JP6043714B2 - Seal member - Google Patents

Description

  In the present invention, a first annular groove to be fitted to the first part is provided on one surface, a second annular groove to be fitted to the second part is provided on the other surface, and the first and second annular grooves are provided to the first and second annular grooves. The present invention relates to a sealing member having first and second press-fitting allowances.

  Conventionally, for chemical control in semiconductor manufacturing processes and liquid crystal manufacturing processes, valves such as flow control valves and on-off valves, sensors such as filters, pressure sensors and flow sensors, piping blocks such as joint blocks and flow path blocks Fluid equipment is used. In recent years, in order to make the apparatus compact, connecting portions of these fluid devices are directly connected using a seal member to form a unit.

  The present applicant has proposed a so-called H-type seal as an example of the seal member. In fluid equipment that handles chemicals such as semiconductors and liquid crystal manufacturing equipment, chemicals with high permeability such as hydrofluoric acid are also handled. Therefore, the sealing member used for connecting the fluid device needs to ensure a high sealing performance so that the chemical liquid does not leak to the outside. As shown in FIG. 8, the connection structure of the H-type seal is a structure in which a protrusion is press-fitted into a groove and sealed. As shown in FIGS. 6 and 7, the seal member 1 of the H-type seal includes a main body portion 10, a grip portion 12, and an overhang portion 13. As shown in FIG. 7, the main body 10 has a first annular groove 11A that fits in the annular protrusion 101A of the first component 100A formed on one surface, and a second annular shape that fits in the annular protrusion 101B of the second component 100B. A groove 11B is formed on the other surface.

When maintaining a semiconductor manufacturing apparatus, it is desirable to use a new seal member when replacing a fluid device such as a valve and reassembling the apparatus. Therefore, when the seal member 1 used for the connecting portion of the fluid device is manufactured and then the seal member 1 is handled alone, great care must be taken to prevent foreign matters from entering the seal portion of the seal member 1. This is because when a foreign substance enters the seal portion, the fluid may be leaked in a fluid device that uses a highly permeable fluid.
Patent Document 1 discloses a protective cap 201 that is attached to the joint body 200 in order to prevent the joint body 200 (particularly the tip) from being damaged before piping, as shown in FIG. . Patent Document 2 discloses a retainer 301 assembled to the gasket 300 in order to protect the sealing surface of the gasket 300 as shown in FIG.

JP 7-280165 A JP 2000-154892 A

In the sealing member 1 proposed by the present applicant, the grip portion 12 is formed on the outer periphery rather than the main body portion 10. Therefore, even if the seal member 1 is placed on a work table or the like, the seal part of the main body 10 does not touch the work table, and even if it is touched by hand, the seal part will not be damaged. However, when the seal member 1 is handled as a single unit after the seal member 1 has been manufactured, foreign matters such as dust are sealed in the protective cap fitted to the outer periphery of the joint tip as in the inventions described in Patent Documents 1 and 2. There is a risk of entering the seal portion 1. Once foreign matter enters the seal portion of the seal member 1, it is difficult to remove it. If the seal member 1 is press-fitted while the foreign matter remains in the seal portion, continuous damage will occur in the seal portion. . Leakage may occur due to the continuous damage of the seal.
In particular, in fluid equipment that handles chemical solutions such as semiconductors and liquid crystal manufacturing apparatuses, it is a major issue to ensure high sealing performance because it also handles highly penetrating chemical solutions such as hydrofluoric acid.

  The present invention is for solving the above-described problems, and an object of the present invention is to provide a seal member that ensures high sealing performance without foreign matter entering the seal portion of the seal member when the seal member is handled alone. And

In order to solve the above problems, the seal member of the present invention has the following configuration.
(1) A first annular groove that fits to the first part is provided on one surface, a second annular groove that fits to the second part is provided on the other surface, and the first and second annular grooves are the seal member includes first and second press-fit allowance, when dealing with the sealing member by itself, a first annular ridge for insertion into the first annular concave stripes provided, said first annular projection Article, the When inserting into the first annular groove, a first protective cap for expanding the width of the groove of the first annular groove and a second annular protrusion to be inserted into the second annular groove are provided , and the second An annular ridge is provided with the 2nd protective cap which expands the width | variety of the groove | channel of a said 2nd annular groove, when inserting in a said 2nd annular groove .

(2) A first annular groove to be fitted to the first part is provided on one side, a second annular groove to be fitted to the second part is provided on the other side, and the first and second annular grooves are provided on the first side. In a sealing member having first and second press-fitting allowances, a first protective cap provided with a first annular ridge to be inserted into the first press-fitting allowance when handling the seal member alone, and the second press-fitting And a second protective cap provided with a second annular ridge to be inserted instead, and the first and second protective caps preferably have air vent holes for venting air. .

(3) In the sealing member according to (2), the air vent hole includes a central air vent hole formed in a central portion of the first and second protective caps, and the first and second protective caps. It is preferable that it is the groove part air vent hole formed in the 1st and 2nd cyclic | annular protrusion.

(4) A first annular groove that fits to the first part is provided on one surface, a second annular groove that fits to the second part is provided on the other surface, and the first and second annular grooves are In a sealing member having first and second press-fitting allowances, a first protective cap provided with a first annular ridge to be inserted into the first press-fitting allowance when handling the seal member alone, and the second press-fitting A second protective cap provided with a second annular ridge to be inserted instead, and the first and second protective caps are locked to the seal member by a hooking portion provided on an outer periphery of the seal member Is preferred.

(5) In the seal member according to any one of (1) to (4), a grip portion is formed on the first and second protective caps so as to be removed from the seal member. It is preferable that the seal member protrudes from the outer diameter.

According to the above aspect, when the seal member is handled as a single unit, the annular ridge of the protective cap is inserted into and fitted into the press-fitting allowance of the seal member and the annular ridge. Will not enter. Therefore, when the sealing member is press-fitted, there is no fear of causing a continuous flaw in the sealing portion, and high sealing performance of the sealing member can be ensured.
According to the above aspect, the protective cap is formed with an air vent hole for venting air. Therefore, when the protective cap is inserted into the seal member, there is no repulsion due to air compression, and the protective cap can be easily attached to the seal member. Can be attached. In particular, since the central air vent hole is formed in the center of the protective cap and the groove air vent hole is formed in the annular ridge, the air trapped inside the seal member or in the annular groove is discharged and rebounded by the compression of air. And the protective cap can be easily attached to the seal member.
Since the protective cap and the sealing member are locked by the above aspect, the protective cap does not come off or shift when the sealing member is transported, and foreign matter does not enter.
According to the above aspect, since the protective cap is provided with the gripping portion protruding from the outer diameter of the seal member, the protective cap can be easily detached from the seal member by applying a force to the gripping portion.

It is XX sectional drawing of the sealing member which showed the procedure which attaches a protective cap, and a protective cap. It is a front view of a seal member in the state where a protection cap was attached. It is YY sectional drawing of the sealing member which showed the procedure which attaches a protective cap, and a protective cap. It is a front view of a protective cap. It is a front view of a sealing member. It is sectional drawing of a sealing member. It is a partial cross section figure of the state which assembles a seal member to a connection part of fluid equipment. It is a partial cross section figure of the state which assembled | attached the sealing member to the connection part of the fluid apparatus. It is sectional drawing of the coupling member protection cap of patent document 1. It is sectional drawing of the pipe joint as described in patent document 2. FIG.

  Embodiments of the seal member 1 of the present invention will be described in detail below with reference to the drawings. FIG. 2 shows a front view of the seal member 1 with the protective cap 2 attached. 1 is a cross-sectional view taken along the line XX of FIG. 2 showing a time series for attaching the protective cap 2, and FIG. 3 is a cross-sectional view taken along the line YY of FIG. 4 shows a front view of the protective cap 2, FIG. 5 shows a front view of the seal member 1, and FIG. 6 shows a cross-sectional view of the seal member 1. 7 shows a partial cross-sectional view of the state in which the seal member 1 is assembled to the connection part of the fluid device, and FIG. 8 shows a partial cross-sectional view of the state in which the seal member 1 is assembled to the connection part of the fluid device. ing.

(Configuration of seal member)
As shown in FIG. 6, the seal member 1 includes a main body portion 10, a grip portion 12, and an overhang portion 13. The main body 10 is formed in a cylindrical shape. Further, as shown in FIG. 7, the main body 10 has a first annular groove 11A (an example of an annular recess) that fits in the annular protrusion 101A of the first component 100A formed on one surface, and the annular shape of the second component 100B. A second annular groove 11B that fits into the protrusion 101B is formed on the other surface.
The cross-section of the seal member 1 is H-shaped, and in FIG. 6, the seal member 1 has a line-symmetric shape with respect to the center line M in the left-right direction and a line-symmetric shape with respect to the center line N in the vertical direction. Therefore, the shape of the seal member 1 on the first component 100A side and the shape of the seal member 1 on the second component 100B side are the same. Therefore, in the following description, description of the shape of the seal member 1 on the first component 100A side will be omitted, and description of the shape of the seal member on the second component 100B side will be omitted. At this time, the symbols “A” and “B” are omitted as appropriate because the explanation is complicated.

In the annular groove 11 of the seal member 1, as shown in FIG. 6, press-fitting allowances 11 b and 11 b are respectively provided on the inner inner wall and the outer inner wall on the back side from the opening. Further, the width W1 of the press-fitting allowances 11b and 11b is formed to be slightly smaller than the width W3 in the thickness direction of the annular protrusion 101 shown in FIG. 7 (W1 <W3). Guide portions 11 a and 11 a for guiding the annular protrusion 101 are provided in the inner opening portion and the outer opening portion of the annular groove 11, respectively. A width W2 between the guide portions 11a and 11a is formed slightly larger than a width W3 in the thickness direction of the annular protrusion 101 shown in FIG. 7 (W3 <W2).
The main body 10 is provided with slopes 10a and 10b on the inner and outer peripheral surfaces so as to correspond to the slope 103 provided at the bottom of the seal groove shown in FIG. When the annular protrusion 101 of the component 100 is inserted into the annular groove 11, the annular protrusion 101 is press-fitted while increasing the width W1 of the press-fitting allowances 11b and 11b.

  On the outer peripheral surface of the main body portion 10, an overhang portion 13 protrudes outward. It is formed in an annular shape along the outer peripheral surface of the main body 10. A plurality of gripping portions 12 are integrally formed on the outer edge portion of the overhang portion 13 with a predetermined interval. The grip portion 12 is provided on both sides from the end portion of the overhang portion 13 so as to extend in a direction orthogonal to the overhang portion 13. At both end portions of the grip portion 12, hook portions 12a that are hooked and engaged with the convex portions 102 of the component 100 shown in FIG. When the hooking portion 12 a is locked to the convex portion 102 of the component 100, the tip of the annular protrusion 101 provided on the component 100 is temporarily inserted into the guide portions 11 a and 11 a of the annular groove 11, and the annular protrusion 101 and the annular groove 11 are inserted. Is positioned properly.

  Next, the first and second parts 100A and 100B are pulled together using a jig (not shown). The annular protrusions 101 of the first and second parts 100A and 100B are press-fitted into the press-fitting allowances 11b and 11b of the seal member 1. As a result, the press-fitting allowances 11b and 11b are slightly plastically deformed. A predetermined sealing force can be maintained in the press-fitted portion.

  Here, in fluid equipment that handles chemicals such as semiconductors and liquid crystal manufacturing apparatuses, chemicals with high permeability such as hydrofluoric acid are also handled. Therefore, when the part 100 and the seal member 1 are connected by the jig, if a foreign matter such as dust enters the annular groove 11, a continuous damage is generated in the seal portion. If a highly penetrating chemical solution such as hydrofluoric acid is used here, the chemical solution may leak from a continuous flawed portion of the seal portion. For this reason, it is necessary to prevent any fine particles from entering the seal portion of the seal member 1.

(Configuration of protective cap)
The protective cap 2 has a shape that does not generate foreign matters, has a finish free from burrs and defects, and is made of resin. When the seal member 1 is handled alone, the first protective cap 2A and the second protective cap 2B are attached to both surfaces of the seal member 1, respectively. Since the first protective cap 2A and the second protective cap 2B have the same shape, The description of the second protective cap 2B is omitted by describing the first protective cap 2A. Note that the signs “A” and “B” are omitted as appropriate because the explanation is complicated.
As shown in FIG. 1, the protective cap 2 includes a main body 21 and an annular protrusion 22 (an example of an annular ridge). A thickness direction width W4 of the annular protrusion 22 is formed to be larger than a width W1 of the press-fitting allowances 11b and 11b of the seal member 1 and smaller than a width W3 of the annular protrusion 101 of the component 100 (W1 <W4). <W3).
In this embodiment, W4 is larger than W1 and smaller than W3 (W1 <W4 <W3), but W4 may include a width equivalent to W3 (W1 <W4 ≦ W3).

  As shown in FIG. 4, a central air vent hole 23 is formed in the center of the main body portion 21 for extracting air accumulated in the central portion. The annular protrusion 22 on the outer periphery of the central air vent hole 23 is formed with a groove air vent hole 26 for venting air accumulated in the annular groove 11. Further, as shown in FIGS. 3A and 4, a locking portion 24 is formed on the outer periphery of the main body portion 21. The protective cap 2 is fixed to the sealing member 1 by the locking portion 24 being locked to the hooking portion 12 a provided on the outer periphery of the sealing member 1.

  In the protective cap 2, two gripping portions 25 are formed on the outer edge portion of the locking portion 24 so as to protrude from the outer diameter of the seal member 1. Since it becomes easy to apply a force directly to the protective cap 2 by the grip portion 25, the locking portion 24 of the protective cap 2 can be detached from the hook portion 12 a of the seal member 1.

(Configuration of seal member provided with protective cap)
A procedure for attaching the protective cap 2 to the seal member 1 will be described.
As shown in FIGS. 1A and 1B, by inserting the tip of the annular protrusion 22 of the protective cap 2 into the guide portions 11a and 11a, the annular protrusion 22 is positioned in parallel with the press-fitting allowances 11b and 11b. The Next, as shown in FIG. 1C, the annular protrusion 22 is press-fitted to the press-fitting allowances 11b and 11b. At this time, the thickness direction width W4 of the annular protrusion 22 is smaller than the thickness direction width W3 of the annular protrusion 101 of the component 100, but is larger than the width W1 of the press-fitting allowances 11b and 11b of the seal member 1 (W1 <W4 <W3). ). For this reason, the annular protrusion 22 and the press-fitting allowances 11b and 11b are in close contact with each other to prevent foreign matter from entering.
At this time, the air trapped inside the seal member 1 (central cavity) is discharged from the central air vent hole 23. Further, as shown in FIG. 3, the air trapped in the annular groove 11 is discharged from a groove air vent hole 26 formed in the annular protrusion 22. Thereby, there is no repulsion by compression of air and the protective cap 2 can be easily attached to the sealing member 1. FIG. 1C and FIG. 3C show a state in which the protective cap 2 is attached to the seal member 1.

  Here, as shown in FIGS. 1B and 3B, when the annular protrusion 22 is inserted into the press-fitting allowances 11b and 11b, the width W1 of the press-fitting allowances 11b and 11b is the thickness direction of the annular protrusion 22. It is smaller than the width W4 (W1 <W4). Therefore, the press-fitting allowances 11b and 11b slightly cause plastic deformation due to the press-fitting of the annular protrusion 22. This plastic deformation is a small plastic deformation because both the annular protrusion 22 and the press-fitting allowances 11b and 11b are made of resin and have elasticity. Therefore, when the protective cap 2 is removed and the seal member 1 is attached to the component 100, the press-fitting allowances 11b and 11b are plastically deformed to some extent. Therefore, the annular protrusion 101 of the component 100 can be easily press-fitted into the press-fitting margins 11b and 11b only by using a simple jig. Alternatively, in order to reassemble the fluid device for maintenance or the like, when the annular protrusion 101 of the component 100 is manually pushed into the press-fitting allowances 11b and 11b, the guides 11a and 11a guide the parts, so that they can be press-fitted in parallel. it can.

In order to manufacture the seal member 1 and assemble it to the connection part of the fluid device, the protective cap 2 is attached to the seal member 1 when the seal member 1 is handled alone. Since the annular protrusion 22 of the protective cap 2 and the press-fitting allowances 11b and 11b of the seal member 1 are sealed by press-fitting, foreign matters such as dust do not adhere to the press-fitting allowances 11b and 11b during transportation. Therefore, even if it is once exposed to the outside air, there is no fear that foreign matter will adhere to the press-fitting allowances 11b and 11b, and it will not be damaged during assembly. Therefore, even if a highly permeable chemical such as hydrofluoric acid is flowed after connecting the first and second parts 100A and 100B, there is no risk of fluid leaking from the connecting portion, and high sealing performance can be ensured.
In addition, when removing the protective cap 2 from the seal member 1, the protective cap 2 is provided with the grip portion 12 protruding from the outer diameter of the seal member 1, so that it is easy to apply force to the grip portion 12. The protective cap 2 can be removed from the seal member.

As described above, according to the sealing member 1 of the present invention,
(1) A first annular groove 11A that fits into the first part 100A is provided on one side, a second annular groove 11B that fits on the second part 100B is provided on the other side, and the first and second annular grooves 11A. 11B, the first protection provided with the first annular protrusion 22A inserted into the first press-fitting allowance 11bA when the seal member 1 is handled alone in the seal member 1 having the first and second press-fitting allowances 11b, 11b. Since the cap 2A and the second protective cap 2B provided with the second annular protrusion 22B to be inserted into the second press-fitting allowance 11bB are provided, when the seal member 1 is handled alone, the protective cap 2 Since the annular protrusion 22 is inserted into the annular groove 11 of the seal member 1, foreign matter such as dust does not enter the seal portion of the seal member 1. Therefore, when the seal member 1 is press-fitted, there is no fear of causing a continuous damage to the seal portion, and high sealing performance of the seal member 1 can be ensured.

(2) In the sealing member 1 according to (1), the first and second protective caps 2A, 2B are formed with air vent holes for venting air, and (3) ( In the sealing member 1 described in 2), the air vent hole is formed in the central air vent hole 23 formed in the central part of the first and second protective caps 2A and 2B, and the first and second annular protrusions 22. Therefore, when the protective cap 2 is inserted into the seal member 1, there is no repulsion due to air compression, and the protective cap 2 can be easily attached to the seal member 1. . In particular, since the central air vent hole 23 is formed in the central portion of the protective cap 2 and the groove air vent hole 26 is formed in the annular protrusion 22, the air trapped in the inside of the seal member 1 and the annular groove 11 is discharged, and the air Therefore, the protective cap 2 can be easily attached to the seal member 1.

(4) In the sealing member 1 according to any one of (1) to (3), the first and second protective caps 2 are attached to the sealing member 1 by a hooking portion 12a provided on the outer periphery of the sealing member 1. Since it is characterized by being locked, when the seal member 1 is transported, the protective cap 2 is not removed or displaced, and no foreign matter enters.

(5) In the sealing member 1 according to any one of (1) to (4), the first and second protective caps 2 are formed with a grip portion 25 for removal from the seal member 1, and the grip portion 25 Is characterized in that it protrudes from the outer diameter of the seal member 1. Therefore, the protective cap 2 can be easily detached from the seal member 1 by applying a force to the grip portion 25 to the protective cap 2.

  In addition, this embodiment is only a mere illustration and does not limit this invention at all. Accordingly, the present invention can naturally be improved and modified in various ways without departing from the gist thereof.

DESCRIPTION OF SYMBOLS 1 Seal member 2 Protective cap 10 Main-body part 11 Annular groove (annular groove)
11a guide portion 11b press-fitting allowance 12 gripping portion 12a hook portion 21 body portion 22 annular protrusion (annular protrusion)
23 Central air vent hole 24 Locking portion 25 Grip portion 26 Groove air vent hole

Claims (5)

A first annular groove that fits to the first part is provided on one side, a second annular groove that fits to the second part is provided on the other side, and the first and second annular grooves are first and In the sealing member having the second press-fitting allowance,
When dealing with the sealing member by itself, a first annular ridge for insertion into the first annular concave stripes provided, said first annular projection Article, upon insertion into the first annular concave, the first a first protective cap to expand the width of the groove of the annular concave, second annular projections to be inserted in the second annular concave stripes provided, said second annular protrusion Article, inserted into the second annular concave A second protective cap for enlarging the width of the groove of the second annular recess ,
A seal member characterized by the above. A first annular groove that fits to the first part is provided on one side, a second annular groove that fits to the second part is provided on the other side, and the first and second annular grooves are first and In the sealing member having the second press-fitting allowance,
When the seal member is handled alone, a first protective cap provided with a first annular ridge to be inserted into the first press-fit allowance and a second annular ridge to be inserted into the second press-fit allowance are provided. Providing a second protective cap;
The first and second protective caps have air vent holes for venting air,
A seal member characterized by the above. The seal member according to claim 2,
The air vent hole is a central air vent hole formed in a central portion of the first and second protective caps, and a groove air vent hole formed in the first and second annular ridges;
A seal member characterized by the above. A first annular groove that fits to the first part is provided on one side, a second annular groove that fits to the second part is provided on the other side, and the first and second annular grooves are first and In the sealing member having the second press-fitting allowance,
When the seal member is handled alone, a first protective cap provided with a first annular ridge to be inserted into the first press-fit allowance and a second annular ridge to be inserted into the second press-fit allowance are provided. Providing a second protective cap;
The first and second protective caps are locked to the seal member by hooking portions provided on an outer periphery of the seal member;
A seal member characterized by the above. In the seal member according to any one of claims 1 to 4,
The first and second protective caps are formed with grips for removal from the seal member,
The gripping part protrudes from the outer diameter of the seal member;
A seal member characterized by the above.

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