JP6040920B2 - Electron beam irradiation apparatus and electron beam irradiation method - Google Patents

Description

  The present invention relates to an electron beam irradiation apparatus and an electron beam irradiation method for irradiating a metal strip with an electron beam.

  2. Description of the Related Art Conventionally, a technique for improving characteristics of a metal strip by continuously irradiating the metal strip with an electron beam is known. For example, in the prior art disclosed in Patent Document 1 or Patent Document 2, the surface of a metal strip that has been subjected to a predetermined surface treatment is irradiated with an electron beam in a direction transverse to the rolling direction. The iron loss of the metal strip is reduced. Hereinafter, continuously irradiating the surface of the metal strip with an electron beam is appropriately referred to as “electron beam scanning”. That is, continuously irradiating the surface of the metal strip with an electron beam in a predetermined direction means scanning the surface of the metal strip with an electron beam in a predetermined direction.

  In general, an electron beam is output by an electron gun including a filament, a focusing coil, a deflection coil, and the like. The electron gun emits an electron beam from a filament, the diameter of the emitted electron beam is reduced by a focusing coil, and the traveling direction of the focused electron beam is changed by a deflection coil. The electron gun irradiates the metal strip while deflecting the electron beam, thereby scanning the surface of the metal strip with the electron beam. Such an electron gun includes, for example, a tungsten ribbon filament (see Patent Document 3). Also, a plurality of electron guns set to a scanning width that equally divides the width of the metal strip are arranged on diagonal lines that obliquely cross the longitudinal direction of the metal strip, and the plurality of electron guns are used to There is an electron beam irradiation apparatus that continuously scans an electron beam in the width direction (see Patent Document 4).

JP-A-63-96218 JP-A 63-186826 Japanese Patent Laid-Open No. 6-2042 Japanese Patent Laid-Open No. 5-209215

  On the other hand, the electron gun as described above has a life that can be irradiated with an electron beam, and the operation life of the electron gun is determined according to the life of a component such as a filament. That is, the electron gun unexpectedly irradiates the electron beam due to a failure of parts such as filament breakage during the operation period in which the electron gun sequentially irradiates (scans) the electron beam onto the surface of the metal strip that is sequentially conveyed. May become impossible. In this case, in the above-described prior art, even if a plurality of electron guns are used as described in Patent Document 4, if a faulty part such as a broken filament is replaced to repair an unirradiated electron gun, An electron beam irradiation process suitable for improving the properties of the strip cannot be continued. Furthermore, in order to repair an electron gun that cannot be irradiated, the operation of the electron beam irradiation process must be stopped suddenly. As a result, the operation line that performs the electron beam irradiation process stops during an unscheduled period excluding scheduled maintenance periods such as periodic repairs and inspections, resulting in the production efficiency of metal strip products. There is a problem of inviting a decline.

  The present invention has been made in view of the above circumstances, and it is possible to stably perform an electron beam irradiation process suitable for improving the properties of a metal strip without impairing the production efficiency of the metal strip product. An object is to provide an electron beam irradiation apparatus and an electron beam irradiation method.

  In order to solve the above-described problems and achieve the object, an electron beam irradiation apparatus according to the present invention continuously irradiates the surface of a metal strip that is sequentially conveyed in the width direction of the metal strip. In the electron beam irradiating apparatus for performing the electron beam scanning, the metal strips are arranged adjacent to each other with an interval of ½ or less of the scannable width of the electron beam irradiated on the surface of the metal strip and at equal intervals in the material width direction. A plurality of electron guns, and the plurality of electron guns are controlled so that the electron beam scanning with respect to the surface of the metal strip is performed in the material width direction, and an electron beam is irradiated into the plurality of electron guns When there is an impossible electron gun, the electron beam scanning width of a normal electron gun adjacent to the non-irradiable electron gun among the plurality of electron guns is set to the electron gun's non-irradiable electron gun. A control unit that expands the entire scanning range of the beam and causes the remaining electron guns other than the unirradiable electron gun to share the electron beam scanning with respect to the surface of the metal strip in the material width direction. It is characterized by that.

  In the electron beam irradiation apparatus according to the present invention, in the above invention, the control unit scans each electron beam of the electron gun that cannot be irradiated and both normal electron guns adjacent to both sides in the material width direction. The width is enlarged so as to cooperatively supplement the entire scanning range of the electron beam of the non-irradiable electron gun.

  The electron beam irradiation apparatus according to the present invention further includes a notifying unit for notifying that the non-irradiable electron gun is generated in the above invention, and the control unit is configured to select the electron gun from the plurality of electron guns. The notification unit is controlled to notify specific information that can specify an electron gun that cannot be irradiated.

  Also, the electron beam irradiation method according to the present invention is arranged adjacent to each other and in the material width direction of the metal strip with an interval of 1/2 or less of the scannable width of the electron beam irradiated onto the surface of the metal strip that is sequentially conveyed. An electron beam irradiation step in which electron beam scanning for continuously irradiating the surface of the metal strip with an electron beam in the material width direction is performed in the material width direction by a plurality of electron guns arranged at equal intervals. And when there is an electron gun that cannot irradiate an electron beam among the plurality of electron guns, the scanning width of an electron beam of a normal electron gun adjacent to the non-irradiable electron gun among the plurality of electron guns is A scanning width expanding step for expanding the entire scanning range of the electron beam of the non-irradiable electron gun, and the electron beam irradiation step includes The rest of the electron gun other than the irradiation non electron gun of the plurality of electron guns, and performing by sharing the electron beam scanning of the surface of the metal strip to the material width direction.

  Further, in the electron beam irradiation method according to the present invention, in the above invention, the scanning width expansion step includes the electron beams of the electron gun that cannot be irradiated and the normal electron guns adjacent to both sides in the material width direction. The scanning width is expanded so as to cooperatively supplement the entire scanning range of the electron beam of the non-irradiable electron gun.

  Further, in the electron beam irradiation method according to the present invention, in the above invention, the specific information that can identify the non-irradiable electron gun among the plurality of electron guns is notified, and the non-irradiable electron gun is generated. It is further characterized by further including a notifying step for notifying that it has been performed.

  According to the present invention, it is possible to stably carry out an electron beam irradiation process suitable for improving the properties of a metal strip without impairing the production efficiency of the metal strip product.

FIG. 1 is a diagram showing a configuration example of an electron beam irradiation apparatus according to an embodiment of the present invention. FIG. 2 is a diagram illustrating an arrangement configuration example of a plurality of electron guns in the present embodiment. FIG. 3 is a flowchart showing an example of the electron beam irradiation method according to the embodiment of the present invention. FIG. 4 is a diagram for explaining a specific example of the electron beam irradiation processing according to the present invention. FIG. 5 is a diagram for explaining another specific example of the electron beam irradiation processing according to the present invention.

  Exemplary embodiments of an electron beam irradiation apparatus and an electron beam irradiation method according to the present invention will be explained below in detail with reference to the accompanying drawings. In the following, the present invention will be described by illustrating a steel strip as an example of a metal strip to be processed and an electron beam irradiation apparatus including eight electron guns. However, the present invention is limited by this embodiment. Is not to be done. Moreover, in each drawing, the same code | symbol is attached | subjected to the same component.

(Electron beam irradiation device)
First, the structure of the electron beam irradiation apparatus concerning embodiment of this invention is demonstrated. FIG. 1 is a diagram showing a configuration example of an electron beam irradiation apparatus according to an embodiment of the present invention. FIG. 1 schematically shows the main part of the electron beam irradiation apparatus viewed from above (in the thickness direction of the steel strip to be processed).

  As shown in FIG. 1, an electron beam irradiation apparatus 1 according to this embodiment includes a vacuum chamber 2 for preparing a vacuum environment suitable for electron beam irradiation, and a plurality (for performing electron beam scanning on a steel strip 8 to be processed. In this embodiment, eight) the electron guns 3a to 3h, the notifying unit 5 for notifying information useful for the operation of the electron beam irradiation process, and the control for controlling the electron guns 3a to 3h and the notifying unit 5, respectively. Part 6.

  The vacuum chamber 2 has a vacuum exhaust system (not shown) such as an exhaust port, and forms a vacuum chamber suitable for irradiating the steel strip 8 with an electron beam. Moreover, the vacuum chamber 2 has an entrance opening and an exit opening (both not shown). The vacuum chamber 2 receives the steel strip 8 sequentially conveyed toward the conveyance direction shown in FIG. 1 from the entrance side opening. After the electron beam irradiation treatment by the electron guns 3a to 3h is performed on the surface of the steel strip 8, the vacuum chamber 2 sequentially sends out the steel strip 8 from the exit opening in the transport direction. During the execution period of the electron beam irradiation process for the steel strip 8, the vacuum chamber 2 maintains the interior of the chamber in a high vacuum state. The transport direction is the same as the longitudinal direction of the steel strip 8. The steel strip 8 is transported in the transport direction by a transport device (not shown) such as a transport roll. The steel strip 8 delivered from the outlet side opening of the vacuum chamber 2 is sequentially transported to the downstream side of the electron beam irradiation device 1 by this transport device.

  The electron guns 3a to 3h perform electron beam scanning in which an electron beam is continuously irradiated in the width direction of the steel strip 8 (hereinafter appropriately referred to as the material width direction) onto the surface of the steel strip 8 that is sequentially conveyed. It is a device. Specifically, each of the electron guns 3a to 3h is realized using a power source, a filament, a focusing coil, a deflection coil, and the like, and is arranged on the upper part of the vacuum chamber 2 in accordance with a predetermined rule. The arrangement of the electron guns 3a to 3h will be described later. In each of the electron guns 3 a to 3 h arranged on the upper part of the vacuum chamber 2, the filament is discharged by being supplied with a current from a power source. The focusing coil reduces the diameter of the electron beam emitted from the filament. The deflection coil changes the traveling direction of the electron beam focused by the focusing coil in the material width direction. Each of these electron guns 3a to 3h irradiates the surface of the steel strip 8 with the electron beam inside the vacuum chamber 2 while deflecting the electron beam in the material width direction in this way. Electron beam scanning in the material width direction with respect to the surface is performed in the material width direction. Specifically, the electron guns 3a to 3h continuously irradiate the respective surfaces of the divided bands 8a to 8h of the steel plate 8 with an electron beam in the material width direction. In this case, the scanning widths W1 to W8 of the electron beams of the electron guns 3a to 3h are approximately the same as the widths of the divided bands 8a to 8h as shown in FIG. For example, in the present embodiment, the scanning widths W1 to W8 are equal to 1/8 times the material width Wt of the steel strip 8. The divided bands 8a to 8h are band-like regions obtained by equally dividing the steel plate 8 in the material width direction (in the present embodiment, equal to eight) corresponding to the eight electron guns 3a to 3h.

  Further, the electron guns 3 a to 3 h make up for the lack of electron beam scanning on the surface of the steel strip 8 between the electron guns adjacent to each other in the material width direction of the steel strip 8. That is, when an electron gun that cannot irradiate an electron beam is generated from the electron guns 3a to 3h, the electron guns 3a to 3h are moved by the remaining normal electron guns except for the electron gun that cannot be irradiated by the steel strip 8 described above. Electron beam scanning is performed in the material width direction. In this case, all of the normal electron guns adjacent to the non-irradiable electron gun in the material width direction among the electron guns 3a to 3h are scanned with the electron beam on the surface of the steel strip 8 which the non-irradiable electron gun originally takes. The scanning width of its own electron beam is expanded so as to supplement the entire range independently or in cooperation.

  When the electron gun 3a to 3h includes an electron gun that cannot irradiate an electron beam, the notification unit 5 notifies that an electron gun that cannot be irradiated is generated. Specifically, the notification unit 5 is realized using a display device such as a liquid crystal display. The notification unit 5 displays specific information that can specify an electron gun that cannot be irradiated from among the plurality of electron guns 3a to 3h, thereby notifying that an electron gun that cannot be irradiated has been generated. Examples of the specific information of the non-irradiable electron gun described above include information indicating the position of the non-irradiable electron gun, information indicating a serial number or mark unique to each of the electron guns 3a to 3h, and the like.

  The control unit 6 controls each operation of the electron guns 3 a to 3 h and the notification unit 5 described above. Specifically, the control unit 6 controls the electron guns 3 a to 3 h so as to perform electron beam scanning with respect to the surface of the steel strip 8 located inside the vacuum chamber 2 in the material width direction. In particular, when there is no electron gun that cannot irradiate an electron beam among the electron guns 3a to 3h, the control unit 6 sets the scanning width W1 set to be approximately the same as the widths of the divided bands 8a to 8h of the steel strip 8. The electron guns 3a to 3h are controlled so that each electron beam scan of .about.W8 is performed on each surface of the divided bands 8a to 8h.

  Moreover, the control part 6 judges the presence or absence of the electron gun which cannot irradiate an electron beam about the electron guns 3a-3h. When there is an electron gun that cannot irradiate an electron beam among the electron guns 3a to 3h, the control unit 6 has a normal electron adjacent to the electron gun that cannot be irradiated among the electron guns 3a to 3h in the material width direction. A scanning width enlargement command signal is transmitted to the gun. Thereby, the control unit 6 expands the scanning width of the electron beam of the normal electron gun to the entire scanning range of the electron beam of the electron gun that cannot be irradiated. Specifically, the control unit 6 transmits a scanning width enlargement command signal to both of the electron guns 3a to 3h that are not irradiated and the normal electron guns adjacent to both sides in the material width direction. . Thereby, the control unit 6 expands the scanning width of each electron beam of both of these normal electron guns so as to complement the entire scanning range of the electron beam of the electron gun that cannot be irradiated. In addition, the control unit 6 transmits a scanning width enlargement command signal to a single normal electron gun adjacent to one of the electron guns 3a to 3h that cannot be irradiated and one side in the material width direction. Thereby, the control unit 6 expands the scanning width of the electron beam of the single normal electron gun so as to compensate for the entire scanning range of the electron beam of the electron gun that cannot be irradiated. As described above, the control unit 6 appropriately enlarges the scanning widths W1 to W8 of the electron guns 3a to 3h, and then, to the remaining electron guns other than the non-irradiable electron guns among these electron guns 3a to 3h, Electron beam scanning with respect to the surface of the steel strip 8 is performed in the material width direction.

  Further, when there is an electron gun that cannot be irradiated among the electron guns 3a to 3h as a result of the determination process described above, the control unit 6 can specify the electron gun that cannot be irradiated from these electron guns 3a to 3h. The notification unit 5 is controlled so as to notify (for example, display) information. Thereby, the control part 6 notifies the alerting | reporting part 5 that the electron gun which cannot be irradiated generate | occur | produced.

(Arrangement of multiple electron guns)
Next, an arrangement configuration of the plurality of electron guns 3a to 3h included in the electron beam irradiation apparatus 1 according to the present embodiment will be described. FIG. 2 is a diagram illustrating an arrangement configuration example of a plurality of electron guns in the present embodiment. FIG. 2 schematically shows the vacuum chamber 2 and the electron guns 3 a to 3 h of the electron beam irradiation apparatus 1 shown in FIG. 1 as viewed from the conveying direction of the steel strip 8. The electron guns 3a to 3h in the present embodiment are adjacent to each other with an interval that is 1/2 or less of the scannable width of the electron beam applied to the surface of the steel strip 8, and in the material width direction of the steel strip 8 or the like. It arrange | positions at the upper part of the vacuum chamber 2 so that it may become a space | interval.

  Specifically, as shown in FIG. 2, the electron guns 3 a to 3 h are arranged so that the electron beam exits face the inside of the vacuum chamber 2 and the electron guns adjacent in the material width direction of the steel strip 8 Are arranged at equal intervals on the upper part of the vacuum chamber 2. That is, the intervals d1 to d7 have the same value. Further, the electron gun 3a on one end side in the material width direction is adjacent to the electron gun 3b with a distance d1 on one side in the material width direction, and the electron gun 3h on the other end side in the material width direction is on one side in the material width direction. Is adjacent to the electron gun 3g with a distance d7. Between these electron guns 3a and 3h, the electron gun 3b is adjacent to the electron guns 3a and 3c at intervals d1 and d2 on both sides in the material width direction, and the electron gun 3c is spaced at intervals d2 on both sides in the material width direction. , D3 are adjacent to the electron guns 3b, 3d, respectively. The electron gun 3d is adjacent to the electron guns 3c and 3e at intervals d3 and d4 on both sides in the material width direction, and the electron gun 3e is adjacent to the electron guns 3d and 3f at intervals d4 and d5 on both sides in the material width direction. Fit. The electron gun 3f is adjacent to the electron guns 3e and 3g at intervals d5 and d6 on both sides in the material width direction, and the electron gun 3g is adjacent to the electron guns 3f and 3h at intervals d6 and d7 on both sides in the material width direction. Fit. In each of these electron guns 3a to 3h, the center of the electron beam exit is set as the center position of the electron gun, and the distance between the center positions of the electron guns adjacent in the material width direction is the distance between the electron guns 3a to 3h. d1 to d7.

  Here, the normal scanning width W1 of the electron beam 4a irradiated to the surface of the steel strip 8 is set to the electron gun 3a. In addition, a scannable width W11 that is at least twice the scan width W1 is set in the electron gun 3a as the maximum deflectable scan width of the irradiated electron beam 4a. Similarly, a normal scanning width W2 of the electron beam 4b to be irradiated and a scannable width W12 that is at least twice the scanning width W2 are set for the electron gun 3b. A normal scanning width W3 of the electron beam 4c to be scanned and a scannable width W13 that is twice or more the scanning width W3 are set. The electron gun 3d is set with a normal scanning width W4 of the irradiating electron beam 4d and a scannable width W14 which is at least twice the scanning width W4. The electron gun 3e has a scanning width W14 of the irradiating electron beam 4e. A normal scanning width W5 and a scannable width W15 that is twice or more the scanning width W5 are set. The electron gun 3f has a normal scanning width W6 of the irradiating electron beam 4f and a scannable width W16 that is twice or more the scanning width W6. The electron gun 3g has a normal scanning width W16. And a scannable width W17 that is at least twice as large as the scan width W7. The electron gun 3h is set with a normal scanning width W8 of the irradiating electron beam 4h and a scannable width W18 that is at least twice the scanning width W8.

  Note that the center positions of the scanning widths W1 to W8 of the electron guns 3a to 3h respectively coincide with the center positions of the scannable widths W11 to W18 described above. The center positions of the electron guns 3a to 3h are on the same straight line as the center positions of the scan widths W1 to W8 and the scannable widths W11 to W18. For example, the center position of the scanning width W1 coincides with the center position of the scannable width W11, and the center position of the electron gun 3a is collinear with the center positions of the scan width W1 and the scannable width W11.

  The electron guns 3a to 3h are arranged at equal intervals so that the distances d1 to d7 are equal to or less than ½ times the scannable widths W11 to W18 of the electron beams 4a to 4h of the electron guns 3a to 3h. . Specifically, the distance d1 between the electron gun 3a and the electron gun 3b is equal to or less than ½ times the scannable widths W11 and W12 of the electron guns 3a and 3b. The same applies to the intervals d2 to d7 of the electron guns 3b to 3h. The electron guns 3a to 3h arranged in this way have respective scanning positions W11 to W18 at the center positions of the scanning widths of the electron guns adjacent to each other in the material width direction of the steel strip 8 (hereinafter referred to as scanning width centers as appropriate). Include within each range. That is, the electron gun 3a includes the center of the scanning width of the adjacent electron gun 3b within the scannable width W11. Similarly, the electron gun 3b includes the scanning width centers of the adjacent electron guns 3a and 3c within the scannable width W12, and the electron gun 3c includes the scanning width centers of the adjacent electron guns 3b and 3d. Is included within the range of the scannable width W13. The electron gun 3d includes the scanning width centers of the adjacent electron guns 3c and 3e within the range of the scannable width W14, and the electron gun 3e scans the scanning width centers of the adjacent electron guns 3d and 3f. Include in the range. The electron gun 3f includes the scan width centers of the adjacent electron guns 3e and 3g within the scannable width W16, and the electron gun 3g scans the scan width centers of the adjacent electron guns 3f and 3h. Include in the range. The electron gun 3h includes the scanning width center of the adjacent electron gun 3g within the range of the scannable width W18.

  In FIG. 2, as an example, the electron guns 3a to 3h are arranged at equal intervals so that the intervals d1 to d7 of the electron guns 3a to 3h are each ½ times the scannable widths W11 to W18. Yes. Thereby, for example, the distance d1 between the electron gun 3a and the electron gun 3b is ½ times the scannable widths W11 and W12 of the electron guns 3a and 3b. That is, each end of the scannable widths W11 to W18 of the electron guns 3a to 3h is located on the center of the scan width between adjacent electron guns as shown in FIG. For example, the end of the scannable width W11 of the electron gun 3a is positioned on the center of the scan width of the adjacent electron gun 3b, and the both ends of the scannable width W12 of the electron gun 3b are located between the adjacent electron guns 3a and 3c. Each is located on the center of each scan width.

(Electron beam irradiation method)
Next, an electron beam irradiation method according to an embodiment of the present invention will be described. FIG. 3 is a flowchart showing an example of the electron beam irradiation method according to the embodiment of the present invention. The electron beam irradiation apparatus 1 shown in FIG. 1 performs the electron beam scanning with respect to the surface of the steel strip 8 to be processed by performing each processing step of steps S101 to S104 shown in FIG. Hereinafter, the electron beam irradiation method according to the present embodiment will be described in detail with reference to FIGS.

  In the electron beam irradiation method according to the present embodiment, as shown in FIG. 3, the electron beam irradiation apparatus 1 first applies an electron beam to the surface of the steel strip 8 that is sequentially transported. Irradiate continuously in the direction (step S101). As described above, the electron guns 3a to 3h included in the electron beam irradiation apparatus 1 are ½ or less of the scannable widths W11 to W18 of the electron beams 4a to 4h that are irradiated onto the surface of the steel strip 8 that is sequentially conveyed. They are adjacent to each other at intervals d1 to d7, and are arranged at equal intervals in the material width direction of the steel strip 8 (see FIG. 2). The electron beam irradiation apparatus 1 uses the electron guns 3a to 3h arranged in this manner to perform electron beam scanning for continuously irradiating the surface of the steel strip 8 with the electron beams 4a to 4h in the material width direction. This is done in the material width direction.

  Specifically, in step S101, the control unit 6 performs electron beam scanning with respect to the surface of the steel strip 8 sequentially conveyed into the vacuum chamber 2 in the material width direction so as to perform the electron guns 3a to 3h. To control. For example, when there is no electron gun that cannot irradiate an electron beam among the electron guns 3a to 3h, the control unit 6 transmits a command signal for setting a normal scanning range of the electron beam to each of the electron guns 3a to 3h. Thereby, the normal scanning widths W1 to W8 of the electron beams 4a to 4h are set for the electron guns 3a to 3h, respectively. Next, the control unit 6 controls the electron guns 3 a to 3 h so that the surface of the steel strip 8 is scanned with an electron beam having a normal scanning width W1 to W8. Under the control of the control unit 6, the electron guns 3a to 3h continuously apply electron beams 4a to 4h having scanning widths W1 to W8 in the material width direction on the respective surfaces of the divided bands 8a to 8h of the steel strip 8. Irradiate.

  After executing step S101, the electron beam irradiation apparatus 1 determines whether or not there is an electron gun that cannot irradiate an electron beam (step S102). In step S102, the control unit 6 acquires drive information such as current values of the electron guns 3a to 3h from the electron guns 3a to 3h. Next, the control unit 6 detects the electron beam irradiation status of the electron guns 3a to 3h based on the acquired drive information of the electron guns 3a to 3h. For example, among the electron guns 3a to 3h, the control unit 6 detects an electron beam irradiation state of an electron gun that has become unable to irradiate an electron beam due to a component failure such as filament breakage as “irradiation impossible”. When the control unit 6 does not detect an electron gun whose electron beam irradiation status has become unirradiable from the electron guns 3a to 3h, the electron gun 3a to 3h has an electron gun that cannot emit an electron beam. Judge that there is no. On the other hand, when the control unit 6 detects an electron gun in which the irradiation state of the electron beam is impossible to irradiate from among the electron guns 3a to 3h, an electron gun that cannot irradiate the electron beam is present in the electron guns 3a to 3h. Judge that there is.

  In step S102, when there is no electron gun that cannot irradiate the electron beam among the electron guns 3a to 3h (No in step S102), the electron beam irradiation apparatus 1 returns to the above-described step S101, and the processes after step S101 are performed. Repeat steps.

  On the other hand, in step S102, when there is an electron gun that cannot irradiate an electron beam among the electron guns 3a to 3h (Yes in step S102), the electron beam irradiation apparatus 1 detects the detected irradiation among the electron guns 3a to 3h. The scanning width of the electron beam of the normal electron gun adjacent to the impossible electron gun is expanded to the entire scanning range of the electron beam of the non-irradiated electron gun (step S103). In step S103, the control unit 6 refers to the specific information of the electron guns 3a to 3h set in advance, and based on the determination processing in step S102 described above (for example, each driving information of the electron guns 3a to 3h), the electron gun The specific information of the electron gun that cannot be irradiated is confirmed from 3a to 3h. For example, the control unit 6 includes, as the specific information of the non-irradiable electron gun 3, positional information of the non-irradiable electron gun in the arrangement configuration of the electron guns 3a to 3h, a serial number or a mark given in advance to the non-irradiable electron gun Confirm unique information such as. Thereby, the control part 6 grasps | ascertains which of the electron guns 3a-3h cannot be irradiated. The control unit 6 applies, to the electron guns 3a to 3h, all the normal electron guns adjacent in the material width direction to the non-irradiable electron gun whose location is known as described above, and the electrons of this non-irradiable electron gun. A command to increase the scanning width so as to supplement the scanning range of the beam is given.

  Specifically, the control unit 6 commands the scanning width expansion command to the electron guns 3a to 3h that are unirradiated and whose normal position is adjacent to both sides in the material width direction. Each signal is transmitted. As a result, the control unit 6 gives commands to both of these normal electron guns to cooperatively expand the scanning width over the entire scanning range of the electron beam of the non-irradiated electron gun. Both of these normal electron guns, that is, the two electron guns sandwiching the non-irradiable electron gun among the electron guns 3a to 3h in the material width direction, are based on the control of the control unit 6 and are not capable of irradiation. Each of the scanning widths is expanded so as to cooperatively supplement the entire scanning range of the electron beam. On the other hand, the control unit 6 sends a scanning width enlargement command signal to the non-irradiable electron gun whose position is known and the single normal electron gun adjacent to one side in the material width direction among the electron guns 3a to 3h. Send. As a result, the control unit 6 gives a command to the single normal electron gun to expand the scanning width over the entire scanning range of the electron beam of the non-irradiated electron gun. The single normal electron gun expands its scanning width based on the control of the control unit 6 so as to compensate for the entire scanning range of the electron beam of the non-irradiated electron gun.

  After executing Step S103, the electron beam irradiation apparatus 1 notifies specific information that can specify the electron gun that cannot be irradiated from the electron guns 3a to 3h, and notifies that the electron gun that cannot be irradiated has been generated ( Step S104). In step S104, the control unit 6 controls the notification unit 5 to display the specific information of the electron gun that cannot be irradiated, which is grasped based on the above-described step S103. Based on the control of the control unit 6, the notification unit 5 displays the specific information of the non-irradiated electron gun, thereby indicating that an unirradiated electron gun has occurred in the electron guns 3a to 3h (externally ( To the workers).

  After executing Step S104, the electron beam irradiation apparatus 1 returns to Step S101 described above and repeats the processing steps of Step S101 as appropriate. In Step S101 after executing Step S104, when there are electron guns that cannot be irradiated among the electron guns 3a to 3h, the electron beam irradiation apparatus 1 selects an electron gun that cannot be irradiated among these electron guns 3a to 3h. The remaining normal electron guns perform electron beam scanning on the surface of the steel strip 8 in the material width direction. In this case, the control unit 6 maintains the state in which the scanning width of the normal electron gun adjacent to the non-irradiable electron gun is increased in step S103 described above, and the non-irradiable electrons among the electron guns 3a to 3h. The remaining electron guns other than the gun are caused to perform electron beam scanning on the surface of the steel strip 8 in the material width direction. The remaining electron guns include, of course, the electron guns of the electron guns 3a to 3h whose scanning width is not enlarged (normal electron guns that are not adjacent to non-irradiable electron guns). In step S103, an electron gun whose scanning width is expanded (a normal electron gun adjacent to an unirradiated electron gun) is included.

(Specific example of electron beam irradiation processing)
Next, an example in which the distances d1 to d7 (see FIG. 2) of the electron guns 3a to 3h of the electron beam irradiation apparatus 1 according to the present embodiment are set to ½ times the scannable widths W11 to W18, respectively. The electron beam irradiation process in steps S101 to S104 described above will be specifically described. FIG. 4 is a diagram for explaining a specific example of the electron beam irradiation processing according to the present invention. As shown in FIG. 4, when there is no non-irradiable electron gun among the electron guns 3 a to 3 h, the electron guns 3 a to 3 h correspond to the normal scanning widths W1 to W8 with respect to the surface of the steel strip 8. The electron beams 4a to 4h are scanned within each scanning range. Thereby, the electron guns 3a to 3h perform the electron beam scanning on the surface of the steel strip 8 in the divided zones 8a to 8h, respectively (state A1).

  After the above-described state A1, among these electron guns 3a to 3h, when a component failure such as filament breakage occurs unexpectedly in the electron gun 3b, the electron gun 3b emits an electron beam 4b as shown in FIG. Irradiation becomes impossible, and irradiation of the electron beam 4b to the divided band 8b of the steel strip 8 is stopped (state A2). In this state A2, the non-irradiable electron gun 3b and the two normal electron guns 3a, 3c adjacent on both sides in the material width direction are directed toward the scanning range of the electron beam of the non-irradiable electron gun 3b. The scanning widths W1 and W3 are enlarged. Specifically, these adjacent electron guns 3a and 3c expand their own scanning widths W1 and W3 to the center of the scanning width of the unirradiated electron gun 3b. As a result, the adjacent electron guns 3a and 3c cooperate to supplement the entire scanning range of the electron beam with respect to the divided band 8b that the electron gun 3b that cannot be irradiated by itself.

  In such a state A2, the electron beam scanning with respect to the surface of the steel strip 8 is performed in the material width direction by the remaining normal electron guns 3a and 3c to 3h except the non-irradiable electron gun 3b among the electron guns 3a to 3h. To share. That is, as shown in FIG. 4, the electron gun 3a scans the electron beam 4a within a scanning range corresponding to the enlarged scanning width W21. As a result, the electron gun 3a is continuous in the material width direction with respect to the surface of the division band 8a originally responsible and the surface of a part (specifically half) of the division band 8b to be substituted for the electron gun 3b that cannot be irradiated. The electron beam 4a is irradiated. Further, the electron gun 3c scans the electron beam 4c within a scanning range corresponding to the enlarged scanning width W22. Thereby, the electron gun 3c is arranged in the material width direction with respect to the surface of the divided band 8c that is originally assumed and the surface of the remaining part (specifically half) of the divided band 8b that is assumed instead of the electron gun 3b that cannot be irradiated. The electron beam 4c is continuously irradiated. On the other hand, the electron guns 3d to 3h continuously irradiate the respective surfaces of the divided bands 8d to 8h with the electron beams 4d to 4h in the material width direction as in the state A1 described above.

  Furthermore, after the above-described state A2, when a component failure occurs unexpectedly in the electron gun 3f among the remaining electron guns 3a, 3c to 3h excluding the non-irradiable electron gun 3b, as shown in FIG. The electron gun 3f becomes unable to irradiate the electron beam 4f, and stops irradiating the electron beam 4f on the divided band 8f of the steel strip 8 (state A3). In this state A3, the newly unirradiable electron gun 3f and the two normal electron guns 3e and 3g adjacent on both sides in the material width direction are directed toward the scanning range of the electron beam of this unirradiable electron gun 3f. The respective scanning widths W5 and W7 are enlarged. More specifically, these adjacent electron guns 3e and 3g expand their scanning widths W5 and W7 to the center of the scanning width of the unirradiable electron gun 3f. As a result, the adjacent electron guns 3e and 3g cooperate to supplement the entire scanning range of the electron beam with respect to the divided band 8f that the electron gun 3f that cannot be irradiated is supposed to play.

  In such a state A3, the remaining normal electron guns 3a, 3c to 3e, 3g, and 3h other than the non-irradiable electron guns 3b and 3f among the electron guns 3a to 3h are used to apply an electron beam to the surface of the steel strip 8. Scanning is performed in the material width direction. That is, as shown in FIG. 4, the electron gun 3e scans the electron beam 4e within a scanning range corresponding to the enlarged scanning width W23. As a result, the electron gun 3e is continuous in the material width direction with respect to the surface of the divided band 8e originally responsible and the surface of a part (specifically half) of the divided band 8f instead of the electron gun 3f that cannot be irradiated. The electron beam 4e is irradiated. Further, the electron gun 3g scans the electron beam 4g within a scanning range corresponding to the enlarged scanning width W24. As a result, the electron gun 3g extends in the material width direction with respect to the surface of the divided band 8g that is originally responsible and the surface of the remaining part (specifically half) of the divided band 8f that is carried instead of the electron gun 3f that cannot be irradiated. The electron beam 4g is continuously irradiated. On the other hand, the electron guns 3a and 3c scan the surface of the divided band 8b with the electron beams 4a and 4c so as to cooperatively compensate for the lack of electron beam scanning with respect to the divided band 8b, as in the state A2 described above. The electron beams 4a and 4c are continuously irradiated in the material width direction on the surfaces of the divided bands 8a and 8c, respectively. On the other hand, the electron guns 3d and 3h continuously irradiate the respective surfaces of the divided bands 8d and 8h with the electron beams 4d and 4h in the material width direction as in the state A1 described above.

  On the other hand, in the above-described embodiment, the case where the intervals d1 to d7 of the electron guns 3a to 3h are each ½ times the scannable widths W11 to W18 is shown as a specific example of the present invention. The intervals d1 to d7 of the electron guns 3a to 3h are set to ½ times or less of the scannable widths W11 to W18, respectively. FIG. 5 is a diagram for explaining another specific example of the electron beam irradiation processing according to the present invention. As shown in FIG. 5, in the state A1 where there is no non-irradiable electron gun among the electron guns 3a to 3h, the electron guns 3a to 3h are similar to the state A1 shown in FIG. Electron beams 4a to 4h are scanned in the scanning ranges corresponding to the normal scanning widths W1 to W8, respectively, on the surfaces of the divided bands 8a to 8h.

  After the state A1 described above, when a component failure such as filament breakage occurs unexpectedly in the electron gun 3a among these electron guns 3a to 3h, the electron gun 3a emits the electron beam 4a as shown in FIG. Irradiation becomes impossible, and irradiation of the electron beam 4a to the divided band 8a of the steel strip 8 is stopped (state A4). In this state A4, the non-irradiable electron gun 3a and the single normal electron gun 3b adjacent to one side in the material width direction scan its own toward the scanning range of the electron beam of the non-irradiable electron gun 3a. The width W2 is increased. Specifically, the electron gun 3b adjacent to this one side expands its scanning width W2 over the entire scanning range of the electron gun 3a that cannot be irradiated. As a result, the electron gun 3b adjacent to this one side supplements the entire scanning range of the electron beam with respect to the divided band 8a that the electron gun 3a that cannot be irradiated is supposed to bear.

  In such a state A4, the electron beam scanning with respect to the surface of the steel strip 8 is shared in the material width direction by the remaining normal electron guns 3b to 3h except the non-irradiable electron gun 3a among the electron guns 3a to 3h. And do it. That is, as shown in FIG. 5, the electron gun 3b scans the electron beam 4b within a scanning range corresponding to the enlarged scanning width W25. Thereby, the electron gun 3b continuously irradiates the electron beam 4b in the material width direction with respect to the surface of the division band 8b originally responsible and the surface of the division band 8a instead of the electron gun 3a that cannot be irradiated. On the other hand, the electron guns 3c to 3h continuously irradiate the respective surfaces of the divided bands 8c to 8h with the electron beams 4c to 4h in the material width direction as in the state A1 described above.

  On the other hand, after the above-described state A1, among the electron guns 3a to 3h, when unexpected component failures occur continuously or intermittently in the adjacent electron guns 3b and 3c, as shown in FIG. As described above, the electron guns 3b and 3c are unable to irradiate the electron beam, and stop the irradiation of the electron beams 4b and 4c to the divided bands 8b and 8c of the steel strip 8 (state A5). In this state A5, the non-irradiable electron gun 3a and the single normal electron gun 3a adjacent to one side in the material width direction scan its own toward the scanning range of the electron beam of the non-irradiable electron gun 3b. The width W2 is increased. Specifically, the electron gun 3a adjacent to one side expands its scanning width W1 over the entire scanning range of the electron gun 3b that cannot be irradiated. As a result, the electron gun 3a adjacent to one side supplements the entire scanning range of the electron beam with respect to the divided band 8b that should be assumed by the electron gun 3b that cannot be irradiated. On the other hand, the single normal electron gun 3d adjacent to the non-irradiable electron gun 3c on one side in the material width direction has its own scanning width W4 toward the scanning range of the electron beam of the non-irradiable electron gun 3c. Expanding. Specifically, the electron gun 3d adjacent to one side expands its scanning width W4 over the entire scanning range of the electron gun 3c that cannot be irradiated. As a result, the electron gun 3d adjacent to this one side compensates for the entire scanning range of the electron beam with respect to the divided band 8c that the electron gun 3c that cannot be irradiated by itself.

  In such a state A5, the remaining normal electron guns 3a and 3d to 3h excluding the unirradiated electron guns 3b and 3c among the electron guns 3a to 3h are used to scan the surface of the steel strip 8 with an electron beam. Share in the width direction. Here, the electron guns 3a and 3d are normal electron guns adjacent to each other in the material width direction with respect to the adjacent electron guns 3b and 3c that cannot be irradiated in the state A5 shown in FIG. As shown in FIG. 5, these adjacent electron guns 3a and 3d respectively expand the scanning widths W1 and W4 so as to supplement the entire scanning range of the electron beams of the electron guns 3b and 3c that cannot be irradiated. This shortage of electron beam scanning over the entire scanning range is compensated by cooperation. That is, as shown in FIG. 5, the electron gun 3a scans the electron beam 4a within a scanning range corresponding to the enlarged scanning width W26. Thereby, the electron gun 3a continuously irradiates the electron beam 4a in the material width direction with respect to the surface of the divided band 8a originally responsible and the surface of the divided band 8b instead of the electron gun 3b that cannot be irradiated. The electron gun 3d scans the electron beam 4d within a scanning range corresponding to the enlarged scanning width W27. Thereby, the electron gun 3d continuously irradiates the electron beam 4d in the material width direction with respect to the surface of the division band 8d originally responsible and the surface of the division band 8c instead of the electron gun 3c that cannot be irradiated. On the other hand, the electron guns 3e to 3h continuously irradiate the respective surfaces of the divided bands 8e to 8h with the electron beams 4c to 4h in the material width direction as in the state A1 described above.

  In order for the electron beam irradiation apparatus 1 to execute the electron beam irradiation processing in the states A4 and A5 described above, the scannable widths W11 to W18 of the electron guns 3a to 3h provided in the electron beam irradiation apparatus 1 are set. The scanning width may be set to three times or more of the intervals d1 to d7 (see FIG. 2) of the electron guns 3a to 3h. That is, the distances d1 to d7 of the electron guns 3a to 3h may be set to 1/3 times or less of the scannable widths W11 to W18, respectively.

  As described above, in the embodiment of the present invention, a plurality of electron guns that irradiate an electron beam onto the surface of a steel strip that is sequentially conveyed are provided with an interval that is 1/2 or less of the scannable width of the electron beam. Electron beam scanning is performed in the material width direction, which is adjacent to each other and arranged at equal intervals in the material width direction of the steel strip, and with the plurality of electron guns, the electron beam is continuously irradiated in the material width direction on the surface of the steel strip. If there is an electron gun that cannot be irradiated with an electron beam among the plurality of electron guns, scanning of the electron beam of a normal electron gun adjacent to the electron gun that cannot be irradiated among the plurality of electron guns The width of the electron beam of the non-irradiable electron gun is expanded over the entire scanning range of the electron beam, and the remaining electron gun including the electron gun after the scanning width expansion and excluding the non-irradiable electron gun is used to scan the surface of the steel strip. Shares in the width direction.

  For this reason, during the operation period in which the electron beam irradiation process (electron beam scanning) is sequentially performed on the surface of the steel strip traveling in the conveyance direction, due to a sudden failure exemplified by component failure such as filament breakage. Even if any of the plurality of electron guns unexpectedly becomes unable to irradiate an electron beam, the electron gun that cannot be irradiated is inherently responsible without stopping the operation of the electron beam scanning. The shortage of the electron beam scanning range on the surface of the steel strip can be compensated by the electron beam scanning of a normal electron gun adjacent to the non-irradiable electron gun. As a result, it is possible to avoid a situation where the operation line of the electron beam scanning is suddenly stopped during an unscheduled period due to repair of an unirradiated electron gun or the like, and a plurality of electron guns affect the irradiation of the electron beam. Without matching (for example, overlapping the scanning range of the electron beam), the irradiation process of the electron beam can be stably continued over the entire width of the steel strip surface to be processed. As a result, it is possible to stably carry out the operation of the electron beam irradiation treatment suitable for improving the properties of the steel strip such as reduction of iron loss without impairing the production efficiency of the steel strip product.

  In the embodiment of the present invention, the scanning width of each electron beam of the electron gun that cannot be irradiated and both normal electron guns adjacent to both sides in the material width direction is set to the scanning range of the electron beam of the electron gun that cannot be irradiated. It is expanding to make up for the entire area in cooperation. For this reason, it is possible to reliably make up for the shortage of the electron beam scanning range caused by the electron gun that cannot be irradiated, without inadvertently overlapping the scanning ranges of the electron beams between the normal electron guns on both sides. As a result, the electron beam irradiation process can be continued stably over and over the entire width of the steel strip surface to be processed.

  Furthermore, in the embodiment of the present invention, when an electron gun that cannot be irradiated is generated in the plurality of electron guns, the specific information that can specify the electron gun that cannot be irradiated from the plurality of electron guns is notified. Is informing that an unirradiated electron gun has occurred. Therefore, it is possible to always confirm the irradiation state of the electron beam by the plurality of electron guns, and to easily identify (distinguish) an electron gun that cannot be irradiated based on the notified specific information. This makes it possible to repair the non-irradiated electron gun at an appropriate timing before the non-irradiated electron gun is excessively generated. As a result, it is possible to more reliably avoid an unexpected stop of the operation line of the electron beam scanning, and it is possible to promote the stable operation of the electron beam irradiation process over the entire width of the steel strip surface to be processed.

  In the above-described embodiment, the electron beam irradiation apparatus 1 including the eight electron guns 3a to 3h has been exemplified. However, the present invention is not limited to this. That is, in the present invention, the number of electron guns provided in the electron beam irradiation apparatus 1 is not particularly limited to eight, and may be a plurality (two or more). Correspondingly, the number of dividing bands for equally dividing the steel strip 8 in the material width direction is not particularly limited to eight (equivalent to eight), and is the same as the number of electron guns provided in the electron beam irradiation apparatus 1. If it is.

  In the above-described embodiment, as illustrated in FIG. 1 and the like, a plurality of electron guns are arranged at equal intervals in the material width direction perpendicular to the conveying direction of the steel strip 8, but the present invention However, the present invention is not limited to this. In the present invention, the material width direction of the metal strip exemplified in the steel strip 8 is a direction from one end to the other end of the side end portions on both sides of the metal strip. The material width direction includes not only a direction perpendicular to the conveying direction of the metal strip but also a direction inclined from the one end to the other end of the side end on both sides of the metal strip. That is, the plurality of electron guns provided in the electron beam irradiation apparatus according to the present invention may be arranged at equal intervals in the material width direction inclined with respect to the transport direction of the metal strip.

  Furthermore, in the above-described embodiment, the scanning widths of the electron gun that cannot be irradiated and the normal electron guns adjacent to both sides in the material width direction are expanded to the center of the scanning width of the electron beam of the electron gun that cannot be irradiated. However, the present invention is not limited to this. That is, in the present invention, the respective scanning widths of the normal electron guns on both sides may be enlarged by the same width or by different widths toward the scanning range of the non-irradiated electron gun. Also good. In any case, the scanning widths of the normal electron guns on both sides may be enlarged so that the entire scanning range of the electron beam of the non-irradiated electron gun is cooperatively compensated.

  Further, in the above-described embodiment, the notification unit 5 that notifies that the non-irradiable electron gun has occurred in the plurality of electron guns by displaying the specific information of the non-irradiable electron gun on the screen is illustrated. However, the present invention is not limited to this. That is, the notification unit 5 is realized by using a light source, a speaker, or the like, and outputs a light output such as a light lighting position, a lighting color, a lighting method (for example, blinking) when notifying that an unirradiated electron gun has occurred. The specific information may be notified depending on the state, or the specific information may be notified by outputting sound information such as sound or buzzer sound. Alternatively, the notification unit 5 may notify the specific information by appropriately combining screen display, light output, and sound information output, thereby notifying that an unirradiated electron gun has occurred.

  Furthermore, in the above-described embodiment, the steel strip is exemplified as the metal strip to be processed. However, the present invention is not limited thereto, and the metal subjected to the electron beam irradiation processing by the electron beam irradiation apparatus and the electron beam irradiation method according to the present invention. The strip may be a band of an iron alloy other than steel, or may be a band other than an iron alloy such as copper or aluminum. That is, in the present invention, the metal strip to be treated may be a steel strip, an iron alloy strip other than the steel strip, or a metal strip other than the iron alloy strip, and the type of metal strip such as a steel type (for example, The strength and composition are not particularly limited.

  Further, the present invention is not limited by the above-described embodiment, and the present invention includes a configuration in which the above-described constituent elements are appropriately combined. In addition, all other embodiments, examples, operation techniques, and the like made by those skilled in the art based on the above-described embodiments are included in the present invention.

DESCRIPTION OF SYMBOLS 1 Electron beam irradiation apparatus 2 Vacuum chamber 3a-3h Electron gun 4a-4h Electron beam 5 Notification part 6 Control part 8 Steel strip 8a-8h Division | segmentation zone

Claims (6)

In an electron beam irradiation apparatus that performs electron beam scanning in which an electron beam is continuously irradiated in the material width direction of the metal strip onto the surface of the metal strip that is sequentially conveyed,
A plurality of electron guns that are adjacent to each other with an interval of ½ or less of the scannable width of the electron beam applied to the surface of the metal strip and arranged at equal intervals in the material width direction;
When the plurality of electron guns are controlled so that the electron beam scanning with respect to the surface of the metal strip is performed in the material width direction, and among the plurality of electron guns, there is an electron gun that cannot emit an electron beam The scanning width of the normal electron gun adjacent to the non-irradiable electron gun among the plurality of electron guns includes the entire scanning range of the normal electron gun, and at the same time the non-irradiable The electron gun is expanded so as to cover the entire scanning range of the electron beam, and the electron beam scanning with respect to the surface of the metal strip is performed in the material width direction for the remaining electron guns excluding the non-irradiable electron gun. A control unit,
An electron beam irradiation apparatus comprising:   The controller controls the scanning width of each electron beam of the non-irradiable electron gun and both normal electron guns adjacent to both sides in the material width direction, and the entire scanning range of the electron beam of the non-irradiable electron gun. The electron beam irradiation apparatus according to claim 1, wherein the electron beam irradiation apparatus is enlarged so as to supplement in cooperation. A notification unit for notifying that the non-irradiable electron gun has occurred;
3. The electron according to claim 1, wherein the control unit controls the notification unit so as to notify specific information capable of specifying the electron gun that cannot be irradiated from the plurality of electron guns. Beam irradiation device. A plurality of electron guns arranged adjacent to each other at equal intervals in the material width direction of the metal strip with an interval of 1/2 or less of the scannable width of the electron beam irradiated on the surface of the metal strip that is sequentially conveyed, An electron beam irradiation step in which electron beam scanning for continuously irradiating the surface of the metal strip with an electron beam in the material width direction is performed in the material width direction;
If there is an electron gun for disabling an electron beam into said plurality of electron guns, among the plurality of electron guns, the scan width of the electron beam normal electron gun adjacent to the irradiation non electron gun, the to include scanning the entire range of normal electron gun of the electron beam and the scanning width expansion step of expanding simultaneously to compensate for scanning the whole range of the irradiation non electron gun of the electron beam,
Including
In the electron beam irradiation step, when there is an electron gun that cannot be irradiated, the electron beam scanning with respect to the surface of the metal strip is performed by the remaining electron guns except the non-irradiable electron gun among the plurality of electron guns. An electron beam irradiation method, which is performed in the material width direction.   In the scanning width expansion step, the scanning width of each electron beam of the non-irradiable electron gun and both normal electron guns adjacent to both sides in the material width direction is set to the scanning range of the electron beam of the non-irradiable electron gun. 5. The electron beam irradiation method according to claim 4, wherein the entire area is enlarged so as to supplement the entire area. The information processing method further includes a notification step of notifying that the non-irradiable electron gun is generated by notifying specific information capable of specifying the unirradiable electron gun from the plurality of electron guns. 6. The electron beam irradiation method according to 4 or 5.

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