JP6138722B2 - Work processing equipment - Google Patents

Description

  The present invention relates to a workpiece processing apparatus that performs various processes such as cutting, drilling, and deburring on a workpiece (also referred to as a workpiece) that is driven and controlled by an industrial robot.

  The present applicant has patented a workpiece support device that supports the workpiece when performing various processes such as drilling, deburring and cutting on the workpiece by controlling the movement of the processing tool attached to the hand part of the industrial robot. Proposed in Document 1.

  In the workpiece support device of Patent Document 1, two workpiece support members arranged adjacent to each other in the longitudinal direction of the workpiece are arranged in the longitudinal direction perpendicular to the longitudinal direction with respect to the remaining workpiece support members and the left and right sides coincident with the longitudinal direction. The distance between the workpiece support members and the height of the workpiece support members are adjusted according to the size of the workpiece to be processed. It is characterized in that the workpiece can be adjusted and the workpiece is securely held corresponding to various workpiece sizes.

  However, in order to perform desired machining with high accuracy on the workpiece held by the workpiece support device, the workpiece is machined with high positional accuracy with respect to the workpiece support device and machining of the hand portion of the work robot. Although it is necessary to hold the workpiece so that the origins coincide with each other, the above work takes time and effort, and there is a problem that the workability of the workpiece is deteriorated.

In particular, in order to save work in the work processing work, it is necessary to automate the supply of the work to the work support device, but in order to position and hold the work with high positional accuracy with respect to the work support device, the operator Positioning work by visual inspection is indispensable, which has been an obstacle to labor saving of work processing work.

  In the workpiece support device of Patent Document 1, each workpiece support member is individually controlled to move in the longitudinal direction and the vertical direction so that the machining origin of the industrial robot matches the workpiece origin of the workpiece. However, it is necessary to control the movement of each work support member with high resolution, and there is a problem that the movement mechanism and the movement control device of each work support member become complicated and the apparatus itself is increased in size and cost. doing.

JP 2013-52468 A

  The problem to be solved is that when a workpiece is machined by an industrial robot, it takes a lot of work and time to position the workpiece to the machining robot's machining origin with respect to the workpiece support device. The workability is poor.

  In addition, when the workpiece support member that holds the workpiece is controlled to be moved so that the two origins coincide with each other, the workpiece support member must be controlled to move with a high resolution. The mechanism and the movement control device are complicated, and the device itself is increased in size and cost.

  Furthermore, in order to position and support the workpiece with high positional accuracy with respect to the workpiece support device, the positioning operation by the operator is indispensable, which is an obstacle in saving labor of the workpiece machining operation.

According to the first aspect of the present invention, desired machining is performed on the workpiece supported by the workpiece support device by driving and controlling the industrial robot based on the three-dimensional machining data in the XYZ directions stored in the machining data storage area. In a workpiece processing apparatus that performs the above-described processing, the workpiece processing tool is supported by a workpiece support device and a two-dimensional movement unit that is provided in a hand portion of an industrial robot and moves a workpiece processing tool in a two-dimensional direction of an XY axis with respect to an opposing workpiece surface. Projecting means for projecting a reference pattern onto a processed portion of the workpiece surface, an imaging means for outputting imaged data of the processed pattern on the workpiece surface supported by the workpiece support device and the reference pattern projected on the location, and the workpiece the three-dimensional reference Wakude workpiece supporting device according to the imaging data of the reference pattern that is projected to be processed location and relevant section of the imaged workpiece surface when supported by normal state Data, converted three-dimensional imaging data from the imaging data of the reference pattern that is projected to be processed location and relevant section of the supported workpiece surface to the work supporting device when the workpiece machining, the machining start position data of the workpiece machining tool, Stores three-dimensional machining data in a three-dimensional direction (two-dimensional direction of the workpiece surface and a normal direction with respect to the workpiece surface) related to the machining position of the workpiece, and pattern data of a reference pattern projected onto the workpiece surface from the projection unit. Comparing means for comparing the three-dimensional reference work data and the three-dimensional imaging data stored in the storage means with the reference pattern data , and determining the positional deviation amount in the three-dimensional direction of the processing origin position at the processing location. when the three-dimensional reference work data and three-dimensional imaging data in the case of disagreement, it is judged by said comparing means The workpiece processing tool is controlled to move in the two-dimensional direction of the workpiece surface by the two-dimensional moving means driven based on the positional deviation between the workpiece origin position in the two-dimensional direction with respect to the workpiece surface and the machining start position of the workpiece processing tool. Control means for matching the machining start position of the workpiece processing tool to the workpiece origin position and correcting the machining data in the normal direction in the machining data based on the amount of positional deviation with respect to the normal direction of the workpiece origin on the workpiece surface; The main feature is that it has

  The present invention is a simple operation, and can correct and position the machining origin of the industrial robot and the workpiece origin of the workpiece supported by the workpiece support device in a short time so that the workpiece can be machined. Efficiency can be improved.

  In addition, the workpiece support device can be simplified and the device itself can be reduced in size and cost compared to the case where the workpiece support member holding the workpiece is moved and corrected.

Furthermore, it is possible to automate the positioning operation for matching the workpiece origin of the workpiece and the machining origin of the industrial robot to save the labor of the workpiece machining operation.

It is perspective explanatory drawing which shows the outline of the workpiece processing apparatus with a calibration function. It is a side view of the workpiece processing apparatus with a calibration function. It is a perspective view which shows the outline of a two-dimensional movement apparatus. It is a front view from the arrow A direction of FIG. It is a side view from the arrow B direction of FIG. It is an electrical block diagram of a control means. It is explanatory drawing which shows the state which set the workpiece | work to the workpiece | work support apparatus. It is a flowchart which shows the process processing of the workpiece | work by an industrial robot. It is a flowchart which shows a calibration process. It is an image of a predetermined location when the work is supported in a normal state. It is an image of a predetermined location when the work is supported in a misaligned state. It is explanatory drawing which shows the position correction state with respect to a two-dimensional direction.

If the 3D reference workpiece data and the 3D imaging data do not match, based on the amount of misalignment between the workpiece origin position and the machining start position of the workpiece processing tool with respect to the workpiece surface as determined by the comparison means. By controlling the movement of the workpiece tool in the two-dimensional direction of the workpiece surface by the driven two-dimensional moving means, the machining start position of the workpiece tool is made coincident with the workpiece origin position, and the normal direction of the workpiece origin point on the workpiece surface is set. It is an optimal embodiment to correct the machining data in the normal direction in the machining data based on the positional deviation amount.

Hereinafter, the present invention will be described according to examples.
As shown in FIGS. 1 to 5, a workpiece drilling device 1 as a processing device with a calibration function includes a workpiece support device 3, an industrial robot 5, and a calibration device 7.

  The workpiece support device 3 has a plurality of workpiece support members 11 on the main body frame 9, and supports the workpiece W supporting the longitudinal width (left-right direction shown) and the longitudinal orthogonal width (front-back direction shown) corresponding to the above. It is erected at predetermined intervals in the left-right direction and the front-rear direction. A holding member 13 that supports and holds the back surface of the work W to be drilled is provided at the tip (upper part) of each work support member 11.

  The holding member 13 is an elastic member that abuts on the back surface of the workpiece W and supports the displacement by restricting the displacement by a high friction coefficient, and air for gripping a rib (not shown) provided on the back surface of the workpiece W. Any of a clamp member constituted by a cylinder, an electromagnetic solenoid, and a gripping claw (none of which are shown), or an adsorption member (none of which is shown) connected to a negative pressure generator and sucking and holding the back surface of the workpiece W It may be.

  As the workpiece W processed in the present invention, a metal molded product, for example, a resin molded product such as various panels for vehicles and a bumper for vehicles is suitable.

  The holding member 13 is provided on a vertical movable body supported by an upper and lower frame provided to extend in a vertical direction on a horizontal movable body supported so as to be movable in the longitudinal direction and the longitudinal orthogonal direction of the workpiece W. The support position of the workpiece W can be changed by moving the workpiece support member 13 in the left-right direction, the front-rear direction, and the up-down direction in accordance with driving of an electric motor such as a numerically controllable servo motor connected to the movable body and the vertically movable body. The structure made into may be sufficient.

  The industrial robot 5 has a base end portion rotatably supported by a turntable 14 that is drivingly connected to an electric motor (not shown) such as a numerically controllable servo motor built in the base 15 and has a numerical value. A first arm 19 to which an electric motor 17 such as a controllable servo motor is connected, and an arm connected to an electric motor (not shown) such as a numerically controllable servo motor built in the tip of the first arm 19 A base end portion is rotatably supported by an attachment member (not shown), and a second arm 25 to which an electric motor 23 such as a servomotor capable of numerical control is connected is incorporated in a distal end portion of the second arm 25. Further, a hand attachment member 27 connected to an electric motor (not shown) such as a servo motor capable of numerical control, and a hand portion 31 attached to the hand attachment plate 27 and drilling a workpiece W are configured.

  The industrial robot 5 described above includes three or more arms corresponding to the number of rotation axes, and rotates the arms corresponding to the base end portion and the distal end portion of each arm in the direction around the axis and in the direction perpendicular to the axis. It is good also as a structure provided with the electric motor for this.

A two-dimensional movement device 35 is attached to the hand attachment plate 27. The two-dimensional movement device 35 includes, for example, a first traveling body 39 supported so as to move in the longitudinal direction by a first frame 37 extending in the left-right direction shown in the figure, and the first traveling body 39 in the longitudinal direction. A first moving member 41 that reciprocates and a second frame 43 that extends in a direction orthogonal to the left-right direction with respect to the first traveling body 39 is supported to move in the longitudinal direction. 2 traveling bodies 45 and a second moving member 47 that reciprocates the second traveling body 45 in the longitudinal direction (a direction orthogonal to the left-right direction).

As the first and second moving members 41 and 47, servo motors or the like that have axes in directions that coincide with the longitudinal directions of the first and second frames 37 and 43 and that can be numerically controlled at one end. Rotation of a feed screw (both not shown) meshed with nuts provided on the first and second traveling bodies 39 and 45 that are connected to and rotatably supported by the electric motor Accordingly, the corresponding first and second traveling bodies 39 and 45 are moved in the respective directions, and are rotatably supported at the longitudinal ends of the first and second frames 37 and 43. At the same time, an electric motor such as a servo motor capable of numerical control is connected to a rotating body that is rotatably supported and a part thereof is fixed to the corresponding first and second traveling bodies 39 and 45. Traveling member (belt, both shown) It not) may be a first and a belt moving mechanism for moving the second carriage 39, 45 to the respective directions corresponding with the driving of each electric motor.

Further, the first and second moving members 41 and 47 correspond to the first and second corresponding to the rack gear extending in the direction corresponding to the longitudinal direction of each of the first and second frames 37 and 43. 2 A pinion gear (not shown) attached to an output shaft of an electric motor such as a numerically controllable servo motor provided on the traveling bodies 39 and 45 is meshed, and responds as each electric motor is driven. A rack and pinion moving mechanism that moves the first and second traveling bodies 39 and 45 in respective directions, a linear servo motor, or the like may be used.

The second traveling body 45 is provided with an electric motor 49, and an end mill 51 serving as a processing tool for drilling is attached to the output shaft of the electric motor 49. As a processing tool, a cutting blade, a punch blade, a ruled line blade, a laser beam output head that is fused by the thermal energy of the output laser beam, or the like may be selected and attached according to the processing mode of the workpiece W.

A guide rail 7b attached to the frame 7a of the calibration device 7 has a video camera 53 as an imaging means and a projector 55 as a projection means at a predetermined distance upward from a predetermined position of the work W held by the work support device 3. And, for example, are attached at a required interval in the left-right direction. The projector 55 projects various reference patterns such as a slit pattern, a lattice pattern, and a dot matrix pattern around the predetermined portion of the work W. The video camera 53 captures the periphery of the predetermined location on the workpiece W and the reference pattern projected on the location and outputs imaging data.

As shown in FIG. 6, a program storage area 61 and a work data storage area 63 are connected to the CPU 59 of the control means 57 that drives and controls the workpiece drilling apparatus 1. In the program storage area 61, program data for driving and controlling the industrial robot 5 to execute a drilling operation on the work W, the work origin of the work W supported by the work support device 3, and the industrial robot 5 Program data and the like for executing a calibration process for calibrating the machining origin are stored.

The work data storage area 63 stores three-dimensional position data relating to the movement path (standby position, machining start origin and each hole position of the workpiece W) set in advance for the hand unit 31 in the industrial robot 5, and the hole depth thereof. 3D reference workpiece data of the workpiece W supported in a normal state (a state where the workpiece origin position of the workpiece W and the machining origin position of the industrial robot 5 coincide with each other) with respect to the machining data storage area 65 to be stored and the workpiece support device 3 On the basis of the image data stored in the image data storage area 69, the image data storage area 69 for storing image data around a predetermined location in the work W imaged by the video camera 53, and the image data stored in the image data storage area 69. 3D imaging data storage area 71 for storing 3D imaging data converted into 3D data, and calibration data Primary data storage area 73, the pattern data storage area 75 for storing the pattern data of a single or a plurality of reference patterns, are projected to the workpiece W is provided.

In addition, as a predetermined location in the workpiece W imaged by the video camera 53, for example, an opening, a stepped portion, a protruding portion or the like (the figure shows the opening) is used as a reference for determining the positional deviation in the two-dimensional direction. )) Including the reference portion Wa is desirable. If the workpiece W does not have the above-described reference portion Wa, a reference portion is provided on the workpiece support device 3 corresponding to both sides of the workpiece W in the longitudinal direction or the longitudinal orthogonal direction, and the workpiece W What is necessary is just to image including the reference | standard part provided in the workpiece | work support apparatus 3, when image | photographing the predetermined location in.

The data stored in the machining data storage area 65, the reference work data storage area 67, and the three-dimensional imaging data storage area 71 are stored as world coordinate system data. Further, as data stored in the reference work data storage area 67, for example, a method of directly inputting the three-dimensional position of the work W supported in a normal state to the work support device 3 and setting the reference work data as world coordinates, Alternatively, any method may be used in which the reference work data obtained by synthesizing the height data of the work W supported in the normal state on the work support device 3 and the CAD data of the work W is set as the world coordinate system data.

The CPU 59 is connected with a comparison unit 77. The comparison unit 77 compares the 3D image data stored in the 3D image data storage area 71 with the 3D reference work data stored in the reference work data storage area 67 and calibrates the displacement amount in the 3D direction. Calculated as data and stored in the calibration data storage area 73.

Robot control means 79 is connected to the CPU 59. The robot control means 79 drives and controls the electric motors (not shown) and the electric motors 17 and 23 (not shown) based on the three-dimensional position data stored in the machining data storage area 65 to bring the hand unit 31 to the machining origin position. After moving, it moves to each drilling position and executes drilling.

Two-dimensional movement control means 81 is connected to the CPU 59. The two-dimensional movement control means 81 is based on the calibration data stored in the calibration data storage area 73 when the processing origin of the hand unit 31 does not coincide with the processing origin of the workpiece W supported by the workpiece support device 3. The first and second moving members 41 and 47 are driven and controlled to move the end mill 51 in the two-dimensional direction so that the machining origin and the machining origin coincide.

Projection control means 83 is connected to the CPU 59. The projection control means 83 drives the projector 55 based on a single or a plurality of pattern data read out from the pattern data storage area 75 prior to drilling the workpiece W in the workpiece support device 3. A reference pattern is projected onto the surface of a predetermined location.

When a plurality of reference patterns are projected onto the workpiece W, the projection control unit 83 causes the projector 55 to be based on the pattern data read from the pattern data storage area 75 according to a preset order. The reference pattern is projected by driving every imaging time of the video camera 53 described later.

An imaging control means 85 is connected to the CPU 59. The image pickup control means 85 picks up the video camera 53 at the timing when the reference pattern is projected onto the work W supported by the work support device 3, and picks up the surface around a predetermined location in the work W including the reference pattern. Then, the imaging data is stored in the imaging data storage area 69.

When a plurality of reference patterns are projected from the projector 55 onto the workpiece W, the imaging control unit 85 drives the video camera 53 to capture images each time the projected reference pattern is switched. Imaging data around a predetermined location in the workpiece W including the pattern is stored in the imaging data storage area 69.

In addition, a plurality of detectors 87 such as a limit switch for detecting that the workpiece W is supported on the workpiece support device 3 are connected to the CPU 59 via an interface 89. Then, the CPU 59 determines that the work W is supported by the work support device 3 when all of the detectors 87 shift to the work W detection state, and executes the projection operation by the projector 55 and the imaging operation by the video camera 53. To do.

The drilling action and calibration process by the workpiece drilling apparatus 1 configured as described above will be described.
First, the outline of the punching action by the workpiece drilling device 1 will be described. When the workpiece W is set on the workpiece support device 3 in step 101 (see FIG. 7), as shown in FIG. It is determined whether or not the workpiece detection state has been entered. If step 101 is NO, the process returns to step 101.

On the other hand, if step 101 is YES, calibration processing is executed in step 103 to match the machining origin of the industrial robot 5 with the workpiece origin of the workpiece supported by the workpiece support device 3.

Next, based on the three-dimensional position data relating to the machining origin stored in the machining data storage area 65 in step 105, the electric motors (not shown) and the electric motors 17 and 23 (illustrated) are driven and controlled, respectively. Steps after the arms 19 and 25 are swung and rotated and the hand mounting member 27 is rotated to move the end mill 51 of the hand portion 31 so that its axis coincides with the normal of the workpiece W to be processed. In 107, the electric motor 49 is driven to rotate the end mill 51 while moving based on the three-dimensional position data to punch holes of a predetermined size and depth in the workpiece W.

Next, in step 109, the first to third arms 19 and 25 are swung and rotated based on the three-dimensional position data stored in the machining data storage area 65, and the hand mounting member 27 is rotated as necessary. After the end mill 51 is extracted from the drilled hole, the first to third arms 19 and 25 are swung and rotated based on the next three-dimensional position data stored in the machining data storage area 65 in step 111. At the same time, the hand mounting member 27 is rotated as necessary, and the end mill 51 is moved so that its axis coincides with the normal of the next processing position.

Next, in step 113, it is determined whether or not the end mill 51 has moved to the next machining position. If the determination is NO, the process returns to step 111. On the other hand, if the step 113 is YES, the electric motor 49 is driven in the same manner as described above in step 115 and the end mill 51 is rotated to move based on the three-dimensional position data and move to a predetermined size on the workpiece W. Then, after drilling a hole having a depth, the first to third arms 19 and 25 are swung and rotated based on the three-dimensional position data stored in the machining data storage area 65 in step 117 and the hand is moved as necessary. The attachment member 27 is rotated to extract the end mill 51 from the drilled hole.

Next, in step 119, it is determined whether or not all the machining positions in the workpiece W have been drilled. If the step 119 is NO, the process returns to step 111 to perform the drilling operation for the next machining position. To do.

On the other hand, if step 119 is YES, the first to third arms 19 and 25 are swung and rotated based on the three-dimensional position data related to the standby position stored in the machining data storage area 65 in step 121. If necessary, the hand mounting member 27 is rotated to move the hand unit 31 to the standby position. Then, in step 123, a lamp is turned on or a buzzer is sounded to notify the completion of the machining operation. finish.

Next, the calibration process in step 103 will be described. As shown in FIG. 9, the work attached to the work support device 3 by driving the projector 55 based on the pattern data stored in the pattern data storage area 75 in step 131. After projecting the reference pattern to a predetermined location of W, the video camera 53 is driven in step 133 to image the surface of the predetermined location of the workpiece W including the projected reference pattern, and the captured data is stored in the imaging data storage area 69. To do.

After the imaging data stored in the imaging data storage area 69 in step 135 is converted into 3D imaging data and stored in the 3D imaging data storage area 71, in step 137, the comparison unit 77 stores the imaging data in the 3D imaging data storage area 71. The stored 3D imaging data and the 3D reference work data corresponding to the imaging location stored in the reference work data storage area 67 are compared.

In the comparison by the comparison means 77, the positional deviation in the two-dimensional direction is compared by the three-dimensional imaging data of the opening Wa and the three-dimensional reference work data, and the slit interval of the projected reference pattern in the three-dimensional imaging data is calculated. The positional deviation in the height direction is compared based on the slit interval of the pattern data stored in the pattern data storage area 75.

Next, in step 139, it is determined whether or not there is a difference between the three-dimensional imaging data, the three-dimensional reference work data, and the pattern data. If the step 139 is NO, the work support device 3 is shown in FIG. On the other hand, it is determined that the workpiece W is in a normal state, that is, the processing origin by the end mill 51 and the processing origin of the workpiece W coincide with each other.

On the other hand, when the above step 139 is YES, it is determined that the work origin of the work W and the work origin of the end mill 51 are displaced with respect to the work support device 3 as shown in FIG. The difference with respect to the three-dimensional direction is calculated, and the calculated positional deviation amount in the three-dimensional direction (XYZ) is stored in the calibration data storage area 73 as calibration data.

Next, drive control of the first and second moving members 41 and 47 is performed based on the two-dimensional calibration data of the XY axes in the calibration data read from the calibration data storage area 73 in step 143. The tip of the end mill 51 (machining origin) is made to coincide with the machining origin of the workpiece W. (See Figure 12)

Further, among the calibration data read from the calibration data storage area 73 in step 145, the Z-axis direction data of the three-dimensional position data related to the machining position stored in the machining data storage area 65 is corrected by the Z-axis calibration data. To complete the calibration operation.

  In the present embodiment, a predetermined portion of the workpiece W including the reference pattern projected by the video camera 55 after the workpiece W is set on the workpiece support device 3 is imaged, and the three-dimensional imaging converted based on the captured imaging data. The positional deviation between the processing origin of the industrial robot 5 and the processing origin of the workpiece W is calculated by comparing the data with the reference three-dimensional workpiece data, and two of the calculated calibration data are calculated based on the data in the XY directions. The three-dimensional machining data is calibrated based on the data in the Z-axis direction, and the industrial robot is calibrated based on the calibrated three-dimensional machining data. 5 is driven to perform predetermined machining on the workpiece W.

  Thereby, even when the workpiece W is not set in a state in which the workpiece W is positioned on the workpiece support device 3, the time and labor of positioning the workpiece W with respect to the workpiece support device 3 are simplified and the workpiece W is preset. The desired processing can be performed at a high quality on the position.

  In the above description, the configuration in which the two-incident moving device 35 is driven and controlled based on the data in the X-Y axis direction of the calculated calibration data to calibrate the end mill 51 to coincide with the workpiece origin of the workpiece W. However, the three-dimensional machining data is calibrated based on the calibration data in the X, Y, and Z-axis directions, and the industrial robot 5 is driven and controlled based on the calibrated three-dimensional machining data. It is good also as a structure which processes by making the to-be-processed origin of the workpiece | work W correspond.

DESCRIPTION OF SYMBOLS 1 Work drilling apparatus as a processing apparatus with a calibration function 3 Work support apparatus 5 Industrial robot 7 Calibration apparatus 7a Frame 7b Guide rail 9 Main body frame 11 Work support member 13 Holding member 14 Turntable 15 Base 17 Electric motor 19 1st arm 23 electric motor 25 second arm 27 hand attachment member 31 hand part 35 two-dimensional movement device 37 first frame 39 first traveling body 41 first moving member 43 second frame 45 second traveling body 47 second moving member 49 electric motor 51 End mill 53 as processing tool Video camera 55 as imaging means Projector 57 as projection means Control means 59 CPU
61 Program storage area 63 Work data storage area 65 Machining data storage area 67 Reference work data storage area 69 Imaging data storage area 71 Three-dimensional imaging data storage area 73 Calibration data storage area 75 Pattern data storage area 77 Comparison means 79 Robot control means 81 Two-dimensional movement control means 83 Projection control means 85 Imaging control means 87 Detector 89 Interface W Work Wa Openings 101 to 145 as reference parts Steps

Claims (2)

In a workpiece machining apparatus for performing desired machining on a workpiece supported by a workpiece support device by driving and controlling an industrial robot based on three-dimensional machining data in the XYZ directions stored in a machining data storage area,
A two-dimensional moving means that is provided in the hand portion of the industrial robot and moves the workpiece processing tool in the two-dimensional direction of the XY axis with respect to the opposite workpiece surface;
Projection means for projecting a reference pattern onto a workpiece location on the workpiece surface supported by the workpiece support device;
An imaging means for outputting imaged data of a workpiece to be processed on the workpiece surface supported by the workpiece support device and a reference pattern projected on the location ;
3D reference work data based on imaged data of a workpiece pattern on the workpiece surface imaged when the workpiece is supported in a normal state by the workpiece support device, and the workpiece support device when machining the workpiece 3D imaging data converted from imaging data of a workpiece pattern on the workpiece surface supported by the workpiece and a reference pattern projected on the workpiece, machining start position data of the workpiece machining tool, and a three-dimensional direction relating to the workpiece machining position (workpiece Storage means for storing three-dimensional machining data in a two-dimensional direction of the surface and a normal direction relative to the workpiece surface) and pattern data of a reference pattern projected from the projection means to the workpiece surface ;
Comparing means for comparing the reference pattern data with the three-dimensional reference work data and the three-dimensional imaging data stored in the storage means, and determining the amount of positional deviation with respect to the three-dimensional direction of the processing origin position at the processing position;
If the 3D reference workpiece data and the 3D imaging data do not match, based on the amount of misalignment between the workpiece origin position and the machining start position of the workpiece processing tool with respect to the workpiece surface as determined by the comparison means. By controlling the movement of the workpiece tool in the two-dimensional direction of the workpiece surface by the driven two-dimensional moving means, the machining start position of the workpiece tool is made coincident with the workpiece origin position, and the normal direction of the workpiece origin point on the workpiece surface is set. Control means for correcting the processing data in the normal direction in the processing data based on the amount of displacement;
Workpiece processing equipment equipped with The first traveling body according to claim 1, wherein the two-dimensional moving means includes a first traveling body that extends in the X-axis direction or the Y-axis direction and is supported so as to reciprocate with respect to a first frame provided at an arm tip of the industrial robot. A first moving member that reciprocates the first traveling body in the extending direction of the first frame, and a reciprocating movement relative to a second frame that extends in a direction orthogonal to the first frame and is attached to the first traveling body. A workpiece processing apparatus comprising: a second traveling body that is supported and provided with a workpiece processing tool; and a second moving member that reciprocates the second traveling body in the extending direction of the second frame.

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