JP6149969B1 - Acceleration sensor device, monitoring system, and diagnostic method - Google Patents

Abstract

A monitoring system for diagnosing the structural performance of a building using an acceleration sensor having a self-diagnosis function. A monitoring system includes a plurality of acceleration sensor devices installed in at least one building and a monitoring device that monitors the building using the plurality of acceleration sensor devices. Each has a diagnostic function for detecting acceleration due to self-drive, and the monitoring device collects diagnostic results of a plurality of acceleration sensor devices. As a result, the self-diagnosis results of the plurality of acceleration sensors can be collectively managed by the monitoring device. [Selection] Figure 7

Description

  The present invention relates to an acceleration sensor device, a monitoring system, and a diagnostic method.

  Structural health monitoring is actively being conducted to monitor structural vibrations such as vibrations associated with earthquakes, microtremors caused by wind, etc., and diagnose structural performance such as building damage and aging (for example, non-patented) Reference 1). The structural health monitoring system is, for example, an acceleration sensor that detects vibration of a building, a server that collects measurement data from the acceleration sensor, a computer that analyzes the collected measurement data, and a diagnosis result of the building from the analysis result. Constructed including means. In structural health monitoring, it is necessary to make a diagnosis at an appropriate timing to maintain the performance and extend the life of the building, and to make an immediate diagnosis to determine the damage and soundness of the building when an earthquake occurs. Therefore, high reliability is particularly required for the acceleration sensor.

For example, Patent Document 1 includes a weight that vibrates when acceleration is applied, a piezoelectric element that detects vibration of the weight, and a piezoelectric plate provided in a case that accommodates the weight and the piezoelectric element, and the sensor is excited by the piezoelectric plate. Thus, an acceleration sensor capable of self-diagnosis as to whether or not it is operating normally is disclosed. Further, in Patent Document 2, a piezoelectric vibrator is disposed in the vicinity of an acceleration sensor on a base plate, an AC voltage is applied to the piezoelectric vibrator to generate vibration, and an output signal is compared with an AC voltage to accelerate the vibration. An acceleration detection device that determines whether a sensor is normal or abnormal is disclosed. Patent Document 3 includes a weight part that receives acceleration, a strain generating part that supports the weight part, a piezoresistor that detects strain of the strain generating part, and a piezoelectric material that drives the weight part by a piezoelectric effect. An acceleration sensor is disclosed in which a voltage is applied to the weight part to cause a state in which acceleration is applied to the weight part in a pseudo manner to determine whether or not it is operating normally. These acceleration sensors detect only acceleration in one axis direction.
Patent Document 1: Japanese Patent Application Laid-Open No. 2007-198744 Patent Document 2: Japanese Patent Application Laid-Open No. Hei 6-148234 Patent Document 3: Japanese Patent Application Laid-Open No. 5-322927 Structural Health Monitoring System Used ", Fuji Electric Technical Review, 2014 vol. 87 no. 1

  In recent years, an inexpensive and highly sensitive acceleration sensor that detects acceleration in the three-axis direction has come to be used. However, no technology for self-diagnosis of such an acceleration sensor has been developed. In structural health monitoring for diagnosing the structural performance of buildings, since acceleration sensors are generally embedded in buildings, it is difficult to check whether the acceleration sensors are operating normally by accessing from outside. . For this reason, conventionally, there is no means for confirming the soundness of the acceleration sensor, and a configuration that can ensure the soundness of the acceleration sensor has been desired.

  In the first aspect of the present invention, a plurality of acceleration sensors provided in at least one building, and a monitoring device that monitors the building using the plurality of acceleration sensor devices, a plurality of acceleration sensors. Each of the devices has a diagnostic function for detecting self-driven acceleration, and the monitoring device is provided with a monitoring system that collects diagnostic results of a plurality of acceleration sensor devices.

  In the second aspect of the present invention, each of a plurality of acceleration sensor devices installed in at least one building detects a self-driven acceleration, and a building is constructed using the plurality of acceleration sensor devices. There is provided a monitoring method comprising: a monitoring stage in which a monitoring device collects diagnostic results of a plurality of acceleration sensor devices.

  In the third aspect of the present invention, the base, a weight displaceable with respect to the base, a detection unit for detecting the displacement of the weight with respect to the base, and the base are provided. There is provided an acceleration sensor device including a displacement generating unit that is displaced in a direction different from the first direction with respect to the weight.

  The summary of the invention does not enumerate all the features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

1 shows a configuration of an acceleration sensor device according to an embodiment. 1 shows a configuration of an acceleration sensor device according to an embodiment. The structure of a signal processing part is shown. An example of the drive signal of a vibration device is shown. The principle of applying acceleration in the XY direction to the weight by the vibration device will be described. An example of the drive signal of a vibration device is shown. An example of the drive signal of a vibration device is shown. The principle of applying acceleration in the XY direction to the weight by the vibration device will be described. An example of the drive signal of a vibration device is shown. The structure of the acceleration sensor apparatus which concerns on a modification is shown. The structure of the acceleration sensor apparatus which concerns on a modification is shown. 1 shows a configuration of a structural health monitoring system according to an embodiment. 3 shows a structure of a structural health monitoring system according to another embodiment. The procedure of the monitoring method in the structural health monitoring system which concerns on another embodiment is shown.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

  1A and 1B show a configuration of an acceleration sensor device 100 according to an embodiment. Here, FIG. 1A is a cross-sectional view with respect to the reference line AA in FIG. 1B, and shows the configuration of the acceleration sensor device 100 from above. FIG. 1B is a cross-sectional view related to the reference line BB in FIG. 1A and shows the configuration of the acceleration sensor device 100 from the side. The vertical direction in FIG. 1A is the vertical direction, the horizontal direction in FIGS. 1A and 1B is the horizontal direction, and the vertical direction in FIG. 1B is the height direction. Acceleration sensor device 100 has a diagnostic function for detecting self-driven acceleration, and thereby provides an acceleration sensor for detecting acceleration in three axial directions that can self-diagnose whether or not it is operating normally. And includes a base body 10, a weight 30, a detection unit 40, and a displacement generation unit 50.

  The base body 10 is a member on which the housing 20 that supports the weight 30 and a sensor unit including a plurality (four as an example) of electrode pairs 41 to 44 of the detection unit 40 and the vibration devices 51 to 54 of the displacement generation unit 50 are mounted. Including the substrate 11 and the housing 20.

  The substrate 11 is a plate-like member. The acceleration sensor device 100 of the present embodiment can be manufactured using MEMS technology, and is used as a base material when manufacturing the casing 20, the weight 30, the vibration devices 51 to 54 of the displacement generating unit 50, and the like. Is also used.

  The housing 20 is a box-like support that supports the weights 30 and the electrodes 41 a to 46 a of the detection unit 40 and accommodates them in the internal space 20 a, and includes four plate-like side walls 21 to 24 and a top plate 25. .

  Of the four side walls 21 to 24, the side walls 21 and 22 are erected on the substrate 11 with their longitudinal directions in the vertical direction and spaced apart on one side and the other side in the horizontal direction, respectively. The side walls 23 and 24 are erected on the substrate 11 with the longitudinal direction oriented in the horizontal direction and spaced apart from one side and the other side in the vertical direction, respectively. Side wall 21 connects two ends to the right end of side walls 23 and 24, respectively, and side wall 22 connects two ends to the left end of side walls 23 and 24, respectively. Accordingly, the plurality of (herein, four as an example) side walls 21 to 24 constitute a rectangular frame.

  The top plate 25 is a lid that covers the inside of the housing 20, is supported on the upper ends of the four side walls 21 to 24 at the periphery, and is arranged in parallel to the upper surface of the substrate 11. Thereby, the internal space 20 a is sealed by the housing 20 and the substrate 11.

  The weight 30 is a member that is supported in the housing 20 so as to be displaceable with respect to the base body 10, and is a member that receives acceleration and senses acceleration by being displaced in the housing 20. For example, the weight 30 has a square upper surface and upper surface. It is formed in a rectangular parallelepiped shape having a small thickness with respect to the side portion. The weight 30 is supported in the casing 20 by connecting four corners to four corners of the casing 20 by a plurality of (four as an example here) beam members 31 to 34 in a top view. The As a result, the weight 30 faces the four side surfaces in parallel to the inner surfaces of the four side walls 21 to 24 of the housing 20, and the upper surface and the bottom surface are the lower surface of the top plate 25 and the upper surface of the substrate 11, respectively. Oppositely, they are spaced from the inner surface of the housing 20 and the upper surface of the substrate 11 and are arranged in the center of the internal space 20a.

  The four beam members 31 to 34 have a spring function, and support the weight 30 that is displaced by sensing acceleration in the housing 20. As an example, with respect to the displacement ΔL of the weight in the lateral direction and the spring constant k of the four beam members 31 to 34 in the lateral direction, the acceleration a in the lateral direction is a = kΔL / m using the mass m of the weight 30. can get. Therefore, the acceleration a can be measured by detecting the displacement ΔL of the weight 30. Longitudinal and height accelerations can also be measured according to the same principle.

  The detection unit 40 is a unit that detects the displacement of the weight 30 with respect to the base 10, and includes a plurality (here, six as an example) of electrode pairs 41 to 46 and a signal processing unit 60 that processes signals from the respective electrode pairs. .

  Of the six electrode pairs 41 to 46, the electrode pair 41 includes two electrodes 41 a and 41 b that are fixed to the inner surface of the side wall 21 of the housing 20 and the right side surface of the weight 30 so as to face each other in the lateral direction. The electrode pair 42 has two electrodes 42 a and 42 b fixed to the inner surface of the side wall 22 of the housing 20 and the left side surface of the weight 30 so as to face each other in the lateral direction. The electrode pair 43 includes two electrodes 43 a and 43 b fixed to the inner surface of the side wall 23 of the housing 20 and the inner surface of the weight 30 so as to face each other in the vertical direction. The electrode pair 44 includes two electrodes 44 a and 44 b fixed to the inner surface of the side wall 24 of the housing 20 and the front side surface of the weight 30 so as to face each other in the vertical direction. The electrode pair 45 includes two electrodes 45 a and 45 b fixed to the lower surface of the top plate 25 of the housing 20 and the upper surface of the weight 30 so as to face each other in the height direction. The electrode pair 46 includes two electrodes 46 a and 46 b fixed to the upper surface of the substrate 11 and the lower surface of the weight 30 so as to face each other in the height direction.

  For each of the six electrode pairs 41 to 46, the signal processing unit 60 is driven by inputting a drive signal from one electrode side, for example, and detects and senses the potential of the electrode on one side. The capacitance of the electrode pair is detected. Since the capacitance of the electrode pair depends on (ie, inversely proportional to) the electrode spacing (ie, the separation distance), detecting the capacitance of the electrode pair (or change thereof) detects the separation distance (or change thereof). ) Can be obtained. The circuit configuration of the signal processing unit 60 will be described later.

  The displacement generator 50 is provided on the base body 10, as an example in the present embodiment, on the substrate 11. A plurality of displacement generators 50 displace the weight 30 in the housing 20 indirectly by displacing the installation position on the substrate 11 in the height direction. This is a unit including the vibration devices 51 to 54 (4 as an example here) and a control unit 55 for controlling them. The weight 30 is indirectly displaced by providing the displacement generator 50 in the housing 20 and swinging the weight 30 in the horizontal and vertical directions. This is because it is difficult to shake.

  Each of the four vibration devices 51 to 54 has a piezoelectric element such as piezoelectric ceramics and a weight supported by the piezoelectric element, and applies a voltage to electrodes provided on one side and the other side of the polarization direction of the piezoelectric element. The vibration in the polarization direction is generated by expanding and contracting in the polarization direction and displacing the weight. The vibration devices 51 to 54 are installed at positions on the substrate 11 that are different from the casing 20, that is, the weight 30 in the vertical direction and / or the horizontal direction, with the polarization direction in the height direction. Specifically, the casing 20 and the weight 30 are installed at positions shifted from the plane center, and are separated from the casing 20 on the right side, the left side, the back, and the front side. Thereby, the vibration devices 51 to 54 displace the substrate 11 in the height direction at each installation position. The vibrating devices 51 to 54 are installed on the substrate 11 in any direction including the polarization direction in addition to the height direction (that is, any direction not orthogonal to the height direction). The substrate 11 may be displaced in that direction at the position. The four vibrating devices 51 to 54 not only induce displacement in the height direction of the weight 30 in the housing 20 but also induce displacement in different directions, that is, longitudinal and lateral directions.

  The control unit 55 is connected to the four vibration devices 51 to 54 via wiring, and vibrates each by transmitting a drive signal. An example of the vibration control of the weight 30 by the drive signal and the four vibration devices 51 to 54 will be described later.

  FIG. 2 shows a configuration of the detection unit 40, particularly the signal processing unit 60 included therein. The signal processing unit 60 includes three amplifiers 61X, 61Y, 61Z, three filters 62X, 62Y, 62Z, three AD converters 63X, 63Y, 63Z, a calculation unit 64, a memory 65, an interface 66, and a diagnosis unit 67. Including.

  Of the three amplifiers 61X, 61Y, and 61Z, the amplifier 61X is connected to the electrode pairs 41 and 42, receives each sense signal, amplifies the difference, and outputs the amplified difference. Here, driving is performed by inputting driving signals having opposite phases to the electrode pairs 41 and 42. Accordingly, the amplifier 61X receives a sense signal proportional to a change in charge (capacitance change) accompanying the displacement of the weight 30 from each of the electrode pairs 41 and 42. As a result, the amplifier 61X outputs a differential signal in phase with the drive signal input to the electrode pair including any one of the electrodes 41a and 42a that the weight 30 approaches. The difference signal of the amplifier 61X is proportional to the lateral component of the acceleration acting on the weight 30. Similarly, the amplifier 61Y is connected to the electrode pairs 43 and 44, receives the respective sense signals, amplifies the difference, and outputs the amplified difference. The difference signal of the amplifier 61Y is proportional to the longitudinal component of the acceleration acting on the weight 30. The amplifier 61Z is connected to the electrode pairs 45 and 46, receives the respective sense signals, amplifies the difference, and outputs the amplified difference. The difference signal of the amplifier 61Z is proportional to the height direction component of the acceleration acting on the weight 30.

  The three filters 62X, 62Y, and 62Z respectively filter the output signals (that is, difference signals) of the three amplifiers 61X, 61Y, and 61Z. As the filters 62X, 62Y, and 62Z, for example, a low-pass filter (LPF) that passes only a low-frequency component due to slow vibration of a building and cuts a high-frequency component including almost only noise that is equal to or higher than a predetermined frequency may be employed. it can. Here, since the vibration frequency of the building is, for example, 0.1 to 10 Hz, the cut-off frequency of the low-pass filter can be set to several tens of Hz, for example.

  The three AD converters 63X, 63Y, and 63Z AD convert the output signals (filtered difference signals) of the three filters 62X, 62Y, and 62Z, respectively. The difference signal converted into the digital signal is transmitted to the calculation unit 64.

  The calculation unit (CPU) 64 processes differential signals from the three AD converters 63X, 63Y, and 63Z to calculate accelerations in the horizontal direction, the vertical direction, and the height direction (that is, triaxial acceleration).

  The memory (SRAM) 65 stores the triaxial acceleration calculated by the calculation unit 64.

  The interface (PHY) 66 externally outputs the triaxial acceleration calculated by the calculation unit 64 as acceleration data.

  The diagnosis unit 67 is a unit for self-diagnosis of the normal operation of the acceleration sensor device 100. The self-drive, that is, the displacement generation unit 50 has displaced the installation positions of the vibration devices 51 to 54 on the substrate 11 in the vertical direction. The displacement of the weight 30 with respect to the substrate 11 is diagnosed based on the triaxial acceleration calculated by the calculation unit 64 (that is, the detection result detected by the detection unit 40). For example, the diagnosis unit 67 performs normal operation of the acceleration sensor device 100 when the acceleration (or the displacement amount of the weight 30) measured with respect to the displacement in the height direction by the displacement generation unit 50 exceeds a threshold value. Make a self-diagnosis. The diagnosis unit 67 outputs the diagnosis result to the outside.

  The diagnosis unit 67 performs self-diagnosis of the normal operation of the acceleration sensor device based on a change in triaxial acceleration (that is, a detection result) according to the change in the amount of displacement in the height direction by the displacement generation unit 50. May be. For example, the calculation result of the acceleration output from the calculation unit 64, for example, whether the maximum is multiplied by α when the horizontal displacement, the vertical displacement, or the height displacement of the weight 30, for example, the maximum displacement is multiplied by α. Judge whether or not.

  The principle of vibration control of the weight 30 by the displacement generator 50 will be described.

  FIG. 3A shows an example of a drive signal input to the vibration device 51. The control unit 55 of the displacement generation unit 50 generates a pulse signal having a positive amplitude at a constant cycle and transmits the pulse signal to the vibration device 51 as a drive signal. Here, the generation frequency of the pulse signal is equal to or substantially equal to the resonance frequency in the lateral direction of the weight 30 or an integer multiple thereof. Thereby, the weight 30 vibrates in resonance with the vibration of the vibration device 51, whereby the weight 30 can be efficiently vibrated in the lateral direction.

  FIG. 3B shows the principle of applying a lateral acceleration to the weight 30 by the vibration of the vibration device 51 that has received the drive signal of FIG. 3A. The weight 30 is supported by the beam members 31 to 34 and is located at the center in the housing 20. The position of the weight 30 is defined as a neutral position. The vibration device 51 receives the drive signal of the positive pulse and displaces the substrate 11 upward in the installation position (in the direction of the white arrow). Along with this, the substrate 11 is distorted, and the side wall 21 of the housing 20 supported by the substrate 11 is displaced upward in the height direction (the direction of the white arrow). At this time, the weight 30 is pulled by the side wall 21 via the beam members 31 and 32 and displaced in the upper right direction (the direction of the black arrow). That is, it is displaced upward in the height direction and simultaneously displaced in the right direction in the lateral direction. Next, the vibration device 51 receives the drive signal with zero amplitude, displaces the substrate 11 at the installation position, and returns it to the original position (position indicated by a dotted line in the drawing). Along with this, the distortion of the substrate 11 returns, and the side wall 21 of the housing 20 is displaced downward in the height direction and returns to the original position (position indicated by a dotted line in the figure). The weight 30 returns to the original neutral position (position indicated by a dotted line in the figure). The vibration device 51 repeatedly receives a positive pulse and a zero-amplitude driving vibration to vibrate the substrate 11 in the height direction at the installation position and vibrate the side wall 21 of the housing 20 in the height direction, thereby By repeatedly pulling the weight 30 in the upper right direction, the weight 30 is vibrated in the lateral direction in addition to the height direction.

  In the example of FIG. 3A, the control unit 55 generates a pulse signal having a positive amplitude at a constant period and transmits the pulse signal to the vibrating device 51 as a drive signal. A pulse signal having a negative amplitude at a constant cycle may be generated and transmitted to the vibrating device 51 as a drive signal. In such a case, the weight 30 is raised in the same manner as above except that the displacement of the substrate 11, the side wall 21 of the housing 20, and the weight 30 at the installation position of the vibration device 51 changes downward in the height direction. In addition to the direction, it can be vibrated in the lateral direction.

  Further, based on the same principle, the weight 30 can be vibrated in the lateral direction in addition to the height direction by the vibrating device 52. Further, the weight 30 can be vibrated in the vertical direction in addition to the height direction by the vibrating devices 53 and 54. In such a case, the generation frequency of the pulse signal is equal to or substantially equal to the resonance frequency in the longitudinal direction of the weight 30 or an integer multiple thereof. Thereby, the weight 30 vibrates in resonance with the vibrations of the vibration devices 53 and 54, so that the weight 30 can be efficiently vibrated in the vertical direction.

  Further, the weight 30 can be vibrated in the lateral direction by one of the vibrating devices 51 and 52, and the weight 30 can be vibrated in the vertical direction by one of the vibrating devices 53 and 54. FIG. 3C shows an example of a drive signal input to the vibrating devices 51 to 54 in such a case. The control unit 55 of the displacement generation unit 50 generates a pulse signal having a positive amplitude at a constant period, transmits the pulse signal to the vibration device 51 as a drive signal, and synchronizes with the drive signal of the vibration device 51, A pulse signal having a positive amplitude is generated at an arbitrary integer multiple period (here, twice as an example), and is transmitted to the vibrating device 53 as a drive signal. It is assumed that the resonance frequency in the horizontal direction of the weight 30 is equal to the resonance frequency in the vertical direction.

  In the above example, the vibration devices 51 and 53 are used, but the vibration devices 52 and 53, 51 and 54, or 52 and 54 may be used similarly. In addition, the drive signal may repeat negative pulses for both vibration devices, or repeat opposite-phase pulses (one positive pulse and the other negative pulse) for the two vibration devices. Also good.

  In the above example, the weight 30 is vibrated in the lateral direction using the vibration device 51, but the weight 30 can also be vibrated in the lateral direction using the two vibration devices 51 and 52.

  FIG. 4A shows an example of drive signals input to the vibration devices 51 and 52. The control unit 55 of the displacement generation unit 50 generates a pulse signal having a positive amplitude at a constant cycle, transmits this as a drive signal to the vibration device 51, and at a different timing, here the vibration device 51 at the same cycle. A pulse signal having a negative amplitude is generated with a half cycle shift with respect to the drive signal, and this is transmitted as a drive signal to the vibration device 52. Here, the generation frequency of the pulse signal is equal to or substantially equal to the resonance frequency in the lateral direction of the weight 30 or an integer multiple thereof. Thereby, the weight 30 vibrates in resonance with the vibrations of the vibration devices 51 and 52, so that the weight 30 can be efficiently vibrated in the lateral direction.

  4B, together with FIG. 3B, shows the principle of applying lateral acceleration to the weight 30 by the vibration of the vibration devices 51 and 52 that have received the drive signal of FIG. 4A. First, as described above, the vibration device 51 receives a positive pulse drive signal and displaces the substrate 11 upward in the height direction at the installation position as shown in FIG. 3B. Along with this, the substrate 11 is distorted, and the side wall 21 of the housing 20 supported by the substrate 11 is displaced upward in the height direction. At this time, the weight 30 is pulled by the side wall 21 via the beam members 31 and 32 and displaced in the upper right direction. That is, it is displaced upward in the height direction and simultaneously displaced in the right direction in the lateral direction. Next, the vibration device 51 receives the drive signal with zero amplitude, displaces the substrate 11 at the installation position, and returns it to the original position. Accordingly, the distortion of the substrate 11 returns, and the side wall 21 of the housing 20 is displaced downward in the height direction and returns to the original position. The weight 30 returns to the original neutral position.

  Next, as shown in FIG. 4B, the vibration device 52 receives a negative pulse drive signal and displaces the substrate 11 downward (in the direction of the white arrow) at the installation position. Along with this, the substrate 11 is distorted, and the side wall 22 of the housing 20 supported by the substrate 11 is displaced downward in the height direction (in the direction of the white arrow). At this time, the weight 30 is pulled by the side wall 22 via the beam members 33 and 34 and displaced in the lower left direction (the direction of the black arrow). That is, it is displaced downward in the height direction and simultaneously displaced in the left direction in the lateral direction. Next, the vibration device 52 receives the drive signal with zero amplitude, displaces the substrate 11 at the installation position, and returns it to the original position (position indicated by a dotted line in the drawing). Along with this, the distortion of the substrate 11 returns, and the side wall 22 of the housing 20 is displaced upward in the height direction and returns to the original position (position indicated by a dotted line in the figure). The weight 30 returns to the original neutral position (position indicated by a dotted line in the figure).

  The vibration devices 51 and 52 repeatedly receive drive vibrations having a positive pulse and a negative pulse that are shifted from each other by a half cycle, thereby displacing the substrate 11 upward and downward at the installation position, respectively. By vibrating, the side walls 21 and 22 of the housing 20 are vibrated in the height direction, whereby the weight 30 is repeatedly pulled alternately in the upper right and lower left directions, thereby adding the weight 30 in the height direction and also in the lateral direction. Vibrate.

  In addition, the weight 30 can be vibrated in the vertical direction in addition to the height direction by the vibration devices 52 and 54 based on the same principle. In such a case, the generation frequency of the pulse signal is equal to or substantially equal to the resonance frequency in the longitudinal direction of the weight 30 or an integer multiple thereof. Accordingly, the weight 30 vibrates in resonance with the vibrations of the vibration devices 52 and 54, and thus the weight 30 can be efficiently vibrated in the vertical direction.

  Further, the weight 30 can be vibrated in the horizontal direction by the vibration devices 51 and 52, and the weight 30 can be vibrated in the vertical direction by the vibration devices 53 and 54. FIG. 4C shows an example of a drive signal input to the vibrating devices 51 to 54 in such a case. The control unit 55 of the displacement generation unit 50 generates a pulse signal having a positive amplitude at a constant cycle, transmits this pulse signal as a drive signal to the vibration device 51, and has the same cycle as the drive signal of the vibration device 51, but half A pulse signal having a negative amplitude is generated by shifting the period, and this is transmitted as a drive signal to the vibration device 52, and in synchronization with the drive signal of the vibration device 51, but a period of any integral multiple (here, A pulse signal having a positive amplitude is generated as a drive signal and transmitted to the vibration device 53 as a drive signal, and has the same period as the drive signal of the vibration device 53, but half the drive signal of the vibration device 51. A pulse signal having a negative amplitude is generated by shifting the period, and this is transmitted to the vibration device 54 as a drive signal. It is assumed that the resonance frequency in the horizontal direction of the weight 30 is equal to the resonance frequency in the vertical direction.

  In the above example, the driving signal is in reverse phase with respect to the vibration devices 51 and 52, reverse phase with respect to the vibration devices 53 and 54, and in phase with respect to the vibration devices 51 and 52 and the vibration devices 53 and 54. However, the present invention is not limited thereto, and may be in phase with respect to the vibration devices 51 and 52, in phase with the vibration devices 53 and 54, and opposite in phase with respect to the vibration devices 51 and 52 and the vibration devices 53 and 54. . Moreover, it is good also as an in-phase with respect to the vibration devices 51-54.

  In addition, the vibration to the weight 30 by the vibration devices 51 to 54 is not limited to the above-described mode, and the pulse height, width, and period of the drive signal are arbitrarily changed, and the drive signals of the vibration devices 51 to 54 are changed. It can be provided in various ways, such as arbitrarily changing the synchronization.

  5A and 5B show a configuration of an acceleration sensor device 110 according to a modification. Here, FIG. 5A is a cross-sectional view with respect to the reference line AA in FIG. 5B, and shows the configuration of the acceleration sensor device 110 from the top. FIG. 5B is a cross-sectional view with respect to the reference line BB in FIG. 5A and shows the configuration of the acceleration sensor device 110 from the side. Of the constituent parts of the acceleration sensor device 110, those corresponding to the constituent parts of the acceleration sensor device 100 described above are given the same reference numerals. The acceleration sensor device 110 includes a base body 10, a weight 30, a detection unit 40, and a displacement generation unit 50. The configuration of the acceleration sensor device 110 is different from the above-described acceleration sensor device 100 only in the installation positions of the vibration devices 51 to 54 included in the displacement generation unit 50.

  The vibration devices 51 to 54 are respectively installed on the top plate 25 located immediately above the center of the side walls 21 to 24 constituting the housing 20. Thereby, the displacement generating unit 50 displaces the side walls 21 to 24 of the housing 20 in the height direction by the vibration devices 51 to 54, so that the weight 30 in the housing 20 is not only in the height direction, It can be displaced indirectly in different directions, i.e. longitudinal and transverse.

  Note that the vibration devices 51 to 54 are not limited to being installed on the housing 20, and may be installed on the substrate 11 to support the lower surface of the housing 20. In such a case, the vibration devices 51 to 54 support the center of the lower surface of the side walls 21 to 24 constituting the housing 20 or the lower surface of the corner of the housing 20 (frame body composed of the side walls 21 to 24), respectively. May be. The vibration devices 51 to 54 displace the side walls 21 to 24 of the housing 20 in the height direction, so that the weight 30 in the housing 20 is not only in the height direction, but also in different directions, that is, the vertical direction and the horizontal direction. Can be indirectly displaced.

  FIG. 6 shows a configuration of a structural health monitoring system 200 according to an embodiment. The structural health monitoring system 200 is a system for diagnosing the structural performance of the building 101, and includes a plurality of acceleration sensor devices 100 and a monitoring device 210.

  The plurality of acceleration sensor devices 100 are embedded in a plurality of locations of the building 101, for example, the ground, a lower floor (for example, the first floor), and a higher floor (for example, the uppermost floor). For high-rise buildings, it is also provided on one or more middle floors.

  The monitoring device 210 is a device that monitors the state of the building 101 and includes a server 211 and a calculator 212.

  The server 211 is connected to the plurality of acceleration sensor devices 100 by wire or wirelessly, and the acceleration data output from the detection unit 40 included in each of the acceleration sensor devices 100 and the diagnosis result output from the diagnosis unit 67 are regularly or periodically transmitted. To collect.

  The calculator 212 diagnoses the structural performance of the building 101 based on the acceleration data collected by the server 211. For example, the computing unit 212 periodically analyzes acceleration data to calculate the resonance frequency and / or resonance mode of the building 101, and diagnoses the structural performance of the building from its secular change. Further, the calculator 212 analyzes the acceleration data, calculates the displacement of the hierarchy in which each of the plurality of acceleration sensor devices 100 is provided, and diagnoses the structural performance of the building from its secular change.

  In addition, the calculator 212 outputs a diagnosis result such as displaying normality or abnormality of the acceleration sensor device 100 to the user or transmitting it to a host device. In the diagnosis by the calculator 212, an instruction to vibrate the vibration devices 51 to 54 may be output from the server 211 or the calculator 212 to the displacement generators 50 of the plurality of acceleration sensor devices 100. The vibrating devices 51 to 54 may be configured to vibrate themselves periodically.

  In the structural health monitoring system 200, the acceleration sensor device 110 according to the modified example may be adopted instead of the acceleration sensor device 100.

  In the acceleration sensor device 100 of the present embodiment, the vibration devices 51 to 54 of the displacement generation unit 50 are installed on the substrate 11 separately from the housing 20 on the right side, left side, back, and front, respectively. Not limited to this, the vibration devices 51 to 54 may be installed on the substrates 11 on one side and the other side in the uniaxial direction and on one side and the other side in the direction intersecting the uniaxial direction with respect to the housing 20. . You may install in the vicinity of the corner | angular part of the housing | casing 20 (frame comprised from the side walls 21-24). Further, in the acceleration sensor device 110 according to the modification, the vibration devices 51 to 54 are respectively installed on the top plate 25 positioned immediately above the center of the side walls 21 to 24 constituting the housing 20, but the present invention is not limited thereto. The vibration devices 51 to 54 are installed on the top plate 25 immediately above the side walls 21 to 24 on one side and the other side in the uniaxial direction with respect to the weight 30 and on the one side and the other side in the direction crossing the uniaxial direction. May be. You may install on the top plate 25 just above the corner | angular part of the housing | casing 20 (frame comprised from the side walls 21-24).

  The base body 10, the weight 30, the detection unit 40, and the displacement generation unit 50 may be packaged as an acceleration sensor unit. Note that the function of the diagnosis unit 67 is not provided in each acceleration sensor device 100, and the external server 211 and the calculator 212 may fulfill this function.

  FIG. 7 shows a configuration of a monitoring system 300 according to another embodiment. The monitoring system 300 aims to make it possible to diagnose the structural performance of a building using an acceleration sensor having a self-diagnosis function and to collectively manage the results of the self-diagnosis of the acceleration sensor. As an example, the monitoring system 300 is a structural health monitoring system that diagnoses the structural performance of a building 101 built at a plurality of sites (sites C1 and C2 as an example), and includes a plurality of acceleration sensor devices 100 and a plurality of analyzes. A device 103 and a monitoring device 310 are provided.

  The plurality of acceleration sensor devices 100, the plurality of analysis devices 103, and the monitoring device 310 can communicate with each other via a wired or wireless network 301 such as a local area network (LAN), a wide area network (WAN), or the Internet. Connected.

  The plurality of acceleration sensor devices 100 may be one or more, for example, the ground, the lower floor (for example, the first floor), and, for each of the buildings 101 at the sites C1 and C2, as an example, for at least one site. It is installed on a higher floor (for example, the top floor). For high-rise buildings, it is also provided on one or more middle floors. In addition, the number of the acceleration sensor apparatuses 100 installed may differ for every building of a different site. In addition, for a low-rise building such as a detached house, one may be installed on the lower floor (for example, the first floor).

  The plurality of acceleration sensor devices 100 are connected to the network 301 and the analysis device 103 via the hub 102 for each of the sites C1 and C2. Note that the plurality of acceleration sensor devices 100 may be directly connected to the network 301 and / or the analysis device 103 without using the hub 102.

  The plurality of analysis devices 103 are devices that analyze the state of the building 101. A plurality of analysis devices 103 are installed in each of the sites C1 and C2 corresponding to each of the plurality of buildings 101, and at least one acceleration sensor device installed in the building 101 in the site via the hub 102. 100 and the network 301 are connected. Each of the plurality of analysis devices 103 receives detection results such as acceleration data from the acceleration sensor device 100 in the same site, and uses this to analyze the state of the building 101 in the same site. The details of the analysis may be the same as the diagnosis of the structural performance of the building 101 by the calculator 212 described above. The plurality of analysis devices 103 transmit the analysis result to the monitoring device 310 described later.

  The monitoring device 310 is a device that monitors the state of the building 101 in each site using a plurality of acceleration sensor devices 100. The monitoring device 310 is installed in one of the buildings 101 in the sites C1 and C2 or a management center that is a different building (in this example, installed in a different building (not shown)). Suppose). The monitoring device 310 includes a diagnosis instruction unit 311, a collection unit 321, a storage unit 322, an analysis unit 323, and a structure diagnosis unit 324.

  The diagnosis instruction unit 311 instructs the execution of diagnosis processing to each of the plurality of acceleration sensor devices 100 installed in the building 101 in each site via the network 301. Thereby, each of the diagnosis units 67 included in the plurality of acceleration sensor devices 100 performs self-diagnosis as to whether or not it is operating normally by detecting acceleration by self-driving. The details of the self-diagnosis by the diagnosis unit 67 are as described above, and the function of the diagnosis unit 67 may be performed by the external analysis device 103 or the monitoring device 310.

  The diagnosis instruction unit 311 may periodically instruct the plurality of acceleration sensor devices 100 to execute diagnosis processing, or may arbitrarily instruct in an emergency such as a disaster. The diagnosis instruction unit 311 may operate in response to an instruction from the structure diagnosis unit 324, for example. A configuration in which a plurality of acceleration sensor devices 100 voluntarily (for example, periodically) execute a diagnostic process and transmit the result to the collecting unit 321 even if the diagnostic instruction unit 311 does not instruct the execution of the diagnostic process. It is good.

  The collection unit 321 collects acceleration data and diagnosis results output from the plurality of acceleration sensor devices 100 installed in the building 101 in each site via the network 301. The collection unit 321 collects acceleration data in synchronization from at least a plurality of acceleration sensor devices 100 installed in the same building 101.

  Note that the collection unit 321 may independently collect acceleration data and diagnosis results from the plurality of acceleration sensor devices 100. For example, the collection unit 321 may collect acceleration data periodically, and may collect diagnosis results when a plurality of acceleration sensor devices 100 perform self-diagnosis upon receiving an instruction from the diagnosis instruction unit 311. Further, when the diagnosis instruction unit 311 arbitrarily instructs execution of diagnosis processing in an emergency such as a disaster, the collection unit 321 collects diagnosis results from the plurality of acceleration sensor devices 100 and thereafter periodically or Optionally, acceleration data may be collected.

  The storage unit 322 determines whether each of the plurality of acceleration sensor devices 100 is normal according to the diagnosis result of the plurality of acceleration sensor devices 100 together with the acceleration data of the plurality of acceleration sensor devices 100 collected by the collection unit 321. The indicated sensor status is stored. Here, the sensor status indicates that, when a diagnosis result in one acceleration sensor device among the plurality of acceleration sensor devices 100 is defective, the one acceleration sensor device is abnormal.

  Instead of or together with this, if the sensor status cannot receive a diagnosis result in one of the plurality of acceleration sensor devices 100, it indicates that the one acceleration sensor device is abnormal. Also good. As a result, even when the acceleration sensor device 100 is damaged due to an earthquake or aftershock and communication is interrupted, the sensor status can be processed as abnormal. In addition to “normal” and “abnormal”, “communication disruption” may be created as a flag, and “communication disruption” data may be rejected from the analysis of the analysis unit 323 in the same manner as “abnormal”.

  The storage unit 322 is associated with each of the plurality of acceleration sensor devices 100 (corresponding to the identification ID of each acceleration sensor), building information indicating the building in which each acceleration sensor device is installed, and the inside of the building Installation position information indicating the installation position of each acceleration sensor device, history information of detection results by each acceleration sensor, calibration data for calibrating each acceleration sensor device, condition data such as years of use and models of each acceleration sensor, etc. May be stored. Thereby, for example, the building in which the acceleration sensor device 100 is installed is specified from the building information, the installation position of the acceleration sensor device 100 is specified from the installation position information, and the building 101 by the analysis unit 323 described later together with the information. It is possible to output the analysis result of the state. Further, the abnormality of the acceleration sensor device 100 can be diagnosed by comparing the detection result of each acceleration sensor 100 with the stored history information of the past detection result. In addition, when acceleration data output from the plurality of acceleration sensor devices 100 includes an error, the acceleration sensor device 100 is always calibrated using the calibration data, so that a plurality of buildings using the plurality of acceleration sensor devices 100 is always used. 101 status can be monitored. Furthermore, it is possible to perform collective management by associating condition data such as years of use and models with an abnormality flag.

  The analysis unit 323 analyzes each state of the plurality of buildings 101 using the detection results obtained by the plurality of acceleration sensor devices 100. Here, the analysis unit 323 confirms the sensor status stored in the storage unit 322, and uses only the detection result of the acceleration sensor device 100 that is normal. Thereby, the state of a plurality of buildings 101 can be analyzed correctly, without using the detection result of acceleration sensor device 100 in an abnormal state. The details of the state analysis of the building 101 by the analysis unit 323 may be the same as the diagnosis of the structural performance of the building 101 by the calculator 212 described above.

  The structure diagnosis unit 324 diagnoses each state of the plurality of buildings 101 based on the analysis result of the analysis unit 323, and outputs the result. For example, the structural diagnosis unit 324 determines that the rigidity of the building 101 is lower than the standard from the change in the resonance frequency and / or resonance mode of the building 101, and the displacement of the layer where the acceleration sensor device 100 is installed exceeds the standard. If so, the building 101 is diagnosed as being in a dangerous state.

  The structural diagnosis unit 324 is not limited to the analysis result of the analysis unit 323, and instead of or together with this, the structural diagnosis unit 324 is constructed from a plurality of analysis devices 103 provided at each site corresponding to each of the plurality of buildings 101. You may collect the analysis result of the state of the thing 101, and may diagnose each state of the some building 101 based on this.

  Note that the monitoring device 310 may include an uninterruptible power supply (not shown) and receive power supply using the uninterruptible power supply. Moreover, it is good to provide an uninterruptible power supply not only in the monitoring apparatus 310 of the management center which becomes a disaster prevention base and centrally manages the information of each site (building 101) but also in the sites C1 and C2. As a result, the monitoring device 310 and the devices at the sites C1 and C2 can be operated even during a power failure due to a disaster or the like.

  FIG. 8 shows the procedure of the monitoring method in the monitoring system 300.

  For example, when the diagnosis instruction unit 311 instructs the plurality of acceleration sensor devices 100 installed in the buildings 101 in the sites C1 and C2 to execute diagnosis processing (determination “Y” in step S1), Each of the plurality of acceleration sensor devices 100 installed in the building 101 detects self-driven acceleration (step S2), and diagnoses whether or not it is operating normally based on the acceleration data of each acceleration sensor device 100. (Step S3).

  For example, the collection unit 321 included in the monitoring device 310 collects the diagnosis results of the plurality of acceleration sensor devices 100 (step S4). Although the central management by the monitoring device 310 of the management center is intended here, the diagnosis result may be collected for each site, the sensor status may be managed, and the structural performance diagnosis described later may be performed. Good.

  For example, the sensor statuses of the plurality of acceleration sensor devices 100 in the storage unit 322 are rewritten in accordance with the collected diagnosis results of the plurality of acceleration sensor devices 100 (step S5).

  When there is no instruction to start the diagnosis process (judgment “N” in step S1) or after the end of the diagnosis process (steps S2 to S5), when diagnosing a building for earthquakes, aftershocks, constant tremors, etc. (step (S6: “Y”), the analysis unit 323 performs analysis based on the acceleration data whose sensor status is “normal”, and the structural diagnosis unit 324 performs the structural performance diagnosis of each building and outputs it (step S7). ). If the building is not diagnosed (judgment “N” in step S6), the process returns to step S1.

  That is, the maximum acceleration and the maximum interlayer deformation angle (the twice integrated value of the acceleration detection value) are calculated, and the decrease in rigidity is calculated from changes in the natural frequency and mode (amplitude shape when vibrating at the natural frequency). As data at the time of data acquisition, data with an abnormal sensor status is removed, and only “normal” data is used to calculate these data. As a result, the accuracy of the diagnostic result of the structural performance can be improved, and errors due to failure to acquire damaged acceleration sensor data can be eliminated.

  Thereafter, when the monitoring is not stopped (determination “N” in step S8), the process returns to step S1. If the monitoring is to be stopped (determination “Y” in step S8), the process ends.

  The monitoring system 300 having the above-described configuration makes it possible to centrally manage each state of the plurality of buildings 101. For example, by diagnosing the structural performance of each of the plurality of buildings 101 over time, it is possible to determine an appropriate timing for the earthquake-proofing work and the repair work.

  In the monitoring system 300 according to the present embodiment, a plurality of acceleration sensor devices installed in the two buildings 101 so as to diagnose the structural performance of the two buildings 101 respectively constructed at the two sites C1 and C2. Although the system is constructed including 100, the number of the buildings 101 is not limited to 2, and the system is constructed including a plurality of acceleration sensor devices 100 installed in a plurality of buildings respectively constructed at three or more sites. Then, the structural performance of the plurality of buildings 101 may be diagnosed.

  In the monitoring system 300, the monitoring devices 310 may be installed at a plurality of different sites, respectively, and the state of the plurality of buildings 101 may be redundantly diagnosed by the plurality of monitoring devices 310. Here, the plurality of different sites may be remote sites such as Tokyo and Osaka. The monitoring device 310 may be constructed as a cloud computer (or distributed computer). That is, the diagnosis instruction unit 311, the collection unit 321, the storage unit 322, the analysis unit 323, and the structural diagnosis unit 324 included in the monitoring device 310 may be constructed by a plurality of devices provided at different sites. Moreover, the diagnosis of the state of the plurality of buildings 101 may be performed synchronously, or may be performed for each building 101 (that is, for each site).

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

  The order of execution of each process such as operations, procedures, steps, and stages in the apparatus, system, program, and method shown in the claims, the description, and the drawings is particularly “before” or “prior to”. It should be noted that the output can be realized in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flow in the claims, the description, and the drawings, even if it is described using “first”, “next”, etc. for convenience, it means that it is essential to carry out in this order. It is not a thing.

  DESCRIPTION OF SYMBOLS 10 ... Base | substrate, 11 ... Board | substrate, 20 ... Housing | casing, 20a ... Internal space, 21-24 ... Side wall, 25 ... Top plate, 31-34 ... Beam member, 40 ... Detection part, 41-46 ... Electrode pair, 41a- 46a, 41b to 46b ... Electrodes, 50 ... Displacement generators, 51-54 ... Vibration devices, 55 ... Control units, 60 ... Signal processing units, 61X, 61Y, 61Z ... Amplifiers, 62X, 62Y, 62Z ... Filters, 63X, 63Y, 63Z ... AD converter, 64 ... arithmetic unit, 65 ... memory, 66 ... interface, 67 ... diagnostic unit, 100, 110 ... acceleration sensor device, 101 ... building, 102 ... hub, 103 ... analysis device, 200, 300 ... monitoring system 210 ... monitoring device 211 ... server 212 ... calculator 301 ... network 310 ... monitoring device 311 ... diagnosis instruction unit 321 ... collection unit, 322 ... storage unit, 323 ... analysis unit, 324 ... structure diagnostic unit.

Claims (20)

A plurality of acceleration sensor devices installed in at least one building , each having a diagnostic function for detecting self-driven acceleration ; and
Monitoring the building using the plurality of acceleration sensor devices, and collecting a diagnostic result of the plurality of acceleration sensor devices ;
With
Each of the plurality of acceleration sensor devices has a direction different from the first direction of a weight capable of displacing the installation position in the first direction by a displacement generation unit provided at the installation position in the base. Is displaced at a frequency equal to the resonance frequency or an integer multiple thereof,
Monitoring system.   The monitoring system according to claim 1, wherein at least one of the plurality of acceleration sensor devices is installed in each of the plurality of buildings.   The monitoring system according to claim 2, wherein the monitoring device is installed in a management center that is one of the plurality of buildings or a building different from the plurality of buildings. Each of the plurality of acceleration sensor devices includes:
The substrate;
The weight;
A detection unit for detecting displacement of the weight with respect to the base;
A self-diagnosis unit for diagnosing the acceleration sensor device based on a detection result of the detection unit accompanying the displacement of the weight with respect to the base;
The monitoring system according to claim 2 or 3. Wherein each of the acceleration sensor device, the installation position of the base body is displaced in a first direction, wherein with the displacement generating unit to generate a different direction displacement between the first direction with respect to the weight Item 5. The monitoring system according to Item 4. The displacement generating unit, the monitoring system according to claim 5 which the installation position before Symbol substrate is displaced in the first direction, thereby indirectly displacing the weight.   The displacement generation unit is provided at an installation position different from the weight in the horizontal direction of the base body, and the installation position is displaced in the first direction including a component perpendicular to the surface direction of the base body. 6. The monitoring system according to 6.   The monitoring system according to any one of claims 2 to 7, wherein the monitoring device includes a diagnosis instruction unit that instructs each of the plurality of acceleration sensor devices to execute a diagnosis process. The monitoring device includes:
A collection unit for collecting diagnostic results of the plurality of acceleration sensor devices;
A storage unit that stores a sensor status indicating whether each of the plurality of acceleration sensor devices is normal according to a diagnosis result of the plurality of acceleration sensor devices;
An analysis unit that analyzes a state of each of the plurality of buildings using a detection result from an acceleration sensor device in which a sensor status stored in the storage unit is normal among detection results of the plurality of acceleration sensor devices; The monitoring system according to claim 2, comprising:   The storage unit stores a sensor status indicating that the one acceleration sensor device is abnormal when a diagnosis result in one acceleration sensor device among the plurality of acceleration sensor devices is defective. The monitoring system described.   The said memory | storage part memorize | stores the sensor status which shows that the said one acceleration sensor apparatus is abnormal, when the diagnostic result in one acceleration sensor apparatus cannot be received among these acceleration sensor apparatuses. The monitoring system described in 1.   The storage unit is associated with each of the plurality of acceleration sensor devices, building information indicating a building in which each acceleration sensor device is installed, installation position information indicating an installation position of each acceleration sensor device in the building, The monitoring system according to any one of claims 9 to 11, wherein at least one of history information of detection results by the acceleration sensors is stored. Of the plurality of buildings, provided corresponding to a first building, among the plurality of acceleration sensor devices, the detection result by at least one acceleration sensor device installed in the first building is used. An analysis device for analyzing the state of the first building;
The monitoring system according to any one of claims 2 to 8, wherein the monitoring device collects the state of the first building from the analysis device. Each of a plurality of acceleration sensor devices installed in at least one building detects a self-driven acceleration, and a diagnosis stage,
A monitoring device for monitoring the building using the plurality of acceleration sensor devices, a collection stage for collecting diagnosis results of the plurality of acceleration sensor devices;
Equipped with a,
In the diagnosis stage, the first position of the weight that can displace the installation position in the first direction by the displacement generation unit provided at the installation position in each base of the plurality of acceleration sensor devices. Displacing at a frequency equal to a resonant frequency or an integer multiple thereof in a different direction,
Monitoring method.   The monitoring method according to claim 14, wherein at least one of the plurality of acceleration sensor devices is installed in each of the plurality of buildings.   The monitoring method according to claim 15, further comprising a diagnosis instruction step for instructing the plurality of acceleration sensor devices to execute a diagnosis process. A substrate;
A weight displaceable with respect to the substrate;
A detection unit for detecting displacement of the weight with respect to the base;
Disposed on the base body, the installation position on the base body is displaced in a first direction at a frequency equal to a resonance frequency of the weight in a direction different from the first direction or an integer multiple thereof, and the first position relative to the weight. A displacement generator that generates displacement in a direction different from one direction;
An acceleration sensor device comprising:   The acceleration sensor device according to claim 17, wherein the displacement generator displaces the weight indirectly by displacing an installation position on the base body in the first direction.   The displacement generation unit is provided at an installation position different from the weight in the horizontal direction of the base body, and displaces the installation position in the first direction including a component perpendicular to the surface direction of the base body. 18. The acceleration sensor device according to 18. A plurality of the displacement generators provided at a plurality of installation positions in the base;
At least two displacement generation units of the plurality of displacement generation units displace at least two installation positions where the at least two displacement generation units are provided among the plurality of installation positions in the first direction at different timings. A control unit;
The acceleration sensor device according to claim 17, further comprising:

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