JP5980110B2 - Diffusion bonding jig and diffusion bonding method - Google Patents

Description

  The present invention relates to a diffusion bonding jig and a diffusion bonding method using the jig.

  In the manufacture of a heat sink having a refrigerant flow path therein, diffusion bonding is performed as a method of bonding a plurality of members to be bonded (base materials). Diffusion bonding uses the diffusion of atoms generated on the bonding surface by heating at a temperature lower than the melting point of the base material in a state where the member to be bonded is pressurized and held in a vacuum or inert atmosphere. Welding method. As the base material, metals such as aluminum, copper, nickel, stainless steel and titanium are used.

  For example, in Patent Document 1, diffusion bonding is performed in which pressure is applied to a member to be bonded by sandwiching a backing plate for each lot to which the members to be bonded are bonded, and further sandwiching a base plate and a pressing plate via spacers above and below them. A method is presented. In this example, the applied pressure is adjusted by adjusting the amount of compression of the heat-resistant spring installed on the upper part of the push plate.

  Further, for example, Patent Document 2 proposes a high pressure diffusion bonding apparatus having a mechanism in which a member to be bonded is sandwiched with a jig (carbon die) and pressurized using a cylinder that can be driven by air or hydraulic pressure. In this example, a structure in which a carbon sheet is sandwiched between jigs made of a carbon die is configured such that pressure is applied to the dimensional accuracy of the members to be joined. Moreover, even if a dimensional change occurs when the member to be joined is in a high temperature state, the carbon sheet is deformed and stable pressurization is realized.

Japanese Patent No. 2540775 JP 2008-30097 A

  In the diffusion bonding as described above, it is important that the bonding surface of the members to be bonded is sufficiently adhered at the initial stage of the diffusion bonding so that there is no gap in the bonding surface. For this purpose, it is necessary to apply pressure to the member to be joined to such an extent that the unevenness of the joining surface is deformed. However, in the prior art, since there is a space outside the joint surface, the resistance of atom movement due to pressure is smaller at the end than at the center of the joint surface, and the material tends to spread laterally, and the amount of deformation in the thickness direction is small. growing. As a result, the end portion has a smaller surface pressure than the center portion, and there is a problem that the contact state is not sufficient (or is not in close contact), resulting in a poor bonding state.

  In the diffusion bonding method described in Patent Document 1, since the member to be bonded is pressurized through a flat plate made of carbon or the like, the surface pressure at the end of the bonding surface is reduced for the reason described above, and the bonding surface The joining state becomes worse at the end. In the diffusion bonding method described in Patent Document 2, a carbon sheet is sandwiched between jigs made of a carbon die to achieve uniform pressurization. Since it is a rigid carbon die, the above-mentioned problems are not solved, and the joining state becomes worse at the end of the joining surface.

  Furthermore, when the joined body formed by diffusion joining has a hollow structure such as a heat sink having a coolant channel therein, when the member to be joined is pressurized via a jig made of a rigid body such as carbon or metal. There is a problem that the upper and lower surfaces of the hollow portion are deformed to be recessed, resulting in a defect.

  The present invention has been made in order to solve the above-described problems, and a first object of the present invention is to eliminate insufficient pressurization at the end of the joint surface and to obtain uniform pressurization over the entire joint surface. It is to provide a diffusion bonding jig and a diffusion bonding method.

  A second object of the present invention is to provide a diffusion bonding jig and a diffusion bonding method that do not cause deformation in which the upper and lower surfaces of the hollow portion are recessed when the bonded body has a hollow structure.

The diffusion bonding jig according to the present invention is a diffusion bonding in which a plurality of members to be bonded are vertically stacked and heated and pressed in a vacuum or an inert atmosphere to form a bonded body having a hollow portion of a predetermined shape . A diffusion bonding jig to be used, comprising: a sheet-shaped jig made of an elastic body arranged so as to be in direct contact with the uppermost surface and the lowermost surface of a plurality of members to be bonded; A plate-like jig made of a rigid body is arranged so as to sandwich the member to be joined from above and below , and the sheet-like jig has a hole having a shape similar to a predetermined shape in a portion corresponding to the hollow portion .

Further, the diffusion bonding jig is used in diffusion bonding in which a plurality of members to be bonded are heated and pressed in a vertical direction in a vacuum or an inert atmosphere to form a bonded body having a hollow portion having a predetermined shape. A sheet-like jig made of an elastic body arranged so as to be in direct contact with the uppermost surface and the lowermost face of the plurality of members to be joined, and the plurality of members to be joined from above and below via the sheet-like jig. A plate-shaped jig made of a rigid body is provided , and the plate-shaped jig has a hole having a shape similar to a predetermined shape in a portion corresponding to the hollow portion .

Further, the diffusion bonding method according to the present invention is a diffusion bonding method in which a plurality of members to be bonded are stacked in a vertical direction in a vacuum or an inert atmosphere and heated and pressed to form a bonded body having a hollow portion of a predetermined shape. A sheet-like jig made of an elastic body is arranged so as to be in direct contact with the uppermost and lowermost surfaces of the plurality of members to be joined, and the plurality of members to be joined are made of rigid bodies via the sheet-like jig. Including a step of sandwiching from above and below with a jig and pressurizing and diffusion bonding with a pressurizing mechanism . The sheet-like jig or plate-like jig has a hole having a shape similar to a predetermined shape in a portion corresponding to the hollow portion. It is what you have .

  According to the diffusion bonding jig and the diffusion bonding method according to the present invention, since the sheet-shaped jig made of an elastic body is arranged so as to be in direct contact with the uppermost surface and the lowermost surface of the plurality of members to be bonded, By deforming the sheet-shaped jig following the deformation of the member to be joined due to pressurization, the applied pressure is made uniform over the entire bonded surface, and the occurrence of poor bonding due to insufficient applied pressure at the end of the bonded surface can be suppressed. it can.

  In addition, the joined body has a hollow portion having a predetermined shape, and a hole having a shape similar to the predetermined shape is provided in a portion corresponding to the hollow portion of the sheet-like jig or plate-like jig. The pressure applied to the upper and lower surfaces of the hollow portion is relieved, and deformation of the upper and lower surfaces of the hollow portion indented in the formed joined body can be suppressed.

It is a perspective view which shows the jig | tool for diffusion bonding and to-be-joined member which concern on Embodiment 1 of this invention. It is sectional drawing which shows the diffusion bonding method using the jig | tool for diffusion bonding which concerns on Embodiment 1 of this invention. It is sectional drawing which shows the diffusion bonding method using the jig | tool for diffusion bonding which concerns on Embodiment 1 of this invention. It is a perspective view which shows the jig | tool for diffusion bonding which concerns on Embodiment 2 of this invention, and a to-be-joined member. It is sectional drawing which shows the diffusion bonding method using the jig | tool for diffusion bonding which concerns on Embodiment 2 of this invention. It is sectional drawing which shows the diffusion bonding method using the jig | tool for diffusion bonding which concerns on Embodiment 2 of this invention.

Embodiment 1 FIG.
Hereinafter, a diffusion bonding jig and a diffusion bonding method using the jig according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view illustrating a diffusion bonding jig and a member to be bonded according to the first embodiment, and FIG. 2 is a cross-sectional view illustrating a diffusion bonding method using the diffusion bonding jig according to the first embodiment. It is. In the drawing, the same and corresponding parts are denoted by the same reference numerals.

  The diffusion bonding jig according to the first embodiment is a jig used in diffusion bonding that heats and pressurizes a plurality of members to be bonded in a vertical direction in a vacuum or an inert atmosphere. In the first embodiment, a hollow heat sink having a coolant channel therein will be described as an example of a bonded body formed by diffusion bonding.

  As shown in FIG. 1, the member to be bonded 10 includes a first member to be bonded 11, a second member to be bonded 12, and a third member to be bonded 13, which are overlapped and bonded in the vertical direction. Thus, a heat sink having a hollow portion with a predetermined shape is formed. In the example shown in FIG. 1, the first member 11 has a refrigerant inlet hole 14 and a discharge hole 15, and the second member 12 is used for a flow path for forming a flow path. A hole 16 is provided.

  The diffusion bonding jig according to the first embodiment includes an upper jig 1A and a lower jig 1B. The upper jig 1A is a plate-shaped jig 2A and a sheet-shaped jig 3A. It has. Similarly, the lower jig 1B includes a backing plate 2B and a sheet-like jig 3B.

  The sheet-like jigs 3A and 3B made of an elastic body are arranged so as to be in direct contact with the uppermost surface and the lowermost surface of the member 10 to be joined. Further, the contact plates 2A and 2B made of a rigid body are arranged so as to sandwich the member to be joined 10 from above and below via the sheet-like jigs 3A and 3B. As the sheet-like jigs 3A and 3B, any material may be used as long as it is heat resistant to the temperature at the time of diffusion bonding and does not lose elasticity by pressurization. For example, a carbon sheet is suitable. Moreover, as the contact plates 2A and 2B, any material may be used as long as it is heat resistant to the temperature at the time of diffusion bonding and has a strength that is not damaged by pressurization, and a plate made of carbon or metal is used.

  Further, the sheet-like jigs 3A and 3B are similar to the hollow portion at a portion corresponding to the hollow portion of the predetermined shape of the heat sink (the flow path hole 16 provided in the second bonded member 12 in FIG. 1). The holes 4A and 4B are shaped. By providing these holes 4A and 4B, the pressure applied to the portions corresponding to the flow path holes 16 of the first member to be bonded 11 and the third member to be bonded 13 is relieved, and the flow heat is applied to the completed heat sink. It is possible to suppress deformation in which the surfaces of the upper and lower portions of the hole 16 are recessed.

  The diffusion bonding method according to the first embodiment will be described. The 1st to-be-joined member 11, the 2nd to-be-joined member 12, and the 3rd to-be-joined member are piled up and down, and are vacuum-heated in a furnace. The heating temperature at this time is lower than the melting point of the metal of the member to be bonded 10. The sheet-like jigs 3A and 3B made of elastic carbon are arranged so as to be in direct contact with the uppermost and lowermost faces of the plurality of members to be joined 10, and a plurality of pieces to be joined via the sheet-like jigs 3A and 3B. In a state where the joining member 10 is sandwiched from above and below by the contact plates 2A and 2B, the joining member 10 is subjected to diffusion joining by pressing in the vertical direction by the pressurizing mechanism 20 using a spring, a weight, a servo, or the like.

  In general, in diffusion bonding, since there is a space outside the bonding surface of the member to be bonded, the resistance to atom movement due to pressure is smaller at the end than at the center of the bonding surface, and the material tends to spread laterally. The amount of deformation in the direction increases. As a result, the end portion has a smaller surface pressure than the center portion, and the pressure is likely to be insufficient. On the other hand, in the diffusion bonding jig according to the first embodiment, sheet-like jigs 3A and 3B made of an elastic carbon sheet are arranged on the uppermost surface and the lowermost surface of the member 10 to be joined. By deforming the sheet-like jigs 3A and 3B following the deformation of the member to be joined 10 due to the pressure, the applied pressure is made uniform over the entire joining surface.

  1 and FIG. 2 show the case where one heat sink is formed as a joined body. However, as shown in FIG. 3, the present embodiment 1 also relates to the case where a plurality of joined bodies are formed simultaneously. Diffusion bonding jigs are applicable. In the example shown in FIG. 3, the members to be joined 10a, 10b, and 10c are the first members to be joined 11a, 11b, and 11c, the second members to be joined 12a, 12b, and 12c, the third member to be joined 13a, 13b and 13c are included.

  Further, as diffusion diffusion jigs for forming a plurality of joined bodies, intermediate jigs 1C and 1D are required in addition to upper jig 1A and lower jig 1B similar to those in FIG. Since the intermediate jigs 1C and 1D serve as both the upper jig 1A and the lower jig 1B, the sheet-like jigs 3C (3D) are respectively arranged on both sides of the backing plate 2C (2D). The The sheet-like jigs 3C and 3D respectively have holes 4C and 4D having shapes similar to the flow passage holes 16a, 16b and 16c of the heat sink.

  As described above, according to the diffusion bonding jig and the diffusion bonding method using the same according to the first embodiment, the elastic carbon sheet is in direct contact with the uppermost surface and the lowermost surface of the member 10 to be bonded. Since the sheet-like jigs 3A and 3B are arranged and the contact plates 2A and 2B are arranged so as to sandwich the member 10 to be joined from above and below via the sheet-like jigs 3A and 3B, By deforming the sheet-like jigs 3A and 3B following the deformation of the member to be bonded 10, the applied pressure is made uniform over the entire bonding surface. Thereby, generation | occurrence | production of the joining defect by insufficient pressurization of a joining surface edge part can be suppressed, and a yield improves.

  Further, since the sheet-like jigs 3A and 3B are provided with holes 4A and 4B having a shape similar to the channel hole 16 which is the hollow portion of the heat sink, the first member 11 and the third member to be joined are provided. The pressure applied to the portion corresponding to the channel hole 16 of the member 13 is relieved, so that the deformation of the surface of the upper and lower portions of the channel hole 16 in the completed heat sink can be suppressed, and the yield is improved.

Embodiment 2. FIG.
FIG. 4 is a perspective view showing a diffusion bonding jig and a member to be bonded according to the second embodiment of the present invention, and FIG. 5 shows a diffusion bonding method using the diffusion bonding jig according to the second embodiment. It is sectional drawing. In the figure, the same and corresponding parts are denoted by the same reference numerals. The bonded body formed by diffusion bonding in the second embodiment is a heat sink similar to that of the first embodiment, and the bonded member 10 includes a first bonded member 11, a second bonded member 12, A third member to be joined 13 is included. In addition, since the structure of the to-be-joined member 10 and the diffusion bonding method according to the second embodiment are the same as those in the first embodiment, description thereof is omitted.

  As shown in FIG. 4, the diffusion bonding jig according to the second embodiment includes an upper jig 5A and a lower jig 5B, and the upper jig 5A includes a contact plate 6A that is a plate-like jig. A sheet-like jig 7A is provided. Similarly, the lower jig 5B includes a backing plate 6B and a sheet-like jig 7B. The sheet-like jigs 7A and 7B made of an elastic body are arranged so as to be in direct contact with the uppermost surface and the lowermost surface of the member 10 to be joined. Further, the contact plates 6A and 6B made of a rigid body are arranged so as to sandwich the member to be joined 10 from above and below via the sheet-like jigs 7A and 7B. The materials of the sheet-like jigs 7A and 7B and the contact plates 6A and 6B are the same as those in the first embodiment, and a description thereof will be omitted.

  The contact plates 6A and 6B are holes having a shape similar to the hollow portion in a portion corresponding to the hollow portion of the predetermined shape of the heat sink (the hole 16 for the flow path provided in the second bonded member 12 in FIG. 4). 8A and 8B. By providing these holes 8A and 8B, the pressure applied to the portions corresponding to the flow path holes 16 of the first member to be bonded 11 and the third member to be bonded 13 is alleviated, and the flow heat is applied to the completed heat sink. It is possible to suppress deformation in which the surfaces of the upper and lower portions of the hole 16 are recessed.

  4 and 5 show the case where one heat sink is formed as a joined body, but as shown in FIG. 6, the present embodiment 2 also relates to the case where a plurality of joined bodies are formed simultaneously. Diffusion bonding jigs are applicable. In the example shown in FIG. 6, the members to be joined 10a, 10b, and 10c are the first members to be joined 11a, 11b, and 11c, the second members to be joined 12a, 12b, and 12c, the third member to be joined 13a, 13b and 13c are included.

  Further, as diffusion diffusion jigs for forming a plurality of joined bodies, intermediate jigs 5C and 5D are required in addition to upper jig 5A and lower jig 5B similar to FIG. Since the intermediate jigs 5C and 5D serve as both the upper jig 5A and the lower jig 5B, the sheet-like jigs 7C (7D) are respectively arranged on both sides of the backing plate 6C (6D). The The contact plates 6C and 6D have holes 8C and 8D having shapes similar to the flow path holes 16a, 16b and 16c of the heat sink, respectively.

  As described above, according to the diffusion bonding jig and the diffusion bonding method using the same according to the second embodiment, as in the first embodiment, the applied pressure is made uniform over the entire bonding surface, and the bonding is performed. Generation | occurrence | production of the joining defect by the insufficient pressurizing force of a surface edge part can be suppressed. Furthermore, since the contact plates 6A and 6B are provided with the holes 8A and 8B having a shape similar to the flow passage hole 16 which is the hollow portion of the heat sink, the first member to be bonded 11 and the third member to be bonded 13 are provided. The pressure applied to the portion corresponding to the flow path hole 16 is alleviated, and deformation of the surface of the upper and lower portions of the flow path hole 16 in the completed heat sink can be suppressed. It should be noted that the present invention can be freely combined with each other within the scope of the invention, and each embodiment can be appropriately modified or omitted.

  The present invention can be used as a diffusion bonding jig for forming a bonded body having a hollow structure.

1A, 5A Upper jig, 1B, 5B Lower jig, 1C, 1D, 5C, 5D Intermediate jig, 2A, 2B, 2C, 2D, 6A, 6B, 6C, 6D Plate-shaped jig (batting plate),
3A, 3B, 3C, 3D, 7A, 7B, 7C, 7D Sheet-like jig,
4A, 4B, 4C, 4D, 8A, 8B, 8C, 8D hole,
10, 10a, 10b, 10c member to be joined,
11, 11a, 11b, 11c 1st member to be joined,
12, 12a, 12b, 12c second member to be joined,
13, 13a, 13b, 13c third member to be joined,
14 Inlet hole, 15 Outlet hole, 16, 16a, 16b, 16c Channel hole,
20 Pressurization mechanism.

Claims (4)

A diffusion bonding jig used in diffusion bonding to form a bonded body having a hollow portion having a predetermined shape by heating and pressurizing a plurality of bonded members in a vertical direction in a vacuum or an inert atmosphere,
A sheet-like jig made of an elastic body arranged so as to be in direct contact with the uppermost and lowermost surfaces of the plurality of members to be joined, and the plurality of members to be joined from above and below via the sheet-like jig A plate-like jig made of a rigid body disposed on the sheet-like jig, and the sheet-like jig has a hole having a shape similar to the predetermined shape in a portion corresponding to the hollow portion. Ingredients. A diffusion bonding jig used in diffusion bonding to form a bonded body having a hollow portion having a predetermined shape by heating and pressurizing a plurality of bonded members in a vertical direction in a vacuum or an inert atmosphere,
A sheet-like jig made of an elastic body arranged so as to be in direct contact with the uppermost and lowermost surfaces of the plurality of members to be joined, and the plurality of members to be joined from above and below via the sheet-like jig A plate-shaped jig made of a rigid body disposed on the plate , and the plate-shaped jig has a hole having a shape similar to the predetermined shape in a portion corresponding to the hollow portion. Ingredients. The diffusion bonding jig according to claim 1 or 2, wherein the sheet-like jig is a carbon sheet, and the plate-like jig is a plate made of carbon or metal. A diffusion bonding method in which a plurality of members to be bonded are stacked in a vertical direction in a vacuum or an inert atmosphere and heated and pressurized to form a bonded body having a hollow portion of a predetermined shape ,
A sheet-like jig made of an elastic body is arranged so as to be in direct contact with the uppermost surface and the lowermost face of the plurality of members to be joined, and the plurality of members to be joined are plate-like made of a rigid body via the sheet-like jig. The sheet-like jig or the plate-like jig has a shape similar to the predetermined shape in a portion corresponding to the hollow part, including a step of sandwiching from above and below by a jig and pressurizing and diffusion bonding with a pressure mechanism. A diffusion bonding method characterized by having a hole .

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