JP6180834B2 - Plasmon resonance structure - Google Patents

Plasmon resonance structure Download PDF

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JP6180834B2
JP6180834B2 JP2013153276A JP2013153276A JP6180834B2 JP 6180834 B2 JP6180834 B2 JP 6180834B2 JP 2013153276 A JP2013153276 A JP 2013153276A JP 2013153276 A JP2013153276 A JP 2013153276A JP 6180834 B2 JP6180834 B2 JP 6180834B2
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plasmon resonance
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佳実 大田
佳実 大田
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Kuraray Co Ltd
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Description

本発明は、プラズモン共鳴構造体に関するものである。   The present invention relates to a plasmon resonance structure.

表面にナノオーダーの凹凸構造を有する金属微細構造体、および平面的に配列された複数のナノオーダーの金属微粒子等では、金属表面に光が入射したときに金属表面の自由電子の粗密波（表面プラズモン波）が入射光により生成されたエバネッセント波に共鳴して励起される。この現象は、表面プラズモン共鳴と呼ばれる。
プラズモン共鳴は、金属の種類と形状とサイズ、および周囲の物質等に応じた特定の波長領域で生じる。また、このプラズモン共鳴によって、金属の表面およびその近傍では非常に強い増強電場が発生する。
プラズモン共鳴構造体は、特定位置での光吸収量の増大および電場増強効果、さらには高次の光学効果の誘起などの効果が報告され、高感度センサ、光学フィルタ、および光電変換素子等の光学デバイスへの応用が期待されている。このような用途では、より狭い範囲において電場増強を集中させることによって、光と分子の相互作用を高められると考えられる。 In the case of metal microstructures having a nano-order concavo-convex structure on the surface and a plurality of nano-order metal fine particles arranged in a plane, the free-electron density wave (surface of the metal surface when light is incident on the metal surface) Plasmon wave) is excited in resonance with the evanescent wave generated by the incident light. This phenomenon is called surface plasmon resonance.
Plasmon resonance occurs in a specific wavelength region according to the type, shape, and size of the metal, the surrounding material, and the like. In addition, this plasmon resonance generates a very strong enhanced electric field at and near the metal surface.
The plasmon resonance structure has been reported to increase the amount of light absorption at a specific position and enhance the electric field, as well as to induce higher-order optical effects. Optical properties such as high-sensitivity sensors, optical filters, and photoelectric conversion elements are reported. Application to devices is expected. In such applications, it is thought that the interaction between light and molecules can be enhanced by concentrating the electric field enhancement in a narrower range.

特許文献１には、ナノオーダーの複数のロッド状の金属微粒子を含むプラズモン共鳴構造体が開示されている（請求項１）。   Patent Document 1 discloses a plasmon resonance structure including a plurality of nano-order rod-shaped metal fine particles (claim 1).

特許文献２には、高さが１００〜１００００ｎｍ、幅が２０〜１０００ｎｍ、アスペクト比が２〜１０である複数の凸部と、これら複数の凸部の表面に積層された厚さ４０〜１２０ｎｍの金属膜と、この金属膜の表面に積層された誘電体層とを有するプラズモン共鳴構造体が開示されている（請求項１）。
特許文献２の図１および図２には、複数の略円錐状の凸部が隙間なく配列した態様が記載されている。 In Patent Document 2, a plurality of protrusions having a height of 100 to 10000 nm, a width of 20 to 1000 nm, and an aspect ratio of 2 to 10 and a thickness of 40 to 120 nm laminated on the surface of the plurality of protrusions A plasmon resonance structure having a metal film and a dielectric layer laminated on the surface of the metal film is disclosed (claim 1).
1 and 2 of Patent Document 2 describe a mode in which a plurality of substantially conical convex portions are arranged without gaps.

特許文献３には、周期的に配置された複数の金属微細突部を有し、各金属微細突部は基板から離間するに従い先細となるように形成されており、各金属微細突部間は平坦な露出面を有する平坦部により接続されているプラズモン共鳴構造体が開示されている（請求項１）。特許文献３の図２には、複数の略円錐状の凸部が間隔を空けて配列した態様が記載されている。   Patent Document 3 has a plurality of metal fine protrusions arranged periodically, and each metal fine protrusion is formed to be tapered as it is separated from the substrate. A plasmon resonance structure connected by a flat portion having a flat exposed surface is disclosed (claim 1). FIG. 2 of Patent Document 3 describes a mode in which a plurality of substantially conical convex portions are arranged at intervals.

国際公開第２００６／０９２９６３号International Publication No. 2006/092963 特開２００７−２４０３６１号公報JP 2007-240361 A 特開２００８−１９６８９８号公報JP 2008-196898 A

特許文献１に記載のプラズモン共鳴構造体では、複数の金属微粒子間の空隙に入射した光は透過してしまうため、光を有効に利用できない。また、電場増強位置は制御されておらず、特定の狭い場所に電場を集中させることは困難である。
特許文献２、３に記載のプラズモン共鳴構造体では、電場増強位置は制御されておらず、基本的には略円錐状の凸部の表面全体にプラズモン電場が存在する。
特許文献１〜３の構造設計では、局所的に高い電場増強を得ることが困難である。 In the plasmon resonance structure described in Patent Document 1, light incident on a gap between a plurality of metal fine particles is transmitted, and thus light cannot be used effectively. Further, the electric field enhancement position is not controlled, and it is difficult to concentrate the electric field in a specific narrow place.
In the plasmon resonance structures described in Patent Documents 2 and 3, the electric field enhancement position is not controlled, and basically the plasmon electric field exists on the entire surface of the substantially conical convex portion.
In the structure designs of Patent Documents 1 to 3, it is difficult to obtain a locally high electric field enhancement.

本発明は上記事情に鑑みてなされたものであり、局所的に高い電場増強を得ることが可能なプラズモン共鳴構造体を提供することを目的とするものである。   The present invention has been made in view of the above circumstances, and an object thereof is to provide a plasmon resonance structure capable of obtaining a high local electric field enhancement.

本発明のプラズモン共鳴構造体は、
平面視周期的に形成された複数の凸部と当該複数の凸部の間に形成された複数の凹部とを含む凹凸構造部を有する金属体からなり、光照射によってプラズモン共鳴を生じるプラズモン共鳴構造体であって、
前記凸部は断面視で上底が下底よりも小さい略台形状であり、
前記複数の凸部の周期間隔をＰ［ｎｍ］とし、
断面視において、前記凸部の前記下底の幅をＷ［ｎｍ］とし、前記凸部の前記下底に対する側面の傾斜角度をθ［°］としたとき、
Ｐが１０〜１０００ｎｍであり、
θが７０°以上９０°未満であり、
下記式（１）で表されるパラメータＡが０．０３５以下であり、
下記式（２）で表されるパラメータＢが２０ｎｍ以下であるプラズモン共鳴構造体である。 The plasmon resonance structure of the present invention is
A plasmon resonance structure made of a metal body having a concavo-convex structure portion including a plurality of convex portions periodically formed in plan view and a plurality of concave portions formed between the plurality of convex portions, and generates plasmon resonance by light irradiation. Body,
The convex portion has a substantially trapezoidal shape in which the upper base is smaller than the lower base in a sectional view,
The periodic interval of the plurality of convex portions is P [nm],
In cross-sectional view, when the width of the lower base of the convex portion is W [nm], and the inclination angle of the side surface of the convex portion with respect to the lower base is θ [°],
P is 10 to 1000 nm,
θ is 70 ° or more and less than 90 °,
The parameter A represented by the following formula (1) is 0.035 or less,
A plasmon resonance structure in which a parameter B represented by the following formula (2) is 20 nm or less.

Figure 0006180834
Figure 0006180834

本発明によれば、局所的に高い電場増強を得ることが可能なプラズモン共鳴構造体を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the plasmon resonance structure which can obtain a high electric field enhancement locally can be provided.

本発明に係る一実施形態のプラズモン共鳴構造体の全体模式断面図である。1 is an overall schematic cross-sectional view of a plasmon resonance structure according to an embodiment of the present invention. 図１の部分拡大図である。It is the elements on larger scale of FIG. 図１の部分拡大図である。It is the elements on larger scale of FIG. [実施例]の項における計算モデルを示す模式断面図である。It is a schematic cross section showing a calculation model in the section of [Example].

「プラズモン共鳴構造体」
図面を参照して、本発明に係る一実施形態のプラズモン共鳴構造体の構造について説明する。
図１は本実施形態のプラズモン共鳴構造体の全体模式断面図である。
図２Ａおよび図２Ｂは、図１の部分拡大図である。 "Plasmon resonance structure"
A structure of a plasmon resonance structure according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is an overall schematic cross-sectional view of the plasmon resonance structure of the present embodiment.
2A and 2B are partially enlarged views of FIG.

図１に示すように、本実施形態のプラズモン共鳴構造体１は、基部１０とその上に一体形成された凹凸構造部２０とを有する金属体からなり、光照射によってプラズモン共鳴を生じる構造体である。
凹凸構造部２０は、平面視周期的に形成された複数の凸部２１とこれら複数の凸部２１の間に形成された複数の凹部２２とからなる。
凸部２１は断面視で上底２１Ｔが下底２１Ｂよりも小さい略台形状である。
ここで、「略台形状」とは、台形状、その面取り形状、およびこれらに近い形状を指す。 As shown in FIG. 1, the plasmon resonance structure 1 of the present embodiment is a structure that includes a base 10 and a concavo-convex structure 20 integrally formed thereon, and generates plasmon resonance by light irradiation. is there.
The concavo-convex structure portion 20 includes a plurality of convex portions 21 formed periodically in plan view and a plurality of concave portions 22 formed between the plurality of convex portions 21.
The convex portion 21 has a substantially trapezoidal shape in which the upper base 21T is smaller than the lower base 21B in a sectional view.
Here, the “substantially trapezoidal shape” refers to a trapezoidal shape, a chamfered shape thereof, and a shape close thereto.

凸部２１は、略円錐台状でもよいし、断面視略台形状のラインパターンでもよい。
凸部２１が略円錐台状である場合、複数の凸部２１の平面周期パターンの単位は特に制限なく、三角格子状パターン、および四角格子状パターン等が挙げられる。 The convex portion 21 may have a substantially truncated cone shape or a line pattern having a substantially trapezoidal shape in cross section.
When the convex portion 21 has a substantially truncated cone shape, the unit of the planar periodic pattern of the plurality of convex portions 21 is not particularly limited, and examples thereof include a triangular lattice pattern and a square lattice pattern.

プラズモン共鳴構造体１の構成金属は特に制限されず、用いる光の波長、プラズモン共鳴構造体１の材料コストと製造方法と生産性等に応じて選択される。
少なくとも凹凸構造部２０は、プラズモン共鳴が効果的に起こる金属を含むことが好ましく、具体的には、Ａｇ、Ａｕ、Ａｌ、およびＣｕからなる群より選ばれた少なくとも１種の金属を含むことが好ましく、Ａｇおよび／またはＡｕを含むことがより好ましい。
なお、基部１０において、凸部２１が形成されていない部分の露出表面が凹凸構造部２０の凹部２２の底面２２Ｂである。したがって、凹凸構造部２０がプラズモン共鳴が効果的に起こる金属を含むということは、凸部２１のみならず、少なくとも基部１０の表層部分は、プラズモン共鳴が効果的に起こる金属を含むということである。
プラズモン共鳴構造体１は同一材料の一体であってもよいし、異なる材料の積層体であってもよい。 The constituent metal of the plasmon resonance structure 1 is not particularly limited, and is selected according to the wavelength of light to be used, the material cost of the plasmon resonance structure 1, the manufacturing method, the productivity, and the like.
It is preferable that at least the concavo-convex structure portion 20 includes a metal in which plasmon resonance effectively occurs, and specifically includes at least one metal selected from the group consisting of Ag, Au, Al, and Cu. Preferably, it contains Ag and / or Au.
In the base 10, the exposed surface of the portion where the convex portion 21 is not formed is the bottom surface 22 </ b> B of the concave portion 22 of the concavo-convex structure portion 20. Accordingly, the fact that the concavo-convex structure portion 20 includes a metal in which plasmon resonance effectively occurs means that not only the convex portion 21 but also at least the surface layer portion of the base portion 10 includes a metal in which plasmon resonance effectively occurs. .
The plasmon resonance structure 1 may be an integral body of the same material or a laminate of different materials.

プラズモン共鳴構造体１の製造方法は特に制限されない。
プラズモン共鳴構造体１はたとえば、基板上に形成された熱可塑性樹脂層に対して、凹凸構造部２０のパターンと同一の凹凸パターンを有するモールドを用いてパターン転写を行い、この上に、そのパターン形状に沿ってＡｇおよび／またはＡｕ等のプラズモン共鳴を生じる金属を積層し、得られた金属体をモールドから剥離することで、製造できる。
たとえば、基板として金属基板を用いる場合、熱可塑性樹脂層上に電解メッキ等によりＡｇおよび／またはＡｕ等の金属を積層することができる。たとえば、熱可塑性樹脂層上に金属体を形成した後、得られた構造体を熱可塑性樹脂層が溶解する溶媒に浸漬させ、熱可塑性樹脂層を溶解させることで、金属体を熱可塑性樹脂層から剥離することができる。 The manufacturing method of the plasmon resonance structure 1 is not particularly limited.
For example, the plasmon resonance structure 1 performs pattern transfer on a thermoplastic resin layer formed on a substrate using a mold having the same concavo-convex pattern as the pattern of the concavo-convex structure portion 20, and the pattern is formed thereon. It can be manufactured by laminating a metal that causes plasmon resonance such as Ag and / or Au along the shape and peeling the obtained metal body from the mold.
For example, when a metal substrate is used as the substrate, a metal such as Ag and / or Au can be laminated on the thermoplastic resin layer by electrolytic plating or the like. For example, after forming a metal body on a thermoplastic resin layer, the resulting structure is immersed in a solvent in which the thermoplastic resin layer dissolves, and the thermoplastic resin layer is dissolved, whereby the metal body is made into the thermoplastic resin layer. Can be peeled off.

上記方法において、基本的には、モールドの凹凸パターンは、凹凸構造部２０のパターンと同一パターンで設計されるが、実際に製造されるプラズモン共鳴構造体１の凹凸パターンは、凸部２１のエッジ形状等が設計パターンとは多少異なる場合がある。   In the above method, the concave / convex pattern of the mold is basically designed in the same pattern as the pattern of the concave / convex structure portion 20, but the concave / convex pattern of the plasmon resonance structure 1 actually manufactured is the edge of the convex portion 21. The shape and the like may be slightly different from the design pattern.

本実施形態のプラズモン共鳴構造体１は、ナノオーダーの凹凸構造部２０を有しているので、幅広い波長と偏光の光に対してプラズモン共鳴が効果的に起こり、電場増強効果が得られる。   Since the plasmon resonance structure 1 of the present embodiment has the nano-order uneven structure portion 20, plasmon resonance effectively occurs for a wide range of wavelengths and polarized light, and an electric field enhancement effect is obtained.

本実施形態ではさらに、下記設計を採用することで、局所的な電場増強効果が得られる。
本実施形態のプラズモン共鳴構造体１において、
複数の凸部２１の周期間隔をＰ［ｎｍ］とし、
断面視において、凸部２１の下底２１Ｂの幅をＷ［ｎｍ］とし、凸部２１の下底２１Ｂに対する側面２１Ｓの傾斜角度をθ［°］としたとき、
Ｐが１０〜１０００ｎｍであり、
θが７０°以上９０°未満であり、
下記式（１）で表されるパラメータＡが０．０３５以下であり、
下記式（２）で表されるパラメータＢが２０ｎｍ以下である。 In the present embodiment, a local electric field enhancement effect can be obtained by adopting the following design.
In the plasmon resonance structure 1 of the present embodiment,
The periodic interval of the plurality of convex portions 21 is P [nm],
In cross-sectional view, when the width of the lower base 21B of the convex portion 21 is W [nm] and the inclination angle of the side surface 21S with respect to the lower base 21B of the convex portion 21 is θ [°],
P is 10 to 1000 nm,
θ is 70 ° or more and less than 90 °,
The parameter A represented by the following formula (1) is 0.035 or less,
The parameter B represented by the following formula (2) is 20 nm or less.

Figure 0006180834
Figure 0006180834

図中、Ｇは互いに隣接する凸部２１の間隙（ギャップ）［ｎｍ］である。なお、Ｗ＝Ｐ−Ｇ［ｎｍ］である。
図中、ＴＷは凸部２１の上底２１Ｔの幅である。θの大きさにもよるが、ＴＷは０．２×Ｐ程度である。 In the drawing, G is a gap (gap) [nm] between the convex portions 21 adjacent to each other. Note that W = P−G [nm].
In the figure, TW is the width of the upper base 21T of the convex portion 21. Although it depends on the magnitude of θ, TW is about 0.2 × P.

図面上、パラメータＡ、Ｂの大きさは、図２Ａおよび図２Ｂで示される。
図２Ａにおいて、凹部２２の底面２２ＢからＰ／１００の高さの位置の例を破線で示してある。この凹部２２の底面２２ＢからのＰ／１００の高さの位置に対して、Ｐ／１００・ｔａｎ（９０°−θ）とパラメータＰ×Ａの大きさを図示してある。パラメータＡは、周期Ｐに対する互いに隣接する凸部２１の間の相対的な大きさを表すパラメータである。
図２Ｂにおいて、１０ｎｍの高さの位置の例を破線で示してある。この凹部２２の底面２２Ｂからの１０ｎｍの高さの位置に対して、１００×ｔａｎ（９０°−θ）とパラメータＢの大きさを図示してある。パラメータＢは、互いに隣接する凸部２１の間の絶対的な大きさを表すパラメータである。 In the drawing, the magnitudes of the parameters A and B are shown in FIGS. 2A and 2B.
In FIG. 2A, an example of the position at a height of P / 100 from the bottom surface 22 </ b> B of the recess 22 is indicated by a broken line. P / 100 · tan (90 ° −θ) and the size of the parameter P × A are shown with respect to the position of the height of P / 100 from the bottom surface 22B of the recess 22. The parameter A is a parameter that represents a relative size between the adjacent convex portions 21 with respect to the period P.
In FIG. 2B, an example of a position having a height of 10 nm is indicated by a broken line. The size of parameter B is 100 × tan (90 ° −θ) with respect to the position of 10 nm height from the bottom surface 22B of the recess 22. The parameter B is a parameter representing the absolute size between the convex portions 21 adjacent to each other.

本実施形態では、凸部２１の側面２１Ｓの傾斜角度θを大きく設計している。これにより、凹凸構造部２０の表面およびその近傍に表面プラズモンを誘起できる。
さらに複数の凸部２１を互いに充分に近接させることによって、生じた表面プラズモンを複数の凸部２１間に集中させることができる。この際、生じた表面プラズモンは、互いに隣接する凸部２１間の間隙が狭い下底２１Ｂ側により多く集中させることができる。
したがって、上記設計のプラズモン共鳴構造体１では、凹部２２の底面２２Ｂおよびその近傍において、局所的に電場が増強される。 In the present embodiment, the inclination angle θ of the side surface 21S of the convex portion 21 is designed to be large. Thereby, surface plasmons can be induced on the surface of the concavo-convex structure portion 20 and in the vicinity thereof.
Furthermore, the generated surface plasmons can be concentrated between the plurality of protrusions 21 by bringing the plurality of protrusions 21 sufficiently close to each other. At this time, the generated surface plasmon can be concentrated more on the lower bottom 21B side where the gap between the adjacent convex portions 21 is narrow.
Therefore, in the plasmon resonance structure 1 of the above design, the electric field is locally enhanced at the bottom surface 22B of the recess 22 and in the vicinity thereof.

以上説明したように、本実施形態によれば、局所的に高い電場増強を得ることが可能なプラズモン共鳴構造体１を提供することができる。
本実施形態のプラズモン共鳴構造体１では、凹部２２の底面２２Ｂおよびその近傍において、大きな電場増強効果が得られ、光センサ、光学フィルタ、および光電変換素子等の光学デバイスに好ましく適用できる。 As described above, according to the present embodiment, it is possible to provide the plasmon resonance structure 1 capable of obtaining a high electric field enhancement locally.
In the plasmon resonance structure 1 of the present embodiment, a large electric field enhancement effect is obtained at the bottom surface 22B of the recess 22 and its vicinity, and it can be preferably applied to optical devices such as an optical sensor, an optical filter, and a photoelectric conversion element.

本発明に係る実施例および比較例について説明する。   Examples and comparative examples according to the present invention will be described.

（実施例１〜２６、比較例１〜１６）
図１に示したような断面構造のプラズモン共鳴構造体について、凸部２１の形状と材質、周期Ｐ、凸部２１の下底２１Ｂの幅Ｗ、および側面２１Ｓの傾斜角度θを変えて、表面およびその近傍の電場強度の空間分布を、ＦＤＴＤ法（Ｒ−Ｓｏｆｔ社製のＦｕｌｌＷＡＶＥ）を用いてシミュレーションした。 (Examples 1 to 26, Comparative Examples 1 to 16)
For the plasmon resonance structure having a cross-sectional structure as shown in FIG. 1, the shape and material of the convex portion 21, the period P, the width W of the lower bottom 21B of the convex portion 21, and the inclination angle θ of the side surface 21S are changed. And the spatial distribution of the electric field intensity in the vicinity thereof was simulated using the FDTD method (FullWAVE manufactured by R-Soft).

各例における設計条件は表１〜表３に示す通りとした。
実施例１〜１４および比較例１〜８（表１）では、凸部２１の形状を円錐台状とし、材質を銀とし、複数の凸部２１の平面周期パターンの単位を三角格子状パターンとした。
実施例１５〜１９および比較例９〜１３（表２）では、凸部２１の形状を円錐台状とし、材質を金とし、複数の凸部２１の平面周期パターンの単位を三角格子状パターンとした。
実施例２０〜２６および比較例１４〜１６（表３）では、凸部２１の形状をラインパターンとし、材質を銀とした。
金と銀の誘電関数はソフトのデフォルトをそのまま用いた。
周囲物質は空気（誘電率は１）とした。 The design conditions in each example were as shown in Tables 1 to 3.
In Examples 1-14 and Comparative Examples 1-8 (Table 1), the shape of the convex part 21 is a truncated cone, the material is silver, and the unit of the planar periodic pattern of the plurality of convex parts 21 is a triangular lattice pattern. did.
In Examples 15 to 19 and Comparative Examples 9 to 13 (Table 2), the shape of the convex portion 21 is a truncated cone, the material is gold, and the unit of the planar periodic pattern of the plurality of convex portions 21 is a triangular lattice pattern. did.
In Examples 20 to 26 and Comparative Examples 14 to 16 (Table 3), the shape of the convex portion 21 was a line pattern, and the material was silver.
For the dielectric function of gold and silver, the soft default was used as it was.
The surrounding material was air (dielectric constant is 1).

計算モデルを図３に示す。図中、図１のプラズモン共鳴構造体と同じ構成要素には同じ参照符号を付してある。
基部１０の上面（複数の凸部２１の下底２１Ｂを含む面）をＸ−Ｙ平面とし、凸部２１の高さ方向をＺ方向とした。
断面視において、光源Ｌは、ある１個の凸部２１の図示右半分（図示右側の側面および上底の図示右半分）と、この凸部２１とその図示右側に隣接する凸部２１との間隙の図示左半分の上方にあり、Ｙ方向に振動しながらＺ方向に進む光がプラズモン共鳴構造体に入射する設定とした。
入射光は中心波長５５０ｎｍのパルス波とし、出力はＦＦＴ解析により求めた。
光源Ｌの下方を計算領域ＣＡＬとした。
Ｘ方向とＹ方向は対称条件とした。
垂直方向（Ｚ方向）は入射した電場を完全に吸収し、一度境界に到達した光が他に影響しないような条件（完全吸収条件）とした。 The calculation model is shown in FIG. In the figure, the same components as those of the plasmon resonance structure of FIG.
The upper surface of the base portion 10 (the surface including the lower bases 21B of the plurality of convex portions 21) was the XY plane, and the height direction of the convex portions 21 was the Z direction.
In a cross-sectional view, the light source L includes a right half of a certain convex portion 21 (a side surface on the right side of the drawing and a right half of the upper bottom), and a convex portion 21 adjacent to the right side of the convex portion 21 in the drawing. The setting is such that light that is above the left half of the gap in the figure and that travels in the Z direction while vibrating in the Y direction is incident on the plasmon resonance structure.
The incident light was a pulse wave with a center wavelength of 550 nm, and the output was obtained by FFT analysis.
The area below the light source L is defined as a calculation area CAL.
The X direction and the Y direction were symmetric.
The vertical direction (Z direction) was such that the incident electric field was completely absorbed, and light that once reached the boundary was not affected by other conditions (complete absorption condition).

Ｙ−Ｚ平面での電場ＥＹ（あるＺ位置においてＹ方向に振動する光の電場）を求め、電場強度の空間分布を求めた。
下記式より、最大の電場増強度を求めた。
最大の電場増強度＝｜ＥＭＡＸ｜２／｜Ｅ０｜２
（式中、ＥＭＡＸは最大電場の振幅、Ｅ０は入射電場の振幅をそれぞれ示す。） The electric field E Y in the YZ plane (the electric field of light oscillating in the Y direction at a certain Z position) was determined, and the spatial distribution of the electric field strength was determined.
The maximum electric field enhancement was determined from the following formula.
Maximum electric field enhancement strength = | E MAX | 2 / | E 0 | 2
(In the equation, E MAX represents the maximum electric field amplitude, and E 0 represents the incident electric field amplitude.)

各実施例および各比較例における最大の電場増強度を表１〜表３に示す。
Ｐが１０〜１０００ｎｍであり、θが７０°以上９０°未満であり、パラメータＡが０．０３５以下であり、パラメータＢが２０ｎｍ以下の設計とした実施例１〜２６では、パラメータＡまたはパラメータＢを規定外の設計とした比較例１〜１６に対して、最大の電場増強度が飛躍的に向上することが分かった。
電場の空間分布のシミュレーション結果から、実施例１〜２６では、凹部２２の底面２２Ｂおよびその近傍において、局所的に電場が大きく増強されることが分かった。 Tables 1 to 3 show the maximum electric field enhancement in each example and each comparative example.
In Examples 1-26 in which P is 10 to 1000 nm, θ is 70 ° or more and less than 90 °, parameter A is 0.035 or less, and parameter B is 20 nm or less, parameter A or parameter B It was found that the maximum electric field enhancement strength was dramatically improved with respect to Comparative Examples 1 to 16, which had a design outside the specification.
From the simulation result of the spatial distribution of the electric field, in Examples 1 to 26, it was found that the electric field was greatly enhanced locally at the bottom surface 22B of the recess 22 and in the vicinity thereof.

Figure 0006180834
Figure 0006180834

Figure 0006180834
Figure 0006180834

Figure 0006180834
Figure 0006180834

本発明は上記実施形態に限定されるものではなく、本発明の趣旨を逸脱しない限りにおいて、適宜設計変更が可能である。   The present invention is not limited to the above-described embodiment, and design changes can be made as appropriate without departing from the spirit of the present invention.

本発明のプラズモン共鳴構造体は、光センサ、光学フィルタ、および光電変換素子等の光学デバイスに好ましく適用できる。   The plasmon resonance structure of the present invention can be preferably applied to optical devices such as an optical sensor, an optical filter, and a photoelectric conversion element.

１ プラズモン共鳴構造体
１０ 基部
２０ 凹凸構造部
２１ 凸部
２１Ｔ 上底
２１Ｂ 下底
２１Ｓ 側面
２２ 凹部
２２Ｂ 底面 1 Plasmon Resonance Structure 10 Base 20 Uneven Structure 21 Projection 21T Upper Bottom 21B Lower Bottom 21S Side 22 Recess 22B Bottom

Claims (4)

平面視周期的に形成された全体が金属からなる複数の凸部と当該複数の凸部の間に形成された複数の凹部とを含む凹凸構造部を有する金属体からなり、光照射によってプラズモン共鳴を生じるプラズモン共鳴構造体であって、
前記凸部は断面視で上底が下底よりも小さい略台形状であり、
前記複数の凸部の周期間隔をＰ［ｎｍ］とし、
断面視において、前記凸部の前記下底の幅をＷ［ｎｍ］とし、前記凸部の前記下底に対する側面の傾斜角度をθ［°］としたとき、
Ｐが１０〜１０００ｎｍであり、
θが７０°以上９０°未満であり、
下記式（１）で表されるパラメータＡが０．０３５以下であり、
下記式（２）で表されるパラメータＢが２０ｎｍ以下であり、
前記凹部の底面およびその近傍において局所的に電場が増強されるプラズモン共鳴構造体。
Figure 0006180834
 A plasmon resonance formed by a metal body having a concavo-convex structure portion including a plurality of convex portions formed entirely of metal and a plurality of concave portions formed between the plurality of convex portions formed periodically in plan view. A plasmon resonance structure that yields
The convex portion has a substantially trapezoidal shape in which the upper base is smaller than the lower base in a sectional view,
The periodic interval of the plurality of convex portions is P [nm],
In cross-sectional view, when the width of the lower base of the convex portion is W [nm], and the inclination angle of the side surface of the convex portion with respect to the lower base is θ [°],
P is 10 to 1000 nm,
θ is 70 ° or more and less than 90 °,
The parameter A represented by the following formula (1) is 0.035 or less,
Parameter B represented by the following formula (2) is 20 nm or less ,
A plasmon resonance structure in which an electric field is locally enhanced at the bottom surface of the recess and in the vicinity thereof .
Figure 0006180834
 前記凸部は略円錐台状であり、前記複数の凸部の平面周期パターンの単位が三角格子状パターンまたは四角格子状パターンである請求項１に記載のプラズモン共鳴構造体。   2. The plasmon resonance structure according to claim 1, wherein the convex portion has a substantially truncated cone shape, and a unit of a planar periodic pattern of the plurality of convex portions is a triangular lattice pattern or a square lattice pattern. 前記凸部は断面視略台形状のラインパターンである請求項１に記載のプラズモン共鳴構造体。   The plasmon resonance structure according to claim 1, wherein the convex portion is a line pattern having a substantially trapezoidal shape in cross section. Ａｇ、Ａｕ、Ａｌ、およびＣｕからなる群より選ばれた少なくとも１種の金属を含む請求項１〜３のいずれかに記載のプラズモン共鳴構造体。   The plasmon resonance structure according to any one of claims 1 to 3, comprising at least one metal selected from the group consisting of Ag, Au, Al, and Cu.
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