JP6068603B2 - Crystal growth equipment - Google Patents

Description

  The present invention relates to a crystal growth apparatus, a crystal growth method, and a crystal growth crucible for growing a silicon carbide crystal by a solution method.

Silicon carbide (Silicon Carbide: hereinafter referred to as “SiC”), which is a compound of carbon and silicon, has a wider band gap than silicon, a large electric field strength leading to dielectric breakdown, and excellent withstand voltage characteristics. Furthermore, it has excellent thermal conductivity, heat resistance, chemical resistance, radiation resistance, and the like. SiC crystals having such various advantages are attracting attention in a wide range of fields such as heavy electric fields including nuclear power, transportation fields including automobiles and aviation, household electrical appliance fields, and space fields.

  As a method for growing a SiC single crystal, a solution method is known (see, for example, Patent Document 1). In the solution method, an upper surface of a seed crystal made of SiC is held by a holding member, and the lower surface is brought into contact with a silicon-containing silicon melt contained in a crucible, and then the seed crystal is pulled up to raise the seed crystal. In this method, a SiC single crystal is grown from a melt on the lower surface of the substrate, and an increase in the size or length of the SiC single crystal is expected. In Patent Document 1, a predetermined crystal growth apparatus is used to carry out such a solution method.

  However, when the solution method is performed using a conventional crystal growth apparatus as described in Patent Document 1, there is a problem that a miscellaneous crystal made of a polycrystal or the like is likely to grow on the seed crystal. The miscellaneous crystal is likely to grow near the side surface of the seed crystal, and the growth rate is usually faster than the growth rate of the single crystal. Therefore, if a miscellaneous crystal grows on the seed crystal, the growth of the single crystal is hindered, and it is difficult to cope with an increase in the size or length of the single crystal.

JP 2000-264790 A

  An object of the present invention is to provide a crystal growth apparatus, a crystal growth method, and a crystal growth crucible that can suppress the growth of miscellaneous crystals on a seed crystal when a silicon carbide crystal is grown by a solution method. is there.

Crystal growth apparatus of the present invention, the crystal growth crucible you accommodate melt of silicon containing carbon therein, the holding member can be out from the opening portion of the crystal-growing crucible inside the said retaining member It includes a seed crystal formed of silicon carbide that is disposed on the lower end face of the said crystal growth crucible is have a first suppression plate that has grown from the inner wall surface so as to surround the central portion, the holding The member has a second suppression plate extending from the outer peripheral surface toward the inner wall surface side of the crystal growth crucible.

  ADVANTAGE OF THE INVENTION According to this invention, when growing the crystal | crystallization of SiC by a solution method, it has the effect that it suppresses that a miscellaneous crystal grows in a seed crystal, and can enlarge or lengthen a SiC single crystal.

It is a schematic explanatory drawing which shows the crystal growth apparatus which concerns on one Embodiment of this invention. It is the elements on larger scale which show the vicinity of the crystal growth crucible in the crystal growth apparatus of FIG. It is the figure which looked at the seed crystal in the crystal growth apparatus of FIG. 1 from the top, (a) is a figure which abbreviate | omits a 2nd suppression board, (b) is a figure which shows a 2nd suppression board without abbreviate | omitting. is there.

<Crucible for crystal growth>
Hereinafter, a crucible for crystal growth (hereinafter sometimes referred to as “crucible”) according to an embodiment of the present invention will be described in detail with reference to FIGS.

  As shown in FIG. 1, the crucible 6 of this embodiment is provided in the crystal growth apparatus 1 described later. The crucible 6 of this embodiment has the opening part 61, the wall surface 62, and the bottom part 63 in an order from the top, as shown in FIG. The wall surface 62 has an outer wall surface 621 and an inner wall surface 622.

  The crucible 6 of the present embodiment has a function as a vessel for containing a silicon melt 5 containing carbon, which will be described later, in an interior 6 </ b> A constituted by an inner wall surface 622 and a bottom 63. In addition, the crucible 6 of the present embodiment grows a SiC single crystal from the melt 5 on the lower surface 4B by bringing a lower surface 4B of a seed crystal 4 described later into contact with the melt 5 and then pulling up the seed crystal 4. Used for the solution method. Examples of the constituent material of the crucible 6 include carbon (graphite).

  Here, the crucible 6 of the present embodiment is a first for suppressing the movement of steam from the melt 5 that extends from the inner wall surface 622 so as to surround the central portion in the middle of the inner wall surface 622 in the height direction. 1 suppression plate 64 is further provided. The middle of the inner wall surface 622 in the height direction means that the intersection of the inner wall surface 622 and the bottom 63 is excluded from the inner wall surface 622. When the crucible 6 has such a first suppression plate 64, the following effects can be obtained.

  That is, the crucible 6 of the present embodiment has a distance L between the lower surface 64C of the first suppression plate 64 and the liquid level 5A of the melt 5 in the interior 6A below the first suppression plate 64. It is set so as to accommodate the melt 5 so as to be equal to or larger than the thickness T of the seed crystal 4. Thereby, the movement of the vapor from the melt 5 can be suppressed by the first suppression plate 64 positioned above the liquid surface 5 </ b> A of the melt 5. The 1st suppression board 64 of this embodiment has this function as a main function.

  And the 1st suppression board 64 of this embodiment has the following function further. That is, the first suppression plate 64 has a function of suppressing the heat radiated from the melt 5 from moving to the outside of the crucible 6. Therefore, heat radiated from the melt 5 can be retained in the space S surrounded by the side surface 4 </ b> C of the seed crystal 4, the liquid surface 5 </ b> A of the melt 5, and the inner wall surface 622. As a result, the temperature of the space S can be made difficult to decrease, and the temperature of the space S can be maintained. Furthermore, the first suppression plate 64 has a function of suppressing outside air from moving into the space S.

  Since the crucible 6 has the first suppression plate 64 having such a function, the vicinity of the side surface 4C of the seed crystal 4 can be warmed, and miscellaneous crystals such as polycrystals grow near the side surface 4C of the seed crystal 4. Can be suppressed. Further, since heat is transferred from the inner wall surface 622 to the first suppression plate 64, the temperature of the first suppression plate 64 can be maintained, so that the vapor or the like from the melt 5 is not easily cooled by the first suppression plate 64. Thus, it is possible to suppress the deposition of silicon or the like on the first suppression plate 64 itself.

  The first suppression plate 64 can be made of a material having a higher melting point than the temperature of heat radiated from the melt 5. As the first suppression plate 64, a material having a melting point of, for example, 1000 ° C. or more can be used. Specifically, as the first suppression plate 64, for example, carbon, silicon, silicon carbide, magnesium oxide, titanium oxide, or the like can be used. In particular, when carbon, silicon, or silicon carbide is used as the first suppression plate 64, even if it is dropped into the melt 5, it does not become an impurity of the melt 5, and it is not necessary to stop crystal growth, so that productivity is high. can do.

  The first suppression plate 64 of the present embodiment is made of carbon and is formed integrally with the inner wall surface 622. Thereby, it is possible to suppress the first restraining plate 64 from dropping from the inner wall surface 622.

  In addition, the first suppression plate 64 may be fixed to the inner wall surface 622 via an adhesive. Examples of the adhesive include a carbon adhesive and a ceramic adhesive containing a ceramic material such as alumina or zirconium. If an adhesive having a melting point higher than the melting point of the melt 5 is employed, the first restraining plate 64 can be prevented from falling off from the inner wall surface 622. In particular, when the crucible 6 and the first suppression plate 64 are made of carbon, a high adhesive strength can be obtained by using a carbon adhesive as the adhesive, and the first suppression plate 64 falls off. Can be suppressed.

  The first suppression plate 64 of the present embodiment is provided over the entire circumference of the inner wall surface 622 as shown in FIG. Thereby, the above-mentioned effect by the 1st suppression board 64 can be heightened. In addition, as long as there exists an effect of this embodiment, you may make it provide the 1st suppression board 64 in a part of inner wall surface 622. FIG. Thus, when the 1st suppression board 64 is provided in a part of inner wall surface 622, when approaching or pulling up the seed crystal 4 to the melt 5, it suppresses interfering with the 1st suppression board 64. Can do.

  As shown in FIG. 2, in the first suppression plate 64 of the present embodiment, the base end portion 64 </ b> B is located on the upper side of the inner wall surface 622. Specifically, the upper side can be set above a position that is half the height of the inner wall surface 622. Thereby, design freedom, such as distance L mentioned above or thickness T of seed crystal 4, can be raised, maintaining the quantity of melt 5.

The first suppression plate 64 of the present embodiment is provided on the inner wall surface 622 so as to be substantially horizontal, that is, substantially parallel to the bottom 63. Thereby, the above-mentioned effect by the 1st suppression board 64 can be heightened. Specifically, the heat radiated from the melt 5 can be easily reflected downward (in the direction of the liquid surface 5A of the melt 5). In addition, as long as there exists an effect of this embodiment, you may provide the 1st suppression board 64 in the inner wall surface 622 so that it may incline with respect to the bottom part 63 at a predetermined angle.

<Crystal growth equipment>
Next, a crystal growth apparatus according to an embodiment of the present invention will be described. The crystal growth apparatus 1 of the present embodiment includes the crucible 6 according to the above-described embodiment, and grows a single crystal of SiC by creating a state close to thermal equilibrium inside the crucible 6. .

  As shown in FIG. 1, the crystal growth apparatus 1 according to the present embodiment includes a crucible container 7 that accommodates the crucible 6 in the lower side in addition to the crucible 6 according to the embodiment described above, and a crucible container 6 and a crucible container 7. A heat insulating material 8 positioned between them and a heating mechanism 10 for heating the crucible 6 are provided.

  The crucible container 7 has a function of holding the crucible 6 inside. The heat insulating material 8 has a function of covering the outer wall surface 621 of the crucible 6 and suppressing heat dissipation from the crucible 6 to keep the crucible 6 at a constant temperature.

  The heating mechanism 10 has a function of heating the crucible 6. The heating mechanism 10 of the present embodiment employs an electromagnetic induction heating method that heats the crucible 6 with electromagnetic waves. Specifically, the heating mechanism 10 of the present embodiment includes a coil 11 and an AC power source 12.

  The coil 11 is composed of a conductor, and the lower region of the outer peripheral portion of the crucible container 7 is spirally wound. The AC power supply 12 is electrically connected to the coil 11 so that an AC current can flow through the coil 11. In addition, when the thing with a high alternating current value is used for the alternating current power supply 12, the time which heats the inside 6A of the crucible 6 to preset temperature can be shortened.

  The crucible 6 is heated by the heating mechanism 10 of the present embodiment as follows. First, an alternating current is passed through the coil 11 using the alternating current power source 12 to generate an electromagnetic field in the space including the heat insulating material 8. This electromagnetic field causes an induced current to flow through the crucible 6. The induced current flowing in the crucible 6 is converted into thermal energy by various losses such as Joule heat generation due to electric resistance and heat generation due to hysteresis loss. That is, the crucible 6 is heated by the heat loss of the induced current.

  Note that an induction current may be passed through the melt 5 by this electromagnetic field to cause the melt 5 itself to generate heat. When the melt 5 itself is heated, the crucible 6 need not be heated. Moreover, although the electromagnetic induction heating system is employ | adopted for the heating mechanism 10 of this embodiment, it may replace with this and may employ | adopt another system. If a specific example is given, the heat transfer system etc. which transfer the heat which generate | occur | produced with exothermic resistors, such as carbon will be mentioned. When the heat transfer type heating mechanism 10 is employed, a heating resistor may be disposed between the crucible 6 and the heat insulating material 8.

  The crystal growth apparatus 1 further includes a seed crystal 4 made of SiC. As shown in FIG. 2, the seed crystal 4 of the present embodiment includes an upper surface 4A that is held by a holding member 2 described below, a lower surface 4B that is located on the opposite side of the upper surface 4A and that grows crystals, and an upper surface. 4A and side surface 4C connected to each of lower surface 4B. The thickness T of the seed crystal 4 can be set to, for example, 1 μm or more and 1 mm or less.

  As shown in FIG. 1, the crystal growth apparatus 1 carries in the seed crystal 4 into the melt 5 located inside the crucible 6, and carries out the SiC single crystal grown from the melt 5. A mechanism 13 is further provided. The carry-in / out mechanism 13 includes a holding member 2 that can be taken in and out of the inside 6 </ b> A of the crucible 6 from the opening 61 of the crucible 6, and a power source 14.

  The three-dimensional shape of the holding member 2 is, for example, a rod shape or a rectangular parallelepiped shape. The three-dimensional shape of the holding member 2 of this embodiment is a substantially cylindrical shape. The holding member 2 is positioned so as to correspond to the opening 61 and has a lower end surface 2A positioned on the crucible 6 side, and holds the seed crystal 4 on the lower end surface 2A.

  The movement of the holding member 2 is controlled by the power source 14 in the vertical direction, that is, in the D1 direction and the D2 direction, so that the portion of the holding member 2 located on the lower end surface 2A side extends from the opening 61 of the crucible 6 to the crucible. 6 is configured to be able to be taken in and out of the inside 6A. Therefore, in this embodiment, the holding member 2 carries in and out the seed crystal 4 and the SiC crystal grown on the lower surface 4B of the seed crystal 4. The D1 direction means a downward direction on the physical space, and the D2 direction means an upward direction on the physical space.

  Examples of the constituent material of the holding member 2 include a material containing carbon as a main component, and examples of the carbon include a polycrystal of carbon and a fired body obtained by firing carbon.

  As shown in FIG. 2, the holding member 2 of the present embodiment is provided with an adhesive 3 on the lower end surface 2 </ b> A, and holds the upper surface 4 </ b> A of the seed crystal 4 through the adhesive 3. The area of the lower end surface 2A of the holding member 2 may be larger or smaller than the area of the upper surface 4A of the seed crystal 4. In the present embodiment, the area of the lower end surface 2A of the holding member 2 is smaller than the area of the upper surface 4A of the seed crystal 4. In addition, when the area of the lower end surface 2A of the holding member 2 is larger than the area of the upper surface 4A of the seed crystal 4, the entire upper surface 4A of the seed crystal 4 can be held via the adhesive material 3 and held. The holding force by the member 2 can be increased.

  Examples of the shape of the lower end surface 2A of the holding member 2 include, for example, a polygonal shape such as a square shape, a circular shape, and the like in the end surface view. The shape of the lower end surface 2A of the holding member 2 of the present embodiment is substantially circular in end view. The end view means a state in which the holding member 2 is viewed from the lower end surface 2A side.

  Examples of the adhesive 3 include a carbon adhesive and a ceramic adhesive containing a ceramic material such as alumina or zirconium. By adopting a material having a melting point higher than that of the melt 5 as the adhesive 3, it is possible to suppress the seed crystal 4 from falling off the holding member 2.

  As shown in FIG. 1, the crystal growth apparatus 1 is connected to an AC power source 12 of the heating mechanism 10 and a power source 14 of the carry-in / out mechanism 13, and further includes a control unit 15 that controls them. . That is, in the crystal growth apparatus 1 of the present embodiment, the control unit 15 controls the heating and temperature control of the melt 5 and the carry-in / out of the seed crystal 4 in conjunction with each other. The control unit 15 includes a central processing unit and a storage device such as a memory, and includes, for example, a known computer.

  Here, in the present embodiment, when the seed crystal 4 is put into the inside 6A from the opening 61 of the crucible 6, the inner edge 64A of the first suppression plate 64 in the top view shown in FIG. The outer periphery of the crystal 4, that is, the inner wall surface 622 side of the side surface 4 </ b> C of the seed crystal 4 is located. Thereby, the function of the first suppression plate 64 described above, that is, the movement of the vapor from the melt 5 is suppressed, the movement of the heat radiated from the melt 5 is suppressed, and the outside air to the space S moves. The function which suppresses can be improved.

In addition, in the above-described top view, the inner edge 64 </ b> A of the first suppression plate 64 may be positioned so as to overlap the side surface 4 </ b> C of the seed crystal 4. When the seed crystal 4 is put into the inside 6 </ b> A from the opening 61 of the crucible 6, the seed crystal 4 is put inside the crucible 6 to a position where the lower surface 4 </ b> B of the seed crystal 4 is brought into contact with the melt 5.
It shall mean the state put in A. The top view means a state in which the seed crystal 4 is viewed from the upper surface 4A side. The inside means the holding member 2 side of the first suppression plate 64 with the inner wall surface 622 as a reference.

  As shown in FIG. 2, the holding member 2 of the present embodiment is located above the first restraining plate 64 and extends from the outer peripheral surface 2 </ b> B toward the inner wall surface 622 side. It has the 2nd suppression board 21 for suppressing a movement. The second suppression plate 21 has a function of assisting the first suppression plate 64 and enhancing the above-described function of the first suppression plate 64.

  Furthermore, when the 2nd suppression board 21 satisfy | fills the following positional relationships, the function of the 2nd suppression board 21 can be improved further. That is, when the seed plate 4 is put into the inside 6A from the opening 61 of the crucible 6, the second restraining plate 21 has an outer edge 21A of the second restraining plate 21 in a top view shown in FIG. It may overlap with the outer periphery of the seed crystal 4, that is, the side surface 4 </ b> C of the seed crystal 4, or may be positioned closer to the inner wall surface 622 than the side surface 4 </ b> C of the seed crystal 4. In this case, for example, the steam that has passed through between the first suppression plate 64 and the holding member 2 can be made difficult to move by the second suppression plate 21. As a result, the effect of assisting the first suppression plate 64 can be enhanced. In the present embodiment, the outer edge 21 </ b> A of the second suppression plate 21 is located closer to the inner wall surface 622 than the side surface 4 </ b> C of the seed crystal 4 in the above-described top view. In addition, an outer side shall mean the inner wall surface 622 side among the 2nd suppression plates 21 on the basis of the outer peripheral surface 2B.

  When the seed crystal 4 is put into the inside 6A from the opening 61 of the crucible 6, the outer edge 21A of the second restraining plate 21 is the inner edge of the first restraining plate 64 in the top view shown in FIG. It may be positioned so as to overlap with 64A or overlap with the first suppression plate 64 positioned on the inner wall surface 622 side with respect to the inner edge 64A of the first suppression plate 64. In this case, the function of the second suppression plate 21 can be further enhanced. In the present embodiment, the outer edge 21 </ b> A of the second suppression plate 21 overlaps the first suppression plate 64 positioned closer to the inner wall surface 622 than the inner edge 64 </ b> A of the first suppression plate 64 in the above-described top view. Located in.

  The 2nd suppression board 21 of this embodiment may be provided over the perimeter of the outer peripheral surface 2B of the holding member 2, as shown in FIG.3 (b). Also by this structure, the function of the 2nd suppression board 21 can be improved. In addition, as long as there exists an effect of this embodiment, you may make it provide the 2nd suppression board 21 in a part of outer peripheral surface 2B.

  As shown in FIG. 2, the second suppression plate 21 of the present embodiment may be provided on the outer peripheral surface 2B in a substantially horizontal direction, that is, substantially parallel to the lower end surface 2A. With this configuration, for example, vapor from the melt 5 can be easily reflected downward, and the function of the second suppression plate 21 can be enhanced. In addition, as long as there exists an effect of this embodiment, you may provide the 2nd suppression board 21 in the outer peripheral surface 2B so that it may incline at a predetermined angle with respect to 2 A of lower end surfaces.

  On the other hand, the crystal growth apparatus 1 may further include a lid member 9 as shown in FIGS. 1 and 2. The lid member 9 is located above the second suppression plate 21 of the holding member 2. The lid member 9 of the present embodiment has a through hole 91 located at the center thereof, and the holding member 2 is inserted through the through hole 91. Thereby, the lid member 9 is configured to be movable up and down along the holding member 2.

  The dimension of the through hole 91 may be appropriately set depending on the dimension of the second suppression plate 21. That is, the second suppression plate 21 can be cooled from the gap between the holding member 2 and the through hole 91 depending on the dimension of the through hole 91. Thus, by adjusting the dimension of the through-hole 91, the 2nd suppression board 21 can be cooled and the temperature of the holding member 2 can be adjusted.

  Further, the lid member 9 of the present embodiment has the outer peripheral portion of the crucible 6 when the seed crystal 4 is put into the inside 6 </ b> A from the opening 61 of the crucible 6 and the second suppression plate 21 is positioned below the opening 61. It is comprised so that the edge part 61A of the opening part 61 may be contact | abutted. Thereby, when growing a single crystal of SiC, for example, it is possible to make it difficult for the vapor from the melt 5 to move out of the crucible 6, so that the inside 6A of the crucible 6 can be maintained at a constant temperature. . As a result, it is possible to grow a high-quality SiC single crystal in which generation of miscellaneous crystals or dislocations is suppressed.

As shown in FIG. 2, the through hole 91 of the lid member 9 may be set larger than the holding member 2 and smaller than the second suppression plate 21 in a top view. In this case, the step of placing the lid member 9 on the edge portion 61A of the crucible 6 or the step of separating the lid member 9 from the edge portion 61A can be performed by moving the holding member 2. Specifically, in the step of separating the lid member 9 from the edge portion 61A, when the holding member 2 is moved in the D2 direction and the SiC single crystal grown from the melt 5 is carried out, the lid member 9 is second. Contact the suppression plate 21. Thereafter, the lid member 9 can be lifted by the second restraining plate 21 and separated from the crucible 6 together with the holding member 2. As the constituent material of the lid member 9, the same material as exemplified in the constituent material of the crucible 6 can be used.

<Crystal growth method>
Next, a crystal growth method according to an embodiment of the present invention will be described taking as an example the case of using the crystal growth apparatus 1 according to the above-described embodiment. The crystal growth method of this embodiment is a method of growing a SiC single crystal.

  In the present embodiment, first, the crucible 6, the holding member 2, and the seed crystal 4 described above are prepared. Next, the raw material of SiC single crystal, that is, carbon and silicon, is housed in the inside 6A of the crucible 6, and the crucible 6 is heated by the heating mechanism 10, and the raw material of the single crystal of SiC is melted in the inside 6A of the crucible 6. The silicon melt 5 containing carbon is accommodated in the inside 6 </ b> A of the crucible 6.

  At this time, the distance L between the lower surface 64C of the first restraining plate 64 and the liquid surface 5A of the melt 5 is below the first restraining plate 64 in the inside 6A of the crucible 6. The melt 5 is accommodated so as to be equal to or greater than the thickness T. In the present embodiment, as shown in FIGS. 1 and 2, in the inside 6 </ b> A of the crucible 6, the distance L is larger than the thickness T of the seed crystal 4, below the first suppression plate 64. The case where the melt 5 is accommodated will be described.

  In the melt 5 accommodated, silicon, which is an element constituting a single crystal of SiC to be grown, is melted as a solvent. The solubility of the solute element (carbon) increases as the temperature of the solvent element increases. In the present embodiment, the temperature of the melt 5 is set to 1300 ° C. or higher and 2500 ° C. or lower. When the melt 5 in which many solutes are dissolved in a solvent at such a high temperature is cooled, the solutes are deposited with thermal equilibrium as a boundary. In the present embodiment, a SiC crystal is grown on the lower surface 4B of the seed crystal 4 by utilizing precipitation due to a temperature deviation from the thermal equilibrium. Note that the thermal equilibrium includes not only strict thermal equilibrium but also includes a state close to thermal equilibrium in which crystals are actually precipitated.

  More specifically, the upper surface 4A of the seed crystal 4 is held by the holding member 2, and the holding member 2 is moved in the D1 direction, whereby the seed crystal 4 is put into the inside 6A from the opening 61 of the crucible 6. At this time, the lower surface 4 </ b> B of the seed crystal 4 is brought into contact with the melt 5 inside the first suppression plate 64. The conditions for bringing the seed crystal 4 into contact with the melt 5 are not particularly limited as long as the lower surface 4B of the seed crystal 4 can contact the melt 5. For example, the entire seed crystal 4 is immersed in the melt 5. May be.

When the lower surface 4B of the seed crystal 4 comes into contact with the melt 5, the melt 5 is cooled in the vicinity of the lower surface 4B, and as described above, the solute precipitates on the lower surface 4B at the boundary of thermal equilibrium. That is, a single crystal of SiC is grown on the lower surface 4B of the seed crystal 4 by utilizing the precipitation of the crystal due to the temperature deviation from the thermal equilibrium.

  At this time, in this embodiment, the distance L between the lower surface 64C of the first suppression plate 64 and the liquid surface 5A of the melt 5 is lower than the first suppression plate 64 in the interior 6A of the crucible 6. Since the melt 5 is accommodated so as to be larger than the thickness T of the seed crystal 4, the movement of the vapor from the melt 5 is suppressed by the first suppression plate 64 and is radiated from the melt 5. It is possible to suppress the movement of heat and the movement of outside air to the space S. As a result, the vicinity of the side surface 4C of the seed crystal 4 can be warmed, and the growth of miscellaneous crystals such as polycrystals in the vicinity of the side surface 4C of the seed crystal 4 can be suppressed. Therefore, according to the present embodiment, the SiC single crystal grown on the lower surface B of the seed crystal 4 can be increased in size or lengthened.

  After the SiC single crystal starts to grow on the lower surface 4B of the seed crystal 4, the seed crystal 4 is pulled up by gradually moving the holding member 2 in the D2 direction. Thereby, a SiC single crystal can be continuously grown on the lower surface 4B of the seed crystal 4.

  At this time, at least the lower surface 4B of the seed crystal 4 needs to be in contact with the melt 5. Here, in the present embodiment, the lower surface 4B of the seed crystal 4 is a concept including the lowermost end of the SiC single crystal grown on the lower surface 4B of the seed crystal 4. Therefore, when pulling up the seed crystal 4, it is necessary to bring the lowest end of the SiC single crystal growing on the lower surface 4 </ b> B of the seed crystal 4 into contact with the melt 5. The speed at which the holding member 2 is moved in the D2 direction is not particularly limited, and may be set as appropriate according to the growth speed of the SiC single crystal grown on the lower surface 4B of the seed crystal 4.

  Through each of the above-described steps, a large or long SiC single crystal is manufactured. In the above-described process of moving the holding member 2 in the D1 direction, the lower surface 4B of the seed crystal 4 and the melt 5 may be relatively close to each other. For example, the melt 5 may be close to the lower surface 4B. Similarly, in the step of moving the holding member 2 in the direction D2, it is sufficient that the lower surface 4B of the seed crystal 4 and the melt 5 are relatively distant from each other. For example, the melt 5 is moved away from the lower surface 4B of the seed crystal 4. Also good.

  As mentioned above, although several embodiment which concerns on this invention was described, this invention is not limited to the above-mentioned embodiment, It cannot be overemphasized that many corrections and changes can be added within the scope of the present invention. Yes.

  For example, in the crystal growth apparatus 1 according to the above-described embodiment, the second suppression plate 21 is positioned above the first suppression plate 64. However, as long as the effect of the second suppression plate 21 is obtained, the second suppression plate 21 is The suppression plate 21 may be positioned at the same height as the first suppression plate 64 or may be positioned below the first suppression plate 64.

DESCRIPTION OF SYMBOLS 1 Crystal growth apparatus 2 Holding member 2A Lower end surface 2B Outer peripheral surface 21 A 2nd suppression board 21A Outer edge 3 Adhesive material 4 Seed crystal 4A Upper surface 4B Lower surface 4C Side surface 5 Melt 5A Liquid surface 6 Crucible 61 Opening 61A Edge 62 Wall surface 621 outer wall surface 622 inner wall surface 63 bottom 64 first restraint plate 64A inner edge 64B base end portion 64C lower surface 6A inner 7 crucible container 8 heat insulating material 9 lid member 91 through hole 10 heating mechanism 11 coil 12 AC power source 13 carry-in / out mechanism 14 Power source 15 Control unit

Claims (7)

A crucible for crystal growth containing therein a silicon melt containing carbon;
A holding member that can be taken in and out of the inside of the crucible for crystal growth; and
A seed crystal made of silicon carbide disposed on the lower end surface of the holding member,
The crystal growth crucible has a first suppression plate extending from the inner wall surface to surround the central portion,
The said growth member is a crystal growth apparatus which has the 2nd suppression board extended toward the inner wall surface side of the said crucible for crystal growth from the outer peripheral surface.   The crystal growth apparatus according to claim 1, wherein the second suppression plate is positioned above the first suppression plate. When the seed crystal is put into the inside from the opening of the crystal growth crucible, the outer edge of the second suppression plate overlaps with the outer periphery of the seed crystal in the top view, or the seed crystal located on the inner wall surface side of the crystal-growing crucible from the outer peripheral, forming AkiraNaru length device according to claim 1 or 2.   When the seed crystal is put into the inside from the opening of the crystal growth crucible, an outer edge of the second restraining plate overlaps an inner edge of the first restraining plate in a top view, or 4. The crystal growth apparatus according to claim 1, wherein the crystal growth apparatus is positioned so as to overlap with a first suppression plate positioned closer to an inner wall surface side of the crystal growth crucible than an inner edge of the first suppression plate.   The holding member is located above the second suppression plate and can be moved up and down along the holding member, and the seed crystal is put into the inside from the opening of the crucible for crystal growth. The cover member according to any one of claims 1 to 4, further comprising a lid member whose outer peripheral portion abuts against an edge of the opening of the crystal growth crucible when the second suppression plate is positioned below the opening. The crystal growth apparatus as described. The lid member has a through hole through which the holding member can be inserted;
The crystal growth apparatus according to claim 5, wherein the through hole is smaller than the second suppression plate.   When the seed crystal is put into the inside from the opening of the crystal growth crucible, the top surface of the melt is covered with the first suppression plate and the second suppression plate when viewed from above. The crystal growth apparatus in any one of Claims 1-6.

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