JP6066308B2 - Light source device - Google Patents

Description

  The present invention relates to a light source device, and more particularly, to a light source device used when forming a concavo-convex structure on a workpiece by an imprint method.

  An imprint method is known as a method for manufacturing a fine concavo-convex structure (see, for example, Patent Document 1). In a state where the UV curable resin is formed on the upper surface of the base material to be processed, a mold (mold) to be molded is pressed against the base material. Then, by irradiating the workpiece and the mold with UV light, an uneven structure opposite to the uneven structure of the mold is formed on the base material. At this time, an LED is used as a light source of UV light.

JP 2011-171366 A

  In Patent Document 1, it is assumed that both surfaces of a base material and a mold as a processing object are planar. For this reason, if light of uniform intensity is emitted from the light source, light with uniform illuminance is irradiated onto the target surface of the workpiece, more specifically, the UV curable resin.

  However, when this technique is applied to the formation of the concavo-convex structure on the lens surface, the following problems occur. FIG. 1 is a schematic conceptual diagram in the case where a concavo-convex structure is formed on a lens surface using an imprint technique.

  The lens 25 generally has a curved surface on both sides or one side. In order to form irregularities on this curved surface, the surface of the mold 23 that is pressed against the target surface also has a configuration along the curved surface. At this time, the resin 27 formed on the lens 25 that is the object to be processed is also formed on the curved surface. As a result, depending on the position on the lens 25, light rays emitted from the light source 21 (each light emission). The angle at which the light beam having a high degree of straightness traveling from the portion toward the lens 25 is incident on the resin 27, the distance along the straight component of light from the light source 21 to the resin 27, and the thickness of the resin 27 along the straight component of light are positioned. It will vary depending on.

  In this state, when a uniform amount of light is emitted from the light source 21, the amount of light sufficient to cure the resin 27 is not irradiated depending on the position, resulting in processing unevenness (resin curing unevenness). There was a problem.

  Further, when the mold 23 or the lens 25 has a curved surface (concave surface or convex surface), if the light incident surface or light exit surface is formed as a curved surface, the light is refracted and the light direction is bent on the curved surface. It is done. This is also a factor that changes the amount of light applied to the resin 27 according to the position.

  In view of the above problems, the present invention realizes a light source device capable of performing imprint processing on a processing object so that processing unevenness corresponding to the position does not occur regardless of the shape of the processing object. Objective.

The present invention is a light source device for imprinting that irradiates light to an irradiated object,
A light source including a first light emitting unit and a second light emitting unit;
A control unit capable of adjusting the amount of light separately for each of the first light emitting unit and the second light emitting unit;
A rod integrator group comprising a plurality of rod integrators,
The rod integrator group includes a first rod integrator and a second rod integrator formed so as to surround an outer periphery of the first rod integrator,
The first rod integrator takes in the light emitted from the first light emitting unit and irradiates the first irradiation region of the irradiated object with light.
The second rod integrator is configured to take in light emitted from the second light emitting unit and irradiate light to a second irradiation region different from the first irradiation region of the irradiated object. And

  According to the above configuration, the amount of light emitted from the emission surface of the first rod integrator and the amount of light emitted from the emission surface of the second rod integrator can be individually controlled by the control unit. The light emitted from the first lot integrator is irradiated to the first irradiation region of the irradiated surface in a uniform illuminance state. Similarly, the light emitted from the second rod integrator is in a uniform illuminance state. The second irradiated area of the irradiated surface is irradiated with

  That is, it is possible to adjust the amount of irradiation light while maintaining the illuminance within the same irradiation region uniform for each irradiation region having a different irradiated surface.

  Here, the second lot integrator is formed so as to surround the outer periphery of the first rod integrator. Accordingly, the second irradiation region irradiated with the light emitted from the second rod integrator is positioned outside the first irradiation region irradiated with the light emitted from the first rod integrator on the irradiated surface. That is, the irradiation light quantity can be adjusted while keeping the illuminance in each irradiation region constant on the inside and outside of the irradiated surface.

  For example, it is assumed that this apparatus is used for imprint processing on the lens surface. At this time, since the lens is formed of a curved surface, the inclination of the irradiated surface with respect to the light source is different between the inside and the outside. In such a case, by adjusting the light amounts of the first light emitting unit and the second light emitting unit according to the inclination, it is possible to irradiate the entire irradiated surface with light of a light amount necessary for processing. is there.

  As the adjustment of the light amount, in addition to the method of providing a difference in the light amount emitted from the first light emitting unit and the second light emitting unit, a method of providing a difference in the light emission time, and a method of combining these may be employed.

  In the above configuration, the second rod integrator may be formed on the concentric axis of the first rod integrator.

Furthermore, the first rod integrator is formed in a cylindrical or elliptical column shape,
The second rod integrator may be formed in an annular column shape or an elliptic ring column shape.

  The rod integrator group may include a plurality of annular second rod integrators surrounding the first rod integrator. In this case, the 2nd light emission part for making light enter with respect to each 2nd rod integrator is provided corresponding to the number of 2nd rod integrators.

That is, the light source includes a plurality of the second light emitting units,
The control unit is configured to adjust the amount of light separately for each of the plurality of second light emitting units,
The rod integrator group includes a plurality of the second rod integrators formed so as to surround the outer periphery of the first rod integrator,
Another feature is that each of the plurality of second rod integrators is configured to take in light emitted from different second light emitting units and irradiate light to different second irradiation regions. To do.

  In this configuration, the light emitted from the plurality of second rod integrators is irradiated to the second irradiation areas having different irradiation surfaces with uniform illuminance. That is, it is possible to increase the number of irradiation areas in which the amount of irradiation light can be adjusted. Thereby, finer adjustment of the amount of irradiation light becomes possible.

  In this case, each of the second irradiation regions irradiated with the emitted light of each of the plurality of second rod integrators is irradiated from the first rod integrator on the irradiation surface. It is located outside the first irradiation region irradiated with the light. That is, one second irradiation region is formed outside the first irradiation region, and another second irradiation region is formed outside the first irradiation region. Hereinafter, a number corresponding to the number of the second rod integrators is separated outside the first irradiation region. The second irradiation region is formed. Thereby, the irradiation light quantity can be finely adjusted while positioning the illuminance in each irradiation region on the inside and outside of the irradiated surface.

  In addition to the above configuration, a projection optical system may be provided between the rod integrator group and the irradiated object.

That is, a projection optical system that projects light emitted from the rod integrator group onto the irradiated object,
The light emitted from the first rod integrator is projected onto the first irradiation region via the projection optical system,
Another feature is that the light emitted from the second rod integrator is projected onto the second irradiation region via the projection optical system.

  According to the above configuration, while maintaining a certain distance between the rod integrator group and the irradiated object, the illuminance within the same irradiated area is uniform for each irradiated area on the irradiated surface with respect to the irradiated object. The irradiation light quantity can be adjusted while maintaining the above.

  In the above configuration, the first light emitting unit and the second light emitting unit may be configured by LEDs. In particular, in the case where an object to be irradiated is processed using a UV curable resin, a UV-LED can be used.

  According to the configuration of the present invention, it is possible to adjust the amount of irradiation light while maintaining the illuminance in the same irradiation region uniform for each irradiation region having a different irradiated surface. Therefore, even if the distance from the light source to the object to be processed and the thickness of the object to be processed are different within the surface because the surface to be irradiated is not planar, the first light emitting part and the second light emitting part By adjusting the amount of light emitted from the light source, it is possible to irradiate the amount of light required for each irradiation region. Therefore, it is possible to complete the process by irradiating light without excess or deficiency regardless of the position of the surface. Thereby, in order to avoid processing unevenness, the predetermined processing can be performed with high efficiency without unnecessarily lengthening the light irradiation time or irradiating light with an excessive amount of irradiation light.

It is a typical conceptual diagram in the case of forming a concavo-convex structure with respect to a lens surface using an imprint technique. It is a schematic diagram which shows the structure of the optical system of a light source device. It is a schematic diagram which shows the structure of a light source. It is a figure which shows distribution of the light intensity of the irradiation area | region of a to-be-irradiated object.

  The light source device of the present invention will be described with reference to the drawings. In each figure, the dimensional ratio in the drawing does not necessarily match the actual dimensional ratio.

  FIG. 2 is a schematic diagram showing the configuration of the optical system of the light source device. The light source device 1 includes a light source 2, a rod integrator group 3, a control unit 4, and a projection optical system 5.

  The light source 2 includes a plurality of light emitting units (referred to as “LED elements” in the present embodiment). FIG. 3 is a schematic diagram showing the configuration of the light source 2. The light source 2 is configured by arranging a plurality of LED elements 21 on a substrate 10. The plurality of LED elements 21 constitute a light emitting unit 31, a light emitting unit 32a, a light emitting unit 32b, and a light emitting unit 32c for each region. The light emitting unit 31 corresponds to the “first light emitting unit”, and the light emitting unit 32 including the light emitting unit 32a, the light emitting unit 32b, and the light emitting unit 32c corresponds to the “second light emitting unit”.

  The control unit 4 adjusts the light amount of each light emitting unit (31, 32) constituting the light source 2. More specifically, the amount of light can be adjusted for each light emitting unit 31, 32 a, 32 b, 32 c for each light emitting unit. For example, the control unit 4 can increase only the light amount from the light emitting unit 31 or decrease only the light amount from the light emitting unit 32a. That is, common light quantity control may be performed for the plurality of LED elements 21 constituting the same light emitting unit.

  The rod integrator group 3 includes a plurality of rod integrators (11, 12a, 12b, 12c). The rod integrator 11 corresponds to the “first rod integrator”, and the rod integrator 12 including the rod integrator 12a, the rod integrator 12b, and the rod integrator 12c corresponds to the “second rod integrator”.

  In the present embodiment, the rod integrator 11 has a cylindrical shape, and each rod integrator 12 has an annular column shape concentric with the rod integrator 11 so as to surround the outer periphery of the rod integrator 11. More specifically, the rod integrator 12a is configured in an annular column shape surrounding the outer periphery of the rod integrator 11, and the rod integrator 12b is further configured in an annular column shape surrounding the outer periphery of the rod integrator 12a. 12c is formed in an annular column shape that further surrounds the outer periphery of the rod integrator 12b.

  However, the rod integrator 11 may have a rectangular column shape, a polygonal column shape, or an elliptic column shape. In this case, each rod integrator 12 may have an annular column shape corresponding to the shape of the rod integrator 11.

  Each rod integrator (11, 12) has a function of making the illuminance uniform on the exit surface of the incident light. Each rod integrator (11, 12) has a different light source (31, 32) from which light is incident.

  That is, in the configuration of the present embodiment, the rod integrator 11 receives the light emitted from the light emitting unit 31, and the illuminance on the emission surface 11z is made uniform (see FIGS. 2 and 3). The rod integrator 12a receives the light emitted from the light emitting unit 32a, and the illuminance on the emission surface 12az is made uniform. The rod integrator 12b receives the light emitted from the light emitting unit 32b, and the illuminance on the emission surface 12bz is made uniform. The rod integrator 12c receives the light emitted from the light emitting unit 32c, and the illuminance on the emission surface 12cz is made uniform.

  Furthermore, each rod integrator (11, 12) irradiates light to a different area. More specifically, the emitted light from the rod integrator 11 is projected onto the irradiation region 15 of the irradiation object 6 via the projection optical system 5. Light emitted from the rod integrator 12 a is projected onto the irradiation region 16 a of the irradiation object 6 via the projection optical system 5. Light emitted from the rod integrator 12 b is projected onto the irradiation region 16 b of the irradiation object 6 via the projection optical system 5. Light emitted from the rod integrator 12 c is projected onto the irradiation region 16 c of the irradiation object 6 via the projection optical system 5. The irradiation region 15 corresponds to the “first irradiation region”, and the irradiation region 16 including the irradiation region 16a, the irradiation region 16b, and the irradiation region 16c corresponds to the “second irradiation region”.

  FIG. 4 is a diagram showing the light intensity distribution in the irradiation region of the object 6 to be irradiated. FIG. 4 (a) schematically shows each irradiation area of the object 6 to be irradiated. FIGS. 4 (b) and 4 (c) show the amount of light from each light emitting section (31, 32). FIG. 5 shows the light intensity distribution in each irradiation region on the line AA in FIG.

  More specifically, FIG. 4B shows the light intensity when the control unit 4 performs control so that the amount of light emitted from the light emitting unit 31 is maximized and the amount of emitted light decreases in the order of the light emitting units 32a, 32b, and 32c. Distribution (see FIG. 3). Further, in FIG. 4C, conversely to FIG. 4B, the control unit 4 minimizes the amount of light emitted from the light emitting unit 31, and the emitted light amount increases in the order of the light emitting units 32a, 32b, and 32c. The light intensity distribution when controlled to (see FIG. 3).

  According to FIG.4 (b), the illumination intensity of the irradiation area | region 15 is the highest, and the illumination intensity is low in order of irradiation area 16a, 16b, 16c. That is, in this case, the irradiation light quantity is set to be higher as it goes inward with respect to the irradiation object 6, and the irradiation light quantity becomes lower as it goes outward.

  Moreover, according to FIG.4 (c), the illumination intensity of the irradiation area | region 15 is the lowest, and the illumination intensity becomes high in order of irradiation area 16a, 16b, 16c. That is, in this case, the irradiation light amount is set to be lower as it goes inward with respect to the irradiation object 6, and the irradiation light amount becomes higher as it goes outward.

  From the above, it can be seen that the irradiation light amount can be adjusted for each irradiation region of the object 6 by adjusting the light emission amount of each light emitting unit (31, 32) by the control unit 4. Therefore, depending on the position of the processing area, the area can be irradiated with light of the necessary irradiation light amount, and in order to avoid processing unevenness, the light irradiation time is unnecessarily extended and the light is excessively irradiated. The predetermined processing can be completed efficiently without any problem.

  Assume that the light source device 1 is used for imprint processing of the lens surface as shown in FIG. In this case, the irradiated object 6 includes a lens 25 having a resin 27 formed on the processing target surface and a mold 23 having a processing target shape. At this time, since the processing target surface has a curved surface derived from the lens 25, the inclination of the irradiated surface with respect to the light source 2 is different between the inside and the outside. In such a case, by adjusting the light amount of each light emitting unit (31, 32) by the control unit 4 according to the inclination, the entire irradiated surface is irradiated with the light amount necessary for the processing. Is possible.

  In addition, each rod integrator (11, 12) has a uniform illuminance on each exit surface, and the emitted light from the exit surface of each rod integrator is irradiated to different irradiation areas of the irradiated object 6. Thereby, in the same irradiation area | region, the light of the same illumination intensity can be irradiated. Therefore, when there is symmetry in the shape of the object to be irradiated, the light emitting part (only for the part where the illuminance condition is desired to be different while irradiating the light with the same illuminance to the part where the illuminance condition is desired to be the same. It is possible to adjust the intensity of (31, 32).

[Another embodiment]
Hereinafter, another embodiment will be described.

  <1> In the embodiment described above, the light emitted from the rod integrator group 3 is projected onto the irradiated surface of the irradiated object 6 via the projection optical system 5. However, when the irradiated object 6 is installed near the exit surface of the rod integrator group 3, the projection optical system 5 may be omitted. Also in this case, the emitted light from each of the rod integrators (11, 12a, 12b, 12c) is irradiated onto different irradiation areas of the irradiated object 6.

  <2> When the light source device 1 of the present embodiment is configured to have a concavo-convex shape with respect to a workpiece by imprint technology, the object to be irradiated 6 is a processing target in which a photocurable resin is formed on the processing target surface. It becomes the structure containing the type | mold which contacted the process target surface of the thing and the said process target object. In this case, the configuration may be such that the light emitted from the rod integrator group 3 is irradiated to the photocurable resin through a mold, or the photocurable resin may be irradiated to the photocurable resin through a workpiece. In other words, either the workpiece or the mold may be installed on the rod integrator group 3 side.

  <3> In the above-described embodiment, the rod integrator group 3 is configured such that a plurality of rod integrators 12 (12 a, 12 b, 12 c) are surrounded by the outer periphery of the rod integrator 11. However, any configuration may be used as long as at least one rod integrator 12 is provided on the outer periphery of the rod integrator 11. And the light source 2 should just be set as the structure provided with the light source part according to the number of rod integrators. In this case, the light emission part 31 and the light emission part 32 which can adjust light quantity collectively for the light emission parts 32a, 32b, and 32c are provided. You should prepare.

  Also in this configuration, by adjusting the light amount for the light emitting units 31 and 32 by the control unit 4, it is possible to adjust the irradiation light amount for the inner and outer regions of the irradiated surface of the irradiated object 6. Thereby, processing unevenness is reduced by adjusting the amount of irradiation light in the inner region and the outer region of the irradiated surface in accordance with the shape of the irradiated object 6.

  Conversely, by increasing the number of rod integrators 12 (second rod integrators) surrounding the outer periphery of the rod integrator 11, and increasing the number of light emitting units 32 (second light emitting units) according to the number of rod integrators 12, The illuminance adjustment for each irradiation region of the irradiated object 6 can be controlled more finely.

  <4> In the above-described embodiment, the light source 2 is realized by the plurality of LED elements 21. However, as long as the light amount can be adjusted by the control unit 4 for each light emitting unit (31, 32), the element constituting the light source is not limited to the LED element. For example, a lamp can be used.

  <5> In the configuration of FIG. 2, the control unit 4 is provided outside the light source 2, but the control unit 4 may be mounted on the same substrate as the substrate 10 on which the light source 2 is mounted.

  <6> In the light source device 1 shown in FIG. 2, a bilateral telecentric optical system may be configured by arranging a collimating lens and an optical aperture between the light source 2 and the rod integrator group 3. Similarly, an optical system may be arranged between the rod integrator group 3 and the irradiated object 6 to constitute a double telecentric optical system. By setting it as such a structure, the irradiated object 6 can be irradiated with the light of uniform illumination intensity for every irradiation area | region.

1: Light source device 2: Light source 3: Rod integrator group 4: Control unit 5: Projection optical system 6: Irradiated object 10: Substrate 11: Rod integrator (first rod integrator)
11z: Output surface of rod integrator 11 12 (12a, 12b, 12c): Rod integrator (second rod integrator)
12az: exit surface of rod integrator 12a 12bz: exit surface of rod integrator 12b 12cz: exit surface of rod integrator 12c 15: first irradiation region 16 (16a, 16b, 16c): second irradiation region 21: LED element 23: mold 25: Lens 27: Resin 31: Light emitting part (first light emitting part)
32 (32a, 32b, 32c): light emitting part (second light emitting part)

Claims (2)

A light source device for imprinting that irradiates an object with light,
A light source including a first light emitting unit and a second light emitting unit;
A control unit capable of adjusting the amount of light separately for each of the first light emitting unit and the second light emitting unit;
A rod integrator group comprising a plurality of rod integrators,
The rod integrator group includes a first rod integrator and a second rod integrator formed so as to surround an outer periphery of the first rod integrator,
The first rod integrator takes in the light emitted from the first light emitting unit and irradiates the first irradiation region of the irradiated object with light.
It said second rod integrator, Ri configuration der for irradiating light to the different second irradiation region and the first irradiation region of the irradiation object captures the light emitted from the second light emitting portion,
The second rod integrator is formed on a concentric axis of the first rod integrator;
The first rod integrator has a column shape,
The light source device , wherein the second rod integrator has an annular column shape . The first rod integrator has a cylindrical or elliptical column shape,
The light source device according to claim 1 , wherein the second rod integrator has an annular column shape or an elliptic column shape.

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