JP6032239B2 - Stopper for overhead traveling vehicles - Google Patents

Description

  The present invention relates to a stopper for an overhead traveling vehicle.

  As a conventional stopper for overhead traveling vehicles, it can be attached to and detached from the traveling rail on which the overhead traveling vehicle travels, and when it is attached to the traveling rail, it can be detected by a detection unit provided on the overhead traveling vehicle to perform overhead traveling. What stops a vehicle is known (for example, refer patent document 1).

Japanese Patent No. 4465418

  The overhead traveling vehicle stopper as described above secures sufficient strength to stop the overhead traveling vehicle that has collided in case the overhead traveling vehicle cannot be stopped by being detected by the detection unit. There is a need. However, if the weight of the overhead traveling vehicle stopper is increased by securing sufficient strength, it may be difficult for an operator to attach and detach the overhead traveling vehicle stopper to the traveling rail.

  Then, an object of this invention is to provide the stopper for overhead traveling vehicles which can ensure sufficient intensity | strength, maintaining the efficiency of the attachment or detachment operation | work with respect to a traveling rail.

  The stopper for an overhead traveling vehicle of the present invention can be attached to and detached from a traveling rail on which the overhead traveling vehicle travels, and in a state where the overhead traveling vehicle is attached to the traveling rail, it is detected by a detection unit provided on the overhead traveling vehicle. A stopper for an overhead traveling vehicle that stops the traveling vehicle, the stopper main body having a detected portion that is detachable from the traveling rail and is detected by the detecting portion when attached to the traveling rail, and the traveling rail And a stopper reinforcing body connected to the stopper main body in a state of being attached to the traveling rail.

  In this overhead traveling vehicle stopper, the stopper reinforcing body is connected to the stopper body in a state where the stopper reinforcing body is attached to the traveling rail. Thereby, since an operator can handle a stopper main body and a stopper reinforcement separately, the stopper main body and the stopper reinforcement can be easily attached to and detached from the traveling rail. On the other hand, in the state attached to the traveling rail, the stopper main body and the stopper reinforcing body are connected to each other, so that the overall strength of the overhead traveling vehicle stopper can be sufficiently ensured. Therefore, according to this overhead traveling vehicle stopper, it is possible to ensure sufficient strength while maintaining the efficiency of the attaching / detaching operation with respect to the traveling rail.

  In the overhead traveling vehicle stopper of the present invention, the stopper body and the stopper reinforcing body may be detachable from a bracket provided on a portion of the traveling rail other than the traveling portion on which the overhead traveling vehicle travels. According to this configuration, even if the overhead traveling vehicle collides with the overhead traveling vehicle stopper, the traveling portion of the traveling rail can be prevented from being damaged.

  The stopper for an overhead traveling vehicle of the present invention may further include a connecting lock that restricts release of the connection between the stopper main body and the stopper reinforcing body when the stopper main body and the stopper reinforcing body are attached to the traveling rail. According to this configuration, for example, it is possible to prevent an operator other than the worker who has attached the overhead traveling vehicle stopper to the traveling rail from accidentally removing the overhead traveling vehicle stopper from the traveling rail.

  In the overhead traveling vehicle stopper according to the present invention, the stopper main body includes a first rod-shaped member that is detachable from the traveling rail, a first beam having one end fixed to the first rod-shaped member, and a detected portion attached thereto. The stopper reinforcing body is a second rod-shaped member that can be attached to and detached from the traveling rail, and the other end is fixed to the second rod-shaped member and attached to the traveling rail. You may have the 2nd beam-shaped member with which an edge part is connected with the other end part of a 1st beam-shaped member. According to this structure, a stopper main body and a stopper reinforcement body can be comprised with a general-purpose member called a rod-shaped member and a beam-shaped member.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the stopper for overhead traveling vehicles which can ensure sufficient intensity | strength, maintaining the efficiency of the attachment or detachment operation | work with respect to a traveling rail.

It is a perspective view of the conveyance system to which the stopper for overhead traveling vehicles of one Embodiment of this invention was applied. It is a perspective view of the bracket provided in the traveling rail of FIG. It is a perspective view of the stopper main body of the stopper for overhead traveling vehicles of FIG. It is a perspective view of the stopper reinforcement body of the stopper for overhead traveling vehicles of FIG. It is a perspective view of the connection lock of the stopper for overhead traveling vehicles of FIG. It is a figure which shows the state which the stopper main body and stopper reinforcement body of FIG. 1 connected.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or an equivalent part, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 1, the transport system 100 includes a traveling rail 60 and an overhead traveling vehicle 50. The traveling rail 60 is laid, for example, near the ceiling in a clean room where semiconductor devices are manufactured. The overhead traveling vehicle 50 travels along the traveling rail 60 and transports, for example, a cassette (so-called FOUP (Front Opening Unified Pod)) containing a plurality of semiconductor wafers as a transported object, and various types of semiconductor wafers. A transferred object is transferred at a load port or the like provided in a processing apparatus that performs processing.

  The overhead traveling vehicle stopper 1 can be attached to and detached from the traveling rail 60 on which the overhead traveling vehicle 50 travels. The overhead traveling vehicle 50 is stopped. The overhead traveling vehicle stopper 1 temporarily stops traveling of the overhead traveling vehicle 50 in order to perform maintenance or inspection of the traveling rail 60 and the like.

  An optical sensor device (detection unit) 51 is attached to the front surface of the overhead traveling vehicle 50 in the traveling direction (Y direction). The optical sensor device 51 includes a light emitting unit 51a and a light receiving unit 51b. The light emitting unit 51a emits the detection light L toward the front in the traveling direction. The light receiving unit 51b receives the detection light L reflected in front of the traveling direction. The overhead traveling vehicle 50 travels while emitting the detection light L from the light emitting portion 51 a of the optical sensor device 51. When an obstacle is present in the traveling direction of the overhead traveling vehicle 50, the detection light L is reflected by the obstacle, and the reflected light is received by the light receiving unit 51b. Accordingly, it can be determined whether or not an obstacle exists in front of the overhead traveling vehicle 50, and the distance between the overhead traveling vehicle 50 and the obstacle can be calculated. The overhead traveling vehicle 50 is configured to decelerate or stop when the distance from the obstacle becomes a predetermined value or less.

  A contact-type switch (detection unit) 52 is attached to the overhead traveling vehicle 50 over the entire circumference. The contact-type switch 52 includes a tape-shaped outer switch 52a wound twice with a gap, and an inner switch that operates by contacting the outer switch 52a when the outer switch 52a is pressed inward from the outside. (Not shown). The outer switch 52 a of the contact switch 52 protrudes from the side surface of the overhead traveling vehicle 50. When the contact switch 52 is activated, the overhead traveling vehicle 50 stops.

  The traveling rail 60 is a member having a rectangular cross section and extends in the traveling direction. The overhead traveling vehicle 50 travels along the inner side of the traveling rail 60. As shown in FIG. 2, brackets 61 and 62 are provided on the traveling rail 60 along the traveling direction of the overhead traveling vehicle 50. The brackets 61 and 62 are provided on portions 60 a and 60 b of the traveling rail 60 other than the traveling portion where the overhead traveling vehicle 50 travels. The portion 60 a is an outer side surface of the traveling rail 60. The portion 60b is an outer upper surface extending in the orthogonal direction from the end of the portion 60a. The stopper main body 10 is detachable from the bracket 61, and the stopper reinforcing body 20 is detachable from the bracket 62. Since the bracket 61 and the bracket 62 have the same configuration, only the configuration of the bracket 61 will be described below, and the description of the configuration of the bracket 62 will be omitted.

  The bracket 61 is configured so that the fixed plate 61a fixed to the traveling rail 60, the upper guide plate 61b and the lower guide plate 61c that hold the stopper body 10, and the stopper body 10 do not move to the ceiling W side more than a predetermined amount. And a regulating plate 61d for regulating.

  The fixed plate 61a is in contact with and fixed to the traveling rail 60 in a shape along the portions 60a and 60b other than the traveling portion of the traveling rail 60. The fixed plate 61 a has holding portions 61 i and 61 j that hold the upper guide plate 61 b and the lower guide plate 61 c on the surface opposite to the surface fixed to the traveling rail 60. The holding portions 61i and 61j are positioned so as not to block holes 61e and 61f of the upper guide plate 61b and the lower guide plate 61c described later.

  The upper guide plate 61b and the lower guide plate 61c are held by the holding portions 61i and 61j of the fixed plate 61a so that the surfaces thereof are substantially horizontal, and are fixed to the fixed plate 61a. The upper guide plate 61b and the lower guide plate 61c are arranged along a direction toward the ceiling W (Z direction), and substantially horizontal surfaces face each other. The upper guide plate 61b is located closer to the ceiling W than the lower guide plate 61c. A hole 61e that penetrates the upper guide plate 61b is provided on a substantially horizontal surface of the upper guide plate 61b. The hole 61e has a hole shape in which notches are added to both sides of the round hole. Furthermore, a concave engaging portion 61g is provided on the upper surface 61h on the ceiling W side of the substantially horizontal surface of the upper guide plate 61b so as to engage with a fall prevention pin 12b of the stopper body 10 described later. . A hole 61f that penetrates the lower guide plate 61c is provided on a substantially horizontal surface of the lower guide plate 61c. As with the hole 61e, the hole 61f has a shape in which notches are added to both sides of the round hole. The notch portions formed in the holes 61e and 61f of the upper guide plate 61b and the lower guide plate 61c are formed, for example, shifted by about 45 degrees so that the phases are different from each other when viewed from the ceiling W side. Yes.

  The restricting plate 61d is disposed so that one surface thereof faces the upper surface 61h of the upper guide plate 61b, and is fixed to the fixed plate 61a. The one surface of the regulation plate 61d abuts against the tip of the round bar 12a of the stopper body 10 so that the stopper body 10 does not move to the ceiling W side from a predetermined position.

  Next, the configuration of the overhead traveling vehicle stopper 1 will be described. As shown in FIG. 1, the overhead traveling vehicle stopper 1 is detachably attached to the traveling rail 60 and attached to the traveling rail 60. The stopper reinforcing body 20 connected to the stopper main body 10 and the connection for restricting the release of the connection between the stopper main body 10 and the stopper reinforcing body 20 in a state where the stopper main body 10 and the stopper reinforcing body 20 are attached to the traveling rail 60. And a lock 30.

  As shown in FIG. 3, the stopper body 10 can be attached to and detached from the traveling rail 60 via a bracket 61 and a detected portion 11 detected by the optical sensor device 51 in a state of being attached to the traveling rail 60. It has a certain first rod-shaped member 12 and a first beam-shaped member 13 to which one end portion is fixed to the first rod-shaped member 12 and the detected portion 11 is attached.

  The detected portion 11 is formed of a plate member that has a rectangular shape in plan view, and is formed using a lightweight material such as plastic. The dimension of the detection surface 11 a of the detection unit 11 corresponds to the spread width of the detection light L emitted from the optical sensor device 51. At least a part of the detected portion 11 is located in the traveling area of the overhead traveling vehicle 50 in a state where the stopper body 10 is attached to the traveling rail 60. Further, the detected surface 11 a is orthogonal to the traveling direction of the overhead traveling vehicle 50 in a state where the stopper body 10 is attached to the traveling rail 60.

  The first rod-shaped member 12 includes a round bar 12a and a fall prevention pin 12b that is disposed at one end of the round bar 12a and that is inserted into the hole 12c of the round bar 12a so as to protrude from the outer peripheral surface of the round bar 12a. ,have. The round bar 12a is formed using a material such as aluminum. The fall prevention pin 12b has a strength for holding the stopper body 10 and is longer than the outer diameter of the round bar 12a. The other end of the round bar 12a may have a shape that is easy for an operator to hold.

  The first beam-like member 13 includes an elongated bottom plate 13b to which the detected portion 11 is attached, and side plates 13c and 13d that are erected from both ends of the bottom plate 13b and face each other. One end of the first beam 13 is fixed to the round bar 12a by side plates 13c and 13d, and the other end of the first beam 13 extends in a direction perpendicular to the round bar 12a. A pin portion 13 a is formed on the side plate 13 d of the other end so as to be connected to the stopper reinforcing body 20. The pin portion 13a protrudes in a direction orthogonal to the top plate, and the outer diameter of the tip is slightly increased. The pin portion 13a may be formed so as to protrude inside the side plate 13d. The upper part of the detected part 11 is attached to the bottom plate 13b. For example, the first beam-like member 13 may be formed by bending a sheet metal.

  As shown in FIG. 4, the stopper reinforcing body 20 includes a second rod-shaped member 21 that can be attached to and detached from the traveling rail 60 via a bracket 62, and one end fixed to the second rod-shaped member 21. In the state attached to 60, it has the 2nd beam-like member 22 with which the other end part is connected with the other end part of the 1st beam-like member 13.

  The second bar-shaped member 21 includes a round bar 21a, a fall prevention pin 21b that is disposed at one end of the round bar 21a and that is inserted into the hole 21c of the round bar 21a so as to protrude from the outer peripheral surface of the round bar 21a. ,have. The second rod-shaped member 21 has the same configuration as the first rod-shaped member 12. The round bar 21a is formed using a material such as aluminum. The fall prevention pin 21b has a strength for holding the stopper reinforcing body 20 and is longer than the outer diameter of the round bar 21a. The other end of the round bar 21a may have a shape that is easy for an operator to hold.

The second beam-like member 22 has an elongated top plate 22b and a side plate 22c that is erected from one end of the top plate 22b so as to have an L shape in plan view together with the top plate 22b. One end of the second beam-like member 22 is fixed to the round bar 21a by a top plate 22b, and the other end of the second beam-like member 22 extends in a direction perpendicular to the round bar 21a. A hole 22 a is formed in the top plate 22 b of the other end of the second beam-like member 22 so as to be connected to the stopper reinforcing body 20.
For example, the second beam-like member 22 may be formed by bending a sheet metal.

  As shown in FIG. 5, the connecting lock 30 includes a first joint portion 31 fixed to the first rod-shaped member 12 of the stopper body 10 and a second joint fixed to the second rod-shaped member 21 of the stopper reinforcing body 20. It has the part 32 and the lock | rock part 33 which connects the 1st coupling part 31 and the 2nd coupling part 32. FIG.

  The first joint portion 31 includes a cylindrical portion 31a that contacts the outer peripheral surface of the round bar 12a of the first rod-shaped member 12 on the inside, and a protruding portion 31b that protrudes from the outer peripheral surface of the cylindrical portion 31a. The cylindrical portion 31a of the first joint portion 31 is disposed at a position that can be reached by the operator in the longitudinal direction of the round rod 12a of the first rod-like member 12, and is fixed to the round rod 12a. A hole 31c is formed at the tip of the protrusion 31b.

  The second joint portion 32 includes a cylindrical portion 32a that contacts the outer peripheral surface of the round bar 21a of the second rod-shaped member 21 on the inside, and a protruding portion 32b that protrudes from the outer peripheral surface of the cylindrical portion 32a. The cylindrical part 32a of the second joint part 32 is disposed at a position that can be reached by the operator in the longitudinal direction of the round bar 21a of the second bar-shaped member 21, and is fixed to the round bar 21a. The second joint portion 32 is positioned so as to face the first joint portion 31. A hole 32c is formed at the tip of the protrusion 32b. Further, the protruding length of the protruding portion 32 b is such that the hole portion of the second joint portion 32 with respect to the hole portion 31 c of the first joint portion 31 in a state where the stopper main body 10 and the stopper reinforcing body 20 are attached to the traveling rail 60. The length of 32c is required to overlap.

  The lock portion 33 locks the hole portion 31c of the first joint portion 31 and the hole portion 32c of the second joint portion so that they are not separated by a predetermined distance or more. For example, the lock portion 33 may be a latch used when the device is locked out / tag out for the purpose of protecting the worker in the factory.

  An example of an operation when attaching the above-described overhead traveling vehicle stopper 1 to the traveling rail 60 will be described with reference to FIGS. The brackets 61 and 62 are provided in advance with respect to the traveling direction of the traveling rail 60 at predetermined intervals.

  As shown in FIG. 2, the operator inserts the second bar-shaped member 21 of the stopper reinforcing body 20 into the hole 62 d of the lower guide plate 62 c of the bracket 62. At this time, it inserts so that the position of the notch part of the hole 62d and the fall prevention pin 21b of the 2nd rod-shaped member 21 may overlap. Thereby, the front-end | tip part of the 2nd rod-shaped member 21 passes the lower guide plate 62c, and abuts on the upper guide plate 62b. At this time, the phase of the notch portion of the hole portion 62d of the lower guide plate 62c and the notch portion of the hole portion 62e of the upper guide plate 62b are shifted, so that the operator rotates the second rod-shaped member 21. It is necessary to abut against the upper guide plate 62b. When the second rod-shaped member 21 is rotated and the drop prevention pin 21b and the notched portion of the hole 62e overlap, the tip of the second rod-shaped member 21 passes through the upper guide plate 62b. After passing through the upper guide plate 62b, the second rod-shaped member 21 is further rotated, and the fall-preventing pin 21b of the second rod-shaped member 21 with respect to the recessed engagement portion 62g formed on the upper surface 62f of the upper guide plate 62b. Engage. Through the above procedure, the stopper reinforcing body 20 is attached to the traveling rail 60 via the bracket 62. In addition, since the phase of the notch portions of the holes 62d and 62e is shifted, even if the second rod-shaped member 21 is removed from the upper guide plate 62b, the lower guide plate 62c prevents the stopper reinforcing body 20 from falling. can do. The stopper body 10 is also attached to the traveling rail 60 in the same procedure as the stopper reinforcing body 20 described above.

  After the stopper main body 10 is attached to the traveling rail 60, as shown in FIGS. 3, 4, and 6, the second beam-shaped member 22 has a second hole 22a formed at the other end thereof. A pin portion 13 a formed at the other end portion of the one beam-like member 13 is inserted. Thereby, the stopper main body 10 and the stopper reinforcement body 20 are connected. The distal end portion of the pin portion 13a has a slightly larger outer diameter, and prevents the hole portion 22a from coming out of the pin portion 13a.

  After that, as shown in FIG. 5, the holes 31 c and 32 c provided in the first joint portion 31 and the second joint portion 32 of the connecting lock 30 are overlapped, and the holes 31 c and 32 c are overlapped by the lock portion 33. Link.

  When removing the stopper main body 10 and the stopper reinforcement body 20 from the traveling rail 60, the procedure reverse to the above-described mounting operation is performed.

  As described above, in the overhead traveling vehicle stopper 1, the stopper reinforcing body 20 is coupled to the stopper main body 10 in a state where the stopper reinforcing body 20 is attached to the traveling rail 60. Thereby, since the operator can handle the stopper main body 10 and the stopper reinforcement body 20 separately, the stopper main body 10 and the stopper reinforcement body 20 can be easily attached to and detached from the traveling rail 60. On the other hand, in the state attached to the traveling rail 60, the stopper main body 10 and the stopper reinforcing body 20 are connected, so that the overall strength of the overhead traveling vehicle stopper 1 can be sufficiently ensured. Therefore, according to the stopper 1 for an overhead traveling vehicle, sufficient strength can be ensured while maintaining the efficiency of the attaching / detaching operation with respect to the traveling rail 60.

  In the overhead traveling vehicle stopper 1, the stopper main body 10 and the stopper reinforcing body 20 can be attached to and detached from brackets 61 and 62 provided on portions of the traveling rail 60 other than the traveling portion on which the overhead traveling vehicle 50 travels. It has become. Thereby, even if the overhead traveling vehicle 50 collides with the overhead traveling vehicle stopper 1, it is possible to prevent the traveling portion of the traveling rail 60 from being damaged. Further, the brackets 61 and 62 to which the stopper body 10 and the stopper reinforcing body 20 are attached and detached can be prevented from blocking the traveling of the overhead traveling vehicle 50.

  The overhead traveling vehicle stopper 1 includes a connecting lock 30 that restricts the release of the connection between the stopper main body 10 and the stopper reinforcing body 20 when the stopper main body 10 and the stopper reinforcing body 20 are attached to the traveling rail 60. ing. Accordingly, for example, it is possible to prevent an operator other than the worker who attached the overhead traveling vehicle stopper 1 to the traveling rail 60 from removing the overhead traveling vehicle stopper 1 from the traveling rail 60 by mistake.

  In the overhead traveling vehicle stopper 1, the stopper body 10 includes a first rod-like member 12 that can be attached to and detached from the running rail 60, one end fixed to the first rod-like member 12, and the detected portion 11 attached. The stopper reinforcing body 20 includes a second rod-shaped member 21 that can be attached to and detached from the traveling rail 60, and one end fixed to the second rod-shaped member 21. In the state attached to the rail 60, it has the 2nd beam-like member 22 with which the other end part is connected with the other end part of the 1st beam-like member 13. According to this structure, the stopper main body 10 and the stopper reinforcement body 20 can be comprised with a general-purpose member called a rod-shaped member and a beam-shaped member. Moreover, since the overhead traveling vehicle stopper 1 uses readily available members such as a rod-like member and a beam-like member, it can be configured at low cost.

  As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said embodiment. For example, the attaching / detaching position of the stopper main body 10 and the stopper reinforcing body 20 with respect to the traveling rail 60 may be on the side facing the attaching / detaching position described in the present embodiment with the traveling rail 60 interposed therebetween. Moreover, you may provide only the attachment / detachment position of the stopper reinforcement body 20 in the opposing side. Further, it is not necessary to provide a plurality of brackets on the traveling rail 60. For example, the stopper main body 10 and the stopper reinforcing body 20 may be detachable from a single bracket. Moreover, in this embodiment, although both the optical sensor apparatus 51 and the contact-type switch 52 are used as a detection part, either one may be sufficient.

  The overhead traveling vehicle stopper 1 is not limited to being attached to or detached from the traveling rail 60 installed in a clean room for manufacturing a semiconductor device. And the material and shape of the structural member of the stopper 1 for overhead traveling vehicles are not restricted to the material and shape as above-mentioned, Various materials and shapes can be applied.

  DESCRIPTION OF SYMBOLS 1 ... Stopper for overhead traveling vehicles, 10 ... Stopper main body, 11 ... Detected part, 12 ... 1st rod-shaped member, 13 ... 1st beam-shaped member, 20 ... Stopper reinforcement body, 21 ... 2nd rod-shaped member, 22 ... 1st 2 beam-shaped members, 30 ... coupling lock, 50 ... overhead traveling vehicle, 51 ... optical sensor device (detection unit), 52 ... contact type switch (detection unit), 60 ... travel rail, 61, 62 ... bracket.

Claims (3)

Ceiling traveling that can be attached to and detached from the traveling rail on which the overhead traveling vehicle travels, and that stops the overhead traveling vehicle by being detected by a detection unit provided in the overhead traveling vehicle when attached to the traveling rail. A car stopper,
A stopper main body having a detected portion that is detachable from the traveling rail and is detected by the detecting portion in a state of being attached to the traveling rail,
A stopper reinforcing body that is detachable from the traveling rail and is connected to the stopper body in a state of being attached to the traveling rail;
An overhead traveling vehicle stopper comprising: a connecting lock that restricts release of the connection between the stopper main body and the stopper reinforcing body in a state where the stopper main body and the stopper reinforcing body are attached to the traveling rail .   The overhead traveling vehicle according to claim 1, wherein the stopper main body and the stopper reinforcing body are detachable from a bracket provided on a portion of the traveling rail other than a traveling portion on which the overhead traveling vehicle travels. Stopper. The stopper body is
A first bar-shaped member that is detachable from the traveling rail;
A first beam-like member having one end fixed to the first rod-like member and to which the detected portion is attached;
The stopper reinforcement is
A second rod-shaped member that is detachable from the traveling rail;
A second beam-like member connected to the other end of the first beam-like member in a state where one end is fixed to the second rod-like member and attached to the traveling rail; The overhead traveling vehicle stopper according to claim 1 or 2 .

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