JP6031742B2 - Sterilizer and sterilization method - Google Patents

Description

  The present invention relates to a sterilization apparatus and a sterilization method using hydrogen peroxide. In particular, the present invention relates to a sterilization apparatus and a sterilization method characterized by a procedure for handling hydrogen peroxide.

Sometimes you want to sterilize an object.
For example, the medical device is sterilized after use or before use.
Sterilizers and sterilization methods are used to sterilize objects.
In order to sterilize these, a sterilization apparatus and a sterilization method for sterilizing an object using hydrogen peroxide are proposed.

  An object is put in a vacuum chamber, the inside is evacuated, and gaseous hydrogen peroxide is filled inside.

Gaseous hydrogen peroxide sterilizes the surface of the object.
An object may have a complex shape.
The object may have a complicated shape.
For example, some objects have a tubular shape.
For example, there has been a request to efficiently sterilize a deep part of the inner diameter of an object having a tube shape.

  The present invention has been devised in view of the above-described problems, and aims to provide a sterilization apparatus and a sterilization method capable of efficiently sterilizing or sterilizing an object having a complicated shape with a simple procedure and a simple configuration. To do.

The present invention is a sterilization apparatus capable of sterilizing an object, and forms a sterilization chamber which is a vacuum chamber capable of storing the object, a vacuum device capable of evacuating the sterilization chamber, and a vaporizing space having a predetermined volume. A vaporization chamber, a vaporization valve that opens and closes to allow conduction between the vaporization chamber and the sterilization chamber, and stops conduction between the vaporization chamber and the sterilization chamber; and a liquid hydrogen peroxide or hydrogen peroxide solution in the vaporization chamber A hydrogen peroxide supply device capable of supplying a vacuum pump, wherein the vacuum device can evacuate from the sterilization chamber, and opens and closes the sterilization chamber and the atmosphere to allow continuity between the sterilization chamber and the atmosphere. A vacuum step of opening the vaporization valve and evacuating the sterilization chamber and the vaporization chamber by the vacuum device, and closing the vaporization valve after performing the vacuum step The hydrogen peroxide supply device A vaporization step of supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber, a vaporization time that is a predetermined time has elapsed after the vaporization step has been performed, and a pressure in the sterilization chamber When the vacuum is reduced to reach a predetermined degree of vacuum, a hydrogen peroxide introduction step is performed to stop evacuation of the sterilization chamber by the vacuum device and open the vaporization valve, and after performing the hydrogen peroxide introduction step When a predetermined time elapses, an air supply step for opening the atmosphere release valve is performed, and after the air supply step is performed, the vaporization valve is closed when the pressure in the sterilization chamber rises to reach a predetermined degree of vacuum. A vaporization valve closing step is performed, and the vaporization time is a time sufficient for vaporization of hydrogen peroxide supplied in the vaporization chamber. Closed and vacuum atmosphere Vaporization in a time sufficient to vaporize inside the chamber, and the gaseous hydrogen peroxide accumulated in the vaporization chamber passed through the vaporization valve and stopped being evacuated from the vaporization chamber. It flows into the sterilization chamber and contacts an object placed inside the sterilization chamber to sterilize the object .

Further, the present invention is a sterilization apparatus capable of sterilizing an object, comprising a sterilization chamber that is a vacuum chamber capable of storing the object, a vacuum device capable of evacuating the sterilization chamber, and a vaporizing space having a predetermined volume. A vaporization chamber to be formed; a vaporization valve that opens and closes to allow conduction between the vaporization chamber and the sterilization chamber; and shuts off the conduction between the vaporization chamber and the sterilization chamber; and liquid hydrogen peroxide or peroxide in the vaporization chamber A hydrogen peroxide supply device capable of supplying a hydrogen solution, and a vacuum pump capable of evacuating the vacuum device from the sterilization chamber, and allowing the sterilization chamber and the atmosphere to be closed and closed to connect the sterilization chamber and the atmosphere. An atmosphere release valve for stopping conduction, and performing a vacuum step of opening the vaporization valve and evacuating the sterilization chamber and the vaporization chamber by the vacuum device, and after performing the vacuum step, the sterilization chamber The pressure of the vacuum drops A vaporization step of closing the vaporization valve when reaching and supplying a liquid hydrogen peroxide or hydrogen peroxide solution to the vaporization chamber by the hydrogen peroxide supply device, and a predetermined time after performing the vaporization step Hydrogen peroxide introduction that stops the evacuation of the sterilization chamber by the vacuum device and opens the vaporization valve when the vaporization time elapses and when the pressure in the sterilization chamber decreases to reach a predetermined vacuum level When a predetermined time has elapsed after performing the hydrogen peroxide introduction step, the air supply step for opening the atmosphere release valve is performed, and after the air supply step is performed, the pressure in the sterilization chamber is reduced. A vaporization valve closing step for closing the vaporization valve when the pressure reaches a predetermined degree of vacuum, and after the vaporization valve closing step, the atmosphere release valve is closed and the vacuum pump is operated to operate the sterilization chamber. Vacuuming A vacuum restarting step is performed, and the vaporization time is a time sufficient for vaporization of hydrogen peroxide supplied in the vaporization chamber. Vaporized in a sufficient amount of time to be closed and vaporized inside the vaporizing chamber in a vacuum atmosphere, and the gaseous hydrogen peroxide accumulated inside the vaporizing chamber passes through the vaporizing valve and is vacuumed from the vaporizing chamber. It is characterized by flowing into the sterilization chamber in a vacuum atmosphere in which the pulling is stopped and contacting the object placed inside the sterilization chamber to sterilize the object .

Further, the present invention is a sterilization apparatus capable of sterilizing an object, comprising a sterilization chamber that is a vacuum chamber capable of storing the object, a vacuum device capable of evacuating the sterilization chamber, and a vaporizing space having a predetermined volume. A vaporization chamber to be formed; a vaporization valve that opens and closes to allow conduction between the vaporization chamber and the sterilization chamber; and shuts off the conduction between the vaporization chamber and the sterilization chamber; and liquid hydrogen peroxide or peroxide in the vaporization chamber A hydrogen peroxide supply device capable of supplying a hydrogen solution, and a vacuum pump that allows the vacuum device to evacuate from the sterilization chamber is opened and closed to allow conduction between the sterilization chamber and the atmosphere, and conduction between the sterilization chamber and the atmosphere. A vacuum step of opening the vaporization valve and evacuating the sterilization chamber and the vaporization chamber with the vacuum device, and after performing the vacuum step, The pressure drops to a predetermined vacuum level A vaporizing step of closing the vaporizing valve and supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporizing chamber with the hydrogen peroxide supply device, and performing a predetermined time after performing the vaporizing step. Hydrogen peroxide introduction that stops the evacuation of the sterilization chamber by the vacuum device and opens the vaporization valve when the vaporization time elapses and when the pressure in the sterilization chamber decreases to reach a predetermined vacuum level When a predetermined time has elapsed after performing the hydrogen peroxide introduction step, an air supply step for opening the atmosphere release valve is performed, and after the air supply step, the pressure in the sterilization chamber increases. A vaporization valve closing step for closing the vaporization valve when a predetermined degree of vacuum is reached, and after performing the vaporization valve closing step, the atmosphere release valve is closed and the vacuum pump is operated to open the sterilization chamber. True vacuum When the pressure in the sterilization chamber drops and does not reach a predetermined degree of vacuum after the vacuum resumption step is performed, the atmosphere release valve is temporarily opened and closed while the vacuum pump is operated. An hourly air supply step is performed, and the vaporization time is a time sufficient for vaporizing hydrogen peroxide supplied in the vaporization chamber .

The present invention is also a sterilization method capable of sterilizing an object, a sterilization chamber that is a vacuum chamber for storing the object, a vaporization chamber that forms a space for vaporization of a predetermined volume, A vaporizing valve that allows and closes the conduction with the sterilization chamber and stops the conduction between the vaporization chamber and the sterilization chamber; and a vacuum pump that can be exhausted from the sterilization chamber is opened to allow the sterilization chamber and the atmosphere to be closed and closed. A vacuum device having an atmosphere release valve for stopping conduction between the sterilization chamber and the atmosphere, and vacuuming the sterilization chamber and the vaporization chamber and closing the vaporization valve to form liquid hydrogen peroxide or A vacuum vaporization step of supplying a hydrogen peroxide solution to the vaporization chamber, a hydrogen peroxide introduction step of stopping evacuation of the sterilization chamber and opening the vaporization valve, an air supply step of opening the atmosphere release valve, A vaporization valve closing process for closing the vaporization valve; And the vacuum vaporization step includes: a vacuum step of opening the vaporization valve to evacuate the sterilization chamber; and a vaporization step of closing the vaporization valve and supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber And performing the vacuum step, performing the vaporization step after performing the vacuum step, evaporating time that is a predetermined time after performing the vaporization step, When the pressure in the sterilization chamber decreases and reaches a predetermined degree of vacuum, the hydrogen peroxide introduction step is performed, and the air supply step is performed when a predetermined time elapses after the hydrogen peroxide introduction step is performed. The vaporization valve closing step is performed when the pressure in the sterilization chamber rises to reach a predetermined degree of vacuum after performing the air supply step, and the vaporization time is supplied in the vaporization chamber. Enough time for hydrogen to evaporate Liquid hydrogen peroxide or hydrogen peroxide solution is vaporized within a time sufficient for vaporization inside the vaporization chamber in a vacuum atmosphere with the vaporization valve closed, and the gas state accumulated in the vaporization chamber Hydrogen peroxide passes through the vaporization valve and flows into the sterilization chamber in a vacuum atmosphere from which evacuation is stopped from the vaporization chamber to contact the target placed inside the sterilization chamber and sterilize the target. It is characterized by .

Further, the present invention is a sterilization method capable of sterilizing an object, a sterilization chamber that is a vacuum chamber for storing the object, a vaporization chamber that forms a vaporization space of a predetermined volume, and the vaporization chamber that is opened and opened. A vaporizing valve that allows and closes the conduction with the sterilization chamber and stops the conduction between the vaporization chamber and the sterilization chamber; and a vacuum pump that can be exhausted from the sterilization chamber is opened to allow the sterilization chamber and the atmosphere to be closed and closed. A vacuum device having an atmosphere release valve for stopping conduction between the sterilization chamber and the atmosphere, and vacuuming the sterilization chamber and the vaporization chamber and closing the vaporization valve to form liquid hydrogen peroxide or A vacuum vaporization step of supplying a hydrogen peroxide solution to the vaporization chamber, a hydrogen peroxide introduction step of stopping evacuation of the sterilization chamber and opening the vaporization valve, an air supply step of opening the atmosphere release valve, A vaporization valve closing process for closing the vaporization valve; A vacuum resuming step of closing the air release valve and operating the vacuum pump to evacuate the sterilization chamber, wherein the vacuum vaporization step opens the vaporization valve to evacuate the sterilization chamber And a vaporization step of closing the vaporization valve and supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber, performing the vacuum step, and performing the vacuum step and then performing the sterilization The vaporization step is performed when the chamber pressure decreases and reaches a predetermined degree of vacuum, the vaporization time which is a predetermined time has elapsed after the vaporization step is performed, and further, the pressure in the sterilization chamber is decreased to a predetermined level. When the degree of vacuum is reached, the hydrogen peroxide introduction step is performed, and after a predetermined time has elapsed after the hydrogen peroxide introduction step, the air supply step is performed, and the air supply step is performed. Later, the pressure in the sterilization chamber increases. When the predetermined degree of vacuum is reached, the vaporization valve closing step is performed, and after the vaporization valve closing step is performed, the vacuum resuming step is performed, and the vaporization time is supplied in the vaporization chamber. The hydrogen peroxide or the hydrogen peroxide solution is vaporized in a time sufficient to vaporize inside the vaporizing chamber in a vacuum atmosphere with the vaporizing valve closed. The hydrogen peroxide in the gaseous state accumulated in the vaporization chamber passes through the vaporization valve and flows into the sterilization chamber in a vacuum atmosphere where evacuation is stopped from the vaporization chamber, and is placed in the sterilization chamber. It is characterized in that the object is sterilized by contacting the object .

Further, the present invention is a sterilization method capable of sterilizing an object, a sterilization chamber that is a vacuum chamber for storing the object, a vaporization chamber that forms a vaporization space of a predetermined volume, and the vaporization chamber that is opened and opened. A vaporizing valve that allows and closes the conduction with the sterilization chamber and stops the conduction between the vaporization chamber and the sterilization chamber; and a vacuum pump that can be exhausted from the sterilization chamber is opened to allow the sterilization chamber and the atmosphere to be closed and closed. A vacuum device having an atmosphere release valve for stopping conduction between the sterilization chamber and the atmosphere, and vacuuming the sterilization chamber and the vaporization chamber and closing the vaporization valve to form liquid hydrogen peroxide or A vacuum vaporization step of supplying a hydrogen peroxide solution to the vaporization chamber, a hydrogen peroxide introduction step of stopping evacuation of the sterilization chamber and opening the vaporization valve, an air supply step of opening the atmosphere release valve, A vaporization valve closing process for closing the vaporization valve; A vacuum resuming step of closing the air release valve and operating the vacuum pump to evacuate the sterilization chamber; a temporary air supply step of temporarily opening and closing the air release valve while operating the vacuum pump; The vacuum vaporization step includes: a vacuum step of opening the vaporization valve to evacuate the sterilization chamber; and a vaporization step of closing the vaporization valve and supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber. And performing the vacuum step, and after performing the vacuum step, the vaporization step is performed when the pressure in the sterilization chamber decreases and reaches a predetermined vacuum level, and the vaporization step is performed. When the vaporization time, which is a predetermined time, elapses later, and when the pressure in the sterilization chamber decreases and reaches a predetermined vacuum level, the hydrogen peroxide introduction step is performed, and the hydrogen peroxide introduction step is performed. After a certain time When the air has passed, the air supply process is performed, and after the air supply process is performed, the vaporization valve closing process is performed when the pressure in the sterilization chamber increases to reach a predetermined degree of vacuum, and the vaporization valve closing process The vacuum resuming step is performed after performing the vacuum resuming step, and after the vacuum resuming step is performed, the temporary air supply step is performed when the pressure in the sterilization chamber decreases and does not reach a predetermined degree of vacuum, and the vaporization time Is characterized by sufficient time for the hydrogen peroxide supplied in the vaporizing chamber to vaporize .

According to the present invention, it is possible to provide a sterilization apparatus and a sterilization method that can efficiently sterilize or sterilize an object having a complicated shape with a simple procedure and a simple configuration.

As described above, the sterilization method according to the present invention has the following effects due to its configuration.
The vaporization valve communicates with the sterilization chamber and the vaporization chamber capable of storing an object, and the sterilization chamber and the vaporization chamber are evacuated and the vaporization valve is closed to form liquid hydrogen peroxide or a hydrogen peroxide solution. When the vaporization chamber is supplied, and when a predetermined time has passed after that, the evacuation of the sterilization chamber is stopped and the vaporization valve is opened, and the hydrogen peroxide supplied in the vaporization chamber is Since the time is sufficient for vaporization, the hydrogen peroxide sufficiently vaporized in a predetermined time in the vaporization chamber passes through the vaporization valve and enters the sterilization chamber to sterilize the object stored. it can.
Further, the vaporization valve is opened to evacuate the sterilization chamber, and then the vaporization valve is closed to supply liquid hydrogen peroxide or hydrogen peroxide solution to the vaporization chamber, and then a predetermined time elapses. Since the evacuation of the sterilization chamber was sometimes stopped and the vaporization valve was opened, hydrogen peroxide was vaporized in the vaporization chamber in a vacuum, and the hydrogen peroxide sufficiently vaporized in a predetermined time was The object passed through the vaporizing valve and entering the sterilization chamber can be sterilized.
Further, the vaporization valve is opened to evacuate the sterilization chamber, and then the vaporization valve is closed to supply liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber, after which a predetermined time has elapsed. Since the evacuation of the sterilization chamber was stopped and the vaporization valve was opened when the predetermined vacuum level was reached, hydrogen peroxide was vaporized in the vaporization chamber in a vacuum, The vaporized hydrogen peroxide passes through the vaporization valve and enters the sterilization chamber where a predetermined degree of vacuum has been reached, so that the object stored therein can be sterilized.
Further, the vaporization valve is opened to evacuate the sterilization chamber, and then the vaporization valve is closed to supply liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber, after which a predetermined time has elapsed. Further, when the pressure in the sterilization chamber decreases to reach a predetermined vacuum level, the evacuation of the sterilization chamber is stopped and the vaporization valve is opened, and then the air release valve is opened after a predetermined time has elapsed. Therefore, the hydrogen peroxide is vaporized in the vaporization chamber in a vacuum, and the hydrogen peroxide sufficiently vaporized in a predetermined time passes through the vaporization valve and enters the sterilization chamber that has reached a predetermined vacuum degree and enters the sterilization. The atmosphere is introduced into the chamber, and the vaporized hydrogen peroxide moves on the surface of the object to sterilize the stored object.
Further, the vaporization valve is opened to evacuate the sterilization chamber, and then the vaporization valve is closed to supply liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber, after which a predetermined time has elapsed. Further, when the pressure in the sterilization chamber decreases to reach a predetermined vacuum level, the evacuation of the sterilization chamber is stopped and the vaporization valve is opened. After that, when the predetermined time has elapsed, the air release valve is opened. Since the vaporization valve is opened when the sterilization chamber reaches a predetermined vacuum level, hydrogen peroxide is vaporized in the vaporization chamber in a vacuum, and the hydrogen peroxide sufficiently vaporized in a predetermined time is vaporized. Air enters the sterilization chamber that has passed a valve and reaches a predetermined degree of vacuum, the atmosphere is introduced into the sterilization chamber, and the vaporized hydrogen peroxide moves on the surface of the target to sterilize the stored target. The chamber maintains a predetermined degree of vacuum.
Further, the vaporization valve is opened to evacuate the sterilization chamber, and then the vaporization valve is closed to supply liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber, after which a predetermined time has elapsed. Further, when the pressure in the sterilization chamber decreases to reach a predetermined vacuum level, the evacuation of the sterilization chamber is stopped and the vaporization valve is opened. After that, when the predetermined time has elapsed, the air release valve is opened. When the sterilization chamber reaches a predetermined degree of vacuum, the vaporization valve is opened, and then the introduction of the atmosphere is stopped and the sterilization chamber is evacuated, so that the hydrogen peroxide is evacuated in the vaporization chamber. The hydrogen peroxide vaporized in a predetermined time passes through the vaporization valve, enters the sterilization chamber that has reached a predetermined degree of vacuum, the atmosphere is introduced into the sterilization chamber, and the vaporized hydrogen peroxide is the surface of the object. The degree of sterilization increases, Chamber can vacuum the sterilization chamber while maintaining a predetermined degree of vacuum.
Further, the vaporization valve is opened to evacuate the sterilization chamber, and then the vaporization valve is closed to supply liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber, after which a predetermined time has elapsed. Further, when the pressure in the sterilization chamber decreases to reach a predetermined vacuum level, the evacuation of the sterilization chamber is stopped and the vaporization valve is opened. After that, when the predetermined time has elapsed, the air release valve is opened. When the sterilization chamber reaches a predetermined vacuum level, the vaporization valve is opened, and then the introduction of the atmosphere is stopped and the sterilization chamber is evacuated. Thereafter, the pressure of the sterilization chamber decreases and does not reach the predetermined vacuum level. Sometimes the atmosphere release valve is temporarily opened and closed, and the same operation is repeated thereafter, so that hydrogen peroxide is vaporized in the vaporization chamber in a vacuum, and the hydrogen peroxide vaporized in a predetermined time is A predetermined vacuum through the vaporization valve The atmosphere is introduced into the sterilization chamber that has reached the sterilization chamber, the vaporized hydrogen peroxide moves on the surface of the object, the degree of sterilization increases, the vaporization chamber maintains a predetermined degree of vacuum and the The sterilization chamber can be evacuated.
Further, the vaporization valve communicates with the sterilization chamber and the vaporization chamber capable of storing the object, and the sterilization chamber is evacuated and the vaporization valve is closed to supply liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber, Thereafter, when the predetermined time has elapsed, the evacuation of the sterilization chamber is stopped and the vaporization valve is opened. After that, when the predetermined period has elapsed, the air release valve is opened, and then the sterilization chamber is evacuated, and then Since the atmosphere release valve was temporarily opened and closed when the predetermined vacuum level of the sterilization chamber was not reached, hydrogen peroxide was vaporized in a vacuumed vaporization chamber and was excessively evaporated after a predetermined time. Hydrogen oxide passes through the vaporization valve and enters the sterilization chamber where a predetermined degree of vacuum is reached, and the atmosphere is introduced into the sterilization chamber, the vaporized hydrogen peroxide moves on the surface of the object, and the object can be sterilized, Vaporization chamber can maintain a predetermined vacuum level and vacuum the sterilization chamber .

Therefore, it is possible to provide a sterilization method capable of efficiently sterilizing or sterilizing an object having a complicated shape with a simple procedure and a simple configuration.

It is a conceptual diagram of the sterilizer which concerns on 1st embodiment of this invention. It is a pressure change figure of the sterilization method concerning a first embodiment of the present invention. It is a pressure change figure of the sterilization method concerning a second embodiment of the present invention. It is a pressure change figure of the sterilization method concerning a 4th embodiment of the present invention. It is a conceptual diagram of the hydrogen peroxide supply apparatus 1 which concerns on 1st embodiment of this invention. It is a time chart figure of the hydrogen peroxide supply equipment 1 concerning a first embodiment of the present invention. It is a conceptual diagram of the hydrogen peroxide supply apparatus 2 which concerns on 1st embodiment of this invention. It is a flowchart figure of the sterilization method which concerns on 1st embodiment of this invention. It is a flowchart figure of the sterilization method which concerns on 2nd embodiment of this invention. It is a flowchart figure of the sterilization method which concerns on 3rd embodiment of this invention. It is a flowchart figure of the sterilization method which concerns on 4th embodiment of this invention.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

First, the sterilizer according to the first embodiment of the present invention will be described.
FIG. 1 is a conceptual diagram of a sterilizer according to a first embodiment of the present invention. FIG. 2 is a pressure change diagram of the sterilization method according to the first embodiment of the present invention. FIG. 5 is a conceptual diagram of the hydrogen peroxide supply device 1 according to the first embodiment of the present invention. FIG. 6 is a time chart of the hydrogen peroxide supply device 1 according to the first embodiment of the present invention. FIG. 7 is a conceptual diagram of the hydrogen peroxide supply device 2 according to the first embodiment of the present invention.

The sterilization apparatus according to the first embodiment of the present invention is an apparatus that can sterilize an object.
The sterilization apparatus according to the first embodiment of the present invention includes a sterilization chamber 10, a vacuum device 20, a vaporization chamber 30, and a vaporization valve 40 and a hydrogen peroxide supply device 50.
The object is what you want to sterilize.
For example, the object is a medical device.

The sterilization chamber 10 is a vacuum chamber that can store an object. The vacuum chamber is a chamber that can maintain a degree of vacuum of about 30 Pascals in a state in which a medical instrument or the like is stored.
The sterilization chamber 10 includes a sterilization chamber body 11 and a sterilization chamber lid structure 12.
The sterilization chamber main body 11 has a main body structure of a vacuum chamber capable of maintaining a vacuum.
A vacuum pump 21, an atmosphere release valve 22, and a vaporization valve 40 described later communicate with the sterilization chamber body 11.
The sterilization chamber lid structure 12 is a lid structure that can open and close the opening of the sterilization chamber 10.
The opening of the sterilization chamber lid structure 12 is opened, an object is put through the opening of the sterilization chamber 10, and the sterilization chamber lid structure 12 closes the opening.

The vacuum device 20 is a device that can evacuate the sterilization chamber 10.
The vacuum device 20 includes a vacuum pump 21 and an atmosphere release valve 22.
The vacuum pump 21 is a device that can exhaust air from the sterilization chamber 10.
The air release valve 22 is a valve that opens to allow conduction between the sterilization chamber 10 and the atmosphere, and closes to stop conduction between the sterilization chamber 10 and the atmosphere.
The sterilization chamber 10 can be evacuated by closing the air release valve 22 to stop conduction between the sterilization chamber 10 and the atmosphere and operating the vacuum pump 21.
When the atmosphere release valve 22 is opened to allow conduction between the sterilization chamber 10 and the atmosphere, the sterilization chamber 10 can be supplied with air.

The vaporizing chamber 30 has a structure that forms a space for vaporizing a predetermined volume.
The vaporization chamber 30 has a space for storing a gas obtained by vaporizing a liquid.
The vaporizing chamber 30 may have a reservoir for storing the liquid and a space for storing the gas obtained by vaporizing the liquid above the reservoir.
The vaporization chamber 30 communicates with the sterilization chamber 10 via a vaporization valve 40 described later.
The vaporization chamber 30 is supplied with liquid hydrogen peroxide or a hydrogen peroxide solution by a hydrogen peroxide supply device 50 described later.
The vaporization chamber 30 may be supplied with hydrogen peroxide solution by a hydrogen peroxide supply device 50.
When a hydrogen peroxide supply device 50 to be described later supplies liquid hydrogen peroxide or hydrogen peroxide solution to the vaporizing chamber 30, the liquid hydrogen peroxide or hydrogen peroxide solution accumulates in the reservoir.
Thereafter, when a predetermined time elapses, the entire amount of liquid hydrogen peroxide or hydrogen peroxide solution is vaporized in the space of the vaporizing chamber 30.

The vaporization valve 40 is a device that opens to allow conduction between the vaporization chamber 30 and the sterilization chamber 10 and closes to stop conduction between the vaporization chamber 30 and the sterilization chamber 10.
When the vaporization chamber 40 is filled with gaseous hydrogen peroxide and the pressure in the sterilization chamber 10 is reduced to reach a predetermined degree of vacuum, the vaporization valve 40 is opened, so that the vaporization chamber 30 and the sterilization chamber 10 are electrically connected. The gaseous hydrogen peroxide filling the vaporization chamber 30 enters the sterilization chamber 10.
When the vaporization chamber 30 is empty, the vaporization valve 40 is opened to allow conduction between the vaporization chamber 30 and the sterilization chamber 10, and when the air release valve 22 is closed and the vacuum pump 21 is operated, the sterilization chamber 10 and the vaporization chamber 30 pressure drops.

The hydrogen peroxide supply device 50 is a device that can supply liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber 30.
Two types of hydrogen peroxide supply device 50 will be described below.

First, the first type hydrogen peroxide supply device 50 will be described.
FIG. 5 shows a first type of hydrogen peroxide supply device 50.
The first type hydrogen peroxide supply device 50 includes a storage chamber 51, a metering chamber 52, a first supply valve 53, a second supply valve 54, and a third supply valve 55.
The storage chamber 51 can store liquid hydrogen peroxide or hydrogen peroxide solution H.
The storage chamber 51 forms a space in which liquid hydrogen peroxide or hydrogen peroxide solution H can be stored.
For example, the storage chamber 51 forms an inverted conical space in which liquid hydrogen peroxide or hydrogen peroxide solution H can be stored.
For example, the storage chamber 51 forms an inverted conical space in which liquid hydrogen peroxide or hydrogen peroxide solution H can be stored.

The measuring chamber 52 forms a storage space in which liquid can be stored.
For example, the measuring chamber 52 can be composed of a straight pipe part and a branch pipe part.
The straight pipe portion is a straight tubular portion.
The branch pipe part is a tubular part extending in a branch shape from an intermediate part of the straight pipe part.
The measuring chamber 52 is installed so that the axis of the straight pipe portion is vertical.
The inside of the straight pipe part and the branch pipe part forms a storage space.

The first supply valve 53 is a valve that opens to allow conduction between the storage chamber 51 and the measurement chamber 52 and closes to stop conduction between the storage chamber 51 and the measurement chamber 52.
The first supply valve 53 may be a valve that opens to allow conduction between the storage chamber 51 and the top of the measurement chamber 52 and closes to stop conduction between the storage chamber 51 and the top of the measurement chamber 52.
For example, the first supply valve 53 opens to allow conduction between the storage chamber 51 and the top of the straight pipe portion, and closes to stop conduction between the storage chamber 51 and the top of the straight pipe portion.
For example, the first supply valve 53 is provided at the top of the straight pipe portion, and communicates with the storage chamber 51 via a conducting pipe.

The second supply valve 54 is a valve that opens to allow conduction between the lower portion of the measurement chamber 52 and the vaporization chamber 30 and closes to stop conduction between the lower portion of the measurement chamber 52 and the vaporization chamber 30.
The second supply valve 54 may be a valve that opens to allow conduction between the lower end of the measurement chamber 52 and the vaporization chamber 30 and closes to stop conduction between the lower end of the measurement chamber 52 and the vaporization chamber 30.
For example, the second supply valve 54 is a valve that opens to allow conduction between the lower end portion of the straight pipe portion and the vaporization chamber 30 and closes to stop conduction between the lower end portion of the straight pipe portion and the vaporization chamber 30.
For example, the 2nd supply valve 54 is provided in the lower end part of a straight pipe part, and is connected to the vaporization chamber 30 via a conduction pipe.

The third supply valve 55 is a valve that opens to allow conduction between the upper or middle portion of the measuring chamber 52 and the vacuum chamber and closes it to stop conduction between the upper or middle portion of the measuring chamber and the vacuum chamber.
For example, the third supply valve 55 is a valve that opens and allows the upper part of the measuring chamber 52 and the vacuum chamber to close and stops the upper part of the measuring chamber 52 and the vacuum chamber.
For example, the third supply valve 55 is a valve that opens to allow conduction between the intermediate portion of the measurement chamber 52 and the vacuum chamber and closes it to stop conduction between the intermediate portion of the measurement chamber and the vacuum chamber.
The third supply valve 55 opens and allows the upper or middle part of the measuring chamber 52 and the vacuum chamber to be evacuated to close, and stops the upper or middle part of the measuring chamber and the vacuum chamber to be evacuated. It may be a valve.
The third supply valve 55 is a valve that opens and allows the intermediate part of the measuring chamber 52 and the vacuum chamber to be evacuated to close, and closes the intermediate part of the measuring chamber and the vacuum chamber to be evacuated.
For example, the third supply valve 55 is a valve that opens to allow conduction between the branch pipe part and the vacuum chamber to be evacuated, and closes to stop conduction between the branch pipe part and the vacuum chamber to be evacuated.
For example, the third supply valve 55 is provided in the branch pipe part, and is conducted to a vacuum chamber that is evacuated through the conducting pipe.
The vacuum chamber may be the sterilization chamber 10 or a separate vacuum chamber.
The third supply valve 55 may be a valve that opens and allows the upper part or middle part of the measuring chamber 52 and the sterilization chamber 10 to be closed and stops the upper part or middle part of the measuring chamber 52 and the sterilization chamber 10. Good.
For example, the third supply valve 55 may be a valve that opens to allow conduction between the branch pipe part and the sterilization chamber 10 and closes it to stop conduction between the branch pipe part and the sterilization chamber 10.
For example, the third supply valve 55 is provided in the branch pipe part, and conducts to the sterilization chamber 10 through the conduction pipe.

The operation process of the first type hydrogen peroxide supply device 50 will be described below.
FIG. 6 shows a time chart of the operation process of the first type hydrogen peroxide supply device 50.
The operation process is performed so that the hydrogen peroxide supply device supplies liquid hydrogen peroxide or hydrogen peroxide solution J to the vaporizing chamber 30.
The operation process includes a filling process, an exhaust process, and a supply process.
The first supply valve 53, the second supply valve 54, and the third supply valve 55 are closed in advance. The third supply valve 55 is opened and closed after a predetermined time. As a result, the inside of the measuring chamber 52 is in a vacuum state.
The filling process is a process of closing the second supply valve 54 and the third supply valve 55 and opening the first supply valve 53. As a result, the liquid moves from the storage chamber 51 to the measurement chamber 52.
The exhaust process is a process for closing the first supply valve 53 and the second supply valve 54 and opening the third supply valve 55 thereafter. As a result, the gas inside the measuring chamber 54 is sucked out via the third supply valve 55, and the gas contamination inside the measuring chamber 54 is reduced.
The supply process is a process in which the first supply valve 53 and the third supply valve 55 are then closed and the second supply valve 54 is temporarily opened and closed. As a result, a fixed amount of liquid falls into the vaporization chamber 40.

After filling the measuring chamber 52 with the liquid, the first supply valve 53 and the second supply valve 54 are closed, the third supply valve 55 is opened, and the inside of the measuring chamber 52 is temporarily evacuated. An appropriate amount of liquid remains in the lower part.
When the above procedure is performed when the liquid is liquid hydrogen peroxide, moisture mixed in the hydrogen peroxide can be removed during the operation.
Thereafter, when the vaporizing chamber 30 is evacuated, the first supply valve 53 and the third supply valve 55 are closed and the second supply valve 54 is opened, so that an appropriate amount of liquid is supplied to the vaporizing chamber 30.

Next, the second type hydrogen peroxide supply device 50 will be described.
FIG. 7 shows a second type of hydrogen peroxide supply device 50.
The second type hydrogen peroxide supply device 50 includes a storage chamber 51 and a supply valve 56.
The storage chamber 51 can store liquid hydrogen peroxide or a hydrogen peroxide solution.
The storage chamber 51 forms a space where liquid hydrogen peroxide or a hydrogen peroxide solution can be stored.
For example, the storage chamber 51 forms an inverted conical space in which liquid hydrogen peroxide or a hydrogen peroxide solution can be stored.
For example, the storage chamber 51 forms an inverted conical space in which non-aqueous hydrogen peroxide water can be stored.

  The supply valve 56 is a valve that opens to allow conduction between the storage chamber 51 and the sterilization chamber 10, and closes to stop conduction between the storage chamber 51 and the sterilization chamber 10.

Below, the operation | movement process of the 2nd type hydrogen peroxide supply apparatus 50 is demonstrated.
After the appropriate amount of liquid is stored in the storage chamber 51, the appropriate amount of liquid can be supplied to the vaporization chamber 30 by opening and closing the supply valve 56.

Next, the operation of the sterilizer according to the first embodiment of the present invention will be described.
FIG. 2 shows a pressure change diagram of the sterilization method according to the first embodiment of the present invention.
The operation of the sterilizer will be described in the order of the initial decompression process, the sterilization process, and the ventilation process.

First, the initial decompression step will be described.
A vacuum vaporization step is performed in the initial decompression step.
(Vacuum vaporization process)
In the vacuum vaporization step, the sterilization chamber 10 and the vaporization chamber 30 are evacuated by the vacuum device 20, the vaporization valve 40 is closed, and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30 by the hydrogen peroxide supply device 50. It is a process of supplying.
The vacuum vaporization process may be composed of a vacuum process and a vaporization process.

(Vacuum process)
The vacuum process is a process of opening the vaporization valve 40 and evacuating the sterilization chamber 10 with the vacuum device 20.
The opening is opened by the sterilization chamber lid structure 12, the object is stored in the sterilization chamber body, and the opening is closed by the sterilization chamber lid structure 12.
The air release valve 22 and the vaporization valve 40 are closed, and the vacuum pump 21 is operated.
As a result, the pressure in the sterilization chamber 10 decreases.
When the pressure in the sterilization chamber 10 decreases and reaches a predetermined degree of vacuum P5, the vaporization valve 40 is opened.
The vaporizing chamber 30 is evacuated through the vaporizing valve 40, and the pressure in the vaporizing chamber 30 decreases.
As a result, after the pressure in the sterilization chamber 10 temporarily increases, the pressure further decreases.

(Vaporization process)
The vaporization step is a step of subsequently closing the vaporization valve and supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber with a hydrogen peroxide supply device.
When the pressure in the sterilization chamber 10 decreases and reaches a predetermined degree of vacuum P2, the hydrogen peroxide supply device 50 is activated to fill the measuring chamber 52 with an appropriate amount of liquid hydrogen peroxide.
When the pressure in the sterilization chamber 10 decreases and reaches a predetermined pressure P3, the vaporization valve 40 is closed and the second supply valve 54 is opened and closed.
As a result, an appropriate amount of liquid hydrogen peroxide enters the vaporizing chamber 30.
As time passes, hydrogen peroxide is gasified and fills the vaporizing chamber 30.

Next, a sterilization process is performed.
In the sterilization process, a hydrogen peroxide introduction process, an air supply process, a vaporization valve closing process, and a vacuum resuming process are performed.
(Hydrogen peroxide introduction process)
The hydrogen peroxide introduction step is a step of opening the vaporization valve by stopping the evacuation of the sterilization chamber by a vacuum device when a predetermined time has elapsed.
Alternatively, when a predetermined time elapses and the pressure in the sterilization chamber further decreases to reach a predetermined vacuum level, the evacuation of the sterilization chamber by the vacuum device is stopped and the vaporization valve is opened.
After a predetermined amount of liquid hydrogen peroxide enters the vaporizing chamber 30, when a predetermined time has elapsed, the vacuum pump 21 is stopped and the vaporizing valve 40 is opened.
As a result, the vaporized hydrogen peroxide enters the sterilization chamber 10, and the pressure in the sterilization chamber 10 increases.
Hydrogen peroxide adheres to the surface of the object and sterilizes the object.

(Air supply process)
The air supply process is a process of opening the air release valve after a predetermined time has elapsed.
After the vaporization valve 40 is opened, the atmosphere release valve is opened when a predetermined time has elapsed.
As a result, the atmosphere enters the sterilization chamber 10 and the pressure in the sterilization chamber 10 increases.
When the atmosphere enters the sterilization chamber 10, hydrogen peroxide moves along the surface of the object and further sterilizes the object.

(Vaporization valve closing process)
The vaporization valve closing step is a step in which the vaporization valve is closed when the pressure in the sterilization chamber 10 increases and reaches a predetermined degree of vacuum.
The atmosphere enters the sterilization chamber 10 via the air release valve 22, and the pressure in the sterilization chamber 10 increases.
When the pressure in the sterilization chamber 10 reaches a predetermined degree of vacuum P1, the vaporization valve 40 is closed.
As a result, the pressure in the vaporizing chamber 30 becomes a predetermined degree of vacuum P1.

(Vacuum resumption process)
The vacuum resuming step is a step of subsequently evacuating the sterilization chamber 10 by closing the air release valve 22 and operating the vacuum pump 21.
After the pressure in the vaporizing chamber 30 reaches a predetermined vacuum degree P0 set in advance, when the predetermined time elapses, the atmosphere release valve 22 is closed and the vacuum pump 21 is operated to sterilize the chamber 10. May be evacuated.
After the pressure in the vaporizing chamber 30 reaches a predetermined vacuum degree P0 set in advance, immediately after a predetermined time set in advance, the atmosphere release valve 22 is closed and the vacuum pump 21 is operated to sterilize the chamber 10. May be evacuated.
For example, the degree of vacuum P0 is atmospheric pressure.
For example, the degree of vacuum P0 is a pressure lower than atmospheric pressure.
The air release valve 22 is closed and the vacuum pump 21 is operated.

The air release valve 22 is closed, the vacuum pump 21 is operated, and the vaporization valve 40 is opened.
As a result, the pressure in the sterilization chamber 10 decreases and the pressure in the vaporization chamber 30 decreases.

Thereafter, a procedure for sequentially performing the vacuum vaporization step, the hydrogen peroxide introduction step, the air supply step, the vaporization valve closing step, and the vacuum resumption step is performed a plurality of times.
In this way, even when the object has a complicated depression, hydrogen peroxide enters the depression and can be sterilized efficiently.
In this way, even when the object has a tubular portion, hydrogen peroxide enters the tube and can be sterilized efficiently.
FIG. 2 shows that the steps of the vacuum vaporization step, the hydrogen peroxide introduction step, the air supply step, the vaporization valve closing step, and the vacuum resumption step are sequentially repeated a plurality of times.

Next, a ventilation process is performed.
The vaporization valve 40 is closed, the vacuum pump is operated, and the atmosphere release valve 22 is repeatedly opened and closed.
As a result, hydrogen peroxide is discharged from the sterilization chamber 10, and hydrogen peroxide that has entered the recess of the object is also discharged.
The sterilization chamber lid structure 12 opens the opening, and the object is taken out from the opening.

Next, a sterilization apparatus according to a second embodiment of the present invention will be described with reference to the drawings.
FIG. 3 is a pressure change diagram of the sterilization method according to the second embodiment of the present invention.
The sterilization apparatus according to the second embodiment of the present invention includes a sterilization chamber 10, a vacuum device 20, a vaporization chamber 30, and a vaporization valve 40 and a hydrogen peroxide supply device 50.
Since the sterilization chamber 10, the vacuum device 20, the vaporization chamber 30, the vaporization valve 40, and the hydrogen peroxide supply device 50 are the same as those according to the first embodiment, the description thereof is omitted.

Next, the operation of the sterilizer according to the second embodiment of the present invention will be described.
The explanation will be divided into an initial decompression process, a sterilization process, and a ventilation process.
Since the initial decompression step and the ventilation step are the same as those of the sterilization apparatus according to the first embodiment, description thereof is omitted.

The sterilization process will be described.
The sterilization process includes a hydrogen peroxide introduction process, an air supply process, a vaporization valve closing process, a vacuum restart process, and a temporary air supply process.
Since the hydrogen peroxide introduction process, the air supply process, the vaporization valve closing process, and the vacuum restart process are the same as the operation of the sterilization apparatus according to the first embodiment, the description thereof is omitted.

(Temporary air supply process)
FIG. 3 illustrates details of changes in the pressure of the sterilization chamber in the temporary air supply process.
The temporary air supply process is a process of temporarily opening and closing the air release valve 22 while operating the vacuum pump 21 when the pressure in the sterilization chamber 10 decreases and does not reach a predetermined degree of vacuum.
After the vacuum resuming step is performed, when the pressure in the sterilization chamber 10 decreases but the predetermined degree of vacuum P4 is not reached within a predetermined time, the air release valve 22 is temporarily turned on while operating the vacuum pump 21. Open and close.
The gas or liquid mist staying in the sterilization chamber 10 is pushed out to the atmosphere that has entered through the atmosphere release valve 22 and is discharged from the sterilization chamber 10.
For example, water vapor evaporated from the surface of the object is pushed out into the atmosphere that has entered through the atmosphere release valve 22 and discharged from the sterilization chamber 10.
As a result, the pressure in the sterilization chamber 10 decreases, reaches a predetermined vacuum level P4, and the subsequent sterilization process can be performed efficiently.

Next, a sterilization apparatus according to the third embodiment of the present invention will be described.
The sterilization apparatus according to the third embodiment of the present invention includes a sterilization chamber 10, a vacuum device 20, a vaporization chamber 30, and a vaporization valve 40 and a hydrogen peroxide supply device 50.
Since the sterilization chamber 10, the vacuum device 20, the vaporization chamber 30, the vaporization valve 40, and the hydrogen peroxide supply device 50 are the same as those according to the first embodiment, the description thereof is omitted.

Next, the operation of the sterilizer according to the third embodiment of the present invention will be described.
The explanation will be divided into an initial decompression process, a sterilization process, and a ventilation process.

First, the initial decompression step will be described.
(Vacuum vaporization process)
In the vacuum vaporization step, the sterilization chamber 10 and the vaporization chamber 30 are evacuated by the vacuum device 20, the vaporization valve 40 is closed, and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30 by the hydrogen peroxide supply device 50. It is a process of supplying.
The sterilization chamber lid structure 12 opens the opening, the object is stored in the sterilization chamber main body from the opening, and the sterilization chamber lid structure 12 closes the opening.
The air release valve 22 is closed and the vacuum pump 21 is operated.
As a result, the pressure in the sterilization chamber 10 decreases.
The vaporizing chamber 30 is evacuated through the vaporizing valve 40, and the pressure in the vaporizing chamber 30 decreases.
When the pressure in the sterilization chamber 10 decreases and reaches a predetermined degree of vacuum P2, the hydrogen peroxide supply device 50 is activated to prepare an appropriate amount of liquid hydrogen peroxide in the measurement chamber 52.
When the pressure in the sterilization chamber 10 decreases and reaches a predetermined pressure P3, the vaporization valve 40 is closed and the second supply valve 54 is opened and closed.
As a result, an appropriate amount of liquid hydrogen peroxide enters the vaporizing chamber 30.
As time passes, hydrogen peroxide is gasified and fills the vaporizing chamber 30.

Next, a sterilization process is performed.
The sterilization process includes a hydrogen peroxide introduction process, an air supply process, and a vacuum restart process.
(Hydrogen peroxide introduction process)
The hydrogen peroxide introduction step is a step of stopping the evacuation of the sterilization chamber by the vacuum device and opening the vaporization valve when a predetermined time passes thereafter.
Alternatively, when a predetermined time elapses and the pressure in the sterilization chamber further decreases to reach a predetermined degree of vacuum, the evacuation of the sterilization chamber by the vacuum device is stopped and the vaporization valve is opened.
When a predetermined amount of time has passed after an appropriate amount of liquid peroxide water death has entered the vaporizing chamber 30, the vacuum pump 21 is stopped and the vaporizing valve 40 is opened.
as a result. The pressure in the sterilization chamber 10 increases. The vaporized hydrogen peroxide enters the sterilization chamber 10, and the hydrogen peroxide adheres to the surface of the object and sterilizes.

(Air supply process)
The air supply process is a process of opening the air release valve after a predetermined time has elapsed.
After the vaporization valve 40 is opened, the atmosphere release valve is opened when a predetermined time has elapsed.
As a result, the atmosphere enters the sterilization chamber 10 and the pressure in the sterilization chamber 10 increases.

(Vacuum resumption process)
The vacuum resuming step is a step of subsequently evacuating the sterilization chamber 10 by closing the air release valve 22 and operating the vacuum pump 21.
After the pressure in the vaporizing chamber 30 reaches a predetermined vacuum degree P0 set in advance, when the predetermined time elapses, the atmosphere release valve 22 is closed and the vacuum pump 21 is operated to sterilize the chamber 10. May be evacuated.
After the pressure in the vaporizing chamber 30 reaches a predetermined vacuum degree P0 set in advance, immediately after a predetermined time set in advance, the atmosphere release valve 22 is closed and the vacuum pump 21 is operated to sterilize the chamber 10. May be evacuated.
For example, the degree of vacuum P0 is atmospheric pressure.
For example, the degree of vacuum P0 is a pressure lower than atmospheric pressure.
The air release valve 22 is closed and the vacuum pump 21 is operated.

When the air release valve 22 is closed and the vacuum pump 21 is operated, the vaporization valve 40 is opened.
As a result, the pressure in the sterilization chamber 10 decreases and the pressure in the vaporization chamber 30 decreases.

Thereafter, the procedure of sequentially performing the vaporization step, the hydrogen peroxide introduction step, the air supply step, and the vacuum resumption step is performed a plurality of times.
In this way, even when the object has a complicated dent, hydrogen peroxide enters the dent and can be sterilized efficiently.

Next, a ventilation process is performed.
The vaporization valve 40 is closed, the vacuum pump is operated, and the atmosphere release valve 22 is repeatedly opened and closed.
As a result, hydrogen peroxide is discharged from the sterilization chamber 10, and hydrogen peroxide that has entered the recess of the object is also discharged.
The sterilization chamber lid structure 12 is opened and the object is taken out.

Next, a sterilization apparatus according to a fourth embodiment of the present invention will be described with reference to the drawings.
FIG. 4 is a pressure change diagram of the sterilization method according to the fourth embodiment of the present invention.
The sterilization apparatus according to the fourth embodiment of the present invention includes a sterilization chamber 10, a vacuum device 20, a vaporization chamber 30, and a vaporization valve 40 and a hydrogen peroxide supply device 50.
Since the sterilization chamber 10, the vacuum device 20, the vaporization chamber 30, the vaporization valve 40, and the hydrogen peroxide supply device 50 are the same as those according to the first embodiment, the description thereof is omitted.

Next, the operation of the sterilizer according to the fourth embodiment of the present invention will be described.
The explanation will be divided into an initial decompression process, a sterilization process, and a ventilation process.
Since the initial decompression step and the ventilation step are the same as those of the sterilization apparatus according to the first embodiment, description thereof is omitted.

In the sterilization process, a hydrogen peroxide introduction process, an air supply process, a vaporization valve closing process, and a vacuum resuming process are performed.
(Hydrogen peroxide introduction process)
The hydrogen peroxide introduction step is a step of opening the vaporization valve by stopping the evacuation of the sterilization chamber by a vacuum device when a predetermined time has elapsed.
Alternatively, when a predetermined time elapses and the pressure in the sterilization chamber further decreases to reach a predetermined vacuum level, the evacuation of the sterilization chamber by the vacuum device is stopped and the vaporization valve is opened.
When a predetermined amount of time has passed after an appropriate amount of liquid peroxide water death has entered the vaporizing chamber 30, the vacuum pump 21 is stopped and the vaporizing valve 40 is opened.
As a result, the vaporized hydrogen peroxide enters the sterilization chamber 10, and the pressure in the sterilization chamber 10 increases.
Hydrogen peroxide adheres to the surface of the object and sterilizes it.

(Air supply process)
The air supply process is a process of opening the air release valve after a predetermined time has elapsed.
After the vaporization valve 40 is opened, the atmosphere release valve is opened when a predetermined time has elapsed.
As a result, the atmosphere enters the sterilization chamber 10 and the pressure in the sterilization chamber 10 increases.
When the atmosphere enters the sterilization chamber 10, hydrogen peroxide moves along the surface of the object and further sterilizes the object.

(Vaporization valve closing process)
The vaporization valve closing step is a step in which the vaporization valve is closed when the pressure in the sterilization chamber 10 increases and reaches a predetermined degree of vacuum.
The atmosphere enters the sterilization chamber 10 via the air release valve 22, and the pressure in the sterilization chamber 10 increases.
When the pressure in the sterilization chamber 10 reaches a predetermined degree of vacuum P1, the vaporization valve 40 is closed.
As a result, the pressure in the vaporizing chamber 30 becomes a predetermined degree of vacuum P1.

(Vacuum resumption process)
The vacuum resuming step is a step of subsequently evacuating the sterilization chamber 10 by closing the air release valve 22 and operating the vacuum pump 21.
When the pressure in the vaporization chamber 30 reaches a predetermined vacuum degree P0 set in advance, the sterilization chamber 10 may be evacuated by closing the atmosphere release valve 22 and operating the vacuum pump 21.
Immediately after the pressure in the vaporization chamber 30 reaches a predetermined vacuum degree P0, the sterilization chamber 10 may be evacuated by closing the atmosphere release valve 22 and operating the vacuum pump 21.
For example, the degree of vacuum P0 is atmospheric pressure.
For example, the degree of vacuum P0 is a pressure lower than atmospheric pressure.
The air release valve 22 is closed and the vacuum pump 21 is operated.

The air release valve 22 is closed, the vacuum pump 21 is operated, and the vaporization valve 40 is opened.
As a result, the pressure in the sterilization chamber 10 decreases and the pressure in the vaporization chamber 30 decreases.

Thereafter, a procedure for sequentially performing the vacuum vaporization step, the hydrogen peroxide introduction step, the air supply step, the vaporization valve closing step, and the vacuum resumption step is performed a plurality of times.
In this way, even when the object has a complicated depression, hydrogen peroxide enters the depression and can be sterilized efficiently.
In this way, even when the object has a tubular portion, hydrogen peroxide enters the tube and can be sterilized efficiently.
FIG. 4 shows that the steps of the vacuum vaporization step, the hydrogen peroxide introduction step, the air supply step, the vaporization valve closing step, and the vacuum resumption step are sequentially repeated a plurality of times.

Next, the sterilization method according to the first embodiment of the present invention will be described with reference to the drawings.
FIG. 8 is a flowchart of the sterilization method according to the first embodiment of the present invention.
The sterilization method according to the first embodiment of the present invention includes a preparation step, a vacuum vaporization step S10, and a hydrogen peroxide introduction step S20.
The sterilization method according to the first embodiment of the present invention may include a preparation step, a vacuum vaporization step S10, a hydrogen peroxide introduction step S20, and an air supply step S30.
The sterilization method according to the first embodiment of the present invention may include a preparation step, a vacuum vaporization step S10, a hydrogen peroxide introduction step S20, an air supply step S30, and a vaporization valve closing step S40.
The sterilization method according to the first embodiment of the present invention may include a preparation process, a vacuum vaporization process S10, a hydrogen peroxide introduction process S20, an air supply process S30, a vaporization valve closing process S40, and a vacuum resumption process S50. Good.

The preparation step is a step of preparing the sterilization chamber 10, the vaporization chamber 30, and the vaporization valve 40.
In the preparation step, the sterilization chamber 10, the vaporization chamber 30, the vaporization valve 40, and the hydrogen peroxide supply device 50 may be prepared.
In the preparation step, the sterilization chamber 10, the vacuum device 20, the vaporization chamber 30, the vaporization valve 40, and the hydrogen peroxide supply device 50 may be prepared.

The sterilization chamber 10 is a vacuum chamber that stores an object.
The vacuum device 20 is a device that evacuates the sterilization chamber 10.
The vaporization chamber 30 forms a space for vaporization having a predetermined volume. The vaporization chamber 30 has a space with a volume sufficient to vaporize the entire amount when a predetermined volume of liquid hydrogen peroxide or a hydrogen peroxide solution is introduced.
The vaporization valve 40 is a valve that opens to allow conduction between the vaporization chamber 30 and the sterilization chamber 10 and closes to stop conduction between the vaporization chamber 30 and the sterilization chamber 10.
The hydrogen peroxide supply device 50 is a device for supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber.
The details of the sterilization chamber 10, the vacuum device 20, the vaporization chamber 30, the vaporization valve 40, and the hydrogen peroxide supply device 50 may be those of the sterilization apparatus described above.

First, the sterilization chamber lid structure 12 opens the opening, the object is put into the sterilization chamber 10 through the opening, and the sterilization chamber lid structure 12 closes the opening.
The object is what you want to sterilize.
For example, the object is a medical device.

The vacuum vaporization step S <b> 10 is a step in which the sterilization chamber 10 and the vaporization chamber 30 are evacuated, the vaporization valve 40 is closed, and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30.
The vacuum vaporization step S10 may include a vacuum step S11 and a vaporization step S12.

The vacuum process S11 is a process of opening the vaporization valve 40 and evacuating the sterilization chamber 10.
The sterilization chamber 10 is evacuated, and the pressure in the sterilization chamber 10 decreases.
The vaporizing chamber 30 is evacuated through the vaporizing valve 40, and the pressure in the vaporizing chamber 30 is reduced.

The vaporization step S12 is a step of closing the vaporization valve 40 and supplying liquid hydrogen peroxide or hydrogen peroxide solution H to the vaporization chamber.
When the liquid hydrogen peroxide or the hydrogen peroxide solution H is supplied to the vaporization chamber 30, the hydrogen peroxide supply device 50 is operated.

When the hydrogen peroxide supply device of the sterilizer is the first type, the vacuum vaporization step S10 or the vaporization step S12 includes a filling step, an exhaust step, and a supply step.
The filling process is a process of closing the second supply valve 54 and the third supply valve 55 and opening the first supply valve 53.
As a result, the liquid hydrogen peroxide or hydrogen peroxide solution stored in the storage chamber 51 enters the measurement chamber 52.
The exhaust process is a process of closing the first supply valve 53 and the second supply valve and opening the third supply valve.
As a result, liquid hydrogen peroxide or hydrogen peroxide solution H accumulated in the measuring chamber 52 is exhausted at the upper portion of the measuring chamber 52, and an appropriate amount of liquid hydrogen peroxide or hydrogen peroxide is discharged below the measuring chamber 52. Solution H remains.
The supply process is a process in which the first supply valve 53 and the third supply valve 55 are closed and the second supply valve 54 is temporarily opened and closed.
As a result, the liquid hydrogen peroxide or hydrogen peroxide solution remaining in the measuring chamber 52 is supplied to the sterilization chamber 10.

When the hydrogen peroxide supply device of the sterilizer is the second type, the vacuum vaporization step S10 or the vaporization step S12 opens and closes the supply valve 56 temporarily.
As a result, the liquid hydrogen peroxide or hydrogen peroxide solution stored in the storage chamber 51 is supplied to the sterilization chamber 10.

The hydrogen peroxide introduction step S20 is a step in which the evacuation of the sterilization chamber 10 is stopped and the vaporization valve is opened.
After performing the vacuum vaporization step S10, the hydrogen peroxide introduction step S20 is performed when the vaporization time which is a predetermined time has elapsed.
The hydrogen peroxide introduction step S20 may be performed when the vacuum vaporization step S10 is performed and then the vaporization time, which is a predetermined time, elapses and the pressure in the sterilization chamber is further reduced to reach a predetermined degree of vacuum.
The vaporization time is a time sufficient for the hydrogen peroxide H supplied in the vaporization chamber 30 to vaporize.
For example, with the atmosphere release valve 22 closed, the vacuum pump 21 is stopped and the vaporization valve 40 is opened.
As a result, vaporized hydrogen peroxide is introduced into the sterilization chamber 10.
Vaporized hydrogen peroxide sterilizes the surface of the object.

The air supply process S30 is a process of opening the atmosphere release valve 22.
After performing hydrogen peroxide introduction process S20, if predetermined time passes, air supply process S30 will be implemented.
As a result, the atmosphere enters the sterilization chamber, the hydrogen peroxide H moves along the surface of the object, and the object is sterilized.
For example, the hydrogen peroxide H moves to the part where the object enters, and the part where the object enters enters is sterilized.

The vaporization valve closing step S40 is a step of closing the vaporization valve.
The air supply step S30 is performed, and then the vaporization valve closing step is performed when the pressure in the sterilization chamber 10 increases to reach a predetermined degree of vacuum.
As a result, the pressure in the vaporizing chamber 30 becomes a predetermined degree of vacuum.

The vacuum resuming step S50 is a step of evacuating the sterilization chamber by closing the atmosphere release valve 22 and operating the vacuum pump 21.
A vaporization valve closing process is performed, and then a vacuum resuming process is performed.
When a predetermined time elapses after the pressure in the vaporizing chamber 30 reaches a predetermined vacuum degree P0, the atmosphere release valve 22 is closed and the vacuum pump 21 is operated to sterilize the chamber. Evacuate.
Immediately after a predetermined time elapses after the pressure in the vaporizing chamber 30 reaches a predetermined vacuum degree P0, the atmosphere release valve 22 is closed and the vacuum pump 21 is operated to sterilize the chamber. Evacuate.
As a result, the sterilization chamber 10 is evacuated.

When the air release valve 22 is closed and the vacuum pump 21 is operated, the vaporization valve 40 is opened.
As a result, the pressure in the sterilization chamber 10 decreases and the pressure in the vaporization chamber 30 decreases.

Thereafter, a procedure for sequentially performing the vacuum vaporization step S10, the hydrogen peroxide introduction step S20, the air supply step S30, the vaporization valve closing step S40, and the vacuum resumption step S50 is performed a plurality of times.
In this way, even when the object has a complicated depression, hydrogen peroxide enters the depression and can be sterilized efficiently.
Even when the object has a tubular portion, hydrogen peroxide enters the tube and can be sterilized efficiently.

Next, a ventilation process is performed.
The vaporization valve 40 is closed, the vacuum pump is operated, and the atmosphere release valve 22 is repeatedly opened and closed.
As a result, hydrogen peroxide is discharged from the sterilization chamber 10, and hydrogen peroxide that has entered the recess of the object is also discharged.
The sterilization chamber lid structure 12 is opened and the object is taken out.

Next, the sterilization method according to the second embodiment of the present invention will be described with reference to the drawings.
FIG. 9 is a flowchart of the sterilization method according to the second embodiment of the present invention.
The sterilization method according to the second embodiment of the present invention includes a preparation step, a vacuum vaporization step S10, and a hydrogen peroxide introduction step S20.
The sterilization method according to the first embodiment of the present invention may include a preparation step, a vacuum vaporization step S10, a hydrogen peroxide introduction step S20, and an air supply step S30.
The sterilization method according to the first embodiment of the present invention may include a preparation step, a vacuum vaporization step S10, a hydrogen peroxide introduction step S20, an air supply step S30, and a vaporization valve closing step S40.
The sterilization method according to the first embodiment of the present invention includes a preparation step, a vacuum vaporization step S10, a hydrogen peroxide introduction step S20, an air supply step S30, a vaporization valve closing step S40, a vacuum resumption step S50, and a temporary air supply step S60. And may be configured.
Since the preparation step, the vacuum vaporization step S10, the hydrogen peroxide introduction step S20, the air supply step S30, the vaporization valve closing step S40, and the vacuum resumption step S50 are the same as those of the sterilization method according to the first embodiment, description thereof is omitted. To do.

The temporary air supply step S60 is a step of temporarily opening and closing the air release valve 22 while operating the vacuum pump 21.
The vacuum resumption process S50 is performed, and then the temporary air supply process S60 is performed when the pressure in the sterilization chamber 10 decreases and does not reach a predetermined degree of vacuum.
For example, the vacuum reopening step S50 is performed, and then, when the pressure in the sterilization chamber 10 decreases but the predetermined degree of vacuum P4 is not reached within a predetermined time, the air release valve 22 is operated while operating the vacuum pump 21. Is temporarily opened and closed.
The gas or liquid mist staying in the sterilization chamber 10 is pushed out to the atmosphere that has entered through the atmosphere release valve 22 and is discharged from the sterilization chamber 10.
For example, water vapor evaporated from the surface of the object is pushed out into the atmosphere that has entered through the atmosphere release valve 22 and discharged from the sterilization chamber 10.
As a result, the pressure in the sterilization chamber 10 is reduced to reach a predetermined degree of vacuum P4, and the subsequent sterilization process can be performed efficiently.

Thereafter, the procedure of sequentially performing the vacuum vaporization step S10, the hydrogen peroxide introduction step S20, the air supply step S30, the vaporization valve closing step S40, the vacuum resumption step S50, and the temporary air supply step S60 is repeated a plurality of times.
In this way, even when the object has a complicated dent, hydrogen peroxide enters the dent and can be sterilized efficiently.

Next, a ventilation process is performed.
The vaporization valve 40 is closed, the vacuum pump is operated, and the atmosphere release valve 22 is repeatedly opened and closed.
As a result, hydrogen peroxide is discharged from the sterilization chamber 10, and hydrogen peroxide that has entered the recess of the object is also discharged.
The sterilization chamber lid structure 12 is opened and the object is taken out.

Next, a sterilization method according to the third embodiment of the present invention will be described with reference to the drawings.
FIG. 10 is a flowchart of the sterilization method according to the third embodiment of the present invention.
The sterilization method according to the third embodiment of the present invention includes a preparation process, a vacuum vaporization process S10, a hydrogen peroxide introduction process S20, an air supply process S30, and a vacuum restart process S50.
Since the preparation step, the vacuum vaporization step S10, the hydrogen peroxide introduction step S20, and the air supply step S30 are the same as those of the sterilization method according to the first embodiment, description thereof is omitted.

The vacuum resuming step S50 is a step of evacuating the sterilization chamber by closing the atmosphere release valve 22 and operating the vacuum pump 21.
The air supply process S30 is performed, and then the vacuum restart process S50 is performed.
As a result, the sterilization chamber 10 is evacuated.

Next, a sterilization method according to a fourth embodiment of the present invention will be described with reference to the drawings.
FIG. 11 is a flowchart of the sterilization method according to the fourth embodiment of the present invention.
The sterilization method according to the first embodiment of the present invention includes a preparation step, a vacuum vaporization step S10, and a hydrogen peroxide introduction step S20.
The sterilization method according to the first embodiment of the present invention may include a preparation step, a vacuum vaporization step S10, a hydrogen peroxide introduction step S20, and an air supply step S30.
The sterilization method according to the first embodiment of the present invention may include a preparation step, a vacuum vaporization step S10, a hydrogen peroxide introduction step S20, an air supply step S30, and a vaporization valve closing step S40.
The sterilization method according to the first embodiment of the present invention may include a preparation process, a vacuum vaporization process S10, a hydrogen peroxide introduction process S20, an air supply process S30, a vaporization valve closing process S40, and a vacuum resumption process S50. Good.
Since the preparation step, the preparation step, the vacuum vaporization step S10, the hydrogen peroxide introduction step S20, the air supply step S30, and the vaporization valve closing step S40 are the same as the sterilization method according to the first embodiment, the description thereof is omitted.

The vacuum resuming step S50 is a step of evacuating the sterilization chamber by closing the atmosphere release valve 22 and operating the vacuum pump 21.
A vaporization valve closing process is performed, and then a vacuum resuming process is performed.
When the pressure in the vaporizing chamber 30 reaches a preset vacuum degree P0, the atmosphere release valve 22 is closed and the vacuum pump 21 is operated to evacuate the sterilization chamber.
Immediately after the pressure in the vaporizing chamber 30 reaches a predetermined degree of vacuum P0, the atmosphere release valve 22 is closed and the vacuum pump 21 is operated to evacuate the sterilization chamber.
As a result, the sterilization chamber 10 is evacuated.

When the air release valve 22 is closed and the vacuum pump 21 is operated, the vaporization valve 40 is opened.
As a result, the pressure in the sterilization chamber 10 decreases and the pressure in the vaporization chamber 30 decreases.

Thereafter, a procedure for sequentially performing the vacuum vaporization step S10, the hydrogen peroxide introduction step S20, the air supply step S30, the vaporization valve closing step S40, and the vacuum resumption step S50 is performed a plurality of times.
In this way, even when the object has a complicated depression, hydrogen peroxide enters the depression and can be sterilized efficiently.
Even when the object has a tubular portion, hydrogen peroxide enters the tube and can be sterilized efficiently.

The sterilization apparatus according to the embodiment of the present invention has the following effects due to its configuration.
The vaporization valve 40 communicates with the sterilization chamber 10 and the vaporization chamber 30 in which an object can be stored, and the sterilization chamber 10 and the vaporization chamber 30 are evacuated and the vaporization valve 40 is closed to form liquid hydrogen peroxide or a hydrogen peroxide solution. Since the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened when a predetermined time has passed after being supplied to the vaporization chamber 40, the peroxidation vaporized in the vaporization chamber 30 within the predetermined time. The hydrogen can pass through the vaporization valve 40 and enter the sterilization chamber 10 to sterilize the stored object.
When the vaporization valve 40 is opened and the sterilization chamber is evacuated, and then the vaporization valve 40 is closed and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30, and then a predetermined time passes. Since the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened, the hydrogen peroxide is vaporized in the vaporization chamber 30 in a vacuum, and the hydrogen peroxide vaporized in a predetermined time causes the vaporization valve 40 to open. The object passing through and entering the sterilization chamber 10 can be sterilized.
Also, the sterilization chamber 10 is evacuated by opening the vaporization valve 40, and then the vaporization valve 40 is closed and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30, and then a predetermined time has passed. Since the evacuation of the sterilization chamber 10 was stopped and the vaporization valve 40 was opened when the predetermined degree of vacuum was reached, hydrogen peroxide was vaporized in the vaporization chamber 30 in a vacuum and vaporized in a predetermined time. An object stored in the sterilization chamber 10 where hydrogen peroxide has passed through the vaporization valve 40 and has reached a predetermined degree of vacuum can be sterilized.
Further, the vaporization valve 40 is opened, the sterilization chamber 10 is evacuated, and then the vaporization valve 40 is closed and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber. When the pressure in the sterilization chamber 10 decreases to reach a predetermined degree of vacuum, the evacuation of the sterilization chamber 10 is stopped and the vaporization valve is opened. After that, when the predetermined time has elapsed, the atmosphere release valve 22 is opened. Hydrogen peroxide is vaporized in the vaporization chamber 30 in a vacuum, and the hydrogen peroxide vaporized in a predetermined time passes through the vaporization valve 40 and enters the sterilization chamber 10 that has reached a predetermined vacuum degree. Is introduced, the vaporized hydrogen peroxide moves on the surface of the object, and the contained object can be sterilized.
Further, the vaporization valve 40 is opened, the sterilization chamber 10 is evacuated, and then the vaporization valve 40 is closed and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber. When the pressure in the sterilization chamber 10 decreases to reach a predetermined vacuum level, the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened. After a predetermined time has elapsed, the air release valve 22 is opened, and then sterilization is performed. Since the vaporization valve 40 is opened when the chamber 10 reaches a predetermined degree of vacuum, hydrogen peroxide is vaporized in the vaporization chamber 30 in a vacuum, and the hydrogen peroxide vaporized in a predetermined time passes through the vaporization valve 40. Then, the air enters the sterilization chamber 10 that has reached a predetermined degree of vacuum, the atmosphere is introduced into the sterilization chamber 10, the vaporized hydrogen peroxide moves on the surface of the object, and the stored object can be sterilized. Maintain a predetermined degree of vacuum.
Also, the sterilization chamber 10 is evacuated by opening the vaporization valve 40, and then the vaporization valve 40 is closed and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30, and then a predetermined time has passed. Further, when the pressure in the sterilization chamber 10 decreases to reach a predetermined degree of vacuum, the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened. Thereafter, when a predetermined time elapses, the atmosphere release valve 22 is opened, and then When the sterilization chamber 10 reaches a predetermined degree of vacuum, the vaporization valve 40 is opened, and then the introduction of air is stopped and the sterilization chamber 10 is evacuated. Thereafter, the same operation is repeated. The hydrogen peroxide vaporized in the vaporization chamber 30 and then vaporized in a predetermined time passes through the vaporization valve 40 and enters the sterilization chamber 10 that has reached a predetermined vacuum degree, and the atmosphere is introduced into the sterilization chamber 10 and vaporized. Hydrogen peroxide moves on the surface of the object The degree of sterilization is increased, since the vaporizing chamber 30 repeats the operation of evacuating the sterilization chamber 10 to maintain a predetermined degree of vacuum, can be sterilized repeatedly stored physical object.
Also, the sterilization chamber 10 is evacuated by opening the vaporization valve 40, and then the vaporization valve 40 is closed and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30, and then a predetermined time has passed. Further, when the pressure in the sterilization chamber 10 decreases to reach a predetermined degree of vacuum, the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened. Thereafter, when a predetermined time elapses, the atmosphere release valve 22 is opened, and then When the sterilization chamber 10 reaches a predetermined degree of vacuum, the vaporization valve 40 is opened, and then the introduction of the atmosphere is stopped and the sterilization chamber 10 is evacuated. Thereafter, the pressure in the sterilization chamber 10 decreases and does not reach the predetermined degree of vacuum. Sometimes the atmosphere release valve 22 is temporarily opened and closed, and the same operation is repeated thereafter, so that hydrogen peroxide is vaporized in the vaporization chamber 30 in a vacuum, and the hydrogen peroxide vaporized in a predetermined time is vaporized. Through the valve to a certain degree of vacuum Enter the sterilization chamber 10, the atmosphere is introduced into the sterilization chamber 10, the vaporized hydrogen peroxide moves on the surface of the object, the degree of sterilization increases, and the vaporization chamber 30 maintains a predetermined degree of vacuum to sterilize the chamber. Since the operation of evacuating 10 is repeated, a desired degree of vacuum can be achieved even in the second and subsequent evacuation, and the stored object can be sterilized repeatedly.
In addition, when the storage chamber 51 can store liquid hydrogen peroxide or hydrogen peroxide solution and the sterilization chamber 10 is evacuated in order to supply the liquid hydrogen peroxide or hydrogen peroxide solution to the vaporization chamber 30. In addition, the conduction between the lower end of the weighing chamber 52 and the vaporization chamber 30 is stopped, the conduction between the intermediate portion of the weighing chamber 52 and the sterilization chamber 10 is stopped, and the conduction between the top of the weighing chamber 52 and the storage chamber 51 is allowed. Thus, the conduction between the top of the measuring chamber 52 and the storage chamber 51 is stopped, the conduction between the lower end of the measuring chamber 52 and the vaporizing chamber 30 is stopped, and the intermediate portion of the measuring chamber 52 and the sterilization chamber 10 are allowed to be connected. An appropriate amount of liquid remains in the lower portion of the measuring chamber 52, and then the conduction between the top of the measuring chamber 52 and the storage chamber 51 is stopped, and the middle portion of the measuring chamber 52 and the sterilization chamber 10 are stopped. Is allowed to remain in the lower part of the weighing chamber 52. Hydrogen peroxide or hydrogen peroxide solution an appropriate amount of liquid can be supplied to the vaporization chamber 30.
Further, the vaporization valve 40 communicates with the sterilization chamber 10 and the vaporization chamber 30 in which an object can be stored, the sterilization chamber 10 is evacuated, the vaporization valve 40 is closed, and the liquid hydrogen peroxide or the hydrogen peroxide solution is vaporized. Then, when a predetermined time has elapsed, the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened. After that, when the predetermined period has elapsed, the air release valve 22 is opened, and then the sterilization chamber 10 is opened. Since the vacuum release was performed and then the atmosphere release valve 22 was temporarily opened and closed when the sterilization chamber 10 did not reach a predetermined degree of vacuum, hydrogen peroxide was vaporized in the vaporization chamber 30 in a vacuum, The hydrogen peroxide vaporized in a predetermined time passes through the vaporization valve 40 and enters the sterilization chamber 10 which has reached a predetermined vacuum degree. The atmosphere is introduced into the sterilization chamber 10, and the vaporized hydrogen peroxide reaches the surface of the object. It can move and sterilize the object, and the vaporization chamber 30 is predetermined. Since the sterilization chamber 10 is evacuated to maintain the degree of vacuum, the desired degree of vacuum can be achieved in vacuum for the second time or later.
In addition, when the storage chamber 51 can store liquid hydrogen peroxide or hydrogen peroxide solution and the sterilization chamber 10 is evacuated in order to supply the liquid hydrogen peroxide or hydrogen peroxide solution to the vaporization chamber 30. In addition, the conduction between the lower end of the weighing chamber 52 and the vaporization chamber 30 is stopped, the conduction between the intermediate portion of the weighing chamber 52 and the sterilization chamber 10 is stopped, and the conduction between the top of the weighing chamber 52 and the storage chamber 51 is allowed. Thus, the conduction between the top of the measuring chamber 52 and the storage chamber 51 is stopped, the conduction between the lower end of the measuring chamber 52 and the vaporizing chamber 30 is stopped, and the intermediate portion of the measuring chamber 52 and the sterilization chamber 10 are allowed to be connected. An appropriate amount of liquid remains in the lower portion of the measuring chamber 52, and then the conduction between the top of the measuring chamber 52 and the storage chamber 51 is stopped, and the middle portion of the measuring chamber 52 and the sterilization chamber 10 are stopped. Is allowed to remain in the lower part of the weighing chamber 52. Hydrogen peroxide or hydrogen peroxide solution an appropriate amount of liquid can be supplied to the vaporization chamber 30.

Moreover, the sterilization method which concerns on embodiment of this invention has the following effects by the structure.
The vaporization valve 40 communicates with the sterilization chamber 10 and the vaporization chamber 30 in which an object can be stored, and the sterilization chamber 10 and the vaporization chamber 30 are evacuated and the vaporization valve 40 is closed to form liquid hydrogen peroxide or a hydrogen peroxide solution. When the vaporization chamber 30 is supplied and then the evacuation of the sterilization chamber 10 is stopped when a predetermined time has elapsed and the vaporization valve is opened, the vaporization time vaporizes the hydrogen peroxide supplied in the vaporization chamber. Therefore, the hydrogen peroxide sufficiently vaporized in the vaporizing chamber 30 within the predetermined time passes through the vaporizing valve 40 and enters the sterilizing chamber 10 to be sterilized.
Further, the sterilization chamber 10 is evacuated by opening the vaporization valve 40, and then the vaporization valve 40 is closed and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30, and then a predetermined time elapses. Since the evacuation of the sterilization chamber 10 is sometimes stopped and the vaporization valve 40 is opened, hydrogen peroxide is vaporized in the vaporization chamber 30 in a vacuum, and the hydrogen peroxide sufficiently vaporized in a predetermined time is vaporized. The object stored in the sterilization chamber 10 through the valve 40 can be sterilized. Also, the vaporization valve 40 is opened to evacuate the sterilization chamber 10, and then the vaporization valve 40 is closed to liquid hydrogen peroxide or excess. Since the hydrogen oxide solution was supplied to the vaporizing chamber 30 and then the evacuation of the sterilization chamber 10 was stopped and the vaporizing valve 40 was opened when a predetermined time had passed and a predetermined degree of vacuum was reached. Hydrogen is vaporized in the vaporization chamber 30 in a vacuum, The hydrogen peroxide vaporized in time can pass through the vaporizing valve 40 and sterilize the object stored in the sterilization chamber 10 that has reached a predetermined degree of vacuum.
Further, the vaporization valve is opened, the sterilization chamber 10 is evacuated, the vaporization valve 40 is then closed, and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30. When the pressure in the sterilization chamber 10 decreases to reach a predetermined degree of vacuum, the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened. After that, the atmospheric release valve 22 is opened after a predetermined time has elapsed. Then, hydrogen peroxide is vaporized in the vaporization chamber 30 in a vacuum, and the hydrogen peroxide sufficiently vaporized in a predetermined time passes through the vaporization valve 40 and enters the sterilization chamber 10 that has reached a predetermined degree of vacuum. Atmosphere is introduced into 10 and the vaporized hydrogen peroxide moves on the surface of the object to sterilize the stored object.
Also, the sterilization chamber 10 is evacuated by opening the vaporization valve 40, and then the vaporization valve 40 is closed and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30, and then a predetermined time has passed. Further, when the pressure in the sterilization chamber 10 decreases to reach a predetermined degree of vacuum, the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened. Thereafter, when a predetermined time elapses, the atmosphere release valve 22 is opened, and then Since the vaporization valve 40 is opened when the sterilization chamber 10 reaches a predetermined degree of vacuum, hydrogen peroxide is vaporized in the vaporization chamber 30 in a vacuum, and the hydrogen peroxide sufficiently vaporized in a predetermined time is vaporized valve. 40 enters the sterilization chamber 10 that has reached a predetermined degree of vacuum after passing through 40, the atmosphere is introduced into the sterilization chamber 10, the vaporized hydrogen peroxide moves on the surface of the object, and the stored object can be sterilized. The chamber 30 maintains a predetermined degree of vacuum.
Also, the sterilization chamber 10 is evacuated by opening the vaporization valve 40, and then the vaporization valve 40 is closed and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30, and then a predetermined time has passed. Further, when the pressure in the sterilization chamber 10 decreases to reach a predetermined degree of vacuum, the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened. Thereafter, when a predetermined time elapses, the atmosphere release valve 22 is opened, and then When the sterilization chamber 10 reaches a predetermined degree of vacuum, the vaporization valve 40 is opened, and then the introduction of the atmosphere is stopped and the sterilization chamber 10 is evacuated. Thereafter, the same procedure is repeated. The hydrogen peroxide vaporized in the vaporization chamber 30 and then vaporized in a predetermined time passes through the vaporization valve 40 and enters the sterilization chamber 10 that has reached a predetermined vacuum degree, and the atmosphere is introduced into the sterilization chamber 10 and vaporized. Hydrogen peroxide moves on the surface of the object The degree of sterilization is increased, since the vaporizing chamber 30 repeats the operation of evacuating the sterilization chamber 10 to maintain a predetermined degree of vacuum, can be sterilized repeatedly stored physical object.
Also, the sterilization chamber 10 is evacuated by opening the vaporization valve 40, and then the vaporization valve 40 is closed and liquid hydrogen peroxide or a hydrogen peroxide solution is supplied to the vaporization chamber 30, and then a predetermined time has passed. Further, when the pressure in the sterilization chamber 10 decreases to reach a predetermined degree of vacuum, the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened. Thereafter, when a predetermined time elapses, the atmosphere release valve 22 is opened, and then When the sterilization chamber 10 reaches a predetermined degree of vacuum, the vaporization valve 40 is opened, and then the introduction of the atmosphere is stopped and the sterilization chamber 10 is evacuated. Thereafter, the pressure in the sterilization chamber 10 decreases and does not reach the predetermined degree of vacuum. Sometimes the atmosphere release valve 22 is temporarily opened and closed, and the same operation is repeated thereafter, so that hydrogen peroxide is vaporized in the vaporization chamber 30 in a vacuum, and the hydrogen peroxide vaporized in a predetermined time is vaporized. A predetermined vacuum passing through the valve 40 The sterilization chamber 10 is reached, the atmosphere is introduced into the sterilization chamber 10, the vaporized hydrogen peroxide moves on the surface of the object, the degree of sterilization increases, and the vaporization chamber 30 maintains a predetermined degree of vacuum. Since the operation of evacuating the sterilization chamber 10 is repeated, a desired degree of vacuum can be achieved even in the second and subsequent evacuation, and the stored object can be sterilized repeatedly.
In addition, when the storage chamber 51 can store liquid hydrogen peroxide or hydrogen peroxide solution and the sterilization chamber 10 is evacuated in order to supply the liquid hydrogen peroxide or hydrogen peroxide solution to the vaporization chamber 30. In addition, the conduction between the lower end of the weighing chamber 52 and the vaporization chamber 30 is stopped, the conduction between the intermediate portion of the weighing chamber 52 and the sterilization chamber 10 is stopped, and the conduction between the top of the weighing chamber 52 and the storage chamber 51 is allowed. Thus, the conduction between the top of the measuring chamber 52 and the storage chamber 51 is stopped, the conduction between the lower end of the measuring chamber 52 and the vaporizing chamber 30 is stopped, and the intermediate portion of the measuring chamber 52 and the sterilization chamber 10 are allowed to be connected. An appropriate amount of liquid remains in the lower portion of the measuring chamber 52, and then the conduction between the top of the measuring chamber 52 and the storage chamber 51 is stopped, and the middle portion of the measuring chamber 52 and the sterilization chamber 10 are stopped. Is allowed to remain in the lower part of the weighing chamber 52. Hydrogen peroxide or hydrogen peroxide solution an appropriate amount of liquid can be supplied to the vaporization chamber 30.
Further, the vaporization valve 40 communicates with the sterilization chamber 10 and the vaporization chamber 30 in which an object can be stored, the sterilization chamber 10 is evacuated, the vaporization valve 40 is closed, and the liquid hydrogen peroxide or the hydrogen peroxide solution is vaporized. Then, when a predetermined time has elapsed, the evacuation of the sterilization chamber 10 is stopped and the vaporization valve 40 is opened. After that, when the predetermined period has elapsed, the air release valve 22 is opened, and then the sterilization chamber 10 is opened. Since the air release valve 22 was temporarily opened and closed when the predetermined vacuum degree of the sterilization chamber 10 was not reached after that, the hydrogen peroxide was vaporized in the vaporization chamber 30 in a vacuum, The hydrogen peroxide vaporized in a predetermined time passes through the vaporization valve 40 and enters the sterilization chamber 10 which has reached a predetermined vacuum degree. The atmosphere is introduced into the sterilization chamber 10, and the vaporized hydrogen peroxide reaches the surface of the object. Can move and sterilize the object, vaporization chamber 30 is predetermined Since the sterilization chamber 10 is evacuated to maintain the degree of vacuum, the desired degree of vacuum can be achieved in vacuum for the second time or later.
In addition, when the storage chamber 51 can store liquid hydrogen peroxide or hydrogen peroxide solution and the sterilization chamber 10 is evacuated in order to supply the liquid hydrogen peroxide or hydrogen peroxide solution to the vaporization chamber 30. In addition, the conduction between the lower end of the weighing chamber 52 and the vaporization chamber 30 is stopped, the conduction between the intermediate portion of the weighing chamber 52 and the sterilization chamber 10 is stopped, and the conduction between the top of the weighing chamber 52 and the storage chamber 51 is allowed. Thus, the conduction between the top of the measuring chamber 52 and the storage chamber 51 is stopped, the conduction between the lower end of the measuring chamber 52 and the vaporizing chamber 30 is stopped, and the intermediate portion of the measuring chamber 52 and the sterilization chamber 10 are allowed to be connected. An appropriate amount of liquid remains in the lower portion of the measuring chamber 52, and then the conduction between the top of the measuring chamber 52 and the storage chamber 51 is stopped, and the middle portion of the measuring chamber 52 and the sterilization chamber 10 are stopped. Is allowed to remain in the lower part of the weighing chamber 52. Hydrogen peroxide or hydrogen peroxide solution an appropriate amount of liquid can be supplied to the vaporization chamber 30.

  The present invention is not limited to the embodiments described above, and various modifications can be made without departing from the scope of the invention.

H Liquid hydrogen peroxide or hydrogen peroxide solution 10 Sterilization chamber 11 Sterilization chamber body 12 Sterilization chamber lid structure 20 Vacuum device 21 Vacuum pump 22 Air release valve 30 Vaporization chamber 40 Vaporization valve 50 Hydrogen peroxide supply device 51 Storage chamber 52 Metering Chamber 53 First supply valve 54 Second supply valve 55 Third supply valve 56 Supply valve S10 Vacuum vaporization step S11 Vacuum step S12 Vaporization step S20 Hydrogen peroxide introduction step S30 Supply step S40 Vaporization valve closing step S50 Vacuum resumption step S60 Air supply process

JP-A-8-38583 JP 2006-233216 A JP 2008-133304 A

Claims (6)

A sterilizer capable of sterilizing an object,
A sterilization chamber that is a vacuum chamber capable of storing objects ;
Vacuum equipment capable of evacuating the sterilization chamber ;
A vaporizing chamber that forms a vaporizing space of a predetermined volume;
A vaporization valve that opens and allows the conduction between the vaporization chamber and the sterilization chamber and closes to stop the conduction between the vaporization chamber and the sterilization chamber;
A hydrogen peroxide supply device capable of supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber;
With
A vacuum pump that can evacuate the vacuum device from the sterilization chamber, and an open air valve that opens and allows the sterilization chamber and the atmosphere to be closed and shuts off the sterilization chamber and the atmosphere, and
The vaporization valve is opened and a vacuum process is performed in which the sterilization chamber and the vaporization chamber are evacuated by the vacuum device. After the vacuum process is performed, the vaporization valve is closed and liquid is supplied by the hydrogen peroxide supply device. of hydrogen peroxide or hydrogen peroxide solution was carried vaporization step of supplying to the vaporizing chamber, the vaporizing time is a predetermined time vaporization step after implementation has elapsed, further, the pressure of the sterilization chamber is lowered When a predetermined degree of vacuum is reached, a hydrogen peroxide introduction step is performed to stop evacuation of the sterilization chamber by the vacuum device and open the vaporization valve, and a predetermined amount after the hydrogen peroxide introduction step is performed. When the time elapses, an air supply step for opening the atmosphere release valve is performed, and after the air supply step is performed, the vaporization valve is closed when the pressure in the sterilization chamber increases to reach a predetermined degree of vacuum. Implementation of the closing process ,
The vaporization time is sufficient for the hydrogen peroxide supplied in the vaporization chamber to vaporize;
Hydrogen peroxide or hydrogen peroxide solutions of the liquid is vaporized in sufficient time to vaporize within the vaporization chamber of the vacuum atmosphere is closed the vaporizing valve, over-the accumulated gas state inside of the vaporizing chamber a hydrogen oxidation you sterilizing said through vaporization valve flows into the sterilization chamber of a vacuum atmosphere to stop the evacuation from the vaporizing chamber into contact with the object placed inside the sterilization chamber object A sterilizer characterized by. A sterilizer capable of sterilizing an object,
A sterilization chamber that is a vacuum chamber capable of storing objects ;
Vacuum equipment capable of evacuating the sterilization chamber ;
A vaporizing chamber that forms a vaporizing space of a predetermined volume;
A vaporization valve that opens and allows the conduction between the vaporization chamber and the sterilization chamber and closes to stop the conduction between the vaporization chamber and the sterilization chamber;
A hydrogen peroxide supply device capable of supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber;
With
A vacuum pump that can evacuate the vacuum device from the sterilization chamber, and an open air valve that opens and allows the sterilization chamber and the atmosphere to be closed and shuts off the sterilization chamber and the atmosphere, and
When the vaporization valve is opened and a vacuum process is performed in which the sterilization chamber and the vaporization chamber are evacuated by the vacuum device, and after the vacuum process is performed, the pressure in the sterilization chamber decreases and reaches a predetermined vacuum level The vaporization valve is closed and a vaporization step of supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber is performed by the hydrogen peroxide supply device, and a predetermined time after the vaporization step is performed. vaporization time passes further, when the pressure of the sterilization chamber reaches a predetermined degree of vacuum down, the hydrogen peroxide introducing step of opening said vaporization valve to stop the evacuation of the sterilization chamber by the vacuum device When a predetermined time has elapsed after performing the hydrogen peroxide introduction step, an air supply step for opening the atmosphere release valve is performed, and after performing the air supply step, the pressure in the sterilization chamber increases. To a certain degree of vacuum Performing a vaporization valve closing step for closing the vaporization valve when performing the operation, closing the atmospheric release valve after performing the vaporization valve closing step, and operating the vacuum pump to evacuate the sterilization chamber. Carried out
The vaporization time is sufficient for the hydrogen peroxide supplied in the vaporization chamber to vaporize;
Hydrogen peroxide or hydrogen peroxide solutions of the liquid is vaporized in sufficient time to vaporize within the vaporization chamber of the vacuum atmosphere is closed the vaporizing valve, over-the accumulated gas state inside of the vaporizing chamber a hydrogen oxidation you sterilizing said through vaporization valve flows into the sterilization chamber of a vacuum atmosphere to stop the evacuation from the vaporizing chamber into contact with the object placed inside the sterilization chamber object A sterilizer characterized by. A sterilizer capable of sterilizing an object,
A sterilization chamber that is a vacuum chamber capable of storing objects ;
Vacuum equipment capable of evacuating the sterilization chamber ;
A vaporizing chamber that forms a vaporizing space of a predetermined volume;
A vaporization valve that opens and allows the conduction between the vaporization chamber and the sterilization chamber and closes to stop the conduction between the vaporization chamber and the sterilization chamber;
A hydrogen peroxide supply device capable of supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber;
With
A vacuum pump that can evacuate the sterilization chamber from the sterilization chamber and an atmosphere release valve that opens and closes the sterilization chamber and the atmosphere and closes the sterilization chamber and the atmosphere;
When the vaporization valve is opened and a vacuum process is performed in which the sterilization chamber and the vaporization chamber are evacuated by the vacuum device, and after the vacuum process is performed, the pressure in the sterilization chamber decreases and reaches a predetermined vacuum level The vaporization valve is closed and a vaporization step of supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber is performed by the hydrogen peroxide supply device, and a predetermined time after the vaporization step is performed. vaporization time passes further, when the pressure of the sterilization chamber reaches a predetermined degree of vacuum down, the hydrogen peroxide introducing step of opening said vaporization valve to stop the evacuation of the sterilization chamber by the vacuum device When a predetermined time has elapsed after performing the hydrogen peroxide introduction step, an air supply step for opening the atmosphere release valve is performed, and after performing the air supply step, the pressure in the sterilization chamber is increased to increase the predetermined time. Reach the degree of vacuum A vacuum resuming step of performing a vaporization valve closing step for closing the vaporization valve, and after performing the vaporization valve closing step, evacuating the sterilization chamber by closing the atmosphere release valve and operating the vacuum pump And a temporary air supply step of temporarily opening and closing the atmosphere release valve while operating the vacuum pump when the pressure in the sterilization chamber decreases and does not reach a predetermined degree of vacuum after the vacuum resumption step is performed. Carried out
Sterilizer hydrogen peroxide to the vaporizing time is fed in the vaporizing chamber is equal to or has enough time der to vaporize. A sterilization method capable of sterilizing an object,
A sterilization chamber is a vacuum chamber for accommodating an object, a vaporizing chamber for forming a vaporizing space of a predetermined volume, open the vaporizing chamber and the sterilization chamber allows conduction between closed the vaporizing chamber and the sterilization chamber vacuum apparatus having a vaporization valve stop conduction, the atmosphere release valve is closed allowing conduction between the sterilization chamber and the atmosphere and open vacuum pump stops conduction between the sterilization chamber and the atmosphere can be evacuated from the sterilization chamber with a preparation step of preparing a, and,
A vacuum vaporization step of evacuating the sterilization chamber and the vaporization chamber and closing the vaporization valve to supply liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber;
Hydrogen peroxide introduction step of stopping evacuation of the sterilization chamber and opening the vaporization valve,
An air supply step of opening the atmosphere release valve;
A vaporization valve closing step for closing the vaporization valve;
With
The vacuum vaporization step is a vacuum step of opening the vaporization valve to evacuate the sterilization chamber ; a vaporization step of closing the vaporization valve and supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber ; Have
Performing the vacuum process, the vacuum step was performed the vaporizing step after implementation, the vaporizing time is a predetermined time vaporization step after implementation has elapsed, further, the pressure of the sterilization chamber is lowered When the predetermined degree of vacuum is reached, the hydrogen peroxide introduction step is performed, and after a predetermined time has elapsed after the hydrogen peroxide introduction step, the air supply step is performed, and the air supply step is performed. When the pressure in the sterilization chamber is increased and a predetermined vacuum level is reached after performing the vaporization valve closing step,
The vaporization time is sufficient for the hydrogen peroxide supplied in the vaporization chamber to vaporize;
Hydrogen peroxide or hydrogen peroxide solutions of the liquid is vaporized in sufficient time to vaporize within the vaporization chamber of the vacuum atmosphere is closed the vaporizing valve, over-the accumulated gas state inside of the vaporizing chamber a hydrogen oxidation you sterilizing said through vaporization valve flows into the sterilization chamber of a vacuum atmosphere to stop the evacuation from the vaporizing chamber into contact with the object placed inside the sterilization chamber object A sterilization method characterized by the above. A sterilization method capable of sterilizing an object,
A sterilization chamber is a vacuum chamber for accommodating an object, a vaporizing chamber for forming a vaporizing space of a predetermined volume, open the vaporizing chamber and the sterilization chamber allows conduction between closed the vaporizing chamber and the sterilization chamber vacuum apparatus having a vaporization valve stop conduction, the atmosphere release valve is closed allowing conduction between the sterilization chamber and the atmosphere and open vacuum pump stops conduction between the sterilization chamber and the atmosphere can be evacuated from the sterilization chamber with a preparation step of preparing a, and,
A vacuum vaporization step of evacuating the sterilization chamber and the vaporization chamber and closing the vaporization valve to supply liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber;
Hydrogen peroxide introduction step of stopping evacuation of the sterilization chamber and opening the vaporization valve,
An air supply step of opening the atmosphere release valve;
A vaporization valve closing step for closing the vaporization valve;
A vacuum resuming step of closing the atmosphere release valve and operating the vacuum pump to evacuate the sterilization chamber;
With
The vacuum vaporization step is a vacuum step of opening the vaporization valve to evacuate the sterilization chamber ; a vaporization step of closing the vaporization valve and supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber ; Have
The vacuum process is performed, and after the vacuum process is performed, the vaporization process is performed when the pressure in the sterilization chamber drops and reaches a predetermined degree of vacuum, and a predetermined time after the vaporization process is performed. vaporization time passes further, when the pressure of the sterilization chamber reaches a predetermined degree of vacuum down to implement the hydrogen peroxide introducing step, a predetermined time after performing the hydrogen peroxide introducing step When the elapse of time, the air supply step is performed, and after the air supply step is performed, the vaporization valve closing step is performed when the pressure in the sterilization chamber increases and a predetermined vacuum level is reached, and the vaporization valve closing step is performed. After performing the vacuum resuming step,
The vaporization time is sufficient for the hydrogen peroxide supplied in the vaporization chamber to vaporize;
Hydrogen peroxide or hydrogen peroxide solutions of the liquid is vaporized in sufficient time to vaporize within the vaporization chamber of the vacuum atmosphere is closed the vaporizing valve, over-the accumulated gas state inside of the vaporizing chamber a hydrogen oxidation you sterilizing said through vaporization valve flows into the sterilization chamber of a vacuum atmosphere to stop the evacuation from the vaporizing chamber into contact with the object placed inside the sterilization chamber object A sterilization method characterized by the above. A sterilization method capable of sterilizing an object,
A sterilization chamber is a vacuum chamber for accommodating an object, a vaporizing chamber for forming a vaporizing space of a predetermined volume, open the vaporizing chamber and the sterilization chamber allows conduction between closed the vaporizing chamber and the sterilization chamber vacuum apparatus having a vaporization valve stop conduction, the atmosphere release valve is closed allowing conduction between the sterilization chamber and the atmosphere and open vacuum pump stops conduction between the sterilization chamber and the atmosphere can be evacuated from the sterilization chamber with a preparation step of preparing a, and,
A vacuum vaporization step of evacuating the sterilization chamber and the vaporization chamber and closing the vaporization valve to supply liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber;
Hydrogen peroxide introduction step of stopping evacuation of the sterilization chamber and opening the vaporization valve,
An air supply step of opening the atmosphere release valve;
A vaporization valve closing step for closing the vaporization valve;
A vacuum resuming step of closing the atmosphere release valve and operating the vacuum pump to evacuate the sterilization chamber;
A temporary air supply step of temporarily opening and closing the atmosphere release valve while operating the vacuum pump;
With
The vacuum vaporization step is a vacuum step of opening the vaporization valve to evacuate the sterilization chamber ; a vaporization step of closing the vaporization valve and supplying liquid hydrogen peroxide or a hydrogen peroxide solution to the vaporization chamber ; Have
The vacuum process is performed, and after the vacuum process is performed, the vaporization process is performed when the pressure in the sterilization chamber decreases and reaches a predetermined degree of vacuum, and the predetermined time is after the vaporization process is performed. vaporization time passes further, when the pressure of the sterilization chamber reaches a predetermined degree of vacuum down to implement the hydrogen peroxide introducing step, a predetermined time after performing the hydrogen peroxide introducing step When the elapse of time, the air supply process is performed, and after the air supply process is performed, the vaporization valve closing process is performed when the pressure in the sterilization chamber increases to reach a predetermined vacuum level, After performing the vacuum resuming step, after performing the vacuum resuming step, when the pressure of the sterilization chamber falls and does not reach a predetermined vacuum level, the temporary air supply step is performed,
Method of sterilization hydrogen peroxide the vaporizing time is fed in the vaporizing chamber is equal to or has enough time der to vaporize.

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