JP6049181B2 - Hydrodynamic planar bearing structure and planar polishing apparatus - Google Patents

Description

  The present invention relates to a dynamic pressure planar bearing structure for rotating and supporting a rotating body, and a planar polishing apparatus for rotating and supporting a rotating body such as a surface plate by the dynamic pressure planar bearing structure.

  Planar polishing equipment is extremely reluctant to apply vibrations to the workpiece being polished. Therefore, a dynamic pressure planar bearing structure is adopted as a bearing for the surface plate that supports the workpiece. Such a dynamic pressure planar bearing structure will be described with reference to the drawings. As shown in FIG. 8, in the dynamic pressure planar bearing, the rotating body 103 of the lower surface plate support portion 102 is positioned in the hydrodynamic bearing plate 101 having a concave cross section, and supports the lower surface plate 104. In addition, the rotating body 107 of the internal gear support 106 is positioned in the hydrodynamic bearing plate 105 having a concave cross section, and supports the internal gear 108. In this way, the bottom surface 109 and the outer peripheral wall inner surface 110 of the fluid bearing plates 101 and 105 are opposed to each other to directly form a dynamic pressure planar bearing structure.

  As shown in FIG. 9, a plurality of bottom surface dynamic pressure generating portions 111 for thrust are arranged on the bottom surface of the hydrodynamic bearing plate 101. As shown in the enlarged cross-sectional view of the bottom surface dynamic pressure generating portion 111 formed at the bottom of the conventional fluid bearing tray 101 of FIG. 10, the bottom surface dynamic pressure generating portion 111 includes a central bearing portion 111a and the bearing portion 111a. And a concave portion 111c adjacent to the inclined portion 111b, and a force for floating the rotating body 103 is applied by the fluid flowing into the bearing portion 111a from the concave portion 111c or the inclined portion 111b. Due to the inclined portions 111b on both sides, dynamic pressure can be generated in the rotating body 103 in either direction of the rotating direction 113 of the rotating body 103. A similar bottom dynamic pressure generating portion (for thrust) 111 is also formed in the fluid bearing plate 105.

  Further, as shown in FIG. 9, a plurality of radial side dynamic pressure generators 112 are arranged on the side surface of the hydrodynamic bearing plate 101. The side surface dynamic pressure generating portion 112 includes a central bearing portion 112a and the bearing portion as shown in the enlarged cross-sectional view of the side surface dynamic pressure generating portion 112 formed on the outer side of the conventional fluid bearing plate 101 of FIG. Inclined portions 112b on both sides of 112a are provided, and dynamic pressure acts on the rotating body 103 toward the center side in the radial direction by the fluid flowing into the bearing portion 112a from the inclined portions 112b. The dynamic pressure can be generated in the rotating body 103 regardless of the rotation direction 113. A similar side dynamic pressure generating portion (for radial use) 112 is also formed in the hydrodynamic bearing plate 105.

  Further, as another example of the prior art of a planar polishing apparatus employing such a dynamic pressure planar bearing structure, Patent Document 1 (Japanese Patent Laid-Open No. 52-56489, “Precision Lapping Machine”) is disclosed. This prior art relates to a precision lapping machine that reduces high-speed and high lapping pressure processing by reducing vibration in the lapping platen as a dynamic pressure plane bearing that supports the thrust and radial loads of the rotating lapping platen respectively. Is.

  In this way, by receiving the thrust and radial loads on the rotation axis of the lapping machine with the hydrodynamic plane bearing, large rigidity is secured even for high load forces, no vibration is generated even at high speed rotation, and external Therefore, high-precision and stable lap motion can be ensured, and the shape of the lap surface is accurately transferred to the workpiece processing surface, so that a highly accurate processing surface can be obtained.

  Further, as another example of the prior art of a planar polishing apparatus that employs a dynamic pressure planar bearing structure, Patent Document 2 (Japanese Patent Laid-Open No. 8-174408, “planar polishing apparatus”) is disclosed. This prior art prevents vibration during machining by making at least the internal gear a fluid bearing structure among the rotatable sun gear and internal gear that planetarily moves the work carrier holding the work, and as a result, the carrier This structure prevents the carrier from being deformed or damaged, and at the same time, improves the machining accuracy of the workpiece.

  In particular, when the size of the internal gear increases and the diameter of the internal gear increases, this tendency becomes more prominent.Therefore, the internal gear has a fluid bearing structure in order to improve carrier protection and polishing accuracy. It is said to be effective.

Further, as another example of the prior art of a planar polishing apparatus that employs a dynamic pressure planar bearing structure, Patent Document 3 (Japanese Patent Laid-Open No. 2002-66910, “Polishing apparatus”) is disclosed. In this conventional technology, the bearing structure of each rotating body of the planar polishing apparatus is a fluid bearing in which both the radial and thrust directions are integrated, so that cracks and chips during processing and accuracy after processing are not reduced. It has a structure that does not generate vibration and rotation unevenness.
The conventional hydrodynamic planar bearing structure and planar polishing apparatus are such.

JP 52-56489 A JP-A-8-174408 JP 2002-66910 A

  As a function of a general dynamic pressure planar bearing structure, the rotating body and the bearing surface generate a pressure (dynamic pressure) in the lubricating fluid film interposed in the bearing gap by relative sliding motion, thereby supporting a relatively large load. It is to be. At this time, the rotator side (the one free in the thrust direction) floats slightly, but the flying height tends to increase in proportion to the rotational speed of the rotator. It should be noted that when the rotating body is stopped, it can be said to be in a substantially contact state.

  Therefore, when the dynamic pressure planar bearing structure is applied as a bearing of a planar polishing apparatus, it can be applied relatively easily as a structure for supporting a load in the vertical direction, that is, in the thrust direction, but in the radial direction of the rotating body, that is, in the radial direction. It has been difficult to apply as a structure that supports the load of the above or a structure that keeps the axis of the rotating body constant.

  This is because the clearance between the rotating body and the bearing surface in the radial direction is an amount determined by the design value and manufacturing accuracy of each member. When the rotating body is stopped, this gap becomes a backlash of the rotating body when viewed from the bearing surface. Therefore, this gap is designed and manufactured in a direction to make it as small as possible.

  On the other hand, when the rotating body is rotating, the magnitude of the dynamic pressure generated in the lubricating fluid film interposed in the bearing gap is determined by the gap amount with the bearing surface, the rotational speed of the rotating body, etc. large. In other words, if this gap is small or the rotational speed of the rotating body is low (of course there is also a correlation with how to make the bearing surface and the number of arrangements), it will not function as a radial bearing if the pressure does not rise sufficiently. As a result, rolls are generated in the rotating body, which may cause a vibration source and decrease the machining accuracy of the workpiece.

  Thus, for example, when the annular ring at the lower part of the lower platen is inserted and fitted into the annular groove provided in the bearing base, the clearance between the outer peripheral surface of the annular ring and the inner peripheral surface of the annular groove on the bearing base is If this is small, it will interfere with each other and the fitting itself will not be possible.On the other hand, if this gap is large, there will be no problem with the fitting work, but the function as a fluid bearing will be insufficient, and the lateral displacement of the lower surface plate in the radial direction will not be possible. Ensuring the hydrodynamic bearing performance in the radial direction, such as vibration, has been a major issue. In particular, in the case of a dynamic pressure planar bearing structure of a large surface polishing apparatus, it is difficult to ensure the outer diameter accuracy of the annular ring outer peripheral surface and the inner diameter accuracy of the annular groove inner peripheral surface after assembly of each member. there were.

  Furthermore, the shape of the dynamic pressure generation part (cut, slope, horizontal plane) is formed on the annular ring side of the rotating body or on the annular groove side of the bearing stand. Since fine additional machining is performed, the machining operation itself is complicated, requiring a lot of machining time, and it is difficult to ensure machining accuracy.

  Furthermore, the above-described method has a problem that it is difficult to ensure the fluid bearing performance because the gap cannot be adjusted at all in the radial direction.

  In the above-mentioned Patent Document 1, there is a description that the dynamic pressure plane bearing structure is used in both the thrust direction and the radial direction of the lower surface plate bearing part, but there is no description for expressing the bearing function in the radial direction.

  Further, in Patent Document 2, there is a description that at least the bearing of the internal gear is a fluid bearing, but no description for expressing the bearing function in the radial direction is seen as in the above.

  Further, in Patent Document 3, although there is a description that the fluid bearing is formed by integrating both the thrust direction and the radial direction of each rotating body, there is a description for expressing the bearing function in the radial direction as described above. Absent.

  In either case, if the rolling and vibration of the lower platen in the radial direction, or the rolling and vibration of the internal gear occur, the effect is reduced even if the hydrodynamic bearing structure is applied in the thrust direction. Therefore, it has been difficult to prevent damage to the carrier and the workpiece and to secure the machining accuracy of the workpiece.

  Therefore, the present invention has been made in view of the above-described problems, and an object of the present invention is to adopt a dynamic pressure planar bearing structure that is resistant to vibration in the thrust direction and the radial direction, and to adopt this dynamic pressure plane bearing structure. An object of the present invention is to provide a planar polishing apparatus that improves the polishing accuracy by suppressing the vibration of the disc and the internal gear.

In order to achieve the above object, the dynamic pressure planar bearing structure according to claim 1 is a dynamic pressure planar bearing structure that supports a rotating body.
The dynamic pressure generated perpendicularly to the annular horizontal surface of the rotating body, a first dynamic pressure generating portion a plurality of supporting the vertical load of the rotating body,
And said dynamic pressure generated perpendicular to the annular inclined surface formed on the outer peripheral side of the rotating body, a second dynamic pressure generating portion a plurality of supporting the vertical load and radial load of the rotating body,
Equipped with a,
The plurality of first dynamic pressure generating portions are manufactured as a common part, and are detachably arranged at regular intervals along the rotation direction of the rotating body in a fluid bearing plate, and the plurality of second dynamic pressures The generating part is manufactured as a common part and is detachably disposed at regular intervals along the rotational direction of the rotating body in the fluid bearing plate,
The surface contact state between the rotating body, the first dynamic pressure generating unit, and the second dynamic pressure generating unit can be adjusted .

The dynamic pressure planar bearing structure according to claim 2 is the dynamic pressure planar bearing structure according to claim 1, wherein the rotating body, the plurality of first dynamic pressure generating portions, and the plurality of second dynamic pressure generating portions. Is set to be substantially zero when the rotating body is stopped.

The plane polishing apparatus according to claim 3 is a plane polishing apparatus that presses a work against a lower surface plate and polishes the work by rotating a work relative to a work carrier meshing with an internal gear and a sun gear,
The rotating body in the dynamic pressure planar bearing structure according to claim 1 or 2 is a part of a lower surface plate and / or an internal gear.

  According to the present invention as described above, the dynamic pressure planar bearing structure that is resistant to vibration in the thrust direction and the radial direction, and the dynamic pressure planar bearing structure are employed to suppress the vibration of the lower surface plate and the internal gear and perform polishing. A planar polishing apparatus with improved accuracy can be provided.

1 is a longitudinal sectional view of a dynamic pressure planar bearing structure and a planar polishing apparatus according to an embodiment for carrying out the present invention. It is a top view of the dynamic pressure plane bearing structure of the form for implementing this invention. It is the A section enlarged view of the dynamic pressure plane bearing structure for lower surface plates concerning the dynamic pressure plane bearing structure of the form for implementing this invention. It is the B section enlarged view of the dynamic pressure plane bearing structure for internal gears which concerns on the dynamic pressure plane bearing structure of the form for implementing this invention. It is CC sectional enlarged view of a 1st dynamic pressure generation part. It is a DD sectional enlarged view of the 2nd dynamic pressure generating part. It is a cross-sectional enlarged view of the dynamic pressure plane bearing structure for internal gears of the other form for implementing this invention. It is a longitudinal cross-sectional view of the planar polishing apparatus of a prior art. It is a top view showing a fluid bearing tray. It is an EE cross-sectional enlarged view of a bottom surface dynamic pressure generating part. It is the F section enlarged view showing a side dynamic pressure generating part.

Then, the form for implementing the dynamic-pressure planar bearing structure and planar polishing apparatus of this invention is demonstrated, referring FIGS. 1-5.
The surface polishing apparatus 1 includes a lower surface plate 10, a lower surface plate receiver 11, a lower surface plate, as shown in a longitudinal sectional view of a main part of the surface polishing apparatus in FIG. Drive shaft 12, internal gear 13, internal gear receiver 14, internal gear drive gear 15, gear drive shaft 16, sun gear 17, sun gear drive shaft 18, carrier 19, work 20, base portion 21, intermediate base A portion 22, a dynamic pressure planar bearing structure 23 for lower surface plate, and a dynamic pressure planar bearing structure 24 for internal gears are provided.

Next, each configuration will be described.
The lower surface plate 10 is an annular disk and has a lap surface / polish surface for polishing the workpiece 20 on the upper surface. Although not shown, a polishing cloth (not shown) may be attached to the upper surface of the lower surface plate 10 and the workpiece may be polished with the polishing cloth. Although not shown, the upper surface plate may be provided. In this case, the lower surface plate 10 and the upper surface plate are supported so as to rotate around the common rotation axis.

  The lower surface plate receiver 11 has the lower surface plate 10 fixed on the upper side, and rotates the lower surface plate 10 with its own rotation. The lower surface plate receiver 11 is supported from the lower side by the lower surface plate dynamic pressure planar bearing structure 23 which is the dynamic pressure planar bearing structure of the present invention, and is smoothly rotated.

  The lower surface plate drive shaft 12 is connected to the lower surface plate receiver 11 and rotates the lower surface plate receiver 11 and the lower surface plate 10. The lower surface plate drive shaft 12 is provided with a lower surface plate drive unit (not shown), and controls the rotational speed and direction of the lower surface plate 10 via the lower surface plate drive shaft 12 and the lower surface plate receiver 11.

The internal gear 13 is disposed on the outer peripheral side of the lower surface plate 10. Teeth are formed on the inner peripheral side of the internal gear 13. The internal gear 13 is fixed to the internal gear receiver 14.
The internal gear receiver 14 is a stepped cylindrical body, and is supported from the lower side by a dynamic pressure planar bearing structure 24 for an internal gear that is a dynamic pressure planar bearing structure of the present invention, so that it rotates smoothly. ing. An internal gear fixed integrally with the internal gear receiver 14 is formed on the lower side of the internal gear receiver 14.

The internal gear drive gear 15 is integrally fixed to the upper end of the gear drive shaft 16. The internal gear drive gear 15 meshes with the internal gear on the lower side of the internal gear receiver 14.
The gear drive shaft 16 is rotationally driven by an internal gear drive unit (not shown).

  Therefore, the internal gear drive section, the gear drive shaft 16, the internal gear drive gear 15, the internal gear on the lower side of the internal gear receiver 14, the internal gear receiver 14, the internal gear 13 and the torque are not shown. The internal gear drive unit controls the rotational speed and direction of the internal gear 13.

The sun gear 17 is disposed on the inner peripheral side (center side) of the lower surface plate 10. Teeth are formed on the outer peripheral side of the sun gear 17.
The sun gear drive shaft 18 is connected to the sun gear 17 at the tip. The sun gear drive shaft 18 is rotationally driven by a sun gear drive unit (not shown) at the lower end. The sun gear drive shaft 18 is loosely inserted into the center hole of the lower surface plate drive shaft 12 so that the lower surface plate drive shaft 12 and the sun gear drive shaft 18 rotate independently of each other. In summary, the lower surface plate drive shaft 12 is rotatably supported by a shaft support (not shown), and the sun gear drive shaft 18 is rotatably supported by the lower surface plate drive shaft 12.

  The carrier 19 is disposed on the lower surface plate 10 as shown in FIG. The carrier 19 has teeth formed on the outer periphery and meshes with the internal gear 13 and the sun gear 17. A work holding hole for holding the work 20 in the carrier 19 is formed. Various carriers 19 are prepared according to the workpiece 20, and one carrier holding hole is formed in one carrier 19, or a plurality of workpiece holding holes are formed. Or

  There are three drive units, a lower platen drive unit, a sun gear drive unit, and an internal gear drive unit, and if there is an upper platen, all four drive units including the upper platen drive unit are motors. It is connected to the driver device, and the rotation is controlled by the arithmetic control unit, and the optimum wrapping and polishing is performed by adjusting the rotation speed.

The base portion 21 is fixed to a solid base (not shown). An annular dynamic pressure planar bearing structure 24 for an internal gear is provided on the upper side of the outer periphery of the base portion 21. The internal pressure gear dynamic pressure planar bearing structure 24 has a configuration shown in detail in FIG.
The intermediate base portion 22 is annular and is formed on the upper side of the base portion 21, and an annular lower surface plate dynamic pressure planar bearing structure 23 is provided on the upper side of the intermediate base portion 22. The lower surface plate dynamic pressure planar bearing structure 23 has a configuration shown in detail in FIG.

Next, a dynamic pressure planar bearing structure that characterizes the present invention will be described. First, the dynamic pressure planar bearing structure 23 for the lower surface plate will be described.
As shown in FIG. 3, the lower surface plate dynamic pressure planar bearing structure 23 includes a lower surface plate hydrodynamic bearing plate 231, a rotating body 232, and a plurality of (8 in this embodiment, as shown in FIG. 2) lower surface plate first. There are provided a plurality of dynamic pressure generating units 233 and a plurality of (8 in this embodiment, as shown in FIG. 2) second dynamic pressure generating units 234 for the lower surface plate.

  The lower surface plate hydrodynamic bearing plate 231 has an annular shape in plan view as shown in FIG. 2 and is formed in a concave cross section as shown in FIG. 3, and an oil tank 231a for the lower surface plate is formed therein. Lubricating oil is stored in the lower surface plate oil tank 231a.

  The rotator 232 has a ring shape in plan view and is integrally fixed on the lower side of the lower surface plate receiver 11, and an annular rotator horizontal portion 232b provided on the inner peripheral side of the lower surface of the ring body 232a. And a rotating body inclined portion 232c having a frustoconical outer peripheral surface which is provided on the outer peripheral side of the lower surface of the ring body 232a and has a positive inclination rising toward the outer peripheral side.

  As shown in FIG. 2, the plurality of lower surface plate first dynamic pressure generating portions 233 are on the bottom surface, which is an annular horizontal surface in the lower surface plate oil tank 231 a of the lower surface plate fluid bearing tray 231. And a plurality (eight in this embodiment) are provided at regular intervals in the rotation circumferential direction.

  The first dynamic pressure generating section 233 for the lower surface plate has a basic structure as shown in an enlarged view showing a CC cross section of FIG. The lower surface plate first dynamic pressure generating portion 233 further includes a bearing portion 233a, inclined portions 233b on both sides, and cut portions 233c on both sides, and is a multi-stage surface in a cross-sectional view formed symmetrically. In the case of rotating in one direction, it is not necessary to form it symmetrically, but in this embodiment, it is configured symmetrically so that it functions as a hydrodynamic bearing regardless of whether the rotating direction of the rotating body is normal or reverse. Yes.

  The bearing portion 233a is a flat surface located at the maximum height with respect to the bottom surface of each fluid bearing tray, and the inclined portions 233b on both sides are inclined so as to rise toward the bearing portion 233a which is the flat surface. The cut portion 233c is formed so that the bottom surface is further below the end portion of the inclined portion 233b. The notch 233c has a bolt mounting hole, and the first dynamic pressure generating part 233 for the lower surface plate is fixed to the bottom surface of the fluid bearing plate 231 with a fixing bolt (vertical direction) 235.

  The upper surfaces of the respective bearing portions 233a of the plurality of first dynamic pressure generating portions 233 for the lower surface plate are located on the same horizontal plane that is annular, and as shown in FIG. 5, the rotating body horizontal portion 232b of the rotating body 232 Opposite to. At the time of stopping, the rotating body horizontal portion 232b of the rotating body 232 and the bearing portion 233a come into contact with each other and stop. When the rotating body 232 rotates, the first dynamic pressure generating unit 233 for the lower surface plate generates a vertical dynamic pressure with respect to the upper bearing part 233a formed horizontally, and the vertical load of the rotating body 232 is generated. (Thrust load) is supported. The first dynamic pressure generating unit 233 for the lower surface plate is as described above.

  As shown in FIG. 2, a plurality of lower surface plate second dynamic pressure generators 234 are arranged at regular intervals in the rotational circumferential direction on the outer peripheral side of the lower surface plate oil tank 231a. Eight in the form) are provided.

  The second dynamic pressure generating unit 234 for the lower surface plate has a basic structure as shown in an enlarged view showing a DD cross section of FIG. The lower surface plate second dynamic pressure generating portion 234 further includes a bearing portion 234a and inclined portions 234b on both sides, and has a multi-stage shape that is symmetrical with respect to a circular arc surface in the cross-sectional view. The bearing portion 234a is an arc surface that comes into contact with the rotating body inclined portion 232c of the rotating body 232 when the rotating body is stationary, and the inclined portions 234b on both sides thereof are inclined so as to rise toward the bearing portion 234a that is the arc surface. And functions as a lubricant introduction surface.

  The lower surface plate second dynamic pressure generating section 234 is fixed along the bottom surface and the outer peripheral wall arc surface of each fluid bearing plate. When this member is also rotated in one direction, it is not necessary to form it symmetrically, but in this embodiment, it is symmetrical so that it can function as a hydrodynamic bearing regardless of whether the rotating body is rotating forward or reverse. It is composed.

The circular arc surface of each bearing portion 234a included in the plurality of second dynamic pressure generating portions 234 for the lower surface plate is located on a frustoconical inner peripheral surface that tapers downward, and as shown in FIG. It faces a rotating body inclined portion 232c having a truncated cone-shaped outer peripheral surface that tapers in the shape of a circle.
The second dynamic pressure generating section 234 for the lower surface plate generates a vertical dynamic pressure with respect to the bearing section 234a that inclines so as to rise toward the outer peripheral side, and the vertical load (thrust load) of the rotating body 232 is generated. ) And radial loads (radial loads).

  In such a lower surface plate dynamic pressure planar bearing structure 23, as shown in the plan view of FIG. 2, the first dynamic pressure generating portion 233 is constant in the rotation direction on the inner peripheral side of the lower surface plate fluid bearing plate 231. A plurality of (8 in this embodiment) are provided at intervals, and a plurality of second dynamic pressure generators 234 are provided at regular intervals in the rotation direction on the inner peripheral side of the lower surface plate hydrodynamic bearing plate 231 (8 in this embodiment). ) Is provided.

  And the 1st dynamic pressure generation part 233 and the 2nd dynamic pressure generation part 234 are provided with a plurality of sets (8 sets in this embodiment) at regular intervals in the rotation direction. The plurality of first dynamic pressure generating parts 233 are manufactured as one common part, and the second dynamic pressure generating part 234 is manufactured as one common part, so that there are no processing restrictions.

  In addition, as described above, the shape of the ring body 232a of the lower surface plate receiver 11 is such that the bottom surface has the rotating body horizontal portion 232b and the rotating body inclined portion 232c with the outer peripheral corners cut into a chamfered shape. It is processed in advance so as to follow the bearing portion 233a of the first dynamic pressure generating portion for board 233 and the bearing portion 234a of the second dynamic pressure generating portion for lower surface plate 234. Here, although the surface contact state is not always guaranteed due to the processing dimension error of the lower surface plate receiver 11, the processing dimension error or installation error of the lower surface plate fluid bearing tray 231, or various deformations of both, the lower surface plate receiver 11 is not guaranteed. It is possible to deal with it relatively easily by adjustment work that adjusts the contact state with each of the dynamic pressure generating members (adjustment of the fixed position of the dynamic pressure generating member, additional machining, etc.).

  In the lower surface plate dynamic pressure planar bearing structure 23 as described above, when the rotating body is stopped, the rotating body 232 between the rotating body horizontal portion 232b of the rotating body 232 and the bearing portion 233a of the first dynamic pressure generating portion 233, and the rotating body. The gap between the rotating body inclined portion 232c of 232 and the bearing portion 234a of the second dynamic pressure generating portion 234 is designed to be substantially zero. Thereby, at the time of a stop, these contact | abut substantially and are fixed. Then, when the rotating body 232 rotates, a dynamic pressure is generated to function as a dynamic pressure bearing. The lower surface plate dynamic pressure planar bearing structure 23 is as described above.

Next, a dynamic pressure planar bearing structure 24 for internal gears will be described as a dynamic pressure planar bearing structure that characterizes the present invention.
As shown in FIG. 4, the internal gear dynamic pressure planar bearing structure 24 includes an internal gear fluid bearing plate 241, a rotating body 242, and a plurality of (in this embodiment, eight) internal gear first dynamic pressure generation. Part 243 and plural (eight in this embodiment) internal gear second dynamic pressure generating parts 244 are provided.

  The internal gear dynamic pressure planar bearing structure 24 is obtained by changing the size of the lower surface plate dynamic pressure planar bearing structure 23. Since the weights of the internal gear 13 and the internal gear receiver 14 are relatively smaller than the weights of the lower surface plate 10 and the lower surface plate receiver 11, the radial width of the internal pressure dynamic pressure planar bearing structure 24 is reduced. However, the basic structure of the hydrodynamic bearing is similar. Except for the differences in dimensions, the internal gear fluid bearing tray 241 has the same configuration and function as the lower surface plate fluid bearing tray 231, and the rotating body 242 has the same configuration and function as the rotating body 232. The internal gear first dynamic pressure generator 243 has the same configuration and function as the lower surface plate first dynamic pressure generator 233, and the internal gear second dynamic pressure generator 244 is the lower surface plate second dynamic pressure. The generator 234 has the same configuration and function. For this reason, the overlapping description is omitted.

  In such an internal gear dynamic pressure planar bearing structure 24, the internal gear 13 is supported by the internal gear fluid bearing tray 241 via the internal gear receiver 14, and the internal gear fluid bearing tray 241. The first dynamic pressure generator 243 for internal gears is fixed at a constant interval in the rotational direction on the inner peripheral side of the bottom surface of the inner gear, and the second dynamic pressure for internal gears is fixed on the outer peripheral side of the bottom surface of the internal gear fluid bearing plate 10. Similarly, the generator 24 is fixed at regular intervals in the rotational direction.

  Further, in such a dynamic pressure planar bearing structure 24 for an internal gear, when the rotating body is in a stopped state, between the rotating body horizontal portion 242b of the rotating body 242 and the bearing portion of the first dynamic pressure generating portion 243, and The gap between the rotating body inclined portion 242c of the rotating body 242 and the bearing portion of the second dynamic pressure generating portion 244 is designed to be substantially zero. Thereby, at the time of a stop, these contact | abut substantially and are fixed. When the rotating body 242 rotates, a dynamic pressure is generated and functions as a dynamic pressure bearing. The internal pressure gear dynamic pressure planar bearing structure 24 is as described above.

  Subsequently, a specific processing operation of the planar polishing apparatus 1 of the present embodiment will be described. First, an installation process for installing the workpiece 20 on the workpiece carrier 19 is performed. This installation process is the same as in the prior art. For example, as shown in FIG. 1, the workpiece 20 is mounted in a workpiece holding hole drilled in the workpiece carrier 19. This mounting may be automated by using a workpiece handling robot or the like to mount the workpiece 20 on the workpiece carrier 19 and to remove the workpiece 20 from the workpiece carrier 19. Finally, a work carrier 19 is disposed on the lower surface plate 10. A workpiece 20 to be lapped or polished is held in a workpiece holding hole formed in the workpiece carrier 19.

  Subsequently, each unit is operated. The lower surface plate 10 receives a driving force from the lower surface plate rotation driving unit, and rotates according to the driving force. As will be described later, the lower surface plate 10 and the lower surface plate receiver 11 rotate smoothly by a dynamic pressure planar bearing structure 23 for the lower surface plate. And the sun gear 17 is rotationally driven by the sun gear rotational drive part, and the internal gear 13 is rotationally driven by the internal gear rotational drive part. As will be described later, the internal gear 13 rotates smoothly by a fluid bearing. The tooth surface on the outer periphery of the work carrier 19 meshes with the sun gear 17 and the internal gear 13, and the work carrier 19 starts planetary motion. At this time, an upper surface plate (not shown) is placed.

  Subsequently, the workpiece is processed. At the time of processing the workpiece 200, the upper surface plate and the lower surface plate 10 are rotated while supplying rinse and slurry from a slurry supply hole provided in the upper surface plate. Further, by rotating the sun gear 17 and the internal gear 13, the work carrier 19 on which the work 20 sandwiched between the upper surface plate and the lower surface plate 10 is rotated and revolves, and both surfaces of the work 20 are polished. The

  The rotation of the upper surface plate, the lower surface plate 10, the sun gear 17, and the internal gear 13 is controlled by the upper surface plate rotation drive unit, the lower surface plate rotation drive unit, the sun gear rotation drive unit, and the internal gear rotation drive unit, respectively. For example, optimal polishing is performed by adjusting the rotation speed by a control device connected to each of these driving units. Finally, the workpiece after polishing is taken out. The machining operation is like this.

  Details of the operation of the lower surface plate dynamic pressure planar bearing structure 23 and the internal gear dynamic pressure planar bearing structure 24 during this machining operation will be described. The structure and function of the lower surface plate dynamic pressure planar bearing structure 23 and the internal gear dynamic pressure planar bearing structure 24 are the same, so only the lower surface plate dynamic pressure planar bearing structure 23 will be described. Description of the dynamic pressure planar bearing structure 24 is omitted.

  The lower surface plate dynamic pressure planar bearing structure 23 functions as a dynamic pressure bearing that generates a dynamic pressure for floating the surface plate when the surface plate rotates. At the start of rotation, a large number of supply holes for supplying pressure fluid (lubricant oil, water, lubricating liquid, etc.) to the rotating body horizontal portion 232b of the rotating body 232 are provided to function as a static pressure bearing that raises the lower surface plate 10. You may do it.

  When the rotation of the rotating body 232 exceeds a predetermined speed, the lower surface plate first dynamic pressure generating section 233 of the lower surface plate dynamic pressure planar bearing structure 23, as shown in FIG. Lubricating oil enters between the portion 232b and the bearing portion 233a of the first dynamic pressure generating portion 233 for the lower surface plate while being compressed by the inclined portion 232b, and the levitation force is applied to the rotator 232 so that the rotator 232 is moved upward. It is supported to lift up and functions as a dynamic pressure bearing. Thereby, a vertical dynamic pressure is generated with respect to the upper bearing surface, and the vertical load (thrust load) of the rotating body 232 is supported.

  Further, in the lower surface plate second dynamic pressure generating portion 234 for the lower surface plate dynamic pressure planar bearing structure 23, as shown in FIG. 6, the rotating body inclined portion 232c of the upper surface rotating body 232 and the second surface plate second dynamic surface motion. Lubricating oil enters between the bearing portion 234a of the pressure generating portion 234 while being compressed by the inclined portion 234b, and supports the levitation force to be applied to the rotator 232 to lift the rotator 232 obliquely upward. It functions as a pressure bearing. Thereby, a vertical dynamic pressure is generated with respect to the upper rotating body inclined portion 232c, and the vertical load (thrust load) and radial load (radial load) of the rotating body 232 are supported. The lower surface plate dynamic pressure planar bearing structure 23 and the internal gear dynamic pressure planar bearing structure 24 function in this way.

  According to the present embodiment described above, the rotating body 232 is in contact with the lower surface plate first dynamic pressure generating section 233 and the lower surface plate second dynamic pressure generating section 234 when the surface plate starts to rotate, and is stable. In addition, when the platen is rotated, it functions as a hydrodynamic bearing to which a floating force due to dynamic pressure fluctuations is added, so that a sufficient floating force can be applied to a large lower platen. Furthermore, the forward and reverse rotation is possible, and the polishing ability is improved. Further, a fluid may be supplied from the lower side to act as a hydrostatic bearing so as to achieve a stable rotational rise. In particular, since the gap can be set to nearly zero, dynamic pressure can be generated reliably.

Subsequently, a reference embodiment of the present invention will be described. FIG. 7 is an enlarged view of the internal gear bearing structure portion representing this embodiment. As shown in FIG. 7, the internal gear dynamic pressure planar bearing structure 25 includes an internal gear fluid bearing plate 251, a rotating body 252, a plurality of first internal gear first dynamic pressure generators 253, and a plurality of internal teeth. A gear second dynamic pressure generator 254 is provided.

  As compared with the internal gear dynamic pressure planar bearing structure 25 described above, the internal gear dynamic pressure planar bearing structure 25 has a positive inclination on the inner peripheral side with respect to the ring body 252a of the rotating body 252. An inner peripheral inclined surface 252b having a truncated cone shape that tapers upward on the inner peripheral side, and an outer peripheral inclined surface having a frustoconical outer peripheral shape that tapers downward so as to have a positive inclination on the outer peripheral side. 252c, and the internal gear first dynamic pressure generating portion 253 has an annular inclined surface having a positive inclination on the inner peripheral side, and the internal gear second dynamic pressure generating portion 254. Has an annular inclined surface having a positive inclination on the outer peripheral side.

  Generates a dynamic pressure perpendicular to the annular inclined surface having a positive inclination on the inner peripheral side of the first dynamic pressure generating portion 253 for the internal gear, and supports the vertical load and the radial load of the rotating body, Further, a dynamic pressure is generated perpendicularly to an annular inclined surface having a positive inclination on the outer peripheral side of the second gear generating portion 254 for the internal gear to support the vertical load and the radial load of the rotating body. . The internal gear first dynamic pressure generator 253 and the internal gear second dynamic pressure generator 254 are fixed by fixing bolts (horizontal direction) 255.

  In this embodiment, the hydrodynamic planar bearing structure 25 has been described as being used for an internal gear. However, the present invention is not limited to this and may be applied to a lower surface plate, and various applications are possible.

The hydrodynamic planar bearing structure and planar polishing apparatus of the present invention have been described above.
In the present invention, the description has been made assuming that each of the support portions supporting the internal gear and the lower surface plate adopts a fluid bearing. However, the effects of the present invention can also be achieved by a configuration in which a fluid bearing is employed only for the internal gear, or a configuration in which a fluid bearing is employed only for the lower surface plate.

  Such a dynamic pressure planar bearing structure and a planar polishing apparatus of the present invention are particularly suitable for use in polishing one or both surfaces of a workpiece formed of silicon, glass, metal or other various materials.

1: Surface polishing apparatus 10: Lower surface plate 11: Lower surface plate receiver 12: Lower surface plate drive shaft 13: Internal gear 14: Internal gear receiver 15: Internal gear drive gear 16: Gear drive shaft 17: Sun gear 18: Sun gear drive shaft 19: carrier 20: workpiece 21: base portion 22: intermediate base portion 23: dynamic pressure planar bearing structure for lower surface plate 231: fluid bearing plate for lower surface plate 231a: oil tank for lower surface plate 232: rotating body 232a: ring Body 232b: Rotating body horizontal part 232c: Rotating body inclined part 233: First dynamic pressure generating part for lower surface plate 233a: Bearing part 233b: Inclined part 233c: Cut part 234: Second dynamic pressure generating part for lower surface plate 234a: Bearing portion 234b: Inclined portion 235: Fixing bolt 24: Internal pressure dynamic pressure flat bearing structure 241: Internal gear fluid bearing plate 241a: Internal gear oil tank 242: Rotating body 243: First gear for internal gear Generator 244: Internal gear second dynamic pressure generator 245: Fixing bolt 25: Internal gear dynamic pressure planar bearing structure 251: Internal gear fluid bearing plate 251a: Internal gear oil tank 252: Rotating body 253 : Internal gear first dynamic pressure generator 254: Internal gear second dynamic pressure generator 255: Fixing bolt

Claims (3)

In the dynamic pressure planar bearing structure that supports the rotating body,
The dynamic pressure generated perpendicularly to the annular horizontal surface of the rotating body, a first dynamic pressure generating portion a plurality of supporting the vertical load of the rotating body,
And said dynamic pressure generated perpendicular to the annular inclined surface formed on the outer peripheral side of the rotating body, a second dynamic pressure generating portion a plurality of supporting the vertical load and radial load of the rotating body,
Equipped with a,
The plurality of first dynamic pressure generating portions are manufactured as a common part, and are detachably arranged at regular intervals along the rotation direction of the rotating body in a fluid bearing plate, and the plurality of second dynamic pressures The generating part is manufactured as a common part and is detachably disposed at regular intervals along the rotational direction of the rotating body in the fluid bearing plate,
A dynamic pressure planar bearing structure characterized in that the surface contact state between the rotating body and the first dynamic pressure generating portion and the second dynamic pressure generating portion can be adjusted . The clearance between the rotating body and the plurality of first dynamic pressure generating sections and the plurality of second dynamic pressure generating sections is set to be substantially zero when the rotating body is stopped. The dynamic pressure planar bearing structure according to claim 1. A work polishing machine that presses the work against the lower surface plate and that rotates the work relative to the work carrier meshing with the internal gear and the sun gear to polish the work,
3. The flat polishing apparatus according to claim 1, wherein the rotating body in the dynamic pressure planar bearing structure according to claim 1 is a part of a lower surface plate and / or an internal gear.

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