JP6191363B2 - Force detection device and robot - Google Patents

Description

  The present invention relates to a force detection device and a robot.

  In recent years, industrial robots have been introduced into production facilities such as factories for the purpose of improving production efficiency. Such an industrial robot includes an arm that can be driven in the direction of one axis or a plurality of axes, and an end effector such as a hand, a component inspection device, or a component transfer device that is attached to the distal end side of the arm. It is possible to perform parts manufacturing work such as part assembly work, part processing work, part transport work, part inspection work, and the like.

  In such an industrial robot, for example, a force detection device is provided between the arm and the end effector. As a force detection device used for an industrial robot, for example, a force detection device disclosed in Patent Document 1 is used. The force detection device described in Patent Document 1 includes a substrate, a number of pressure-sensitive elements provided on the substrate and arranged in a matrix, and a portion of an elastic body that is provided on the pressure-sensitive elements and forms a semispherical shape. A plurality of contacts. Each contact is provided on a number of pressure sensitive elements. Further, the area of the contact in the cross section is larger on the pressure sensitive element side (lower side) than on the opposite side (upper side) of the pressure sensitive element. By having such a configuration, the force detection device described in Patent Document 1 can detect the applied force.

JP 2008-164557 A

However, in the force detection device described in Patent Document 1, the area in the cross section of the contact is larger on the pressure-sensitive element side than on the opposite side of the pressure-sensitive element. There is a drawback that it cannot be concentrated on the element and the sensitivity is poor.
An object of the present invention is to provide a force detection device capable of improving detection sensitivity in force detection and a robot using the force detection device.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A force detection device according to this application example includes a plate-shaped first member, a plate-shaped second member that is disposed to face the first member, and the first member. A plurality of pressure sensitive elements provided between the member and the second member, and an elastic body provided on a surface of the first member opposite to the surface on which the pressure sensitive element is provided; The pressure sensitive element includes a first member electrode provided on the first member, a second member electrode provided on the second member, the first member electrode, and the first member electrode. A pressure-sensitive member provided between the two-member electrode and having elasticity, and a pressure-sensitive member dispersed in the base material and having a plurality of conductive fillers. A first portion overlapping the first member electrode and the second member electrode in a plan view as viewed in the thickness direction of the member; and the first portion And when the stress is applied to the pressure-sensitive member, the first portion of the pressure-sensitive member is subjected to the first stress, and the second portion A portion of the first member electrode and the second member electrode that does not overlap is subjected to a second stress that is greater than the first stress.

  According to this application example, when stress is applied, the first portion of the pressure-sensitive member is subjected to the first stress, and overlaps the first member electrode and the second member electrode of the second portion. Since the second stress greater than the first stress is applied to the portion that is not subjected to the pressure, the pressure-sensitive member does not contact the portion other than the member electrode on the member by letting the deformation during pressing escape to the second portion. As a result, it is possible to prevent a reduction in detection sensitivity and to obtain a force detection device with higher sensitivity. In addition, the influence of force dispersion (load dispersion) due to deformation of the pressure-sensitive member can be reduced, and the force can be accurately detected.

  Application Example 2 In the force detection device according to the application example described above, the second part of the pressure-sensitive member is formed of a porous member having pores, and the second part of the pressure-sensitive member. The vacancy density is less than the vacancy density of the first portion.

  According to this application example, the second portion of the pressure-sensitive member is formed of a porous member having pores. Since the hole density of the second part of the pressure-sensitive member is smaller than the hole density of the first part, the influence of force dispersion due to deformation of the pressure-sensitive member can be reduced, and the force can be detected accurately. it can.

  Application Example 3 In the force detection device according to the application example described above, the thickness of the second portion of the pressure-sensitive member is smaller than the thickness of the first portion.

  According to this application example, since the thickness of the second portion of the pressure-sensitive member is thinner than the thickness of the first portion, the force is not affected by the force distribution due to the deformation of the pressure-sensitive member. Can be detected.

  Application Example 4 In the force detection device according to the application example described above, the second portion of the pressure-sensitive member has holes provided intermittently in a surface direction in the plan view of the second member. It is characterized by having.

  According to this application example, the second part of the pressure-sensitive member has the holes intermittently provided in the surface direction, so that the second part of the pressure-sensitive member is not affected by force distribution due to deformation of the pressure-sensitive member. , The force can be detected.

  Application Example 5 In the force detection device according to the application example described above, the hole includes a through-hole penetrating from the front surface to the back surface of the pressure-sensitive member.

  According to this application example, since the hole includes a through-hole penetrating from the front surface to the back surface of the pressure-sensitive member, the force can be detected without being affected by the force dispersion due to the deformation of the pressure-sensitive member. .

  Application Example 6 In the force detection device according to the application example described above, when a reference point is set on the second member in the plan view of the second member, the second member is arranged around the reference point. It has three or more of the elastic bodies, and is provided between the first member and the second member in each of the three or more elastic bodies in the plan view of the second member. The two pressure-sensitive elements obtained are arranged on both sides of the straight line across the straight line, assuming a straight line passing through the reference point and the center of the elastic body.

  According to this application example, it is possible to detect a moment around three mutually perpendicular axes and a shear force in the two mutually perpendicular directions using a small number of pressure sensitive elements.

  Application Example 7 In the force detection device according to the application example described above, when a reference point is set on the second member in the plan view of the second member, the second member is arranged around the reference point. 2 which is provided between the first member and the second member in each of the four elastic bodies in the plan view of the second member. The two pressure-sensitive elements are arranged on both sides of the straight line across the straight line, assuming a straight line passing through the reference point and the center of the elastic body.

  According to this application example, it is possible to detect a moment around three mutually perpendicular axes and a shear force in the two mutually perpendicular directions using a small number of pressure sensitive elements.

  Application Example 8 In the force detection device according to the application example, the two pressure-sensitive elements are arranged in line symmetry with respect to the straight line in the plan view of the second member. And

  According to this application example, it is possible to more easily detect the moments around the three axes orthogonal to each other and the shear forces in the directions of the two axes orthogonal to each other using a small number of pressure sensitive elements.

  Application Example 9 In the force detection device according to the application example described above, in the planar view of the second member, the three or more elastic bodies have an equal distance between the center of the elastic body and the reference point. It is a distance and is arranged at equiangular intervals.

  According to this application example, the stress can be detected without deviation.

  Application Example 10 In the force detection device according to the application example described above, in the plan view of the second member, the surface of the elastic body on the first member side is the first member and the second member. It overlaps with the said several pressure sensitive element provided between these members.

  According to this application example, the applied stress can be accurately transmitted to the pressure sensitive element.

  Application Example 11 In the force detection device according to the application example described above, the shape of the surface of the elastic body on the first member side is a circle, and the shape of the first member electrode is a circle. Features.

  According to this application example, the dependency of the deformation amount of the elastic body due to the direction of the applied stress can be suppressed in plan view. For example, a circular cross section can be used for isotropic shear forces.

  Application Example 12 In the force detection device according to the application example described above, the surface of the elastic body opposite to the surface on which the first member is provided is circular.

  According to this application example, the dependency of the deformation amount of the elastic body due to the direction of the applied stress can be suppressed in plan view.

  Application Example 13 In the force detection device according to the application example described above, the area S1 of the surface opposite to the surface on which the first member of the elastic body is provided and the surface on which the first member is provided. The ratio S1 / S2 to the area S2 of the side surface is 1.1 or more and 9 or less.

  According to this application example, it can be made more difficult to be crushed, and the applied stress can be concentrated on the pressure-sensitive element.

  Application Example 14 In the force detection device according to the application example described above, an area of the second member electrode is larger than a total area of the first member electrodes.

  According to this application example, the deformation amount of the pressure-sensitive member can be reduced by covering the region that is easily changed by the contact force with the member electrode. As a result, the difference in thickness can be reduced and the thickness can be reduced.

  Application Example 15 In the force detection device according to the application example described above, two pressure-sensitive elements are disposed between the first member and the second member, and the two pressure-sensitive elements are A semicircular shape is formed, and linear portions connecting both end portions of the semicircular arcs of the two pressure-sensitive elements are arranged to face each other.

  According to this application example, when the surface on the second member side of the elastic body is circular, the elastic body can be stably supported, and the elastic body according to the direction of the applied stress is seen in plan view. The dependency of the deformation amount can be suppressed.

  Application Example 16 In the force detection device according to the application example described above, a flexible member provided on a surface of the first member opposite to the surface on which the elastic body is provided, and the plurality of members And an adhesive layer for adhering the first member and the second member. The adhesive layer is provided so as to surround the pressure-sensitive element.

  According to this application example, the stress can be detected with a simple configuration.

  Application Example 17 A robot according to this application example includes a plurality of arms, and at least one arm connection body formed by rotatably connecting the adjacent arms of the plurality of arms, and the arm connection body. An end effector provided on the arm, and the force detection device according to any one of the above, which is provided between the arm coupling body and the end effector and detects a force applied to the end effector. It is characterized by.

  According to this application example, the same effects as those of the force detection device described above can be obtained. Then, the stress detected by the force detection device can be fed back to perform the operation more precisely. Further, the contact of the end effector with the obstacle can be detected by the stress detected by the force detection device. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like, which are difficult with conventional position control, can be easily performed, and the work can be executed more safely.

The schematic plan view which shows the force detection apparatus which concerns on 1st Embodiment. The schematic cross section which follows the AA 'line of the force detection apparatus shown in FIG. The figure explaining the influence of dispersion | distribution of the force by a deformation | transformation of the pressure-sensitive conductor layer which concerns on 1st Embodiment. (A) is a schematic cross section which shows the force detection apparatus which concerns on 1st Embodiment, (B) is a schematic cross section which shows the conventional force detection apparatus. The schematic side view which shows the other structural example of an elastic body. The schematic plan view which shows the force detection apparatus which concerns on 2nd Embodiment. The schematic cross section which follows the BB 'line of the force detection device shown in FIG. The schematic diagram which shows the force detection apparatus which concerns on 3rd Embodiment. (A) is a schematic plan view, (B) is a schematic cross-sectional view. The schematic diagram which shows the force detection apparatus which concerns on 4th Embodiment. (A) is a schematic plan view, (B) is a schematic cross-sectional view. The schematic plan view which shows the force detection apparatus which concerns on 5th Embodiment. The schematic cross section which shows the force detection apparatus which concerns on 6th Embodiment. The figure which shows an example of the single arm robot using the force detection apparatus which concerns on this embodiment. The figure which shows an example of the multi-arm robot using the force detection apparatus which concerns on this embodiment. The schematic cross section which shows the force detection apparatus which concerns on this modification, (A) is a figure where a 2nd part shows a plane, (B) is a figure where a 2nd part shows a curved surface. The schematic plan view which shows the pressure-sensitive conductor layer which concerns on this modification.

  Hereinafter, a force detection device and a robot according to the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

<First Embodiment>
FIG. 1 is a schematic plan view showing a force detection device 1 according to this embodiment. FIG. 2 is a schematic cross-sectional view taken along the line AA ′ of the force detection device 1 shown in FIG. In the following, for convenience of explanation, the upper side in FIG. 2 is referred to as “upper” or “upper”, and the lower side is referred to as “lower” or “lower”. Further, FIG. 1 assumes three-dimensional coordinates having an x axis, a y axis, and a z axis that are orthogonal to each other. And in plan view (plan view of the first substrate (first member) 4 and the second substrate (second member) 5), the origin of the three-dimensional coordinates (on the second substrate 5), A reference point P is set. Further, the output value of each pressure-sensitive element 3, that is, the value (voltage value) of the voltage output from each pressure-sensitive element 3, as shown in FIG. 1, respectively, 1a, 1b, 2a, 2b, 3a, 3b, 4a and 4b, which are described in the corresponding pressure sensitive element 3.

The force detection device 1 shown in FIGS. 1 and 2 has a function of detecting force (stress) (including moment). The force detection apparatus 1 includes a detection unit 2 that outputs a signal according to applied stress, a force detection circuit (not shown), and an adhesive layer 8 having elasticity or flexibility.
As shown in FIGS. 1 and 2, the detection unit 2 includes a first substrate 4 and a second substrate 5 that are arranged to face each other, and eight pressure-sensitive elements 3 that output signals according to applied stress. And four elastic bodies 6. Note that either the first substrate 4 or the second substrate 5 may be a substrate on which a force is applied, but in the present embodiment, the first substrate 4 will be described as a substrate on which a force is applied. Further, the number of pressure sensitive elements 3 and the number of elastic bodies 6 are not limited to the above numbers, respectively, and the number of pressure sensitive elements 3 may be two, for example. For example, the number may be one.

Although the shape of the 1st board | substrate 4 and the 2nd board | substrate 5 is not specifically limited, respectively, In this embodiment, it has comprised the square (square). The first substrate 4 and the second substrate 5 are installed so as to face each other with a predetermined distance therebetween. The first substrate 4 and the second substrate 5 are bonded (fixed) by an adhesive layer 8. The adhesive layer 8 is formed over the circumference of the pair of pressure sensitive elements 3 so as to surround the pair of pressure sensitive elements 3. Since the adhesive layer 8 has elasticity or flexibility, the stress applied to the elastic body 6 is transmitted to the pair of pressure sensitive elements 3 through the first substrate 4. In addition, it does not specifically limit as a constituent material of the 1st board | substrate 4 and the 2nd board | substrate 5, respectively, For example, various resin materials etc. can be used.
Each pressure sensitive element 3 is provided between the first substrate 4 and the second substrate 5, respectively. Since each pressure-sensitive element 3 is the same, a single pressure-sensitive element 3 will be typically described below. Here, the structure of the pressure-sensitive element 3 will be mainly described, and the arrangement and shape of each pressure-sensitive element will be described later.

  The pressure-sensitive element 3 includes a pair of substrate electrodes 31 and 32 disposed so as to face each other, and a pressure-sensitive conductor layer (pressure-sensitive member) 33 provided between the pair of substrate electrodes 31 and 32. And have. The second substrate electrode 32 is a common electrode of the pair of pressure sensitive elements 3 provided so as to correspond to one elastic body 6, and is formed on the second substrate 5. The first substrate electrode 31 is an individual electrode and is formed on the first substrate 4. The first substrate electrode 31 may be a common electrode, the second substrate electrode 32 may be an individual electrode, and the substrate electrodes 31 and 32 may be individual electrodes.

The constituent materials of the substrate electrodes 31 and 32 are not particularly limited, and examples thereof include gold, titanium, aluminum, copper, iron, and alloys containing these.
The pressure-sensitive conductor layer 33 includes a layered base material having elasticity and a plurality of fillers dispersed in the base material and having conductivity. The pressure-sensitive conductor layer 33 is deformed in accordance with the applied force, and the amount and area of fillers that are in contact with each other change, whereby a voltage (signal) corresponding to the applied force is applied from the pressure-sensitive element 3. Is output. The pressure-sensitive conductor layer 33 includes a first portion 14 that overlaps the substrate electrodes 31 and 32 and a second portion that surrounds the first portion 14 in a plan view as viewed in the thickness direction of the second substrate 5. 9. In the pressure-sensitive conductor layer 33, when stress is applied to the pressure-sensitive conductor layer 33, the first portion 14 of the pressure-sensitive conductor layer 33 is subjected to the first stress, and the second portion 9 A second stress larger than the first stress is applied to the portions that do not overlap the substrate electrodes 31 and 32. The thickness of the second portion 9 of the pressure-sensitive conductor layer 33 is smaller than the thickness of the first portion 14. As a result, the force can be detected without being affected by the dispersion of the force due to the deformation of the pressure-sensitive conductor layer 33.

Here, the influence of force dispersion due to deformation of the pressure-sensitive conductor layer 33 will be described.
FIG. 3 is a diagram for explaining the influence of force dispersion due to deformation of the pressure-sensitive conductor layer 33 according to the present embodiment. (A) is a schematic cross-sectional view showing a force detection device 1 according to the present embodiment, (B) is a schematic cross-sectional view showing a conventional force detection device.

  In the conventional force detection device, as indicated by an arrow D in FIG. 3B, force is also applied to a region that cannot be detected outside the substrate electrode. In the force detection device 1 according to the present embodiment, all the force is transmitted to the substrate electrode as indicated by an arrow C in FIG.

  The constituent material of the base material of the pressure-sensitive conductor layer 33 is not particularly limited as long as it is an elastic material having insulating properties. For example, natural rubber, isoprene rubber, butadiene rubber, styrene-butadiene rubber, nitrile rubber, chloroprene rubber , Rubber materials such as butyl rubber, acrylic rubber, ethylene-propylene rubber, hydrin rubber, urethane rubber, silicone rubber, fluorine rubber, styrene, polyolefin, polyvinyl chloride, polyurethane, polyester, polyamide, polybutadiene Various thermoplastic elastomers such as those based on trans-polyisoprene, fluoro rubber, and chlorinated polyethylene can be used, and one or more of these can be used in combination.

Further, the constituent material of the filler of the pressure-sensitive conductor layer 33 is not particularly limited as long as it has conductivity, and examples thereof include gold, titanium, aluminum, copper, iron, or an alloy containing these, carbon, and the like. Can be mentioned.
Returning to FIG. 2, each elastic body 6 is provided on the surface of the first substrate 4 opposite to the surface on which the pair of pressure sensitive elements 3 are provided. That is, one elastic body 6 is provided for the pair of pressure sensitive elements 3. The stress applied to each elastic body 6 is transmitted to the corresponding pair of pressure sensitive elements 3 through the first substrate 4. The contact surface of the elastic body 6 with the first substrate 4 is circular, and the shape of the first substrate electrode is circular. Thereby, the dependence of the deformation amount of the elastic body 6 by the direction of the applied stress can be suppressed in a plan view. For example, a circular cross section can be used for isotropic shear forces. Since each elastic body 6 is the same, below, one elastic body 6 is demonstrated typically.

The elastic body 6 has a portion where the area in the cross section gradually decreases from the side opposite to the first substrate 4 toward the first substrate 4, and the first substrate 4 of the elastic body 6 is provided. The area S1 of the surface opposite to the surface, that is, the upper surface 61 is larger than the surface S1 of the first substrate 4 side, that is, the lower surface 62. Specifically, the elastic body 6 has a truncated cone shape. That is, the upper surface 61 and the lower surface 62 of the elastic body 6 each have a circular shape, and the central axis of the upper surface 61 and the central axis of the lower surface 62 coincide with each other. Gradually decreases from the lower surface 62 to the lower surface 62.
By making the upper surface 61 and the lower surface 62 of the elastic body 6 each have a circular shape, the dependency of the deformation amount of the elastic body 6 on the direction of the stress applied to each elastic body 6 can be suppressed in plan view. That is, the stress in all directions applied to each elastic body 6 can be detected appropriately (uniformly) in plan view.

  Further, since the area of the surface of the elastic body 6 opposite to the surface on which the first substrate 4 is provided is larger than the area of the surface of the first substrate 4 side, The parts without 6 are reduced, the detection unit 2 is not easily crushed, and the reliability is increased. Further, since the area of the surface of the elastic body 6 on the first substrate 4 side is smaller than the area of the surface opposite to the surface on which the first substrate 4 is provided, the stress applied to each elastic body 6 is reduced. It is possible to concentrate on the pressure-sensitive element 3, thereby improving detection sensitivity in stress detection.

Further, the ratio S1 / S2 between the area S1 of the upper surface 61 and the area S2 of the lower surface 62 of the elastic body 6 is not particularly limited and is appropriately set according to various conditions. Or less, more preferably 2 or more and 4 or less. Thereby, the detection unit 2 can be made more difficult to be crushed, and the stress applied to each elastic body 6 can be concentrated on the pressure sensitive element 3.
Further, the area S1 of the upper surface 61 of the elastic body 6 is not particularly limited and is appropriately set according to various conditions, but is preferably 5 mm ² or more and 500 mm ² or less, preferably 10 mm ² or more and 100 mm. More preferably, it is ² or less. Thereby, the detection part 2 can be made more difficult to crush.

The area S2 of the lower surface 62 of the elastic body 6 is not particularly limited, and is appropriately set according to various conditions, but is preferably 0.5 mm ² or more and 300 mm ² or less, preferably 3 mm ² or more. 30 mm ² or less is more preferable. Thereby, the stress applied to each elastic body 6 can be concentrated on the pressure sensitive element 3.
Further, the length L in the vertical direction (axial direction) in FIG. 2 of the elastic body 6 is not particularly limited and is appropriately set according to various conditions, but is 0.5 mm or more and 10 mm or less. It is preferably 1 mm or more and 5 mm or less. Thereby, the stress applied to each elastic body 6 can be transmitted to the pressure sensitive element 3.

  As shown in FIG. 1, each elastic body 6 is arranged around the reference point P in plan view. In this case, the elastic bodies 6 are arranged at an equal distance in the plan view from the center of the elastic body 6 and the reference point P (at an interval of 90 ° in the illustrated configuration). That is, the elastic bodies 6 are arranged at equal angular intervals on the same circle centered on the reference point P in plan view. The centers of the two elastic bodies 6 in plan view are respectively positioned on the x axis (straight line), and the centers of the remaining two elastic bodies 6 in plan view are respectively y axis (straight lines). ) Is located above. Thereby, a stress can be detected without deviation. The x axis is a straight line passing through the reference point P and the centers of the two elastic bodies 6, and the y axis is a straight line passing through the reference point P and the centers of the remaining two elastic bodies 6.

  The constituent material of the elastic body 6 is not particularly limited as long as it is an elastic material. For example, natural rubber, isoprene rubber, butadiene rubber, styrene-butadiene rubber, nitrile rubber, chloroprene rubber, butyl rubber, acrylic rubber, ethylene- Various rubber materials such as propylene rubber, hydrin rubber, urethane rubber, silicone rubber, fluorine rubber, styrene, polyolefin, polyvinyl chloride, polyurethane, polyester, polyamide, polybutadiene, trans polyisoprene, fluorine Various thermoplastic elastomers such as rubber-based and chlorinated polyethylene are listed, and one or more of these can be used in combination.

Hereinafter, when the pressure sensitive elements 3 are not distinguished from each other, they are referred to as “pressure sensitive elements 3”, and when distinguished from each other, they are referred to as “pressure sensitive elements 1A, 1B, 2A, 2B, 3A, 3B, 4A, 4B”. .
The pressure sensitive elements 1B, 1A, 2B, 2A, 3B, 3A, 4B, 4A are arranged in this order in the clockwise direction in FIG. The pair of pressure sensitive elements 1 </ b> A and 1 </ b> B is disposed below the common elastic body 6. Similarly, the pair of pressure sensitive elements 2 </ b> A and 2 </ b> B are disposed below the common elastic body 6. Similarly, the pair of pressure sensitive elements 3 </ b> A and 3 </ b> B are disposed below the common elastic body 6. Similarly, the pair of pressure sensitive elements 4 </ b> A and 4 </ b> B are disposed below the common elastic body 6.

  As described above, the pair of pressure-sensitive elements 1A and 1B and the elastic body 6 installed above them, the pair of pressure-sensitive elements 2A and 2B and the elastic body 6 installed above them, and a pair of The pressure-sensitive elements 3A and 3B and the elastic body 6 installed above the pressure-sensitive elements 3A and 3B and the pair of pressure-sensitive elements 4A and 4B and the elastic body 6 installed thereabove are the same. Specifically, the pressure sensitive elements 1A and 1B and the elastic body 6 installed above the pressure sensitive elements 1A and 1B will be described.

First, each of the pressure sensitive elements 1A and 1B has a semicircular shape in plan view. Further, in a plan view, the pressure sensitive element 1A and the pressure sensitive element 1B are disposed on both sides of the y axis so as to be separated from each other with the y axis interposed therebetween. Further, the pressure sensitive element 1A and the pressure sensitive element 1B are arranged symmetrically with respect to the y axis. Each second substrate electrode 32 corresponding to one elastic body 6 is arranged line-symmetrically with respect to the y-axis. Thereby, a shear force and a rotational moment can be detected with high accuracy. Further, in a plan view, the pressure-sensitive element 1A and the pressure-sensitive element 1B include a straight line connecting both ends of the semicircular arc of the pressure-sensitive element 1A and both ends of the semicircular arc of the pressure-sensitive element 1B. The straight line portion to be connected is disposed opposite to the straight line portion. The semicircular shape includes not only a complete semicircle but also a part of the semicircle missing.
Thereby, the elastic body 6 can be supported stably and the dependence of the deformation amount of the elastic body 6 due to the direction of the stress applied to each elastic body 6 can be suppressed in plan view. That is, the stress in all directions applied to each elastic body 6 can be detected appropriately (uniformly) in plan view.

In plan view, the pressure sensitive element 3A and the pressure sensitive element 3B are arranged line-symmetrically with respect to the y axis, and the pressure sensitive element 2A and pressure sensitive element 2B are line symmetrical with respect to the x axis. The pressure sensitive element 4A and the pressure sensitive element 4B are arranged symmetrically with respect to the x axis.
Here, in the plan view of the pressure sensitive elements 1A and 1B, the surface of the elastic body 6 on the first substrate 4 side, that is, the lower surface 62 overlaps the pressure sensitive elements 1A and 1B. In this case, the circle on the lower surface 62 is slightly larger than the circle formed by the pressure sensitive elements 1A and 1B. Thereby, the stress applied to the upper surface 61 of the elastic body 6 can be transmitted to the pressure sensitive elements 1A and 1B.

Note that the lower surface 62 of the elastic body 6 may not overlap the pressure sensitive elements 1A and 1B in a plan view of the pressure sensitive elements 1A and 1B, and the upper surface 61 and the lower surface 62 of the elastic body 6 are respectively Needless to say, it does not have to be circular. Examples of other shapes of the upper surface 61 and the lower surface 62 of the elastic body 6 include a polygon such as a triangle, a quadrangle, and a pentagon, an ellipse, a semi-ellipse, and a semi-circle.
Further, the shape of each of the pressure sensitive elements 1A and 1B is not limited to a semicircular shape in a plan view, and other examples include a polygon such as a triangle, a quadrangle, and a pentagon, an ellipse, a semiellipse, and a circle. It is done.
In addition, the joining method of each part of the detection part 2 is not specifically limited, For example, the adhesion | attachment by an adhesive agent etc. are mentioned.

FIG. 4 is a schematic side view showing another configuration example of the elastic body 6. In the following, for convenience of explanation, the upper side in FIG. 4 is referred to as “upper” or “upper”, and the lower side is referred to as “lower” or “lower”. Here, the shape of the elastic body 6 is not limited to that described above, and may be any shape as long as the area of the upper surface 61 is larger than the area of the lower surface 62. Hereinafter, another configuration example of the elastic body 6 will be described with reference to FIG.
The elastic body 6 shown in FIG. 4A has a curved concave surface. Further, the elastic body 6 shown in FIG. 4B has a curved convex surface on the side surface. Further, the elastic body 6 shown in FIG. 4C has a step on the side surface. In addition, the elastic body 6 shown in FIG. 4D has a portion in which the area in the cross section gradually decreases from the first substrate 4 side to the second substrate 5 side, and in the middle of the vertical direction in the drawing. In addition, there is a portion where the area in the cross section gradually increases from the first substrate 4 side toward the second substrate 5 side.

Next, a force detection circuit (not shown) of the force detection device 1 will be described.
A signal (voltage) detected by the detection unit 2 is input to a force detection circuit (not shown).
The force detection circuit has a function of calculating and outputting as follows using the input signal. That is, the force detection circuit, as described below, applies pressure Fa applied to all elastic bodies 6, shear force Fx in the x-axis direction, shear force Fy in the y-axis direction, moment Mx around the x axis, and around the y axis. The moment My and the moment Mz around the z axis are obtained and output.

For example, when a shearing force is applied in the positive direction in the x-axis direction, the elastic body 6 on the pressure sensitive elements 1A and 1B is deformed so as to fall down in the positive direction in the x-axis direction. Thereby, the site | part by the side of the pressure sensitive element 1A of the elastic body 6 is compressed and shrink | contracted, and the site | part by the side of the pressure sensitive element 1B expands relatively. For this reason, the shear force Fx in the x-axis direction is proportional to the difference between the voltage value 1a and the voltage value 1b. Shear force is calculated using this principle.
For example, when a moment Mx about the x axis is applied, one of the elastic bodies 6 on the pressure sensitive elements 1A and 3A is compressed and contracted, and the other is relatively expanded. For this reason, the moment Mx around the x axis is proportional to the difference between the voltage value 1a and the voltage value 3a. The moment is calculated using this principle.

First, the pressure Fa applied to all the elastic bodies 6 is obtained as follows.
Fa = (1a + 1b) + (2a + 2b) + (3a + 3b) + (4a + 4b)
Further, the shearing force Fx in the x-axis direction is obtained as follows.
Fx∝ (1a-1b) + (3b-3a)
Further, the shearing force Fy in the y-axis direction is obtained as follows.
Fy∝ (4a-4b) + (2b-2a)

Further, the moment Mx about the x axis is obtained as follows.
Mx∝ (3a + 3b)-(1a + 1b)
Further, the moment My about the y-axis is obtained as follows.
My∝ (2a + 2b)-(4a + 4b)
Further, the moment Mz about the z axis is obtained as follows.
Mz∝ (1a-1b) + (2a-2b) + (3a-3b) + (4a-4b)

As described above, according to the force detection device 1, the area of the upper surface 61 of the elastic body 6 is larger than the area of the lower surface 62, so that it is not easily crushed and has high reliability.
Further, since the area of the lower surface 62 of the elastic body 6 is smaller than the area of the upper surface 61, the applied stress can be concentrated on the pressure-sensitive element 3, thereby detecting the stress.
In addition, since the pair of pressure sensitive elements 3 are provided for one elastic body 6, the shearing force can be detected.

In addition, since the four pairs of pressure sensitive elements 3 are provided, a moment around the x axis, a moment around the y axis, and a moment around the z axis can be detected. As for the shearing force, the shearing force in the x-axis direction and the shearing force in the y-axis direction can be detected.
Thus, in this force detection apparatus 1, each stress can be detected using relatively few pressure-sensitive elements 3, and the detection sensitivity can be improved.

  According to the present embodiment, when stress is applied, the first stress 14 is applied to the first portion 14 of the pressure-sensitive conductor layer 33, and the substrate electrode 31, 32 of the second portion 9 is overloaded. Since the second stress greater than the first stress is applied to the non-wrapped portion, the deformation at the time of pressing is released to the second portion 9, so that pressure is applied to portions other than the substrate electrodes 31 and 32 on the substrate. Since the conductor layer 33 is not in contact, it is possible to prevent a decrease in detection sensitivity and to obtain a force detection device 1 with higher sensitivity. Further, the influence of force dispersion (load dispersion) due to deformation of the pressure-sensitive conductor layer 33 can be reduced, and the force can be accurately detected.

Second Embodiment
FIG. 5 is a schematic cross-sectional view showing the force detection device 1 according to the present embodiment. 6 is a schematic cross-sectional view taken along the line BB ′ of the force detection device 1 shown in FIG. Hereinafter, for convenience of explanation, the upper side in FIG. 6 is referred to as “upper” or “upper”, and the lower side is referred to as “lower” or “lower”.
Hereinafter, the present embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted.

  As shown in FIGS. 5 and 6, the area of the second substrate electrode 32 of the force detection device 1 of the present embodiment is larger than the total area of the first substrate electrodes 31. Specifically, the first substrate electrode 31 has a semicircular shape, and the second substrate electrode 32 has a rectangular shape. The short side of the rectangle of the second substrate electrode 32 is larger than the diameter of the first substrate electrode 31. In addition, the first substrate electrodes 31 corresponding to one elastic body 6 are arranged symmetrically with respect to the y axis. Thereby, a shear force and a rotational moment can be detected with high accuracy. The second substrate electrode 32 may have any shape as long as it is larger than the outer periphery of the first substrate electrode 31.

  According to the present embodiment, the deformation amount of the pressure-sensitive conductor layer 33 can be reduced by covering the regions that are easily changed by the contact force with the substrate electrodes 31 and 32. As a result, the difference in thickness can be reduced and the thickness can be reduced.

<Third Embodiment>
FIG. 7 is a schematic diagram showing the force detection device 1 according to the present embodiment. (A) is a schematic plan view, (B) is a schematic cross-sectional view. Hereinafter, for convenience of explanation, the upper side in FIG. 7B is referred to as “upper” or “upper”, and the lower side is referred to as “lower” or “lower”.
Hereinafter, the present embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted.

  As shown in FIGS. 7A and 7B, the second portion 10 of the pressure-sensitive conductor layer 33 of the force detection device 1 of the present embodiment is composed of a porous member having pores. Has been. The hole density of the second portion 10 of the pressure-sensitive conductor layer 33 is smaller than the hole density of the first portion 14.

  According to the present embodiment, the second portion 10 of the pressure-sensitive conductor layer 33 is composed of a porous member having pores. The void density of the second portion 10 of the pressure-sensitive conductor layer 33 is smaller than the void density of the first portion 14, thereby reducing the influence of force dispersion due to deformation of the pressure-sensitive conductor layer 33, Force can be detected accurately.

<Fourth embodiment>
FIG. 8 is a schematic diagram showing the force detection device 1 according to the present embodiment. (A) is a schematic plan view, (B) is a schematic cross-sectional view. Hereinafter, for convenience of explanation, the upper side in FIG. 8B is referred to as “upper” or “upper”, and the lower side is referred to as “lower” or “lower”.
Hereinafter, the present embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted.

  As shown in FIGS. 8A and 8B, the second portion 11 of the pressure-sensitive conductor layer 33 of the force detection device 1 of the present embodiment is in the plane direction in the plan view of the second substrate 5. It has holes 12 provided intermittently. For example, the pressure-sensitive conductor layer 33 includes the holes 12 provided in a perforated shape in the surface direction. The perforated holes 12 are provided in portions of the second portion 11 that do not overlap the first substrate electrode 31 and the second substrate electrode 32.

  The hole 12 may include a through hole 13 that penetrates from the front surface to the back surface of the pressure-sensitive conductor layer 33. Thereby, the hole 12 includes the through hole 13 penetrating from the front surface to the back surface of the pressure-sensitive conductor layer 33, thereby detecting the force without being affected by the force distribution due to the deformation of the pressure-sensitive conductor layer 33. can do.

  According to the present embodiment, the second portion 11 of the pressure-sensitive conductor layer 33 has the holes 12 provided intermittently in the surface direction, so that the force due to the deformation of the pressure-sensitive conductor layer 33 is reduced. The force can be detected without being affected by the dispersion of.

<Fifth Embodiment>
FIG. 9 is a schematic plan view showing the force detection device 1 according to the present embodiment.
In the following, for convenience of explanation, FIG. 9 assumes three-dimensional coordinates having an x-axis, a y-axis, and a z-axis that are orthogonal to each other, and the origin of the three-dimensional coordinates in plan view is the reference point P. And Further, as shown in FIG. 1, the output value of each pressure-sensitive element 3, that is, the voltage value (voltage value) output from each pressure-sensitive element 3, is shown as 1a, 1b, 2a, 2b, 3a, and 3b, respectively. And listed in the corresponding pressure sensitive element 3. Further, when the pressure sensitive elements 3 are not distinguished from each other, they are referred to as “pressure sensitive elements 3”, and when they are distinguished from each other, they are referred to as “pressure sensitive elements 1A, 1B, 2A, 2B, 3A, 3B”.

Hereinafter, the present embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted.
As shown in FIG. 9, in the force detection device 1 of the present embodiment, the first substrate 4 and the second substrate 5 have a circular shape.
The number of elastic bodies 6 is three, and the number of pressure sensitive elements 3 is six. That is, the detection unit 2 of the force detection device 1 has three pairs of pressure sensitive elements 3.

  Each elastic body 6 is arranged around the reference point P in plan view. In this case, the elastic bodies 6 are arranged at equal distances between the center of the elastic bodies 6 and the reference point P in plan view and at equal angular intervals (120 ° intervals in the illustrated configuration). That is, the elastic bodies 6 are arranged at equal angular intervals on the same circle centered on the reference point P in plan view. The center of the first elastic body 6 in plan view is located on the y axis, and the center of the second elastic body 6 in plan view is on the xy plane from the y axis. It is located on a straight line 91 at a position rotated clockwise by 120 °, and the center of the third elastic body 6 in a plan view is rotated by 240 ° clockwise from the y axis on the xy plane. It is located on the straight line 92 at the position. Thereby, a stress can be detected without deviation.

Further, in a plan view, the pressure sensitive element 1A and the pressure sensitive element 1B are arranged symmetrically with respect to the y axis, and the pressure sensitive element 2A and the pressure sensitive element 2B are symmetrical with respect to the straight line 91. The pressure sensitive element 3 </ b> A and the pressure sensitive element 3 </ b> B are arranged symmetrically with respect to the straight line 92.
The force detection circuit (not shown) of the force detection device 1 has a function of calculating and outputting as follows using an input signal (voltage). That is, the force detection circuit is configured as follows. Pressure Fa applied to the entire surface of the first substrate 4, shear force Fx in the x-axis direction, shear force Fy in the y-axis direction, moment Mx, y-axis around the x-axis The moment My around and the moment Mz around the z axis are obtained and output.

First, the pressure Fa applied to the entire surface of the first substrate 4 is obtained as follows.
Fa = (1a + 1b) + (2a + 2b) + (3a + 3b)
Further, the shearing force Fx in the x-axis direction is obtained as follows.
Fx∝ (1a-1b)
Further, the shearing force Fy in the y-axis direction is obtained as follows.
Fy∝ (2b-2a) + (3a-3b)

Further, the moment Mx about the x axis is obtained as follows.
Mx∝ [(2a + 2b) + (3a + 3b)] − 2 · (1a-1b)
Further, the moment My about the y-axis is obtained as follows.
My∝ (2a + 2b)-(3a + 3b)
Further, the moment Mz about the z axis is obtained as follows.
Mz∝ (1a-1b) + (2a-2b) + (3a-3b)
According to the force detection device 1, the same effect as that of the first embodiment described above can be obtained.
In this force detection device 1, detection can be performed with a smaller number of pressure sensitive elements 3 than in the first embodiment.

<Sixth Embodiment>
FIG. 10 is a schematic cross-sectional view showing the force detection device 1 according to the present embodiment. Hereinafter, for convenience of explanation, the upper side in FIG. 10 is referred to as “upper” or “upper”, and the lower side is referred to as “lower” or “lower”.
Hereinafter, the present embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted.

As shown in FIG. 10, the detection unit 2 of the force detection device 1 of the present embodiment includes an elastic body in addition to the first substrate 4, the second substrate 5, the pressure-sensitive element 3, and the elastic body 6. 6 has a flexible substrate 7 provided on the surface opposite to the surface on which the first substrate 4 is provided. The stress applied to the substrate 7 is transmitted to the pair of pressure sensitive elements 3 through the elastic body 6 and the first substrate 4.
According to the force detection device 1, the same effect as that of the first embodiment described above can be obtained.
The present embodiment can also be applied to the second to fifth embodiments.

<Embodiment of single arm robot>
Next, a single-arm robot that is the robot 500 of this embodiment will be described with reference to FIG. Hereinafter, the present embodiment will be described with a focus on differences from the first to sixth embodiments described above, and description of similar matters will be omitted.
FIG. 11 is a diagram illustrating an example of a single-arm robot using the force detection device 100 according to the present embodiment. The single-arm robot 500 of FIG. 11 includes a base 510, an arm connection body 520, an end effector 530 provided in the arm connection body 520, and a force detection provided between the arm connection body 520 and the end effector 530. Device 100. In addition, as the force detection apparatus 100, the thing similar to each embodiment mentioned above is used.

The base 510 has a function of accommodating an actuator (not shown) that generates power for rotating the arm coupling body 520, a control unit (not shown) that controls the actuator, and the like. The base 510 is fixed on, for example, a floor, a wall, a ceiling, and a movable carriage.
The arm connection body 520 includes a first arm 521, a second arm 522, a third arm 523, a fourth arm 524, and a fifth arm 525, and the adjacent arms can be rotated. It is comprised by connecting to. The arm coupling body 520 is driven by being rotated or bent in a compound manner around the coupling portion of each arm under the control of the control unit.

The end effector 530 has a function of gripping an object. The end effector 530 has a first finger 531 and a second finger 532. After the end effector 530 reaches a predetermined operation position by driving the arm coupling body 520, the object can be gripped by adjusting the distance between the first finger 531 and the second finger 532.
The force detection device 100 has a function of detecting stress applied to the end effector 530. For example, the force detection device 100 can detect contact pressure, shear force (slip force), and in-plane rotational moment. By feeding back the force detected by the force detection device 100 to the control unit of the base 510, the single-arm robot 500 can perform more precise work. Further, the single-arm robot 500 can detect contact of the end effector 530 with an obstacle by the force detected by the force detection device 100. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like, which are difficult with conventional position control, can be easily performed, and the single-arm robot 500 can perform work more safely.
In the illustrated configuration, the arm coupling body 520 is configured by a total of five arms, but the present embodiment is not limited thereto. When the arm connection body 520 is constituted by one arm, when constituted by 2 to 4 arms, when constituted by 6 or more arms, it is within the scope of the present invention.

<Embodiment of double-arm robot>
Next, a multi-arm robot that is the robot 600 of the present embodiment will be described with reference to FIG. Hereinafter, the present embodiment will be described with a focus on differences from the first to sixth embodiments described above, and description of similar matters will be omitted.
FIG. 12 is a diagram illustrating an example of a multi-arm robot using the force detection device 100 according to the present embodiment. 12 includes a base 610, a first arm coupling body 620, a second arm coupling body 630, an end effector 640a provided on the first arm coupling body 620, and a second arm coupling body 620. End effector 640b provided in the arm connection body 630, a force detection device provided between the first arm connection body 620 and the end effector 640a and between the second arm connection body 630 and the end effector 640b. 100. In addition, as the force detection apparatus 100, the thing similar to each embodiment mentioned above is used.

The base 610 includes an actuator (not shown) that generates power for rotating the first arm connecting body 620 and the second arm connecting body 630, a control unit (not shown) that controls the actuator, and the like. Has the function of storing. The base 610 is fixed on, for example, a floor, a wall, a ceiling, and a movable carriage.
The 1st arm coupling body 620 is comprised by connecting the 1st arm 621 and the 2nd arm 622 so that rotation is possible. The 2nd arm coupling body 630 is comprised by connecting the 1st arm 631 and the 2nd arm 632 so that rotation is possible. The first arm coupling body 620 and the second arm coupling body 630 are driven by complex rotation or bending around the coupling portion of each arm under the control of the control unit.

  The end effectors 640a and 640b have a function of gripping an object. The end effector 640a has a first finger 641a and a second finger 642a. The end effector 640b has a first finger 641b and a second finger 642b. After the end effector 640a reaches a predetermined operating position by driving the first arm coupling body 620, the object can be grasped by adjusting the distance between the first finger 641a and the second finger 642a. it can. Similarly, after the end effector 640b reaches a predetermined operation position by driving the second arm coupling body 630, the distance between the first finger 641b and the second finger 642b is adjusted to hold the target object. can do.

  The force detection device 100 has a function of detecting stress applied to the end effectors 640a and 640b. By feeding back the force detected by the force detection device 100 to the control unit of the base 610, the multi-arm robot 600 can perform the operation more precisely. Further, the multi-arm robot 600 can detect contact of the end effectors 640a and 640b with an obstacle by the force detected by the force detection device 100. Therefore, an obstacle avoidance operation, an object damage avoidance operation, and the like that have been difficult with conventional position control can be easily performed, and the multi-arm robot 600 can perform the work more safely.

In the configuration shown in the figure, there are a total of two arm connectors, but the present embodiment is not limited to this. The case where the multi-arm robot 600 has three or more arm coupling bodies is also within the scope of the present embodiment.
As mentioned above, although the force detection apparatus and robot of this embodiment were demonstrated based on illustration, this embodiment is not limited to this, The structure of each part is set to the thing of the arbitrary structures which have the same function. Can be replaced. In addition, other arbitrary components may be added to the present embodiment.

Further, the present embodiment may be a combination of any two or more configurations (features) of the above-described embodiments.
In the embodiment, the pressure-sensitive element using a pressure-sensitive conductor is used. However, in the present embodiment, the pressure-sensitive element is limited to this as long as the output changes according to the applied stress. In addition, for example, one using a piezoelectric body or the like can be used.

Further, in the robot of this embodiment, the force detection device is installed between the arm coupling body and the end effector, but in this embodiment, the present invention is not limited to this. The force detection device may be used as a tactile sensor by being installed on the fingertip of the end effector.
The robot of this embodiment is not limited to an arm type robot (robot arm), but may be another type of robot such as a scalar robot or a legged walking (running) robot.
The force detection device of the present embodiment is not limited to a robot, but other devices, for example, a transport device such as an electronic component transport device, an inspection device such as an electronic component inspection device, a processing device such as a cutting (grinding) device, The present invention can also be applied to a moving body such as an automobile, a vibration meter, an accelerometer, a gravimeter, a dynamometer, a seismometer, an inclinometer, an input device, and the like. For example, it can be applied to a pointing device. As a result, operations such as moving the cursor and scrolling the screen can be performed with little movement of the fingertip.

(Modification)
FIG. 13 is a schematic cross-sectional view showing a force detection device 1 according to this modification. (A) is a figure in which the 2nd part 9 shows a plane, (B) is a figure in which the 2nd part 9 shows a curved surface. FIG. 14 is a schematic plan view showing a pressure-sensitive conductor layer 33 according to this modification.

  In the first embodiment described above, the shape is not limited to the shape of the second portion 9, and for example, the shape shown in FIGS. 13A and 13B may be used.

  The shape of the second portion 9 may be a plane as shown in FIG. 13A, or may be a curved surface as shown in FIG. As a result, stress concentration is less likely to occur and damage is less likely. Moreover, as shown in FIG. 14, when providing the area | region where thickness is thinner than the area | region pinched | interposed into the substrate electrodes 31 and 32 in the peripheral part of the substrate electrodes 31 and 32 of the pressure-sensitive conductor layer 33, you may shape | mold with a type | mold. However, it may be sharpened.

  DESCRIPTION OF SYMBOLS 1 ... Force detection apparatus 2 ... Detection part 3, 1A, 1B, 2A, 2B, 3A, 3B, 4A, 4B ... Pressure sensitive element 4 ... 1st board | substrate (1st member) 5 ... 2nd board | substrate (1st) 2 ... 6 ... Elastic body 7 ... Substrate (member) 8 ... Adhesive layer 9, 10, 11 ... Second part 12 ... Hole 13 ... Through hole 14 ... First part 31 ... First substrate electrode (first) 32. Second substrate electrode (second member electrode) 33 ... Pressure sensitive conductor layer (pressure sensitive member) 61 ... Upper surface 62 ... Lower surface 91, 92 ... Straight line 100 ... Force detection device 500 ... Single arm robot 510 ... base 520 ... arm connector 521 ... first arm 522 ... second arm 523 ... third arm 524 ... fourth arm 525 ... fifth arm 530 ... end effector 531 ... first finger 532 ... Second finger 600 ... double-arm robot 6 DESCRIPTION OF SYMBOLS 0 ... Base 620 ... 1st arm coupling body 621 ... 1st arm 622 ... 2nd arm 630 ... 2nd arm coupling body 631 ... 1st arm 632 ... 2nd arm 640a ... End effector 641a ... First finger 642a ... second finger 640b ... end effector 641b ... first finger 642b ... second finger.

Claims (13)

A plate-shaped first member;
A second member having a plate-like shape disposed opposite to the first member;
A plurality of pressure sensitive elements provided between the first member and the second member;
An elastic body provided on a surface of the first member opposite to the surface on which the pressure sensitive element is provided;
Including
The pressure sensitive element is:
A first member electrode provided on the first member;
A second member electrode provided on the second member;
A pressure-sensitive member provided between the first member electrode and the second member electrode and having elasticity and conductivity ;
Including
The pressure sensing member, before Symbol plan view seen in the thickness direction of the second member, enclose a first portion of the overlap and the first member electrode and the second member electrode, the first portion A second portion having a thickness smaller than that of the first portion ,
The surface of the elastic member on the first member side is circular in a state where it is not subjected to stress, and has a smaller area than the surface on the side opposite to the first member . The force detection device according to claim 1 ,
When a reference point is set on the second member in the plan view of the second member, the elastic member disposed at around the reference point has three or more elastic bodies,
In each of the three or more elastic bodies in the plan view of the second member, the first member
When the two pressure-sensitive elements provided between the member and the second member are assumed to be a straight line passing through the reference point and the center of the elastic body, the two pressure-sensitive elements are arranged on both sides of the straight line. A force detector characterized by being arranged. In the force detection device according to claim 1 or 2 ,
When the reference point is set on the second member in the plan view of the second member, the elastic member disposed around the reference point has four elastic bodies,
The two pressure-sensitive elements provided between the first member and the second member in each of the four elastic bodies in the plan view of the second member include the reference point and When a straight line passing through the center of the elastic body is assumed, the force detection device is disposed on both sides of the straight line with the straight line interposed therebetween. In the force detection device according to claim 2 or 3 ,
The force detection device, wherein the two pressure sensitive elements are arranged symmetrically with respect to the straight line in the plan view of the second member. In the force detection device according to any one of claims 2 to 4 ,
In the plan view of the second member, the three or more elastic bodies are arranged at equal angular intervals between the centers of the elastic bodies and the reference points, and are arranged at equal angular intervals. Force detection device. In the force detection device according to any one of claims 1 to 5 ,
In the plan view of the second member, the surface of the elastic body on the first member side includes the plurality of pressure sensitive elements provided between the first member and the second member. A force detection device characterized by overlapping. In the force detection device according to any one of claims 1 to 6 ,
Before Symbol shape of the first member electrode, a force detector which is a circular shape. In the force detection device according to any one of claims 1 to 7 ,
The shape of the surface of the said elastic body on the opposite side to the surface in which the said 1st member was provided is circular, The force detection apparatus characterized by the above-mentioned. In the force detection device according to any one of claims 1 to 8 ,
The ratio S1 / S2 of the area S1 of the surface opposite to the surface on which the first member of the elastic body is provided and the area S2 of the surface on the surface side on which the first member is provided is 1. 1 or more and 9 or less, The force detection apparatus characterized by the above-mentioned. In the force detection device according to any one of claims 1 to 9 ,
The area of the said 2nd member electrode is larger than the sum total of the area of the said 1st member electrode, The force detection apparatus characterized by the above-mentioned. In the force detection device according to any one of claims 1 to 10 ,
The two pressure sensitive elements are disposed between the first member and the second member;
The two pressure-sensitive elements have a semicircular shape, and linear portions connecting both end portions of the semicircular arc of the two pressure-sensitive elements are arranged to face each other. In the force detection device according to any one of claims 1 to 11 ,
A flexible member provided on a surface opposite to the surface on which the first member of the elastic body is provided;
An adhesive layer provided so as to surround the plurality of pressure-sensitive elements, and bonding the first member and the second member;
A force detection device comprising: A plurality of arms, and at least one arm connecting body formed by rotatably connecting the adjacent arms of the plurality of arms;
An end effector provided in the arm coupling body;
The force detection device according to any one of claims 1 to 12 , which is provided between the arm coupling body and the end effector, and detects a force applied to the end effector.
A robot characterized by comprising:

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