JP6129630B2 - Thermally assisted magnetic head element inspection method and apparatus, temperature measurement method and apparatus for micro heat source, cantilever and manufacturing method thereof - Google Patents

Description

  The present invention relates to a method and apparatus for inspecting a heat-assisted magnetic head element that measures a micro heat source using a scanning probe microscope and measures a magnetic field to inspect a heat-assisted light emitting part and a magnetic field generating part of the heat-assisted magnetic head element. The present invention relates to a method for measuring a temperature of a micro heat source and an apparatus thereof, a cantilever and a method for manufacturing the same.

  As a magnetic head for the next generation hard disk, a thermally assisted magnetic head element as described in Patent Document 1, Patent Document 2, Patent Document 3, and the like has been studied. The heat-assisted light, ie, near-field light, generated from the heat-assisted magnetic head element is in the range of several tens of nanometers (nm) or less, and the spatial distribution of this light spot and the energy density or absolute temperature as the heat source are written to the hard disk. Determine the track width. When actually operating a heat-assisted magnetic head, an inspection method for information such as the intensity distribution of the near-field light spot and the energy density or absolute temperature is an unresolved important issue.

  On the other hand, Patent Documents 4 and 5 disclose techniques for measuring a minute heat source such as a near-field light spot of the heat-assisted magnetic head based on a scanning probe microscope (SPM) inspection technique.

  Further, as a basic technique of the present invention, Patent Document 6 and Non-Patent Document 1 disclose a technique for measuring a write magnetic field generated by a magnetic head of an HDD based on a scanning probe microscope (SPM) inspection technique. ing.

JP 2010-182394 A JP 2011-86362 A JP 2011-113595 A JP 2002-243880 A JP 2005-345411 A JP 2009-230845 A

Jun Zhang Kai et al .: Development of the next width inspection technology for magnetic head elements using a magnetic force microscope: Proceedings of the 73rd Annual Conference of the Japan Society of Applied Physics 13p-H6-11, Fall 2012

  Patent Documents 1 to 3 disclose the structure of a thermally assisted magnetic head, but do not disclose a method for inspecting the thermally assisted magnetic head.

  On the other hand, in the method disclosed in Patent Document 4 relating to a heating probe and a heating probe device, a thermal resistance heating probe is used, the surface of the sample is scanned by the tip of the conductive nanotube probe, and the temperature distribution on the sample surface is determined as a heating element. The heat is directly detected as a change in resistance. This method is not suitable for an inspection apparatus suitable for mass production due to a slow scanning speed and a very expensive probe.

  Further, in Patent Document 5 relating to a micro surface temperature distribution measuring apparatus, the micro surface temperature distribution measurement is achieved by measuring the temperature change of the cantilever as the change of the resonance frequency using the temperature dependence of the resonance frequency of the cantilever. However, because it is a precondition that the entire cantilever is in a high temperature state, measurement with high spatial resolution is impossible, and it is difficult to perform high-speed measurement because the cantilever must wait until it reaches thermal equilibrium. .

  Further, Patent Document 6 relating to a magnetic head inspection method and apparatus discloses that a magnetic head element is inspected for the write track width of the magnetic head using an atomic force microscope in a state of a row bar cut out from the wafer. However, Patent Document 6 does not describe inspecting the heat generation state of the heat-assisted magnetic head. Non-Patent Document 1 discloses that a writing magnetic field generated by a magnetic head of a hard disk drive (Hard Disk Drive: HDD) is inspected using a scanning probe microscope (SPM). That is, in Non-Patent Document 1, in the measurement of the magnetic head of the HDD, the magnetic field sensitivity (Δφ) of the cantilever, that is, the cantilever generated by the magnetic force applied to the magnetic material of the cantilever probe from the alternating magnetic field generated from the magnetic head of the HDD. Focusing on the fact that the magnetic force applied to the cantilever is proportional to the saturation magnetic flux density Bs of the magnetic material in order to improve the phase change amount of the magnetic field, and improving the magnetic field sensitivity by using a magnetic material with a high saturation magnetic flux density Bs Is described. However, Non-Patent Document 1 does not describe inspecting the heat generation state of the heat-assisted magnetic head.

  The present invention solves the above-described problems of the prior art, and by inspecting a thermally assisted magnetic head element in a row bar state, it is possible to inspect the thermally assisted magnetic head as early as possible in the manufacturing process. The present invention provides an inspection method and apparatus for a thermally assisted magnetic head element, a temperature measurement method and apparatus for a micro heat source, a cantilever and a manufacturing method thereof.

  In order to solve the above-described problems, in the present invention, an inspection apparatus for inspecting a thermally assisted magnetic head element includes a table unit on which a thermally assisted magnetic head element as a sample is placed and movable in a plane, and the table. A cantilever having a probe that scans the surface of the sample placed on the means and having a magnetic film formed on the surface of the probe, and vibration that vibrates the cantilever in the vertical direction with respect to the surface of the sample Cantilever vibration is detected by irradiating light on the surface opposite to the side where the probe and the probe of the cantilever that is vibrated by this vibration drive means are formed and detecting the reflected light from the cantilever Displacement detection means, a signal for generating an alternating magnetic field from the magnetic field generator of the thermally-assisted magnetic head element, and a signal for generating near-field light from the near-field light emitter Scattering generated from the surface of the probe on which the magnetic film of the cantilever is formed by the near-field light generated from the near-field light emitting part of the thermally-assisted magnetic head element by the signal output means and the signal output from the signal output means Scattered light detection means for detecting light and an AC magnetic field generated from the magnetic field generation section by a signal output from the signal output means without emitting near-field light from the near-field light emission section, and detected by the displacement detection means. And a signal obtained by generating an alternating magnetic field from the magnetic field generator and detecting it by the displacement detector while the near-field light is emitted from the near-field light emitter by the signal output from the signal output means. And a processing means for inspecting the temperature of the near-field light emitted from the near-field light emitting section.

  In order to solve the above-described problems, the present invention provides a method for inspecting a thermally assisted magnetic head element by placing a thermally assisted magnetic head element as a sample on a table movable within a plane of a scanning probe microscope apparatus. An AC magnetic field was generated from the magnetic field generation part of the sample, and the cantilever of the scanning probe microscope having a probe having a magnetic film formed on the surface was vibrated up and down in the vicinity of the surface of the sample generating the AC magnetic field. In this state, the table is moved in a plane while irradiating the surface opposite to the side where the probe of the cantilever is formed and receiving the reflected light from the cantilever to process the signal and processing the first signal of the cantilever. 1 is detected, an alternating magnetic field is generated from the magnetic field generator of the sample, and near-field light is generated from the near-field light emitter, and the cantilever of the scanning probe microscope is exchanged. While moving the table in a plane in a state where it vibrates up and down in the vicinity of the surface of the sample that generates a magnetic field and near-field light, it is placed on the surface opposite to the side where the probe of the cantilever is formed. The signal obtained by irradiating light and receiving the reflected light from the cantilever is processed to detect the second vibration state of the cantilever, and the signal obtained by detecting the first vibration state and the second The temperature of the near-field light emitted from the near-field light emitting unit is inspected using a signal obtained by detecting the vibration state.

  In order to solve the above-described problems, a method for measuring the temperature of a micro heat source includes a cantilever having a probe in which a standard magnetic field is generated at a location where heat is locally generated by the micro heat source and a magnetic film is formed on the surface. The magnetic film formed on the probe by measuring the standard magnetic field and determining the temperature dependence of the magnetic properties of the magnetic film formed on the probe in the standard magnetic field. The standard magnetic field was measured when the magnetic properties of the magnetic film changed, and the change in the magnetic field sensitivity of the cantilever obtained by measuring the standard magnetic field when the magnetic properties of the magnetic film changed and the magnetic properties of the magnetic film at the standard magnetic field The temperature of the micro heat source was converted based on the temperature dependence.

  Further, in order to solve the above-described problems, a temperature measuring device for a micro heat source includes a table means that can be moved in a plane by placing a sample capable of generating heat locally with the micro heat source to be measured, and a surface. A cantilever having a probe that scans the surface of the sample placed on the table means, a means for generating a standard magnetic field under the sample, and the cantilever above and below the surface of the sample. By detecting light reflected from the cantilever by irradiating light on the surface of the cantilever that is vibrated by the vibration driving means and the surface opposite to the side on which the probe is formed. A signal for generating a magnetic field from a displacement detecting means for detecting cantilever vibration and a means for generating a standard magnetic field and outputting a signal for generating heat locally from a micro heat source of the sample The magnetic field sensitivity and the magnetic field strength distribution are obtained from the result of detecting the change in the vibration of the cantilever by the displacement detecting means in a state where the magnetic field is generated from the force means and the means for generating the standard magnetic field by the signal output from the signal output means. The detection means and the signal output from the signal output means generate a standard magnetic field from the magnetic field generation unit and generate heat locally from the micro heat source, while the cantilever probe is locally generated by the micro heat source. Measure the standard magnetic field generated in the magnetic field generator when the temperature rises due to excessive heat, and the measurement result (magnetic field sensitivity) of the standard magnetic field when the magnetic properties of the magnetic film formed on the probe change due to temperature rise Means for converting the temperature of the micro heat source from the magnetic field sensitivity of the cantilever based on the temperature dependence of the magnetic properties of the magnetic material obtained in advance. It was.

  According to the present invention, a minute heat source such as near-field light can be indirectly measured at high speed by measuring a magnetic field.

  Further, according to the present invention, the write magnetic field generated by the heat-assisted magnetic head element at the earliest possible stage during the manufacturing process, the intensity distribution of the heat-assisted light (near-field light), the absolute temperature of the heat-assisted light, or the magnetic field generator The surface shape of the near-field light emitting part and the positional relationship between the near-field light emitting part and the writing magnetic field generating part can be inspected nondestructively.

  Moreover, according to this invention, there exists an effect that the cantilever which can measure a micro heat source indirectly can be provided.

It is a graph which shows the difference in the hysteresis curve of the different magnetic material which concerns on the background art of 1st and 2nd embodiment of this invention. It is a graph which shows the change of the magnetic field sensitivity of a cantilever by the difference in the magnetic force added to the cantilever by the magnetic material added to the cantilever which concerns on the background art of the 1st and 2nd embodiment of this invention. It is a graph which shows the difference of the hysteresis curve under different temperature of the same magnetic material which concerns on the 1st and 2nd embodiment of this invention. 4 is a schematic diagram showing the temperature around the cantilever probe corresponding to the difference in magnetic field sensitivity of the cantilever due to the temperature dependence of the magnetic material formed in the cantilever according to the first and second embodiments of the present invention. FIG. 5 is a diagram for explaining a method of manufacturing a cantilever formed with a magnetic material according to the first and second embodiments of the present invention, and shows a side surface of the cantilever showing a state where a thin magnetic film is formed on the front surface of the cantilever and the probe. FIG. It is a figure explaining the method to measure the temperature dependence of the magnetic characteristic of the magnetic material which concerns on the 1st and 2nd embodiment of this invention, and is the same thin magnetic film as the said cantilever probe surface of the front side of a crow board | substrate It is a side view of the measurement sample which shows the state which formed. 1 is a block diagram showing a schematic configuration of a thermally-assisted magnetic head element inspection apparatus according to a first embodiment of the present invention. FIG. 3 is a schematic plan view of a Y stage and a positioning placement unit in a state where a row bar is not placed in the thermally-assisted magnetic head element inspection apparatus according to the first embodiment of the present invention. It is a figure explaining the detection principle of the thermally assisted magnetic head element inspection apparatus which concerns on 1st Embodiment of this invention, and the magnetic field of a cantilever and the thermally assisted magnetic head which shows the state in which the thermally assisted magnetic head element is generating the write-in magnetic field, It is a side view of a near-field light generating part. FIG. 3 is a diagram for explaining the detection principle of the thermally-assisted magnetic head element inspection apparatus according to the first embodiment of the present invention, and shows a cantilever and a thermally-assisted state in which the thermally-assisted magnetic head element simultaneously generates a write magnetic field and near-field light. It is a side view of the magnetic field of a magnetic head and a near-field light generation part. It is the flowchart which showed the procedure which measures the temperature of the near-field light which a thermally-assisted magnetic head element generate | occur | produces using the thermally-assisted magnetic head element inspection method and apparatus concerning 1st Embodiment of this invention. It is a flowchart which shows the procedure which test | inspects a thermally-assisted magnetic head element using the thermally-assisted magnetic head element inspection apparatus which concerns on 1st Embodiment of this invention. It is a block diagram which shows the schematic structure of the micro heat source inspection apparatus which concerns on 2nd Embodiment of this invention. It is a figure explaining the detection principle of the micro heat source test | inspection apparatus which concerns on 2nd Embodiment of this invention, Cantilever and micro heat source generation | occurrence | production which show the state which generate | occur | produces and measures the reference magnetic field in the state which does not generate | occur | produce a measurement object It is a side view of a sample and a magnetic field generation mechanism. It is a figure explaining the detection principle of the micro heat source inspection apparatus which concerns on 2nd Embodiment of this invention, and cantilever and micro heat source generation | occurrence | production sample which show the state which makes the measuring object heat | fever and produces | generates the magnetic field for a reference simultaneously, and is measuring FIG. 3 is a side view of the magnetic field generation mechanism.

  In the present invention, in the inspection apparatus for the thermally assisted magnetic head element, the magnetic characteristics of the magnetic film formed on the surface of the probe due to the temperature of the probe of the cantilever rising due to the heat generated from the heat assist portion of the thermally assisted magnetic head element Is used to estimate the temperature of the near-field light from the change in the magnetic field sensitivity of the cantilever and inspect the heat-assisted magnetic head element.

  That is, in the present invention, first, the temperature dependence of the magnetic properties of a specific magnetic material is obtained in advance. Next, when measuring a micro heat source such as near-field light generated by a thermally-assisted magnetic head using a cantilever with a magnetic material added to the tip of the probe, the write magnetic field in the immediate vicinity of the heat source is measured. By doing so, the tip of the cantilever tip contacts the micro heat source, and the temperature rises. For this reason, the magnetic properties of the magnetic material formed on the surface of the probe change with respect to the magnetic properties at room temperature, and the measurement result (magnetic field sensitivity) to the magnetic field changes. The measurement result was compared with the data on the temperature dependence of the magnetic properties of the magnetic material obtained in advance, so that the temperature of the near-field light was estimated.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiment, and the repetitive description thereof will be omitted. As long as the gist of the present invention is not exceeded, the present invention is not limited to the examples and drawings described below.

First, the principle of the present invention will be described with reference to FIGS. 1A and 1B.
The present invention inspects a write magnetic field generated by a magnetic head of an HDD using a scanning probe microscope (SPM).

  Each type of magnetic material has its own magnetic properties. When a magnetic material is placed in an external magnetic field, the internal magnetic flux density B of the material itself changes as the external magnetic field H changes. A curve indicating this change is called a hysteresis curve of the magnetic material. From the hysteresis curve, three parameters representing the magnetic properties of the magnetic material are obtained. They are the saturation magnetic flux density Bs which is the value on the vertical axis when the hysteresis curve is parallel to the horizontal axis, the coercive force Hc which is the intersection of the hysteresis curve and the horizontal axis, and the magnetic permeability μ which is the slope of the hysteresis curve. is there. FIG. 1A shows that the hysteresis curves are different for the three types of magnetic materials 1 to 3, that is, the parameters Bs, Hc and μ indicating the three magnetic characteristics are different for each magnetic material.

  On the other hand, in Non-Patent Document 1, as described above, the magnetic field sensitivity (Δφ) of the cantilever of the scanning probe microscope is applied to the magnetic film formed on the surface of the probe of the cantilever from the AC magnetic field generated from the magnetic head of the HDD. Focusing on the fact that the magnetic force applied to the cantilever is proportional to the saturation magnetic flux density Bs of the magnetic material in order to make the phase change amount of the cantilever vibration caused by the magnetic force more apparent, a magnetic material having a large saturation magnetic flux density Bs is used. The use is described.

In the present invention, the magnetic field sensitivity (Δφ) of the cantilever of the scanning probe microscope described above is the average magnetic force corresponding to one cycle of the magnetic force applied to the probe when the external magnetic field changes for one cycle, that is, the hysteresis curve of the magnetic material. It was elucidated that it can be calculated from force (F _ave ). Specifically, the above-mentioned average magnetic force (F _ave ) is calculated by a simple hysteresis curve, that is, from parameters indicating three magnetic characteristics of the saturation magnetic flux density Bs, the coercive force Hc, and the permeability μ, and the cantilever In consideration of the resonance frequency f0 of the cantilever indicating the mechanical characteristics (hardness and physical shape), an equation that can calculate the magnetic field sensitivity (Δφ) of the cantilever is derived as in (Equation 1). As the resonance frequency f0 of the cantilever, data measured and stored in advance is used.

  In this embodiment, the magnetic properties and the resonance frequency of the magnetic film formed on the surface of the cantilever probe are obtained in advance, so that the magnetic field sensitivity (Δφ) of the cantilever can be calculated using (Equation 1). (See FIG. 1B).

・・・ （数１）

なお、ａは、後述する方法により決定される定数、ｂはカンチレバーの探針の形状及び表面の形成される磁性膜の成膜条件により決まる定数である。

(Equation 1)

Here, a is a constant determined by a method to be described later, and b is a constant determined by the shape of the probe of the cantilever and the film formation conditions of the magnetic film formed on the surface.

In the present invention, in addition to the principle described above, the temperature dependence of the magnetic film (magnetic material), that is, as shown in FIG. 2A, when the same magnetic material is used, the higher the temperature of the material itself ( In the case of FIG. 2A, T ₁ <T ₂ <T ₃ ), the hysteresis curve indicating the magnetic characteristics of the magnetic material changes, and the parameters indicating the three magnetic characteristics of the saturation magnetic flux density Bs, coercive force Hc, and permeability μ are respectively shown. The phenomenon that the ferromagnetism is completely lost when the Curie temperature Tc is reduced is used.

First, the temperature dependence of the magnetic properties of a magnetic film (magnetic material) formed in advance on the surface of a probe of a cantilever of a scanning probe microscope is measured. The temperature dependence of the magnetic characteristics is such that the temperature ranges from room temperature (room temperature) to a high temperature (a temperature lower than the Curie temperature Tc) under a plurality of temperatures as shown in FIG. 2A (in the case of FIG. 2A, T ₁ ° C., T ₂ Obtain a hysteresis curve at (° C., T ₃ ° C.) and calculate an average magnetic force at each temperature (F _ave1 , F _ave2 , F _{ave3 in} the case of FIG. 2A) from this hysteresis curve (see FIG. 2B) And stored in association with the temperature information.

Next, in a state where heat is generated from the micro heat source to be measured (unknown high temperature state), the probe of the scanning probe microscope is scanned and measured, and the change in vibration of the cantilever is described later. Obtain the magnetic field sensitivity (Δφ) of the cantilever. Next, using the magnetic field sensitivity (Δφ) of the cantilever obtained by this measurement, the following (Equation 2) is derived from the above (Equation 1), and the average magnetic force under the unknown high temperature state is derived from this equation. F _ave is calculated.

・・・ （２）

最後に、該算出した平均磁気力Ｆ_ａｖｅと事前に測定して記憶しておいた常温から高温まで、各温度下のヒステリシス曲線から計算した平均磁気力（図２Ａの場合、Ｆ_ａｖe1,Ｆ_ａｖｅ２,Ｆ_ａｖｅ３）を比較することにより、前記微小熱源が発生する際（未知な高温状態）の温度を推定する。

(2)

Finally, the calculated average magnetic force F _ave and the average magnetic force calculated from the hysteresis curve at each temperature from room temperature to high temperature measured and stored in advance (in the case of FIG. 2A, F _ave1 , F _ave2 , F _ave3 ) to estimate the temperature when the micro heat source is generated (unknown high temperature state).

That is, as in (Equation 3), the average magnetic force F _ave is obtained from the magnetic field sensitivity (Δφ) of the cantilever, and the temperature (T _x ) of the micro heat source to be measured is converted (estimated) from this average magnetic force F _ave. I did it.

・・・ （３）

(3)

  FIG. 3A shows a thin magnetic film on the front surface of the probe 4 formed at the tip of the protrusion 3 of the cantilever 1 capable of measuring the temperature of the near-field light spot generated by the thermally-assisted magnetic head according to the present embodiment. It is a side view of the cantilever 1 which shows the formed state. The cantilever 1 and the protrusion 3 are generally silicon (Si), and the probe 4 formed at the tip of the protrusion 3 is silicon (Si), carbon nanotube (Carbon Nano Tube: CNT), carbon nanofiber (Carbon). It is made of either Nano Fiber (CNF) or tungsten (W). A thin magnetic film 2 (for example, any one of Co, Ni, Fe, NiFe, CoFe, and NiCo) is formed on the protrusion 3 of the cantilever 1 and the front side of the probe 4 (the left side in FIG. 3A). As a means for coating the magnetic film 2 on the protrusion 3 of the cantilever 1 and the surface of the probe 4, a vacuum deposition apparatus or a sputtering apparatus may be used. The deposition amount of the magnetic film 2 is determined by the strength and size of the magnetic field generated by the measurement object, but is generally 10 nm to 40 nm. The cantilever 1 includes a probe 4 and a thin magnetic film 2 and can measure both near-field light and a magnetic field.

The material of the magnetic material 2 formed as a thin film on the surface of the protrusion 3 and the probe 4 of the cantilever 1 according to the present invention is determined by the temperature of the object to be measured. The Curie temperature Tc of the magnetic material needs to be higher than the temperature to be measured. Therefore, generally, a magnetic material having a high Curie temperature Tc is used. In addition, after the magnetic film is formed, it is placed in a heat treatment furnace and heat treatment is performed up to about the Curie temperature Tc in a strong magnetic field. This heat treatment improves crystallinity, suppresses the formation of magnetic domains, improves magnetic properties, and suppresses changes in film properties due to repeated thermal measurements of a thermally assisted magnetic head element. is there. Magnetic characteristics at each temperature of the magnetic material 2 formed on the surface of the protrusion 3 and the probe 4 of the cantilever 1 according to the present embodiment are measured using a sample 305 for measuring magnetic characteristics as shown in FIG. 3B. As shown in FIG. 3B, the magnetic property measurement sample 305 is manufactured by forming a magnetic film 304 on a substrate 303. The substrate 303 is generally glass, and a thin magnetic film 304 is formed on the front side of the substrate 303 under the same conditions (simultaneous film formation and heat treatment) when the cantilever 1 is formed. Using this magnetic property measurement sample 305, a magnetic property at each temperature of the magnetic material, that is, a hysteresis curve is measured in a VSM (vibration magnetometer: not shown) in which the environmental temperature at the time of measurement is variable. . Using this measurement result, an average magnetic force (T _ave ) corresponding to one cycle of the hysteresis curve at each temperature is calculated and stored in the storage means.

  FIG. 4A is a diagram illustrating a basic configuration of the thermally-assisted magnetic head element inspection apparatus 100 according to the present embodiment. The heat-assisted magnetic head element inspection apparatus 100 in FIG. 4A is a process before processing a wafer on which a large number of thin film magnetic head elements are formed and cutting out a slider alone (thin film magnetic head chip) in the magnetic head element manufacturing process. The state of the row bar 40 (a block in which a plurality of head sliders are arranged) or the near-field light intensity distribution generated by the heat-assisted magnetic head element in the heat-assisted magnetic head unit 50, the maximum temperature of the near-field light spot, and the heat assist The write magnetic field generated by the magnetic head can be measured.

  The heat-assisted magnetic head element inspection apparatus 100 according to the present embodiment is configured to perform a predetermined inspection using the row bar 40 or the heat-assisted magnetic head unit 50 as a workpiece. Usually, about 30 to 30 row bars 40 are arrayed and stored at a predetermined interval in the minor axis direction in a tray (not shown). Using a handling robot (not shown), the row bars 40 are taken out one by one from a tray (not shown) and conveyed to the inspection stage 101. The row bar 40 transported and installed on the inspection stage 101 is inspected as described later.

  The thermally-assisted magnetic head element inspection apparatus 100 according to this embodiment is based on a scanning probe microscope. The inspection stage 101 of the heat-assisted magnetic head element inspection apparatus 100 includes an X stage 106 and a Y stage 105 that can move the row bar 40 or the heat-assisted magnetic head unit 50 in the X and Y directions.

  The row bar 40 or the heat-assisted magnetic head unit 50 has a reference surface 1141 of the mounting portion 114 for positioning the row bar 40 or the heat-assisted magnetic head unit 50 whose one side surface in the major axis direction is provided on the upper surface of the Y stage 105. Positioning is performed in the Y direction by once being abutted against the step surface formed on the Y stage 105. The mounting portion 114 is provided with a step portion 1142 that substantially matches the shape of the row bar 40 or the heat-assisted magnetic head unit 50. The row bar 40 or the heat-assisted magnetic head unit 50 is shown in FIG. 4B (plan view of the Y stage 105 and the positioning mounting unit 114 in a state where the row bar 40 or the heat-assisted magnetic head unit 50 is not mounted). By contacting the bottom surface 1143 and the side surface 1144 of the stepped portion 1142, they are installed at predetermined positions in the Z direction and the X direction.

  The rear surface (reference surface 1141) of the stepped portion is in contact with the rear surface of the row bar 40 or the heat-assisted magnetic head unit 50 (the surface opposite to the surface having the connection terminals of the heat-assisted magnetic head element). Each of the contact surfaces 1143 and 1144 includes a reference surface that is parallel to and orthogonal to the moving direction of the X stage 106 (X axis) and the moving direction of the Z stage 104 (Z axis). Positioning in the X direction and the Z direction is performed by placing the row bar 40 in contact with the bottom surface 1143 and the side surface 1144 of the stepped portion 1142 of the Y stage 105.

  Above the Y stage 105, a camera 103 for measuring the amount of displacement of the row bar 40 or the heat-assisted magnetic head unit 50 is provided. The Z stage 104 is fixed to the column 1011 of the inspection stage 101, and moves the cantilever 1 in the Z direction. The X stage 106, the Y stage 105, and the Z stage 104 of the inspection stage 101 are each composed of a piezo stage that is driven by a piezo element (not shown). When the predetermined positioning of the row bar 40 is completed, the excitation signal output from the control unit PC30 and the light emission signal or directly the excitation laser 401 are supplied to the row bar 40 or the heat-assisted magnetic head unit 50, and the row bar 40 or heat In the assisted magnetic head unit 50, the writing field generating unit 502 of the heat-assisted magnetic head element of the thermally assisted magnetic head magnetic field / near-field light generating unit 501 (see FIG. 5A) can generate a magnetic field on the mounting unit 114. In a state where the light emitting unit 504 can emit light, it is sucked and held by a suction means (not shown) provided on the Y stage 105.

  The piezo driver 107 drives and controls piezo elements (not shown) that drive the X stage 106, Y stage 105, and Z stage 104 of the inspection stage 101, respectively. The control unit PC30 is configured by a control computer having a basic configuration of a personal computer (PC) including a monitor. As shown in the figure, a cantilever capable of measuring both the near-field light and the magnetic field is located above the row bar 40 or the heat-assisted magnetic head unit 50 placed on the Y stage 105 of the inspection stage 101. 1 is arranged. The cantilever 1 is attached to a vibration unit 122 provided below the Z stage 104. The excitation unit 122 is composed of a piezo element, and an alternating voltage having a frequency near the mechanical resonance frequency is applied by the excitation voltage from the piezo driver 107, and the probe 4 at the tip of the cantilever 1 is moved in the vertical direction (Z direction). Vibrated.

  The vibration in the Z direction of the probe 4 of the cantilever 1 is detected by a displacement detection unit including a semiconductor laser element 109 and a displacement sensor 110 composed of a four-split optical detector element. In this displacement detector, the laser beam emitted from the semiconductor laser element 109 is irradiated on the surface of the cantilever 1 opposite to the surface on which the probe 4 is formed, and the laser beam reflected by the cantilever 1 enters the displacement sensor 110. .

  The displacement sensor 110 is a four-divided sensor in which the light receiving surface is divided into four regions, and the laser incident on each of the divided light receiving surfaces of the displacement sensor 110 is photoelectrically converted and output as four electric signals. . Here, in the displacement sensor 110, when the laser is irradiated from the semiconductor laser element 109 in a state where the cantilever 1 is not vibrated by the vibration unit 122, that is, in a stationary state, the reflected light from the cantilever 1 is 4 It is installed at a position where it is equally incident on each of the light receiving surfaces divided into two.

  The differential amplifier 111 performs predetermined arithmetic processing on the difference signal of the four electrical signals output from the displacement sensor 110 and outputs the result to the DC converter 112. That is, the differential amplifier 111 outputs a displacement signal corresponding to the difference between the four electrical signals output from the displacement sensor 110 to the DC converter 112. Therefore, in a state where the cantilever 1 is not vibrated by the vibration unit 122, the position of the cantilever 1 is adjusted as described above, so that the output from the differential amplifier 111 becomes zero. The DC converter 112 is configured by an RMS-DC converter (Root Mean Squared to Direct Current converter) that converts a displacement signal output from the differential amplifier 111 into an effective DC signal.

  The displacement signal output from the differential amplifier 111 is a signal corresponding to the displacement of the cantilever 1 and is an AC signal because the cantilever 1 vibrates. A signal output from the DC converter 112 is output to the feedback controller 113. The feedback controller 113 outputs a signal based on the signal input from the DC converter 112 to the control unit PC30 as a signal for monitoring the current magnitude of the cantilever 1 and adjusts the magnitude of the excitation of the cantilever 30. Is output to the control unit PC30 as a control signal for the Z stage 104. This signal is monitored by the control unit PC30, and the piezo driver 107 controls a piezo element (not shown) that drives the Z stage 104 according to the value, so that the initial position of the cantilever 1 is determined before the measurement is started. I try to adjust it.

  In this embodiment, a height of several micrometers from the light emitting surface of the heat-assisted magnetic head is set as the initial position of the cantilever 1. The transmitter 102 supplies an oscillation signal for exciting the cantilever 1 to the piezo driver 107. The piezo driver 107 drives the excitation unit 122 based on the oscillation signal from the transmitter 102 to vibrate the cantilever 1 at a predetermined frequency.

  5A and 5B are diagrams showing an outline of the principle of detecting the light emission state and temperature of near-field light by the thermally-assisted magnetic head element inspection apparatus 100 shown in FIG. 4A, and the magnetic field / near field of the thermally-assisted magnetic head. The configuration of the writing magnetic field generation unit 502 of the light generation unit 501, the heat assist light (near field light) light emission unit 504, and the detector 115 that detects the scattered light generated by the near field light is enlarged and shown together with the cantilever 1. FIG.

  As shown in FIG. 5A, the cantilever 1 has a probe 4 in which the magnetic film 3 of the cantilever 1 is formed at a height corresponding to the head flying height Hf from the surface of the magnetic field of the thermally assisted magnetic head, the near-field light generator 501. It is positioned by the Z stage 104 so that the front end portion is positioned. By driving the X stage 106 and the Y stage 105 with the piezo driver 107, the cantilever 1 scans a plane parallel to the recording surface 510 of the thermally-assisted magnetic head within a range of several hundred nm to several μm.

  In this embodiment, the row bar 40 or the heat-assisted magnetic head unit 50 is moved by driving the X stage 106 and the Y stage 107. At this time, the magnetic field / near-field light generation unit 501 of the heat-assisted magnetic head is supplied with the excitation signal and the light emission signal 401 or directly the excitation laser beam output from the control unit PC30 shown in FIG. The write magnetic field generator 502 of the head magnetic field / near-field light generator 501 generates a write magnetic field (AC magnetic field) 503, and the near-field light emitter 504 generates thermal assist light (near-field light) 505 at different timings or simultaneously. .

  In this embodiment, first, in FIG. 5A, the magnetic field generated from the magnetic field generator 502 without generating the heat assist light (near field light) from the near field light emitter 504 of the magnetic field / near field light generator 501 is shown. Indicates the state to be measured. That is, before measuring the heat by the heat-assisted light (near-field light) generated from the near-field light emitting unit 504, the write magnetic field (from the write-field generating unit 502 of the magnetic field / near-field light generating unit 501 of the heat-assisted magnetic head) (AC magnetic field) 503 is generated, and the X stage 106 on which the row bar 40 or the heat-assisted magnetic head unit 50 is placed is piezo controlled by the piezo driver 107 in a state where the cantilever 1 is vibrated by the vibration unit 122. A state in which the element (not shown) is moved in the X direction at a constant speed is shown. In this state, when the probe 4 of the cantilever 1 enters the region of the write magnetic field 503 generated by the write magnetic field generator 502, the thin-film magnetic body 2 formed on the surface of the probe 4 is magnetized, and the probe When 4 receives a magnetic force, the vibration state (phase and amplitude) of the cantilever 10 changes.

  This change in vibration (phase and amplitude) is detected by the displacement sensor 110 in FIG. 5A. That is, when the vibration state (phase and amplitude) of the cantilever 1 changes, the incident position on the light receiving surface divided into four of the displacement sensor 110 of the laser emitted from the semiconductor laser element 109 and reflected by the cantilever 1 changes. To do. A change in the vibration state of the cantilever 1 can be detected by detecting the outputs from the four light receiving surfaces of the displacement sensor 110 with the differential amplifier 111. Among the changes in the vibration state, the amount of change in the vibration phase is defined as the magnetic field sensitivity Δφ of the cantilever 1. The reason why the magnetic field sensitivity Δφ of the cantilever 1 in the room temperature state is measured is to suppress variation due to individual differences between the cantilever 1 and the magnetic head to be measured, and is recorded as a measurement standard. By measuring and obtaining the magnetic field sensitivity Δφ of the cantilever 1 in this way, this can be substituted into (Equation 1) to determine the constant a.

  FIG. 5B shows a write magnetic field (alternating magnetic field) 503 from the write magnetic field generator 502 of the magnetic field / near-field light generator 501 of the heat-assisted magnetic head, and a heat-assisted light (near-field light) 505 from the near-field light emitter 504. Are simultaneously generated, and a state in which the detector 115 detects the scattered light generated from the magnetic film 2 on the surface of the probe 4 by the measurement of the magnetic field similar to the above measurement and the heat assist light (near field light) 505 is shown. When the probe 4 reaches the region where the near-field light 505 is generated by the near-field light emitting unit 504 by driving the X stage 106 under the control of the piezo driver 107, the protrusion of the probe 4 and the cantilever 1 The magnetic film 2 formed on the surface 3 generates scattered light enhanced by the localized surface plasmon enhancement effect, and at the same time, the magnetic film 2 is brought into contact with the near-field light 505 that is a micro heat source, whereby the magnetic film 2 It is heated by light and becomes a relatively high temperature.

  Of the scattered light generated from the magnetic film 2, the scattered light incident on the detector 115 is detected by the detector 115, and the output signal 402 from the detector 115 is input to the control unit PC 30, and the X stage 106 by the piezo driver 107 is connected. By processing using the control signal of the Y stage 105, the intensity distribution of the scattered light is obtained.

  Further, since the magnetic film 2 is heated by the near-field light and becomes a relatively high temperature, the magnetic characteristics of the magnetic material 2 change with respect to the magnetic characteristics measured at room temperature as shown in FIG. 5A. The magnetic field sensitivity Δφ of the cantilever 1 also changes with respect to the value at room temperature. At this time, due to the principle of the heat-assisted magnetic head, the location where the near-field light is emitted and the location where the write magnetic field is generated are separated by a distance of 30 nm or less, which is about the same as the diameter of the probe 4 with the magnetic film 2 added. Alternatively, since the diameter of the probe 4 is larger, it can be approximated that the near-field light generation region and the magnetic field generation region are the same place.

The magnetic field sensitivity Δφ obtained by measurement in a state where the heat assist light (near field light) is generated is recorded, and the difference from the magnetic field sensitivity Δφ of the cantilever 1 in the normal temperature state previously recorded as the reference value. The magnetic field sensitivity Δφ obtained as a difference from the reference value is substituted into the above (Equation 2) to calculate the average magnetic force F _ave under a high temperature state. By comparing this calculated average magnetic force F _ave with the average magnetic force calculated from the hysteresis curve at each temperature from room temperature to high temperature, which is measured and stored in advance, the proximity that is a minute heat source of the heat-assisted magnetic head The temperature generated by the heat assist light (near field light) generated by the field light generation unit 504 is estimated. Then, it is possible to determine whether the near-field light generating unit 504 is good or not by checking whether the estimated temperature is within a predetermined range set in advance.

  Further, the distribution of the magnetic field strength is obtained from the information of the magnetic field detected by scanning the region including the magnetic field generation unit 502 with the probe 4, and the obtained distribution of the magnetic field strength is compared with a preset reference of the magnetic field strength distribution. Thus, the quality of the magnetic field generation unit 502 can be determined.

FIG. 5C shows the flow of processing based on FIGS. 5A and 5B described above.
First, in a state where the row bar 40 or the heat-assisted magnetic head unit 50 is placed and positioned on the mounting unit 114 on the Y stage 105, the inspection stage is moved to the row bar 40 or the heat-assisted magnetic head unit 50 by a driving means (not shown). Is moved to the position of the cantilever 1 to align the probe 4 of the cantilever 1 with the position to be measured of the row bar 40 or the heat-assisted magnetic head unit 50 in the XY plane, and then the piezo driver 107 performs the Z stage. 104 is controlled to position the cantilever 1 so that the distance between the tip of the probe 4 and the surface of the magnetic field / near-field light generating unit 501 of the row bar 40 or the heat-assisted magnetic head unit 50 becomes the head flying height Hf. (S501).

  Next, under the control of the control unit PC30, a write magnetic field (alternating magnetic field) 503 is generated from the write field generator 502 of the magnetic field / near-field light generator 501 of the row bar 40 or the heat-assisted magnetic head unit 50 (S502). At this time, the near-field unit generator 504 does not generate the heat assist light (near-field light) 505.

  Next, in a state in which the write magnetic field (alternating magnetic field) 503 is generated from the write magnetic field generation unit 502, the X stage 106 is driven by the piezo driver 107 while the cantilever 1 is vibrated by the vibration unit 122, and is constant in the X direction. The magnetic field / near-field light generating unit 501 is scanned with the cantilever 1 by moving it at a constant distance at a speed (S503). After moving the X stage by a certain distance, the Y stage 105 is driven by the piezo driver 107 and moved by one pitch in the Y direction, and then the X stage 106 is moved in the reverse direction (−X direction) by the cantilever 1. By repeating the scanning, scanning is performed by the cantilever 1 over the entire surface of a predetermined inspection region (S504).

  During this scanning, the laser emitted from the laser light source 109 and reflected by the cantilever 1 is detected by the displacement sensor 110, and the detection signal is sent to the control unit PC30 via the differential amplifier 111, the DC converter 113, and the feedback controller 113. It is done.

  After the inspection of the entire predetermined inspection area with the cantilever 1, the write magnetic field (alternating magnetic field) 503 is generated from the write magnetic field generator 502, and the control unit PC30 controls the row bar 40 or the heat-assisted magnetic head alone. The 50 near-field generation units 504 are controlled to generate heat assist light (near-field light) 505 (S505).

  Next, in a state where the write magnetic field (alternating magnetic field) 503 is generated from the write magnetic field generation unit 502 and the heat assist light (near field light) 505 is generated from the near-field individual generation unit 504, the excitation unit 122 cantilever 1 The cantilever 1 scans the magnetic field / near-field light generating unit 501 by driving the X stage 106 with the piezo driver 107 and moving the X stage 106 at a constant speed in the X direction while vibrating (S506). After moving the X stage by a certain distance, the Y stage 105 is driven by the piezo driver 107 and moved by one pitch in the Y direction, and then the X stage 106 is moved in the reverse direction (−X direction) by the cantilever 1. By repeating the scanning, the entire cantilever 1 is scanned with the cantilever 1 (S507).

  During this scanning, the laser emitted from the laser light source 109 and reflected by the cantilever 1 is detected by the displacement sensor 110, and the detection signal is sent to the control unit PC30 via the differential amplifier 111, the DC converter 113, and the feedback controller 113. It is done. Further, the scattered light generated from the magnetic film 2 formed on the surfaces of the cantilever 1 and the probe 4 when scanning the near-field unit 504 where the heat assist light (near-field light) 505 is generated. Of these, scattered light incident on the detector 115 is detected by the detector 115. The output signal 402 from the detector 115 is input to the control unit PC30 and processed using the control signals of the X stage 106 and the Y stage 105 by the piezo driver 107, thereby obtaining the intensity distribution of scattered light.

  In the control unit PC30, the cantilever at normal temperature is detected from the detection signal of the displacement sensor 110 detected in a state where the write magnetic field (alternating magnetic field) 503 is generated from the write magnetic field generation unit 502 without generating the heat assist light (near field light) 505. 1 and a detection signal of the displacement sensor 110 detected in a state where the write magnetic field (alternating magnetic field) 503 is generated from the write magnetic field generation unit 502 while generating the heat assist light (near field light) 505, and a high temperature state. The difference between the magnetic field sensitivities Δφ of the cantilever 1 is obtained, and the processing using the above-described (Equation 1) to (Equation 3) is performed using the magnetic field sensitivity Δφ of the obtained difference, and the near-field light generating unit By estimating the temperature of the thermally assisted light (near field light) generated from 504 and checking whether this estimated temperature is within the predetermined range set in advance, The quality of the field light generator 504 is determined (S508).

  Further, in the control unit PC30, a detection signal from the displacement sensor 110 detected in a state where the write magnetic field (alternating magnetic field) 503 is generated from the write magnetic field generation unit 502 while generating the heat assist light (near-field light) 505, Using the X stage 106 and Y stage 105 control signals from the piezo driver 107, the intensity distribution of the write magnetic field (alternating magnetic field) 503 in the state in which the heat assist light (near field light) 505 is generated is obtained and stored in advance. The quality distribution of the write magnetic field (alternating magnetic field) 503 is judged to be good or bad by comparing with the reference value (S509).

  Further, in the control unit PC30, an output signal 402 from the detector 115 that has detected the scattered light generated from the magnetic film 2 is input and processed by using the control signals of the X stage 106 and the Y stage 105 by the piezo driver 107. The intensity distribution of the scattered light is obtained, the intensity distribution of the heat assist light (near field light) 505 is obtained based on this, and the intensity distribution of the heat assist light (near field light) 505 is compared with a reference value stored in advance. The quality of the intensity distribution is determined (S510).

  Further, in the control unit PC30, the positions of the write magnetic field generation unit 502 and the near field light generation unit 504 are determined based on the relationship between the intensity distribution of the write magnetic field (alternating magnetic field) 503 and the intensity distribution of the heat assist light (near field light) 505. A relationship (interval and positional deviation) is obtained, and it is determined whether the positional relationship is within a predetermined range (S511).

  FIG. 6 is a flowchart showing a procedure of an operation for inspecting the row bar 40 using the above-described heat-assisted magnetic head element inspection apparatus 100. First, one row bar 40 is taken out from the supply tray by a handling unit (not shown), transported onto the inspection stage 101, and the row bar 40 is pressed against the reference surface 1141 of the Y stage 105. The row bar 40 is placed on the stepped portion 1142 formed by the above (S601). Next, the camera 103 captures the row bar 40 to obtain the position information of the row bar 40, and based on the obtained position information, the X stage 106 or the Y stage 105 is driven to perform alignment for adjusting the position of the row bar 40 ( (S602), the row bar 40 is moved to the measurement position (S603).

Next, measurement is performed according to the procedure described in FIG. 5C (S604).
Next, it is checked whether there is a place to be further measured (S605). If there is a place to be further measured, the cantilever 1 is moved up by the Z stage 104 and moved to the next head measurement position (S606). ), S604 measurement is performed. On the other hand, if there is no further measurement location, the row bar 40 that has been measured with the cantilever 1 raised by the Z stage 104 is taken out by a handling unit (not shown) and stored in the collection tray (S607).

  Next, it is checked whether or not there is an uninspected row bar 40 in a supply tray (not shown) (S608). If there is an uninspected row bar 40, the process returns to S601 and the uninspected row bar 40 is supplied to the supply tray ( It is taken out from (not shown) (S609), conveyed to the inspection stage 101, and the steps from S601 are executed. On the other hand, when there is no uninspected row bar 40 in the supply tray, the measurement ends (S610).

  According to this embodiment, the maximum temperature of the near-field light, the write magnetic field intensity distribution, the near-field light intensity distribution, and the write magnetic field generation of the heat-assisted magnetic head element formed on the row bar 40 in the heat-assisted magnetic head element inspection apparatus 100. The measurement of the positional relationship between the part 502 and the near-field light generating part 504 can be detected by two scans by the cantilever 1, and the inspection can be performed upstream of the manufacturing process and in a relatively short time. .

  FIG. 7 is a block diagram showing the overall configuration of a micro heat source temperature inspection apparatus 200 according to the second embodiment of the present invention. The micro heat source temperature inspection device 200 shown in FIG. 7 has basically the same structure as the heat-assisted magnetic head element inspection device 100 shown in FIG. 4A described in the first embodiment. In the configuration of the minute heat source temperature inspection apparatus 200 shown in FIG. 7, parts that are the same as those in the configuration of the heat-assisted magnetic head element inspection apparatus 100 described with reference to FIG.

  The second embodiment is different from the first embodiment in that the measurement object of the second embodiment is not limited to the one that can generate a magnetic field with a minute heat source such as a heat-assisted magnetic head. Therefore, in this embodiment, as shown in FIG. 7, in order to make it possible to measure a sample 700 having a minute heat source and not having a magnetic field generator, as shown in FIGS. 8A and 8B. In addition, a standard magnetic field generating means 701 is installed in the measurement unit. By measuring the magnetic field generated from the standard magnetic field generating means 701 with the cantilever 1, it is possible to measure the temperature of the micro heat source that is the measurement target. When the object to be measured is near-field light, the light detector 115 capable of detecting the scattered light generated from the magnetic film 2 formed on the tip portion of the cantilever 1 is used as in the first embodiment. The intensity distribution of field light can also be measured.

  8A and 8B are diagrams showing an outline of the principle of detecting the temperature of the micro heat source by the micro heat source inspection apparatus 200 shown in FIG. 7, and the configurations of the micro heat source generation sample 700 and the standard magnetic field generation means 701 are enlarged. FIG. 5 is a view shown together with the cantilever 1.

  First, as shown in FIG. 8A, a magnetic field 803 is generated in the standard magnetic field generator 701 by an excitation signal 711 (see FIG. 7) oscillated from the control unit PC30, and the vicinity of the surface of the sample 700 is scanned with the cantilever 1 to generate a magnetic field. The change in vibration of the cantilever 1 by 803, that is, the magnetic field sensitivity Δφ is measured. The measurement purpose and method are the same as those described in Example 1 with reference to FIG. 5A. However, in the present embodiment, since the magnetic field 803 generated by the magnetic field generator 701 is unchanged, the above measurement is for measuring variation in vibration of the cantilever 1.

  Next, as shown in FIG. 8B, the standard magnetic field generating means 701 and the minute heat source generating sample 700 are operated by the excitation signal 711 and the heat generation signal 712 (see FIG. 7) oscillated from the control unit PC30, and the standard magnetic field 803 is obtained. A minute heat source 805 is generated simultaneously, and the vicinity of the surface of the sample 700 is scanned with the cantilever 1 to measure the magnetic field 803. The measurement purpose and method are the same as those described in the first embodiment with reference to FIG. 5B.

  In this embodiment, the method for determining the temperature of the minute heat source 805 generated by the minute heat source generation sample 700 using the measurement result is basically the same as that in the first embodiment.

  According to this embodiment, there is an effect that the measurement time for the conventional micro heat source can be greatly reduced, and the measurement cost and the spatial resolution can be greatly improved.

  Although the probe 4 of the cantilever 1 described in the first and second embodiments has been described as having a pyramid shape, the present invention is not limited to this shape. As for the probe material, carbon nanotube (Carbon Nano Tube: CNT), carbon nanofiber (Carbon Nano Fiber: CNF) or tungsten (W) has higher thermal conductivity than silicon (Si) ( Example: CNT: 3000 W / m · K, Si: 168 W / m · K), higher measurement sensitivity can be expected.

  DESCRIPTION OF SYMBOLS 1 ... Cantilever 2 ... Magnetic film 3 ... Protrusion part 4 of a cantilever 4 ... Probe 303 ... Glass substrate 304 ... Magnetic film 305 ... Sample for magnetic characteristic measurement 30 ... Control part PC 40 ... Rover 50 ... Heat assist magnetic head 100 ... Heat Assist magnetic head element inspection apparatus 101 ... Inspection stage 102 ... Transmitter 103 ... Camera 104 ... Z stage 105 ... Y stage 106 ... X stage 107 ... Piezo driver 109 ... Semiconductor laser element 110 ... Displacement sensor 111 ... Differential amplifier 112 ... DC Converter 113 ... Feedback controller 114 ... Placement unit 115 ... Detector 122 ... Excitation unit 130 ... Displacement detection unit 501 ... Magnetic field / near-field light generation unit 502 ... Magnetic field generation unit 504 ... Near-field light generation unit 510: Recording surface of heat-assisted magnetic head 200 ... Minute heat source temperature measurement device 700 ... Minute heat source generation sample 701 ... Standard magnetic field generation device

Claims (12)

An inspection apparatus for inspecting a heat-assisted magnetic head element,
A table means on which a heat-assisted magnetic head element as a sample is placed and movable in a plane;
A cantilever having a probe for scanning the surface of a sample placed on the table means, and a magnetic film formed on the surface of the probe;
Vibration driving means for vibrating the cantilever vertically with respect to the surface of the sample;
Detecting the vibration of the cantilever by irradiating light on the surface of the cantilever that is vibrated by the vibration driving means on the surface opposite to the side where the probe is formed and detecting the reflected light from the cantilever Displacement detecting means for
A signal output means for outputting a signal for generating an alternating magnetic field from the magnetic field generator of the thermally-assisted magnetic head element and a signal for generating near-field light from the near-field light emitter;
The scattered light generated from the surface of the probe on which the magnetic film of the cantilever is formed by the near-field light generated from the near-field light emitting part of the thermally-assisted magnetic head element is detected by the signal output from the signal output means Scattered light detecting means,
A signal obtained by generating an alternating magnetic field from the magnetic field generation unit based on a signal output from the signal output unit in a state in which no near-field light is emitted from the near-field light emitting unit, and detecting the displacement detection unit; Using the signal obtained by generating an alternating magnetic field from the magnetic field generation unit in a state in which near-field light is emitted from the near-field light emitting unit by a signal output from the output unit and detecting by the displacement detection unit An inspection apparatus for a thermally assisted magnetic head element, comprising: processing means for inspecting the temperature of near-field light emitted from the near-field light emitting unit. 2. The heat-assisted magnetic head element inspection apparatus according to claim 1, wherein the processing unit is configured to generate the magnetic field generation unit based on a signal output from the signal output unit without emitting near-field light from the near-field light emitting unit. A signal obtained by generating an alternating magnetic field from the displacement detection means,
A difference from a signal obtained by generating an alternating magnetic field from the magnetic field generation unit in a state in which near-field light is emitted from the near-field light emitting unit by a signal output from the signal output unit and detecting by the displacement detection unit. The average magnetomotive force of the magnetic film on the surface of the probe in the state in which the near-field light emitting portion is caused to emit light from the near-field light emitting unit, and the average magnetomotive force obtained from the room temperature measured and stored in advance The temperature of the near-field light emitted from the near-field light emitting unit is estimated by comparing with the average magnetic force at each temperature up to a high temperature, and the estimated near-field light temperature is compared with preset data. An inspection apparatus for a heat-assisted magnetic head element, wherein the temperature of the near-field light is inspected. 3. The inspection apparatus for a thermally assisted magnetic head element according to claim 2, wherein the processing means uses the surface of the probe as an average magnetic force at each temperature from room temperature to high temperature which is measured and stored in advance. An inspection apparatus for a thermally assisted magnetic head element, wherein data of average magnetic force at each temperature from the normal temperature to a high temperature obtained by measurement using a magnetic film of the same material as the magnetic film formed on the substrate is used. 4. The thermal assist magnetic head element inspection apparatus according to claim 1, wherein the processing unit is further configured to emit the near-field light from the signal output unit without emitting the near-field light from the near-field light emitting unit. A near-field light is emitted from the near-field light emitter by a signal obtained by generating an alternating magnetic field from the magnetic field generator by the output signal and detected by the displacement detector, and a signal output from the signal output means. The intensity distribution of the near-field light emitted from the near-field light emitting part of the thermally-assisted magnetic head element by processing the signal obtained by detecting the scattered light with the scattered light detection means in the state of being generated, and the generation of the magnetic field An inspection apparatus for a thermally assisted magnetic head element, further comprising: inspecting at least one of an intensity distribution of an alternating magnetic field generated from the unit and a positional relationship between the magnetic field generation unit and the near-field light emitting unit. 5. The heat-assisted magnetic head element inspection apparatus according to claim 1, wherein the heat-assisted magnetic head element is inspected in a row bar state. . A method for inspecting a thermally assisted magnetic head element, comprising:
The heat-assisted magnetic head element as a sample is placed on a table movable within the plane of the scanning probe microscope apparatus,
An alternating magnetic field is generated from the magnetic field generator of the sample,
The table is moved in a plane while the cantilever of a scanning probe microscope having a probe having a magnetic film formed on its surface is vibrated up and down in the vicinity of the surface of the sample generating the AC magnetic field. Detecting the state of the first vibration of the cantilever by processing the signal obtained by irradiating the surface of the cantilever opposite to the side where the probe is formed and receiving the reflected light from the cantilever And
An alternating magnetic field is generated from the magnetic field generator of the sample and near-field light is generated from the near-field light emitter,
The probe of the cantilever is moved in a plane while the cantilever of the scanning probe microscope is vibrated up and down in the vicinity of the surface of the sample generating the alternating magnetic field and generating the near-field light. Detecting a second vibration state of the cantilever by processing a signal obtained by irradiating the surface opposite to the side where the needle is formed and receiving reflected light from the cantilever;
The temperature of the near-field light emitted from the near-field light emitting unit is inspected using the signal obtained by detecting the first vibration state and the signal obtained by detecting the second vibration state. A method for inspecting a thermally assisted magnetic head element. The method for inspecting a thermally-assisted magnetic head element according to claim 6, wherein in the step of inspecting the temperature of the near-field light, a signal obtained by detecting the state of the first vibration and the second vibration are detected. The average magnetomotive force of the magnetic film on the surface of the probe in a state in which near-field light is emitted from the near-field light emitting unit is determined from the difference from the signal obtained by detecting the state. The temperature of the near-field light emitted from the near-field light emitting unit is estimated by comparing with the average magnetic force at each temperature from room temperature to high temperature that is measured and stored in advance, and the estimated near-field light A method for inspecting a thermally-assisted magnetic head element, wherein the temperature of the near-field light is inspected by comparing the temperature with a preset data. 8. The method for inspecting a thermally-assisted magnetic head element according to claim 7, wherein, in the step of inspecting the temperature of the near-field light, the average magnetic force at each temperature from room temperature to high temperature that is measured and stored in advance. As described above, heat-assisted magnetism is characterized by using data on average magnetic force at each temperature from the normal temperature to the high temperature obtained by measurement using a magnetic film of the same material as the magnetic film formed on the surface of the probe. Head element inspection method. 9. The inspection method for a thermally assisted magnetic head element according to claim 6, wherein an alternating magnetic field is generated from the magnetic field generation unit in a state where no near-field light is emitted from the near-field light emission unit. A signal obtained by detecting the state of the first vibration of the cantilever, and a second field of the cantilever in a state where an alternating magnetic field is generated from the magnetic field generator and near-field light is emitted from the near-field light emitter. The signal obtained by detecting the state of vibration is processed and the intensity distribution of near-field light emitted from the near-field light emitting part of the thermally-assisted magnetic head element, the intensity of the alternating magnetic field generated from the magnetic field generating part A method for inspecting a thermally-assisted magnetic head element, further comprising the step of further inspecting at least one of a distribution and a positional relationship between a magnetic field generation unit and a near-field light emitting unit. 9. The inspection method for a heat-assisted magnetic head element according to claim 6, wherein the heat-assisted magnetic head element is inspected in a row bar state. . A standard magnetic field is generated at a location where heat is generated locally by a micro heat source,
Measure the standard magnetic field using a cantilever having a probe with a magnetic film formed on the surface,
Finding the temperature dependence of the magnetic properties in the standard magnetic field of the magnetic film formed on the probe,
The standard magnetic field is measured in a state where the temperature of the probe rises due to heat generated from the micro heat source and the magnetic characteristics of the magnetic film formed on the probe change,
Based on the change in magnetic field sensitivity of the cantilever obtained by measuring the standard magnetic field in a state where the magnetic characteristics of the magnetic film have changed, and the temperature dependence of the magnetic characteristics of the magnetic film in the standard magnetic field, Convert temperature,
A method for measuring the temperature of a minute heat source. A table means capable of moving within a plane by placing a sample capable of generating heat locally with a micro heat source to be measured;
A cantilever having a probe having a magnetic film formed on the surface and scanning the surface of the sample placed on the table means;
Means for generating a standard magnetic field under the sample;
Vibration driving means for vibrating the cantilever vertically with respect to the surface of the sample;
Detecting the vibration of the cantilever by irradiating light on the surface of the cantilever that is vibrated by the vibration driving means on the surface opposite to the side where the probe is formed and detecting the reflected light from the cantilever Displacement detecting means for
A signal output means for generating a magnetic field from the means for generating the standard magnetic field and outputting a signal for generating heat locally from the micro heat source of the sample;
The magnetic field sensitivity and the magnetic field strength distribution are obtained from the result of detecting the change in vibration of the cantilever by the displacement detecting means in a state where the magnetic field is generated from the means for generating the standard magnetic field by the signal output from the signal output means. Detection means;
In the state where the standard magnetic field is generated from the means for generating the standard magnetic field by the signal output from the signal output means and the heat is generated locally from the micro heat source, the probe of the cantilever is locally generated by the micro heat source. Measurement of the standard magnetic field generated by the means for generating the standard magnetic field in a state in which the temperature is increased due to a typical heat, and the standard magnetic field in a state in which the magnetic properties of the magnetic film formed on the probe due to the temperature increase have changed. Means for converting the temperature of the micro heat source from the magnetic field sensitivity of the cantilever based on the measurement result (magnetic field sensitivity) and the temperature dependence of the magnetic properties of the magnetic material obtained in advance;
An apparatus for measuring a temperature of a micro heat source, comprising:

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