JP6139917B2 - Contact sensor, contact input device, and electronic device - Google Patents

Description

  The present invention relates to a contact sensor, a contact input device, and an electronic apparatus.

2. Description of the Related Art Conventionally, an input device is known in which a flexible touch panel is stacked on a planar pressure sensor so as to be in close contact with each other (see, for example, Patent Document 1).
Also, conventionally, when a plurality of pressure sensors are arranged on the lower surface of the touch panel and contact with the touch panel is detected, an input device that sets an operation mode using the output of the pressure sensor within a predetermined range from the position of the contact is provided. It is known (see, for example, Patent Document 2).

JP-A-5-61592 Japanese Patent No. 5043641

  By the way, in the input device according to the above-described prior art, a pressure sensor such as a resistance pressure-sensitive type or a capacitance detection type is used, and it is necessary to provide an electrode and electric wiring for detecting a contact position with respect to the touch panel in the vicinity of the touch panel. Arise. As a result, the structure in the vicinity of the touch panel becomes complicated, and there is a problem that structural restrictions increase. Furthermore, since the structure required for detecting the strength of the contact pressure on the touch panel is complicated, it is difficult to improve versatility by having various shapes and sizes.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a contact sensor, a contact input device, and an electronic apparatus that can detect a contact position and a contact pressure while preventing the structure from becoming complicated. It is said.

In order to solve the above problems and achieve the object, the contact sensor according to the first aspect of the present invention has a pressure transmission medium inside, and can transmit pressure fluctuation due to contact of an object to the pressure transmission medium. A hollow member (for example, the hollow member 101 in the embodiment), and at least one pressure fluctuation detection unit (for example, the inside of the hollow member or the hollow member that outputs a detection signal corresponding to the pressure fluctuation) Contact detection means (for example, the signal processing circuit 103 in the embodiment) that detects the contact position and the contact pressure of the object based on the pressure sensor 1) in the embodiment and the detection signal output from the pressure fluctuation detection unit. ), And the pressure fluctuation detection unit includes a main body (for example, main body 3 in the embodiment) having an opening (for example, the communication opening 11 in the embodiment) through which the pressure transmission medium can flow. The distal end portion (for example, the distal end portion 4b in the embodiment) is a free end and the base end portion (for example, the proximal end portion 4a in the embodiment) is supported by the main body portion in a cantilevered manner to block the opening. The cantilever (e.g., cantilever 4 in the embodiment) that is flexibly deformed according to the pressure fluctuation, and a displacement detection unit (e.g., displacement in the embodiment) that detects displacement according to the bending deformation of the cantilever Measuring means 5), and the contact detection means is based on a plurality of displacement magnitudes and timing differences of the cantilever detected by the displacement detection part of at least one of the pressure fluctuation detection parts, detecting a contact position and contact pressure of the object, comprising a plurality of the pressure fluctuation detecting unit disposed in the interior of the hollow member, the body portion of the pressure fluctuation detecting part, the cavity (eg For example, the cavity 10) according to the embodiment includes the opening of the main body portion that communicates the inside and the outside of the cavity, and the cantilever is bent and deformed according to a pressure difference between the inside and the outside of the cavity. The contact detection means is configured to detect the magnitude of the displacement of the plurality of cantilevers detected by the plurality of displacement detectors and the timing of the displacement between the plurality of cantilevers detected by the plurality of displacement detectors. The contact position and the contact pressure of the object are detected based on the difference, and the hollow member is formed in a plate shape and provided along the surface of the hollow member, and generates the pressure fluctuation according to the contact operation. The contact detection unit includes a possible flat contact operation unit (for example, the contact operation unit 211 in the embodiment), and includes at least three pressure fluctuation detection units having different arrangement positions. The means is based on the magnitude of the displacement of the three cantilevers detected by the displacement detector of the three pressure fluctuation detectors and the difference in timing of the displacement between the three cantilevers. A two-dimensional coordinate position of the contact position in the contact operation unit is detected.

Furthermore, a contact sensor according to a second aspect of the present invention includes a hollow member (for example, a hollow member in the embodiment) that has a pressure transmission medium therein and can transmit pressure fluctuation due to contact with an object to the pressure transmission medium. 101), at least one pressure fluctuation detection unit (for example, pressure sensor 1 in the embodiment) that is disposed inside the hollow member or inside the hollow member and outputs a detection signal corresponding to the pressure fluctuation, and the pressure Contact detection means (for example, the signal processing circuit 103 in the embodiment) that detects the contact position and the contact pressure of the object based on the detection signal output from the fluctuation detection unit, and the pressure fluctuation detection unit A body part (for example, body part 3 in the embodiment) having an opening (for example, the communication opening 11 in the embodiment) through which the pressure transmission medium can flow, and a tip part (for example, the tip part in the embodiment) b) is a free end and a base end portion (for example, the base end portion 4a in the embodiment) is arranged so as to close the opening in a state where it is supported in a cantilevered manner by the main body portion, and according to the pressure fluctuation A cantilever that bends and deforms (for example, the cantilever 4 in the embodiment), and a displacement detector that detects a displacement corresponding to the bending deformation of the cantilever (for example, the displacement measurement unit 5 in the embodiment). The detection means detects a contact position and a contact pressure of the object based on a difference in magnitude and timing of the plurality of displacements of the cantilever detected by the displacement detection unit of at least one of the pressure fluctuation detection units. , the hollow member which is formed in the opening (e.g., opening 111 in the embodiment) provided with a plurality of the pressure fluctuation detecting part disposed in said opening of said body portion, said hollow member The inside and the outside communicate with each other, the cantilever bends and deforms according to the pressure difference between the inside and the outside of the hollow member, and the contact detection means includes a plurality of the cantilevers detected by the plurality of displacement detection units. Detecting the contact position and the contact pressure of the object based on the magnitude of the displacement and the difference in timing of the displacement between the plurality of cantilevers detected by the plurality of displacement detectors , A planar contact operation part (for example, the contact operation part 211 in the embodiment) that is formed in a plate shape and is provided along the surface of the hollow member and capable of generating the pressure fluctuation according to the contact operation. , At least three pressure fluctuation detection units having different arrangement positions, and the contact detection means includes the three pressure detection units detected by the displacement detection units of the three pressure fluctuation detection units. Based on the magnitude of the displacement of the cantilever and the difference in timing of the displacement between the three cantilevers, a two-dimensional coordinate position of the contact position in the contact operation unit is detected.

Furthermore, in the contact sensor according to a third aspect of the present invention, the main body portion of the pressure fluctuation detection unit includes a cavity (for example, the cavity 10 in the embodiment) disposed outside the hollow member, The opening of the main body part communicates the inside of the cavity and the inside of the hollow member, and the cantilever is bent and deformed according to a pressure difference between the inside of the cavity and the inside of the hollow member.

Furthermore, in the contact sensor according to a fourth aspect of the present invention, the contact detection means includes the position of the cantilever having the largest displacement among the displacements of the plurality of cantilevers detected by the displacement detector or the The contact position of the object is detected based on the position of the cantilever with the earliest displacement response.

Furthermore, in the contact sensor according to the fifth aspect of the present invention, a hollow member (for example, the hollow member in the embodiment) that has a pressure transmission medium therein and can transmit pressure fluctuation due to contact of an object to the pressure transmission medium. 101), at least one pressure fluctuation detection unit (for example, pressure sensor 1 in the embodiment) that is disposed inside the hollow member or inside the hollow member and outputs a detection signal corresponding to the pressure fluctuation, and the pressure Contact detection means (for example, the signal processing circuit 103 in the embodiment) that detects the contact position and the contact pressure of the object based on the detection signal output from the fluctuation detection unit, and the pressure fluctuation detection unit A body part (for example, body part 3 in the embodiment) having an opening (for example, the communication opening 11 in the embodiment) through which the pressure transmission medium can flow, and a tip part (for example, the tip in the embodiment) 4b) is a free end and a base end portion (for example, the base end portion 4a in the embodiment) is disposed so as to close the opening in a cantilevered manner on the main body portion, and according to the pressure fluctuation A cantilever that bends and deforms (for example, the cantilever 4 in the embodiment), and a displacement detector that detects a displacement corresponding to the bending deformation of the cantilever (for example, the displacement measurement unit 5 in the embodiment). The detection means detects a contact position and a contact pressure of the object based on a difference in magnitude and timing of the plurality of displacements of the cantilever detected by the displacement detection unit of at least one of the pressure fluctuation detection units. , the hollow member is formed in an annular shape, provided with one of the pressure fluctuation detecting part arranged so as to close the circumferential direction inside the hollow member, the opening of the body portion, the pressure The first direction portion (for example, the first direction portion 113a in the embodiment) on the first direction side in the circumferential direction that is the distribution direction of the delivery medium and the second direction portion (for example, the first direction portion in the embodiment) The two-direction portion 113b), the cantilever bends and deforms according to the pressure difference between the first direction portion and the second direction portion, and the displacement detection portion includes the first direction and the second direction. Two displacements corresponding to two bending deformations of the cantilever due to the pressure fluctuation transmitted in the direction are detected, and the contact detection means detects the magnitude of the two displacements of the cantilever detected by the displacement detector. The contact position and the contact pressure of the object are detected based on the difference in height and timing.

Furthermore, in the contact sensor according to a sixth aspect of the present invention, the hollow member includes a dead area (for example, the dead area 112 in the embodiment) incapable of transmitting the pressure fluctuation to the pressure transmission medium, and the displacement The detection unit detects a plurality of displacements according to a plurality of bending deformations of the cantilever due to a plurality of pressure fluctuations caused by a plurality of pressure fluctuations caused by the contact movement of the object with respect to the hollow member across the insensitive region, and the contact detection The means detects the contact movement direction and the contact position of the object across the dead area based on the timings of the plurality of displacements of the cantilever detected by the displacement detector.

A contact input device according to a seventh aspect of the present invention includes a hollow member (for example, a hollow member in the embodiment) that has a pressure transmission medium therein and can transmit pressure fluctuation due to contact with an object to the pressure transmission medium. Member 101), at least one pressure fluctuation detection unit (for example, pressure sensor 1 in the embodiment) that is disposed inside the hollow member or inside the hollow member and outputs a detection signal corresponding to the pressure fluctuation; Contact detection means (for example, the signal processing circuit 103 in the embodiment) that detects the contact position and the contact pressure of the object based on the detection signal output from the pressure fluctuation detection unit, and the pressure fluctuation detection unit A main body (for example, main body 3 in the embodiment) having an opening (for example, the communication opening 11 in the embodiment) through which the pressure transmission medium can flow, and a tip (for example, the tip in the embodiment). b) is a free end and a base end portion (for example, the base end portion 4a in the embodiment) is arranged so as to close the opening in a state where it is supported in a cantilevered manner by the main body portion, and according to the pressure fluctuation A cantilever that bends and deforms (for example, the cantilever 4 in the embodiment), and a displacement detector that detects a displacement corresponding to the bending deformation of the cantilever (for example, the displacement measurement unit 5 in the embodiment). The detection means detects a contact position and a contact pressure of the object based on a difference in magnitude and timing of the plurality of displacements of the cantilever detected by the displacement detection unit of at least one of the pressure fluctuation detection units. A plurality of the pressure fluctuation detection units disposed inside the hollow member, and the main body of the pressure fluctuation detection unit includes a cavity (for example, the cavity 10 in the embodiment). The opening of the main body communicates the inside and the outside of the cavity, the cantilever bends and deforms according to a pressure difference between the inside and the outside of the cavity, and the contact detection means includes a plurality of contact detecting means. The contact of the object based on the magnitude of the displacement of the plurality of cantilevers detected by the displacement detector and the difference in timing of the displacement between the plurality of cantilevers detected by the plurality of displacement detectors The position and contact pressure are detected, and the hollow member is formed in a tubular shape, is provided along the longitudinal direction of the hollow member, can be elastically deformed by a pressing operation, and can generate the pressure fluctuation according to the pressing operation. A plurality of pressing operation portions (for example, keys of the keypad 201 in the embodiment) are provided, and the first and second end portions in the longitudinal direction of the hollow member are first and second ends. The pressure fluctuation detection unit, wherein the contact detection means has a magnitude of the displacement of the first and second cantilevers detected by the displacement detection unit of the first and second pressure fluctuation detection units. A contact sensor that detects which one of the plurality of pressing operation units is pressed based on the difference in timing of the displacement between the first and second cantilevers; An input signal output unit (for example, the signal processing circuit 103 in the embodiment) that outputs an input signal corresponding to the pressing unit detected by the contact detection unit.
A contact input device according to an eighth aspect of the present invention includes a hollow member (for example, a hollow member in the embodiment) that has a pressure transmission medium therein and can transmit pressure fluctuation due to contact with an object to the pressure transmission medium. Member 101), at least one pressure fluctuation detection unit (for example, pressure sensor 1 in the embodiment) that is disposed inside the hollow member or inside the hollow member and outputs a detection signal corresponding to the pressure fluctuation; Contact detection means (for example, the signal processing circuit 103 in the embodiment) that detects the contact position and the contact pressure of the object based on the detection signal output from the pressure fluctuation detection unit, and the pressure fluctuation detection unit A main body (for example, main body 3 in the embodiment) having an opening (for example, the communication opening 11 in the embodiment) through which the pressure transmission medium can flow, and a tip (for example, the tip in the embodiment). b) is a free end and a base end portion (for example, the base end portion 4a in the embodiment) is arranged so as to close the opening in a state where it is supported in a cantilevered manner by the main body portion, and according to the pressure fluctuation A cantilever that bends and deforms (for example, the cantilever 4 in the embodiment), and a displacement detector that detects a displacement corresponding to the bending deformation of the cantilever (for example, the displacement measurement unit 5 in the embodiment). The detection means detects a contact position and a contact pressure of the object based on a difference in magnitude and timing of the plurality of displacements of the cantilever detected by the displacement detection unit of at least one of the pressure fluctuation detection units. A plurality of the pressure fluctuation detection units disposed in an opening formed in the hollow member (for example, the opening 111 in the embodiment), and the opening of the main body portion includes the hollow member The inside and the outside communicate with each other, the cantilever bends and deforms according to the pressure difference between the inside and the outside of the hollow member, and the contact detection means includes a plurality of the cantilevers detected by the plurality of displacement detection units. Detecting the contact position and the contact pressure of the object based on the magnitude of the displacement and the difference in timing of the displacement between the plurality of cantilevers detected by the plurality of displacement detectors, A plurality of pressing operation parts (for example, in the embodiment) that are formed along the longitudinal direction of the hollow member, can be elastically deformed by a pressing operation, and can generate the pressure fluctuation according to the pressing operation. A key of the keypad 201), the first end portion and the second end portion in the longitudinal direction of the hollow member, the first and second pressure fluctuation detection units, , The magnitude of the displacement of the first and second cantilevers detected by the displacement detector of the first and second pressure fluctuation detectors, and the displacement between the first and second cantilevers And a contact sensor for detecting which one of the plurality of pressing operation units is pressed, and the pressing unit detected by the contact detection unit based on the timing difference between An input signal output unit that outputs an input signal (for example, the signal processing circuit 103 in the embodiment).
In the contact input device according to the ninth aspect of the present invention, the main body of the pressure fluctuation detection unit includes a cavity (for example, the cavity 10 in the embodiment) disposed outside the hollow member. The opening of the main body communicates the inside of the cavity and the inside of the hollow member, and the cantilever is bent and deformed according to a pressure difference between the inside of the cavity and the inside of the hollow member.

According to a tenth aspect of the present invention, there is provided a contact input device according to the contact sensor according to any one of the first to third aspects and the contact position detected by the contact detection means. An input signal output unit (for example, the signal processing circuit 103 in the embodiment) that outputs the input signal.

An electronic apparatus according to an eleventh aspect of the present invention includes the contact input device according to any one of the seventh to tenth aspects .

  According to the contact sensor of the present invention, the hollow member can be formed to have various shapes and sizes, and it is possible to easily reduce the weight and the thickness, and to improve versatility. Furthermore, it is not necessary to provide an electrode or electrical wiring in the vicinity of the contact position of the object, and it is not necessary to provide a special seal structure for liquid or the like, so that the structure can be prevented from becoming complicated. Furthermore, the light transmittance of the material forming the hollow member and the substance constituting the pressure transmission medium can be appropriately set, and a desired light transmittance can be easily ensured. Furthermore, the contact position and the contact pressure can be detected at the same time without the need to provide additional special structures or components. Furthermore, no voltage application from the outside is required, and an increase in power consumption can be prevented.

According to the contact input device of the present invention, it is possible to easily reduce the weight and thickness while preventing the structure from becoming complicated, and to improve versatility.
Furthermore, according to the contact input device according to the tenth aspect of the present invention, it is possible to distinguish and detect operations on the plurality of pressing operation units with one tubular hollow member, and for example, a sensor is individually provided for each of the plurality of pressing operation units. The structure can be simplified as compared with the case of providing.
Further, according to the contact input device according to the eleventh aspect of the present invention, the two-dimensional coordinate position can be detected with high accuracy regardless of the size of the plate-like hollow member, and versatility is achieved by the hollow members having various sizes. Can be improved.

According to the electronic device of the present invention, it is possible to easily reduce the weight and thickness while preventing the structure from becoming complicated, and to improve versatility.
Furthermore, according to the electronic apparatus including the contact input device according to the seventh to ninth inventions , it is possible to distinguish and detect operations on a plurality of pressing operation portions by one tubular hollow member, for example, a plurality of The structure can be simplified as compared with the case where a sensor is provided for each of the pressing operation units.
Furthermore, according to the electronic apparatus including the contact input device according to the tenth aspect of the invention, the two-dimensional coordinate position can be accurately detected regardless of the size of the plate-like hollow member, and various sizes of electronic devices can be detected. A device can be easily formed, and versatility can be improved.

It is a block diagram of the contact sensor which concerns on embodiment of this invention. It is a top view which shows the structure of the pressure sensor which concerns on embodiment of this invention. It is sectional drawing along the AA line shown in FIG. It is a figure which shows an example of the pressure fluctuation input into the pressure sensor which concerns on embodiment of this invention, and a sensor output. It is a figure which shows an example of operation | movement of the pressure sensor which concerns on embodiment of this invention. It is a figure which shows an example of the sensor output (output signal) of two pressure sensors of the contact sensor which concerns on embodiment of this invention. It is a block diagram of the contact sensor which concerns on the 1st modification of embodiment of this invention. It is a block diagram of the contact sensor which concerns on the 2nd modification of embodiment of this invention. It is a block diagram of the contact sensor which concerns on the 3rd modification of embodiment of this invention. It is a block diagram of the contact sensor which concerns on the 4th modification of embodiment of this invention. It is a figure which shows an example of the sensor output (output signal) of two pressure sensors of the contact sensor which concerns on the 4th modification of embodiment of this invention. It is a block diagram of the contact sensor which concerns on the 5th modification of embodiment of this invention. It is a figure which shows an example of the sensor output (output signal) of three pressure sensors of the contact sensor which concerns on the 5th modification of embodiment of this invention. It is a block diagram of the contact sensor which concerns on the 6th modification of embodiment of this invention. It is a figure which shows an example of the sensor output (output signal) of the pressure sensor of the contact sensor which concerns on the 6th modification of embodiment of this invention, and the output of a 1st and 2nd comparator. It is a figure which shows an example of the sensor output (output signal) of the pressure sensor of the contact sensor which concerns on the 6th modification of embodiment of this invention, and the output of a 1st and 2nd comparator. It is a block diagram of the contact sensor which concerns on the 7th modification of embodiment of this invention. It is a block diagram of the contact sensor which concerns on the 7th modification of embodiment of this invention. It is a block diagram of the contact input device which concerns on embodiment of this invention. It is a block diagram of the contact input device which concerns on embodiment of this invention.

(Contact sensor)
Hereinafter, a contact sensor according to an embodiment of the present invention will be described with reference to the accompanying drawings.
FIG. 1 is a configuration diagram of a contact sensor 100 according to an embodiment of the present invention. FIG. 2 is a plan view showing the configuration of the pressure sensor 1 according to the first embodiment of the present invention. 3 is a cross-sectional view taken along line AA shown in FIG.

  As shown in FIG. 1, the contact sensor 100 of this embodiment is a sensor which detects the contact position and contact pressure of an object. The contact sensor 100 includes, for example, at least two first pressure sensors 1 (1a) and second pressure sensors 1 (1b), a hollow member 101, a detection circuit 102, and a signal processing circuit 103. Yes.

(Configuration of pressure sensor)
As shown in FIGS. 2 and 3, the pressure sensor 1 of the present embodiment is a sensor that detects pressure fluctuations in a predetermined frequency band. The pressure sensor 1 has, for example, a shape in which the SOI substrate 2 and the main body 3 are integrally fixed, a cantilever 4 formed on the SOI substrate 2, and a displacement that is connected to the cantilever 4 and measures the displacement of the cantilever 4. And a measurement unit 5.

The SOI substrate 2 is formed by thermally bonding a silicon support layer 2a, an oxide layer 2b such as a silicon oxide film, and a silicon active layer 2c.
The main body 3 is made of, for example, a resin material, and includes a box-shaped recess 10 a that functions as the cavity 10, that is, a box-shaped recess 10 a provided with a communication opening 11 that communicates the inside and the outside of the cavity 10. . Accordingly, for example, in the oxide layer 2b and the silicon active layer 2c of the SOI substrate 2, a communication opening 2A that communicates with the communication opening 11 of the main body 3 is formed.

The cantilever 4 is composed of the silicon active layer 2c of the SOI substrate 2, and is formed by cutting out the gap 13 so as to form the cantilever 4 and the frame portion 12 from the flat silicon active layer 2c. The cantilever 4 forms a cantilever structure having a base end 4a as a fixed end and a tip 4b as a free end, and bends according to a pressure difference between the inside and the outside of the cavity 10 around the base end 4a. It can be deformed.
A through hole 15 is formed in the base end portion 4a of the cantilever 4 so that the cantilever 4 is easily bent and deformed.

The displacement measuring unit 5 includes a piezoresistor 20 provided on the surface of the base end 4 a of the cantilever 4, a wiring unit 21 connected to the piezoresistor 20, and a detection circuit 102 that detects the displacement of the cantilever 4. I have.
The piezoresistors 20 are resistance elements whose electric resistance values change according to the amount of deflection (displacement) of the cantilever 4 and are paired on both sides of the through hole 15 in the short direction of the cantilever 4 in FIG. Are arranged. The pair of piezoresistors 20 are electrically connected to each other via a wiring portion 21 made of a conductive material. The detection circuit 102 is connected to the pair of piezoresistors 20 and detects the displacement of the cantilever 4 based on the change in the electric resistance value of the piezoresistors 20.

  In this displacement measuring unit 5, when a predetermined voltage is applied to the piezoresistor 20 through the detection circuit 102, the current resulting from this voltage application wraps around the through-hole 15 so that the one piezoresistor 20 passes through the wiring unit 21. To the other piezoresistor 20 via. As a result, the detection circuit 102 can extract the change in the electric resistance value of the piezoresistor 20 that changes according to the displacement (flexure deformation) of the cantilever 4 as an electrical output signal. The displacement measuring unit 5 can measure the displacement of the cantilever 4 based on this output signal (sensor output), and detects a pressure difference generated between the inside and the outside of the cavity 10.

The piezoresistor 20 is formed by doping a dopant (impurity) such as phosphorus by various methods such as an ion implantation method and a diffusion method. Further, both piezoresistors 20 are formed so as to be electrically connected only by the wiring portion 21. Thus, the silicon active layer 2 c around the cantilever 4 is etched so that both the piezoresistors 20 other than the wiring portion 21 do not conduct.
The piezoresistor 20 may be a piezoelectric thin film. In this case, an electromotive force is generated according to the stress applied to the base end portion 4 a of the cantilever 4. The detection circuit 102 detects the displacement of the cantilever 4 by detecting this electromotive force.

(Pressure sensor operation)
First, the case where minute pressure fluctuations are detected using the pressure sensor 1 described above will be described with reference to FIGS.
First, as in period A shown in FIG. 4A, when the pressure difference between the pressure outside the cavity 10 (hereinafter, external pressure Pout) and the pressure inside the cavity 10 (hereinafter, internal pressure Pin) is zero. As shown in FIG. 5A, the cantilever 4 is not bent and deformed.
Here, when the external pressure Pout rises stepwise as in the period B after time t1 shown in FIG. 4A, a pressure difference is generated between the outside and the inside of the cavity 10, so that FIG. As shown, the cantilever 4 is bent and deformed toward the inside of the cavity 10.
Then, the piezoresistor 20 is distorted in accordance with the bending deformation of the cantilever 4 and the electric resistance value changes, so that the output signal of the pressure sensor 1 increases as shown in FIG.

Further, after the increase of the external pressure Pout, the pressure transmission medium flows from the outside to the inside of the cavity 10 through the gap 13. For this reason, as shown in FIG. 4A, the internal pressure Pin rises with time and with a response that is slower than the external pressure Pout and slower than the fluctuation of the external pressure Pout.
As a result, the internal pressure Pin gradually approaches the external pressure Pout, so that the pressure between the outside and the inside of the cavity 10 starts to be in an equilibrium state, and the deflection of the cantilever 4 gradually decreases. As shown in FIG. The output signal gradually decreases.
When the internal pressure Pin becomes equal to the external pressure Pout as in the period C after time t2 shown in FIG. 4A, the bending deformation of the cantilever 4 is eliminated and the original state is obtained as shown in FIG. 5C. Then, as shown in FIG. 4B, the output signal of the pressure sensor 1 becomes zero again.

Thus, by monitoring the fluctuation of the output signal based on the displacement of the cantilever 4, the pressure fluctuation outside the cavity 10 can be detected.
In particular, since the cantilever 4 can be formed by a semiconductor process technique using the silicon active layer 2c of the SOI substrate 2, it is easy to make the cantilever thinner (for example, several tens to several hundreds nm) than the conventional piezoelectric element. Therefore, it is possible to detect minute pressure fluctuations with high accuracy.

(Configuration of contact sensor)
The two first and second pressure sensors 1 (1 a, 1 b) are arranged at different positions inside the hollow member 101.
The hollow member 101 is formed of a material, such as a resin material, whose contact portion can be deformed by pressing of contact with an object and which can be restored to its original shape by releasing the pressing. The hollow member 101 has a pressure transmission medium made of various gases and liquids inside, and can transmit pressure fluctuations at the contact portion due to pressing of the contact of the object to the outer surface to the internal pressure transmission medium.
In each pressure sensor 1 arranged inside the hollow member 101, a pressure transmission medium exists inside and outside the cavity 10, and pressure is transmitted from a contact portion on the outer surface of the hollow member 101 by pressing of contact with an object. The cantilever 4 of each pressure sensor 1 can be bent and deformed in accordance with the pressure fluctuation transmitted to the medium.

  For example, when the hollow member 101 is formed of a material that is transparent or has a light transmittance higher than a predetermined value, and the pressure transmission medium is a substance such as air that is transparent or has a light transmittance higher than a predetermined value, contact The sensor 100 has a light transmittance higher than a predetermined value.

The detection circuit 102 detects a displacement corresponding to the bending deformation of the cantilever 4 caused by the pressure fluctuation of the pressure transmission medium, and outputs a detection signal of this displacement.
The signal processing circuit 103 uses the detection signal output from the detection circuit 102 to detect the displacement detected with respect to the first pressure sensor 1 (1a) and the displacement detected with respect to the second pressure sensor 1 (1b). The contact position and contact pressure of the object with respect to the outer surface of the hollow member 101 are detected based on the difference in magnitude and timing from the displacement.

For example, as shown in FIG. 6, the magnitude of the displacement detected by the first and second pressure sensors 1 (1a, 1b) in response to the pressing of the object contact with the outer surface of the hollow member 101 (sensor output) Fa and Fb) indicate the magnitude of the pressure fluctuation of the pressure transmission medium, that is, the pressing strength (contact pressure) of the contact of the object with the outer surface of the hollow member 101. Therefore, the signal processing circuit 103 detects the pressing strength (contact pressure) of the contact of the object using the magnitude of the displacement detected with respect to the first and second pressure sensors 1 (1a, 1b).
Furthermore, as shown in FIG. 6, the difference between the displacement timings detected for the first and second pressure sensors 1 (1a, 1b) (that is, the times ta, tb corresponding to the sensor outputs Fa, Fb). t (= tb−ta) corresponds to the distance difference d between the position of the first and second pressure sensors 1 (1a, 1b) and the contact position. This distance difference d is a difference t (= tb−ta) between the transmission speed v of the pressure fluctuation in the pressure transmission medium and the displacement timing detected with respect to the first and second pressure sensors 1 (1a, 1b). And the product (d = t × v). Therefore, the signal processing circuit 103 makes contact with the predetermined pressure transmission path between the first and second pressure sensors 1 (1a, 1b) inside the hollow member 101 according to the distance difference d. Detect position.

(Operation of contact sensor)
Hereinafter, in the present embodiment, for example, as shown in FIG. 1, the hollow member 101 of the contact sensor 100 is formed in a tubular shape, and the extending direction of the tubular hollow member 101 (for example, the direction in which the hollow member 101 extends). Operation of the contact sensor 100 when the first pressure sensor 1 (1a) is disposed at the first end 101L in the longitudinal direction and the second pressure sensor 1 (1b) is disposed at the second end 101R. Will be described.

  When a pressure F due to the contact of an object acts on an appropriate position between the first end 101L and the second end 101R in the extending direction of the tubular hollow member 101, the pressure fluctuation caused by the contact is caused by the pressure transmission medium. Thus, the first member 101L and the second member 101R are transmitted along the extending direction of the hollow member 101. Accordingly, the pressure fluctuation transmitted along the extending direction of the hollow member 101 is generated by the first pressure sensor 1 (1a) at the first end 101L and the second pressure sensor 1 (1b at the second end 101R). ) And detected.

  The signal processing circuit 103 detects the pressing strength (contact pressure) of the object contact using the magnitude of the displacement detected by the detection circuit 102 with respect to the first and second pressure sensors 1 (1a, 1b). To do. Further, the signal processing circuit 103 uses the difference in the timing of displacement detected by the detection circuit 102 with respect to the first and second pressure sensors 1 (1a, 1b) to use the first and second pressure sensors 1. A distance difference between the position (1a, 1b) and the contact position of the object is detected. Then, a contact position on the pressure transmission path along the extending direction of the hollow member 101 is detected according to the detected distance difference.

  As described above, according to the contact sensor 100 of the present embodiment, the hollow member 101 can be formed to have various shapes and sizes, and can be easily reduced in weight and thinned. Can be improved. Furthermore, it is not necessary to provide an electrode or electrical wiring in the vicinity of the contact position of the object, and it is not necessary to provide a special seal structure for liquid or the like, so that the structure can be prevented from becoming complicated. Furthermore, the light transmittance of the material forming the hollow member 101 and the substance constituting the pressure transmission medium can be set as appropriate, and a desired light transmittance can be easily ensured. Furthermore, the contact position and the contact pressure can be detected at the same time without the need to provide additional special structures or components. Furthermore, no voltage application from the outside is required, and an increase in power consumption can be prevented.

(First modification)
In the above-described embodiment, for example, when the same pressure transmission medium as the pressure transmission medium inside the hollow member 101 exists outside the hollow member 101, the contact sensor according to the first modification shown in FIG. As in 100, the hollow member 101 may include a communication opening 101 a that communicates the inside and the outside.
According to the first modification, the internal pressure of the hollow member 101 becomes the same as the external pressure through the communication opening 101a, so that deformation of the hollow member 101 due to a change in external pressure can be suppressed, It is possible to prevent the hollow member 101 from being deteriorated or damaged.

(Second modification)
In the above-described embodiment, the pressure sensor 1 may be disposed in the opening 111 formed in the hollow member 101 as in the contact sensor 100 according to the second modification shown in FIG.
In the second modification, openings 111 are provided at the first end 101L and the second end 101R in the extending direction of the tubular hollow member 101 (for example, the longitudinal direction in which the hollow member 101 extends). It has been. Then, the inner wall surface of the opening 111 and the outer surface of the pressure sensor 1 (for example, the end surface of the SOI substrate 2 or the main body 3) are in contact with each other so that the pressure sensor 1 is supported by the opening 111. A pressure sensor 1 is attached to 111. The main body 3 and the cavity 10 are arranged outside the hollow member 101, and the communication opening 11 of the main body 3 communicates the inside of the cavity 10 and the inside of the hollow member 101. The cantilever 4 is bent and deformed according to the pressure difference between the inside of the cavity 10 and the inside of the hollow member 101.

(Third Modification)
In the second modification described above, for example, when the same pressure transmission medium as the pressure transmission medium inside the hollow member 101 exists outside the hollow member 101, the third modification shown in FIG. Like the contact sensor 100, the main body 3 of the pressure sensor 1 is formed in the same shape as the oxide layer 2b and the silicon active layer 2c of the SOI substrate 2, for example, an annular plate shape, and the cavity 10 may be omitted.
In the third modification, the communication opening 11 of the main body 3 communicates the inside and the outside of the hollow member 101. The cantilever 4 bends and deforms according to the pressure difference between the inside and the outside of the hollow member 101.

(Fourth modification)
In the above-described embodiment, like the contact sensor 100 according to the fourth modified example shown in FIG. 10, the hollow member 101 exhibits pressure fluctuation with respect to the pressing of the object contact against the outer surface of the hollow member 101. An insensitive area 112 that cannot be transmitted to the pressure transmission medium may be provided.
The insensitive area 112 is, for example, an area in which a contact portion cannot be deformed by pressing of an object contact, and is formed thicker or made of a harder material than an area that can be deformed by pressing of an object contact. Has been.

  In the fourth modified example, the detection circuit 102 performs a plurality of times (for example, twice shown in FIG. 10) due to the contact movement of the object with respect to the hollow member 101 across the insensitive region 112 with respect to each pressure sensor 1. A plurality of displacements corresponding to a plurality of bending deformations of the cantilever 4 due to the pressure fluctuations are detected. The signal processing circuit 103 uses the magnitude of the plurality of displacements detected by the detection circuit 102 with respect to the first and second pressure sensors 1 (1a, 1b) to use the pressure intensity (contact pressure) of the contact of the object. ) Is detected. Further, the signal processing circuit 103 uses the difference between the timings of the plurality of displacements detected by the detection circuit 102 with respect to the first and second pressure sensors 1 (1a, 1b) to cross the dead area 112. The direction of contact movement and the starting point position and end point position of the contact movement are detected.

  For example, as shown in FIG. 11, two displacements before and after straddling the insensitive area 112 are detected by the detection circuit 102 with respect to the first pressure sensor 1 (1 a) due to the contact movement of the object straddling the insensitive area 112. (That is, two times ta1 and ta2 corresponding to the sensor output Fa) are detected. Further, due to the contact movement of the object straddling the insensitive area 112, the detection circuit 102 causes the two displacement timings before and after straddling the insensitive area 112 (that is, the sensor) to the second pressure sensor 1 (1b). Two times tb1, tb2) corresponding to the output Fb are detected.

  Here, the displacement timing detected with respect to the first and second pressure sensors 1 (1a, 1b) before straddling the insensitive region 112 (that is, times ta1, tb1 corresponding to the sensor outputs Fa, Fb). The difference T1 (= tb1-ta1) corresponds to the distance difference between the position of the first and second pressure sensors 1 (1a, 1b) and the starting point position of the contact movement. Further, the displacement timings detected with respect to the first and second pressure sensors 1 (1a, 1b) after straddling the insensitive region 112 (that is, times ta2, tb2 corresponding to the sensor outputs Fa, Fb). The difference T2 (= tb2-ta2) corresponds to the distance difference between the position of the first and second pressure sensors 1 (1a, 1b) and the end point position of the contact movement. When T1> T2, the difference in timing T1 before straddling the insensitive area 112 and the difference in timing T2 after straddling the insensitive area 112 are such that the direction of contact movement is the first pressure sensor. This corresponds to the direction from 1 (1a) to the second pressure sensor 1 (1b). The case of T1 <T2 corresponds to the case where the direction of contact movement is the direction from the second pressure sensor 1 (1b) toward the first pressure sensor 1 (1a).

Therefore, the signal processing circuit 103 first presses the contact of the object using the magnitudes of the displacement (sensor outputs Fa and Fb) detected with respect to the first and second pressure sensors 1 (1a and 1b). The strength (contact pressure) is detected.
Further, the signal processing circuit 103 uses the difference T1 of the displacement timing detected with respect to the first and second pressure sensors 1 (1a, 1b) before straddling the insensitive area 112, and thereby the starting position of the contact movement. Is detected. Furthermore, the end point position of the contact movement is detected by using the difference T2 between the displacement timings detected for the first and second pressure sensors 1 (1a, 1b) after straddling the dead area 112. Further, the direction of contact movement is detected using the timing differences T1 and T2.

(5th modification)
In the above-described embodiment, at least three first, second, and third pressure sensors 1 (1a, 1b, 1c) are provided as in the contact sensor 100 according to the fifth modification shown in FIG. May be.
In the fifth modification, the hollow member 101 is formed in a thin plate shape, and the three first, second, and third pressure sensors 1 (1a, 1b, 1c) are formed in the three members formed in the hollow member 101. It arrange | positions at the opening part 111 (111a, 111b, 111c). Then, the inner wall surface of the opening 111 and the outer surface of the pressure sensor 1 (for example, the end surface of the SOI substrate 2 or the main body 3) are in contact with each other so that the pressure sensor 1 is supported by the opening 111. A pressure sensor 1 is attached to 111. The main body 3 and the cavity 10 are arranged outside the hollow member 101, and the communication opening 11 of the main body 3 communicates the inside of the cavity 10 and the inside of the hollow member 101. The cantilever 4 is bent and deformed according to the pressure difference between the inside of the cavity 10 and the inside of the hollow member 101.

  In this fifth modification, the signal processing circuit 103 uses the detection signals for the three first, second and third pressure sensors 1 (1a, 1b, 1c) output from the detection circuit 102 to In addition to the contact pressing strength (contact pressure), the two-dimensional coordinate position of the contact position of the object with the outer surface of the hollow member 101 is detected in a two-dimensional coordinate system set on the outer surface of the hollow member 101.

For example, as shown in FIG. 13, the signal processing circuit 103 includes magnitudes of displacements detected by the first, second, and third pressure sensors 1 (1a, 1b, 1c) (sensor outputs Fa, Fb, Fc) is used to detect the pressing strength (contact pressure) of the object contact.
Further, for example, as shown in FIG. 13, the displacement timing detected by the detection circuit 102 with respect to the first and second pressure sensors 1 (1a, 1b) (that is, the time ta corresponding to the sensor outputs Fa, Fb). , Tb) corresponds to the distance difference dab between the positions of the first and second pressure sensors 1 (1a, 1b) and the contact position. Further, the difference tac (= the timing of displacement detected by the detection circuit 102 with respect to the first and third pressure sensors 1 (1a, 1c) (that is, the times ta, tc corresponding to the sensor outputs Fa, Fc). tc−ta) corresponds to the distance difference dac between the position of the first and third pressure sensors 1 (1a, 1c) and the contact position. Therefore, the signal processing circuit 103 detects the contact position of the two-dimensional coordinate in the two-dimensional coordinate system set on the outer surface of the hollow member 101 according to the distance difference dab, dac.

(Sixth Modification)
In addition, in embodiment mentioned above, when the hollow member 101 is cyclically formed like the contact sensor 100 which concerns on the 6th modification shown in FIG. 14, the inside of the hollow member 101 is plugged in the circumferential direction. One pressure sensor 1 arranged in this manner may be provided.
In the sixth modification, the main body 3 of the pressure sensor 1 is formed in the same shape as the oxide layer 2b and the silicon active layer 2c of the SOI substrate 2, for example, an annular plate shape, and the cavity 10 is omitted. The communication opening 11 of the main body 3 communicates the first direction portion 113a on the first direction side in the circumferential direction that is the flow direction of the pressure transmission medium inside the hollow member 101 and the second direction portion 113b on the second direction side. The cantilever 4 bends and deforms according to the pressure difference between the first direction portion 113a and the second direction portion 113b.

The contact sensor 100 according to the sixth modified example compares a detection signal output from the detection circuit 102 with a predetermined first threshold value Vth1 and outputs a comparison result signal, and a first comparator 114 (114a). A second comparator 114 (114b) that compares the detection signal output from the detection circuit 102 with a predetermined second threshold value Vth2 and outputs a comparison result signal is provided.
In the sixth modification, pressure fluctuation is transmitted in the first direction and the second direction in the circumferential direction in response to the pressing of the contact of the object with the outer surface of the hollow member 101. Accordingly, the distance of the pressure transmission path from the object contact position toward the pressure sensor 1 in the first direction side is different from the distance of the pressure transmission path from the object contact position toward the pressure sensor 1 in the second direction side. In this case, the cantilever 4 is bent twice in opposite directions. Therefore, the detection circuit 102 detects two displacements corresponding to two bending deformations of the cantilever 4 in opposite directions, and detects a detection signal of these two displacements, for example, a detection signal having a positive value and a negative value. And a detection signal having the same.

  The first threshold value Vth1 and the second threshold value Vth2 of the first and second comparators 114 (114a, 114b) are set corresponding to two bending deformations in the opposite directions that occur in the cantilever 4 of the pressure sensor 1. . For example, when the detection signal having a positive value output from the detection circuit 102 has a value larger than the first threshold value Vth1 having a predetermined positive value, the ON signal output from the first comparator 114 (114a) is This shows that the cantilever 4 is bent and deformed in response to the pressure fluctuation transmitted in the first circumferential direction. The ON signal output from the second comparator 114 (114b) when the detection signal having a negative value output from the detection circuit 102 has a value smaller than the second threshold value Vth2 having a predetermined negative value is This shows that the cantilever 4 is bent and deformed in response to the pressure fluctuation transmitted in the second circumferential direction.

The signal processing circuit 103 uses the two detection signals output from the detection circuit 102 to detect the pressing intensity (contact pressure) of the contact of the object, and in addition, the first and second comparators 114 (114a, The contact position of the object in the circumferential direction of the hollow member 101 is detected based on the timing of the ON signal output from 114b).
For example, like the first pressing F1 shown in FIG. 14, the distance of the pressure transmission path from the contact position of the object toward the pressure sensor 1 in the first direction side is the pressure sensor 1 from the contact position of the object in the second direction side. When the distance is shorter than the distance of the pressure transmission path toward the second comparator 114 (114b) at time t2 after time t1 when the ON signal is output from the first comparator 114 (114a), as shown in FIG. ) Is output from the ON signal. Further, for example, as in the second press F2 shown in FIG. 14, the distance of the pressure transmission path from the contact position of the object toward the pressure sensor 1 in the first direction side is the pressure sensor in the second direction side from the contact position of the object. When the distance is longer than the distance of the pressure transmission path toward 1, the first comparator 114 at time t2 after time t1 when the ON signal is output from the second comparator 114 (114b), as shown in FIG. An ON signal is output from (114a). Therefore, the signal processing circuit 103 depends on the order of the ON signals output from the first and second comparators 114 (114a, 114b) and the timing difference T (= t2−t1) of these ON signals. The contact position of the object in the circumferential direction of the hollow member 101 is detected.

  When the distance of the pressure transmission path from the object contact position toward the pressure sensor 1 in the first direction is equal to the distance of the pressure transmission path from the object contact position toward the pressure sensor 1 in the second direction. The bending deformations in the opposite directions generated in the cantilever 4 cancel each other. Therefore, the predetermined region 113c in which the distance from the pressure sensor 1 is substantially equal in the first direction and the second direction in the circumferential direction of the hollow member 101 is a region insensitive to contact with an object.

(Seventh Modification)
In the embodiment described above, a plurality of pressure sensors 1 may be arranged along a predetermined arrangement line as in the contact sensor 100 according to the seventh modification shown in FIG. A plurality of pressure sensors 1 may be arranged on the front panel.
In the seventh modified example, the plurality of pressure sensors 1 may be disposed in the plurality of openings 111 formed in the hollow member 101, or the plurality of pressure sensors are formed by the SOI substrate 2 on which the plurality of cantilevers 4 are formed. 1 may be configured, and the SOI substrate 2 may be disposed in the opening 111 formed in the hollow member 101. Then, the inner wall surface of the opening 111 and the outer surface of the pressure sensor 1 (for example, the end surface of the SOI substrate 2 or the main body 3) are in contact with each other so that the pressure sensor 1 is supported by the opening 111. A pressure sensor 1 is attached to 111. The main body 3 of the pressure sensor 1 is formed in the same shape as the oxide layer 2b and the silicon active layer 2c of the SOI substrate 2, for example, an annular plate shape, and the cavity 10 is omitted. The communication opening 11 of the main body 3 communicates the inside and the outside of the hollow member 101. The cantilever 4 bends and deforms according to the pressure difference between the inside and the outside of the hollow member 101.
In the seventh modification, the signal processing circuit 103 detects the displacement of the cantilever 4 or the displacement of the cantilever 4 having the largest displacement of the cantilever 4 among the plurality of detection signals output from the detection circuit 102 to the plurality of pressure sensors 1. Using the detection signal with the earliest response, the position of the pressure sensor 1 corresponding to this detection signal or the vicinity of this position is detected as the contact position of the object.

  In the seventh modification, for example, as shown in FIGS. 18A and 18B, an object directly contacts the pressure sensor 1, and the pressure fluctuation at the contact portion due to the pressing of the contact is a pressure. It may be detected by the sensor 1. In this case, for example, as shown in FIG. 18C, a cover 115 that covers the plurality of pressure sensors 1 may be provided, and an object may contact the pressure sensor 1 through the cover 115. .

(Contact input device)
Hereinafter, a contact input device according to a first embodiment of the present invention will be described with reference to the accompanying drawings.
The contact input device 200 of the present embodiment is an input device such as a keyboard, for example, and as shown in FIG. 19, a plurality of keys 201a that can be pressed and assigned output of signals of various characters, symbols, and functions. A keypad 201, and the contact sensor 100 of the above-described embodiment.

The contact sensor 100 is disposed on the back side of the keypad 201, and detects pressure fluctuation caused by pressing of each key 201a of the keypad 201 that can be elastically deformed by an operator's pressing operation.
The hollow member 101 of the contact sensor 100 is formed in a tubular shape and has a curved shape at a plurality of locations corresponding to the arrangement of the keys 201 a of the keypad 201. The first pressure sensor 1 (1a) is disposed at the first end 101L in the extending direction of the tubular hollow member 101, and the second pressure sensor 1 (1b) is disposed at the second end 101R. ing.

  The signal processing circuit 103 of the contact sensor 100 stores in advance data on the correspondence relationship between the position on the pressure transmission path along the extending direction of the tubular hollow member 101 and the position of each key 201a of the keypad 201. ing. As a result, the signal processing circuit 103 uses the detection signal output from the detection circuit 102 to the first and second pressure sensors 1 (1a, 1b) to use the pressure along the extending direction of the hollow member 101. A contact position of an object (that is, each key 201a of the keypad 201) on the transmission path is detected. Then, the key 201a pressed on the keypad 201 is detected according to the detected contact position, and a signal assigned in advance to the detected key 201a is output to the outside.

Hereinafter, a contact input device according to a second embodiment of the present invention will be described with reference to the accompanying drawings.
The contact input device 210 according to the present embodiment is an input device such as a touch panel, for example, and as illustrated in FIG. 20, the flat contact operation unit 211 and the contact sensor 100 according to the fifth modification of the embodiment described above. And.
The contact operation unit 211 can be elastically deformed by an operator's pressing operation and can generate pressure fluctuations according to the pressing operation.
The contact sensor 100 is disposed on the back side of the contact operation unit 211 and detects a pressure fluctuation of the contact operation unit 211 that can be elastically deformed by an operator's pressing operation.

  The signal processing circuit 103 of the contact sensor 100 uses the detection signal output from the detection circuit 102 for the first, second, and third pressure sensors 1 (1a, 1b, 1c) to the contact operation unit 211. The pressing strength (contact pressure) of the pressing operation is detected. Further, the signal processing circuit 103 detects the two-dimensional coordinates of the contact position in the two-dimensional coordinate system preset on the surface of the contact operation unit 211. And the signal of the detected contact position and contact pressure is output outside.

According to the contact input devices 200 and 210 of the first or second embodiment described above, it is possible to easily reduce the weight and the thickness while preventing the structure from becoming complicated, and improve versatility. Can do.
Furthermore, according to the contact input device 200 according to the first embodiment, the operation on the plurality of keys 201a can be distinguished and detected by one tubular hollow member 101, for example, individually for each of the plurality of keys 201a. Compared with the case where a sensor is provided, the structure can be simplified.
Furthermore, according to the contact input device 210 according to the second embodiment, the two-dimensional coordinate position of the contact position can be detected with high accuracy regardless of the size of the plate-like contact operation unit 211, and various sizes. The versatility can be improved by the contact operation unit 211.

(Electronics)
The contact input devices 200 and 210 according to the first and second embodiments described above can be provided in various electronic devices such as a computer device and an electronic musical instrument.
For example, in the electronic keyboard instrument including the contact input device 200 according to the first embodiment described above, the hollow member 101 of the contact sensor 100 is formed in a tubular shape, and a plurality of white keys and black of the electronic keyboard instrument that can be pressed. It has a shape corresponding to the key arrangement. The signal processing circuit 103 of the contact sensor 100 has a correspondence relationship between the position on the pressure transmission path along the extending direction of the tubular hollow member 101 and the positions of a plurality of white keys and black keys of the electronic keyboard instrument. I remember the data. As a result, the signal processing circuit 103 detects the white key or the black key that is pressed by using the detection signal output from the detection circuit 102 to the first and second pressure sensors 1 (1a, 1b). Then, a tone output signal having a tone color assigned in advance to the detected white key or black key is output to the outside.

  Further, for example, in the electronic percussion instrument including the contact input device 210 according to the second embodiment described above, the signal processing circuit 103 of the contact sensor 100 is preliminarily stored in a two-dimensional coordinate system on the surface of the contact operation unit 211. Data on the correspondence relationship between the contact position, the contact pressure, and the timbre is stored. As a result, the signal processing circuit 103 uses the detection signals output from the detection circuit 102 to the first, second, and third pressure sensors 1 (1a, 1b, 1c) to determine the contact pressure and the contact position. Detecting and outputting a sound output signal of a tone color assigned in advance to the detected contact pressure and contact position.

According to the electronic device of the above-described embodiment, it is possible to easily reduce the weight and the thickness while preventing the structure from becoming complicated, and to improve versatility.
Furthermore, according to the electronic keyboard instrument including the contact input device 200 according to the first embodiment, it is possible to distinguish and detect operations on a plurality of white keys and black keys with one tubular hollow member 101, for example, a plurality of The structure can be simplified as compared with the case where a sensor is provided for each of the white key and the black key.
Furthermore, according to the electronic percussion instrument including the contact input device 210 according to the second embodiment, it is possible to accurately detect the two-dimensional coordinate position of the contact position regardless of the size of the plate-like contact operation unit 211. Therefore, electronic percussion instruments of various sizes can be easily formed, and versatility can be improved.

DESCRIPTION OF SYMBOLS 1 ... Pressure sensor (pressure fluctuation detection part) 3 ... Main-body part 4 ... Cantilever 10 ... Cavity 11 ... Communication opening (opening) 100 ... Contact sensor 101 ... Hollow member 102 ... Detection circuit 103 ... Signal processing circuit (contact detection means, input) (Signal output unit) 111 ... opening 113a ... first direction part 113b ... second direction part 211 ... contact operation part

Claims (11)

A hollow member having a pressure transmission medium therein and capable of transmitting pressure fluctuation due to contact with an object to the pressure transmission medium;
At least one pressure fluctuation detecting unit arranged inside the hollow member or the hollow member and outputting a detection signal corresponding to the pressure fluctuation;
Contact detection means for detecting a contact position and a contact pressure of the object based on the detection signal output from the pressure fluctuation detection unit;
With
The pressure fluctuation detector is
A main body having an opening through which the pressure transmission medium can flow;
A cantilever that is disposed so as to close the opening in a state where a distal end is a free end and a base end is supported in a cantilevered manner by the main body, and bends and deforms in response to the pressure fluctuation;
A displacement detector that detects displacement according to the bending deformation of the cantilever,
The contact detection means determines the contact position and the contact pressure of the object based on a plurality of displacement magnitudes and timing differences of the cantilever detected by the displacement detector of at least one of the pressure fluctuation detectors. Detect
A plurality of the pressure fluctuation detection units disposed inside the hollow member;
The main body of the pressure fluctuation detection unit includes a cavity,
The opening of the main body communicates the inside and the outside of the cavity,
The cantilever bends and deforms according to the pressure difference between the inside and the outside of the cavity,
The contact detection means includes a magnitude of the displacement of the plurality of cantilevers detected by the plurality of displacement detection units, and a difference in timing of the displacement between the plurality of cantilevers detected by the plurality of displacement detection units. , To detect the contact position and the contact pressure of the object based on
The hollow member is formed in a plate shape,
A flat contact operation part provided along the surface of the hollow member and capable of generating the pressure fluctuation according to a contact operation,
Comprising at least three pressure fluctuation detectors having different arrangement positions;
The contact detection means includes the magnitude of the displacement of the three cantilevers detected by the displacement detector of the three pressure fluctuation detectors and the difference in timing of the displacement between the three cantilevers. Based on the two-dimensional coordinate position of the contact position in the contact operation unit,
The contact sensor characterized by the above-mentioned. A hollow member having a pressure transmission medium therein and capable of transmitting pressure fluctuation due to contact with an object to the pressure transmission medium;
At least one pressure fluctuation detecting unit arranged inside the hollow member or the hollow member and outputting a detection signal corresponding to the pressure fluctuation;
Contact detection means for detecting a contact position and a contact pressure of the object based on the detection signal output from the pressure fluctuation detection unit;
With
The pressure fluctuation detector is
A main body having an opening through which the pressure transmission medium can flow;
A cantilever that is disposed so as to close the opening in a state where a distal end is a free end and a base end is supported in a cantilevered manner by the main body, and bends and deforms in response to the pressure fluctuation;
A displacement detector that detects displacement according to the bending deformation of the cantilever,
The contact detection means determines the contact position and the contact pressure of the object based on a plurality of displacement magnitudes and timing differences of the cantilever detected by the displacement detector of at least one of the pressure fluctuation detectors. Detect
A plurality of the pressure fluctuation detection units disposed in the opening formed in the hollow member;
The opening of the main body communicates the inside and the outside of the hollow member,
The cantilever bends and deforms according to the pressure difference between the inside and the outside of the hollow member,
The contact detection means includes a magnitude of the displacement of the plurality of cantilevers detected by the plurality of displacement detection units, and a difference in timing of the displacement between the plurality of cantilevers detected by the plurality of displacement detection units. , To detect the contact position and the contact pressure of the object based on
The hollow member is formed in a plate shape,
A flat contact operation part provided along the surface of the hollow member and capable of generating the pressure fluctuation according to a contact operation,
Comprising at least three pressure fluctuation detectors having different arrangement positions;
The contact detection means includes the magnitude of the displacement of the three cantilevers detected by the displacement detector of the three pressure fluctuation detectors and the difference in timing of the displacement between the three cantilevers. Based on the two-dimensional coordinate position of the contact position in the contact operation unit,
The contact sensor characterized by the above-mentioned. The main body of the pressure fluctuation detection unit includes a cavity disposed outside the hollow member,
The opening of the main body communicates the inside of the cavity and the inside of the hollow member,
The cantilever is bent and deformed according to a pressure difference between the inside of the cavity and the inside of the hollow member.
The contact sensor according to claim 2. The contact detection means, based on the position of the cantilever with the largest displacement among the displacements of the plurality of cantilevers detected by the displacement detector, or the position of the cantilever with the earliest response to the displacement, Detect the contact position of the object,
The contact sensor according to any one of claims 1 to 3, wherein the contact sensor is characterized in that A hollow member having a pressure transmission medium therein and capable of transmitting pressure fluctuation due to contact with an object to the pressure transmission medium;
At least one pressure fluctuation detecting unit arranged inside the hollow member or the hollow member and outputting a detection signal corresponding to the pressure fluctuation;
Contact detection means for detecting a contact position and a contact pressure of the object based on the detection signal output from the pressure fluctuation detection unit;
With
The pressure fluctuation detector is
A main body having an opening through which the pressure transmission medium can flow;
A cantilever that is disposed so as to close the opening in a state where a distal end is a free end and a base end is supported in a cantilevered manner by the main body, and bends and deforms in response to the pressure fluctuation;
A displacement detector that detects displacement according to the bending deformation of the cantilever,
The contact detection means determines the contact position and the contact pressure of the object based on a plurality of displacement magnitudes and timing differences of the cantilever detected by the displacement detector of at least one of the pressure fluctuation detectors. Detect
The hollow member is formed in an annular shape,
One pressure fluctuation detector arranged so as to close the circumferential direction inside the hollow member,
The opening of the main body communicates the first direction portion on the first direction side in the circumferential direction that is the flow direction of the pressure transmission medium and the second direction portion on the second direction side,
The cantilever bends and deforms according to the pressure difference between the first direction part and the second direction part,
The displacement detection unit detects two displacements corresponding to two bending deformations of the cantilever due to the pressure fluctuation transmitted in the first direction and the second direction,
The contact detection means detects a contact position and a contact pressure of the object based on a difference between the magnitude and timing of the two displacements of the cantilever detected by the displacement detector.
The contact sensor characterized by the above-mentioned. The hollow member includes a dead area where the pressure fluctuation cannot be transmitted to the pressure transmission medium,
The displacement detector detects a plurality of displacements according to a plurality of times of bending deformation of the cantilever due to a plurality of times of the pressure fluctuation caused by the contact movement of the object with respect to the hollow member across the insensitive region,
The contact detection means detects a contact movement direction and a contact position of the object across the dead area based on the timings of the plurality of displacements of the cantilever detected by the displacement detection unit.
The contact sensor according to any one of claims 1 to 3, wherein the contact sensor is characterized in that A hollow member having a pressure transmission medium therein and capable of transmitting pressure fluctuation due to contact with an object to the pressure transmission medium;
At least one pressure fluctuation detecting unit arranged inside the hollow member or the hollow member and outputting a detection signal corresponding to the pressure fluctuation;
Contact detection means for detecting a contact position and a contact pressure of the object based on the detection signal output from the pressure fluctuation detection unit;
With
The pressure fluctuation detector is
A main body having an opening through which the pressure transmission medium can flow;
A cantilever that is disposed so as to close the opening in a state where a distal end is a free end and a base end is supported in a cantilevered manner by the main body, and bends and deforms in response to the pressure fluctuation;
A displacement detector that detects displacement according to the bending deformation of the cantilever,
The contact detection means determines the contact position and the contact pressure of the object based on a plurality of displacement magnitudes and timing differences of the cantilever detected by the displacement detector of at least one of the pressure fluctuation detectors. Detect
A plurality of the pressure fluctuation detection units disposed inside the hollow member;
The main body of the pressure fluctuation detection unit includes a cavity,
The opening of the main body communicates the inside and the outside of the cavity,
The cantilever bends and deforms according to the pressure difference between the inside and the outside of the cavity,
The contact detection means includes a magnitude of the displacement of the plurality of cantilevers detected by the plurality of displacement detection units, and a difference in timing of the displacement between the plurality of cantilevers detected by the plurality of displacement detection units. , To detect the contact position and the contact pressure of the object based on
The hollow member is formed in a tubular shape,
Provided along the longitudinal direction of the hollow member, comprising a plurality of pressing operation portions that can be elastically deformed by a pressing operation and can generate the pressure fluctuation according to the pressing operation,
The first and second pressure fluctuation detectors are provided at the first end and the second end in the longitudinal direction of the hollow member,
The contact detection means includes the magnitude of the displacement of the first and second cantilevers detected by the displacement detector of the first and second pressure fluctuation detectors, and the first and second A contact sensor that detects which one of the plurality of pressing operation units is pressed based on the difference in timing of the displacement between the cantilevers;
An input signal output unit that outputs an input signal corresponding to the pressing operation unit detected by the contact detection unit,
A contact input device characterized by that. A hollow member having a pressure transmission medium therein and capable of transmitting pressure fluctuation due to contact with an object to the pressure transmission medium;
At least one pressure fluctuation detecting unit arranged inside the hollow member or the hollow member and outputting a detection signal corresponding to the pressure fluctuation;
Contact detection means for detecting a contact position and a contact pressure of the object based on the detection signal output from the pressure fluctuation detection unit;
With
The pressure fluctuation detector is
A main body having an opening through which the pressure transmission medium can flow;
A cantilever that is disposed so as to close the opening in a state where a distal end is a free end and a base end is supported in a cantilevered manner by the main body, and bends and deforms in response to the pressure fluctuation;
A displacement detector that detects displacement according to the bending deformation of the cantilever,
The contact detection means determines the contact position and the contact pressure of the object based on a plurality of displacement magnitudes and timing differences of the cantilever detected by the displacement detector of at least one of the pressure fluctuation detectors. Detect
A plurality of the pressure fluctuation detection units disposed in the opening formed in the hollow member;
The opening of the main body communicates the inside and the outside of the hollow member,
The cantilever bends and deforms according to the pressure difference between the inside and the outside of the hollow member,
The contact detection means includes a magnitude of the displacement of the plurality of cantilevers detected by the plurality of displacement detection units, and a difference in timing of the displacement between the plurality of cantilevers detected by the plurality of displacement detection units. , To detect the contact position and the contact pressure of the object based on
The hollow member is formed in a tubular shape,
Provided along the longitudinal direction of the hollow member, comprising a plurality of pressing operation portions that can be elastically deformed by a pressing operation and can generate the pressure fluctuation according to the pressing operation,
The first and second pressure fluctuation detectors are provided at the first end and the second end in the longitudinal direction of the hollow member,
The contact detection means includes the magnitude of the displacement of the first and second cantilevers detected by the displacement detector of the first and second pressure fluctuation detectors, and the first and second A contact sensor that detects which one of the plurality of pressing operation units is pressed based on the difference in timing of the displacement between the cantilevers;
An input signal output unit that outputs an input signal corresponding to the pressing operation unit detected by the contact detection unit,
A contact input device characterized by that. The main body of the pressure fluctuation detection unit includes a cavity disposed outside the hollow member,
The opening of the main body communicates the inside of the cavity and the inside of the hollow member,
The cantilever is bent and deformed according to a pressure difference between the inside of the cavity and the inside of the hollow member.
The contact input device according to claim 8. The contact sensor according to any one of claims 1 to 3,
An input signal output unit that outputs an input signal corresponding to the contact position detected by the contact detection means.   An electronic device comprising the contact input device according to any one of claims 7 to 10.

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