JP6120646B2 - Coaxial nozzle of laser processing machine and laser processing method using the coaxial nozzle - Google Patents

Description

  The present invention relates to a coaxial nozzle of a laser processing machine and a laser processing method using the coaxial nozzle.

  Conventionally, the laser coaxial nozzle (laser nozzle) 200 prevents the reflected light from the welded portion from returning to the laser oscillator and its optical system and damaging the laser oscillator and its optical system when welding workpieces. In order to do this, it is inclined 10 ° to 20 ° with respect to the processed surface of the workpiece W (see FIG. 2).

  In addition, Patent Literature 1 to Patent Literature 4 can be listed as literatures related to the prior art.

JP 7-68382 A Japanese Patent Publication No.4-2353 Japanese Patent Laid-Open No. 7-155556 Japanese Patent Laid-Open No. 51-135859

  By tilting the laser nozzle, damage to the laser oscillator and its optical system can be prevented, but the reflected light from the work surface of the workpiece hits (irradiates) the laser nozzle, causing the laser nozzle to overheat. There is a problem that it ends up. In addition, there is an example in which a carbon nozzle is conventionally used as a countermeasure against spatter adhesion. However, in the atmosphere, the carbon nozzle starts to deteriorate due to oxidation from around 400 ° C. There is a problem with strength.

  The present invention has been made in view of the above problems, and in order to prevent the occurrence of damage in the laser oscillator and its optical system, the coaxial nozzle of the laser processing machine is tilted with respect to the workpiece processing surface. Therefore, even when the reflected light from the work surface of the workpiece hits the coaxial nozzle and the nozzle is overheated, the coaxial nozzle of the laser processing machine and the coaxial nozzle that can suppress the thermal deterioration of the nozzle and increase the heat resistance strength An object is to provide a laser processing method used.

The coaxial nozzle of the laser processing machine of the invention of claim 1 includes an inner nozzle through which the laser beam and the inner shield gas pass, emits the laser beam from the tip toward the workpiece, and ejects the inner shield gas. An outer nozzle that is provided outside the inner nozzle and that blows out an outer shield gas from a tip through a cylindrical space secured between the inner nozzle and an inert gas as the inner shield gas inside the inner nozzle And a shield gas supply means for supplying an inert gas as the outer shield gas to the cylindrical space outside the inner nozzle, and at least the tip of the inner nozzle has an inert gas atmosphere It is formed of a material to improve the heat resistance strength by being placed under at least said Lee The flow of the inner shield gas passing through the inner side of the inner nozzle is made into a laminar flow, and the inner shield gas is supplied to the inner wall of the inner nozzle to the inner wall of the inner nozzle or the peripheral wall of the cylindrical part communicating with the inner nozzle. The supply port is provided as an element of the gas supply means, and the supply port is provided with a rectifying means for laminating the flow of the inner shield gas supplied to the inside of the inner nozzle. And

  The invention of claim 2 is the coaxial nozzle of the laser processing machine according to claim 1, wherein carbon is used as a material that improves heat resistance strength by being placed in the inert gas atmosphere. Features.

Invention of Claim 3 is a coaxial nozzle of the laser processing machine of Claim 1 or 2 , Comprising: The control means to stop supply and stop supply of the inert gas by the gas supply means, The control means, Inert gas is supplied to the gas supply means during laser processing, and after the laser processing is completed, the supply of the inert gas is continued to the gas supply means until the temperature of the inner nozzle becomes a predetermined temperature or less. It is characterized by making it.

Invention of Claim 4 is a coaxial nozzle of the laser beam machine of any one of Claims 1-3, Comprising: The cooling circuit which cools the said inner nozzle is further provided, The said cooling circuit is the said inner nozzle by installing a middle cylindrical body in a cylindrical space existing between the nozzle and the outer nozzle, a space only cross jet gas flows formed so as to surround at least a portion of an outer periphery of the inner nozzle The outer periphery of the inner nozzle is cooled using the cross jet gas.

According to a fifth aspect of the present invention, in the coaxial nozzle of the laser processing machine according to any one of the first to fourth aspects, the front of the workpiece irradiated with the laser light emitted from the coaxial nozzle of the laser processing machine is The outer nozzle is blocked by the inner nozzle so that it cannot be seen.

A laser processing method according to a sixth aspect of the invention is a laser processing method using the coaxial nozzle of the laser processing machine according to the first aspect, wherein during the laser processing, an inert gas is passed between the tip of the inner nozzle and the outer nozzle. Laser processing is performed on the workpiece while jetting together from the tip, and after the laser processing is finished, the inert gas is continuously supplied during the laser processing until the temperature of the tip of the inner nozzle becomes a predetermined temperature or less. The tip of the inner nozzle is covered with the inert gas by jetting from the tip of the inner nozzle and the tip of the outer nozzle.

According to the invention of claim 1, the tip of the inner nozzle can be covered with the inert gas flowing inside the inner nozzle and the inert gas flowing outside the inner nozzle, and the atmosphere to the tip of the inner nozzle The oxygen contact inside can be blocked by an inert gas. Therefore, in order to prevent damage to the laser oscillator and its optical system, the coaxial nozzle of the laser processing machine is tilted with respect to the work surface of the work, so that the reflected light from the work surface of the work is reflected by the inner nozzle. Even when the inner nozzle is overheated by hitting the tip of the nozzle, the thermal degradation of the tip of the inner nozzle can be suppressed and the heat resistance can be increased by blocking the contact of oxygen in the atmosphere. In particular, since the flow of the inner shield gas that passes through at least the inner side of the inner nozzle is a laminar flow, the entrainment of oxygen in the atmosphere can be reliably blocked. In addition, when supplying the inner shield gas to the space inside the inner nozzle, rectifying means (such as a mesh as a gas lens) is provided from the supply port provided on the peripheral wall of the inner nozzle or the cylindrical part communicating with the inner nozzle. Since the inner shield gas is supplied in a laminar flow through the laser, the interior of the inner nozzle through which the laser beam passes and the interior of the cylindrical part communicating therewith can be completely emptied as a space free of obstacles. Does not obstruct the passage of light.

  According to invention of Claim 2, since at least the front-end | tip part of an inner nozzle is comprised with carbon, the adhesion of the sputter | spatter accompanying laser processing (mainly welding processing) can be prevented. In addition, since the tip of the inner nozzle made of carbon can be covered with an inert gas while the tip of the inner nozzle is heated by the reflected light from the workpiece, the heat resistance strength of the carbon portion is 2000 ° C. or more. Can be increased. In other words, it is known that carbon oxidizes in the vicinity of 400 ° C. in the air and causes wear and strength reduction, but does not react up to 2000 ° C. in a nitrogen gas atmosphere and 3000 ° C. in an argon gas atmosphere. Therefore, the heat resistance temperature of the carbon portion is raised by placing the carbon portion in an inert gas atmosphere of nitrogen or argon during the laser processing and until the temperature of the inner nozzle after the processing is lowered to around 400 ° C. As a result, the life of the coaxial nozzle can be extended.

According to the invention of claim 3 , the tip of the inner nozzle can be covered with the inert gas until the temperature of the tip of the inner nozzle becomes equal to or lower than a predetermined value during and after the laser processing. Therefore, the heat resistance strength of the tip portion of the inner nozzle can be reliably increased. In other words, when the tip of the inner nozzle is made of carbon having good sputter peelability, the temperature of the tip of the inner nozzle is the temperature at which oxidation occurs (for example, about The supply of the inert gas is stopped after waiting for the temperature to fall below 400 ° C. By doing so, oxidation (deterioration) due to overheating of the tip of the inner nozzle can be reliably suppressed even after the laser processing is completed, and the heat resistance strength of the tip of the inner nozzle can be increased.

  As an example of means for determining that the temperature of the tip of the inner nozzle has become equal to or lower than a predetermined value, means for determining by measuring the elapsed time (natural cooling time) from the end of processing by a timer in the control means , Means for measuring and judging the temperature of the tip of the inner nozzle with a radiation thermometer, etc., means for estimating and judging the temperature by measuring the red heat state of the tip of the inner nozzle by color discrimination using a camera, etc. Can be provided.

According to invention of Claim 4 , in order to prevent generation | occurrence | production of the damage in a laser oscillator or its optical system, the process surface of a workpiece | work is used by inclining and using the coaxial nozzle of a laser processing machine with respect to the process surface of a workpiece | work. It is possible to prevent the coaxial nozzle from overheating even when the reflected light from the coaxial nozzle hits the coaxial nozzle. Further, since the outer periphery of the inner nozzle is cooled using the cross jet gas, the coaxial nozzle can be cooled with a simple structure without newly adding a cooling medium. Moreover, since cross jet gas is used, the running cost concerning cooling of a coaxial nozzle can be reduced. Furthermore, since the space (space for cooling the inner nozzle) through which only the cross jet gas flows is formed by the intermediate cylindrical body, the flow of the shield gas (inner shield gas, outer shield gas) is not disturbed, It becomes easy to keep the concentration of the shielding gas at a desired value even at a processing point (welded portion) of the workpiece.

According to the invention of claim 5 , since the outer nozzle is configured not to be visible from the part of the workpiece irradiated with the laser beam emitted from the coaxial nozzle, the outer nozzle may be damaged by the reflection of the laser beam. This eliminates the need to replace the outer nozzle.

According to the invention of claim 6 , since the tip of the inner nozzle is covered with the inert gas until the temperature of the tip of the inner nozzle becomes equal to or lower than a predetermined value during and after the laser processing, the tip of the inner nozzle is surely The heat resistant strength of can be increased. In other words, when the tip of the inner nozzle is made of carbon or the like having good sputter peelability, the temperature of the tip of the inner nozzle is less than the temperature at which oxidation occurs (for example, about 400 ° C. for carbon). Wait and then stop supplying inert gas. By doing so, oxidation (deterioration) due to overheating of the tip portion of the inner nozzle can be suppressed, and the heat resistance strength of the tip portion of the inner nozzle can be increased.

  In addition, as a method of judging that the temperature of the tip of the inner nozzle has become a predetermined temperature or less, a method of measuring an elapsed time (natural cooling time) from the end of processing with a timer, a tip of the inner nozzle with a radiation thermometer, etc. A method of measuring and managing the temperature of the part, a method of estimating and managing the temperature by measuring the red heat state of the tip of the inner nozzle by color discrimination using a camera, and the like can be employed.

It is a perspective view which shows schematic structure of the head for laser processing by which the coaxial nozzle of the laser beam machine which concerns on embodiment of this invention is employ | adopted. It is a perspective view which shows the condition when using the coaxial nozzle of a laser processing machine inclining with respect to the process surface of a workpiece | work. It is a section perspective view showing a schematic structure of a coaxial nozzle of a laser beam machine concerning an embodiment of the present invention. It is sectional drawing which shows schematic structure of the head for laser processing by which the coaxial nozzle of the laser processing machine which concerns on embodiment of this invention is employ | adopted. It is sectional drawing which shows schematic structure of the coaxial nozzle of the laser beam machine which concerns on embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First, a schematic configuration of a laser processing head 3 in which a coaxial nozzle 1 of a laser processing machine according to an embodiment (for example, a laser welding machine that welds a workpiece using a laser beam LB) is employed will be described.

  As shown in FIGS. 1 and 4, the laser processing head 3 includes an optical element support 5, a cross jet assembly 7, a nozzle base 9, and a coaxial nozzle (coaxial nozzle of a laser processing machine) 1. ing.

  Here, for convenience of explanation, the extending direction of the axis (center axis) of the laser processing head 3 is the Z-axis direction, one end side in the Z-axis direction is the base end side (upper side), and the other end side is The tip side (lower side).

  The optical element support 5 is positioned on the base end side of the laser processing head 3, and a cross jet assembly 7 is integrally provided at the tip of the optical element support 5. The nozzle base 9 is integrally provided at the tip, and the coaxial nozzle 1 is integrally provided at the tip of the nozzle base 9.

  The optical element support 5 supports an optical element such as a condensing lens that condenses laser light, and the cross jet assembly 7 includes a condensing lens provided on the optical element support 5. In order to protect the optical element, an air curtain G4 of the cross jet gas G3 is generated (see FIG. 1).

  A laser beam LB emitted from a laser oscillator (not shown) passes through the inside of the laser processing head 3 (through the central axis of the laser processing head 3 and around this, and proceeds from the proximal end side to the distal end side in the Z-axis direction. ) It is emitted from the coaxial nozzle 1 and irradiated onto the workpiece W (see FIG. 2).

  Here, the coaxial nozzle 1 will be described in detail. The coaxial nozzle 1 includes an inner nozzle 13, an outer nozzle 15, and a cooling circuit 17.

  The inner nozzle 13 is formed in a cylindrical shape (for example, a cylindrical shape), and the laser beam and the inner shield gas (inner gas) G1 supplied to the processing portion of the laser beam pass through the inner nozzle 13 from the tip. The laser beam LB is emitted toward the workpiece W, and the inner shield gas G1 is ejected toward the processing portion with respect to the workpiece W (see FIG. 3).

  Since the laser beam passes inside the inner nozzle 13, it is not possible to attach a component (such as a gas lens mesh) that laminates the flow of the inner shield gas G1. For this reason, as will be described later, a component that realizes laminar flow is disposed at a position that does not obstruct the passage of the laser light (side of the space through which the laser light passes).

  The inner shield gas G1 is, for example, a gas supplied to a processing portion of the workpiece W in order to prevent oxidation of the workpiece W irradiated with laser light and remove generated plasma. Here, for example, nitrogen gas is used. An inert gas such as argon gas is used. Plasma is vapor of the work W evaporated by laser light (in the case where the work W is a metal, metal vapor).

  The outer nozzle 15 is formed in a cylindrical shape (for example, a cylindrical shape), and is integrally connected to the inner nozzle 13 outside the inner nozzle 13. The outer nozzle 15 surrounds the inner nozzle 13 so as to form a cylindrical (for example, cylindrical) space (gap) 19 outside the inner nozzle 13, and the cylindrical space 19 is surrounded by the outer shield. Gas (outer gas) G2 flows, and outer shield gas G2 is ejected from the tip (see FIG. 3).

  The outer shield gas G2 is, for example, a gas that is supplied around the machining site in order to prevent the workpiece W from being oxidized at the machining site irradiated with the laser beam. Here, for example, nitrogen gas, argon gas, or the like Inert gas is used.

  Since the cylindrical space 19 between the outer nozzle 15 and the inner nozzle 13 is not a part through which the laser beam passes, an ordinary laminar flow component (such as a gas lens mesh 27) can be installed. The outer shield gas G2 can be ejected along the inner nozzle 13 in a laminar state.

  The central axis of the inner nozzle 13 and the central axis of the outer nozzle 15 coincide with the axis of the laser processing head 3. The laser processing head 3 tilts the axis of the coaxial nozzle 1 by 10 ° to 20 ° with respect to a straight line perpendicular to the processing surface of the planar workpiece W in the same manner as before, and emits laser light to the workpiece W. Irradiation is performed (see FIG. 2).

  The cooling circuit 17 cools the outer periphery of the inner nozzle 13. The cooling circuit 17 is configured to cool the outer periphery of the inner nozzle 13 using a cross jet gas G3, which is a gas different from the inner gas G1 and the outer gas G2. The cross jet gas G3 is a gas for protecting an optical system such as a condenser lens through which the laser light passes from sputtering generated by laser processing.

  Note that the cross jet gas G3 used for cooling in the cooling circuit 17 is air (in the optical system of the optical element support 5 and the laser irradiation part of the workpiece W) in the cross jet assembly 7 as described above. A curtain G4 is formed to protect an optical system such as a condenser lens.

  That is, the welding spatter and the like that have entered the inner nozzle 13 are blown off by the cross jet gas G3 so that the welding spatter and the like do not adhere to the condensing lens of the optical element support 5 and the lens protection window. Can do. In FIG. 1, the path of the cross jet gas G3 is schematically shown.

  In addition, the cooling circuit 17 is configured by installing, for example, a cylindrical intermediate cylindrical body 21 in a cylindrical space (gap) 19 existing between the inner nozzle 13 and the outer nozzle 15 (intermediate cylindrical body 21). Are integrally installed in the inner nozzle 13) to form a space (for example, a cylindrical space such as a cylinder) 23 through which only the cross jet gas G3 flows. This space 23 surrounds at least a part of the outer periphery of the inner nozzle 13.

  Further, in the laser processing head 3, the portion of the workpiece W irradiated with the laser light emitted from the coaxial nozzle 1 is blocked by the inner nozzle 13 (particularly, the tip side inner nozzle 13B described later). The outer nozzle 15 and other components (the optical element support 5, the cross jet assembly 7, the nozzle base 9, etc.) are configured not to be seen. Of course, even when the axis of the coaxial nozzle 1 is tilted by 10 ° to 20 ° with respect to a straight line perpendicular to the processing surface of the planar workpiece W, it cannot be seen.

  The coaxial nozzle 1 will be described in more detail.

  As shown in FIG. 5 and the like, a cylindrical mesh support 25 is provided at the tip (lower end) of the nozzle base 9 as a cylindrical part communicating with the space 34 inside the inner nozzle 13. A cylindrical partition 29 having a diameter larger than that of the mesh support 25 is provided outside the body 25, and a cylindrical nozzle holder 33 having a diameter larger than that of the partition 29 is provided outside the partition 29.

  The partition 29 divides another space inside the cylindrical space 19 inside the outer nozzle 15, and a cylindrical inner gas is provided between the mesh support 25 and the partition 29 as another space. A chamber 31 is secured.

  A plurality of supply ports (configured by notches) 26 for supplying the inner shield gas G <b> 1 to the space 34 inside the inner nozzle 13, located at the upper part of the inner gas chamber 31, are provided on the peripheral wall of the mesh support 25. A gas lens mesh (rectifying means) 27 for laminating the flow of the inner shield gas G1 supplied to the space 35 inside the inner nozzle 13 is provided at the supply ports 26. . That is, the base end (upper end) side portion of the inner gas chamber 31 is connected through the mesh 27 to a space 35 inside the mesh support 25 (a space communicating with the space 34 inside the inner nozzle 13).

  In this case, the mesh 27 may be provided in an arc curved surface shape or a rectangular flat shape for each supply port 26, or may be provided in a cylindrical surface so as to cover all the supply ports 26. Further, the direction of the supply port 26 may not be set in a direction orthogonal to the axis of the mesh support 25 but may be set so as to be inclined in the nozzle tip direction.

  The inner gas chamber 31 is provided with an inlet (indicated by the tip of the arrow S1) that is located above the inner gas chamber 31 and into which the inner shield gas G1 flows into the inner gas chamber 31.

  The inner shield gas G1 that has passed through a flow path (not shown) provided in the nozzle base 9 passes through the inner gas chamber 31, the mesh 27, and the space 35, and passes through the space 34 inside the inner nozzle 13. It is ejected from the tip of the inner nozzle 13 and supplied to the laser processing site.

  Here, the first shield gas supply means S1 (shown for convenience in the arrow in FIG. 3) for supplying an inert gas into the inner nozzle 13 is constituted by means including the flow path of the inner shield gas G1. Has been.

  Note that at least a part of the inner shield gas G1 that reaches the inner gas chamber 31 through a flow path (not shown) provided in the nozzle base 9 is an inner surface (the inner gas chamber 31) on the tip side of the inner gas chamber 31. The inner bottom surface), and the direction is once changed to the base end side so as to pass through the mesh 27. Thus, by reversing the direction of gas flow, the inner gas flowing in from the inflow port attenuates the fluid energy at the time of inflow, and then the inner gas is discharged from the supply port 25. Therefore, the flow velocity and non-uniformity of the inner shield gas G1 are alleviated, and then introduced into the inner nozzle 13 in a laminar state by passing through the mesh 27.

  The total area of the supply port 26 provided with the mesh 27 is set so as to be smaller than the sum of the cross-sectional areas of the upper end opening and the lower end opening of the inner nozzle 13. The required flow rate of the inner shield gas G1 can be supplied below the upper limit speed (calculated by the number of lay nozzles). Therefore, even if the inner shield gas G1 introduced into the inner nozzle 13 is ejected from the tip of the inner nozzle 13 while changing the direction, the laminar flow state can be maintained.

  A cylindrical base end side inner nozzle 13A integral with the nozzle holder 33 is connected to the tip end of the partition 29, and the tip end of the base end side inner nozzle 13A is conically narrowed. A cylindrical tip-side inner nozzle 13B is connected. This tip side inner nozzle 13B is made of carbon as a countermeasure against adhesion of spatter.

  The inner end nozzle 13 is formed by the cylindrical proximal end inner nozzle 13A and the distal end inner nozzle 13B, and the distal end inner nozzle 13B is screwed to the proximal inner nozzle 13A. The side inner nozzle 13B can be easily replaced.

  In the present embodiment, the nozzle holder 33 and the base end side inner nozzle 13 </ b> A are integrally formed, and the tip end side of the nozzle holder 33 is a base end side inner nozzle 13 </ b> A that forms a part of the inner nozzle 13. Yes.

  The diameter of the intermediate cylindrical body 21 is larger than the diameter of the inner nozzle 13, is provided at the tip of the nozzle holder 33, and covers the proximal end inner nozzle 13A. A cylindrical space 23 is formed between the intermediate cylindrical body 21 and the proximal end inner nozzle 13A.

  Then, the cross jet gas G3 that has passed through the flow path (not shown) cools the proximal inner nozzle 13A through the space 23, returns to the cross jet assembly 7 through another flow path (not shown), and is condensed. In order to protect optical elements such as lenses, an air curtain G4 of a cross jet gas G3 is generated.

  In addition, the outer periphery of the base end side inner nozzle 13A is provided with fins 39 in which large outer diameter portions and small outer diameter portions are alternately arranged in the axial direction, and the base end by the cross jet gas G3 is provided. The cooling efficiency of the side inner nozzle 13A is increased.

  The diameter of the outer nozzle 15 is larger than the diameters of the inner nozzle 13 and the intermediate cylindrical body 21, and the outer nozzle 15 is provided at the tip of the nozzle holder 33, and the intermediate cylindrical body 21 and the proximal inner nozzle 13A and a part (base end side part) of the front end side inner nozzle 13B are covered.

  The outer shield gas G2 that has passed through a flow path (not shown) is provided in the opening 37 at the tip of the outer nozzle 15 through the cylindrical space 19 secured between the outer nozzle 15 and the inner nozzle 13. It passes through the gas lens mesh 27 and is jetted in a laminar flow state around the laser processing site.

  Here, the second shield gas supply means S2 (in FIG. 3) is provided by means including a flow path for supplying the outer shield gas G2 to the cylindrical space 19 secured between the outer nozzle 15 and the inner nozzle 13. (Indicated by an arrow for the sake of convenience), and the inert gas (nitrogen gas, argon gas, etc.) common to the first shield gas supply means S1 for supplying the inner shield gas G1 described above can be supplied. ing.

  Further, the laser processing machine is provided with control means (not shown) for controlling the first and second shield gas supply means described above, and this control means serves as a shield gas supply means during laser processing. While supplying the inert gas, the supply of the inert gas is continued until the temperature of the inner nozzle 13 becomes equal to or lower than the predetermined temperature after the laser processing is completed.

  According to the coaxial nozzle 1, the tip of the inner nozzle 13 can be covered with the inert gas flowing inside the inner nozzle 13 and the inert gas flowing outside the inner nozzle 13. Contact with atmospheric oxygen can be blocked by an inert gas. Therefore, in order to prevent damage to the laser oscillator and its optical system, the reflected light from the work surface of the workpiece W can be obtained by tilting the coaxial nozzle 1 of the laser processing machine with respect to the work surface of the work W. Even when the tip-side inner nozzle 13B (tip portion of the inner nozzle 13) hits the tip-side inner nozzle 13B and the tip-side inner nozzle 13B overheats, the contact of oxygen in the atmosphere is cut off to suppress thermal deterioration of the tip-side inner nozzle 13B. Heat resistance can be increased.

  Further, according to the coaxial nozzle 1, the tip side inner nozzle 13B is made of carbon as a material that improves the heat resistance strength by being placed in an inert gas atmosphere, so that laser processing (mainly welding processing) is performed. ) Can be prevented. In addition, while the tip side inner nozzle 13B is heated by the reflected light from the workpiece W, the tip of the carbon tip side inner nozzle 13B can be covered with an inert gas. The temperature can be increased to 2000 ° C. or higher. In other words, it is known that carbon oxidizes in the vicinity of 400 ° C. in the air and causes wear and strength reduction, but does not react up to 2000 ° C. in a nitrogen gas atmosphere and 3000 ° C. in an argon gas atmosphere. Accordingly, the heat resistance temperature of the carbon portion is maintained by placing the carbon portion in an inert gas atmosphere of nitrogen or argon during laser processing and until the temperature of the inner nozzle 13B on the front end side after processing is lowered to around 400 ° C. As a result, it is possible to extend the life of the front end side inner nozzle 13B.

  Moreover, according to this coaxial nozzle 1, since the flow of the inner shield gas G1 and the outer shield gas G2 passing through the inner side and the outer side of the inner nozzle 13 is a laminar flow, the entrainment of oxygen in the atmosphere can be reliably blocked. Can do.

  Further, according to the coaxial nozzle 1, when the inner shield gas G1 is supplied to the space 34 inside the inner nozzle 13, the inner wall of the inner nozzle or the peripheral wall of the cylindrical component (partition 29) communicating with the inner nozzle is provided. Since the inner shield gas G1 is supplied from the provided supply port 26 through a mesh 27 as a gas lens in a laminar state, the inside of the inner nozzle 13 through which the laser beam passes and the cylindrical part (partition 29) communicating therewith are supplied. The interior can be completely emptied as a space free of obstacles, and the passage of laser light is not hindered.

  Moreover, according to this synchronous nozzle 1, since the front end side inner nozzle 13B can be covered with the inert gas until the temperature of the front end side inner nozzle 13B becomes equal to or lower than a predetermined value during the laser processing and after the end of processing, The heat resistance strength of the side inner nozzle 13B can be increased.

  That is, when the tip side inner nozzle 13B is made of carbon, the temperature of the tip side inner nozzle 13B falls below the temperature at which oxidation occurs (for example, about 400 ° C. in the case of carbon) even after the end of laser processing. Wait and then stop supplying inert gas. By so doing, oxidation (deterioration) due to overheating of the front end side inner nozzle 13B can be reliably suppressed even after the end of laser processing, and the heat resistance strength of the front end side inner nozzle 13B can be increased.

  In addition, as a method of judging that the temperature of the tip of the inner nozzle has become a predetermined temperature or less, a method of measuring an elapsed time (natural cooling time) from the end of processing with a timer, a tip of the inner nozzle with a radiation thermometer, etc. A method of measuring and managing the temperature of the part, a method of estimating and managing the temperature by measuring the red heat state of the tip of the inner nozzle by color discrimination using a camera, and the like can be employed.

  Further, according to the coaxial nozzle 1, the cooling circuit 17 for cooling the inner nozzle 13 is provided near the heat source (a processing part such as a welded portion in the work W). By using the coaxial nozzle 1 of the machining head 3 at an angle, the inner nozzle 13 can be prevented from being overheated even when reflected light from the machining surface of the workpiece W strikes the inner nozzle 13. Even if the output of the laser beam is increased without using cooling water with high cooling efficiency, overheating of the inner nozzle 13 can be prevented. Further, the inner nozzle 13 is cooled, so that the outer nozzle 15 is also cooled by heat conduction to prevent overheating.

  Further, according to the coaxial nozzle 1, since the outer periphery of the inner nozzle 13 is cooled using the cross jet gas G3, the coaxial nozzle 1 can be configured with a simple configuration without newly adding a cooling medium. Can be cooled. Further, since the cross jet gas G3 is used, the running cost for cooling the coaxial nozzle 1 can be reduced.

  Further, according to the coaxial nozzle 1, since the space (space for cooling the inner nozzle 13) 23 in which only the cross jet gas G3 flows is formed by the intermediate cylindrical body 21, the shielding gas (inner shielding gas, The flow of the outer shield gas (G1, G2) is not disturbed, and it is easy to maintain the concentration of the shield gas G1, G2 at a desired value even at the processing point (welded part) of the workpiece W.

  Moreover, according to this coaxial nozzle 1, since it is comprised so that the outer nozzle 15 cannot be seen from the site | part of the workpiece | work W irradiated with the laser beam LB emitted from the coaxial nozzle 1 of the laser processing head 3, The outer nozzle 15 is not damaged by the reflection of the laser beam LB, and the replacement of the outer nozzle 15 becomes unnecessary.

  In the above embodiment, the inner nozzle 13 is cooled using the cross jet gas G3. However, instead of or in addition to the cross jet gas G3, a refrigerant (cooling water, cooling air) is used, and the inner nozzle 13 is You may comprise so that it may cool.

  Further, in the embodiment, the case where the tip side inner nozzle 13B is made of carbon having a high spatter adhesion preventing performance has been extended. However, the tip is made using a material (for example, a polymer material) that has high heat resistance in an inert gas. It is also possible to configure the side inner nozzle 13B.

1 Coaxial nozzle of laser processing machine 13 Inner nozzle 13B Tip side inner nozzle (tip part of inner nozzle)
15 Outer nozzle 17 Cooling circuit 19 Cylindrical space 21 Intermediate cylindrical body 23 Space
25 Mesh support (tubular parts)
26 Supply port 27 Mesh (rectifying means )
S 1 First shield gas supply means G1 Inner shield gas (inner gas)
S2 Second shield gas supply means G2 Outer shield gas (outer gas)
G3 Cross jet gas LB Laser light

Claims (6)

An inner nozzle through which the laser beam and the inner shield gas pass, emits the laser beam from the tip toward the workpiece, and ejects the inner shield gas;
An outer nozzle that is provided outside the inner nozzle, and blows out an outer shield gas from the tip through a cylindrical space secured between the inner nozzle;
Shield gas supply means for supplying an inert gas as the inner shield gas to the inside of the inner nozzle and supplying the inert gas as the outer shield gas to the cylindrical space outside the inner nozzle; ,
At least the tip of the inner nozzle is made of a material that improves heat resistance by being placed in an inert gas atmosphere,
The flow of the inner shield gas that passes at least the inner side of the inner nozzle is a laminar flow,
A supply port for supplying the inner shield gas to the inner side of the inner nozzle is provided as an element of the gas supply means on the peripheral wall of the inner nozzle or the peripheral wall of a cylindrical part communicating with the inner nozzle. A coaxial nozzle of a laser beam machine, wherein a rectifying means for laminating the flow of the inner shield gas supplied to the inside of the inner nozzle is provided at a supply port. The coaxial nozzle of the laser beam machine according to claim 1,
A coaxial nozzle for a laser beam machine, characterized in that carbon is used as a material that improves heat resistance when placed in the inert gas atmosphere. A coaxial nozzle for a laser beam machine according to claim 1 or 2,
Control means for stopping and supplying the inert gas by the gas supply means;
The control means causes the gas supply means to supply an inert gas during laser processing, and continues to the gas supply means after the laser processing ends until the temperature of the inner nozzle becomes a predetermined temperature or less. A coaxial nozzle of a laser processing machine, characterized in that gas supply is continued. It is a coaxial nozzle of the laser beam machine according to any one of claims 1 to 3,
A cooling circuit for cooling the inner nozzle is further provided;
Said cooling circuit, said by installing a middle cylindrical body in a cylindrical space existing between the inner nozzle and the outer nozzle, cross only jet gas flows of the outer periphery of the inner nozzle space at least a A coaxial nozzle for a laser beam machine, wherein the outer periphery of the inner nozzle is cooled using the cross jet gas. In the coaxial nozzle of the laser beam machine according to any one of claims 1 to 4,
A coaxial nozzle of a laser processing machine, wherein the outer nozzle is blocked by the inner nozzle from a portion of a workpiece irradiated with laser light emitted from the coaxial nozzle of the laser processing machine. A laser processing method using the coaxial nozzle of the laser processing machine according to claim 1,
During laser processing, laser processing is performed on the workpiece while injecting an inert gas from the tip of the inner nozzle and the tip of the outer nozzle, and after the laser processing is finished, the temperature of the tip of the inner nozzle is below a predetermined value. Until then, the tip of the inner nozzle is covered with the inert gas by ejecting the inert gas from the tip of the inner nozzle and the tip of the outer nozzle together during the laser processing. A laser processing method.

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