JP6051579B2 - Charging circuit and flash discharge lamp lighting device - Google Patents

Description

  The present invention relates to a charging circuit for charging an electric storage element with an electric charge and a flash discharge lamp lighting device using the same.

  Conventionally, a flash discharge lamp typified by a xenon lamp capable of emitting flash discharge light has been used as a light source for ultraviolet irradiation. Such a flash discharge lamp is used, for example, for curing an ultraviolet curable material, and a large power of several tens of kW is instantaneously input by a dedicated lighting device. Here, if such a large amount of power is instantaneously supplied directly from the commercial power source to the flash discharge lamp, it may cause a failure in peripheral equipment of the same commercial power system, or a large-capacity contact between the commercial power source and the irradiation device. And the need for wiring is a problem. Therefore, generally, a configuration is adopted in which a charging circuit is provided in the lighting device, and electric power from a commercial power supply is temporarily stored in the charging circuit, and then the stored electric power is supplied to the flash discharge lamp in response to a lighting command.

  FIG. 10 shows a flash discharge lamp lighting device (hereinafter referred to as “lighting device”) using a conventional charging circuit. The lighting device includes a rectifying unit (1, 2) that rectifies and smoothes the AC power supply, a charging circuit (3-13) that boosts and charges the output of the rectifying unit, and a flash discharge lamp 40 that breaks down the insulation from the power storage circuit. A starting circuit (19, 20) for supplying energy to the flash discharge lamp 40 and a control unit 30 for controlling the charging circuit and the starting circuit to cause the flash discharge lamp 40 to perform a series of lighting operations are provided. The charging circuit includes a booster circuit (3-9) that boosts the output of the rectifier and a storage circuit (10-13) that rectifies and charges the output of the booster circuit.

  The booster circuit is composed of a booster inverter circuit including a full bridge circuit (3-6) that converts the output of the rectifiers (1, 2) into AC. When receiving the charge start command from the control unit 30, the boost control circuit 7 turns on and off the full bridge circuit alternately at a high frequency of about 50 kHz. By this switching operation, the DC input from the rectifying unit is AC converted. The AC output of the full bridge circuit is current-limited by the inductor 8 and input to the primary winding of the step-up transformer 9, and a voltage boosted according to the turn ratio of the step-up transformer 9 is generated in the secondary winding. The voltage generated in the secondary winding of the step-up transformer 9 is rectified by the diode bridge 10-12, and the rectified output is charged in the storage capacitor 13. Then, when it is detected that the charging voltage detected by the charging voltage detector (16, 17) has increased to the charging set value, the controller 30 stops the operation of the booster circuit. The charge setting value is, for example, about 2000 to 3000 Vdc.

  The control unit 30 stops the booster circuit, and then outputs a lighting command (start signal) to the igniter circuit 19 at a predetermined timing. When the igniter circuit 19 receives the start signal, it causes the external trigger 20 to generate a high voltage pulse voltage. When the flash discharge lamp 40 is broken down by a high-pressure pulse from the external trigger 20, the energy charged in the storage capacitor 13 is input to the flash discharge lamp 40. Thereby, the flash discharge lamp 40 is turned on once. Similar lighting devices are disclosed in Patent Documents 1 and 2, for example.

Japanese Patent No. 4140279 JP 2011-192418 A

  However, in the above configuration, a protection function is not ensured in the case where the booster circuit does not stop due to some trouble even when the charging voltage of the storage capacitor 13 reaches the charging set value. Without such a protection function, the charging voltage of the storage capacitor 13 increases beyond the charge setting value, and may exceed the absolute maximum rated voltage of the storage capacitor 13, which may cause a failure of the storage capacitor. is there.

  As the above problems, there may be an operational problem in the control unit 30 formed of a microcomputer or the like or a hardware problem around the charge voltage detection unit (16-17). Operational malfunctions in the microcomputer include erroneous detection of the charging voltage due to noise generated by circuit oscillation during charging operation, latching due to noise generated by circuit oscillation during charging operation, and malfunctioning of the microcomputer due to other external noise. possible. Hardware defects include defective parts such as voltage dividing resistors in the charging voltage detector (particularly, poor contact of the resistor 16 or short circuit of the resistor 17), defective printed circuit board patterns in the charging voltage detector, and charging. There may be a disconnection at the harness portion from the voltage detection portion to the control board, a wire caulking failure at the connector portion, forgetting to insert the connector, or the like.

  Therefore, according to the present invention, in the charging circuit for charging the storage element with the boosted voltage, the charging voltage of the storage element is a predetermined value even when the boosting circuit does not stop due to some trouble even though the charging voltage reaches the charge setting value. It is an object to provide a configuration that does not exceed. Another object of the present invention is to provide a flash discharge lamp lighting device using such a charging circuit.

  A first aspect of the present invention is a charging circuit including a boosting circuit that boosts an input voltage, and a storage circuit that has a storage element and charges the storage element with the output of the boosting circuit. The power storage circuit includes a first rectifying element that rectifies the output of the booster circuit, a second rectifying element for preventing backflow inserted in a charging path from the first rectifying element to the power storing element, and a second rectifying element A voltage breakdown type element is provided on the anode terminal side and connected between the output terminals of the first rectifying element, and the breakdown voltage of the voltage breakdown type element is lower than the absolute maximum rated value of the storage element.

  Here, a charging voltage detection unit that detects a charging voltage of the storage element, and a control unit that generates a charging completion signal when it is determined that the charging voltage detected by the charging voltage detection unit has reached a charging set value are further provided. The control unit may be configured to output an abnormality detection signal and stop the booster circuit when a charge completion signal is not generated even after a predetermined time has elapsed since the start of charging.

  Also, a charging input detection unit that detects a voltage between the output terminals of the first rectifying element, and a control that determines whether or not the voltage breakdown type element is conductive based on the charging input voltage detected by the charging input detection unit May be further provided, and the control unit may be configured to stop the booster circuit when it is determined that the voltage breakdown element is conductive.

  Furthermore, it is good also as a structure further equipped with the alerting | reporting means which alert | reports that the abnormality detection signal was output.

  According to a second aspect of the present invention, there is provided a flash discharge lamp lighting comprising a charging circuit according to the first aspect and a starting circuit for causing the flash discharge lamp to inject energy from the storage element by causing dielectric breakdown of the flash discharge lamp. Device.

1 is a diagram showing a flash discharge lamp lighting device including a charging circuit according to an embodiment of the present invention. It is a figure which shows the flash discharge lamp used for this invention. It is a figure which shows the charging voltage in the charging circuit of the Example of this invention. It is a figure which shows the charging voltage in the charging circuit of the Example of this invention. It is a figure explaining the charge input voltage in the charging circuit of the Example of this invention. It is a figure explaining the charge input voltage in the charging circuit of the Example of this invention. It is a figure which shows the flash discharge lamp lighting device containing the charging circuit by the 1st modification of this invention. It is a figure which shows the flash discharge lamp lighting device containing the charging circuit by the 2nd modification of this invention. It is a figure explaining the charging input voltage in the charging circuit of the 2nd modification of this invention. It is a figure which shows the flash discharge lamp lighting device containing the charging circuit by the 3rd modification of this invention. It is a figure which shows the flash discharge lamp lighting device containing the charging circuit by the 3rd modification of this invention. It is a figure which shows the light irradiator to which this invention is applied. It is a figure which shows the conventional flash discharge lamp lighting device.

Example.
FIG. 1 shows a flash discharge lamp lighting device (hereinafter referred to as “lighting device”) including a charging circuit according to an embodiment of the present invention. The lighting device includes a rectifying unit (1, 2) that rectifies and smoothes the AC power source, a charging circuit (3-15) that boosts and charges the output of the rectifying unit, and a flash discharge lamp 40 that breaks down the insulation from the power storage circuit. A starting circuit (19, 20) for supplying energy to the flash discharge lamp 40 and a control unit 30 for controlling the charging circuit and the starting circuit to cause the flash discharge lamp 40 to perform a series of lighting operations are provided. The charging circuit includes a booster circuit (3-9) that boosts the output of the rectifier and a storage circuit (10-15) that rectifies and charges the output of the booster circuit. However, it is convenient for each circuit element to belong to which circuit and does not restrict the present invention. The resistors 16 and 17 constitute a charging voltage detection unit, and the charging voltage of the storage capacitor 13 detected by the charging voltage detection unit is input to the control unit 30.

  The booster circuit (3-9) includes a booster inverter circuit including a full bridge circuit (3-6) that converts the output of the rectifiers (1, 2) into an alternating current. In the full bridge circuit, when the boost control circuit 7 receives a charge start command from the control unit 30, the transistors 3 and 6 and the transistors 4 and 5 are alternately turned on / off at a high frequency of several tens of kHz (for example, about 50 kHz). . By this switching operation, the DC input from the rectifying unit is AC converted. The AC output of the full bridge circuit is current-limited by the inductor 8 and input to the primary winding of the step-up transformer 9, and a voltage boosted according to the turn ratio of the step-up transformer 9 is generated in the secondary winding.

  The storage circuit (10-15) includes a diode bridge 10-12 (first rectifier element) that rectifies the output of the booster circuit, a storage capacitor 13 (storage element) that is charged with the rectified output, and a diode bridge 10-12. The rectifying element 14 (second rectifying element) inserted in the charging path to the storage capacitor 13 and the voltage breakdown type element 15 connected on the anode terminal side of the rectifying element 14 and between the output terminals of the diode bridge 10-12. Is provided. The diode bridge 10-12 full-wave rectifies the outputs of the plurality of secondary windings of the step-up transformer 9, and outputs the total voltage. The withstand voltage of each of the diode bridges 10-12 may be about one third of the charging set value or the absolute maximum rated value of the storage capacitor 13. The rectifying element 14 is a diode that prevents backflow from the storage capacitor 13 to the voltage breakdown element 15 side. The voltage breakdown type element 15 is formed of, for example, a discharge gap, and becomes conductive when a voltage higher than the breakdown voltage is applied. As will be described in detail later, it is assumed that the breakdown voltage of the voltage breakdown element 15 is higher than the charge setting value and lower than the absolute maximum rating value of the storage capacitor.

  The control unit 30 includes a computer such as a microcomputer or a personal computer, and includes a CPU 31, a memory 32, and, in some cases, an input / output interface 33. As described above, the control unit 30 is configured to turn on the flash discharge lamp 40 at a predetermined timing. Therefore, the predetermined timing may be programmed in the memory 32, read from a removable storage medium, or read from a communication device via a transmission medium. . When the control unit 30 is a personal computer, a user may be able to input a desired timing via the input / output interface 33 according to the manufacturing process.

  The control unit 30 outputs a charge start signal to the boost control circuit 7 to start switching of the full bridge circuit (3-6). Thereafter, when the control unit 30 determines that the charge voltage detected by the charge voltage detection unit (16-17) has risen to the charge set value, the control unit 30 generates a charge completion signal and supplies the boost control circuit 7 with the full bridge circuit. Stop operation.

  The control unit 30 stops the booster circuit, and then outputs a lighting command (start signal) to the igniter circuit 19 at a predetermined timing. Upon receiving the start signal, the igniter circuit 19 causes the external trigger 20 to generate a high voltage pulse voltage of 10 k to 20 kV. When the flash discharge lamp 40 is broken down by the high-pressure pulse from the external trigger 20, the energy charged in the storage capacitor 13 is thrown into the flash discharge lamp 40 while being limited by the inductor 18 for controlling the discharge current peak. . Thereby, the flash discharge lamp 40 is turned on once. This operation from charging to lighting is performed at a set timing.

  In this embodiment, the capacity of the storage capacitor 13 is 50 μF, the absolute maximum rated value is 4000 Vdc, and the charge setting value is 3000 Vdc. In the charging operation, the boost control circuit 7 controls the switching frequency of the full bridge circuit (3-6) according to the command value from the control unit 30, and thereby the voltage charged in the storage capacitor 13 is controlled. The full bridge circuit receives a voltage of about 282 V (the voltage of the smoothing capacitor 2) obtained by full-wave rectification of the AC power supply 200V, and is driven at a switching frequency of about 50 kHz to charge the storage capacitor 13.

  FIG. 2 shows a specific configuration of the flash discharge lamp 40 and the external trigger 20 of FIG. The flash discharge lamp 40 seals the quartz arc tube 101, the anode 102 disposed inside one end of the quartz arc tube 101, the cathode 103 disposed inside the other end of the quartz arc tube 101, and both ends of the quartz arc tube 101. And a trigger wire 105 (external trigger 20) disposed in the vicinity of the quartz arc tube, and an electrode core rod 106 connected to the anode 102 and the cathode 103, respectively. The anode 102 is made of tungsten, and the cathode 103 is obtained by welding a sintered electrode to the tip of a tungsten electrode. The sintered electrode is made by doping tungsten with barium oxide BaO or aluminum oxide AL203 and baking it.

  FIG. 3A is a diagram showing the charging voltage of the storage capacitor 13 in the present embodiment, and shows the charging voltage when the above-described problem (hereinafter referred to as “defect”) does not occur in the “problem to be solved by the invention”. Show. When charging is started at t0, the charging voltage increases and reaches the charging set value (3000 V) at tA. At tA, the control unit 30 determines that the charging is completed based on the detected charging voltage from the charging voltage detection unit (16-17), generates a charging completion signal, and sends the full bridge circuit (3 The operation of -6) is stopped. At tB, the control unit 30 outputs a start signal to the igniter circuit 19, and when the igniter circuit 19 is activated, the charge of the storage capacitor 13 is discharged by the flash discharge lamp 40, and the charging voltage is instantaneously several tens V (flash discharge lamp 40). The voltage can be maintained until the discharge can be maintained.

  FIG. 3B is a diagram illustrating a charging voltage of the storage capacitor 13 when a failure occurs. Here, the breakdown voltage of the voltage breakdown type element 15 is 3500 Vdc. When charging is started at t0, the charging voltage increases. After that, at tA, the control unit 30 cannot determine that charging has been completed due to a malfunction even though the charging voltage has reached the charging set value (3000 V), and a charging completion signal is generated. Not. Therefore, the operation of the full bridge circuit (3-6) is continued in the boost control circuit 7. At tC, the charging voltage reaches the breakdown voltage (3500 V) of the voltage breakdown type element 15, and the voltage breakdown type element 15 breakdowns and becomes conductive. Thereafter, the voltage breakdown of the voltage breakdown element 15 is repeated while the operation of the booster circuit is continued, and the charging voltage is kept constant at the breakdown voltage (3500 V). In the conventional charging circuit shown in FIG. 10, the charging voltage continues to increase after tC (see the broken line portion in FIG. 3B).

  4A and 4B show charging input waveforms (voltage waveforms between the node N1 and the node N2) at each time of FIG. 3B. FIG. 4A shows a waveform near an arbitrary time t1 in the charging voltage increase process between t0 and tA. During this period, the charging input waveform which is a full-wave rectified waveform is clamped to the charging voltage of the rising storage capacitor 13. In the drawing, the trough portion of the pulsating voltage is reduced to 0V, but in reality, it may not be completely 0V due to the influence of the capacity of the rectifying element portion.

  As shown in FIG. 4B, the charging input waveform immediately after tC (voltage waveform between the node N1 and the node N2) is approximately equal to the charging input voltage due to the voltage breakdown of the voltage breakdown element 15 when the charging input voltage reaches the breakdown voltage. 0V. Since the holding current continues once the voltage breakdown element 15 has broken down, the breakdown state is maintained until the current disappears due to the stoppage of the booster circuit or the like.

  Thus, even if the booster circuit is not stopped due to a problem, the storage circuit can suppress the voltage of the storage capacitor 13 to be equal to or lower than the breakdown voltage of the voltage breakdown element 15. Therefore, the charging voltage does not exceed the absolute maximum rating of the storage capacitor 13, and the storage capacitor 13 is protected from overvoltage.

  Here, in the voltage breakdown period Tb, the diode bridge 10-12 is in the on state, and the rectifying element 14 is in the off state. Therefore, at the time of voltage breakdown, the current flowing through the voltage breakdown type element 15 is only the current generated in the secondary winding of the step-up transformer 9, that is, the step-up transformer 9, and the current flows from the storage capacitor 13 into the voltage breakdown type element 15. There is nothing. Therefore, by inserting the rectifying element 14 into the path between the node N1 or N2 and the storage capacitor 13, a small-sized voltage breakdown element 15 having a small current capacity can be adopted. For example, the secondary side charging current value of the step-up transformer 9 when charging the 50 μF storage capacitor 13 to 3000 Vdc in about 100 msec to 150 msec (t0 → tA) (depending on the transformer design) is about 1.0 A. Even if the voltage breakdown element 15 breaks down, the current flowing therethrough is about this level. If the rectifying element 14 is not inserted, the voltage breakdown type element 15 needs a current capacity equal to or higher than the lamp current (several tens of A to about 1000 A) to the flash discharge lamp 40. Therefore, it is necessary to insert the rectifying element 14 in order to reduce the capacity of the voltage breakdown type element 15.

  The control unit 30 also desirably generates an abnormality detection signal and stops the boost control circuit 7 if a charge completion signal is not generated internally even after a predetermined time has elapsed since the output of the charge start signal. Further, the determination of the occurrence of abnormality in the charging circuit and the stop of the booster circuit may be performed by the control unit 30 or may be performed by an external controller or the like via the interface 33.

  Further, the control unit 30 is provided with a notification unit 35, and the control unit 30 outputs an abnormality detection signal to the notification unit 35, so that the notification unit 35 notifies the user of the abnormality of the charging circuit and also prompts the inspection or repair. It may be. The notification means 35 can notify the above information visually (lamp display, liquid crystal display, etc.), auditory (beep sound, voice, etc.) or a combination thereof.

  Thus, according to the configuration of the charging circuit of the present embodiment, the charging voltage of the storage capacitor 13 breaks down even when the boosting circuit does not stop due to a malfunction even though the charging voltage reaches the charging set value. The voltage (and therefore the absolute maximum rating of the storage capacitor) can be avoided. In addition, by inserting the rectifying element 14 for preventing backflow, the voltage breakdown type element 15 can be reduced in capacity, and the charging circuit can be made small and low-cost.

Modification 1
In the above embodiment, the booster circuit is stopped based on the fact that the charge completion signal is not generated. However, in this modification, the booster circuit is stopped based on the voltage breakdown of the voltage breakdown element. Indicates. FIG. 5 shows a lighting device including the charging circuit of this modification. 1 is different from the embodiment shown in FIG. 1 in that a charging input detection unit comprising resistors 21 and 22 is connected between the output terminals of the diode bridge 10-12 (in this embodiment, connected in parallel to the voltage breakdown type element 15). The detected voltage is input to the control unit 30. Since the other points are the same as the configuration of the embodiment shown in FIG.

  As described with reference to FIG. 4A, the waveform of the charging input voltage when the voltage breakdown type element 15 is not broken down is a waveform in which the peak of the full-wave rectified waveform is clamped, and the charging input voltage is basically set to 0V. It will not stay. On the other hand, as shown in FIG. 4B, the charging input voltage remains substantially 0V during the period when the voltage breakdown type element 15 is voltage breakdown. Therefore, the control unit 30 can determine that the voltage breakdown type element 15 is conductive when detecting that the voltage detected by the charging input detection unit remains at 0 V for a certain period, and can generate an abnormality detection signal.

  Further, as shown in FIG. 4B, the charging input voltage sharply falls at the moment when the voltage breakdown element 15 breaks down. Therefore, the control unit 30 detects the differential value of the detected charge input voltage, and determines that the voltage breakdown element 15 is conductive when the absolute value of the differential value at the fall of the charge input voltage exceeds the threshold value. In this case, an abnormality detection signal may be generated.

  In addition, it is good also as a structure which connects a charge input detection part to the output terminal of some diode bridges (for example, diode bridge 12). Further, the control unit 30 generates an abnormality detection signal based on the logical product or logical sum of the determination result that the charge completion signal is not generated internally in the predetermined period and the determination result that the voltage breakdown type element 15 has voltage breakdown. It may be determined whether or not.

  Thus, according to the present modification, when the voltage breakdown element 15 breaks down, the control unit 30 can generate an abnormality detection signal, and the boost control circuit 7 can stop the full bridge circuit (3-6). Therefore, it is possible to extend the life of the voltage breakdown type element 15 by reducing the number of voltage breakdowns, and to reduce noise and power consumption due to the voltage breakdown operation.

Modification 2
In the above-described embodiment, the configuration in which the voltage breakdown of all the outputs of the diode bridge 10-12 is shown. However, in this modification, a configuration in which a part of the output of the diode bridge 10-12 is voltage breakdowned is shown. FIG. 6 shows a flash discharge lamp lighting device including a charging circuit according to this modification. The difference from the embodiment shown in FIG. 1 is that a voltage breakdown type element 15 'is connected so as to voltage breakdown the total output of the diode bridge 11-12. Here, the number of turns of the three secondary windings of the step-up transformer 9 is assumed to be equal, and the breakdown voltage of the voltage breakdown type element 15 ′ is about 2/3 of the breakdown voltage of the voltage breakdown type element 15 in the embodiment. And Since the other points are the same as the configuration of the embodiment shown in FIG.

  FIG. 7 shows a charge input waveform (voltage waveform between the node N1 and the node N2) during the operation of the voltage breakdown element 15 ′. As shown in FIG. 7, when the voltage applied to the voltage breakdown type element 15 ′ reaches the breakdown voltage, the voltage breakdown type element 15 ′ breaks down, and the charge input voltage in the voltage breakdown period is 1/3 of the case where there is no voltage breakdown. It becomes.

  While the voltage breakdown element 15 ′ is in voltage breakdown, the rectifying element 14 is in an off state. Therefore, at the time of voltage breakdown, the current flowing through the voltage breakdown type element 15 ′ is only the current generated in the secondary winding of the step-up transformer 9, that is, the step-up transformer 9. No current flows into 15 '. Further, at the time of voltage breakdown, a high voltage corresponding to the charging voltage of the storage capacitor 13 is not applied to the diode bridge 10. The position where the voltage breakdown type element 15 ′ is connected is not limited to the total output point of the diode bridges 11 and 12, and may be the total output point of the diode bridges 10 and 11.

  As described above, since the voltage breakdown type element 15 ′ is configured to breakdown a part of the boost output, the voltage breakdown type element 15 ′ can employ a smaller one having a low breakdown voltage.

Modification 3
In the above-described embodiment, the configuration using the voltage breakdown type element 15 having a breakdown voltage higher than the charge setting voltage is shown, but in this modification, the configuration using the voltage breakdown type element having a breakdown voltage equal to the charge setting value is shown. According to the configuration of the present modification, the charging voltage detection unit (16-17) can be omitted. 8A and 8B show a flash discharge lamp lighting device including a charging circuit according to this modification.

  In the lighting device shown in FIG. 8A, the breakdown voltage of the voltage breakdown type element 15 is equal to the charge set value and is 3000 Vdc. And although the lighting input device is provided with the charging input detection part (21-22), the charging voltage detection part (16-17) is not provided. Similar to the first modification, the control unit 30 detects that the voltage breakdown type element 15 is turned on based on the detection voltage from the charge input detection unit (21-22) and then connects the boost control circuit 7 to the full bridge circuit. (3-6) is stopped.

  The change in the charging voltage of the storage capacitor 13 during the charging operation is the same as in FIG. 3A. Referring to FIG. 3A, charging is started at t0, and when the charging voltage reaches the charge setting voltage, that is, the breakdown voltage (3000 V) at tA, the voltage breakdown element 15 breaks down. The control unit 30 detects the voltage breakdown operation based on the voltage from the charge input detection unit (21-22), and generates a charge completion signal. When the boost control circuit 7 receives the charge completion signal and stops the boost circuit, the charge voltage becomes constant at the charge set value. At tB, the control unit 30 outputs a start signal to the igniter circuit 19, and when the igniter circuit 19 is activated, the charge of the storage capacitor 13 is discharged to the flash discharge lamp 40, and the charging voltage is instantaneously reduced to several tens of volts.

  Also in the lighting device shown in FIG. 8B, the breakdown voltage of the voltage breakdown element 15 is equal to the charge setting voltage and is 3000V. On the other hand, the detection device and the control unit 30 are not provided in the lighting device. The boost control circuit 7 stops the full bridge circuit (3-6) when a predetermined time has elapsed from the start of the boost operation, and outputs a start signal to the igniter circuit 19. The change of the charging voltage in the storage capacitor 13 is the same as in FIG. 3A, but the full bridge circuit is stopped between tA and tB in the lighting device of FIG. 8A, whereas tA in the lighting device of FIG. 8B. And the full bridge circuit continues to operate between tB and the voltage breakdown state of the voltage breakdown type element 15 is maintained. In the configuration of FIG. 8B, a series of lighting control is simple. For example, if the boost control circuit 7 has a timer function, the control unit 30 can be omitted.

  Therefore, according to the configuration of the present modification, the voltage breakdown operation of the voltage breakdown type element 15 no longer functions as a part of the protection function but functions as a part of the charging voltage determination function. Thereby, each detection part or control part can be abbreviate | omitted, and the structure of a lighting device can be made simpler.

The charging circuit according to the present invention and the flash discharge lamp lighting device using the same have been described above. The light irradiator which is the application example is demonstrated below.
FIG. 9 shows the light irradiator of the present invention, with the upper part being a top view and the lower part being a side view. The light irradiator includes an irradiator 301 including a lamp, a lamp 340 (corresponding to the flash discharge lamp 40 in FIG. 1), a reflector 302, and a duct 303. A substrate 304 such as a semiconductor wafer to be irradiated is disposed to face the lamp 340 and the reflecting mirror 302. Further, it is preferable that the wiring between the trigger wire 20 attached to the lamp 340 and the igniter circuit 19 is short so that the high-pressure pulse from the igniter circuit 19 is not attenuated. Therefore, the igniter circuit 19 is provided in the irradiator 301. The reflector 302 is for efficiently reflecting the discharge light from the lamp to the object to be irradiated, and the duct 303 is a duct for intake or exhaust for cooling (air cooling) the lamp.

  Since the light irradiator to which the present invention is applied is equipped with a lighting device that protects the storage capacitor 13 even when the booster circuit does not stop due to a problem, the safety of the light irradiator can be further increased. Moreover, since the circuit components (rectifier element and voltage breakdown type element) to be added to the lighting device can be configured with small components, the lighting device does not increase in size and does not hinder mounting on the light irradiator. Furthermore, if the notification means 35 detects the abnormality when the charging circuit is abnormal, the maintenance and inspection work of the light irradiator becomes easy.

  The above light irradiator is used as an ultraviolet irradiation device for curing an ultraviolet curable tape to be applied to a semiconductor wafer substrate before separation or an ultraviolet curable coating to be applied to a semiconductor wafer substrate in a dicing process in semiconductor manufacturing. Can do. Moreover, said light irradiation device can be utilized also for the sterilization use which utilized the ultraviolet light of the short wavelength range contained in the radiant light of high illumination intensity for a short time.

In addition, although the said Example was shown as the most suitable example of this invention, the following is noted.
(1) In the embodiment, the input power supply is a single-phase power supply, but may be a three-phase power supply.
(2) In the embodiment, the rectifying units (1, 2) have been described as the so-called capacitor input type, but may be configured by a boost chopper circuit or the like. Note that when a DC power source is connected as an input power source, the rectifying unit may not be provided. In the case where the rectifying unit is configured by a boost chopper circuit, the boost function of the boost circuit may be provided on the boost chopper circuit side.
(3) In the embodiment, a combination of a full bridge inverter and a boost transformer is used as the boost circuit (3-9). However, the boost circuit is a combination of a half bridge inverter and a boost transformer, a flyback converter, a forward converter, or the like. There may be.
(4) In the embodiment, the storage capacitor 13 is shown as the storage element, but a battery may be used.
(5) In the embodiment, the configuration in which the signal transmission / reception between the control unit 30, the boost control circuit 7, the igniter circuit 19 and the notification unit 35 is performed by wire is shown, but the configuration may be performed by wireless communication.

1. 1. Rectifier circuit Smoothing capacitor 3-6. Transistor 7. Boost control circuit 8. Inductor 9. Step-up transformer 10-12. Diode bridge 13. Storage capacitor 14. Rectifier elements 15, 15 '. Voltage breakdown type element 16, 17. Resistor 18. Inductor 19. Igniter circuit 20. External trigger 21, 22. Resistance 30. Control unit 31. CPU
32. Memory 33. Input / output interface 35. Notification means 40. Flash discharge lamp

Claims (2)

A charging circuit,
A booster circuit for boosting the input voltage;
A storage circuit having a storage element and charging the output of the booster circuit to the storage element, wherein the first rectifier element rectifies the output of the booster circuit, and charging from the first rectifier element to the storage element A second rectifying element inserted into the path for preventing backflow, and an anode terminal side of the second rectifying element and connected between the output terminals of the first rectifying element, and a breakdown voltage is an absolute value of the storage element. A storage circuit with a discharge gap lower than the maximum rated value;
A charge input detector for detecting a voltage between output terminals of the first rectifier element on the anode terminal side of the second rectifier element;
It is configured to determine whether or not the discharge gap is conducted based on a charge input voltage detected by the charge input detection unit, and to stop the booster circuit when it is determined that the discharge gap is conducted. A charging circuit including a control unit. A flash discharge lamp lighting device,
A flash discharge lamp lighting device comprising: the charging circuit according to claim 1 ; and a starting circuit for causing the flash discharge lamp to break down and causing energy from the power storage element to be input to the flash discharge lamp.

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