JP6000551B2 - Focusing spot position detection method of laser processing equipment - Google Patents

Description

  The present invention relates to a condensing spot position detection method for a condenser that condenses a laser beam in a laser processing apparatus.

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a substantially wafer-shaped semiconductor wafer, and devices such as ICs, LSIs, etc. are partitioned in the partitioned regions. Form. Then, the semiconductor wafer is cut along the streets to divide the region in which the device is formed to manufacture individual semiconductor devices.

  As a method of dividing along the street of the above-described semiconductor wafer or the like, there is a laser processing method in which a pulse laser beam having transparency to the wafer is used, and the pulse laser beam is irradiated with a focusing point inside the region to be divided. Has been tried. The dividing method using this laser processing method is to irradiate a pulse laser beam having a wavelength having transparency to the wafer from one side of the wafer to the inside, and irradiate the wafer along the street. A modified layer is continuously formed, and an external force is applied along a street whose strength is reduced by the formation of the modified layer, thereby dividing the workpiece. (For example, refer to Patent Document 1.) When the modified layer is formed inside along the street formed on the workpiece as described above, the condensing point of the laser beam at a predetermined depth position from the upper surface of the workpiece. It is important to position

  Further, as a method of dividing a plate-like workpiece such as a semiconductor wafer, a laser machining groove is formed by irradiating a pulse laser beam along a street formed on the workpiece, and along the laser machining groove. A method of cleaving with a mechanical braking device has been proposed. (For example, refer to Patent Document 2.) Even when the laser processing groove is formed along the street formed on the workpiece, the laser beam condensing point is positioned at a predetermined height position of the workpiece. is important.

Japanese Patent No. 3408805 JP-A-10-305420

  Thus, the position of the condensing spot collected by the concentrator for condensing the laser beam is determined by the design value NA of the concentrator, but the distance between the concentrator and the workpiece holding means is If it is not maintained with high accuracy, there is a problem that the focused spot cannot be properly positioned with respect to the workpiece held by the workpiece holding means.

  The present invention has been made in view of the above-mentioned facts, and the main technical problem thereof is that the position of the condensing spot collected by the condenser for condensing the laser beam is properly positioned in the optical axis direction (Z-axis direction). It is an object of the present invention to provide a method for detecting a focused spot position of a laser processing apparatus that can detect the laser beam.

In order to solve the above main technical problem, according to the present invention, a workpiece holding means having a holding surface for holding a workpiece, and a workpiece held by the workpiece holding means is irradiated with a laser beam. A laser beam irradiating means provided with a condenser, a processing feed means for processing and feeding the workpiece holding means and the laser beam irradiating means relative to the processing feed direction (X-axis direction), and the laser beam irradiating means. Focusing spot position adjusting means for moving the focusing spot in the optical axis direction (Z-axis direction) perpendicular to the holding surface of the workpiece holding means, and Z-axis direction for detecting the Z-axis direction position of the condenser A focused spot in a laser processing apparatus, comprising: a position detection unit; an imaging unit that images the workpiece held by the workpiece holding unit; and a display unit that displays an image captured by the imaging unit. Position detection There is provided a method,
A plate-like object holding step of holding a plate-like object having a predetermined thickness on the holding surface of the workpiece holding means;
A reference position setting step of setting a reference position in the Z-axis direction of the light collector by a design value of a light collecting spot position of a laser beam condensed by the light collector and a thickness of the plate-like object;
A detection range setting step for setting a detection range in the Z-axis direction exceeding an error range between the design value and the actual focused spot position from the reference position;
The condenser unit in the Z-axis direction position and said at a predetermined moving speed the condenser unit by operating the light-collection spot position adjusting means have a correlation from one of the detection range in the other of the X-axis direction While moving along the Z-axis direction, the workpiece feed means is operated to move the workpiece holding means at a predetermined moving speed in the X-axis direction, and the laser beam irradiation means is operated to hold the workpiece. A laser processing groove forming step of forming a laser processing groove having a continuous groove width on the plate-like object held by the means;
A laser processing groove imaging step of imaging the laser processing groove formed on the plate-like object by the laser processing groove forming step by the imaging means;
A laser processing groove display step for displaying the laser processing groove imaged in the laser processing groove imaging step on the display means;
Based on the laser-processed groove having the continuous groove width displayed on the display means by the laser-processed groove display step, the Z-axis direction position of the condenser corresponding to the position having the smallest groove width is obtained, and the Z-axis direction A condensing spot position determining step for determining the position as a condensing spot position,
A focused spot position detection method in a laser processing apparatus is provided.

In the focused spot position detection method in the laser processing apparatus according to the present invention, the focused spot position adjusting means is operated to detect the focused spot with a correlation between the Z-axis direction position and the X-axis direction of the focused spot. Laser beam irradiation means while moving the workpiece holding means at a predetermined movement speed in the X-axis direction by operating the processing feeding means while moving from one of the detection ranges set in the range setting step to the other at a predetermined movement speed The laser processing groove having a continuous groove width is formed on the plate-like object held by the workpiece holding means, and the laser processing groove is imaged and displayed on the display means, and displayed on the display means. obtains a continuous Z-axis direction position of the concentrator corresponding to the most groove width is smaller position based on laser groove having a groove width, since it is determined that the focusing spot position the Z-axis direction position, focused spot Detection of the position becomes extremely easy.

The perspective view of the laser processing apparatus for enforcing the condensing spot position detection method by this invention. The block diagram which shows the control means with which the laser processing apparatus shown in FIG. 1 is equipped. The perspective view which shows the state which stuck the plate-shaped object used for the condensing spot position detection method of the laser processing apparatus by this invention to the adhesive tape with which the cyclic | annular flame | frame was mounted | worn. Explanatory drawing of the laser processing groove | channel formation process in the condensing spot position detection method of the laser processing apparatus by this invention. The figure which shows the correlation with the Z-axis direction position and X-axis direction of a collector in the laser processing groove | channel formation process of the condensing spot position detection method of the laser processing apparatus by this invention. The figure which shows the laser processing groove | channel displayed on a display means in the laser processing groove | channel display process in the condensing spot position detection method of the laser processing apparatus by this invention.

  Hereinafter, a preferred embodiment of a method for detecting a focused spot position of a laser processing apparatus according to the present invention will be described in more detail with reference to the accompanying drawings.

  FIG. 1 is a perspective view of a laser processing apparatus for carrying out the focused spot position detecting method according to the present invention. A laser processing apparatus 1 shown in FIG. 1 includes a stationary base 2 and a chuck table mechanism that is disposed on the stationary base 2 so as to be movable in a machining feed direction (X-axis direction) indicated by an arrow X and holds a workpiece. 3 and a laser beam irradiation unit support mechanism 4 disposed on the stationary base 2 so as to be movable in an index feed direction (Y-axis direction) indicated by an arrow Y perpendicular to the direction indicated by the arrow X (X-axis direction); The laser beam unit support mechanism 4 is provided with a laser beam irradiation unit 5 disposed so as to be movable in the focused spot position adjustment direction (Z-axis direction) indicated by an arrow Z.

  The chuck table mechanism 3 includes a pair of guide rails 31, 31 arranged in parallel along the machining feed direction indicated by the arrow X on the stationary base 2, and the arrow X on the guide rails 31, 31. A first sliding block 32 disposed so as to be movable in the machining feed direction (X-axis direction), and disposed on the first sliding block 32 so as to be movable in the index feed direction (Y-axis direction) indicated by an arrow Y. A second sliding block 33 provided, a cover table 35 supported on the second sliding block 33 by a cylindrical member 34, and a chuck table 36 as a workpiece holding means are provided. The chuck table 36 includes a suction chuck 361 formed of a porous material, and holds, for example, a disk-shaped semiconductor wafer, which is a workpiece, on the suction chuck 361 by suction means (not shown). . The chuck table 36 configured as described above is rotated by a pulse motor (not shown) disposed in the cylindrical member 34. The chuck table 36 is provided with a clamp 362 for fixing an annular frame described later.

  The first sliding block 32 is provided with a pair of guided grooves 321 and 321 fitted to the pair of guide rails 31 and 31 on the lower surface thereof, and in the index feed direction indicated by an arrow Y on the upper surface thereof. A pair of guide rails 322 and 322 formed in parallel with each other are provided. The first sliding block 32 configured in this way is processed by the arrow X along the pair of guide rails 31, 31 when the guided grooves 321, 321 are fitted into the pair of guide rails 31, 31. It is configured to be movable in the feed direction. The chuck table mechanism 3 in the illustrated embodiment includes a machining feed means 37 for moving the first sliding block 32 along the pair of guide rails 31 and 31 in the machining feed direction indicated by the arrow X. The processing feed means 37 includes a male screw rod 371 disposed in parallel between the pair of guide rails 31 and 31, and a drive source such as a pulse motor 372 for rotationally driving the male screw rod 371. One end of the male screw rod 371 is rotatably supported by a bearing block 373 fixed to the stationary base 2, and the other end is connected to the output shaft of the pulse motor 372 by transmission. The male screw rod 371 is screwed into a penetrating female screw hole formed in a female screw block (not shown) provided on the lower surface of the central portion of the first sliding block 32. Accordingly, by driving the male screw rod 371 in the forward and reverse directions by the pulse motor 372, the first slide block 32 is moved along the guide rails 31 and 31 in the machining feed direction (X-axis direction) indicated by the arrow X. .

  The laser processing apparatus 1 in the illustrated embodiment includes X-axis direction position detection means 374 for detecting the X-axis direction position of the chuck table 36. The X-axis direction position detecting means 374 is a linear scale 374a disposed along the guide rail 31, and a reading that is disposed along the linear scale 374a together with the first sliding block 32 disposed along the first sliding block 32. It consists of a head 374b. In the illustrated embodiment, the reading head 374b of the X-axis direction position detecting means 374 sends a pulse signal of one pulse every 1 μm to the control means described later. The control means described later detects the position of the chuck table 36 in the X-axis direction by counting the input pulse signals.

  The second sliding block 33 is provided with a pair of guided grooves 331 and 331 which are fitted to a pair of guide rails 322 and 322 provided on the upper surface of the first sliding block 32 on the lower surface thereof. By fitting the guided grooves 331 and 331 to the pair of guide rails 322 and 322, the guided grooves 331 and 331 are configured to be movable in the indexing feed direction (Y-axis direction) indicated by the arrow Y. The chuck table mechanism 3 in the illustrated embodiment includes an index feed direction (Y-axis direction) indicated by an arrow Y along the pair of guide rails 322 and 322 provided on the first slide block 32. The first index feeding means 38 for moving to the first position is provided. The first index feed means 38 includes a male screw rod 381 disposed in parallel between the pair of guide rails 322 and 322, and a drive source such as a pulse motor 382 for rotationally driving the male screw rod 381. It is out. One end of the male screw rod 381 is rotatably supported by a bearing block 383 fixed to the upper surface of the first sliding block 32, and the other end is connected to the output shaft of the pulse motor 382. The male screw rod 381 is screwed into a penetrating female screw hole formed in a female screw block (not shown) provided on the lower surface of the central portion of the second sliding block 33. Therefore, by driving the male screw rod 381 forward and backward by the pulse motor 382, the second slide block 33 is moved along the guide rails 322 and 322 in the indexing feed direction (Y-axis direction) indicated by the arrow Y. .

  The laser processing apparatus 1 in the illustrated embodiment includes Y-axis direction position detecting means 384 for detecting the Y-axis direction position of the second sliding block 33. The Y-axis direction position detecting means 384 is a linear scale 384a disposed along the guide rail 322, and a reading which is disposed along the linear scale 384a together with the second sliding block 33 disposed along the second sliding block 33. And a head 384b. In the illustrated embodiment, the reading head 384b of the Y-axis direction position detecting means 384 sends a pulse signal of one pulse every 1 μm to the control means described later. The control means described later detects the position of the chuck table 36 in the Y-axis direction by counting the input pulse signals.

  The laser beam irradiation unit support mechanism 4 includes a pair of guide rails 41, 41 arranged in parallel along the indexing feed direction (Y-axis direction) indicated by an arrow Y on the stationary base 2, and the guide rails 41, 41, A movable support base 42 is provided on 41 so as to be movable in the direction indicated by arrow Y. The movable support base 42 includes a movement support portion 421 that is movably disposed on the guide rails 41, 41, and a mounting portion 422 that is attached to the movement support portion 421. The mounting portion 422 is provided with a pair of guide rails 423 and 423 extending in the direction indicated by the arrow Z on one side surface in parallel. The laser beam irradiation unit support mechanism 4 in the illustrated embodiment has a second index for moving the movable support base 42 along the pair of guide rails 41 and 41 in the index feed direction (Y-axis direction) indicated by the arrow Y. A feeding means 43 is provided. The second index feed means 43 includes a male screw rod 431 disposed in parallel between the pair of guide rails 41, 41, and a drive source such as a pulse motor 432 for rotationally driving the male screw rod 431. It is out. One end of the male screw rod 431 is rotatably supported by a bearing block (not shown) fixed to the stationary base 2, and the other end is connected to the output shaft of the pulse motor 432. The male screw rod 431 is screwed into a female screw hole formed in a female screw block (not shown) provided on the lower surface of the central portion of the moving support portion 421 constituting the movable support base 42. Therefore, the movable support base 42 is moved along the guide rails 41 and 41 in the indexing feed direction (Y-axis direction) indicated by the arrow Y by driving the male screw rod 431 forward and backward by the pulse motor 432. .

  The laser beam irradiation unit 5 in the illustrated embodiment includes a unit holder 51 and laser beam irradiation means 52 attached to the unit holder 51. The unit holder 51 is provided with a pair of guided grooves 511 and 511 that are slidably fitted to a pair of guide rails 423 and 423 provided in the mounting portion 422. By being fitted to the guide rails 423 and 423, the guide rails 423 and 423 are supported so as to be movable in the condensing spot adjustment direction (Z-axis direction) indicated by an arrow Z.

  The laser beam irradiation unit 5 in the illustrated embodiment adjusts the focused spot position for moving the unit holder 51 in the focused spot position adjusting direction (Z-axis direction) indicated by the arrow Z along the pair of guide rails 423 and 423. Means 53 are provided. The condensing spot position adjusting means 53 includes a male screw rod (not shown) disposed between the pair of guide rails 423 and 423, and a drive source such as a pulse motor 532 for rotationally driving the male screw rod. The male screw rod (not shown) is driven to rotate forward and reverse by the pulse motor 532, so that the unit holder 51 and the laser beam irradiation means 52 are moved along the guide rails 423 and 423 along the focusing spot adjustment direction (Z axis) indicated by the arrow Z. Direction). In the illustrated embodiment, the laser beam irradiation means 52 is moved upward by driving the pulse motor 532 forward, and the laser beam irradiation means 52 is moved downward by driving the pulse motor 532 in reverse. Yes.

  The laser beam irradiation unit 5 in the illustrated embodiment includes Z-axis direction position detection means 55 for detecting the position of the laser beam irradiation means 52 in the Z-axis direction. The Z-axis direction position detecting means 55 includes a linear scale 551 disposed in parallel with the guide rails 423 and 423, a reading head 552 attached to the unit holder 51 and moving along with the unit holder 51 along the linear scale 551. It is made up of. In the illustrated embodiment, the reading head 552 of the Z-axis direction position detecting means 55 sends a pulse signal of one pulse every 1 μm to the control means described later.

  The illustrated laser beam irradiating means 52 condenses the pulse laser beam oscillating means (not shown) disposed in the casing 521 and the pulse laser beam oscillated from the laser beam oscillating means disposed at the tip of the casing 521 to collect the above-mentioned laser beam. A condenser 522 is provided for irradiating the workpiece held on the chuck table 36 as workpiece holding means.

  At the front end portion of the casing 521 constituting the laser beam irradiation means 52, an image pickup means 6 for detecting a processing region to be laser processed by the laser beam irradiation means 52 is disposed. The imaging unit 6 includes an illuminating unit that illuminates the workpiece, an optical system that captures an area illuminated by the illuminating unit, an imaging device (CCD) that captures an image captured by the optical system, and the like. The captured image signal is sent to the control means described later.

  The laser processing apparatus 1 in the illustrated embodiment includes a control means 10 shown in FIG. The control means 10 is constituted by a computer, and a central processing unit (CPU) 101 that performs arithmetic processing according to a control program, a read-only memory (ROM) 102 that stores a control program and the like, and a readable and writable data that stores arithmetic results and the like. A random access memory (RAM) 103, an input interface 104 and an output interface 105 are provided. Detection signals from the X-axis direction position detection unit 374, the Y-axis direction position detection unit 384, the Z-axis direction position detection unit 55, the imaging unit 6, and the like are input to the input interface 104 of the control unit 10. A control signal is output from the output interface 105 of the control means 10 to the pulse motor 372, pulse motor 382, pulse motor 432, pulse motor 532, laser beam irradiation means 52, display means 7, and the like.

  In the laser processing apparatus 1 described above, the position of the focused spot position adjustment direction (Z-axis direction), which is the optical axis direction of the focused spot of the pulse laser beam irradiated from the collector 522 of the laser beam irradiation means 52, is the collection point. If the distance between the optical device 522 and the chuck table 36 as the workpiece holding means is not maintained with high accuracy, the focused spot cannot be properly positioned with respect to the workpiece held on the chuck table 36. There's a problem. Therefore, when starting the laser processing operation, it is necessary to detect the position in the condensing spot position adjustment direction (Z-axis direction) which is the optical axis direction of the condensing spot of the pulse laser beam irradiated from the condenser 522. is there. Hereinafter, a method for detecting the position of the condensing spot position adjustment direction (Z-axis direction) of the condensing spot of the pulsed laser beam irradiated from the condenser 522 will be described.

  In order to carry out the focused spot position detecting method according to the present invention, first, a plate for detection is prepared. In the illustrated embodiment, as shown in FIG. 3, a circular plate-shaped object 8 made of a silicon substrate having a predetermined thickness is prepared in a state where it is adhered to the surface of an adhesive tape T mounted on an annular frame F. To do. The plate-like object 8 adhered to the surface of the adhesive tape T attached to the annular frame F in this way is the upper surface of the chuck table 36 as the workpiece holding means of the laser processing apparatus 1 shown in FIG. Is placed on the holding surface via the adhesive tape T. Next, by operating a suction means (not shown), the plate-like object 8 is sucked and held on the chuck table 36 via the adhesive tape T (plate-like object holding step). Then, the annular frame F is fixed by the clamp 362.

  Next, the Z axis in the condenser 522 is determined by the design value of the condensing spot of the laser beam condensed by the condenser 522 and the thickness of the plate-like object 8 (and the thickness of the adhesive tape T in the illustrated embodiment). A reference position for the direction is set (reference position setting step). That is, the design value of the laser beam condensed by the condenser 522 on the upper surface of the plate-like object 8 sucked and held on the chuck table 36 via the adhesive tape T based on the design value of the focal length of the condenser 522. A reference position at which the condensing spot is positioned is set.

  If the reference position setting step is performed as described above, a detection range in the Z-axis direction that exceeds the error range between the design value and the actual focused spot position is set from the reference position (detection range setting step). That is, if the error range of the condensing spot position by the condenser 522 is, for example, plus or minus 40 μm with respect to the reference position, the detection region is set to, for example, plus or minus 50 μm with respect to the reference position. The detection range in the Z-axis direction of the condenser 522 set in this way is stored in a random access memory (RAM) 103.

  Next, the condensing spot position adjusting means 53 is operated with a correlation between the position of the concentrator 522 in the Z-axis direction and the X-axis direction to move the concentrator 522 from one of the detection ranges to the other. While moving at a speed, the work feed means 37 is operated to move the chuck table 36 as the work holding means in the X axis direction at a predetermined moving speed, and the laser beam irradiation means 52 is operated to move the work holding means. A laser processing groove forming step of forming a laser processing groove on the plate-like object 8 held by the chuck table 36 is performed. That is, as shown in FIG. 4A, the chuck table 36 is moved to the laser beam irradiation region where the condenser 522 of the laser beam irradiation means 52 for irradiating the pulse laser beam is located, and the plate-like object held on the chuck table 36 is moved. The laser processing groove forming region at 8 is positioned directly below the condenser 522. Then, the Z-axis direction position of the condenser 522 is positioned at one of the detection ranges set in the detection range setting step (reference position plus 50 μm). Next, a pulse laser beam having an output of 1.0 W and a repetition frequency of 100 kH is irradiated from the condenser 522 of the laser beam irradiation means 52 to the plate-like object 8 made of a silicon substrate with an absorptive wavelength (for example, 355 nm). The light collector 522 and the chuck table 36 are moved with the correlation shown in FIG. That is, the condensing spot position adjusting unit 53 is operated to lower the concentrator 522 at a predetermined moving speed (1 μm / second in the illustrated embodiment), and the processing feed unit 37 is operated to move the chuck table 36. In FIG. 4A, it is moved at a predetermined moving speed (2 mm / second in the illustrated embodiment) in the direction indicated by the arrow X1. When the chuck table 36 is moved by a predetermined distance (200 mm in the illustrated embodiment) as shown in FIG. 4B, the irradiation of the pulse laser beam is stopped, the lowering of the condenser 522 is stopped, and the chuck table is stopped. The movement of 36 is stopped. As a result, the spot diameter corresponding to each position of the detection range (reference position ± 50 μm) of the condenser 522 in the Z-axis direction as shown in FIGS. The laser processing groove 80 is formed (laser processing groove forming step).

  As described above, if the laser processing groove 80 having a spot diameter corresponding to each position of the detection range (reference position ± 50 μm) in the Z-axis direction of the condenser 522 is formed, the laser processing formed on the plate-like object 8 is performed. A laser processing groove imaging step of imaging the groove 80 by the imaging means 6 is performed. That is, the chuck table 36 holding the plate-like object 8 on which the laser processing groove forming step has been performed is positioned in the imaging area of the imaging means 6. Then, the laser processing groove 80 formed on the upper surface of the plate-like object 8 is imaged, and the imaged image signal is sent to the control means 10.

  When the image signal from the imaging means 6 is input, the control means 10 moves the input laser processing groove 80 together with the X-axis direction position of the chuck table 36 and the Z-axis direction position of the condenser 522 as shown in FIG. It displays on the display means 7 (laser processing groove | channel display process). Thus, by displaying the laser processing groove 80 corresponding to the detection range (reference position ± 50 μm) of the condenser 522 in the Z-axis direction, the thinnest (smallest groove width) position in the laser processing groove 80 (illustrated). In this embodiment, the Z-axis direction position of the condenser 522 corresponding to the reference position minus 11 μm) is obtained, and the Z-axis direction position is determined as the focused spot position (a focused spot position determining step). As described above, it is extremely easy to obtain the position in the Z-axis direction of the condenser 522 corresponding to the thinnest (smallest groove width) position in the laser processing groove 80 displayed on the display means 7. The position can be easily detected.

1: Laser processing device 2: Stationary base 3: Chuck table mechanism 36: Chuck table 37: Processing feed means 374: X-axis direction position detection means 38: First index feed means 384: Y-axis direction position detection means 4: Laser beam irradiation unit support mechanism 42: Movable support base 43: Second index feed unit 5: Laser beam irradiation unit 52: Laser beam irradiation unit 522: Condenser 53: Condensing spot position adjusting unit 55: Z-axis direction position detecting unit 6: Imaging means 7: Display means 8: Plate-like object 10: Control means

Claims (1)

A workpiece holding means having a holding surface for holding the workpiece, a laser beam irradiating means having a condenser for irradiating a laser beam to the workpiece held by the workpiece holding means, and the workpiece A processing feed means for processing and feeding the object holding means and the laser beam irradiation means relative to the processing feed direction (X-axis direction), and a focused spot perpendicular to the holding surface of the workpiece holding means. Held by the workpiece holding means, the focused spot position adjusting means for moving in the optical axis direction (Z-axis direction), the Z-axis position detecting means for detecting the Z-axis position of the condenser, and the workpiece holding means. A condensing spot position detection method in a laser processing apparatus comprising: an imaging unit that images a workpiece; and a display unit that displays an image captured by the imaging unit,
A plate-like object holding step of holding a plate-like object having a predetermined thickness on the holding surface of the workpiece holding means;
A reference position setting step of setting a reference position in the Z-axis direction of the light collector by a design value of a light collecting spot position of a laser beam condensed by the light collector and a thickness of the plate-like object;
A detection range setting step for setting a detection range in the Z-axis direction exceeding an error range between the design value and the actual focused spot position from the reference position;
The condenser unit in the Z-axis direction position and said at a predetermined moving speed the condenser unit by operating the light-collection spot position adjusting means have a correlation from one of the detection range in the other of the X-axis direction While moving along the Z-axis direction, the workpiece feed means is operated to move the workpiece holding means at a predetermined moving speed in the X-axis direction, and the laser beam irradiation means is operated to hold the workpiece. A laser processing groove forming step of forming a laser processing groove having a continuous groove width on the plate-like object held by the means;
A laser processing groove imaging step of imaging the laser processing groove formed on the plate-like object by the laser processing groove forming step by the imaging means;
A laser processing groove display step for displaying the laser processing groove imaged in the laser processing groove imaging step on the display means;
Based on the laser-processed groove having the continuous groove width displayed on the display means by the laser-processed groove display step, the Z-axis direction position of the condenser corresponding to the position having the smallest groove width is obtained, and the Z-axis direction A condensing spot position determining step for determining the position as a condensing spot position,
A method for detecting a focused spot position in a laser processing apparatus.

Images