JP2015141849A - high-frequency input coupler - Google Patents

high-frequency input coupler Download PDF

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JP2015141849A
JP2015141849A JP2014015028A JP2014015028A JP2015141849A JP 2015141849 A JP2015141849 A JP 2015141849A JP 2014015028 A JP2014015028 A JP 2014015028A JP 2014015028 A JP2014015028 A JP 2014015028A JP 2015141849 A JP2015141849 A JP 2015141849A
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loop
outer conductor
inner conductor
conductor
frequency input
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青木 延忠
Nobutada Aoki
延忠 青木
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Toshiba Corp
Canon Electron Tubes and Devices Co Ltd
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Toshiba Corp
Toshiba Electron Tubes and Devices Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a high-frequency input coupler capable of securing a coaxial property of an inner conductor and an outer conductor, and of connecting between a loop and the inner and outer conductors without any gaps.SOLUTION: A high-frequency input coupler 10 comprises an inner conductor 20 and an outer conductor 21 coaxially arranged. An front end part of the inner conductor 20 and a front end part of the outer conductor 21 are connected with each other by a loop 22. Screws 28 and 29 are inserted into the loop 22 to fasten and fix the loop 22 to the inner conductor 20 and the outer conductor 21, respectively. Covering parts 36 and 37 respectively cover the screws 28 and 29 inserted into the loop 22.

Description

本発明の実施形態は、高周波増幅器から放出された高周波(マイクロ波)を加速空洞に入射する高周波入力結合器に関する。   Embodiments described herein relate generally to a high-frequency input coupler that injects a high-frequency wave (microwave) emitted from a high-frequency amplifier into an acceleration cavity.

従来、荷電粒子(電子、イオン)加速器において、クライストロン等の高周波増幅器から放出された高周波(マイクロ波)を加速空洞に入射するのに高周波入力結合器が用いられている。   2. Description of the Related Art Conventionally, in a charged particle (electron, ion) accelerator, a high frequency input coupler is used to make a high frequency (microwave) emitted from a high frequency amplifier such as a klystron enter an acceleration cavity.

高周波入力結合器は、同軸配置される内導体および外導体、およびこれら内導体の先端部と外導体の先端部とを接続するループを備え、さらに、高周波が通過してくる導波管の内部の大気圧と加速空洞内の高真空とを隔絶し、高周波を効率良く透過する高周波入力窓を備えた構造となっている。   The high-frequency input coupler includes an inner conductor and an outer conductor that are coaxially arranged, a loop that connects a tip portion of these inner conductors and a tip portion of the outer conductor, and further, an inner portion of a waveguide through which a high frequency passes. The structure is equipped with a high frequency input window that isolates the atmospheric pressure from the high vacuum in the acceleration cavity and efficiently transmits high frequencies.

ループは内導体の先端部と外導体の先端部とにろう付けによって接合して組み立てているが、内導体と外導体との同軸性を確保することに加え、ループと内導体および外導体との間に隙間を生じさせないことが重要となっている。ループと内導体および外導体との間に隙間があると、高周波電界の不均一、集中が発生し、放電を誘発することが懸念されるからである。そのため、ループの接合時には、様々な治具を用いて内導体と外導体との同軸性を保ちながら、質量が大きいウェイトをループ上に載せてループと内導体および外導体との間に隙間が発生するのを防ぐような工夫がなされている。   The loop is assembled by brazing the tip of the inner conductor and the tip of the outer conductor by brazing. In addition to ensuring the coaxiality of the inner conductor and the outer conductor, the loop, the inner conductor, and the outer conductor It is important not to create a gap between them. This is because if there is a gap between the loop and the inner conductor and the outer conductor, non-uniformity and concentration of the high-frequency electric field occurs, which may cause discharge. Therefore, when joining the loops, a large weight is placed on the loop while maintaining the coaxiality between the inner conductor and the outer conductor using various jigs, and there is a gap between the loop and the inner conductor and the outer conductor. The device is made to prevent it from occurring.

また、ループと内導体および外導体との接合部分を凹凸形状の嵌合構造とすることにより、ループと内導体および外導体とのずれの発生を抑制することが可能となるが、ループ上に載せるウェイトのずれ等により、ループと内導体および外導体との間の隙間の発生を確実に防ぐことは困難なものとなっている。   In addition, it is possible to suppress the occurrence of deviation between the loop and the inner conductor and the outer conductor by adopting a concave-convex fitting structure at the joint portion between the loop and the inner conductor and the outer conductor. It is difficult to reliably prevent the generation of a gap between the loop and the inner conductor and the outer conductor due to a shift of the weight to be placed.

特開2001−60500号公報JP 2001-60500 A

従来の高周波入力結合器では、内導体と外導体との同軸性を確保し、ループと内導体および外導体との間を隙間なく接続することが難しい問題があった。   The conventional high-frequency input coupler has a problem that it is difficult to ensure the coaxiality between the inner conductor and the outer conductor and to connect the loop and the inner conductor and the outer conductor without any gap.

本発明が解決しようとする課題は、内導体と外導体との同軸性を確保し、ループと内導体および外導体とを隙間なく接続できる高周波入力結合器を提供することである。   The problem to be solved by the present invention is to provide a high-frequency input coupler capable of securing the coaxiality between the inner conductor and the outer conductor and connecting the loop, the inner conductor, and the outer conductor without any gap.

本実施形態の高周波入力結合器は、同軸配置される内導体および外導体と、前記内導体の先端部と前記外導体の先端部とを接続するループと、このループに挿通し、前記内導体および前記外導体に前記ループをそれぞれ締め付けて固定するねじと、前記ループに挿通した前記ねじを覆う覆い部とを具備するものである。   The high-frequency input coupler according to the present embodiment includes an inner conductor and an outer conductor that are coaxially arranged, a loop that connects a front end portion of the inner conductor and a front end portion of the outer conductor, and the inner conductor that is inserted through the loop. And a screw that fastens and fixes the loop to the outer conductor, and a cover that covers the screw inserted through the loop.

第1の実施形態を示す高周波入力結合器の断面図である。It is sectional drawing of the high frequency input coupler which shows 1st Embodiment. 同上高周波入力結合器の正面図である。It is a front view of a high frequency input coupler same as the above. 同上高周波入力結合器の分解状態の断面図である。It is sectional drawing of the decomposition | disassembly state of a high frequency input coupler same as the above. 第2の実施形態を示す高周波入力結合器の正面図である。It is a front view of the high frequency input coupler which shows 2nd Embodiment.

以下、第1の実施形態を、図1ないし図3を参照して説明する。   Hereinafter, a first embodiment will be described with reference to FIGS. 1 to 3.

高周波入力結合器10は、例えばクライストロン等の高周波増幅器から放出された高周波を伝送する導波管11と高周波空洞装置12の加速空洞13との間を結合するとともに、導波管11内の大気圧と加速空洞13内の高真空とを隔絶し、高周波を加速空洞13に入射するのに用いられる。   The high-frequency input coupler 10 couples, for example, a waveguide 11 that transmits a high frequency emitted from a high-frequency amplifier such as a klystron and an acceleration cavity 13 of the high-frequency cavity device 12, and the atmospheric pressure in the waveguide 11 And high vacuum in the acceleration cavity 13 are isolated from each other, and a high frequency is used to enter the acceleration cavity 13.

高周波入力結合器10は、結合器本体16、およびこの結合器本体16の軸方向の一端に設置される窓ユニット17を備えている。高周波入力結合器10は、一例として、全長600mm程度、直径100〜200mm程度に形成されている。   The high-frequency input coupler 10 includes a coupler main body 16 and a window unit 17 installed at one end of the coupler main body 16 in the axial direction. As an example, the high-frequency input coupler 10 is formed with a total length of about 600 mm and a diameter of about 100 to 200 mm.

そして、結合器本体16は、同軸配置される円柱状の内導体20および円筒状の外導体21を備えている。結合器本体16の一端側において内導体20と外導体21とが窓ユニット17によって同軸に固定され、結合器本体16の他端側において内導体20の先端部と外導体21の先端部とがループ22によって同軸に固定されている。これら内導体20、外導体21およびループ22を含む結合器本体16は、内部を通過する高周波によって表面を電流が流れやすくすること等を考慮して、例えば銅材料によって形成されている。   The coupler body 16 includes a columnar inner conductor 20 and a cylindrical outer conductor 21 that are coaxially arranged. The inner conductor 20 and the outer conductor 21 are coaxially fixed by the window unit 17 on one end side of the coupler body 16, and the tip of the inner conductor 20 and the tip of the outer conductor 21 are on the other end of the coupler body 16. It is fixed coaxially by a loop 22. The coupler main body 16 including the inner conductor 20, the outer conductor 21, and the loop 22 is made of, for example, a copper material in consideration of facilitating current flow through the surface by a high frequency passing through the inside.

内導体20および外導体21の先端部には、それぞれねじ孔等の取付孔23,24が形成されている。内導体20の先端部は外導体21の先端部よりも突出されている。   Attachment holes 23 and 24 such as screw holes are formed at the distal ends of the inner conductor 20 and the outer conductor 21, respectively. The leading end portion of the inner conductor 20 protrudes beyond the leading end portion of the outer conductor 21.

ループ22は、内導体20の先端部に接合される接合部25、外導体21の先端部に接合される接合部26、およびこれら接合部25と接合部26とを連結する連結部27を備えている。接合部25,26は連結部27から突出されているとともに、内導体20の先端部と外導体21の先端部との突出量が異なっているのに対応して連結部27からの接合部26の突出量が接合部25の突出量よりも大きくなっている。   The loop 22 includes a joint portion 25 joined to the tip portion of the inner conductor 20, a joint portion 26 joined to the tip portion of the outer conductor 21, and a connecting portion 27 that connects the joint portion 25 and the joint portion 26. ing. The joints 25 and 26 protrude from the connecting part 27, and the joints 26 from the connecting part 27 correspond to the protruding amounts of the tip of the inner conductor 20 and the tip of the outer conductor 21 being different. Is larger than the protruding amount of the joint portion 25.

ループ22は、ねじ28,29によって内導体20の先端部および外導体21の先端部に締め付けて固定されている。ねじ28,29は、軸部30および頭部31を有している。内導体20用のねじ28と外導体21用のねじ29とは、内導体20の先端部と外導体21の先端部との突出量が異なっているのに対応して軸部30の長さが異なっている。ねじ28,29は、例えばステンレスまたは銅材料によって形成されている。これらステンレスと銅は熱膨張率があまり変わらないため、ねじ28,29の材料として何れを用いても構わない。   The loop 22 is fastened and fixed to the distal end portion of the inner conductor 20 and the distal end portion of the outer conductor 21 by screws 28 and 29. The screws 28 and 29 have a shaft portion 30 and a head portion 31. The screw 28 for the inner conductor 20 and the screw 29 for the outer conductor 21 have different lengths of the tip of the inner conductor 20 and the tip of the outer conductor 21, and the length of the shaft portion 30 corresponds. Is different. The screws 28 and 29 are made of, for example, stainless steel or copper material. Since these stainless steel and copper do not change much in the coefficient of thermal expansion, any of them may be used as the material of the screws 28 and 29.

接合部25,26には、それぞれねじ28,29が挿通する挿通孔32,33が貫通形成されている。挿通孔32,33は、軸部30が挿通する小径孔部34、および頭部31が配置される大径孔部35を有している。   Insertion holes 32 and 33 through which the screws 28 and 29 are inserted are formed through the joint portions 25 and 26, respectively. The insertion holes 32 and 33 have a small diameter hole portion 34 through which the shaft portion 30 is inserted and a large diameter hole portion 35 in which the head portion 31 is disposed.

ねじ28,29の頭部31がそれぞれ配置される挿通孔32,33の大径孔部35を覆って覆い部36,37が用いられる。覆い部36,37は、例えば銅材料によって形成されており、ループ22にろう材を挟んで溶着するろう付け(ろう接合)によって接合されているとともにループ22の表面に沿って面一に形成されている。   Cover portions 36 and 37 are used to cover the large-diameter hole portions 35 of the insertion holes 32 and 33 in which the heads 31 of the screws 28 and 29 are respectively disposed. The cover portions 36 and 37 are made of, for example, a copper material, and are joined to the loop 22 by brazing (wax joining) by sandwiching a brazing material and are flush with the surface of the loop 22. ing.

外導体21の外側には、結合器本体16の他端側が加速空洞13に配置されるように高周波空洞装置12に取り付けるためのフランジ38が固定されている。   On the outside of the outer conductor 21, a flange 38 for fixing to the high-frequency cavity device 12 is fixed so that the other end side of the coupler body 16 is disposed in the acceleration cavity 13.

また、窓ユニット17は、内導体20に接合される円筒状の内導体部40、外導体21に接合される円筒状の外導体部41、およびこれら内導体部40と外導体部41との間に接合される高周波入力窓42を備えている。   Further, the window unit 17 includes a cylindrical inner conductor portion 40 joined to the inner conductor 20, a cylindrical outer conductor portion 41 joined to the outer conductor 21, and the inner conductor portion 40 and the outer conductor portion 41. A high-frequency input window 42 is provided between them.

高周波入力窓42は、セラミックス製で、中央に孔43を設けた円板状(円環状)に形成されている。高周波入力窓42の孔43に内導体部40が挿入され、高周波入力窓42が外導体部41の内側に挿入され、高周波入力窓42と内導体部40および外導体部41との接合面がろう付けによって気密に接合されている。そして、高周波入力窓42によって、内導体部40と外導体部41とを同軸に固定している。   The high frequency input window 42 is made of ceramics and is formed in a disc shape (annular shape) having a hole 43 in the center. The inner conductor portion 40 is inserted into the hole 43 of the high frequency input window 42, the high frequency input window 42 is inserted inside the outer conductor portion 41, and the joint surface between the high frequency input window 42 and the inner conductor portion 40 and the outer conductor portion 41 is formed. It is airtightly joined by brazing. The inner conductor portion 40 and the outer conductor portion 41 are coaxially fixed by the high frequency input window 42.

内導体部40および外導体部41は、内部を通過する高周波によって表面を電流が流れやすくすることと、高周波入力窓42のろう付け・昇温時に高周波入力窓42との膨張差で生じる応力を吸収できること等を考慮して、銅材料によって形成されている。   The inner conductor portion 40 and the outer conductor portion 41 have a stress that is generated by a difference in expansion between the high-frequency input window 42 and the high-frequency input window 42 when current flows easily on the surface due to high-frequency waves passing through the inner conductor portion 40 and brazing / heating. Considering that it can be absorbed, it is made of a copper material.

窓ユニット17を結合器本体16に取り付けることにより、内導体部40が内導体20に組み合わされて内導体20の外面に面一となり、外導体部41が外導体21に組み合わされて外導体21の内面に面一となり、これら内導体部40および外導体部41がそれぞれ内導体20および外導体21の一部として構成されている。   By attaching the window unit 17 to the coupler body 16, the inner conductor portion 40 is combined with the inner conductor 20 to be flush with the outer surface of the inner conductor 20, and the outer conductor portion 41 is combined with the outer conductor 21. The inner conductor portion 40 and the outer conductor portion 41 are configured as a part of the inner conductor 20 and the outer conductor 21, respectively.

そして、このように構成された高周波入力結合器10は、外導体21に取り付けられたフランジ38によって高周波空洞装置12に設置され、内導体20と外導体21との間で高周波入力窓42までの部分が真空状態となる。また、高周波入力結合器10は、同軸型の導波管11をねじで固定して取り付け、大気圧の内部を通ってきた高周波を高周波入力窓42の方向に導くものとなっている。   The thus configured high frequency input coupler 10 is installed in the high frequency cavity device 12 by a flange 38 attached to the outer conductor 21, and is connected between the inner conductor 20 and the outer conductor 21 up to the high frequency input window 42. The part is in a vacuum state. The high-frequency input coupler 10 has a coaxial waveguide 11 fixed with screws, and guides high-frequency waves that have passed through the inside of the atmospheric pressure toward the high-frequency input window 42.

次に、ループ22と内導体20および外導体21との組み立てについて説明する。ループ22の接合部25,26をそれぞれ内導体20の先端部および外導体21の先端部にろう材を挟んで配置し、後の接合工程でろう付けできるようにしておく。このとき、内導体20、外導体21の高さが規定の公差に収まらず、ループ22が傾いてしまう場合には、ループ22の接合部25,26のどちらかを予め切削して突出量を調整しておく。   Next, assembly of the loop 22, the inner conductor 20, and the outer conductor 21 will be described. The joining portions 25 and 26 of the loop 22 are arranged with a brazing material sandwiched between the tip portion of the inner conductor 20 and the tip portion of the outer conductor 21, respectively, so that brazing can be performed in a later joining step. At this time, if the heights of the inner conductor 20 and the outer conductor 21 do not fall within the specified tolerances and the loop 22 is inclined, either one of the joining portions 25 and 26 of the loop 22 is cut in advance to increase the protrusion amount. Adjust it.

ねじ28,29をループ22の挿通孔32,33に挿通して内導体20および外導体21の取付孔23,24に螺着し、ねじ28,29によってループ22を内導体20および外導体21に締め付けて固定する。このねじ28,29の締め付けは、内導体20と外導体21との同軸性および傾き等を調整した後に強固に締め付けて固定する。このとき、ねじ28,29の緩みを防止するために、ねじ28,29の頭部31とループ22との間にろう材を挟み、後の接合工程でろう付けできるようにしておく。   The screws 28 and 29 are inserted into the insertion holes 32 and 33 of the loop 22 and screwed into the mounting holes 23 and 24 of the inner conductor 20 and the outer conductor 21, and the loop 22 is connected to the inner conductor 20 and the outer conductor 21 by the screws 28 and 29. Tighten to and fix. The screws 28 and 29 are tightened firmly after the coaxiality and inclination of the inner conductor 20 and the outer conductor 21 are adjusted. At this time, in order to prevent the screws 28 and 29 from loosening, a brazing material is sandwiched between the heads 31 of the screws 28 and 29 and the loop 22 so that they can be brazed in a subsequent joining step.

覆い部36,37をループ22の挿通孔32,33に嵌め込む。このとき、覆い部36,37とループ22との間にろう材を挟み、後の接合工程でろう付けできるようにしておく。また、覆い部36,37は、図3に2点鎖線で示すように、ループ22の挿通孔32,33に挿入される高さよりも高い初期形状のものが用いられる。そのため、覆い部36,37をループ22の挿通孔32,33に嵌め込んだ状態では、覆い部36,37をループ22の表面から突出している。   The cover portions 36 and 37 are fitted into the insertion holes 32 and 33 of the loop 22. At this time, a brazing material is sandwiched between the cover portions 36 and 37 and the loop 22 so that brazing can be performed in a later joining step. Moreover, the cover parts 36 and 37 have an initial shape higher than the height inserted into the insertion holes 32 and 33 of the loop 22 as indicated by a two-dot chain line in FIG. Therefore, when the cover portions 36 and 37 are fitted in the insertion holes 32 and 33 of the loop 22, the cover portions 36 and 37 protrude from the surface of the loop 22.

接合工程において、ろう材を配置しておいたループ22の接合部25,26と内導体20および外導体21との間、ねじ28,29の頭部31とループ22との間、覆い部36,37とループ22との間を、それぞれろう材を挟んで溶着するろう付けによって接合する。   In the joining process, between the joint portions 25 and 26 of the loop 22 where the brazing material has been arranged and the inner conductor 20 and the outer conductor 21, between the head portion 31 of the screws 28 and 29 and the loop 22, and the covering portion 36. , 37 and the loop 22 are joined by brazing with a brazing material interposed therebetween.

接合工程の後に、ループ22の表面から突出する覆い部36,37の突出部分を切削・研磨し、ループ22の表面に面一となるようにする。   After the joining step, the protruding portions of the cover portions 36 and 37 protruding from the surface of the loop 22 are cut and polished so as to be flush with the surface of the loop 22.

このように、高周波入力結合器10では、ねじ28,29でループ22を内導体20および外導体21を締め付けて固定するため、内導体20と外導体21との同軸性を確保し、ループ22と内導体20および外導体21とを隙間なく接続できる。   In this way, in the high frequency input coupler 10, since the loop 22 is fastened and fixed to the inner conductor 20 and the outer conductor 21 with the screws 28 and 29, the coaxiality between the inner conductor 20 and the outer conductor 21 is secured, and the loop 22 And the inner conductor 20 and the outer conductor 21 can be connected without a gap.

しかも、ループ22を挿通したねじ28,29を覆い部36,37で覆うため、ねじ28,29がループ22に埋め込まれた状態となり、ループ22の表面で高周波電界を乱すことを回避することができる。仮に、ループ22の表面にねじ28,29の頭部31が露出していると、頭部31の部分で局所的な電界集中が発生し、頭部31が発熱するおそれがある。   In addition, since the screws 28 and 29 inserted through the loop 22 are covered with the cover portions 36 and 37, the screws 28 and 29 are embedded in the loop 22, and it is possible to avoid disturbing the high-frequency electric field on the surface of the loop 22. it can. If the heads 31 of the screws 28 and 29 are exposed on the surface of the loop 22, local electric field concentration occurs in the head 31 part, and the head 31 may generate heat.

さらに、覆い部36,37をねじ28,29が挿通されたループ22の挿通孔32,33に埋め込み、覆い部36,37をループ22の表面に面一にしているため、ループ22の表面で高周波電界を乱すことを回避することができる。   Further, since the cover portions 36 and 37 are embedded in the insertion holes 32 and 33 of the loop 22 through which the screws 28 and 29 are inserted, and the cover portions 36 and 37 are flush with the surface of the loop 22, Disturbing the high frequency electric field can be avoided.

また、ねじ28,29および覆い部36,37を用いることで組立工数が増加することになるが、ろう付け後に、ループ22の傾き、ろう材の流れ出し、内導体20と外導体21との同軸度に不良が生じた場合には、修正がほとんど不可能となることを考慮すると、予め内導体20および外導体21の同軸性および傾きを調整してねじ28,29でループ22を内導体20および外導体21に固定した後に、ろう付けを行うことは有効なものとなる。   In addition, the assembly man-hour is increased by using the screws 28 and 29 and the cover portions 36 and 37. However, after brazing, the inclination of the loop 22, the flow of the brazing material, and the inner conductor 20 and the outer conductor 21 are coaxial. If a defect occurs every time, considering that correction is almost impossible, adjust the coaxiality and inclination of the inner conductor 20 and the outer conductor 21 in advance, and use the screws 28 and 29 to connect the loop 22 with the inner conductor 20. It is effective to perform brazing after fixing to the outer conductor 21.

また、高周波入力結合器10において、内導体20、外導体21およびループ22は、高周波にさらされることによる温度上昇がある。これら構造物の温度上昇は熱膨張による変形、ディメンジョンの変異、さらに構造物の表面からのガス放出を招くことになり、機器の正常な機能発揮に少なからず影響をもたらすことが懸念される。そのため、大入力の高周波入力結合器10では、外導体21の外周部に水冷ジャケットを設け、さらに内導体20も先端付近まで冷却管を導入して熱を除去する構成が採られている。しかし、ループ22の部分に水冷機構を設けることはサイズの点で難しいものとなるため、ループ22の部分で発生した熱は伝導により内導体20および外導体21に逃がすものとしている。そして、内導体20、外導体21およびループ22は熱伝導性に優れた銅製とすることが一般的なものとなっており、ねじ28,29についても同様の考え方に基づき銅製のものとすることが好ましい。   Further, in the high-frequency input coupler 10, the inner conductor 20, the outer conductor 21, and the loop 22 have a temperature rise due to exposure to a high frequency. The rise in temperature of these structures may cause deformation due to thermal expansion, variation in dimensions, and gas release from the surface of the structure, and there is a concern that this will have a considerable impact on the normal functioning of the equipment. For this reason, the high-input high-frequency input coupler 10 employs a configuration in which a water cooling jacket is provided on the outer peripheral portion of the outer conductor 21 and heat is removed by introducing a cooling pipe to the inner conductor 20 near the tip. However, since it is difficult to provide a water cooling mechanism in the loop 22 portion in terms of size, heat generated in the loop 22 portion is transferred to the inner conductor 20 and the outer conductor 21 by conduction. The inner conductor 20, outer conductor 21, and loop 22 are generally made of copper having excellent thermal conductivity, and the screws 28 and 29 are made of copper based on the same concept. Is preferred.

次に、図4に第2の実施形態を示す。なお、第1の実施形態と同じ構成については同じ符号を用い、その構成および作用効果についての説明を省略する。   Next, FIG. 4 shows a second embodiment. In addition, the same code | symbol is used about the same structure as 1st Embodiment, and the description about the structure and effect is abbreviate | omitted.

高周波入力結合器において、ループ22を内導体20および外導体21にろう付けする際、それぞれを固定するねじ28,29を締め込んでも、ろう付けの温度上昇(銀ろう付けでは800℃程度)によりループ22と内導体20および外導体21とに微小なずれが発生する可能性がある。このずれに関しては、ねじ28,29の締め付け時の回転応力を考慮すると、ループ22と外導体21との接合面で回転ずれが出ることが最も起きやすいものと考えられる。   In the high-frequency input coupler, when the loop 22 is brazed to the inner conductor 20 and the outer conductor 21, even if the screws 28 and 29 for fixing the loop 22 are tightened, the temperature of brazing increases (about 800 ° C. for silver brazing). There is a possibility that a minute shift occurs between the loop 22 and the inner conductor 20 and the outer conductor 21. With regard to this deviation, it is considered that the rotational deviation is most likely to occur at the joint surface between the loop 22 and the outer conductor 21 in consideration of the rotational stress when the screws 28 and 29 are tightened.

このようなずれを防止するために、ループ22と外導体21とを接続する部分で周方向の少なくとも2箇所をねじ29で固定する。これにより、ループ22の回転方向のずれの発生を抑えることが可能となる。   In order to prevent such a shift, at least two portions in the circumferential direction are fixed with screws 29 at a portion where the loop 22 and the outer conductor 21 are connected. As a result, it is possible to suppress the occurrence of deviation in the rotational direction of the loop 22.

なお、ループ22と内導体20との接合面でずれが発生する可能性もあるが、ループ22と外導体21との間での回転ずれの発生が防止できるため、ループ22と内導体20とを固定するねじ28の数を増加しなくてもよい。   Although there is a possibility that a deviation occurs at the joint surface between the loop 22 and the inner conductor 20, since the occurrence of rotational deviation between the loop 22 and the outer conductor 21 can be prevented, the loop 22 and the inner conductor 20 It is not necessary to increase the number of screws 28 for fixing the.

本発明のいくつかの実施形態を説明したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これら新規な実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。これら実施形態やその変形は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明とその均等の範囲に含まれる。   Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

10 高周波入力結合器
20 内導体
21 外導体
22 ループ
28,29 ねじ
32,33 挿通孔
36,37 覆い部
10 High frequency input coupler
20 Inner conductor
21 Outer conductor
22 loops
28, 29 screw
32, 33 insertion hole
36, 37 Cover

Claims (5)

同軸配置される内導体および外導体と、
前記内導体の先端部と前記外導体の先端部とを接続するループと、
このループに挿通し、前記内導体および前記外導体に前記ループをそれぞれ締め付けて固定するねじと、
前記ループに挿通した前記ねじを覆う覆い部と
を具備することを特徴とする高周波入力結合器。
An inner conductor and an outer conductor arranged coaxially;
A loop connecting the tip of the inner conductor and the tip of the outer conductor;
A screw that passes through the loop and fastens and fixes the loop to the inner conductor and the outer conductor;
A high-frequency input coupler comprising: a cover that covers the screw inserted through the loop.
前記覆い部は、前記ループにろう付けによって接合されているとともに前記ループの表面に沿って面一に形成されている
ことを特徴とする請求項1記載の高周波入力結合器。
The high frequency input coupler according to claim 1, wherein the cover is joined to the loop by brazing and is flush with the surface of the loop.
前記ループは、前記ねじが挿通する挿通孔が形成され、
前記覆い部は、前記ねじが挿通された前記挿通孔に埋め込まれている
ことを特徴とする請求項1または2記載の高周波入力結合器。
The loop has an insertion hole through which the screw is inserted,
The high frequency input coupler according to claim 1, wherein the cover is embedded in the insertion hole through which the screw is inserted.
前記ループ、前記ねじおよび前記キャップは、銅材料で形成されている
ことを特徴とする請求項1ないし3いずれか一記載の高周波入力結合器。
The high-frequency input coupler according to any one of claims 1 to 3, wherein the loop, the screw, and the cap are formed of a copper material.
前記ねじは、前記外導体と前記ループとの締め付け固定に2本以上備えている
ことを特徴とする請求項1ないし4いずれか一記載の高周波入力結合器。
5. The high-frequency input coupler according to claim 1, wherein two or more screws are provided for fastening and fixing the outer conductor and the loop.
JP2014015028A 2014-01-30 2014-01-30 high-frequency input coupler Pending JP2015141849A (en)

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Publications (1)

Publication Number Publication Date
JP2015141849A true JP2015141849A (en) 2015-08-03

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Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107863597A (en) * 2017-12-12 2018-03-30 合肥中科离子医学技术装备有限公司 A kind of device for being used to be input to high frequency power coupling in resonator
JP2021114690A (en) * 2020-01-17 2021-08-05 キヤノン電子管デバイス株式会社 High-frequency input coupler

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107863597A (en) * 2017-12-12 2018-03-30 合肥中科离子医学技术装备有限公司 A kind of device for being used to be input to high frequency power coupling in resonator
JP2021114690A (en) * 2020-01-17 2021-08-05 キヤノン電子管デバイス株式会社 High-frequency input coupler
JP7414542B2 (en) 2020-01-17 2024-01-16 キヤノン電子管デバイス株式会社 High frequency input coupler

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