JP6207849B2 - Coaxial type high frequency coupler and method of manufacturing the same - Google Patents

Coaxial type high frequency coupler and method of manufacturing the same Download PDF

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JP6207849B2
JP6207849B2 JP2013046162A JP2013046162A JP6207849B2 JP 6207849 B2 JP6207849 B2 JP 6207849B2 JP 2013046162 A JP2013046162 A JP 2013046162A JP 2013046162 A JP2013046162 A JP 2013046162A JP 6207849 B2 JP6207849 B2 JP 6207849B2
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inner conductor
thermocouple
ring
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frequency coupler
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尚己 阪本
尚己 阪本
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Canon Electron Tubes and Devices Co Ltd
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本発明の実施形態は、加速器に高周波を供給する同軸型高周波カプラおよびその製造方法に関する。   Embodiments described herein relate generally to a coaxial high frequency coupler that supplies a high frequency to an accelerator and a method for manufacturing the same.

高周波カプラは、クライストロンなどの高周波発生装置からの高周波を加速器の加速空胴に供給するものである。   The high frequency coupler supplies a high frequency from a high frequency generator such as a klystron to an acceleration cavity of an accelerator.

高周波カプラとしては、円筒状の内導体とこの内導体を収容する円筒状の外導体とを同軸に有する同軸型高周波カプラがある。   As a high-frequency coupler, there is a coaxial high-frequency coupler having a cylindrical inner conductor and a cylindrical outer conductor that accommodates the inner conductor.

特開２０１０−２６７４３０号公報JP 2010-267430 A

高周波カプラは、高周波損失による発熱があり、各部の温度上昇を知ることは高周波カプラの設計にとって、および加速器の動作の健全性にとって、好ましいものである。   The high frequency coupler generates heat due to high frequency loss, and knowing the temperature rise of each part is preferable for the design of the high frequency coupler and the soundness of the operation of the accelerator.

しかしながら、同軸型高周波カプラでは、内導体が外導体の内部に収容されているため、外部から内導体の温度を測定することが難しく、また、内導体の温度を高い信頼性で測定することが困難であった。   However, in the coaxial high frequency coupler, since the inner conductor is housed inside the outer conductor, it is difficult to measure the temperature of the inner conductor from the outside, and the temperature of the inner conductor can be measured with high reliability. It was difficult.

本発明が解決しようとする課題は、内導体の温度を高い信頼性で測定できる同軸型高周波カプラおよびその製造方法を提供することである。   The problem to be solved by the present invention is to provide a coaxial high frequency coupler capable of measuring the temperature of the inner conductor with high reliability and a method for manufacturing the same.

本実施形態の同軸型高周波カプラは、円筒状の内導体と円筒状の外導体とを同軸に有するカプラ本体と、熱電対、およびこの熱電対が固定されたリングを有し、このリングが前記内導体の内周面に設置されている温度測定手段とを具備しているものである。 The coaxial high frequency coupler of the present embodiment has a coupler body having a cylindrical inner conductor and a cylindrical outer conductor coaxially, a thermocouple, and a ring to which the thermocouple is fixed. those that and a temperature measuring means which is installed on the inner peripheral surface of the inner conductor.

一実施形態を示す同軸型高周波カプラの断面図である。It is sectional drawing of the coaxial type high frequency coupler which shows one Embodiment. 同上同軸型高周波カプラの拡大断面図である。It is an expanded sectional view of a coaxial type high frequency coupler same as the above.

以下、一実施形態を、図１および図２を参照して説明する。   Hereinafter, an embodiment will be described with reference to FIGS. 1 and 2.

図１に示すように、同軸型高周波カプラ10は、円筒状のカプラ本体11を有し、このカプラ本体11の軸方向の一端側にクライストロンなどの高周波発生装置が結合される結合部12が形成され、軸方向の他端側に加速器が結合される結合部13が形成されている。   As shown in FIG. 1, a coaxial high-frequency coupler 10 has a cylindrical coupler body 11, and a coupling portion 12 to which a high-frequency generator such as a klystron is coupled is formed on one end side of the coupler body 11 in the axial direction. A coupling portion 13 is formed on the other end side in the axial direction to which the accelerator is coupled.

カプラ本体11は、円筒状の内導体14とこの内導体14を収容する円筒状の外導体15とを同軸に有し、これら内導体14と外導体15との間を通じて高周波発生装置から加速器へ高周波を所定のモードで伝送する。   The coupler body 11 has a cylindrical inner conductor 14 and a cylindrical outer conductor 15 that accommodates the inner conductor 14 coaxially, and passes between the inner conductor 14 and the outer conductor 15 from the high-frequency generator to the accelerator. High frequency is transmitted in a predetermined mode.

内導体14は、外導体15の内部に複数の支持体16によって支持されており、一端側には外部にアクセスするための図示しない導管が接続され、他端側には加速器の加速空胴に配置されるアンテナ部17が形成されている。内導体14の一端側と他端側との間の中間部においては、内導体14が軸方向に複数の内導管18に分割されており、これら内導管18が複数のベローズ19によって連結されている。ベローズ19は、軸方向に伸縮可能で、加速器の加速空胴に侵入するアンテナ部17の位置調整を可能とするとともに、超伝導加速空洞ユニットに組み込まれ、加速器の運転で生じる熱変形を吸収するために用いられている。   The inner conductor 14 is supported by a plurality of supports 16 inside the outer conductor 15, a conduit (not shown) for accessing the outside is connected to one end side, and an acceleration cavity of the accelerator is connected to the other end side. An antenna portion 17 to be disposed is formed. In an intermediate portion between one end side and the other end side of the inner conductor 14, the inner conductor 14 is divided into a plurality of inner conduits 18 in the axial direction, and these inner conduits 18 are connected by a plurality of bellows 19. Yes. The bellows 19 can be expanded and contracted in the axial direction, and can adjust the position of the antenna portion 17 that enters the acceleration cavity of the accelerator, and is incorporated in the superconducting acceleration cavity unit to absorb thermal deformation caused by the operation of the accelerator. It is used for.

内導体14の内部には、この内導体14の温度を測定するための温度測定手段21が設置されている。温度測定手段21は、内導体14の例えば２箇所に設置されており、それぞれ、内導体14の内周面に設置されたリング22、およびこのリング22に設置された熱電対23を備えている。   Inside the inner conductor 14, temperature measuring means 21 for measuring the temperature of the inner conductor 14 is installed. The temperature measurement means 21 is installed at, for example, two locations of the inner conductor 14, and includes a ring 22 installed on the inner peripheral surface of the inner conductor 14 and a thermocouple 23 installed on the ring 22. .

リング22は、例えば銅製で、ベローズ19の近傍の内導管18の内周面に、例えば９金ろうなどのろう材24によってろう接されている。   The ring 22 is made of copper, for example, and is brazed to the inner peripheral surface of the inner conduit 18 in the vicinity of the bellows 19 by a brazing material 24 such as 9 gold brazing.

熱電対23としては、例えば、高温用のシース熱電対（株式会社岡崎製作所 Supercouple 1000H シース径０．５ｍｍ）が用いられる。リング22に形成された挿通孔22aに熱電対23の先端が挿入され、リング22の挿通孔22aの周辺部が熱電対23にかしめられているとともに、熱電対23がリング22に例えば９金ろうなどのろう材24によってろう接されている。熱電対23は、内導体14の内部および内導体14の一端側に接続された導管の内部に沿って配置され、その導管を通じて熱電対23の先端とは反対側の基端が外部に導出されて測定器に接続されている。   As the thermocouple 23, for example, a sheath thermocouple for high temperature (Okazaki Corporation Supercouple 1000H sheath diameter 0.5 mm) is used. The tip of the thermocouple 23 is inserted into the insertion hole 22a formed in the ring 22, and the periphery of the insertion hole 22a of the ring 22 is crimped to the thermocouple 23. It is brazed by a brazing material 24 such as. The thermocouple 23 is arranged along the inside of the inner conductor 14 and the inside of the conduit connected to one end of the inner conductor 14, and the base end opposite to the tip of the thermocouple 23 is led out to the outside through the conduit. Connected to the measuring instrument.

そして、同軸型高周波カプラ10を製造するには、内導体14の組立工程において予めリング22と熱電対23とを固定した温度測定手段21を内導体14に組み込み、この内導体14と外導体15とを支持体16を介して組み立てる。   In order to manufacture the coaxial high-frequency coupler 10, the temperature measuring means 21 in which the ring 22 and the thermocouple 23 are fixed in advance in the assembly process of the inner conductor 14 is incorporated in the inner conductor 14, and the inner conductor 14 and the outer conductor 15 are assembled. Are assembled through the support 16.

内導体14に組み込む温度測定手段21は、リング22の挿通孔22aに熱電対23の先端を挿入し、リング22の挿通孔22aの周辺部を熱電対23にかしめ、リング22と熱電対23とを固定している。   The temperature measuring means 21 incorporated in the inner conductor 14 inserts the tip of the thermocouple 23 into the insertion hole 22a of the ring 22, caulking the periphery of the insertion hole 22a of the ring 22 to the thermocouple 23, and the ring 22 and the thermocouple 23 Is fixed.

内導体14の組立工程においては、内導管18とベローズ19とを結合する前に、熱電対23を固定したリング22を内導管18の内側に配置し、熱電対23とリング22との間およびリング22と内導管18との間のそれぞれを例えば９金ろうなどのろう材24によって同時にろう接する。その後、内導管18とベローズ19とを銀ろうなどのろう材24によってろう接し、内導体14を組み立てる。なお、内導管18とベローズ19とを銀ろうなどのろう材24によってろう接する際に、同時に、９金ろうなどのろう材24によってろう接されている熱電対23とリング22との間およびリング22と内導管18との間をさらに銀ろうなどのろう材24によってろう接してもよい。   In the assembly process of the inner conductor 14, before the inner conduit 18 and the bellows 19 are joined, the ring 22 to which the thermocouple 23 is fixed is disposed inside the inner conduit 18, and between the thermocouple 23 and the ring 22 and Each of the ring 22 and the inner conduit 18 is brazed simultaneously with a brazing material 24 such as 9 gold brazing. Thereafter, the inner conduit 18 and the bellows 19 are brazed with a brazing material 24 such as silver brazing to assemble the inner conductor 14. When the inner conduit 18 and the bellows 19 are brazed by a brazing material 24 such as silver brazing, at the same time, between the thermocouple 23 and the ring 22 brazed by the brazing material 24 such as 9 gold brazing and the ring 22 A brazing material 24 such as silver brazing may be further brazed between 22 and the inner conduit 18.

このように構成された同軸型高周波カプラ10では、熱電対23によって内導体14の温度を測定できる。   In the coaxial high frequency coupler 10 configured as described above, the temperature of the inner conductor 14 can be measured by the thermocouple 23.

しかも、熱電対23を内導体14に直接設置することは困難を要するが、リング22を介することにより熱電対23を内導体14に容易に設置できるとともに、高い熱伝導度を有するリング22を通じて内導体14の温度を測定できる。   Moreover, although it is difficult to install the thermocouple 23 directly on the inner conductor 14, it is easy to install the thermocouple 23 on the inner conductor 14 via the ring 22, and the inner side through the ring 22 having high thermal conductivity. The temperature of the conductor 14 can be measured.

さらに、熱電対23とリング22との間およびリング22と内導管18との間をろう接することにより、それらの部材間での高い熱伝導が得られ、熱電対23により内導体14の温度を高い信頼性で測定することができる。   Further, brazing between the thermocouple 23 and the ring 22 and between the ring 22 and the inner conduit 18 provides high heat conduction between the members, and the thermocouple 23 controls the temperature of the inner conductor 14. It can be measured with high reliability.

また、内導体14は表面積の大きいベローズ19の部分が最も温度が高くなりやすいが、このベローズ19の近傍にリング22を介して熱電対23を設置することにより、内導体14の高温部を測定することができる。   In addition, the temperature of the inner conductor 14 where the portion of the bellows 19 having a large surface area is most likely to become the highest is measured by installing a thermocouple 23 through the ring 22 in the vicinity of the bellows 19. can do.

また、内導体14の軸方向に異なる２箇所にリング22を介して熱電対23を設置し、これら２つの熱電対23でそれぞれ測定される温度から内導体14の温度勾配も監視することができる。また、近傍の２箇所を測定することにより、熱電対23の健全性も確認できる。   In addition, thermocouples 23 are installed via rings 22 at two different locations in the axial direction of the inner conductor 14, and the temperature gradient of the inner conductor 14 can be monitored from the temperatures measured by these two thermocouples 23, respectively. . Moreover, the soundness of the thermocouple 23 can also be confirmed by measuring two places in the vicinity.

また、内導体14の組立工程において、内導体14にリング22および熱電対23を組み込むことにより、その後の同軸型高周波カプラ10の組立工程におけるろう接や熱処理を可能にできる。   Further, by incorporating the ring 22 and the thermocouple 23 into the inner conductor 14 in the assembly process of the inner conductor 14, it is possible to perform brazing and heat treatment in the subsequent assembly process of the coaxial high frequency coupler 10.

さらに、内導体14の組立工程において、熱電対23とリング22との間およびリング22と内導管18との間を同時にろう接することにより、組立性を向上できる。   Further, in the assembling process of the inner conductor 14, the assemblability can be improved by simultaneously brazing between the thermocouple 23 and the ring 22 and between the ring 22 and the inner conduit 18.

なお、温度測定手段21は、内導体14の少なくとも１箇所に設置されていればよく、あるいは３個所以上に設置してもよい。   The temperature measuring means 21 may be installed at least at one location of the inner conductor 14, or may be installed at three or more locations.

本発明のいくつかの実施形態を説明したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これら新規な実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。これら実施形態やその変形は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明とその均等の範囲に含まれる。   Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

10 同軸型高周波カプラ
11 カプラ本体
14 内導体
15 外導体
21 温度測定手段
22 リング
23 熱電対 10 Coaxial type high frequency coupler
11 Coupler body
14 Inner conductor
15 outer conductors
21 Temperature measurement means
22 rings
23 Thermocouple

Claims (3)

円筒状の内導体と円筒状の外導体とを同軸に有するカプラ本体と、
熱電対、およびこの熱電対が固定されたリングを有し、このリングが前記内導体の内周面に設置されている温度測定手段と
を具備していることを特徴とする同軸型高周波カプラ。 A coupler body coaxially having a cylindrical inner conductor and a cylindrical outer conductor;
A coaxial high-frequency coupler comprising: a thermocouple; and a temperature measurement means provided on the inner peripheral surface of the inner conductor, the thermocouple having a ring to which the thermocouple is fixed. 前記内導体と前記リングとが、および前記リングと前記熱電対とが、それぞれろう接されている
ことを特徴とする請求項１記載の同軸型高周波カプラ。 Said inner conductor and said ring and has, and with the ring and the thermocouple, claim 1 Symbol placement coaxial high-frequency coupler, characterized in that it is respectively soldered. 円筒状の内導体と円筒状の外導体とを同軸に有する同軸型高周波カプラの製造方法であって、
リングに熱電対を配置するとともに前記内導体の内周面に前記リングを配置し、前記リングと前記熱電対との間および前記内導体と前記リングとの間を同時にろう接する工程と、
前記内導体と前記外導体とを同軸に組み立てる工程と
を具備していることを特徴とする同軸型高周波カプラの製造方法。 A method of manufacturing a coaxial high frequency coupler having a cylindrical inner conductor and a cylindrical outer conductor coaxially,
Disposing a thermocouple on the ring and disposing the ring on the inner peripheral surface of the inner conductor, and simultaneously brazing between the ring and the thermocouple and between the inner conductor and the ring;
And a step of assembling the inner conductor and the outer conductor coaxially.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110493947A (en) * 2019-08-14 2019-11-22 中国科学院近代物理研究所 A kind of voltage biasing structure for accelerator radio frequency resonant cavity high power input coupler

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6612143B2 (en) 2016-02-05 2019-11-27 三菱重工機械システム株式会社 Acceleration cavity input coupler and accelerator

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JPS62155502U (en) * 1986-03-26 1987-10-02
JPH0492801U (en) * 1990-12-28 1992-08-12
JPH0546000U (en) * 1991-11-19 1993-06-18 石川島播磨重工業株式会社 Coaxial waveguide temperature detector
JP2935322B2 (en) * 1993-01-20 1999-08-16 三菱電機株式会社 High frequency power introduction device
JP5498054B2 (en) * 2009-05-13 2014-05-21 株式会社東芝 High frequency coupler for accelerator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110493947A (en) * 2019-08-14 2019-11-22 中国科学院近代物理研究所 A kind of voltage biasing structure for accelerator radio frequency resonant cavity high power input coupler
CN110493947B (en) * 2019-08-14 2021-03-30 中国科学院近代物理研究所 Biasing structure for accelerator radio frequency resonant cavity high-power input coupler

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