JP6019198B2 - Magnetic inspection system for vapor deposition - Google Patents

Description

  The present invention relates to a magnetic inspection apparatus for vapor deposition (INSPECTING APPARATUS FOR DEPOSITION MAGNET). More specifically, the magnetic inspection for vapor deposition can improve the inspection accuracy by inspecting the magnetic material used when aligning the substrate and mask in the same environment as the bottom-up (upward) vapor deposition environment. Relates to the device.

  With the revolution of information technology represented by digital convergence and ubiquitous, the development of electronic devices is progressing remarkably fast. Among them, one of the core technologies is display technology. Recently, there has been an increasing demand for better visibility, lower cost, and lower power consumption for displays. Along with this, organic light emitting diodes (OLEDs) are in the spotlight following PDPs (Plasma Display Panels) and liquid crystal display devices (LCDs).

  An organic light emitting diode is a self-luminous device that emits light when an electric current is passed, and has a response speed that is 1000 times faster than a liquid crystal display device and a wide viewing angle. In addition, it is possible to realize a flexible display without requiring a backlight, a color filter, or the like required by the liquid crystal display device, and has a great advantage not only in terms of performance but also in terms of component price.

  The organic thin film used for manufacturing the organic light emitting diode is sequentially formed on the surface of the substrate using a vacuum deposition method in a high vacuum state. In order to realize a full color display of an organic light emitting diode, a fine pitch deposition pattern is essential. In order to form such a vapor deposition pattern, a mask on which a pattern is formed is used. In order to improve the accuracy of the deposition pattern, it is important that not only the pattern of the mask itself must be precise, but also that the substrate and the mask are mechanically precisely aligned.

  In this case, a magnetic material may be used when performing the vapor deposition process after aligning the mask and the substrate. The mask has a predetermined pattern formed of a metal material and is aligned with the substrate, and the deposition process is performed after the substrate is in close contact with the magnetic body so that the substrate and the mask can be kept aligned. That is, the vapor deposition process is performed by arranging the mask, the substrate, and the magnetic material in this order. By the magnetic material, the mask on which the pattern is formed of the metal material is brought into close contact with the substrate side, and the aligned state is continuously maintained.

  At this time, because there is no defect in the magnetic material, the substrate and the mask are maintained in a precisely aligned state, and the pattern is accurately maintained. Therefore, an apparatus for inspecting a magnetic material is required. A conventional apparatus for inspecting a magnetic body is inspected while moving along the magnetic body from above, separated from the upper surface of the magnetic body by a predetermined distance. However, in such a case, it is difficult to accurately measure the magnetic flux density between the mask and the magnetic material, unlike the deposition environment in which the mask, the substrate, and the magnetic material are arranged in this order. Therefore, there is a problem in that a magnetic material that is determined to have no defect at the time of inspection actually has a defect, so that uniform and precise vapor deposition is not performed during the actual vapor deposition process.

  Accordingly, an object of the present invention is to solve such a conventional problem, and inspects a magnetic material used when aligning a substrate and a mask in the same environment as a bottom-up deposition environment, An object of the present invention is to provide a magnetic substance inspection apparatus for vapor deposition that can obtain a precise and reliable magnetic substance inspection result by minimizing vibrations that may occur during inspection.

  An object of the present invention is to provide an apparatus for inspecting a magnetic material used when aligning a substrate and a mask in a vapor deposition process according to the present invention, a mask on which a predetermined pattern is formed of a metal material, and a substrate aligned on the upper surface of the mask. A fixing portion that is provided so that an upper surface of the substrate aligned with the mask comes into contact and is temporarily fixed, and the magnetic body is accommodated therein so as to be movable in a vertical direction, and below the mask And an inspecting unit that measures at least one of a magnetic flux density corresponding to a distance between the magnetic body and the mask and a deflection phenomenon of the pattern.

  Here, the inspection unit is installed, a stage unit that moves the inspection unit, and a base unit that has a pair of interconnected surface plates and on which the stage unit and the fixing unit are respectively installed. It is preferable.

  Here, the fixing portion includes a frame portion in which a part of the upper surface is recessed inward to form a receiving space, a fixing plate that is received in the receiving space and is provided so as to be movable in a vertical direction, It is preferable to include a magnetic body that is mounted on the lower surface and in which the N pole and the S pole are alternately arranged with a predetermined interval.

  Here, it is preferable that the surface of the fixing portion that contacts the substrate is etched into an embossing pattern so that static electricity is not generated when the substrate is in contact with the substrate.

  Here, the inspection unit measures a Gaussian distribution according to the distance between the magnetic body and the mask, and a pattern deflection according to the distance between the magnetic body and the mask. It is preferable to include at least one of shape measuring units that measure the phenomenon.

According to the present invention, since a magnetic material is inspected in the same environment as a bottom-up type vapor deposition device in which the magnetic material is actually used, a precise and highly reliable magnetic material inspection device for vapor deposition is provided.
In addition, the inspection unit can be moved using the stage to inspect the entire magnetic body, and at this time, the base unit provided with a pair of surface plates minimizes the generation of vibrations and leads to precise inspection results. Is done.

Further, since the magnetic body is connected to an external structure installed on the upper side of the base portion and moves in the vertical direction, vibration applied to the magnetic body is further minimized.
In addition, the surface of the fixing portion that comes into contact with the substrate is etched into an embossing pattern, so that generation of static electricity is prevented at the time of contact between the substrate and the fixing portion.

1 is a schematic perspective view of a vapor deposition magnetic inspection apparatus according to an embodiment of the present invention. It is a figure which shows schematically the mask of the magnetic body test | inspection apparatus for vapor deposition of FIG. It is a schematic front view of the fixing | fixed part of the magnetic body test | inspection apparatus for vapor deposition of FIG. FIG. 2 is a schematic bottom perspective view of a main part of a fixing part of the vapor deposition magnetic substance inspection apparatus in FIG. 1. It is a schematic top view of the principal part among the fixing | fixed parts of the magnetic body test | inspection apparatus for vapor deposition of FIG. FIG. 2 is a schematic bottom perspective view of a fixing portion of the vapor deposition magnetic substance inspection apparatus in FIG. 1. It is a schematic perspective view of the stage part and test | inspection part of the magnetic body test | inspection apparatus for vapor deposition of FIG.

Hereinafter, a magnetic inspection apparatus for vapor deposition according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
The magnetic substance inspection apparatus for vapor deposition according to an embodiment of the present invention inspects a magnetic substance used when the substrate and the mask are aligned in the same environment as the bottom-up type vapor deposition environment, and vibrations that can occur during the inspection are minimized. By doing so, the present invention relates to a magnetic substance inspection apparatus for vapor deposition that can obtain a precise and highly reliable magnetic substance inspection result.

FIG. 1 is a schematic perspective view of a magnetic substance inspection apparatus for vapor deposition according to an embodiment of the present invention. Referring to FIG. 1, a deposition magnetic inspection apparatus 100 according to an embodiment of the present invention is temporarily fixed by contacting a substrate 110, a mask 120 aligned with the substrate 110, and an upper surface of the substrate 110. A fixing unit 130, an inspection unit 140 disposed on the mask 120, a stage unit 150 on which the inspection unit 140 is installed, and a base unit 160.
The substrate 110 is configured to deposit a deposition material released from a deposition source in a deposition process, and is aligned (attached) on the upper surface of the mask 120.

FIG. 2 is a surface schematically showing a mask of the vapor deposition magnetic substance inspection apparatus of FIG. Referring to FIG. 2, the mask 120 is configured to deposit a predetermined pattern on the lower surface of the substrate 110, and includes a mask frame 121 and a pattern unit 122.
The mask frame 121 has a predetermined thickness, and a through hole is formed so that the pattern portion 122 can be formed. That is, the mask frame 121 is a frame for supporting the pattern portion 122.

The pattern portion 122 is a region where the same pattern as the pattern formed on the substrate 110 is formed. The pattern portion 122 is made of a metal material so that the pattern can be accurately maintained by the magnetic body 133 according to the product manufactured by the vapor deposition process, and is formed from a wire in this embodiment.
The substrate 110 and the mask 120 are provided so that the magnetic substance 133 can be inspected in the same environment as the actual deposition environment, and the same ones as the substrate 110 and the mask 120 used in the actual deposition environment are used. used.

FIG. 3 is a schematic front view of a fixing portion of the vapor deposition magnetic substance inspection apparatus of FIG. 1, and FIG. 4 is a schematic view of a main part of the fixing part of the vapor deposition magnetic substance inspection apparatus of FIG. It is a bottom perspective view.
During the deposition process, the aligned mask 120 and the substrate 110 move upward, and the upper surface of the substrate 110 comes into contact with the fixing unit 130, whereby the substrate and the mask are temporarily fixed, and the substrate 110 and the mask 120 are fixed. By performing the vapor deposition process in the above state, the vapor deposition material can be deposited precisely and uniformly. The fixed part 130 includes a frame part 131, a fixed plate 132, and a magnetic body 133.

  The frame part 131 has a configuration in which the upper surface of the substrate 110 is in contact with the lower surface of the frame part and the fixing plate 132 on which the magnetic body 133 is installed is accommodated. The frame part 131 forms an accommodation space when a part of the upper surface is depressed inside, and the fixed plate 132 is accommodated in the accommodation space. At this time, the size of the accommodation space is set to be slightly larger than the size of the fixed plate 132, thereby minimizing transmission of vibration due to the drive of the stage unit 150 to the fixed plate 132. By minimizing vibration, there is almost no influence of vibration on the magnetic body 133, and thereby a precise and highly reliable inspection result can be derived.

  The fixed plate 132 has a configuration in which the magnetic body 133 is fixedly installed on the lower surface of the fixed plate. The fixed plate 132 is connected to a separate configuration such as a substrate or a mask aligning device installed on the upper side of the upper base portion 160 so as to vertically move. It is provided so as to be movable. By being connected to a separate configuration, it is possible to minimize the transmission of vibrations that may occur during inspection to the magnetic body 133.

  A magnetic field is formed between the pattern part 122 provided with the metal material and the magnetic body 133, and the magnetic flux density shows different values depending on the interval between the pattern part 122 and the magnetic body 133. . Depending on the vapor deposition process, the required magnetic flux density value may differ depending on the product to be manufactured, and the fixed plate 132 is provided so as to be movable in the vertical direction. The distance from the pattern unit 122 is adjusted to have a desired magnetic flux density value. In this example, the surface of the magnetic body 133 has a 3900 to 4000 gauss value, a 1100 to 1200 gauss value in the case of a separation distance of 10 mm, and a 350 to 400 gauss value in the case of a separation distance of 20 mm.

  In this embodiment, the frame 131 is made of AL6061 material, the fixing plate 132 is made of a SUS420 material fixing plate and an AL6061 material back plate, and the size of the fixing plate 132 is 900 mm × 620 mm. However, it is not necessarily limited to this.

  FIG. 5 is a schematic plan view of the main part of the fixing part of the magnetic substance inspection apparatus for vapor deposition shown in FIG. Referring to FIG. 5, the magnetic body 133 is configured to form a magnetic field between the pattern portions 122 of the mask 120 provided with a metal material, and is installed on the lower surface of the fixed plate 132. That is, the mask 120, the substrate 110, the frame part 131, the magnetic body 133, and the fixed plate 132 are arranged in this order from the bottom, and the same environment as the actual deposition environment is formed.

  In the case of bottom-up deposition, the substrate 110 is aligned and seated on the upper surface of the mask 120. At this time, the load of the substrate 110 causes a problem that the pattern portion 122 of the mask 120 bends downward by a predetermined distance. There can be. For this reason, the magnetic body 133 is installed and the pattern portion 122 is pulled upward by attractive force, so that the bending phenomenon of the pattern portion 122 due to the load of the substrate 110 can be prevented.

  The magnetic body 133 is provided so as to have a length similar to the length of the fixed plate 132, and the N pole and the S pole are alternately arranged with a predetermined interval along the width direction of the fixed plate 132. It is preferable that the width of the magnetic body 133 and the distance between the magnetic bodies 133, that is, the distance between the N pole and the S pole are appropriately set according to the deposition environment.

  The fixed plate 132 including the magnetic body 133 is detachably provided from the magnetic body inspection apparatus 100. When the inspection conditions are satisfied, the fixing plate 132 can be attached and detached and installed in the evaporation apparatus to perform a precise vapor deposition process. .

  FIG. 6 is a schematic bottom perspective view of a fixing portion of the vapor deposition magnetic substance inspection apparatus of FIG. 1. Referring to FIG. 6, an embossing pattern 134 is formed on the lower surface of the fixing unit 130, that is, the surface of the frame unit 131 that contacts the upper surface of the substrate 110. The lower surface of the fixing portion is etched to have the embossing pattern 134, so that static electricity or the like is not generated when the fixing portion 130 and the substrate 110 are in contact with each other.

  FIG. 7 is a schematic perspective view of the stage unit and the inspection unit of the vapor deposition magnetic substance inspection apparatus of FIG. 1. Referring to FIG. 7, the inspection unit 140 is configured to inspect items such as the performance and quality of the magnetic body 133 and is installed below the mask 120. The magnetic body 133 is inspected in the same environment as the actual deposition environment by being disposed below the mask 120 in a state where the mask 120, the substrate 110, the frame part 131, the magnetic body 133, and the fixing plate 132 are disposed. It will be. That is, during the vapor deposition process, a vapor deposition source is disposed below the mask 120. In this embodiment, the same environment is formed by disposing the inspection unit 140 in a region where the vapor deposition source is disposed.

  The inspection unit 140 includes a shape measuring unit 141 that measures a deflection phenomenon of the pattern unit 122 according to the distance between the magnetic body 133 and the mask 120, and a magnetic flux according to the distance between the magnetic body 133 and the mask 120. A Gaussian measuring unit 142 for measuring the density.

  Specifically, the shape measuring unit 141 is configured to measure an interval between wires, a wire bending phenomenon, and the like while moving along the length direction and the width direction of the pattern unit 122. The Gauss measuring unit 142 includes: In this configuration, the magnetic flux density of the entire pattern unit 122 corresponding to the distance between the mask 120 and the magnetic body 133, that is, Gaussian is measured. By checking the defect of the pattern part 122 itself by the shape measuring part 141 when measuring the magnetic flux density by the Gaussian measuring part 142, it is possible to prevent an erroneous magnetic flux density value due to the defect of the pattern part 122 from being measured.

  The stage unit 150 is configured to move the inspection unit 140 along the length direction, the width direction, and the height direction of the mask 120. The stage unit 150 includes three guide rails and is arranged so that the installation area is minimized. That is, the width direction guide rail installed on the length direction guide rail is provided so as to move the inspection unit 140 in the length direction simultaneously with the guide rail function, thereby minimizing the installation space.

  The base portion 160 is configured to minimize vibration due to movement of the stage portion 150, and is provided with a pair of surface plates, and the surface plates are interconnected by connecting columns. The stage unit 150 is mounted on the upper surface of the lower base unit 160, and the upper base unit 160 is installed above the fixed unit 130. When the stage unit 150 is driven and the inspection unit 140 moves, vibrations may occur in the entire apparatus. If vibrations occur, the Gaussian value is greatly affected. Therefore, the base unit 160 is provided with a pair of surface plates and is interconnected to minimize vibration due to the driving of the stage unit 150.

  That is, according to the present invention, the reliability of the measurement results is improved by minimizing vibrations that can occur during inspection by means of vertical movement means of the base part 160, the frame part 131, and the fixed plate 132 provided by a pair of surface plates. It can be improved further.

The operation of the vapor deposition magnetic inspection apparatus according to one embodiment of the present invention will be described below.
First, the magnetic body 133 and the fixed plate 132 to be inspected are accommodated in the accommodating space of the frame portion 131, and the fixed plate 132 is moved in the vertical direction so that a required Gaussian value is indicated. For example, when a 1100 to 1200 gauss value is required, the fixing plate 132 is moved and fixed so that the separation distance is 10 mm.

  Thereafter, the substrate 110 and the mask 120 are loaded, and the substrate 110 aligned and seated on the mask 120 rises together with the mask 120 and contacts the lower surface of the fixing portion 130. At this time, the embossing pattern 134 is formed on the lower surface of the fixing unit 130, thereby preventing the generation of static electricity when contacting the substrate 110.

  When the substrate 110 and the mask 120 come into contact with the fixing unit 130 and are temporarily fixed, the stage unit 150 provided with the inspection unit 140 is driven. As the stage unit 150 is driven, the inspection unit 140 performs inspection while moving along the length direction, width direction, and height direction of the mask 120. At this time, even when the drive of the stage unit 150 and the inspection unit 140 move, the base unit 160 provided with a pair of surface plates and a separate configuration above the base unit 160 are connected to the frame unit 131 at a predetermined interval. The fixed plate 132 accommodated so as to be separated from each other minimizes vibration and is not affected by movement.

Specifically, the shape measuring unit 141 measures defects such as a deflection phenomenon of the pattern unit 122 of the mask 120, and the Gaussian measuring unit 142 measures the magnetic flux density between the mask 120 and the magnetic body 133. If the magnetic flux density shows a constant value over the entire area as a result of scanning along the entire area of the pattern portion 122, it is determined that the magnetic body 133 is free of defects.
The magnetic body 133 determined to have no defect is separated from the apparatus and then accommodated in a vapor deposition apparatus and used in an actual vapor deposition process.

  Therefore, according to the present invention, the magnetic material used when aligning the substrate and the mask is inspected in the same environment as the bottom-up type deposition environment, so that the vibration that can occur during the inspection is minimized. Thus, a magnetic substance inspection apparatus for vapor deposition that can obtain a highly reliable magnetic substance inspection result is provided.

  The scope of the right of the present invention is not limited to the above-described embodiments, and can be embodied in various forms within the scope of the appended claims. Without departing from the gist of the present invention claimed in the scope of claims, any person having ordinary knowledge in the technical field to which the invention pertains can describe various claims that can be modified. Considered to be within range.

DESCRIPTION OF SYMBOLS 100 Magnetic substance test | inspection apparatus for vapor deposition 110 Substrate 120 Mask 130 Fixing part 131 Frame part 132 Fixing plate 133 Magnetic substance 134 Embossing pattern 140 Inspection part 141 Gauss measurement part 142 Shape measurement part 150 Stage part 160 Base part

Claims (5)

In an apparatus for inspecting a magnetic material used when aligning a substrate and a mask in a vapor deposition process,
A mask on which a predetermined pattern is formed of a metal material;
A substrate aligned with the top surface of the mask;
A fixing portion provided so that an upper surface of the substrate aligned with the mask comes into contact with and temporarily fixed, and the magnetic body is accommodated therein so as to be movable in the vertical direction;
A vapor deposition magnetic inspection apparatus comprising: an inspection unit that is disposed below the mask and measures at least one of a magnetic flux density and a pattern deflection phenomenon according to a distance between the magnetic substance and the mask. The inspection unit is installed, and a stage unit for moving the inspection unit;
2. The magnetic inspection apparatus for vapor deposition according to claim 1, comprising a pair of interconnected surface plates and a base part on which the stage part and the fixing part are respectively installed. The fixing part is
A frame part in which a part of the upper surface is depressed inside to form an accommodation space;
A stationary plate housed in the housing space and provided so as to be movable in the vertical direction;
The magnetic substance inspection apparatus for vapor deposition according to claim 2, further comprising: a magnetic body that is attached to a lower surface of the fixed plate and alternately arranges the N pole and the S pole with a predetermined interval.   4. The vapor deposition magnetic body according to claim 1, wherein a surface of the fixing portion that contacts the substrate is etched into an embossing pattern so that static electricity is not generated when the substrate is in contact with the substrate. 5. Inspection device.   The inspection unit measures a Gaussian distribution unit that measures a Gaussian distribution according to a distance between the magnetic body and the mask, and measures a pattern deflection phenomenon according to a distance between the magnetic body and the mask. The magnetic substance test | inspection apparatus for vapor deposition of Claim 4 provided with at least 1 of the shape measurement part to perform.

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