JP6026882B2 - Heating device - Google Patents

Description

  The present invention relates to a heating apparatus used for heat treatment such as degreasing, calcination and firing of ceramics.

  In recent years, the demands on the characteristics of ceramic parts used in electronic devices and automobiles have become stricter. In particular, the uniformity of the characteristics of each product when the same product is mass-produced (many) is strongly demanded. It has become to. In order to improve the uniformity of the characteristics of ceramic parts, it is necessary to stabilize and equalize the processing conditions of each manufacturing process, and high-precision control of temperature, atmosphere, and the like is also required in heat treatment apparatuses.

  In the heat treatment process in the production of ceramic parts, when a small variety is produced in large quantities, a continuous furnace that normally passes the object to be heat-treated on a base plate or a conveyor belt and passes through a tunnel-like furnace body Is used. However, in recent years, various ceramic parts with various characteristics are required, and since the production form has a strong tendency to produce a variety of products in small quantities, a batch furnace in which the heat treatment conditions can be easily changed is used as a heat treatment apparatus. Opportunities are also increasing.

  A conventional general batch-type heating device used for firing ceramic parts, for example, described in Patent Document 1 below, is a heat insulating member that surrounds a heat treatment region in which a ceramic generation form as a workpiece is disposed. And a heating unit (heater) disposed at a predetermined part in the heat treatment region surrounded by the heat insulating member, and measures the temperature in the heat treatment region surrounded by the heat insulating member. A sensor and a control means for adjusting the output of the heat generating means based on the measured value of the temperature sensor are provided. The heat insulating member acts to suppress the transfer of thermal energy from the inner surface to the outer surface on the side surrounding the heat treatment region, and keep the temperature in the heat treatment region high. In a conventional general batch furnace, the temperature at a predetermined position in the heat treatment region is measured by a temperature sensor in the heat treatment region, and the control means generates heat generated in the heat treatment region according to the measured temperature at the predetermined position. The output of the means is adjusted to control the temperature distribution in the heat treatment region to be in an appropriate state.

JP 2005-77001 A

  In conventional batch furnaces, heat treatment is performed by adjusting the amount of heat supplied by the heating means disposed in the heat treatment region based on the temperature measurement value by the temperature sensor disposed at a predetermined position in the heat treatment region. The temperature in the area was controlled. However, only by performing such control, if the heating device is used for a long time, the temperature of a specific part in the heat treatment region becomes high, and conversely the temperature becomes low in other parts, There has been a problem that the temperature distribution in the heat treatment region becomes large. This variation in temperature distribution is caused by a plurality of factors such as a change in the characteristics of the heat insulating member surrounding the heat treatment region, a change in heat generation characteristics such as a change in the resistance value of the heater, and a change in the environmental temperature.

An example of temperature distribution variation due to a change in the characteristics of the heat insulating member surrounding the heat treatment region will be described. The heat generating means warms the air in the heat treatment region by heat transfer, and the temperature of the inner surface of the heat insulation member also rises by heat transfer from the air in the heat treatment region that has become high temperature to the heat insulation member. Moreover, the temperature of the inner surface of the heat insulating member also rises when radiant heat from the heat generating means reaches the inner surface of the heat insulating member. That is, the heat generating means raises the temperature of the inner surface of the heat insulating member in addition to the temperature of the air and various members in the heat treatment region.

  In the heat insulating member, the temperature is hardly transmitted from the inner surface to the outer surface of the heat insulating member, and the temperature of the inner surface of the heat insulating member is kept relatively high. That is, in the heat insulating member, heat energy is hardly transmitted from the inner surface surrounding the heat treatment region to the outer surface, and the heat energy transmitted to the heat insulating member remains on the inner surface side surrounding the heat treatment region. For example, when a relatively low temperature portion of the air in the heat treatment region contacts the inner surface of the heat insulating member, the inner surface of the heat insulating member maintained at a relatively high temperature warms the air in the heat treatment region. Thus, a part of the heat energy stored on the inner surface of the heat insulating member is transmitted again into the heat treatment region. As described above, the heat energy transmitted in the heat treatment region includes the heat energy directly transmitted from the heat generating means to the heat treatment region, and the heat energy transmitted from the heat generating means to the heat insulating member and then transmitted in the heat treatment region (transmitted through the heat insulating member). Thermal energy).

  By the way, when heat processing is repeatedly performed over a long period of time, the heat insulating properties of the heat insulating member deteriorate. When the heat insulation characteristics deteriorate, the heat energy easily moves from the inner surface to the outer surface of the heat insulating member, and the heat energy supplied from the heat generating means finally easily escapes from the outer surface of the heat insulating member to the outside of the heat treatment region.

  In this case, since the heat energy transmitted through the heat insulating member is reduced in particular, even if the heat generating means is heated under the same conditions as those in the case where the heat insulating characteristics of the heat insulating member are not deteriorated, the sum of the heat energy transmitted in the heat treatment region. Becomes smaller than the case where the heat insulating property is not deteriorated. In this case, when the heat generating means is controlled under the same conditions as when the heat insulating properties are not deteriorated and the heat energy is supplied into the heat treatment region, the heat energy transmitted through the heat insulating member is reduced by the heat generating means in the heat treatment region. As a result, the balance between the heat energy directly transmitted from the heat generating means to the heat treatment region and the heat energy transmitted through the heat insulating member is lost, and the temperature in the vicinity of the heat insulating member is less than the case where the heat insulating characteristics are not deteriorated. In some cases, the temperature distribution in the heat treatment region may change from the beginning of use, such as a decrease. The present invention has been made to solve such problems.

The present invention is a heating apparatus for heat-treating an object to be processed, the heat-insulating member having an inner surface surrounding the heat-treatment region in which the object to be processed is disposed and an outer surface opposite to the inner surface, and the heat-treatment region. The first heat generating means for heating the object to be processed and the heat insulating member are heated from the outer surface side, and disposed in a region opposite to the heat treatment region with the heat insulating member interposed therebetween. and second heating means, a first temperature sensor for measuring the temperature of the first temperature sensing part set in the heat treatment area, wherein the internal insulating member, the insulating member than the first temperature sensor A second temperature sensor for measuring a temperature of a second temperature measuring portion set at a position close to the outer surface of the heat insulating member or the outer surface of the heat insulating member, and the first temperature measuring portion measured by the first temperature sensor And the second temperature sensor Therefore, to adjust the amount of heat transmitted to the heat treatment region via the heat insulating member by adjusting at least the amount of heat generated by the second heat generating means based on the measured temperature of the second temperature measuring portion. And a control device.

  The present invention adjusts the degree of heat generation of the heat generating means arranged on the outside of the heat insulating member based on the temperature information on the inner surface side and the outer surface side of the heat insulating member measured by a plurality of temperature sensors, thereby insulating the heat insulating member. Since the temperature change in the heat treatment region that occurs as the characteristics deteriorate can be corrected, the temperature distribution in the heat treatment region can be reduced even if the characteristics of the heat insulating member change.

It is an upper section of one embodiment of the heating device of the present invention. It is side sectional drawing of one Embodiment of the heating apparatus of this invention. It is a schematic sectional side view explaining the structure of a 1st heat generating means, a 2nd heat generating means, and a 3rd heat generating means with which one Embodiment of the heating apparatus of this invention is provided. It is a schematic sectional side view explaining the structure of a 1st temperature sensor, a 2nd temperature sensor, and a 3rd temperature sensor with which one Embodiment of the heating apparatus of this invention is provided. (A) And (b) is the schematic explaining the fluctuation | variation of the temperature information t1 and t2 which are acquired in the heating apparatus shown in FIG. (A)-(c) is a schematic sectional drawing for demonstrating the magnitude | size of the thermal energy transmitted to the temperature-measurement part T1 and T2 with the deterioration of the heat insulation performance of a heat insulation member.

  FIG. 1 and FIG. 2 are diagrams for explaining an embodiment of the heating device of the present invention. FIG. 1 is a top sectional view of the heating device 10, and FIG. 2 is a side sectional view of the heating device 10. In FIG. 1, illustration of the control means 28 described later is omitted.

  The heating device 10 is a device for heat-treating the workpiece 1 and has a heat insulating member 12 having an inner surface 12A surrounding a heat treatment region A where the workpiece 1 is disposed and an outer surface 12B opposite to the inner surface 12A. The first heat generating means 14 for heating the workpiece 1 and the heat insulating member 12 which are disposed in the heat treatment region A and the heat insulating member 12 are heated from the side of the outer surface 12B. The second heat generating means 16 arranged in the area of the first heat-sensing portion and the first temperature measuring portion set inside the heat treatment area A or inside the heat insulating member 12 (in the embodiment shown in FIGS. 1 and 2, inside the heat treatment area A). A first temperature sensor 22 for measuring the temperature of T1, and a position closer to the outer surface 12B of the heat insulating member 12 than the first temperature sensor 22 inside the heat insulating member 12, or the outer surface 12B of the heat insulating member 12 (FIG. 1). And shown in Figure 2 In the embodiment, the second temperature sensor 24 for measuring the temperature of the second temperature measuring portion T2 set in the heat insulating member 12) and the temperature of the first temperature measuring portion T1 measured by the first temperature sensor 22 are used. Based on t1 and the temperature t2 of the second temperature measuring portion measured by the second temperature sensor 24, the amount of heat generated by the second heat generating means 16 is adjusted at least to be transmitted to the heat treatment region A via the heat insulating member 12. Control means 28 for adjusting the amount of heat.

  In the heating apparatus 10, the control means 28 is based on the temperature of the first temperature measuring portion T 1 measured by the first temperature sensor 22 and the temperature of the second temperature measuring portion T 2 measured by the second temperature sensor 24. The temperature of the heat treatment area A is adjusted by adjusting the amount of heat generated by the first heating means 14.

  Further, the heating device 10 has a third temperature sensor 26 for measuring the temperature of the third temperature measuring portion T3 set at a position farther from the heat insulating member 12 than the first temperature measuring portion T1 inside the heat treatment region A. And a third heat generating means 18 set in a position farther from the heat insulating member 12 than the first heat generating means 14 inside the heat treatment region A. The control means 28 also adjusts at least the amount of heat generated by the third heat generating means 18 based on the temperature of the third temperature measuring portion T3 measured by the third temperature sensor 26.

The heat insulating member 12 is a cylindrical member, and is made of, for example, a ceramic fiber material whose main component is a known alumina fiber. A disk-shaped lid member 32 is disposed in the upper opening of the heat insulating member 12. The lid member 32 is also made of a ceramic fiber material mainly composed of alumina fibers, like the heat insulating member 12. The lid member 32 is provided with a plurality of through holes. The third heat generating means 18, the third temperature sensor 26, and the plurality of second heat generating means 14 are inserted into the through holes, and these members are the lid member 32. It is fixed to. A ring-shaped bottom plate member 34 provided with a circular opening 34 a is attached to the lower opening of the heat insulating member 12. A placement body 36 having a flat upper surface is disposed in the opening 34a. The mounting body 36 is disposed on a driving stage 38 that can be horizontally rotated in a direction indicated by an arrow R in FIG. 1 and moved up and down in a direction indicated by an arrow V in FIG. 2 by driving means such as a motor (not shown). . Driving means such as a motor (not shown) for driving the driving stage 38 is connected to the control means 28, and the control means 28 controls the horizontal rotation in the direction indicated by the arrow R and the vertical movement operation indicated by the arrow V.

  The workpiece 1 is, for example, a ceramic production form. In the embodiment shown in FIG. 1 and FIG. 2, an assembly 13 formed by stacking a plurality of mounting bodies 11 on which a plurality of workpieces 1 are mounted is in a heat treatment region A surrounded by a heat insulating member 12. Several are arranged. More specifically, the base member 39 is disposed on the upper surface of the mounting body 36, and the plurality of assemblies 13 are disposed on the upper surface of the base member 39.

  FIG. 3 is a schematic sectional side view for explaining the configuration of the first heat generating means 14, the second heat generating means 16 and the third heat generating means 18. The first heat generating means 14, the second heat generating means 16 and the third heat generating means 18 all have the same configuration, and FIG. 3 shows only the first heat generating means 14 as a representative. The first heat generating means 14 is a U-shaped resistance heater that generates heat when a current flows. The first heating means 14 is U-shaped, which electrically connects two rod-shaped resistance heaters 14a and the two resistance heaters 14a at their lower ends (lower ends in FIGS. 2 and 3). And an electrode member 14b curved into a mold.

  The upper end portions of the two resistance heaters 14 a are inserted into through holes provided in the lid member 32 and fixed to the lid member 32. Of the two resistance heaters 14a, the upper end of one resistance heater 14a is connected to the positive electrode, and the upper end of the other resistance heater 14a is connected to the negative electrode. Two current heaters 14a generate heat when current flows through both of these electrodes to both resistance heaters 14a.

  A plurality of first heat generating means 14 are arranged at equal intervals along the inner surface 12A of the cylindrical heat insulating member 12. The second heat generating means 16 is a member for heating the heat insulating member 12 from the outer surface 12B side, and a plurality of second heat generating means 16 are arranged along the outer surface 12B of the cylindrical heat insulating member 12 at equal intervals.

  In the heating device 10, the outer heat insulating member 48 is also disposed outside the heat insulating member 12. A plurality of second heat generating means 16 are arranged in a region surrounded by the heat insulating member 12 and the outer heat insulating member 48. Thus, by providing the outer heat insulating member 48 and arranging the second heat generating means 16 in a region surrounded by the heat insulating member 12 and the outer heat insulating member 48, the heat retaining property of the second heat generating means 16 is improved, and the heat insulating member 12. The electric power required when heating from the outer surface 12B side can be made relatively low.

  The third heat generating means 18 is an auxiliary heater for heating the workpiece 1 and averaging the temperature distribution in the heat treatment region A, and is disposed in the vicinity of the central portion in the heat treatment region A surrounded by the heat insulating member 12. Has been.

  The first heat generating means 14, the second heat generating means 16 and the third heat generating means 18 are connected to the control means 28. More specifically, the first heat generating means 14, the second heat generating means 16, and the third heat generating means 18 are connected to a current supply mechanism (not shown) provided in the control means 28, and current is supplied from the control means 28. Each heating means generates heat. The control means 28 is configured to be able to adjust the magnitude of the current supplied to each of the first heat generating means 14, the second heat generating means 16, and the third heat generating means 18.

  The first temperature sensor 22, the second temperature sensor 24, and the third temperature sensor 26 are each known thermocouple type temperature sensors. FIG. 4 is a schematic sectional side view for explaining the configuration of the first temperature sensor 22, the second temperature sensor 24, and the third temperature sensor 26. The first temperature sensor 22, the second temperature sensor 24, and the third temperature sensor 26 have the same configuration, and only the first temperature sensor 22 is shown as a representative in FIG. In the first temperature sensor 22, a thermocouple wire 44 is inserted into a ceramic protective tube 42 provided with an opening 42 a at a part of the tip, and a temperature measuring unit 46 at the tip is exposed from the opening 42 a of the protection tube 42. doing. The first temperature sensor 22 can measure the temperature of the part corresponding to the temperature measuring unit 46.

  In the heating apparatus 10, the first temperature sensor 22 is arranged so that the temperature measuring unit 46 is positioned in the first temperature measuring portion T <b> 1 set inside the heat treatment region A or inside the heat insulating member 12. Similarly, in the heating device 10, a temperature measuring unit (not shown) of the second temperature sensor 24 is located in the second temperature measuring part T2, and a temperature measuring unit (not shown) of the third temperature sensor 26 is located in the third temperature measuring part T3. Each temperature sensor is arranged.

  In the heating device 10, the second temperature measuring portion T2 is set inside the heat insulating member 12, and the second temperature sensor 24 is arranged inside the heat insulating member 12 to measure the temperature of the second temperature measuring portion T2. In the heating apparatus 10, the first temperature measuring portion T1 is set in the vicinity of the inner surface 12A of the heat insulating member 12 inside the heat treatment A, and the first temperature sensor 22 measures the temperature of the first portion T1. Specifically, the second temperature sensor 24 is inserted from the end face 12C on the upper side (the upper side in FIG. 2) of the heat insulating member 12. The first temperature measurement portion T1 and the second temperature measurement portion T2 are set at the central portion of the length of the heat insulating member 12 along the vertical direction in FIG. 2, and the first temperature measurement portion T1 and the second temperature measurement portion T2 are set. A temperature measuring unit 46 of the first temperature sensor 22 and a temperature measuring unit (not shown in FIG. 2) of the second temperature sensor 24 are located at positions corresponding to the temperature portion T2. The third temperature sensor 26 is disposed in the vicinity of the central portion in the heat treatment region A surrounded by the heat insulating member 12.

  As described above, in the heating device 10, a plurality of the first heat generating means 14 and the second heat generating means 16 are arranged along the inner surface 12 </ b> A of the cylindrical heat insulating member 12. By disposing a plurality of the first heat generating means 14 and the second heat generating means 16 along the inner surface 12A of the heat insulating member 12 in this manner, partial temperature variations in the heat treatment region A (more specifically, the heat insulating member 12 Variation in the direction along the inner surface 12A). In the heating device 10, as described above, the mounting body 36 on which the workpiece 1 is mounted is rotated horizontally in the direction indicated by the arrow R in FIG. 1 and the arrow in FIG. It is disposed on a drive stage 38 that can move up and down in the direction indicated by V. During the heating of the workpiece 1, the drive stage 38 is continuously moved in the direction indicated by the arrow R in FIG. 1 or in the direction indicated by the arrow V in FIG. Can be suppressed.

  The control means 28 is connected to each of the first temperature sensor 22, the second temperature sensor 24, and the third temperature sensor 26, and the output value from each temperature sensor, that is, the current temperature information t1 of the first portion T1, the first The current temperature information t2 of the second part T2 and the current temperature information t3 of the third part T3 are acquired.

  In the present embodiment, two first temperature sensors 22 and two second temperature sensors 24 are arranged. In the present embodiment, the current temperature information t1 of the first portion T1 acquired by the control means 28 means an average value of the respective temperature information acquired in the two first portions T1, and similarly, the control means The current temperature information t2 of the second part T2 acquired by 28 is an average value of the temperature information acquired in the two second parts T2.

The heating device 10 is entirely surrounded by a metal casing 52 having a bottom plate provided with an opening in which the drive stage 38 is disposed. The metal housing 52 is provided with an air supply / exhaust port (not shown), and a gas such as nitrogen or argon can be supplied into the housing 52 from the air supply / exhaust port. In addition, for example, the lid member 32 or the like is provided with an air supply / exhaust port and an air supply / exhaust valve (not shown) so that the atmosphere of the heat treatment region A can be adjusted.

  Next, the heat treatment operation in the heating apparatus 10 will be described by taking as an example the case of sintering a ceramic generating shape as the workpiece 1.

  First, a predetermined type of gas is supplied into the casing 52 and the heat treatment area A from an air supply / exhaust port (not shown), and the atmosphere in the casing 52 and the heat treatment area A is adjusted to a predetermined state. At this stage, the drive stage 38 is disposed on the lower side in FIG. 2, and the workpiece 1 is not disposed in the heat treatment region A.

  Next, a current is supplied to the third heat generating means 18 and the third heat generating means 18 is calibrated. Specifically, the temperature information t3 after the elapse of a predetermined time is acquired while a current having a predetermined magnitude is passed through the third heat generating means 18. The temperature information t3 is the temperature of the third portion T3 arranged at a position close to the third heat generating means 18, and it can be said that the temperature information t3 accurately corresponds to the degree of heat generated from the third heat generating means 18. When the third heat generating means 18 is repeatedly used over a long period of time, the degree of heat generated by the third heat generating means 18 may change even if the current supplied to the third heat generating means does not change. In this calibration, the magnitude of the current supplied to the third heat generating means 18 is adjusted so that the third temperature information t3 falls within a predetermined set temperature range, and the degree of heat generated by the third heat generating means 18 in the heat treatment (that is, , The thermal energy supplied from the third heat generating means 18) is made constant at each heat treatment.

  Next, a current is supplied to the first heat generating means 14 and the second heat generating means 16 to start full-scale heating in the heat treatment region A. At this time, a current of a predetermined magnitude set by the calibration is continuously supplied to the third heat generating means 18.

  First, a current of a predetermined magnitude is supplied to each of the first heat generating means 14 and the second heat generating means 16, and when a predetermined time elapses (at a time after a sufficient time for the temperature to stabilize), the control means 28 acquires temperature information t1 and temperature information t2.

  The temperature information t1 of the T1 portion corresponds to the temperature of the inner surface 12A of the heat insulating member 12 with high accuracy. Further, it can be said that the difference between the temperature information t1 and the temperature information t2 accurately represents the temperature gradient in the heat insulating member 12 from the inner surface 12A to the outer surface 12B of the heat insulating member 12. The degree of the temperature gradient in the heat insulating member 12 changes as the heat insulating member 12 deteriorates.

  FIGS. 5A and 5B are diagrams for explaining the degree of temperature gradient in the heat insulating member 12 due to deterioration of the heat insulating member 12, and are schematic diagrams showing fluctuations in the temperature information t1 and t2. FIG. 5A shows temperature information t1 (a) of the temperature measuring portion T1 and temperature information t2 (a) of the temperature measuring portion T2 in a state where the heat insulating performance of the heat insulating member 12 is not deteriorated. FIG. 5B shows temperature information t1 (b) of the temperature measuring portion T1 and temperature information t2 (b) of the temperature measuring portion T2 in a state where the heat insulating performance of the heat insulating member is deteriorated. 5A and 5A, it is assumed that the heat generation amounts from the first heat generating means 14, the second heat generating means 16, and the third heat generating means 18 are the same. 6A to 6C are schematic cross-sectional views for explaining the magnitude of the thermal energy transmitted to the temperature measuring portions T1 and T2 due to the deterioration of the heat insulating performance of the heat insulating member 12. FIG. FIG. 6A corresponds to a state where the heat insulating performance of the heat insulating member 12 shown in FIG. 5A is not deteriorated (a state where the heat insulating member 12 maintains high heat insulating performance). b) corresponds to a state in which the heat insulating performance of the heat insulating member 12 shown in FIG.

  Of the thermal energy emitted from the first heat generating means 14, as a component of the heat energy transmitted to the temperature measuring portion T1 of the first temperature sensor 22, for example, as shown in FIG. Of the thermal energy component D transmitted to the inner surface of the member 12, the thermal energy component L transmitted to the first temperature sensor 22 via the heat insulating member 12, and the first temperature from the first heating means 14 without passing through the thermal insulating member 12. There is a component H of thermal energy that is directly transmitted to the sensor 22. The component L of thermal energy transmitted through the heat insulating member 12 is a component of heat energy transmitted to the first temperature sensor 22 due to reflection of radiant heat by the inner surface 12A of the heat insulating member 12, or a heat insulating member that has reached a high temperature. The inner surface 12 </ b> A side of 12 is, for example, the sum total of components of thermal energy that is transferred to the first temperature sensor 22 by heating the air in the heat treatment region A.

  As shown in FIG. 6A, in a state where the heat insulating performance of the heat insulating member 12 is sufficiently high, the component E of the heat energy that reaches the outer surface 12B from the inner surface 12A of the heat insulating member 12 through the heat insulating member 12 is very small. The component O (not shown in FIG. 6A) of thermal energy that escapes from the outer surface 12B to the outside of the heat insulating member 12 is also extremely small.

  For example, when the heat insulating member 12 made of a ceramic fiber material mainly composed of known alumina fibers is exposed to a relatively high temperature, grain growth of alumina occurs in the fibers. When the heat insulating member 12 is repeatedly exposed to a relatively high temperature, the heat insulating performance of the heat insulating member 12 gradually decreases as the alumina grains gradually increase. When the heat insulating performance of the heat insulating member 12 deteriorates, heat energy is easily transmitted from the inner surface 12A of the heat insulating member 12 to the outer surface 12B.

  Thus, in the state where the heat insulating performance of the heat insulating member 12 is deteriorated (the state shown in FIG. 5B or FIG. 6B), even when the magnitude of the heat energy emitted from the first heat generating means 14 does not change. The component E of the thermal energy that reaches the outer surface 12B from the inner surface 12A of the heat insulating member 12 through the inside of the heat insulating member 12 is relatively large, and the component O of the relatively large heat energy is transferred from the outer surface 12B to the outside of the heat insulating member 12. Will run away. Therefore, in a state where the heat insulating performance of the heat insulating member 12 is deteriorated (the state shown in FIG. 5B or FIG. 6B), the thermal energy component L transmitted through the heat insulating member 12 becomes small. Therefore, the amount of heat generated from the first heat generating means 14, the heat component H transmitted directly from the first heat generating means 14 to the first temperature sensor 22 without passing through the heat insulating member 12, and the inner surface of the heat insulating member 12 from the first heat generating means 14. Even when the component D of the transmitted thermal energy does not change, the temperature of the first temperature measuring portion T1 of the first temperature sensor 22 disposed in the heat treatment region A is as shown in FIG. The heat insulation performance shown in FIG. 6A and FIG. In this case, as shown in FIG. 6B, the component E of the thermal energy flowing from the inner surface 12A to the outer surface 12B of the heat insulating member 12 becomes relatively large. Therefore, as shown in FIG. The temperature t2 (b) of the portion T2 is higher than the temperature t2 (a) in the initial state (the state where the heat insulating performance of the heat insulating member 12 is not deteriorated). Moreover, since the component L of the thermal energy transmitted through the heat insulating member 12 is reduced, the temperature information t1 (b) of the temperature measurement portion T1 is lower than the initial temperature t1 (a).

  Thus, the temperature t1 of the first temperature measuring portion T1 measured by the first temperature sensor 22 and the temperature t2 of the second temperature measuring portion T2 measured by the second temperature sensor 24 are the heat insulation of the heat insulating member 12. Changes as performance degrades.

  The control means 28 is based on, for example, the temperature t1 of the first temperature measuring portion T1 measured by the first temperature sensor 22 and the temperature t2 of the second temperature measuring portion T2 measured by the second temperature sensor 24. The amount of heat transmitted to the heat treatment region A via the heat insulating member 12 is adjusted by adjusting the amount of heat generated by the two heat generating means 16. That is, the control means 28 determines the magnitude of the current flowing through the second heat generating means 16 and the amount of heat generated by the second heat generating means 16 according to the temperature t1 of the first temperature measuring portion T1 and the temperature t2 of the second temperature measuring portion T2. Determine based on

  For example, when t1 is smaller than a predetermined value and t2 is larger than a predetermined value when a predetermined current is passed, a heat insulating member as shown in FIGS. 5 (b) and 6 (b) It is considered that the heat escape from the inner surface 12A to the outer surface 12B is increased. In this case, the control unit 28 may increase the amount of heat generated from the second heat generating unit 16 by first increasing the amount of current flowing through the second heat generating unit 16. That is, the control means 28 causes the second heat generating means 16 to generate heat, and flows from the outer surface 12B through the outer surface 12A to the heat treatment region A so as to complement the decrease in the thermal energy component L transmitted through the heat insulating member 12. By generating the component I of the reaching thermal energy, the total amount of heat transferred to the heat treatment region A through the heat insulating member 12 is adjusted. In this case, for example, the temperature t1 of the first temperature measuring portion T1 in the heat treatment region A is the same as the case where the heat insulating performance of the heat insulating member 12 shown in FIGS. 5A and 6A is not deteriorated. The amount of heat generated by the second heat generating means 16 is controlled so as to be the size. As described above, the difference between the temperature t1 of the first temperature measuring portion T1 and the temperature t2 of the second temperature measuring portion T2 corresponds well to the degree of deterioration of the heat insulating performance of the heat insulating member 12. The relationship between the temperatures t1 and t2 and the degree of deterioration of the heat insulating member 12 can be grasped in advance by experiments, simulations, or the like. In the heating apparatus 10, a control algorithm based on this previously grasped relationship is stored in a memory (not shown) in the control means 28. In the heating apparatus 10, the control means 28 adjusts the amount of current to the second heat generating means 16 by this control algorithm based on the temperature t1 of the first temperature measuring portion T1 and the temperature t2 of the second temperature measuring portion T2. .

  Further, the control means 28 is based on the temperature t1 of the first temperature measuring portion T1 measured by the first temperature sensor 22 and the temperature t2 of the second temperature measuring portion T2 measured by the second temperature sensor 24. The amount of heat generated by the heat generating means 14 may be adjusted. For example, after the calibration of the third heat generating means 18 described above, the temperature of t1 when a current of a predetermined magnitude is passed through the first heat generating means 14 is smaller than a predetermined value, and t2 is also smaller than the predetermined value (heat Since the heat generation performance of the first heat generating means 14 is considered to have deteriorated, such as when the energy component E is also small), the control means 28 increases the magnitude of the current supplied to the first heat generating means 14. Thus, the amount of heat generated from the first heat generating means 14 may be adjusted.

  Moreover, when the difference of the temperature information acquired with the two 1st temperature sensors 22 with which the heating apparatus 10 is provided is too large, one of the 1st temperature sensors 22 may have malfunctioned. Similarly, when the difference between the temperature information acquired by the two second temperature sensors 24 included in the heating device 10 is too large, one of the second temperature sensors 24 may have malfunctioned. In such a case, the control means 28 stops the heat treatment operation, and the malfunction of the first temperature sensor 22 or the second temperature sensor 22 has occurred in the image display means (not shown) provided in the heating device 10. The warning screen may be displayed.

  As described above, the temperature t1 of the first temperature measuring portion T1 and the temperature t2 of the second temperature measuring portion T2 are the heat insulating performance of the heat insulating member 12, the heat generating performance of the first heat generating means 14, and the second heat generating means 16. It changes according to the heat generation performance of the. In the heating apparatus of the present invention, not limited to the above-described embodiment, the control means is based on the temperature of the first temperature measurement portion and the temperature of the second temperature measurement portion by various control algorithms set by experiments or simulations. It is sufficient to adjust at least the amount of heat generated by the second heat generating means, and details of the control algorithm are not particularly limited.

When the control by the control means 28 is finished and a predetermined time has elapsed (after a sufficient time for the temperature in the heat treatment region A to stabilize), the drive stage 38 is raised to place the workpiece 1 in the heat treatment region A. The heat treatment (heat treatment) of the workpiece 1 is started. During this heat treatment, the drive stage 38 is continuously moved in the rotational direction indicated by the arrow R in FIG. 1 and in the vertical direction indicated by the arrow V in FIG. During the heat treatment of the object 1 to be processed, the control means 28 is based on the temperature information t1 of the first temperature measurement portion T1 and the temperature information t2 of the second temperature measurement portion T2, and the first heating means 14, What is necessary is just to adjust continuously the magnitude | size of the electric current sent through the 2 heat generating means 16 and the 3rd heat generating means 18 grade | etc.,. In the heating device 10, the workpiece 1 can be heat-treated in this way.

  As mentioned above, although the embodiment of the heating device of the present invention has been described as an example, the present invention is not limited to the above-described embodiment, and does not depart from the gist of the present invention, such as the shape, number, and arrangement position of each member. Various changes, improvements, combinations and the like can be made within the range.

DESCRIPTION OF SYMBOLS 1 To-be-processed object 10 Heating device 12 Heat insulation member 12A Inner surface 12B Outer surface 13 Assembly 14 1st heat generating means 14a Resistance heater 14b Electrode member 16 2nd heat generating means 18 3rd heat generating means 22 1st temperature sensor 24 2nd temperature sensor 26 Third temperature sensor 28 Control means 32 Lid member 34 Bottom plate member 34a Opening 36 Mounting body 38 Drive stage 39 Base member 42 Ceramic protective tube 42a Opening 44 Thermocouple wire 46 Temperature measuring part 48 Outer heat insulating member A Heat treatment region T1 First 1 temperature measurement portion T2 2nd temperature measurement portion T3 3rd temperature measurement portion

Claims (3)

A heating device for heat-treating a workpiece,
A heat insulating member having an inner surface surrounding a heat treatment region in which the workpiece is disposed and an outer surface opposite to the inner surface;
A first heating means disposed in the heat treatment region for heating the workpiece;
Heating the heat insulating member from the outer surface side, a second heat generating means disposed in a region on the opposite side of the heat treatment region across the heat insulating member;
A first temperature sensor for measuring the temperature of the first temperature sensing part set in the heat treatment area,
A second temperature for measuring the temperature of the second temperature measuring portion set in the heat insulation member at a position closer to the outer surface of the heat insulation member or on the outer surface of the heat insulation member than the first temperature sensor. A sensor,
Based on the temperature of the first temperature measuring portion measured by the first temperature sensor and the temperature of the second temperature measuring portion measured by the second temperature sensor, at least the amount of heat generated by the second heating means is determined. And a control means for adjusting the amount of heat transmitted to the heat treatment region via the heat insulating member by adjusting.   The control means is based on the temperature of the first temperature measuring portion measured by the first temperature sensor and the temperature of the second temperature measuring portion measured by the second temperature sensor. The heating apparatus according to claim 1, wherein a temperature of the heat treatment region is adjusted by adjusting a heat generation amount of the heat treatment region. A third temperature sensor for measuring the temperature of the third temperature measuring portion set at a position farther from the heat insulating member than the first temperature measuring portion in the heat treatment region;
A third heat generating means set at a position farther from the heat insulating member than the first heat generating means in the heat treatment region,
The control means adjusts the temperature distribution of the heat treatment region by adjusting the amount of heat generated by the third heat generating means based on the temperature of the third temperature measuring portion measured by the third temperature sensor. The heating device according to claim 1 or 2, characterized in that

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