JP6059411B1 - 光源装置及び検査装置 - Google Patents

光源装置及び検査装置 Download PDF

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Publication number
JP6059411B1
JP6059411B1 JP2016556341A JP2016556341A JP6059411B1 JP 6059411 B1 JP6059411 B1 JP 6059411B1 JP 2016556341 A JP2016556341 A JP 2016556341A JP 2016556341 A JP2016556341 A JP 2016556341A JP 6059411 B1 JP6059411 B1 JP 6059411B1
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Japan
Prior art keywords
light
light source
wavelength
optical
optical amplifier
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JP2016556341A
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English (en)
Japanese (ja)
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JPWO2016194556A1 (ja
Inventor
共則 中村
共則 中村
充哲 西沢
充哲 西沢
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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Publication of JPWO2016194556A1 publication Critical patent/JPWO2016194556A1/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/50—Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/50—Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • H01S5/5027—Concatenated amplifiers, i.e. amplifiers in series or cascaded
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/50—Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • H01S5/5045—Amplifier structures not provided for in groups H01S5/02 - H01S5/30 the arrangement having a frequency filtering function
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/02—ASE (amplified spontaneous emission), noise; Reduction thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • General Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Semiconductor Lasers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Lasers (AREA)
  • Light Receiving Elements (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP2016556341A 2015-05-29 2016-05-10 光源装置及び検査装置 Active JP6059411B1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015110187 2015-05-29
JP2015110187 2015-05-29
PCT/JP2016/063864 WO2016194556A1 (ja) 2015-05-29 2016-05-10 光源装置及び検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016238670A Division JP6714500B2 (ja) 2015-05-29 2016-12-08 光源装置及び検査装置

Publications (2)

Publication Number Publication Date
JP6059411B1 true JP6059411B1 (ja) 2017-01-11
JPWO2016194556A1 JPWO2016194556A1 (ja) 2017-06-22

Family

ID=57440607

Family Applications (2)

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JP2016556341A Active JP6059411B1 (ja) 2015-05-29 2016-05-10 光源装置及び検査装置
JP2016238670A Active JP6714500B2 (ja) 2015-05-29 2016-12-08 光源装置及び検査装置

Family Applications After (1)

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JP2016238670A Active JP6714500B2 (ja) 2015-05-29 2016-12-08 光源装置及び検査装置

Country Status (6)

Country Link
US (1) US10408874B2 (enExample)
EP (1) EP3306761B1 (enExample)
JP (2) JP6059411B1 (enExample)
KR (1) KR102403498B1 (enExample)
CN (1) CN107615603B (enExample)
WO (1) WO2016194556A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6605651B2 (ja) 2018-03-27 2019-11-13 株式会社フジクラ レーザモジュール及びレーザ装置
JP7219096B2 (ja) * 2019-01-21 2023-02-07 浜松ホトニクス株式会社 分光測定装置および分光測定方法
CN111596158A (zh) * 2020-05-29 2020-08-28 苏州市运泰利自动化设备有限公司 基于产品老化测试状态的感光放大系统及方法
KR102286322B1 (ko) * 2020-05-29 2021-08-06 한국광기술원 마이크로 led 검사 시스템 및 방법
EP4213318A4 (en) * 2020-09-09 2025-01-29 Furukawa Electric Co., Ltd. Light source, light source device, method for driving light source, raman amplifier, and raman amplification system
KR102799599B1 (ko) * 2020-09-23 2025-04-23 하마마츠 포토닉스 가부시키가이샤 검사 장치
JP2023084807A (ja) * 2021-12-08 2023-06-20 古河電気工業株式会社 光源、光源装置、光源の駆動方法、ラマン増幅器、およびラマン増幅システム
US20240142512A1 (en) * 2022-10-31 2024-05-02 Texas Instruments Incorporated Semiconductor device testing

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012247397A (ja) * 2011-05-31 2012-12-13 Hamamatsu Photonics Kk 集積回路検査装置
JP2013065713A (ja) * 2011-09-16 2013-04-11 Toshiba Corp ファイバレーザ装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3854673B2 (ja) * 1996-11-25 2006-12-06 株式会社日立コミュニケーションテクノロジー 光増幅媒体制御方法及び光増幅装置並びにそれを利用したシステム
JP3452768B2 (ja) * 1997-08-11 2003-09-29 富士通株式会社 光増幅のための方法及び装置並びに該装置を有するシステム
EP2315073B1 (en) * 1998-07-23 2014-12-31 The Furukawa Electric Co., Ltd. Raman amplifier and Raman amplification method
US7593647B2 (en) * 2002-09-19 2009-09-22 Novera Optics, Inc. Apparatuses and methods for automatic wavelength locking of an optical transmitter to the wavelength of an injected incoherent light signal
KR20050009584A (ko) * 2003-07-18 2005-01-25 삼성전자주식회사 반도체 광증폭기와 광증폭 모듈
KR100539928B1 (ko) * 2003-08-29 2005-12-28 삼성전자주식회사 다파장 광원 및 그를 이용한 파장 분할 다중 시스템
JP2009049123A (ja) * 2007-08-17 2009-03-05 Fujifilm Corp 光半導体素子、該光半導体素子を用いた波長可変光源および光断層画像取得装置
WO2014028013A1 (en) * 2012-08-16 2014-02-20 Massachusetts Institute Of Technology Optical source for interferometric fiber optic gyroscopes
CN104300360B (zh) * 2014-10-16 2018-04-20 浙江大学 一种改善超辐射发光二极管光源波长稳定性的装置和方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012247397A (ja) * 2011-05-31 2012-12-13 Hamamatsu Photonics Kk 集積回路検査装置
JP2013065713A (ja) * 2011-09-16 2013-04-11 Toshiba Corp ファイバレーザ装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JPN7016002170; Ｔａｋｅｓｈｉ Ｙａｍａｔｏｙａ ａｎｄ Ｆｕｍｉｏ Ｋｏｙａｍａ: 'Ｎｏｉｓｅ Ｓｕｐｐｒｅｓｓｉｏｎ ｏｆ Ｓｐｅｃｔｒｕｍ -Ｓｌｉｃｅｄ Ｌｉｇｈｔ Ｕｓｉｎｇ Ｓｅｍｉｃｏｎｄｕｃｔｏｒ Ｏｐｔｉｃａｌ Ａｍｐｌｉｆｉｅｒｓ' Ｅｌｅｃｔｒｏｎｉｃｓ ａｎｄ Ｃｏｍｍｕｎｉｃａｔｉｏｎｓ ｉｎ Ｊａｐａｎ Ｐａｒｔ ２ Ｖｏｌ． ８６， Ｎｏ． ２, 2003, ｐｐ．２８-３５ *

Also Published As

Publication number Publication date
JP6714500B2 (ja) 2020-06-24
EP3306761A1 (en) 2018-04-11
CN107615603B (zh) 2024-06-04
JP2017092480A (ja) 2017-05-25
WO2016194556A1 (ja) 2016-12-08
KR102403498B1 (ko) 2022-05-31
EP3306761A4 (en) 2019-01-23
EP3306761B1 (en) 2022-06-22
JPWO2016194556A1 (ja) 2017-06-22
US10408874B2 (en) 2019-09-10
CN107615603A (zh) 2018-01-19
US20180156860A1 (en) 2018-06-07
KR20180013937A (ko) 2018-02-07

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