JP6301677B2 - Three-way valve and intake system - Google Patents

Description

  The present invention relates to a three-way valve, and more particularly to a three-way valve that switches a flow path of a fluid such as air and an intake system using the same.

  Conventionally, a three-way valve that is disposed in a pipe connected to an intake source and switches a flow path of a fluid flowing through the pipe is known. For example, Patent Document 1 includes a valve body made of a hollow elliptical columnar elastic body, and a valve chamber in which an elliptical columnar cavity that rotatably accommodates the valve body is formed. A three-way valve that switches between open and closed states of two outlet ports by rotating and sliding without rattling has been proposed. Further, in Patent Document 2, a pair of valve bodies that move integrally so as to alternately open and close the valve holes in a valve chamber provided with valve holes on both sides, and these valve bodies are selectively closed. A three-way valve has been proposed that accommodates a cam that presses the valve body and selectively presses the valve body to the closed position with the cam as the opening and closing shaft rotates.

JP 2013-57352 A JP 2009-299736 A

  However, in the three-way valve described in Patent Document 1 described above, the valve body has a portion that slides with respect to a part of the valve chamber. On the other hand, in the three-way valve described in Patent Document 2 described above, a part of the cam has a portion that slides with respect to the valve body. When the sliding part is included in the structure for driving the valve body as described above, the opening / closing performance of the flow path may deteriorate due to wear of the sliding part.

  It is conceivable to apply lubricating oil or the like in order to prevent such wear of the sliding portion. However, in this case, a situation in which part of the lubricating oil leaks into the pipe may occur. The leakage of the lubricating oil can cause a malfunction in the apparatus main body including the three-way valve. For example, as will be described later, when a three-way valve is applied to an intake system that sucks the surface of a processing table, a situation may occur in which oil is attached to a processing target on the processing table.

  By the way, the above-described three-way valve is applied to, for example, an intake system that divides a single intake source by a branch pipe and sucks foreign matters or the like on processing tables arranged at a plurality of locations. In such an intake system, by switching the flow path in the branch pipe using a three-way valve, it is possible to switch the processing table for sucking in foreign matter or the like.

  In such an intake system, it is preferable that the suction force with respect to the processing table is kept constant regardless of the state of the flow path in the branch pipe. For example, when the suction force with respect to a specific processing table fluctuates according to the state of the flow path in the branch pipe, it may be assumed that the suction force deviates from a predetermined range and sucks unnecessary components. For this reason, in such an intake system, a three-way valve capable of adjusting the inflow amount of the fluid is required to maintain the suction force in the suction portion constant.

  The present invention has been made in view of such circumstances, and provides a three-way valve capable of adjusting the amount of fluid inflow while suppressing deterioration in the opening / closing performance of the flow path, and an intake system using the same. The purpose is to do.

A three-way valve according to the present invention includes a body including a second port facing the first port, and a third port between the first port and the second port, and the first port An opening / closing means for opening and closing the second port in a switchable manner, wherein the opening / closing means includes a plate-like sealing plate having an area for sealing the first port or the second port; A plate moving unit that moves the plate back and forth between the first port and the second port, and includes an adjusting unit that adjusts an opening area of the port in the first port or the second port , The adjustment unit includes an adjustment plate that adjusts the opening area, a movable unit that moves the adjustment plate, and a position control unit that controls the position of the adjustment plate by the movable unit, and the position control unit controls the position of the adjustment plate. The opening area is adjusted .

  According to the above three-way valve, the opening / closing means opens and closes the first port and the second port by switching the sealing plate between the first port and the second port by the plate moving unit. Let For this reason, the first port and the second port can be switched open and closed without having a portion that slides with the body or the like. Thereby, the situation where the constituent members of the three-way valve are worn can be avoided, and the deterioration of the opening / closing performance of the flow path can be suppressed. Further, the opening area of the first port or the second port is adjusted by the adjusting unit. For this reason, the area of the inflow path of the fluid flowing into the body from the first port or the second port can be adjusted. Thereby, the inflow amount of the fluid from the first port or the second port can be adjusted. As a result, it becomes possible to adjust the inflow amount of the fluid while suppressing deterioration of the opening / closing performance of the flow path.

According to the configuration of this, the first port or the second port by the position control of the adjustment plate can be adjusted to a desired opening area. Thereby, the inflow amount of the fluid from the first port or the second port can be adjusted flexibly.

  An air intake system according to the present invention branches from a suction port of a blower motor in at least two directions by a branch pipe and sucks at least two processing tables, a first suction section, a second suction section, a branch pipe, A first three-way valve configured by any one of the three-way valves disposed in a first pipe connecting the first suction section, and a second pipe connecting the branch pipe and the second suction section. In an intake system comprising: a second three-way valve configured by any one of the three-way valves disposed above; and a switching control unit that switches and controls opening and closing of the first three-way valve and the second three-way valve. The one-way three-way valve connects the third port to the branch pipe, the first port connects to the first suction part, the second port can be opened to the atmosphere, and the second three-way valve The third port is connected to the branch pipe, the first port is connected to the second suction part, and the second port Is open to the atmosphere, and the switching control unit operates either the first three-way valve opening / closing means or the second three-way valve opening / closing means to operate the first three-way valve opening / closing means. One open / close means of the second three-way valve is actuated to block the first port, and the air is sucked from the second port whose opening area is adjusted by the adjusting unit, and the first three-way valve or the second The amount of intake air from the suction portion connected to the other first port of the three-way valve is the same as that before the first port of one of the first three-way valve or the second three-way valve is blocked. And

  According to the above intake system, before and after closing the first port of the first three-way valve (second three-way valve) by operating the opening / closing means of the first three-way valve (second three-way valve), The amount of intake air from the suction part connected to the first port of the two three-way valves (first three-way valve) can be made the same. Thereby, the suction force in the suction part connected to the second three-way valve (first three-way valve) can be kept constant regardless of the state of the first three-way valve (second three-way valve). . As a result, there is a problem caused by a change in the suction force of the suction portion connected to the second three-way valve (first three-way valve) according to the state of the first three-way valve (second three-way valve). Can be prevented.

  For example, in the above intake system, the position control is performed so that the wind speed measuring unit for measuring the wind speed inside the pipe is disposed in each of the first pipe and the second pipe so that the wind speed measured by the wind speed measuring unit does not change. Control the part. According to this configuration, the position of the adjustment plate by the position control unit can be controlled based on the change in the wind speed inside the first and second pipes. Thereby, even if the open / close state of the first three-way valve is switched, the intake air amount from the second suction part can be kept constant with high accuracy.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to adjust the inflow amount of a fluid, suppressing deterioration of the opening / closing performance of a flow path.

It is a schematic diagram which shows the structure of the three-way valve which concerns on 1st Embodiment. It is a schematic diagram which shows the structure of the three-way valve which concerns on 2nd Embodiment. It is explanatory drawing of a structure of the intake system to which the three-way valve which concerns on 2nd Embodiment is applied.

  Hereinafter, a plurality of embodiments of the present invention will be described with reference to the drawings. In the following, a case will be described in which the three-way valve according to the present invention is applied to an intake system for sucking on a processing table for processing a workpiece such as a semiconductor wafer. However, the system and apparatus to which the three-way valve according to the present invention is applied are not limited to the intake system, and can be applied to any system or apparatus that needs to switch the fluid flow path.

(First embodiment)
FIG. 1 is a schematic diagram showing a configuration of a three-way valve 10 according to the first embodiment. FIG. 1A shows a case where the three-way valve 10 is in an open state, and FIG. 1B shows a case where the three-way valve 10 is in a closed state. In the following, for convenience of explanation, the upper side shown in FIG. 1 is called the upper side of the three-way valve 10, and the lower side shown in FIG. 1 is called the lower side of the three-way valve 10. The same applies to the three-way valve 20 according to the second embodiment shown in FIG.

  As shown in FIG. 1, the three-way valve 10 according to the first embodiment includes a body 11 made of, for example, a metal material or a resin material. Inside the body 11, a valve chamber 110 constituted by a certain space is provided. First to third ports 11 a to 11 c are formed at predetermined positions of the body 11. These 1st-3rd ports 11a-11c are comprised by the opening part which has circular shape, for example.

  The first port 11 a is formed on the lower surface of the body 11. The second port 11b is formed on the upper surface of the body 11 so as to face the first port 11a. The third port 11c is formed between the first port 11a and the second port 11b. Specifically, the third port 11c is formed on the side surface of the body 11 (the side surface on the right side in FIG. 1). Around the first port 11a and the third port 11c, a connection portion 11d to which a pipe 14 described later is connected is provided.

  Further, the three-way valve 10 includes an opening / closing means 12 for switching an opening / closing state of a flow path formed in the valve chamber 110. The opening / closing means 12 opens and closes the first port 11a and the second port 11b in a switchable manner. The opening / closing means 12 includes a blocking plate 12a that blocks the first port 11a or the second port 11b, and a plate moving unit 12b that moves the blocking plate 12a.

  The blocking plate 12a is formed of, for example, a circular plate-like member, and is disposed inside the body 11 (valve chamber 110). The plate-like member constituting the sealing plate 12a has an area for sealing the first port 11a and the second port 11b. That is, the plate-like member constituting the blocking plate 12a is configured to have a larger diameter than the opening areas of the first port 11a and the second port 11b. The blocking plate 12a is connected to a driving mechanism inside the plate moving part 12b via a shaft 12c.

  The plate moving part 12b is constituted by a solenoid or the like, for example, and reciprocates the blocking plate 12a in the vertical direction in the valve chamber 110. More specifically, the plate moving part 12b moves the blocking plate 12a back and forth between the first port 11a and the second plate 11b. That is, the plate moving part 12b seals the first port 11a inside the first port 11a shown in FIG. 1A and the second port 11b inside the second port 11b shown in FIG. 1B. The blocking plate 12a is configured to be capable of reciprocating between the position and the position. Switching of the object to be blocked by the plate moving unit 12b is controlled by a switching control unit (not shown) (see FIG. 3).

  Furthermore, the three-way valve 10 includes an adjustment unit 13 that adjusts the opening area of the second port 11b. For example, the adjustment unit 13 has an annular shape in plan view and is disposed on the upper surface of the body 11. The adjusting unit 13 is formed on the upper surface of the body 11 so as to reduce the opening area of the second port 11b (more specifically, a part of which overlaps the opening of the second port 11b). Be placed.

  For example, the adjustment unit 13 can be formed of a metal material or a resin material having elasticity. When the adjustment part 13 has an annular shape, the opening area of the second port 11 b is adjusted by arranging the adjustment part 13 having a different diameter of the central opening part on the upper surface of the body 11. Note that the amount of adjustment of the opening area of the second port 11b by the adjusting unit 13 is appropriately changed according to the type and quantity of the components of the intake system to which the three-way valve 10 is applied.

  In the three-way valve 10 shown in FIG. 1, a pipe 14 is connected to the first port 11a and the third port 11c. A suction part (not shown in FIG. 1, refer to FIG. 3) is connected to the first port 11a via a pipe. A blower motor (not shown in FIG. 1, refer to FIG. 3), which is an intake source, is connected to the third port 11c via a pipe. The suction part connected to the first port 11a is used, for example, for sucking foreign matter or the like on a processing table (peeling table) for peeling a protective tape attached to a semiconductor wafer.

  According to the three-way valve 10 having such a configuration, as shown in FIG. 1A, when the second port 11b is blocked by the blocking plate 12a, the first port 11a and the body 11 (valve chamber 110) A flow path passing through the third port 11c is formed. In this case, the suction force generated by the blower motor is supplied to the suction portion via the third port 11c and the first port 11a. For this reason, the air sucked from the suction part reaches the blower motor through the flow path passing through the first port 11a and the third port 11c. As a result, foreign matters remaining on the surface of the processing table are removed.

  On the other hand, as shown in FIG. 1B, even when the first port 11 a is blocked by the blocking plate 12 a, the second port 11 b is open to the atmosphere via the adjustment unit 13. In this case, when a suction force is generated by the blower motor, the air is sucked from the second port 11 b whose opening area is adjusted by the adjusting unit 13. The air sucked from the second port 11b reaches the blower motor via the third port 11c.

  As described above, in the three-way valve 10 according to the present embodiment, the plate moving unit 12b causes the blocking plate 12a to move back and forth between the first port 11a and the second port 11b. The second port 11b is opened and closed in a switching manner. For this reason, the first port 11a and the second port 11b can be opened and closed in a switchable manner without the three-way valve 10 having a portion that slides with the body 11 or the like. Thereby, the situation where the structural member of the three-way valve 10 is worn can be avoided, and deterioration of the opening / closing performance of the flow path can be suppressed.

  Further, in the three-way valve 10 according to the present embodiment, an adjusting portion 13 is provided around the second port 11b, and the opening area of the second port 11b is adjusted by the adjusting portion 13. For this reason, the area of the inflow path of the fluid flowing into the body 11 (valve chamber 110) from the second port 11b can be adjusted. Thereby, the inflow amount of the fluid from the second port 11b can be adjusted.

  For example, in the three-way valve 10 according to the present embodiment, the amount of suction accompanying the suction force of the blower motor is adjusted by the adjusting unit 13 before the first port 11a is blocked (for example, the state shown in FIG. 1A). ), The opening area of the second port 11b can be adjusted. By adjusting the opening area of the second port 11b in this way, the suction amount sucked through the three-way valve 10 can be kept constant before and after the first port 11a is blocked.

  In the above description, the case where the suction portion is connected to the first port 11a and the opening area of the second port 11b is adjusted by the adjusting portion 13 has been described. However, the configuration of the three-way valve 10 is not limited to this and can be appropriately changed. For example, a suction part may be connected to the second port 11 b and the opening area of the first port 11 a may be adjusted by the adjustment part 13.

(Second Embodiment)
In the three-way valve 10 according to the first embodiment, a case where the adjusting unit 13 is fixed in the vicinity of the second port 11b is described. The three-way valve according to the second embodiment is different from the three-way valve 10 according to the first embodiment in that the adjustment unit 13 is movable in the vicinity of the second port 11b. Hereinafter, the configuration of the three-way valve according to the second embodiment will be described focusing on differences from the three-way valve 10 according to the first embodiment.

  FIG. 2 is a schematic diagram showing the configuration of the three-way valve 20 according to the second embodiment. 2A and 2B show the case where the three-way valve 20 is in a closed state. 2A shows a state in which the adjustment plate 131 constituting the adjustment unit 13 is closed and the opening area of the second port 11b is narrowed. In FIG. 2B, the adjustment plate 131 is opened and the second port 11b is opened. The state where the opening area of is widened is shown. In FIG. 2, the same components as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 2, the three-way valve 20 according to the second embodiment includes, as the adjustment unit 13, an adjustment plate 131 that adjusts the opening area of the second port 11 b and a movable unit that moves the adjustment plate 131. 132 and a position control unit 133 that controls the position of the adjustment plate 131 by the movable unit 132, and is different from the three-way valve 10 according to the first embodiment.

  The adjustment plate 131 has, for example, a shape obtained by dividing an annular shape (for example, divided into two) in plan view, and is arranged on the upper surface of the body 11. The adjustment plate 131 is disposed on the upper surface of the body 11 so that a part of the adjustment plate 131 overlaps the opening of the second port 11b in the closed state shown in FIG. 2A. The shape of the adjustment plate 131 is not limited to this, and can be changed as appropriate. For example, an arbitrary shape can be adopted on the assumption that the opening area of the second port 11b can be adjusted.

  The movable portion 132 is connected to a part of the outer peripheral edge of the adjustment plate 131. The movable portion 132 is configured so that the adjustment plate 131 can be moved so that the inner peripheral edge of the adjustment plate 131 moves up and down. For example, the movable unit 132 includes a drive shaft extending in the depth direction of the paper shown in FIG. 2 and a drive motor that rotates the drive shaft about the axis. In this case, the movable part 132 can open and close the adjustment plate 131 by rotating the adjustment plate 131 fixed to the drive shaft by the drive motor.

  For example, the movable portion 132 includes a state in which the adjustment plate 131 is disposed in parallel with the upper surface of the body 11 (the state illustrated in FIG. 2A) and a state in which the adjustment plate 131 is disposed orthogonal to the upper surface of the body 11 (FIG. 2B). The adjustment plate 131 can be moved between the state shown in FIG. In the former case, the amount of fluid (air amount) flowing into the body 11 (valve chamber 110) is limited. In the latter case, the flow of fluid into the body 11 (valve chamber 110) is not limited, and a fluid having the same amount of fluid (atmospheric amount) as that without the adjusting unit 13 flows.

  The position control unit 133 controls the position of the adjustment plate 131 by the movable unit 131. For example, the position control unit 133 controls the position of the adjustment plate 131 by controlling the movable state of the movable unit 131 under the instruction of the main control unit of the intake system to which the three-way valve 20 is applied. Note that the amount of adjustment of the opening area of the second port 11b by the position control unit 133 is appropriately changed according to the type and quantity of the components of the intake system to which the three-way valve 20 is applied.

  In the three-way valve 20 having such a configuration, as shown in FIG. 2, even if the first port 11a is blocked by the blocking plate 12a, as in the three-way valve 10 according to the first embodiment, The second port 11b is open to the atmosphere via the adjustment unit 13. In this case, when suction force is generated by the blower motor, air is sucked from the second port 11b.

  In particular, in the three-way valve 20 according to the second embodiment, the amount of air flowing into the body 11 (valve chamber 110) can be adjusted according to the arrangement of the adjustment plate 13. For example, as shown in FIG. 2A, when the adjustment plate 131 is closed, the amount of air flowing into the body 11 (valve chamber 110) can be reduced. On the other hand, as shown in FIG. 2B, when the adjustment plate 131 is in an open state, the amount of air flowing into the body 11 can be increased.

  2 illustrates a state in which the adjustment plate 131 is completely closed and an open state, but the amount of air flowing into the body 11 can be appropriately adjusted according to the opening degree of the adjustment plate 131. . For example, the amount of air flowing into the body 11 by disposing the adjusting plate 131 at an intermediate position between the state shown in FIG. 2A (completely closed state) and the state shown in FIG. 2B (fully open state). Can be adjusted to about half of the state shown in FIG. 2B.

  Thus, in the three-way valve 20 according to the present embodiment, the adjustment unit 13 includes the adjustment unit 13 that can move the adjustment plate 131 that adjusts the opening area of the second port 11b. Therefore, the second port 11b can be adjusted to a desired opening area by controlling the position of the adjusting plate 131 by the position control unit 133. Thereby, the inflow amount of the fluid (atmosphere) from the 2nd port 11b can be adjusted flexibly.

  Hereinafter, the configuration of the intake system to which the three-way valve 20 according to the second embodiment is applied will be described. FIG. 3 is an explanatory diagram of the configuration of the intake system 100 to which the three-way valve 20 according to the second embodiment is applied. In FIG. 3, the same components as those in FIGS. 1 and 2 are given the same reference numerals (or an identification code is added to the end of the same reference numerals), and the description thereof is omitted.

  FIG. 3 shows an intake system 100 that sucks the surfaces of a plurality of processing tables for processing a workpiece such as a semiconductor wafer by a common blower motor. Here, an alignment table T1 (hereinafter simply referred to as “table T1”) that adjusts the orientation of the semiconductor wafer to a predetermined direction prior to grinding of the semiconductor wafer, and a tape that affixes a support tape that supports the semiconductor wafer after grinding. A case is shown in which a mount table T2 (hereinafter simply referred to as “table T2”) and a peeling table T3 (hereinafter simply referred to as “table T3”) for peeling a protective tape that protects the device portion of the semiconductor wafer are sucked.

  The intake system 100 includes a blower motor 15, a branch pipe 16 connected to the suction port 151 of the blower motor 15, first to third pipes 14 a to 14 c connected to the branch pipe 16, 1st-3rd suction parts 17a-17c connected to 1st-3rd piping 14a-14c, and the 1st-3rd three ways arrange | positioned at these 1st-3rd piping 14a-14c And the valves 20a to 20c.

  The blower motor 15 constitutes a single intake source of the intake system 100 according to the present embodiment. The blower motor 15 has a suction port 151 and a discharge port 152, and supplies suction force from the suction unit 151 to the intake system 100 as the motor unit is driven. In the intake system 100 according to the present embodiment, the suction force generated by the blower motor 15 is constant regardless of the open / closed state of the first to third three-way valves 20a to 20c.

  The branch pipe 16 is connected to the suction port 151 of the blower motor 15 and branches the intake system in three directions. One end portions (upper end portions) of the first to third pipes 14a to 14c are connected to the first to third end portions 161 to 163 of the branch pipe 16 branched in three directions, respectively. On the other hand, first to third suction portions 17a to 17c are connected to the other end portions (lower end portions) of the first to third pipes 14a to 14c, respectively.

  The first suction portion 17a is disposed to face the surface of the table T1. Similarly, the second suction portion 17b is disposed to face the surface of the table T2, and the third suction portion 17c is disposed to face the surface of the table T3. These first to third suction portions 17a to 17c have shapes longer than the outer dimensions of the tables T1 to T3 in the Y-axis direction shown in FIG.

  These tables T1 to T3 are configured to be movable in the X-axis direction shown in FIG. 3 by a moving mechanism (not shown). By setting the first to third suction portions 17a to 17c to the suction state and moving the tables T1 to T3 in the X-axis direction shown in FIG. 3, the entire surface of the tables T1 to T3 can be sucked. Thereby, for example, foreign matters remaining on the surfaces of the tables T1 to T3 can be removed.

  The first three-way valve 20a is disposed in the first pipe 14a. In the first three-way valve 20a, the first port 11a is connected to the first suction part 17a via the first pipe 14a, and the third port 11c is connected via the first pipe 14a. It is connected to the branch pipe 16 (more specifically, the first end 161). The second port 11b is open to the atmosphere via the adjustment unit 13.

  Similarly, the second three-way valve 20b is disposed in the second pipe 14b. In the second three-way valve 20b, the first port 11a is connected to the second suction part 17b via the second pipe 14b, and the third port 11c is connected via the second pipe 14b. It is connected to the branch pipe 16 (more specifically, the second end 162). The second port 11b is open to the atmosphere via the adjustment unit 13.

  The third three-way valve 20c is disposed in the third pipe 14c. In the third three-way valve 20c, the first port 11a is connected to the third suction part 17c via the third pipe 14c, and the third port 11c is connected via the third pipe 14c. It is connected to the branch pipe 16 (more specifically, the third end 163). The second port 11b is open to the atmosphere via the adjustment unit 13.

  A switching control unit 18 for switching control of the open / closed state is connected to the opening / closing means 12 of the first to third three-way valves 20a to 20c. The switching control unit 18 switches the object to be blocked (the first port 11a or the second port 11b) by the blocking plate 12a by operating the opening / closing means 12 of the first to third three-way valves 20a to 20c. In FIG. 3, the third three-way valve 20c is opened (that is, the second port 11b is closed), and the first to second three-way valves 20a to 20b are closed (that is, the first port 11b is closed). It shows a case where the port 11a is in a blocked state.

  In addition, a position control unit 133 that controls the movable state of the movable unit 132 is connected to the movable unit 132 of the first to third three-way valves 20a to 20c. The position control unit 133 adjusts the position of the adjustment plate 131 by controlling the movable state of the movable unit 132 of the first to third three-way valves 20a to 20c. FIG. 3 shows a case where the adjustment plate 131 is closed in the third three-way valve 20c and the adjustment plate 131 is opened to an intermediate position in the first to second three-way valves 20a to 20b. ing.

  The position control unit 133 is connected to wind speed measuring units 19a to 19c disposed in the first to third pipes 14a to 14c, respectively. These wind speed measuring units 19a to 19c are first to third pipes between the first to third three-way valves 20a to 20c and the first to third ends 161 to 163 of the branch pipe 16, respectively. 14a to 14c. These wind speed measuring units 19a to 19c measure the wind speed in the first to third pipes 14a to 14c, respectively, and output the measurement results to the position control unit 133. In the position control unit 133, the movable state of the movable unit 132 is controlled based on the measurement results input from the wind speed measuring units 19a to 19c. More specifically, the position control unit 133 is a movable unit so that the wind speed measured by the wind speed measurement units 19a to 19c does not change before and after the open / close state of the first to third three-way valves 20a to 20c is changed. The movable state of 132 is controlled.

  In the intake system 100 shown in FIG. 3, when the blower motor 15 is driven, a suction force is supplied to the third suction portion 17c via the third three-way valve 20c that is opened. Thereby, the foreign matters remaining on the surface of the table T3 are sucked and removed. In this case, in the first to second three-way valves 20a to 20b, the air flows from the second port 11b whose opening area is adjusted by the adjusting unit 13 (adjusting plate 131).

  Here, in the intake system 100 according to the present embodiment, even when the open / close states of the first to third three-way valves 20a to 20c are switched, the suction amounts for the tables T1 to T3 are the same. The opening area of the second port 11b is adjusted by the adjusting unit 13. Therefore, the suction force in the third suction portion 17c can be kept constant regardless of the open / closed state of the first to second three-way valves 20a to 20b. As a result, it is possible to prevent problems caused by the change in the suction force of the third suction portion 17c according to the open / closed state of the first to second three-way valves 20a to 20b.

  For example, consider a case where the open / close states of the first to third three-way valves 20a to 20c are all switched from the open state to the state shown in FIG. When all of the first to third three-way valves 20a to 20c are open, the suction force from the blower motor 15 is supplied to the first to third suction parts via the intake system branched by the branch pipe 16. It will be supplied equally to 17a-17c.

  When the open / close state of the first to third three-way valves 20a to 20c is switched to the state shown in FIG. 3 from this state, the suction force from the blower motor 15 is supplied only to the third suction portion 17c. It becomes. In this case, when the second port 11b of the first to second three-way valves 20a to 20b is completely blocked, the third suction part 17c has a suction force about three times that before the switching. Will be supplied. When the suction force increases in this way, a problem such as suction of a peripheral member such as a protective tape peeled off from the semiconductor wafer at the table T3 may occur.

  On the other hand, in the intake system 100 according to the present embodiment, the second and third suction valves 20a to 20c are adjusted so that the suction amounts for the tables T1 to T3 are the same by the adjusting unit 13 of the first to third three-way valves 20a to 20c. The opening area of the port 11b is adjusted. Thereby, for example, the suction force in the third suction part 17c can be kept constant regardless of the open / closed state of the first to second three-way valves 20a to 20b. As a result, it is possible to prevent problems caused by the change in the suction force of the third suction portion 17c according to the open / closed state of the first to second three-way valves 20a to 20b.

  In particular, in the intake system 100 according to the present embodiment, the wind speed measured by the wind speed measuring units 19a to 19c before and after the position control unit 133 changes the open / close state of the first to third three-way valves 20a to 20c. The movable state of the movable part 132 is controlled so that the value does not change. Thereby, the position of the adjustment plate 131 can be controlled based on the change in the wind speed inside the first to third pipes 14a to 14c. Thereby, even if the open / close state of the first to third three-way valves 20a to 20c is switched, the intake air amount from the third suction part 17c can be kept constant with high accuracy.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the intake system 100 shown in FIG. 3, the case where the intake system is branched in three directions by the branch pipe 16 is shown. However, the number of intake systems by the branch pipe 16 is not limited to this, and can be changed as appropriate. For example, the present invention can be applied to a case where the intake system is branched in two directions or a case where the intake system is branched in four or more directions.

  Moreover, in the intake system 100 shown in FIG. 3, the case where the three-way valve 20 which concerns on 2nd Embodiment is applied is demonstrated. However, the three-way valve applied to the intake system 100 is not limited to the three-way valve 20 according to the second embodiment, and can be changed as appropriate. For example, the three-way valve 10 according to the first embodiment can be applied on the assumption that the function of the position control unit 133 shown in FIG. 3 is omitted.

  As described above, according to the present invention, there is an effect that it is possible to adjust the inflow amount of the fluid while suppressing the deterioration of the opening / closing performance of the front flow path, and in particular, suction from a single intake source. This is useful for a device or system having an intake structure that uses a force split.

10, 20 Three-way valve 20a First three-way valve 20b Second three-way valve 20c Third three-way valve 11 Body 11a First port 11b Second port 11c Third port 12 Opening / closing means 12a Sealing plate 12b Plate moving part 12c shaft 13 adjustment unit 131 adjustment plate 132 movable unit 133 position control unit 14 piping 14a first piping 14b second piping 14c third piping 15 blower motor 151 suction port 152 discharge port 16 branch pipe 17a first suction unit 17b Second suction unit 17c Third suction unit 18 Switching control unit 19a to 19c Wind speed measurement unit 100 Intake system T1 Alignment table T2 Tape mount table T3 Peeling table

Claims (3)

A body comprising a second port facing the first port; and a third port between the first port and the second port; and the first port and the second port And a three-way valve having an opening and closing means for opening and closing in a switchable manner,
The opening / closing means includes a plate-shaped sealing plate having an area for sealing the first port or the second port, and a plate for moving the sealing plate back and forth between the first port and the second port. And at least a moving part,
The first port or the second port, an adjustment unit for adjusting the opening area of the port,
The adjustment unit includes an adjustment plate that adjusts the opening area, a movable unit that moves the adjustment plate, and a position control unit that controls the position of the adjustment plate by the movable unit.
A three-way valve that adjusts the opening area by controlling the position of the adjusting plate by the position control unit . A first suction section and a second suction section that branch from the suction port of the blower motor in at least two directions by a branch pipe and suck at least two processing tables;
A first three-way valve consists of a first pipe to be disposed claim 1 Symbol mounting three-way valve connecting the said branch pipe and the first suction section,
A second three-way valve consists of a second pipe to be disposed claim 1 Symbol mounting three-way valve connecting the suction part of the branch pipe and the second,
An intake system comprising: a switching control unit that performs switching control of opening and closing of the first three-way valve and the second three-way valve;
The first three-way valve is
The third port is connected to the branch pipe, the first port is connected to the first suction part, and the second port is open to the atmosphere;
The second three-way valve is
The third port is connected to the branch pipe, the first port is connected to the second suction part, and the second port is open to the atmosphere;
By said changeover switching control unit actuates the switching means of either of the three-way valve of said switching means of said switching means or said second three-way valve of the first three-way valve,
The air from the second port to adjust the opening area in the adjustment portion with the first three-way valve or by operating the one of said switching means of said second three-way valve blocking the first port is air, one intake air amount of the suction unit connected to the other of the first port of the first three-way valve or the second three-way valve is a three-way valve or the second three-way valve of the first An intake system that is the same as before the first port of A wind speed measuring unit for measuring a wind speed inside the pipe is disposed in each of the first pipe and the second pipe according to claim 2 ,
Intake system according to claim 2, wherein該風speed measuring section is thereby controlled the position controller according to claim 1, wherein as the wind speed to be measured does not change.

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