JP6300692B2 - measuring device - Google Patents

Description

  The present invention relates to a measuring apparatus that measures the shape or the like of a measurement object based on an image obtained by imaging the measurement object.

2. Description of the Related Art Conventionally, there is a measuring apparatus that measures the shape or the like of a measurement object based on an image obtained by imaging the measurement object with an imaging apparatus such as a CCD (Charge Coupled Device) camera.
In such a measuring apparatus, at the time of the measurement, for example, edge detection is performed using an image of a measurement object displayed on a display device such as a monitor. For example, in the image measuring apparatus described in Patent Document 1, a circular tool indicating a range in which edge detection processing is performed is displayed on an image obtained by capturing an object to be measured, and image information within the range specified by the circular tool is displayed. After searching from a plurality of directions passing through the center of the circular tool and detecting the edge point of the image in each search direction, the edge is estimated from the detected edge point, and the center of the circular tool is estimated. The edge point obtained by searching in the direction orthogonal to the detected edge is set as the finally detected edge point.

JP-A-11-201724

  In the measurement apparatus that performs edge detection or the like using the image of the measurement object displayed on the display device as described above, the size of the measurement object image captured by the imaging apparatus is reduced when the edge detection is performed ( For example, when the display is displayed on the display device with lower resolution or pixel thinning, the display on the display device is limited compared to the display on the display device without changing the size. Although it is possible to display the entire image of the measurement object in the area, improve the followability of the live image of the measurement object displayed on the display device, etc. Since edge detection is performed using a reduced image, there is a problem that the edge detection accuracy is lowered. In addition, when the shape of the measurement object is measured based on the edge position thus detected, there is a problem that the measurement accuracy is lowered.

  In light of the above circumstances, an object of the present invention is to provide a measurement apparatus that improves user operability and does not reduce edge detection accuracy when performing edge detection.

  According to a first aspect of the present invention, a display image generation unit that generates a display image by performing processing for reducing at least the image size of a measurement image, and the display image generation unit A display unit for displaying a display image; a coordinate conversion unit for converting coordinates of an edge detection range designated on the display image displayed by the display unit into coordinates on the measurement image; and the coordinate conversion An edge detection unit that performs edge detection in the edge detection range on the measurement image corresponding to the edge detection range specified on the display image based on the coordinates on the measurement image converted by the unit; A measuring apparatus is provided.

  According to a second aspect of the present invention, in the first aspect, the coordinate conversion unit further includes the coordinates of the edge position on the measurement image obtained by the edge detection performed by the edge detection unit. Provided is a measuring device that converts coordinates on a display image, and the display unit further displays the position of the coordinates on the display image converted by the coordinate conversion unit as a detected edge position. .

  According to a third aspect of the present invention, in the first or second aspect, the measurement image is an input image from an imaging device or a high gradation image generated based on a plurality of input images from the imaging device. A measuring device is provided.

  A fourth aspect of the present invention provides the measurement apparatus according to the third aspect, wherein the input image is a high-definition image or a high gradation image generated based on a plurality of captured images by the imaging device.

  According to a fifth aspect of the present invention, in the fourth aspect, the high-definition image is an image generated by combining a plurality of picked-up images picked up by the image pickup device using a pixel shift function. Provide a measuring device.

  According to a sixth aspect of the present invention, in any one of the third to fifth aspects, the high gradation image is an image generated by HDR (High Dynamic Range) composition of the plurality of input images having different exposures, Alternatively, a measurement apparatus is provided that is an image generated by HDR combining the plurality of captured images with different exposures.

  According to a seventh aspect of the present invention, in any one of the first to sixth aspects, the display image generation unit performs a process for reducing the image size on the measurement image and a predetermined image. Provided is a measurement device that performs processing to generate the display image.

An eighth aspect of the present invention provides the measurement apparatus according to the seventh aspect, wherein the predetermined image processing is image processing for edge enhancement.
According to a ninth aspect of the present invention, in any one of the first to eighth aspects, the measurement image is an image of a measurement object placed on a movable stage, and the stage is moved. When measuring the measurement object, a measurement apparatus is provided that acquires and stores the coordinates of the position of the stage and uses it when measuring the measurement object.

  ADVANTAGE OF THE INVENTION According to this invention, when performing edge detection, the measurement apparatus which does not reduce edge detection accuracy, improving a user's operativity can be provided.

It is a figure which shows the structural example of the measurement microscope system which is a measuring apparatus which concerns on 1st Embodiment. It is a figure which shows the internal structural example of a control part. It is a flowchart which shows an example of the edge detection operation | movement of a measuring object based on 1st Embodiment. It is a figure explaining the specific example when edge detection is performed according to the flowchart shown in FIG. It is a figure which shows the example of a display of the edge detection result of a monitor when edge detection is performed according to the specific example shown in FIG. It is a flowchart which shows an example of the edge detection operation | movement of a measuring object performed in the measurement microscope system which is a measuring apparatus which concerns on 2nd Embodiment. It is a flowchart which shows an example of the edge detection operation | movement of a measuring object performed in the measurement microscope system which is a measuring device which concerns on 3rd Embodiment. It is a figure which shows the structural example of the measurement microscope system which concerns on a modification. It is a figure which shows the example of a display of the edge detection result of a monitor when a circle tool is selected as an edge detection method and edge detection operation is performed. It is a figure which shows the example of a display of the edge detection result of a monitor when a rectangular tool is selected as an edge detection method, and edge detection operation is performed.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<First Embodiment>
FIG. 1 is a diagram illustrating a configuration example of a measurement microscope system that is a measurement apparatus according to a first embodiment of the present invention.

  As shown in FIG. 1, the measurement microscope system according to the present embodiment includes a microscope main body 1, a CCD camera 2, a microscope controller 3, a control unit 4, a monitor 5, a keyboard 6, a mouse 7, and a foot switch 8.

The microscope main body 1 includes a stage 10 on which a measurement object 9 is placed, an X direction moving handle 11, a Y direction moving handle 12, an objective lens 13, and a lens barrel 14.
The stage 10 is a stage that can move in the X direction, the Y direction, and the Z direction. The X direction and the Y direction are directions perpendicular to the optical axis direction of the objective lens 13, and the Z direction is a direction parallel to the optical axis direction of the objective lens 13.

  The X-direction moving handle 11 is a manual handle for moving the stage 10 in the X direction. The Y-direction moving handle 12 is a manual handle for moving the stage 10 in the Y direction. Although not shown, the microscope main body 1 also includes a manual handle for moving the stage 10 in the Z direction.

  The objective lens 13 focuses light (reflected light or transmitted light) from the measurement object 9 placed on the stage 10 on the imaging surface of the CCD camera 2 via the lens barrel 14. The measurement object 9 placed on the stage 10 is irradiated with illumination light from above or below by an illumination unit (not shown). The lens barrel 14 guides light from the objective lens 13 (light from the measurement object 9) to the imaging surface of the CCD camera 2.

Under the control of the control unit 4, the CCD camera 2 controls the control unit 4 to obtain an image (image of the measurement target 9) obtained by imaging the light imaged on the imaging surface (light from the measurement target 9). Output to.
The microscope controller 3 controls the microscope main body 1 under the control of the control unit 4. In addition, the microscope controller 3 detects the XYZ coordinates of the stage 10 by counting the movement amounts of the stage 10 in the X direction, Y direction, and Z direction, and outputs the detected values to the control unit 4.

  The control unit 4 controls the entire operation of the measurement microscope system including the edge detection operation of the measurement object 9 and the shape measurement operation of the measurement object 9. The edge detection operation of the measurement object 9 is an operation for detecting the edge of the measurement object 9 based on the image of the measurement object 9 captured by the CCD camera 2. The shape measurement operation of the measurement object 9 is an operation for measuring the shape of the measurement object 9 based on the edge position detected by the edge detection operation, for example.

  The monitor 5 displays an image, a tool box, an operation menu, various information, and the like under the control of the control unit 4. The keyboard 6, the mouse 7, and the foot switch 8 detect user operation inputs and output them to the control unit 4.

FIG. 2 is a diagram illustrating an internal configuration example of the control unit 4.
As shown in FIG. 2, the control unit 4 includes an input image memory 41, a program memory 42, a work memory 43, a display image memory 44, a serial port 45, and a CPU (Central Processing Unit) 46.

The input image memory 41 stores an input image from the CCD camera 2 (an image of the measurement object 9 captured by the CCD camera 2).
The program memory 42 stores a program executed by the CPU 46.

The work memory 43 is used as a work area for the CPU 46, and a part of the work memory 43 is used as a measurement image area for storing measurement images.
The display image memory 44 stores a display image generated by the CPU 46 and displayed on the monitor 5.

The input image memory 41, the work memory 43, and the display image memory 44 are volatile memories, and the program memory 42 is a nonvolatile memory.
The serial port 45 is a connection interface for performing serial communication between the CPU 46 and the microscope controller 3.

  The CPU 46 executes a program stored in the program memory 42 to perform processing for controlling the entire operation of the microscope system including the edge detection operation and the shape measurement operation described above. For example, the CPU 46 performs the following process when controlling the edge detection operation. The CPU 46 acquires an input image from the CCD camera 2 via the input image memory 41 and stores it in the measurement image area of the work memory 43 as a measurement image. Further, the CPU 46 generates a display image by performing at least processing for reducing the image size (for example, processing such as reduction in resolution and pixel thinning) on the measurement image read from the measurement image area of the work memory 43. The display image is stored in the display image memory 44 and displayed on the monitor 5. Further, the CPU 46 designates an edge detection range on the display image displayed on the monitor 5 in response to an operation input of the mouse or the like by the user. Further, the CPU 46 converts the coordinates of the edge detection range designated on the display image into coordinates on the measurement image stored in the measurement image area of the work memory 43. Further, the CPU 46 performs edge detection in the edge detection range on the measurement image corresponding to the edge detection range specified on the display image based on the coordinates on the measurement image. Further, the CPU 46 converts the coordinates of the edge position on the measurement image obtained by the edge detection into the coordinates on the display image displayed on the monitor 5, and sets the position of the coordinates on the display image. The detected edge position is displayed on the monitor 5.

  In the measurement microscope system according to the present embodiment configured as described above, a part of the function of the control unit 4 (or the CPU 46) performs processing for reducing at least the image size on the measurement image and displays it. It is an example of the display image generation part which produces | generates for image. The monitor 5 is an example of a display unit that displays the display image generated by the display image generation unit. Another part of the function of the control unit 4 (or CPU 46) is a coordinate conversion unit that converts the coordinates of the edge detection range designated on the display image displayed by the display unit into coordinates on the measurement image. It is an example. Still another part of the function of the control unit 4 (or the CPU 46) is for measurement corresponding to the edge detection range specified on the display image based on the coordinates on the measurement image converted by the coordinate conversion unit. It is an example of the edge detection part which performs edge detection in the edge detection range on an image.

Next, the operation of the measurement microscope system according to this embodiment will be described.
Here, as an example of the operation, the edge detection operation of the measurement object 9 will be described in detail with reference to FIGS. 3 to 5.

FIG. 3 is a flowchart showing an example of the edge detection operation.
As shown in FIG. 3, when this operation is started, the CPU 46 first acquires an input image from the CCD camera 2 via the input image memory 41 and stores it in the measurement image area of the work memory 43 as a measurement image. Store (S11).

  Subsequently, the CPU 46 generates a display image by performing at least processing for reducing the image size on the measurement image read from the measurement image area of the work memory 43, and displays the display image as the display image memory 44. And displayed on the monitor 5 (S12).

  At this time, a toolbox for edge detection may be displayed on the monitor 5 together with the display image. From this tool box, the user can select, for example, a line tool, a circle tool, a multipoint tool, or the like as an edge detection method. Here, the line tool is a method of detecting an edge by searching from one point to the other point on a straight line between two points designated on the image. The circle tool is a method for detecting an edge by searching from the outer periphery of one circle to the outer periphery of the other circle on the area between the outer periphery of each of the two circles whose centers coincide with each other designated on the image. It is. The multi-point tool is a method of detecting an edge by searching a rectangular area designated on an image from one side of the rectangle toward a side opposite to the side.

Subsequently, the CPU 46 designates an edge detection range on the display image displayed on the monitor 5 in response to an operation input of the mouse 7 or the like by the user (S13).
Subsequently, the CPU 46 converts the coordinates of the edge detection range designated on the display image into coordinates on the measurement image stored in the measurement image area of the work memory 43 (S14).

  Subsequently, the CPU 46 performs edge detection in the edge detection range on the measurement image corresponding to the edge detection range specified on the display image based on the converted coordinates on the measurement image (S15). .

  Subsequently, the CPU 46 converts the coordinates of the edge position on the measurement image obtained by the edge detection into the coordinates on the display image displayed on the monitor 5, and the position of the coordinates on the display image. Is displayed on the monitor 5 as the detected edge position (S16), and this operation ends.

  FIG. 4 is a diagram for explaining a specific example when edge detection is performed according to the flowchart shown in FIG. In FIG. 4, the left side schematically illustrates processing for the display image, and the right side schematically illustrates processing for the measurement image.

  In this specific example, the image size of the measurement image (also the image size of the input image) is 1920 * 1440 (horizontal 1920, vertical 1440), and the image size of the display image is 1200 * 900 (horizontal 1200, The vertical is 900). That is, the ratio of the image sizes is measurement image (input image): display image = 8: 5. In this specific example, it is assumed that the line tool is selected as the edge detection method.

  In this case, in S13 of FIG. 3, for example, as shown in S101 of FIG. 4, the search start point and the search end point are displayed on the display image displayed on the monitor 5 by the click operation of the mouse 7 by the user. When specified, a straight line connecting the search start point coordinates (A, B) and the search end point coordinates (C, D) is specified as the edge detection range.

  Thereafter, in S14 of FIG. 3, as shown in S102 of FIG. 4, the search start point coordinates (A, B) and the search end point coordinates (C, C), which are the coordinates of the edge detection range designated on the display image, are displayed. D) is converted into corresponding search start point coordinates (A ′, B ′) and search end point coordinates (C ′, D ′) on the measurement image. Since the ratio of the image size of the measurement image to the display image is 8: 5, A ′, B ′, C ′, and D ′ are A ′ = A * 1.6 and B ′ = B *. 1.6, C ′ = C * 1.6, and D ′ = D * 1.6.

  Thereafter, in S15 of FIG. 3, as shown in S103 of FIG. 4, edge detection is performed in the corresponding edge detection range on the measurement image, and the edge position coordinates are obtained. That is, edge detection is performed by searching from the search start point to the search end point on a straight line connecting the search start point coordinates (A ′, B ′) and the search end point coordinates (C ′, D ′). The position coordinates (X ′, Y ′) are obtained. In this example, the position where the luminance value crosses the predetermined threshold value Vth in the edge detection range is detected as the edge position.

  Thereafter, in S16 of FIG. 3, as shown in S104 of FIG. 4, the coordinates (X ′, Y ′) of the edge position on the measurement image correspond to the corresponding coordinates (X, Y) on the display image. The position of the coordinates (X, Y) on the display image is displayed on the monitor 5 as the detected edge position. Since the ratio of the image size of the measurement image to the display image is 8: 5, X and Y can be obtained by X = X ′ * 0.625 and Y = Y ′ * 0.625. it can.

FIG. 5 is a diagram showing a display example of the edge detection result of the monitor 5 when the edge detection is performed according to the specific example shown in FIG.
As shown in FIG. 5, the monitor 5 displays the search start point, the search end point, and the detected edge position superimposed on the display image of the measurement object 9.

  As described above, according to the measurement microscope system according to the present embodiment, the image displayed on the monitor 5 is an image after size reduction (display image), and the image used for edge detection is an image before size reduction (measurement). Image). Therefore, the user's operability is not likely to be impaired, and the edge detection accuracy can be improved as compared with the conventional apparatus that performs the edge detection using the image after the size reduction. Here, the user operability means that, for example, the entire image of the measurement object 9 can be displayed in a limited display area of the monitor 5 or a live image of the measurement object 9 displayed on the monitor 5. It is possible to improve the follow-up performance.

  Further, by measuring the shape or the like of the measurement object 9 based on the edge position detected using the image before size reduction (measurement image) in this way, measurement is performed using the image after size reduction. Compared with the conventional apparatus which has been used, the measurement accuracy can be improved.

<Second Embodiment>
The measurement microscope system, which is a measurement apparatus according to the second embodiment of the present invention, is partially different in operation from the measurement microscope system according to the first embodiment. Therefore, here, the measurement microscope system according to the present embodiment will be described focusing on the different points.

FIG. 6 is a flowchart illustrating an example of an edge detection operation performed in the measurement microscope system according to the present embodiment.
6 corresponds to the flowchart shown in FIG. 3, and S11 shown in FIG. 3 is replaced with S21 and S22 shown in FIG. Therefore, S23 to S27 shown in FIG. 6 are the same as S12 to S16 shown in FIG.

  As shown in FIG. 6, when this operation starts, the CPU 46 first acquires a plurality of input images with different exposures from the CCD camera 2 via the input image memory 41 (S21). Note that the plurality of input images with different exposures are a plurality of captured images obtained by capturing the measurement object 9 with the CCD camera 2 under different exposure conditions.

  Subsequently, the CPU 46 generates one high gradation image based on the plurality of input images having different exposures, and stores the high gradation image as a measurement image in the measurement image area of the work memory 43 (S22). The high gradation image is generated by, for example, HDR (High Dynamic Range) composition of a plurality of input images having different exposures.

Subsequent S23 to S27 are the same as S12 to S16 shown in FIG.
As described above, according to the measurement microscope system according to the present embodiment, the same effect as that of the measurement microscope system according to the first embodiment can be obtained, and the measurement image and the display image can be increased in gradation.

<Third Embodiment>
The measurement microscope system, which is a measurement apparatus according to the third embodiment of the present invention, is partially different in operation from the measurement microscope system according to the first embodiment. Therefore, here, the measurement microscope system according to the present embodiment will be described focusing on the different points.

FIG. 7 is a flowchart illustrating an example of an edge detection operation performed in the measurement microscope system according to the present embodiment.
7 corresponds to the flowchart shown in FIG. 3, and S12 shown in FIG. 3 is replaced with S32 shown in FIG. Therefore, S31 and S33 to S36 shown in FIG. 7 are the same as S11 and S13 to S16 shown in FIG.

  As shown in FIG. 7, when this operation is started, first, the CPU 46 acquires the input image from the CCD camera 2 through the input image memory 41 as S11 in FIG. Stored in the measurement image area of the work memory 43 (S31).

  Subsequently, the CPU 46 performs processing for reducing the image size on the measurement image read from the measurement image area of the work memory 43 and performs predetermined image processing to generate a display image. The image is stored in the display image memory 44 and displayed on the monitor 5 (S32). Note that either the process for reducing the image size or the predetermined image process may be performed first. The predetermined image processing is, for example, image processing for edge enhancement.

Subsequent S33 to S36 are the same as S13 to S16 shown in FIG.
As described above, according to the measurement microscope system according to the present embodiment, the same effects as those of the measurement microscope system according to the first embodiment can be obtained. For example, the image after the size reduction process and the image process such as edge enhancement The edge detection accuracy can also be improved as compared with the conventional apparatus that performs edge detection using the.

The measurement microscope system as the measurement apparatus according to the first to third embodiments has been described above, but various modifications can be made in the measurement microscope system according to each embodiment.
For example, in the measurement microscope systems according to the first and third embodiments, the input image from the CCD camera 2 may be a high-definition image or a high gradation image generated by the CCD camera 2 based on a plurality of captured images. . For example, the high-definition image is an image generated by combining a plurality of captured images captured by the CCD camera 2 using the pixel shift function of the CCD camera 2. For example, the high gradation image is an image generated by HDR combining a plurality of captured images with different exposures by the CCD camera 2. As described above, when the input image from the CCD camera 2 is a high-definition image, the edge detection accuracy can be further improved as compared with a case where the input image is a single captured image. When the input image from the CCD camera 2 is a high gradation image, the measurement image and the display image can be a high gradation image as in the measurement microscope system according to the second embodiment. In this case, the high-tone image generation performed by the CPU 46 in the measurement microscope system according to the second embodiment may be performed by the CCD camera 2. The load on the CPU 46 can also be reduced.

  Further, for example, in the measurement microscope system according to the first to third embodiments, when an operation (including the above-described edge detection operation) for measuring the shape or the like of the measurement object 9 accompanying the movement of the stage 10 is performed. The CPU 46 may acquire and store the XYZ coordinates of the stage 10 from the microscope controller 3, and may be used when measuring the shape or the like of the measurement object 9.

In addition, for example, in the measurement microscope system according to the first to third embodiments, the stage 10 may be configured to be driven (moved) electrically instead of manually.
FIG. 8 is a diagram illustrating a configuration example of a measurement microscope system according to a modified example when configured as described above. As shown in FIG. 8, in this case, the X-direction movement motor 101, the Y-direction movement are provided in place of the X-direction movement handle 11, the Y-direction movement handle 12, and the Z-direction movement handle (not shown). Motor 102 and a Z-direction moving motor (not shown). In addition, a joystick 103 for instructing movement of the stage 10 in the XY directions and an operation unit (not shown) for instructing movement of the stage 10 in the Z direction are provided. Thereby, the user can drive the stage 10 by driving one or both of the X-direction moving motor 101 and the Y-direction moving motor 102 by operating the joystick 103, for example. Other configurations are the same as those shown in FIG.

  In the measurement microscope system according to the first to third embodiments, as an edge detection method, other than the line tool described with reference to FIGS. 4 and 5, for example, a circle tool, a multipoint tool, and the like. Of course, the edge detection method may be selected.

  FIG. 9 is a diagram illustrating a display example of the edge detection result of the monitor 5 when the circle tool is selected as the edge detection method and the edge detection operation is performed. As shown in FIG. 9, in this example, on the display image of the measurement object 9, the outer circumference of each of the two circles 111 and 112 designated to define the edge detection range, and the inner circle 111 This is an example in which the outer periphery of the circle 113 as the edge position detected by searching from the outer periphery toward the outer periphery of the outer circle 112 is superimposed and displayed.

  FIG. 10 is a diagram illustrating a display example of the edge detection result of the monitor 5 when the rectangular tool is selected as the edge detection method and the edge detection operation is performed. As shown in FIG. 10, in this example, on the display image of the measurement object 9, a rectangle 121 designated for defining the edge detection range, and one side 121a of the rectangle 121 to the side 121a. This is an example in which the line 122 as the edge position detected by searching toward the side 121b opposite to the line 121 is superimposed and displayed.

  As mentioned above, each embodiment mentioned above shows the example of this invention, in order to make an understanding of invention easy, and this invention is not limited to the above-mentioned embodiment. The present invention can be variously modified and changed without departing from the concept of the present invention defined in the claims.

DESCRIPTION OF SYMBOLS 1 Microscope main body 2 CCD camera 3 Microscope controller 4 Control part 5 Monitor 6 Keyboard 7 Mouse 8 Foot switch 9 Measurement object 10 Stage 11 X direction movement handle 12 Y direction movement handle 13 Objective lens 14 Lens barrel 41 Input image memory 42 Program memory 43 Work memory 44 Display image memory 45 Serial port 46 CPU
101 motor for X direction movement 102 motor for Y direction movement 103 joystick 111, 112, 113 circle 121 rectangle 121a, 121b side 122 line

Claims (9)

A display image generating unit that generates a display image by performing a process for reducing at least the image size of the measurement image;
A display unit for displaying the display image generated by the display image generation unit;
A coordinate conversion unit that converts the coordinates of the edge detection range specified on the display image displayed by the display unit into coordinates on the measurement image;
Edge detection for performing edge detection in the edge detection range on the measurement image corresponding to the edge detection range specified on the display image based on the coordinates on the measurement image converted by the coordinate conversion unit And
A measuring apparatus comprising: The coordinate conversion unit further converts the coordinates of the edge position on the measurement image obtained by the edge detection performed by the edge detection unit into coordinates on the display image,
The display unit further displays the position of the coordinate on the display image converted by the coordinate conversion unit as the detected edge position.
The measuring apparatus according to claim 1. The measurement image is an input image from an imaging device or a high gradation image generated based on a plurality of input images from the imaging device.
The measuring apparatus according to claim 1 or 2, wherein The input image is a high-definition image or a high-gradation image generated based on a plurality of captured images by the imaging device.
The measuring apparatus according to claim 3. The high-definition image is an image generated by synthesizing a plurality of captured images captured using the pixel shift function by the imaging device.
The measuring apparatus according to claim 4. The high gradation image is an image generated by HDR (High Dynamic Range) synthesis of the plurality of input images with different exposures, or an image generated by HDR synthesis of the plurality of captured images with different exposures. Is,
The measuring apparatus according to claim 3, wherein The display image generation unit performs processing for reducing the image size on the measurement image and performs predetermined image processing to generate the display image.
The measuring apparatus according to any one of claims 1 to 6, wherein The predetermined image processing is image processing for edge enhancement.
The measuring apparatus according to claim 7. The measurement image is an image of a measurement object placed on a movable stage,
When measuring the measurement object accompanied by the movement of the stage, the coordinates of the position of the stage are acquired and stored, and used when measuring the measurement object.
The measuring apparatus according to claim 1, wherein