JP5984359B2 - Ultrasonic atomization unit - Google Patents
Ultrasonic atomization unit Download PDFInfo
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- JP5984359B2 JP5984359B2 JP2011242118A JP2011242118A JP5984359B2 JP 5984359 B2 JP5984359 B2 JP 5984359B2 JP 2011242118 A JP2011242118 A JP 2011242118A JP 2011242118 A JP2011242118 A JP 2011242118A JP 5984359 B2 JP5984359 B2 JP 5984359B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
- B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
- B05B17/0676—Feeding means
- B05B17/0684—Wicks or the like
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Description
この発明は、水や薬液等の液体を超音波振動によって霧化する超音波霧化ユニットに関する。 The present invention relates to an ultrasonic atomizing unit that atomizes a liquid such as water or a chemical solution by ultrasonic vibration.
従来、超音波霧化装置に使用される超音波霧化ユニットとして、圧電振動子に振動板を取り付けた霧化部材を、弾性素材からなる弾性部材を介してケーシングで弾性的に挟持した構造のものが提供されている（例えば特許文献１参照）。
図５は、特許文献１に記載された超音波霧化ユニットの一例を示す断面図であり、図６はその分解斜視図である。この超音波霧化ユニットは、中央部に開口１０１ａを有する圧電振動子１０１に振動板１０２を取り付けた霧化部材１００と、この霧化部材１００の両面にそれぞれ添わせた一対の弾性部材１０３と、前記霧化部材１００及び弾性部材１０３を収容した保持部材としてのケーシング１０４とを備えている。
Conventionally, as an ultrasonic atomizing unit used in an ultrasonic atomizing apparatus, an atomizing member having a diaphragm attached to a piezoelectric vibrator is elastically sandwiched by a casing via an elastic member made of an elastic material. Have been provided (see, for example, Patent Document 1).
FIG. 5 is a sectional view showing an example of the ultrasonic atomization unit described in Patent Document 1, and FIG. 6 is an exploded perspective view thereof. The ultrasonic atomizing unit includes an atomizing member 100 in which a diaphragm 102 is attached to a piezoelectric vibrator 101 having an opening 101a in the center, and a pair of elastic members 103 attached to both surfaces of the atomizing member 100, respectively. And a casing 104 as a holding member that houses the atomizing member 100 and the elastic member 103.
前記圧電振動子１０１は円形薄板状の圧電セラミックスからなり、その上下面に設けられた電極１０１ｂに高周波電圧を印加することにより、径方向に伸縮する超音波振動を生じる。また、前記振動板１０２は、金属からなる円形薄板状のものであり、圧電振動子１０１の開口１０１ａを覆った状態で当該圧電振動子１０１の下面に取り付けられている。この振動板１０２の前記開口１０１ａに臨む部分には、多数の微細孔１０２ａが形成されている。 The piezoelectric vibrator 101 is made of a circular thin plate-shaped piezoelectric ceramic, and generates ultrasonic vibration that expands and contracts in the radial direction by applying a high-frequency voltage to the electrodes 101b provided on the upper and lower surfaces thereof. The vibration plate 102 is a circular thin plate made of metal, and is attached to the lower surface of the piezoelectric vibrator 101 in a state of covering the opening 101 a of the piezoelectric vibrator 101. A large number of fine holes 102a are formed in the portion of the diaphragm 102 facing the opening 101a.
前記一対の弾性部材１０３は、ゴムからなる円環平板状のものであり、それぞれ霧化部材１００の両面に面接触した状態で密着している。また、前記ケーシング１０４は、中央部が開口した中空円板状のものであり、その内部において、一対の弾性部材１０３を介して前記霧化部材１００を弾性的に挟み込んで保持している。このケーシング１０４は上下に分離可能に二分割されている。 The pair of elastic members 103 are in the shape of an annular flat plate made of rubber, and are in close contact with both surfaces of the atomizing member 100 while being in surface contact with each other. The casing 104 has a hollow disk shape with an open center, and the atomizing member 100 is elastically sandwiched and held via a pair of elastic members 103 therein. The casing 104 is divided into two parts so as to be separable in the vertical direction.
前記従来の超音波霧化ユニットによれば、前記圧電振動子１０１に高周波電圧を印加し、当該圧電振動子１０１を超音波振動させて、前記振動板１０２を超音波振動させることにより、当該振動板１０２の微細孔１０２ａ部分に供給された液体を霧化させて、噴霧することができる。 According to the conventional ultrasonic atomization unit, a high-frequency voltage is applied to the piezoelectric vibrator 101, the piezoelectric vibrator 101 is ultrasonically vibrated, and the vibration plate 102 is ultrasonically vibrated, thereby the vibration. The liquid supplied to the fine hole 102a portion of the plate 102 can be atomized and sprayed.
なお、特許文献１には、前記薄板状の弾性部材１０３に代えて、一対の輪ゴム状の第１の弾性部材１０５と、この第１の弾性部材１０５よりも外径が大きい一対の第２の弾性部材１０６とを用い、これら各弾性部材１０５，１０６を、霧化部材１００の両面の外周縁と開口縁とにそれぞれ添わせたものも記載されている（図７参照）。 In Patent Document 1, instead of the thin plate-like elastic member 103, a pair of rubber band-like first elastic members 105 and a pair of second elastic members having a larger outer diameter than the first elastic member 105 are disclosed. Also described is an elastic member 106 in which the elastic members 105 and 106 are attached to the outer peripheral edge and the opening edge of both surfaces of the atomizing member 100, respectively (see FIG. 7).
前記従来の超音波霧化ユニットは、霧化させる液体の種類や使用環境等に応じて、液体の微粒子をより遠くまで噴霧することが要求される場合がある。この場合、圧電振動子１０１に印加する電圧を大きく高めたり、送風ファンを用いたりすることにより、液体の微粒子をより遠くまで噴霧することが行われている。 The conventional ultrasonic atomizing unit may be required to spray fine particles of liquid farther according to the type of liquid to be atomized, the usage environment, and the like. In this case, liquid fine particles are sprayed farther by greatly increasing the voltage applied to the piezoelectric vibrator 101 or using a blower fan.
しかし、圧電振動子１０１に印加する電圧を大きく高めると、高周波電圧を発生させる駆動回路が大きくなったり、振動板１０２の振幅が大きくなってその寿命が短くなったりするという問題がある。また、送風ファンを用いた場合には、液体の微粒子が過度に拡散したり、装置が大型化したりするという問題がある。
この発明は前記問題点に鑑みてなされたものであり、圧電振動子に印加する電圧を大きく高めたり、ファンを用いたりすることなく、液体の微粒子をより遠くまで噴霧することができる超音波霧化ユニットを提供することを目的とする。
However, when the voltage applied to the piezoelectric vibrator 101 is greatly increased, there is a problem that a drive circuit that generates a high-frequency voltage becomes large, or the amplitude of the diaphragm 102 becomes large and its life is shortened. Further, when a blower fan is used, there are problems that liquid fine particles are excessively diffused and the apparatus is enlarged.
The present invention has been made in view of the above-described problems, and an ultrasonic mist capable of spraying liquid fine particles farther without greatly increasing the voltage applied to the piezoelectric vibrator or using a fan. The purpose is to provide a unit.
この発明に係る超音波霧化ユニットは、中央部が開口した円形薄板状の圧電振動子と、厚さ方向に貫通した多数の微細孔を有し、前記開口に臨んだ状態で前記圧電振動子の片面に添わせた振動板とを備え、前記圧電振動子によって前記振動板を超音波振動させて液体を霧化する霧化部材と、
前記霧化部材の両面のそれぞれに添わせた状態で当該霧化部材と同心状に配置された一対の円環状の弾性部材と、
前記一対の弾性部材を介して前記霧化部材を弾性的に挟み込んで保持する保持部材と、を備える超音波霧化ユニットであって、
前記霧化部材の中心を挟んだ径方向の片側における前記円環状の弾性部材と前記霧化部材の片面との径方向の最大対向幅が、前記圧電振動子の中心を挟んだ径方向の片側における径方向幅に対して４０％であり、
前記振動板の外径が、前記圧電振動子の内径よりも大きく、かつ当該圧電振動子の外径よりも小さい径であり、
前記圧電振動子と振動板とが厚さ方向に接合しており、
前記一対の弾性部材の一方の弾性部材が、前記霧化部材の一側面とこの一側面に対向する保持部材の内面との間に当該霧化部材の厚さ方向のみに弾性収縮した状態で挟まれており、当該一対の弾性部材の他方の弾性部材が、前記霧化部材の他側面とこの他側面に対向する保持部材の内面との間に当該霧化部材の厚さ方向のみに弾性収縮した状態で挟まれており、前記円環状の弾性部材がＯリングであることを特徴とする。
The ultrasonic atomizing unit according to the present invention has a circular thin plate-like piezoelectric vibrator having an opening at the center and a number of fine holes penetrating in the thickness direction, and the piezoelectric vibrator in a state facing the opening. An atomizing member that atomizes a liquid by ultrasonically vibrating the vibration plate by the piezoelectric vibrator,
A pair of annular elastic members disposed concentrically with the atomizing member in a state of being attached to both surfaces of the atomizing member;
A holding member that elastically sandwiches and holds the atomization member via the pair of elastic members, and an ultrasonic atomization unit,
The maximum opposing width in the radial direction between the annular elastic member and one side of the atomizing member on one side in the radial direction across the center of the atomizing member is one side in the radial direction across the center of the piezoelectric vibrator. 40% der the radial direction width of is,
The outer diameter of the diaphragm is larger than the inner diameter of the piezoelectric vibrator and smaller than the outer diameter of the piezoelectric vibrator;
The piezoelectric vibrator and the diaphragm are joined in the thickness direction,
One elastic member of the pair of elastic members is sandwiched between one side surface of the atomizing member and the inner surface of the holding member facing the one side surface in an elastically contracted state only in the thickness direction of the atomizing member. The other elastic member of the pair of elastic members is elastically contracted only in the thickness direction of the atomizing member between the other side surface of the atomizing member and the inner surface of the holding member facing the other side surface. and it is sandwiched state, the elastic member of the annular and wherein the O-ring der Rukoto.
このような構成の超音波霧化ユニットによれば、Ｏリングと霧化部材の片面との前記径方向の最大対向幅が、圧電振動子の前記径方向幅に対して４０％であるので、霧化部材の振動が抑制されるのを防止することができる。このため、霧化部材によって霧化された液体の微粒子を、遠方まで噴霧することができる。
また、Ｏリングを霧化部材に対して線状に接触させることができるので、霧化部材の振動が抑制されるのをより効果的に防止することができる。このため、霧化部材によって霧化された液体の微粒子を、より遠方まで噴霧することができる。
According to the ultrasonic atomizing unit having such a configuration, the maximum facing width in the radial direction between the O-ring and one surface of the atomizing member is 40% with respect to the radial width of the piezoelectric vibrator. It is possible to prevent the vibration of the atomizing member from being suppressed. For this reason, the liquid microparticles atomized by the atomizing member can be sprayed far away.
Moreover, since the O-ring can be brought into linear contact with the atomizing member, it is possible to more effectively prevent the vibration of the atomizing member from being suppressed. For this reason, the liquid fine particles atomized by the atomizing member can be sprayed to a farther distance.
すなわち、本願発明者は、従来の超音波霧化ユニットが、霧化された液体の微粒子を遠方まで噴霧することができない原因について鋭意研究した結果、従来の超音波霧化ユニットは、径方向の幅寸法が大きい円環平板状の弾性部材を霧化部材の両面全体に添わせたり、輪ゴム状の二対の弾性部材を圧電振動子の両面の開口縁及び外周縁に添わせたりしていることから、当該弾性部材によって圧電振動子（霧化部材）の振動が一部抑制されていることに原因あることを見出し、かかる知見に基づいて本願発明を完成したものである。 That is, the inventor of the present application has conducted intensive research on the cause that the conventional ultrasonic atomizing unit cannot spray the atomized liquid fine particles far away. As a result, the conventional ultrasonic atomizing unit An annular flat plate-like elastic member with a large width dimension is attached to the entire surface of the atomizing member, or two rubber band-like elastic members are attached to the opening edge and the outer peripheral edge of both surfaces of the piezoelectric vibrator. Thus, the present inventors have found that there is a cause in that the vibration of the piezoelectric vibrator (atomizing member) is partially suppressed by the elastic member, and the present invention has been completed based on such knowledge.
前記超音波霧化ユニットにおいて、前記振動板が、その中央部に噴霧側に突出する凸状部または噴霧側と反対側に突出する凸状部を有していてもよい。 In the ultrasonic atomizing unit, the diaphragm may have a convex portion projecting to the spray side or a convex portion projecting to the side opposite to the spray side at a central portion thereof.
前記凸状部は、その基端部の直径をＲ１とし、前記圧電振動子の中央部の開口の直径をＲ２としたときに、Ｒ１とＲ２の関係が
Ｒ１≦（４／５）・Ｒ２
であるのが好ましい。
これは、Ｒ１とＲ２の関係がＲ１＞（４／５）・Ｒ２となると、前記振動板のうち、前記圧電振動子の中央部の開口に臨む部分の平面部の径方向寸法が小さくなり過ぎるため、前記圧電振動子の超音波振動に伴い、前記平面部がたわみ変形し難くなって、霧化された液体の微粒子をより効果的に遠方まで噴霧することができなくなるからである。
The relationship between R1 and R2 is R1 ≦ (4/5) · R2 where R1 is the diameter of the base end of the convex portion and R2 is the diameter of the opening at the center of the piezoelectric vibrator.
Is preferred.
This is because, when the relationship between R1 and R2 is R1> (4/5) · R2, the radial dimension of the planar portion of the diaphragm facing the opening at the center of the piezoelectric vibrator becomes too small. Therefore, the ultrasonic vibration of the piezoelectric vibrator makes it difficult for the flat portion to bend and deform, and it becomes impossible to spray the atomized liquid fine particles to a far distance more effectively.
前記超音波霧化ユニットにおいて、前記振動板が、平板状ではなく、その中央部に噴霧側に突出する凸状部を有するのが好ましい。
この場合、霧化部材によって霧化された液体の微粒子を、当該凸状部を有しない振動板に比べて、より効果的に遠方まで噴霧することができる。
In the ultrasonic atomizing unit, it is preferable that the vibration plate is not flat and has a convex portion that protrudes toward the spray side at a central portion thereof.
In this case, the liquid fine particles atomized by the atomizing member can be more effectively sprayed farther than a diaphragm without the convex portion.
前記Ｏリングの線径は、０．５〜２．０ｍｍの範囲であるのが好ましい。
この場合、霧化部材によって霧化された液体の微粒子を、より遠方まで噴霧することができる。
The wire diameter of the O-ring is preferably in the range of 0.5 to 2.0 mm.
In this case, the liquid fine particles atomized by the atomizing member can be sprayed farther.
前記超音波霧化ユニットにおいて、霧化部材の中心を挟んだ径方向の片側における前記Ｏリングと前記霧化部材の片面との径方向の最小対向幅は、前記圧電振動子の中心を挟んだ径方向の片側における径方向幅に対して５％であるのが好ましい。
この場合、前記対向幅の割合が５％以上であるので、弾性部材によって霧化部材を安定的に支持することができる。このため液体を安定的に霧化させることができる。
In the ultrasonic atomizing unit, the minimum opposing width in the radial direction between the O-ring and one side of the atomizing member on one side in the radial direction across the center of the atomizing member sandwiches the center of the piezoelectric vibrator. It is preferably 5% with respect to the radial width on one side in the radial direction.
In this case, since the ratio of the facing width is 5% or more, the atomizing member can be stably supported by the elastic member. For this reason, the liquid can be stably atomized.
また、前記超音波霧化ユニットにおいては、圧電振動子の厚みが０．１〜４．０ｍｍ、外径が６〜６０ｍｍであり、前記振動板の厚みが０．０２〜２．０ｍｍ、外径が６〜６０ｍｍであり、前記微細孔の孔径が３〜１５０μｍであるのが好ましい。
この超音波霧化ユニットによれば、サイズが比較的小さい前記霧化部材において、霧化された液体の微粒子を、より遠方まで噴霧することができる。
In the ultrasonic atomizing unit, the thickness of the piezoelectric vibrator is 0.1 to 4.0 mm, the outer diameter is 6 to 60 mm, the thickness of the diaphragm is 0.02 to 2.0 mm, and the outer diameter. Is 6 to 60 mm, and the pore diameter is preferably 3 to 150 μm.
According to this ultrasonic atomizing unit, the atomized liquid fine particles can be sprayed farther in the atomizing member having a relatively small size.
前記Ｏリングの硬さは、２０〜９０ ＩＲＨＤであるのが好ましく、この場合は、霧化部材を効果的に保持することができるので、液体をより安定的に霧化させることができる。
なお、本願においてＩＲＨＤの値は、国際ゴム硬さＭ法に準拠した値を示している。
The hardness of the O-ring is preferably 20 to 90 IRHD. In this case, since the atomizing member can be effectively retained, the liquid can be atomized more stably.
In addition, in this application, the value of IRHD has shown the value based on the international rubber hardness M method.
この発明に係る超音波霧化ユニットによれば、圧電振動子に印加する電圧を大きく高めたり、ファンを用いたりすることなく、液体の微粒子をより遠くまで噴霧することができる。 According to the ultrasonic atomizing unit of the present invention, liquid fine particles can be sprayed farther without greatly increasing the voltage applied to the piezoelectric vibrator or using a fan.
以下、この発明に係る超音波霧化ユニットの実施の形態について添付図面を参照しながら説明する。 Embodiments of an ultrasonic atomizing unit according to the present invention will be described below with reference to the accompanying drawings.
図１は、この発明に係る超音波霧化ユニットの一実施形態を示す断面図である。この超音波霧化ユニットは、圧電振動子１１によって振動板１２を超音波振動させて、水や薬液等の液体を霧化する霧化部材１と、前記霧化部材１の両面にそれぞれに添わせた円環状の弾性部材としての一対の弾性リング２と、この一対の弾性リング２を介して前記霧化部材１を弾性的に挟み込んで保持する保持部材としてのケーシング３とを備えている。前記振動板１２には、当該振動板１２に薬剤等の液体を供給するための吸液芯４を接触又は近接させている。 FIG. 1 is a cross-sectional view showing an embodiment of an ultrasonic atomizing unit according to the present invention. This ultrasonic atomizing unit ultrasonically vibrates the diaphragm 12 with a piezoelectric vibrator 11 to atomize a liquid such as water or a chemical solution, and is attached to both surfaces of the atomizing member 1 respectively. And a casing 3 as a holding member that elastically sandwiches and holds the atomizing member 1 via the pair of elastic rings 2. A liquid absorbing core 4 for supplying a liquid such as a drug to the diaphragm 12 is in contact with or close to the diaphragm 12.
前記霧化部材１の圧電振動子１１は、中央部に開口１１aが形成された円形薄板状の圧電セラミックスによって構成されている。この圧電振動子１１は、厚さ方向に分極されており、両面に形成された図示しない電極に高周波電圧を印加することにより、径方向への微細振動を生じる。この圧電振動子１１は、例えば、厚みが０．１〜４．０ｍｍ、外径が６〜６０ｍｍのサイズの小さいものであって、高周波電圧の周波数（駆動周波数）として、３０〜５００ＫＨｚのものが選定されている。 The piezoelectric vibrator 11 of the atomizing member 1 is composed of a circular thin plate-shaped piezoelectric ceramic having an opening 11a formed at the center. The piezoelectric vibrator 11 is polarized in the thickness direction, and fine vibrations in the radial direction are generated by applying a high-frequency voltage to electrodes (not shown) formed on both surfaces. The piezoelectric vibrator 11 is a small one having a thickness of 0.1 to 4.0 mm and an outer diameter of 6 to 60 mm, for example, and having a high frequency voltage (drive frequency) of 30 to 500 KHz. Selected.
前記振動板１２は、例えばニッケルからなる円形薄板状のものである。この振動板１２は、圧電振動子１１の開口１１ａを覆った状態で、図１において圧電振動子１１の下面に対して当該圧電振動子１１と同心に接合（固着）されている。この振動板１２は、例えば、厚みが０．０２〜２．０ｍｍ、外径が６〜６０ｍｍのものであり、その外径は圧電振動子１１の開口１１aの内径寸法より大きく、そのサイズは圧電振動子１１のサイズに対応させて適宜選択される。 The diaphragm 12 has a circular thin plate shape made of nickel, for example. The vibration plate 12 is joined (fixed) concentrically to the piezoelectric vibrator 11 with respect to the lower surface of the piezoelectric vibrator 11 in FIG. 1 while covering the opening 11 a of the piezoelectric vibrator 11. The diaphragm 12 has, for example, a thickness of 0.02 to 2.0 mm and an outer diameter of 6 to 60 mm. The outer diameter is larger than the inner diameter of the opening 11a of the piezoelectric vibrator 11, and the size is piezoelectric. It is appropriately selected according to the size of the vibrator 11.
前記振動板１２の前記開口１１ａに臨む部分には、厚さ方向に貫通した多数の微細孔１３ａが形成されている。この微細孔１３ａの孔径は３〜１５０μｍである。また、前記振動板１２の中央部には、その頂部から裾部へかけて曲面で構成された凸状部１３が設けられている。この凸状部１３は上方（液体の噴霧方向）へ膨出したドーム状のものである。この凸状部１３は圧電振動子１１の径方向への伸縮（振動）に伴って、上下方向に超音波振動する。前記凸状部１３の立ち上り部である基端部の直径をＲ１とし、前記圧電振動子１１の中央開口１１ａの直径（内径）をＲ２としたときに、Ｒ１とＲ２の関係が
Ｒ１≦（４／５）・Ｒ２
である。これにより、前記圧電振動子１１の超音波振動に伴い、前記凸状部１３の周囲の平面部をたわみ変形し易くすることができる。このため、霧化された液体の微粒子をより遠方まで噴霧することができる。
A large number of fine holes 13a penetrating in the thickness direction are formed in a portion of the diaphragm 12 facing the opening 11a. The diameter of the fine holes 13a is 3 to 150 μm. Further, a convex portion 13 having a curved surface is provided from the top to the skirt at the center of the diaphragm 12. The convex portion 13 has a dome shape that bulges upward (in the direction of spraying the liquid). The convex portion 13 ultrasonically vibrates in the vertical direction as the piezoelectric vibrator 11 expands and contracts (vibrates) in the radial direction. The relationship between R1 and R2 is R1 ≦ (4), where R1 is the diameter of the base end that is the rising portion of the convex portion 13 and R2 is the diameter (inner diameter) of the central opening 11a of the piezoelectric vibrator 11. / 5) ・ R2
It is. As a result, along with the ultrasonic vibration of the piezoelectric vibrator 11, it is possible to easily deform the flat portion around the convex portion 13. For this reason, the atomized liquid fine particles can be sprayed farther.
前記弾性リング２は一対のみ設けられている。この一対の弾性リング２は、前記ケーシング３と前記霧化部材１の上面（一側面）との間及び前記ケーシング３と前記霧化部材１の下面（他側面）との間で弾性変形した状態で、それぞれ前記霧化部材１と同心状にて当該霧化部材１の上面及び下面に対して接触している。
この弾性リング２としては、線径０．５〜３ｍｍ、より好ましくは線径０．５〜２．０ｍｍのＯリングが好適に用いられる。このような線径のＯリングを用いると、前記弾性リング２を霧化部材１に対して細い線状に接触させることができるので、霧化された液体の微粒子をより効果的に遠方まで噴霧することができる。
Only one pair of the elastic rings 2 is provided. The pair of elastic rings 2 are elastically deformed between the casing 3 and the upper surface (one side surface ) of the atomizing member 1 and between the casing 3 and the lower surface (other side surface ) of the atomizing member 1. Thus, they are in contact with the upper and lower surfaces of the atomizing member 1 concentrically with the atomizing member 1, respectively.
As this elastic ring 2, an O-ring having a wire diameter of 0.5 to 3 mm, more preferably a wire diameter of 0.5 to 2.0 mm is suitably used. When an O-ring having such a wire diameter is used, the elastic ring 2 can be brought into contact with the atomizing member 1 in a thin line shape, so that the atomized liquid fine particles can be more effectively sprayed far away. can do.
また、前記弾性リング２の硬さは２０〜９０ ＩＲＨＤ、より好ましくは３０〜９０ ＩＲＨＤである。これにより、霧化部材１を適度な弾力で保持して、当該霧化部材１が過度に振動するのを効果的に抑制することができる。このため、液体をより安定的に霧化させることができる。
なお、霧化部材１の上面に接触させた弾性リング２と、下面に接触させた弾性リング２とは、平均径[（内径＋外径）／２]、線径、硬さ等が同一のものが好ましく、特に平均径については同じものがよい。
The hardness of the elastic ring 2 is 20 to 90 IRHD, more preferably 30 to 90 IRHD. Thereby, the atomization member 1 can be hold | maintained with moderate elasticity, and it can suppress effectively that the said atomization member 1 vibrates excessively. For this reason, the liquid can be atomized more stably.
The elastic ring 2 in contact with the upper surface of the atomizing member 1 and the elastic ring 2 in contact with the lower surface have the same average diameter [(inner diameter + outer diameter) / 2], wire diameter, hardness, etc. In particular, the same is preferable for the average diameter.
図３に示すように、前記霧化部材１の中心を挟んだ径方向の片側において、前記弾性リング２と前記霧化部材１の片面との径方向の対向幅Ｌ１（以下「弾性リング２と霧化部材１との対向幅Ｌ１」という）の、前記圧電振動子１１の中心を挟んだ径方向の片側における径方向幅Ｌ２（以下「圧電振動子１１の径方向幅Ｌ２」という）に対する割合は、４０％以下、より好ましくは３５％以下に設定されている。これにより、霧化部材１の振動が抑制されるのを効果的に防止することができる。
弾性リング２と霧化部材１との対向幅Ｌ１は、霧化部材１に対する弾性リング２の投影幅である。弾性リングがＯリングの場合には、対向幅L１は当該Ｏリングの線径であり、弾性リングが角リングの場合には、対向幅L１は当該角リングの径方向幅である。
前記圧電振動子１１の径方向幅Ｌ２に対する弾性リング２と霧化部材１との対向幅Ｌ１の割合[（Ｌ１／Ｌ２）×１００）（％）]は、例えば同じサイズの圧電振動子１１において、弾性リング２の線径を細くしたり、太くしたりすることにより容易に設定することができる。
As shown in FIG. 3, on one side in the radial direction across the center of the atomizing member 1, a radial facing width L <b> 1 between the elastic ring 2 and one side of the atomizing member 1 (hereinafter referred to as “elastic ring 2”). The ratio of the width L1 facing the atomizing member 1) to the radial width L2 on one side in the radial direction across the center of the piezoelectric vibrator 11 (hereinafter referred to as the "radial width L2 of the piezoelectric vibrator 11"). Is set to 40% or less, more preferably 35% or less. Thereby, it can prevent effectively that the vibration of the atomization member 1 is suppressed.
The facing width L <b> 1 between the elastic ring 2 and the atomizing member 1 is a projection width of the elastic ring 2 with respect to the atomizing member 1. When the elastic ring is an O-ring, the opposing width L1 is the wire diameter of the O-ring, and when the elastic ring is a square ring, the opposing width L1 is the radial width of the angular ring.
The ratio [(L1 / L2) × 100) (%)] of the facing width L1 of the elastic ring 2 and the atomizing member 1 to the radial width L2 of the piezoelectric vibrator 11 is, for example, in the piezoelectric vibrator 11 of the same size. The diameter of the elastic ring 2 can be easily set by making it thin or thick.
前記圧電振動子１１の径方向幅Ｌ２に対する弾性リング２と霧化部材１との対向幅Ｌ１の割合[（Ｌ１／Ｌ２）×１００）（％）]の下限値は、霧化部材１を安定的に支持できる範囲で適宜選択される。この割合は５％以上、より好ましくは１０％以上である。この場合、一対の弾性リング２によって霧化部材１を安定的に支持できるので、液体を安定的に霧化させることができる。
なお、前記弾性リング２の素材としては、ニトリルゴム、フッ素ゴム、エチレンプロピレンゴム、シリコーンゴム、アクリルゴム、水素化ニトリルゴム等を挙げることができる。
The lower limit value of the ratio [(L1 / L2) × 100) (%) of the facing width L1 between the elastic ring 2 and the atomizing member 1 to the radial width L2 of the piezoelectric vibrator 11 stabilizes the atomizing member 1. The range is appropriately selected within a range that can be supported. This ratio is 5% or more, more preferably 10% or more. In this case, since the atomizing member 1 can be stably supported by the pair of elastic rings 2, the liquid can be stably atomized.
Examples of the material of the elastic ring 2 include nitrile rubber, fluorine rubber, ethylene propylene rubber, silicone rubber, acrylic rubber, and hydrogenated nitrile rubber.
ケーシング３は、上下に分離可能に二つ割りされた中空円環状のものであり、全体が合成樹脂によって形成されている。このケーシング３の上下面の開口３１の内径は、霧化部材１との間で前記弾性リング２を挟み込んで支持できるように、当該弾性リング２の内径よりも小さくなっている。前記弾性リング２はケーシング３の内面に対しても接触している。 The casing 3 has a hollow annular shape that is divided in two so as to be separable in the vertical direction, and is entirely formed of a synthetic resin. The inner diameter of the opening 31 on the upper and lower surfaces of the casing 3 is smaller than the inner diameter of the elastic ring 2 so that the elastic ring 2 can be sandwiched and supported with the atomizing member 1. The elastic ring 2 is also in contact with the inner surface of the casing 3.
吸液芯４は直径が例えば３〜４．５ｍｍの不織布で構成されており、その頂部が、振動板１２の凸状部１３に近接又は接触している。この吸液芯４の下部側は、芳香剤や殺菌剤、殺虫剤等の薬液を入れたタンク（図示せず）に浸漬されており、当該薬液を毛細管現象によって前記凸状部１３に供給することができる。 The liquid absorption core 4 is made of a nonwoven fabric having a diameter of, for example, 3 to 4.5 mm, and the top thereof is close to or in contact with the convex portion 13 of the diaphragm 12. The lower side of the liquid absorbent core 4 is immersed in a tank (not shown) containing a chemical solution such as a fragrance, a bactericide, or an insecticide, and supplies the chemical solution to the convex portion 13 by capillary action. be able to.
以上の構成の超音波霧化ユニットによれば、圧電振動子１１に高周波電圧を印加して振動板１２の凸状部１３を振動させることにより、吸液芯４を介して前記凸状部１３に供給された薬液が、毛細管現象によって当該凸状部１３の微細孔１３ａに導入され、霧化された状態で上方に噴霧される。
この際、前記弾性リング２と霧化部材１との対向幅Ｌ１が前記圧電振動子１１の径方向幅Ｌ２に対して４０％以下であるため、前記弾性リング２によって霧化部材１の振動が抑制されるのを防止することができる。このため、霧化部材１によって霧化された薬液の微粒子を、より遠方まで噴霧することができる。例えば、凸型振動板を用いた本発明の超音波霧化ユニット及び従来の超音波霧化ユニット[（Ｌ１／Ｌ２）×１００＝１００％]について、それぞれ同じ条件で薬液の微粒子を上方へ噴射させたところ、従来の超音波霧化ユニットの最大噴射高さが１０〜１５ｃｍであるのに対して、本発明の超音波霧化ユニットの最大噴射高さは、従来品の２〜３倍になることが確認されている。
According to the ultrasonic atomizing unit having the above configuration, the convex portion 13 is interposed via the liquid absorption core 4 by applying a high frequency voltage to the piezoelectric vibrator 11 to vibrate the convex portion 13 of the diaphragm 12. The chemical solution supplied to is introduced into the micropores 13a of the convex portion 13 by capillary action and sprayed upward in an atomized state.
At this time, since the facing width L1 between the elastic ring 2 and the atomizing member 1 is 40% or less with respect to the radial width L2 of the piezoelectric vibrator 11, the vibration of the atomizing member 1 is caused by the elastic ring 2. It can be prevented from being suppressed. For this reason, the fine particles of the chemical liquid atomized by the atomizing member 1 can be sprayed farther. For example, for the ultrasonic atomizing unit of the present invention using the convex diaphragm and the conventional ultrasonic atomizing unit [(L1 / L2) × 100 = 100%], the fine particles of the chemical solution are jetted upward under the same conditions. As a result, the maximum injection height of the conventional ultrasonic atomization unit is 10 to 15 cm, whereas the maximum injection height of the ultrasonic atomization unit of the present invention is two to three times that of the conventional product. It has been confirmed that
なお、前記円環状の弾性部材２としては、前記Ｏリングに代えて、断面形状が楕円、四角形、三角形あるいは菱形等のリングであってもよく、また、Ｄ字型、Ｘ字型、Ｔ字型などのリングであってもよい。
また、この円環状の弾性部材は、周方向に完全につながって連続している必要はなく、周方向に一箇所切れ目が入っていてもよく、周方向に数箇所間欠的に切れ目が入っていてもよい。
前記振動板１２の凸状部１３は、頂部が曲面で構成されたドーム状のみならず、当該頂部が平面で構成された円錐台状であってもよく、その形状は任意である。
さらに、前記実施の形態においては、振動板１２として凸状部１３を噴霧方向に突出させた凸型振動板を例示したが、凸状部１３を噴霧方向と反対方向に突出させて凹状部２３とした凹型振動板であってもよい（図３の点線参照）。この他、前記振動板１２は、中央部に凸状部及び凹状部を有しない平板型振動板であってもよい。
The annular elastic member 2 may be a ring having a cross-sectional shape of an ellipse, a quadrangle, a triangle, a rhombus, etc., instead of the O-ring, and is also D-shaped, X-shaped, T-shaped. It may be a ring such as a mold.
Further, the annular elastic member does not need to be continuously connected in the circumferential direction, and may have one cut in the circumferential direction, and may have several intermittent cuts in the circumferential direction. May be.
The convex portion 13 of the diaphragm 12 is not limited to a dome shape whose top portion is a curved surface, but may be a truncated cone shape whose top portion is a flat surface, and its shape is arbitrary.
Furthermore, in the said embodiment, although the convex-shaped diaphragm which made the convex part 13 protrude in the spraying direction was illustrated as the diaphragm 12, the convex-shaped part 13 protrudes in the opposite direction to the spraying direction, and the concave part 23 is shown. A concave diaphragm may be used (see the dotted line in FIG. 3). In addition, the diaphragm 12 may be a flat plate diaphragm that does not have a convex portion and a concave portion in the center.
本実施の形態においては、円形薄板状の振動板１２が圧電振動子１１の開口１１aを完全に覆うものを例示したが、矩形薄板状の振動板を用い、この振動板を圧電振動子１１の開口１１aを跨ぐように掛け渡し、当該振動板の両端部を圧電振動子１１の一方の面に固着するようにしてもよい。
また、この発明に係る超音波霧化ユニットは、図４に示すように、吸液芯４を使用することなく薬液を収容する容器７から薬液を直接振動板１２に供給するものにも適用して実施することができる。
［効果確認試験］
In the present embodiment, an example in which the circular thin plate-like diaphragm 12 completely covers the opening 11 a of the piezoelectric vibrator 11 is illustrated, but a rectangular thin plate-like diaphragm is used, and this diaphragm is used as the piezoelectric vibrator 11. It is possible to span the opening 11a so that both ends of the diaphragm are fixed to one surface of the piezoelectric vibrator 11.
Further, the ultrasonic atomizing unit according to the present invention is also applied to an apparatus for supplying chemical liquid directly to the diaphragm 12 from a container 7 containing chemical liquid without using the liquid absorbent core 4 as shown in FIG. Can be implemented.
[Effectiveness confirmation test]
（１）効果確認試験１
＜実施例Ａ１〜Ａ１２＞
実施例Ａ１〜Ａ１２として以下の仕様の超音波霧化ユニットを作製した。この実施例の超音波霧化ユニットは、図１に示すものと同じ構造のものである。
i．霧化部材
圧電振動子：
外径１５ｍｍ、内径５ｍｍ、厚み０．４ｍｍの圧電セラミックス
振動板：
凸型振動板
・凸状部の基端部の直径３ｍｍ
・微細孔の孔径１０μｍ
・厚み０．０４ｍｍ（ニッケル製）、
ii．円環状の弾性部材
表１に示すサイズのＯリング（硬さ５０ ＩＲＨＤ）
＜比較例Ａ１〜Ａ３＞
比較例Ａ１〜Ａ３として、前記実施例Ａ１〜Ａ１２と同じ構造でサイズの異なる超音波霧化ユニットを作製した。この比較例のＯリングのサイズを表１に示す。
なお、表１に示す対向割合（％）は、Ｏリングの線径（＝Ｏリングと霧化部材との対向幅Ｌ1）を圧電振動子の径方向幅（Ｌ２）で割り、１００をかけた値である。この点は、Ｏリングに関して他の表においても同様である。
＜試験条件及び結果＞
(1) Effect confirmation test 1
<Examples A1 to A12>
As Examples A1 to A12, ultrasonic atomizing units having the following specifications were produced. The ultrasonic atomizing unit of this embodiment has the same structure as that shown in FIG.
i. Atomizing member Piezoelectric vibrator:
Piezoelectric ceramics with an outer diameter of 15 mm, an inner diameter of 5 mm, and a thickness of 0.4 mm
Convex diaphragm-3 mm diameter at the base end of the convex part
・ Pore diameter of micro hole 10μm
・ Thickness 0.04mm (made of nickel),
ii. Annular elastic member O-ring of the size shown in Table 1 (hardness 50 IRHD)
<Comparative Examples A1 to A3>
As Comparative Examples A1 to A3, ultrasonic atomizing units having the same structure as that of Examples A1 to A12 and having different sizes were produced. Table 1 shows the size of the O-ring of this comparative example.
Note that the facing ratio (%) shown in Table 1 is obtained by dividing the O-ring wire diameter (= the facing width L1 between the O-ring and the atomizing member) by the radial width (L2) of the piezoelectric vibrator and multiplying by 100. Value. This point is the same in other tables regarding the O-ring.
<Test conditions and results>
実施例Ａ１〜Ａ１２及び比較例Ａ１〜Ａ３の超音波霧化ユニットを用いて、効果確認試験を実施した。この試験では、圧電振動子に対して電圧３５Ｖｐ−ｐ、高周波周波数１１０ｋＨｚの電力を供給し、噴霧液を上方へ向けて噴射したときの実施例及び比較例の最大噴霧高さを測定した。
また、噴霧液として石油系溶剤（商品名「エクソールＤ１１０」）を用いた。この効果確認試験の結果を表１に示す。
The effect confirmation test was implemented using the ultrasonic atomization unit of Examples A1-A12 and Comparative Examples A1-A3. In this test, power of a voltage of 35 Vp-p and a high frequency of 110 kHz was supplied to the piezoelectric vibrator, and the maximum spray heights of the example and the comparative example were measured when the spray liquid was sprayed upward.
In addition, a petroleum solvent (trade name “Exsol D110”) was used as the spray liquid. The results of this effect confirmation test are shown in Table 1.
表１より、実施例Ａ１〜Ａ１２は比較例Ａ１〜Ａ３に比べて噴霧高さが高くなることが明らかである。すなわち、Ｏリングと霧化部材との対向幅（Ｌ１）の最大値が、圧電振動子の径方向幅（Ｌ２）に対して４０％以下である場合に、霧化部材によって霧化された薬液の微粒子を、効果的に遠方まで噴霧できることが明らかである。 From Table 1, it is clear that the spray heights of Examples A1 to A12 are higher than those of Comparative Examples A1 to A3. That is, when the maximum value of the opposing width (L1) between the O-ring and the atomizing member is 40% or less with respect to the radial width (L2) of the piezoelectric vibrator, the chemical liquid atomized by the atomizing member It is clear that the fine particles can be effectively sprayed far away.
（２）効果確認試験２
＜実施例Ｂ１〜Ｂ１２＞
実施例Ｂ１〜Ｂ１２として、振動板の微細孔の孔径を６μｍにした以外は前記実施例Ａ１〜Ａ１２と同じ仕様の超音波霧化ユニットを作製した。
＜比較例Ｂ１〜Ｂ３＞
比較例Ｂ１〜Ｂ３として、振動板の微細孔の孔径を６μｍにした以外は前記比較例Ａ１〜Ａ３と同じ仕様の超音波霧化ユニットを作製した。
(2) Effect confirmation test 2
<Examples B1 to B12>
As Examples B1 to B12, ultrasonic atomization units having the same specifications as those of Examples A1 to A12 were prepared except that the diameter of the micropores of the diaphragm was changed to 6 μm.
<Comparative Examples B1 to B3>
As Comparative Examples B1 to B3, ultrasonic atomization units having the same specifications as those of Comparative Examples A1 to A3 were prepared except that the diameter of the micropores of the diaphragm was changed to 6 μm.
＜試験条件及び結果＞
実施例Ｂ１〜Ｂ１２及び比較例Ｂ１〜Ｂ３の超音波霧化ユニットを用いて、効果確認試験１と同じ条件で効果確認試験を実施した。
この効果確認試験の結果を表２に示す。
<Test conditions and results>
The effect confirmation test was implemented on the same conditions as the effect confirmation test 1 using the ultrasonic atomization unit of Example B1-B12 and Comparative Example B1-B3.
The results of this effect confirmation test are shown in Table 2.
表２より、振動板の微細孔の孔径が６μｍである実施例Ｂ１〜Ｂ１２についても、比較例Ｂ１〜Ｂ３に比べて噴霧高さが高くなることが明らかである。 From Table 2, it is clear that the spray heights of Examples B1 to B12 in which the diameters of the fine holes of the diaphragm are 6 μm are higher than those of Comparative Examples B1 to B3.
（３）効果確認試験３
＜実施例Ｃ１〜Ｃ１２＞
実施例Ｃ１〜Ｃ１２として、振動板の微細孔の孔径を１２μｍにした以外は前記実施例Ａ１〜Ａ１２と同じ仕様の超音波霧化ユニットを作製した。
＜比較例Ｃ１〜Ｃ３＞
比較例Ｃ１〜Ｃ３として、振動板の微細孔の孔径を１２μｍにした以外は前記比較例Ａ１〜Ａ３と同じ仕様の超音波霧化ユニットを作製した。
＜試験条件及び結果＞
(3) Effect confirmation test 3
<Examples C1 to C12>
As Examples C1 to C12, ultrasonic atomizing units having the same specifications as those of Examples A1 to A12 were prepared except that the diameter of the fine holes of the diaphragm was changed to 12 μm.
<Comparative Examples C1-C3>
As Comparative Examples C1 to C3, ultrasonic atomization units having the same specifications as those of Comparative Examples A1 to A3 were prepared except that the diameter of the micropores of the diaphragm was 12 μm.
<Test conditions and results>
実施例Ｃ１〜Ｃ１２及び比較例Ｃ１〜Ｃ３の超音波霧化ユニットを用いて、効果確認試験１と同じ条件で効果確認試験を実施した。
この効果確認試験の結果を表３に示す。
Using the ultrasonic atomization units of Examples C1 to C12 and Comparative Examples C1 to C3, an effect confirmation test was performed under the same conditions as the effect confirmation test 1.
The results of this effect confirmation test are shown in Table 3.
表３より、振動板の微細孔の孔径が１２μｍである実施例Ｃ１〜Ｃ１２についても、比較例Ｃ１〜Ｃ３に比べて噴霧高さが高くなることが明らかである。 From Table 3, it is clear that the spray height is higher also in Examples C1 to C12 where the diameter of the micropores of the diaphragm is 12 μm compared to Comparative Examples C1 to C3.
（４）効果確認試験４
＜実施例Ｄ１〜Ｄ９＞
実施例Ｄ１〜Ｄ９として、硬さが異なるＯリングを用いた以外は前記実施例Ａ１、実施例Ａ５及び実施例Ａ９とそれぞれ同じ仕様の超音波霧化ユニットを作製した。
＜試験条件及び結果＞
(4) Effect confirmation test 4
<Examples D1 to D9>
As Examples D1 to D9, ultrasonic atomization units having the same specifications as those of Example A1, Example A5, and Example A9 were prepared except that O-rings having different hardnesses were used.
<Test conditions and results>
実施例Ｄ１〜Ｄ９の超音波霧化ユニットを用いて、効果確認試験１と同じ条件で効果確認試験を実施した。
この効果確認試験の結果を表４に示す。なお、参考までに表１の実施例Ａ１、実施例Ａ５及び実施例Ａ９の試験結果も表４に併記する。
Using the ultrasonic atomization units of Examples D1 to D9, an effect confirmation test was performed under the same conditions as in Effect Confirmation Test 1.
The results of this effect confirmation test are shown in Table 4. For reference, the test results of Example A1, Example A5, and Example A9 in Table 1 are also shown in Table 4.
表４より、Ｏリングのサイズが同じ超音波霧化ユニットについては、噴霧高さがほぼ同じであることが明らかである。従って、Ｏリングの硬さは噴霧高さにほとんど影響しないことが分かる。 From Table 4, it is clear that the ultrasonic atomization units having the same O-ring size have substantially the same spray height. Therefore, it can be seen that the hardness of the O-ring hardly affects the spray height.
（５）効果確認試験５
＜実施例Ｅ１〜Ｅ１２＞
実施例Ｅ１〜Ｅ１２として以下の仕様の超音波霧化ユニットを作製した。この実施例Ｅ１〜Ｅ１２の超音波霧化ユニットは、凹型振動板を用いた以外は図１に示すものと同じ構造のものである。
i．霧化部材
圧電振動子：
外径１５ｍｍ、内径５ｍｍ、厚み０．４ｍｍの圧電セラミックス
振動板：
凹型振動板
・凹状部の基端部の直径３ｍｍ
・微細孔の孔径１０μｍ
・厚み０．０４ｍｍ（ニッケル製）
ii．円環状の弾性部材
表５に示すサイズのＯリング（硬さ５０ ＩＲＨＤ）
＜比較例Ｅ１〜Ｅ３＞
比較例Ｅ１〜Ｅ３として、前記実施例Ｅ１〜Ｅ１２と同じ構造でサイズが異なる超音波霧化ユニットを作製した。この比較例のＯリングのサイズを表５に示す。
＜試験条件及び結果＞
(5) Effect confirmation test 5
<Examples E1-E12>
As Examples E1 to E12, ultrasonic atomizing units having the following specifications were produced. The ultrasonic atomizing units of Examples E1 to E12 have the same structure as that shown in FIG. 1 except that a concave diaphragm is used.
i. Atomizing member Piezoelectric vibrator:
Piezoelectric ceramics with an outer diameter of 15 mm, an inner diameter of 5 mm, and a thickness of 0.4 mm
Concave diaphragm ・ The diameter of the base end of the concave part is 3 mm.
・ Pore diameter of micro hole 10μm
・ Thickness 0.04mm (made of nickel)
ii. Annular elastic member O-ring of the size shown in Table 5 (hardness 50 IRHD)
<Comparative Examples E1-E3>
As Comparative Examples E1 to E3, ultrasonic atomization units having the same structure as that of Examples E1 to E12 but different in size were produced. Table 5 shows the size of the O-ring of this comparative example.
<Test conditions and results>
実施例Ｅ１〜Ｅ１２及び比較例Ｅ１〜Ｅ３の超音波霧化ユニットを用いて、効果確認試験を実施した。この試験では、圧電振動子に対して電圧４５Ｖｐ−ｐ、高周波周波数１１０ｋＨｚの電力を供給し、実施例及び比較例の最大噴霧高さを測定した。
また、噴霧液として石油系溶剤（商品名「エクソールＤ１１０」）を用いた。この効果確認試験の結果を表５に示す。
The effect confirmation test was implemented using the ultrasonic atomization unit of Examples E1-E12 and Comparative Examples E1-E3. In this test, power of a voltage of 45 Vp-p and a high frequency of 110 kHz was supplied to the piezoelectric vibrator, and the maximum spray heights of the examples and comparative examples were measured.
In addition, a petroleum solvent (trade name “Exsol D110”) was used as the spray liquid. The results of this effect confirmation test are shown in Table 5.
表５より、Ｏリングと霧化部材との対向幅（Ｌ１）の最大値が、圧電振動子の径方向幅（Ｌ２）に対して４０％以下である場合に、霧化部材によって霧化された薬液の微粒子を、効果的に遠方まで噴霧することができることが分かる。ただし、その噴霧高さは、実施例Ｅ１〜Ｅ１２よりも、凸型振動板を用いた前記実施例Ａ１〜Ａ１２の方が高いことが認められた。 According to Table 5, when the maximum value of the opposing width (L1) between the O-ring and the atomizing member is 40% or less with respect to the radial width (L2) of the piezoelectric vibrator, the atomizing member atomizes. It can be seen that fine particles of the chemical solution can be effectively sprayed far away. However, the spray height was recognized to be higher in Examples A1 to A12 using the convex diaphragm than Examples E1 to E12.
（６）効果確認試験６
振動板の微細孔の孔径を６μｍ及び１２μｍにした以外は前記実施例Ｅ１〜Ｅ１２と同じ仕様の超音波霧化ユニットを作製して、効果確認試験５と同じ条件で効果確認試験を実施した。この結果、振動板の微細孔の孔径が６μｍ及び１２μｍである場合でも、噴霧高さは、実施例Ｅ１〜Ｅ１２と同等であることが確認された。
(6) Effect confirmation test 6
An ultrasonic atomizing unit having the same specifications as those of Examples E1 to E12 was prepared except that the diameters of the fine holes of the diaphragm were 6 μm and 12 μm, and an effect confirmation test was performed under the same conditions as the effect confirmation test 5. As a result, it was confirmed that the spray height was equivalent to that of Examples E1 to E12 even when the diameters of the fine holes of the diaphragm were 6 μm and 12 μm.
（７）効果確認試験７
ＩＲＨＤ硬さが３０、８０及び９０であるＯリングを用いた以外は前記実施例Ｅ１〜Ｅ１２とそれぞれ同じ仕様の超音波霧化ユニットを作製して、効果確認試験１と同じ条件で効果確認試験を実施した。この結果、Ｏリングのサイズが同じ超音波霧化ユニットについては、噴霧高さがほぼ同じであった。従って、凹型振動板を用いた超音波霧化ユニットについても、Ｏリングの硬さは噴霧高さにほとんど影響しないことが確認された。
(7) Effect confirmation test 7
Except for using O-rings with IRHD hardness of 30, 80 and 90, ultrasonic atomization units having the same specifications as those of Examples E1 to E12 were prepared, and effect confirmation test under the same conditions as effect confirmation test 1 Carried out. As a result, for the ultrasonic atomizing units having the same O-ring size, the spray height was almost the same. Therefore, it was confirmed that the hardness of the O-ring hardly affects the spray height even in the ultrasonic atomizing unit using the concave diaphragm.
（８）効果確認試験８
＜実施例Ｆ１〜Ｆ１２＞
実施例Ｆ１〜Ｆ１２として以下の仕様の超音波霧化ユニットを作製した。この実施例の超音波霧化ユニットは、平板型振動板を用いた以外は図１に示すものと同じ構造のものである。
i．霧化部材
圧電振動子：
外径１５ｍｍ、内径５ｍｍ、厚み０．４ｍｍの圧電セラミックス
振動板：
・平板型振動板
・厚み０．０４ｍｍ（ニッケル製）
ii．円環状の弾性部材
表６に示すサイズのＯリング（硬さは５０ ＩＲＨＤ）
＜比較例Ｆ１〜Ｆ３＞
比較例Ｆ１〜Ｆ３として、前記実施例Ｆ１〜Ｆ１２と同じ構造でサイズが異なる超音波霧化ユニットを作製した。この比較例のＯリングのサイズを表６に示す。
＜試験条件及び結果＞
(8) Effect confirmation test 8
<Examples F1 to F12>
As Examples F1 to F12, ultrasonic atomization units having the following specifications were produced. The ultrasonic atomizing unit of this embodiment has the same structure as that shown in FIG. 1 except that a flat diaphragm is used.
i. Atomizing member Piezoelectric vibrator:
Piezoelectric ceramics with an outer diameter of 15 mm, an inner diameter of 5 mm, and a thickness of 0.4 mm
・ Plate type diaphragm ・ Thickness 0.04mm (made of nickel)
ii. Annular elastic member O-ring of the size shown in Table 6 (hardness is 50 IRHD)
<Comparative Examples F1-F3>
As Comparative Examples F1 to F3, ultrasonic atomization units having the same structure as that of Examples F1 to F12 and having different sizes were produced. Table 6 shows the size of the O-ring of this comparative example.
<Test conditions and results>
実施例Ｆ１〜Ｆ１２及び比較例Ｆ１〜Ｆ３の超音波霧化ユニットを用いて、効果確認試験を実施した。この試験では、圧電振動子に対して電圧４５Ｖｐ−ｐ、高周波周波数１１０ｋＨｚの電力を供給し、実施例及び比較例の最大噴霧高さを測定した。
また、噴霧液として石油系溶剤（商品名「エクソールＤ１１０」）を用いた。効果確認試験結果を表６に示す。
The effect confirmation test was implemented using the ultrasonic atomization unit of Examples F1-F12 and Comparative Examples F1-F3. In this test, power of a voltage of 45 Vp-p and a high frequency of 110 kHz was supplied to the piezoelectric vibrator, and the maximum spray heights of the examples and comparative examples were measured.
In addition, a petroleum solvent (trade name “Exsol D110”) was used as the spray liquid. Table 6 shows the results of the effect confirmation test.
表６より、弾性リングと霧化部材との対向幅（Ｌ１）の最大値が、圧電振動子の径方向幅（Ｌ２）に対して４０％以下である場合に、霧化部材によって霧化された薬液の微粒子を、効果的に遠方まで噴霧することができることが分かる。ただし、噴霧高さは、凸型振動板を用いた実施例Ａ１〜Ａ１２及び凹型振動板を用いた実施例Ｅ１〜Ｅ１２の方が、実施例Ｆ１〜Ｆ１２よりも高いことが認められた。 According to Table 6, when the maximum value of the opposing width (L1) between the elastic ring and the atomizing member is 40% or less with respect to the radial width (L2) of the piezoelectric vibrator, the atomizing member atomizes. It can be seen that fine particles of the chemical solution can be effectively sprayed far away. However, it was recognized that the spray heights of Examples A1 to A12 using a convex diaphragm and Examples E1 to E12 using a concave diaphragm were higher than those of Examples F1 to F12.
（９）効果確認試験９
振動板の微細孔の孔径を６μｍ及び１２μｍにした以外は前記実施例Ｆ１〜Ｆ１２と同じ仕様の超音波霧化ユニットを作製し、効果確認試験５と同じ条件で効果確認試験を実施した。この結果、振動板の微細孔の孔径が６μｍ及び１２μｍである場合でも、噴霧高さは、実施例F１〜F１２と同等であることが確認された。
(9) Effect confirmation test 9
An ultrasonic atomization unit having the same specifications as those of Examples F1 to F12 was prepared except that the diameters of the fine holes of the diaphragm were 6 μm and 12 μm, and an effect confirmation test was performed under the same conditions as the effect confirmation test 5. As a result, it was confirmed that the spray height was equivalent to that of Examples F1 to F12 even when the diameters of the fine holes of the diaphragm were 6 μm and 12 μm.
（１０）効果確認試験１０
ＩＲＨＤ硬さが３０、８０及び９０であるＯリングを用いた以外は前記実施例Ｆ１〜Ｆ１２とそれぞれ同じ仕様の超音波霧化ユニットを作製し、効果確認試験１と同じ条件で効果確認試験を実施した。この結果、Ｏリングのサイズが同じ超音波霧化ユニットについては、噴霧高さがほぼ同じであった。従って、平板型振動板を用いた超音波霧化ユニットについても、Ｏリングの硬さは噴霧高さにほとんど影響しないことが確認された。
(10) Effect confirmation test 10
Except for using O-rings with IRHD hardness of 30, 80 and 90, ultrasonic atomization units having the same specifications as those of Examples F1 to F12 were prepared, and the effect confirmation test was performed under the same conditions as effect confirmation test 1. Carried out. As a result, for the ultrasonic atomizing units having the same O-ring size, the spray height was almost the same. Therefore, it was confirmed that the hardness of the O-ring hardly affects the spray height even for the ultrasonic atomizing unit using the flat plate-type diaphragm.
（１１）効果確認試験１１
実施例Ｇ１〜Ｇ６として以下の仕様の超音波霧化ユニットを作製した。この実施例の超音波霧化ユニットは、振動板として凸型振動板、凹型振動板及び平板型振動板を用い、弾性リングとして角リングを用いたものである。
i．霧化部材
圧電振動子：
外径１５ｍｍ、内径５ｍｍ、厚み０．４ｍｍの圧電セラミックス
振動板：
ａ．凸型振動板
・凸状部の基端部の直径３ｍｍ
ｂ．凹型振動板
・凹状部の基端部の直径３ｍｍ
ｃ．平板型振動板
・ａ〜ｃの各振動板の厚み ０．０４ｍｍ（ニッケル製）
・ａ〜ｃの各振動板の微細孔の口径 １０μｍ
ii．円環状の弾性部材
表７に示すサイズの断面角形の角リング（硬さ５５ ＩＲＨＤ）
＜比較例G１〜G３＞
比較例G１〜G３として、前記実施例G１〜G６と同じ構造でサイズが異なる超音波霧化ユニットを作製した。この比較例の角リングのサイズを表７に示す。
＜試験条件及び結果＞
(11) Effect confirmation test 11
As Examples G1 to G6, ultrasonic atomization units having the following specifications were produced. The ultrasonic atomizing unit of this embodiment uses a convex diaphragm, a concave diaphragm and a flat diaphragm as the diaphragm, and a square ring as the elastic ring.
i. Atomizing member Piezoelectric vibrator:
Piezoelectric ceramics with an outer diameter of 15 mm, an inner diameter of 5 mm, and a thickness of 0.4 mm
a. Convex diaphragm
・ Diameter of base end of convex part 3mm
b. Concave diaphragm
・ The diameter of the base end of the concave part is 3mm
c. Flat type diaphragm ・ Thickness of each diaphragm of a to c 0.04 mm (made of nickel)
-Diameter of fine hole of each diaphragm of a to c 10 μm
ii. Ring-shaped elastic member Square ring with a cross-section of the size shown in Table 7 (hardness 55 IRHD)
<Comparative Examples G1-G3>
As Comparative Examples G1 to G3, ultrasonic atomization units having the same structure as that of Examples G1 to G6 and having different sizes were produced. Table 7 shows the size of the corner ring of this comparative example.
<Test conditions and results>
実施例G１〜G６及び比較例G１〜G３の超音波霧化ユニットを用いて、効果確認試験を実施した。この試験では、圧電振動子に対して以下の電圧で高周波周波数１１０ｋＨｚの電力を供給し、噴霧液を上方へ向けて噴射したときの実施例G１〜G６及び比較例G１〜G３の最大噴霧高さを測定した。
凸型振動板：３５Ｖｐ−ｐ
凹型振動板：４５Ｖｐ−ｐ
平板型振動板：４５Ｖｐ−ｐ
また、噴霧液として石油系溶剤（商品名「エクソールＤ１１０」）を用いた。この効果確認試験の結果を表７に示す。
なお、表７に示す対向割合（％）は、角リングの径方向幅（＝角リングと霧化部材との対向幅Ｌ1）を圧電振動子の径方向幅（Ｌ２）で割り、１００をかけた値である。
The effect confirmation test was implemented using the ultrasonic atomization unit of Examples G1-G6 and Comparative Examples G1-G3. In this test, the maximum spray height of Examples G1 to G6 and Comparative Examples G1 to G3 when electric power of a high frequency of 110 kHz is supplied to the piezoelectric vibrator at the following voltage and the spray liquid is sprayed upward. Was measured.
Convex diaphragm: 35 Vp-p
Concave diaphragm: 45Vp-p
Flat plate diaphragm: 45Vp-p
In addition, a petroleum solvent (trade name “Exsol D110”) was used as the spray liquid. The results of this effect confirmation test are shown in Table 7.
The facing ratio (%) shown in Table 7 is obtained by dividing the radial width of the square ring (= the facing width L1 between the square ring and the atomizing member) by the radial width (L2) of the piezoelectric vibrator and multiplying by 100. Value.
表７より、実施例Ｇ１〜Ｇ６は比較例Ｇ１〜Ｇ３に比べて噴霧高さが高いことが明らかである。従って、弾性リングとして断面形状が四角形の角形リングを用いた場合でも、Ｏリングを用いた場合と同様な効果を奏することが分かる。 From Table 7, it is clear that Examples G1-G6 have higher spray heights than Comparative Examples G1-G3. Therefore, it can be seen that even when a square ring having a square cross-sectional shape is used as the elastic ring, the same effect as that obtained when the O-ring is used can be obtained.
１ 霧化部材
１１ 圧電振動子
１１ａ 開口
１２ 振動板
１３ 凸状部
１３ａ 微細孔
２ 弾性リング（弾性部材）
３ ケーシング（保持部材）
Ｌ１ 弾性リングと霧化部材との対向幅
Ｌ２ 圧電振動子の径方向幅
DESCRIPTION OF SYMBOLS 1 Atomization member 11 Piezoelectric vibrator 11a Opening 12 Diaphragm 13 Convex part 13a Micro hole 2 Elastic ring (elastic member)
3 Casing (holding member)
L1 Opposite width between elastic ring and atomizing member L2 Radial width of piezoelectric vibrator
Claims (7)
前記霧化部材の両面のそれぞれに添わせた状態で当該霧化部材と同心状に配置された一対の円環状の弾性部材と、
前記一対の弾性部材を介して前記霧化部材を弾性的に挟み込んで保持する保持部材と、を備える超音波霧化ユニットであって、
前記霧化部材の中心を挟んだ径方向の片側における前記円環状の弾性部材と前記霧化部材の片面との径方向の最大対向幅が、前記圧電振動子の中心を挟んだ径方向の片側における径方向幅に対して４０％であり、
前記振動板の外径が、前記圧電振動子の内径よりも大きく、かつ当該圧電振動子の外径よりも小さい径であり、
前記圧電振動子と振動板とが厚さ方向に接合しており、
前記一対の弾性部材の一方の弾性部材が、前記霧化部材の一側面とこの一側面に対向する保持部材の内面との間に当該霧化部材の厚さ方向のみに弾性収縮した状態で挟まれており、当該一対の弾性部材の他方の弾性部材が、前記霧化部材の他側面とこの他側面に対向する保持部材の内面との間に当該霧化部材の厚さ方向のみに弾性収縮した状態で挟まれており、
前記円環状の弾性部材がＯリングであることを特徴とする超音波霧化ユニット。 A circular thin plate-shaped piezoelectric vibrator having an opening at the center, and a diaphragm having a large number of fine holes penetrating in the thickness direction and attached to one side of the piezoelectric vibrator in a state of facing the opening An atomizing member that atomizes the liquid by ultrasonically vibrating the diaphragm by the piezoelectric vibrator;
A pair of annular elastic members disposed concentrically with the atomizing member in a state of being attached to both surfaces of the atomizing member;
A holding member that elastically sandwiches and holds the atomization member via the pair of elastic members, and an ultrasonic atomization unit,
The maximum opposing width in the radial direction between the annular elastic member and one side of the atomizing member on one side in the radial direction across the center of the atomizing member is one side in the radial direction across the center of the piezoelectric vibrator. 40% der the radial direction width of is,
The outer diameter of the diaphragm is larger than the inner diameter of the piezoelectric vibrator and smaller than the outer diameter of the piezoelectric vibrator;
The piezoelectric vibrator and the diaphragm are joined in the thickness direction,
One elastic member of the pair of elastic members is sandwiched between one side surface of the atomizing member and the inner surface of the holding member facing the one side surface in an elastically contracted state only in the thickness direction of the atomizing member. The other elastic member of the pair of elastic members is elastically contracted only in the thickness direction of the atomizing member between the other side surface of the atomizing member and the inner surface of the holding member facing the other side surface. Is sandwiched between
Ultrasonic atomizing unit elastic member of said annular and said O-ring der Rukoto.
Ｒ１≦（４／５）・Ｒ２
である請求項２記載の超音波霧化ユニット。 When the diameter of the base end portion of the convex portion is R1, and the diameter of the opening of the central portion of the piezoelectric vibrator is R2, the relationship between R1 and R2 is R1 ≦ (4/5) · R2.
The ultrasonic atomizing unit according to claim 2.
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