JP6152272B2 - Ultrasonic inspection method - Google Patents

Description

  The present invention relates to an ultrasonic inspection method.

  In general, an ultrasonic inspection method is used when measuring the thickness of a pipe. In the ultrasonic inspection method, a probe arranged on the surface of an object to be measured emits ultrasonic waves. The emitted ultrasonic wave is reflected on the back surface of the object, and the reflected wave enters the probe. The time measurement unit connected to the probe measures the time when the ultrasonic wave is emitted and the time when the reflected wave is incident, and based on the time from the time when the control device connected to the contactor emits the incident time The thickness of the object is derived.

  Here, by closely contacting the probe to the object and minimizing the air existing between the probe and the object, the ultrasonic wave can be reliably incident on the object, The reflected wave can be received reliably. Therefore, a method is adopted in which a contact medium such as glycerin paste or water is applied to the surface of the probe, and the probe is arranged with the contact medium interposed on the object.

  In addition, it has been proposed to use a fluid substance mainly composed of glass as a contact medium (see Patent Document 1 below).

Japanese Patent No. 4244172

  However, when water is used as the contact medium as described above, the boiling point of water is 100 ° C., and the heat-resistant temperature of the glycerin paste is 400 ° C., so that the object is used in a higher temperature state. There is a problem that the thickness of the object cannot be measured.

  On the other hand, as shown in the above-mentioned Patent Document 1, when a fluid contact medium mainly composed of glass is used, the temperature can be measured up to 700 ° C. However, since this contact medium has fluidity and may be peeled off from the probe, the contact medium must be continuously supplied between the object and the probe during measurement. Further, after the measurement is completed, the contact medium attached to the object must be wiped away. In this way, there is an inconvenience that the contact medium must be continuously supplied during measurement and removed after the measurement is completed.

  The present invention has been made in view of such circumstances, and provides an ultrasonic inspection method capable of inspecting an internal state with a simple operation even when an object to be inspected is at a high temperature.

In order to achieve the above object, the present invention employs the following means.
That is, the ultrasonic inspection method according to the present invention includes an ultrasonic probe that transmits ultrasonic waves, between the object to be inspected for propagating an ultrasonic wave, is interposed couplant including fine ceramics, the greater A probe-side attachment step for attaching the contact medium to an acoustic probe; a probe-side smoothing step for smoothing an inspection surface of the contact medium opposite to the ultrasonic probe; A test object comprising a placement step of placing the test surface on a surface of an inspection object and a transmission step of transmitting the ultrasonic wave to the test object, wherein the contact medium is attached to the surface of the test object An object-side adhesion step and an object-side smoothing step of smoothing the surface to be inspected opposite to the object to be inspected of the contact medium are provided .

In such an ultrasonic inspection method, the contact medium interposed between the object to be inspected and the ultrasonic probe contains fine ceramics that can withstand high temperatures. Therefore, even when the inspection object is at a high temperature, the contact medium functions so as to be in close contact with the ultrasonic probe and the inspection object, so that the ultrasonic wave can be reliably transmitted to the inspection object. Therefore, the internal situation can be inspected even when the object to be inspected is at a high temperature.
In addition, since the inspection surface of the contact medium attached to the ultrasonic probe is a smooth surface, the inspection surface of the contact medium attached to the ultrasonic probe is arranged on the surface of the inspection object. In the state, the inspection surface and the surface of the object to be inspected are in reliable contact. Therefore, since the ultrasonic wave transmitted from the ultrasonic probe passes through the contact medium and is reliably propagated to the inspection object, the state inside the inspection object can be reliably inspected.
Furthermore, since the surface to be inspected of the contact medium attached to the inspection object is a smooth surface, the inspection surface of the ultrasonic probe is arranged on the inspection surface of the contact medium attached to the inspection object. In the state, the inspection surface and the surface to be inspected come into contact with each other more reliably. Therefore, since the ultrasonic wave transmitted from the ultrasonic probe passes through the contact medium and is reliably propagated by the inspection object, the state inside the inspection object can be more reliably inspected.

The ultrasonic inspection method according to the present invention includes a contact medium containing fine ceramics between an ultrasonic probe that transmits ultrasonic waves and an inspection object that propagates the ultrasonic waves. A probe side adhesion step of attaching the contact medium to the surface of the acoustic probe; a probe side sintering step of sintering the contact medium; and the surface of the object to be inspected, the contact medium of the contact medium. An arrangement step for arranging an inspection surface opposite to the ultrasonic probe, a transmission step for transmitting ultrasonic waves to the inspection object, and an inspection object for attaching the contact medium to the surface of the inspection object An object-side adhesion step and an object-side sintering step for sintering the contact medium attached to the object to be inspected are provided.

In such an ultrasonic inspection method, the contact medium attached to the ultrasonic probe is a sintered body in which pores between powder particles constituting the contact medium are reduced by sintering. Therefore, with the contact medium attached to the ultrasonic probe placed on the surface of the inspection object, the amount of air interposed between the ultrasonic probe and the inspection object is minimized, The sintered body of the contact medium and the object to be inspected are reliably in contact. Therefore, since the ultrasonic wave transmitted from the ultrasonic probe passes through the contact medium and is reliably propagated to the inspection object, the state inside the inspection object can be reliably inspected.
Furthermore, the contact medium attached to the surface of the object to be inspected is a sintered body in which pores between powder particles constituting the contact medium are reduced by sintering. Therefore, in a state where the contact medium of the ultrasonic probe is arranged on the contact medium on the surface of the inspection object, the amount of air interposed between the ultrasonic probe and the inspection object is minimized, The sintered body of the contact medium of the ultrasonic probe and the sintered body of the contact medium of the object to be inspected are reliably in contact with each other. Therefore, since the ultrasonic wave transmitted from the ultrasonic probe passes through the contact medium and is reliably propagated by the inspection object, the state inside the inspection object can be more reliably inspected.

  Moreover, the ultrasonic inspection method according to the present invention may include a pressing step of pressing the ultrasonic probe against the inspection object.

  In such an ultrasonic inspection method, since the ultrasonic probe is pressed against the object to be inspected, the ultrasonic probe is in close contact with the object to be inspected through the contact medium. Therefore, the amount of air intervening between the ultrasonic probe and the object to be inspected is suppressed to a minimum, and the two come into reliable contact. Therefore, since the ultrasonic wave transmitted from the ultrasonic probe passes through the contact medium and is reliably propagated to the inspection object, the state inside the inspection object can be reliably inspected.

  Further, the ultrasonic inspection method according to the present invention includes a first inclined structure having the first inclined surface inclined with respect to the surface of the object to be inspected and configured by the contact medium, and the first inclined surface. A transmitting side arrangement step of arranging a first probe body having the ultrasonic probe arranged on the surface of the inspection object, and a second inclination inclined with respect to the surface of the inspection object A second inclined structure having a surface and composed of the contact medium, and a reflected wave of the ultrasonic wave transmitted from the first probe body and transmitted from the first probe body on the inspection object. A receiving-side arrangement step of arranging a second probe body having an ultrasonic receiver on the surface of the object to be inspected, and the ultrasonic probe with respect to the object to be inspected. The transmitting step for transmitting a sound wave and the ultrasonic receiver may include a receiving step for receiving the reflected wave.

  In such an ultrasonic inspection method, the ultrasonic wave transmitted from the ultrasonic probe of the first probe body propagates to the inside of the inspection object through the first inclined structure of the first probe body. Is done. Here, for example, if a crack is generated in the inspection object, the propagated ultrasonic wave is reflected by the crack and propagated as a reflected wave. The propagated reflected wave is received by the ultrasonic receiver of the second probe body via the second inclined structure of the second probe body. Therefore, the crack depth can be calculated by analyzing the reflected wave from the upper end of the crack and the reflected wave from the lower end of the crack.

  According to the ultrasonic inspection method of the present invention, even when the inspection object is at a high temperature, the contact medium functions so as to be in close contact with the ultrasonic probe and the inspection object. it can. Therefore, the internal situation can be inspected even when the object to be inspected is at a high temperature. Further, it is possible to inspect the internal state of the object to be inspected with a simple operation without a troublesome operation.

It is a flowchart of the ultrasonic inspection method which concerns on 1st embodiment of this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the ultrasonic inspection method which concerns on 1st embodiment of this invention, (a), (b) shows a probe side adhesion process, (c) shows a probe side smoothing process. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the ultrasonic inspection method which concerns on 1st embodiment of this invention, (a), (b) is a to-be-inspected object side adhesion process, (c) is a schematic diagram which shows to-be-inspected object side smooth process. . It is a schematic diagram which shows the arrangement | positioning process of the ultrasonic inspection method which concerns on 1st embodiment of this invention. It is a flowchart of the ultrasonic inspection method which concerns on 2nd embodiment of this invention. It is used for the ultrasonic inspection method which concerns on 3rd embodiment of this invention, (a) is a schematic diagram of a 1st inclination structure (2nd inclination structure), (b) is a 1st probe body. (C) is a diagram in which the first probe body is arranged on the object to be inspected, and (d) is the first probe body and the second probe body. It is the figure which has arrange | positioned to the to-be-inspected object. It is a flowchart of the ultrasonic inspection method which concerns on 3rd embodiment of this invention.

(First embodiment)
Hereinafter, the ultrasonic inspection method according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 4.
The ultrasonic inspection method is a method for inspecting the thickness of a pipe (inspected object) provided in a plant, for example.

  As shown in FIG. 2, as a pre-process, an ultrasonic probe 10 and a contact medium P that transmit ultrasonic waves are prepared.

  The ultrasonic probe 10 has a base 11 and a positive electrode lead D1 and a negative electrode lead D2 connected to the base 11. Each of the pair of positive electrode lead D1 and negative electrode lead D2 is connected to a control unit (not shown) provided outside.

  The base portion 11 is, for example, a positive electrode 12A connected to the positive electrode lead D1, a negative electrode 12B connected to the negative electrode lead D2, and a piezoelectric element composed of a piezoelectric element disposed between the positive electrode 12A and the negative electrode 12B. Part 13.

  When the control unit connected to the positive electrode lead D1 and the negative electrode lead D2 transmits a pulse signal, the ultrasonic probe 10 transmits from the positive electrode 12A via the positive electrode lead D1 and from the negative electrode 12B via the negative electrode lead D2. A pulse signal is applied to each piezoelectric portion 13. When receiving a pulse signal, the piezoelectric element constituting the piezoelectric unit 13 repeatedly vibrates and expands to generate ultrasonic waves.

  The contact medium P is a substance containing a reaction product of boron nitride and tetrabutoxyzinium (IV), which are fine ceramics, and acetylacetone. In this embodiment, it is accommodated in the spray, and Table 1 shows an example of the composition of the contact medium P. The heat resistance temperature of the contact medium P is 800 ° C., and the particle size of the fine ceramics constituting the contact medium P is, for example, several tens of μm. Preferably, the contact medium P contains boron nitride and a reaction product of tetrabutoxyzinium (IV) and acetylacetone as a main component.

Next, as shown in FIGS. 2A and 2B, a probe-side attachment step S01 is performed.
The contact medium P is attached to the ultrasonic probe 10 to form the first contact medium layer 20 on the ultrasonic probe 10. In the present embodiment, the first contact medium layer 20 is formed by spraying the contact medium P accommodated in the spray onto the ultrasonic probe 10.

  Thereby, the ultrasonic probe 10 is integrated with the first contact medium layer 20. Here, the surface of the first contact medium layer 20, that is, the side opposite to the ultrasonic probe 10 is an inspection surface 20 </ b> A.

Next, as shown in FIG.2 (c), the probe side smoothing process S02 is performed.
The inspection surface 20A of the first contact medium layer 20 is smoothed by shaving with, for example, an abrasive.

Next, as shown in FIGS. 3A and 3B, the inspection object side attaching step S03 is performed.
The contact medium P is attached to the surface Z1 of the inspection object Z to form the second contact medium layer 30. In the present embodiment, the second contact medium layer 30 is formed by spraying the contact medium P onto the inspection object Z in the same manner as in the probe side attachment step S01.

  Thereby, the inspection object Z is integrated with the second contact medium layer 30. The surface of the second contact medium layer 30, that is, the side opposite to the inspection object Z is the inspection surface 30A.

Next, as shown in FIG.3 (c), the to-be-inspected object side smoothing process S04 is performed.
The surface to be inspected 30A of the second contact medium layer 30 is smoothed by shaving with, for example, an abrasive.

Next, as shown in FIG. 4, an arrangement step S05 is performed.
The surface to be inspected 30A of the second contact medium layer 30 attached to the inspection object Z and the inspection surface 20A of the first contact medium layer 20 attached to the ultrasonic probe 10 are brought into contact with each other to be inspected. The ultrasonic probe 10 is arranged on the inspection object Z. In this way, the contact medium P is interposed between the inspection object Z and the ultrasonic probe 10.

Next, the pressing step S06 is executed.
The ultrasonic probe 10 is pressed by the pressing unit 40 against the inspection object Z.
The pressing portion 40 includes a contact portion 41 disposed on the surface of the ultrasonic probe 10 opposite to the first contact medium layer 20 and a direction in which the contact portion 41 faces the inspection object Z (hereinafter referred to as a press). A biasing portion 42 that biases the biasing portion in a pressing direction, and a driving portion 43 that applies a force to the biasing portion 42 in the pressing direction.

  When the driving unit 43 applies a force in the pressing direction to the urging unit 42, the urging unit 42 applies a urging force in the pressing direction to the contact unit 41. Thereby, the contact part 41 presses the ultrasonic probe 10 toward the inspection object Z in the pressing direction. In this state, it is interposed between the inspection surface 20A of the first contact medium layer 20 attached to the ultrasonic probe 10 and the inspection surface 30A of the second contact medium layer 30 attached to the inspection object Z. Air is kept to a minimum.

In this state, the transmission step S07 is executed.
As described above, the ultrasonic probe 10 generates the ultrasonic wave S when receiving the pulse signal. The ultrasonic wave S is transmitted to the inspection object Z through the contact medium P attached to the ultrasonic probe 10 and the contact medium P attached to the inspection object Z. The propagated ultrasonic wave S is reflected by the back surface of the inspection object Z and propagates through the inspection object Z as a reflected wave T. The reflected wave T passes through the contact medium P attached to the inspection object Z and the contact medium P attached to the ultrasonic probe 10 and is received by the ultrasonic probe 10.

  As a result, a piezoelectric effect is generated, and a voltage corresponding to the ultrasonic pulse is generated between the surface on the positive electrode 12A side and the surface on the negative electrode 12B side of the piezoelectric portion 13. This pulsed electric signal passes through the positive electrode lead D1 through the positive electrode 12A and through the negative electrode lead D2 through the negative electrode 12B, and is input to the control unit.

  When the pulse signal is detected, the control unit measures the time from the transmission of the ultrasonic wave S to the reception of the reflected wave T. Then, the thickness of the inspection object Z, the position of the crack, and the like can be grasped from the properties of the pulse signal, the measured time, and the like.

  In the ultrasonic inspection method configured as described above, the contact medium P interposed between the inspection object Z and the ultrasonic probe 10 includes fine ceramics that can withstand high temperatures. Therefore, even when the inspection object Z is at a high temperature, the contact medium P functions so as to be in close contact with the ultrasonic probe 10 and the inspection object Z, so that the ultrasonic wave S can be reliably transmitted to the inspection object Z. it can. Therefore, it is possible to inspect the internal state such as the thickness of the inspection object Z and the position of the crack even when the inspection object Z is at a high temperature.

  Further, the inspection surface 20A formed on the opposite side of the ultrasonic probe 10 of the contact medium P attached to the ultrasonic probe 10 is a smooth surface and is attached to the inspection object Z. A surface 30A to be inspected formed on the opposite side of the contact medium P from the object Z to be inspected is a smooth surface. Therefore, the inspection surface 20A of the ultrasonic probe 10 and the inspection surface 30A of the inspection object Z are reliably in contact with the inspection surface 20A disposed on the inspection surface 30A. Therefore, since the ultrasonic wave S transmitted from the ultrasonic probe 10 passes through the contact medium P and is reliably propagated to the inspection object, the state inside the inspection object can be reliably inspected.

  For example, when the surface Z1 of the inspection object Z is uneven, the ultrasonic probe 10 is made by attaching the contact medium P to the surface Z1 of the inspection object Z and smoothing the inspection surface 30A. And a shape corresponding to the smooth inspection surface 20A formed on the contact medium P attached to the surface. Therefore, since a large contact area between the contact medium P of the inspection object Z and the contact medium P of the ultrasonic probe 10 can be ensured, the propagation of the ultrasonic wave S is favorable.

  Further, since the ultrasonic probe 10 is pressed against the inspection object Z, the contact medium P attached to the ultrasonic probe 10 is in close contact with the contact medium P attached to the inspection object Z. Therefore, the amount of air intervening between the ultrasonic probe 10 and the object to be inspected Z is suppressed to a minimum, and both come into contact with each other with certainty. Therefore, since the ultrasonic wave S transmitted from the ultrasonic probe 10 passes through the contact medium P and is reliably propagated to the inspection object, the state inside the inspection object can be reliably inspected.

  Fine ceramics are solid from room temperature to about 700 ° C. Therefore, if the contact medium P is attached to the ultrasonic probe 10 before the inspection and the ultrasonic probe 10 is disposed on the inspection object Z, the contact medium P is continuously attached without being attached again thereafter. Can be inspected. Further, since the ultrasonic probe 10 is integrated with the contact medium P, the contact medium P is also removed together with the operation of removing the ultrasonic probe 10 from the inspection object Z after the inspection. Therefore, it is possible to inspect the state inside the inspection object Z with a simple operation without a troublesome operation.

(Second embodiment)
Hereinafter, the ultrasonic inspection method according to the second embodiment of the present invention will be described mainly with reference to FIG.
In this embodiment, the same members as those used in the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  The ultrasonic inspection method according to this embodiment includes the probe-side smoothing step S02 as the probe-side sintering step S12 and the inspection-object-side attachment step in the ultrasonic inspection method according to the first embodiment described above. S03 is replaced with the inspection object side sintering step S14. Since other processes are the same as those in the first embodiment, the description thereof is omitted.

  In the probe side sintering step S12, the contact medium P attached to the ultrasonic probe 10 is sintered. For example, the contact medium P is heated to a temperature equal to or lower than the melting point, and the powder particles constituting the contact medium P are diffused to the surface Z1. Thereby, the contact medium P attached to the ultrasonic probe 10 becomes a sintered body in which pores between the powder particles are reduced.

  In the inspection object side sintering step S14, the contact medium P attached to the inspection object Z is sintered. Similar to the probe side sintering step, the contact medium P attached to the inspection object Z becomes a sintered body in which the pores between the powder particles are reduced.

  In the ultrasonic inspection method configured as described above, the contact medium P attached to the ultrasonic probe 10 is a sintered body in which pores between powder particles constituting the contact medium P are reduced by sintering. Yes. Further, the contact medium P attached to the surface Z1 of the inspection object Z is a sintered body in which pores between powder particles constituting the contact medium P are reduced by sintering. Therefore, in the state in which the contact medium P of the ultrasonic probe 10 is disposed on the contact medium P of the surface Z1 of the inspection object Z, the air intervening between the ultrasonic probe 10 and the inspection object Z The sintered body of the contact medium P of the ultrasonic probe 10 and the sintered body of the contact medium P of the object to be inspected Z are reliably in contact with each other while minimizing the amount. Accordingly, since the ultrasonic wave S transmitted from the ultrasonic probe 10 passes through the contact medium P and is reliably propagated to the inspection object Z, the internal state of the inspection object Z is surely inspected. Can do.

(Third embodiment)
Hereinafter, the ultrasonic inspection method according to the second embodiment of the present invention will be described mainly with reference to FIGS. 6 and 7.
In this embodiment, the same members as those used in the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted.

First, an ultrasonic inspection apparatus used in the ultrasonic inspection method according to the present embodiment will be described.
As shown in FIG. 6D, the ultrasonic inspection apparatus 100 includes a first probe body 101 that transmits an ultrasonic wave S, and the transmitted ultrasonic wave S is propagated inside the inspection object Z and reflected. And a second probe body 102 for receiving the reflected wave T.

  The first probe body 101 includes a first inclined structure 110 disposed on the inspection object Z, an ultrasonic probe 120 that transmits the ultrasonic wave S, and the first inclined structure 110 and the ultrasonic probe. And a joint 130 formed of a contact medium P, which is interposed between the contactor 10 and the contactor 10.

  The first inclined structure 110 is composed of a contact medium P. The first inclined structure 110 is inclined with respect to the bottom 111 placed on the inspection object Z, a plurality of side walls 112 erected from the bottom 111, and the one side wall 112 to the bottom 111. It has a first inclined wall portion (first inclined surface) 113 and an upper wall portion 114 facing away from the bottom portion 111. The first inclined wall 113 is formed to be inclined at a predetermined angle with respect to the surface Z1 of the inspection object Z.

  The first inclined structure 110 is filled with fine ceramics in a mold (not shown) having a shape corresponding to the bottom 111, the plurality of side walls 112, the first inclined wall 113, and the upper wall 114, for example. It is formed by doing.

  Similar to the ultrasonic probe 10 according to the first embodiment, the ultrasonic probe 120 includes a base 161 and a positive electrode lead D3 and a negative electrode lead D4 connected to the base 161.

  The second probe body 102 includes a second inclined structure 210, an ultrasonic receiver 220 that receives the reflected wave T of the ultrasonic wave S transmitted from the first probe body 101 on the inspection object Z, It has a joint portion 230 formed of a contact medium P interposed between the second inclined structure 210 and the ultrasonic receiver 220.

  The second inclined structure 210 is composed of the contact medium P in the same manner as the first inclined structure 110. The second inclined structure 210 has a bottom portion 211, a side wall portion 212, an inclined wall portion (second inclined surface) 213, and an upper wall portion 214.

  Similar to the ultrasonic probe 120, the ultrasonic receiver 220 includes a base 261, and a positive electrode lead D <b> 5 and a negative electrode lead D <b> 6 connected to the base 261.

Next, an ultrasonic inspection method using the ultrasonic inspection apparatus 100 configured as described above will be described.
The ultrasonic inspection method includes a transmission side arrangement step S21, a reception side arrangement step S22, a transmission step S23, and a reception step S24.

  In the transmitting side arrangement step S21, the first probe body 101 is arranged on the inspection object Z such that the bottom 111 of the first probe body 101 contacts the surface Z1 of the inspection object Z.

  In the receiving side arrangement step S22, the second probe body 102 is arranged on the inspection object Z such that the bottom portion 211 of the second probe body 102 contacts the surface Z1 of the inspection object Z.

  In the transmission step S23, the ultrasonic probe 120 transmits the ultrasonic wave S to the inspection object Z as in the transmission step S07 of the first embodiment.

  In the receiving step S24, the reflected wave T reflected by the crack Q generated in the inspection object Z is received. Here, the reflected wave T is a first reflected wave T1 from the upper end Q1 of the crack Q and a second reflected wave T2 from the lower end Q2 of the crack Q.

  In the ultrasonic inspection method configured as described above, the ultrasonic wave S transmitted from the ultrasonic probe 120 of the first probe body 101 passes through the first inclined structure 110 of the first probe body 101. Is propagated to the inside of the inspection object Z. Here, for example, if a crack Q occurs in the inspection object Z, the propagated ultrasonic wave S is reflected by the crack Q and propagated as the first reflected wave T1 and the second reflected wave T2. The propagated first reflected wave T1 and second reflected wave T2 are received by the ultrasonic receiver 220 of the second probe body 102 via the second inclined structure 210 of the second probe body 102. The Therefore, by analyzing the first reflected wave T1 from the upper end Q1 of the crack Q and the second reflected wave T2 from the lower end Q2 of the crack Q, the depth of the crack Q can be calculated.

  The various shapes and combinations of the constituent members shown in the above-described embodiments are merely examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

  For example, in the third embodiment, as shown in FIG. 6C, the first probe body 101 is configured to receive the reflected wave from the inspection object Z, and the second probe is applied to the surface Z1 of the inspection object Z. Without arranging the child body 102, the first probe body 101 is arranged and moved onto the surface Z1. In this case, the position of the crack Q can be specified by analyzing the pulsed electric signal generated by the reflected wave.

  In the first embodiment and the second embodiment, the contact medium P is attached to both the ultrasonic probe 120 and the inspection object Z, but the present invention is not limited to this, and the ultrasonic probe. What is necessary is just to interpose the contact medium P between 120 and the to-be-inspected object Z. FIG. Therefore, the contact medium P may be provided on one of the ultrasonic probe 120 and the inspection object Z. Furthermore, the ultrasonic probe 120 and the inspection object Z are configured as separate members from the contact medium P, and the ultrasonic probe 120 and the inspection object Z sandwich the contact medium P therebetween. The contact medium P may be simply disposed between the contact 120 and the inspection object Z.

Z ... object to be inspected Z1 ... surface 10 ... ultrasonic probe 11 ... base D1 ... positive electrode conductor D2 ... negative electrode conductor 12A ... positive electrode 12B ... negative electrode 13 ... piezoelectric part S ... ultrasonic wave T ... reflected wave P ... contact medium DESCRIPTION OF SYMBOLS 20 ... 1st contact medium layer 20A ... Inspection surface 30 ... 2nd contact medium layer 30A ... Test surface 40 ... Press part 41 ... Contact part 42 ... Energizing part 43 ... Drive part S01 ... Probe side adhesion process S02 ... probe-side smoothing process S03 ... inspection object-side adhesion process S04 ... inspection object-side smoothing process S05 ... placement process S06 ... pressing process S07 ... sending process

Claims (3)

An ultrasound probe that emits ultrasound,
A contact medium containing fine ceramics is interposed between the inspection object that propagates the ultrasonic wave ,
A probe side attachment step of attaching the contact medium to the ultrasonic probe;
A probe-side smoothing step of smoothing the inspection surface of the contact medium opposite to the ultrasonic probe;
An arrangement step of arranging the inspection surface on the surface of the inspection object;
A transmission step of transmitting the ultrasonic wave to the inspection object,
An inspection object-side attachment step of attaching the contact medium to the surface of the inspection object;
An ultrasonic inspection method comprising: an inspection object side smoothing step of smoothing an inspection surface of the contact medium opposite to the inspection object . An ultrasound probe that emits ultrasound,
A contact medium containing fine ceramics is interposed between the inspection object that propagates the ultrasonic wave,
A probe-side attachment step of attaching the contact medium to the surface of the ultrasonic probe;
A probe side sintering step of sintering the contact medium;
An arrangement step of arranging an inspection surface of the contact medium opposite to the ultrasonic probe on the surface of the inspection object;
A transmitting step of transmitting ultrasonic waves to the object to be inspected;
An inspection object-side attachment step of attaching the contact medium to the surface of the inspection object;
An ultrasonic inspection method comprising: an inspection object side sintering step of sintering the contact medium attached to the inspection object. The ultrasonic inspection method according to claim 1 or 2 ,
An ultrasonic inspection method comprising a pressing step of pressing the ultrasonic probe against the inspection object.

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