JP6308588B2 - Discharge lamp packing structure - Google Patents

Description

  The present invention relates to a packaging structure for a discharge lamp.

  A lamp that emits ultraviolet rays is used as a light source of an exposure apparatus for patterning semiconductors, liquid crystal panels, and the like.

  Patent Document 1 discloses an example of such a discharge lamp. The discharge lamp is filled with a rare gas such as Xe gas, Kr gas, Ar gas or the like at room temperature or higher. Careful attention is required for the transportation and transportation of a lamp filled with a high-pressure rare gas, and various proposals have been made for the packaging structure for housing the lamp.

Patent Document 2 is a conventional example of a discharge lamp packaging structure.
A concave portion for receiving the light bulb is formed on the mating surface of the first container element and the second container element, and a convex portion is formed on the back surface thereof. By setting it as such a structure, the accommodation state of a light bulb is stabilized.

JP 2010-73488 A Japanese Utility Model Publication No. 2-87779

  A conventional discharge lamp packaging structure is housed in a packaging box in a state in which the discharge lamp is turned sideways (the lamp shaft is horizontal to the ground). The packaging box is placed in a storage place such as a storage shelf with the stored discharge lamp facing sideways. However, since discharge lamps are generally long in the axial direction, a wide storage space is required for storage in a sideways state. If the packaging boxes containing the discharge lamps are stacked in order to save space in the storage place, the burden placed on the packaging boxes located at the lower level (stacked) is large, and the discharge lamps inside may be damaged.

  In order to solve the above problems, it is conceivable to store the packing box containing the discharge lamp in a vertical state (the lamp axis is vertical to the ground). However, when the discharge lamp is stored in the vertical direction, the discharge lamp is supported by only one of the sealed tubes, and the weight of the discharge lamp is concentrated on the sealed tube.

  The sealing tube of a discharge lamp made of quartz glass is integrated by heating and melting glasses with different coefficients of thermal expansion in a state of containing electrodes and conductive members made of a metal having a large mass such as tungsten and molybdenum. Due to the construction, the mechanical strength is low.

  Therefore, if the discharge lamp is stored vertically in the packing box (the lamp shaft is vertical to the ground), and if a large impact is applied due to a large shaking or accidental dropping during transportation or transportation, The impact is concentrated on the sealing tube, and the discharge lamp may not be sufficiently protected.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a discharge lamp packaging structure that solves the above-described conventional problems and that can be stored in a narrow space and can reduce the risk of breakage compared to the conventional one.

  A packing structure for holding a discharge lamp in a vertical direction, which includes a light emitting tube having a pair of electrodes inside, a sealing tube provided at both ends of the light emitting tube, and a base provided at an end of the sealing tube. The arc tube has a reduced diameter portion whose outer diameter gradually decreases as it approaches the sealing tube from the largest diameter portion, and one of the pair of electrodes having a large mass is arranged on the lower side in the vertical direction. The reduced diameter portion, which is lower in the vertical direction than the maximum diameter portion of the arc tube, is held by a buffer.

  With the configuration described above, the weight applied to the sealing tube of the discharge lamp can be dispersed, so that the discharge lamp can be safely stored and stored in the packing box in a vertical state. Thereby, space saving of a storage place is realizable. In addition, it is possible to disperse and reduce the impact force generated due to shaking during transportation and transportation of the discharge lamp, dropping the packing box onto the floor surface, and the like.

It is a partial cross section figure which shows the packing structure of this invention. It is a bottom view of an upper stage buffer. It is a top view of a lower buffer. It is a top view of a middle stage shock absorber. It is a top view of the middle buffer object which shows other embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
The packaging structure of the discharge lamp 40 of this embodiment includes a packaging box 30, an upper buffer body 20, a middle buffer body 10, and a lower buffer body 60.

  The discharge lamp 40 shown in FIG. 1 includes a substantially spherical arc tube 42 made of quartz glass, a first sealing tube 43 and a second sealing tube 44 connected to both ends of the arc tube 42, A base 47 and a base 48 fixed to ends of the first sealing pipe 43 and the second sealing pipe 44 are integrally provided. As shown in the figure, the central portion of the arc tube 42 constitutes a maximum diameter portion 42 a having a maximum diameter (outer diameter) centered on the axis L of the discharge lamp 40. The arc tube 42 has a reduced diameter portion 42b whose outer diameter gradually decreases as it approaches the first sealing tube 43 and the second sealing tube 44 from the maximum diameter portion 42a. The first sealing tube 43 and the second sealing tube 44 are coaxial with each other. In the discharge lamp 40, a rare gas such as Xe gas, Kr gas, or Ar gas is sealed at a pressure that is equal to or higher than atmospheric pressure at room temperature.

  A pair of electrodes (anode 46a and cathode 46b) made of a refractory metal such as tungsten are disposed inside the arc tube 42 so as to face each other. Metal caps 47 and 48 are attached to the ends of the first sealing tube 43 and the second sealing tube 44 on the side opposite to the arc tube 42, respectively. The electrodes (anode 46a and cathode 46b) can be electrically connected to the caps 47 and 48 by the first sealing tube 43 and the second sealing tube 44 and the conductive member 45 disposed inside the arc tube 42. It is connected to the. When the bases 47 and 48 are connected to an external power supply unit (not shown) and electric power is supplied to the discharge lamp 40, discharge occurs between the electrodes, and ultraviolet light is emitted.

  In the discharge lamp 40 as in the present embodiment, the anode 46a is heated to a high temperature when the electrons collide with the anode 46a. Therefore, the anode 46a is larger and heavier than the cathode 46b. Therefore, as will be described later, the discharge lamp 40 is housed in the packing box 30 so that the heavy anode 46a faces downward (vertically in the vertical direction), thereby stably storing and transporting.

  As shown in FIG. 1, the above-described discharge lamp 40 is accommodated in the packing box 30 in the vertical direction via the middle buffer body 10, the upper buffer body 20, and the lower buffer body 60. Hereinafter, the packaging box 30 and each buffer will be described.

  The packaging box 30 is formed of, for example, an elastic resin (for example, polypropylene (PP)).

FIG. 2 shows a bottom view of the upper buffer body 20.
The upper buffer body 20 is a buffer body provided with a substantially C-shaped recess 24 a for holding the base 48 of the discharge lamp 40. For example, it is made of a resin material such as polyethylene or polypropylene. Further, the relief portion 22 is formed in consideration of the deformation of the concave portion 24a when the base 48 is held. Further, a substantially C-shaped recess 24 b for holding the base end 48 a of the discharge lamp 40 is provided.

  In order to maintain the stepped shape formed from the base 48 and the base end portion 48a, the upper stage shock absorber 20 is formed by forming a concave portion 24a and a concave portion 24b having different hole diameters (recess diameters) by processing one shock absorber. Yes. However, if the processing becomes complicated and costly, the upper buffer body 20 may be manufactured by bonding the buffer body formed with the recess 24a and the buffer body formed with the recess 24b by an adhesive or heat welding. Good.

FIG. 3 shows a top view of the lower buffer body 60.
The lower shock absorber 60 is a shock absorber provided with a substantially C-shaped recess 64 a for holding the base 47 of the discharge lamp 40. Like the upper buffer body 20, it is made of a resin material such as polyethylene or polypropylene. Further, in consideration of deformation of the concave portion 64a when the base 47 is held, a relief portion 62 is formed. Further, a substantially C-shaped recess 64b for holding the base end 47a of the discharge lamp 40 is provided.

  In order to maintain the step shape formed from the base 47 and the base end portion 47a, the lower-stage shock absorber 60 is formed by forming a recess 64a and a recess 64b having different hole diameters (recess diameters) by processing one buffer. Yes. Similarly to the upper buffer body 20, the buffer body formed with the recess 64a and the buffer body formed with the recess 64b may be bonded together. The lower shock absorber 60 produced in this way is spread on the bottom surface of the packing box 30. At this time, the bottom surface of the packaging box 30 and the lower buffer body 60 may be attached with an adhesive or the like.

  As described above, the upper buffer body 20 and the lower buffer body 60 hold the bases 47 and 48 and the base end portions 47a and 48a of the discharge lamp 40. Thereby, the both ends of the discharge lamp 40 can be supported, and the discharge lamp 40 accommodated in the packing box 30 in the vertical direction is stably held. However, since it is insufficient to prevent weight distribution on the sealing tube of the discharge lamp 40 and damage to the discharge lamp 40, the intermediate buffer 10 shown in FIG. 2 is used.

  The intermediate buffer body 10 shown in FIG. 4 is provided with a holding portion 11 and an opening 11a, and is formed as a single unit through the slit portion 13 at positions where the four holding portions 11 are equally spaced in the circumferential direction. It is. The middle buffer body 10 is made of a resin material such as polyethylene or polypropylene. A notch 19 is provided at one of the four corners, and a slit 17 extending from the slit 13 to the notch 19 is provided.

  The holding part 11 bends along the reduced diameter part 42 b of the discharge lamp 40. By appropriately setting the material and thickness of the middle buffer body 10, the holding section 11 is configured as the middle buffer body 10 that bends along the reduced diameter portion 42b. Moreover, only the holding part 11 may be comprised with another members, such as sponge material (urethane) and rubber | gum, and only the thickness of the holding part 11 may be made thin. Since the narrow gap portion 13 is formed, even if a plurality of holding portions 11 are provided, it is possible to bend without interfering with each other.

  The middle buffer body 10 is installed in the packaging box 30. As will be described later, this installation position is a position that surrounds the reduced diameter portion 42 b of the discharge lamp 40 when the discharge lamp 40 is stored in the packaging box 30. It is. In particular, a position on the same plane as the electrode arranged on the lower side in the vertical direction is preferable.

  In addition, a notch 19 is provided at one of the four corners of the middle buffer body 10, and a slit 17 extending from the slit 13 to the notch 19 is provided. In the case of the discharge lamp 40 having a power supply line (not shown), when the discharge lamp 40 is housed, the power supply line is passed through the slit 17 and the power supply terminal (crimp terminal, etc.) of the power supply line is held by the notch 19. can do. Thereby, the breakage of the discharge lamp 40 due to the power supply line coming into contact with the discharge lamp 40 during transportation or transportation is reduced.

  The middle buffer body 10 has an opening 11a at the center thereof. When the discharge lamp 40 is accommodated coaxially in the opening 11a, the lower part of the spherical surface of the discharge lamp 40 (contracted) between each holding portion 11 and the maximum diameter portion 42a of the discharge lamp 40 reaches the sealing tube 43. The discharge lamp 40 is held so as to hold the diameter portion 42b).

  Next, a method for packing the discharge lamp 40 using the packing box 30, the upper buffer body 20, the middle buffer body 10, and the lower buffer body 60 will be described with reference to FIG.

  The discharge lamp 40 is provided with a surface protection cover 41 so that the arc tube 42 does not directly touch the buffer. Of the pair of electrodes (anode 46a and cathode 46b) built in the arc tube 42, the discharge lamp 40 is arranged in a vertical direction (with respect to the ground) so that the electrode having a large mass, in this embodiment, the anode 46a is on the lower side. Thus, the lamp shaft L is accommodated along the vertical direction. In this state, as is apparent from FIG. 1, first, the cap 47 portion of the discharge lamp 40 is inserted into the opening 11a of the intermediate buffer 10, and the holding portion 11 bends along the reduced diameter portion 42b. Subsequently, the concave portion 64a and the base 47 portion, and the concave portion 64b and the base end portion 47a of the lower buffer body 60 are respectively fitted. Accordingly, the discharge lamp 40 is held by the lower buffer body 60 and the middle buffer body 10. The lower buffer body 60 and the middle buffer body 10 may be attached and fixed to the inner surface of the packaging box 30.

  Finally, the upper buffer body 20 is installed in the packing box 30. That is, the concave portion 24a of the upper buffer body 20 and the base 48 of the discharge lamp 40, and the concave portion 24b and the base end portion 48a are fitted.

  In this state, the discharge lamp 40, the upper buffer body 20, the middle buffer body 10, and the lower buffer body 60 are integrally stored inside the packing box 30 by closing the opening of the packing box with the outer lid of the packing box 30.

  When the discharge lamp 40 is housed in the packing box 30 using each buffer as described above, the discharge lamp 40 disposed in the opening 11a of the middle buffer 10 is around the anode 46a having a large mass, that is, the arc tube. The holding portion 11 holds the reduced diameter portion 42b on the lower side in the vertical direction than the maximum diameter portion 42a of the 42.

  Thereby, since the weight of the discharge lamp 40 applied to the sealing tube 43 holding the anode 46a having a large mass can be effectively dispersed, damage to the sealing tube 43 is reduced, and the discharge lamp 40 is in a state along the vertical direction. Can be stored stably. Therefore, it is not necessary to secure a wide storage place, and space saving can be realized. In particular, since the anode 46a has a large mass, the anode 46a can be held more stably by holding the reduced diameter portion 42b that is on the same plane within the range of the axial length H of the anode 46a.

  When the discharge lamp 40 is coaxially inserted into the opening 11a of the middle buffer body 10, the four holding parts 11 formed at equal positions in the circumferential direction are bent along the reduced diameter part 42b, so that the opening 11a is formed. The said part is hold | maintained so that it may expand substantially and the reduced diameter part 42b may be held. As a result, it is possible to reduce the impact force caused by shaking during transportation or transportation, or by accidentally dropping the packing box onto the floor surface, and damage to the discharge lamp 40 can be reduced.

  The number and shape of the holding portions 11 are not limited to the above, and can be changed as appropriate, such as increasing the number of holding portions 11 in the case of a large discharge lamp. Moreover, the holding part 11 may be in a state where the diameter is hardly increased as a shape bent along the reduced diameter part 42b from the beginning.

  Since the surface protection cover 41 is provided on the discharge lamp 40, the holding portion 11 of the middle buffer body 10 is caught on the surface protection cover 41 when the discharge lamp 40 is stored and taken out from the packing box 30, and the arc tube 42 may be exposed. If the arc tube 42 is exposed, the exposed portion may be damaged when it contacts the inner surface of the packaging box 30. However, by installing the middle buffer body 10 so as to be positioned below the maximum diameter portion 42a of the arc tube 42 in the vertical direction, the contact distance between the holding portion 11 and the surface protection cover 41 (at the time of storage and removal, the holding portion 11 and The distance at which the surface protective cover 41 comes into contact with the surface protective cover 41 is shortened, and the possibility that the holder 11 is caught by the surface protective cover 41 and the arc tube 42 is exposed is reduced. Furthermore, since the opening 11a is expanded by bending the holding portion 11, the surface protective cover 41 is hardly caught and the storing and taking out operations can be performed smoothly.

  Although one embodiment of the present invention has been described above, the present invention can be implemented with various modifications.

Next, as another embodiment, a packaging structure for storing six discharge lamps in the vertical direction will be described.
The middle stage buffer 50 shown in FIG. 5 is a buffer having six openings.

  The middle buffer body 50 includes a holding part 51, an opening 51 a, a narrow gap part 53, a slit 57, and a notch part 59. In addition, a partition groove 55 for installing a cross-shaped partition plate (not shown) for separating each discharge lamp along the vertical direction is formed. The rest of the configuration is the same as that of the middle buffer body 10. Although not shown, the upper buffer body 20 and the lower buffer body 60 are configured to hold six discharge lamps in the same manner as the middle buffer body 50, so that each discharge lamp can be stably stored and transported and transported. can do.

  By providing a cross-shaped partition plate between the lower buffer body and the middle buffer body 50 and between the upper buffer body and the middle buffer body 50, the middle buffer body 10 is placed at a position corresponding to the axial length of the partition plate. Can be held. In addition, the partition plate can be hooked on the inner surface of the packing box 30 by providing the partition plate with a protrusion that hooks the packing box 30. Thereby, when taking out the discharge lamp 40 from the packing box 30, it prevents the middle buffer body 10 from moving together with the discharge lamp 40 and being displaced from an appropriate position.

  In the present embodiment, six discharge lamps have been described, but other numbers can be housed stably and transported / transported in the same manner.

  Note that the four corners of each buffer may be chamfered in consideration of the tolerances of each buffer (upper buffer 20, middle buffer 10, 50, lower buffer 60) and packing box 30.

10 Middle shock absorber 11 Holding part 20 Upper shock absorber 30 Packing box 40 Discharge lamp 60 Lower shock absorber L Discharge lamp axis

Claims (5)

An arc tube having a pair of electrodes inside;
Sealing tubes provided at both ends of the arc tube;
In the packaging structure for holding the discharge lamp consisting of a base provided at the end of the sealing tube in the vertical direction,
The arc tube has a reduced diameter portion whose outer diameter gradually decreases as it approaches the sealing tube from the maximum diameter portion,
One electrode having a large mass among the pair of electrodes is arranged on the lower side in the vertical direction,
A discharge lamp packaging structure characterized in that a reduced diameter portion that is vertically lower than a maximum diameter portion of the arc tube is held by a buffer. 2. The discharge according to claim 1, wherein the position where the reduced diameter portion is held by the buffer body is a position which is on the same plane as the electrode arranged on the lower side in the vertical direction in the axial direction of the discharge lamp. Lamp packaging structure. The discharge lamp packaging structure according to any one of claims 1 to 2, wherein the reduced diameter portion is held by the buffer body at positions at equal intervals in a circumferential direction. 4. The discharge lamp packaging structure according to claim 1, wherein the shock absorber has a holding portion bent along the reduced diameter portion. 5. A middle buffer comprising the buffer;
An upper buffer body that holds a base located on the upper side in the vertical direction of the base;
A lower buffer body for holding a base located on the lower side in the vertical direction of the base;
A packaging box capable of storing the discharge lamp, the upper buffer, the middle buffer, and the lower buffer;
The discharge lamp packaging structure according to any one of claims 1 to 4, further comprising:

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