JP6002329B2 - 光干渉式センサ及びそれを用いた計測システム - Google Patents
光干渉式センサ及びそれを用いた計測システム Download PDFInfo
- Publication number
- JP6002329B2 JP6002329B2 JP2015528213A JP2015528213A JP6002329B2 JP 6002329 B2 JP6002329 B2 JP 6002329B2 JP 2015528213 A JP2015528213 A JP 2015528213A JP 2015528213 A JP2015528213 A JP 2015528213A JP 6002329 B2 JP6002329 B2 JP 6002329B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical
- displacement
- sensor
- optical path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013154512 | 2013-07-25 | ||
JP2013154512 | 2013-07-25 | ||
PCT/JP2014/068039 WO2015012094A1 (fr) | 2013-07-25 | 2014-07-07 | Capteur à interférence optique, et système de mesure l'utilisant |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6002329B2 true JP6002329B2 (ja) | 2016-10-05 |
JPWO2015012094A1 JPWO2015012094A1 (ja) | 2017-03-02 |
Family
ID=52393142
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015528213A Active JP6002329B2 (ja) | 2013-07-25 | 2014-07-07 | 光干渉式センサ及びそれを用いた計測システム |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6002329B2 (fr) |
WO (1) | WO2015012094A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016170723A1 (fr) | 2015-04-20 | 2016-10-27 | パナソニックIpマネジメント株式会社 | Élément de visualisation de vibration, élément de mesure de vibration, et procédé de mesure de vibration |
JP6782466B2 (ja) | 2016-06-14 | 2020-11-11 | パナソニックIpマネジメント株式会社 | 可視化素子、計測システム、及び計測方法 |
CN109141491A (zh) * | 2018-09-29 | 2019-01-04 | 成都凯天电子股份有限公司 | 压力型光纤微变传感器 |
CN109030865A (zh) * | 2018-10-09 | 2018-12-18 | 贵阳学院 | 一种哑铃滑块式光纤加速度传感器及其使用方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10142253A (ja) * | 1996-11-07 | 1998-05-29 | Suzuki Motor Corp | 振動検出センサ及びこれを用いた振動測定装置 |
US20020036251A1 (en) * | 2000-06-28 | 2002-03-28 | Ulrich Johann | Inertial sensor for the mounting and checking of an inertial reference in a satellite |
US20040046111A1 (en) * | 2002-09-10 | 2004-03-11 | The Regents Of The University Of California | Fiber optic micro accelerometer |
US20040149037A1 (en) * | 2003-02-05 | 2004-08-05 | Digonnet Michel J.F. | Fiber optic accelerometer |
JP2010117333A (ja) * | 2008-11-12 | 2010-05-27 | Hakusan Kogyo Kk | 光ファイバセンサ |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7137299B2 (en) * | 2005-04-21 | 2006-11-21 | Northrop Grumman Corporation | Fiber optic accelerometer |
US20090219546A1 (en) * | 2008-03-03 | 2009-09-03 | Lockheed Martin Corporation | Interferometric Gravity Sensor |
-
2014
- 2014-07-07 WO PCT/JP2014/068039 patent/WO2015012094A1/fr active Application Filing
- 2014-07-07 JP JP2015528213A patent/JP6002329B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10142253A (ja) * | 1996-11-07 | 1998-05-29 | Suzuki Motor Corp | 振動検出センサ及びこれを用いた振動測定装置 |
US20020036251A1 (en) * | 2000-06-28 | 2002-03-28 | Ulrich Johann | Inertial sensor for the mounting and checking of an inertial reference in a satellite |
US20040046111A1 (en) * | 2002-09-10 | 2004-03-11 | The Regents Of The University Of California | Fiber optic micro accelerometer |
US20040149037A1 (en) * | 2003-02-05 | 2004-08-05 | Digonnet Michel J.F. | Fiber optic accelerometer |
JP2010117333A (ja) * | 2008-11-12 | 2010-05-27 | Hakusan Kogyo Kk | 光ファイバセンサ |
Also Published As
Publication number | Publication date |
---|---|
WO2015012094A1 (fr) | 2015-01-29 |
JPWO2015012094A1 (ja) | 2017-03-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6002329B2 (ja) | 光干渉式センサ及びそれを用いた計測システム | |
CN105934651B (zh) | 改进的陀螺仪结构和陀螺仪 | |
Lu et al. | Review of micromachined optical accelerometers: from mg to sub-μg | |
EP2643711B1 (fr) | Pendule courbe basse fréquence et capteur sismique vertical utilisant ce pendule courbe | |
CN105004884B (zh) | 一种SiC基微光学高温加速度计及其设计方法 | |
JPH0843534A (ja) | 微分測距装置及びその測定方法 | |
JP2018141773A (ja) | ナビゲーション品位の環境において使用するための共振光学機械加速度計 | |
Rao et al. | A high-resolution area-change-based capacitive MEMS tilt sensor | |
AU2012247104A1 (en) | Low frequency folded pendulum and vertical seismic sensor utilizing such a folded pendulum | |
CN102759635A (zh) | 一种集成光栅压电调制的微光学加速度传感器及其检测方法 | |
ITMI20102453A1 (it) | Dispositivo di misura gravimetrica assoluta a interferometria atomica per applicazioni geofisiche particolarmente per il monitoraggio di giacimenti di idrocarburi | |
Kang et al. | A mode-localized resonant accelerometer with self-temperature drift suppression | |
CN101576383A (zh) | 双路光干涉的精密光微机电陀螺仪 | |
Zhou et al. | Water temperature measurement using a novel fiber optic ultrasound transducer system | |
CN101509772A (zh) | 光学位相检测的高精度硅微机电陀螺仪 | |
Qu et al. | A nano-g MOEMS accelerometer featuring electromagnetic force balance with 157-dB dynamic range | |
CN101046381B (zh) | 微机电光导干涉陀螺 | |
JPH09304169A (ja) | 光ファイバ加速度センサ | |
Wong et al. | Design and fabrication of monolithic photonic crystal fiber acoustic sensor | |
Rao et al. | A High-resolution area-change-based capacitive MEMS accelerometer for tilt sensing | |
JP2009068841A (ja) | 微小機械−電気構造(mems)用の振動変位計測装置 | |
Feng et al. | Performance and modeling of a micro-grating accelerometer | |
Cao et al. | Research on an anchor point lever beam coupling type tuning fork micro-gyroscope | |
da Silva et al. | Photonic seismometer based on whispering gallery modes | |
Zhang et al. | Laser self-mixing interferometer for MEMS dynamic measurement |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160823 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160902 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6002329 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |