JP6114074B2 - Power supply system - Google Patents

Description

The present invention relates to a power supply system for a plurality of components having a load.

As an example, a power supply system that supplies power to a load controls power supply from the power supply source to the load by controlling a commercial power source that is a power supply source or a switch element connected to the battery. (For example, refer patent document 1).

JP 2010-206914 A

As a switch element that controls power supply from a power supply source to a load, a power MOSFET or an IGBT (Insulated Gate Bipolar Transistor) is generally used for power supply to a load that requires a large amount of power. In the case of supplying electric power to a load such as an electronic circuit, it is common to use a thin film transistor. The power MOSFET, IGBT, and thin film transistor are all made of a material containing silicon.

A switch element made of a material containing silicon has a problem of standby power when power is not used. This standby power is due to a leak current flowing through the switch element when power is not used, and an increase in standby power leads to an increase in power consumption. Therefore, in order to reduce power consumption, it is necessary to reduce the leakage current flowing through the switch element.

As described above, in the conventional switch element, a leak current flows through the switch element even during standby, so that a substantially normally-off state cannot be created.

Based on the technical background as described above, an object of the present invention is to provide a power supply system that can reduce leakage current flowing through a switch element and reduce power consumption.

A power supply system according to an aspect of the present invention includes a command unit, and a plurality of components including a power line, a load, and a switch that switches electrical connection between the power line and the load. The switch is individually controlled to be turned on or off, and the switch is a transistor including a semiconductor whose band gap is wider than that of silicon in a channel formation region.

Alternatively, a power supply system according to one embodiment of the present invention includes a first command unit, a second command unit, a power line, a load, and a switch that switches an electrical connection between the power line and the load. A plurality of components, wherein the first command unit individually controls the second command unit, the second command unit individually controls on or off of the switch, and the switch forms a channel In the region, the transistor includes a semiconductor whose band gap is wider than that of silicon.

Alternatively, in the power supply system according to one aspect of the present invention, the command unit, the first power supply line, the first load, and the first power supply switching between the first power supply line and the first load are switched. A first power supply line distributed from a first power supply line of any one of the L first components, and an L number of first components (L is a natural number of 2 or more), M (M is a natural number of 1 or more) second components having a second load, and a second switch that switches electrical connection between the second power supply line and the second load, and M The third power line distributed from the second power line included in any one of the second components, the third load, and the electrical connection between the third power line and the third load are switched. N (N is a natural number greater than or equal to 1) third component having a third switch The command unit individually controls on / off of the first switch to the third switch, and the first switch to the third switch have a band gap in the channel formation region and silicon. It is a transistor including a wider semiconductor.

According to one embodiment of the present invention, a power supply system that can reduce leakage current flowing through a switch element and reduce power consumption can be provided.

In addition, the switch element according to one embodiment of the present invention can create a substantially complete OFF state in which leakage current does not flow through the switch element during standby. Therefore, the power supply system of one embodiment of the present invention is a power supply system in which a switch that can create a completely off state is first introduced, and can be a normally normally off system.

The figure which shows the structure of the electric power supply system which concerns on 1 aspect of this invention. The figure which shows the structure of the electric power supply system which concerns on 1 aspect of this invention. The figure which shows the structure of the electric power supply system which concerns on 1 aspect of this invention. The figure which shows the structure of the electric power supply system which concerns on 1 aspect of this invention. The figure which shows operation | movement of the electric power supply system which concerns on 1 aspect of this invention. The figure which shows operation | movement of the electric power supply system which concerns on 1 aspect of this invention. The figure which shows operation | movement of the electric power supply system which concerns on 1 aspect of this invention. FIG. 6 illustrates a structure of a transistor. The figure which shows the structure of the electric power supply system which concerns on 1 aspect of this invention. The figure which shows the structure of the electric power supply system which concerns on 1 aspect of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it will be easily understood by those skilled in the art that modes and details can be variously changed without departing from the spirit and scope of the present invention. Therefore, the present invention should not be construed as being limited to the description of the embodiments below.

<Configuration of power supply system (1)>
FIG. 1 illustrates an example of a structure of a power supply system according to one embodiment of the present invention. The power supply system 100 illustrated in FIG. 1 includes components 101-1 to 101-L (L is a natural number equal to or greater than 2) and a command unit that individually controls power supply to the components 101-1 to 101-L. 102.

Each of the components 101-1 to 101 -L includes a power line 103, a load 104 that consumes power, and a switch 105 that switches electrical connection between the power line 103 and the load 104. When the switch 105 is on (conductive state), power is supplied from the power supply line 103 to the load 104 via the switch 105. When the switch 105 is off (non-conducting state), power supply from the power supply line 103 to the load 104 is stopped.

Note that the components 101-1 to 101-L may share the power line 103. Alternatively, at least one of the components 101-1 to 101-L may have a power supply line 103 of a different system from the other components.

In one embodiment of the present invention, the channel formation region has a wider band gap than silicon, impurities such as moisture or hydrogen serving as an electron donor (donor) are reduced, and oxygen vacancies are reduced. A transistor including a purified semiconductor is used for the switch 105. The transistor has significantly lower off-state current than a transistor including silicon in a channel formation region. Therefore, in one embodiment of the present invention, a transistor including a semiconductor whose band gap is wider than that of silicon in a channel formation region is used for the switch 105, whereby leakage current flowing through the switch 105 when the switch 105 is off can It is possible to prevent power from being supplied from the power supply line 103 to the load 104.

In one embodiment of the present invention, the charge accumulated on the load 104 side can be held by the parasitic capacitance of the load 104 by significantly reducing the off-current flowing through the switch 105. Therefore, when the switch is turned on again and the supply of power is resumed, the operation can be restored at high speed.

Note that FIG. 1 illustrates the case where the switch 105 includes one transistor, but the present invention is not limited to this configuration. In one embodiment of the present invention, the switch 105 may include a plurality of transistors.

The command unit 102 has a function of individually controlling ON / OFF of the switch 105 included in each of the components 101-1 to 101 -L. In each of the components 101-1 to 101 -L, whether the switch 105 is turned on or off can be selected according to a command input to the command unit 102 from the outside of the power supply system 100.

In addition, when the load which a component has interacts and operate | moves with the load of another component, it is good also as a structure which controls on / off of the switch 105 by the instruction | command part 102 all at once. Therefore, the power supply system according to the present embodiment supplies power to components necessary for realizing a predetermined purpose only for a period required for operation, and when one component operates, other components simultaneously respond accordingly. Alternatively, the power supply system can be driven to operate sequentially.

Alternatively, the power supply system 100 has an ammeter or the like that can monitor the power consumption in the load 104, and commands whether or not the power supply to the load 104 is necessary or not according to the amount of power in the load 104. The determination may be made by the unit 102. For example, the command unit 102 supplies power to the load 104 when the power consumption of the load 104 is approximately the same as the leakage power consumed when the load 104 is in a standby state over a certain period. Can be determined to be unnecessary.

Alternatively, the power supply system 100 includes a sensor circuit, and monitors the usage environment and / or the surrounding environment of the load 104 using physical quantities such as light, sound, temperature, magnetism, and pressure acquired in the sensor circuit. The command unit 102 may determine whether power supply to the load 104 is necessary or unnecessary in accordance with a change due to monitoring. In this case, the command unit 102 selects ON / OFF of the switch 105 according to the determination result of whether or not power supply is necessary.

For example, the power supply system 100 according to one embodiment of the present invention is applied to a house, and home appliances such as lighting, an electric heater, and an air cleaner provided in the house correspond to the components. In this case, the brightness of the room where the illumination is used is monitored using a sensor circuit having an optical sensor. Then, when the amount of light entering from the window changes and the room becomes brighter than a specified value, the command unit 102 turns the illumination switch 105 from on to off in order to stop supplying power to the illumination. Can be changed.

Or the temperature of the room where the electric heater is used is specifically monitored using the sensor circuit which has a temperature sensor. When the outside temperature changes and the room temperature becomes higher than a predetermined value, the command unit 102 turns the electric heater switch 105 from on to off in order to stop the power supply to the electric heater. Can be changed.

Alternatively, the use state of the room where the air purifier is used is monitored using a sensor circuit having an optical sensor. Then, when the movement of the person is not detected by the sensor circuit for a certain period, the command unit 102 changes the switch 105 of the air purifier from on to off in order to stop the power supply to the air purifier. be able to.

In addition, when the said household appliance corresponds to a component, the switch 105 is incorporated in each household appliance. When the switch 105 is provided outside the home appliance, the home appliance corresponds to the load 104, and the component includes the home appliance that is the load 104 and the switch 105.

If each component is provided independently, the command unit 102 may select whether the switch 105 is turned on or off using a radio signal. In this case, the switch 105 is preferably configured to hold a signal for changing the state of the switch from the command unit 102.

The sensor circuit includes a sensor and a circuit group for processing a sensor signal output from the sensor. As a sensor, a temperature sensor, a magnetic sensor, an optical sensor, a microphone, a strain gauge, a pressure sensor, a gas sensor, or the like can be used. The temperature sensor may be a contact type such as a resistance temperature detector, thermistor, thermocouple, or IC temperature sensor, or may be a non-contact type such as a thermal infrared sensor or a quantum infrared sensor.

FIG. 9 shows a block diagram in which the power supply system 100 shown in FIG. 1 includes a sensor circuit. As illustrated in FIG. 9, the sensor circuit 901 transmits data relating to the physical quantity to the command unit 102. The command unit 102 monitors the physical quantity acquired by the sensor circuit 901 and determines whether power supply to the load 104 is necessary or unnecessary.

If each component is provided independently, a sensor circuit may be provided for each component, and data obtained by the sensor circuit may be transmitted to the command unit 102 by a wireless signal. FIG. 10 shows a block diagram different from FIG. 9 in the case where a sensor circuit is provided for each component. As shown in FIG. 10, the sensor circuit 700 is provided in each component, and individually transmits data regarding physical quantities to the command unit 102. The command unit 102 monitors the physical quantity acquired by the sensor circuit 700 provided in each component, and determines whether or not it is necessary to supply power to the load 104.

The component may be an electronic device such as a computer, a detector, or a television, a device (CPU, memory, HDD, printer, monitor) constituting a computer system, or an electric control device incorporated in an automobile. Alternatively, an internal configuration of an LSI such as a CPU or a semiconductor memory may be used. Here, the computer includes a tablet computer, a notebook computer, a desktop computer, and a large computer such as a server system.

The concept of components can also be applied to a wide range of concepts such as social infrastructures and houses that require a power supply system in addition to electronic devices that operate by power supply.

Here, a specific application target in the case where the power supply system which is one embodiment of the present invention is applied to a wide concept such as social infrastructure is illustrated. For example, when the power supply system according to one aspect of the present invention is applied to social infrastructure, the components shown in FIG. 1 can include railways, harbors, roads, etc., and the command section can be a substation or a power plant. Can be mentioned. As another example, the components shown in FIG. 1 can include sections such as a room and a hierarchy of a building, and the command unit can include a power management facility, a switchboard, and the like.

<Configuration of power supply system (2)>
FIG. 2 illustrates an example of another structure of the power supply system according to one embodiment of the present invention. The power supply system 200 illustrated in FIG. 2 includes the first component 201-1 to the first component 201-L (L is a natural number of 2 or more) and the power to the first component 201-1 to the first component 201-L. And a first command unit 202-1 for individually controlling the supply. FIG. 2 illustrates only the first component 201-1 and a part of the first component 201-2.

In the power supply system 200, each of the first component 201-1 to the first component 201-L individually controls the plurality of second components and the supply of power to the plurality of second components. Part 202-2. Specifically, FIG. 2 illustrates a case where the first component 201-1 includes the second component 206-1 to the second component 206-M (M is a natural number of 2 or more).

Note that the number of the plurality of second components included in each of the first component 201-1 to the first component 201-L is not necessarily the same.

As illustrated in the second component 206-1 to the second component 206-M in FIG. 2, the plurality of second components include the power line 203, the load 204 that consumes power, the power line 203, and the load. And a switch 205 for switching the electrical connection 204. When the switch 205 is on, power is supplied from the power line 203 to the load 204 via the switch 205. When the switch 205 is off, the supply of power from the power line 203 to the load 204 is stopped.

The second component 206-1 to the second component 206-M may share the power line 203. Alternatively, at least one second component among the second component 206-1 to the second component 206 -M may have a power supply line 203 of a different system from the other second components. Further, at least one of the plurality of second components included in one first component may share the power line 203 with at least one of the plurality of second components included in the other first component.

In one embodiment of the present invention, a transistor including a semiconductor whose band gap is wider than that of silicon is used for the switch 205 in a channel formation region. The transistor has significantly lower off-state current than a transistor including silicon in a channel formation region. Therefore, in one embodiment of the present invention, when a transistor including a semiconductor whose band gap is wider than that of silicon in a channel formation region is used for the switch 205, leakage current flowing in the switch 205 when the switch 205 is off It is possible to prevent power from being supplied from the power supply line 203 to the load 204.

In one embodiment of the present invention, the charge accumulated on the load 204 side can be held by the parasitic capacitance of the load 204 by significantly reducing the off-current flowing through the switch 205. Therefore, when the switch 205 is turned on again and the supply of power is resumed, the operation can be restored at high speed.

Note that FIG. 2 illustrates the case where the switch 205 includes one transistor, but the present invention is not limited to this configuration. In one embodiment of the present invention, the switch 205 may include a plurality of transistors.

The first command unit 202-1 determines whether power supply to the load 204 is necessary or unnecessary for each of the plurality of second components included in each of the first component 201-1 to the first component 201-L. Judgment. As in the case of the command unit 102 included in the power supply system 100 of FIG. 1, the above determination may be determined by a command input from the outside of the power supply system 200, and the power consumption in the load 204 may be determined. It may be performed by monitoring, or may be performed using a physical quantity acquired in the sensor circuit.

Further, the second command unit 202-2 included in each of the first component 201-1 to the first component 201-L determines whether the supply of power to the load 204 is necessary or unnecessary in the plurality of second components. Judge every. As in the case of the command unit 102 included in the power supply system 100 of FIG. 1, the above determination may be determined by a command input from the outside of the power supply system 200, and the power consumption in the load 204 may be determined. It may be performed by monitoring, or may be performed using a physical quantity acquired in the sensor circuit.

The determination by the second command unit 202-2 whether or not it is necessary to supply power to the load 204 includes a plurality of components belonging to the first component that is determined to require power supply by the first command unit 202-1. This is done in the second component.

The second command unit 202-2 individually selects ON / OFF of the switch 205 in the plurality of second components according to the determination result of whether power supply is necessary or not.

When the load 204 of the second component operates by interacting with the load 204 of another second component, the switch 205 is turned on or off by the first command unit 202-1 or the second command unit 202-2. It is good also as a structure which controls all at once.

In addition, when each second component is provided independently, the switch on / off selection by the first command unit 202-1 or the second command unit 202-2 is performed using a radio signal. do it. In this case, it is preferable that the switch be configured to hold a signal for changing the state of the switch from the first command unit 202-1 or the second command unit 202-2.

Further, when each second component is provided independently, a sensor circuit is provided for each second component, and the data obtained by the sensor circuit is transmitted by radio signal to the first command unit 202-1 or the second command unit. What is necessary is just to make it transmit to 202-2.

<Configuration of power supply system (3)>
FIG. 3 illustrates an example of another structure of the power supply system according to one embodiment of the present invention. The power supply system 300 illustrated in FIG. 3 is a first component that individually controls power supply to the first component 301-1 to the first component 301 -L and the first component 301-1 to the first component 301 -L. A command unit 302-1. FIG. 3 illustrates only the first component 301-1 and a part of the first component 301-2.

The power supply system 300 also includes a second command in which each of the first component 301-1 to the first component 301-L individually controls power supply to the plurality of second components and the plurality of second components. Part 302-2. Specifically, FIG. 3 illustrates a case where the first component 301-1 includes the second component 306-1 to the second component 306-M.

Note that the numbers of the plurality of second components included in each of the first component 301-1 to the first component 301-L are not necessarily the same.

In the power supply system 300, each of the plurality of second components includes a plurality of third components and a third command unit 302-3 that individually controls power supply to the plurality of third components. Specifically, FIG. 3 illustrates a case where the second component 306-1 includes a third component 307-1 to a third component 307-N (N is a natural number of 2 or more).

Note that the numbers of the plurality of third components included in the plurality of second components are not necessarily the same.

Although not shown in FIG. 3, the plurality of third components include a power line and a load that consumes power, like the first component shown in FIG. 1 and the second component shown in FIG. 2. And a switch for switching electrical connection between the power supply line and the load. When the switch is on, power is supplied from the power line to the load via the switch. When the switch is off, the supply of power from the power line to the load is stopped.

The third component 307-1 to the third component 307-N may share a power line. Alternatively, at least one third component among the third components 307-1 to 307-N may have a power supply line of a different system from the other third components. Further, third components belonging to different second components or third components belonging to different first components may share a power line.

In one embodiment of the present invention, the channel formation region has a wider band gap than silicon, impurities such as moisture or hydrogen serving as an electron donor (donor) are reduced, and oxygen vacancies are reduced. A transistor including a purified semiconductor is used for the switch. The transistor has significantly lower off-state current than a transistor including silicon in a channel formation region. Thus, according to one embodiment of the present invention, when the switch is off, leakage current flowing through the switch can prevent power from being supplied from the power supply line to the load.

In one embodiment of the present invention, the charge accumulated on the load side can be held by the parasitic capacitance of the load by significantly reducing the off-current flowing through the switch. Therefore, when the switch is turned on again and the supply of power is resumed, the operation can be restored at high speed.

The first command unit 302-1 determines, for each first component, whether or not it is necessary to supply power to the loads in the plurality of third components of the first component 301-1 to the first component 301-L. To do. As in the case of the command unit 102 included in the power supply system 100 of FIG. 1, the above determination may be determined by a command input from the outside of the power supply system 300, and the power consumption in the load is monitored. This may be performed by using a physical quantity acquired by the sensor circuit.

Further, the second command unit 302-2 included in each of the first component 301-1 to the first component 301-L determines whether power supply to the load in the plurality of third components is necessary or unnecessary for each second component. to decide. As in the case of the command unit 102 included in the power supply system 100 of FIG. 1, the above determination may be determined by a command input from the outside of the power supply system 300, and the power consumption in the load is monitored. This may be performed by using a physical quantity acquired by the sensor circuit.

The determination by the second command unit 302-2 whether or not the supply of power to the load is necessary or not is based on a plurality of second components belonging to the first component that is determined to require the supply of power by the first command unit 302-1. Do this in two components.

Further, the third command unit 302-3 included in each of the second component 306-1 to the second component 306-M determines whether the supply of power to the load is necessary or unnecessary for each of the third components. Judgment. As in the case of the command unit 102 included in the power supply system 100 of FIG. 1, the above determination may be determined by a command input from the outside of the power supply system 300, and the power consumption in the load is monitored. This may be performed by using a physical quantity acquired by the sensor circuit.

The determination by the third command unit 302-3 whether or not it is necessary to supply power to the load is based on a plurality of second components belonging to the second component determined to require power supply by the second command unit 302-2. This is done in three components.

The third command unit 302-3 individually performs on / off switching of the plurality of third components according to the determination result of whether or not power supply is necessary.

When the load of the third component operates by interacting with the load of the other third component, the first command unit 302-1, the second command unit 302-2, or the third command unit 302-3 A configuration may be adopted in which the on / off control of the switches is performed all at once.

When the third component 307-1 to the third component 307-N are provided independently, the first command unit 302-1, the second command unit 302-2, or the third command unit 302-3 The on / off selection of the switch may be performed using a radio signal. In this case, the switch is preferably configured to hold a signal for changing the state of the switch from the first command unit 302-1, the second command unit 302-2, or the third command unit 302-3. .

In addition, when the third component 307-1 to the third component 307-N are provided independently, a sensor circuit is provided for each third component, and the data obtained by the sensor circuit is transmitted to the first command by a radio signal. What is necessary is just to transmit to the part 302-1, the 2nd instruction | command part 302-2, or the 3rd instruction | command part 302-3.

<Configuration of power supply system (4)>
FIG. 4 illustrates an example of another structure of the power supply system according to one embodiment of the present invention. The power supply system 400 illustrated in FIG. 4 includes a command unit 500, a plurality of first components, a plurality of second components, and a plurality of third components.

Although not shown in FIG. 4, in the power supply system 400, all of the plurality of first components, the plurality of second components, and the plurality of third components are all shown in the first component shown in FIG. 1 and FIG. 2. Similarly to the second component and the third component shown in FIG. 3, each has a power line, a load that consumes power, and a switch that switches electrical connection between the power line and the load. When the switch is on, power is supplied from the power line to the load via the switch. When the switch is off, the supply of power from the power line to the load is stopped.

In one embodiment of the present invention, the channel formation region has a wider band gap than silicon, impurities such as water or hydrogen serving as an electron donor (donor) are reduced, and oxygen vacancies are reduced, so that the purity is increased. A transistor including the formed semiconductor is used for the switch. The transistor has significantly lower off-state current than a transistor including silicon in a channel formation region. Therefore, in one embodiment of the present invention, a transistor including a semiconductor whose band gap is wider than that of silicon in a channel formation region is used for a switch, so that when a switch is off, leakage current flowing in the switch It is possible to prevent power from being supplied to the load.

In one embodiment of the present invention, the charge accumulated on the load side can be held by the parasitic capacitance of the load by significantly reducing the off-current flowing through the switch. Therefore, when the switch is turned on again and the supply of power is resumed, the operation can be restored at high speed.

Then, in the power supply system 400, it is assumed that the power lines of each of the plurality of second components are distributed from the power lines of the first component.

Specifically, in FIG. 4, among the first component 501-1 to the first component 501-L, the second component 502-1 to the second component 502-1 having the power supply line distributed from the power supply line of the first component 501-1. The second component 502-M and the third component 503-1 to the third component 503-N having power supply lines distributed from the power supply lines of the second component 502-1 are illustrated.

Note that the number of the plurality of second components corresponding to each of the first component 501-1 to the first component 501-L is not necessarily the same. In addition, the number of the plurality of third components corresponding to each of the plurality of second components is not necessarily the same.

In the power supply system 400, the command unit 500 individually determines whether power supply to the load is necessary or unnecessary for the plurality of first components, the plurality of second components, and the plurality of third components. . As in the case of the command unit 102 included in the power supply system 100 of FIG. 1, the above determination may be determined by a command input from the outside of the power supply system 400, and the power consumption in the load is monitored. This may be performed by using a physical quantity acquired by the sensor circuit.

In addition, when the load of any one of the first to third components operates by interacting with the load of any other component, the on / off control of the switch by the command unit 500 is performed simultaneously. It is good also as a structure performed to.

Next, an example of the operation of the power supply system 400 will be described. In FIG. 5, among all the components, in the third component 503-1 and the third component 503-3, the switch is turned off in accordance with the command from the command unit 500, and the supply of power to the load is stopped.

In FIG. 6, among all the components, the second component 502-1 and the third component 503-1 to the third component 503- each having power supply lines distributed from the power supply lines of the second component 502-1. At N, the switch is turned off in accordance with a command from the command unit 500, and the supply of power to the load is stopped.

In FIG. 7, among all the components, the first component 501-1 and the second component 502-1 to the second component 502- each having power supply lines distributed from the power supply lines of the first component 501-1. M and a plurality of third components each including power supply lines distributed from the power supply lines of the second component 502-1 to the second component 502-M (including the third component 503-1 to the third component 503-N) , The switch is turned off in accordance with the command from the command unit 500, and the supply of power to the load is stopped.

When there are components that are independently provided, the command unit 500 may select whether to turn on or off a switch of the component using a radio signal. In this case, the switch is preferably configured to hold a signal for changing the state of the switch from the command unit 500.

Further, when there is a component that is independently provided, a sensor circuit may be provided in the component, and data obtained by the sensor circuit may be transmitted to the command unit 500 by a wireless signal.

Note that in the power supply system according to one embodiment of the present invention illustrated as an example in FIGS. 1 to 4, 9, and 10, in all the components, the band gap is wider than silicon in the channel formation region. A transistor including a semiconductor purified by reducing impurities such as moisture or hydrogen serving as a donor (donor) and oxygen vacancies being reduced is used for switching electrical connection between a power supply line and a load. Used for switches. However, in the power supply system according to one aspect of the present invention, for some components that need to be switched between power supply to the load and its stop at high speed, rather than reducing leakage power in the switch, You may give priority to the high-speed operation of the switch. Specifically, according to one embodiment of the present invention, switching can be performed at high speed in some components that require high-speed switching control in a switch, such as a transistor including crystalline silicon in a channel formation region. A simple transistor may be used for the switch. Further, for some components for which high speed operation is required for the switch, a transistor including a germanium semiconductor, a gallium / arsenic semiconductor, a group 13-15 compound semiconductor, or the like in the channel formation region may be used for the switch.

<About transistor configuration>
In one embodiment of the present invention, an oxide semiconductor is included in a channel formation region of the transistor functioning as the switch 105. As described above, by including an oxide semiconductor in a channel formation region, a transistor with extremely low off-state current can be realized. An example of a cross-sectional view of a transistor is illustrated in FIG.

In FIG. 8, a transistor includes a semiconductor film 121 functioning as an active layer over a substrate 120 having an insulating surface, a source electrode 122 and a drain electrode 123 over the semiconductor film 121, and a semiconductor film 121, a source electrode 122, and a drain electrode. A gate insulating film 124 over the gate insulating film 124 and a gate electrode 125 located on the gate insulating film 124 so as to overlap the semiconductor film 121 between the source electrode 122 and the drain electrode 123 are provided.

In the transistor illustrated in FIG. 8, in the semiconductor film 121, a region overlapping with the gate electrode 125 between the source electrode 122 and the drain electrode 123 corresponds to the channel formation region 121 c. A region of the semiconductor film 121 that overlaps with the source electrode 122 corresponds to the source region 121 s, and a region of the semiconductor film 121 that overlaps with the drain electrode 123 corresponds to the drain region 121 d.

In one embodiment of the present invention, an oxide semiconductor may be included in at least the channel formation region 121c in the semiconductor film 121; however, the entire semiconductor film 121 may include an oxide semiconductor.

Note that FIG. 8 illustrates the case where the transistor has a single-gate structure; however, the transistor has a multi-gate structure in which a plurality of channel formation regions are provided by including a plurality of electrically connected gate electrodes. There may be.

In addition, the transistor only needs to have at least one gate electrode on one side of the active layer, but may have a pair of gate electrodes existing with the active layer interposed therebetween. In the case where a transistor has a pair of gate electrodes present with an active layer interposed therebetween, a signal for controlling switching (ON or OFF) is given to one gate electrode, and the other gate electrode Alternatively, it may be in a floating state where it is electrically insulated, or in a state where a potential is applied from another. In the latter case, the same potential may be applied to the pair of electrodes, or a fixed potential such as a ground potential may be applied only to the other gate electrode. By controlling the level of the potential applied to the other gate electrode, the threshold voltage of the transistor can be controlled.

Note that unless otherwise specified, off-state current in this specification refers to an n-channel transistor in which the drain terminal is higher than the source terminal and the gate electrode, and the potential of the source terminal is used as a reference. This means a current that flows between the source terminal and the drain terminal when the potential of the gate electrode is 0 V or less. Alternatively, in this specification, off-state current refers to that in a p-channel transistor, the potential of the gate electrode with respect to the potential of the source terminal in a state where the drain terminal is lower than the source terminal and the gate electrode. It means a current flowing between the source terminal and the drain terminal when the voltage is 0 V or higher.

Note that examples of semiconductors having a wider band gap and lower intrinsic carrier density than silicon semiconductors include compound semiconductors such as gallium nitride (GaN) in addition to oxide semiconductors. Unlike gallium nitride, an oxide semiconductor has an advantage that a transistor with excellent electrical characteristics can be manufactured by a sputtering method or a wet method, and the mass productivity is excellent. Further, unlike gallium nitride, an oxide semiconductor can be formed at room temperature; thus, a transistor with excellent electrical characteristics can be manufactured over a glass substrate or an integrated circuit using silicon. In addition, it is possible to cope with an increase in the size of the substrate. Therefore, among the above-described wide gap semiconductors, an oxide semiconductor has a merit that mass productivity is high. Even when a crystalline oxide semiconductor is obtained in order to improve transistor performance (eg, field effect mobility), a crystalline oxide semiconductor can be easily obtained by heat treatment at 250 ° C. to 800 ° C. Can do.

An oxide semiconductor (purified OS) that is highly purified by reducing impurities such as moisture or hydrogen serving as an electron donor (donor) and reducing oxygen vacancies is i-type (intrinsic semiconductor) or i-type Infinitely close. Therefore, a transistor including the above oxide semiconductor has a characteristic that off-state current is extremely small. The band gap of the oxide semiconductor is 2 eV or more, preferably 2.5 eV or more, more preferably 3 eV or more. By using the oxide semiconductor film which is highly purified by sufficiently reducing the concentration of impurities such as moisture or hydrogen and reducing oxygen vacancies, the off-state current of the transistor can be reduced.

Specifically, it can be proved by various experiments that the off-state current of a transistor in which a highly purified oxide semiconductor film is used for a channel formation region is small. For example, even in an element having a channel width of 1 × 10 ⁶ μm and a channel length of 10 μm, when the voltage between the source electrode and the drain electrode (drain voltage) is in the range of 1V to 10V, It is possible to obtain characteristics that are below the measurement limit, that is, 1 × 10 ⁻¹³ A or less. In this case, it can be seen that the off-current normalized by the channel width of the transistor is 100 zA / μm or less. In addition, off-state current was measured using a circuit in which a capacitor and a transistor were connected and charge flowing into or out of the capacitor was controlled by the transistor. In this measurement, a highly purified oxide semiconductor film was used for a channel formation region of the transistor, and the off-state current of the transistor was measured from the change in charge amount per unit time of the capacitor. As a result, it was found that when the voltage between the source electrode and the drain electrode of the transistor is 3 V, an even smaller off current of several tens of yA / μm can be obtained. Therefore, a transistor using a highly purified oxide semiconductor film for a channel formation region has significantly lower off-state current than a transistor using crystalline silicon.

An oxide semiconductor preferably contains at least indium (In) or zinc (Zn). In addition, it is preferable that gallium (Ga) be included in addition to the stabilizer for reducing variation in electrical characteristics of the transistor including the oxide semiconductor. Moreover, it is preferable to have tin (Sn) as a stabilizer. Moreover, it is preferable to have hafnium (Hf) as a stabilizer. Moreover, it is preferable to have aluminum (Al) as a stabilizer. Moreover, it is preferable that zirconium (Zr) is included as a stabilizer.

As other stabilizers, lanthanoids such as lanthanum (La), cerium (Ce), praseodymium (Pr), neodymium (Nd), samarium (Sm), europium (Eu), gadolinium (Gd), terbium (Tb) , Dysprosium (Dy), holmium (Ho), erbium (Er), thulium (Tm), ytterbium (Yb), or lutetium (Lu) may be included.

For example, as an oxide semiconductor, indium oxide, tin oxide, zinc oxide, binary metal oxides such as In—Zn oxide, Sn—Zn oxide, Al—Zn oxide, Zn—Mg oxide Oxides, Sn—Mg oxides, In—Mg oxides, In—Ga oxides, In—Ga—Zn oxides (also referred to as IGZO) which are oxides of ternary metals, In— Al-Zn oxide, In-Sn-Zn oxide, Sn-Ga-Zn oxide, Al-Ga-Zn oxide, Sn-Al-Zn oxide, In-Hf-Zn oxide In-La-Zn-based oxide, In-Pr-Zn-based oxide, In-Nd-Zn-based oxide, In-Sm-Zn-based oxide, In-Eu-Zn-based oxide, In-Gd -Zn oxide, In-Tb-Zn oxide, In-Dy-Zn oxide, n-Ho-Zn-based oxide, In-Er-Zn-based oxide, In-Tm-Zn-based oxide, In-Yb-Zn-based oxide, In-Lu-Zn-based oxide, quaternary metal In—Sn—Ga—Zn-based oxide, In—Hf—Ga—Zn-based oxide, In—Al—Ga—Zn-based oxide, In—Sn—Al—Zn-based oxide, In— Sn-Hf-Zn-based oxides and In-Hf-Al-Zn-based oxides can be used.

Note that for example, an In—Ga—Zn-based oxide means an oxide containing In, Ga, and Zn, and there is no limitation on the ratio of In, Ga, and Zn. Moreover, metal elements other than In, Ga, and Zn may be included. An In—Ga—Zn-based oxide has sufficiently high resistance when no electric field is applied, and can sufficiently reduce off-state current. In addition, the In—Ga—Zn-based oxide has high mobility.

For example, In: Ga: Zn = 1: 1: 1 (= 1/3: 1/3: 1/3) or In: Ga: Zn = 2: 2: 1 (= 2/5: 2/5: 1). / 5) atomic ratio In—Ga—Zn-based oxides and oxides in the vicinity of the composition can be used. Alternatively, In: Sn: Zn = 1: 1: 1 (= 1/3: 1/3: 1/3), In: Sn: Zn = 2: 1: 3 (= 1/3: 1/6: 1) / 2) or In: Sn: Zn = 2: 1: 5 (= 1/4: 1/8: 5/8) atomic ratio In—Sn—Zn-based oxide or an oxide in the vicinity of the composition. Use it.

For example, high mobility can be obtained relatively easily with an In—Sn—Zn-based oxide. However, mobility can be increased by reducing the defect density in the bulk also in the case of using an In—Ga—Zn-based oxide.

For example, the oxide semiconductor film may include a non-single crystal. The non-single crystal includes, for example, CAAC (C Axis Aligned Crystal), polycrystal, microcrystal, and amorphous part. The amorphous part has a higher density of defect states than microcrystals and CAAC. In addition, microcrystals have a higher density of defect states than CAAC. Note that an oxide semiconductor including CAAC is referred to as a CAAC-OS (C Axis Crystallized Oxide Semiconductor).

For example, the oxide semiconductor film may include a CAAC-OS. For example, the CAAC-OS is c-axis oriented, and the a-axis and / or the b-axis are not aligned macroscopically.

The oxide semiconductor film may include microcrystal, for example. Note that an oxide semiconductor including microcrystal is referred to as a microcrystalline oxide semiconductor. The microcrystalline oxide semiconductor film includes microcrystal (also referred to as nanocrystal) with a size greater than or equal to 1 nm and less than 10 nm, for example.

For example, the oxide semiconductor film may include an amorphous part. Note that an oxide semiconductor having an amorphous part is referred to as an amorphous oxide semiconductor. An amorphous oxide semiconductor film has, for example, disordered atomic arrangement and no crystal component. Alternatively, the amorphous oxide semiconductor film is, for example, completely amorphous and has no crystal part.

Note that the oxide semiconductor film may be a mixed film of a CAAC-OS, a microcrystalline oxide semiconductor, and an amorphous oxide semiconductor. For example, the mixed film includes an amorphous oxide semiconductor region, a microcrystalline oxide semiconductor region, and a CAAC-OS region. The mixed film may have a stacked structure of an amorphous oxide semiconductor region, a microcrystalline oxide semiconductor region, and a CAAC-OS region, for example.

Note that the oxide semiconductor film may include a single crystal, for example.

The oxide semiconductor film preferably includes a plurality of crystal parts, and the c-axis of the crystal parts is aligned in a direction parallel to the normal vector of the formation surface or the normal vector of the surface. Note that the directions of the a-axis and the b-axis may be different between different crystal parts. An example of such an oxide semiconductor film is a CAAC-OS film.

In most cases, a crystal part included in the CAAC-OS film fits in a cube whose one side is less than 100 nm. Further, in the observation image obtained by a transmission electron microscope (TEM), the boundary between the crystal part and the crystal part included in the CAAC-OS film is not clear. In addition, a clear grain boundary (also referred to as a grain boundary) cannot be confirmed in the CAAC-OS film by TEM. Therefore, in the CAAC-OS film, reduction in electron mobility due to grain boundaries is suppressed.

The crystal part included in the CAAC-OS film is aligned so that, for example, the c-axis is in a direction parallel to the normal vector of the formation surface of the CAAC-OS film or the normal vector of the surface, and is perpendicular to the ab plane. When viewed from the direction, the metal atoms are arranged in a triangular shape or a hexagonal shape, and when viewed from the direction perpendicular to the c-axis, the metal atoms are arranged in layers, or the metal atoms and oxygen atoms are arranged in layers. Note that the directions of the a-axis and the b-axis may be different between different crystal parts. In this specification, the term “perpendicular” includes a range of 80 ° to 100 °, preferably 85 ° to 95 °. In addition, a simple term “parallel” includes a range of −10 ° to 10 °, preferably −5 ° to 5 °.

Note that the distribution of crystal parts in the CAAC-OS film is not necessarily uniform. For example, in the formation process of the CAAC-OS film, when crystal growth is performed from the surface side of the oxide semiconductor film, the ratio of crystal parts in the vicinity of the surface of the oxide semiconductor film is higher in the vicinity of the surface. In addition, when an impurity is added to the CAAC-OS film, the crystal part in a region to which the impurity is added becomes amorphous in some cases.

Since the c-axis of the crystal part included in the CAAC-OS film is aligned in a direction parallel to the normal vector of the formation surface of the CAAC-OS film or the normal vector of the surface, the shape of the CAAC-OS film ( Depending on the cross-sectional shape of the surface to be formed or the cross-sectional shape of the surface, the directions may be different from each other. The crystal part is formed when a film is formed or when a crystallization process such as a heat treatment is performed after the film formation. Therefore, the c-axes of the crystal parts are aligned in a direction parallel to the normal vector of the surface where the CAAC-OS film is formed or the normal vector of the surface.

In a transistor using a CAAC-OS film, change in electrical characteristics due to irradiation with visible light or ultraviolet light is small. Therefore, the transistor has high reliability.

The CAAC-OS film is formed by a sputtering method using a polycrystalline metal oxide target, for example. When ions collide with the target, a crystal region included in the target may be cleaved from the ab plane and separated as flat or pellet-like sputtered particles having a plane parallel to the ab plane. In this case, the flat-plate-like sputtered particle reaches the substrate while maintaining a crystalline state, whereby a CAAC-OS film can be formed.

In order to form the CAAC-OS film, the following conditions are preferably applied.

By reducing the mixing of impurities during film formation, the crystal state can be prevented from being broken by impurities. For example, the impurity concentration (hydrogen, water, carbon dioxide, nitrogen, etc.) existing in the treatment chamber may be reduced. Further, the impurity concentration in the deposition gas may be reduced. Specifically, a deposition gas having a dew point of −80 ° C. or lower, preferably −100 ° C. or lower is used.

Further, by increasing the substrate heating temperature during film formation, migration of sputtered particles occurs after reaching the substrate. Specifically, the film is formed at a substrate heating temperature of 100 ° C. to 740 ° C., preferably 200 ° C. to 500 ° C. By increasing the substrate heating temperature at the time of film formation, when the flat sputtered particles reach the substrate, migration occurs on the substrate, and the flat surface of the sputtered particles adheres to the substrate.

In addition, it is preferable to reduce plasma damage during film formation by increasing the oxygen ratio in the film formation gas and optimizing electric power. The oxygen ratio in the deposition gas is 30% by volume or more, preferably 100% by volume.

As an example of the target, an In—Ga—Zn-based oxide target is described below.

In-Ga-Zn which is polycrystalline by mixing InO _X powder, GaO _Y powder and ZnO _Z powder at a predetermined mol number ratio, and after heat treatment at a temperature of 1000 ° C. to 1500 ° C. A system oxide target is used. X, Y and Z are arbitrary positive numbers. Here, the predetermined mole number ratio is, for example, 2: 2: 1, 8: 4: 3, 3: 1: 1, 1: 1: 1, 4 for InO _X powder, GaO _Y powder, and ZnO _Z powder. : 2: 3 or 3: 1: 2. In addition, what is necessary is just to change suitably the kind of powder, and the mol number ratio to mix with the target to produce.

DESCRIPTION OF SYMBOLS 100 Power supply system 101-L thru | or 101-1 Component 102 Command part 103 Power supply line 104 Load 105 Switch 120 Substrate 121 Semiconductor film 121c Channel formation area 121d Drain area 121s Source area 122 Source electrode 123 Drain electrode 124 Gate insulating film 125 Gate electrode 200 Power supply system 201-1 to 201-L First component 202-1 First command unit 202-2 Second command unit 203 Power line 204 Load 205 Switch 206-1 to 206-M Second component 300 Power supply system 301 -1 to 301-L First component 302-1 First command unit 302-2 Second command unit 302-3 Third command unit 306-1 to 306-M Second component 307-1 to 307-N Third component Cement 400 power supply system 500 command unit 501-1 to 501-L first component 502-1 to 502-M second component 503-1 to 503-N third component 700 sensor circuit 901 the sensor circuit

Claims (10)

A command section;
A first component;
A second component;
A first sensor circuit ,
The first component includes a first power line, a first load, and a first switch,
The second component includes a second power line, a second load, and a second switch;
The first switch has a function of switching a conduction state between the first power line and the first load;
The second switch has a function of switching a conduction state between the second power supply line and the second load;
The command unit controls the on / off of the first switch according to the output of the first sensor circuit, and the on / off of the second switch according to the output of the first sensor circuit. A function to control off, and
The first switch has a function of holding the charge accumulated in the first load when the first switch is off according to the output of the first sensor circuit,
The second switch has a function of holding the charge accumulated in the second load when the second switch is off according to the output of the first sensor circuit,
The first switch or the second switch includes a transistor including a semiconductor having a wider band gap than silicon in a channel formation region. A command section;
A first component;
A second component;
A first sensor circuit;
A second sensor circuit;
The first component includes a first power line, a first load, and a first switch,
The second component includes a second power line, a second load, and a second switch;
The first switch has a function of switching a conduction state between the first power line and the first load;
The second switch has a function of switching a conduction state between the second power supply line and the second load;
The command unit controls the on / off of the first switch according to the output of the first sensor circuit, and the on / off of the second switch according to the output of the second sensor circuit. A function to control off, and
The first switch has a function of holding the charge accumulated in the first load when the first switch is off according to the output of the first sensor circuit,
The second switch has a function of holding electric charge accumulated in the second load when the second switch is off according to an output of the second sensor circuit.
The first switch or the second switch includes a transistor including a semiconductor having a wider band gap than silicon in a channel formation region. In claim 1 or claim 2 ,
The power supply system wherein the first power line is electrically connected to the second power line. In any of 請 Motomeko 1 to claim 3,
Said first sensor circuit, a power supply system that have a function of monitoring a change in the first load of the use environment or the ambient environment. In any one of Claims 1 thru | or 4 ,
The first sensor circuit includes a light sensor, a magnetic sensor, a microphone, a strain gauge, a pressure sensor, a gas sensor, or a temperature sensor. A first command unit;
A second command unit;
A third command section;
A first component;
A second component;
A third component;
A fourth component;
A first sensor circuit;
A second sensor circuit;
A third sensor circuit;
A fourth sensor circuit;
Have
The first component includes a first power line, a first load, and a first switch,
The second component includes a second power line, a second load, and a second switch;
The third component includes a third power line, a third load, and a third switch,
The fourth component includes a fourth power line, a fourth load, and a fourth switch,
The first switch has a function of switching a conduction state between the first power line and the first load;
The second switch has a function of switching a conduction state between the second power supply line and the second load;
The third switch has a function of switching a conduction state between the third power supply line and the third load;
The fourth switch has a function of switching a conduction state between the fourth power line and the fourth load;
The first command unit has a function of controlling on or off of the first switch in accordance with an output of the first sensor circuit, and the second switch in accordance with an output of the second sensor circuit. A function for controlling on / off of the third switch, a function for controlling on / off of the third switch according to the output of the third sensor circuit, and the fourth according to the output of the fourth sensor circuit . A function of controlling on or off of the switch, and
The second command unit has a function of controlling on or off of the first switch in accordance with an output of the first sensor circuit, and the second switch in accordance with an output of the second sensor circuit. A function of controlling on or off of the
The third command unit has a function of controlling on or off of the third switch in accordance with an output of the third sensor circuit, and the fourth switch in accordance with an output of the fourth sensor circuit. A function of controlling on or off of the
The first switch has a function of holding the charge accumulated in the first load when the first switch is off according to the output of the first sensor circuit,
The second switch has a function of holding electric charge accumulated in the second load when the second switch is off according to an output of the second sensor circuit.
The third switch has a function of holding the charge accumulated in the third load when the third switch is off according to the output of the third sensor circuit,
The fourth switch has a function of holding the charge accumulated in the fourth load when the fourth switch is off according to the output of the fourth sensor circuit.
The first switch, the second switch, the third switch, or the fourth switch includes a transistor including a semiconductor having a wider band gap than silicon in a channel formation region. In claim 6 ,
The power supply system wherein the first power line is electrically connected to the second power line. In claim 6 or claim 7 ,
The power supply system, wherein the first power supply line is electrically connected to the third power supply line. 請 Motomeko 6 to place any one of claims 8,
Said first sensor circuit, a power supply system that have a function of monitoring a change in the first load of the use environment or the ambient environment. In any one of Claims 6 thru | or 9 ,
The first sensor circuit includes a light sensor, a magnetic sensor, a microphone, a strain gauge, a pressure sensor, a gas sensor, or a temperature sensor.

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