JP6211491B2 - Roll mold manufacturing method and roll mold - Google Patents

Description

  The present invention relates to a method for manufacturing a roll-shaped mold (roll mold) having fine irregularities as transfer patterns on the surface, and a roll mold manufactured by the method.

  In recent years, nanoimprinting using web handling technology such as roll-to-roll has been proposed. For example, such a nanoimprint has a fine uneven pattern on the surface of a conveyance path between a feeding device that feeds out a sheet to be processed (for example, a resin film or an inorganic substrate) and a winding device that winds up the sheet. A roll mold (also referred to as a mold roll or a stamper roll) is provided, and the sheet is conveyed from the feeding device to the winding device while the roll die is in contact with the processing surface of the sheet. Thereby, it becomes possible to emboss the resin film continuously and efficiently and to form a pattern on the resist applied on the sheet.

  The roll mold is formed by, for example, winding a sheet-shaped thin mold having a concavo-convex pattern around a cylindrical roll body serving as a rotation axis, and welding the opposite ends of the mold sheet that makes one round of the roll body. Manufactured. However, it is not easy to fix the sheet-shaped mold firmly without forming a gap between the roll body.

  On the other hand, by applying a resist to the inner peripheral surface of a cylindrical part (cylinder) and irradiating this resist with a laser beam, a concave / convex pattern is formed on the inner peripheral surface of the cylinder to produce a roll master. A plating film is grown on the surface of the concavo-convex pattern on the inner peripheral surface of the cylinder to form a cylindrical shape. By removing the cylindrical plating film from the cylinder, a seamless roll mold made of a cylindrical metal layer is formed on the surface. The manufacturing method is proposed in Patent Documents 1-3.

  Patent Documents 1 and 2 propose a method of forming a concavo-convex pattern on a resist by disposing a head inside a cylinder and irradiating a laser beam from the inside. In Patent Document 2, as a method of peeling the plating film from the cylinder, a method of injecting a solution for dissolving the photoresist layer between the plating film and the inner surface of the cylinder, or when the thermal expansion of the cylinder and the plating film is different. Discloses a method of expanding or contracting such that the plating film has a smaller diameter than the cylinder by heating or cooling them.

  Patent Document 3 proposes a method of forming a concavo-convex pattern on a resist formed on an inner wall surface of a cylinder by irradiating a laser beam from the outside of the cylinder by using a light-transmitting cylinder. Further, when removing the plating film from the cylinder, a method is disclosed that makes it easy to remove the plating film from the cylinder by melting and removing the resist by utilizing the fact that the melting point of the resist is lower than that of the cylinder and the plating film. Yes.

JP 2009-214381 A JP 2009-279615 A JP 2005-199642 A

  However, in the methods described in Patent Documents 1 to 3, when the plating film is peeled off from the cylinder, the resist is peeled off while being attached to the plating film, and the resist is pulled out or the resist is dissolved and removed. Since the plated film is pulled out from the cylinder, the roll master cannot be used a plurality of times, and only one roll mold replica can be produced from one roll master, resulting in low production efficiency. That is, in Patent Documents 1 to 3, it is not assumed at all that the roll master is used for manufacturing a plurality of roll dies.

  This invention is made | formed in view of the said situation, Comprising: It aims at providing the manufacturing method of a roll metal mold | die which can duplicate a some roll metal mold | die, and a roll metal mold | die using one roll original disk.

The roll mold manufacturing method of the present invention prepares a roll master having an uneven pattern to be transferred to an inner wall surface forming a cylindrical hollow part,
A metal layer is formed on the inner wall surface,
Forming a peeling assisting layer having a thermal expansion coefficient larger than the thermal expansion coefficient of the metal layer on at least one axial end of the cylindrical surface of the metal layer;
By cooling the roll master on which the metal layer and the peeling auxiliary layer are formed to a temperature lower than the temperature at the time of forming the peeling auxiliary layer protective layer, the metal layer and the peeling auxiliary layer are contracted more than the roll master, Peel off the metal layer,
A roll mold manufacturing method for producing a roll mold comprising a cylindrical laminate having an uneven surface complementary to the uneven pattern on the outer surface by pulling out a cylindrical laminate of the metal layer and the peeling auxiliary layer from the roll master. It is.

Here, the temperature at the time of forming the peeling auxiliary layer is strictly the temperature of the peeling auxiliary layer at the time of forming the peeling auxiliary layer, but when the temperature of the peeling auxiliary layer follows the environmental temperature, The environmental temperature is regarded as the temperature at the time of formation.
Here, the “thermal expansion coefficient” of the metal layer or the peeling auxiliary layer is a value in a temperature range including at least the temperature at the time of forming the peeling auxiliary layer and peeling the metal layer from the roll master.

  In the method for producing a roll mold of the present invention, as a method of cooling the roll master on which the metal layer and the peeling auxiliary layer are formed, the metal layer and the peeling are in a liquid having a temperature lower than the temperature at the time of forming the peeling auxiliary layer. It is preferable to immerse the roll master on which the auxiliary layer is formed.

  For example, water can be used as the liquid.

  It is preferable that the temperature lower than the temperature at the time of forming the peeling auxiliary layer is set to a temperature lower by 30 ° C. or more than the temperature at the time of forming the peeling auxiliary layer.

As a roll master, a roll made of silicon oxide or silicon cylinder is used as the roll body.
It is particularly preferable that the peeling auxiliary layer is made of polycarbonate or polyethylene terephthalate.

  It is preferable to mechanically deform one end of the cylindrical laminated body in the column axis direction and flow a fluid between one end of the mechanically deformed laminated body and the roll master to separate the metal layer from the roll master.

  It is preferable to perform mold release treatment on the inner wall surface before forming the metal layer, and to deposit the metal layer on the inner wall surface subjected to the mold release treatment.

  Examples of the mold release treatment include a method of applying a mold release agent, and it is preferable to use a fluorine-based mold release agent as the mold release agent.

  It is preferable to provide a region that does not have a concavo-convex pattern to be transferred to at least a partial region of one end of the inner surface of the roll master in the cylinder axis direction.

  It is preferable to provide a peeling assist layer on the entire surface of the metal layer.

  As a method for forming the peeling auxiliary layer, a method of sticking a pressure-sensitive adhesive layer of a resin film having an adhesive layer on one side to a metal layer, a method by a dip coating method, etc. are preferable. A peeling auxiliary layer is formed on the surface of the metal layer by a dip coating method. Is preferably attached to a surface other than the inner wall surface on which the metal layer of the roll master is formed before forming the auxiliary peeling layer.

  The thickness of the metal layer is preferably 30 μm or more and 100 μm or less.

  The thickness of the peeling assist layer is preferably more than 100 μm.

  The roll mold of the present invention is a roll mold comprising a cylindrical laminate having an uneven pattern obtained by pulling out from a roll master in the roll mold manufacturing method described above.

  According to the method for manufacturing a roll mold of the present invention, after forming a metal layer on the inner wall surface of the roll master having an uneven pattern, at least a part of one end of the surface of the metal layer in the cylindrical axis direction on the inner wall surface. By forming a peeling auxiliary layer having a thermal expansion coefficient larger than that of the metal layer and cooling to a temperature lower than the temperature at the time of forming the peeling auxiliary layer, the roll master, the metal layer, and the peeling auxiliary layer are Shrink. At this time, the shrinkage amount of the metal layer and the peeling auxiliary layer is larger than that of the roll master, and the shrinkage amount of the peeling auxiliary layer is larger than the shrinkage amount of the metal layer. Since the force works in the direction of peeling from the roll, the metal layer can be easily peeled from the roll master. According to the roll mold manufacturing method of the present invention, the metal layer can be peeled from the roll master and pulled out without damaging the concavo-convex pattern of the roll mold or losing the concavo-convex pattern. The roll master can be used repeatedly a plurality of times, and the production efficiency can be dramatically improved.

It is a schematic diagram which shows the manufacturing process in the manufacturing method of the roll metal mold | die of embodiment of this invention. It is the top view and sectional drawing of the roll original recording in the process A of FIG. It is a figure which shows the manufacturing process of the roll original recording of FIG. It is the top view and sectional drawing of a roll original disk in which the metal layer was formed in the uneven | corrugated pattern surface shown to the process B of FIG. It is the top view and sectional drawing of a roll original disk in which the peeling auxiliary | assistance layer was further formed in the metal layer surface shown to the process C of FIG. It is a figure which shows an example of the formation method of a peeling assistance layer. It is a perspective view which shows the formation method of the peeling assistance layer shown in FIG. It is a figure which shows the other example of the formation method of a peeling auxiliary | assistant layer. It is the top view and sectional drawing which show the state which the metal layer peeled from the roll original recording shown to the process D of FIG. It is a figure which shows an example of the peeling method which peels a roll metal mold | die from a roll original recording. It is a figure which shows the other example of the peeling method which peels a roll metal mold | die from a roll original recording. It is the top view and sectional drawing of the roll metal mold | die peeled and formed from the roll original disk shown to the process F of FIG.

  Hereinafter, although an embodiment of the present invention is described using a drawing, the present invention is not limited to this. In addition, for easy visual recognition, the scale of each component in the drawings is appropriately changed from the actual one.

FIG. 1 is a diagram schematically illustrating a method for manufacturing a roll mold according to the present embodiment.
As shown in FIG. 1, the roll mold manufacturing method of the present embodiment prepares a roll master 10 in which a concavo-convex pattern 15 to be transferred is formed on an inner wall surface 10 a forming a cylindrical hollow portion (process). A) The metal layer 20 is formed on the inner wall surface 10a (step B), and the peeling auxiliary layer 30 having a thermal expansion coefficient larger than that of the metal layer 20 is formed on the surface of the metal layer 20 (step). C) By cooling the roll master 10 on which the metal layer 20 and the peeling auxiliary layer 30 are formed to a temperature lower than the temperature at the time of forming the peeling auxiliary layer 30, the metal layer 20 and the peeling auxiliary layer 30 are made to be lower than the roll master 10. By contracting, the metal layer 20 is peeled from the roll master 10 (process D), and the cylindrical laminate 40 of the metal layer 20 and the peeling auxiliary layer 30 is pulled out from the roll master 10 (process E). The uneven surface Complementary convex pattern 25 over down 15 get roll mold consisting of a cylindrical laminated body 40 having an outer surface that is (step F) methods.

  In the manufacturing method of the present invention, without removing the resist film carrying the concavo-convex pattern together with the laminate 40 or dissolving and removing the resist film, the laminate 40 is peeled from the concavo-convex pattern, and only the laminate 40 is rolled. Since it is pulled out from the master 10, the concavo-convex pattern of the roll master 10 is not damaged or lost by the production of the roll mold. Therefore, after the cylindrical laminate 40 is pulled out, the roll master 10 can be used again for duplication of the roll mold. Since a plurality of roll dies can be duplicated from one roll master 10, the production cost can be reduced and the roll dies can be produced efficiently.

  In addition, since the cylindrical laminated body 40 of the metal layer 20 and the peeling auxiliary layer 30 obtained as described above has low mechanical resistance, as shown in Step G of FIG. A practical roll mold 42 can be obtained by fitting.

  Next, each step described in FIG. 1 will be described in detail.

  FIG. 2 is a diagram showing a plan view and a cross-sectional view of the roll master 10 prepared in step A of FIG. In the present embodiment, the roll master 10 has a cylinder 11 having an inner wall surface 11a that forms a cylindrical hollow portion constituting the roll main body, and unevenness comprising a resist film 12 provided in a pattern on the inner wall surface 11a. What comprises the pattern 15 is used. The resist film 12 is formed in a line-and-space pattern in the cross-sectional view shown in FIG. 2, and the fine uneven pattern 15 is constituted by the line 15a and the space 15b of the resist film 12.

  In this example, the concavo-convex pattern is line-and-space, but the concavo-convex pattern is not limited to this, and may be a dot-like pattern in which dot-like concave portions are formed in a resist film.

However, it is preferable that the concave / convex pattern 15 is not formed in at least a partial region of one end of the roll master 10 in the column axis A direction. That the concavo-convex pattern 15 is not formed means a state in which the resist film 12 is uniformly formed or the resist film 12 is not uniformly provided. In the present embodiment, the resist film 12 is uniformly formed in the one end region 14 of the roll master 10. That is, the concave / convex pattern 15 is not formed over the entire circumference in the one end region 14. The length L1 of the _one end region 14 in the cylinder axis A direction is preferably 10 mm or more, and more preferably 30 mm or more. The convex portion height of the concave / convex pattern 15 is about 20 nm to 20 μm, and the convex portion width (line width) or concave portion width (space width) of the concave / convex pattern is also about 20 nm to 20 μm. The height of the convex portion is the thickness of the resist film 12 and can be adjusted when the resist film is formed.

An example of a method for manufacturing the roll master 10 will be described with reference to FIG.
First, as shown in Step A of FIG. 3, a cylinder 11 made of a light transmissive material having an inner wall surface 11 a that forms a cylindrical hollow portion is prepared, and then, as shown in Step B, the inner wall surface of the cylinder 11 is prepared. A resist film 12 is uniformly formed on the entire inner wall surface by dip coating 11a. Thereafter, the laser beam 16 is condensed from the outside of the cylinder 11 onto the resist film 12 by the condenser lens 17, and a desired pattern is exposed and drawn. As shown in FIG. 3C, by exposing the resist film 12 to the laser beam 16 and rotating the cylinder 11 about the cylinder axis, exposure can be performed in a line shape along the circumference. Each time the cylinder 11 is rotated once, the irradiation position of the laser beam 16 is moved in the cylinder axis direction for drawing. Step 3 in FIG. 3 is carried out without developing when using a photoresist that can change the shape of the heat mode as a resist after exposure drawing using laser light, and by developing when using a normal photoresist. As shown in FIG. 3, a concavo-convex pattern 15 including a line-shaped resist film 15a and a line-shaped space 15b along the circumferential direction is formed.
The roll master 10 can be manufactured as described above.

The present invention is not limited to the roll master manufactured as described above, and a roll master manufactured by the method described in Patent Documents 1 and 2 or Patent Document 3 may be used. As described in Patent Documents 1 and 2, when a laser head is disposed in the hollow portion of the cylinder 11 and a resist is exposed from the inside of the cylinder to form a concavo-convex pattern, the cylinder is not light transmissive. Also good.
Further, a roll master having a fine uneven pattern formed on the inner wall surface of the cylinder itself by etching the inner wall surface of the cylinder may be used.

  The cylinder 11 has a coefficient of thermal expansion in a temperature range (for example, a temperature range of 0 ° C. to 100 ° C.) at least when cooling from the forming temperature of the peeling auxiliary layer 30 and peeling, as compared with the metal layer 20 and the peeling auxiliary layer 30. What is necessary is just to be comprised from the small material. In the case of the cylinder 11 having optical transparency, silicon, quartz, glass and the like can be mentioned.

  The inner diameter D of the cylinder 11 is preferably 100 mm to 300 mm. The length L in the cylinder axis A direction of the cylinder 11 is preferably 300 mm or more. The thickness (distance between the inner wall surface and the outer wall surface) Ts of the cylinder 11 is not particularly limited. However, when the concavo-convex pattern is formed by irradiating the laser beam from the outer wall surface as described above, the concavo-convex pattern is precisely fine. From the viewpoint of forming a thin film, the thinner one is preferable, and it is preferably 1.2 mm or less, more preferably 0.6 mm or less, and particularly preferably 0.1 mm or less.

  4A and 4B are a plan view and a cross-sectional view illustrating a state in which the metal layer 20 is formed on the inner wall surface 15 provided with the uneven pattern 15 of the roll master 10. By making the thickness of the metal layer 20 about several tens of μm to several hundreds of μm and sufficiently thicker than the thickness of the concavo-convex pattern 15, that is, the thickness of the resist film 12, the surface side opposite to the fine concavo-convex pattern side of the metal layer 20 is substantially flat. Thus, the metal layer 20 is formed in a cylindrical shape along the inner wall surface of the roll master 10. At this time, the outer wall surface side of the cylindrical metal layer 20 has an uneven pattern 25 complementary to the uneven pattern 15 on the inner wall of the roll master 10. The thickness of the metal layer 20 is preferably 30 μm or more and 100 μm or less.

As a method for forming the metal layer 20, it is possible to use vacuum film formation such as electrolytic plating, electroless plating, and sputtering.
In order to form a metal layer by electroplating when the inner wall surface 10a of the roll master 10 is not conductive, it is necessary to form a conductive layer on the inner wall surface first. From the viewpoint that a uniform film can be formed on the inner wall surface, electroless plating is preferably performed. That is, as a method of forming the metal layer 20, after a conductive layer (metal film) having a thin film thickness of about several μm is first formed by electroless plating, a thickness of about several tens μm to 100 μm is formed by electrolytic plating (electroforming). The method of forming a metal layer is particularly preferable. The conductive layer formed by electroless plating and the metal layer formed thereafter by electrolytic plating may be the same material or different materials. It is the metal layer 20 formed in 10a. Note that Ni is particularly preferable as the material of the metal layer 20.

FIG. 5 is a plan view and a cross-sectional view showing a state in which the metal layer 20 is formed on the inner wall surface of the roll master 10 and the peeling assist layer 30 is further formed on the surface (the inner wall surface of the cylindrical metal layer). .
Here, the peeling assist layer 30 is uniformly formed over almost the entire inner wall surface of the cylindrical metal layer 20, but if it is formed at least at one end in the columnar axial direction of the inner wall surface, the peeling assist layer 30 is formed. The function of can be performed. Further, the one end where the peeling auxiliary layer is formed does not necessarily include the axial end of the cylinder of the roll master, and the peeling auxiliary layer is slightly different from the axial end of the cylinder as long as it has a peeling auxiliary function. You may form in the axial direction inside of a cylinder. Even when the peeling auxiliary layer 30 is formed only at one end of the inner wall surface of the metal layer 20, it is desirable that the peeling auxiliary layer 30 be formed in a ring shape along the circumferential direction of the inner wall surface.

If the peeling auxiliary layer 30 is formed over the entire inner wall surface of the metal layer 20, the peeling auxiliary layer 30 forms a trigger for peeling the metal layer 20 from the roll master, and only functions to assist peeling. In addition, it is very effective as a support layer for supporting the thin metal layer 20 having low mechanical resistance, which is preferable.
The thickness of the peeling assist layer 30 is preferably greater than 100 μm.

  The release auxiliary layer may be made of a material having a larger thermal expansion coefficient than Ni, but a resin material is preferably used in order to increase the difference in shrinkage from the roll master due to cooling. In particular, polycarbonate (PC), polyethylene terephthalate (PET) and the like are preferable.

6 and 7 are diagrams showing an example of a method of forming the peeling assist layer 30 shown in step C of FIG.
As shown in Step A of FIG. 6 and FIG. 7, a peeling aid comprising a resin film 32 in which an adhesive 31 is formed on one side further inside the cylindrical metal layer formed on the inner wall of the roll master 10. The layer 30 is inserted by being rounded to be smaller than the inner diameter of the metal layer 20 so that the surface provided with the adhesive 31 is on the outer side, and the peeled peeling auxiliary layer 30 is peeled off from one end side in the circumferential direction by a sticking roller 35. The peeling assisting layer 30 is stuck to the metal layer 20 by rotating the sticking roller 35 in the circumferential direction along the inner wall while pressing the metal 30 toward the metal layer 20 side. At this time, as shown in step B of FIG. 6, the starting end and the terminal end of the inner paste of the peeling assisting layer 30 may partially overlap.
In this way, the peeling assist layer 30 can be formed on the inner wall surface of the cylindrical metal layer 20.

FIG. 8 is a diagram showing another example of a method for forming a peeling assist layer shown in step C of FIG.
As shown in Step A of FIG. 8, a protective layer 36 is formed on the roll master 10 on which the metal layer 20 is formed, in addition to the inner wall surface where the metal layer 20 is exposed. This protective layer 36 is provided in order to prevent the peeling assist layer from being formed in unnecessary portions. If the peeling auxiliary layer is formed on the outer wall surface, the force of contracting the roll master during the cooling peeling works, so the effect of the present invention is reduced.

Next, as shown in Step B of FIG. 8, the roll master 10 on which the metal layer 20 is formed is immersed in the ultraviolet curable resin solution 38 and pulled up to apply the resin solution 38 to the surface of the metal layer 20. Thereafter, as shown in Step C of FIG. 8, the resin solution 38 is cured by irradiating with ultraviolet rays (UV light) 39 to form the peeling assist layer 30. Thereafter, the protective layer 36 is removed as shown in Step D of FIG.
In this way, the peeling assist layer 30 may be formed.

  In such a method for forming the peeling auxiliary layer, the environmental temperature at the time of UV light irradiation is the temperature at the time of forming the peeling auxiliary layer, and the temperature of the resin solution may be different from the environmental temperature. Pulling up the roll master from 38 and irradiating with UV light are performed in an environment of substantially the same temperature, that is, the environment in which the bathtub 37 for storing the resin solution 38 is disposed and the environment in which the UV light irradiation is performed are substantially the same. It is preferable. It is preferable that the environmental temperature at the time of forming the peeling assist layer is 40 ° C. or higher.

FIG. 9 is a plan view and a cross-sectional view showing a state where the metal layer is peeled from the roll master 10.
After forming the peeling auxiliary layer 30, the roll master 10 on which the metal layer 20 and the peeling auxiliary layer 30 are formed is shrunk by cooling from the temperature at the time of forming the peeling auxiliary layer 30, and the roll master 10 and the metal layer 20 and The metal layer 20 is peeled from the roll master due to the difference in thermal expansion coefficient from the peeling assisting layer 30.

  In the present invention, a metal film having a thermal expansion coefficient larger than the thermal expansion coefficient of the cylinder and a peeling auxiliary layer are provided, and a layer having a larger thermal expansion coefficient than that of the metal film is used as the peeling auxiliary layer. When the temperature at the time of peeling is made lower than the temperature at the time of forming the peeling auxiliary layer and the entire workpiece is shrunk, the thermal expansion coefficient differs for each material, so that a difference in shrinkage occurs. The metal layer 20 is peeled off from the inner wall surface 10a of the roll master 10 so as to be pulled by the peel auxiliary layer 30 with the shrinkage of the peeling auxiliary layer 30 having the largest shrinkage amount due to cooling. A gap 18 is formed between the wall surface 10a. The cooling temperature is preferably lower by 30 ° C. or more than the temperature at the time of formation. For example, when the environmental temperature at the time of forming the peeling auxiliary layer is 40 ° C., it is preferably cooled to about 10 ° C. If there is a sufficient difference in shrinkage between the roll master 10 and the peeling auxiliary layer 30 in the cylinder radial direction, the temperature change may be less than 30 ° C.

The degree of difference in shrinkage was examined for specific materials.
Tables 1 and 2 show that silicon oxide (SiO ₂ ), silicon (Si) that can constitute a cylinder, nickel (Ni) that is particularly preferably used as a metal layer, polycarbonate (PC) that can be used as a mold release auxiliary layer, and polyethylene terephthalate The amount of shrinkage in the radial direction when the temperature changed by 30 ° C. (equivalent to cooling from 40 ° C. to 10 ° C.) in a cylinder with a diameter of 100 mm and a cylinder with a diameter of 300 mm obtained from the respective thermal expansion coefficients of (PET) For [m] and Ni, PC, and PET, the difference [μm] in the amount of shrinkage between each of SiO ₂ and Si is shown.

As shown in Tables 1 and 2, the difference between the amount of shrinkage of the cylinder and the amount of shrinkage of the peeling assist layer when the temperature changes by 30 ° C. is larger than the difference between the amount of shrinkage of the cylinder and the amount of shrinkage of the metal layer. The metal layer follows the rapid shrinkage of the peeling assist layer, and the metal layer is peeled from the inner wall surface of the roll master.
If there is a gap 18 between the metal layer and the inner wall surface of the roll master at one end in the cylindrical axis direction, the metal layer and the inner wall surface of the roll master are peeled over the entire area by injecting fluid into the gap. be able to. The fluid may be a gas or a liquid.

  At the time of peeling, as shown in FIG. 10, if the gap 18 occurs even at a part at one end in the cylindrical axis direction, a cutter blade 45 is inserted into that part, and the metal layer 20 and the peeling auxiliary layer 30 are separated. The metal layer 20 may be peeled off from the inner wall surface 10a of the roll master 10 while partially changing the shape of the laminated body 40 from the cylindrical shape.

Further, as shown in FIG. 11, a roll master in which the metal layer 20 and the peeling assisting layer 30 are formed in water 48 at a temperature lower than the temperature at which the peeling assisting layer 30 is formed, preferably at a temperature of 30 ° C. or more. The roll master 10, the metal layer 20, and the peeling auxiliary layer 30 may be contracted by immersing 10. In this case, a gap 18 is generated between the roll master 10 and the metal layer 20 due to the difference in shrinkage rate, and water as a fluid is injected from the gap 18 to further promote the separation between the roll master 10 and the metal layer 20. Is done. Furthermore, if the cutter blade 45 is inserted into the gap at one end in the cylindrical axis direction and the laminated body 40 of the metal layer 20 and the peeling auxiliary layer 30 is partially deformed, water injection is further promoted, and the roll master 10 and Separation from the metal layer 20 is also promoted.
In addition, since the resist film 12 which bears an uneven | corrugated pattern is very thin, it considers that the shrinkage rate of the roll original recording 10 is substantially the same as the shrinkage rate of the cylinder 11 which comprises a roll main body.

  The material of each layer may be selected or the film surface may be treated so that the adhesion force between the release auxiliary layer and the metal layer is greater than the adhesion force between the inner wall surface of the roll master and the metal layer. preferable.

In order to further facilitate the peeling between the roll master 10 and the metal layer 20, it is preferable to perform a mold release treatment on the inner wall surface 10 a of the roll master 10 before forming the metal layer 20.
Examples of the mold release process include a process of applying a mold release agent to the inner wall surface 10a. As the releasing agent, it is preferable to use a fluorine-based releasing agent, and it is particularly preferable to form a self-assembled monolayer using a fluorine-based releasing agent. As a fluorine-type mold release agent, Daikin Industries, Ltd. Optool (trademark) is mentioned, for example. The release agent film can be formed by a dip coating method or the like.

FIG. 12 is a plan view and a cross-sectional view of a roll mold made of a cylindrical laminate 40 in which a metal layer 20 and a peeling assist layer 30 are laminated.
The roll mold has a concavo-convex pattern 25 complementary to the concavo-convex pattern 15 of the roll master 10 on the outer surface, and can be manufactured by the method described in detail above. As described above, a plurality of roll dies can be duplicated using one roll dies 10.
In the roll mold produced in this embodiment, since the peeling assist layer 30 is formed over the entire surface of the metal layer 20, the mechanical strength is significantly increased as compared with the case of the metal layer 20 alone. , Handling is improved.

DESCRIPTION OF SYMBOLS 10 Roll original recording 11 Cylinder 12 Resist film 15 Unevenness pattern 20 Metal layer 25 Unevenness pattern on metal layer surface 30 Peeling auxiliary layer 40 Cylindrical laminated body (roll die)

Claims (14)

Prepare a roll master in which a concavo-convex pattern to be transferred is formed on the inner wall surface forming the cylindrical hollow part,
Forming a metal layer on the inner wall;
Forming a peeling assisting layer having a thermal expansion coefficient larger than the thermal expansion coefficient of the metal layer on at least one axial end of the cylindrical surface of the metal layer;
The roll master on which the metal layer and the peeling auxiliary layer are formed is cooled to a temperature lower than the temperature at which the peeling auxiliary layer is formed, so that the metal layer and the peeling auxiliary layer are contracted more than the roll master. And peeling the metal layer from the roll master,
A roll for pulling out a cylindrical laminated body of the metal layer and the peeling auxiliary layer from the roll master and producing a roll mold made of the cylindrical laminated body having an uneven pattern complementary to the uneven pattern on the outer surface. Mold manufacturing method.   The roll mold according to claim 1, wherein the cooling is performed by immersing the roll master in which the metal layer and the peeling auxiliary layer are formed in a liquid having a temperature lower than the temperature at the time of forming the peeling auxiliary layer. Production method.   The method for producing a roll mold according to claim 2, wherein water is used as the liquid.   The manufacturing method of the roll metal mold | die of any one of Claim 1 to 3 which makes temperature lower than the temperature at the time of formation of the said peeling auxiliary layer 30 degreeC or more lower than the temperature at the time of formation of this peeling auxiliary layer . As the roll master, one having a cylinder made of silicon oxide or silicon,
The method for producing a roll mold according to any one of claims 1 to 4, wherein the peeling auxiliary layer is made of polycarbonate or polyethylene terephthalate. One end of the cylindrical laminated body in the axial direction of the column is mechanically deformed, and a fluid is allowed to flow between the one end of the cylindrical laminated body thus mechanically deformed and the roll master so that the metal layer is formed from the roll master. The manufacturing method of the roll metal mold | die of any one of Claim 1 to 5 which peels. Before the metal layer is formed, the inner wall surface is subjected to a mold release treatment,
The method for manufacturing a roll mold according to any one of claims 1 to 6, wherein the metal layer is formed on the inner wall surface subjected to the mold release treatment.   The roll mold manufacturing method according to claim 7, wherein a fluorine-based mold release agent is used in the mold release treatment. The roll die according to any one of claims 1 to 8, further comprising a region not having the uneven pattern to be transferred in at least a partial region of one end in an axial direction of the cylinder on an inner wall surface of the roll master. Manufacturing method.   The method for producing a roll mold according to any one of claims 1 to 9, wherein the peeling assist layer is provided on the entire surface of the metal layer.   The manufacturing method of the roll metal mold | die of any one of Claim 1 to 10 which affixes the said adhesion layer of the resin film which has an adhesion layer on the one surface to the said metal layer, and forms the said peeling auxiliary | assistant layer. Prior to the formation of the peeling auxiliary layer, a peelable protective sheet is attached to a surface other than the inner wall surface on which the metal layer of the roll master is formed,
The method for manufacturing a roll mold according to any one of claims 1 to 10, wherein the auxiliary peeling layer is formed on the surface of the metal layer by dip coating. The manufacturing method of the roll metal mold | die of any one of Claim 1 to 12 which sets the thickness of the said metal layer to 30 micrometers or more and 100 micrometers or less.   The method for manufacturing a roll mold according to any one of claims 1 to 13, wherein the thickness of the peeling assist layer is more than 100 µm.