JP6141135B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus that cuts a workpiece with a cutting blade.

  Cutting comprising holding means for holding a workpiece, cutting means having a cutting blade for cutting the workpiece held by the holding means, and cutting feed means for relatively cutting and feeding the holding means and the cutting means. In the cutting means in the apparatus, the orientation of the spindle on which the cutting blade is mounted needs to be perpendicular to the direction in which the cutting feed means performs cutting feed.

  For this reason, a method is adopted in which the spindle housing that supports the spindle is fixed to a support portion such as a spindle holder with a screw, and the direction of the spindle is adjusted by loosening the screw and hitting the spindle unit with a hammer. Yes.

  Also, as a mechanism for adjusting the orientation of the spindle, Patent Document 1 describes a mechanism for changing the orientation of the spindle by an angle setting block, and Patent Document 2 describes positioning for fixing and fixing two members. A mechanism for adjusting the position by decentering the upper side and the lower side of the fixing member is described.

JP 2003-124155 A JP 2008-89156 A

  However, in the method of adjusting the direction of the spindle by hitting the spindle unit with a hammer, it is difficult to adjust the direction of the spindle correctly, and skill is required. Further, in the mechanism described in Patent Document 1, since the direction of the spindle is determined by the angle setting block, the direction of the spindle cannot be finely adjusted. Furthermore, in the mechanism described in Patent Document 2, the displacement of the positions of the two members is determined by the amount of eccentricity of the positioning and fixing member, and even if the positioning and fixing member is rotated, only the direction of deviation changes, Will not change. For this reason, it cannot be used for applications in which the orientation of the spindle is finely adjusted.

  The present invention has been considered in view of such problems, and an object of the present invention is to make it possible to easily adjust the orientation of a spindle on which a cutting blade is mounted in a cutting apparatus.

  A cutting apparatus according to the present invention includes a holding means for holding a workpiece, a spindle having a cutting blade mounted at a tip thereof, and a spindle housing that rotatably supports the spindle, and the holding means. A supporting means for supporting the cutting means so as to be able to cut into the workpiece held by the holding means, and the holding means and the supporting means in the X-axis direction parallel to the workpiece held by the holding means. The cutting feed means for relatively moving, and the holding means and the support means in the Y-axis direction parallel to the workpiece held by the holding means and perpendicular to the X-axis direction. Indexing feeding means for relatively moving; and notching feeding means for relatively moving the holding means and the supporting means in the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction; A cutting device provided with the spindle shaft The ging includes an attachment surface that abuts on the support means, a working hole of a circular hole provided on the attachment surface, and at least three screw holes provided on the attachment surface. A support plate that abuts on the mounting surface of the spindle housing; and an adjustment portion that adjusts a positional relationship between the support plate and the spindle housing. The adjustment portion is a cylindrical guide that can be rotated by an operation lever. And a working portion that is formed in a columnar shape around an axis parallel to the axis of the guide portion and different from the axis of the guide portion, and is connected to the guide portion and engages with the action hole. Includes at least three screw through-holes through which screws screwed into the respective screw holes of the spindle housing pass, and a guide hole that engages with the guide portion in an elliptical shape with the Y-axis direction as a longitudinal direction. And rotating the guide unit And by, with said support plate and mounting surface slides a screw screwed into one of the threaded holes as a fulcrum, thereby it is possible to adjust the orientation of the spindle.

  According to the cutting device of the present invention, the support plate and the mounting surface can be slid by operating the operation lever to rotate the guide portion, thereby easily adjusting the orientation of the spindle. be able to. For this reason, the spindle can be easily made perpendicular to the cutting feed direction.

The perspective view which shows the cutting device. The disassembled perspective view which shows a cutting means and a support means. The perspective view which shows another example of a guide part and an operation lever. The partially broken figure which shows the 1st example of the positional relationship of a cutting means and a support means. The partially broken figure which shows the 2nd example of the positional relationship of a cutting means and a support means. The partially broken figure which shows the 3rd example of the positional relationship of a cutting means and a support means. The partially broken figure which shows the 4th example of the positional relationship of a cutting means and a support means.

  A cutting apparatus 10 shown in FIG. 1 supports a holding means 11 that holds a workpiece, two cutting means 12a and 12b that cut the workpiece held by the holding means 11, and the cutting means 12a and 12b. Two supporting means 13a, 13b, a cutting feed means 14 for moving the holding means 11 in the ± X direction, two incision feeding means 15a, 15b for moving the supporting means 13a, 13b in the ± Z direction, Two index feeding means 16a and 16b for moving the cutting feed means 15a and 15b in the ± Y directions are provided. The X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are horizontal, and the Z axis is vertical.

  The holding means 11 sucks and holds a workpiece placed on a holding surface parallel to the XY plane with a suction source (not shown). The workpiece is, for example, a disk-shaped wafer.

  The cutting feed means 14 cuts and feeds the holding means 11 and the support means 13a and 13b relatively in the X-axis direction by moving the holding means 11 in the ± X direction. The cutting feed means 14 is configured such that the motor 141 rotates the screw shaft 142 parallel to the ± X direction, so that the moving base 145 engaged with the screw shaft 142 has two guide rails 143 and 144 parallel to the screw shaft 142. Are configured to move in the ± X directions. The holding means 11 is supported by the moving table 145 and moves in the ± X direction as the moving table 145 moves.

  The cutting and feeding means 15a cuts and feeds the holding means 11 and the supporting means 13a relatively in the Z-axis direction by moving the supporting means 13a in the ± Z direction. On the other hand, the cutting feed means 15b cuts and feeds the holding means 11 and the support means 13b relatively in the Z-axis direction by moving the support means 13b in the ± Z directions. Each cutting feed means 15a, 15b has two guide rails parallel to the screw shaft 152 so that the moving base 155 engaged with the screw shaft 152 is rotated by the motor 151 rotating the screw shaft 152 parallel to the ± Z direction. Guided by 153 and 154, it moves in the ± Z direction. The support means 13a and the cutting means 12a are cut and fed in the ± Z directions as the moving table 155 moves. Further, the support means 13b and the cutting means 12b are cut and fed in the ± Z directions as the moving table 155 moves.

  The indexing and feeding means 16a relatively feeds the holding means 11 and the supporting means 13a in the Y-axis direction by moving the cutting and feeding means 15a in the ± Y direction. On the other hand, the index feeding means 16b moves the cutting feed means 15b in the ± Y direction, thereby indexing and feeding the holding means 11 and the support means 13b relatively in the Y-axis direction. Each index feed means 16a, 16b has two guides parallel to the screw shaft 162 so that the moving table 165 engaged with the screw shaft 162 is rotated by the motor 161 rotating the screw shaft 162 parallel to the ± Y direction. Guided by the rails 163 and 164, it moves in the ± Y direction. The moving table 165 of the index feeding means 16a supports the cutting feed means 15a, and the cutting feed means 15a, the supporting means 13a, and the cutting means 12a move in the Y-axis direction of the moving table 165 of the index feeding means 16a. Accordingly, it is configured to move in the Y-axis direction. Similarly, the moving table 165 of the index feeding means 16b supports the cutting feed means 15b, and the cutting feed means 15b, the supporting means 13b, and the cutting means 12b are the Y-axis of the moving table 165 of the index feeding means 16b. It is configured to move in the Y-axis direction as the direction moves.

  As shown in FIG. 2, the cutting means 12 a includes a rotating spindle 21 and a spindle housing 22 that rotatably supports the spindle 21. A cutting blade 20 is mounted at the tip of the spindle 21 so that the surface direction is perpendicular to the rotation axis of the spindle 21, and the rotating cutting blade 20 is held by the holding means 11 shown in FIG. Cut by cutting into an object. The details of the cutting means 12b are the same as the cutting means 12a.

  A flat mounting surface 221 that is parallel to the rotation axis of the spindle 21 is provided on the upper portion (+ Z direction side) of the spindle housing 22. The attachment surface 221 contacts the support means 13a. The attachment surface 221 is provided with a cylindrical action hole 222 and four screw holes 223a to 223d.

  The support means 13a suspends and supports the cutting means 12a so as to be able to cut into the workpiece held by the holding means 11, and is supported in a + Z direction from the plate-like support plate 31 and the support plate 31. 31, a support column 32 that supports 31, an adjustment unit 33 that adjusts the positional relationship between the support plate 31 and the spindle housing 22, and four screws 34 a to 34 d that fix the support plate 31 and the spindle housing 22. .

  The support plate 31 includes four screw through holes 311a to 311d through which the screws 34a to 34d pass, a guide hole 312 that engages with the adjusting portion 33, and a bottom of the guide hole 312 to a support surface 314 (see FIG. 4). An adjustment through-hole 313 is provided.

  The support surface 314 is the lower surface (the surface on the −Z direction side) of the support plate 31, is parallel to the XY plane, and contacts the mounting surface 221 of the spindle housing 22. The screw through holes 311a to 311d are provided at positions corresponding to the screw holes 223a to 223d. The inner diameters of the screw through holes 311a to 311d are slightly larger than the diameters of the shaft portions of the screws 34a to 34d, and play is provided so that the positional relationship between the support plate 31 and the spindle housing 22 can be adjusted by the adjusting portion 33. Yes.

  The centers of gravity of the guide hole 312 and the adjustment through hole 313 are the same. The guide hole 312 is formed in an oval shape whose longitudinal direction is the ± Y direction. The “oval” means a shape in which a semicircle is coupled to two opposite sides of a rectangle. Further, the adjustment through hole 313 may be an oval shape whose longitudinal direction is the ± X direction, or a circular hole whose outer diameter is the outermost circumference of the ellipse with the center of gravity as the center. Is provided.

  The adjustment unit 33 includes a columnar action part 331, a columnar guide part 332 connected to the action part 331, and an operation lever 333 for rotating the guide part 332. The action portion 331 is inserted through the adjustment through hole 313 and the tip engages with the action hole 222. The diameter of the action part 331 is slightly smaller than the diameter of the action hole 222, and the action part 331 is rotatable in the action hole 222. The guide part 332 engages with the guide hole 312. The height of the guide portion 332 is substantially the same as the depth of the guide hole 312 or smaller than the depth of the guide hole 312. Thereby, when the guide portion 332 is inserted into the guide hole 312, the guide portion 332 does not protrude in the + Z direction of the support plate 31. The outer diameter of the guide portion 332 is larger than the outer diameter of the action portion 331 and slightly smaller than the diameter of the arc portion of the guide hole 312, and the guide portion 332 can be rotated and slid in the guide hole 312. .

  The bottom surface on the + Z direction side of the action portion 331 and the bottom surface on the −Z direction side of the guide portion 332 are connected. The central axis of the action part 331 is parallel to the central axis of the guide part 332, and is arranged at a position displaced from the central axis of the guide part 332 by a predetermined distance. The operation lever 333 is, for example, a hexagonal bar-shaped hexagon wrench bent into an L shape.

On the upper surface on the + Z direction side of the guide portion 332 exposed when the guide portion 332 is inserted into the guide hole 312, a hexagonal hole that fits the operation lever 333 is provided. Thereby, the operation lever 333 is detachably attached to the guide portion 332. By attaching the operation lever 333 to the guide portion 332 and the operator turning the operation lever 333, the guide portion 332 can be turned.
In addition, as shown in FIG. 3, when the height of the guide part 332a is formed higher than the depth of the guide hole 312a, the side surface 332b of the guide part 332a exposed when the guide part 332a is inserted into the guide hole 312a. An insertion hole 332c for inserting the operation lever 333a is provided, the operation lever 333a is inserted into the insertion hole 332c, and the operator rotates the guide portion 332a by the operation lever 333a as shown in FIGS. be able to.

The screws 34a to 34d fasten the cutting means 12a and the support means 13a so as not to rotate. The screw 34a is inserted into the screw through hole 311a and screwed into the screw hole 223a. The screw 34b is inserted into the screw through hole 311b and screwed into the screw hole 223b. The screw 34c is inserted into the screw through hole 311c and screwed into the screw hole 223c. The screw 34d is inserted through the screw through hole 311d and screwed into the screw hole 223d.
The details of the support means 13b are the same as those of the support means 13a, and the support means 13b supports the cutting means 12b so that it can be cut into the workpiece held by the holding means 11.

  The cutting blade 20 is mounted perpendicular to the rotation axis of the spindle 21, and the cutting feed means 14 cuts and feeds the holding means 11 in the ± X direction. Therefore, the rotation axis of the spindle 21 is perpendicular to the ± X direction. It is necessary to be. Since the support plate 31 is parallel to the XY plane and the mounting surface 221 that contacts the support plate 31 is parallel to the rotation axis of the spindle 21, the rotation axis of the spindle 21 is parallel to the XY plane. Therefore, the cutting means 12a is fixed to the support means 13a so that the rotation axis of the spindle 21 is perpendicular to the ± X direction in the XY plane.

  For example, the screws 34a to 34d are inserted into the screw through holes 311a to 311d, the tips of the screws 34a to 34d are screwed into the screw holes 223a to 223d, and the support plate 31 and the mounting surface 221 are brought into contact with each other. At this time, the screws 34a to 34c are temporarily tightened with a relatively small torque so that the support plate 31 and the mounting surface 221 can slide. The remaining one screw 34d is temporarily tightened with a torque larger than that of the other screws 34a to 34c in order to serve as a fulcrum for rotation.

  In this state, the direction of the rotation axis of the spindle 21 is measured. For example, not the cutting blade 20 but a dial gauge is attached to the tip of the spindle 21 at a position away from the rotation axis of the spindle 21, and the stretch is applied to the holding means 11 so that the longitudinal direction is parallel to the ± X direction. Hold the dial gauge probe in contact with the stretch. If the scale of the dial gauge does not change even when the spindle 21 is rotated, the rotation axis of the spindle 21 is perpendicular to the ± X direction.

  If the rotation axis of the spindle 21 is not perpendicular to the ± X direction, the direction of the rotation axis of the spindle 21 is adjusted by rotating the adjustment unit 33 so that the rotation axis of the spindle 21 is perpendicular to the ± X direction. . When the rotation axis of the spindle 21 is perpendicular to the ± X direction, the screws 34a to 34d are finally tightened with a predetermined torque, and the cutting means 12a and the support means 13a are fixed.

  As shown in FIG. 4, when the operation lever 333 is operated to rotate the guide portion 332 and the central axis of the action portion 331 is arranged in the −Y direction when viewed from the central axis of the guide portion 332, The action part 331 is located at the center of the adjustment through hole 313 in the ± X direction. Since the distal end of the action portion 331 is inserted into and engaged with the action hole 222, the action hole 222 is located at the center in the ± X direction of the adjustment through-hole 313.

  From the state shown in FIG. 4, as shown in FIG. 5, by operating the operation lever 333 clockwise, the guide portion 332 is rotated, and the central axis of the action portion 331 is set to the guide portion 332. When viewed in the −X direction as viewed from the central axis, the action portion 331 is positioned at the end of the adjustment through hole 313 in the −X direction. Since the tip of the action portion 331 is engaged with the action hole 222, the action hole 222 is positioned at the end of the adjustment through hole 313 in the −X direction, and the rotation shaft 211 is in the XY plane, as shown in FIG. It becomes the direction rotated counterclockwise rather than the state of.

  From the state shown in FIG. 5, as shown in FIG. 6, by operating the operation lever 333 to rotate clockwise, the guide portion 332 is further rotated, and the central axis of the action portion 331 is changed to the guide portion. When arranged in the + Y direction as viewed from the central axis of 332, the action portion 331 is located at the center in the ± X direction of the adjustment through-hole 313. Since the tip of the action portion 331 is engaged with the action hole 222, the action hole 222 is positioned at the center in the ± X direction of the adjustment through-hole 313, and the rotation shaft 211 is in the XY plane, as shown in FIG. Return to the same orientation as.

  From the state shown in FIG. 6, as shown in FIG. 7, by rotating the operation lever 333 clockwise, the guide portion 332 is further rotated, and the central axis of the action portion 331 is set to the guide portion. When arranged in the + X direction as viewed from the central axis of 332, the action portion 331 is positioned at the end of the adjustment through hole 313 in the + X direction. Since the tip of the action portion 331 is engaged with the action hole 222, the action hole 222 is located at the end in the + X direction of the adjustment through hole 313, and the rotation shaft 211 is located in the XY plane as shown in FIG. The direction turns clockwise from the state of FIG.

  Thus, by rotating the adjustment portion 33, the position of the working hole 222 can be moved in the ± X directions. In the example of FIGS. 4 to 7, the case where the adjustment unit 33 is rotated by 90 degrees has been described. However, if the direction in which the adjustment unit 33 is rotated is finely adjusted, the position of the working hole 222 is adjusted to the adjustment through hole. Since it can be arranged at an arbitrary position in the ± X direction of 313, the direction of the rotating shaft 211 can be adjusted to an arbitrary direction between the direction shown in FIG. 5 and the direction shown in FIG. .

  Further, by operating the operating lever 333 to rotate the guide portion 332, the support plate 31 and the mounting surface 221 can be slid, and thus the orientation of the spindle 21 can be easily performed without requiring skill. Can be fine-tuned. For this reason, it is easy to make the spindle 21 perpendicular to the cutting feed direction, and the time required for the adjustment work can be shortened.

  After the adjustment of the orientation of the spindle 21 is completed, if the operation lever 333 is left attached to the guide portion 332, the operation lever 333 may be moved by mistake, and the orientation of the spindle 21 may be changed. The lever 333 is removed from the guide part 332. Thereby, it is possible to prevent the operation lever 333 from being erroneously moved to change the direction of the spindle 21.

  The mounting surface 221 is provided not on the + Z direction side of the spindle housing 22 but on the −X direction side or the + X direction side, and accordingly, the support surface 314 of the support plate 31 is not parallel to the XY plane. Alternatively, it may be configured to be parallel to the YZ plane. In that case, the direction of the rotating shaft 211 of the spindle 21 can be adjusted in the YZ plane. For this reason, the angle at which the cutting blade 20 cuts into the workpiece can be adjusted. For example, the cutting blade 20 can be adjusted so as to cut perpendicularly to the workpiece.

  Further, the mounting surface 221 and the support surface 314 may have other arbitrary orientations. In that case, the direction of the rotating shaft 211 of the spindle 21 can be adjusted within a plane parallel to the support surface 314.

  The embodiment described above is an example, and the present invention is not limited to this. For example, you may replace the structure of the non-essential part with another structure as follows.

  The number of screws, screw holes, and screw through holes is not limited to four. In order to firmly fix the cutting means and the support means so as not to rotate, it is desirable to fix with three or more screws.

  In addition, the guide hole 312 does not need to be arranged at the center in the ± X direction of the support plate 31 and may be arranged at a position deviated in the + X direction or the −X direction. Furthermore, the guide hole 312 does not need to be disposed on the + Y direction side of the support plate, and may be configured to be disposed on the −Y direction side.

  In addition, the guide through hole 312 may pass through the support plate 31 without providing the adjustment through hole 313. Further, the guide hole 312 may be provided at a position closer to the support pillar 32. Since the operation lever 333 is detachable, the guide portion 332 can be rotated without the operation lever 333 interfering with the support column 21 even if the guide hole 312 is provided at a position close to the support column 32. The operation lever 333 may not be removable and may be configured to be fixed to the guide portion 332.

  The screw used as a fulcrum when adjusting the orientation of the spindle 21 may be any screw, but it is desirable that the screw be located in the ± Y direction as viewed from the guide hole 312. As the distance between the screw serving as the fulcrum and the guide hole 312 increases, the change in the orientation of the spindle 21 due to the movement of the action portion 331 becomes smaller, and fine adjustment becomes possible. Therefore, when the guide hole 312 is arranged on the + Y direction side of the support plate 31, it is desirable to use a screw that penetrates any one of the screw through holes provided on the −Y direction side as a fulcrum. When the guide hole 312 is disposed on the −Y direction side of the support plate 31, it is desirable to use a screw penetrating any one of the screw through holes provided on the + Y direction side as a fulcrum.

  The longitudinal direction of the guide hole 312 is not necessarily parallel to the ± Y direction. However, since the action part 331 of the adjustment part 33 moves in a direction perpendicular to the longitudinal direction of the guide hole 312, the longitudinal direction of the guide hole 312 is the direction of a straight line connecting the screw serving as the fulcrum and the guide hole 312. It is desirable that the orientation be close to.

  The number of adjustment units 33 is not limited to one and may be two or more. For example, guide holes are provided at two locations on the + Y direction side and the −Y direction side of the support plate 31, and action holes are provided at corresponding positions on the mounting surface 221. In this case, instead of using any one of the screws as a fulcrum, the direction of the spindle may be adjusted by rotating the other adjustment unit using the action unit of one adjustment unit as a fulcrum. .

10 cutting device, 11 holding means,
12a, 12b cutting means,
20 cutting blades, 21 spindles, 211 rotating shafts,
22 spindle housing, 221 mounting surface, 222 working hole,
223a to 223d screw holes,
13a, 13b support means,
31 support plate,
311a to 311d Screw through holes, 312 guide holes, 313 adjustment through holes,
314 support surface, 32 support pillar, 33 adjustment part, 331 action part, 332 guide part,
333 operation lever, 34a to 34d screw 14 cutting feed means,
141 Motor, 142 Screw shaft, 143, 144 Guide rail, 145 Moving table 15a, 15b Cutting feed means,
151 Motor, 152 Screw shaft, 153, 154 Guide rail, 155 Moving table 16a, 16b Index feed means,
161 Motor, 162 Screw shaft, 163, 164 Guide rail, 165 Moving table

Claims (1)

Holding means for holding the workpiece;
A cutting means comprising: a spindle on which a cutting blade is mounted at a tip; and a spindle housing that rotatably supports the spindle;
A support means for supporting the cutting means so as to be able to cut into the workpiece held by the holding means;
Cutting feed means for cutting and feeding the holding means and the support means relatively in the X-axis direction;
Indexing and feeding means for indexing and feeding the support means in the Y-axis direction orthogonal to the X-axis direction;
A cutting device comprising: cutting feed means for cutting and feeding the support means in the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction,
The spindle housing includes a mounting surface that abuts on the support means, a circular working hole provided in the mounting surface, and at least three screw holes provided in the mounting surface.
The support means includes a support plate that contacts the mounting surface of the spindle housing, and an adjustment unit that adjusts a positional relationship between the support plate and the spindle housing.
The adjustment portion is formed in a columnar shape around a cylindrical guide portion that can be rotated by an operating lever, and an axis that is parallel to the guide portion axis and different from the guide portion axis, and is connected to the guide portion. An action portion engaging with the action hole,
The support plate includes at least three screw through-holes through which screws to be screwed into the screw holes of the spindle housing, and a guide hole that engages with the guide portion in an elliptical shape having the Y-axis direction as a longitudinal direction. And comprising
A cutting device capable of adjusting the orientation of the spindle by rotating the guide portion so that the support plate and the mounting surface slide with a screw screwed into one of the screw holes as a fulcrum.

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