JP6225369B2 - Gas detection unit - Google Patents

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JP6225369B2
JP6225369B2 JP2013110157A JP2013110157A JP6225369B2 JP 6225369 B2 JP6225369 B2 JP 6225369B2 JP 2013110157 A JP2013110157 A JP 2013110157A JP 2013110157 A JP2013110157 A JP 2013110157A JP 6225369 B2 JP6225369 B2 JP 6225369B2
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gas
detected
adsorption
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JP2014228485A (en
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吉田 大介
大介 吉田
康城 吉栄
康城 吉栄
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New Cosmos Electric Co Ltd
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Description

本発明は、被検知ガスを検知する検知部を筐体の内部に備えたガス検知ユニットに関する。   The present invention relates to a gas detection unit including a detection unit that detects a gas to be detected inside a casing.

従来、比較的低濃度の試料ガス中の被測定成分を測定する場合、当該被測定成分の濃度を高めるために加熱脱着法(サーマルデソープション)によるガス濃縮処理が行なわれることが多い。加熱脱着法では、まず、被測定成分を主として吸着する吸着剤を充填した濃縮管に試料ガスを流通させて、該試料ガスに含まれる被測定成分を吸着剤に吸着させる。そして、充分に被測定成分が吸着された後に、該濃縮管にキャリアガスを流しつつ吸着剤の温度を急速に上昇させる。これにより、吸着されていた被測定成分が短時間の間に脱離し、高濃度で下流のガスセンサに導入することができる。   Conventionally, when measuring a component to be measured in a sample gas having a relatively low concentration, gas concentration treatment by a thermal desorption method is often performed to increase the concentration of the component to be measured. In the thermal desorption method, first, a sample gas is circulated through a concentration tube filled with an adsorbent that mainly adsorbs a component to be measured, and the component to be measured contained in the sample gas is adsorbed to the adsorbent. Then, after the component to be measured is sufficiently adsorbed, the temperature of the adsorbent is rapidly raised while flowing the carrier gas through the concentration tube. As a result, the adsorbed component to be measured is desorbed in a short time and can be introduced into the downstream gas sensor at a high concentration.

特許文献1には、捕集手段に試料ガスを流通させて該捕集手段に試料成分を吸着させ、その後に流路切替手段を切り替えて該捕集手段に吸着されている試料成分を不活性なガス中に脱離させて、酸素又は酸素を含むガスを混入した後に、におい検出手段に導入するにおい測定装置が記載されている。   In Patent Document 1, a sample gas is circulated through a collection means so that the sample component is adsorbed on the collection means, and then the flow path switching means is switched to inactivate the sample component adsorbed on the collection means. An odor measuring device is described which is introduced into an odor detecting means after being desorbed into a gas and mixed with oxygen or a gas containing oxygen.

また、特許文献2には、排ガス処理装置に使用される吸着濃縮装置として、吸着手段を、ガスを吸着するための吸着部と吸着したガスを脱着する脱着部とで構成し、脱着部で吸着された有機溶剤を脱着するための脱着用気体を供給する脱着用気体供給手段を備え、吸着部と脱着部を周期的に切替え動作する吸着濃縮装置が記載されている。この装置では、吸着手段の入口濃度を測定する入口濃度測定手段と当該入口濃度測定手段の信号を受け、吸脱着周期を調整する吸脱着周期調整手段を備えている。   Further, in Patent Document 2, as an adsorption concentrator used in an exhaust gas treatment apparatus, an adsorption means is constituted by an adsorption part for adsorbing a gas and a desorption part for desorbing the adsorbed gas, and is adsorbed by the desorption part. There is described an adsorption concentrating apparatus that includes a desorption gas supply means for supplying a desorption gas for desorbing the organic solvent, and periodically switches between the adsorption section and the desorption section. This apparatus includes an inlet concentration measuring means for measuring the inlet concentration of the adsorption means and an adsorption / desorption cycle adjusting means for adjusting the adsorption / desorption cycle in response to a signal from the inlet concentration measuring means.

特開平11−118744号公報JP-A-11-118744 特開2006−247595号公報JP 2006-247595 A

特許文献1のにおい測定装置では、不活性ガスを供給するガス供給手段や、酸素ガスを混入する混入手段などを必要としていた。また、特許文献2の吸着濃縮装置における吸着手段は、吸着体を充填した吸着搭で構成されていた。このように特許文献1,2の装置では大掛かりな構成となるため、例えば対象となる被検知ガスが存在する現場において、ハンディタイプの小規模なガス検知器などには適用できなかった。   The odor measuring apparatus of Patent Document 1 requires a gas supply unit that supplies an inert gas, a mixing unit that mixes oxygen gas, and the like. Moreover, the adsorption | suction means in the adsorption concentration apparatus of patent document 2 was comprised with the adsorption tower filled with the adsorbent. As described above, since the apparatus of Patent Documents 1 and 2 has a large-scale configuration, it cannot be applied to a handy-type small-sized gas detector or the like, for example, at a site where a target gas to be detected exists.

従って、本発明の目的は、小規模で被検知ガスを濃縮して検知できるガス検知ユニットを提供することにある。   Accordingly, an object of the present invention is to provide a gas detection unit that can detect and concentrate a detection gas on a small scale.

上記目的を達成するための本発明に係るガス検知ユニットの特徴構成は、耐熱性基板の一方の面に、温度変化によって被検知ガスが吸着脱離する吸着手段、および、他方の面に加熱手段を備えている吸着部と、前記吸着部より脱離した被検知ガスを検知する検知部と、を筐体の内部に備え、前記吸着部の上流において、被検知ガスに含まれる被測定成分が前記吸着部に吸着する際に被検知ガスが流通する吸着流路と、被検知ガスに含まれる被測定成分が前記吸着部より脱離する際に被検知ガスが流通する脱離流路と、を備え、これら流路を切り替え可能にしてあり、前記脱離流路に、被検知ガスに含まれる被測定成分を除去する除去手段を備えた点にある。 FEATURES configuration of the gas sensing unit according to the present invention for achieving the above object, heating the one surface of the heat resistant substrate, suction means for the gas to be detected are desorbed adsorbed by temperature change, and, on the other side A measurement unit included in the detected gas upstream of the adsorption unit, and provided with an adsorption unit provided with a means and a detection unit for detecting the detected gas desorbed from the adsorption unit An adsorption channel through which the gas to be detected flows when adsorbed on the adsorption unit, and a desorption channel through which the gas to be detected flows when a component to be measured contained in the gas to be detected is desorbed from the adsorption unit. These flow paths can be switched, and the desorption flow path is provided with a removing means for removing the measured component contained in the detected gas .

本構成では、吸着部に低濃度の被測定成分を含有する被検知ガスを流下させることで、吸着手段に被測定成分を吸着させて濃縮することができる。この状態で加熱手段を発熱させて吸着手段を加熱すると、吸着手段から濃縮された被測定成分を脱離させることができる。このようにして脱離させた濃縮された被測定成分を検知部によって測定することができる。   In this configuration, by allowing a gas to be detected containing a low concentration component to be measured to flow down in the adsorption portion, it is possible to cause the adsorption component to adsorb and concentrate the component to be measured. In this state, when the heating unit is heated to heat the adsorption unit, the concentrated component to be measured can be desorbed from the adsorption unit. The concentrated component to be measured thus desorbed can be measured by the detector.

従って、本構成によれば、吸着部および検知部を、例えばハンディタイプのガス検知器や、天井或いは壁に配設する警報器などの筐体の内部に配設することができるため、小規模な構成で、被検知ガスを濃縮して検知することができる。   Therefore, according to the present configuration, the adsorption unit and the detection unit can be disposed inside a housing such as a handy type gas detector or an alarm device disposed on the ceiling or wall. With a simple configuration, the gas to be detected can be concentrated and detected.

本発明に係るガス検知ユニットは、前記吸着部の上流において、被検知ガスに含まれる被測定成分が前記吸着部に吸着する際に被検知ガスが流通する吸着流路と、被検知ガスに含まれる被測定成分が前記吸着部より脱離する際に被検知ガスが流通する脱離流路と、を備え、これら流路を切り替え可能にしてあり、前記脱離流路に、被検知ガスに含まれる被測定成分を除去する除去手段を備えるGas detection unit according to the present invention, upstream of the suction unit, a suction flow path gas to be detected flows in the measured components contained in gas to be detected is adsorbed to the adsorption unit, the gas to be detected A desorption channel through which a gas to be detected flows when a component to be measured is desorbed from the adsorption unit, and the channels can be switched, and the gas to be detected is disposed in the desorption channel. The removal means which removes the to-be-measured component contained in is provided .

本構成によれば、被検知ガスに含まれる被測定成分を吸着部に吸着させる場合と、被検知ガスに含まれる被測定成分を吸着部より脱離させる場合とにおいて、流路を切り替えることができる。脱離流路を被検知ガスが流下すると、除去手段によって当該被検知ガスに含まれる被測定成分を除去することができる。これにより、加熱して被検知ガスに含まれる被測定成分を脱離させる場合は脱離流路を使用して、吸着部の上流において除去手段によって被検知ガスに含まれる被測定成分を除去できる。従って、本構成では、濃縮前の被検知ガスに含まれる被測定成分の信号が検出されるのを防止できるため、より正確に濃縮した被検知ガスに含まれる被測定成分の濃度を算出することができる。   According to this configuration, the flow path can be switched between when the component to be measured contained in the detected gas is adsorbed by the adsorption unit and when the component to be measured contained in the detected gas is desorbed from the adsorption unit. it can. When the gas to be detected flows down the desorption channel, the component to be measured contained in the gas to be detected can be removed by the removing means. As a result, when the component to be measured contained in the gas to be detected is desorbed by heating, the component to be measured contained in the gas to be detected can be removed by the removing means upstream of the adsorption portion using the desorption channel. . Therefore, in this configuration, since it is possible to prevent detection of the signal of the measured component contained in the detected gas before concentration, the concentration of the measured component contained in the concentrated detected gas can be calculated more accurately. Can do.

本発明のガス検知ユニットを示す概略図である。It is the schematic which shows the gas detection unit of this invention. 実施例1においてジケトンAのピークを検出したときの結果を示したグラフである。2 is a graph showing results when a peak of diketone A is detected in Example 1. FIG. 実施例2のガス検知ユニットの概略図である。It is the schematic of the gas detection unit of Example 2. FIG. 実施例2(ガス検知ユニットを壁に取り付けるタイプの警報器として使用)における温度および信号の関係を示したグラフである。It is the graph which showed the relationship between the temperature and signal in Example 2 (it uses as a type of alarm device which attaches a gas detection unit to a wall). 実施例3(クリーニング工程を行う場合)における温度および信号の関係を示したグラフである。It is the graph which showed the relationship of the temperature and signal in Example 3 (when performing a cleaning process). 実施例4のガス検知ユニットの概略図である。FIG. 6 is a schematic diagram of a gas detection unit according to a fourth embodiment. 実施例5のガス検知ユニットの概略図である。FIG. 10 is a schematic diagram of a gas detection unit according to a fifth embodiment. 吸着部の別実施例の概略図である(実施例8)。It is the schematic of another Example of an adsorption | suction part (Example 8). 吸着部の別実施例の概略図である(実施例8)。It is the schematic of another Example of an adsorption | suction part (Example 8). 吸着部の別実施例の概略図である(実施例9)。It is the schematic of another Example of an adsorption | suction part (Example 9). 吸着部の別実施例の概略図である(実施例10)。It is the schematic of another Example of an adsorption | suction part (Example 10).

以下、本発明の実施形態を図面に基づいて説明する。
本発明は、被検知ガスを検知する検知部を筐体の内部に備えたガス検知ユニットである。当該ガス検知ユニットは、例えば小型のハンディタイプのガス検知器などが挙げられるが、これに限られるものではない。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The present invention is a gas detection unit including a detection unit that detects a gas to be detected inside a casing. Examples of the gas detection unit include, but are not limited to, a small handy type gas detector.

図1に示したように、本発明のガス検知ユニットXは、耐熱性基板10の一方の面に、温度変化によって被検知ガスが吸着脱離する吸着手段21、および、他方の面に加熱手段22を備えている吸着部20と、当該吸着部20より脱離した被検知ガスを検知する検知部30と、を筐体40の内部に備えている。   As shown in FIG. 1, the gas detection unit X of the present invention has an adsorption means 21 for adsorbing and desorbing a gas to be detected by temperature change on one surface of a heat-resistant substrate 10, and a heating means on the other surface. The housing 40 is provided with an adsorbing unit 20 having 22 and a detecting unit 30 for detecting a gas to be detected desorbed from the adsorbing unit 20.

耐熱性基板10は、耐熱性を有する基板であればよく、例えばセラミックス製、金属製、耐熱樹脂製などの基板を使用することができる。セラミックス製の基板の場合、アルミナ基板や窒化アルミ基板などを使用するとよい。耐熱性基板10の大きさは、吸着量、吸着効率および消費電力といった要素によって決まるが、概ね3mm×3mm×1mm以下が好ましい。ただし、耐熱性基板10の形は必ずしも矩形でなくてよい。   The heat resistant substrate 10 may be any substrate having heat resistance, and for example, a substrate made of ceramic, metal, heat resistant resin, or the like can be used. In the case of a ceramic substrate, an alumina substrate or an aluminum nitride substrate may be used. The size of the heat-resistant substrate 10 is determined by factors such as the amount of adsorption, adsorption efficiency, and power consumption, but is preferably approximately 3 mm × 3 mm × 1 mm or less. However, the shape of the heat resistant substrate 10 is not necessarily rectangular.

吸着手段21は、温度変化によって吸着した気体を吸着脱離することができる態様であれば、どのような手段でも適用できる。具体的には吸着手段21は、使用温度で被検知ガスとの反応性に乏しく、常温において被検知ガスを吸着し、加熱手段22によって加熱することで吸着した被検知ガスを脱離できる態様であればよい。このような吸着手段21としては多孔質固体を使用することができ、例えばシリカ、アルミナ、炭素、金属酸化物などの無機系のものや、合成樹脂など有機系のものが使用できる。   As long as the adsorption | suction means 21 is an aspect which can adsorb / desorb the gas adsorb | sucked by the temperature change, what kind of means is applicable. Specifically, the adsorption means 21 is poor in reactivity with the detected gas at the operating temperature, and is capable of adsorbing the detected gas at room temperature and desorbing the adsorbed detected gas by heating with the heating means 22. I just need it. As such an adsorbing means 21, a porous solid can be used. For example, inorganic materials such as silica, alumina, carbon, and metal oxide, and organic materials such as a synthetic resin can be used.

炭素系の吸着手段21としては、Tenax GR(ジーエルサイエンス株式会社製)やカーボンブラックなどが使用できる。カーボンブラックの表面を酸化させて適度に酸性にすると、アンモニアやアミンといったアルカリ性成分を選択的によく吸着させることが可能である。カーボンブラックに酸性物質を付着させてもよい。カーボンブラック組織の末端をスルホ基等の酸性基で化学的に修飾してもよい。カーボンブラックの表面を適度にアルカリにすると、有機酸やメルカプタンといった酸性成分を選択的によく吸着させることが可能である。カーボンブラックにアルカリ物質を付着させてもよい。カーボンブラック組織の末端をアミノ基等のアルカリ性基で化学的に修飾してもよい。   As the carbon-based adsorption means 21, Tenax GR (manufactured by GL Science Co., Ltd.) or carbon black can be used. When the surface of carbon black is oxidized to be moderately acidic, alkaline components such as ammonia and amine can be selectively adsorbed well. An acidic substance may be attached to the carbon black. The terminal of the carbon black structure may be chemically modified with an acidic group such as a sulfo group. If the surface of the carbon black is made moderately alkaline, acidic components such as organic acids and mercaptans can be selectively adsorbed well. An alkaline substance may be attached to the carbon black. The terminal of the carbon black structure may be chemically modified with an alkaline group such as an amino group.

吸着手段21の厚みは、吸着量および消費電力といった要素によって適宜設定することが可能であるが、概ね20〜300μmが好ましい。   The thickness of the suction means 21 can be appropriately set depending on factors such as the amount of suction and power consumption, but is preferably approximately 20 to 300 μm.

加熱手段22は、耐熱性基板10に配設できる態様であればよく、例えば白金薄膜をパターニングしたヒータとすることができるが、これに限定されるものではない。加熱手段22はその温度制御のため、ペルチェ素子と連結してもよい。
加熱手段22による加熱温度は、吸着手段21の変質を防ぐために、有機ガスないし有機吸着剤使用の場合400℃以下、無機ガスおよび無機吸着剤使用の場合500℃以下、とするのがよい。
The heating means 22 may be an embodiment that can be disposed on the heat-resistant substrate 10. For example, the heater 22 may be a heater in which a platinum thin film is patterned, but is not limited thereto. The heating means 22 may be connected to a Peltier element for temperature control.
The heating temperature by the heating means 22 is preferably 400 ° C. or lower when using an organic gas or an organic adsorbent, and 500 ° C. or lower when using an inorganic gas and an inorganic adsorbent, in order to prevent the adsorption means 21 from being altered.

検知部30は、被検知ガスを検知するものであればどのような態様であってもよく、公知の半導体式センサ素子、接触燃焼式センサ素子および電気化学式センサ素子などが使用できる。例えば半導体式ガス検知素子として、熱線型半導体式ガス検知素子、基板型半導体式ガス検知素子が挙げられるが、これに限られるものではない。半導体式ガス検知素子において、例えば低濃度のにおい成分を検出できるように、ガス感応部の主成分として、酸化スズや酸化インジウムを使用し、かつ、モリブデン酸化物および鉛酸化物などを添加するとよい。また、低濃度のVOC(揮発性有機化合物)ガスを検出できるように、ガス感応層が酸化タングステンを主成分とし、VOC選択性を有するように構成してもよい。   The detection unit 30 may be in any form as long as it detects the gas to be detected, and a known semiconductor sensor element, catalytic combustion sensor element, electrochemical sensor element, or the like can be used. For example, the semiconductor gas detection element includes a hot-wire semiconductor gas detection element and a substrate type semiconductor gas detection element, but is not limited thereto. In a semiconductor gas detection element, for example, tin oxide or indium oxide may be used as a main component of the gas sensitive part, and molybdenum oxide, lead oxide, or the like may be added so that a low concentration odor component can be detected. . Further, the gas sensitive layer may be configured to have tungsten oxide as a main component and have VOC selectivity so that a low concentration VOC (volatile organic compound) gas can be detected.

ガス検知ユニットXの筐体40は、その内部に吸着部20と検知部30とを収容する態様であれば、その形状は特に限定されるものではないが、本実施形態では上面視で矩形状であり、厚板状の形状を呈するものを例示する。ガス検知ユニットXの使用形態としては、天井や壁に設置する態様、或いは、ハンディタイプの態様などが挙げられる。   The shape of the casing 40 of the gas detection unit X is not particularly limited as long as the suction unit 20 and the detection unit 30 are accommodated therein. However, in the present embodiment, the casing 40 is rectangular in top view. And an example of a thick plate-like shape. Examples of the usage form of the gas detection unit X include an aspect in which the gas detection unit X is installed on a ceiling or a wall, or an aspect of a handy type.

また、本発明のガス検知ユニットXは、上記構成の他に、ガス吸引口1、ガス排出口2、ガス流路3、三方弁4、ポンプPを備える。   The gas detection unit X of the present invention includes a gas suction port 1, a gas discharge port 2, a gas flow path 3, a three-way valve 4, and a pump P in addition to the above configuration.

本実施形態において、低濃度の被測定成分(例えばにおい成分)を含有する被検知ガスがガス排出口2側に流下するように三方弁4をセットして当該被検知ガスを一定量流し、吸着部20の吸着手段21に被測定成分を吸着させて濃縮することができる。次に、加熱手段22を発熱させて吸着手段21を加熱すると、吸着手段21から濃縮されたにおい成分を脱離させ、脱離ガスが検知部30側に流下するように三方弁4をセットして、ポンプPより少量のキャリアガス(空気、ヘリウム、窒素など)を一定時間流下させる。このとき、流量を制御する流量制御手段(図外)を設けることが可能である。   In this embodiment, the three-way valve 4 is set so that the gas to be detected containing a low concentration component to be measured (for example, an odor component) flows down to the gas outlet 2 side, and the gas to be detected is allowed to flow by a certain amount. The component to be measured can be adsorbed on the adsorption means 21 of the unit 20 and concentrated. Next, when the heating unit 22 is heated to heat the adsorption unit 21, the three-way valve 4 is set so that the concentrated odor component is desorbed from the adsorption unit 21 and the desorbed gas flows down to the detection unit 30 side. Then, a small amount of carrier gas (air, helium, nitrogen, etc.) is caused to flow down from the pump P for a certain time. At this time, it is possible to provide a flow rate control means (not shown) for controlling the flow rate.

このような構成により本発明のガス検知ユニットXは、吸着部20および検知部30を、ハンディタイプのガス検知器や、天井或いは壁に配設する警報器などの筐体の内部に配設することができるため、小規模な構成で、被検知ガスを濃縮して検知することができる。   With such a configuration, the gas detection unit X of the present invention has the adsorption unit 20 and the detection unit 30 arranged inside a housing such as a handy type gas detector or an alarm device arranged on the ceiling or wall. Therefore, the gas to be detected can be concentrated and detected with a small configuration.

7に示したように、ガス流路3は、吸着部20の上流において、被検知ガスに含まれる被測定成分が吸着部20に吸着する際に被検知ガスが流通する吸着流路3aと、被検知ガスに含まれる被測定成分が吸着部より脱離する際に被検知ガスが流通する脱離流路3bと、を備える。この場合、吸着流路3aおよび脱離流路3bを切り替える切り替え制御手段(図外)を設けるとよい。本構成では、被検知ガスに含まれる被測定成分を吸着部20に吸着させる場合と、被検知ガスに含まれる被測定成分を吸着部20より脱離させる場合とにおいて、被検知ガスの流路を切り替えることができる。 As shown in FIG. 7, the gas flow path 3 includes an adsorption flow path 3 a through which the gas to be detected flows when the component to be measured contained in the gas to be detected is adsorbed by the adsorption section 20 upstream of the adsorption unit 20. the desorption passage 3b to be measured component contained in the gas to be detected is to be detected gas flows during the desorption from the adsorption unit, Ru comprising a. In this case, it is preferable to provide a switching control means (not shown) for switching between the adsorption channel 3a and the desorption channel 3b. In this configuration, the flow path of the gas to be detected in the case where the measurement component contained in the detection gas is adsorbed by the adsorption unit 20 and the case where the measurement component contained in the detection gas is desorbed from the adsorption unit 20 Can be switched.

また、脱離流路3bには、被検知ガスに含まれる被測定成分を除去する除去手段60を備えてある。本構成では、脱離流路3bを被検知ガスが流下することで、当該被検知ガスに含まれる被測定成分を除去手段60によって除去することができる。これにより、加熱して被検知ガスに含まれる被測定成分を脱離させる場合は脱離流路3bを使用して、吸着部20の上流において除去手段60によって被検知ガスに含まれる被測定成分を除去できる。従って、本構成では、濃縮前の被検知ガスに含まれる被測定成分の信号が検出されるのを防止できるため、より正確に濃縮した被検知ガスに含まれる被測定成分の濃度を算出することができる。 Further, the desorption channel 3b is provided with a removing means 60 for removing the component to be measured contained in the gas to be detected . In the present configuration, the measured component contained in the detected gas can be removed by the removing means 60 as the detected gas flows down the desorption channel 3b. Thus, when the component to be measured contained in the gas to be detected is desorbed by heating, the component to be measured contained in the gas to be detected by the removing means 60 upstream of the adsorption unit 20 using the desorption channel 3b. Can be removed. Therefore, in this configuration, since it is possible to prevent detection of the signal of the measured component contained in the detected gas before concentration, the concentration of the measured component contained in the concentrated detected gas can be calculated more accurately. Can do.

〔実施例1〕
本発明の実施例について説明する。
本発明のガス検知ユニットXにおける吸着部20の性能をテストするため、被測定成分であるジケトンA(におい成分の一種;1ppm)を含む被検知ガスを当該吸着部20に接触させた。
[Example 1]
Examples of the present invention will be described.
In order to test the performance of the adsorption unit 20 in the gas detection unit X of the present invention, a gas to be detected containing diketone A (a kind of odor component; 1 ppm) as a component to be measured was brought into contact with the adsorption unit 20.

吸着部20は、アルミナ基板10(3mm×3mm×1mm)の一方の面に炭素材料吸着剤Tenax GR(ジーエルサイエンス株式会社製)を1.4mg塗布して吸着手段21とし、他方の面に白金をミアンダパターンとなるようにパターニングして加熱手段22とした。   The adsorbing unit 20 applies 1.4 mg of carbon material adsorbent Tenax GR (manufactured by GL Science Co., Ltd.) to one surface of an alumina substrate 10 (3 mm × 3 mm × 1 mm) to form an adsorbing means 21, and platinum on the other surface Was patterned to form a meander pattern to form a heating means 22.

サンプルガスを吸着部20に接触させた後、加熱手段22を280℃に加熱して10mLの濃縮ガスとしてガスクロマトグラフィー(型番XG−100V 新コスモス電機株式会社製)に導入し、半導体式ガスセンサで継続的に測定したところ、ジケトンAの大きなピークを得た(図2(a))。   After bringing the sample gas into contact with the adsorbing unit 20, the heating means 22 is heated to 280 ° C. and introduced into gas chromatography (model number XG-100V, manufactured by Shin Cosmos Electric Co., Ltd.) as a 10 mL concentrated gas. When measured continuously, a large peak of diketone A was obtained (FIG. 2 (a)).

この結果、低濃度のにおい成分であっても、吸着部20に吸着脱離させることで、ガス検知に十分なレベルまで濃縮した状態で検知部30に導入できるものと認められた。
また、ジケトンAの大きなピークを得た後に、再度、加熱手段22を加熱してジケトンAの検出を試みたところ、ジケトンAのピークは検出されなかった(図2(b))。そのため、本構成のような小型の吸着部20に配設された小型の加熱手段22であっても、被検知ガスの脱離が十分に行えるものと認められた。
As a result, it was recognized that even a low-concentration odor component can be introduced into the detection unit 30 in a state of being concentrated to a level sufficient for gas detection by being adsorbed and desorbed by the adsorption unit 20.
In addition, after obtaining a large peak of diketone A, the heating means 22 was heated again to detect diketone A. As a result, no peak of diketone A was detected (FIG. 2B). Therefore, it was recognized that even the small heating means 22 disposed in the small adsorption unit 20 as in the present configuration can sufficiently desorb the gas to be detected.

〔実施例2〕
本発明のガス検知ユニットXを、壁に取り付けるタイプの警報器として使用した(図3)。
[Example 2]
The gas detection unit X of the present invention was used as a type of alarm attached to a wall (FIG. 3).

約30時間、室温に放置して被測定成分を吸着部20の吸着手段21に吸着させ、その後、加熱手段22を300℃に加熱して吸着手段21より被測定成分を脱離させた。このとき、検知部30で被測定成分の信号を得ることができた(図4)。これにより、本発明のガス検知ユニットXを壁に取り付けるタイプの警報器として使用して、低濃度の被測定成分、例えばVOCやニオイ成分のモニタリングといった用途に用いることができるものと認められた。   The components to be measured were allowed to stand at room temperature for about 30 hours to be adsorbed by the adsorption means 21 of the adsorption unit 20, and then the heating means 22 was heated to 300 ° C. to desorb the components to be measured from the adsorption means 21. At this time, the signal of the component under measurement could be obtained by the detection unit 30 (FIG. 4). Accordingly, it was recognized that the gas detection unit X of the present invention can be used as an alarm device of a type attached to a wall and used for monitoring low concentration components to be measured, for example, VOC and odor components.

〔実施例3〕
実施例2のガス検知ユニットXにおいて、被測定成分を吸着部20の吸着手段21に吸着させたのち、加熱手段22を加熱することで、吸着手段21のクリーニングを兼ねている。しかし、被測定成分が熱に弱い、あるいは妨害成分の脱離が難しいといった場合が考えられる。このような場合は、吸着手段21のクリーニングをするために加熱手段22を加熱するタイミングを別に設定するとよい。図5には、被測定成分を吸着手段21に吸着させる前に加熱手段22を350℃に加熱して吸着手段21のクリーニング(第1クリーニング工程)を行い、さらに、被測定成分を吸着手段21より250℃で脱離させた後で加熱手段22を350℃に加熱して吸着手段21のクリーニング(第2クリーニング工程)を行った場合を示した。
Example 3
In the gas detection unit X according to the second embodiment, the component to be measured is adsorbed by the adsorption unit 21 of the adsorption unit 20, and then the heating unit 22 is heated so that the adsorption unit 21 is also cleaned. However, there may be cases where the component to be measured is weak against heat or it is difficult to remove the interfering component. In such a case, in order to clean the adsorption means 21, the timing for heating the heating means 22 may be set separately. In FIG. 5, before the component to be measured is adsorbed by the adsorption unit 21, the heating unit 22 is heated to 350 ° C. to clean the adsorption unit 21 (first cleaning step). The case where the heating means 22 was heated to 350 ° C. after desorption at 250 ° C. to clean the adsorption means 21 (second cleaning step) was shown.

これにより、吸着手段21のクリーニングを、被測定成分を吸着手段21より脱離させる温度より高い温度で行うことができるため、被測定成分を変性させることなく確実に吸着手段21のクリーニングを行うことができる。   As a result, the adsorption unit 21 can be cleaned at a temperature higher than the temperature at which the component to be measured is desorbed from the adsorption unit 21, so that the adsorption unit 21 can be reliably cleaned without denaturing the component to be measured. Can do.

尚、クリーニング工程における加熱時は被測定成分の濃縮前の被測定成分の信号が検出される。このとき検出された信号のレベルが検知下限以下の場合は無視できるが、検知下限以上と見込まれる場合、クリーニング工程における加熱前の信号分を差し引くか、一定の係数(例えば0.9)を掛けることで、被検知ガスに含まれる被測定成分の濃度を算出することができる。   During heating in the cleaning process, a signal of the measured component before concentration of the measured component is detected. If the detected signal level is below the detection lower limit, it can be ignored, but if it is expected to be above the detection lower limit, the signal before heating in the cleaning process is subtracted or multiplied by a certain coefficient (for example, 0.9). Thus, the concentration of the component to be measured included in the gas to be detected can be calculated.

〔実施例4〕
本発明のガス検知ユニットXを、ハンディタイプのガス検知器として使用した(図6)。
Example 4
The gas detection unit X of the present invention was used as a handy type gas detector (FIG. 6).

所定時間、ポンプPで雰囲気ガスを吸引して被測定成分を吸着部20の吸着手段21に吸着させ、その後、加熱手段22を300℃に加熱して吸着手段21より被測定成分が脱離させた。このとき、検知部30で被測定成分の信号を得ることができた(結果は示さない)。これにより、本発明のガス検知ユニットXをハンディタイプのガス検知器として使用して、低濃度の被測定成分のモニタリングといった用途に用いることができるものと認められた。
本実施例のようにハンディタイプのガス検知器として使用することにより、例えば比較的濃度の低い環境中の全炭化水素量(THC)を現場で測定し、値が高い場合は移動しながら測定することにより、その発生源を探索することも可能となる。
Atmospheric gas is sucked by the pump P for a predetermined time to cause the component to be measured to be adsorbed to the adsorption means 21 of the adsorption unit 20, and then the heating means 22 is heated to 300 ° C. to cause the component to be measured to be desorbed from the adsorption means 21 It was. At this time, the signal of the component under measurement could be obtained by the detection unit 30 (results are not shown). Accordingly, it was recognized that the gas detection unit X of the present invention can be used as a handy type gas detector and used for applications such as monitoring of low concentration components to be measured.
By using it as a handy type gas detector as in this embodiment, for example, the total amount of hydrocarbons (THC) in a relatively low concentration environment is measured on site, and if the value is high, it is measured while moving. Therefore, it is possible to search for the generation source.

〔実施例5〕
本発明のガス検知ユニットXを、ハンディタイプのガス検知器として使用した(図7)。本実施例では、吸着部20の上流において、被検知ガスに含まれる被測定成分が吸着部20に吸着する際に被検知ガスが流通する吸着流路3a、および、被検知ガスに含まれる被測定成分が吸着部より脱離する際に被検知ガスが流通する脱離流路3bを設けた。脱離流路3bには被検知ガスに含まれる被測定成分を除去する除去手段60を設けた。
Example 5
The gas detection unit X of the present invention was used as a handy type gas detector (FIG. 7). In the present embodiment, upstream of the adsorption unit 20, the adsorption flow path 3 a through which the gas to be detected flows when the component to be measured contained in the gas to be detected is adsorbed by the adsorption unit 20, and the object to be contained in the gas to be detected. A desorption channel 3b through which the gas to be detected flows when the measurement component is desorbed from the adsorption unit is provided. The desorption channel 3b is provided with a removing means 60 for removing the component to be measured contained in the gas to be detected.

本構成では、脱離流路3bを被検知ガスが流下することで、当該被検知ガスに含まれる被測定成分を除去手段60によって除去することができる。これにより、加熱して被検知ガスを脱離する場合、吸着部20の上流において除去手段60によって被検知ガスに含まれる被測定成分を除去し、濃縮前の被検知ガスに含まれる被測定成分の信号が重複されるのを防止できるため、より正確に被測定成分の濃度を算出することができる。
本実施例においても、ハンディタイプのガス検知器を移動しながら測定することにより、全炭化水素量(THC)の発生源を探索することが可能となる。
In the present configuration, the measured component contained in the detected gas can be removed by the removing means 60 as the detected gas flows down the desorption channel 3b. As a result, when the gas to be detected is desorbed by heating, the component to be measured contained in the gas to be detected is removed by the removing means 60 upstream of the adsorption unit 20, and the component to be measured contained in the gas to be detected before concentration. Therefore, it is possible to calculate the concentration of the component to be measured more accurately.
Also in the present embodiment, it is possible to search for a source of the total hydrocarbon amount (THC) by measuring while moving the handy type gas detector.

〔実施例6〕
上述した実施例において、吸着部20および検知部30の間に、妨害成分の影響を排除できるフィルタ部、あるいは、複数の被測定成分の濃度を測定できるカラム部を設けることが可能である(図外)。カラム部は、充填カラム(パックドカラム)あるいはキャピラリーカラムの何れの態様でもよく、多孔質膜と組み合わせてもよい。
Example 6
In the embodiment described above, it is possible to provide between the adsorption unit 20 and the detection unit 30 a filter unit that can eliminate the influence of interference components, or a column unit that can measure the concentration of a plurality of components to be measured (FIG. Outside). The column portion may be either a packed column (packed column) or a capillary column, and may be combined with a porous membrane.

当該フィルタ部を設けることで、妨害成分の影響を排除した状態で被検知ガスに含まれる被測定成分の濃度をより正確に算出することができる。また、当該カラム部を設けることで、複数の被測定成分を分離してこれらの濃度を測定することができるため、各被測定成分の濃度をより正確に算出することができる。   By providing the filter unit, it is possible to more accurately calculate the concentration of the component to be measured contained in the gas to be detected in a state where the influence of the disturbing component is eliminated. Further, by providing the column part, it is possible to separate a plurality of components to be measured and measure their concentrations, so that the concentration of each component to be measured can be calculated more accurately.

〔実施例7〕
上述した実施例において、特性の異なる複数の検知部30を設けてもよい。これにより、被検知ガスが複数の被測定成分を含有する場合において、複数の被測定成分を複数の検知部30のそれぞれで測定することができる。
Example 7
In the embodiment described above, a plurality of detection units 30 having different characteristics may be provided. Thereby, when the gas to be detected contains a plurality of components to be measured, the plurality of components to be measured can be measured by each of the plurality of detection units 30.

〔実施例8〕
上述した実施例において、吸着部20(吸着手段21)をガス流路3に対して直交するように配設してもよい(図8)。本構成では、被検知ガスを吸着手段21に対して直交する角度で吸着させることができるため、吸着効率が向上する。
Example 8
In the embodiment described above, the adsorbing portion 20 (adsorbing means 21) may be arranged so as to be orthogonal to the gas flow path 3 (FIG. 8). In this configuration, the gas to be detected can be adsorbed at an angle orthogonal to the adsorbing means 21, so that the adsorption efficiency is improved.

また、吸着部20を二つ設ける態様としてもよい(図9)。本構成では、一対の吸着部20の加熱手段22どうしを対面状態に、かつ、一対の吸着部20の一端どうしを接触させて所謂V字状に配設している。吸着部20を二つ設けることで、被検知ガスに含まれる被測定成分が吸着手段21に吸着される機会を増大させることができるため、吸着効率が向上する。   Moreover, it is good also as an aspect which provides two adsorption | suction parts 20 (FIG. 9). In this configuration, the heating means 22 of the pair of adsorption portions 20 are arranged in a so-called V shape with the facing portions and the ends of the pair of adsorption portions 20 in contact with each other. By providing two adsorption portions 20, the opportunity for the component to be measured contained in the gas to be detected to be adsorbed by the adsorption means 21 can be increased, so that the adsorption efficiency is improved.

〔実施例9〕
上述した実施例の吸着部20において、吸着手段21を耐熱性基板10で挟み、吸着部20の外面側のそれぞれに加熱手段22を設けるようにしてもよい(図10)。本構成では、吸着手段21への伝熱効率が向上するため、加熱手段22によって加熱することで吸着した被検知ガスをより迅速に脱離できる。
Example 9
In the suction part 20 of the embodiment described above, the suction means 21 may be sandwiched between the heat-resistant substrates 10 and the heating means 22 may be provided on each outer surface side of the suction part 20 (FIG. 10). In this configuration, since the heat transfer efficiency to the adsorption unit 21 is improved, the detected gas adsorbed by heating by the heating unit 22 can be desorbed more quickly.

〔実施例10〕
上述した実施例の吸着部20において、二枚の耐熱性基板10を組み合わせて多層基板11とし、当該多層基板11の外面側のそれぞれに吸着手段21を設けるようにしてもよい(図11)。本構成では、二枚の耐熱性基板10の対向面に加熱手段22を設けることで、当該加熱手段22が多層基板11の内部に設けられるように構成する。多層基板11は、加熱手段22を含むグリーンシートを積層して圧着し、焼成することで形成することができる。
Example 10
In the suction unit 20 of the above-described embodiment, the two heat-resistant substrates 10 may be combined to form the multilayer substrate 11, and the suction means 21 may be provided on each outer surface side of the multilayer substrate 11 (FIG. 11). In this configuration, the heating unit 22 is provided on the opposing surfaces of the two heat resistant substrates 10, so that the heating unit 22 is provided inside the multilayer substrate 11. The multilayer substrate 11 can be formed by laminating and pressing a green sheet including the heating means 22 and firing.

本構成では、吸着手段21を二つ設けることで、被検知ガスに含まれる被測定成分が吸着手段21に吸着される機会を増大させることができるため、吸着効率が向上する。   In this configuration, by providing two adsorption means 21, it is possible to increase the chance that the component to be measured contained in the gas to be detected is adsorbed by the adsorption means 21, so that the adsorption efficiency is improved.

本発明のガス検知ユニットは、被検知ガスを検知する検知部を筐体の内部に備えたガス検知ユニットに利用することができる。   The gas detection unit of the present invention can be used for a gas detection unit that includes a detection unit that detects a gas to be detected inside the casing.

X ガス検知ユニット
10 耐熱性基板
20 吸着部
21 吸着手段
22 加熱手段
30 検知部
40 筐体
X Gas detection unit 10 Heat-resistant substrate 20 Adsorption part 21 Adsorption means 22 Heating means 30 Detection part 40 Case

Claims (1)

耐熱性基板の一方の面に、温度変化によって被検知ガスが吸着脱離する吸着手段、および、他方の面に加熱手段を備えている吸着部と、
前記吸着部より脱離した被検知ガスを検知する検知部と、を筐体の内部に備え
前記吸着部の上流において、被検知ガスに含まれる被測定成分が前記吸着部に吸着する際に被検知ガスが流通する吸着流路と、被検知ガスに含まれる被測定成分が前記吸着部より脱離する際に被検知ガスが流通する脱離流路と、を備え、これら流路を切り替え可能にしてあり、前記脱離流路に、被検知ガスに含まれる被測定成分を除去する除去手段を備えたガス検知ユニット。
An adsorbing means for adsorbing and desorbing a gas to be detected by temperature change on one surface of the heat-resistant substrate, and an adsorbing section having a heating means on the other surface
A detection unit that detects a gas to be detected desorbed from the adsorption unit, and a housing ,
Upstream of the adsorption unit, an adsorption flow path through which the gas to be detected flows when the component to be measured contained in the gas to be detected is adsorbed to the adsorption unit, and a component to be measured contained in the gas to be measured are supplied from the adsorption unit. And a desorption channel through which the gas to be detected flows when desorbing, and these channels can be switched, and the desorption channel removes the component to be measured contained in the gas to be detected. Gas detection unit with means .
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