JP6280458B2 - Three-dimensional shape measuring apparatus, measurement data processing unit, measurement data processing method, and computer program - Google Patents

Description

  The present invention provides a three-dimensional shape measuring apparatus, measurement data processing, which can easily display an analysis result of analysis processing using a plurality of measurement data, and can easily change information on an analysis method of analysis processing. The present invention relates to a unit, a measurement data processing method, and a computer program.

  Conventionally, a three-dimensional shape measuring apparatus including an optical microscope, such as a confocal microscope or a digital microscope, performs various analysis processes using measurement data having height information obtained by measuring the three-dimensional shape of a sample. Run. The analysis processing means, for example, displaying a profile graph along a profile line set on a two-dimensional sample image, or analyzing a line roughness along the profile line. When comparing analysis results of analysis processing using multiple measurement data, execute the analysis processing with the same settings for each measurement data, output the analysis results for each measurement data, and monitor multiple analysis results Display them side by side.

  In order to compare analysis results correctly, it is necessary that images to be compared have the same posture and the same display position. For example, Patent Document 1 discloses an optical microscope apparatus that adjusts the position of an image to be inspected (target image) by pattern matching. In Patent Document 1, not only the position of the target image in the two-dimensional plane but also the position in the height direction is adjusted.

JP 2009-258187 A

  However, for example, when there are analysis results for a plurality of measurement data, it is difficult to correctly compare the analysis results only by displaying the analysis results side by side. Also, if you want to compare the analysis processing settings for some measurement data, such as adding a new profile line, for example, edit the analysis processing settings for each measurement data and perform analysis with the same settings. It is necessary to obtain a result, and such repeated work has a problem that it imposes a heavy work burden on the user.

  In addition, when it is desired to examine the change contents of the information related to the analysis method of the analysis process while comparing the analysis results between the measurement data, it may be difficult to display a plurality of analysis results side by side at a desired position.

  The present invention has been made in view of such circumstances, and can easily display the analysis result of the analysis process using a plurality of measurement data, and can easily change the information related to the analysis method of the analysis process. It is an object of the present invention to provide a possible three-dimensional shape measuring apparatus, a measurement data processing unit, a measurement data processing method, and a computer program.

  In order to achieve the above object, a three-dimensional shape measuring apparatus according to the first invention measures a three-dimensional shape of a sample and acquires measurement data including three-dimensional shape information, and a measurement data A measurement data storage means for storing a plurality of different measurement data, comprising: a measurement data processing unit having a measurement data processing unit for executing an analysis process relating to a three-dimensional shape of a sample and displaying an analysis result on a display unit And information receiving means for receiving information settings related to a plurality of analysis methods for executing the analysis processing, and for each stored measurement data, a plurality of analysis processes are performed based on the information related to the analysis method receiving the settings. The analysis processing means to be executed and the analysis result analyzed based on the information on the same analysis method between the plurality of measurement data in the first direction, a plurality of measurement data for each measurement data Settings are received for analysis result display means for displaying the analysis results based on the information on the analysis method side by side in a second direction orthogonal to the first direction, and for a plurality of measurement data displayed side by side in the first direction. Information updating means for updating information relating to the analysis technique and information relating to the analysis technique set in the measurement data, wherein the analysis result display means is based on information relating to the updated analysis technique of other measurement data. The analyzed analysis result is displayed.

  In the three-dimensional shape measuring apparatus according to the second invention, in the first invention, the information relating to the analysis method that has received the setting for one measurement data is set as information relating to the analysis method for all other measurement data. Features.

  The three-dimensional shape measuring apparatus according to the third aspect of the present invention is the second aspect of the invention, further comprising measurement data selection receiving means for receiving selection of one measurement data from a plurality of measurement data, and setting the measurement data for which the selection has been received. The information on the analysis method that has accepted is set as information on the analysis method of all other measurement data.

  The three-dimensional shape measuring apparatus according to the fourth invention is the display condition setting accepting means for accepting setting of the display condition of the analysis result for each of the stored measurement data in any one of the first to third inventions. And display condition setting means for setting, as a display condition for other measurement data, a display condition for which setting has been received for one measurement data among a plurality of measurement data displayed side by side in the first direction. Features.

  In addition, when the three-dimensional shape measuring apparatus according to the fifth invention displays a graph as an analysis result in the fourth invention, the display condition setting means sets the scale of the graph for which the setting for one measurement data is received to the other It is set as a scale of a graph of measurement data.

  The three-dimensional shape measuring apparatus according to a sixth aspect of the present invention is the fourth or fifth aspect of the present invention in which a height image is displayed as an analysis result for each of a plurality of measurement data displayed side by side in the first direction. The display condition setting means sets the color allocation range of the height image corresponding to one measurement data as the color allocation range of the height image corresponding to other measurement data.

  In the three-dimensional shape measurement apparatus according to the seventh invention, in any one of the first to sixth inventions, the information receiving means is a reference for receiving setting of a reference plane used in an analysis process relating to the three-dimensional shape of the sample. The information updating unit includes a surface setting receiving unit, and the information updating unit sets a reference surface for which setting has been received for one measurement data as a reference surface for other measurement data.

  Further, the three-dimensional shape measuring apparatus according to the eighth aspect of the present invention is set in the height image when color assignment is performed with a color palette for the height range of the height image based on the measurement data in the seventh aspect. The color assignment is performed so that the reference plane becomes a specific color of the color palette.

  Further, the three-dimensional shape measuring apparatus according to the ninth aspect of the invention is that, in the eighth aspect, the color of the color palette extending in one direction changes in gradation on both sides of the substantially central portion, and changes sharply in the substantially central portion. Features.

  Next, in order to achieve the above object, the measurement data processing unit according to the tenth invention relates to the three-dimensional shape of the sample by using the measurement data including the three-dimensional shape information obtained by measuring the three-dimensional shape of the sample. A measurement data processing unit that executes analysis processing and displays analysis results on a display unit, and includes measurement data storage means for storing a plurality of different measurement data, and information on a plurality of analysis methods for executing the analysis processing Information accepting means for accepting settings, analysis processing means for executing a plurality of analysis processes on the basis of information on the analysis method accepting the settings for each stored measurement data, and the same analysis among the plurality of measurement data The analysis result analyzed based on the information on the method is in the first direction, and the analysis result by the information on the plurality of analysis methods for each measurement data is orthogonal to the first direction. Analysis result display means for arranging and displaying in the second direction, and an analysis method set in the measurement data with information on the analysis method that has received the settings for the plurality of measurement data displayed in the first direction. Information updating means for updating information related to the information, and the analysis result display means displays the analysis result analyzed based on the information related to the updated analysis method of other measurement data.

  The measurement data processing unit according to the eleventh aspect of the invention is characterized in that, in the tenth aspect of the invention, information relating to an analysis method for which setting has been received for one measurement data is set as information relating to an analysis method for all other measurement data. And

  A measurement data processing unit according to a twelfth aspect of the present invention is the measurement data processing unit according to the eleventh aspect of the invention, further comprising measurement data selection reception means for receiving selection of one measurement data from a plurality of measurement data, and setting the measurement data for which selection has been received Information on the received analysis method is set as information on analysis methods of all other measurement data.

  Next, in order to achieve the above object, a measurement data processing method according to the thirteenth invention relates to a three-dimensional shape of a sample by using measurement data including three-dimensional shape information obtained by measuring the three-dimensional shape of the sample. A measurement data processing method that can be executed by a measurement data processing unit that executes analysis processing and displays an analysis result on a display unit, wherein the measurement data processing unit stores a plurality of different measurement data. And a second step for accepting setting of information related to a plurality of analysis methods for executing analysis processing, and for each stored measurement data, a plurality of information is obtained based on the information relating to the analysis method receiving the settings. The analysis result analyzed based on the information regarding the 3rd process which performs analysis processing, and the same analysis method between a plurality of measurement data in a 1st direction, a plurality of measurement data for every measurement data Settings were accepted for the fourth step of displaying the analysis results based on the information on the analysis method side by side in a second direction orthogonal to the first direction, and the plurality of measurement data displayed side by side in the first direction A fifth step of updating information related to the analysis method and information related to the analysis method set in the measurement data, and analyzing results analyzed based on the information related to the updated analysis method of other measurement data It is characterized by displaying.

  Next, in order to achieve the above object, a computer program according to the fourteenth aspect of the present invention provides an analysis process related to a three-dimensional shape of a sample using measurement data including three-dimensional shape information acquired by measuring the three-dimensional shape of the sample. Is a computer program that can be executed by a measurement data processing unit that displays an analysis result on a display unit, the measurement data processing unit storing a plurality of different measurement data, and an analysis An information receiving means for receiving setting of information related to a plurality of analysis methods for executing processing, and an analysis processing for executing a plurality of analysis processing based on information related to the analysis method receiving settings for each stored measurement data The analysis result analyzed based on the information on the same analysis method between the plurality of measurement data is measured in the first direction. Analysis result display means for displaying analysis results based on information on a plurality of analysis methods for each in a second direction orthogonal to the first direction, and a plurality of measurement data displayed in a row in the first direction, The information regarding the analysis method that has received the setting is caused to function as an information update unit that updates information about the analysis method set in the measurement data, and the analysis result display unit is related to the updated analysis method of other measurement data. It is made to function as a means to display the analysis result analyzed based on information.

  In the first invention, the tenth invention, the thirteenth invention and the fourteenth invention, an analysis process relating to the three-dimensional shape of the sample is executed using measurement data including the three-dimensional shape information obtained by measuring the three-dimensional shape of the sample. The analysis result is displayed on the display unit. A plurality of different measurement data is stored, and information settings relating to a plurality of analysis methods for executing analysis processing are accepted. For each stored measurement data, a plurality of analysis processes are executed on the basis of the information on the analysis method for which the setting has been accepted, and the analysis result analyzed based on the information on the same analysis method among the plurality of measurement data is the first. In this direction, analysis results based on information on a plurality of analysis methods are displayed side by side in a second direction orthogonal to the first direction for each measurement data. For a plurality of measurement data displayed side by side in the first direction, the information on the analysis method set in the measurement data is updated with the information on the analysis method that has received the settings, and the updated analysis of other measurement data is performed. The analysis result analyzed based on the information on the method is displayed. As a result, analysis results based on information on the same analysis method can be displayed side by side, and it is possible to avoid making an erroneous determination by comparing the analysis results. In addition, since it is possible to easily change the information related to the analysis method, it is possible to reduce the work burden on the user and improve convenience.

  In the second invention and the eleventh invention, the information related to the analysis method that has received the setting for one measurement data is set as the information related to the analysis method for all other measurement data, so the analysis result based on the information related to the same analysis method It becomes possible to easily compare by displaying a list.

  In the third invention and the twelfth invention, selection of one measurement data from a plurality of measurement data is accepted, and information on the analysis method for which the setting is accepted for the measurement data accepted for selection is analyzed for all other measurement data. Since it is set as the information on the technique, a list of analysis results obtained by executing the analysis process with the information on the desired analysis technique can be displayed as a list, and it becomes possible to easily compare and examine without complicated work.

  In the fourth invention, for each of the stored measurement data, the setting of the display condition for the analysis result is accepted, and the display condition for which the setting is accepted for one measurement data among a plurality of measurement data displayed side by side in the first direction. Are set as display conditions for other measurement data. This makes it possible to unify the display conditions in the information related to the analysis method and display the analysis results side by side in the second direction, so that comparison of the analysis results is facilitated.

  In the fifth invention, when the graph is displayed as the analysis result, the scale of the graph for which the setting for one measurement data is accepted is set as the scale of the graph for the other measurement data. Therefore, it is possible to avoid making an erroneous determination.

  In the sixth invention, when a height image is displayed as an analysis result for each of a plurality of measurement data displayed side by side in the first direction, the color allocation range of the height image corresponding to one measurement data is changed to another. Set as the color allocation range of the height image corresponding to the measurement data. Thereby, since the color assignment in the height direction is unified, the displacement in the height direction can be identified by the color and can be easily compared.

  In the seventh invention, the setting of the reference plane used in the analysis processing related to the three-dimensional shape of the sample is received, and the reference plane that has received the setting for one measurement data is set as the reference plane for the other measurement data. Thereby, since the reference plane in the trace processing of the three-dimensional shape can be unified, the reference plane becomes clear at the time of executing the analysis process, and it becomes possible to obtain a highly reliable analysis result.

  In the eighth invention, when color allocation is performed with the color palette for the height range of the height image based on the measurement data, the color allocation is performed so that the reference plane set in the height image becomes a specific color of the color palette. Thus, when comparing the height images side by side, since the distance from the reference plane can be known depending on whether or not they are the same color, it is easy to compare a plurality of height images.

  In the ninth aspect of the invention, the color of the color palette extending in one direction changes in gradation on both sides of the substantially central portion and changes sharply in the substantially central portion, so that the shape near the reference plane can be clearly grasped. Become.

  According to the present invention, analysis results based on information on the same analysis method can be displayed side by side, and it is possible to avoid making an erroneous determination by comparing analysis results. In addition, since it is possible to easily change the information related to the analysis method, it is possible to reduce the work burden on the user and improve convenience.

It is a block diagram which shows typically the structure of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a block diagram which shows the structure at the time of using control parts, such as CPU, of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a functional block diagram of the measurement data processing unit of the three-dimensional shape measuring apparatus according to the embodiment of the present invention. It is a schematic diagram which shows the difference in the information regarding the analysis method of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure which shows the display state by the difference in the analysis process unit information of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure which shows the display state by the difference in the analysis process unit information of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure which shows the display state by the difference in the file unit information of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure which shows the display state by the difference in the cell unit information of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is another example figure which shows the display state by the difference in the cell unit information of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a list | wrist of the information regarding the analysis method which influences the display of an analysis result of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a list | wrist of the information regarding the analysis method which influences the display of an analysis result of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a list | wrist of the information regarding the analysis method which influences the display of an analysis result of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a list | wrist of the information regarding the analysis method which influences the display of an analysis result of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a list | wrist of the information regarding the analysis method which influences the display of an analysis result of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a list | wrist of the information regarding the analysis method which influences the display of an analysis result of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a list | wrist of the information regarding the analysis method which influences the display of an analysis result of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure of the setting menu of the information regarding the analysis method of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure which shows the display state of the analysis result at the time of the setting of the information regarding the analysis method shown in FIG. 16 of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure which shows the display state of the analysis result in the profile measurement process of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure which shows the display state of the analysis result in the profile measurement process of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure which shows the display state of the analysis result in the profile measurement process of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure which shows the display state of the analysis result in the profile measurement process of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure of the image of the analysis result which imaged the same analysis location in case the allocation of the color palette with respect to a height range is not unified. It is an illustration figure of the image of the analysis result which imaged the same analysis location in case the allocation of the color palette with respect to a height range is unified. It is an illustration figure of the reference plane setting reception screen of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure of the profile graph in case the scale is not unified of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure of the profile graph in case the scale is unified of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a flowchart which shows the procedure of the analysis process of CPU of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a flowchart which shows the procedure of the analysis result display process of CPU of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure of GUI regarding the color allocation of a color palette. It is an illustration figure of GUI regarding the color allocation of a color palette.

  Hereinafter, a three-dimensional shape measuring apparatus according to an embodiment of the present invention will be specifically described with reference to the drawings. FIG. 1 is a block diagram schematically showing the configuration of the three-dimensional shape measuring apparatus according to the embodiment of the present invention.

  As shown in FIG. 1, the three-dimensional shape measuring apparatus 10 according to the present embodiment includes a measurement data processing unit 1 and a three-dimensional shape measuring unit 2. The three-dimensional shape measurement unit 2 has a laser light source 52, and single wavelength light is emitted from the laser light source 52. The emitted single wavelength light is reflected by the first half mirror 56 via the XY scan optical system 54, and is irradiated on the sample M on the stage 58 through the objective lens 20.

 The reflected light of the sample M is reflected by the first half mirror 56, subsequently reflected by the second half mirror 22, and then guided to the first imaging lens 24. Only the light whose focal position of the first imaging lens 24 matches the pinhole 26 passes through the pinhole 26 as a confocal stop, and the reflected light that has passed through the pinhole 26 is input to the light receiving element 28.

 The three-dimensional shape measurement unit 2 also includes a white light source 30. White light emitted from the white light source 30 is reflected by the third half mirror 32 provided between the first half mirror 56 and the objective lens 20, and is applied to the sample M.

  The three-dimensional shape measurement unit 2 includes a color CCD camera 34 and captures an image formed by the second imaging lens 36 that forms an image of light that has passed through the first half mirror 56. The captured image is a target of analysis processing in the measurement data processing unit 1.

 The light emitted from the laser light source 52, which is a point light source, is divided into scanning position units within the observation visual field via the XY scanning optical system 54, and is scanned XY, and the light receiving element 28 is reflected at each scanning position. Detect light. The objective lens 20 is driven in the Z-axis direction (optical axis direction) as indicated by an arrow, and changes the focal position in the Z-axis direction for each scanning position. Therefore, the light receiving element 28 detects reflected light at each position of the objective lens 20 in the Z-axis direction. The reflected light of the white light source 30 is detected by the color CCD camera 34, and the color information of the sample M at the focal position detected using the laser light source 52 is detected for each scanning position.

 The light receiving element 28 and the color CCD camera 34 are connected to a measurement data processing unit 1 configured by a computer, and transmit the detected measurement data to the measurement data processing unit 1. The measurement data processing unit 1 that has received the measurement data executes an analysis process based on the received measurement data. The analysis result is displayed on the display device (display unit) 43 of the measurement data processing unit 1.

  FIG. 2 is a block diagram showing a configuration of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention when a control unit such as a CPU is used. As shown in FIG. 2, the measurement data processing unit 1 according to the present embodiment includes at least a CPU (control unit) 11 that executes a control program for controlling operations, a memory 12, a storage device 13, an I / O interface 14, A video interface 15, a portable disk drive 16, a communication interface 17 and an internal bus 18 are provided.

  The CPU 11 is connected to the above-described hardware units of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 via the internal bus 18, and controls the operation of the above-described hardware units and the storage device 13. Various software functions are executed in accordance with the computer program 100 stored in the computer. The memory 12 is composed of a volatile memory such as SRAM or SDRAM, and a load module is expanded when the computer program 100 is executed, and stores temporary data generated when the computer program 100 is executed.

  The storage device 13 includes a built-in fixed storage device (hard disk), a ROM, and the like. The computer program 100 stored in the storage device 13 is downloaded by the portable disk drive 16 from a portable recording medium 90 such as a DVD or CD-ROM in which information such as programs and data is recorded, and from the storage device 13 at the time of execution. The program is expanded into the memory 12 and executed. Of course, a computer program downloaded from an external computer connected via the communication interface 17 may be used.

  The storage device 13 is configured by a hard disk or the like, and includes a measurement data storage unit 131 and an information storage unit 132 relating to an analysis method. In the measurement data storage unit 131, the measurement data including the three-dimensional shape information obtained by measuring the three-dimensional shape of the sample in the three-dimensional shape measurement unit 2 is stored in association with the information on the analysis method or the analysis location. To do.

  The information storage unit 132 related to the analysis method stores information related to a plurality of analysis methods for executing analysis processing related to the three-dimensional shape of the sample using the measurement data. The information related to the analysis method is, for example, information for setting different analysis methods for each analysis method, each measurement data, and each measurement data.

  The communication interface 17 is connected to an internal bus 18, and is connected to an external network such as the Internet, LAN, WAN, etc., so that the 3D shape measuring unit 2 of the 3D shape measuring apparatus 10 or an external computer or the like. It is possible to send and receive data.

  The I / O interface 14 is connected to input devices such as a keyboard 41 and a mouse 42, and receives input of information related to an analysis method necessary for analysis processing. The video interface 15 is connected to a display device 43 such as an LCD and displays a list of analysis results.

  FIG. 3 is a functional block diagram of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. The measurement data acquisition unit 301 of the measurement data processing unit 1 according to the present embodiment acquires image data in the light receiving element 28 and the color CCD camera 34 of the three-dimensional shape measurement unit 2 as measurement data, and the measurement data storage unit 131. (Measurement data storage means).

  The information accepting unit 302 accepts setting of information related to the analysis method for executing the analysis process. An analysis process is executed for each measurement data based on the information regarding the analysis method for which the setting has been accepted. In addition, it is preferable that the information regarding the analysis method includes at least the designation of the analysis location.

  A specific example of information related to the analysis method will be described. In the present embodiment, information on three types of analysis methods, that is, information for each analysis method (hereinafter, analysis processing unit information), information for each measurement data (hereinafter, file unit information), and different analysis methods for each measurement data The display state is controlled by combining three pieces of information (hereinafter referred to as cell unit information).

  FIG. 4 is a schematic diagram showing a difference in information regarding the analysis method of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. In the example of FIG. 4, the analysis result for each measurement data (file) is represented in units of rows, and the analysis result for each analysis process is represented in columns. The analysis processing unit information, file unit information, and cell unit information can also be stored in the memory 12 in association with each other as shown in the schematic diagram of FIG.

  In this case, the analysis processing unit information indicates to which analysis processing each column is an analysis result as an analysis processing unit information set 401 including a plurality of pieces of analysis processing unit information as a group. For example, in the case of profile measurement processing, “laser + color”, “laser”, “color”, “height”, and the like as the types of image display are analysis processing unit information.

  5 and 6 are exemplary views showing display states depending on differences in analysis processing unit information of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. In FIG. 5, “laser + color” is selected as analysis processing unit information in the profile measurement process, and an analysis result related to “laser + color information” is displayed together with a profile graph for each measurement data.

  In FIG. 6, “height” is selected as the analysis processing unit information in the profile measurement process, and the analysis result related to “height information” is displayed together with the profile graph for each measurement data. Thus, all the analysis results and the display of the analysis results can be changed only by changing the selection of the analysis processing unit information.

  Returning to FIG. 4, the file unit information indicates an analysis result obtained by executing an analysis process using information about which analysis method each line uses as a file unit information set 402 including a plurality of file unit information as a group. ing. For example, in the case of profile measurement processing, measurement data such as height data and color data, and a file name become file unit information.

  FIG. 7 is an exemplary diagram showing a display state depending on the difference in the analysis processing unit information in the file unit information of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. In FIG. 7, in the profile measurement process, measurement data such as height data (FIG. 7A), color data (FIG. 7B), and the like are stored in units of files as image processing results. Note that the display of “color” and “height” can be switched by setting the analysis processing unit information as described above.

  Returning to FIG. 4, the cell unit information 403 indicates individual file information for each analysis process. FIG. 8A is an exemplary diagram showing a display state according to a difference in cell unit information of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention.

  In FIG. 8A, in the profile measurement processing, the position of the profile line, the measurement location that becomes the analysis location of the profile waveform, and the like are set for each cell, that is, for each cell of the matrix configured by the measurement data and the type of analysis processing. In FIG. 8A, the position 81 of the profile line is displayed on the captured image, and the analysis portion 82 of the profile waveform is displayed on the profile graph.

  FIG. 8B is another exemplary diagram showing a display state depending on the cell unit information of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. In FIG. 8B, it can be seen that in the profile measurement process, the position 81 of the profile line is different for each cell, and the profile graphs indicating the profile waveforms are different.

  9 to 15 are lists of information on analysis methods that affect the display of analysis results of the measurement data processing unit 1 of the three-dimensional shape measurement apparatus 10 according to the embodiment of the present invention. First, FIG. 9 to FIG. 13 describe the contents of each row displaying the analysis result in a matrix for each item of information on the analysis method set as measurement data. Specifically, FIG. 9 shows information items related to an analysis method related to image display, FIG. 10 shows information items related to an analysis method related to display of a three-dimensional image, and FIG. 11 shows an analysis method related to display of a profile graph. Each item of information is shown.

  FIG. 12 shows items of information relating to analysis methods relating to image processing. For example, in FIG. 12, the “height cut level” sets an image cut level in the height direction and an interpolation method for removing noise. “DCL / BCL” sets a shape cut level and an interpolation method for a portion with a weak light amount (dark portion) and a strong portion (bright portion).

  In addition, “filter” sets the type, conditions, and the like of general image filters such as a smoothing filter and an edge enhancement filter. “Surface shape correction” sets a method for correcting a horizontally picked surface, quadratic surface, spherical surface, and the like into a horizontal plane.

  “Height inversion” sets whether to invert the shape in the height direction. “Rotation” sets the rotation angle. “Vertical / horizontal inversion” sets whether to make a mirror image in the vertical direction or the horizontal direction. “Position correction” sets the amount of translation and / or rotational movement. When the position is automatically corrected, a reference image for pattern matching is set.

  FIG. 13 shows information items related to the analysis method related to the reference plane. The setting of the reference plane will be described later.

  14 and 15 describe the contents of each column displaying the analysis result in a matrix for each item of information on the analysis method set as the analysis process. In addition to the type of analysis processing as shown in FIG. 14, the display of columns may be unified with items other than the type of analysis processing as shown in FIG.

  Returning to FIG. 3, for each measurement data stored in the measurement data storage unit 131, the analysis processing unit 303 analyzes information stored in the information storage unit 132 related to the analysis method and / or analysis method that has received the setting. A plurality of analysis processes are executed based on information on the method.

  The analysis result display unit 304 analyzes in the column direction (first direction) the analysis result obtained by analyzing the same analysis portion among a plurality of measurement data, and displays the analysis result based on information on a plurality of analysis methods for each measurement data in the row direction ( (Second direction orthogonal to the first direction) are displayed side by side. If there is no analysis result obtained by analyzing the same analysis location among a plurality of measurement data, the analysis result is added and displayed in the row direction.

  FIG. 16 is an exemplary diagram of a setting menu for information related to an analysis method in the measurement data processing unit 1 of the three-dimensional shape measurement apparatus 10 according to the embodiment of the present invention. As shown in FIG. 16, each analysis process has a hierarchical structure, and information related to an analysis method for each analysis process can be selected by selecting each check box 161 with the mouse 42 or the like. The user can edit the hierarchical structure itself.

  FIG. 17 is an exemplary diagram showing a display state of an analysis result when setting information related to the analysis method shown in FIG. 16 in the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. As shown in FIG. 17, the analysis process of “Line Roughness Analysis 1” selected for each file name is executed, and the roughness curves, Ra and Rz are displayed as outputs. As described above, the user can freely add or delete information on an analysis method of an arbitrary analysis process using a menu as shown in FIG.

  In other words, it is possible to execute a desired analysis process by storing information related to a preset analysis technique in the storage device 13 and changing the information related to the analysis technique of the analysis process as necessary. For example, when using the stored information regarding the analysis technique, it is possible to read the measurement data and execute the analysis process immediately after starting the application. In addition, since information on analysis methods is stored in advance, even when new measurement data is added, analysis processing can be executed based on information on the same analysis method, and analysis results can be additionally displayed. it can.

  Here, the present embodiment is characterized in that the information updating unit 305 is provided. The information updating unit 305 updates the information on the analysis method set in the measurement data with the information on the analysis method for which the setting has been received for the plurality of measurement data displayed side by side in the first direction. For example, it is possible to execute analysis processing for other measurement data using the same information about the analysis method set for one measurement data, and display the analysis result. Can be easily compared.

  Specifically, for example, information on an analysis method for a predetermined row, that is, information on an analysis method set in one measurement data, information on an analysis method for another row, that is, information on an analysis method for other measurement data By overwriting, the analysis processing can be executed based on the information related to the same analysis method for other measurement data, and the analysis result can be displayed. Of course, it is not limited to overwriting the information related to the analysis method set in one measurement data as the information related to the analysis method of other rows, but the information related to the analysis method is shared among all measurement data. Thus, information regarding the same analysis method may be selected.

  FIG. 18 to FIG. 21 are exemplary diagrams showing display states of analysis results in the profile measurement process of the measurement data processing unit 1 of the three-dimensional shape measurement apparatus 10 according to the embodiment of the present invention. In FIG. 18 to FIG. 21, “laser + color” is selected as analysis processing unit information in the profile measurement process, and the analysis result is displayed together with the profile graph for each measurement data.

  And as shown in FIG. 19, unlike FIG. 18, the setting of the analysis part is changed about the measurement data of the top line. That is, two-point measurement is performed in the profile measurement process, but the designated position for two-point measurement is changed only for the top measurement data.

  In this case, in the conventional three-dimensional shape measuring apparatus 10, it is necessary to change the designated position for the two-point measurement for each measurement data, which requires complicated work for the user. Therefore, as shown in FIG. 20, right-click and select measurement data (top measurement data) for which information on the analysis method is to be reflected in other measurement data (measurement data selection accepting means). Then, a pop-up screen as the information updating unit 305 is displayed. By selecting “Reflect this analysis setting to all lines” from the pop-up screen, the change in the designated position of the two-point measurement is reflected in all other measurement data. That is, the slope of the line segment connecting the designated positions for two-point measurement is in the reverse direction.

  Then, as shown in FIG. 21, the profile measurement process is executed again on the other measurement data based on the information about the newly updated analysis method, and the analysis results are displayed side by side. As apparent from the comparison with FIG. 18, the slope of the line segment connecting the designated positions of the two-point measurement is reversed for all measurement data, and information on the analysis method of one measurement data can be easily obtained by other measurements. It can be confirmed that it can be reflected in the data.

  The range in which the information related to the analysis method is reflected is not limited to all other measurement data. In addition to this, for example, it may be reflected only in some selected rows (measurement data). In this case, the selection of a desired row may be accepted with a mouse or the like from the analysis results displayed in a matrix form by the analysis result display means 304.

  Further, it may be reflected only in the rows (measurement data) having a predetermined condition. In this case, for example, by specifying a line including “abc” in the file name, a line whose value of the predetermined numerical sequence of the analysis result is 0.5 or less, and the like, the information related to the analysis method is reflected only on the desired line. Can do.

  Further, it may be determined whether or not the display condition of the analysis result is reflected for each measurement data among the information on the analysis method. For example, the information receiving unit 302 may include a display condition setting receiving unit 306 to receive setting of analysis result display conditions for each of the stored measurement data.

  The analysis result display unit 304 includes a display condition setting unit 310, and the display condition for receiving the setting for one measurement data among a plurality of measurement data displayed side by side in the first direction is set as the display condition for other measurement data. Set as. As a result, the analysis results can be displayed under the same display conditions for all measurement data or a plurality of measurement data whose designations are accepted, thereby avoiding the possibility of making an erroneous determination by comparing the analysis results. be able to.

  For example, when a graph is displayed as an analysis result, the display condition setting unit 310 sets the scale of the graph that has received the setting for one measurement data as the scale of the graph of the other measurement data. Thereby, since the displayed graph can be displayed on the same scale, the degree of change and the like can be easily compared.

  In addition, when displaying a height image as an analysis result for each of a plurality of measurement data displayed side by side in the first direction, the display condition setting unit 310 accepts the setting for one measurement data. The color allocation range of the height image corresponding to the data may be set as the color allocation range of the height image corresponding to the other measurement data. Thereby, the display of the color with respect to the absolute value of height can be unified in a column unit for the height image.

  As a method for unifying the color display for the absolute value of height, (1) a method of assigning a color palette to a range of height specified by the user, (2) setting of the height image height of the selected row Any of the following methods may be used: (3) a method of assigning a color palette to a height range including the maximum and minimum heights of all height images. As for the graph display, (1) a method for setting the scale specified by the user for all measurement data, (2) a method for setting the scale of the graph received in the selected line to other measurement data, and (3) Any of the methods of setting a range including the maximum value and the minimum value of all value ranges of a plurality of graphs as a scale may be used.

  For example, when a height image is acquired, a height range including a maximum value and a minimum value is determined for each image, and a color palette is assigned to the height range. Therefore, since the color pallet assignment is not uniform, the absolute value of the height may be different even if displayed in the same color.

  FIG. 22 is an exemplary diagram of an analysis result image obtained by imaging the same analysis location when the color palette assignment to the height range is not unified. 22A to 22C, a large circular portion 2201 in the image is an analysis location.

  As shown in FIG. 22, in each of FIGS. 22A to 22C, the relationship between the color of the circular portion 2201 (displayed by the difference in shading from the surroundings) and the absolute value of the height is not unified. In particular, in FIG. 22C, it is difficult to compare the analysis results, for example, the analysis location cannot be visually recognized.

  FIG. 23 is a view showing an example of an analysis result image obtained by imaging the same analysis location in the case where the allocation of the color palette to the height range is standardized. In FIGS. 23A to 23C, a large circular portion 2301 in the image is an analysis portion.

  In FIG. 23, the circular portion 2301 is set as the reference plane, and the color palette assignment to the height range is unified. Thereby, the circular part 2301 which is an analysis location becomes clear, and the analysis location can be visually recognized in FIGS. 23A to 23C, and the analysis results can be easily compared.

  Therefore, in order to unify the color pallet assignment to the height range, it is preferable to set a reference plane. This is because, when assigning a color palette to the height range, it is necessary to set a range based on the absolute value of the height. That is, the reference plane setting accepting unit 307 in FIG. 3 accepts the setting of the reference plane used in the analysis processing related to the three-dimensional shape of the sample to be analyzed. The reference plane setting reception unit 307 designates a reference plane on the image and sets the height of the reference plane to 0 (zero). The allocation of the color palette is set according to the distance (height) from the height of the reference plane.

  FIG. 24 is an exemplary view of a reference plane setting reception screen of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. As shown in FIG. 24, as the method for setting the reference plane, one of four designation methods can be selected as shown in the reference plane designation area 241.

  First, when “area designation” is selected, the user designates an arbitrary area on the displayed image. An approximate plane calculated by the least square method from the height data of the pixels in the designated area is set as the reference plane.

  Next, when “profile designation” is selected, two points are designated on each of the profile graph in the X-axis direction and the profile graph in the Y-axis direction, and a straight line passing through the two points is calculated. Then, a plane parallel to the two calculated straight lines is set as a reference plane. However, since the plane is not uniquely determined by itself, the plane includes two points designated on the profile graph in the X-axis direction.

  If “Numerical value setting” is selected, the reference plane is set by setting three values, the X-axis direction inclination, the Y-axis direction inclination, and the Z-axis direction offset, as numerical values. Further, when “multiple point designation” is selected, three or more arbitrary points are designated on the image, and an approximate plane calculated by the least square method from the height data of the designated point is set as the reference plane. You may calculate including the pixel of the fixed distance around the designated point.

  The information receiving unit 302 in FIG. 3 includes a reference plane setting receiving unit 307 that receives a reference plane setting by these methods. Then, the information updating unit 305 sets the reference plane for which the setting for one measurement data is received as the reference plane for the other measurement data, thereby making it possible to unify the color palette assignment for the height range. Thus, the same height position can be displayed in the same color, and the analysis results can be displayed side by side to facilitate comparison.

  Of course, information relating to the analysis method including the coordinate position of the analysis location may be stored in the storage device 13 as an initial setting. Thereby, it becomes possible to specify an analysis location correctly.

  Also, it is desirable to unify scales in profile graphs and the like. FIG. 25 is an exemplary diagram of a profile graph when the scales are not unified in the measurement data processing unit 1 of the three-dimensional shape measurement apparatus 10 according to the embodiment of the present invention. When it is determined only from FIGS. 25A to 25C, it may be determined that there is no difference between the profiles.

  On the other hand, FIG. 26 is an exemplary diagram of a profile graph in the case where the scale is unified in the measurement data processing unit 1 of the three-dimensional shape measurement apparatus 10 according to the embodiment of the present invention. 26 (a) to (c) only unify the scales of FIGS. 25 (a) to (c). As apparent from FIG. 26, in FIG. 25, it may be judged that there is not much difference, but when the scale is unified, from FIGS. 26 (a) to (c). As can be seen, there are differences in the profiles.

  FIG. 27 is a flowchart showing the analysis processing procedure of the CPU 11 of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. The CPU 11 of the measurement data processing unit 1 acquires image data in the light receiving element 28 and the color CCD camera 34 of the three-dimensional shape measurement unit 2 as measurement data (step S2701) and stores it in the storage device 13 (step S2702).

  The CPU 11 accepts the reference plane setting (step S2703). The reference plane setting method may be any of the above-described “area specification”, “profile specification”, “numerical value setting”, and “multiple point specification”.

  The CPU 11 accepts setting of information related to the analysis method (step S2704). Based on the information related to the analysis method for which the setting has been accepted, the analysis process is executed by reflecting the setting of the reference plane for which the setting has been accepted.

  The CPU 11 executes an analysis process for the designated analysis location based on the information regarding the analysis method that has received the setting (step S2705). The CPU 11 determines whether or not the same analysis location exists among the analysis locations that have received the designation (step S2706).

  When the CPU 11 determines that the same analysis location exists (step S2706: YES), the CPU 11 displays the analysis result for each analysis location in the same row (step S2707). When the CPU 11 determines that the same analysis location does not exist (step S2706: NO), the CPU 11 displays the analysis result for each analysis location in a new column (step S2708).

  The CPU 11 determines whether or not an update of information related to the analysis method has been received for any measurement data (step S2709). When the CPU 11 determines that the update of the information related to the analysis method is received for any measurement data (step S2709: YES), the CPU 11 updates the information related to the analysis method of the measurement data in the specified range (step S2710). ), The process is returned to step S2705, and the above-described process is repeated for the measurement data in which the information on the analysis method is updated.

  When the CPU 11 determines that any measurement data has not been updated for information on the analysis method (step S2709: NO), the CPU 11 stores the analysis result in association with the information on the analysis method for each measurement data. (Step S2711), and the process ends.

  It also accepts partial area settings that are part of the analysis results (measurement data in the row direction and analysis processing in the column direction) listed in a matrix, and stores the analysis results of the partial areas that have received the settings. 12 may be temporarily stored. This is because when the analysis result of the same partial area is displayed again, it is not necessary to execute the analysis process, and the display response can be improved.

  In other words, if the same partial area is displayed for the second time or later, it is sufficient to display the analysis result of the temporarily stored partial area. It is possible to reduce the calculation processing load and increase the display response.

  FIG. 28 is a flowchart showing a procedure of analysis result display processing of the CPU 11 of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. The CPU 11 of the measurement data processing unit 1 displays the analysis result on the display device 43 according to the analysis processing procedure shown in FIG. 27 (step S2801), and accepts the setting of the partial area on the displayed screen (step S2802).

  The CPU 11 determines whether the image of the partial area for which the setting has been accepted, that is, a part of the analysis result has already been temporarily stored in the memory 12 (step S2803). When the CPU 11 determines that the partial area image has already been temporarily stored in the memory 12 (step S2803: YES), the CPU 11 reads out the temporarily stored partial area analysis result from the memory 12 (step S2804). ), The analysis result of the area other than the partial area is displayed on the display device 43 (step S2807).

  When the CPU 11 determines that the image of the partial area is not temporarily stored in the memory 12 (step S2803: NO), the CPU 11 executes an analysis process (step S2805), and the analysis result of the partial area is stored in the memory 12. Temporary storage is performed (step S2806). The CPU 11 displays the analysis result on the display device 43 (step S2807).

  As described above, according to the present embodiment, analysis results based on information on the same analysis method can be displayed side by side, and it is possible to avoid making an erroneous determination by comparing analysis results. Become. In addition, since it is possible to easily change the information related to the analysis method, it is possible to reduce the work burden on the user and improve convenience.

  The present invention is not limited to the above-described embodiments, and various changes and improvements can be made within the scope of the present invention. For example, a line for displaying an analysis result may be added every time measurement data to be analyzed is acquired. Alternatively, a specific folder may be constantly monitored, and a line for displaying an analysis result may be added when it is detected that a measurement data file has been added to the folder. Further, the timing and method of adding a line are not particularly limited, such as adding a file name by specifying a key-in and adding a file icon by a drag-and-drop operation.

  In addition, a calculation may be performed between columns, and the calculation result may be a new column. Furthermore, a column may be specified, and a statistical value of cell values in the same column, for example, an average value may be calculated and displayed as an analysis result.

  Further, a graph may be displayed by specifying a column and using values of cells in the same column. The graph to be displayed is not particularly limited, such as a histogram, a trend graph, and a scatter diagram.

  In the above-described embodiment, the analysis results for each measurement data are displayed in rows, and the analysis results for each analysis process (information on the analysis method) are displayed in columns. However, even if the rows and columns are interchanged, Needless to say, it doesn't matter.

  Note that, in FIG. 22 described above, a state in which the color palette assignment to the height range is unified is described. When color assignment is performed, that is, when the color range of the height image is set, a restriction may be added so that the reference plane is always at the center of the color bar. Such a restriction makes it easier to compare a plurality of height images. This point will be specifically described below.

  Conventionally, the color assignment to the height image cannot uniquely determine which color corresponds to the height (= 0) as the reference plane. For this reason, it is difficult to determine where the reference plane is by simply looking at the height image, and there is a problem that it is difficult to understand when comparing a plurality of height images side by side. Further, since the color palette is composed of gradations in which colors gradually change, it is difficult to read at a glance whether the shape near the reference surface is higher or lower than the reference surface from the height image.

On the other hand, these problems can be solved by adding the above-described restrictions. FIG. 29 and FIG. 30 are examples of GUIs relating to color allocation of the color palette.
In the setting screen shown in FIG. 29, a check box corresponding to “color with reference plane (height 0) as the center” is provided. When the selection of such a check box is accepted, as shown in FIG. 30, the center is forced to be 0.000 μm, and the absolute values of the upper and lower limits are equal.

  For example, when the selection of the automatic setting button is accepted, that is, in the automatic setting mode, the color range is determined so as to include the maximum value and the minimum value of the height data unless the selection of the check box is accepted. The On the other hand, when the selection of a check box is accepted in the automatic setting mode, the larger of the absolute value of the maximum value and the minimum value is set as the upper limit, and the value with a minus sign is set as the lower limit. The Thereby, the center of the color bar is set to be the reference plane (height = 0).

  In this way, since the color near the center of the color palette is fixed to the color of the reference plane, when comparing height images side by side, the same color indicates that the distance from the reference plane is the same. It becomes possible to easily compare a plurality of height images. In short, when assigning colors with the color palette to the height range of the image based on the measurement data, the reference plane set in the height image is a specific color of the color palette (for example, the color of the central part of the color palette, etc. It is possible to easily compare multiple height images by assigning colors so that they can be fixed colors set in advance or set or changed colors set or changed by the user. It becomes possible to do.

  Also, if you want to evaluate the height image with the reference plane in mind, if the color of the reference plane is fixed by the color assignment described above, the color of the height image will show the absolute amount of height displacement from the reference plane. It is easy to evaluate because it comes to show. However, when the color of the reference surface is similar to the color near the reference surface, there is a possibility that it is not clear where the height of the reference surface is on the height image.

  Therefore, a color palette in which color parameters change stepwise at the level of the reference plane fixed at the center of the color bar can be used by the color assignment described above. As a result, the reference plane becomes clear on the height image, and it is clearly understood how the reference plane is swollen or dented in the vicinity of the reference plane. In short, the color of the color palette extending in one direction changes in gradation on both sides of the substantially central portion, and changes sharply in the substantially central portion. Thereby, the shape in the vicinity of the reference surface can be clearly grasped.

  Here, the definition of “steep change” will be described in detail. For example, when at least one of the color channels represented by RGB changes in luminance by about 5% or more of the full range of the channel in a specific section, it may be defined as “steep change”. More preferably, the case where the luminance changes by approximately 10% or more may be defined as “steep change” so that the shape in the vicinity of the reference plane can be clearly grasped. More preferably, the brightness may be changed by approximately 15% or more.

  In addition, in each color channel expressed in RGB, in at least one channel, the luminance changes by about 5% or more of the full range of the channel in a specific section, and is omitted in a portion excluding the specific section of the same channel. A case where the luminance does not change by 5% or more may be defined as “steep change”. Further, in each color channel represented by RGB, in at least one channel, the luminance changes by about 5% or more of the full range of the channel in a specific section, and the vicinity of both ends of the same channel and the specific section are A case where the luminance does not change by about 5% or more in the excluded portion may be defined as “steep change”. Furthermore, in at least one of the color channels represented by RGB, a case where the luminance changes by about 5% or more of the circumferential length on the hue ring of the channel is defined as “steep change”. Also good.

1 Measurement Data Processing Unit 2 3D Shape Measurement Unit 10 3D Shape Measurement Device 11 CPU
DESCRIPTION OF SYMBOLS 12 Memory 13 Storage device 90 Portable recording medium 100 Computer program 131 Measurement data storage part 132 Information storage part regarding analysis method

Claims (14)

A three-dimensional shape measurement unit that measures the three-dimensional shape of the sample and obtains measurement data including three-dimensional shape information;
A three-dimensional shape measuring apparatus having a measurement data processing unit for executing analysis processing on the three-dimensional shape of a sample using measurement data and displaying the analysis result on a display unit,
Measurement data storage means for storing a plurality of different measurement data;
Information accepting means for accepting setting of information related to a plurality of analysis methods for executing analysis processing;
For each stored measurement data, an analysis processing means for executing a plurality of analysis processes based on information on the analysis method for which the setting has been accepted,
An analysis result analyzed based on information about the same analysis method among a plurality of measurement data is in a first direction, and an analysis result based on information about a plurality of analysis methods for each measurement data is orthogonal to the first direction. Analysis result display means for displaying them side by side in the direction;
Information updating means for updating the information about the analysis method set in the measurement data with the information about the analysis method for which the setting has been received for a plurality of measurement data displayed side by side in the first direction;
The three-dimensional shape measuring apparatus characterized in that the analysis result display means displays an analysis result analyzed based on information relating to an updated analysis method of other measurement data.   The three-dimensional shape measuring apparatus according to claim 1, wherein information regarding an analysis method that has received a setting for one measurement data is set as information regarding an analysis method for all other measurement data. A measurement data selection receiving means for receiving selection of one measurement data from a plurality of measurement data;
3. The three-dimensional shape measuring apparatus according to claim 2, wherein information relating to an analysis technique whose setting has been accepted for measurement data whose selection has been accepted is set as information relating to an analysis technique for all other measurement data. Display condition setting accepting means for accepting setting of display conditions for analysis results for each of the stored measurement data;
A display condition setting unit configured to set a display condition for accepting a setting for one measurement data among a plurality of measurement data displayed side by side in the first direction as a display condition for the other measurement data; The three-dimensional shape measuring apparatus according to any one of claims 1 to 3.   5. When displaying a graph as an analysis result, the display condition setting unit sets a scale of a graph that has received a setting for one measurement data as a scale of a graph of another measurement data. 3D shape measuring device.   When displaying a height image as an analysis result for each of the plurality of measurement data displayed side by side in the first direction, the display condition setting unit is configured to assign a color image range of a height image corresponding to one measurement data. Is set as a color allocation range of a height image corresponding to other measurement data. The information receiving unit includes a reference plane setting receiving unit that receives a setting of a reference plane used in an analysis process related to a three-dimensional shape of a sample,
The three-dimensional shape according to any one of claims 1 to 6, wherein the information updating unit sets a reference plane for which setting has been received for one measurement data as a reference plane for other measurement data. measuring device.   When color allocation is performed with a color palette for a height range of a height image based on measurement data, color allocation is performed so that a reference plane set in the height image is a specific color of the color palette. 8. The three-dimensional shape measuring apparatus according to claim 7,   The three-dimensional shape measuring apparatus according to claim 8, wherein the color of the color palette extending in one direction changes in gradation on both sides of a substantially central portion and changes steeply in the substantially central portion. A measurement data processing unit that performs analysis processing on the three-dimensional shape of a sample using measurement data including three-dimensional shape information obtained by measuring the three-dimensional shape of the sample, and displays the analysis result on a display unit. ,
Measurement data storage means for storing a plurality of different measurement data;
Information accepting means for accepting setting of information related to a plurality of analysis methods for executing analysis processing;
For each stored measurement data, an analysis processing means for executing a plurality of analysis processes based on information on the analysis method for which the setting has been accepted,
An analysis result analyzed based on information about the same analysis method among a plurality of measurement data is in a first direction, and an analysis result based on information about a plurality of analysis methods for each measurement data is orthogonal to the first direction. Analysis result display means for displaying them side by side in the direction;
Information updating means for updating the information about the analysis method set in the measurement data with the information about the analysis method for which the setting has been received for a plurality of measurement data displayed side by side in the first direction;
The measurement data processing unit is characterized in that the analysis result display means displays an analysis result analyzed based on information relating to an updated analysis method of other measurement data.   The measurement data processing unit according to claim 10, wherein information related to an analysis method for which setting has been received for one measurement data is set as information related to an analysis method for all other measurement data. A measurement data selection receiving means for receiving selection of one measurement data from a plurality of measurement data;
The measurement data processing unit according to claim 11, wherein information regarding an analysis technique whose setting has been received for measurement data whose selection has been received is set as information regarding an analysis technique for all other measurement data. Using the measurement data including the 3D shape information obtained by measuring the 3D shape of the sample, execute the analysis process on the 3D shape of the sample and execute it in the measurement data processing unit that displays the analysis result on the display unit A measurement data processing method capable of
The measurement data processing unit is
A first step of storing a plurality of different measurement data;
A second step of accepting setting of information related to a plurality of analysis methods for executing analysis processing;
For each stored measurement data, a third step of executing a plurality of analysis processes based on information on the analysis method for which the setting has been accepted;
An analysis result analyzed based on information about the same analysis method among a plurality of measurement data is in a first direction, and an analysis result based on information about a plurality of analysis methods for each measurement data is orthogonal to the first direction. A fourth step of displaying the images side by side,
A plurality of measurement data displayed side by side in the first direction, and a fifth step of updating information related to the analysis method set in the measurement data with information related to the analysis method that has received the setting,
A measurement data processing method characterized by displaying an analysis result analyzed based on information on an updated analysis method of other measurement data. Using the measurement data including the 3D shape information obtained by measuring the 3D shape of the sample, execute the analysis process on the 3D shape of the sample and execute it in the measurement data processing unit that displays the analysis result on the display unit A computer program capable of
The measurement data processing unit;
Measurement data storage means for storing a plurality of different measurement data;
Information receiving means for receiving setting of information on a plurality of analysis methods for executing analysis processing;
For each stored measurement data, an analysis processing means for executing a plurality of analysis processes based on information on the analysis method for which the setting has been accepted,
An analysis result analyzed based on information about the same analysis method among a plurality of measurement data is in a first direction, and an analysis result based on information about a plurality of analysis methods for each measurement data is orthogonal to the first direction. Analysis result display means for displaying the data side by side in the direction and information on the analysis method that has received the settings for the plurality of measurement data that are displayed side by side in the first direction. Function as an information update means to update,
A computer program for causing the analysis result display means to function as means for displaying an analysis result analyzed based on information relating to an updated analysis method of other measurement data.