JP6077339B2 - Multi-channel rotary joint - Google Patents

Description

  The present invention relates to a multi-channel rotary joint that conducts a plurality of fluids such as liquids or gases between a relatively rotating device body and a cleaning table in a semiconductor cleaning device, for example.

  Conventionally, for example, in order to conduct a fluid such as a liquid or a gas between relative rotating members such as a semiconductor cleaning device (between a fixed side member such as an apparatus main body and a rotating side member such as a cleaning table), for example, a patent A rotary joint as described in Document 1 is used.

  A rotary joint described in Patent Document 1 includes a plurality of mechanical seal mechanisms including a rotary seal ring fixed to a rotary shaft body and a stationary seal ring held by a case body so as to be movable in the axial direction. It is arranged in series with the body in the axial direction.

  Specifically, when a plurality of mechanical seal mechanisms are arranged in series so as to be stacked, a fixed number of rotary seal rings are fixed to the rotary shaft body and the stationary seal rings are held so as to be movable in the axial direction A predetermined number of bodies are stacked and fixed and assembled.

  In addition, the fluid that conducts through the rotary joint is diversified, and further increase in the number of conduction paths through which the fluid conducts is demanded. As in the rotary joint of Patent Document 2, the number of mechanical paths according to the number of conduction paths that are required. The seal mechanisms need to be arranged in series so as to be stacked.

  As described above, when the number of mechanical seal mechanisms arranged in series increases, a processing error in which the rotational seal ring fixed to the rotary shaft body and the case body fixed by stacking a predetermined number exceed the allowable range in the axial direction. For example, there is a possibility that the stationary sealing ring held in the case body so as to be movable in the axial direction is excessively pressed against the rotating sealing ring, or that both sealing rings are distorted due to excessive pressing. . When distortion occurs, the flatness of the seal surface where the stationary seal ring and the rotary seal ring are in close contact with each other is impaired, and the seal performance is greatly affected. Specifically, the seal ring may be unevenly worn to reduce the sealing performance of the mechanical seal mechanism, or may cause heat generation and increase in power loss due to an increase in wear coefficient due to excessive pressing of the seal ring.

JP 2003-42374 A Japanese Patent Laid-Open No. 2004-19912

  Accordingly, an object of the present invention is to provide a multi-channel rotary joint that has excellent durability capable of maintaining high sealing performance over a long period of time and has little power loss.

The present invention has a plurality of internal fluid passages that are arranged in the axial direction and whose ends are bent in the radial direction and open to the outer peripheral surface, and the end openings of the plurality of internal fluid passages are in the axial direction. On the outer peripheral surface of the cylindrical rotary shaft member arranged at intervals, the cylindrical rotary shaft member is arranged at a predetermined interval in the axial direction across the end opening, and is not movable in the axial direction on the rotary shaft member A rotation sealing ring fixed to the outer periphery of the rotary shaft member, and a part of the through-passage that rotates relative to the rotary shaft member and penetrates the outer peripheral surface and the inner peripheral surface. An annular fixed case, and is fixed to the annular fixed case in a non-rotatable manner and supported by the annular fixed case so as to be slidable in the axial direction, with a predetermined interval in the axial direction. Between the rotating seal ring A seal portion is constituted by an axially moving seal ring arranged so that the opposite surfaces face each other, and the axially movable seal ring and the seal portion are provided between the rotary shaft member and the annular fixed case. A closed space is sealed between the communication space communicating with the internal fluid passage between the rotating shaft member and the axially moving sealing ring, and between the axially moving sealing ring and the annular fixed case. A mechanical seal mechanism that divides into a sealed space is arranged in series in the axial direction with respect to the rotating shaft member so as to correspond to the number of the internal fluid passages, and the annular fixed case A ring-shaped annular fixed case main body, and a retainer portion that protrudes radially inward with respect to the annular fixed case main body and supports the axially-moving sealing ring, and the retainer portion is formed by the annular fixed case main body. Characterized by being configured separately slidably in the axial direction against.
The axially-moving seal ring can move in the axial direction, but can be a stationary seal ring that is non-rotatably fixed to the annular fixed case body.

According to the present invention, it is possible to configure a multi-channel rotary joint having excellent durability capable of communicating the internal fluid passage and the through passage, reducing power loss, and maintaining high sealing performance over a long period of time.
Specifically, the annular fixing case in the mechanical seal mechanism arranged in series in the axial direction and corresponding to the number of the internal fluid passages is arranged in a ring-shaped annular fixing case main body on the outer side of the diameter, and the annular fixing case main body With a retainer portion that is configured separately so as to be slidable in the axial direction, a predetermined number of layers are fixed and fixed to a rotary seal ring that is fixed to the rotary shaft so as not to move in the axial direction. Even when the annular fixed case is displaced in the axial direction, the retainer portion that supports the axially movable sealing ring can be appropriately adjusted in the axial direction with respect to the rotary sealing ring. Therefore, the axially moving seal ring supported by the retainer portion can always be disposed at a predetermined relative position in the axial direction with respect to the rotary seal ring. The desired sealing performance can always be ensured on the sealing surface.

  Also, for example, even when the annular fixed case is distorted by assembly, the relative position and posture of the axially movable seal ring relative to the fixed seal ring can be maintained as initially set, so that uneven wear can be prevented and power loss is reduced. In addition, a rotary joint having durability can be provided.

As an aspect of the present invention, the annular fixed case body can be made of resin.
A multi-passage rotary joint that is lighter and more workable than the multi-passage rotary joint in which the annular fixed case body is made of metal and has no temperature dependency can be configured.

When the annular fixed case main body is made of resin, compared to a case where the annular fixed case main body is made of metal, the influence on the rotary seal ring due to stress and thermal strain when the stacked annular fixed case is fixed and integrated is increased. However, as described above, the annular fixed case is configured by a ring-shaped annular fixed case main body on the outer side of the diameter and a retainer portion separately configured to be slidable in the axial direction with respect to the annular fixed case main body. Accordingly, it is possible to ensure the sealing performance without temperature dependency on the sealing surface between the axial direction moving sealing ring and the rotating sealing ring.
Therefore, a lightweight multi-channel rotary joint that has excellent durability and can maintain the sealing performance can be configured.

Moreover, as an aspect of this invention, it can comprise with the said 3 or more said internal fluid channel | path and the said mechanical seal mechanism.
Thus, when a multi-channel rotary joint is constituted by three or more internal fluid passages and the mechanical seal mechanism, the number of the annular fixed cases is increased, and a rotary sealing ring fixed to the rotary shaft body, The amount of misalignment due to stacking of machining errors increases in the axial direction with respect to the annular fixed case fixed in several layers.

  More specifically, when three or more mechanical seal mechanisms are stacked along the axial direction, and when, for example, all the mechanical seal mechanisms are fixed with connected bolts, both ends of the shaft are arranged in the vertical direction. The mechanical seal mechanism of the uppermost and lowermost stages is directly tightened by connecting bolts, but the other mechanical seal mechanisms arranged between the uppermost and lowermost stages are the mechanical seal mechanisms of the uppermost and lowermost stages. Therefore, the mechanical error of the mechanical seal mechanism that is sandwiched and fixed may cause a shift. In this way, the effect of processing errors caused by stacking three or more mechanical seal mechanisms increases as the number of stacked mechanical seal mechanisms increases between the uppermost and lowermost mechanical seal mechanisms. Increases and the amount of displacement increases.

  However, by configuring the annular fixed case with a ring-shaped annular fixed case main body on the radially outer side and a retainer portion separately configured to be slidable in the axial direction with respect to the annular fixed case main body, Even if a deviation occurs, a reliable sealing performance can be secured on the sealing surface between the axially moving seal ring and the rotating seal ring.

  Further, as an aspect of the present invention, the through passage is configured by communicating a main body through passage penetrating the annular fixed case main body and a retainer through passage penetrating the retainer portion, and the retainer through passage of the retainer portion is formed. Sealing means can be provided on both axial sides.

The sealing means can be constituted by a rubber packing such as an O-ring.
According to the present invention, the internal fluid passage can be communicated with the communication through passage formed by the main body through passage and the retainer through passage, and fluid can be conducted to the inside while ensuring high sealing performance.

  According to the present invention, it is possible to provide a multi-channel rotary joint that has excellent durability capable of maintaining high sealing performance over a long period of time and has little power loss.

Sectional drawing of a multichannel rotary joint. The disassembled perspective view of a mechanical seal mechanism. The partial expansion perspective view of a multichannel rotary joint. The a section enlarged view in FIG. The b section enlarged view in FIG. Explanatory drawing about the comparison with the prior art by the a section enlarged view.

An embodiment of the present invention will be described below with reference to FIGS.
1 is a sectional view of the multi-channel rotary joint 1, FIG. 2 is an exploded perspective view of the mechanical seal mechanism 10, FIG. 3 is a partially enlarged perspective view of the multi-channel rotary joint 1, and FIG. FIG. 5 shows an enlarged view of the part a in FIG. 1, FIG. 5 shows an enlarged view of the part b in FIG. 1, and FIG. 6 shows an explanatory diagram for comparison with the prior art by the enlarged view of the part a.

  2 and 3, in order to facilitate understanding of each configuration, a part of the circumferential direction is illustrated in a transparent state, and illustration of the O-rings 91, 91 b, 92, and 92 b is omitted.

  FIG. 6A shows an enlarged cross-sectional view when the rotary seal ring 14 and the flange body 111 are in the correct positional relationship, and FIG. 6D shows the correct relative relationship between the rotary seal ring 14x and the integral flange 11x. The expanded sectional view in the case of the conventional multichannel rotary joint in a positional relationship is shown.

  FIG. 6B shows an enlarged cross-sectional view of the state in which the flange main body 111 is displaced upward with respect to the rotary seal ring 14, and FIG. 6E is a diagram in which the integrated flange 11 x is displaced upward with respect to the rotary seal ring 14 x. The expanded sectional view in the case of the conventional multi-flow-path rotary joint of the state which showed is shown.

  FIG. 6C is an enlarged cross-sectional view showing a state in which the flange main body 111 is shifted downward with respect to the rotary seal ring 14, and FIG. 6F is a diagram illustrating the integrated flange 11 x on the lower side with respect to the rotary seal ring 14 x. The expanded sectional view in the case of the conventional multi-flow-path rotary joint of the state shifted | deviated to is shown.

  The multi-channel rotary joint 1 is a device that conducts a plurality of fluids such as liquids or gases between a relatively rotating device body and a cleaning table in, for example, a semiconductor cleaning device or the like. 10 mechanical mechanisms 10 (10a, 10b,... 10j) arranged in series in the axial direction CL and on the upper side of the uppermost first mechanical mechanism 10a on the outer side of the rotation main shaft 2 in the axial direction CL. A ring-shaped upper ring 3, a ring-shaped lower ring 4 disposed below the lowermost tenth mechanical mechanism 10 j, and a circular shape in plan view fixed to the upper portion of the rotary spindle 2 inside the upper ring 3. Of the bearing receiving plate 5, the upper ring 3 and the bearing receiving plate 5 in the radial direction, and the lower ring 4 and the rotating main shaft 2 in the radial direction. It is composed of a bearing 6 which is arranged to Re respectively.

  The rotary main shaft 2 is a cylindrical body that is disposed at the center of the multi-passage rotary joint 1 in a plan view and whose height direction is the axial direction CL, and is fitted to the portion corresponding to the lower ring 4 on the lower side. And a fixed flange 2b protruding outward in the diameter is formed at the lower end.

In addition, the bottom surface side of the fixed flange 2b is provided with a circular concave portion 2c having a circular shape when viewed from the bottom, into which a top surface convex portion 7a formed on the top surface of the adapter 7 described later is fitted.
A locking step 2aa that allows the bearing 6 to be locked is formed below the large-diameter portion 2a, and the large-diameter portion 2a is positioned above the locking step 2aa by the thickness of the bearing 6. A fitting groove 2ab that allows fitting of a C-shaped snap ring 6b for fixing the externally fitted bearing 6 in the axial direction CL is formed.

Furthermore, internal fluid passages 30 (30a, 30b,... 30j arranged along the ten axial directions CL, that is, parallel to the axial direction CL, or arranged in a torsional position in the rotary main shaft 2. ) At a predetermined interval in the circumferential direction.
The lower end of the internal fluid passage 30 opens into the circular recess 2 c, and the upper end of the internal fluid passage 30 is formed to a height corresponding to each mechanical seal mechanism 10 and communicates with the support passage 31 facing radially outward.

  The adapter 7 described above is a connection adapter that connects a cleaning table (not shown) and the rotary spindle 2, and is formed in a circular shape in a plan view with a bottom surface on the cleaning table side open and having a reverse concave shape, and a circular recess 2 c. An upper surface convex portion 7a to be fitted into the upper surface is formed on the upper surface.

  The upper surface convex portion 7a is formed with a communication passage 32 (32a, 32b,... 32j) that penetrates from the upper surface to the bottom surface side and communicates with the internal fluid passage 30 described above.

  The bearing receiving plate 5 has a circular recessed portion 5a in plan view and has a circular recessed portion 5a in plan view that allows the upper end portion of the rotary main shaft 2 to be fitted on the bottom surface side, and has an outer concave shape outside the upper end portion. A locking step portion 5b that allows the fitted bearing 6 to be locked is formed, and the bearing 6 that is externally fitted to the bearing receiving plate 5 is positioned below the locking step portion 5b by the thickness of the bearing 6 in the axial direction CL. An insertion groove 5ba that allows the C-type snap ring 6b to be fixed to the insertion is formed. The bearing receiving plate 5 is mounted so that the upper end portion of the rotary main shaft 2 is fitted into the fitting concave portion 5a so as to cover the upper end portion of the rotary main shaft 2, and is fixed by a fixing bolt 5c.

  The upper ring 3 is a ring body that is arranged on the outer side of the bearing receiving plate 5 via the bearing 6 and has the same inner diameter and outer diameter as the flange main body 111 in the mechanical seal mechanism 10 to be described later. A projecting portion 3a projecting downward from the inner diameter side of the portion, a projecting projection 3b that projects the inner portion of the center in the height direction toward the inner diameter side, and latches the ring seal member 8 that fits inside, and a projecting projection At the upper end portion above 3b, a bearing fixing portion 3c for mounting the bearing 6 is formed by projecting further toward the inner diameter side than the locking convex portion 3b.

In addition, a cooling fluid that is bent inward from the outer peripheral surface and further to the lower side at one circumferential direction of the upper ring 3 and penetrates to the inner peripheral surface of the lower position of the ring seal member 8 that is fitted inside. A discharge path 3d is provided.
In addition, the lower end diameter outer corner of the downward projecting portion 3a is provided with a tapered notch 3aa that retains the O-ring 91 by compressing it so as to have a triangular shape in cross section.

  The ring seal member 8 is an annular seal fitted into the upper ring 3, and the seal ring is formed in a cross-section reverse letter shape in which the outer diameter is substantially vertical, folded back at the upper end, and inclined downward inward. 8a, a reinforcing metal fitting 8b embedded in a radially outer vertical portion of the seal ring 8a, and a garter spring 8c for ensuring the contact force of the seal ring 8a with the outer peripheral surface of the rotary seal ring 14 to be described later. .

  The lower ring 4 is arranged on the outer side of the large-diameter portion 2a via the bearing 6, and has a circular shape in a plan view and has the same outer diameter as the upper ring 3 and the same inner diameter as the locking convex portion 3b in the upper ring 3. The upper bottom ring 4a and the lower bottom ring 4b sandwich the radially outer portion of the bearing 6 to be fitted from above and below.

  The lower bottom ring 4b is a ring body having a circular shape in plan view having the same outer diameter as the upper ring 3 and an inner diameter slightly smaller than the outer diameter of the bearing 6, and the lower half of the outer diameter side of the bearing 6 is disposed at the upper portion on the inner diameter side. It has a fitting recess 4ba that allows fitting of the part.

  The upper bottom ring 4a is a ring body having a circular shape in a plan view and having a lower protruding portion 4ab having the same outer diameter as the upper ring 3 and the same inner diameter as the locking convex portion 3b in the upper ring 3, and on the inner diameter side of the upper end portion, A locking recess 4aa that allows the downward projection 111a (see FIG. 2) formed in the flange main body 111 of the tenth mechanical mechanism 10j to be fitted and the ring seal member 8 fitted in the tenth mechanical mechanism 10j to be locked. The lower projecting portion 4ab projecting the lower inner diameter portion to the inner diameter side according to the outer diameter of the bearing 6 and the upper end portion of the lower projecting portion 4ab project further to the inner diameter side, and the inner diameter side end portion is directed upward. Thus, an L-shaped projecting portion 4ac having an L-shaped cross section is formed.

  By the upper bottom ring 4a and the lower bottom ring 4b configured as described above, the upper portion of the bearing 6 in which the lower half portion on the outer diameter side is fitted into the fitting recess 4ba of the lower bottom ring 4b is formed in the L shape of the upper bottom ring 4a. The lower ring 4 holds the ring seal member 8 on the inner diameter side so as to be restrained by the protruding portion 4ac.

  With the upper ring 3 and the lower ring 4 configured as described above, the flange main body 111 of the mechanical seal mechanism 10 arranged in series in the axial direction CL described later is sandwiched and fixed from above and below.

  As described above, the multi-channel rotary joint 1 of the present embodiment includes ten mechanical seal mechanisms 10 (10a, 10b... 10j) for the ten internal fluid passages 30, the upper ring 3 and Between the lower rings 4, they are arranged in series in the axial direction CL.

  The ten mechanical seal mechanisms 10 arranged in series in the axial direction CL are, in order from the top, a first mechanical mechanism 10a, a second mechanical mechanism 10b,..., A tenth mechanical mechanism 10j. Since the mechanical seal mechanisms 10 (10a to 10i) other than the tenth mechanical mechanism 10j have the same structure, the mechanical seal mechanisms 10 (10a to 10i) other than the tenth mechanical mechanism 10j will be described below.

  The mechanical seal mechanism 10 includes an outermost flange 11, a movable seal ring 12 supported by the flange 11, a sleeve 13 fixed to the outer peripheral surface of the rotary main shaft 2, and a rotary seal ring disposed with the sleeve 13 interposed therebetween. 14.

  The flange 11 is a ring main body 111 that is a ring body having the same inner diameter and outer diameter as the upper ring 3, and is fixed to the flange main body 111 so as not to rotate and is slidable in the axial direction CL. , And a retainer 112 that supports the movable seal ring 12.

  As described above, the flange main body 111 is a ring body having the same inner diameter and outer diameter as the upper ring 3, and as shown in FIG. 4, a lower protruding portion 111 a in which the inner diameter side of the lower end portion protrudes downward, A fitting recess 111b that allows fitting of the lower protrusion 111a of the upper mechanical seal mechanism 10 is formed on the inner diameter side of the upper end. The lower protrusion 3a of the upper ring 3 is fitted into the fitting recess 111b of the first mechanical mechanism 10a, and the lower protrusion 111a of the tenth mechanical mechanism 10j is fitted into the locking recess 4aa of the lower ring 4. .

  A taper cutout portion 111aa for holding the O-ring 91 is formed at the outer corner portion of the lower end diameter of the downward projecting portion 111a of the flange main body 111 by cutting it into a taper shape and compressing the cross section into a triangular shape. On the inner peripheral surface of the flange main body 111, a notch groove 111 c that is compressed in an elliptical shape and held by the O-ring 92 is provided with a predetermined interval in the vertical direction across the center in the height direction of the flange main body 111. Two places are formed.

  The retainer 112 has a disk shape having a substantially T-shaped cross-sectional shape in which an outer peripheral wall portion 113 having a vertically-long rectangular cross section on the outer diameter side and a support ring portion 114 protruding inward from the outer peripheral wall portion 113 are integrally formed. It is a part. That is, the upper part and the lower part of the outer peripheral wall part 113 protrude in the vertical direction from the support ring part 114, about the thickness of the ring plate part 121 of the movable sealing ring 12 described later.

  In the vicinity of the center in the height direction on the outer peripheral surface of the outer peripheral wall 113, there is provided an outer peripheral groove 113a that is concave toward the inside of the diameter. A second fluid passage 117 to be described later is opened in the outer circumferential groove 113a, and the fluid supplied from the first fluid passage 116 formed in the flange body 111 is not hindered by the axial movement of the retainer 112, and the retainer 112 The second fluid passage 117 is formed so as to be supplied to the second fluid passage 117.

  Further, as shown in FIG. 4, spring holes 115 that allow the insertion of springs 15 to be described later are opened at upper and lower sides at equal intervals in the circumferential direction of the support ring portion 114. In preparation. Further, the upper surface side spring hole 115 and the lower surface side spring hole 115 are provided with through holes 115a communicating with the respective bottom portions.

  Furthermore, a notch groove 114a that allows the O-ring 92b to be fitted is provided on the inner peripheral surface of the support ring portion 114 at a predetermined interval in the vertical direction across the center in the height direction of the support ring portion 114. Two places are formed.

  The flange 11 configured as described above is in contact with the O-ring 92 fitted in the notch groove 111c of the flange main body 111 and the outer peripheral surface of the outer peripheral wall portion 113 of the retainer 112 in an urged state. On the other hand, the retainer 112 is configured to be slidable in the axial direction CL while being sealed by the O-ring 92.

The flange body 111 is made of resin, but may be made of metal. Further, a first fluid passage 116 penetrating in the radial direction is provided in a part of the flange body 111 in the circumferential direction.
Furthermore, the retainer 112 is a circumferential position corresponding to the first fluid passage 116 of the flange body 111, and between the spring holes 115 in the circumferential direction, more specifically, the outer circumferential surface of the outer circumferential wall 113, more specifically, the outer circumferential surface. A second fluid passage 117 that penetrates in a radial direction from the outer peripheral groove 113a formed in the inner periphery to the inner peripheral surface of the support ring portion 114 is provided.

The movable seal ring 12 includes an upper movable seal ring 12a and a lower movable seal ring 12b that are arranged so as to sandwich the support ring portion 114 of the flange 11 from above and below.
The upper movable sealing ring 12 a has an outer diameter smaller than the inner peripheral surface of the outer peripheral wall portion 113 and an inner diameter larger than the outer shape of the sleeve 13 described later, and protrudes from the support ring portion 114 of the outer peripheral wall portion 113. A ring plate-shaped ring plate portion 121 formed with a thickness equivalent to the protruding amount, and an outer peripheral surface that abuts an O-ring 92b fitted in the notch groove 114a of the support ring portion 114 on the inner diameter side of the ring plate portion 121 And an inner diameter side cylindrical portion 122 protruding downward so as to have an L-shaped cross section. In addition, on the upper surface of the ring plate portion 121, a sliding convex portion 123 is formed which slides with an opposing surface of the rotary seal ring 14 described later and serves as a seal surface.

  The lower moving seal ring 12b is vertically symmetrical with the upper moving seal ring 12a. Further, the upper surface of the sliding convex portion 123 in the upper moving sealing ring 12a that slides on the opposed surface of the rotary sealing ring 14 is the upper sealing surface 123a, and the bottom surface of the sliding convex portion 123 in the lower moving sealing ring 12b is the lower seal. The surface 123b is used.

  The moving seal ring 12 configured as described above has the upper moving seal ring 12a disposed so as to surround the upper half portion on the inner diameter side of the support ring portion 114, and is disposed so as to surround the lower half portion on the inner diameter side of the support ring portion 114. By arranging the side moving sealing ring 12b, the support ring portion 114 is sandwiched from above and below.

  In this state, the outer peripheral surface of the inner diameter side cylindrical portion 122 of the upper moving seal ring 12a abuts on an O-ring 92b fitted in the upper notch groove 114a of the support ring portion 114, and the inner diameter of the lower moving seal ring 12b. The outer peripheral surface of the side tube portion 122 is in contact with an O-ring 92b fitted in the notch groove 114a on the lower side of the support ring portion 114.

  Furthermore, the upper moving sealing ring 12 a and the lower moving sealing ring 12 b are urged in the separating direction by a coiled spring 15 mounted in the spring hole 115. In addition, an annular fluid groove 124 is formed between the opposing ends of the inner diameter side cylindrical portion 122 of the upper movable seal ring 12a and the lower movable seal ring 12b arranged vertically symmetrically.

  Further, between the facing surface of the moving sealing ring 12 and the facing surface of the rotary sealing ring 14, more specifically, the upper surface of the upper moving sealing ring 12a and the bottom sealing surface 141 of the rotating sealing ring 14 or the lower moving sealing ring 12b. A clearance corresponding to the height of the sliding convex portion 123 is formed between the bottom surface of the rotary sealing ring 14 and the upper seal surface 142 of the rotary sealing ring 14, and the sealing surfaces 123 a and 123 b of the sliding convex portion 123 and the rotary sealing ring 14 Since only the opposed surfaces are in contact with each other, the relative rotation of the movable seal ring 12 and the rotary seal ring 14 associated with the relative rotation of the rotary main shaft 2 with respect to the flange 11 is not hindered. The moving seal ring 12 and the rotary seal ring 14 are both made of silicon carbide (Sic).

  The sleeve 13 fixed to the outer peripheral surface of the rotary spindle 2 is a ring body having a vertically long rectangular cross section that is slightly higher than the outer peripheral wall portion 113 of the flange 11, and is concave toward the radially outer side near the center in the height direction of the inner peripheral surface. A plurality of connection passages 131 formed by annular grooves, and a connection hole 132 formed at a predetermined interval in the circumferential direction of the sleeve 13 and penetrating the bottom of the connection passage 131 and the outer peripheral surface of the sleeve 13. ing.

  In addition, a taper cutout portion 133 that holds the O-ring 91b by forming a cutout in a tapered shape at the upper end diameter inner corner portion and the lower end diameter inner corner portion of the sleeve 13 so as to have a triangular shape is formed. doing.

  The rotary seal ring 14 is a ring plate body having an oblong cross section having an inner diameter that is in close contact with the outer peripheral surface of the rotary main shaft 2 and an outer diameter that allows the surface facing the sliding projection 123 to slide on the upper seal surface 123a. . The rotary seal ring 14 is formed of a sleeve 13 disposed so that the upper part of the axial upper end surface, that is, the upper surface is in close contact with the lower part, ie, the bottom surface, of the axial lower end surface of the rotary seal ring 14 of the upper mechanical seal mechanism 10. The O-ring 91 b disposed in the taper notch 133 is fixed to the outer peripheral surface of the rotary spindle 2.

Note that an upper rotary sealing ring 14 a is disposed on the sleeve 13 of the first mechanical mechanism 10 a so as to be in contact with the bottom of the bearing receiving plate 5. Further, the upper rotary seal ring 14 a and the rotary seal ring 14 in the tenth mechanical mechanism 10 j may be formed thicker than other rotary seal rings 14.
Further, in the rotary seal ring 14, the bottom side surface that slides with the upper seal surface 123 a of the sliding protrusion 123 is a bottom seal surface 141, and the top side surface is an upper seal surface 142.

  As shown in FIG. 5, the mechanical seal mechanism 10 in which each component is composed of the elements described above has an axial end surface on the bottom seal surface 141 of the rotary seal ring 14 of the upper mechanical seal mechanism 10. The sleeve 13 is disposed on the outer periphery of the rotating main shaft 2 so as to be in close contact, and the rotary seal ring 14 is disposed on the outer periphery of the rotating main shaft 2 so that the upper seal surface 142 is in close contact with the bottom surface of the fixed sleeve 13. To fix.

  At this time, the connection hole 132 of the sleeve 13 is arranged and fixed so as to be in a circumferential position corresponding to the branch path 31 of the corresponding internal fluid path 30, and the branch path 31 and the connection hole are connected via the connection path 131. 132 will communicate.

  Between the upper seal surface 142 of the rotary seal ring 14 and the bottom seal surface 141 of the rotary seal ring 14 of the upper mechanical seal mechanism 10, the outer peripheral surface of the sleeve 13 and the inner diameter side cylinder of the movable seal ring 12. The mechanical seal mechanism 10 is configured by disposing the movable sealing ring 12 and the flange 11 so that the inner peripheral surface of the portion 122 faces the radial direction. At this time, the first fluid passage 116 and the second fluid passage 117 of the flange 11 are arranged and fixed so as to be in the circumferential position corresponding to the connection hole 132 of the sleeve 13 and the support passage 31 of the corresponding internal fluid passage 30.

  In this state, as shown in FIG. 4, the upper moving seal ring 12 a is placed on the bottom seal surface 141 of the upper rotary seal ring 14 by the spring 15 mounted in the spring hole 115 of the retainer 112. On the contrary, the lower moving seal ring 12b is pressed against the upper seal surface 142 of the lower rotary seal ring 14 so that the lower seal surface 123b of the sliding convex portion 123 is pressed against the lower seal ring 123b. So that it is biased downward.

  In addition, the first fluid passage 116, the second fluid passage 117, the fluid groove 124, the connection hole 132 and the connection passage 131, the corresponding branch passage 31, the internal fluid passage 30, and the communication passage 32 formed in the adapter communicate with each other. The fluid passage X can be configured.

  As shown in FIG. 5, the upper and lower O-rings 92, the support ring portion 114 and the inner diameter side of the communication fluid passage X are arranged at the boundary between the flange main body 111 and the retainer 112. Upper and lower O-rings 92b disposed at the boundary with the cylindrical portion 122, upper seal surfaces 123a and 123b of the sliding convex portion 123 of the movable seal ring 12 (12a and 12b), and seal surfaces 141 and 142 of the rotary seal ring 14, and Since the vertical direction is sealed by the O-ring 91b at the boundary between the sleeve 13 and the rotation main shaft 2, leakage of the conducting fluid from the communication fluid passage X or other fluid from the outside to the communication fluid passage X Can be prevented from entering.

  The mechanical seal mechanism 10 configured as described above is arranged in series so as to be stacked in the axial direction CL sequentially from the tenth mechanical mechanism 10j with respect to the lower ring 4 attached and fixed to the rotary main shaft 2, and finally the upper part. The ring 3 and the bearing receiving plate 5 are mounted to constitute the multi-channel rotary joint 1.

  As shown in FIG. 1, the flange main body 111 of the tenth mechanical mechanism 10 j is formed higher in height than the flange main body 111 of the other mechanical seal mechanism 10 so as to fit the ring seal member 8 therein. In addition, a cooling fluid supply path 111 d that penetrates in the radial direction between the internally fitted ring seal member 8 and the movable sealing ring 12 is provided in a part of the circumferential direction of the flange main body 111, and the internally fitted ring seal member 8 A bolt receiving portion 111e that protrudes radially inward at the upper portion and receives a lower end of a communication bolt 82 described later is provided.

  The ring seal member 8 fitted in the flange main body 111 of the tenth mechanical mechanism 10j is mounted with the same ring seal member 8 as the ring seal member 8 fitted in the upper ring 3 turned upside down. . However, the seal member is not limited to the ring seal member 8 as long as the seal member is fitted in the flange main body 111.

  Furthermore, each retainer 112 of the mechanical seal mechanism 10 arranged in series in the axial direction CL is fixed in a state in which each retainer 112 is not relatively rotatable by a communication bolt 82 communicating in the vertical direction.

  Further, the mechanical seal mechanism 10 arranged in series in the axial center direction CL has the first fluid passage 116 formed in the flange main body 111 so that the circumferential position does not overlap with the axial direction, and the corresponding internal fluid passage 30 is provided. It arrange | positions according to the circumferential direction position of the branch path 31. FIG.

  In addition, the flange main body 111 arranged in series in the axial direction CL may be configured such that all the stacked flange main bodies 111 are integrally fixed with the sandwiching fixing bolts 81 or are stacked in the vertical direction although not shown. Lamination fixing while sandwiching the flange main bodies 111 with the sandwiching fixing bolts 81 is also possible.

  The multi-channel rotary joint 1 configured as described above is, in the closed space Z in which the upper and lower sides are sealed by the ring seal member 8 between the outer peripheral surface of the rotation main shaft 2 and the inner peripheral surface of the flange main body 111. The space between the movable seal rings 12 facing each other between the rotary seal ring 14 (141, 142) and the sliding protrusion 123 (123a, 123b) and outside the sliding seal surface is defined as each movable seal ring. Twelve spring holes 115 and through holes 115a communicate with each other to form a substantially cylindrical cooling fluid conduction space Y through which a cooling fluid such as a quench is conducted.

  The cooling fluid conduction space Y communicates with the cooling fluid supply path 111d formed in the flange body 111 of the tenth mechanical mechanism 10j and the cooling fluid discharge path 3d formed in the upper ring 3, and is supplied from the cooling fluid supply path 111d. The cooled cooling fluid can be cooled by conducting the cooling fluid conduction space Y and discharging the cooling fluid from the cooling fluid discharge path 3d.

  As described above, in the rotary main shaft 2, the mechanical seal in the multi-channel rotary joint 1 in which the number of mechanical seal mechanisms 10 corresponding to the number of the internal fluid passages 30 formed along the axial direction CL is arranged in series. The flange 11 of the mechanism 10 includes a ring-shaped flange main body 111 on the radially outer side and a retainer 112 that protrudes radially inward with respect to the flange main body 111 and supports the movable sealing ring 12. In contrast, the internal fluid passage 30, the first fluid passage 116, and the second fluid passage 117 are connected to each other so as to be slidable in the axial direction CL, and excellent durability can be maintained over a long period of time. The multi-passage rotary joint 1 can be configured with high power and low power loss.

  Specifically, the flange 11 in the mechanical seal mechanism 10 arranged in series in the axial center direction CL and corresponding to the number of the internal fluid passages 30 is arranged with respect to the ring-shaped flange body 111 and the flange body 111 on the radially outer side. 6 and the retainer 112 separately configured to be slidable in the axial direction CL, the rotary seal ring 14 fixed to the rotary main shaft 2 and the flange 11 fixed in a predetermined number of layers are fixed as shown in FIG. As shown in (b) and (c), the retainer 112 that supports the movable sealing ring 12 is adjusted in the axial direction CL with respect to the rotary sealing ring 14 even when it is displaced in the axial direction CL. be able to.

  Specifically, the rotary seal ring 14 fixed to the rotary main shaft 2 and the flange 11 fixed to the mechanical seal mechanism 10 in a predetermined number of layers are arranged in the axial direction as shown in FIGS. 6 (b) and 6 (c). When shifted to CL, a conventional multi-channel rotary having a conventional integrated flange 11x in which the flange main body 111 and the retainer 112 in this embodiment are integrated as shown in FIGS. 6 (d) to (f). In the case of a joint, the upper surface and the lower surface of the retainer portion 112x in the integrated flange 11x may come into contact with the bottom surface and the upper surface of the movable seal ring 12x (see FIGS. 6E and 6F). As described above, when the retainer portion 112x of the integral flange 11x comes into contact with the moving seal ring 12x, unnecessary force in an distorted direction is applied to the contact portion between the seal surface of the moving seal ring 12x and the seal surface of the rotary seal ring 14x. There is a risk that the sealing surfaces of the moving seal ring 12x and the rotary seal ring 14x will be unevenly worn and the sealing performance will be reduced.

  Even in such a case, as shown in FIGS. 6B and 6C, the retainer 112 that supports the movable seal ring 12 and is configured separately from the flange main body 111 is attached to the rotary seal ring 14. Since the position of the movable seal ring 12 can be adjusted in the axial direction CL, the movable seal ring 12 supported by the retainer 112 can be disposed at a predetermined relative position in the axial direction with respect to the rotary seal ring 14. A reliable sealing property can be secured on the sealing surfaces (123a, 123b, 141, 142) with the rotary seal ring 14.

  Further, for example, even when the flange 11 is distorted by fixing, the relative position and posture of the movable sealing ring 12 with respect to the flange 11 can be maintained, so that deterioration in sealing performance due to uneven wear is prevented, and durability is achieved. Seal performance can be maintained.

  Further, by configuring the flange main body 111 with resin, it is possible to configure the multi-channel rotary joint 1 that is lighter and easier to process than the multi-channel rotary joint composed of metal.

  On the other hand, as compared with the case where the flange main body 111 is made of metal, the metal rotary main shaft 2 and the rotary seal ring 14 due to fixing strength and thermal strain when the laminated flanges 11 are fixed and integrated are fixed. However, as described above, the flange 11 is configured by the ring-shaped flange main body 111 and the retainer 112 separately configured to be slidable in the axial direction CL with respect to the flange main body 111 as described above. Accordingly, it is possible to ensure a reliable sealing property without temperature dependency on the sealing surfaces (123a, 123b, 141, 142) of the movable sealing ring 12 and the rotary sealing ring 14. Therefore, a lightweight multi-channel rotary joint 1 that can maintain durable sealing performance can be configured.

  In addition, the multi-channel rotary joint 1 including the ten internal fluid passages 30 that are three or more and configured with the ten mechanical seal mechanisms 10 has a large number of stacked flanges 11, and each mechanical seal mechanism 10. Are stacked in order from the bottom, and in the upper mechanical seal mechanism 10 such as the first mechanical seal mechanism 10a and the second mechanical seal mechanism 10b, the rotary seal ring 14 fixed to the rotary spindle 2 and a predetermined number of layers are stacked. In the axial direction CL with respect to the flange 11 fixed in this manner, the amount of deviation due to accumulation of machining errors increases.

  More specifically, when three or more mechanical seal mechanisms 10 are stacked along the axial direction CL, when the shaft is disposed in the vertical direction of the mechanical seal mechanisms 10 fixed by the communication bolts 82, both ends thereof, that is, Although the uppermost and lowermost mechanical seal mechanisms 10 are directly tightened by the communication bolts 82, the mechanical seal mechanism 10 disposed between the uppermost and lowermost stages is the uppermost and lowermost mechanical seal mechanisms 10. It is only sandwiched and fixed by the lower mechanical seal mechanism 10, and the influence of the processing error of the mechanical seal mechanism 10 that is sandwiched and fixed occurs as a deviation. In this way, the influence of processing errors caused by stacking three or more mechanical seal mechanisms 10 increases the number of stacked mechanical seal mechanisms 10 sandwiched and fixed between the uppermost and lowermost mechanical seal mechanisms 10. The larger the number, the larger the displacement and the greater the deviation.

  In particular, in the case of the integrated flange 11x that is greatly displaced, the O-ring 92b fitted into the inner peripheral surface of the retainer portion 112x closes the fluid groove 124 formed in the opposing portion of the movable seal ring 12x, and the communication fluid passage X is conducted. May deteriorate. On the other hand, as described above, by configuring the flange 11 with the ring-shaped flange main body 111 on the outer diameter side and the retainer 112 separately configured to be slidable in the axial direction CL with respect to the flange main body 111, On the sealing surfaces (123a, 123b, 141, 142) between the moving seal ring 12 and the rotary seal ring 14, there is little power loss and a reliable sealing property can be ensured.

  The first fluid passage 116 penetrating the flange main body 111 and the second fluid passage 117 penetrating the retainer 112 are configured to communicate with each other, and O-rings 92b are provided on both sides of the second fluid passage 117 in the retainer 112 in the axial direction CL. As a result, the internal fluid passage 30 is connected to the first fluid passage 116 and the second fluid passage 117 to form the communication fluid passage X, and the liquid fluid is conducted inside while ensuring high sealing performance. can do.

As described above, in the correspondence between the configuration of the present invention and the above-described embodiment, the rotating shaft member of the present embodiment corresponds to the rotating main shaft 2,
Similarly,
The axially moving seal ring corresponds to the move seal ring 12,
The through passage corresponds to the first fluid passage 116 and the second fluid passage 117,
The annular fixing case corresponds to the flange 11,
The communication space corresponds to the communication fluid passage X,
The sealed space corresponds to the cooling fluid conduction space Y,
The annular fixed case body corresponds to the flange body 111,
The retainer portion corresponds to the retainer 112,
The body through-passage corresponds to the first fluid passage 116,
The retainer through passage corresponds to the second fluid passage 117,
The sealing means corresponds to the O-rings 91, 91b, 92, and 92b attached to the notch groove 114a, but is not limited to the above embodiment.

  For example, in the above description, the multi-passage rotary joint 1 is configured by arranging ten mechanical seal mechanisms 10 in series with respect to the rotary main shaft 2, but the number of mechanical seal mechanisms 10 is 10 or more, but 10 or less. The flow path rotary joint 1 may be configured.

  Further, both the moving seal ring 12 and the rotary seal ring 14 are made of Sic, but one of the moveable seal ring 12 and the rotary seal ring 14 may be made of Sic and the other may be made of carbon (C).

DESCRIPTION OF SYMBOLS 1 ... Multi-flow-path rotary joint 2 ... Rotation main shaft 10 ... Mechanical seal mechanism 11 ... Flange 12 ... Moving seal ring 14 ... Rotation seal ring 30 ... Internal fluid passage 91, 91b, 92, 92b ... O-ring 111 ... Flange main body 112 ... Retainer 114a ... cutout groove 116 ... first fluid passage 117 ... second fluid passages 123a, 123b, 141, 142 ... sealing surface X ... communication fluid passage Y ... cooling fluid conduction space Z ... closed space

Claims (4)

A plurality of internal fluid passages which are disposed in the axial direction and whose end portions are bent in the radial direction and open to the outer peripheral surface; in the outer peripheral surface of the deployed cylindrical rotating shaft member, while being arranged at a predetermined distance of the axial direction across said end opening, it is moved not secured in the axial direction to the rotary shaft member A rotating seal ring;
An annular fixed case that rotates relative to the rotary shaft member outside the outer peripheral surface of the rotary shaft member and has a through-passage that penetrates the outer peripheral surface and the inner peripheral surface in a part of the circumferential direction;
The rotary sealing ring fixed to the annular fixed case so as not to rotate and supported by the annular fixed case in a slidable state in the axial direction and arranged at a predetermined interval in the axial direction. The seal portion is configured with an axially moving seal ring arranged with the seal surfaces facing each other,
The internal fluid passage between the rotating shaft member and the axially moving sealing ring is closed by the axially moving sealing ring and the seal portion between the rotating shaft member and the annular fixed case. A mechanical seal mechanism that is divided into a communication space that communicates with the rotary shaft member and a sealed space that is sealed between the axially movable seal ring and the annular fixed case. Corresponding to the number of passages, arranged in series in the axial direction,
The annular fixing case,
A ring-shaped annular fixed case body on the outer diameter side;
Projecting radially inward with respect to the annular fixed case body, and constituted by a retainer portion that supports the axially-moving seal ring,
A multi-channel rotary joint in which the retainer portion is configured separately from the annular fixed case main body so as to be slidable in the axial direction. The multi-channel rotary joint according to claim 1, wherein the annular fixed case body is made of resin. The multi-channel rotary joint according to claim 1 or 2, comprising three or more internal fluid passages and the mechanical seal mechanism. The through passage,
A main body through path that penetrates the annular fixed case main body and a retainer through path that penetrates the retainer portion are configured to communicate with each other.
The multi-channel rotary joint according to any one of claims 1 to 3, further comprising sealing means on both sides in the axial direction of the retainer through passage in the retainer portion.

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