JP6233953B2 - Inspection apparatus, inspection method and program - Google Patents

Description

  The present invention relates to an inspection apparatus, an inspection method, and a program for inspecting the surface shape of an inspection object using a laser beam.

  Conventionally, an optical three-dimensional measurement technique for measuring the surface shape of an object using a laser beam or the like has been widely used. In particular, the reflected light of the projected laser beam on the surface of the inspection object is acquired by an imaging device such as a camera, and the three-dimensional surface shape of the inspection object is obtained by combining a plurality of reflection positions specified by the triangulation principle. A method to reproduce is used.

In this technique, a method of scanning slit light using a sheet light laser and a rotating mirror is generally used. Further, slit light can be scanned by using a two-dimensional scanning type MEMS (Micro Electro Mechanical System) mirror.
The MEMS mirror is an element that allows the direction of the mirror surface provided in itself to be changed according to an external signal. The laser light reflected by the mirror surface of the MEMS mirror changes its traveling direction according to a change in the direction of the mirror surface of the MEMS mirror. Therefore, the laser beam can be scanned two-dimensionally on the surface of the inspection object by appropriately controlling the mirror surface of the MEMS mirror.
In particular, a light cutting method is known in which slit light processed into a thin sheet is scanned with a MEMS mirror, and the outline of the inspection object obtained thereby is combined to reproduce the entire surface shape configuration.

  In addition, as a technique related to the technique of scanning the laser beam using the MEMS mirror as described above, a technique of controlling the output intensity of the laser beam together with the scanning process is disclosed (see Patent Document 1).

JP 2011-523252 A

However, the above-described optical cutting method has the following problems.
For example, when one piece of slit light is projected onto a certain part of the inspection object, the slit light is reflected on the surface, and the outline for one line can be acquired. At this time, if the distance to the target surface, the orientation of the surface, and the reflectance are substantially the same on the outline of one line, reflected light of the same amount is projected onto the image sensor. However, the amount of reflected light on the contour of one line may be greatly different due to the influence of the distance to the target surface, the orientation of the surface, or the surface material of the surface of the object to be inspected. is there.

  As described above, when the amount of reflected light greatly varies in a part on one contour, the three-dimensional data of the surface shape may not be obtained correctly based on the image data projected on the image sensor. For example, if the reflectance is extremely high on a part of the surface of the inspection object, a large amount of reflected light is generated in that part, and the factor that increases reflected disturbance light that projects other unexpected surface parts onto the image sensor Become. In addition, when the reflectance is extremely low on a part of the surface, the amount of reflected light incident on the image sensor is insufficient, and this part may not be reflected as three-dimensional data.

  Therefore, an object of the present invention is to provide an inspection apparatus, an inspection method, and a program that can solve the above-described problems.

The present invention has been made to solve the above-described problems, and controls the laser light source that emits laser light and the scanning of the laser light on the surface of the inspection object while specifying the projection direction of the laser light. A laser projection control unit that performs the imaging, an image sensor that captures the reflected light of the laser light reflected on the surface of the inspection object, acquires an image, an optical sensor that acquires the amount of the reflected light, and the laser A laser output calculation unit that specifies an output intensity of the laser light emitted from a light source, output intensity information indicating the output intensity of the laser light, and a position intensity correspondence table that is stored in association with each projection direction; comprising an output intensity update unit that updates the output intensity information stored in the position intensity correspondence table, said laser output calculation unit, when the scanning of the first said laser beam, before Based on the amount of light the light sensor is acquired, and updating the output intensity information stored in the position intensity correspondence table, during the scanning of the second of said laser beam, determined the amount of light the light sensor is acquired in advance The inspection apparatus is characterized in that the output intensity of the laser beam is specified for each projection direction while referring to the position intensity correspondence table so as to fall within the specified range.

  In the inspection apparatus described above, the output intensity update unit may acquire an output intensity corresponding to each projection direction at the second scanning for each projection direction at the first scanning. Further, the output intensity information is updated for each projection direction so as to have an inversely proportional relationship with the light quantity.

  According to the present invention, in the above-described inspection apparatus, the same inspection object is imaged from an angle different from the image acquired by the imaging element based on the light quantity acquired by the optical sensor during the first scanning. And an image acquisition unit for acquiring the second image that has been obtained.

  Further, the present invention provides the above-described inspection apparatus, wherein the two casings are separated from each other, the first casing having the laser light projection port, and the second casing having the imaging element that captures the reflected light. A second imaging element that is arranged in the second housing while a relative positional relationship with the imaging element is fixed, and that acquires image data of a region different from the imaging element; Based on an image for relative position specification obtained by the second image pickup device and picked up by a marker recorded on the surface of the first housing, the laser light projection port and the image pickup device are relative to each other. And a relative position specifying unit for specifying a specific positional relationship.

According to the present invention, the laser light source emits laser light, and the laser projection control unit performs control to scan the laser light on the surface of the inspection object while specifying the projection direction of the laser light. Captures the reflected light of the laser light reflected on the surface of the inspection object, acquires an image, the optical sensor acquires the amount of the reflected light, and the laser output calculation unit performs the first time Based on the light quantity acquired by the optical sensor at the time of scanning with laser light, update output intensity information indicating the output intensity of the laser light stored in the position intensity correspondence table in association with each projection direction, For each projection direction , referring to the position intensity correspondence table so that the amount of light acquired by the optical sensor is within a predetermined range during the second scanning of the laser light. And an output intensity of the laser beam emitted from the laser light source is specified.

The present invention also provides a laser light source that emits laser light, an imaging device that captures reflected light of the laser light reflected on the surface of the inspection object, and acquires an image, and light that acquires the amount of light of the reflected light. A laser projection control means for controlling a computer of an inspection apparatus including a sensor to scan the laser light on the surface of the inspection object while specifying a projection direction of the laser light, and the first laser light The output intensity information indicating the output intensity of the laser beam stored in the position intensity correspondence table in association with each projection direction is updated based on the amount of light acquired by the optical sensor at the time of scanning , and the second time While referring to the position intensity correspondence table so that the amount of light acquired by the optical sensor during scanning of the laser light falls within a predetermined range. The program is made to function as laser output intensity specifying means for specifying the output intensity of the laser beam emitted from the laser light source for each projection direction.

  According to the present invention, the surface shape of an inspection object can be grasped more accurately.

It is a figure which shows the function structure of the inspection apparatus which concerns on 1st Embodiment. It is a figure explaining the function of the laser projection control part which concerns on 1st Embodiment. It is a figure which shows the content of the position intensity corresponding | compatible table which concerns on 1st Embodiment. It is a 1st figure explaining the function of the output intensity update part which concerns on 1st Embodiment. It is a 2nd figure explaining the function of the output intensity update part which concerns on 1st Embodiment. It is a figure which shows the processing flow of the test | inspection apparatus main-body part which concerns on 1st Embodiment. It is a figure which shows the function structure of the inspection apparatus which concerns on 2nd Embodiment. It is a figure which shows the processing flow of the test | inspection apparatus main-body part which concerns on 2nd Embodiment. It is the schematic diagram which showed the example of the whole structure of the test | inspection apparatus which concerns on 1st Embodiment and 2nd Embodiment. It is the schematic diagram which showed the example of the whole structure of the test | inspection apparatus which concerns on 3rd Embodiment. It is the figure which showed in detail the structure of the measurement head which concerns on 3rd Embodiment. It is a figure explaining the function of the relative position specific | specification part which concerns on 3rd Embodiment.

<First Embodiment>
The inspection apparatus according to the first embodiment will be described below with reference to the drawings.
FIG. 1 is a diagram illustrating a functional configuration of the inspection apparatus according to the first embodiment. In this figure, reference numeral 1 denotes an inspection device.

As shown in FIG. 1, the inspection apparatus 1 according to the present embodiment includes an inspection apparatus main body 10 and a measurement head 20.
The inspection apparatus main body 10 performs control to output laser light and scan it on the surface of the inspection object X. Further, the inspection apparatus main body 10 takes in the reflected light of the laser light projected on the surface of the inspection object X, and acquires information on the surface shape of the inspection object X.

The measuring head 20 is arranged in the vicinity of the periphery of the inspection object X, and performs laser light projection, scanning, and acquisition of reflected light based on the control of the inspection apparatus main body 10.
As shown in FIG. 1, the measurement head 20 changes its own mirror surface angle in accordance with an external signal, thereby changing the projection direction of the laser light onto the inspection object X (MEMS). A mirror 21 is provided. Further, the measuring head 20 includes an imaging element 22 that collects reflected light of the laser beam on the surface of the inspection object X and acquires image data. Note that the positional relationship between the MEMS mirror 21 and the image sensor 22 is known in advance and is used for triangulation calculation.
As shown in FIG. 1, the measuring head 20 is disposed at a point routed from the inspection apparatus main body 10 through a signal line and an optical fiber. Thereby, even if it is a narrow location where it is difficult to insert the inspection apparatus main body, for example, it is possible to observe only the measuring head 20 by being routed to the inspection object.

  With the configuration as described above, the inspection apparatus 1 projects laser light onto the inspection object X, detects the reflected light with the imaging device, and from the geometric relationship to the image acquisition unit and the inspection object X. By determining the distance, the three-dimensional shape of the surface of the inspection object X is measured.

Next, the functional configuration of the inspection apparatus main body 10 shown in FIG. 1 will be described.
First, the inspection apparatus body 10 includes a laser light source 100, a conversion circuit 101, and a laser output calculation unit 102.
The laser light source 100 is an emission source of laser light composed of a laser diode. The laser light source 100 changes the output intensity of the laser light emitted according to information (output intensity information) indicating the output intensity of the laser light specified by the laser output calculation unit 102. As shown in FIG. 1, the laser light emitted from the laser light source 100 is sent to the measuring head 20 via the optical fiber FA, and then to the inspection object X via the lens LA and the MEMS mirror 21 described later. Is projected. Note that the laser light source 100 may be configured to emit, for example, a red laser diode, a green laser diode, and a blue laser diode simultaneously or while switching.
The conversion circuit 101 converts the output intensity information specified by the laser output calculation unit 102 into a signal for the laser light source 100. The conversion circuit 101 includes a D / A (Digital / Analog) conversion circuit, a modulation circuit, and the like, and reflects output intensity information (digital signal) input from the laser output calculation unit 102 in the actual output intensity of laser light. To convert to an analog signal.
The laser output calculation unit 102 specifies the output intensity of the laser light emitted from the laser light source 100 based on the output intensity information stored in advance. The laser output calculation unit 102 specifies output intensity information while referring to output intensity information stored in a position intensity correspondence table 12 described later. The laser output calculation unit 102 inputs projection direction information indicating the position at which the laser beam is projected from a laser projection control unit 110 described later, and specifies output intensity information based on the projection direction information.

Further, the inspection apparatus main body 10 includes a laser projection control unit 110, a projection direction table 111, and a counter 112.
The laser projection control unit 110 controls the projection direction of the laser light based on the projection direction information stored in advance. Specifically, the laser projection control unit 110 controls the projection direction of the laser light by manipulating the mirror surface direction of the MEMS mirror 21 provided in the measurement head 20. The laser projection control unit 110 associates the mirror orientation of the MEMS mirror 21 with the projection orientation of the laser light on a one-to-one basis. And if the laser projection control part 110 specifies the position which should project a laser beam with reference to the projection direction table 111, it will output the control signal corresponding to the projection direction to the MEMS mirror 21. FIG.
The projection direction table 111 is a storage table that stores projection direction information indicating the projection direction of laser light. The projection direction table 111 stores projection direction information in association with each predetermined count number.
The counter 112 is a circuit that outputs a predetermined count number corresponding to a synchronization signal input from the image sensor 22 described later. Here, the synchronization signal is a pulse signal output at an appropriate time interval while synchronizing with the image acquisition process of the image sensor 22. The counter 112 calculates the number of times this pulse signal is input, and outputs information indicating this number to the laser projection control unit 110.

Further, the inspection apparatus body 10 includes an optical sensor 120, a conversion circuit 121, and an output intensity update unit 122.
The optical sensor 120 is a light receiving element formed of a photodiode, and is a sensor that detects the amount of reflected light (hereinafter referred to as laser reflected light) of laser light projected on the surface of the inspection object X. The optical sensor 120 condenses the laser reflected light with the lens LB provided in the measuring head 20, transmits the laser reflected light through the optical fiber FB, and outputs an analog signal corresponding to the amount of the reflected light.
The conversion circuit 121 converts the analog signal input from the optical sensor 120 into light amount information that is a digital signal and outputs the light amount information. The conversion circuit 121 includes an A / D (Analog / Digital) conversion circuit, a demodulation circuit, and the like, and performs processing of converting an analog signal corresponding to the light amount input from the optical sensor 120 into light amount information that is a digital signal.
The output intensity update unit 122 associates the light amount information input via the optical sensor 120 and the conversion circuit 121 with the projection direction information input from the laser projection control unit 110, and stores the output stored in the position intensity correspondence table 12 described later. Update the strength information value. The output intensity update unit 122 temporarily holds the light amount information acquired in the scanning process for one specific line of laser light, and the portion of the position intensity correspondence table 12 corresponding to the scanning position of the one line. Update output intensity information.

Further, the inspection apparatus body 10 includes an image memory 13.
The image memory 13 is a storage area in which image data acquired by the image sensor 22 provided in the measurement head 20 is stored. The image memory 13 is constructed by general storage means, for example, a mass storage device such as an HDD (Hard Disk Drive) or an SSD (Solid State Drive).

  The imaging element 22 is an imaging module such as a CCD (Charge Coupled Device) camera. Specifically, the image pickup device 22 performs a process of acquiring a plurality of image data by capturing the laser reflected light in the course of the laser light scanning process, and storing and storing it in the image memory 13. The inspection apparatus main body 10 constructs three-dimensional data representing the surface shape of the inspection object X based on the image data stored in the image memory 13 after all the scanning processes are completed. Since a known technique (triangulation principle or the like) may be used as a method for constructing the three-dimensional data, a detailed description of this point will be omitted.

FIG. 2 is a diagram illustrating the function of the laser projection control unit according to the first embodiment.
The function of the laser projection control unit 110 according to the present embodiment will be described in detail with reference to FIG.
First, FIG. 2A shows the contents of the projection direction table 111. As shown in FIG. 2A, the projection direction table 111 stores the count number input from the counter 112 in association with the projection direction information indicating the projection direction of the laser beam, that is, the X coordinate of the projection direction. It is a storage table.

The laser projection control unit 110 according to the present embodiment refers to the projection direction table shown in FIG. 2A and specifies the projection direction (x, y) to be projected next based on the count number input from the counter 112. To do. For example, when the count number “0003” is input from the counter 112, the laser projection control unit 110 refers to the projection direction table 111 and specifies the X coordinate value x3 of the next projection direction. For the Y coordinate, y0, y1,..., Yn are sequentially and repeatedly output.
Here, the laser projection control unit 110 stores the projection direction (x, y) obtained as described above and the control signal indicating the mirror surface direction of the MEMS mirror 21 in a one-to-one correspondence. Therefore, when the projection direction (x0, y3) is specified, the laser projection control unit 110 outputs a control signal corresponding to the projection direction (x0, y3) to the MEMS mirror 21. The laser beam reflected by the mirror surface of the MEMS mirror 21 determined according to this control signal is projected to a position corresponding to the projection direction (x0, y3) in the image acquisition region P.

  On the other hand, every time the synchronization signal from the image sensor 22 is input, the counter 112 performs a process of increasing the count number by one and outputting it. Here, the synchronization signal is a pulse signal output in synchronization with the imaging process of the imaging element 22 (a series of processes for acquiring image data based on laser reflected light and storing it in the image memory).

  FIG. 2B shows a process in which the projection azimuth changes as the count number increases. In the projection direction table 111, as the count number increases to “0000”, “0001”,..., The laser beam projection direction moves in a two-dimensional manner to scan the entire predetermined image acquisition region P. In addition, the X coordinate of the projection direction is stored (see FIG. 2B). This image acquisition area P is a range corresponding to the stored contents of the projection direction table 111.

  As described above, the laser projection control unit 110 performs control to two-dimensionally scan the laser light emitted from the laser light source 100 via the MEMS mirror 21.

FIG. 3 is a diagram illustrating the contents of the position intensity correspondence table according to the first embodiment.
Next, the function of the laser output calculation unit 102 according to the present embodiment will be described in detail with reference to FIG.
As shown in FIG. 3, the position intensity correspondence table 12 according to the present embodiment has information (output) indicating the output intensity of laser light corresponding to each laser beam projection direction (projection direction specified by the laser projection control unit 110). Strength information) is a storage table storing A00, A01,.

The laser output calculation unit 102 according to the present embodiment refers to the position intensity correspondence table 12 and specifies the output intensity of the laser beam to be output next. Specifically, the laser output calculation unit 102 specifies the projection direction information that is specified by the laser projection control unit 110 and indicates the projection direction of the laser beam to be output next, that is, the projection direction (x, y) (FIG. 2 ( Enter a)). Then, the laser output calculation unit 102 specifies the output intensity of the laser beam to be output next with reference to the light output intensity information specified by the projection azimuth information.
For example, if the projection direction of the laser beam to be output next is (x0, y2), the laser output calculation unit 102 acquires the projection direction (x0, y2) from the laser projection control unit 110 as projection direction information. . Then, the laser output calculation unit 102 specifies the output intensity information A02 corresponding to the projection direction (x0, y2) with reference to the position intensity correspondence table 12.
When the output intensity of the laser beam to be output next is specified as A02, the laser output calculation unit 102 outputs the output intensity information A02 to the conversion circuit 101. The conversion circuit 101 converts the output intensity information A02, which is a digital signal, into an analog signal and outputs the analog signal to the laser light source 100. The laser light source 100 outputs a laser beam having an output intensity corresponding to the output intensity information A02 based on the analog signal input from the conversion circuit 101.

  As described above, the laser output calculation unit 102 performs control to change the output intensity of the laser light while specifying it for each projection direction.

FIG. 4 is a first diagram illustrating the function of the output intensity update unit according to the first embodiment.
As described above, the output intensity update unit 122 updates the value of the output intensity information stored in the position intensity correspondence table 12 based on the light amount information input via the optical sensor 120 (and the conversion circuit 121). Hereinafter, the function of the output intensity update unit 122 will be specifically described.
First, FIG. 4A shows the stored contents of the position intensity correspondence table 12 at the start of the three-dimensional measurement for the inspection object X. As shown in FIG. 4A, output intensity information Aref, which is a predetermined output intensity, is stored in the projection direction table 111 at the start of measurement for all the projection directions of laser light. That is, during the first scan, the laser output calculation unit 102 outputs laser light with the same output intensity Aref for all projection directions.

  Next, as will be described later with reference to a flowchart (FIG. 6), the laser projection control unit 110 executes a first scanning process. Here, for example, as shown in FIG. 4B1, first, as the first scanning process, the laser projection control unit 110 converts the projection direction (x0, y0) to the projection direction (x0, ym) (m is 1 or more). For one line up to (integer). At this time, the laser output calculation unit 102 outputs the output intensity information corresponding to the projection azimuth (x0, y0) to the projection azimuth (x0, ym) stored in the projection azimuth table 111 (in broken lines in FIG. 4A). The output intensity of the laser light is specified based on the enclosing portion. At the time of the first scan, the output intensity information for all the projection directions is a predetermined value “Aref”, so that the laser output calculation unit 102 always maintains the output intensity at a constant value Aref for the first time. The scanning process is performed.

  Next, a part of the laser reflected light is emitted every time the optical sensor 120 emits the laser light to the projection azimuth (x0, y0), (x0, y1),..., (X0, ym) in the first scanning process. Is received and the amount of light is acquired. At this time, the distribution of the amount of light received by the optical sensor 120 in the first scanning process (scanning for one line in the projection directions (x0, y0) to (x0, ym)) is as shown in the graph of FIG. Suppose that According to the graph shown in FIG. 4 (b2), the optical sensor 120 is located near the center of the scanning for one line and the projection direction (x0, yi) (i is an integer of 0 <i <m (m ≧ 2)). It can be seen that the amount of light received by is increasing. That is, it is assumed that the reflectance is locally high near the portion corresponding to the projection direction (x0, yi) on the surface of the inspection object X.

The output intensity update unit 122 temporarily stores light amount information, which is information indicating the distribution of the light amount acquired from the optical sensor 120 (FIG. 4 (b2)). Then, the output intensity update unit 122 performs a process of updating the output intensity information stored in the projection direction table 111 based on the acquired light amount information.
Specifically, as shown in FIG. 4C, the output intensity update unit 122 outputs the output intensity information (FIG. 4) corresponding to the projection directions (x0, y0) to (x0, ym) at the first scanning. (C) is updated to new output intensity information A00, A01,..., A0m. The laser output calculation unit 102 refers to the newly updated output intensity information at the second scanning.

Here, an example of a specific method in which the output intensity update unit 122 determines new output intensity information A00, A01,..., A0m will be described. For example, the output intensity updating unit 122 sets the output intensity information A00, A01,..., A0m to be newly updated at the projection direction (x0, y0), (x0, y1), ... calculated and determined so as to have a relationship inversely proportional to the amount of light acquired by the projection of laser light onto (x0, ym).
In this case, the laser projection control unit 110, for example, at the time of the first scan, the projection direction (the light amount of the laser reflected light received by the optical sensor 120 is relatively smaller than the other projection directions ( The output intensity information A00, A0m corresponding to (x0, y0), (x0, ym) is set to a large value according to the amount of light. Similarly, the output intensity update unit 122 sets the output intensity information A0i corresponding to the projection direction (x0, yi) in which the light amount received by the optical sensor 120 is relatively large to a small value according to the light amount.

FIG. 5 is a second diagram illustrating the function of the output intensity update unit according to the first embodiment.
As shown in FIG. 5A (FIG. 4C), the output intensity update unit 122 is based on the light intensity information (FIG. 4B2) acquired during the first scan. 12 output intensity information is updated.
When this update process is performed, the laser projection control unit 110 then performs another scanning process for the positions (projection azimuth (x0, y0) to (x0, ym)) at which the laser light is projected during the first scan. Perform (second scanning process).
At this time, the laser output calculation unit 102 receives the projection azimuth information corresponding to the second scanning process from the laser projection control unit 110 and stores the projection azimuths (x0, y0) to (x0, y0) to ( The output intensity of the laser light is specified with reference to the output intensity information corresponding to (x0, ym) (the part surrounded by the broken line in FIG. 5A).

  While the laser output calculation unit 102 adjusts the output intensity of the laser beam based on the projection direction table 111 shown in FIG. 5A, the laser projection control unit 110 performs the second scanning process (FIG. 5B1). reference). In the second scanning process, the laser output calculation unit 102 sets a relatively high output intensity A00 for the laser light toward the projection azimuth (x0, y0). Similarly, the laser output calculation unit 102 sets a relatively small output intensity A0i for the laser light toward the projection azimuth (x0, yi). Further, the laser output calculation unit 102 sets a relatively high output intensity A0m for the laser light toward the projection direction (x0, ym). As described above, the laser output calculation unit 102 dynamically adjusts the output intensity during the second scanning.

As a result, the distribution of the amount of light received by the optical sensor 120 during the second scan is as shown by the solid line graph in FIG. That is, the laser output calculation unit 102 sets the output intensity of the laser beam at the second scanning to a portion where the light amount received at the first scanning is small (projection azimuth (x0, y0), (x0, ym), etc.) ) Is increased, and adjustment is performed to reduce the portion (projection azimuth (x0, yi)) where the amount of light received during the first scan is large. As a result, as shown in FIG. 5B2, the amount of light received by the optical sensor 120 during the second scan is equalized as a whole. Therefore, the laser output calculation unit 102 specifies the output intensity of the laser light for each projection direction so that the amount of light acquired by the optical sensor 120 falls within a predetermined range (range Q).
Note that the graph shown by the solid line in FIG. 5B2 shows the distribution of the amount of light received by the optical sensor 120 during the second scanning, but the amount of reflected laser light taken in by the image sensor 22 at the same time is equally equal. It becomes a thing.

FIG. 6 is a diagram illustrating a processing flow of the inspection apparatus main body according to the first embodiment.
Next, the processing flow of the inspection apparatus main body 10 according to the present embodiment will be described step by step with reference to FIG.

  In the stage before starting the measurement, the projection direction table 111 stores in advance projection direction information indicating the projection direction of the laser light corresponding to a certain image acquisition region P, and the position intensity correspondence table 12 further includes It is assumed that the initial value (Aref) is stored in the output intensity information.

  First, the laser projection control unit 110 executes a first scanning process (step S01). Specifically, the laser projection control unit 110 specifies the projection direction corresponding to the first scanning process while referring to the count number input from the counter 112 and the projection direction information stored in the projection direction table 111. To do. And the control signal to the MEMS mirror 21 according to the specified projection direction is output. On the other hand, the laser output calculation unit 102 performs a process of specifying the output intensity of the laser light while referring to the output intensity information stored in the projection direction table 111 in accordance with the scanning process of the laser projection control unit 110 (Step S1). In S01, the output intensity of the laser light is always Aref).

  Next, the output intensity update unit 122 acquires and temporarily stores light amount information indicating the amount of light received by the optical sensor 120 in the first scanning process in step 01 (step S02). Here, the output intensity update unit 122 acquires light amount information for each projection direction (x, y) in the first scanning process.

  Next, the output intensity update unit 122 performs a process of updating the output intensity information stored in the position intensity correspondence table 12 based on the light amount information acquired in the first scanning process (step S03). Here, as described above, the output intensity update unit 122 acquires the output intensity information A00, A01,... To be newly updated by the projection of the laser light in each projection direction at the first scanning. It is calculated and determined so as to have an inversely proportional relationship with the amount of light.

When the update of the position intensity correspondence table 12 in step S03 is completed, the laser projection control unit 110 immediately performs the second scanning process (step S04). The laser projection control unit 110 specifies again the projection direction corresponding to the first scanning process while referring to the count number input from the counter 112 and the projection direction information stored in the projection direction table 111. And the control signal to the MEMS mirror 21 according to the specified projection direction is output. On the other hand, the laser output calculation unit 102 refers to the output intensity information newly updated in step S03 of the projection direction table 111 in accordance with the second scanning process of the laser projection control unit 110, and outputs the laser beam output intensity. Process to identify.
As a result, during the second scan, the amount of laser reflected light captured by the image sensor 22 is equalized.

The image sensor 22 captures the laser reflected light at the time of the second scanning and acquires image data (step S05).
When the acquisition of the image data for one line is completed in step S05, the laser projection control unit 110 determines whether or not to scan for the next one line (step S06). Specifically, the laser projection control unit 110 refers to the projection direction table 111 and determines based on whether or not there is projection direction information for the next one line.
Here, when scanning for the next one line is performed (step S06: YES), the inspection apparatus body 10 executes the processes of steps S01 to S05 again for the next one line. For example, when the scanning processing of the projection orientations (x0, y0) to (x0, ym) is completed in steps S01 to S05, the laser projection control unit 110 outputs the projection orientation (x1, The first scanning process is started for y0) to (x1, ym).
On the other hand, when the scanning process for the entire image acquisition region P is completed and scanning for the next one line is not performed (step S06: NO), the inspection apparatus main body unit 10 ends the measurement.

According to the processing flow described above, the inspection apparatus main body 10 detects the light intensity distribution of the laser reflected light during the first scan, and then sets the output intensity of the laser light so that the light intensity distribution is equalized. The scanning process is performed again (second time) while adjusting. Then, in the inspection apparatus main body 10, the amount of laser reflected light captured by the image sensor 22 during the second scan falls within a predetermined range Q and is equalized.
Therefore, according to the inspection apparatus 1, due to the influence of the surface material of the inspection object X, the laser reflected light becomes extremely large in the scanning process of the laser light and the reflected disturbance light is generated. It is possible to avoid a situation where the surface of the inspection object X becomes small and the surface of the inspection object X cannot be observed, and to realize three-dimensional measurement with higher accuracy.

  As mentioned above, according to the inspection apparatus 1 which concerns on 1st Embodiment, the surface shape of a test target object can be grasped | ascertained more correctly.

In addition, the aspect of the test | inspection apparatus 1 mentioned above is not limited to said content, It can deform | transform as follows.
For example, in the above description, when the output intensity update unit 122 updates the output intensity information in the position intensity correspondence table 12 (FIG. 6, step S03), the output intensity information corresponding to each projection direction at the time of the first scan. For all of the above, the calculation is performed and updated so as to have a relationship inversely proportional to the amount of light acquired at the time of the first scanning.
However, the inspection apparatus 1 according to the modification of the present embodiment sets, for example, a predetermined upper limit value Rmax and lower limit value Rmin for the amount of light received by the optical sensor 120, and the amount of light received during the first scan. However, the output intensity information A00, A01,... May be calculated and updated only for the output intensity corresponding to the projection direction that is not within the range between the upper limit value Rmax and the lower limit value Rmin. In this case, only one of the upper limit value Rmax and the lower limit value Rmin may be set according to the surface material of the inspection object.

In the above description, the laser projection control unit 110 executes a process flow (FIG. 6, steps S01 to S06) in which the first scanning process and the second scanning process are repeated for each scanning of one line. Explained.
However, the inspection apparatus 1 according to another modification of the present embodiment performs, for example, the first scanning process for all of the image acquisition areas P, and then performs the second scanning process for all of the image acquisition areas P. A processing flow may be executed. Specifically, the output intensity update unit 122 acquires and stores light amount information for the entire image acquisition region P during the first scan (FIG. 6, step S02), and based on this, the position intensity correspondence table 12 is performed to update all the output intensity information stored in 12 (FIG. 6, step S03). Then, the laser projection control unit 110 performs the second scanning process for all the image acquisition regions P (step S04 in FIG. 6).

<Second Embodiment>
Next, an inspection apparatus according to the second embodiment will be described with reference to the drawings.
FIG. 7 is a diagram illustrating a functional configuration of the inspection apparatus according to the second embodiment.
In this figure, the same functional configuration as that of the first embodiment is denoted by the same reference numeral, and the description thereof is omitted.

As shown in FIG. 7, the inspection apparatus 1 according to the present embodiment further includes an image acquisition unit 123 in addition to the functional configuration of the first embodiment.
The image acquisition unit 123 is different from the image (first image) acquired by the imaging element 22 for the same inspection object X based on the light amount (light amount information) acquired by the optical sensor 120 during the first scanning. A second image taken from an angle is acquired.

Here, in the case of the inspection apparatus 1 according to the first embodiment, the light intensity information acquired via the optical sensor 120 during the first scan is input only by the output intensity update unit 122, and the position intensity correspondence table 12 Used for update processing.
On the other hand, in the inspection apparatus 1 according to the second embodiment, the light amount information acquired by the optical sensor 120 during the first scan is added to the output intensity update unit 122, and further, the image acquisition unit 123 inputs the light amount information. Is temporarily stored. Then, when the laser projection control unit 110 completes the scanning process for the entire range of the image acquisition region P, the image acquisition unit 123 combines the total light amount information acquired at the first scanning for each line. Processing to form second image data is performed.

  Here, as shown in FIG. 7, in the measurement head 20 according to the present embodiment, the lens LB for guiding the laser reflected light to the optical sensor 120 of the inspection apparatus main body 10 is a position different from the position of the imaging element 22. Arranged. Therefore, the second image data formed based on the reflected light input to the optical sensor 120 via the lens LB and the optical fiber FB is image data (first image) acquired by the imaging element 22 by the imaging process. Image data taken from an angle different from (data).

  As described above, according to the inspection apparatus 1 according to the present embodiment, the image sensor 22 acquires image data with high imaging accuracy during the second scanning, and further, during the first scanning, Through the optical sensor 120 (photodiode), it becomes possible to acquire the second image data captured from an angle different from the image data acquired by the image sensor 22.

FIG. 8 is a diagram illustrating a processing flow of the inspection apparatus main body according to the second embodiment.
In the processing flow shown in this figure, the same processing contents as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  The image acquisition unit 123 according to the present embodiment temporarily stores the same light amount information as the light amount information acquired by the output intensity update unit 122 via the optical sensor 120 in step S02 after the process of step S01. (Step S07). Each time the next one-line scanning process is executed in the determination process of step S06, the image acquisition unit 123 accumulates light amount information corresponding to the one line in step S07.

Then, when the scanning of the entire range of the image acquisition region P is completed (step S06: NO), the light quantity information for the entire range of the image acquisition region P acquired by the process of step S07 is combined into one. Processing for forming image data (second image data) is performed (step S08). The image acquisition unit 123 stores the formed second image data in the image memory 13.
Through the processing flow as described above, the inspection apparatus 1 according to the present embodiment uses the image data acquired by the image sensor 22 based on the light amount information acquired through the optical sensor 120 (hereinafter referred to as first image data). ) Can be acquired from a different angle.

The second image data acquired in this way is captured from an angle different from that of the first image data, and therefore includes information indicating a surface shape different from that of the first image data. There is. Then, for example, the operator of the inspection apparatus 1 uses the second image for a portion in which the surface shape is unclear in the first image data due to large unevenness on the surface of the inspection object X. By newly referring to the data, it becomes possible to grasp the surface shape of the unclear part. In addition, the operator can also use it as a determination material when performing the measurement process again by changing the projection angle or projection range of the laser light while referring to the surface shape captured in the second image data.
In addition, the inspection apparatus 1 according to the present embodiment may combine the first image data and the second image data and perform a calculation process to reproduce the three-dimensional shape while compensating for each other data missing portion. .
Furthermore, the inspection apparatus 1 according to the present embodiment uses the second image data acquired by the image acquisition unit 123 via the optical sensor 120 as a backup even if the inspection apparatus 1 fails due to a poor environment. Is also possible.

  As described above, according to the inspection apparatus according to the second embodiment, in addition to the first embodiment, the amount of light acquired from the photosensor (photodiode) at the time of the first scanning process and the first scanning. Information can be used more effectively.

Note that the inspection apparatus according to the second embodiment is not limited to the above-described aspect.
For example, according to FIG. 8, the inspection apparatus 1 stores light quantity information based on the first scanning process (step S01) (step S07), and then the first image data based on the second scanning process. Is performed (steps S03 to S05).
However, the inspection apparatus 1 according to another modified example of the present embodiment is different from the processing flow according to the first embodiment, for example, based on only one scanning process, for example, the image acquisition unit 123 via the optical sensor 120. While acquiring the second image data, the image sensor 22 may perform a process of acquiring the first image data. Specifically, in FIG. 8, based on the first scanning process (step S01), the light amount information is stored by the optical sensor 120 and the image acquisition unit 123 (step S07), and the first image data by the imaging element 22 is stored. Only acquisition (step S05) is performed.
By doing so, the laser light from which the first image data and the second image data are acquired becomes the same, and both image data are acquired at the same timing. Therefore, the consistency between the first image data and the second image data can be improved, and a more accurate three-dimensional shape can be acquired.
Further, in this case, for example, instead of the image sensor 22 which is a CCD camera, the first image data is obtained using another optical sensor made of a photodiode at a location where the image sensor 22 is arranged. Also good.
By doing in this way, the structure of the whole apparatus is simplified rather than the case where the image pick-up element 22 is used, and further size reduction is attained.

FIG. 9 is a schematic diagram illustrating an example of the overall configuration of the inspection apparatus according to the first embodiment and the second embodiment.
As shown in FIG. 9, in the inspection apparatus 1 according to the above-described embodiment, the inspection apparatus main body 10 and the measurement head 20 are connected by a wired cable C. The wired cable C is a communication cable in which the optical fibers FA and FB shown in FIG. 1 or FIG. 7 and various signal lines are bundled together. The MEMS mirror 21, the image sensor 22, and the like shown in FIG. 1 or FIG. 7 are configured in a single housing as the measurement head 20.
With such a configuration, as shown in FIG. 9, the operator of the inspection apparatus 1 inserts only the measurement head 20 and the wired cable C into the cylindrical narrow portion, and the tertiary in the region ahead of the narrow portion. Original measurements can be performed.
Further, the inspection apparatus 1 according to the first embodiment and the second embodiment may further include a mechanism that can move the tip of the wired cable C by a predetermined remote operation in addition to the above-described configuration. By doing in this way, the operator of the inspection apparatus 1 can acquire image data of a desired region by remote operation even when the measuring head 20 is inserted into a deeper narrow portion.

<Third Embodiment>
Next, an inspection apparatus according to a third embodiment will be described with reference to the drawings.
FIG. 10 is a schematic diagram illustrating an example of the overall configuration of the inspection apparatus according to the third embodiment.
In this figure, the same functional configurations as those in the first embodiment and the second embodiment are denoted by the same reference numerals and description thereof is omitted.

As shown in FIG. 10, in the inspection apparatus 1 according to the present embodiment, the measurement head 20 has two housings, a laser light projection unit 20A (first housing), an imaging unit 20B (second housing), Have been separated. The laser light projection unit 20A is connected to the inspection apparatus main body 10 via a wired cable CA, and similarly the imaging unit 20B is connected to the inspection apparatus main body 10 via a wired cable CB.
The laser light projection unit 20 </ b> A includes a MEMS mirror 21 inside, and forms a housing having a laser light projection opening in the measurement head 20. Although not shown in FIG. 10, the laser light projection unit 20 </ b> A also includes a lens LB that sends the laser reflected light to the optical sensor 120.
On the other hand, the imaging unit 20B is a housing that includes an imaging element 22 therein and constitutes a part of the measurement head 20 that captures laser reflected light and acquires image data. The imaging unit 20B includes a side image sensor 23 on the side surface with respect to the longitudinal direction of the housing in addition to the image sensor 22.

  Further, the inspection apparatus main body 10 of the inspection apparatus 1 according to the present embodiment has a relative position specifying unit 14 in addition to the functional configuration of the first embodiment (FIG. 1) or the second embodiment (FIG. 7). It has. The functional configuration of the relative position specifying unit 14 will be described later.

The inspection apparatus 1 according to the present embodiment reduces the size of each of the two casings (laser light projection unit 20A and imaging unit 20B) constituting the measurement head 20 by using the double-headed measurement head as described above. be able to. Therefore, according to the inspection apparatus 1 according to the present embodiment, as shown in FIG. 10, the measuring head 20 can be inserted into a narrower narrow portion.
However, in order to reproduce the three-dimensional shape of the surface of the inspection object X based on the image data acquired by the image sensor 22, it is necessary to use a surveying technique such as a triangulation principle. For this purpose, it is necessary to grasp the relative positional relationship between the laser light emission port and the position where the laser reflected light is captured (imaging element 22). Therefore, the inspection apparatus 1 according to the present embodiment further includes the following functional configuration.

FIG. 11 is a diagram showing in detail the structure of the measurement head according to the third embodiment.
As shown in FIG. 11, the laser light projection unit 20 </ b> A has a plurality of markers 200 periodically written along the circumferential direction on the side surface in the longitudinal direction.
On the other hand, an imaging element 22 is provided at the longitudinal end of the imaging unit 20B. Similar to the first and second embodiments, the image sensor 22 (first image sensor) captures the laser reflected light of the laser light projected by the laser light projection unit 20A, thereby inspecting the object X. The image data obtained by imaging the surface of is acquired.
The imaging unit 20 </ b> B includes a side image sensor 23 disposed on the side surface as a second image sensor different from the image sensor 22. The side image sensor 23 is provided in the same housing as the image sensor 22, so that the relative positional relationship with the image sensor 22 is fixed. The side image sensor 23 is arranged on the side surface side thereof, and acquires image data of a region different from that of the image sensor 22.

  The side image pickup device 23 is an image pickup device (for example, a CCD camera equivalent to the image pickup device 22) that picks up an image of the arrangement pattern of the markers 200 marked on the side surface of the laser light projection unit 20A and stores it as image data. The side image sensor 23 outputs image data (hereinafter, relative position specifying image data) obtained by imaging the arrangement pattern of the plurality of markers 200 to the relative position specifying unit 14.

FIG. 12 is a diagram illustrating the function of the relative position specifying unit according to the third embodiment.
FIGS. 12A, 12 </ b> B, and 12 </ b> C show examples of relative position specifying image data acquired by the side imaging element 23.
Next, the function of the relative position specifying unit 14 will be described with reference to FIG.

  The relative position specifying unit 14 specifies the relative positional relationship between the laser light projection unit 20 </ b> A and the imaging unit 20 </ b> B based on the relative position specifying image data input from the side imaging device 23. In this case, even if the marker 200 is imaged from any direction in the circumferential direction, the circumferential direction of the casing of the laser light projection unit 20A so that any marker 200 is acquired in the relative position specifying image data. For example, a plurality of the circumferences are arranged at intervals dividing the circumference into eight equal parts.

As shown in FIG. 11, the markers 200 periodically arranged along the circumferential direction are described with different patterns (or colors, shapes, etc.) for each circumferential direction. Therefore, the relative position specifying unit 14 determines whether the casing of the laser light projection unit 20A is in the circumferential direction from the combination of the pattern of the marker 200 captured in the relative position specifying image data with respect to the imaging unit 20B. It can be specified whether it is facing the direction of (2) (a).
Specifically, the relative position specifying unit 14 has a correspondence relationship between an arrangement pattern having a different pattern for each circumferential direction of the marker 200 and information indicating a rotational position of the laser light projection unit 20A in the circumferential direction. A storage table stored in advance is provided. And the relative position specific | specification part 14 extracts the arrangement pattern of the pattern of the marker 200 imaged to the relative position specifying image data, and refers to the said memory | storage table, The circumferential direction of the housing | casing of the laser beam projection part 20A Specify the rotational position for.

As shown in FIG. 11, a plurality of markers 200 are arranged with the same pattern (or color, shape, etc.) along the longitudinal direction of the casing of the laser light projection unit 20A. Therefore, the relative position specifying unit 14 is a direction in which the plurality of markers 200 having the same pattern are periodically arranged in the relative position specifying image data, or the degree of radial expansion or narrowing along the longitudinal direction. By specifying the position of the laser light projection unit 20A, the attitude of the housing with respect to the imaging unit 20B can be specified (FIGS. 12B and 12C).
For example, the relative position specifying unit 14 generates a plurality of straight lines passing through the plurality of markers 200 of the same pattern copied in the relative position specifying image data, the direction of the straight line in the relative position specifying image data, and Then, a process of specifying the degree of radial expansion or narrowing of a plurality of straight lines is performed.

Further, the relative position specifying unit 14 specifies the separation distance between the imaging unit 20B and the laser light projection unit 20A by acquiring the size and interval width of the plurality of markers 200 periodically arranged in the circumferential direction and the longitudinal direction. (FIG. 12D).
Also in this case, for example, the relative position specifying unit 14 includes information indicating the size of the marker 200 or the interval between the markers 200 captured in the relative position specifying image data and the separation distance from the housing of the laser light projection unit 20A. Are stored in advance.

  As described above, the relative position specifying unit 14 specifies the relative position between the imaging unit 20B and the laser light projection unit 20A based on the arrangement pattern of the markers 200 captured in the relative position specifying image data.

  By doing in this way, the inspection apparatus 1 according to the present embodiment, when the measuring head 20 is a double-headed type and the individual casings are miniaturized, the two casings (the laser light projection unit 20A and the imaging unit 20B). ), That is, the relative position relationship between the laser projection port and the portion that captures the laser reflected light (image sensor 22).

  As described above, according to the inspection apparatus according to the third embodiment, the miniaturization can be realized by using the double-headed measurement head, and the surface shape in a narrower region can be measured.

  In addition, although the inspection apparatus according to the third embodiment described above has shown an example in which a plurality of the markers 200 are described in a circular spot shape, as long as the above-described function of the marker 200 can be exhibited, The marker 200 may have any shape, pattern, color, or the like.

  Note that the inspection apparatus main body 10 according to each of the above-described embodiments has a computer system therein. Each process of the inspection apparatus main body 10 described above is stored in a computer-readable recording medium in the form of a program, and the above process is performed by the computer reading and executing the program. Here, the computer-readable recording medium refers to a magnetic disk, a magneto-optical disk, a CD-ROM (Compact Disk Read Only Memory), a semiconductor memory, or the like. Alternatively, the computer program may be distributed to the computer via a communication line, and the computer that has received the distribution may execute the program.

  As mentioned above, although some embodiment of this invention was described, these embodiment is shown as an example and is not intending limiting the range of invention. These embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the invention described in the claims and equivalents thereof, as long as they are included in the scope and gist of the invention.

DESCRIPTION OF SYMBOLS 1 ... Inspection apparatus 10 ... Measuring device main-body part 100 ... Laser light source 101 ... Conversion circuit 102 ... Laser output calculation part 110 ... Laser projection control part 111 ... Projection direction table 112 ... Counter 12 ... Position intensity correspondence table 120 ... Optical sensor 121 ... Conversion circuit 122 ... Output intensity update unit 123 ... Image acquisition unit 13 ... Image memory 14 ... Relative position specifying unit 20 ... measuring head 21 ... MEMS mirror 22 ... imaging device

Claims (6)

A laser light source for emitting laser light;
A laser projection control unit that performs control to scan the laser light on the surface of the inspection object while specifying the projection direction of the laser light;
An image sensor that captures the reflected light of the laser light reflected on the surface of the inspection object, and acquires an image;
An optical sensor for acquiring the amount of the reflected light;
A laser output calculation unit for specifying an output intensity of the laser light emitted from the laser light source;
A position intensity correspondence table in which output intensity information indicating the output intensity of the laser beam is stored in association with each projection direction;
An output intensity update unit that updates the output intensity information stored in the position intensity correspondence table;
With
The laser output calculator is
The output intensity information stored in the position intensity correspondence table is updated based on the amount of light acquired by the optical sensor at the first scanning of the laser beam, and at the second scanning of the laser beam. The output intensity of the laser light is specified for each projection direction while referring to the position intensity correspondence table so that the amount of light acquired by the optical sensor falls within a predetermined range. Inspection device. The output intensity update unit
For each projection azimuth, the output intensity corresponding to each projection azimuth at the time of the second scan has an inversely proportional relationship with the light quantity acquired for each projection azimuth at the time of the first scan. The inspection apparatus according to claim 1 , wherein the output intensity information is updated. Image acquisition for acquiring a second image captured from an angle different from the image acquired by the imaging device for the same inspection object based on the light quantity acquired by the optical sensor during the first scanning. And
The inspection apparatus according to claim 1 , further comprising: Two housings separated from each other, comprising: a first housing having a projection port for the laser light; and a second housing having the imaging element that takes in the reflected light.
A second imaging element that is arranged in the second housing while a relative positional relationship with the imaging element is fixed, and that acquires image data of a region different from the imaging element;
Based on an image for relative position specification obtained by the second image pickup device and picked up by a marker recorded on the surface of the first housing, the image pickup device and the projection opening of the laser light are relative to each other. A relative position specifying part for specifying a correct positional relationship;
The inspection apparatus according to any one of claims 1 to 3 , further comprising: The laser light source emits laser light,
The laser projection control unit performs control to scan the laser light on the surface of the inspection object while specifying the projection direction of the laser light,
An imaging device captures the reflected light of the laser beam reflected on the surface of the inspection object, and acquires an image;
An optical sensor acquires the amount of the reflected light,
The output of the laser light stored in the position intensity correspondence table in association with each projection direction based on the amount of light acquired by the optical sensor at the first scanning of the laser light by the laser output calculation unit While updating the output intensity information indicating the intensity, and referring to the position intensity correspondence table so that the light quantity acquired by the optical sensor during the second scanning of the laser light is within a predetermined range , An inspection method for specifying the output intensity of the laser beam emitted from the laser light source for each projection direction. A laser light source that emits laser light; an imaging element that captures reflected light of the laser light reflected on the surface of the inspection object; and an optical sensor that acquires the amount of reflected light. The computer of the inspection device,
Laser projection control means for performing control to scan the laser light on the surface of the inspection object while specifying the projection direction of the laser light;
Output intensity information indicating the output intensity of the laser light stored in the position intensity correspondence table in association with each projection direction based on the light quantity acquired by the optical sensor at the first scanning of the laser light. For each projection azimuth while referring to the position intensity correspondence table so that the light quantity acquired by the optical sensor is within a predetermined range during the second scanning of the laser light. Laser output intensity specifying means for specifying the output intensity of the laser beam emitted from the laser light source;
A program characterized by functioning as

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