JP6040393B2 - Coating material coating apparatus, coating film forming method on long member - Google Patents

Coating material coating apparatus, coating film forming method on long member Download PDF

Info

Publication number
JP6040393B2
JP6040393B2 JP2013086345A JP2013086345A JP6040393B2 JP 6040393 B2 JP6040393 B2 JP 6040393B2 JP 2013086345 A JP2013086345 A JP 2013086345A JP 2013086345 A JP2013086345 A JP 2013086345A JP 6040393 B2 JP6040393 B2 JP 6040393B2
Authority
JP
Japan
Prior art keywords
die
coating
coating material
long member
long
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013086345A
Other languages
Japanese (ja)
Other versions
JP2014210217A (en
Inventor
学久 柴山
学久 柴山
孝彦 今井
孝彦 今井
折田 伸昭
伸昭 折田
慎平 東藤
慎平 東藤
伊藤 寿浩
寿浩 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THE FURUKAW ELECTRIC CO., LTD.
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
THE FURUKAW ELECTRIC CO., LTD.
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by THE FURUKAW ELECTRIC CO., LTD., National Institute of Advanced Industrial Science and Technology AIST filed Critical THE FURUKAW ELECTRIC CO., LTD.
Priority to JP2013086345A priority Critical patent/JP6040393B2/en
Publication of JP2014210217A publication Critical patent/JP2014210217A/en
Application granted granted Critical
Publication of JP6040393B2 publication Critical patent/JP6040393B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Wood Science & Technology (AREA)

Description

本発明は、長尺部材の表面に塗膜材を塗布する塗膜材の塗布装置およびこれを用いた長尺部材への塗膜材形成方法に関するものである。   The present invention relates to a coating material coating apparatus for coating a coating material on the surface of a long member and a method for forming a coating material on a long member using the coating device.

例えば太陽電池パネルのような発電機器は、基材に機能性薄膜を形成して作製される。このような機能性薄膜は、例えば、真空蒸着やCVD等の各種の大型・真空プロセスの他、小さなプロセス領域や非真空系を用いたロール・ツー・ロールプロセス等によって形成される。   For example, a power generation device such as a solar cell panel is manufactured by forming a functional thin film on a base material. Such a functional thin film is formed by, for example, a roll-to-roll process using a small process area or a non-vacuum system, in addition to various large-sized and vacuum processes such as vacuum deposition and CVD.

一方、特に高速でこのような機能性薄膜を形成する方法として、ダイスによる塗布方法がある。ダイスによる塗布方法では、数百m/分以上での塗膜形成が可能である。   On the other hand, as a method for forming such a functional thin film at a particularly high speed, there is a coating method using a die. The coating method using a die can form a coating film at several hundred m / min or more.

図4は、長尺部材へ塗膜材を塗布する従来の塗布装置100を示す概略断面図である。ダイス101は、上部のダイス部111と、下部のガイド部112とから構成される。上部のダイス部111には、キャビティ113が設けられ、図示を省略した塗膜材供給部から、所定量の塗膜材が連続して供給される(図中矢印H方向)。長尺部材105は、ダイス101内(ダイス部111とガイド部112の間)を通過する。この際、塗膜材103を長尺部材105の上面のみに塗布する場合は、長尺部材105の下面は、ガイド部112の上面に接触する。一方、ダイス部側と長尺部材105の上面には隙間が設けられる。なお、塗膜材103を長尺部材105の上面と下面の両方に塗布する場合は、ダイス部側と長尺部材105の上面および下面に隙間が設けられる。   FIG. 4 is a schematic cross-sectional view showing a conventional coating apparatus 100 that applies a coating material to a long member. The dice 101 includes an upper die part 111 and a lower guide part 112. A cavity 113 is provided in the upper die portion 111, and a predetermined amount of a coating material is continuously supplied from a coating material supply portion (not shown) (in the direction of arrow H in the figure). The long member 105 passes through the die 101 (between the die part 111 and the guide part 112). At this time, when the coating material 103 is applied only to the upper surface of the long member 105, the lower surface of the long member 105 is in contact with the upper surface of the guide portion 112. On the other hand, a gap is provided between the die portion side and the upper surface of the long member 105. In the case where the coating material 103 is applied to both the upper surface and the lower surface of the long member 105, a gap is provided between the die portion side and the upper surface and the lower surface of the long member 105.

このような、ダイスによって塗膜材を塗布する方法としては、例えば、長尺基材を連続的に移送しながら、その一方の表面に所定の間隔をおいて対向配置されたキャビティを有する塗布ダイスを用いて、塗布ダイスのキャビティ内へ所定の圧力で材料溶液を供給しながら、材料溶液により生じる塗布ダイスへの反発力が所定の値に保たれるように塗布ダイスへの荷重を制御する薄膜形成方法がある(特許文献1)。   As a method for applying the coating material with such a die, for example, a coating die having cavities disposed opposite to each other at a predetermined interval while continuously transporting a long base material. Is used to control the load on the coating die so that the repulsive force to the coating die generated by the material solution is maintained at a predetermined value while supplying the material solution into the cavity of the coating die at a predetermined pressure. There is a forming method (Patent Document 1).

特開2010−274241号公報JP 2010-274241 A

一方、塗膜材103の種類によっては、長尺部材105に塗布された塗膜材103を、図示を省略した加熱ヒータ等によって加熱して乾燥する必要がある。この場合には、長尺部材105を連続的に移動させながら、加熱範囲において、塗膜材103が乾燥するだけの加熱を行う必要がある。したがって、長尺部材105の速度を速めるためには、加熱ヒータによる発熱量を高める必要がある。   On the other hand, depending on the type of the coating material 103, it is necessary to heat and dry the coating material 103 applied to the long member 105 with a heater or the like (not shown). In this case, it is necessary to perform heating that dries the coating material 103 in the heating range while continuously moving the long member 105. Therefore, in order to increase the speed of the long member 105, it is necessary to increase the amount of heat generated by the heater.

しかし、加熱ヒータの加熱を強くしすぎると、部分的な過熱などよって長尺部材105が破断する恐れがある。したがって、このような長尺部材105の破断を防止するとともに、塗膜材103を十分に乾燥させるためには、長尺部材105の移動速度には限界があった。   However, if the heating of the heater is too strong, the long member 105 may be broken due to partial overheating or the like. Therefore, there is a limit to the moving speed of the long member 105 in order to prevent such a breakage of the long member 105 and to sufficiently dry the coating material 103.

本発明は、このような問題に鑑みてなされたもので、長尺部材の破断を抑制するとともに、従来と比較して長尺部材の速度を上げることが可能な薄膜の形成装置等を提供することを目的とする。   The present invention has been made in view of such a problem, and provides a thin film forming apparatus and the like that can suppress the breakage of a long member and can increase the speed of the long member as compared with the prior art. For the purpose.

前述した目的を達するために第1の発明は、長尺部材への塗膜材の塗布装置であって、第1のダイスと、前記第1のダイスと離間して配置される第2のダイスと、前記第1のダイスと前記第2のダイスとの間に配置される筒状部と、を具備し、前記第1のダイスは、前記第1のダイスを通過する長尺部材に塗膜材を連続して塗布可能であり、前記第2のダイスは、前記第2のダイスを通過する長尺部材に液状部材を連続して塗布可能であり、前記第1のダイスと前記筒状部の間、および前記第2のダイスと前記筒状部との間がシールされ、前記筒状部には減圧装置が接続され、前記筒状部の内部を減圧することが可能であることを特徴とする塗膜材の塗布装置である。   In order to achieve the above-mentioned object, a first invention is an apparatus for applying a coating material to a long member, and includes a first die and a second die that is disposed apart from the first die. And a cylindrical portion disposed between the first die and the second die, and the first die is coated on a long member that passes through the first die. A material can be continuously applied, and the second die can continuously apply a liquid member to a long member that passes through the second die, and the first die and the cylindrical portion And between the second die and the cylindrical portion, a pressure reducing device is connected to the cylindrical portion, and the inside of the cylindrical portion can be depressurized. It is a coating material coating apparatus.

前記筒状部は、隔壁によって、溶媒供給部と減圧部に区分されており、前記溶媒供給部には揮発した溶媒が導入され、前記減圧部には、前記減圧装置が接続され前記第1のダイスから導出された長尺部材は、前記溶媒供給部を通過し、前記隔壁に形成された孔を通過して、前記減圧部に導入してもよい。   The cylindrical part is divided into a solvent supply part and a decompression part by a partition wall, a volatilized solvent is introduced into the solvent supply part, and the decompression device is connected to the decompression part. The long member led out from the die may pass through the solvent supply unit, pass through a hole formed in the partition wall, and be introduced into the decompression unit.

第1の発明によれば、一対のダイスの間に筒状部を設け、筒状部内を減圧することで、短時間で塗膜材を乾燥させることができる。このため、乾燥の際の加熱温度を過剰に高くする必要がなく、長尺部材の破断を抑制することができる。   According to 1st invention, a coating-film material can be dried in a short time by providing a cylindrical part between a pair of dice | dies and decompressing the inside of a cylindrical part. For this reason, it is not necessary to raise the heating temperature at the time of drying excessively, and the breakage of the long member can be suppressed.

また、一対のダイスと筒状部との間はシールされるため、筒状部内を効率よく減圧することができる。また、一対のダイスには、それぞれ、塗膜材と液状部材が供給され、長尺部材がそれぞれのダイスを通過する際、ダイスと長尺部材との隙間が塗膜材または液状部材で塞がれる。このため、より効率よく筒状部内を減圧することができる。
また、このようにダイス間を密閉することで、乾燥時における異物の付着を防止できるとともに、減圧のために吸引したガスから溶媒を回収することで溶媒の再利用も可能である。
Further, since the gap between the pair of dies and the cylindrical portion is sealed, the inside of the cylindrical portion can be decompressed efficiently. The pair of dies are respectively supplied with a coating material and a liquid member, and when the long member passes through each die, the gap between the die and the long member is blocked with the coating material or the liquid member. It is. For this reason, the inside of a cylindrical part can be pressure-reduced more efficiently.
Further, by sealing between the dies in this way, it is possible to prevent the adhesion of foreign matters during drying, and it is possible to reuse the solvent by recovering the solvent from the gas sucked for decompression.

また、筒状部の内部を隔壁によって分割し、塗膜材を塗布するダイスの出側を溶媒供給部とすることで、ダイスの出口近傍での塗膜材の乾燥を防止することができる。このため、ダイスの出口近傍に、塗膜材の固形物などが付着することを防止することができる。また、隔壁の後方は減圧部となるため、塗膜材を効率よく乾燥させることができる。   Moreover, the inside of a cylindrical part is divided | segmented by a partition, and drying of the coating film material in the exit vicinity of die | dye can be prevented by making the exit side of the die | dye which apply | coats coating film material into a solvent supply part. For this reason, it can prevent that the solid substance of a coating-film material adheres to the exit vicinity of die | dye. Moreover, since the back of a partition becomes a pressure reduction part, a coating-film material can be dried efficiently.

第2の発明は、長尺部材への塗膜材の塗布方法であって、第1のダイスと、前記第1のダイスと離間して配置される第2のダイスと、前記第1のダイスと前記第2のダイスとの間に配置される筒状部と、を具備する塗装装置を用い、前記筒状部には減圧装置が接続され、前記第1のダイスと前記筒状部の間、および前記第2のダイスと前記筒状部との間がシールされ、前記第1のダイスに塗膜用の塗料を供給しつつ前記第1のダイスに長尺部材を連続して通過させ、前記第1のダイスで表面に塗膜材が塗布された長尺部材を減圧された前記筒状部に通過させ、前記塗膜材を乾燥させ、前記第2のダイスに液状部材を供給しつつ、前記塗膜材が乾燥した長尺部材を前記第2のダイスに通過させ、前記第1のダイスと長尺部材の間が前記塗膜材でシールされ、前記第2のダイスと長尺部材との間が前記液状部材によりシールされることを特徴とする長尺基材への塗膜形成方法である。   2nd invention is the coating method of the coating-film material to a elongate member, Comprising: The 1st dice, the 2nd dice spaced apart from the said 1st die, and the said 1st die And a cylindrical part disposed between the first die and the second die, a pressure reducing device is connected to the cylindrical part, and the first die and the cylindrical part are between And the gap between the second die and the cylindrical portion is sealed, and the elongated member is continuously passed through the first die while supplying the coating material for the coating film to the first die. While passing the elongate member having the coating material applied on the surface with the first die through the reduced-pressure tubular portion, drying the coating material, and supplying the liquid member to the second die The long member dried with the coating material is passed through the second die, and the space between the first die and the long member is the coating material. Is Lumpur, a film forming method of the the second die and between the elongated member is characterized in that it is sealed by the liquid member elongate base material.

前記液状部材は、前記塗膜材によって形成された塗膜に対して相溶性を有さず、前記液状部材を乾燥させることで、長尺部材上に前記塗膜材による塗膜のみを形成することが望ましい。   The liquid member is not compatible with the coating film formed by the coating material, and only the coating film by the coating material is formed on the long member by drying the liquid member. It is desirable.

前記液状部材は、前記塗膜材によって形成された塗膜に対して相溶性を有さず、前記液状部材を乾燥させることで、基材上に形成された前記塗膜材による塗膜上に保護膜を形成してもよい。   The liquid member does not have compatibility with the coating film formed by the coating material, and the liquid member is dried so that the liquid member is formed on the coating film by the coating material formed on the substrate. A protective film may be formed.

第2の発明によれば、筒状部を減圧することで、長尺部材に効率よく塗膜材を塗布することができる。また、塗膜材と液状部材とが相溶性を有しないため、液状部材を塗布した際に、乾燥した塗膜材が再度溶解することを防止することができる。また、液状部材が揮発性の高いものであれば、液状部材を揮発させることで、長尺部材には、塗膜材による薄膜のみを残存させることができる。   According to 2nd invention, a coating-film material can be efficiently apply | coated to a long member by decompressing a cylindrical part. Moreover, since the coating material and the liquid member are not compatible, it is possible to prevent the dried coating material from being dissolved again when the liquid member is applied. If the liquid member is highly volatile, only the thin film made of the coating material can be left on the long member by volatilizing the liquid member.

また、液状部材が塗膜材と相溶性を有さず、液状部材を乾燥させると、保護膜を形成することで、長尺部材に容易に保護膜を形成することができる。   Further, when the liquid member does not have compatibility with the coating material and the liquid member is dried, the protective film can be easily formed on the long member by forming the protective film.

本発明によれば、長尺部材の破断を抑制するとともに、従来と比較して長尺部材の速度を上げることが可能な薄膜の形成装置等を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, while suppressing the fracture | rupture of a long member, the thin film formation apparatus etc. which can raise the speed of a long member compared with the past can be provided.

塗布装置1の構造を示す断面図。FIG. 3 is a cross-sectional view showing the structure of the coating apparatus 1. 塗布装置1の部分拡大図であり、(a)は図1のE部拡大図、(b)は図1のF部拡大図。It is the elements on larger scale of the coating device 1, (a) is the E section enlarged view of FIG. 1, (b) is the F section enlarged view of FIG. 塗布装置1aの構造を示す断面図。Sectional drawing which shows the structure of the coating device 1a. 従来の塗布装置100の構造を示す断面図。Sectional drawing which shows the structure of the conventional coating device 100. FIG.

以下、図面を参照しながら、本発明の実施形態について説明する。図1は、塗布装置1を示す側方断面図である。塗布装置1は、主に、筒状部3、ダイス5a、5b、減圧装置7等から構成される。なお、以下の説明において、基材である長尺部材9の上面に対して塗膜材11を塗布する方法について説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a side sectional view showing a coating apparatus 1. The coating device 1 mainly includes a cylindrical portion 3, dies 5a and 5b, a decompression device 7, and the like. In addition, in the following description, the method to apply | coat the coating material 11 with respect to the upper surface of the elongate member 9 which is a base material is demonstrated.

ダイス5aとダイス5bが筒状部3を介して離間して一直線上に配置される。ダイス5a、5bは、それぞれ、上部のダイス部6と、下部のガイド部8とから構成される。ガイド部8は、長尺部材9を下方から保持する部材である。すなわち、長尺部材9は、ガイド部8と接触する。ダイス部6は、ガイド部8の上方に配置される。ダイス部6は、内部にキャビティ10を有する。ダイス部6の例えば長尺部材9の供給側の側面には配管が接続される。   The dice 5a and the dice 5b are spaced apart via the cylindrical portion 3 and arranged on a straight line. The dice 5a and 5b are each composed of an upper die portion 6 and a lower guide portion 8. The guide portion 8 is a member that holds the long member 9 from below. That is, the long member 9 is in contact with the guide portion 8. The die part 6 is disposed above the guide part 8. The die part 6 has a cavity 10 inside. For example, a pipe is connected to the supply side surface of the long member 9 of the die portion 6.

ダイス5aのダイス部6内部のキャビティに対して、外部の図示を省略した加圧容器もしくはディスペンサー等の塗膜材供給部から、配管を介して塗膜材11を連続して送り込むことができる(図中矢印B方向)。このとき、塗膜材11の圧力もしくは流量が制御される。   The coating material 11 can be continuously fed into the cavity inside the die part 6 of the die 5a from a coating material supply unit such as a pressurized container or a dispenser (not shown) via a pipe ( Arrow B direction in the figure). At this time, the pressure or flow rate of the coating material 11 is controlled.

同様に、ダイス5bのダイス部6内部のキャビティに対して、外部の図示を省略した加圧容器もしくはディスペンサー等の液状部材供給部から、配管を介して液状部材13を連続して送り込むことができる(図中矢印C方向)。このとき、液状部材13の圧力もしくは流量が制御される。
なお、塗膜材11の材質は、例えばPVDF(PolyVinylidene DiFluoride)、PZT(lead zirconate titanate)、P3HT(poly(3−hexylthiophene−2,5−diyl))、PCBM([6,6]−Phenyl−C61−Butyric Acid Methyl Ester)、PEDOT:PSS(poly(3,4−ethylenedioxythiophene):poly(styrene sulfonate))などの物質を、水、トルエン、クロロホルム、ジクロロベンゼン、アセトンなどの溶媒に溶解したものであるが、必ずしもこれらに限定されるものではない。
Similarly, the liquid member 13 can be continuously fed into the cavity inside the die portion 6 of the die 5b from a liquid member supply portion such as a pressurized container or a dispenser (not shown) via a pipe. (Arrow C direction in the figure). At this time, the pressure or flow rate of the liquid member 13 is controlled.
The material of the coating material 11 is, for example, PVDF (Polyvinylidene DiFluoride), PZT (Lead Zirconate Titanate), P3HT (Poly (3-hexylthiophene-2,5-diyl)), PCBM ([6,6] -Phenyl- C 61 -Butylic Acid Methyl Ester), PEDOT: PSS (poly (3,4-ethylenedithiophene): poly (styrene sulfonate)) dissolved in a solvent such as water, toluene, chloroform, dichlorobenzene and acetone However, it is not necessarily limited to these.

図2(a)は、筒状部3とダイス5aとの接続部近傍の拡大図である。筒状部3の端部は、ダイス5a(ダイス部6またはガイド部8)とシール部材15を介して接触する。シール部材15は、例えばOリングである。すなわち、筒状部3とダイス5aとの間は気密に接合される。   FIG. 2A is an enlarged view of the vicinity of the connecting portion between the cylindrical portion 3 and the die 5a. The end portion of the cylindrical portion 3 is in contact with the die 5a (the die portion 6 or the guide portion 8) via the seal member 15. The seal member 15 is, for example, an O-ring. That is, the cylindrical portion 3 and the die 5a are joined in an airtight manner.

同様に、図2(b)は、筒状部3とダイス5bとの接続部近傍の拡大図である。筒状部3の端部は、ダイス5b(ダイス部6またはガイド部8)とシール部材15を介して接触する。シール部材15は、例えばOリングである。すなわち、筒状部3とダイス5bとの間は気密に接合される。   Similarly, FIG. 2B is an enlarged view of the vicinity of the connecting portion between the cylindrical portion 3 and the die 5b. The end portion of the cylindrical portion 3 is in contact with the die 5b (the die portion 6 or the guide portion 8) via the seal member 15. The seal member 15 is, for example, an O-ring. That is, the cylindrical portion 3 and the die 5b are joined in an airtight manner.

筒状部3には、減圧装置7が接続される。したがって、減圧装置7によって、筒状部3内部は減圧される。この際、筒状部3とダイス5a、5bの間にはシール部材15が設けられるため、筒状部3とダイス5a、5bとの隙間から、エア等がリークすることを防止することができる。なお、筒状部3は、例えば石英管である。   A decompression device 7 is connected to the cylindrical portion 3. Therefore, the inside of the cylindrical portion 3 is decompressed by the decompression device 7. At this time, since the sealing member 15 is provided between the cylindrical portion 3 and the dies 5a and 5b, it is possible to prevent air and the like from leaking from the gap between the cylindrical portion 3 and the dies 5a and 5b. . In addition, the cylindrical part 3 is a quartz tube, for example.

図2(a)に示すように、ダイス5aのガイド部8とダイス部6との間を長尺部材9が通過する。この際、長尺部材9の上面側が、ダイス部6のキャビティに露出する。長尺部材9とダイス部6の内面との間の隙間には、塗膜材11が充填されている。したがって、長尺部材9の上面側は、キャビティ内の塗膜材11と接触し、長尺部材9とダイス部6の内面との間の隙間が塞がれる。   As shown in FIG. 2A, the long member 9 passes between the guide portion 8 and the die portion 6 of the die 5a. At this time, the upper surface side of the long member 9 is exposed in the cavity of the die portion 6. A coating material 11 is filled in a gap between the long member 9 and the inner surface of the die portion 6. Therefore, the upper surface side of the long member 9 is in contact with the coating material 11 in the cavity, and the gap between the long member 9 and the inner surface of the die portion 6 is closed.

なお、長尺部材9の両側面とダイス部6およびガイド部8の内側面との間にはわずかに隙間が形成される。長尺部材9の側面には、必ずしも塗膜材11を塗布する必要がない場合もあるが、長尺部材9と、ダイス部6およびガイド部8の内側面との間に隙間が形成されないと、長尺部材9を、塗布装置1内をスムーズに通過させることができない。したがって、長尺部材9を塗布装置1内で高速で通過させることが可能な程度に、可能な限り小さな隙間が形成される。なお、この隙間は、塗膜材11によって塞がれる。   A slight gap is formed between both side surfaces of the long member 9 and the inner surfaces of the die portion 6 and the guide portion 8. Although it may not always be necessary to apply the coating material 11 to the side surface of the long member 9, a gap is not formed between the long member 9 and the inner surface of the die portion 6 and the guide portion 8. The long member 9 cannot be smoothly passed through the coating apparatus 1. Therefore, a gap as small as possible is formed to such an extent that the long member 9 can be passed through the coating apparatus 1 at high speed. The gap is closed by the coating material 11.

長尺部材9の下面の少なくとも一部は、ダイス5aのガイド部8と接触する。ここで、ガイド部8上を進行する長尺部材9には、キャビティ内の塗膜材11の圧力が付与されるとともに、長尺部材9の供給および巻き取り装置により所定の張力が与えられる。また、長尺部材9は、張力が付与された状態(直線状)に対して、ガイド部8によって、やや上方に持ち上げられた状態で保持される。すなわち、長尺部材9によってガイド部8は、下方へ押さえつけられる。このようにすることで、ダイス5aのガイド部8と長尺部材9とを密着させ、長尺部材9の下面とガイド部8との隙間が塞がれる。   At least a part of the lower surface of the long member 9 is in contact with the guide portion 8 of the die 5a. Here, the pressure of the coating material 11 in the cavity is applied to the long member 9 traveling on the guide portion 8 and a predetermined tension is applied by the supply and winding device of the long member 9. Further, the long member 9 is held in a state where it is lifted slightly upward by the guide portion 8 with respect to a state where tension is applied (linear shape). That is, the guide portion 8 is pressed downward by the long member 9. By doing in this way, the guide part 8 and the elongate member 9 of the die | dye 5a are closely_contact | adhered, and the clearance gap between the lower surface of the elongate member 9 and the guide part 8 is block | closed.

同様に、図2(b)に示すように、ダイス5bのガイド部8とダイス部6との間を長尺部材9が通過する。この際、長尺部材9の上面側が、ダイス部6のキャビティに露出する。長尺部材9とダイス部6の内面との間の隙間には、液状部材13が充填されている。したがって、長尺部材9の上面側は、キャビティ内の液状部材13と接触し、長尺部材9とダイス部6の内面との間の隙間が塞がれる。   Similarly, as shown in FIG. 2B, the long member 9 passes between the guide portion 8 and the die portion 6 of the die 5b. At this time, the upper surface side of the long member 9 is exposed in the cavity of the die portion 6. A liquid member 13 is filled in a gap between the long member 9 and the inner surface of the die portion 6. Therefore, the upper surface side of the long member 9 comes into contact with the liquid member 13 in the cavity, and the gap between the long member 9 and the inner surface of the die portion 6 is closed.

なお、長尺部材9の両側面とダイス部6およびガイド部8の内側面との間には、長尺部材9を塗布装置1内で高速で通過させることが可能な程度に、可能な限り小さな隙間が形成される。なお、この隙間は、液状部材13によって塞がれる。   As long as possible, the long member 9 can pass between the side surfaces of the long member 9 and the inner surfaces of the die portion 6 and the guide portion 8 at a high speed in the coating apparatus 1. A small gap is formed. This gap is closed by the liquid member 13.

長尺部材9の下面の少なくとも一部は、ダイス5bのガイド部8と接触する。ここで、ガイド部8上を進行する長尺部材9には、キャビティ内の液状部材13の圧力が付与されるとともに、長尺部材9の供給および巻き取り装置により所定の張力が与えられる。また、長尺部材9は、張力が付与された状態(直線状)に対して、ガイド部8によって、やや上方に持ち上げられた状態で保持される。すなわち、長尺部材9によってガイド部8は、下方へ押さえつけられる。このようにすることで、ダイス5bのガイド部8と長尺部材9とを密着させ、長尺部材9の下面とガイド部8との隙間が塞がれる。   At least a part of the lower surface of the long member 9 is in contact with the guide portion 8 of the die 5b. Here, the pressure of the liquid member 13 in the cavity is applied to the long member 9 traveling on the guide portion 8 and a predetermined tension is applied by the supply and winding device of the long member 9. Further, the long member 9 is held in a state where it is lifted slightly upward by the guide portion 8 with respect to a state where tension is applied (linear shape). That is, the guide portion 8 is pressed downward by the long member 9. By doing in this way, the guide part 8 and the elongate member 9 of the die | dye 5b are closely_contact | adhered, and the clearance gap between the lower surface of the elongate member 9 and the guide part 8 is block | closed.

前述したように、減圧装置7を稼働させると、筒状部3内部のエア等を吸引することができる(図中矢印D)。また、筒状部3は、ダイス5a、5bとの隙間がシール部材15で塞がれるとともに、ダイス5a、5bと長尺部材9との隙間が、塗膜材11または液状部材13で塞がれる。したがって、筒状部3内を確実に減圧状態に保つことができる。   As described above, when the decompression device 7 is operated, air or the like inside the cylindrical portion 3 can be sucked (arrow D in the figure). Further, in the cylindrical portion 3, the gap between the dies 5 a and 5 b is closed by the seal member 15, and the gap between the dies 5 a and 5 b and the long member 9 is closed by the coating material 11 or the liquid member 13. It is. Therefore, the inside of the cylindrical portion 3 can be reliably maintained in a reduced pressure state.

ここで、塗膜材11は、溶剤系の液状部材である。すなわち、溶剤が揮発することで塗膜材が乾燥し、塗膜が形成される。前述したように、筒状部3の内部は減圧されている。したがって、従来の常圧下と比較して、溶剤をより速く揮発させることができる。したがって、従来よりも高速に長尺部材9を移動させても、塗膜材を乾燥させることができる。特に、本発明では、長尺部材9とダイス部6との隙間が、塗膜材11または液状部材13で塞がれるため、長尺部材9とダイス部6との隙間からエア等が浸入することを防止し、効率よく減圧を保つことができる。   Here, the coating material 11 is a solvent-based liquid member. That is, when the solvent is volatilized, the coating material is dried and a coating film is formed. As described above, the inside of the cylindrical portion 3 is depressurized. Therefore, the solvent can be volatilized faster compared to the conventional normal pressure. Therefore, even if the elongate member 9 is moved faster than before, the coating material can be dried. In particular, in the present invention, since the gap between the long member 9 and the die part 6 is closed by the coating material 11 or the liquid member 13, air or the like enters from the gap between the long member 9 and the die part 6. This can be prevented and the pressure reduction can be efficiently maintained.

なお、筒状部3の外周部に、図示を省略した加熱装置を配置してもよい。この場合でも、従来の常圧下と比較して、より低温で塗膜材を乾燥させることができる。このため、過熱による長尺部材9の破断等を防止することができる。   In addition, you may arrange | position the heating apparatus which abbreviate | omitted illustration to the outer peripheral part of the cylindrical part 3. FIG. Even in this case, the coating material can be dried at a lower temperature as compared with the conventional normal pressure. For this reason, breakage of the long member 9 due to overheating can be prevented.

なお、ダイス部6の入口形状は長尺部材9の幅方向に一様な形状が望ましいが、円形であっても良い。   The inlet shape of the die portion 6 is desirably a uniform shape in the width direction of the long member 9, but may be circular.

ここで、長尺部材9は、長手方向に連続した部材であり、例えば、径が数μm〜数mmであり、断面が丸、矩形等の繊維状基材(線状体)であってもよく、幅が数mm以上で厚さが数μm〜数mmの平板状基材であってもよい。また、長尺部材9の材質は例えば、ガラス、樹脂、金属であるが、必ずしもこれらに限定されるものではない。   Here, the long member 9 is a member that is continuous in the longitudinal direction. For example, the long member 9 may be a fibrous base material (linear body) having a diameter of several μm to several mm and having a round or rectangular cross section. It may be a flat substrate having a width of several mm or more and a thickness of several μm to several mm. Moreover, although the material of the elongate member 9 is glass, resin, and a metal, for example, it is not necessarily limited to these.

次に、長尺部材9の表面に塗膜材11に塗膜を形成する方法について説明する。長尺部材9は、ホビン等から供給装置(図示省略)により、長尺部材9前処理装置(図示省略)へ送られる。供給装置から連続して巻き出される長尺部材9は、前処理装置によっての表面の洗浄・表面改質が行われる。例えば、走行する長尺部材9に対して所定の成分のガス(プラズマが望ましい)や液体を照射もしくは浸漬して長尺部材9の表面の洗浄や表面改質が行われる。   Next, a method of forming a coating film on the coating material 11 on the surface of the long member 9 will be described. The long member 9 is sent from a hobbin or the like to a long member 9 pretreatment device (not shown) by a supply device (not shown). The long member 9 continuously unwound from the supply device is subjected to surface cleaning and surface modification by the pretreatment device. For example, the surface of the long member 9 is cleaned or surface-modified by irradiating or immersing a gas (preferably plasma) or liquid of a predetermined component on the traveling long member 9.

前処理装置の後工程には塗布装置1が配置される。なお、前処理装置から塗布装置1にかけては不活性ガスを満たす等により長尺部材9が外気にさらされない構造にするのが望ましい。塗布装置1に導入された長尺部材9は、まず、ダイス5aを通過する(図中矢印A方向)。この際、ダイス5aのダイス部6内に供給される塗膜材11が長尺部材9の上面に塗布される。なお、塗膜材11の塗布量は、ダイス部6と長尺部材9上面とのギャップおよび塗膜材11の供給圧力によって制御される。   A coating apparatus 1 is disposed in a post process of the pretreatment apparatus. In addition, it is desirable that the long member 9 is not exposed to the outside air by filling the inert gas or the like from the pretreatment apparatus to the coating apparatus 1. The long member 9 introduced into the coating apparatus 1 first passes through the die 5a (in the direction of arrow A in the figure). At this time, the coating material 11 supplied into the die portion 6 of the die 5 a is applied to the upper surface of the long member 9. The coating amount of the coating material 11 is controlled by the gap between the die portion 6 and the upper surface of the long member 9 and the supply pressure of the coating material 11.

ダイス5aから出た長尺部材9は、筒状部3内部を通過する。前述したように、筒状部3では、長尺部材9に塗布された塗膜材11が乾燥する。この際、筒状部3とダイス5a、5bとの隙間がシール部材15で塞がれるとともに、ダイス5a、5bと長尺部材9との隙間が、塗膜材11または液状部材13で塞がれる。したがって、筒状部3内を確実に減圧状態に保つことができる。   The long member 9 coming out of the die 5a passes through the inside of the cylindrical portion 3. As described above, in the cylindrical portion 3, the coating material 11 applied to the long member 9 is dried. At this time, the gap between the cylindrical portion 3 and the dies 5 a and 5 b is closed by the seal member 15, and the gap between the dies 5 a and 5 b and the long member 9 is closed by the coating material 11 or the liquid member 13. It is. Therefore, the inside of the cylindrical portion 3 can be reliably maintained in a reduced pressure state.

筒状部3を通過し、塗膜材11が乾燥して塗膜が形成された長尺部材9は、ダイス5bに導入される。ダイス5bでは、ダイス5bのダイス部6内に供給される液状部材13が長尺部材9の塗膜上面に塗布される。ここで、液状部材13としては、塗膜材11と相溶性がないものが適用される。このようにすることで、液状部材13によって塗膜が溶解することがない。   The long member 9 that has passed through the cylindrical portion 3 and has a coating film formed by drying the coating film material 11 is introduced into the die 5b. In the dice 5 b, the liquid member 13 supplied into the dice portion 6 of the dice 5 b is applied to the upper surface of the coating film of the long member 9. Here, the liquid member 13 is not compatible with the coating material 11. By doing so, the coating film is not dissolved by the liquid member 13.

また、液状部材13としては、例えば、揮発性の高いアルコールや水など、乾燥による残渣のないものが望ましい。このようにすることで、ダイス5bを通過後、液状部材13を完全に乾燥させると、長尺部材9上には塗膜のみを形成することができる。   Moreover, as the liquid member 13, for example, a material having no residue due to drying, such as highly volatile alcohol or water, is desirable. In this way, when the liquid member 13 is completely dried after passing through the die 5 b, only the coating film can be formed on the long member 9.

また、液状部材13としては、塗膜材11と相溶性がなく、塗膜上に保護層を形成可能なものでもよい。保護膜を形成可能であれば、液状部材13は例えば紫外線硬化樹脂等であってもよい。   Further, the liquid member 13 may not be compatible with the coating material 11 and can form a protective layer on the coating. If the protective film can be formed, the liquid member 13 may be, for example, an ultraviolet curable resin.

このようにして、長尺部材9に所望の厚みの塗膜が形成された後、長尺部材9が図示を省略した巻き取り装置によって巻き取られる。このようにして、塗膜材11が塗布された長尺部材9を形成することができる。   Thus, after the coating film of desired thickness is formed in the elongate member 9, the elongate member 9 is wound up by the winding apparatus which abbreviate | omitted illustration. In this way, the long member 9 to which the coating material 11 is applied can be formed.

以上説明したように、本実施の形態によれば、減圧された筒状部3内に塗膜材11が塗布された長尺部材9を通過させるため、塗膜材11の高速乾燥が可能となる。したがって、長尺部材9の線速を上げても、塗膜材11の乾燥能力を確保することができる。   As described above, according to the present embodiment, since the elongated member 9 coated with the coating material 11 is passed through the decompressed tubular portion 3, the coating material 11 can be dried at high speed. Become. Therefore, even if the linear velocity of the long member 9 is increased, the drying ability of the coating material 11 can be ensured.

特に、筒状部3とダイス5a、5bの間にはシール部材15が設けられるため、筒状部3とダイス5a、5bの間からエア等がリークすることがない。また、ダイス部6と長尺部材9との間は、塗膜材11または液状部材13によって塞がれるため、この隙間からエア等がリークすることがない。   In particular, since the sealing member 15 is provided between the cylindrical portion 3 and the dies 5a and 5b, air or the like does not leak from between the cylindrical portion 3 and the dies 5a and 5b. Further, since the space between the die portion 6 and the long member 9 is blocked by the coating material 11 or the liquid member 13, air or the like does not leak from this gap.

また、液状部材13を完全に揮発させることで、長尺部材9上には塗膜のみを形成することができる。また、液状部材13によって塗膜材による塗膜上に保護膜を積層することもできる。   Moreover, only the coating film can be formed on the long member 9 by completely volatilizing the liquid member 13. Moreover, a protective film can also be laminated | stacked on the coating film by a coating material by the liquid member 13. FIG.

次に、第2の実施の形態について説明する。図3は、塗布装置1aを示す側方断面図である。なお、以下の説明において、塗布装置1と同様の構成については、図1、図2と同様の符号を付し、重複する説明を省略する。塗布装置1aは、塗布装置1と同様の構成を具備するが、隔壁部17および溶媒供給装置19が用いられる点で異なる。   Next, a second embodiment will be described. FIG. 3 is a side sectional view showing the coating apparatus 1a. In the following description, the same components as those of the coating apparatus 1 are denoted by the same reference numerals as those in FIGS. 1 and 2, and redundant descriptions are omitted. The coating apparatus 1a has the same configuration as the coating apparatus 1, but differs in that a partition wall portion 17 and a solvent supply device 19 are used.

塗布装置1aでは、筒状部3が、隔壁部17によって内部が区分される。ダイス5a側の筒状部3には、溶媒供給装置19が接続される。ダイス5b側の筒状部3には、減圧装置7が接続される。すなわち、筒状部3の内部が、溶媒供給装置19と接続された溶媒供給部と、減圧装置7が接続された減圧部に区分される。   In the coating apparatus 1 a, the inside of the cylindrical part 3 is divided by the partition part 17. A solvent supply device 19 is connected to the cylindrical portion 3 on the die 5a side. A decompression device 7 is connected to the cylindrical portion 3 on the die 5b side. That is, the inside of the cylindrical portion 3 is divided into a solvent supply unit connected to the solvent supply device 19 and a decompression unit connected to the decompression device 7.

なお、隔壁部17と筒状部3との間には、図示を省略したシール部材が設けられる。隔壁部17には、長尺部材9が貫通可能な孔が設けられる。隔壁部17の孔は、長尺部材9に対して十分に大きいため、隔壁部17と長尺部材9(および長尺部材9に塗布された塗膜材11)と接触することがない。   A seal member (not shown) is provided between the partition wall portion 17 and the cylindrical portion 3. The partition wall 17 is provided with a hole through which the long member 9 can pass. Since the hole of the partition wall portion 17 is sufficiently large with respect to the long member 9, it does not come into contact with the partition wall portion 17 and the long member 9 (and the coating material 11 applied to the long member 9).

ダイス5aから出た長尺部材9は、筒状部3の溶媒供給部に導入される。溶媒供給部には、溶媒供給装置19から揮発した溶媒が供給される。このため、溶媒供給部内の溶媒の分圧が上昇する。したがって、溶媒供給部内においては、塗膜材11の溶媒の揮発が進行せず、乾燥が抑制される。   The long member 9 coming out of the die 5 a is introduced into the solvent supply part of the cylindrical part 3. The solvent supply unit 19 is supplied with the volatile solvent from the solvent supply device 19. For this reason, the partial pressure of the solvent in a solvent supply part rises. Therefore, in the solvent supply unit, the solvent of the coating material 11 does not evaporate, and drying is suppressed.

次に、長尺部材9は、溶媒供給部から隔壁部17を介して、減圧部に導入される。減圧部では、前述したように、長尺部材9に塗布された塗膜材11が乾燥する。すなわち、隔壁部17で区分されたダイス5a側の溶媒供給部においては、塗膜材11の乾燥を抑制し、ダイス5b側の減圧部において、塗膜材11の乾燥を促進させる。   Next, the long member 9 is introduced from the solvent supply unit to the decompression unit via the partition wall unit 17. In the decompression unit, as described above, the coating material 11 applied to the long member 9 is dried. That is, drying of the coating material 11 is suppressed in the solvent supply portion on the die 5a side separated by the partition wall portion 17, and drying of the coating material 11 is promoted in the decompression portion on the die 5b side.

第2の実施の形態によれば、第1の実施形態と同様の効果を得ることができる。また、溶媒供給部において、塗膜材11の乾燥を抑制するため、ダイス5aのダイス部6の出口近傍に、塗膜材11の固形物(塗膜材11が付着したものが直ちに乾燥して固化したもの)の付着および堆積を抑制することができる。このため、長尺部材9上に塗布された塗膜材11への汚れや傷の発生を抑制することができる。   According to the second embodiment, the same effect as that of the first embodiment can be obtained. In addition, in the solvent supply unit, in order to suppress drying of the coating material 11, the solid matter of the coating material 11 (the material to which the coating material 11 has adhered is immediately dried near the outlet of the die portion 6 of the die 5 a. Adhesion and deposition of the solidified product) can be suppressed. For this reason, generation | occurrence | production of the stain | pollution | contamination and the damage | wound to the coating-film material 11 apply | coated on the elongate member 9 can be suppressed.

また、隔壁部17は、長尺部材9と接触することがないため、減圧部側の壁面等に塗膜材11が付着することがない。このため、塗膜材11の固形物の付着や堆積を防止することができる。   Moreover, since the partition part 17 does not contact the elongate member 9, the coating-film material 11 does not adhere to the wall surface etc. of the pressure reduction part side. For this reason, it is possible to prevent adhesion and accumulation of solid matter of the coating material 11.

なお、溶媒供給部に供給された溶媒は、隔壁部17の孔を通って減圧部側に流入するが、溶媒供給部に対して減圧部の大きさを十分に大きくし、減圧装置7によって内部の溶媒を吸引することで、減圧部を減圧状態に保持することができる。   Note that the solvent supplied to the solvent supply unit flows into the decompression unit side through the hole of the partition wall unit 17, but the size of the decompression unit is sufficiently increased with respect to the solvent supply unit, and the decompression device 7 By sucking the solvent, the decompression part can be kept in a decompressed state.

以下に、本発明の一実施例を示す。図3に示す塗布装置1aを用いて長尺部材へ塗膜材を塗布した。
長尺部材9として、厚さ100μmのポリエチレンテレフタラート(PET)に酸化インジウムスズ(ITO)が製膜されたものを幅5mmにスリット加工したものを用いた。塗膜材としては、導電性ポリマー材料であるpoly(3,4−ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) 水分散液(Heraeus社製:CLEVIOS P AI 4083(商品名))を用いた。また、液状部材としてはトルエンを用いた。
An embodiment of the present invention will be shown below. The coating material was apply | coated to the elongate member using the coating device 1a shown in FIG.
As the long member 9, a material obtained by forming a film of indium tin oxide (ITO) on polyethylene terephthalate (PET) having a thickness of 100 μm and slitting it to a width of 5 mm was used. As the coating material, poly (3,4-ethylenedithiothiophene): poly (styrene sulfate) (PEDOT: PSS) aqueous dispersion (made by Heraeus: CLEVIOS P AI 4083 (trade name)), which is a conductive polymer material, is used. It was. Moreover, toluene was used as the liquid member.

長尺部材の進行速度を5m/minとし、長尺部材9の表面に厚さ約150nmの塗膜を形成した。このとき、ダイス5aと隔壁部17により形成された溶媒供給部には溶媒としてトルエンを供給した。また、筒状部内部を10kPaに減圧するとともに、塗膜材11を乾燥・熱処理装置によって150℃を超えない温度で乾燥した。
さらに、塗膜が形成された長尺部材9を巻き取り装置によって巻き取った。以上により、長尺部材の表面に塗膜が形成された。
The traveling speed of the long member was 5 m / min, and a coating film having a thickness of about 150 nm was formed on the surface of the long member 9. At this time, toluene was supplied as a solvent to the solvent supply part formed by the dice 5a and the partition part 17. Moreover, while reducing the pressure inside the cylindrical part to 10 kPa, the coating material 11 was dried at a temperature not exceeding 150 ° C. by a drying / heat treatment apparatus.
Furthermore, the long member 9 on which the coating film was formed was wound up by a winding device. As described above, a coating film was formed on the surface of the long member.

本実施例によれば、塗膜材11の高速乾燥が可能となり、筒状部内部を減圧しない場合と比較して約2倍の速度で塗膜の形成が可能であった。また、溶媒供給部を設けたことで、ダイス5aのダイス部6の出口近傍に塗膜材11が付着することがなく、形成された塗膜には塗膜材11の固形物の付着や堆積が観察されなかった。   According to the present example, the coating material 11 can be dried at high speed, and the coating film can be formed at a speed about twice that in the case where the inside of the cylindrical portion is not decompressed. In addition, since the solvent supply unit is provided, the coating material 11 does not adhere to the vicinity of the exit of the die portion 6 of the die 5a, and the solid matter of the coating material 11 is deposited or deposited on the formed coating film. Was not observed.

以上、添付図を参照しながら、本発明の実施の形態を説明したが、本発明の技術的範囲は、前述した実施の形態に左右されない。当業者であれば、特許請求の範囲に記載された技術的思想の範疇内において各種の変更例または修正例に想到し得ることは明らかであり、それらについても当然に本発明の技術的範囲に属するものと了解される。   As mentioned above, although embodiment of this invention was described referring an accompanying drawing, the technical scope of this invention is not influenced by embodiment mentioned above. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

例えば、塗布装置1、1aにおいて、塗膜材11が揮発した溶媒をより効率よく減圧装置7に流すために、減圧部に、乾燥空気などの気体を、減圧レベルが確保できる程度にわずかに導入することもできる。
また、塗膜材11を長尺部材9の上面に形成する場合の例を示したが、上面と下面の両方に塗布する場合にも用いることができる。
For example, in the coating apparatus 1, 1a, in order to flow the solvent in which the coating film material 11 has volatilized to the decompression device 7 more efficiently, a gas such as dry air is introduced into the decompression unit so as to ensure a decompression level. You can also
Moreover, although the example in the case of forming the coating material 11 in the upper surface of the elongate member 9 was shown, it can be used also when apply | coating to both an upper surface and a lower surface.

1、1a………塗布装置
3………筒状部
5a、5b………ダイス
6………ダイス部
7………減圧装置
8………ガイド部
9………長尺部材
10………キャビティ
11………塗膜材
13………液状部材
15………シール部材
17………隔壁部
19………溶媒供給部
100………塗布装置
101………ダイス部
103………塗膜材
105………長尺部材
111………ダイス部
112………ガイド部
113………キャビティ
DESCRIPTION OF SYMBOLS 1, 1a ......... Applicator 3 ......... Cylindrical part 5a, 5b ......... Dice 6 ......... Die part 7 ......... Pressure reducing device 8 ......... Guide part 9 ......... Long member 10 ... ... Cavity 11 ......... Coating material 13 ......... Liquid member 15 ......... Seal member 17 ...... Partition wall part 19 ...... Solvent supply part 100 ...... Applicator 101 ...... Die part 103 ......... Coating material 105 ......... Long member 111 ... ... Die part 112 ... ... Guide part 113 ... ... Cavity

Claims (5)

長尺部材への塗膜材の塗布装置であって、
第1のダイスと、
前記第1のダイスと離間して配置される第2のダイスと、
前記第1のダイスと前記第2のダイスとの間に配置される筒状部と、
を具備し、
前記第1のダイスは、前記第1のダイスを通過する長尺部材に塗膜材を連続して塗布可能であり、
前記第2のダイスは、前記第2のダイスを通過する長尺部材に液状部材を連続して塗布可能であり、
前記第1のダイスと前記筒状部の間、および前記第2のダイスと前記筒状部との間がシールされ、
前記筒状部には減圧装置が接続され、前記筒状部の内部を減圧することが可能であることを特徴とする塗膜材の塗布装置。
An apparatus for applying a coating material to a long member,
The first die,
A second die spaced apart from the first die;
A cylindrical portion disposed between the first die and the second die;
Comprising
The first die can be continuously coated with a coating material on a long member passing through the first die,
The second die can continuously apply a liquid member to a long member that passes through the second die,
The space between the first die and the tubular portion and the space between the second die and the tubular portion are sealed,
A coating apparatus for applying a coating material, wherein a decompression device is connected to the tubular portion, and the interior of the tubular portion can be decompressed.
前記筒状部は、隔壁によって、溶媒供給部と減圧部に区分されており、前記溶媒供給部には揮発した溶媒が導入され、前記減圧部には、前記減圧装置が接続され前記第1のダイスから導出された長尺部材は、前記溶媒供給部を通過し、前記隔壁に形成された孔を通過して、前記減圧部に導入することを特徴とする請求項1記載の塗膜材の塗布装置。   The cylindrical part is divided into a solvent supply part and a decompression part by a partition wall, a volatilized solvent is introduced into the solvent supply part, and the decompression device is connected to the decompression part. 2. The coating material according to claim 1, wherein the elongate member derived from the die passes through the solvent supply unit, passes through a hole formed in the partition, and is introduced into the decompression unit. Coating device. 長尺部材への塗膜材の塗布方法であって、
第1のダイスと、前記第1のダイスと離間して配置される第2のダイスと、前記第1のダイスと前記第2のダイスとの間に配置される筒状部と、を具備する塗装装置を用い、前記筒状部には減圧装置が接続され、前記第1のダイスと前記筒状部の間、および前記第2のダイスと前記筒状部との間がシールされ、
前記第1のダイスに塗膜用の塗料を供給しつつ前記第1のダイスに長尺部材を連続して通過させ、前記第1のダイスで表面に塗膜材が塗布された長尺部材を減圧された前記筒状部に通過させ、前記塗膜材を乾燥させ、前記第2のダイスに液状部材を供給しつつ、前記塗膜材が乾燥した長尺部材を前記第2のダイスに通過させ、
前記第1のダイスと長尺部材の間が前記塗膜材でシールされ、前記第2のダイスと長尺部材との間が前記液状部材によりシールされることを特徴とする長尺基材への塗膜形成方法。
It is a coating method of a coating material on a long member,
A first die, a second die disposed apart from the first die, and a cylindrical portion disposed between the first die and the second die. Using a coating apparatus, a pressure reducing device is connected to the tubular part, and the space between the first die and the tubular part and between the second die and the tubular part are sealed,
While supplying the coating material for the coating film to the first die, the long member is continuously passed through the first die, and the long member whose coating material is applied to the surface with the first die is provided. Pass through the decompressed cylindrical part, dry the coating material, and supply the liquid member to the second die, while passing the long member dried by the coating material to the second die. Let
To the long base material, the space between the first die and the long member is sealed with the coating material, and the space between the second die and the long member is sealed with the liquid member. Coating film forming method.
前記液状部材は、前記塗膜材によって形成された塗膜に対して相溶性を有さず、前記液状部材を乾燥させることで、長尺部材上に前記塗膜材による塗膜のみを形成することを特徴とする請求項3記載の長尺基材への塗膜形成方法。   The liquid member is not compatible with the coating film formed by the coating material, and only the coating film by the coating material is formed on the long member by drying the liquid member. The method for forming a coating film on a long base material according to claim 3. 前記液状部材は、前記塗膜材によって形成された塗膜に対して相溶性を有さず、前記液状部材を乾燥させることで、基材上に形成された前記塗膜材による塗膜上に保護膜を形成することを特徴とする請求項3記載の長尺基材への塗膜形成方法。   The liquid member does not have compatibility with the coating film formed by the coating material, and the liquid member is dried so that the liquid member is formed on the coating film by the coating material formed on the substrate. The method for forming a coating film on a long base material according to claim 3, wherein a protective film is formed.
JP2013086345A 2013-04-17 2013-04-17 Coating material coating apparatus, coating film forming method on long member Expired - Fee Related JP6040393B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013086345A JP6040393B2 (en) 2013-04-17 2013-04-17 Coating material coating apparatus, coating film forming method on long member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013086345A JP6040393B2 (en) 2013-04-17 2013-04-17 Coating material coating apparatus, coating film forming method on long member

Publications (2)

Publication Number Publication Date
JP2014210217A JP2014210217A (en) 2014-11-13
JP6040393B2 true JP6040393B2 (en) 2016-12-07

Family

ID=51930422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013086345A Expired - Fee Related JP6040393B2 (en) 2013-04-17 2013-04-17 Coating material coating apparatus, coating film forming method on long member

Country Status (1)

Country Link
JP (1) JP6040393B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109789440A (en) * 2016-09-27 2019-05-21 富士胶片株式会社 The manufacturing method of film

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04200769A (en) * 1990-11-30 1992-07-21 Dainippon Printing Co Ltd Multilayer coating equipment
JP2006194546A (en) * 2005-01-14 2006-07-27 Dainippon Printing Co Ltd Continuously decompressed drying method and apparatus
JP2010274241A (en) * 2009-06-01 2010-12-09 Furukawa Electric Co Ltd:The Thin film forming method and thin film forming system

Also Published As

Publication number Publication date
JP2014210217A (en) 2014-11-13

Similar Documents

Publication Publication Date Title
JP5691175B2 (en) Method for producing gas barrier film, gas barrier film, and organic photoelectric conversion element
KR101022017B1 (en) Apparatus for manufacturing hierarchical structure
CN103332685B (en) Transfer device and transfer method of graphene
Biswas et al. Effects of particle size and substrate surface properties on deposition dynamics of inkjet-printed colloidal drops for printable photovoltaics fabrication
JP4870502B2 (en) Organic EL sheet manufacturing equipment
JP6040393B2 (en) Coating material coating apparatus, coating film forming method on long member
KR20120034284A (en) Method for manufacturing a flexible transparent electrode film in roll to roll system
JP6926075B2 (en) Methods for processing millimeter, micrometer or nanometer structures on the surface of a substrate
Wang et al. Rapid nanopatterning technique based on monolayer silica nanosphere close-packing by spin coating
JP2008023467A (en) Film washing device
US10290517B2 (en) Etching apparatus and method, and flexible film etched by the etching method
KR101626576B1 (en) Hybrid coating device having chamber type ink supply
JP2014129565A (en) Film formation apparatus
JP4869013B2 (en) Multilayer film manufacturing method and film forming apparatus
JP6134942B2 (en) Coating material coating apparatus, coating method of coating material on long member
CN110624789A (en) Method for preparing large-area film by inversion type sticking coating method
JP2014132611A (en) Method for manufacturing film-forming substance and film-forming device
KR101470306B1 (en) Maskless Etching Apparatus By Condensing Behavior of Etching Gas, And Etching Method For Fabricating Nano or Micro Scale Pattern Using The Same
CN203451227U (en) Transfer device for graphene
WO2024090226A1 (en) Film forming apparatus, method for producing multilayer body, and method for producing semiconductor device
KR101527715B1 (en) Apparatus for transfer process of large area nanoscale thin films
JP2019162589A (en) Coating device and coating method
JP2011018785A (en) Thin film forming method, gas barrier film, and organic photoelectric conversion element
JP2024106251A (en) Film forming apparatus, laminate manufacturing method, and semiconductor device manufacturing method
JP5207036B2 (en) Laminated wafer end face seal forming apparatus and seal forming method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160113

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160908

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20160920

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20161005

R150 Certificate of patent or registration of utility model

Ref document number: 6040393

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees