JP6082494B1 - Actuator - Google Patents

Abstract

An actuator is provided that realizes fixing of an article to a desired jig or the like with precise positioning using simple parts. By incorporating a piezoelectric element into an actuator having a drive direction conversion section having spring properties, the displacement is maintained within a predetermined time even when the supply of voltage is stopped with an accurate displacement applied to the object. can do. [Selection] Figure 1

Description

  The present invention relates to an actuator. More specifically, the present invention relates to an actuator that gives an accurate displacement amount to a target article.

  In a manufacturing site such as a factory, there is a case where an article to be manufactured is fixed to a predetermined jig and transported by a transport device such as a belt conveyor. As a method for fixing the article in the jig, various methods such as using a member having a spring property or using an electromagnet can be considered.

  Patent Document 1 discloses the technical contents of an actuator using a piezoelectric element and a positioning device using the same as a technique that seems to be partly related to the present invention.

JP 2014-023266 A

For example, there are uses that not only fix the article to the jig but also require precise positioning, such as fine adjustment of the position on the plane after the semiconductor wafer is fixed to the transfer jig.
If the article is simply fixed to the jig, means for generating a desired force such as a spring or an electromagnet may be used. However, in addition to simply fixing the article to the jig, if it is accompanied by precise positioning, positioning cannot be realized with the aforementioned spring or electromagnet.

  The present invention has been made in view of such a situation, and an object of the present invention is to provide an actuator that realizes fixation with precise positioning of an article to a desired jig or the like using simple parts.

  In order to solve the above-described problems, an actuator of the present invention includes a piezoelectric element that can be connected and disconnected from a voltage source, a first driver that is press-fitted with the piezoelectric element and is displaced in the longitudinal direction as the piezoelectric element is displaced. A second driving body that is provided on both side surfaces of the first driving body and converts a displacement in the longitudinal direction of the first driving body to a displacement in a direction perpendicular to the longitudinal direction, and is fixed to one side of the second driving body. A top plate that applies displacement to the object, and a bottom plate that is fixed to the other side of the second driver and applies displacement to the object.

According to the present invention, it is possible to provide an actuator that realizes fixing with precise positioning of an article to a desired jig or the like using simple parts.
Problems, configurations, and effects other than those described above will be clarified by the following description of embodiments.

1 is an external perspective view of an actuator according to a first embodiment of the present invention. It is a disassembled perspective view of the actuator which concerns on 1st embodiment of this invention. FIG. 2 is an external perspective view of a first drive body into which a piezoelectric element is press-fitted, and an external perspective view of a state in which the first drive body is sandwiched between second drive bodies. It is an external appearance perspective view of the state which inserted | pinched the 2nd drive body with the top plate and the baseplate. FIG. 4 is a top view of the first driver, a partially enlarged view, and a partially enlarged view in a state where distortion is caused by the piezoelectric element. Front view of the second driving body, front view of the second driving body, a partially enlarged view of the vicinity of the center, a partially enlarged view of the vicinity of the center in a state where distortion is caused by the piezoelectric element, and an end portion FIG. 4 is a partially enlarged view of a vicinity portion and a partially enlarged view of a portion in the vicinity of an end portion in a state where distortion is caused by a piezoelectric element. It is a block diagram of an actuator drive device. It is a circuit diagram of a PWM driver. It is the line graph based on the table | surface which applied the voltage 100V to the piezoelectric element single-piece | unit, stopped applying the voltage, and observed the displacement with time passage, and the table | surface. It is an external appearance perspective view of the 2nd drive body used for an actuator based on 2nd embodiment of this invention. It is the front view of the 2nd drive body which concerns on 2nd embodiment of this invention, a partial enlarged view, the enlarged view of a drive direction conversion part, and the operation principle figure of a drive direction conversion part.

[First Embodiment: Appearance and Configuration of Actuator 101]
FIG. 1 is an external perspective view of an actuator 101 according to the first embodiment of the present invention.
FIG. 2 is an exploded perspective view of the actuator 101 according to the first embodiment of the present invention.
FIG. 3A is an external perspective view of the first drive body into which the piezoelectric element is press-fitted.
Figure 3B is a perspective view of a sandwiched state of the first driving member by the second driver.
FIG. 4 is an external perspective view of a state in which the second driving body is sandwiched between the top plate and the bottom plate.
2, FIG. 3A, FIG. 3B and FIG. 4 are also diagrams for explaining the assembly process of the actuator 101. FIG.
For convenience of drawing, the hole drawn in an octagon is actually a circle.

As shown in FIG. 1, the actuator 101 has a thin flat plate shape. When a voltage is applied to the lead wire 102, the second driving bodies 103 and 104 are deformed. Due to the deformation of the second driving bodies 103 and 104, the top plate 105 is driven slightly upward in the drawing and the bottom plate 106 is slightly driven downward in the drawing.
As shown in FIG. 2, the actuator 101 is provided with second drive bodies 103 and 104 that are formed symmetrically on both sides of the first drive body 201 disposed at the center. A top plate 105 and a bottom plate 106 are disposed on both side surfaces of 104, respectively. All parts except the piezoelectric elements 202a and 202b press-fitted into the slots 201a and 201b of the first driver 201 are made of stainless steel. Note that the material constituting the actuator 101 is required to have rigidity and elasticity. Therefore, in addition to stainless steel, chromium molybdenum steel and the like are considered as usable materials.

As shown in FIGS. 2 and 3A, first, the piezoelectric elements 202a and 202b are press-fitted into the slots 201a and 201b of the first driver 201.
The first driver 201 reflects the force generated when the piezoelectric elements 202a and 202b to which the voltage is applied is deformed as its deformation and transmits the force to the second drivers 103 and 104.

As shown in FIGS. 3A and 3B, a central hole 201 c, which is a screw hole, a first drive hole 201 d, a second drive hole 201 e, a third drive hole 201 f, and a fourth drive, which are provided beside the first drive body 201. The holes 201g exist at positions corresponding to the center hole 103c, the first drive hole 103d, the second drive hole 103e, the third drive hole 103f, and the fourth drive hole 103g of the second drive body 103, respectively.
Similarly, on the opposite side of the first driving body 201 that cannot be seen from the paper surface, the same positions as the center hole 201c, the first driving hole 201d, the second driving hole 201e, the third driving hole 201f, and the fourth driving hole 201g are provided. Screw holes are provided.

Further, the second drive body 104 paired with the second drive body 103 also has a center hole 103c, a first drive hole 103d, a second drive hole 103e, a third drive hole 103f, a second drive body 103, Screw holes are provided at the same positions as the four drive holes 103g. That is, the second driving bodies 103 and 104 are screwed to the first driving body 201 with screws (not shown) through the above screw holes.
As shown in FIG. 4, the top plate 105 and the bottom plate 106 are screwed to both side surfaces of the second driving bodies 103 and 104 with screws (not shown). In this way, the second driving bodies 103 and 104 convert the deformation of the first driving body 201 in the longitudinal direction of the actuator 101 into the deformation in the vertical direction and transmit the deformation to the top plate 105 and the bottom plate 106.

[First Embodiment: Structure of First Driver 201]
FIG. 5A is a top view of the first driver 201. FIG. 5B is a partially enlarged view of the first driver 201. FIG. 5C is a partially enlarged view of the first driving body 201 in a state where distortion is generated by the piezoelectric elements 202a and 202b. Actually, a large displacement as shown in FIG. 5C does not occur, but a state in which a large displacement has occurred is shown for easy understanding.
As shown in FIG. 5A and FIG. 5B, in the positions close to the slots 201a and 201b, which are slightly separated from the center of the first driver 201, notches 201h, 201i, and the like for following the deformation of the piezoelectric elements 202a and 202b. 201j, 201k, 201l, and 201m are formed. These springs 201h, 201i, 201j, 201k, 201l and 201m provide leaf springs 201n, 201o, 201p and 201q.

When a voltage is applied to the piezoelectric elements 202a and 202b (see FIG. 4), the piezoelectric elements 202a and 202b are deformed in a direction extending in the longitudinal direction of the first driver 201. Then, as shown in FIGS. 5B to 5C, the leaf springs 201n, 201o, 201p, 201q formed by cutting are elastically deformed. In this way, the entire length of the first driver 201 is extended by the piezoelectric elements 202a and 202b.
As shown in FIG. 3A, on the side surface of the first driving body 201, a center hole 201c, which is a screw hole, a first driving hole 201d, a second driving hole 201e, a third driving hole 201f, and a fourth driving hole 201g are provided. These five screw holes are also provided, and similarly, five screw holes are also provided on the opposite side that cannot be seen from the page. And the 2nd drive bodies 103 and 104 are being fixed to these ten screw holes using the screw which is not illustrated. Thereby, the deformation | transformation which arose in the 1st drive body 201 is transmitted to the 2nd drive bodies 103 and 104 through a screw | thread.

[First Embodiment: Structure of Second Driver 104]
The structure of the second driver 104 will be described here. Since the second driving body 103 has the same structure as the second driving body 104, only the second driving body 104 will be described in FIGS. 6A to 6E.
FIG. 6A is a front view of the second driver 104. FIG. 6B is a partially enlarged view of the vicinity of the center of the second driver 104. FIG. 6C is a partially enlarged view showing a state in which distortion is generated by the piezoelectric elements 202 a and 202 b in the vicinity of the center of the second driving body 104. FIG. 6D is a partially enlarged view of the vicinity of the end of the second driver 104. FIG. 6E is a partially enlarged view showing a state in which distortion is generated by the piezoelectric elements 202 a and 202 b in the vicinity of the end of the second driver 104. Actually, a large displacement as shown in FIGS. 6C and 6E does not occur, but a state in which a large displacement has occurred is shown for easy understanding.

  As shown in FIGS. 6A, 6B, and 6D, the second driving body 104 includes a pantograph-shaped driving direction conversion unit 104h, 104i, 104j, 104k, 104l formed by cutting and having spring properties at both ends. , 104m, 104n, and 104o are provided. Both ends of the drive direction conversion units 104h, 104i, 104j, 104k, 104l, 104m, 104n, and 104o are thinned by cutting, and elastic deformation occurs at the thinned portions. Similarly to the second driving body 103, the center hole 104c, the first driving hole 104d, the second driving hole 104e, the third driving hole 104f, and the fourth driving hole are provided at positions corresponding to the holes of the first driving body 201. 104g is provided.

As described above, the first driver 201 is fixed to the second drivers 103 and 104 with screws. When the piezoelectric elements 202a and 202b are deformed to extend to the first driving body 201, the driving force is transmitted to the second driving body 104 through screws. In FIG. 6B, the driving force generated from the first driving body 201 has a distance between the center portion 104p where the center hole 104c is provided and the first driving portion 104q where the first drive hole 104d is provided. Transmit in the direction of leaving. Then, as shown in FIG. 6B to FIG. 6C, the pantograph-shaped drive direction conversion portions 104 h and 104 i having spring properties at both ends formed by cutting are elastically deformed at the thinned portions at both ends. Also, as shown in FIGS. 6D to 6E, the pantograph-shaped drive direction changing portions 104j and 104k formed by cutting and having spring properties at both ends are elastically deformed at the thinned portions at both ends. Then, the longitudinal displacement is converted into a vertical displacement.
Thus, the top driver 104r and the bottom support 104s of the second driver 103, 104 are expanded in the vertical direction by the driving force of the first driver 201.

The greatest feature of the actuator 101 according to the first embodiment of the present invention is that the second is to change the driving direction of the piezoelectric elements 202a and 202b extending and contracting in the longitudinal direction to a right angle direction and to greatly increase the amount of displacement. It exists in the drive body 103,104. The piezoelectric elements 202a and 202b are displaced with a strong force by applying a high voltage, but the displacement is extremely small. Therefore, the pantograph-shaped drive direction conversion portion provided on the second drive bodies 103 and 104 having spring properties at both ends converts the displacement direction to the orthogonal direction and greatly increases the amount of displacement.
For example, the second drivers 103 and 104 increase the displacement amount of the piezoelectric elements 202a and 202b by about 15 times. By this conversion, on the contrary, the driving force is reduced to 1/15 times.

[First Embodiment: Method of Using Actuator 101]
FIG. 7 is a block diagram of the actuator driving device 701. The actuator driving device 701 can be realized by adding a simple circuit to a general personal computer.
A personal computer constituting a part of the actuator driving device 701 includes a CPU 703, a ROM 704, a RAM 705, a non-volatile storage 706 such as a hard disk device and a flash memory, a display unit 707 such as a liquid crystal display, a keyboard and a mouse, etc. The operation unit 708 is provided. In addition to these, a serial interface 709 (abbreviated as “serial I / F” in FIG. 7) is connected to the bus 702, and PWM + pulses and PWM− pulses are supplied from the serial interface 709 to the PWM driver 710. .

FIG. 8 is a circuit diagram of the PWM driver 710.
Piezoelectric elements 202a and 202b incorporated in the actuator 101 and a smoothing capacitor C804 connected in parallel to the PWM driver 710 are connected through a connector 805 and a cable 806.
The PWM + pulse output from the serial interface 709 is applied to the gate of a P-channel MOSFET 801 (hereinafter abbreviated as “PMOSFET”). The PMOSFET 801 whose source is connected to the switching power supply 711 functions as a high-side switch for the switching power supply 711.
The PWM-pulse output from the serial interface 709 is applied to the gate of an N-channel MOSFET 802 (hereinafter abbreviated as “NMOSFET”). The drain of the NMOSFET 802 is connected to the current limiting resistor R803. The other terminal of the current limiting resistor R803 is connected to the drain of the PMOSFET 801. The NMOSFET 802 functions as a low-side switch for the smoothing capacitor C804 and the piezoelectric elements 202a and 202b.

  Note that the NMOSFET 802 and the PMOSFET 801 in the PWM driver 710 are general usage examples, but are not necessarily limited thereto. For example, on / off of the switching power supply 711 may be controlled by applying a gate voltage higher than the voltage output from the switching power supply 711 to the NMOSFET instead of the PMOSFET 801.

By controlling the duty ratio of the PWM + pulse applied to the PWM driver 710 and the output time of the PWM + pulse, the voltage applied to the piezoelectric elements 202a and 202b can be increased or decreased. As is well known, the piezoelectric elements 202a and 202b exhibit a displacement amount substantially proportional to the applied voltage. The fact that the voltage applied to the piezoelectric elements 202a and 202b can be adjusted means that the displacement amount of the actuator 101 can be adjusted.
In the PWM driver 710, a non-illustrated table describing the displacement amount of the actuator 101, the duty ratio of the PWM + pulse, and the output time is stored in the nonvolatile storage 706 of the actuator driving device 701. The actuator driving device 701 receives a user operation from the operation unit 708, selects a desired PWM + pulse duty ratio and output time from the table, and supplies the PWM + pulse adjusted appropriately to the PWM driver 710.

Once the actuator driving device 701 supplies the PWM + pulse to the PWM driver 710 and causes the actuator 101 to undergo a desired displacement, the cable 806 is then disconnected from the connector 805 to electrically connect the actuator driving device 701 and the actuator 101. Disconnect. The piezoelectric elements 202a and 202b are capacitive loads and have extremely large internal resistance. The piezoelectric elements 202a and 202b are approximately equivalent to a capacitor of several μF. For this reason, even if the piezoelectric elements 202a and 202b are once displaced by applying a voltage and the voltage application is stopped, the piezoelectric elements 202a and 202b maintain the displacement for a while.
Since the actuator 101 can maintain the displacement even when the voltage application is stopped, the actuator 101 can be handled in various ways, such as freely moving an article with a precise displacement as it is, changing its posture, and rotating it. .

  When releasing the displacement of the piezoelectric elements 202a and 202b, the cable 806 is connected to the connector 805 again, and the electrical connection between the actuator driving device 701 and the actuator 101 is resumed. Then, the actuator driving device 701 supplies the PWM-pulse to the PWM driver 710. Then, the charges accumulated in the piezoelectric elements 202a and 202b and the smoothing capacitor C804 are discharged through the NMOSFET 802 and the current limiting resistor R803, so that the displacement of the actuator 101 is restored.

[First embodiment: Displacement holding characteristics of piezoelectric element]
The results of an experiment on how the piezoelectric element maintains the displacement even when the application of voltage is stopped will be described below.
FIG. 9A is a table in which, after applying DC 100 V to a single piezoelectric element, the voltage application is stopped and the displacement is observed over time. The displacement of the piezoelectric element was measured using a laser displacement meter. The unit of the numerical value is μm. One “0” in the table is a single piezoelectric element, and the other “4.7 μ × 3” in the table is obtained by connecting three 4.7 μF high-voltage electrolytic capacitors in parallel to the piezoelectric element.
FIG. 9B is a line graph based on the table of FIG. 9A. The vertical axis is the amount of displacement, and the horizontal axis is time. In FIG. 9B, the solid line is a single piezoelectric element, and the broken line is an electrolytic capacitor connected in parallel.
It was found that the change in 30 seconds after the application of the voltages in FIGS. 9A and 9B was about 4% of the maximum displacement.
It was also found that this decrease in displacement can be suppressed to a change of about 2% by connecting a capacitor for backing up the charge in parallel.

From the above results, the displacement of the piezoelectric element can be maintained for several tens of seconds to several minutes depending on the amount or rate of displacement reduction allowed in the application to be applied and the capacity of capacitors connected in parallel. .
As can be seen from the graph of FIG. 9B, depending on the amount of reduction or rate of displacement allowed in the applied application, it is not necessary to connect capacitors in parallel to the piezoelectric elements 202a and 202b for a very short time. Good. That is, the smoothing capacitor C804 is not essential.

[Second Embodiment: Structure of Second Driver 1004]
FIG. 10 is an external perspective view of the second driving body 1004 used for the actuator 101 according to the second embodiment of the present invention.
As described above, the greatest feature of the actuator 101 according to the first embodiment of the present invention is that the driving direction of the piezoelectric elements 202a and 202b that expand and contract in the longitudinal direction is changed to a right angle direction, and the amount of displacement is greatly increased. It exists in the 2nd drive body 103,104. The conversion of the driving direction and the increase of the displacement amount are realized by a pantograph-shaped driving direction conversion unit having spring properties at both ends provided in the second driving bodies 103 and 104.
The conversion of the driving direction and the increase of the displacement amount are not limited to the pantograph shape. In the second embodiment shown in FIG. 10, another form of the second drive bodies 103 and 104 different from the first embodiment will be described.

FIG. 11A is a front view of a second driver 1004 according to the second embodiment of the present invention. FIG. 11B is a partially enlarged view of the second driver 1004. FIG. 11C is an enlarged view of the drive direction conversion unit of the second driver 1004. FIG. 11D is an operation principle diagram of the drive direction conversion unit of the second driver 1004.
The second driving body according to the second embodiment of the present invention corresponding to the second driving body 103 of the first embodiment is plane-symmetric with the second driving body 1004 as in the first embodiment. Therefore, explanation is omitted.

The second driving body 1004 shown in FIGS. 11A, 11B, and 11C is different from the second driving body 104 of the first embodiment in that the driving direction conversion portion is configured by a ball bearing using a steel ball. It is a point.
When the first driver 201 is deformed by the piezoelectric elements 202a and 202b, the driving force is transmitted to the second driver 1004 through the screws.
A driving force is applied to the center hole 1004a and the first drive hole 1004b shown in FIG. 11A in the direction of spreading by the first drive body 201, as in the first embodiment. The driving force generated from the first driving body 201 is in a direction in which the distance between the bottom plate support portion 1004d provided with the central hole 1004a and the first pressing portion 1004e provided with the first driving hole 1004b is increased. introduce.

A thin plate support 1004i formed by cutting is formed between the first pressing portion 1004e and the bottom plate support portion 1004d. The driving force generated from the first driver 201 elastically deforms the thin plate support 1004i, and the first pressing portion 1004e moves in a direction away from the bottom plate support 1004d (left side in FIG. 11B).
Note that the same mechanical change as that of the first pressing portion 1004e occurs also in the second pressing portion 1004f provided with the second drive hole 1004c. Hereinafter, the first pressing portion 1004e and the first top plate support portion 1004g will be described in detail, and the description of the second top plate support portion 1004h will be omitted.

As shown in FIG. 11C, a drive groove 1004j in which the first drive ball 1005 and the second drive ball 1006 are accommodated is provided between the first pressing portion 1004e and the first top plate support portion 1004g. Between the bottom plate support portion 1004d and the first top plate support portion 1004g, a restriction groove 1004k in which the first restriction ball 1007 and the second restriction ball 1008 are accommodated is provided. The drive groove 1004j is inclined 4 ° to the right in FIG. 11C from the direction perpendicular to the straight line passing through the centers of the center hole 1004a and the first drive hole 1004b, while the regulation groove 1004k is separated from the center hole 1004a. It is formed perpendicular to a straight line passing through the center of the first drive hole 1004b, and is not inclined like the drive groove 1004j.
When the first pressing portion 1004e is displaced to the left in FIG. 11B, the first driving ball 1005 and the second driving ball 1006 that are housed in the driving groove 1004j and pressed against the tip of the first pressing portion 1004e are the first top plate. The support portion 1004g is displaced upward in the drawing.

FIG. 11D is an explanatory diagram of the operating principle, which is a more simplified version of FIG. 11C.
The drive groove 1004j that is in close contact with the first drive ball 1005 and the second drive ball 1006 is provided with an inclination of 4 ° with respect to the vertical direction at the contact portion of the first top plate support portion 1004g.
The contact portion of the restriction groove 1004k, which is in close contact with the first restriction ball 1007 and the second restriction ball 1008, of the first top plate support portion 1004g is parallel to the vertical direction and is not provided with an inclination.

When the first pressing portion 1004e is displaced leftward from the right side of the drawing, a force is applied to the first top plate support portion 1004g from the first driving ball 1005 and the second driving ball 1006, and the first regulating ball 1007 and Movement in the lateral direction is restricted by the second regulating ball 1008. For this reason, the first top plate support 1004g moves upward in FIG. 11D so as to be squeezed out by the first driving ball 1005, the second driving ball 1006, the first regulating ball 1007, and the second regulating ball 1008. To do.
In this way, the second driving body 1004 spreads in the vertical direction by the driving force of the first driving body 201.

If one of the first driving sphere 1005 and the second driving sphere 1006 is not present, a rotational force is generated in the first top plate support portion 1004g, and the first driving sphere 1005 and the second driving sphere 1006 are not correctly driven vertically. The same applies even when one of the first restriction ball 1007 and the second restriction ball 1008 is absent.
The drive direction conversion unit in the second drive unit 1004 according to the second embodiment includes a bottom plate support unit 1004d, a first pressing unit 1004e, a first top plate support unit 1004g, and a first drive ball shown in FIGS. 11C and 11D. 1005, a second driving ball 1006, a first regulating ball 1007, and a second regulating ball 1008.

The drive direction conversion unit of the second drive body 104 according to the first embodiment is integrated with a drive direction conversion function based on the pantograph shape and an elastic deformation function that returns to the original state when no force is applied. . Although the structure is simple and easy to realize, the movable part needs to be designed in consideration of breakage due to shear stress.
On the other hand, the driving direction conversion part of the second driving body 1004 according to the second embodiment has only a function of converting the driving direction by the ball bearing, and elastic deformation that returns to the original state when no force is applied. The function is completely divided by the thin plate support 1004i. The second driving body 1004 according to the second embodiment has a larger number of parts than the second driving body 104 according to the first embodiment, but it is not necessary to consider shear stress, and thus is more robust than the first embodiment. And is easy to design.
The second driving body 1004 according to the second embodiment also increases the displacement amount of the piezoelectric elements 202a and 202b by about 15 times, similarly to the second driving bodies 103 and 104 according to the first embodiment. By this conversion, on the contrary, the driving force is reduced to 1/15 times.

In the embodiment of the present invention, an actuator has been disclosed.
The piezoelectric element is very small with respect to the applied voltage, but is displaced in proportion to the voltage. It was found that the displacement force is strong and the displacement is maintained for a while even if the voltage application is stopped because of the capacitive load. Therefore, by incorporating a piezoelectric element in an actuator having a drive direction conversion unit having spring properties, the displacement can be maintained within a predetermined time even when the supply of voltage is stopped with an accurate displacement applied to the object. Can do.

  The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and other modifications and application examples are provided without departing from the gist of the present invention described in the claims. including.

DESCRIPTION OF SYMBOLS 101 ... Actuator, 102 ... Lead wire, 103, 104 ... 2nd drive body, 104h, 104j ... Drive direction conversion part, 104p ... Center part, 104q ... First drive part, 104r ... Top plate support part, 104s ... Bottom plate support , 105 ... top plate, 106 ... bottom plate, 201 ... first drive body, 201a ... slot, 201n ... plate spring, 202a, 202b ... piezoelectric element, 701 ... actuator drive device, 702 ... bus, 703 ... CPU, 704 ... ROM, 705 ... RAM, 706 ... nonvolatile storage, 707 ... display unit, 708 ... operation unit, 709 ... serial interface, 710 ... PWM driver, 711 ... switching power supply, 801 ... PMOSFET, 802 ... NMOSFET, R803 ... current limiting resistor , C804 ... smoothing capacitor, 805 ... connector, 806 Cable, 1004 ... second drive body, 1004d ... bottom plate support portion, 1004e ... first press portion, 1004f ... second press portion, 1004g ... first top plate support portion, 1004h ... second top plate support portion, 1004i ... thin plate Support body, 1004j ... driving groove, 1004k ... regulating groove, 1005 ... first driving ball, 1006 ... second driving ball, 1007 ... first regulating ball, 1008 ... second regulating ball

Claims (3)

A piezoelectric element that can be connected and disconnected from a voltage source;
A first driving body that is press-fitted with the piezoelectric element and is displaced in the longitudinal direction in accordance with the displacement of the piezoelectric element;
A second driving body provided on both side surfaces of the first driving body, for converting the displacement in the longitudinal direction of the first driving body into a displacement in a direction perpendicular to the longitudinal direction;
A top plate that is fixed to one side of the second driving body and applies displacement to the object;
An actuator comprising: a bottom plate fixed to the other side of the second driver to give displacement to the object. The second driver is
A bottom plate support that forms a regulating groove formed in a direction perpendicular to the displacement in the longitudinal direction of the first driver, wherein the bottom plate is fixed while receiving the displacement of the first driver;
A thin plate support formed by cutting on the bottom plate support, and having a spring property;
A pressing portion that is supported by the thin plate support and receives a displacement of the first driving body and forms a driving groove having an inclination angle;
The bottom plate support portion is formed by cutting, forms the drive groove that receives the displacement of the first drive body together with the pressing portion, forms the regulation groove together with the bottom plate support portion, and fixes the top plate A top plate support,
Housed in the driving groove, for transmitting a driving force generated from the pressing portion to the top plate supporting portion, a first drive balls contribute to the conversion of the driving direction,
A second driving sphere that is housed in the driving groove and transmits the driving force generated from the pressing portion together with the first driving sphere to the top plate support portion, and contributes to conversion of the driving direction;
A first regulating ball that is housed in the regulating groove and regulates the driving of the top plate support;
2. The actuator according to claim 1, further comprising a second restriction ball that is housed in the restriction groove and restricts driving of the top plate support portion together with the first restriction ball. The second drive body has a pantograph-shaped drive direction conversion portion formed by cutting and having spring properties at both ends.
The actuator according to claim 1.

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