JP6249570B2 - 静電容量型圧力センサ - Google Patents
静電容量型圧力センサ Download PDFInfo
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- JP6249570B2 JP6249570B2 JP2015549226A JP2015549226A JP6249570B2 JP 6249570 B2 JP6249570 B2 JP 6249570B2 JP 2015549226 A JP2015549226 A JP 2015549226A JP 2015549226 A JP2015549226 A JP 2015549226A JP 6249570 B2 JP6249570 B2 JP 6249570B2
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- electrode
- diaphragm
- signal extraction
- measurement
- pressure sensor
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- 238000005259 measurement Methods 0.000 claims description 39
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- 230000007246 mechanism Effects 0.000 description 14
- 230000008859 change Effects 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 238000009530 blood pressure measurement Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 7
- 230000004308 accommodation Effects 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/069—Protection against electromagnetic or electrostatic interferences
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Description
ところで、このような静電容量型圧力センサでは、前記電極体の信号取り出し側の固定が何らかの原因でずれてしまうと、それに伴ってボディ内の電極面の位置が変化し、ギャップが設計値から大きくずれて圧力の測定精度が悪くなってしまうという問題がある。
1 ・・・ボディ
11 ・・・支持部
2 ・・・ダイヤフラム
3 ・・・電極体
31 ・・・測定電極
32 ・・・信号取り出し電極
33 ・・・スプリング(可撓性接続部材)
3A ・・・対向部
3B ・・・貫通部
3C ・・・ねじ部
3D ・・・ナット部材
3E ・・・収容凹部
3F ・・・挿入部
3S ・・・電極面
4 ・・・絶縁配置体
41 ・・・平坦面
5 ・・・押圧機構
51 ・・・第1リング状部材
52 ・・・第2リング状部材
5A ・・・位置調整体
5P ・・・被押圧面
5C ・・・接触面
53 ・・・押圧板
6 ・・・絶縁封止体
SC ・・・固定ねじ
PL ・・・支持面
前記静電容量型圧力センサ100は、例えばマスフローコントローラ等の流量制御装置や圧力制御装置において流体の圧力を測定するために用いられるものである。このものは、図1に示すように流体の圧力により変形が生じるダイヤフラム2と、前記ダイヤフラム2と対向して設けられた電極面3Sとを有し、前記ダイヤフラム2及び前記電極面3S間の静電容量の変化から圧力を測定するものである。
Claims (3)
- 圧力により変形するダイヤフラムと、
前記ダイヤフラムとギャップを形成して対向する電極面を有した電極体と、
一端側に前記ダイヤフラムが接合され、前記電極体の少なくとも一部が内部に収容されるボディと、を備え、
前記電極体が、前記電極面を有し、前記ボディ内に設けられる測定電極と、前記ボディの他端側に固定され、前記測定電極から信号を取り出すための信号取り出し電極と、前記測定電極及び前記信号取り出し電極を電気的に接続する可撓性接続部材と、を具備し、
前記測定電極又は前記信号取り出し電極に形成された収容凹部に前記可撓性接続部材が収容されていることを特徴とする静電容量型圧力センサ。 - 前記測定電極又は前記信号取り出し電極の一方に前記収容凹部が形成されており、前記測定電極又は前記信号取り出し電極の他方が前記収容凹部内に挿入される挿入部を有し、
前記可撓性接続部材が前記収容凹部と前記挿入部との間に設けられている請求項1記載の静電容量型圧力センサ。 - 前記可撓性接続部材が、弾性体で形成されており、その弾性力で前記測定電極及び前記信号取り出し電極と接触するように構成されている請求項1記載の静電容量型圧力センサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013243382 | 2013-11-25 | ||
JP2013243382 | 2013-11-25 | ||
PCT/JP2014/081103 WO2015076413A1 (ja) | 2013-11-25 | 2014-11-25 | 静電容量型圧力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2015076413A1 JPWO2015076413A1 (ja) | 2017-03-16 |
JP6249570B2 true JP6249570B2 (ja) | 2017-12-20 |
Family
ID=53179672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015549226A Active JP6249570B2 (ja) | 2013-11-25 | 2014-11-25 | 静電容量型圧力センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US9897503B2 (ja) |
EP (1) | EP2993454B1 (ja) |
JP (1) | JP6249570B2 (ja) |
WO (1) | WO2015076413A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6895289B2 (ja) * | 2017-03-29 | 2021-06-30 | 株式会社堀場エステック | 圧力センサ |
CN115342965A (zh) * | 2022-09-21 | 2022-11-15 | 内蒙古工业大学 | 一种电容式气体压力传感器结构 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4542435A (en) * | 1984-03-29 | 1985-09-17 | General Signal Corporation | Pressure transducer and mounting |
US4823603A (en) | 1988-05-03 | 1989-04-25 | Vacuum General, Inc. | Capacitance manometer having stress relief for fixed electrode |
CH691625A5 (de) * | 1997-09-15 | 2001-08-31 | Kk Holding Ag | Beschleunigungskompensierter Druckkaufnehmer. |
US6568274B1 (en) * | 1998-02-04 | 2003-05-27 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
US6105436A (en) | 1999-07-23 | 2000-08-22 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
EP1106982B1 (de) * | 1999-12-10 | 2005-02-09 | Endress + Hauser GmbH + Co. KG | Druckmessgerät |
WO2002014821A2 (en) * | 2000-08-11 | 2002-02-21 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
US6837112B2 (en) * | 2003-03-22 | 2005-01-04 | Stec Inc. | Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis |
JP4014006B2 (ja) * | 2004-06-17 | 2007-11-28 | 株式会社山武 | 圧力センサ |
JP4798605B2 (ja) * | 2005-10-18 | 2011-10-19 | 株式会社山武 | 静電容量型圧力センサ |
JP4993345B2 (ja) | 2006-10-26 | 2012-08-08 | アズビル株式会社 | 静電容量型圧力センサ |
US20090015269A1 (en) * | 2007-07-13 | 2009-01-15 | Pinto Gino A | Stray Capacitance Compensation for a Capacitive Sensor |
JP5576331B2 (ja) * | 2011-03-31 | 2014-08-20 | アズビル株式会社 | 圧力センサ装置 |
US8893555B2 (en) * | 2011-09-01 | 2014-11-25 | Setra Systems, Inc. | Pressure measuring instrument |
JP6130765B2 (ja) * | 2013-09-30 | 2017-05-17 | アズビル株式会社 | 静電容量型圧力センサ |
-
2014
- 2014-11-25 US US14/894,094 patent/US9897503B2/en active Active
- 2014-11-25 WO PCT/JP2014/081103 patent/WO2015076413A1/ja active Application Filing
- 2014-11-25 JP JP2015549226A patent/JP6249570B2/ja active Active
- 2014-11-25 EP EP14863368.8A patent/EP2993454B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2993454A4 (en) | 2017-01-04 |
US20160103030A1 (en) | 2016-04-14 |
EP2993454A1 (en) | 2016-03-09 |
JPWO2015076413A1 (ja) | 2017-03-16 |
EP2993454B1 (en) | 2019-12-25 |
WO2015076413A1 (ja) | 2015-05-28 |
US9897503B2 (en) | 2018-02-20 |
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