JP6096145B2 - Manifold - Google Patents

Description

  The present invention relates to a manifold base having a substantially rectangular parallelepiped shape in which a base air supply channel, a base exhaust channel, and a base output channel are formed, and attached to the upper surface of the manifold base adjacent to each other. The present invention relates to a manifold including a flow path and two or more electromagnetic valves each communicating with a base output flow path.

  A manifold 101 shown in FIG. 6 is implemented as a conventional manifold. Such a manifold 101 is used, for example, for transporting electronic components for mounting on a substrate or the like in a factory. The manifold 101 is mounted and used on a head in the robot hand of the transfer robot.

  The manifold 101 includes two or more solenoid valves 3 and a substantially cuboid manifold base 102. As shown in FIG. 6, a base air supply passage 103 is formed in the manifold base 102 corresponding to the valve air supply passage 13 of the electromagnetic valve 3. A base output flow path 104 is formed corresponding to the valve output flow path 14 of the electromagnetic valve 3. A base exhaust passage 105 is formed corresponding to the valve exhaust passage 15 of the electromagnetic valve 3.

  The base air supply channel 103 communicates with the base air supply common channel 106. The base air supply common flow path 106 is formed so as to penetrate the one side surface side of the manifold base 102 in the longitudinal direction (from the front side to the back side in the drawing). The base air supply common channel 106 is connected to a vacuum source (not shown). The base exhaust flow path 105 communicates with the base exhaust common flow path 107. The base exhaust common flow path 107 is formed through the other side surface of the manifold base 102 in the longitudinal direction. The base exhaust common flow path 107 is open to the atmosphere. The base output flow path 104 is formed in an L shape so as to avoid the base air supply common flow path 106. The base output flow path 104 is connected to a suction pad (not shown).

The operation of the manifold 101 when transporting electronic parts for mounting on a substrate or the like in a factory will be described.
Air is sucked through the base air supply flow path 103 and the base output flow path 104 by the vacuum source connected to the base air supply common flow path 106. At this time, the electronic component is attracted to the suction pad by a negative pressure. The electronic component sucked by the suction pad is transported to a predetermined position by the transport robot. When transported to a predetermined position, the air is sucked through the base exhaust passage 105 and the base output passage 104, and the negative pressure to the suction pad is released. As a result, the electronic component is detached from the suction pad.

JP 2012-250313 A JP 2004-306238 A JP 2011-133074

However, the conventional manifold 101 has the following problems.
That is, in order to increase the speed of the transfer robot, there has been a strong demand to reduce the weight of the head in the robot hand and reduce the size. Due to the demand for higher speed and smaller size, the width of the solenoid valve 3 is about 10 mm. However, in the manifold base 102, the base air supply common flow path 106 and the base exhaust common flow path 107 are provided in parallel in the longitudinal direction in the manifold base 102. Therefore, the base output flow path 104 must be provided avoiding the base supply common flow path 106 and the base exhaust common flow path 107, and the manifold 101 is large in the horizontal direction and the vertical direction. As a result, the weight of the head in the robot hand is heavy, and it is difficult to increase the speed of the transfer robot.

  The present invention is for solving the above-described problems, and an object thereof is to provide a manifold including a manifold base that is reduced in size and weight.

In order to solve the above problems, the manifold of the present invention has the following configuration.
(1) A manifold base having a substantially rectangular parallelepiped shape in which a base air supply channel, a base exhaust channel, and a base output channel are formed, and attached to the upper surface of the manifold base adjacent to each other, the base air supply channel, In a manifold including a base exhaust flow path and two or more solenoid valves each communicating with the base output flow path, the base air supply flow path is formed through one side of the manifold base in the longitudinal direction. The base output flow path is formed on the other side surface of the manifold base, and the base exhaust flow path is formed on the other side surface of the manifold base. It is characterized in that it communicates with a base groove and a mesh filter is provided in the base exhaust passage .

( 2 ) A manifold base having a substantially rectangular parallelepiped shape in which a base air supply flow path, a base exhaust flow path, and a base output flow path are formed, and the base air supply flow path, In a manifold including a base exhaust flow path and two or more solenoid valves each communicating with the base output flow path, the base air supply flow path is formed through one side of the manifold base in the longitudinal direction. The base output flow path is formed on the other side surface of the manifold base, and the base exhaust flow path is formed on the other side surface of the manifold base. it communicates with the base groove, wherein the lower surface of the base groove, it is further exhaust groove is formed, the base groove, the porous filter settings It being, wherein the exhaust groove, said that the filter holding projection for holding the porous filter is formed, characterized by.

( 3 ) The manifold according to ( 2 ), wherein the manifold base is formed by extrusion molding.

(1) A manifold base having a substantially rectangular parallelepiped shape in which a base air supply channel, a base exhaust channel, and a base output channel are formed, and attached to the upper surface of the manifold base adjacent to each other, the base air supply channel, In a manifold including a base exhaust flow path and two or more solenoid valves each communicating with the base output flow path, the base air supply flow path is formed through one side of the manifold base in the longitudinal direction. The base output flow path is formed on the other side surface of the manifold base, and the base exhaust flow path is formed on the other side surface of the manifold base. Since the base exhaust passage communicates with the base groove, air is sucked into the base exhaust passage through the base groove formed on the other side surface. It is possible to eliminate the common channel, the same other aspects the base groove, it is possible to form the base output channel. Thereby, size reduction and weight reduction of a manifold base are realizable. Further, since the base exhaust passage is provided with a mesh filter, when the atmosphere is inhaled by the presence of the mesh filter in the base exhaust passage, particles in the atmosphere are electromagnetically Since it does not enter the flow path of the valve, there is no risk of impairing the sealing performance of the valve.

( 2 ) A manifold base having a substantially rectangular parallelepiped shape in which a base air supply flow path, a base exhaust flow path, and a base output flow path are formed, and the base air supply flow path, In a manifold including a base exhaust flow path and two or more solenoid valves each communicating with the base output flow path, the base air supply flow path is formed through one side of the manifold base in the longitudinal direction. The base output flow path is formed on the other side surface of the manifold base, and the base exhaust flow path is formed on the other side surface of the manifold base. Since the base exhaust channel is in communication with the base groove, air is sucked into the base exhaust passage through the base groove formed on the other side surface. It is possible to eliminate the gas common passage, to the same other aspects the base groove, it is possible to form the base output channel. Thereby, size reduction and weight reduction of a manifold base are realizable. The base groove is provided with a porous filter, the lower surface of the base groove is formed with an exhaust groove, and the exhaust groove is used for holding the porous filter. Since the filter holding convex part is formed, the exhaust groove is formed on the lower surface of the base groove, so that a flow path for sucking air can be secured and the resistance by the porous filter is reduced. can do. Thereby, responsiveness can be improved. In addition, since the porous filter is provided in the base groove and the filter holding convex part is formed in the exhaust groove, particles in the atmosphere are retained in the electromagnetic valve while holding the porous filter when the air is inhaled. Since it does not enter the flow path, there is no risk of impairing the sealing performance of the valve.

( 3 ) The manifold according to ( 2 ) is characterized in that the manifold base is formed by extrusion molding, so that the product can be provided at low cost by reducing post-processing.

It is XX sectional drawing of the manifold of FIG. 2 which concerns on 1st Embodiment. It is a top view of a manifold. It is a top view of a manifold base. It is sectional drawing corresponding to FIG. 1 of the manifold which concerns on 2nd Embodiment. It is the Y section enlarged view of FIG. It is sectional drawing of the conventional manifold.

<First Embodiment>
The manifold 1 of the first embodiment will be described in detail below with reference to the drawings. FIG. 2 is a view of the manifold 1 as seen from above. FIG. 1 is a cross-sectional view of the manifold 1 according to the first embodiment, taken along the line XX shown in FIG. FIG. 3 is a diagram of the manifold base 4 alone as viewed from above.

(Configuration of solenoid valve)
As shown in FIG. 2, the manifold 1 includes two or more solenoid valves 3 and a manifold base 4. First, the configuration of the electromagnetic valve 3 will be described.
As shown in FIG. 1, the electromagnetic valve 3 includes a valve unit 10 having a valve body 12 for switching the air flow path and a solenoid unit 30 for driving the valve body 12.

  The valve portion 10 includes a substantially rectangular parallelepiped valve body 11. A through hole 11a is formed in the valve body 11 so as to penetrate in the longitudinal direction (from the left side to the right side in the drawing). One end of a valve air supply channel 13, a valve output channel 14, and a valve exhaust channel 15 is opened on the lower surface of the valve body 11 in order from the right in the drawing. The other ends of the flow paths 13 to 15 are opened in communication with the through holes 11a. A plurality of recesses 11b for stealing meat is formed on the upper surface of the valve body 11.

  A hollow cylindrical retainer 16 is attached to one end of the through hole 11a. A stopper 21 is attached to one end surface of the retainer 16. The stopper plug 21 has a cylindrical shape, and has an outer diameter that is slightly smaller than the inner diameter of the retainer 16. The stopper 21 is provided with an annular recess along the outer peripheral surface for mounting the O-ring 25. A recess is formed on the side of the stopcock 21 that does not face the outside, and a sound deadening member 24 is provided. An air supply valve seat 16 b is formed on the other end surface of the retainer 16. Further, the retainer 16 is formed with a communication hole 16a at an opening where the valve air supply channel 13 and the through hole 11a communicate with each other. The interior of the valve air supply passage 13 and the retainer 16 communicates with each other through a communication hole 16a. In order to mount the O-ring 18 between the air supply valve seat 16b of the retainer 16 and the through hole 11a, a recess is provided in an annular shape along the outer peripheral surface.

  A cylinder 16c is formed on the inner wall of the retainer 16, and the piston 20 is slidably held in the cylinder 16c. The piston 20 is obtained by integrally forming a piston rod 20b on a piston portion 20a. The piston portion 20a has a columnar shape, and has an outer diameter that is slightly smaller than the inner diameter of the cylinder 16c. In order to mount the O-ring 26 on the piston portion 20a, a recess is annularly provided along the outer peripheral surface. A compression spring 23 is interposed between the piston portion 20a and the stopper plug 21. The piston rod 20 b is connected to one end of a cylindrical rod 22 provided with the valve body 12. The valve body 12 is a rubber ring member, and is fitted into a valve body holding portion 22 a formed on the center outer periphery of the rod 22.

  In the valve body 11, an exhaust valve seat 11 c is formed on the end face on the valve output flow path 14 side between the valve output flow path 14 and the valve exhaust flow path 15. The exhaust valve seat 11c is formed to face the supply valve seat 16b. A valve chamber 19 is formed in a space between the air supply valve seat 16 b and the exhaust valve seat 11 c and located on the valve output flow path 14. The valve body 12 is accommodated in the valve chamber 19. The valve body 12 contacts or separates from the supply valve seat 16b and the exhaust valve seat 11c. The valve body 12 is urged in a direction away from the air supply valve seat 16 b by the urging force of the compression spring 23.

  FIG. 1 shows a state where the coil 32 is energized. The movable iron core 36 is in contact with the fixed iron core 38. At this time, the valve body 12 is separated from the air supply valve seat 16b by the urging force of the compression spring 23 and abuts against the exhaust valve seat 11c. As a result, the valve air supply channel 13 and the valve output channel 14 communicate with each other through the communication hole 16a, the retainer 16 and the valve chamber 19, and the valve output channel 14 and the valve exhaust channel 15 are blocked.

  On the other hand, although not shown, when the energization to the coil 32 is stopped, the valve body 12 comes into contact with the air supply valve seat 16b against the urging force of the compression spring 23 and is separated from the exhaust valve seat 11c. Thereby, the valve air supply flow path 13 and the valve output flow path 14 are shut off, and the valve output flow path 14 and the valve exhaust flow path 15 communicate with each other via the valve chamber 19 and the through hole 11a.

  An annular mounting groove 11d is formed on the surface of the valve body 11 on which the solenoid portion 30 is disposed. An O-ring 17 made of an elastic body as a position adjusting means is mounted in the mounting groove 11d. The depth of the mounting groove 11d is set to be smaller than the thickness of the O-ring 17, and the O-ring 17 is mounted in the mounting groove 11d so as to protrude slightly from the height of the mounting groove 11d of the valve body 11. .

  As shown in FIG. 1, the solenoid unit 30 includes a bonnet 31. Inside the bonnet 31, a coil 32 in which a plurality of conductive wires are wound around a cylindrical bobbin 33 is disposed. A guide ring 35 that functions as a magnetic circuit forming member that forms a magnetic circuit is provided inside the magnetic core 34 and on the side where the valve body 11 is located. A substantially cylindrical movable iron core 36 is slidably held in the guide ring 35 and the bobbin 33. One end of the movable iron core 36 is installed so as to enter the through hole 11 a, and its end surface is in contact with the end surface of the rod 22. Further, a flange 36 a that protrudes outward is formed at one end of the movable iron core 36. A compression spring 37 is interposed between the guide ring 35 and the flange portion 36a. The movable iron core 36 is biased in the direction of pressing the rod 22 by the biasing force of the compression spring 37.

  A cylindrical fixed iron core 38 is provided in the bobbin 33. One end surface of the fixed iron core 38 is a magnetic pole surface, and the magnetic pole surface is coaxially disposed so as to face the other end surface of the movable iron core 36. The outer diameter of the fixed iron core 38 is substantially the same as the inner diameter of the bobbin 33. A pair of coil terminals 39 are fitted into one end of the bobbin 33. One end of the coil terminal 39 is electrically connected to the coil 32, and the other end of the coil terminal 39 is electrically connected to the connection terminal 41 of the terminal block 40 attached to the upper part of the solenoid unit 30.

(Manifold base configuration)
Next, the manifold base 4 will be described.
The manifold base 4 includes a substantially cuboid base body 51. On the upper surface of the base body 51, as shown in FIG. 3, openings for the base air supply flow path 52, the base output flow path 54, and the base exhaust flow path 55 are formed for one electromagnetic valve 3. As shown in FIG. 1, a base air supply common channel 53 is formed on one side 51a side of the base body 51 so as to penetrate in the longitudinal direction (from the front side to the back side in the drawing). One end of the base air supply channel 52 communicates with the base air supply common channel 53. The other end of the base air supply passage 52 communicates with the valve air supply passage 13 of the electromagnetic valve 3. The base air supply channel 52 is connected to a vacuum source (not shown) via the base air supply common channel 53, and air is sucked.

  The base output channel 54 is formed in the base body 51 in an L shape. The base output flow path 54 is provided with a mesh filter 56 for removing particles. At one end of the base output channel 54, an opening is formed in the other side surface 51b of the base body 51. The other end of the base output channel 54 communicates with the valve output channel 14. The base output channel 54 is connected to a suction pad (not shown) for sucking electronic components.

  One end of the base exhaust passage 55 communicates with a rectangular base groove 58. The base groove 58 is formed on the other side surface 51 b of the base body 51. The other end of the base exhaust passage 55 communicates with the valve exhaust passage 15 of the electromagnetic valve 3. A mesh filter 57 for removing particles is installed in the base exhaust passage 55. The mesh filter 57 is shaped like a hat and has a collar portion 57a. The flange portion 57 a is formed slightly larger than the diameter of the base exhaust passage 55. When the mesh filter 57 is incorporated into the base exhaust passage 55, the flange portion 57a is reduced and returned to its original shape by the base exhaust passage 55, so that the tension is used to fix the mesh filter 57 in the base exhaust passage 55. Yes.

(Manifold effect)
As shown in FIG. 1, when the coil 32 is energized, the movable iron core 36 moves to the left in the drawing and comes into contact with the fixed iron core 38, and the valve body 12 is brought into the air supply valve seat by the urging force of the compression spring 23. It is separated from 16b. At this time, the rod 22 contacts the movable iron core 36. In this state, the valve body 12 contacts the exhaust valve seat 11c.
Thereby, the valve air supply flow path 13 and the valve output flow path 14 communicate with each other through the communication hole 16a, the retainer 16 and the valve chamber 19, and the valve output flow path 14 and the valve exhaust flow path 15 are blocked. Air is sucked through the base air supply channel 52 and the base output channel 54 by the vacuum source connected to the base air supply common channel 53. The electronic component is attracted to the suction pad by the negative pressure. The electronic component sucked by the suction pad is transported to a predetermined position by the transport robot.

  When the coil 32 is conveyed to a predetermined position and energization to the coil 32 is stopped, the movable iron core 36 moves rightward in the figure by the urging force of the compression spring 37 and abuts against the rod 22 (not shown). The valve body 12 abuts against the air supply valve seat 16b against the urging force of the compression spring 23, and is separated from the exhaust valve seat 11c. Thereby, the valve air supply flow path 13 and the valve output flow path 14 are shut off, and the valve output flow path 14 and the valve exhaust flow path 15 communicate with each other via the valve chamber 19 and the through hole 11a. The atmosphere is sucked in through the base exhaust passage 55 and the base output passage 54, and the negative pressure to the suction pad is released. As a result, the electronic component is detached from the suction pad.

  Here, the conventional manifold 101 has a base exhaust common flow path 107 as shown in FIG. However, the manifold 1 according to the first embodiment can easily form the atmosphere by forming the base groove 58 on the other side surface 51b and communicating with the base exhaust passage 55 without using the base exhaust common passage 107. Can be inhaled. As a result, the manifold base 4 can be reduced in size and weight, and the response time for switching from vacuum to atmospheric pressure is short, and the responsiveness can be improved.

  Further, since the mesh filter 57 removes particles in the atmosphere when opening to the atmosphere, the sealing performance of the valve can be maintained without particles entering the flow path of the electromagnetic valve. The mesh filter 57 is held in the base exhaust passage 55 by its tension. Even if the air is pushed upward by inhalation of the atmosphere, it will not come off because of the electromagnetic valve 3. Even if it falls downward, it does not fall from the base body 51 due to the rectangular base groove 58.

As described above, according to the manifold 1 according to the first embodiment,
(1) A manifold base 4 having a substantially rectangular parallelepiped shape in which a base air supply flow path 52, a base exhaust flow path 55, and a base output flow path 54 are formed, and a top surface of the manifold base 4 are attached adjacent to each other. In the manifold 1 including the passage 52, the base exhaust passage 55, and the two or more solenoid valves 3 through which the base output passage 54 communicates, the base air supply passage 52 extends in the longitudinal direction toward the one side surface 51 a of the manifold base 4. Are connected to the base air supply common channel 53 formed through the base, the base output channel 54 is formed on the other side surface 51 b of the manifold base 4, and the base exhaust channel 55 is connected to the manifold base 4. The base exhaust passage 55 is formed on the other side surface 51b because the base groove 58 is communicated with the base groove 58 formed on the other side surface 51b. Air is sucked through the base groove 58, it is possible to eliminate the base exhaust common channel, the same other aspects 51b based grooves 58, it is possible to form the base output channel 54. Thereby, size reduction and weight reduction of the manifold base 4 are realizable.

(2) The manifold 1 described in (1) is characterized in that the base exhaust passage 55 is provided with a mesh filter 57. Therefore, the base exhaust passage 55 has the mesh filter 57. When the atmosphere is inhaled, particles in the atmosphere do not enter the flow path of the electromagnetic valve 3, so there is no risk of impairing the sealing performance of the valve.

Second Embodiment
The manifold 2 of 2nd Embodiment is demonstrated referring drawings. FIG. 4 is a cross-sectional view corresponding to FIG. 1 of the manifold 2 according to the second embodiment. FIG. 5 is an enlarged view of a Y portion in FIG. The plan view of the manifold 1 and the manifold base 4 according to the first embodiment shown in FIGS. 2 and 3 is the same as the plan view of the manifold 2 and the manifold base 5 according to the second embodiment. Here, the manifold 2 and the manifold base 5 according to the second embodiment are shown in parentheses. In addition, about the structure which is common in 1st Embodiment, the code | symbol same as 1st Embodiment is attached | subjected to drawing, and description is omitted.
In the manifold 1 according to the first embodiment, the mesh filter 57 is used for the manifold base 4. However, the manifold 2 according to the second embodiment is configured using a porous filter 59 instead of the mesh filter 57 with respect to the manifold base 5 as shown in FIG. Since the porous filter 59 can filter fine particles and the like as compared with the mesh filter 57, the porous filter 59 can be applied when a cleaner state is desired. In addition, since the porous filter 59 has a large air resistance when opened to the atmosphere, there is a concern that sufficient circulation of the atmosphere cannot be obtained and the responsiveness is poor.

  As shown in FIG. 4, the manifold 2 includes a solenoid valve 3 and a manifold base 5. In the base groove 58 of the manifold base 5, a porous filter 59 having a rectangular cross section is fitted and installed in the longitudinal direction. On the lower surface of the base groove 58, an exhaust groove 58a for securing an air flow path is formed. A filter holding convex portion 58b for holding the porous filter 59 is formed in the exhaust groove 58a.

Here, it is conceivable that the porous filter 59 is fitted into the base groove 58 not in the longitudinal direction but in the lateral direction. However, if it is fitted in the short direction, the manifold base becomes large. In order to avoid an increase in the size of the manifold base, in the manifold 2 according to the second embodiment, the porous filter 59 is fitted in the longitudinal direction. However, when fitted in the longitudinal direction, sufficient air circulation could not be obtained due to air resistance by the porous filter 59 when opening to the atmosphere. Further, the air flow in the porous filter 59 is limited to the arrow P1 shown in FIG.
Therefore, by forming an exhaust groove 58a for securing an air flow path in the base groove 58, not only the arrow P1 but also the air flows of the arrows P2 and P3 are generated, and a large volume of air is sucked. I was able to. Thereby, a large volume of air can be inhaled in a short time, and the responsiveness is improved.
In addition, the maintenance can be performed without removing the solenoid valve 3 when performing maintenance such as installing or replacing the porous filter 59. Therefore, work efficiency can be improved.

  As described above, according to the manifold 2 according to the second embodiment, the base groove 58 is provided with the porous filter 59, and the exhaust groove 58 a is formed on the lower surface of the base groove 58. The exhaust groove 58a is formed with a filter holding convex portion 58b for holding the porous filter 59. Therefore, the exhaust groove 58a is formed on the lower surface of the base groove 58. Therefore, a flow path for inhaling air can be secured, and the resistance due to the porous filter 59 can be reduced. Thereby, responsiveness can be improved. Further, since the porous filter 59 is provided in the base groove 58 and the filter holding convex portion 58b is formed in the exhaust groove 58a, when the air is sucked, the porous filter 59 is held and the Since particles do not enter the flow path of the electromagnetic valve 3, there is no risk of impairing the sealing performance of the valve.

  In the manifold 2 described above, the manifold base 5 is characterized by being formed by extrusion molding. Therefore, by reducing post-processing, a product can be provided at low cost.

In addition, this embodiment is only a mere illustration and does not limit this invention at all. Accordingly, the present invention can naturally be improved and modified in various ways without departing from the gist thereof.
For example, the manifold of the present invention is used for a three-port valve for negative pressure that is open to the vacuum and the atmosphere, but can also be used for positive pressure. In this case, the air flow is reversed. For example, in the manifold 2 according to the second embodiment, the arrows P1, P2, and P3 in FIG. 5 indicating the flow of the air are directed in opposite directions.
Further, in the manifold 1 according to the first embodiment, the mesh filter 57 is provided in the base output flow path 55. However, if there is no concern about particles, the mesh filter 57 may not be provided. Similarly, in the manifold 2 according to the second embodiment, the porous filter 59 is provided in the base groove 58. However, if there is no concern about particles, the porous filter 59 may not be provided. In the state where the exhaust groove 58a is formed in the base groove 58 without the porous filter 59, higher response can be obtained.
In the manifold 1 according to the first embodiment, when the mesh filter 57 is provided, the exhaust groove 58a is not formed in the base groove 58, but the exhaust groove 58a may be provided.

1, 2 Manifold 3 Solenoid valve 4, 5 Manifold base 10 Valve portion 13 Valve air supply passage 14 Valve output flow passage 15 Valve exhaust passage 30 Solenoid portion 51 Base body 51a One side surface 51b Other side surface 52 Base air supply passage 53 Base Air supply common flow path 54 Base output flow path 55 Base exhaust flow path 57 Mesh filter 58 Base groove 58a Exhaust groove 58b Filter holding convex part 59 Porous filter

Claims (3)

A manifold base having a substantially rectangular parallelepiped shape formed with a base air supply channel, a base exhaust channel, and a base output channel, and attached to the upper surface of the manifold base adjacent to each other, the base air supply channel, the base exhaust flow And a manifold having two or more solenoid valves each communicating with the base output flow path,
The base air supply channel communicates with a base air supply common channel formed on one side of the manifold base in the longitudinal direction;
The base output flow path is formed on the other side of the manifold base,
The base exhaust passage communicates with a base groove formed on the other side surface of the manifold base;
The base exhaust flow path is provided with a mesh filter,
A featured manifold. A manifold base having a substantially rectangular parallelepiped shape formed with a base air supply channel, a base exhaust channel, and a base output channel, and attached to the upper surface of the manifold base adjacent to each other, the base air supply channel, the base exhaust flow And a manifold having two or more solenoid valves each communicating with the base output flow path,
The base air supply channel communicates with a base air supply common channel formed on one side of the manifold base in the longitudinal direction;
The base output flow path is formed on the other side of the manifold base,
The base exhaust passage communicates with a base groove formed on the other side surface of the manifold base;
The base groove is provided with a porous filter,
An exhaust groove is formed on the lower surface of the base groove,
A filter holding convex part for holding the porous filter is formed in the exhaust groove,
Manifold characterized by. The manifold according to claim 2 ,
The manifold base is formed by extrusion;
Manifold characterized by.

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