JP6155242B2 - Vibration power generation body and method for electrification of vibration power generation body - Google Patents

Description

  The present invention relates to a vibration power generator using an electret dielectric.

  Conventionally, electrical energy includes vibrations of structures such as roads, bridges, buildings, and industrial machines, vibrations of moving bodies such as automobiles, railway vehicles, and aircraft, and environmental vibrations that are universally present in human movement and the environment. Attempts have been made to make effective use by converting to.

  As a power generation method for converting such vibration energy into electricity, there is a method that uses electrostatic induction using an electret dielectric that holds a charge semipermanently. By changing the relative position of the electret dielectric and the electrode disposed at a distance from the dielectric by vibration or the like, electric charges are electrostatically induced in the electrode, and power generation is performed. A power generation device using such a principle is described in Patent Document 1, for example.

  In the vibration power generation apparatus described in Patent Document 1, a plurality of strip-shaped base electrodes are arranged in parallel on the upper surface of a fixed substrate, and electrets are formed on the respective base electrodes. The movable substrate faces the surface of the fixed substrate on which the electret is disposed, and is disposed in parallel with a predetermined gap. Further, a strip-shaped counter electrode is formed on the counter surface of the movable substrate so as to oppose the base electrode. When vibration is applied, the movable substrate moves in parallel while maintaining a distance from the fixed substrate. Therefore, the relative position between the electret and the counter electrode changes in a parallel direction. At this time, electric power can be electrostatically induced in each electrode to generate power.

  However, it is difficult for this power generation method to cope with a wide range and various forms of attachment sites. For example, the device described in Patent Document 1 is inferior in flexibility, such as changing the shape according to the attachment site, because each member is formed substantially rigid.

  The present inventors have studied a flexible vibration power generation body and previously proposed a vibration power generation body using an electret dielectric. This vibration power generator generates power by changing the relative distance between a flexible electrode and an electret dielectric by an applied external force or vibration (Patent Documents 2 and 3).

JP 2010-136598 A JP 2014-27756 A JP 2014-42444 A

  As a method of charging the electret dielectric used in the vibration power generator as in Patent Documents 2 and 3, (1) after electret dielectric surface is charged using an external corona generator, the electret dielectric is A method of manufacturing a vibration power generator by sandwiching an electret dielectric and an electrode via a spacer, and (2) electret dielectric via a spacer before charging the electret dielectric There are two methods of manufacturing a vibration power generator by bonding an electrode and applying a voltage between the electrode in this state to perform electret dielectric charging.

  The electret dielectric charging method (1) is widely used as an electret dielectric charging method. On the other hand, in the method (2), it is not necessary to use an external corona generator, and electret dielectrics can be charged in the final step of the manufacturing process of the vibration power generator. For this reason, the method (2) makes it easier to manufacture the vibration power generator and to charge the electret dielectric compared to the method (1).

  Therefore, the inventors tried to electretize the electret dielectric by the method (2), and in order to make the electret dielectric have a predetermined charging potential, the condition of the voltage applied between the electrodes was derived. It took time. That is, in the method (2), the electret dielectric can be charged relatively easily if the electret dielectric charging conditions can be derived in advance. However, it has been found that it takes time to derive the conditions when electret charging conditions are not obtained, for example, when electret charging is performed on various shapes and structures of vibration power generators.

  On the other hand, when the vibration power generator is continuously used, there is a concern that the power generation output of the vibration power generator decreases as the surface potential (charging potential) of the electret dielectric decreases with time. In order to suppress such a decrease in the power generation output of the vibration power generator, a material that does not easily attenuate the surface potential of the electret dielectric is selected or the structure of the vibration power generator is devised. It is necessary to take measures to stabilize the power generation output of the power generator. However, there has been a problem that it is difficult to completely prevent a decrease in the power generation output of the vibration power generator for longer-term use by an inexpensive and easy countermeasure.

  The present invention has been made in view of such problems, and it is easy to charge the electret dielectric in a state in which the vibration power generator is configured, and the power generation output of the vibration power generator is reduced by the decrease in the surface potential of the electret. An object of the present invention is to provide a vibration power generator and the like that can easily recover the power generation output of the vibration power generator by charging the electret dielectric in a state where the vibration power generator is configured again even when the vibration power is reduced.

In order to achieve the above-mentioned object, the first invention is a vibration power generator, an electret dielectric holding electric charge, and a first electrode and a second electrode arranged so as to sandwich the electret dielectric, A grid electrode provided between the electret dielectric and the first electrode so as to be spaced apart from each other; the electret dielectric, the first electrode, the second electrode, and the grid electrode, Both have flexibility, and a spacer is partially provided between the electret dielectric and the grid electrode, and the electret dielectric and the grid electrode are interposed via at least a part of the spacer. Are joined, and the portion other than the spacer becomes a non-joined portion, and the first electrode and the grid electrode are deformed, whereby the grid electrode It is possible to contact the electret dielectric, at least a portion of said non-joined portion, it is possible to vary the distance in the thickness direction of the electret dielectric and the grid electrode, the grid electrode A vibration power generator characterized in that a power generation output can be taken out between the first electrode and the second electrode that are short-circuited.

  It is desirable that the second electrode and the electret dielectric are bonded over the entire surface.

A spacer is partially provided between the grid electrode and the first electrode to form a gap, and the spacer formed between the electret dielectric and the grid electrode in plan view; The positions of the spacers formed between the grid electrode and the first electrode may substantially coincide with each other .

A dielectric layer may be formed between the grid electrode and the first electrode. In addition, the grid electrode has a structure in which a plurality of openings having a predetermined shape are provided in a predetermined shape, and the size of the opening and the interval between the openings are larger than the size of the non-joining portion. May be small.

  According to the first invention, the distance in the thickness direction between the electret dielectric and the grid electrode is changed by an external force, and static electricity is statically applied to both the grid electrode and the first electrode that is short-circuited with the grid electrode in accordance with the change in distance. It is electrically induced and can generate electricity.

  The external force is not limited to a force that mechanically contacts another substance with the vibration power generator and deforms the vibration power generator. For example, from the outside to the vibration power generation body that can be repeatedly applied to the vibration power generation body, such as vibration of the structure itself generated in the attachment portion of the vibration power generation body, sound waves or air pressure changes from the outside, and the vibration power generation body can be deformed It refers to the action of the force. This external force may be minute. In addition, the vibration in the vibration power generator is not limited to the one whose amplitude or frequency is constant, but refers to one that can apply external force (including inertial force) repeatedly or irregularly. .

In addition, by using the grid electrode, the electret dielectric is charged in a state where the vibration power generator is configured, that is, in a state where the electret dielectric and the electrodes (first electrode, second electrode, and grid electrode) are stacked. It can be performed. Therefore, the power generation output can be recovered by charging the electret dielectric again with respect to the vibration power generation body in which the power generation output is reduced. At this time, the electret dielectric can be easily charged to a desired surface potential (charging potential) by controlling the voltage of the grid electrode. For this reason, it is not necessary to perform a troublesome derivation of the charging process conditions for charging the electret dielectric to a desired surface potential (charging potential). In addition, since the spacer is partially provided between the electret dielectric and the grid electrode, it is easy to maintain the gap between the electret dielectric and the grid electrode by the thickness of the spacer. Therefore, the distance between the electret dielectric and the grid electrode can be changed more reliably according to the external force.

  Further, by joining one second electrode and the electret dielectric over the entire surface, it is possible to generate electric power only by changing the distance between the other first electrode (and grid electrode) and the electret dielectric. As described above, the vibration power generator structure and the power generation mechanism thereof can be simplified by adopting the vibration power generator structure in which the distance from the electrode is changed only on one side of the electret dielectric. For example, in the case of a vibration power generation structure that generates power by changing the distance between the electrodes on both sides and the electret dielectric, it suppresses cancellation due to the difference in the polarity of the voltage of the power generation caused by the change in both distances. Therefore, it is necessary to align the direction and timing of both distance changes, but this is not necessary in the case of a vibration power generator structure that generates power by changing the distance between the electrode on one side and the electret dielectric.

  Further, if a spacer is provided between the grid electrode and the first electrode, the gap between the grid electrode and the first electrode can be maintained. Therefore, it is possible to prevent the grid electrode and the first electrode from being short-circuited during the electret dielectric charging process.

  In addition, by forming a dielectric layer between the grid electrode and the first electrode, insulation between the grid electrode and the first electrode can be ensured and a short circuit can be prevented. Moreover, a dielectric barrier discharge can be generated by applying an AC voltage between the first electrode and the grid electrode, and a desired voltage can be obtained by adjusting the DC voltage between the second electrode and the grid electrode. The electret dielectric can be efficiently charged to the surface potential (charging potential). Further, the first electrode and the grid electrode are joined to each other through the dielectric layer (joining using an adhesive or a pressure-sensitive adhesive if necessary), so that a space ( The air layer is not formed, so that when external force is applied to the vibration power generator, efficient external force propagation from the first electrode side to the grid electrode side is realized. An efficient distance change between the electrode and the electret dielectric can be realized. For this reason, power generation efficiency improves.

2nd invention is the electrification processing method of a vibration electric power generation body, Comprising: The electret dielectric material which hold | maintained the electric charge, the 1st electrode and 2nd electrode which are arrange | positioned so that the said electret dielectric material may be inserted | pinched, and the said electret dielectric material And a grid electrode provided between the first electrode and the first electrode, using a vibration power generator, the electret dielectric, the first electrode, the second electrode, and the grid electrode Are both flexible, and a spacer is partially provided between the electret dielectric and the grid electrode, and the electret dielectric and the grid are interposed via at least a part of the spacer. The electrode is joined, the portion other than the spacer becomes a non-joined portion, and the first electrode and the grid electrode are deformed, whereby the grip It is possible to contact the with the electrode electret dielectric, at least a portion of said non-joined portion, it is possible to vary the distance in the thickness direction of the electret dielectric and the grid electrode, the grid A DC voltage V1 is applied between the first electrode and the second electrode while the electrode and the first electrode are insulated, and is lower than V1 between the grid electrode and the second electrode. The method for charging a vibration power generator is characterized in that a DC voltage V2 is applied and air discharge is performed in a gap between the first electrode and the grid electrode to charge the electret dielectric.

In addition, the method of electrifying the vibration power generator includes an electret dielectric holding electric charge, a first electrode and a second electrode disposed so as to sandwich the electret dielectric, the electret dielectric, and the first And a grid electrode provided at a distance from one electrode, using a vibration power generator, and the electret dielectric, the first electrode, the second electrode, and the grid electrode are all It has flexibility, and a spacer is partially provided between the electret dielectric and the grid electrode, and the electret dielectric and the grid electrode are joined via at least a part of the spacer. And the portion other than the spacer becomes a non-joining portion, and the first electrode and the grid electrode are deformed, It is possible to contact the serial electret dielectric, at least a portion of said non-joined portion, it is possible to vary the distance in the thickness direction of the electret dielectric and the grid electrode, the grid electrode An AC voltage V1 is applied between the first electrode and the second electrode while the first electrode is insulated, and a DC voltage lower than V1 is applied between the grid electrode and the second electrode. A method for charging a vibration power generator, wherein V2 is applied and the electret dielectric is charged by performing air discharge in a gap between the first electrode and the grid electrode.

In addition, the method of electrifying the vibration power generator includes an electret dielectric holding electric charge, a first electrode and a second electrode disposed so as to sandwich the electret dielectric, the electret dielectric, and the first And a dielectric layer provided between the grid electrode and the first electrode, and using the vibration power generator, the electret dielectric, and the dielectric layer. The first electrode, the second electrode, and the grid electrode are all flexible, and a spacer is partially provided between the electret dielectric and the grid electrode, and at least a part thereof The electret dielectric and the grid electrode are joined via the spacer, and a portion other than the spacer becomes a non-joined portion, and the first electrode and the grid electrode are joined. By the grid electrode is deformed, wherein the grid electrode is capable of contacting the electret dielectric, at least a portion of said non-joined portion, the distance in the thickness direction of the electret dielectric and the grid electrode In the state where the grid electrode and the first electrode are insulated, an alternating voltage V1 is applied between the first electrode and the second electrode, and the grid electrode and the first electrode A DC voltage V2 lower than V1 is applied between the two electrodes, and air discharge is performed between the dielectric layer and the grid electrode to charge the electret dielectric. This is a method for charging a vibration power generator.

  According to the second invention, the electret dielectric can be efficiently charged to a desired surface potential (charging potential) while the vibration power generator is configured.

  According to the present invention, it is easy to charge the electret dielectric in the state where the vibration power generator is configured, and even if the power generation output of the vibration power generator is reduced due to a decrease in the surface potential (charging potential) of the electret, By electrifying the electret dielectric in a state in which the vibration power generator is configured, it is possible to provide a vibration power generator that can recover the power generation output of the vibration power generator.

(A) is a figure which shows the vibration electric power generation body 1, (b) is a figure which shows the vibration electric power generation body 1a. (A) is a figure which shows the electret dielectric material 3, (b) is an enlarged view of the electret dielectric material 3a using the porous material. The figure which shows the connection state of each electrode at the time of use (at the time of power generation output taking out) of the vibration electric power generation body 1a. 1A is an enlarged view of part A in FIG. 1A. FIG. 1A is a diagram showing a steady state (a state where no external force is applied), and FIG. 1B is a state where an external force is applied (mainly deformation of the electrode 5b and the grid electrode 11). FIG. The figure which shows the connection state of each electrode and each power supply at the time of the charging process of the electret dielectric material 3 of the vibration electric power generation body 1a. The figure which shows the vibration electric power generation body 1b. The figure which shows the vibration electric power generation body 1c. These are the figures which show the connection state of each electrode and each power supply at the time of the electrification process of the electret dielectric material 3 of the vibration electric power generation body 1c. The figure which shows the vibration electric power generation body 1d. The figure which shows the vibration electric power generation body 1e.

<Embodiment 1>
Hereinafter, the vibration electric power generation body 1 concerning embodiment of this invention is demonstrated. As shown in FIG. 1A, the vibration power generator 1 mainly includes an electret dielectric 3, electrodes 5a and 5b, spacers 7a, 7b and 7c, a grid electrode 11 and the like.

  On both sides of the electret dielectric 3, an electrode 5 b that is a first electrode and an electrode 5 a that is a second electrode are disposed so as to cover the entire surface of the electret dielectric 3. Moreover, the grid electrode 11 is arrange | positioned at intervals with respect to each between the thickness direction of the electret dielectric material 3 and the electrode 5b. The grid electrode 11 is an electrode provided with a plurality of apertures at a predetermined interval. The grid electrode 11 is disposed so as to cover the entire surface of the electret dielectric 3.

  The electret dielectric 3, the electrodes 5a and 5b, and the grid electrode 11 are all flexible. Therefore, the vibration power generation body 1 has flexibility as a whole, and can be modified to suit various installation locations. Further, it can be easily cut into an arbitrary shape using a cutting tool such as scissors or a knife.

  The electrodes 5a and 5b can be formed of, for example, easily deformable aluminum or copper metal foil, or a conductive or semiconductive resin film or resin sheet. As the conductive or semiconductive resin, for example, polyacetylene-based, polythiophine-based, polyaniline-based, or polypyrrole-based conductive polymer materials can be used. Also, for example, plastic resins such as polyethylene, polypropylene, polyethylene terephthalate, polyimide, polyamide, and fluorine, nitrile rubber, ethylene propylene rubber, acrylic rubber, urethane rubber, chloroprene rubber, silicone rubber, fluorine rubber, etc. A resin having conductivity or semiconductivity can be used by using a rubber-based resin as a base resin and adding conductive powder (for example, carbon black) to the base resin.

  However, since the electrode 5b is used as a discharge electrode when charging the electret dielectric 3 described later, a material that does not deteriorate under the influence of discharge is required, and it is desirable to use a metal material that is resistant to discharge deterioration. In addition, since the electrical resistance of the resin of the conductive material or the semiconductive material is generally larger than the electrical resistance of the metal, the electrode 5a, 5b is taken into consideration when the electrical loss when taking out the power generation output from the vibration power generator 1 is taken into consideration. It is desirable to use a metal material.

  The electrode 5b used as the discharge electrode is required to efficiently generate an air discharge from the electrode 5b when a DC high voltage or an AC high voltage is applied between the electrodes 5a and 5b. For example, by using a material in which metal fibers formed of metal such as aluminum, copper, and stainless steel are knitted on the electrode 5b, a fine fuzzy tip portion of the metal fiber or a thin metal wire portion having a very small diameter is locally used. Since the electric field can be emphasized, air discharge such as corona discharge can be efficiently generated. Regarding the metal fiber, in order to ensure the mechanical strength of the electrode 5b, it may be knitted by mixing with a resin fiber such as a polyester fiber.

  As the electrode 5b, a metal mesh electrode such as aluminum, copper, and stainless steel may be used. Alternatively, the electrode 5b may have a structure in which a number of minute protrusions are provided on the surface of the metal foil by appropriately roughening the surface of the metal foil such as aluminum, copper, and stainless steel by etching or sanding. Good. With such a configuration, air discharge such as corona discharge can be efficiently generated from the electrode 5b. In addition, the electrode 5b may be configured to stretch a fine wire such as aluminum, copper, tungsten, molybdenum wire or the like, and a mesh electrode may be formed by weaving such a fine wire. Air discharge such as corona discharge can be efficiently generated from the wire. The diameter of the ultrafine wire is preferably about 0.05 to 0.1 mm, for example, but is not limited thereto.

  As the grid electrode 11, for example, a mesh-like mesh electrode made of aluminum, copper, or stainless steel that can be easily deformed can be used. That is, the grid electrode 11 has a structure in which a plurality of apertures having a predetermined shape are provided at predetermined intervals. Note that the size of the apertures of the grid electrode 11 (cross-sectional shape and area in the planar direction of the vibration power generator) and the spacing between the apertures are not bonded in order to perform electrification treatment on the electret dielectric 3 described later. It is necessary to make it smaller than the size of the portions 9a and 9b (cross-sectional shape and area in the plane direction of the vibration power generator). That is, the size (shape, area) of the apertures provided in the grid electrode 11 and the interval between the apertures are determined so that a plurality of apertures are arranged in each non-joined part 9a, 9b. That's fine.

  The electret dielectric 3 and the grid electrode 11, and the electret dielectric 3 and the electrode 5a are joined via spacers 7a and 7c, respectively. Moreover, the grid electrode 11 and the electrode 5b are joined via the spacer 7b. The spacers 7a and 7c are for holding gaps (gap) between the electret dielectric 3 and the grid electrode 11 and the electrode 5a. The spacer 7b is for maintaining a gap (gap) between the electrode 5b and the grid electrode 11.

  That is, between the electret dielectric 3 and the grid electrode 11 at a portion not joined by the spacer 7a (non-joint portion 9a), and between the electrode 5b and the grid electrode 11 at a portion not joined by the spacer 7b (non-joint portion 9b) Depending on the thickness of each of the spacers 7a, 7b, and 7c, and between the electret dielectric 3 and the electrode 5a at the portion not joined by the spacer 7c (non-joint portion 9c). An air gap (gap) is formed. Note that the positions of the spacers 7a, 7b, and 7c substantially coincide with each other in plan view. That is, in a plan view, the position of the non-joined portion 9a and the positions of the non-joined portion 9b and the non-joined portion 9c that are not joined by the spacers 7b and 7c substantially coincide with each other.

  In the non-joining part 9a, at least one of the electret dielectric 3 and the grid electrode 11 is deformed, so that the mutual distance (gap length) easily changes. Similarly, in the non-joining part 9c, the distance (gap length) between each other is easily changed by deforming at least one of the electret dielectric 3 and the electrode 5a. In addition, the grid electrode 11 can be deformed by deforming the electrode 5b located in the non-joined portions 9a and 9b and bringing the electrode 5b and the grid electrode 11 into contact with each other. For example, the grid electrode 11 can be brought into contact with the surface of the electret dielectric 3 by deformation of the electrode 5b.

  As described above, the spacers 7 a and 7 c can secure a deformation allowance between the grid electrode 11 and the electrode 5 a and the electret dielectric 3 due to the external force applied to the vibration power generator 1. Further, by optimizing the thicknesses of the spacers 7 a and 7 c, the contact and peeling between the grid electrode 11, the electrode 5 a and the electret dielectric 3 can be repeated with respect to changes in the external force applied to the vibration power generator 1. . For this reason, a high power generation output can be obtained from the vibration power generator 1. At this time, power generation can be performed more efficiently by setting the thicknesses of the spacers 7a and 7c holding the gap length to 30 μm to 100 μm, respectively.

  Further, by adjusting the thickness of the spacer 7b between the electrode 5b and the grid electrode 11 and the interval between the spacers 7b, the electret dielectric 3 described later can be charged with the electrode 5b and the grid electrode 11 during the charging process. In the gap (non-joint portion 9b), air discharge can be efficiently generated. At this time, the thickness of the spacer 7b and the distance between the spacers 7b are such that the electrode 5b and the grid electrode 11 do not contact (short-circuit) in a steady state (a state in which no external force is applied to the vibration power generator 1; the same applies hereinafter). It is desirable to design to the extent that the gap length can be maintained. Further, the thickness and interval of the spacer 7b are such that the gap length at which air discharge occurs in the gap of the non-joint portion 9b with respect to a predetermined DC voltage or AC voltage applied between the electrode 5b and the grid electrode 11 It is desirable to design so that the insulating performance of the spacer 7b itself can be maintained. Similarly, the thickness of the spacers 7a and 7c and the distance between the spacers 7a and 7c are such that the electret dielectric 3, the grid electrode 11 and the electrode 5a can maintain the gap length without contacting in a steady state. It is desirable to design.

  The spacers 7a, 7b, and 7c are made of an insulating material. In addition, it is desirable that at least a part of all the spacers 7a, 7b, and 7c is made of an adhesive or adhesive member. For example, the spacers 7a, 7b, and 7c are partially formed of an adhesive member or an adhesive member to the extent that the electret dielectric 3, the electrodes 5a and 5b, and the grid electrode 11 can be bonded and fixed. Non-adhesive or non-adhesive spacers 7a, 7b, and 7c may be used for these parts.

  The spacers 7a, 7b, and 7c are arranged at predetermined intervals in a plan view, for example, in a shape (form) such as a dot shape, a stripe shape, a lattice shape, and a mesh shape. When the spacers 7a, 7b, and 7c are dot-shaped, the shape of the spacers 7a, 7b, and 7c in a plan view may be an arbitrary shape such as a circle, an ellipse, a square, or a rectangle. At this time, it is desirable to make the area occupied by the vibration power generator 1 of the spacers 7a, 7b, and 7c as small as possible and to make the area occupied by the non-joined portions 9a, 9b, and 9c as large as possible.

  In the case where the spacers 7a, 7b, and 7c are mesh-like, the spacers 7a, 7b, and 7c may be formed so that the non-joined portions 9a, 9b, and 9c are substantially circular in a plan view. For example, a plurality of circular non-joining portions 9a, 9b, 9c may be arranged regularly and repeatedly. In this case, the electret dielectric 3, electrodes 5 a, 5 b, grid electrodes are formed in the circular holes provided in the spacers 7 a, 7 b, 7 c (cylindrical holes in consideration of the thickness of the spacers 7 a, 7 b, 7 c). 11 are not joined together. In addition, what is necessary is just to form in arbitrary shapes, such as a long hole shape, an ellipse, and a hexagon, as cross-sectional shape of the planar direction of the non-joining part 9a, 9b, 9c.

  In this embodiment, the example using the spacers 7a, 7b, and 7c has been described. However, in the present invention, the spacers 7a, 7b, and 7c are necessarily required if the non-joining portions 9a, 9b, and 9c can be formed. is not.

  As shown in FIG. 2A, both surfaces of the electret dielectric 3 are charged with charges having opposite polarities. In addition, the electret dielectric material 3 should just be a state with the surface potential difference in front and back. Therefore, only one side of the electret dielectric 3 may be charged with one of the polarities, or both sides of the electret dielectric 3 may be charged with one of the polarities. .

  The electret dielectric 3 according to the present invention is formed by previously charging an insulating member, and has a predetermined surface potential difference on both surfaces immediately after the vibration power generator is completed. It points to what is. Therefore, it is assumed that the insulating member that is not charged in any process during manufacturing of the vibration power generator is not included in the electret dielectric according to the present invention. A method for charging the electret dielectric 3 will be described later.

Here, the electret dielectric 3 has a large charge amount (for example, a potential difference V ₀ [V] between the front and back surfaces of the electret dielectric 3), the electret dielectric 3 has a small thickness d [m], and the electret dielectric 3 As the relative dielectric constant ε _r increases, the power generated by the vibration power generator 1 tends to increase. As shown in the following equation, the dielectric constant of vacuum is ε _0, and the surface charge densities charged on both surfaces of the electret dielectric 3 are + σ [C / m ² ] and −σ [C / m ² ], respectively. This is because the power generated by the vibration power generator 1 increases as the surface charge density σ increases.

  As the material of the electret dielectric 3, for example, a resin such as polyethylene, polypropylene, polyethylene terephthalate, polyvinyl chloride, or a fluororesin can be used. Further, depending on the use conditions, for example, a polyimide-based resin or a fluorine-based resin (for example, fluoroethylenepropylene or polytetrafluoroethylene) having excellent high-temperature characteristics can be used. Further, as the rubber material, for example, nitrile rubber, ethylene propylene rubber, acrylic rubber, urethane rubber, silicone rubber, fluorine rubber, or the like can be used. Moreover, as a material of the electret dielectric material 3, an insulating sheet-like fiber body may be sufficient and a nonwoven fabric and felt other than a woven fabric can be used. Especially, the nonwoven fabric is utilized for the electret filter used for an air washing machine, a mask, etc., and has the characteristic of a favorable electret. As the material of such a nonwoven fabric, the same resin material as described above can be used.

The appropriate value of the potential difference V ₀ between the front and back surfaces of the electret dielectric 3 is the gap length between the electrode 5a and the grid electrode 11 and the electret dielectric 3 (in the non-joint portion 9a and the non-joint portion 9c). Depending on the distance between each other. That is, it is desirable that the potential difference V ₀ is set so that a decrease in potential difference due to air discharge in the gap is reduced.

In general, the occurrence of air discharge in the non-joint portion 9a and non-joint portion 9c (gap) between the electrode 5a, the grid electrode 11 and the electret dielectric 3 is determined by the gap length and the potential difference between the gaps. Follow the law of Therefore, the potential difference between the gaps does not generate air discharge with respect to the change range of the gap length between the electrode 5a and the grid electrode 11 and the electret dielectric 3 when the external force is not applied and when the external force is applied. It is desirable to set the potential difference V ₀ between the front and back surfaces of the electret dielectric 3 so as to be a value.

  In addition, as shown in FIG.2 (b), the electret dielectric material 3a consisting of a porous material can also be used. When voltage is applied to both surfaces of a porous material having fine pores 4 therein, corona discharge easily occurs in the pores 4. By this corona discharge, the electret dielectric 3a charged also in the hole wall surface and in the vicinity of the hole wall surface can be easily manufactured. In addition, as shown in FIG. 2B, the electrification dielectric 3a has a positive charge in the voltage application direction (in this case, the thickness direction of the electret dielectric 3a). It is considered that a negatively charged region is formed.

  Further, if the holes 4 are present inside the electret dielectric 3a, the electret dielectric 3a as a whole can be easily deformed. For this reason, not only the gap length between the electrode 5a, the grid electrode 11 and the electret dielectric 3a but also the thickness of the electret dielectric 3a can be easily changed. Accordingly, the distance between the electrode 5a and the grid electrode 11 is likely to change, and the amount of change is increased, so that the amount of charge electrostatically induced in both electrodes is increased, and the power generation efficiency is improved.

  As a material of the porous electret dielectric 3a, an insulating porous plastic sheet or porous plastic film, an insulating porous rubber sheet or porous rubber film, or a sheet-like fibrous body made of insulating material fibers Can be used. As the material for such a porous body, the same resin materials as those described above can be used. In the following description, an example using the electret dielectric 3 having no holes 4 is shown.

  Further, the vibration power generation body of the present invention may be one in which the spacer 7a is provided only between one grid electrode 11 and the electret dielectric 3 as in the vibration power generation body 1a shown in FIG. good.

  The vibration power generator 1a has substantially the same configuration as that of the vibration power generator 1, but the electrode 5a is directly bonded to the electret dielectric 3 over the entire surface without the spacer 7c. Even in this case, the gap 6 (gap) is formed by the spacer 7 a between the other grid electrode 11 and the electret dielectric 3.

  The electrode 5a and the electret dielectric 3 are joined using, for example, heat fusion, an adhesive, or an adhesive. However, when using an adhesive or a pressure-sensitive adhesive, it is desirable to make the adhesive layer or the pressure-sensitive adhesive layer as thin as possible. For example, it is desirable to make it sufficiently thin with respect to the distance between the electrodes 5 a and 5 b and the thickness of the electret dielectric 3.

(Power generation mechanism of vibration power generator)
Next, the power generation mechanism of the vibration power generator of the present invention will be described. In the following description, a power generation mechanism taking the vibration power generation body 1a as an example is shown. FIG. 3 is a diagram illustrating a usage state of the vibration power generator 1a, and FIG. 4A is an enlarged view of a portion A in FIG. 1B. When the vibration power generator 1a is caused to generate power and obtain a power generation output on the load circuit 16 side, the electrode 5b and the grid electrode 11 are short-circuited (short-circuited), and the shorted electrode 5b, the grid electrode 11 and the electrode 5a The load circuit 16 is connected between them. By adopting such a configuration, as will be described later, it is possible to take out the charges electrostatically induced in both the electrode 5b and the grid electrode 11 by the electric field generated outside the electret dielectric 3 to the load circuit 16 side. Therefore, the power generation efficiency of the vibration power generator 1a can be increased.

  As shown in FIG. 4A, in a steady state, the non-joining part 9a (gap 6) and the non-joining part 9b between the electrode 5b and the grid electrode 11 and between the grid electrode 11 and the electret dielectric 3 are used. In (gap 6), a gap corresponding to the spacing and thickness of the spacers 7a and 7b is formed.

  From this state, as shown in FIG. 4B, when the external force C is applied in the thickness direction of the vibration power generator 1a, the electrode 5b and the grid electrode 11 in contact with the electrode 5b are deformed. At this time, the mutual distance in the gap 6 changes, and the grid electrode 11 and the electret dielectric 3 can be in contact with each other. Therefore, electric charges are electrostatically induced in the electrode 5a and the grid electrode 11 due to a change in the distance between the gaps 6 (the gaps in the non-joined portions 9a and 9b) to generate electric power.

  In addition, when no external force is applied and the state returns to a steady state, power is generated by the change in the distance between the similar gaps 6. In this way, the distance between the grid electrode 11 and the electret dielectric 3 in the thickness direction can be deformed in a range from the thickness of the spacer 7a to 0 (in a state where they are in contact with each other). In addition, the power generation output voltage accompanying the mutual change in the distance between the grid electrode 11 and the electret dielectric 3 is highest immediately before the grid electrode 11 contacts the electret dielectric 3 due to deformation and immediately after peeling.

  Here, when the mutual distance between the electrode 5b and the electret dielectric 3 also changes, the same polarity of charge as that of the grid electrode 11 is electrostatically induced in the electrode 5b. For this reason, it is desirable that the grid electrode 11 and the electrode 5b are short-circuited (short-circuited) so that the electrostatic charge induced by the grid electrode 11 and the electrode 5b can be taken out to the load circuit 16 side. When the distance between the electrode 5b and the electret dielectric 3 is changed, the electric charge is electrostatically induced in the electrode 5b based on the following principle from an electromagnetic viewpoint. Most of the electric lines of force generated from the electric charge charged in the electret dielectric 3 are connected to the charges induced on the surface of the grid electrode 11, but a part of the electric lines of force pass through the openings of the grid electrode 11. Thus, it is connected to the charge induced on the surface of the electrode 5b. As a result, since the mutual distance between the grid electrode 11 and the electrode 5b changes, the charge induced in the electrode 5b changes, so that the charge is electrostatically induced in the electrode 5b. In the following description, the power generation mechanism accompanying the change in the distance between the grid electrode 11 and the electrode 5a and the electret dielectric 3 will be mainly described. That is, the above-described power generation mechanism by the application of the external force C and the power generation mechanism accompanying electrostatic induction to the grid electrode 11 due to the deformation of the electrode 5b and the grid electrode 11 are basically the same. Therefore, the description of the power generation mechanism in a state where the grid electrode 11 and the electrode 5b are short-circuited (short-circuited) is omitted.

  Although illustration is omitted, when power is generated by the vibration power generator 1 of FIG. 1A due to external force, the distance between the electrode 5a and the electret dielectric 3 also changes at the non-joint portion 9c. As a result, electrostatic induction of charges to the electrodes 5a and 5b (in a state of being short-circuited with the grid electrode 11) is also performed. That is, in the vibration power generator 1, the change in the distance between the grid electrode 11 (in a state short-circuited with the electrode 5 b) and the electret dielectric 3 in the non-joint portions 9 a and 9 c and the change in the distance between the electrode 5 a and the electret dielectric 3. Along with this, electric charges are electrostatically induced in the electrode 5a and the electrode 5b (in a state short-circuited with the grid electrode 11) to generate electricity.

  Here, since the vibration power generator 1 generates power by changing the distance between each of the electrode 5a and the grid electrode 11 and the electret dielectric 3, each of the electrode 5a and the grid electrode 11, the electret dielectric 3 and If the distance change direction and the timing (phase) do not coincide with each other, the power generation output voltages generated between the electrode 5a and the grid electrode 11 (electrode 5b) may cancel each other due to the distance change. Therefore, in order to efficiently generate power in the entire vibration power generation body 1, the direction and timing (phase) of the distance change between the electrodes 5 a and 5 b, the grid electrode 11 and the electret dielectric 3 are changed in each part of the vibration power generation body 1. It is desirable to match. For example, when the grid electrode 11 and the electrode 5 a are repeatedly contacted and peeled off from the electret dielectric 3, it is desirable to match the timing of the contact and peeling at each part of the vibration power generator 1.

  Thus, in order to match the direction and timing of the distance change between the electrodes 5a and 5b, the grid electrode 11 and the electret dielectric 3 on the front and back of the electret dielectric 3 with respect to the application of the external force C, the electret dielectric 3 It is desirable that the planar arrangements of the spacers 7a and 7c on the front and back sides of the grid electrode 11 are made to coincide, and the planar arrangements of the spacers 7a and 7b on the front and back sides of the grid electrode 11 are made to coincide. That is, in the vibration power generator 1 of FIG. 1A, it is desirable that all the planar arrangements of the spacers 7a, 7b, and 7c are made to coincide.

  On the other hand, in the vibration power generator 1a of FIG. 1B, since one electrode 5a is joined to the electret dielectric 3 over the entire surface, power is generated only by a change in the distance between the other grid electrode 11 and the electret dielectric 3. Done. Therefore, unlike the vibration power generator 1 of FIG. 1A, it is not necessary to make the distance change direction and timing (phase) of each of the electrode 5a, the grid electrode 11 and the electret dielectric 3 coincide with each other.

  In the vibration power generator 1a of FIG. 1B, the spacers 7a, 7b are compared with the change in the gap length of the non-joined portions 9a, 9b (gap 6) due to an external force, depending on the material of the spacers 7a, 7b. Since the change of the distances between the electrodes 5a and 5b, the grid electrode 11 and the electret dielectric 3 is small in the portion provided with 7b, it is difficult to contribute to power generation. Therefore, it is desirable that the spacers 7a and 7b be as small as possible in plan view and that the total area of the spacers 7a and 7b in the vibration power generator 1a be as small as possible. In addition, it is desirable to arrange the spacers 7a and 7b with a space as much as possible so that a desired gap length can be maintained in the non-joined portions 9a and 9b (gap 6). Also in the case of the vibration power generator 1 of FIG. 1A, similarly, the spacers 7a, 7b, 7c are made as small as possible in plan view, and the non-joining portions 9a, 9b, 9c (gap 6) It is desirable to arrange the spacers 7a, 7b, and 7c with an interval as much as possible so that a desired gap length can be maintained.

  In addition, as will be described later, the vibration power generators 1 and 1a have a non-joint portion 9a between the grid electrode 11 and the electret dielectric 3, the grid electrode 11 and the electrode 5b, in terms of electret dielectric charging. It is desirable to match the planar arrangement with the non-joining portion 9b between the two. By adopting such a configuration, an air discharge is generated at the non-joint portion 9b between the electrode 5b and the grid electrode 11, and the grid electrode 11 and the electret dielectric whose plane arrangement coincides with the non-joint portion 9b at that time. By adjusting the current flowing through the non-joining portion 9a between the body 3 and the body 3, the surface of the electret dielectric 3 facing the non-joining portion 9a can be effectively charged.

  Here, the vibration power generation body 1a of FIG. 1B can be made thinner than the vibration power generation body 1 by the thickness of the spacer 7c. Further, as described above, the vibration power generator 1a does not need to match the power generation timings of the front and back surfaces, and thus the structure can be simplified. Therefore, considering the cost reduction and thinning, the power generation amount is slightly lower than that of the structure of the vibration power generator 1, but there is an advantage of using the vibration power generator 1a. In the following description, as in the vibration power generator 1a shown in FIG. 1B, a spacer 7a is provided only on the grid electrode 11 side, and the electrode 5a and the electret dielectric 3 are joined over the entire surface. As will be described, in each of the following embodiments, a spacer 7c may be provided on the electrode 5a side as in the vibration power generator 1 shown in FIG.

(Method for electrification of vibration power generator)
Next, an embodiment of a charging method for the electret dielectric 3 of the vibration power generator 1a will be described. As shown in FIG. 5, a grid voltage power supply 17 for applying a negative DC voltage to the grid electrode 11 with the electrode 5a as a reference potential is provided between the grid electrode 11 and the electrode 5a. Connecting. Further, a DC high voltage power supply 19 for applying a negative DC high voltage to the electrode 5b is connected between the electrode 5a and the electrode 5b with the electrode 5a as a reference potential. At this time, in order to efficiently charge the electret dielectric 3, the DC voltage polarity applied to the grid electrode 11 and the electrode 5 b is matched, and a DC high voltage applied to the electrode 5 b is applied to the grid electrode 11. It is desirable to make it larger than the grid voltage. By doing so, a DC high voltage is applied between the grid electrode 11 and the electrode 5b, and an air discharge such as corona discharge is generated at the non-joint portion 9b between the grid electrode 11 and the electrode 5b. The electret dielectric 3 is charged. With respect to the electrification potential and electrification polarity of the electret dielectric 3, the electret dielectric 3 flows through the gap (non-joint portion 9 a) between the grid electrode 11 and the electret dielectric 3 by controlling the magnitude and polarity of the DC voltage applied to the grid electrode 11. It can be easily adjusted by controlling the current. In the present embodiment, the electrode 5a is used as a reference potential, and the polarity of the DC voltage applied to the grid electrode 11 and the electrode 5b is negative. However, a positive DC voltage may be applied.

  Here, a charging potential (potential difference between the front surface and the back surface of the electret dielectric 3) during charging of the electret dielectric 3 when the use of the vibration power generator 1a is considered will be considered. After the electret dielectric 3 is charged, a non-joint portion between the grid electrode 11 and the electret dielectric 3 in the vibration power generator 1a in a deformation state due to the external force applied to the vibration power generator 1a or in a steady state where no external force is applied. If air discharge occurs at 9a, the surface potential of the electret dielectric 3 may be lowered. In general, the occurrence of air discharge in the gap between the grid electrode 11 and the electret dielectric 3 (non-joined portion 9a, gap 6) is determined by the gap length and the potential difference between the gaps, and roughly follows Paschen's law. Therefore, the electret dielectric is set so that the potential difference between the gaps in which no air discharge occurs with respect to the change range of the gap length between the grid electrode 11 and the electret dielectric 3 when an external force is applied to the vibration power generator 1a. It is desirable to set the potential difference between the front surface and the back surface of the body 3. For example, if the gap length when an external force is not applied is 100 μm, the change range of the gap length when an external force is applied is 0 to 100 μm. With respect to the change range of the gap length, air discharge occurs when the potential difference between the front surface and the back surface of the electret dielectric 3 is set to about 500 V or more. On the other hand, when an air discharge occurs between the gaps, the potential difference between the front and back surfaces of the electret dielectric 3 after the air discharge is about 150 to 500V. Therefore, in the present invention, when the gap length is 100 μm, it is desirable to perform the charging process so that the potential difference between the front surface and the back surface of the electret dielectric 3 is about 150 to 500V.

  Further, in order to confirm whether the electret dielectric 3 has been charged to a predetermined charging potential, the current flowing between the grid electrode 11 and the electrode 5a may be detected by, for example, a digital electrometer. . At this time, when there is no potential difference between the electret dielectric 3 and the grid electrode 11 between the gaps between the electret dielectric 3 and the grid electrode 11 (non-junction portion 9 a), that is, the electret dielectric 3 is applied to the grid electrode 11. When the charging potential is the same as the direct current voltage (the surface potential of the electret dielectric 3 facing the grid electrode 11 with the electrode 5a as a reference potential), the value of the current flowing between the grid electrode 11 and the electrode 5a is zero. Or it becomes a steady state (it is constant at a certain value). In this way, it can be confirmed that the surface of the electret dielectric 3 facing the grid electrode 11 has reached a predetermined charging potential set by a DC voltage applied to the grid electrode 11.

  As described above, according to the vibration power generators 1 and 1a of the present embodiment, since the grid electrodes 11 are provided, the electrodes 5a and 5b and the like are arranged on both sides of the electret dielectric 3, that is, the vibration power generators 1 and 1a are arranged. The electret dielectric 3 can be easily charged in the configured state. At this time, the charging potential of the electret dielectric 3 can be easily controlled by controlling the grid voltage applied between the grid electrode 11 and the electrode 5a. Further, it can be easily known whether or not the electret dielectric 3 is charged to a desired potential. In addition, when the surface potential (charging potential) of the electret dielectric 3 is lowered after the vibration power generators 1 and 1a have been used for a predetermined time, the surface potential (charging potential) is easily recovered by performing another charging process. Can be made.

  In the above-described example, an AC power supply may be used instead of the DC high voltage power supply 19 and an AC voltage may be applied between the electrodes 5a and 5b. Even when an AC voltage is applied between the electrodes 5a and 5b, an AC voltage is applied between the electrode 5b and the grid electrode 11, so that a gap between the electrode 5b and the grid electrode (non-joint portion 9b) is applied. ) Can generate air discharge. Also in this case, the current flowing through the gap (non-junction portion 9a) between the grid electrode 11 and the electret dielectric 3 is controlled by controlling the grid voltage applied between the grid electrode 11 and the electrode 5a. Can be controlled. For this reason, the electrification potential of the electret dielectric 3 can be easily controlled.

<Embodiment 2>
FIG. 6 is a diagram showing the vibration power generator 1b. Note that in the following description, the same functions as those of the vibration power generators 1 and 1a are denoted by the same reference numerals as in FIG. Further, as described above, in the following description, an example in which the spacer 7c is not provided on the electrode 5a side is shown, but the spacer 7c may be provided between the electrode 5a and the electret dielectric 3.

  The vibration power generation body 1b has substantially the same configuration as the vibration power generation body 1a, but differs in that a resin layer 13 is laminated on the surface of the electrodes 5a and 5b on the outer surface side of the vibration power generation body 1a. Such a resin layer 13 may be bonded to the electrodes 5a and 5b by an adhesive, a pressure-sensitive adhesive, heat welding, or the like, and in any case, as long as the resin layer 13 can be formed on the surfaces of the electrodes 5a and 5b. Good.

  Examples of the resin layer 13 include polyethylene, polypropylene, polyethylene terephthalate, polyvinyl chloride, plastic resins such as acrylic, polyimide, polyamide, and fluorine, nitrile rubber, ethylene propylene rubber, acrylic rubber, and urethane rubber. Further, rubber resins such as chloroprene rubber, silicone rubber, and fluorine rubber can be used.

  According to the second embodiment, an effect similar to that of the first embodiment can be obtained. Moreover, by providing the resin layer 13, electrical insulation between the electrodes 5a and 5b and the surrounding environment can be ensured, and the water resistance, moisture resistance, and durability of the electrodes 5a and 5b can be improved. In addition, damage to the electrodes 5a and 5b can be prevented.

  In addition, by providing the resin layer 13, after the electrodes 5a and 5b are deformed by an external force, when the external force is unloaded, the restoring force to return to the original shape, that is, the restoring force to the shape in the steady state is obtained. Power generation efficiency increases. That is, the followability of the mutual distance change of the gap part (non-joint part 9b) between the electrode 5b and the grid electrode 11 with respect to the external force change is improved, and therefore the gap part between the grid electrode 11 and the electret dielectric 3 is improved. Since it is possible to improve the follow-up capability of the distance changes of the (non-joined portion 9a), it is possible to improve the power generation efficiency of the vibration power generator 1b.

<Embodiment 3>
The vibration power generation body 1c shown in FIG. 7 has substantially the same configuration as the vibration power generation body 1a, but differs in that a dielectric layer 15 is provided between the electrode 5b and the grid electrode 11. Dielectric layer 15 is bonded to electrode 5b and grid electrode 11. The dielectric layer 15 is a material having flexibility and insulation. For example, when the frequency of the charging process to the electret dielectric 3 is high such as a resin material such as polypropylene, polyethylene, or polyethylene terephthalate, paraxylylene is used. A polymer or polyimide resin is desirable.

  Further, in order to generate a dielectric barrier discharge with a low electric field in the opening portion of the grid electrode 11, a material having a high relative dielectric constant is desirable for the dielectric layer 15. The dielectric layer 15 may be, for example, an insulating porous plastic sheet or porous plastic film, an insulating porous rubber sheet or porous rubber film, or a sheet-like fiber body made of insulating material fibers, A dielectric polymer sheet or the like can be used. As the material of the porous body used for the dielectric layer 15, the same resin material as described above can be used.

  The dielectric layer 15 can also be a non-woven fabric. As the material of such a nonwoven fabric, the same resin material as described above can be used.

  FIG. 8 is a diagram illustrating a state in which the vibration power generator 1c is charged. As shown in FIG. 8, a grid voltage power source 17 for applying a negative DC voltage to the grid electrode 11 with the electrode 5a as a reference potential is provided between the grid electrode 11 and the electrode 5a. Connecting. Further, a high frequency AC high voltage power source 21 for applying a high frequency AC voltage is connected between the electrode 5a and the electrode 5b.

  In this state, a DC voltage is applied between the grid electrode 11 and the electrode 5a, and a high-frequency AC high voltage of about 1 kHz to several kHz or more is applied between the electrode 5a and the electrode 5b. As a result, an alternating voltage is applied between the grid electrode 11 and the electrode 5b, and the dielectric is formed in the vicinity of the portion where the dielectric layer 15, the grid electrode 11 and the air overlap (contact portion) in the opening portion of the grid electrode 11. Airborne discharge due to barrier discharge can be generated, and electret dielectric 3 can be charged. In addition, the charging potential and charging polarity of the electret dielectric 3 can be controlled by the DC voltage and voltage polarity applied to the grid electrode 11.

  Also in this case, in order to confirm whether the electret dielectric 3 has been charged to a predetermined charging potential, the current flowing between the grid electrode 11 and the electrode 5a is detected by, for example, a digital electrometer. May be.

  In the case where the dielectric layer 15 is formed, the dielectric layer 15 may not be bonded to the entire surface of both the grid electrode 11 and the electrode 5b. For example, like the vibration power generator 1d shown in FIG. 9, the surface of the electrode 5b facing the grid electrode 11 and the dielectric layer 15 are bonded over the entire surface, and between the dielectric layer 15 and the grid electrode 11, A spacer 7b may be provided. Even if it does in this way, the effect similar to the vibration electric power generation body 1c can be acquired. That is, by applying an AC voltage between the grid electrode 11 and the electrode 5b, an air discharge due to a dielectric barrier discharge in the gap (non-joint portion 9b) between the dielectric layer 15 and the grid electrode 11 is generated. The current flowing through the gap (non-junction portion 9a) between the grid electrode 11 and the electret dielectric 3 can be controlled by the magnitude and voltage polarity of the DC voltage applied between the electrode 5a and the grid electrode 11. it can. For this reason, the charging potential and charging polarity of the electret dielectric 3 can be easily controlled.

  Further, like the vibration power generator 1e shown in FIG. 10, the surface of the grid electrode 11 facing the electrode 5b and the dielectric layer 15 are joined over the entire surface, and a spacer is provided between the dielectric layer 15 and the electrode 5b. 7b may be provided. In this case, an opening similar to the opening of the grid electrode 11 is also formed in the dielectric layer 15, and the positions of the opening of the grid electrode 11 and the opening of the dielectric layer 15 are substantially the same. You may join both in the shape made. In this case, for example, the dielectric layer 15 may be covered only on the surface side of the grid electrode 11 facing the electrode 5b. Even if it does in this way, the effect similar to the vibration electric power generation body 1c can be acquired.

  According to the third embodiment, the same effect as that of the first embodiment can be obtained. Further, by providing the dielectric layer 15 between the electrode 5b and the grid electrode 11, it is possible to prevent a short circuit between the grid electrode 11 and the electrode 5b during the electret dielectric 3 charging process. In addition, since there is no (or small) gap (non-joint portion) between the electrode 5b and the grid electrode 11, when an external force is applied to the vibration power generator 1c, the deformation of the electrode 5b is directly applied to the grid electrode 11. The distance between the grid electrode 11 and the electret dielectric 3 can be changed in the gap portion (non-joined portion 9a) by efficiently transmitting the power to the grid electrode 11. As a result, the power generation efficiency of the vibration power generator 1c is improved.

Example 1
The specific Example of this invention is shown. As the vibration power generator, the one having the structure (vibration power generator 1b) shown in FIG. 6 was used. The size of the vibration power generator 1b was set to 300 mm × 300 mm × 0.4 mm. Moreover, 12-micrometer-thick aluminum foil was used as electrode 5a, 5b. With respect to the aluminum foil of the electrode 5b, an appropriate surface roughening treatment was performed by subjecting the surface facing the grid electrode 11 described later to a surface treatment by plasma etching. The electrode 5a was bonded to the electret dielectric 3 over the entire surface by a dry laminating method using an adhesive (thickness of several μm). A PET (polyethylene terephthalate) film having a thickness of 30 μm was used as the resin layer 13, and these were joined to the electrodes 5a and 5b by a dry laminating method using an adhesive (thickness of several μm). As the electret dielectric 3, a PET film having a thickness of 30 μm was used.

  As the grid electrode 11, a stainless steel mesh electrode having a strand diameter of 0.1 mm and 30 mesh was used. As the spacers 7a and 7b, insulating adhesive sheets were used. This insulating adhesive sheet is staggered in a circle with a diameter of 5 mm to provide a circular opening portion having a diameter of 5 mm, and the electrode 5b and the grid electrode via the adhesive sheet provided with the circular opening portion. 11 and the grid electrode 11 and the electret dielectric 3 were bonded to each other, thereby providing non-bonded portions 9a and 9b located at the circular hole portions of the adhesive sheet. At this time, the aperture ratio indicating the ratio of the area of the aperture portion to the total area of the adhesive sheet was set to about 50%. For the spacer 7a, an adhesive sheet with a thickness of 30 μm having a circular opening was used so that the gap length (non-joint portion 9a) between the grid electrode 11 and the electret dielectric 3 was 30 μm. Regarding the spacer 7b, an adhesive sheet having a thickness of 30 μm having a circular opening was used so that the distance between the grid electrode 11 and the electrode 5b facing the grid electrode 11 was 30 μm. Further, the electret dielectric 3 and the grid electrode 11, and the grid electrode 11 and the electrode 5b are arranged so that the non-joining portions 9a and 9b formed by the spacers 7a and 7b are arranged in the same manner in the plan view of the vibration power generator 1b. The vibration power generator 1b was manufactured by joining with the spacers 7a and 7b.

  Next, the electret dielectric 3 of the vibration power generator 1b was charged. A direct current high voltage power supply 19 for applying a negative direct current high voltage to the electrode 5b with the electrode 5a as a reference potential was connected between the electrode 5a and the electrode 5b. Further, a grid voltage power source 17 for applying a negative DC voltage to the grid electrode 11 with the electrode 5a as a reference potential was connected between the electrode 5a and the grid electrode 11.

  First, the grid voltage power supply 17 is adjusted in order to charge the electret dielectric 3 charging potential (surface potential of the electret dielectric 3 facing the grid electrode 11 with the electrode 5a as a reference potential) to about −150V. Thus, the DC voltage V2 = −150 V was applied between the electrode 5a and the grid electrode 11 with the electrode 5a as a reference potential. Further, in order to generate an air discharge due to corona discharge in the gap (non-joint portion 9b) between the electrode 5b and the grid electrode 11, the DC high voltage power supply 19 is adjusted so that the electrode 5a becomes the reference potential. A DC voltage V1 = −750 V was applied between 5a and the electrode 5b. At this time, a DC voltage of 600 V is applied to the gap between the electrode 5b and the grid electrode 11 in the non-joint portion 9b. The occurrence of corona discharge at the non-joint portion 9b is determined by the gap length and the potential difference between the gaps, and approximately follows Paschen's law. Therefore, according to Paschen's law, when the gap distance between the electrode 5b and the grid electrode 11 of this embodiment is 30 μm, an air discharge by corona discharge can be generated by generating a potential difference of 600 V between the gaps. .

  Further, in order to confirm whether or not the electret dielectric 3 was charged to the set charging potential of −150 V, the current flowing between the electrode 5a and the grid electrode 11 was detected with a digital electrometer. At this time, if the electret dielectric 3 is charged to a charging potential of −150 V, the potential difference between the electret dielectric 3 and the grid electrode 11 disappears, and the gap (non-joint portion) between the electret dielectric 3 and the grid electrode 11 is eliminated. Since the current value flowing through 9a) approaches zero, the current value detected by the digital electrometer between the electrode 5a and the grid electrode 11 approaches zero. Also in the present example, it was confirmed that the current value of the digital electrometer approaches substantially zero in a charging process time of about 5 minutes.

  The electrode 5b and the grid electrode 11 of the vibration power generation body 1b obtained in this way are short-circuited (short-circuited), and an external force is applied, so that the electrode 5b and the grid electrode 11 short-circuited with the electrode 5a are desired. It was confirmed that the power generation output was obtained.

(Example 2)
As the vibration power generator, the one having the structure (vibration power generator 1c) shown in FIG. 7 was used. Example 2 was the same as Example 1 except that the dielectric layer 15 was formed between the electrode 5b and the grid electrode 11. For the dielectric layer 15, a PET film having a thickness of 100 μm was used. Each of the electrode 5b and the grid electrode 11 and the dielectric layer 15 were bonded over the entire surface using an adhesive (thickness of several μm).

  A high frequency AC high voltage power source 21 for applying an AC voltage was connected between the electrode 5a and the electrode 5b. A grid voltage power source 17 was connected between the electrode 5 a and the grid electrode 11. First, in order to charge the electret dielectric 3 to about −150V, the grid voltage power supply 17 is adjusted so that the DC voltage V2 = −150V is applied between the electrode 5a and the grid electrode 11 with the electrode 5a as a reference potential. Applied. In addition, in order to generate an air discharge due to dielectric barrier discharge in the vicinity of the portion where the dielectric layer 15 and the grid electrode 11 overlap with air in the opening portion of the grid electrode 11, the electrodes 5 a and 5 b The high frequency alternating current high voltage power supply 21 applied the alternating voltage V1 = 2500V of frequency 5kHz between these. At this time, an AC voltage of 2350 V is applied between the electrode 5 b and the grid electrode 11, and a portion where the dielectric layer 15, the grid electrode 11, and the air overlap in the opening portion of the grid electrode 11 (contact portion) It was confirmed that air discharge by dielectric barrier discharge occurred in the vicinity of).

  In order to confirm whether or not the electret dielectric 3 was charged to the set charging potential of −150 V, the current flowing between the electrode 5a and the grid electrode 11 was detected with a digital electrometer. Also in this example, it was confirmed that the electric current value of the digital electrometer approaches approximately zero after charging for about 5 minutes.

  The electrode 5b and the grid electrode 11 of the vibration power generation body 1c obtained in this way are short-circuited (short-circuited), and an external force is applied, so that the electrode 5b and the grid electrode 11 short-circuited with the electrode 5a are desired. It was confirmed that the power generation output was obtained.

  As mentioned above, although embodiment of this invention was described referring an accompanying drawing, the technical scope of this invention is not influenced by embodiment mentioned above. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

  For example, each configuration of each embodiment can be combined with each other.

1, 1a, 1b, 1c, 1d, 1e ......... Vibration power generator 3, 3a ......... Electret dielectric 4 ......... Hole 5a, 5b ......... Electrode 6 ...... Gap 7a, 7b, 7c ... ...... Spacers 9a, 9b, 9c ......... Non-joint part 11 ......... Grid electrode 13 ......... Resin layer 15 ...... Dielectric layer 16 ......... Load circuit 17 ......... Grid voltage power supply 19 ......... DC high-voltage power supply 21 ... High-frequency AC high-voltage power supply

Claims (8)

A vibration power generator,
An electret dielectric holding a charge;
A first electrode and a second electrode disposed so as to sandwich the electret dielectric;
A grid electrode provided between the electret dielectric and the first electrode, spaced apart from each other;
Comprising
The electret dielectric, the first electrode, the second electrode, and the grid electrode all have flexibility,
A spacer is partially provided between the electret dielectric and the grid electrode, and the electret dielectric and the grid electrode are joined to each other through at least a part of the spacer. Becomes a non-joined part,
By deforming the first electrode and the grid electrode, it is possible to contact the grid electrode and the electret dielectric,
It is possible to change the distance in the thickness direction between the electret dielectric and the grid electrode in at least a part of the non-joining part,
The vibration power generator, wherein a power generation output can be taken out between the first electrode and the second electrode that are short-circuited with the grid electrode.   2. The vibration power generator according to claim 1, wherein the second electrode and the electret dielectric are joined over the entire surface. A spacer is partially provided between the grid electrode and the first electrode to form a gap, and the spacer formed between the electret dielectric and the grid electrode in plan view; vibration generators according to claim 1 or claim 2 respective positions of the spacers formed is characterized that you substantially match between the grid electrode and the first electrode. Wherein between the grid electrode and the first electrode, the vibration generators according to any one of claims 1 to 3, characterized in that the dielectric layer is formed. The grid electrode has a structure in which a plurality of openings having a predetermined shape are provided in a predetermined shape, and the size of the opening and the interval between the openings are smaller than the size of the non-joining portion. The vibration power generator according to any one of claims 1 to 4, wherein the vibration power generator is provided. A method of charging a vibration power generator,
An electret dielectric holding a charge;
A first electrode and a second electrode disposed so as to sandwich the electret dielectric;
A grid electrode provided between the electret dielectric and the first electrode, spaced apart from each other;
Using a vibration power generator,
The electret dielectric, the first electrode, the second electrode, and the grid electrode all have flexibility,
A spacer is partially provided between the electret dielectric and the grid electrode, and the electret dielectric and the grid electrode are joined to each other through at least a part of the spacer. Becomes a non-joined part,
By deforming the first electrode and the grid electrode, it is possible to contact the grid electrode and the electret dielectric,
It is possible to change the distance in the thickness direction between the electret dielectric and the grid electrode in at least a part of the non-joining part,
With the grid electrode and the first electrode insulated,
A DC voltage V1 is applied between the first electrode and the second electrode;
A DC voltage V2 lower than V1 is applied between the grid electrode and the second electrode,
A method of charging a vibration power generator, wherein the electret dielectric is charged by performing air discharge in a gap between the first electrode and the grid electrode. A method of charging a vibration power generator,
An electret dielectric holding a charge;
A first electrode and a second electrode disposed so as to sandwich the electret dielectric;
A grid electrode provided between the electret dielectric and the first electrode, spaced apart from each other;
Using a vibration power generator,
The electret dielectric, the first electrode, the second electrode, and the grid electrode all have flexibility,
A spacer is partially provided between the electret dielectric and the grid electrode, and the electret dielectric and the grid electrode are joined to each other through at least a part of the spacer. Becomes a non-joined part,
By deforming the first electrode and the grid electrode, it is possible to contact the grid electrode and the electret dielectric,
It is possible to change the distance in the thickness direction between the electret dielectric and the grid electrode in at least a part of the non-joining part,
With the grid electrode and the first electrode insulated,
An AC voltage V1 is applied between the first electrode and the second electrode,
A DC voltage V2 lower than V1 is applied between the grid electrode and the second electrode,
A method of charging a vibration power generator, wherein the electret dielectric is charged by performing air discharge in a gap between the first electrode and the grid electrode. A method of charging a vibration power generator,
An electret dielectric holding a charge;
A first electrode and a second electrode disposed so as to sandwich the electret dielectric;
A grid electrode provided between the electret dielectric and the first electrode;
A dielectric layer provided between the grid electrode and the first electrode;
Using a vibration power generator,
The electret dielectric, the first electrode, the second electrode, and the grid electrode all have flexibility,
A spacer is partially provided between the electret dielectric and the grid electrode, and the electret dielectric and the grid electrode are joined to each other through at least a part of the spacer. Becomes a non-joined part,
By deforming the first electrode and the grid electrode, it is possible to contact the grid electrode and the electret dielectric,
It is possible to change the distance in the thickness direction between the electret dielectric and the grid electrode in at least a part of the non-joining part,
With the grid electrode and the first electrode insulated,
An AC voltage V1 is applied between the first electrode and the second electrode,
A DC voltage V2 lower than V1 is applied between the grid electrode and the second electrode,
A method of charging a vibration power generator, wherein the electret dielectric is charged by performing an air discharge between the dielectric layer and the grid electrode.

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