JP6191477B2 - Particle size measuring apparatus and particle size measuring method - Google Patents

Particle size measuring apparatus and particle size measuring method Download PDF

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JP6191477B2
JP6191477B2 JP2014011534A JP2014011534A JP6191477B2 JP 6191477 B2 JP6191477 B2 JP 6191477B2 JP 2014011534 A JP2014011534 A JP 2014011534A JP 2014011534 A JP2014011534 A JP 2014011534A JP 6191477 B2 JP6191477 B2 JP 6191477B2
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十時 慎一郎
慎一郎 十時
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本発明は、試料の粒子径を測定するための粒子径測定装置、粒子径測定方法及び粒子径測定プログラムに関するものである。   The present invention relates to a particle size measuring apparatus, a particle size measuring method, and a particle size measuring program for measuring the particle size of a sample.

従来から、試料の粒子径を測定するために、いわゆるパーティクルカウンターなどの粒子径測定装置が用いられている(例えば、下記特許文献1参照)。この種の粒子径測定装置では、試料中の粒子にレーザ光を照射し、粒子からの散乱光を検出器で受光することにより、得られた散乱光強度に基づいて粒子径を測定することができる。   Conventionally, in order to measure the particle diameter of a sample, a particle diameter measuring apparatus such as a so-called particle counter has been used (for example, see Patent Document 1 below). In this type of particle size measuring device, the particle size can be measured based on the obtained scattered light intensity by irradiating the particles in the sample with laser light and receiving the scattered light from the particles with a detector. it can.

試料中の粒子は、セル内の測定領域を1つずつ通過する。レーザ光は測定領域に集光され、測定領域を1つずつ通過する各粒子で散乱することにより、各粒子の粒子径に応じた散乱光強度が検出器で検出される。   The particles in the sample pass through the measurement region in the cell one by one. The laser light is focused on the measurement region and scattered by each particle passing through the measurement region one by one, and the scattered light intensity corresponding to the particle diameter of each particle is detected by the detector.

特許第2899359号公報Japanese Patent No. 2899359

パーティクルカウンターなどの粒子径測定装置では、上述の通り、各粒子に対して1つずつレーザ光を照射して散乱光強度を検出しなければならない。そのため、各粒子を分離することが困難な場合があり、仮に2つ以上の粒子に対して同時にレーザ光が照射された場合には、粒子径を正確に測定することができないという問題がある。   In a particle diameter measuring apparatus such as a particle counter, as described above, the intensity of scattered light must be detected by irradiating each particle with one laser beam. For this reason, it may be difficult to separate each particle, and if two or more particles are simultaneously irradiated with laser light, there is a problem that the particle size cannot be measured accurately.

また、パーティクルカウンターで測定可能な粒子径の下限は、一般的には250nm程度である。そのため、例えば100nm以下の微粒子の粒子径を測定することは困難であり、測定範囲が限定されるという問題がある。   The lower limit of the particle diameter that can be measured with a particle counter is generally about 250 nm. Therefore, for example, it is difficult to measure the particle diameter of fine particles of 100 nm or less, and there is a problem that the measurement range is limited.

本発明は、上記実情に鑑みてなされたものであり、より広範囲の粒子径を正確に測定することができる粒子径測定装置、粒子径測定方法及び粒子径測定プログラムを提供することを目的とする。   The present invention has been made in view of the above circumstances, and an object thereof is to provide a particle size measuring apparatus, a particle size measuring method, and a particle size measuring program capable of accurately measuring a wider range of particle sizes. .

本発明に係る粒子径測定装置は、粒子分離部と、粒子濃度測定部と、散乱光強度測定部と、測定基準情報記憶部と、粒子径算出部とを備える。前記粒子分離部は、試料を粒子径ごとの粒子群に分離する。前記粒子濃度測定部は、前記粒子分離部により分離された粒子群ごとに粒子濃度を測定する。前記散乱光強度測定部は、前記粒子分離部により分離された粒子群ごとに散乱光強度を測定する。前記測定基準情報記憶部は、単位濃度あたりの散乱光強度と粒子径との関係を測定基準情報として記憶する。前記粒子径算出部は、前記粒子濃度測定部により測定された粒子濃度、及び、前記散乱光強度測定部により測定された散乱光強度基づいて、単位濃度あたりの散乱光強度を算出し、その値と前記測定基準情報に基づいて、前記粒子分離部により分離された粒子群の粒子径を算出する。
本発明に係る粒子径測定装置は、粒子分離部と、粒子濃度測定部と、散乱光強度測定部と、測定基準情報記憶部と、粒子径算出部とを備える。前記粒子分離部は、試料を粒子径ごとの粒子群に分離する。前記粒子濃度測定部は、前記粒子分離部により分離された粒子群ごとに吸光度を測定し、当該吸光度から粒子濃度を測定する。前記散乱光強度測定部は、前記粒子分離部により分離された粒子群ごとに散乱光強度を測定する。前記測定基準情報記憶部は、単位濃度あたりの散乱光強度と粒子径との関係を測定基準情報として記憶する。前記粒子径算出部は、前記粒子濃度測定部により測定された各粒子群に対応する吸光度のピーク面積、前記散乱光強度測定部により測定された各粒子群に対応する散乱光強度のピーク面積、及び、前記測定基準情報に基づいて、前記粒子分離部により分離された粒子群の粒子径を算出する。
The particle size measurement apparatus according to the present invention includes a particle separation unit, a particle concentration measurement unit, a scattered light intensity measurement unit, a measurement reference information storage unit, and a particle size calculation unit. The particle separation unit separates the sample into particle groups for each particle diameter. The particle concentration measurement unit measures the particle concentration for each particle group separated by the particle separation unit. The scattered light intensity measurement unit measures the scattered light intensity for each particle group separated by the particle separation unit. The measurement reference information storage unit stores the relationship between the scattered light intensity per unit concentration and the particle diameter as measurement reference information. The particle diameter calculation unit, particle concentration measurement by the particle concentration measurement unit, and, based on the scattered light intensity measured by the scattered light intensity measuring unit calculates the scattered light intensity per unit concentration, the Based on the value and the measurement reference information, the particle size of the particle group separated by the particle separation unit is calculated.
The particle size measurement apparatus according to the present invention includes a particle separation unit, a particle concentration measurement unit, a scattered light intensity measurement unit, a measurement reference information storage unit, and a particle size calculation unit. The particle separation unit separates the sample into particle groups for each particle diameter. The particle concentration measurement unit measures the absorbance for each particle group separated by the particle separation unit, and measures the particle concentration from the absorbance. The scattered light intensity measurement unit measures the scattered light intensity for each particle group separated by the particle separation unit. The measurement reference information storage unit stores the relationship between the scattered light intensity per unit concentration and the particle diameter as measurement reference information. The particle size calculation unit is a peak area of absorbance corresponding to each particle group measured by the particle concentration measurement unit, a peak area of scattered light intensity corresponding to each particle group measured by the scattered light intensity measurement unit, And based on the said measurement reference information, the particle diameter of the particle group isolate | separated by the said particle | grain separation part is calculated.

このような構成によれば、試料を粒子径ごとの粒子群に分離した上で、各粒子群の粒子径を算出することができる。このとき、単位濃度あたりの散乱光強度と粒子径との関係を表す測定基準情報を用いることにより、1つずつの粒子に分離しなくても、測定された各粒子群の粒子濃度及び散乱光強度に基づいて粒子径を正確に測定することができる。   According to such a configuration, it is possible to calculate the particle diameter of each particle group after separating the sample into particle groups for each particle diameter. At this time, by using the measurement reference information representing the relationship between the scattered light intensity per unit concentration and the particle diameter, the measured particle concentration and scattered light of each particle group without being separated into individual particles. The particle diameter can be accurately measured based on the strength.

また、粒子群単位で散乱光強度を測定するため、各粒子単位で散乱光強度を測定するような構成よりも、粒子径の差異に応じた散乱光強度の変化を判別しやすい。そのため、例えば100nm以下のような極めて微小な粒子でも粒子径を測定することが可能となり、より広範囲の粒子径を測定することができる。   Further, since the scattered light intensity is measured in units of particle groups, it is easier to discriminate changes in the scattered light intensity depending on the difference in particle diameter than in a configuration in which the scattered light intensity is measured in units of particles. Therefore, for example, it is possible to measure the particle diameter even with extremely fine particles such as 100 nm or less, and a wider range of particle diameters can be measured.

前記散乱光強度測定部は、試料からの散乱光を受光する1つの検出器を備えていてもよい。この場合、前記粒子径算出部は、前記1つの検出器により測定された散乱光強度に基づいて、前記粒子分離部により分離された粒子群の粒子径を算出してもよい。   The scattered light intensity measurement unit may include one detector that receives scattered light from the sample. In this case, the particle size calculation unit may calculate the particle size of the particle group separated by the particle separation unit based on the scattered light intensity measured by the one detector.

このような構成によれば、1つの検出器を用いて粒子径を測定することができるため、より簡単かつ安価な構成とすることができる。この場合、測定しようとする粒子径に応じて検出器の位置を設定し、粒子群からの散乱光を受光する角度を変更すれば、例えば数nm〜数μmの広範囲にわたって粒子径を正確に測定することができる。   According to such a configuration, since the particle diameter can be measured using one detector, a simpler and cheaper configuration can be achieved. In this case, if the position of the detector is set according to the particle diameter to be measured and the angle at which scattered light from the particle group is received is changed, the particle diameter can be accurately measured over a wide range of, for example, several nanometers to several micrometers. can do.

前記粒子濃度測定部は、前記粒子分離部により分離された粒子群に光を照射する光源を備えていてもよい。この場合、前記1つの検出器は、前記光源から粒子群に照射された光の散乱光を受光してもよい。   The particle concentration measurement unit may include a light source that irradiates light to the particle group separated by the particle separation unit. In this case, the one detector may receive the scattered light of the light irradiated to the particle group from the light source.

このような構成によれば、粒子濃度測定部の光源から粒子群に照射される光を用いて、粒子群の粒子濃度を測定することができるだけでなく、散乱光を検出器で受光することにより、粒子群の散乱光強度も測定することができる。この場合、既存の粒子濃度測定部に1つの検出器を追加するだけの簡単な構成で、粒子径を測定することができる。   According to such a configuration, not only can the particle concentration of the particle group be measured using light emitted from the light source of the particle concentration measurement unit, but also the scattered light is received by the detector. The scattered light intensity of the particle group can also be measured. In this case, the particle diameter can be measured with a simple configuration in which only one detector is added to the existing particle concentration measurement unit.

本発明に係る粒子径測定方法は、粒子分離ステップと、粒子濃度測定ステップと、散乱光強度測定ステップと、測定基準情報読出ステップと、粒子径算出ステップとを備える。前記粒子分離ステップでは、試料を粒子径ごとの粒子群に分離する。前記粒子濃度測定ステップでは、前記粒子分離ステップで分離された粒子群ごとに粒子濃度を測定する。前記散乱光強度測定ステップでは、前記粒子分離ステップで分離された粒子群ごとに散乱光強度を測定する。前記測定基準情報読出ステップでは、単位濃度あたりの散乱光強度と粒子径との関係を測定基準情報として記憶する測定基準情報記憶部から、前記測定基準情報を読み出す。前記粒子径算出ステップでは、前記粒子濃度測定ステップで測定された粒子濃度、及び、前記散乱光強度測定ステップで測定された散乱光強度基づいて、単位濃度あたりの散乱光強度を算出し、その値と前記測定基準情報に基づいて、前記粒子分離ステップで分離された粒子群の粒子径を算出する。
本発明に係る粒子径測定方法は、粒子分離ステップと、粒子濃度測定ステップと、散乱光強度測定ステップと、測定基準情報読出ステップと、粒子径算出ステップとを備える。前記粒子分離ステップでは、試料を粒子径ごとの粒子群に分離する。前記粒子濃度測定ステップでは、前記粒子分離ステップで分離された粒子群ごとに吸光度を測定し、当該吸光度から粒子濃度を測定する。前記散乱光強度測定ステップでは、前記粒子分離ステップで分離された粒子群ごとに散乱光強度を測定する。前記測定基準情報読出ステップでは、単位濃度あたりの散乱光強度と粒子径との関係を測定基準情報として記憶する測定基準情報記憶部から、前記測定基準情報を読み出す。前記粒子径算出ステップでは、前記粒子濃度測定ステップで測定された各粒子群に対応する吸光度のピーク面積、前記散乱光強度測定ステップで測定された各粒子群に対応する散乱光強度のピーク面積、及び、前記測定基準情報に基づいて、前記粒子分離ステップで分離された粒子群の粒子径を算出する。
The particle size measurement method according to the present invention includes a particle separation step, a particle concentration measurement step, a scattered light intensity measurement step, a measurement reference information reading step, and a particle size calculation step. In the particle separation step, the sample is separated into particle groups for each particle diameter. In the particle concentration measurement step, the particle concentration is measured for each particle group separated in the particle separation step. In the scattered light intensity measurement step, the scattered light intensity is measured for each particle group separated in the particle separation step. In the measurement standard information reading step, the measurement standard information is read from a measurement standard information storage unit that stores the relationship between the scattered light intensity per unit concentration and the particle diameter as measurement standard information. Wherein the particle diameter calculating step, the particle concentration measured measured particle concentration in step, and, on the basis of the measured scattered light intensity in the scattered light intensity measuring step to calculate the scattered light intensity per unit concentration, the Based on the value and the measurement reference information, the particle size of the particle group separated in the particle separation step is calculated.
The particle size measurement method according to the present invention includes a particle separation step, a particle concentration measurement step, a scattered light intensity measurement step, a measurement reference information reading step, and a particle size calculation step. In the particle separation step, the sample is separated into particle groups for each particle diameter. In the particle concentration measurement step, the absorbance is measured for each particle group separated in the particle separation step, and the particle concentration is measured from the absorbance. In the scattered light intensity measurement step, the scattered light intensity is measured for each particle group separated in the particle separation step. In the measurement standard information reading step, the measurement standard information is read from a measurement standard information storage unit that stores the relationship between the scattered light intensity per unit concentration and the particle diameter as measurement standard information. In the particle diameter calculation step, the peak area of absorbance corresponding to each particle group measured in the particle concentration measurement step, the peak area of scattered light intensity corresponding to each particle group measured in the scattered light intensity measurement step, And based on the said measurement reference information, the particle diameter of the particle group isolate | separated by the said particle separation step is calculated.

本発明に係る粒子径測定プログラムは、前記粒子分離ステップと、前記粒子濃度測定ステップと、前記散乱光強度測定ステップと、前記測定基準情報読出ステップと、前記粒子径算出ステップとをコンピュータに実行させる。   The particle size measurement program according to the present invention causes a computer to execute the particle separation step, the particle concentration measurement step, the scattered light intensity measurement step, the measurement reference information reading step, and the particle size calculation step. .

本発明によれば、1つずつの粒子に分離しなくても、試料を粒子径ごとの粒子群に分離し、各粒子群の粒子濃度及び散乱光強度を測定することにより、粒子径を正確に測定することができる。また、本発明によれば、粒子群単位で散乱光強度を測定するため、極めて微小な粒子でも粒子径を測定することが可能となり、より広範囲の粒子径を測定することができる。   According to the present invention, the particle size can be accurately determined by separating the sample into particle groups for each particle size and measuring the particle concentration and scattered light intensity of each particle group without separating the particles into individual particles. Can be measured. Further, according to the present invention, since the scattered light intensity is measured in units of particle groups, it is possible to measure the particle diameter even with extremely fine particles, and a wider range of particle diameters can be measured.

本発明の一実施形態に係る粒子径測定装置の構成例を示した概略図である。It is the schematic which showed the structural example of the particle diameter measuring apparatus which concerns on one Embodiment of this invention. 散乱光強度測定部の具体的構成の一例を示した概略図である。It is the schematic which showed an example of the specific structure of a scattered light intensity | strength measurement part. 制御装置の具体的構成の一例を示したブロック図である。It is the block diagram which showed an example of the specific structure of a control apparatus. 測定基準情報の一例について説明するための図である。It is a figure for demonstrating an example of measurement reference information. 粒子径を算出する際の吸光度A及び散乱光強度Iの一例を時間経過とともに示した図である。It is the figure which showed an example of the light absorbency A and the scattered light intensity | strength I at the time of calculating a particle diameter with time passage. 試料の粒子径を測定する際の制御部による処理の一例を示したフローチャートである。It is the flowchart which showed an example of the process by the control part at the time of measuring the particle diameter of a sample. 粒子濃度測定部の変形例を示した概略図である。It is the schematic which showed the modification of the particle concentration measurement part.

図1は、本発明の一実施形態に係る粒子径測定装置の構成例を示した概略図である。この粒子径測定装置は、タンパク質などの試料の粒子径を測定するための装置であり、導入部1、粒子分離部2、粒子濃度測定部3、散乱光強度測定部4及び制御装置5などを備えている。   FIG. 1 is a schematic diagram showing a configuration example of a particle size measuring apparatus according to an embodiment of the present invention. This particle size measuring device is a device for measuring the particle size of a sample such as protein, and includes an introduction unit 1, a particle separation unit 2, a particle concentration measurement unit 3, a scattered light intensity measurement unit 4, a control device 5, and the like. I have.

試料は、導入部1から粒子分離部2に導入される。粒子分離部2は、例えばサイズ排除クロマトグラフのような液体クロマトグラフにより構成され、試料を粒子径ごとの粒子群に分離する。すなわち、粒子径に応じて粒子の流速が変化するような機構を用いて粒子分離部2を構成することにより、粒子径が近似する粒子同士を粒子群として同じ時間帯に溶出させることができる。ただし、粒子分離部2は、液体クロマトグラフに限らず、例えばFFF(Field Flow Fractionation)法などの他の方法により、試料を粒子径ごとの粒子群に分離することができるような構成であってもよい。   The sample is introduced from the introduction unit 1 to the particle separation unit 2. The particle separation unit 2 is configured by a liquid chromatograph such as a size exclusion chromatograph, for example, and separates a sample into particle groups for each particle diameter. That is, by configuring the particle separation unit 2 using a mechanism that changes the flow rate of particles according to the particle diameter, particles having similar particle diameters can be eluted as particle groups in the same time zone. However, the particle separation unit 2 is not limited to a liquid chromatograph, and is configured to be able to separate a sample into particles for each particle diameter by other methods such as FFF (Field Flow Fractionation). Also good.

粒子濃度測定部3は、例えば光源31及び検出器32を備えており、粒子分離部2により分離された粒子群ごとに粒子濃度を測定する。具体的には、粒子分離部2により分離されて、粒子濃度測定部3に順次導かれる各粒子径の粒子群に対して、光源31から測定光が照射される。そして、粒子群を通過した測定光を検出器32で検出することにより吸光度を測定し、当該吸光度から粒子の濃度を算出することができる。   The particle concentration measurement unit 3 includes a light source 31 and a detector 32, for example, and measures the particle concentration for each particle group separated by the particle separation unit 2. Specifically, the measurement light is irradiated from the light source 31 to the particle groups having the respective particle diameters separated by the particle separation unit 2 and sequentially guided to the particle concentration measurement unit 3. Then, the absorbance can be measured by detecting the measurement light passing through the particle group with the detector 32, and the concentration of the particles can be calculated from the absorbance.

吸光度から粒子濃度を算出する際には、例えば既知の濃度を有する粒子群について吸光度を測定することにより得られる検量線を用いることができる。検出器32としては、例えばUV検出器(紫外線検出器)、RI検出器(示差屈折率検出器)、RF検出器(蛍光検出器)などの各種検出器を用いることができる。   When calculating the particle concentration from the absorbance, for example, a calibration curve obtained by measuring the absorbance of a particle group having a known concentration can be used. As the detector 32, for example, various detectors such as a UV detector (ultraviolet detector), an RI detector (differential refractive index detector), and an RF detector (fluorescence detector) can be used.

散乱光強度測定部4は、粒子分離部2により分離された粒子群ごとに散乱光強度を測定するためのものであり、この例では、粒子濃度測定部3を通過した各粒子径の粒子群が、散乱光強度測定部4に順次導かれる。散乱光強度測定部4に順次導かれる各粒子径の粒子群には、光源41から測定光が照射され、当該測定光が粒子群で散乱することにより発せられる散乱光が検出器42で検出される。   The scattered light intensity measurement unit 4 is for measuring the scattered light intensity for each particle group separated by the particle separation unit 2. In this example, the particle group having each particle diameter that has passed through the particle concentration measurement unit 3. Are sequentially guided to the scattered light intensity measurement unit 4. The particle groups of each particle diameter sequentially guided to the scattered light intensity measurement unit 4 are irradiated with the measurement light from the light source 41, and the scattered light emitted when the measurement light is scattered by the particle group is detected by the detector 42. The

光源41としては、例えばランプ、LED(Light Emitting Diode)又はレーザ光源などの各種光源を用いることができる。また、検出器42としては、フォトダイオード又はPMT(光電子増倍管)などの各種検出器を用いることができる。   As the light source 41, various light sources, such as a lamp, LED (Light Emitting Diode), or a laser light source, can be used, for example. Moreover, as the detector 42, various detectors, such as a photodiode or PMT (photomultiplier tube), can be used.

制御装置5は、導入部1、粒子分離部2、粒子濃度測定部3及び散乱光強度測定部4などの各部の動作を制御するとともに、検出器32,42による検出結果に基づいて演算を行う。本実施形態では、粒子濃度測定部3により測定された粒子濃度と、散乱光強度測定部4により測定された散乱光強度とを用いて、粒子分離部2により分離された各粒子群の粒子径が算出される。   The control device 5 controls the operation of each unit such as the introduction unit 1, the particle separation unit 2, the particle concentration measurement unit 3, and the scattered light intensity measurement unit 4, and performs calculations based on the detection results by the detectors 32 and 42. . In the present embodiment, the particle diameter of each particle group separated by the particle separation unit 2 using the particle concentration measured by the particle concentration measurement unit 3 and the scattered light intensity measured by the scattered light intensity measurement unit 4. Is calculated.

図2は、散乱光強度測定部4の具体的構成の一例を示した概略図である。この図2に示すように、光源41からの測定光は、セル43内に順次導かれる粒子径ごとの粒子群Pに対して照射され、このとき発生する散乱光が検出器42により検出される。   FIG. 2 is a schematic diagram illustrating an example of a specific configuration of the scattered light intensity measurement unit 4. As shown in FIG. 2, the measurement light from the light source 41 is irradiated to the particle group P for each particle diameter sequentially guided into the cell 43, and the scattered light generated at this time is detected by the detector 42. .

この例では、光源41側から見てセル43の側方に配置された1つの側方センサにより検出器42が構成されている。セル43は、例えば薄い中空状の部材により形成されており、その厚み方向Dが光源41から入射する測定光の光軸Lと平行になるように配置される。検出器42としての側方センサは、セル43に対して、例えば厚み方向Dに直交する方向に配置される。   In this example, the detector 42 is constituted by one side sensor arranged on the side of the cell 43 as viewed from the light source 41 side. The cell 43 is formed of, for example, a thin hollow member, and is arranged so that the thickness direction D thereof is parallel to the optical axis L of the measurement light incident from the light source 41. The side sensor as the detector 42 is arranged with respect to the cell 43 in a direction orthogonal to the thickness direction D, for example.

図3は、制御装置5の具体的構成の一例を示したブロック図である。制御装置5は、例えばコンピュータにより構成され、制御部51及び記憶部52などを備えている。制御部51は、例えばCPU(Central Processing Unit)を含む構成であり、CPUがプログラムを実行することにより、粒子径算出部511などの各種機能部として機能する。記憶部52は、例えばROM(Read Only Memory)、RAM(Random Access Memory)及びハードディスクなどにより構成することができる。   FIG. 3 is a block diagram illustrating an example of a specific configuration of the control device 5. The control device 5 is configured by a computer, for example, and includes a control unit 51 and a storage unit 52. The control unit 51 includes, for example, a CPU (Central Processing Unit), and functions as various functional units such as the particle size calculation unit 511 when the CPU executes a program. The storage unit 52 can be configured by, for example, a ROM (Read Only Memory), a RAM (Random Access Memory), a hard disk, and the like.

粒子径算出部511は、粒子濃度測定部3により測定された粒子濃度、及び、散乱光強度測定部4により測定された散乱光強度に基づいて、粒子分離部2により分離された粒子群の粒子径を算出するための処理を行う。記憶部52には、単位濃度あたりの散乱光強度と粒子径との関係を測定基準情報として記憶する測定基準情報記憶部521が割り当てられており、粒子径算出部511は、当該測定基準情報を用いて粒子群の粒子径を算出する。   The particle size calculation unit 511 is a particle group particle separated by the particle separation unit 2 based on the particle concentration measured by the particle concentration measurement unit 3 and the scattered light intensity measured by the scattered light intensity measurement unit 4. A process for calculating the diameter is performed. The storage unit 52 is assigned a measurement reference information storage unit 521 that stores the relationship between the scattered light intensity per unit concentration and the particle diameter as measurement reference information. The particle diameter calculation unit 511 stores the measurement reference information. Use to calculate the particle size of the particle group.

粒子径算出部511により算出された粒子径は、記憶部52に割り当てられた粒子径記憶部522に、各粒子群に対応付けて記憶される。粒子径記憶部522に記憶されている各粒子群の粒子径については、測定結果として読み出して、表示部(図示せず)に表示させるなどの処理を行うことができる。   The particle diameter calculated by the particle diameter calculation unit 511 is stored in the particle diameter storage unit 522 allocated to the storage unit 52 in association with each particle group. About the particle diameter of each particle group memorize | stored in the particle diameter memory | storage part 522, it reads as a measurement result and can perform the process of displaying on a display part (not shown).

図4は、測定基準情報の一例について説明するための図である。図4に示すように、粒子濃度測定部3により測定される粒子濃度(C)と、散乱光強度測定部4により測定される散乱光強度(I)とは比例しており、各粒子群の粒子径(d)に応じて、単位濃度あたりの散乱光強度(図4における「傾き」)が変化する。このような粒子濃度(C)、散乱光強度(I)及び粒子径(d)の関係を表す測定基準情報は、例えばミー散乱理論に基づく計算式などを用いて求めることもできるし、既知の粒子径を有する粒子群について粒子濃度及び散乱光強度を測定することにより検量線として求めることもできる。   FIG. 4 is a diagram for explaining an example of the measurement reference information. As shown in FIG. 4, the particle concentration (C) measured by the particle concentration measuring unit 3 and the scattered light intensity (I) measured by the scattered light intensity measuring unit 4 are proportional to each other. Depending on the particle diameter (d), the scattered light intensity per unit concentration (“tilt” in FIG. 4) changes. The measurement standard information representing the relationship between the particle concentration (C), the scattered light intensity (I), and the particle diameter (d) can be obtained by using, for example, a calculation formula based on the Mie scattering theory or the like. A calibration curve can also be obtained by measuring the particle concentration and scattered light intensity of a particle group having a particle diameter.

粒子径算出部511は、粒子濃度測定部3により測定された粒子濃度(C)、及び、散乱光強度測定部4により測定された散乱光強度(I)に基づいて、単位濃度あたりの散乱光強度(傾き)を算出し、当該傾きを図4に示すような測定基準情報に対応する関数に代入することにより、各粒子群の粒子径(d)を特定する。例えば、粒子濃度がC=C1、散乱光強度がI=I1であった場合には、その粒子群の各粒子の粒子径はd=50nmとなる。   Based on the particle concentration (C) measured by the particle concentration measuring unit 3 and the scattered light intensity (I) measured by the scattered light intensity measuring unit 4, the particle diameter calculating unit 511 is configured to scatter light per unit concentration. By calculating the intensity (slope) and substituting the slope into a function corresponding to the measurement reference information as shown in FIG. 4, the particle diameter (d) of each particle group is specified. For example, when the particle concentration is C = C1 and the scattered light intensity is I = I1, the particle diameter of each particle in the particle group is d = 50 nm.

このように、粒子分離部2により分離された粒子群の粒子濃度(C)が得られたとしても、当該粒子群の散乱光強度(I)が得られなければ粒子径(d)を特定することはできない。同様に、粒子分離部2により分離された粒子群の散乱光強度(I)が得られたとしても、当該粒子群の粒子濃度(C)が得られなければ粒子径(d)を特定することはできない。すなわち、粒子分離部2により分離された粒子群の粒子濃度(C)及び散乱光強度(I)の両方が得られた場合にのみ、図4に示すような測定基準情報を用いて粒子径(d)を特定することができる。   Thus, even if the particle concentration (C) of the particle group separated by the particle separation unit 2 is obtained, the particle diameter (d) is specified unless the scattered light intensity (I) of the particle group is obtained. It is not possible. Similarly, even if the scattered light intensity (I) of the particle group separated by the particle separation unit 2 is obtained, the particle diameter (d) is specified unless the particle concentration (C) of the particle group is obtained. I can't. That is, only when both the particle concentration (C) and the scattered light intensity (I) of the particle group separated by the particle separation unit 2 are obtained, the particle diameter ( d) can be specified.

図5は、粒子径を算出する際の吸光度A及び散乱光強度Iの一例を時間経過とともに示した図である。この例では、粒子濃度測定部3により吸光度Aが測定されるタイミングと、散乱光強度測定部4により散乱光強度Iが測定されるタイミングとの対応関係が、各粒子群について正確に得られる場合について説明する。   FIG. 5 is a diagram showing an example of the absorbance A and scattered light intensity I when calculating the particle diameter over time. In this example, the correspondence between the timing at which the absorbance A is measured by the particle concentration measuring unit 3 and the timing at which the scattered light intensity I is measured by the scattered light intensity measuring unit 4 is accurately obtained for each particle group. Will be described.

例えば図5のように、粒子分離部2により分離された粒子群について、あるタイミングにおける吸光度がA=A2であり、対応するタイミングにおける散乱光強度がI=I2であったとする。この場合、吸光度A2から算出される粒子濃度C2で散乱光強度I2を除算することにより、単位濃度あたりの散乱光強度(I2/C2)が算出される。このようにして算出された単位濃度あたりの散乱光強度(I2/C2)を、例えば単位濃度あたりの散乱光強度と粒子径との関係を表す関数に代入することにより、当該粒子群の粒子径を算出することができる。   For example, as shown in FIG. 5, for the particle group separated by the particle separation unit 2, it is assumed that the absorbance at a certain timing is A = A2, and the scattered light intensity at the corresponding timing is I = I2. In this case, the scattered light intensity (I2 / C2) per unit concentration is calculated by dividing the scattered light intensity I2 by the particle concentration C2 calculated from the absorbance A2. By substituting the scattered light intensity (I2 / C2) per unit concentration calculated in this way into a function representing the relationship between the scattered light intensity per unit concentration and the particle diameter, for example, the particle diameter of the particle group Can be calculated.

この例では、粒子濃度測定部3により測定される吸光度Aの瞬時値(A2)と、散乱光強度測定部4により測定される散乱光強度Iの瞬時値(I2)とに基づいて、各粒子群の粒子径を算出するような構成について説明した。しかし、例えば各粒子群に対応する吸光度A及び散乱光強度Iの各ピーク面積に基づいて、各粒子群の粒子径を算出するような構成であってもよい。   In this example, each particle is based on the instantaneous value (A2) of the absorbance A measured by the particle concentration measuring unit 3 and the instantaneous value (I2) of the scattered light intensity I measured by the scattered light intensity measuring unit 4. The configuration for calculating the particle size of the group has been described. However, for example, the particle diameter of each particle group may be calculated based on the peak areas of absorbance A and scattered light intensity I corresponding to each particle group.

この場合、同一の粒子群に対応する吸光度AのピークP1と散乱光強度IのピークP2について、それぞれの積算値を求めて単位濃度あたりの散乱光強度を算出してもよい。このように、瞬時値ではなく積算値を用いた場合には、粒子濃度測定部3により吸光度Aが測定されるタイミングと、散乱光強度測定部4により散乱光強度Iが測定されるタイミングとの対応関係が正確に得られない場合であっても、同一の粒子群に対応する吸光度A及び散乱光強度Iの各ピークP1,P2を判別できれば、単位濃度あたりの散乱光強度を正確に算出することができる。   In this case, for the peak P1 of absorbance A and the peak P2 of scattered light intensity I corresponding to the same particle group, respective integrated values may be obtained to calculate the scattered light intensity per unit concentration. As described above, when the integrated value is used instead of the instantaneous value, the timing when the absorbance A is measured by the particle concentration measuring unit 3 and the timing when the scattered light intensity I is measured by the scattered light intensity measuring unit 4. Even if the correspondence relationship cannot be obtained accurately, if the peaks P1 and P2 of the absorbance A and scattered light intensity I corresponding to the same particle group can be discriminated, the scattered light intensity per unit concentration can be accurately calculated. be able to.

図6は、試料の粒子径を測定する際の制御部51による処理の一例を示したフローチャートである。試料の粒子径を測定する際には、まず、導入部1から粒子分離部2に所定の流量で試料を導入させることにより、粒子分離部2において試料を粒子径ごとの粒子群に分離させるための処理が行われる(ステップS101:粒子分離ステップ)。   FIG. 6 is a flowchart showing an example of processing by the control unit 51 when measuring the particle diameter of the sample. When measuring the particle size of a sample, first, the sample is introduced into the particle separation unit 2 from the introduction unit 1 at a predetermined flow rate so that the sample is separated into particle groups for each particle size in the particle separation unit 2. Is performed (step S101: particle separation step).

このようにして粒子群ごとに分離された粒子群は、粒子濃度測定部3に順次導かれ、当該粒子濃度測定部3において粒子群ごとに粒子濃度を測定するための処理が行われる(ステップS102:粒子濃度測定ステップ)。また、各粒子群は粒子濃度測定部3から散乱光強度測定部4に順次導かれ、当該散乱光強度測定部4において粒子群ごとに散乱光強度を測定するための処理が行われる(ステップS103:散乱光強度測定ステップ)。   The particle groups separated for each particle group in this manner are sequentially guided to the particle concentration measurement unit 3, and the particle concentration measurement unit 3 performs a process for measuring the particle concentration for each particle group (step S102). : Particle concentration measurement step). Each particle group is sequentially guided from the particle concentration measuring unit 3 to the scattered light intensity measuring unit 4, and the scattered light intensity measuring unit 4 performs processing for measuring the scattered light intensity for each particle group (step S103). : Scattered light intensity measurement step).

その後、測定基準情報記憶部521から測定基準情報が読み出され(ステップS104:測定基準情報読出ステップ)、当該測定基準情報と、予め測定されている粒子濃度及び散乱光強度とに基づいて、各粒子群の粒子径を算出するための処理が行われる(ステップS105:粒子径算出ステップ)。このようなステップS102〜S105の処理は、粒子分離部2において分離される各粒子群に対して順次実行される。   Thereafter, measurement reference information is read from the measurement reference information storage unit 521 (step S104: measurement reference information reading step), and based on the measurement reference information, the particle concentration and the scattered light intensity measured in advance, Processing for calculating the particle diameter of the particle group is performed (step S105: particle diameter calculating step). Such processing of steps S102 to S105 is sequentially executed for each particle group separated in the particle separation unit 2.

本実施形態では、試料を粒子径ごとの粒子群に分離した上で、各粒子群の粒子径を算出することができる。このとき、図4に示すような単位濃度あたりの散乱光強度と粒子径との関係を表す測定基準情報を用いることにより、1つずつの粒子に分離しなくても、測定された各粒子群の粒子濃度及び散乱光強度に基づいて粒子径を正確に測定することができる。   In this embodiment, after separating a sample into particle groups for each particle diameter, the particle diameter of each particle group can be calculated. At this time, by using the measurement standard information indicating the relationship between the scattered light intensity per unit concentration and the particle diameter as shown in FIG. 4, each measured particle group without being separated into individual particles. The particle diameter can be accurately measured based on the particle concentration and scattered light intensity.

また、粒子群単位で散乱光強度を測定するため、各粒子単位で散乱光強度を測定するような構成よりも、粒子径の差異に応じた散乱光強度の変化を判別しやすい。そのため、図4に示したように、例えば100nm以下のような極めて微小な粒子でも粒子径を測定することが可能となり、より広範囲の粒子径を測定することができる。   Further, since the scattered light intensity is measured in units of particle groups, it is easier to discriminate changes in the scattered light intensity depending on the difference in particle diameter than in a configuration in which the scattered light intensity is measured in units of particles. Therefore, as shown in FIG. 4, it is possible to measure the particle diameter even with extremely fine particles such as 100 nm or less, and a wider range of particle diameters can be measured.

特に、本実施形態では、散乱光強度測定部4に備えられた1つの検出器42により、試料からの散乱光が受光される(図2参照)。そして、当該1つの検出器42により測定された散乱光強度に基づいて、粒子径算出部511が粒子分離部2により分離された粒子群の粒子径を算出するようになっている。   In particular, in the present embodiment, the scattered light from the sample is received by one detector 42 provided in the scattered light intensity measurement unit 4 (see FIG. 2). Then, based on the scattered light intensity measured by the one detector 42, the particle size calculation unit 511 calculates the particle size of the particle group separated by the particle separation unit 2.

このように、1つの検出器42を用いて粒子径を測定することができるため、より簡単かつ安価な構成とすることができる。この場合、測定しようとする粒子径に応じて検出器42の位置を設定し、粒子群からの散乱光を受光する角度を変更すれば、例えば数nm〜数μmの広範囲にわたって粒子径を正確に測定することができる。   Thus, since the particle diameter can be measured using one detector 42, a simpler and cheaper configuration can be achieved. In this case, if the position of the detector 42 is set according to the particle diameter to be measured and the angle at which the scattered light from the particle group is received is changed, the particle diameter can be accurately adjusted over a wide range of, for example, several nm to several μm. Can be measured.

例えば図2のように、検出器42が測定光の光軸Lに対して90°方向に散乱する散乱光を受光する構成の場合には、数nm〜100nm程度の粒子径を測定することができる。また、セル43から光源41側(後方)に散乱する散乱光を検出器42で受光する構成の場合には、より小さい粒子径を測定することができる。一方、セル43から光源41側とは反対側(前方)に散乱する散乱光を検出器42で受光する構成の場合には、より大きい粒子径を測定することができる。   For example, as shown in FIG. 2, when the detector 42 is configured to receive scattered light scattered in a 90 ° direction with respect to the optical axis L of the measurement light, a particle diameter of about several nm to 100 nm can be measured. it can. In the case where the detector 42 receives scattered light scattered from the cell 43 toward the light source 41 (rear), a smaller particle diameter can be measured. On the other hand, when the detector 42 receives scattered light scattered from the cell 43 to the side opposite to the light source 41 (forward), a larger particle diameter can be measured.

図7は、粒子濃度測定部3の変形例を示した概略図である。この変形例では、粒子濃度測定部3に散乱光強度測定部4が一体化されている。すなわち、粒子濃度測定部3に備えられたセル33内に順次導かれる粒子径ごとの粒子群Pに対して、光源31から光(例えば紫外光)が照射され、吸光度が検出器32で測定されるとともに、散乱光強度が検出器42で測定されるようになっている。   FIG. 7 is a schematic view showing a modification of the particle concentration measuring unit 3. In this modification, the scattered light intensity measurement unit 4 is integrated with the particle concentration measurement unit 3. That is, light (for example, ultraviolet light) is irradiated from the light source 31 to the particle group P for each particle diameter sequentially guided into the cell 33 provided in the particle concentration measuring unit 3, and the absorbance is measured by the detector 32. In addition, the scattered light intensity is measured by the detector 42.

このとき、試料の種類に応じて吸収が生じる波長域が異なるため、吸収が生じる波長における検出器32の受光強度に基づいて吸光度を測定すれば、吸光度を良好に測定することができる。一方、吸光が生じない、又は、吸光が生じにくい波長における検出器42の受光強度に基づいて散乱光強度を測定すれば、散乱光強度を良好に測定することができる。   At this time, since the wavelength region where the absorption occurs differs depending on the type of the sample, the absorbance can be satisfactorily measured by measuring the absorbance based on the received light intensity of the detector 32 at the wavelength where the absorption occurs. On the other hand, if the scattered light intensity is measured based on the received light intensity of the detector 42 at a wavelength at which light absorption does not occur or light absorption is difficult to occur, the scattered light intensity can be measured satisfactorily.

なお、吸光度を測定するための検出器32は、セル33に対して光源31側とは反対側(前方)に配置されることが好ましい。一方、散乱光強度を検出するための検出器42は、上述の通り、測定しようとする粒子径に応じて任意の位置に配置することができる。   The detector 32 for measuring the absorbance is preferably arranged on the opposite side (front) of the cell 33 to the light source 31 side. On the other hand, the detector 42 for detecting the scattered light intensity can be arranged at an arbitrary position according to the particle diameter to be measured as described above.

このように、図7のような構成では、粒子濃度測定部3の光源31から粒子群に照射される光を用いて、粒子群の粒子濃度を測定することができるだけでなく、散乱光を検出器42で受光することにより、粒子群の散乱光強度も測定することができる。この場合、既存の粒子濃度測定部3に1つの検出器42を追加するだけの簡単な構成で、粒子径を測定することができる。   As described above, in the configuration as shown in FIG. 7, not only the particle concentration of the particle group can be measured using the light irradiated to the particle group from the light source 31 of the particle concentration measuring unit 3, but also the scattered light is detected. The scattered light intensity of the particle group can be measured by receiving the light with the device 42. In this case, the particle diameter can be measured with a simple configuration in which only one detector 42 is added to the existing particle concentration measurement unit 3.

以上の実施形態では、粒子分離部2により分離された各粒子群が、粒子濃度測定部3に導かれて粒子濃度が測定された後、散乱光強度測定部4に導かれて散乱光強度が測定されるような構成について説明した。しかし、このような構成に限らず、粒子分離部2により分離された各粒子群が、散乱光強度測定部4に導かれて散乱光強度が測定された後、粒子濃度測定部3に導かれて粒子濃度が測定されるような構成であってもよい。   In the above embodiment, each particle group separated by the particle separation unit 2 is guided to the particle concentration measurement unit 3 and the particle concentration is measured, and then guided to the scattered light intensity measurement unit 4 to determine the scattered light intensity. The configuration to be measured has been described. However, the present invention is not limited to this configuration, and each particle group separated by the particle separation unit 2 is guided to the scattered light intensity measurement unit 4 and the scattered light intensity is measured, and then guided to the particle concentration measurement unit 3. The particle concentration may be measured.

この場合、図6のステップS102及びS103は、順序を入れ替えて実行されてもよい。また、図7のように粒子濃度測定部3と散乱光強度測定部4とが一体化された構成の場合には、図6のステップS102及びS103が同時に実行されてもよい。   In this case, steps S102 and S103 in FIG. 6 may be executed in a reversed order. In the case where the particle concentration measuring unit 3 and the scattered light intensity measuring unit 4 are integrated as shown in FIG. 7, steps S102 and S103 of FIG. 6 may be executed simultaneously.

上記実施形態では、制御部51が、図6に例示されるような処理を実行することにより、試料の粒子径が自動で測定されるような構成について説明した。しかし、このような構成に限らず、図6に例示されるような各処理の少なくとも1つが、作業者により手動で行われるような構成であってもよい。   In the above embodiment, the configuration in which the control unit 51 automatically measures the particle diameter of the sample by executing the process illustrated in FIG. 6 has been described. However, the configuration is not limited to such a configuration, and a configuration in which at least one of the processes illustrated in FIG. 6 is manually performed by an operator may be employed.

また、上記実施形態のように、試料の粒子径を測定するための粒子径測定装置を提供することができるだけでなく、図6に例示されるような処理をコンピュータに実行させるためのプログラム(粒子径測定プログラム)を提供することも可能である。この場合、上記プログラムは、記憶媒体に記憶された状態で提供されるような構成であってもよいし、有線通信又は無線通信を介してプログラム自体が提供されるような構成であってもよい。   Further, as in the above-described embodiment, not only can a particle size measuring device for measuring the particle size of a sample be provided, but also a program (particles) for causing a computer to execute the processing illustrated in FIG. It is also possible to provide a diameter measurement program. In this case, the program may be configured to be provided in a state stored in a storage medium, or may be configured to provide the program itself via wired communication or wireless communication. .

1 導入部
2 粒子分離部
3 粒子濃度測定部
4 散乱光強度測定部
5 制御装置
31 光源
32 検出器
33 セル
41 光源
42 検出器
43 セル
51 制御部
52 記憶部
511 粒子径算出部
521 測定基準情報記憶部
522 粒子径記憶部
DESCRIPTION OF SYMBOLS 1 Introduction part 2 Particle separation part 3 Particle concentration measurement part 4 Scattered light intensity measurement part 5 Control apparatus 31 Light source 32 Detector 33 Cell 41 Light source 42 Detector 43 Cell 51 Control part 52 Memory | storage part 511 Particle diameter calculation part 521 Measurement reference information Storage unit 522 Particle size storage unit

Claims (2)

試料を粒子径ごとの粒子群に分離する粒子分離部と、
前記粒子分離部により分離された粒子群ごとに吸光度を測定し、当該吸光度から粒子濃度を測定する粒子濃度測定部と、
前記粒子分離部により分離された粒子群ごとに散乱光強度を測定する散乱光強度測定部と、
単位濃度あたりの散乱光強度と粒子径との関係を測定基準情報として記憶する測定基準情報記憶部と、
前記粒子濃度測定部により測定された各粒子群に対応する吸光度のピーク面積、前記散乱光強度測定部により測定された各粒子群に対応する散乱光強度のピーク面積、及び、前記測定基準情報に基づいて、前記粒子分離部により分離された粒子群の粒子径を算出する粒子径算出部とを備えたことを特徴とする粒子径測定装置。
A particle separation unit for separating the sample into particles for each particle size;
Measuring the absorbance for each particle group separated by the particle separation unit, a particle concentration measurement unit for measuring the particle concentration from the absorbance,
A scattered light intensity measurement unit for measuring the scattered light intensity for each particle group separated by the particle separation unit;
A measurement standard information storage unit for storing the relationship between the scattered light intensity per unit concentration and the particle diameter as measurement standard information;
In the peak area of absorbance corresponding to each particle group measured by the particle concentration measuring unit, the peak area of scattered light intensity corresponding to each particle group measured by the scattered light intensity measuring unit, and the measurement reference information A particle size measuring apparatus comprising: a particle size calculating unit that calculates a particle size of the particle group separated by the particle separating unit.
試料を粒子径ごとの粒子群に分離する粒子分離ステップと、
前記粒子分離ステップで分離された粒子群ごとに吸光度を測定し、当該吸光度から粒子濃度を測定する粒子濃度測定ステップと、
前記粒子分離ステップで分離された粒子群ごとに散乱光強度を測定する散乱光強度測定ステップと、
単位濃度あたりの散乱光強度と粒子径との関係を測定基準情報として記憶する測定基準情報記憶部から、前記測定基準情報を読み出す測定基準情報読出ステップと、
前記粒子濃度測定ステップで測定された各粒子群に対応する吸光度のピーク面積、前記散乱光強度測定ステップで測定された各粒子群に対応する散乱光強度のピーク面積、及び、前記測定基準情報に基づいて、前記粒子分離ステップで分離された粒子群の粒子径を算出する粒子径算出ステップとを備えたことを特徴とする粒子径測定方法。
A particle separation step for separating the sample into particles for each particle size;
Measuring the absorbance for each particle group separated in the particle separation step, measuring the particle concentration from the absorbance, a particle concentration measurement step,
A scattered light intensity measurement step for measuring the scattered light intensity for each particle group separated in the particle separation step;
A measurement reference information reading step for reading the measurement reference information from a measurement reference information storage unit that stores the relationship between the scattered light intensity per unit concentration and the particle diameter as measurement reference information;
The absorbance peak area corresponding to each particle group measured in the particle concentration measurement step, the scattered light intensity peak area corresponding to each particle group measured in the scattered light intensity measurement step, and the measurement reference information And a particle size calculating step for calculating a particle size of the particle group separated in the particle separation step.
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