JPH03243292A - Laser welding machine - Google Patents

Laser welding machine

Info

Publication number
JPH03243292A
JPH03243292A JP2039774A JP3977490A JPH03243292A JP H03243292 A JPH03243292 A JP H03243292A JP 2039774 A JP2039774 A JP 2039774A JP 3977490 A JP3977490 A JP 3977490A JP H03243292 A JPH03243292 A JP H03243292A
Authority
JP
Japan
Prior art keywords
welding machine
condenser lens
laser welding
laser
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2039774A
Other languages
Japanese (ja)
Inventor
Seiichiro Kimura
盛一郎 木村
Kiyoshi Yamada
清 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2039774A priority Critical patent/JPH03243292A/en
Publication of JPH03243292A publication Critical patent/JPH03243292A/en
Pending legal-status Critical Current

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  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To make improvement in the ease of the laser welding procedure in a narrow joint part by using an eccentric condenser lens having a polarizing angle on the rear with the laser welding machine which deviates a focus by the condenser lens. CONSTITUTION:The focus of a laser beam 1 emitted from a laser oscillator is deviated by using the eccentric condenser lens 5 having the polarizing angle on the rear as the condenser lens of the laser welding machine which welds a work by transmitting the above-mentioned transmission beam with a transmission path to a condensing part and deviating the focus by the condenser lens. A driving mechanism for rotationally driving the eccentric condenser lens 5 is provided for this purpose to irradiate the work with the laser beam. The laser welding machine which allow the easy holding of the condenser lens and can securely join the work even in the narrow joint part is obtd. in this way.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、レーザ溶接機に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a laser welder.

(従来の技術) 従来から、重ねられた複数の鋼板などを、早く、且つ、
ていさいよく接合するために、抵抗溶接機が使われてい
る。
(Prior art) Conventionally, multiple stacked steel plates, etc. can be quickly and
A resistance welder is used to ensure a good joint.

ところがこの抵抗溶接機は、溶接回数を重ねるに従って
電極の先端が摩耗して、加圧・通電面積が増えていくの
で、定期的に電極先端を整形しなければならない。
However, with this resistance welding machine, the tip of the electrode wears out as the number of times we weld increases, and the area where pressure and current are applied increases, so the electrode tip must be reshaped regularly.

また、接合される鋼板の溶接部には、板厚で決まる一定
以上の重ね代が必要であり、更に板厚が増すに従かい溶
接電流が先に溶接され隣接した溶接部に分流するので、
これ又−室以上の間隔が必要である。
In addition, the welding part of the steel plates to be joined requires a certain amount of overlap determined by the plate thickness, and as the plate thickness increases, the welding current is welded first and then flows to the adjacent welded part.
Again, a distance of more than one room is required.

そのため、これらの欠点を補う溶接方法として第5図に
示すレーザ溶接機がある。
Therefore, a laser welding machine shown in FIG. 5 is available as a welding method that compensates for these drawbacks.

すなわち、同図のレーザ溶接機は1図示しないレーザ伝
退路の加工ヘッド13の内部に図示しないレーザ伝退路
から伝送されたレーザ光1の光軸とα。だけ偏心させた
集光レンズ12が、図示しない保持器と回転駆動機構を
介して矢印β1方向に回転自在に収納されていて1図示
しない回転駆動機構を駆動しなからレーザ光1を集光レ
ンズ12で集光することで、矢印β2のように集光点で
環状の溶接部を得るものである。
That is, in the laser welding machine shown in the figure, the optical axis of the laser beam 1 transmitted from the not-shown laser propagation path into the processing head 13 of the not-shown laser propagation path and α. A condensing lens 12 decentered by 1 is housed so as to be rotatable in the direction of arrow β1 via a holder and a rotational drive mechanism (not shown). By focusing the light at point 12, an annular welded portion is obtained at the focusing point as indicated by arrow β2.

その結果、このレーザ溶接機では、重ねられた鋼板の重
ね代が狭くても、はぼ上述の環状の溶接部の直径の幅が
あれば接合可能となり、又、環状の溶接部の間隔も要求
される仕様に応じて任意に設定することができる。
As a result, with this laser welding machine, even if the overlapping margin of stacked steel plates is narrow, they can be joined as long as the width of the diameter of the annular weld is approximately the same as described above, and the spacing between the annular welds is also required. It can be set arbitrarily according to the specifications.

(発明が解決しようとする課題) ところが、このように構成されたレーザ溶接機では、第
5図で示すように、集光レンズ12を偏心させてレーザ
光を集光するので、所定の長さの集光距離を得るために
は集光レンズ12の直径が大きくなり、その結果レーザ
ヘッド13の外形も大きくなって、ワークの形状によっ
ては狭い部分の溶接ができなくなるだけでなく、集光レ
ンズ12は揺動するので、冷却構造がやりにくくなって
実用化がむつかしい。
(Problem to be Solved by the Invention) However, in the laser welding machine configured in this way, as shown in FIG. In order to obtain a focusing distance of 12 oscillates, making the cooling structure difficult and difficult to put into practical use.

そこで1本発明の目的は、幅の狭い接合部でも容易且つ
強力に溶接することのできるレーザ溶接機を得ることで
ある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a laser welding machine that can easily and powerfully weld even narrow joints.

〔発明の構成〕[Structure of the invention]

(課題を解決するための手段と作用) 本発明は、レーザ発振器から出射されたレーザ光を集光
部に伝送し集光レンズで偏心させてワークを溶接するレ
ーザ溶接機において、集光レンズとして裏面に偏光角を
備えた偏心集光レンズを用い、この偏心集光レンズを回
転駆動させる駆動機構を設けて集光されたレーザ光をワ
ークに照射することで、集光部の保持が容易でワークを
強力に接合することのできるレーザ溶接機である。
(Means and Effects for Solving the Problems) The present invention provides a laser welding machine that transmits a laser beam emitted from a laser oscillator to a condensing section, decenters it with a condensing lens, and welds a workpiece. By using an eccentric condensing lens with a polarization angle on the back surface and installing a drive mechanism to rotate this eccentric condensing lens, the workpiece is irradiated with the focused laser light, making it easy to hold the condensing part. This is a laser welding machine that can powerfully join workpieces.

(実施例) 以下、本発明のレーザ溶接機の一実施例を図面を参照し
て説明する。
(Example) Hereinafter, an example of the laser welding machine of the present invention will be described with reference to the drawings.

まず、本発明のレーザ溶接機の集光光学系として、発明
者らは、第2図(a)に示すレンズの組み合せを考えた
First, the inventors considered a combination of lenses shown in FIG. 2(a) as a condensing optical system for the laser welding machine of the present invention.

このレーザ溶接機は、図示しない伝送路で伝送されたレ
ーザ光1を偏光角度α1のプリズム11で受光し、その
透過光をプリズム11と同径で同心状に隣接して設けら
れた集光球面レンズ12で集光して、伝送されたレーザ
光lと偏心した集光部を、プリズム11だけか又はプリ
ズム11と集光球面レンズ12を回転させることで、環
状にワークを加熱して溶融接合するものである。
This laser welding machine receives a laser beam 1 transmitted through a transmission path (not shown) with a prism 11 having a polarization angle α1, and directs the transmitted light to a condensing spherical surface that has the same diameter as the prism 11 and is provided concentrically adjacent to the prism 11. By rotating the prism 11 alone or the prism 11 and the condensing spherical lens 12, the workpiece is heated annularly and melted and bonded by concentrating the transmitted laser beam l and the eccentric condensing part by the lens 12. It is something to do.

ここで、集光点の回転半径Rは、次式で表わされる。Here, the radius of rotation R of the focal point is expressed by the following equation.

R= f (n −1)  tanα  ・・・・・・
・・・・・・・・・ (1)但し、f:集光球面レンズ
12の集点距離n:集光レンズ12の屈折率 この光学系では、レーザ光1と同軸にプリズム11と集
光レンズ12を設けることで、プリズム11と集光レン
ズ12は揺動することなく回転させることができるので
、光学系部品の冷却構成が容易となって一応実用化可能
である。
R= f (n −1) tanα ・・・・・・
(1) However, f: Focusing distance of the focusing spherical lens 12 n: Refractive index of the focusing lens 12 In this optical system, the prism 11 and the focusing lens are coaxial with the laser beam 1. By providing the lens 12, the prism 11 and the condensing lens 12 can be rotated without swinging, which facilitates the cooling configuration of the optical system components, making it possible to put it into practical use.

しかし、この光学系では、光学部品が2個となるので、
保持機構が複雑で精度もばらつくおそれがある。
However, this optical system has two optical components, so
The holding mechanism is complicated and the accuracy may vary.

そこで、発明者らは、これらの問題を解消するものとし
て更に第2図(b)に示す集光光学系を実用化した。
In order to solve these problems, the inventors further put into practical use a condensing optical system shown in FIG. 2(b).

同図において、偏光集光レンズ5は、第5図に示した集
光レンズ12の裏面に偏光角度α、を備えたレンズ5で
、伝送されたレーザ光lと同軸に設けられ、その結果、
同図に示すように集光点も偏心する。
In the same figure, the polarized light condensing lens 5 is a lens 5 having a polarization angle α on the back surface of the condensing lens 12 shown in FIG. 5, and is provided coaxially with the transmitted laser beam l.
As shown in the figure, the focal point is also eccentric.

第1図は、この偏光集光レンズ5を組み込んだレーザ溶
接機のヘッド部の縦断面図である。
FIG. 1 is a longitudinal sectional view of the head portion of a laser welding machine incorporating this polarized light condensing lens 5.

同図において、図示しないレーザ溶接機の伝送路端に取
付けられたエンドパイプ4の下端には。
In the figure, at the lower end of an end pipe 4 attached to the end of a transmission line of a laser welding machine (not shown).

略円筒状の外管4aがエンドパイプ4と同心状に取付け
られ、この外管4aの下端にはノズル8が螺合され、こ
のノズル8の上部右側には空圧継手7が螺合されて図示
しないシールドガス供給管が接続され、ノズル8の下端
には円筒状の静電容量形距離センサ10が挿着されてい
る。
A substantially cylindrical outer tube 4a is attached concentrically to the end pipe 4, a nozzle 8 is screwed to the lower end of the outer tube 4a, and a pneumatic joint 7 is screwed to the upper right side of the nozzle 8. A shield gas supply pipe (not shown) is connected to the nozzle 8, and a cylindrical capacitive distance sensor 10 is inserted into the lower end of the nozzle 8.

又、外管4aの内部には、下端外周に軸受9が談合した
内管4bが下側から外管4aと同軸に挿入され、この内
管4bの外周に螺合されたナツト4b、 と外管4aの
下端内側に螺合されたナツト9aで軸受9を外管4aと
内管4bに固定することで外管4aに回転自在に支持さ
れ、この内管4bの上端外周には平歯車3Bが図示しな
いキーを介して挿入された上端外側のナツト3B□で締
付けられている。
In addition, an inner tube 4b having a bearing 9 rigged on the outer periphery of the lower end is inserted into the outer tube 4a coaxially with the outer tube 4a from below, and a nut 4b screwed onto the outer periphery of the inner tube 4b. The bearing 9 is fixed to the outer tube 4a and the inner tube 4b with a nut 9a screwed inside the lower end of the tube 4a, so that it is rotatably supported by the outer tube 4a, and a spur gear 3B is attached to the outer circumference of the upper end of the inner tube 4b. is tightened with a nut 3B□ on the outside of the upper end inserted through a key (not shown).

又、エンドパイプ4の右側面には直流電動機2が縦に設
けられ、この直流電動機2の出力軸には平歯車3Bに噛
み合ったピニオン3Aが図示しないキーを介して挿入さ
れてナツトで固定され、エンドパイプ4の右側面と外管
4aの右側面に外側から取付けられたカバー40で保護
されている。
Further, a DC motor 2 is vertically provided on the right side of the end pipe 4, and a pinion 3A meshing with a spur gear 3B is inserted into the output shaft of the DC motor 2 via a key (not shown) and fixed with a nut. , are protected by a cover 40 attached from the outside to the right side of the end pipe 4 and the right side of the outer tube 4a.

更に、内管4bの下端には、アルミニウム製の筒形の冷
却筒6が下から螺合され、この冷却筒6の螺合部の内側
には前述の第2図(b)で示す偏光集光レンズ5が上か
ら挿着され、Oリング5aとナツト5bで上側から固定
され、冷却筒6の中間部以下の外周には同図のA−A断
面図を示す同図(b)のように、歯車状に冷却フィン6
aが形成されている。
Furthermore, an aluminum cylindrical cooling tube 6 is screwed onto the lower end of the inner tube 4b from below, and inside the threaded portion of the cooling tube 6 is a polarized light condenser shown in FIG. 2(b). The optical lens 5 is inserted from above and fixed from above with an O-ring 5a and a nut 5b, and the outer periphery below the middle part of the cooling tube 6 is provided as shown in FIG. cooling fins 6 in a gear shape.
a is formed.

次に、このように構成されたレーザ溶接機の作用を説明
する。
Next, the operation of the laser welding machine configured in this way will be explained.

図示しないレーザ発振器から伝送されて偏光集光レンズ
5で集光されたレーザ光lは、焦点位置においてレーザ
光の光軸1aから偏心して集光されるが、この偏心距離
は1例えば偏光集光レンズ5の焦点距離を5インチとし
、偏光角度を0.64°とすると(1)式で2m+++
どなる。
The laser beam l transmitted from a laser oscillator (not shown) and condensed by the polarization condensing lens 5 is eccentrically focused from the optical axis 1a of the laser beam at the focal position. If the focal length of lens 5 is 5 inches and the polarization angle is 0.64°, then 2m+++ is obtained from equation (1).
bawl.

今、直流電動機2を駆動すると、 ピニオン3A工平歯
車3Bを介して内管4Bが回転することで、冷却筒6と
ともに偏光集光レンズ5が回転して焦点の軌跡は直径4
mmの環状となり、このとき空圧継手7からノズル8の
内部に吐出されたシールドガスは、回転する冷却筒6の
冷却フィン6aに吹き付けられて偏光集光レンズ5から
の熱伝達で加熱された冷却筒6の熱を吸収し、ノズル8
の下方に流れて静電容量距離センサ10内を貫流してワ
ークの照射部に供給される。
Now, when the DC motor 2 is driven, the inner tube 4B rotates via the pinion 3A and the spur gear 3B, and the polarized light condensing lens 5 rotates together with the cooling cylinder 6, so that the locus of the focal point becomes 4 mm in diameter.
mm, and the shielding gas discharged from the pneumatic joint 7 into the nozzle 8 at this time was blown onto the cooling fins 6a of the rotating cooling cylinder 6 and heated by heat transfer from the polarizing condenser lens 5. The heat of the cooling tube 6 is absorbed and the nozzle 8
It flows below, flows through the capacitance distance sensor 10, and is supplied to the irradiation part of the workpiece.

ここで、接合されるワークを溶接する方法には大別して
二つある。
Here, there are roughly two methods for welding the workpieces to be joined.

その一つは、第3図(b)に示すようにワーク表面に環
状の表面ビート14を、同図(c)の断面図に示すよう
に、溶は込み15を形成した後、同図(a)のようにレ
ーザ光の照射を中断し図示しないレーザ伝送路を駆動し
てワークの溶接線方向に所定の距離だけノズル8を移動
させて再び同図(’a)に示すようにレーザ光をワーク
に照射して同図(b)。
One method is to form an annular surface bead 14 on the workpiece surface as shown in FIG. 3(b) and a melt penetration 15 as shown in the cross-sectional view of FIG. 3(c). As shown in a), the laser beam irradiation is interrupted, the laser transmission line (not shown) is driven, the nozzle 8 is moved a predetermined distance in the direction of the welding line of the workpiece, and the laser beam is irradiated again as shown in the figure ('a). The same figure (b) is obtained by irradiating the workpiece.

(c)に示す表面ビート14、溶は込み15を得、以下
これを繰り返す方法である。
This is a method in which a surface beat 14 and a melt penetration 15 shown in (c) are obtained, and this process is repeated thereafter.

発明者らは、上述の偏光レンズ5で焦点の周速を1m/
11inとし、厚さ0.8mmの軟鋼板の重ね合せ部に
レーザ光の照射時間を約1秒として第3図(b)、(C
)のような表面ビート14、溶は込み15の溶接部を得
、その結果、溶接歪みの少ないワークを得ることができ
た。
The inventors set the circumferential speed of the focal point to 1 m/m with the polarizing lens 5 described above.
3 (b), (C
), a welded part with a surface beat 14 and a weld penetration 15 was obtained, and as a result, a workpiece with little welding distortion was obtained.

又、発明者らは、他の溶接方法として、偏心集光レンズ
5を取り換えて、焦点の偏心距離が0.5mmのもので
、第4図(a)のようにレーザ光を連続してワークに照
射するとともに、図示しないレーザ伝送路を連続的にワ
ークの溶接線方向に移動させて重ねられた二枚の軟鋼板
を溶接して、同図(b)のように幅1mmの表面ビート
16と同図(c)の断面図のような溶は込み17を得た
In addition, the inventors have proposed another welding method in which the eccentric focusing lens 5 is replaced and the eccentric distance of the focal point is 0.5 mm, and the laser beam is continuously applied to the workpiece as shown in FIG. 4(a). At the same time, a laser transmission line (not shown) is continuously moved in the direction of the welding line of the workpiece to weld the two stacked mild steel plates to form a surface bead 16 with a width of 1 mm as shown in Figure (b). A melt penetration 17 was obtained as shown in the cross-sectional view of FIG.

この場合には入熱量が増えるので、ワークに歪が生ずる
欠点はあるが1重ねられた板状ワークの間に多少の隙間
があっても、又、重ね代が狭くても強力に接合できる他
、ワークの突き合せ部にも適用できる利点もある。
In this case, the amount of heat input increases, so there is a disadvantage that distortion occurs in the workpieces, but even if there is a slight gap between the stacked plate-like workpieces or the overlapping margin is narrow, it can be strongly joined. , it also has the advantage of being applicable to the butt part of the workpiece.

なお、上記実施例において、冷却筒6の外周の冷却フィ
ン6aは歯車状にしたが、ボールねじのおねじ状にして
もよい。この場合には製造が容易で回転数に関係なく冷
却効果が一定でアシストガスの吹付けによる騒音も減る
利点がある。
In the above embodiment, the cooling fins 6a on the outer periphery of the cooling cylinder 6 are shaped like a gear, but they may also be shaped like a male thread of a ball screw. In this case, there are advantages that manufacturing is easy, the cooling effect is constant regardless of the rotation speed, and the noise caused by the blowing of assist gas is reduced.

〔発明の効果〕〔Effect of the invention〕

以上、本発明によれば、レーザ発振器から出射されたレ
ーザ光を伝送路で集光部に伝送し、集光レンズで焦点を
偏心させてワークを溶接するレーザ溶接機において、集
光レンズとして裏面に偏光角を備えた偏光集光レンズを
用いて焦点を偏心させ、この偏心集光レンズを回転駆動
する駆動機構を設けてワークに照射したので、集光レン
ズの保持が容易で狭い接合部でも強力にワークを接合す
ることのできるレーザ溶接機を得ることができる。
As described above, according to the present invention, in a laser welding machine that transmits a laser beam emitted from a laser oscillator to a condensing part through a transmission path, and welds a workpiece by decentering the focal point with a condensing lens, the back surface of the condensing lens is used. A polarized condensing lens with a polarization angle is used to decenter the focal point, and a drive mechanism is installed to rotate this decentered condensing lens to irradiate the workpiece.The condensing lens can be easily held and can be used even in narrow joints. A laser welding machine capable of powerfully joining workpieces can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第工図は本発明のレーザ溶接機の一実施例を示す図で、
同図(a)は要部縦断面図、同図(b)は同図(a)の
A−A断面図、第2図(a)、(b)、第3図(a)、
(b)、(c)と第4図(a)、(b)、(c)は本発
明のレーザ溶接機の作用を示す図、第5図は従来のレー
ザ溶接機の要部を示す図である。 1・・レーザ光      2・・直流電動機3・・偏
光集光レンズ   6・・・冷却筒(8733)代理人
 弁理士 猪 股 祥 晃(ほか1名) (a) (b) 第 図 (a) (b) (c) 第 圓 第 A−A餌面庸 (b)
The second construction drawing is a diagram showing an embodiment of the laser welding machine of the present invention.
Figure (a) is a vertical cross-sectional view of the main part, Figure (b) is a cross-sectional view taken along line A-A in Figure (a), Figures 2 (a), (b), Figure 3 (a),
(b), (c) and Fig. 4 (a), (b), (c) are diagrams showing the operation of the laser welding machine of the present invention, and Fig. 5 is a diagram showing the main parts of a conventional laser welding machine. It is. 1. Laser light 2. DC motor 3. Polarized condensing lens 6. Cooling tube (8733) Agent Patent attorney Yoshiaki Inomata (and 1 other person) (a) (b) Figure (a) (b) (c) The first round A-A bait surface (b)

Claims (1)

【特許請求の範囲】[Claims] レーザ発振器から出射されたレーザ光を集光部に伝送し
集光レンズで偏心させてワークを溶接するレーザ溶接機
において、前記集光レンズを裏面又は表面に偏光角を備
えた偏心集光レンズとし、前記集光部にこの偏心集光レ
ンズを回転駆動する駆動機構を設けたことを特徴とする
レーザ溶接機。
In a laser welding machine that transmits a laser beam emitted from a laser oscillator to a condenser and decenters it with a condenser lens to weld a workpiece, the condenser lens is an eccentric condenser lens with a polarization angle on the back or front surface. . A laser welding machine, characterized in that the condensing section is provided with a drive mechanism for rotationally driving the eccentric condensing lens.
JP2039774A 1990-02-22 1990-02-22 Laser welding machine Pending JPH03243292A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2039774A JPH03243292A (en) 1990-02-22 1990-02-22 Laser welding machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2039774A JPH03243292A (en) 1990-02-22 1990-02-22 Laser welding machine

Publications (1)

Publication Number Publication Date
JPH03243292A true JPH03243292A (en) 1991-10-30

Family

ID=12562282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2039774A Pending JPH03243292A (en) 1990-02-22 1990-02-22 Laser welding machine

Country Status (1)

Country Link
JP (1) JPH03243292A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5303081A (en) * 1992-05-15 1994-04-12 Sumitomo Electric Industries, Ltd. Laser beam scanner
WO2013137289A1 (en) * 2012-03-14 2013-09-19 株式会社 アマダ Coaxial nozzle for a laser processing machine
JP2014200802A (en) * 2013-04-02 2014-10-27 株式会社アマダ Coaxial nozzle of laser beam machine and laser beam method using this coaxial nozzle
JP2021051226A (en) * 2019-09-25 2021-04-01 株式会社フジクラ Beam shaper, processing device, and processing method
JP2021051225A (en) * 2019-09-25 2021-04-01 株式会社フジクラ Beam shaper, processing device, and processing method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5303081A (en) * 1992-05-15 1994-04-12 Sumitomo Electric Industries, Ltd. Laser beam scanner
WO2013137289A1 (en) * 2012-03-14 2013-09-19 株式会社 アマダ Coaxial nozzle for a laser processing machine
JP2013215801A (en) * 2012-03-14 2013-10-24 Amada Co Ltd Coaxial nozzle for laser processing machine
US10328524B2 (en) 2012-03-14 2019-06-25 Amada Company, Limited Coaxial nozzle of laser beam machine
JP2014200802A (en) * 2013-04-02 2014-10-27 株式会社アマダ Coaxial nozzle of laser beam machine and laser beam method using this coaxial nozzle
JP2021051226A (en) * 2019-09-25 2021-04-01 株式会社フジクラ Beam shaper, processing device, and processing method
JP2021051225A (en) * 2019-09-25 2021-04-01 株式会社フジクラ Beam shaper, processing device, and processing method

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