JP5961509B2 - Method for adjusting flow rate of coating liquid and coating apparatus - Google Patents

Description

  The present invention relates to a technique for adjusting the flow rate of a coating liquid in a coating apparatus that applies the coating liquid by discharging the coating liquid from a plurality of nozzles.

  2. Description of the Related Art Conventionally, various coating apparatuses that apply a coating liquid to a target object such as a substrate have been developed. For example, in an apparatus for manufacturing an organic EL (Electro Luminescence) display device, coating is performed by applying a hole transport material or an organic EL material in a predetermined pattern shape to the main surface of a substrate such as a glass substrate placed on a stage. An apparatus is used (for example, refer to Patent Document 1). In this coating apparatus, a coating liquid (organic EL material or hole transport material) is discharged from a nozzle at a predetermined pressure. Specifically, the coating liquid is stored in a supply source such as a tank provided in the coating apparatus, the coating liquid supplied from the supply source is increased by a pump, and is discharged from the nozzle.

  In the coating apparatus, when red, green, and blue organic EL materials are applied, in order to increase manufacturing efficiency, any one organic EL material of red, green, and blue is simultaneously applied in parallel from a plurality of nozzles. It is common to apply by discharging. For example, when a monochromatic organic EL material is simultaneously ejected from a plurality of nozzles using the coating apparatus disclosed in Patent Document 1, a coating solution stored in a single supply source (for example, a red organic EL material) There is a method in which a coating liquid is applied to a plurality of positions simultaneously by branching and supplying to a plurality of nozzles, and simultaneously applying the nozzles onto the substrate from each nozzle.

  In the coating apparatus disclosed in Patent Document 1, based on the measured value of the coating liquid flow rate of the main pipe and the measured value of the coating liquid flow rate of the branch pipe measured in a state where the coating liquid is supplied from the main pipe to one branch pipe. The relational expression between the flow rate of the coating liquid flowing through the main pipe and the flow rate of the coating liquid flowing through each branch pipe is set, and the other branch pipes are also set sequentially. Also, the coating liquid supplied from the main pipe is discharged into a predetermined container and weighed, and by using the result of weighing and the measured value of the coating liquid flow rate of the main pipe measured when the coating liquid is supplied, the main pipe is A relational expression between the flow rate of the coating liquid flowing and the flow rate of the coating liquid flowing through each branch pipe can be set.

  Therefore, in the coating apparatus disclosed in Patent Document 1, since the target flow rate value of the coating liquid is set for each branch pipe using these relational expressions, the flow rate management work for weighing the actual discharge flow rate for each branch pipe is performed. It becomes unnecessary.

JP 2009-45574 A

  However, in an actual application operation, there may be an error in the measurement result of the measured value of the coating liquid flow rate due to a change in ambient atmosphere (temperature, humidity, atmospheric pressure, etc.) of the coating apparatus or a secular change. When such a measurement error occurs, in the coating apparatus that controls the flow rate of the coating liquid for each branch pipe using a relational expression with the measured flow rate value of the coating liquid as a variable, as in the coating apparatus of Patent Document 1 described above, It is necessary to perform an operation of resetting a relational expression between the flow rate of the coating liquid flowing through the pipe and the flow rate of the coating liquid flowing through each branch pipe (hereinafter referred to as “flow rate resetting operation”).

  In addition, if the frequency of resetting the flow rate is lowered, there is a possibility that a difference in the discharge flow rate for each branch may occur, leading to a decrease in yield. Therefore, the flow rate resetting operation must be performed at a constant frequency. On the other hand, the time during which the flow rate resetting operation is performed is the non-operation time of the coating operation in which the coating apparatus cannot perform the coating operation on the substrate. Reduction is required.

  The present invention has been made in view of the above problems, and by providing the coating device with a means for extracting a branch pipe that needs to perform the flow rate resetting operation, the flow rate is reduced without reducing the frequency of performing the flow rate resetting operation. An object of the present invention is to provide a coating liquid flow rate adjustment method that reduces the time required for the resetting operation (non-operation time of the coating device) and a coating device having a configuration suitable for application of the adjustment method.

In order to solve the above-mentioned problems, the invention of claim 1 is based on a configuration in which a coating liquid supplied via a main pipe from a supply source for storing a coating liquid is divided into a plurality of branch pipes and connected to each of the branch pipes. A method of adjusting a coating liquid flow rate in a coating apparatus that discharges a processing liquid to a substrate at a predetermined flow rate, wherein the coating liquid from the supply source is supplied in parallel to the plurality of branch pipes through the main pipe. The state in which the supply is supplied is referred to as a “parallel supply state”, one branch pipe that is sequentially selected from the plurality of branch pipes is referred to as a “selected branch pipe”, and the coating liquid supplied from the supply source is the one of the plurality of branch pipes. When a state supplied only to the selected branch pipe is called a “selective supply state”, a correlation characteristic that defines the correlation between the first adjustment command value for flow rate adjustment and the actual flow rate for each of the plurality of branch pipes. Data is pre-determined And the branch flow rate adjusting means of each of the plurality of branch pipes in the parallel supply state is provided with a first adjustment command value for flow rate adjustment determined for each branch pipe based on the correlation, In the selective supply state, when the flow rate of the main pipe measured by the main flow rate measuring means for measuring the flow rate of the coating liquid flowing in the main pipe becomes the predetermined flow rate, the flow rate adjustment of each selected branch pipe The second adjustment command value for the first branch is determined based on the actual measurement step, and the relationship between the first adjustment command value and the second adjustment command value for each branch. An extraction step of extracting a branch pipe to which correlation characteristic data should be reset as a target branch pipe.

  The invention of claim 2 is the method of adjusting the flow rate of the coating liquid according to claim 1, wherein the branch flow rate adjusting means includes a valve provided in each branch pipe, and “the first adjustment command value for each branch pipe” is provided. Is based on the relationship between the valve opening corresponding to the first adjustment command value and the valve opening corresponding to the second adjustment command value for each branch pipe. It is characterized by being based on a relationship.

  According to a third aspect of the present invention, a coating liquid supplied via a main pipe from a supply source for storing a coating liquid is divided into a plurality of branch pipes, and a processing liquid is supplied from a nozzle connected to each of the branch pipes at a predetermined flow rate. (A) a flow rate control unit that controls the flow rate of the coating liquid, and (b) a flow rate setting adjustment unit that performs setting adjustment in the flow rate control, and the flow rate control unit includes: (A-1) a main flow rate measuring means for measuring the flow rate of the coating liquid flowing in the main pipe, and (a-2) a flow rate of the coating liquid flowing in the branch pipes respectively provided in the plurality of branch pipes. A plurality of branch flow rate adjusting means for adjusting each, and a state in which the coating liquid from the supply source is supplied in parallel to the plurality of branches via the main pipe is referred to as a "parallel supply state", One branch sequentially selected from the plurality of branches is selected as “selected branch”. When the state in which the coating liquid from the supply source is supplied only to the selected branch pipe among the plurality of branch pipes is referred to as a `` selective supply state '', the flow rate setting adjusting means (b) -1) The first adjustment command value for each branch determined based on the correlation between the first adjustment command value for flow rate adjustment and the actual flow rate for each of the plurality of branch pipes is given to the branch flow rate adjusting means. A flow rate setting means for setting the flow rate of each branch pipe to the predetermined flow rate in the parallel supply state; and (b-2) giving a second adjustment command value to the branch flow rate adjustment means in the selective supply state. , A sequential flow rate adjusting means for setting the main flow rate measured by the main flow rate measuring means to the predetermined flow rate, and (b-3) for each of the plurality of branch pipes, the first adjustment command value and the Command to compare with the second adjustment command value Based on the comparison result by the comparison means and (b-4) the command value comparison means, a branch pipe to which the correlation characteristic data defining the correlation is to be reset is extracted as a target branch pipe among the plurality of branch pipes. Resetting branch pipe extracting means.

  According to a fourth aspect of the present invention, in the coating apparatus according to the third aspect, the resetting branch pipe extracting means is a branch pipe in which the degree of coincidence between the first adjustment command value and the second adjustment command value is lower than a predetermined threshold value. Is extracted as the target branch pipe.

  A fifth aspect of the present invention is the coating apparatus according to the third or fourth aspect, wherein each of the coating apparatus includes the main pipe and the plurality of branch pipes, and a plurality of coating liquids are supplied in parallel from the supply source. The flow rate control means and the flow rate setting adjustment means are individually activated for each of the plurality of pipeline systems.

  A sixth aspect of the present invention is the coating apparatus according to any one of the third to fifth aspects, wherein the correlation characteristic data is a first adjustment command value for flow rate adjustment to the branch flow rate adjusting means for each branch. , And the actual flow rate of the branch pipe, and the resetting branch extracting means extracts a branch pipe to which the function should be reset from the plurality of branch pipes.

  According to a seventh aspect of the present invention, in the coating apparatus according to the sixth aspect, the resetting of the function performed on the branch pipe extracted by the resetting branch pipe extracting means is performed by parallel movement of the function. Features.

  The invention of claim 8 is the coating apparatus according to any one of claims 3 to 7, wherein the branch flow rate adjusting means includes a valve provided in each branch pipe, and the first adjustment command value and Each of the second adjustment command values is a command value corresponding to the opening of the valve, and the command value comparing means corresponds to the valve opening corresponding to the first adjustment command value and the second adjustment command value. It is characterized by comparing the valve opening.

  According to a ninth aspect of the present invention, in the coating apparatus according to any one of the third to eighth aspects, the coating liquid is an organic EL material, a hole transport material, or a hole injection material. .

In the adjusting method according to the first and second aspects, a plurality of branch pipes included in the coating apparatus are sequentially selected one by one, and the coating liquid from the main pipe is allowed to flow only to the selected branch pipe. Then, the adjustment command value (second adjustment command value) of the branch flow rate adjusting means of the selected branch pipe is measured in a state where the flow rate in the main pipe measured by the main flow rate measuring means becomes a predetermined flow rate. And ask. Based on the relationship between the second adjustment command value and the reference adjustment command value (first adjustment command value), a branch pipe to which correlation characteristic data is to be reset is extracted.

  The correlation characteristic data defines the correlation between the first adjustment command value for flow rate adjustment and the actual flow rate, and is data that serves as a basis for control of the branch flow rate adjustment means. Rather than resetting the correlation characteristics data for all the branch pipes, it is necessary to reset only the branch pipes that need to be reset by extracting only those branch pipes that need to be reset. The time required for the entire flow rate resetting operation (non-operating time of the coating apparatus) can be reduced.

  The coating apparatus of the inventions of claims 3 to 9 has a configuration suitable for carrying out the adjustment method of claim 1. First, as a function when actually applying to the substrate, the coating apparatus applies a first adjustment command value to the branch flow rate adjusting means, so that the flow rate of each branch pipe is a predetermined flow rate in the parallel supply state. Setting means is provided so that a required amount of coating liquid is supplied from each branch pipe to the nozzle.

  When adjusting the flow rate of the coating liquid, the flow rate sequential adjustment means is configured to supply the main liquid flow rate measuring means in a state in which the coating liquid is supplied from only the one branch pipe sequentially selected from the plurality of branch pipes. The second adjustment command value for each branch pipe is determined so that the flow rate of the main pipe measured in step 1 becomes a predetermined flow rate. Then, the command value comparing means compares the second adjustment command value of each branch with the first adjustment command value, and based on the comparison result, the branch pipe to which correlation characteristic data should be reset among the plurality of branches. Are extracted as target branches.

  Therefore, the coating apparatus of the present invention is configured to automatically execute the substantial control portion of the branch pipe extraction routine for resetting the correlation characteristic data. For this reason, the operation | work which extracts only the branch pipe with a high necessity for reset of correlation characteristic data can be automated, and the time (non-operation time of a coating device) concerning the whole flow reset operation can be reduced.

It is the top view and front view which show the principal part schematic structure of the coating device 1 which concerns on the 1st and 2nd embodiment of this invention. FIG. 2 is a block diagram illustrating a schematic configuration of a supply unit 54a and a nozzle unit 50 according to the first embodiment of the present invention. It is a block diagram which shows the control function of the coating device 1 of FIG. It is a flowchart which shows an example of various operation | movement of the coating device 1 which concerns on 1st Embodiment. It is a flowchart of a subroutine which shows an example of operation | movement of the actual flow measurement mode process in step S2 of FIG. It is a flowchart of a subroutine which shows an example of operation | movement of the branch pipe flow rate setting mode process in step S3 of FIG. 6 is a graph showing an example of a relational expression between an actual discharge flow rate R and a flow rate measurement value F during a flow rate setting operation. It is a graph which shows an example of the relational expression of the flow measurement value F and the flow measurement value f at the time of a flow setting operation. It is a schematic diagram which shows an example of the selective supply state to each branch pipe. It is a figure which shows an example of the relational expression each set according to the classification of the coating liquid to be used. It is a flowchart of a subroutine which shows an example of operation | movement of the verification operation | work in step S3b of FIG. It is a figure which shows an example of the comparison result by a command value comparison means. It is a schematic diagram which shows the branch pipe extracted by the reset branch pipe extraction means. FIG. 5 is a flowchart of a subroutine showing an example of an operation of calibration work in step S3d of FIG. It is a graph which shows an example of the relational expression of the flow measurement value F and the flow measurement value f after calibration work. 6 is a flowchart of a subroutine showing an example of the operation of the calibration work (particularly, simple calibration work) in step S3d of FIG. It is a block diagram which shows schematic structure of the supply part 54b and the nozzle unit 50 which concern on the 2nd Embodiment of this invention.

{First embodiment}
<1.1 Coating device>
Hereinafter, a coating apparatus according to a first embodiment of the present invention will be described with reference to the drawings. In order to make the description more specific, the following description will be given using an example in which the coating apparatus is applied to a coating apparatus that manufactures an organic EL display device that uses an organic EL material, a hole transport material, or the like as a coating liquid. . The coating apparatus manufactures an organic EL display device by coating an organic EL material, a hole transport material, a hole injection material, and the like in a predetermined pattern shape on a glass substrate placed on a stage. FIG. 1A is a plan view showing a schematic configuration of a main part of the coating apparatus 1. FIG. 1B is a front view illustrating a schematic configuration of a main part of the coating apparatus 1. As described above, the coating apparatus 1 uses a plurality of coating liquids such as an organic EL material, a hole transport material, and a hole injection material, and the organic EL material is described as a coating liquid as a representative thereof.

  In FIG. 1A and FIG. 1B, the coating apparatus 1 generally includes a substrate mounting apparatus 2, an organic EL coating mechanism 5, and a control unit 10 that controls various operations of the coating apparatus 1. Yes. The organic EL coating mechanism 5 includes a nozzle moving mechanism 51, a nozzle unit 50, and liquid receivers 53L and 53R. The nozzle moving mechanism 51 has a guide member 511 extending in the X-axis direction in the figure, and moves the nozzle unit 50 in the X-axis direction in the figure along the guide member 511.

  The nozzle unit 50 is a state in which a plurality of nozzles 52 (only three nozzles 52a, 52b, and 52c are shown in FIG. 1) that discharge one of organic EL materials of red, green, and blue are arranged in parallel. Hold on. In FIG. 1, the coating apparatus 1 showing only the three nozzles 52 a, 52 b, and 52 c is shown, but in the coating apparatus 1, more nozzles 52 are arranged in parallel and held by the nozzle unit 50. It is possible.

  In the coating apparatus 1, n nozzles 52 (hereinafter referred to as nozzles 52a to 52n) can be arranged in parallel. In this case, an organic EL material of any one color of red, green, and blue is used. It discharges from nozzle 52a-52n. Each of the nozzles 52a to 52n is supplied with an organic EL material of any one color of red, green, and blue from a supply source 541 (see FIG. 2). Thus, although the organic EL material of the same color is discharged from the plurality of nozzles 52, an example in which the red organic EL material is discharged from the nozzles 52a to 52n is used for specific description.

  The substrate mounting apparatus 2 includes a stage 21, a turning unit 22, a parallel movement table 23, a guide receiving unit 24, and a guide member 25. The stage 21 places a substrate P such as a glass substrate to be coated on the upper surface of the stage. The lower part of the stage 21 is supported by the turning unit 22, and the stage 21 is configured to be rotatable in the θ direction shown in the figure by the turning operation of the turning unit 22. In addition, a heating mechanism for preheating the substrate P coated with the organic EL material on the stage surface, a suction mechanism for the substrate P, a delivery pin mechanism, and the like are provided inside the stage 21.

  The guide member 25 extends in the Y-axis direction perpendicular to the X-axis direction and is fixed horizontally so as to pass under the organic EL coating mechanism 5. A guide receiving portion 24 that abuts on the guide member 25 and slides on the guide member 25 is fixed to the lower surface of the translation table 23. In addition, the swivel unit 22 is fixed on the upper surface of the translation table 23. Accordingly, the parallel movement table 23 can be moved in the Y-axis direction along the guide member 25 by receiving a driving force from, for example, a linear motor (not shown), and the stage 21 supported by the turning unit 22 can be moved. Horizontal movement is also possible.

  When the substrate P is placed on the stage 21 via the delivery pin mechanism, the substrate P is sucked and fixed, and the parallel movement table 23 moves to the lower side of the organic EL coating mechanism 5, the substrate P becomes red organic. This is the position where the application of the EL material is received from the nozzles 52a to 52n. Then, the control unit 10 (see FIG. 3) controls the nozzle moving mechanism unit 51 so as to reciprocate the nozzle unit 50 in the X-axis direction, and moves the stage 21 by a predetermined pitch in the Y-axis direction every linear movement. Thus, the translation table 23 is controlled so that a predetermined flow rate of the organic EL material is discharged from the nozzles 52a to 52n.

  In addition, at the discharge positions in the X-axis direction of the nozzles 52a to 52n, in both side spaces deviating from the substrate P placed on the stage 21, a liquid receiving portion 53L that receives the organic EL material discharged out of the substrate P and 53R is respectively fixed. The nozzle moving mechanism 51 is disposed outside the other side of the substrate P from the upper space of the liquid receiving portion 53 (for example, the liquid receiving portion 53L) disposed outside the one side of the substrate P across the substrate P. The nozzle unit 50 is reciprocated to the upper space of the liquid receiver 53 (for example, the liquid receiver 53R) provided.

  The translation table 23 moves the stage 21 by a predetermined pitch in a predetermined direction (Y-axis direction in the drawing) perpendicular to the nozzle reciprocating direction when the nozzle unit 50 is disposed in the upper space of the liquid receiving portion 53. Let Simultaneously with the operation of the nozzle moving mechanism 51 and the parallel movement table 23, the organic EL material is ejected from the nozzles 52a to 52n in a liquid column state, whereby the red organic EL material is formed in a stripe shape formed on the substrate P. A so-called stripe arrangement arranged for each groove is formed on the substrate P.

<1.2 Nozzle unit 50>
Next, with reference to FIG. 2, a schematic configuration of the coating liquid supply unit 54 a and the nozzle unit 50 in the coating apparatus 1 will be described. FIG. 2 is a block diagram illustrating a schematic configuration of the supply unit 54a and the nozzle unit 50 of the coating apparatus 1.

  In FIG. 2, the coating apparatus 1 includes a supply unit 54 a and a nozzle unit 50. The supply unit 54a divides a coating liquid (for example, red organic EL material) supplied from a single supply source 541 into a plurality of parts during supply (manifold 545) and supplies the plurality of nozzles 52a to 52n. Here, in the supply unit 54a, a supply pipe from the supply source 541 until the coating liquid is branched into a plurality of parts is referred to as a main pipe, and the supply pipe from the branching of the coating liquid to a plurality of nozzles is supplied to the nozzles 52a to 52n. Are described as branch pipes.

  The supply unit 54a includes a supply source 541, a pump 542, a filter 543, a reference flow meter 544, a manifold 545, a plurality of flow control valves 546a to 546n, a plurality of branch flow meters 547a to 547n, and open / close valves 548a to 548n. Yes. The pump 542 takes out the organic EL material stored in the supply source 541 according to the operation signal Cp output from the control unit 10 and flows it into the main pipe. The filter 543 removes foreign matters in the organic EL material flowing in the main pipe. The reference flow meter 544 detects the flow rate of the organic EL material in the main pipe and outputs the flow rate information If0 to the control unit 10. Then, the organic EL material flowing through the main pipe is supplied to a manifold (manifold) 545. The reference flow meter 544 in the present embodiment corresponds to the “main flow rate measuring unit” in the present invention.

  The manifold 545 branches the organic EL material supplied from the main pipe into a plurality of branch pipes. Here, a plurality of branch pipes from which the manifold 545 branches are connected to the nozzles 52a to 52n, respectively, and in the following description, the branch pipes connected to the nozzles 52a to 52n are described as a system branch pipes to n system branch pipes. To do.

  The flow control valve 546a controls the flow rate of the organic EL material flowing through the a-system branch pipe in accordance with the operation signal Cfa output from the control unit 10. The branch pipe flow meter 547a detects the flow rate of the organic EL material in the a system branch pipe and outputs the flow rate information Ifa to the control unit 10.

  As will become apparent later, the control unit 10 generates an operation signal Cfa based on the flow rate information Ifa so that the flow rate indicated by the branch flow meter 547a becomes the adjustment command value fac, and the operation of the flow rate control valve 546a. In order to control, the control part 10, the flow control valve 546a, and the branch pipe flowmeter 547a function together as a mass flow controller. Thus, the adjustment command value fac becomes an adjustment target of the flow control valve 546a in the coating process.

  The open / close valve 548a opens or closes the a-system branch pipe in response to the operation signal Coa output from the control unit 10 to supply or stop the organic EL material to the nozzle 52a. Then, the nozzle 52a receives the supply of the organic EL material from the a-system branch pipe via the opening / closing valve 548a, and discharges the organic EL material in a liquid column state from the tip portion thereof. The nozzle 52a has a filter 521a for removing foreign substances in the organic EL material supplied from the a-system branch pipe.

  Other b system branch pipes-n system branch pipes also have the same components as the a system branch pipes. That is, the flow control valves 546b to 546n control the flow rate of the organic EL material flowing through the b-system branch pipe to the n-system branch pipe, respectively, according to the operation signals Cfb to Cfn output from the control unit 10, respectively. The branch pipe flow meters 547b to 547n detect the flow rate of the organic EL material in the b system branch pipe to the n system branch pipe, respectively, and output the flow rate information Ifb to Ifn to the control unit 10, respectively.

  Therefore, for the b-system branch pipe to the n-system branch pipe, the control unit 10 operates based on the flow rate information Ifb to Ifn so that the flow rates indicated by the branch flow meters 547b to 547n become the adjustment command values fbc to fnc, respectively. In order to generate Cfn and control the operation of the flow rate control valves 546b to 546n, the control unit 10, the flow rate control valves 546b to 546n, and the branch flow meters 547b to 547n respectively function as mass flow controllers. The function as the mass flow controller in each branch corresponds to the “branch flow rate adjusting means” in the present invention. Thus, the adjustment command values fbc to fnc are also adjustment targets for the flow rate control valves 546b to 546n in the coating process, respectively.

  The open / close valves 548b to 548n supply or stop the organic EL materials to the nozzles 52b to 52n by opening and closing the b system branch pipes to the n system branch pipes, respectively, according to the operation signals Cob to Con output from the control unit 10, respectively. To do. The nozzles 52b to 52n receive the supply of the organic EL material from the b-system branch pipe to the n-system branch pipe via the open / close valves 548b to 548n, respectively, and discharge the organic EL material in a liquid column state from their tip portions. The nozzles 52b to 52n also have filters 521b to 521n for removing foreign substances in the organic EL material supplied from the b system branch pipe to the n system branch pipe, respectively. In addition, each piping from the supply source 541 to the nozzles 52a to 52n uses a pipe member made of PE (polyethylene), PP (polypropylene), Teflon (registered trademark), or the like.

<1.3 Control unit 10>
FIG. 3 is a block diagram for explaining the electrical configuration of the coating apparatus 1.

  As shown in FIG. 3, the control unit 10 is configured by, for example, a general computer in which a CPU 11, a ROM 12, a RAM 13, a storage device 14, and the like are interconnected via a bus line 15. The ROM 12 stores basic programs and the like, and the RAM 13 is used as a work area when the CPU 11 performs predetermined processing. The storage device 14 is configured by a non-volatile storage device such as a flash memory or a hard disk device.

  In the control unit 10, the input unit 16 and the output unit 17 are also connected to the bus line 15. The input unit 16 includes various switches, a touch panel, and the like, and receives various input setting instructions such as a processing recipe from an operator (an operator who operates the coating apparatus 1). The output unit 17 includes a liquid crystal display device, a lamp, and the like, and displays various types of information under the control of the CPU 11.

  Further, the control unit 10 includes a pump 542, a reference flow meter 544, a plurality of flow control valves 546a to 546n, branch flow meters 547a to 547n, open / close valves 548a to 548n, a swivel unit 22, a translation table 23, and a nozzle. The moving mechanism unit 51 is connected as a control target.

  Further, the control unit 10 acquires flow rate information If0 indicating the main flow rate output from the reference flow meter 544, and acquires flow rate information Ifa to Ifn indicating the branch flow rates output from the branch flow meters 547a to 547n, respectively. And operation | movement of the flow control valves 546a-546n is controlled according to the flow volume information Ifa-Ifn so that the flow volume information Ifa-Ifn of each of the a system branch pipe -n system branch pipe may correspond to the adjustment command values fac-fnc. The control of the flow rate for each branch pipe will be described in detail in “<2 Various Operations of Coating Apparatus 1>” described later.

  Here, on the surface of the substrate P to which the red organic EL material is applied, a plurality of stripe-shaped grooves corresponding to a predetermined pattern shape to which the organic EL material is to be applied are formed in parallel. . As the organic EL material, for example, an organic EL material having a viscosity enough to flow in a groove on the substrate P is used, and specifically, a polymer type organic EL material for each color is used. It is done. The nozzle unit 50 is rotatably supported around a predetermined support shaft, and can be adjusted around the support shaft by the control of the control unit 10 to adjust the coating pitch interval.

  Based on the position and direction of the substrate P placed on the stage 21, the control unit 10 adjusts the angle of the swivel unit 22 so that the direction of the groove formed in the substrate P becomes the X-axis direction, and the application , That is, a coating start position at which coating is started at one end side of the groove formed in the substrate P is calculated. The application start position is an upper space of one liquid receiving portion 53. Then, the control unit 10 drives the parallel movement table 23 and the nozzle movement mechanism unit 51 as described above.

  At the application start position, the control unit 10 instructs the supply unit 54a to start discharging the organic EL material from the nozzles 52a to 52n. At this time, according to the moving speed of the nozzles 52a to 52n, the controller 10 applies a uniform amount of the organic EL material at each point of the stripe-shaped groove and discharges the organic EL material in a liquid column state. The application amount is controlled, and the flow rate information Ifa to Ifn from the branch flow meters 547a to 547n is fed back and controlled. Then, in order to flow the organic EL material into the groove on the substrate P, the control unit 10 moves the nozzle unit 50 along the groove on the substrate P while pouring the nozzle unit 50 into the guide member 511. It is controlled to move along. By this operation, the red organic EL material discharged from the nozzles 52a to 52n in the liquid column state is poured into the respective grooves at the same time.

  When the control unit 10 is positioned on the other liquid receiving portion 53 fixed on the outside of the other end portion of the groove across the substrate P, the control unit 10 moves the organic EL material from the nozzles 52a to 52n. While the discharge is continued, the movement of the nozzle unit 50 by the nozzle movement mechanism 51 is stopped. By this single movement, the application of the organic EL material to the n grooves is completed simultaneously. For example, when the nozzle pitch (interval of each nozzle in the Y direction) is equivalent to three rows of grooves, the organic EL material of the same color is ejected from each of the nozzles 52a to 52n. The organic EL material of the same color is applied to the grooves for a total of n rows.

  Next, the control unit 10 feeds the translation table 23 by a predetermined distance in the positive direction of the Y axis so that the organic EL material can be applied to the groove to be applied next. When the control unit 10 positions the nozzle unit 50 across the substrate P in the opposite direction from the upper space of the other liquid receiving part 53 and is positioned on the one liquid receiving part 53, the organic substance from the nozzles 52a to 52n. While the discharge of the EL material is continued, the movement of the nozzle unit 50 by the nozzle moving mechanism 51 is stopped. By this second movement, the application of the organic EL material to the next groove is completed. By repeating such an operation, the red organic EL material is poured into the groove for applying red.

<2 Various operations of the coating apparatus 1>
FIG. 4 is a flowchart showing various operations of the coating apparatus 1.

  As described above, the coating apparatus 1 according to the first embodiment controls the substrate mounting device 2 and the organic EL coating mechanism 5 by the control unit 10, so that the nozzle 52 a is applied to the substrate placed on the stage 21. It is possible to apply | coat the coating liquid discharged from -52n.

  In addition, the coating apparatus 1 of the first embodiment activates various means including “flow rate setting means”, “flow rate sequential adjustment means”, “command value comparison means”, and “resetting branch pipe extraction means” described below. As a result, it becomes possible to individually set and calibrate the flow rate of the a system branch pipe to the n system branch pipe.

The routine shown in the flowchart of FIG.
1) Initial setting routine RTa;
2) substrate processing routine RTb; and
3) Flow rate adjustment routine RTc;
It is divided roughly into.

  Among these, the initial setting routine RTa preliminarily shows a correlation characteristic between the adjustment command value for controlling the flow control valves 546a to 546n and the flow rate flowing through each branch pipe according to the valve opening degree according to the adjustment command value. In this routine, various control parameters are set in advance based on the above.

  The next substrate processing routine RTb is a routine for performing a coating process on each substrate based on the correlation characteristic set in the initial setting routine RTa and the reference adjustment command value. This coating process is repeated for a series of substrates. For example, when a stop command is issued from the operator or a higher-level control device at the stage where the work for one day is completed, the repetition is stopped.

  The flow rate adjustment routine RTc is executed when a command to the effect “perform flow rate inspection or calibration” is given from the operator after the substrate processing routine or the like. This flow rate adjustment routine RTc verifies whether correlation characteristics need to be calibrated (reset) for each of the branch pipes, using the flow rate measurement of the main pipe according to the characteristics of the present invention, As a result, calibration for resetting the correlation characteristics is performed only for the branch pipes that are determined to be necessary for calibration.

  When the flow rate adjustment routine is completed, a standby state for waiting for the next substrate processing is entered, and the substrate processing routine RTb is restarted in a timely manner based on an instruction input from the operator.

  Hereinafter, the details of these roughly divided routines will be described.

<2.1 Initial setting routine RTa (flow rate setting work)>
First, an example of an initial setting routine RTa (flow rate setting operation) of the coating apparatus 1 according to the first embodiment will be described with reference to FIGS. The flow rate setting operation is an operation for initially setting the flow rate of the coating liquid discharged from each of the nozzles 52a to 52n in the above-described substrate coating operation.

  FIG. 5 is a subroutine showing an example of the operation of the actual flow rate measurement mode processing in step S1a of FIG. FIG. 6 is a subroutine showing an example of the operation of the branch pipe flow rate setting mode process in step S1b of FIG.

<2.1.1 Actual flow rate measurement mode processing>
In step S1a, the control unit 10 performs actual flow rate measurement mode processing. In the actual flow rate measurement mode process, the control unit 10 determines the relational expression between the actual flow rate R and the flow rate measurement value F of the reference flow meter 544 (hereinafter “ Rf relational expression ") is set, and the relational expression is stored in the installed storage device 14.

  In FIG. 5 showing the details of the actual flow rate measurement mode processing, the control unit 10 selects one branch system (for example, a system) for measuring the actual flow rate (actual discharge flow rate), and sets the discharge flow rate range (step). S11). Here, the discharge flow rate range indicates a range of discharge flow rate that may be applied when the coating apparatus 1 applies a coating liquid to be used in the future.

  Next, the control unit 10 fully opens the open / close valve 548 of the target branch pipe system selected in step S11 (for example, the open / close valve 548a of the system a) and fully closes the other open / close valves 548 (step S11). S12).

  Next, the control unit 10 controls the flow control valve 546 (for example, the target branch system) selected in step S11 so that the flow rate measurement value F of the reference flow meter 544 becomes an arbitrary value within the discharge flow rate range. A system flow control valve 546a) is operated (step S13). By the operation of step S13, the organic EL material flowing into the main pipe flows only to the target branch pipe (for example, a branch pipe of system a) selected in step S11, and one nozzle 52 (for example, nozzle 52a). It will be in the state discharged from.

  Next, the control unit 10 acquires the actual discharge flow rate R measured by weighing and the flow rate measurement value F of the reference flow meter 544 at that time (step S14). For example, in the operation state of step S13, the operator of the coating apparatus 1 weighs the coating liquid from the nozzle 52 that discharges the coating liquid, and calculates the actual discharge flow rate R.

  Then, the operator inputs the value of the actual discharge flow rate R via the input unit 16 of the control unit 10. The flow rate measurement value F of the reference flow meter 544 at that time may be automatically acquired by the control unit 10 using the flow rate information If0 output from the reference flow meter 544, or the operator may input the input unit 16 You can enter it via

  Next, the control unit 10 determines whether or not the actual flow rate measurement has been completed (step S15). For example, the weighing of the actual discharge flow rate R performed in step S13 and step S14 is performed corresponding to a plurality of points (for example, 3 to 5 points) in the discharge flow rate range. In step S15, when the weighing of the actual discharge flow rate R is performed corresponding to all the plurality of points, the control unit 10 proceeds to the next step S16. On the other hand, when the weighing of the actual discharge flow rate R is not performed for any of the plurality of points, the control unit 10 returns to step S13 and performs processing for other values within the discharge flow rate range.

  In step S16, the control unit 10 sets a relational expression (R-F relational expression) between the actual discharge flow rate R and the flow rate measurement value F of the reference flow meter 544, stores the relational expression in a storage medium, and performs processing according to the subroutine. finish.

  FIG. 7 is a graph showing an example of the R—F relational expression, where the horizontal axis is the flow rate measurement value F of the reference flow meter 544 and the vertical axis is the actual discharge flow rate R, and the measurement result of the actual discharge flow rate R is 3 points. It is what is plotted. Specifically, the actual discharge flow rate weighed when the flow rate measurement value of the reference flow meter 544 is F1 by the processing of step S13 and step S14 is R1. The actual discharge flow rate weighed when the flow rate measurement value of the reference flow meter 544 is F2 is R2. The actual discharge flow rate measured when the flow rate measurement value of the reference flow meter 544 is F3 is R3.

An approximate line (for example, a straight line) passing through these three plot points (point F1-R1, point F2-R2, and point F3-R3) is an actual discharge flow rate R and the flow rate measurement value F of the reference flow meter 544. Derived as a relational expression. For example, the R—F relational expression is
R = A * F + B (Formula 1)
Indicated by The symbol “*” indicates a product.

  Here, A and B are constants (first-order coefficient and zero-order coefficient) derived from the plot points, respectively, and are determined by the least square method, for example. In the coating apparatus 1, such a relational expression is set for each type of coating liquid used and stored in the storage device 14.

<2.1.2 Branch flow rate setting mode processing>
Returning to FIG. 4, after the actual flow rate measurement mode process of step S1a, the control unit 10 performs a branch flow rate setting mode process (step S1b). In this branch flow rate setting mode process, the control unit 10 determines the relationship between the flow rate measurement value F of the reference flow meter 544 and the flow rate measurement value f of the branch flow meter 547 for each type of coating liquid used by the coating apparatus 1. An expression (hereinafter referred to as “Ff relational expression”) is set, and the relational expression is stored in the installed storage device 14.

  In FIG. 6 showing the details of step S1b, the control unit 10 selects a branch pipe system (for example, a system) for setting the branch pipe flow rate, and sets a discharge flow rate range (step S21). Here, the discharge flow rate range is the same as the range described in step S11, and there is a possibility that the coating apparatus 1 may apply a coating liquid to be used through the selected branch pipe system. The flow range is shown.

  Next, the control unit 10 fully opens the open / close valve 548 of the target branch pipe system selected in step S21 (for example, the open / close valve 548a of the system a) and fully closes the other open / close valves 548 (step S21). S22).

  Next, the control unit 10 measures the flow measurement value f (for example, the flow measurement value fa of the branch flow meter 547a) of the branch flow meter 547 (for example, the branch flow meter 547a of the system a) of the selected target a system branch. The flow control valve 546 of the branch pipe system (for example, the flow control valve 546a of the a system) is operated so that becomes an arbitrary value within the discharge flow range (step S23). By the operation of step S23, the organic EL material flowing into the main pipe flows only to the branch pipe (for example, the a-system branch pipe) selected in step S21 and is discharged from one nozzle 52 (for example, the nozzle 52a). It will be in a state to be.

  Next, the control unit 10 acquires the flow rate measurement value f of the branch flow meter 547 of the selected branch pipe system and the flow rate measurement value F of the reference flow meter 544 at that time (step S24). For example, the control unit 10 acquires the flow rate measurement value fa and the flow rate measurement value F using the flow rate information Ifa of the branch flow meter 547a and the flow rate information If0 of the reference flow meter 544 output in the state of step S23. .

  Next, the control unit 10 determines whether or not the branch flow rate setting of the selected branch pipe system has been completed (step S25). For example, the branch pipe flow rate setting performed in step S23 and step S24 is performed corresponding to a plurality of points (for example, 3 to 5 points) in the discharge flow rate range, similarly to the weighing of the actual discharge flow rate R described above.

  In step S25, when the branch flow rate setting of the selected branch system is performed corresponding to all the plurality of points, the control unit 10 proceeds to the next step S26. On the other hand, when the branch pipe flow rate setting of the selected branch pipe system has not been performed for any of the plurality of points, the control unit 10 returns to step S23 and processes for other values within the discharge flow rate range. I do.

  In step S <b> 26, the control unit 10 sets a relational expression (Ff relational expression) between the flow measurement value F of the reference flow meter 544 and the flow measurement value f of the branch flow meter 547 and stores it in the storage device 14.

  FIG. 8 is a graph showing an example of the Ff relational expression obtained from the measurement results of steps S23 and S24. The horizontal axis represents the flow rate measurement value fa of the branch flow meter 547a and the vertical axis represents the reference flow meter 544. The measurement result of step S23 and step S24 is plotted with the flow rate measurement value F. Specifically, the flow rate measurement value of the reference flow meter 544 is F1 when the flow rate measurement value of the branch pipe flow meter 547a is fa1 by the processing of step S23 and step S24. Further, when the flow rate measurement value of the branch pipe flow meter 547a is fa2, the flow rate measurement value of the reference flow meter 544 is F2. In addition, when the flow rate measurement value of the branch pipe flow meter 547a is fa3, the flow rate measurement value of the reference flow meter 544 is F3.

An approximate line (for example, a straight line) passing through these three plotted points (point fa1-F1, point fa2-F2, point fa3-F3) is a flow rate measurement value F of the reference flow meter 544 and a flow rate of the branch flow meter 547a. It is derived as a relational expression with the measured value fa. For example, the above relational expression is
F = Ca * fa + Da (Formula 2)
Indicated by Here, Ca and Da are constants (first-order coefficient and zero-order coefficient) of the a system derived from the plot points, respectively, and these are also determined by the least square method or the like. Then, “a relational expression (for example, Expression 2) between the flow rate measurement value F of the reference flow meter 544 and the flow rate measurement value fa of the branch pipe flow meter 547a” defined by the constants Ca and Da is a correlation characteristic between F−f. Is represented (correlation characteristic data between F-f). In the coating apparatus 1, such Ff relational expressions are set and stored for each branch system depending on the type of coating liquid to be used. Moreover, in the following description, in the case of the Ff relational expression in the system a, it is expressed in particular as “F-fa relational expression”. The same applies to the b system to the n system.

  Returning to FIG. 6, after setting the relational expression in step S <b> 26, the control unit 10 determines whether or not the branch flow rate setting for all the branch systems has been completed (step S <b> 27). And the control part 10 returns to said step S21, and performs the branch flow rate setting with respect to a different branch system, when there exists a branch system which has not completed the branch flow rate setting. On the other hand, the control part 10 complete | finishes the process by the said subroutine, when the branch flow volume setting of all the branch pipe systems is complete | finished.

  In the following description, one branch pipe that is sequentially selected as a supply path for the coating liquid as in the above branch pipe flow rate setting mode processing is referred to as a “selected branch pipe”, and a state where the coating liquid is supplied only to the selected branch pipe. This is called “selective supply state”. FIG. 9A is a schematic diagram showing a selective supply state in which a branch pipe of system a is set as a selective branch pipe as in the above example. FIG. 9B is a schematic diagram showing a selective supply state in which the branch pipes of the b system are set as selective branch pipes.

<2.1.3 Setting of correlation characteristic data>
Returning to FIG. 4, after the branch flow rate setting mode process in step S <b> 1 b, the control unit 10 sets a first adjustment command value fc of each branch for a discharge flow rate used in a substrate processing routine RTb (coating process) described later ( Step S1c). The first adjustment command value fc is set as a reference for the command value given to the flow rate control valves 546a to 546n in the subsequent coating liquid supply control as a result of the initial setting routine RTa. In an ideal case where the performance of 546a to 546n and other parts and the environment of the coating apparatus 1 do not change with time, the desired application performance can always be obtained by maintaining the first adjustment command value fc. . As described above, since there is a change over time in each part and environment in reality, the first adjustment command value fc cannot be used as it is for a long time, and calibration is required to compensate for it. Will be described later in detail as a flow rate adjustment routine RTc.

  Hereinafter, the first adjustment command value fc will be described with reference to FIGS. 7, 8, and 10. FIG. 10 is a diagram illustrating an example of a relational expression that is set according to the type of coating liquid to be used.

The control unit 10 sets the RF relational expression and the FF relational expression as shown in FIG. 10 by the processing of the above steps S1a to S1b. FIG. 10 shows an example of a relational expression set and stored by the control unit 10 for each of the coating liquids q to t to be used. For example, for the coating solution q, the R—F relational expression is derived from (Expression 1),
R = Aq * F + Bq (Formula 3)
Is set in Here, Aq and Bq indicate specific values of the constants A and B set for the coating solution q, respectively.

For the coating solution q, the F-fa relational expression is derived from (Expression 2),
F = Caq * fa + Daq (Formula 4)
Is set in Here, Caq and Daq are specific values of constants of the a system set for the coating liquid q, respectively.

Further, the relational expression (F-fb relational expression) between the flow rate measurement value F of the reference flow meter 544 and the flow rate measurement value fb of the branch pipe flow meter 547b with respect to the coating liquid q is similar to (Formula 4).
F = Cbq * fb + Dbq (Formula 5)
Is set in Here, Cbq and Dbq are specific values of constants of the a system set for the coating solution q, respectively. Further, the flow rate measurement values fc to fn of the branch pipe flow meters 547c to 547n in the other c system to n system are also related to the flow rate measurement value F of the reference flow meter 544 in the coating liquid q, similarly to the system a and the system b. An expression is set.

  The control unit 10 sets the first adjustment command value fc of each branch for the discharge flow rate by appropriately combining the above-described relational expressions.

In order to make the description more specific, the first adjustment command value fc when the discharge flow rate from the a-system nozzle 52a in the coating process is the actual discharge flow rate Rp will be described. For example, as shown in FIG. 7, the relational expression between the actual discharge flow rate R and the flow rate measurement value F of the reference flow meter 544:
R = A * F + B (Formula 1: repeated)
Is used to derive the flow rate measurement value Fp of the reference flow meter 544 corresponding to the actual discharge flow rate Rp.

Then, as shown in FIG. 8, a relational expression between the flow rate measurement value F of the reference flow meter 544 and the flow rate measurement value fa of the branch flow meter 547b:
F = Ca * fa + Da (Formula 2: reprinted)
Is used to derive the flow measurement value fap of the branch flow meter 547a corresponding to the flow measurement value Fp. That is, as is clear from these relational expressions, when it is desired to discharge the coating liquid at the actual discharge flow rate Rp from the nozzle a of the system a, the first adjustment command value fac of the coating liquid flowing through the system a is set to the flow rate measurement value. What is necessary is just to set to fap. Accordingly, the first adjustment command value fac of the a system when discharging at the discharge flow rate Rp is:
fac = {(Rp-B) / A-Da} / Ca (Formula 6)
Set by. Further, as described above, each relational expression is set for each type of coating liquid. Therefore, the first adjustment command value facq of the a system when the coating liquid q is discharged at the discharge flow rate Rp is:
facq = {(Rp−Bq) / Aq−Daq} / Caq (Formula 7)
Set by.

  As described above, on the basis of the R—F relational expression obtained by the actual flow rate measurement mode process (step S1a) and the Ff relational expression obtained by the branch pipe flow rate setting mode process (step S1b), A relational expression (hereinafter referred to as “Rf relational expression”) between the branch flow rate measurement value f and the actual discharge flow rate R is stored and set in the storage device 14. In the Rf relational expression, the first adjustment command value fc and the actual flow rate Rp and the branch flow rate measurement value f corresponding to the main flow rate measurement value Fp are set as the first adjustment command value fc. A relational expression with the discharge flow rate Rp is obtained.

  This “relation between the first adjustment command value fc and the actual discharge flow rate Rp” corresponds to “the correlation between the first adjustment command value for flow rate adjustment and the actual flow rate” in the present invention. Further, “the relational expression between the first adjustment command value fc and the actual discharge flow rate Rp (Rp−fc relational expression; for example, Expression 6 and Expression 7)” is “the first adjustment command value for flow adjustment and the actual flow rate. Correlation characteristic data defining the correlation of

<2.2 Coating process>
Returning to FIG. 4, after the initial setting routine RTa is completed, when the substrate coating process by the coating apparatus 1 is started by an instruction input from the operator, the control unit 10 uses the first adjustment command value fc. A coating process is performed on the coated body (for example, a glass substrate) (step S2a).

  In this coating process, the control unit 10 fully opens the open / close valves 548a to 548n. The state in which the coating liquid is supplied in parallel to all the branch pipes in this way is hereinafter referred to as “parallel supply state”.

  Further, the control unit 10 uses the flow rate information Ifa output from the branch pipe flow meter 547a of the a system so that the flow rate measurement value fa indicated by the branch flow meter 547a becomes the first adjustment command value fac. The valve 546a is controlled. Thus, the first adjustment command value fac becomes a flow rate adjustment target of the flow rate control valve 546a.

  Similarly, the control unit uses the flow rate information Ifb to Ifn output from the branch flowmeters 547b to 547n to measure the flow rate measurement values fb to fn indicated by the branch flowmeters 547b to 547n, respectively. The flow control valves 546b to 546n are controlled so as to be the first adjustment command values fbc to fnc. As described above, the first adjustment command values fbc to fnc become the flow rate adjustment targets of the flow rate control valves 546b to 546n, respectively.

  As described above, in the coating apparatus 1 of the first embodiment, an operation for setting the flow rate of the coating liquid flowing through the branch pipes in the parallel supply state in advance to be the first adjustment command values fac to fnc (initial setting routine). RTa) is executed in advance. Hereinafter, such a branch flow rate setting operation is referred to as “flow rate setting operation”. In addition, the storage device 14 stores the correlation characteristic data representing the correlation equation obtained by the “flow rate setting operation” and the first adjustment command values fac to fnc in the storage device 14, so that “ It also functions as an element for realizing “flow rate setting means”.

  Hereinafter, when the first adjustment command value set in the “flow setting operation” is fac to fnc, the flow rate measurement value F of the reference flow meter 544 is set as the target flow rate measurement value Fp, and the actual discharge flow rate R is set as the target. The description continues as the discharge flow rate Rp.

  Then, after the coating process (step S2a) for the substrate is completed, the control unit 10 determines whether or not to continue the coating process for the subsequent substrate based on the control signal from the upper control unit and the recipe information for the recording medium process. (Step S2b). Depending on the determination result, the subsequent substrate coating process is subsequently performed (step S2c), or the flow proceeds to a flow rate adjustment routine RTc (step S3a).

  For example, the control unit 10 determines that a verification operation is necessary when the coating liquid used in the coating apparatus 1 is replaced or when a periodical management (for example, daily management) time for checking the branch pipe flow rate has arrived ( It can be set to branch to Yes in step S3a. As another example, when the operator instructs the execution of the verification work from the input unit 16, the control unit 10 determines that the verification work is necessary (branch to Yes in step S3a). You can also.

  The details of the steps (steps S3b to S3d) related to the flow rate verification operation and the calibration operation will be described later. However, at the stage where the flow rate verification operation or the like is not required, the flow rate verification operation or the like is performed without performing the flow rate verification operation. The coating liquid supply system is in a standby state (step S3e) for the maintenance of the portion.

<2.3 Verification work>
Next, the verification operation in step S3b in FIG. 4 will be described.

  As described above, in the flow rate setting work (steps S1a to S1c), the Rp-fc relational expression is set based on the RF relational expression and the Ff relational expression, and the target is calculated using the Rp-fc relational expression. The first adjustment command value fc corresponding to the discharge flow rate Rp is set as the first adjustment command values fac to fnc for each branch system.

  And the verification work of 1st Embodiment is "at the time of flow rate setting work, is the Ff relational expression set for each branch system maintained?" The flow rate measurement value F indicated by the reference flow meter 544 is maintained at the target flow rate value Fp set during the flow rate setting operation.

  At the time of verification work (step S3b), the flow rate setting work (steps S1a to S1c) in the above-described initial setting routine RTa has already been performed. Therefore, the first adjustment command values fac to fnc are set such that the flow rate measurement value F of the reference flow meter 544 indicates the target flow rate measurement value Fp, and the flow rate of each branch should be controlled based on this.

  However, when the coating apparatus as in the present embodiment is actually operated, a measurement error occurs in a meter (for example, branch flowmeters 547a to 547n) with aging and surrounding atmosphere (temperature and humidity). there is a possibility. In the branch system (for example, system a) in which such a measurement error occurs, even if the flow rate measurement value fa of the branch flow meter 547a indicates the first adjustment command value fac, the measurement value fa includes an error. It is a value and it is in a state where accurate flow control is not possible.

  Therefore, in the verification work of the first embodiment, the flow rate control valve 546 is adjusted so that the flow rate measurement value F of the reference flow meter 544 indicates the target flow rate measurement value Fp in the selective supply state for each branch system. The flow rate measurement value f of the branch pipe flowmeter 547 is stored in the storage device 14 as the second adjustment command value fcx (adjustment command value at the time of verification work).

  Hereinafter, an example of the procedure of the verification work will be described with reference to FIG. FIG. 11 is a subroutine showing an example of the operation of the verification work in step S3b of FIG. 4 (when branched to YES in step S3a).

  First, the control part 10 selects the branch pipe system (for example, a system | strain) which performs verification work (step S31), and advances a process to the next step. At this time, the flow control as the mass flow controller by the first adjustment command value fc (for example, fac) set during the flow rate setting operation in the branch system (for example, the a system) is stopped.

  Next, the control unit 10 fully opens the open / close valve 548 of the target branch pipe system selected in step S31 (for example, the open / close valve 548a of the system a) and fully closes the other open / close valves 548 (step S31). S32). As described above, the verification operation is an actual measurement process performed in the selective supply state in which the coating liquid is supplied only to the selected branch pipes sequentially selected as in the branch flow rate setting mode process.

  Next, the control unit 10 operates the flow control valve 546 (for example, the flow control valve 546a) of the branch pipe system so that the flow rate measurement value F of the main reference flow meter 544 becomes the target flow rate measurement value Fp ( Step S33).

  Next, the control unit 10 determines that the branch flow meter 547 (for example, the branch flow meter 547a) when the flow rate measurement value F of the main reference flow meter 544 is the target flow rate measurement value Fp in step S33. The flow rate measurement value fx (for example, the flow rate measurement value fax) shown is used as the second adjustment command value fcx (for example, the second adjustment command value facx) that is the flow rate adjustment target of the flow rate control valve 546 (for example, the flow rate control valve 546a). It memorize | stores in the memory | storage device 14 (step S34).

  Thus, the flow rate measurement value and the second adjustment command value at the time of the verification operation (step S3b) are distinguished from the flow rate measurement value f and the first adjustment command value fc at the time of the flow rate setting operation (steps S1a to S1c). Therefore, description will be made using the flow rate measurement value fx and the first adjustment command value fcx.

  After storing the second adjustment command value fcx (for example, the second adjustment command value facx) in step S34, the control unit 10 determines whether the verification work for all the branch systems has been completed (step S35). ). When there is a branch system that has not been verified, the control unit 10 returns to step S31 to set a branch flow rate for a different branch system. On the other hand, the control part 10 complete | finishes the process by the said subroutine, when the verification operation | work of all the branch pipe systems is complete | finished. Further, the “flow sequential adjustment means” in the present invention is realized by the function of the control unit 10 for the verification work.

<2.4 Extraction of branch pipes to be calibrated (reset)>
Returning to FIG. 4, when the verification work (step S3b) is completed, the control unit 10 determines whether or not a calibration work is necessary for each branch system (step S3c). Each branch is functionally realized by the control unit 10, specifically, “command value comparing means” for comparing the degree of coincidence between the first adjustment command value fc and the second adjustment command value fcx, In addition, this is realized by a “reset branch extraction means” that extracts a branch system (a branch system for which flow rate setting is to be performed again) having a degree of coincidence lower than a predetermined threshold.

  For comparison between the first adjustment command value fc and the second adjustment command value fcx by the “command value comparison means”, various comparison index values that can determine the degree of coincidence of both values can be adopted. For example, the difference between the first adjustment command value fc and the second adjustment command value fcx may be taken, or the ratio between the first adjustment command value fc and the second adjustment command value fcx may be taken. The square difference between the value fc and the second adjustment command value fcx may be taken.

  In the following description, as an example of the command value comparison means, a case will be described in which a comparison is made by taking a ratio between the first adjustment command value fc and the second adjustment command value fcx. FIG. 12 is an example of a comparison result obtained by the command value comparing means, and is a diagram showing a ratio between the first adjustment command values fac to fnc and the second adjustment command values facx to fncx in each branch system.

  Therefore, the branch system in which the comparison result column (fcx / fc) in FIG. 12 is less than the threshold value “1” means that the flow rate has decreased compared to the flow rate setting operation, and the branch system greater than the threshold value “1” This means that the flow rate has increased since the setting work. Further, for the branch pipe system in which the comparison result column (fcx / fc) in FIG. 12 matches the threshold value “1”, it means that the flow rate flowing through the branch pipe is the same during the flow rate setting work and the verification work. To do.

  When the comparison by the “command value comparison means” is performed, based on the comparison result, a branch system in which the degree of coincidence between the first adjustment command value fc and the second adjustment command value fcx is lower than a predetermined threshold is extracted. The resetting branch extraction means ”is activated. As for the threshold value, the operator can set a desired value according to the comparison method of the “command value comparison means” and the type of coating liquid. Hereinafter, when the deviation from the reference value (first adjustment command value fc) is 1% or less, that is, within the range of 99% to 101% of the reference value, it is determined as a branch pipe that does not require calibration. The description of the case where a branch pipe out of the range of% to 101% is extracted as a branch pipe requiring calibration will be continued.

  In this case, a branch system (ratio value fcx / fc is smaller than 0.99) whose ratio value adopted as an index of the degree of coincidence between the first adjustment command value fc and the second adjustment command value fcx is lower than 99%. ) Or a branch system whose ratio value is higher than the threshold value 101% (ratio value fcx / fc is greater than 1.01) is extracted as a branch system to be reset by the resetting branch extracting means, Proceed to step S3d (calibration work).

  On the other hand, for the branch system in which the coincidence between the first adjustment command value fc and the second adjustment command value fcx is higher than the threshold value (the branch system in which the ratio value fcx / fc is 0.99 or more and 1.01 or less), It is not extracted by the resetting branch extraction means, and the process proceeds to step S3e. In this case, for the branch pipe system, the first adjustment command value fc set during the flow rate setting operation is adopted as a reference for flow rate control by the mass flow controller.

  Hereinafter, when the branch a system and the branch m system are extracted as a branch system to be reset by the resetting branch extracting means (hereinafter referred to as “reset branch”) in accordance with the example of FIG. The description will be continued (see FIG. 13).

<2.5 Calibration work>
Next, calibration work will be described. This calibration work is performed by resetting the Ff relational expression for the resetting pipe (the Ff relational expression when the flow rate setting work is not maintained to a predetermined level). The correlation characteristic data (Rp-fc relational expression) and the adjustment command value fc are also reset.

<2.5.1 Calibration Work in First Embodiment>
FIG. 14 is a subroutine showing an example of the calibration work in step S3d of FIG. Hereinafter, the calibration operation will be described with reference to FIG. 14 (steps S41 to S49).

  The control unit 10 selects one branch system (for example, the a system) from among resetting branch systems (for example, the a system and the m system) for setting the branch flow rate, and sets the discharge flow rate range (step S41). The process proceeds to the next step.

  Next, the control unit 10 fully opens the opening / closing valve 548 of the target branch pipe system selected in step S41 (for example, the opening / closing valve 548a of system a), and fully closes the other opening / closing valve 548 (step S42). ), The process proceeds to the next step.

  Next, the control unit 10 measures the flow measurement value f (for example, the flow measurement value fa of the branch flow meter 547a) of the branch flow meter 547 (for example, the branch flow meter 547a of the system a) of the selected target a system branch. , The flow control valve 546 of the branch system (for example, the flow control valve 546a of the a system) is operated (step S43), and the process proceeds to the next step. By the operation in step S43, a selective supply state in which the coating liquid is supplied only to the selective branch pipe (for example, the a-system branch pipe) is established.

  Next, the control unit 10 determines the flow rate measurement value f (for example, the flow rate measurement value fa of the branch flow meter 547a) of the branch flow meter 547 of the selected branch system (for example, system a) and the reference flow meter at that time. The flow rate measurement value F of 544 is acquired (step S44), and the process proceeds to the next step.

  Next, the control unit 10 determines whether or not the branch flow rate setting of the selected branch pipe system has been completed (step S45). For example, the branch flow rate setting performed in step S43 and step S44 is performed corresponding to a plurality of points (for example, 3 to 5 points) in the discharge flow rate range as in the branch flow rate setting mode process.

  In step S45, when the branch flow rate setting of the selected branch system is performed corresponding to all the plurality of points, the control unit 10 proceeds to the next step S46. On the other hand, when the branch pipe flow rate setting of the selected branch pipe system has not been performed for any of the plurality of points, the control unit 10 returns to step S43 to process other values within the discharge flow rate range. I do.

  In step S <b> 46, the control unit 10 resets a relational expression (Ff relational expression) between the flow rate measurement value F of the reference flow meter 544 and the flow rate measurement value f of the branch pipe flow meter 547 and stores it in the storage device 14. Then, the process proceeds to the next step. This process has the same process contents as the branch flow rate setting mode (step S1b in FIG. 4) in the initial setting routine RTa, and the value of the correlation characteristic data determined as a result is the same as in the initial setting. Only the result is different.

  Hereinafter, with reference to FIGS. 15A and 15B, the Ff relational expression reset by the calibration work will be described. FIG. 15A is a graph showing an example of the F-fa relational expression set by resetting the Ff relational expression for the a-system branch pipe (step S46). FIG. 15B shows an example of the F-fa relational expression (dotted line part in the figure) set during the flow rate setting work and the F-fa relational expression (solid line part in the figure) set during the calibration work. It is a graph.

  FIG. 15A plots the measurement results of steps S43 and S44 with the horizontal axis representing the flow rate measurement value fa of the branch flow meter 547a and the vertical axis representing the flow rate measurement value F of the reference flow meter 544. Specifically, the flow rate measurement value of the reference flow meter 544 is F11 when the flow rate measurement value of the branch pipe flow meter 547a is fa1 by the processing of step S43 and step S44. Further, when the flow rate measurement value of the branch pipe flow meter 547a is fa2, the flow rate measurement value of the reference flow meter 544 is F12. Further, when the flow rate measurement value of the branch flow meter 547a is fa3, the flow rate measurement value of the reference flow meter 544 is F13.

An approximate curve (for example, a straight line) passing through these three plot points (point fa1-F11, point fa2-F12, point fa3-F13) is a flow rate measurement value F of the reference flow meter 544 and a flow rate of the branch flow meter 547a. It is derived as a relational expression with the measured value fa. For example, the above relational expression is
F = Ea * fa + Fa (Formula 8)
Indicated by Here, Ea and Fa are constants of the a system (first-order coefficient and zero-order coefficient) derived from the plot points, respectively. And the said F-fa relational expression is memorize | stored in the memory | storage device 14 as Ff type | formula of a system piping.

  Here, referring to FIG. 15B, the F-fa relational expression (dotted line part in the figure) set during the flow rate setting work and the F-fa relational expression (solid line part in the figure) set during the calibration work. Will be described.

As shown in FIG. 15B, in the resetting branch system (for example, a system), the first adjustment command value fc (for example, the first adjustment command value fac) is not performed without resetting the Ff relational expression. When the flow rate control is performed based on the flow rate, the flow rate control value F of the main pipe is controlled so as to indicate Fp2 different from the target flow rate measurement value Fp. Also,
R = A * F + B (Formula 1: re-post)
As shown in FIG. 4, since the actual discharge flow rate R and the flow rate measurement value F correspond one-to-one, when the flow rate measurement value F is Fp2 different from the target flow rate measurement value Fp, a flow rate different from the target discharge flow rate Rp is obtained. It is actually discharged.

  Therefore, in step S46, as shown by a solid line in FIG. 15B (so that the flow rate measurement value F indicates the target flow rate measurement value Fp corresponding to a predetermined adjustment command value), an Ff relational expression (for example, , F-fa relational expression) is reset. In the present embodiment, the predetermined command value matches the second adjustment command value facx set at the time of verification.

  Returning to FIG. 14, after resetting the relational expression (Ff relational expression) in step S <b> 46, in the branch system (for example, a system), the control unit 10 performs the reset Ff relational expression. Based on (for example, F-fa relational expression) and RF relational expression (formula 1), the relational expression (correlation characteristic data) between the actual discharge flow rate and the adjustment command value is reset (step S47).

  Further, an adjustment command value fcx (for example, facx) corresponding to the target flow rate measurement value Fp and the target discharge flow rate Rp is used as a first adjustment command value (adjustment command value at the time of application work) serving as a reference for flow rate control by the mass flow controller. Reset is performed (step S47).

  After resetting the correlation characteristic data and the adjustment command value (step S47), the control unit 10 determines whether or not the steps from step S41 to step S47 have been completed for all reset branch systems (step S47). S48). Then, when there is another resetting branch system (for example, m system) in which the processes of Steps S41 to S47 are not completed, the control unit 10 returns to Step S41 and performs the resetting branch system (for example, m Reset the branch flow rate for the system.

  On the other hand, the control part 10 complete | finishes the process by the subroutine concerning the said calibration operation, when the process of step S41-step S47 is complete | finished with respect to all the reset branch systems.

  As described above, in the calibration work, the resetting of the Ff relational expression, the resetting of the correlation characteristic data, and the resetting of the adjustment command value are performed for each resetting branch system. As a result, flow control is performed individually for each branch system, and the target discharge flow rate Rp is discharged from each branch system.

<2.5.2 Calibration Work (Simple Calibration Work) in Modification of First Embodiment>
FIG. 16 is a subroutine showing an example of simple calibration work in the modification of the first embodiment. Hereinafter, the simple calibration work will be described with reference to FIG. 16 (steps S51 to S54).

  The control unit 10 selects one branch system (for example, the a system) from among resetting branch systems (for example, the a system and the m system) for setting the branch pipe flow rate, and stores the branch system stored in the storage device 14. A second adjustment command value fcx (for example, facx) is called (step S51), and the process proceeds to the next step.

  Next, the control unit 10 determines the F-f of the resetting branch pipe (for example, a system branch pipe) based on the Ff relational expression (for example, Formula 2: F = Ca * fa + Da) set during the flow rate setting work. A relational expression (for example, F-fa relational expression) is reset (step S52). Specifically, the control unit 10 determines that the Ff relational expression (for example, Expression 2: F = Ca * fa + Da) set during the flow rate setting operation passes through the point (facx-Fp). (For example, the F-fa relational expression) is translated, and the Ff relational expression after the parallel movement is set as the Ff relational expression after resetting. The reason for resetting the Ff relational expression (for example, F-fa relational expression) of the resetting branch pipe (for example, a-system branch pipe) in the simple calibration work will be described later.

  After the resetting of the Ff relational expression in step S52, in the branch system (for example, the a system), the control unit 10 determines that the reset Ff relational expression (for example, the F-fa relational expression) Based on the RF relational expression (formula 1), the relational expression (correlation characteristic data) between the actual discharge flow rate and the adjustment command value is reset (step S53).

  Further, an adjustment command value fcx (for example, facx) corresponding to the target flow rate measurement value Fp and the target discharge flow rate Rp is used as a first adjustment command value (adjustment command value at the time of application work) serving as a reference for flow rate control by the mass flow controller. Reset is performed (step S53).

  After resetting the correlation characteristic data and the adjustment command value (step S53), the control unit 10 determines whether or not the steps S51 to S53 have been completed for all reset branch systems (step S53). S54). Then, when there is another resetting branch system (for example, m system) in which the processes of Steps S51 to S53 are not completed, the control unit 10 returns to Step S51 to perform the resetting branch system (for example, m Reset the branch flow rate for the system.

  On the other hand, the control part 10 complete | finishes the process by the subroutine concerning the said simple calibration work, when the process of step S51-step S53 is complete | finished with respect to all the reset branch systems.

  As described above, in the simple calibration work, the resetting of the Ff relational expression, the resetting of the correlation characteristic data, and the resetting of the adjustment command value are performed for each resetting branch system.

  Hereinafter, the reason why the parallel movement is adopted for the resetting of the Ff relational expression in the simple calibration work will be briefly described with reference to FIG.

  As described above, the branch pipe extracted as the resetting branch pipe is a branch pipe system in which the degree of coincidence between the first adjustment command value fc and the second adjustment command value fcx is lower than the threshold value. Therefore, the F-f relational expression (for example, Formula 2: F = Ca * fa + Da) set during the flow rate setting operation does not pass through the point (for example, the point facx-Fp) measured during the verification operation (FIG. 15 ( b)). This is due to the occurrence of measurement errors in the instrument (for example, the branch flow meter 547a) with the aging of the coating apparatus 1 and the surrounding atmosphere (temperature, humidity, pressure, etc.).

  Such a measurement error has a certain property. For example, as shown in FIG. 15B, a measurement error caused in the flow rate measurement value fa of the branch flow meter 547a during the flow rate setting work and after the calibration work. (Difference between F = Ca * fa + Da (Formula 2) and F = Ea * fa + Fa (Formula 8)) may be constant.

  As described above, when the measurement error is constant, as described in “<2.5.1 Calibration work in the first embodiment>”, the flow rate measurement values are actually measured at a plurality of points, and the Ff relational expression is obtained. Even if the calibration work of the first embodiment for performing the resetting is not performed, the same calibration result can be obtained only by performing the simple calibration work (translating the Ff relational expression so as to pass through the measurement point at the time of the verification work). can get. Therefore, the simple calibration work described as another embodiment of the present invention is a calibration work particularly suitable when the measurement error is constant as described above.

<Effect of coating device 1 of 3 first embodiment>
In the flow rate setting operation (step S1a to step S1c) in the initial setting routine RTa of the coating liquid according to the first embodiment described above, the reference flow meter 544 is measured when measuring the actual discharge flow rate, and the relational expression thereof. By setting (R—F relational expression), the reference flow meter 544 is handled as a standard device in the coating apparatus 1. A stepwise flow rate control system was established by setting a relational expression (Ff relational expression) for the reference flowmeter 544 and the plurality of branch pipe flowmeters 547 and installed in the coating apparatus 1. The flow management of many branch pipe flowmeters 547 is performed.

  Thus, the coating apparatus according to the first embodiment obtains the first adjustment command value fc corresponding to the target discharge flow rate Rp and the target flow rate measurement value Fp based on the RF relational expression and the Ff relational expression. Set. Therefore, even when the target discharge flow rate of the coating liquid is changed, it is not necessary to perform the flow rate setting work for each nozzle system again by using the relational expression, and the time required for the flow rate setting work (the coating apparatus 1). Non-operating time) can be shortened.

  In addition, since the measurement of the reference flow meter 544 is performed at the time of measuring the actual discharge flow rate and the R-F relational expression is set, it is not necessary to measure the actual discharge flow rate for each nozzle system and derive the relational expressions. The time required for the flow rate setting work (non-operating time of the coating apparatus 1) can be shortened.

  Further, in the verification work and the calibration work (steps S3a to S3d) of the coating apparatus 1 according to the first embodiment, the calibration work is based on the result of the verification work (flow rate measurement at only one point) performed on each branch pipe. A determination is made as to whether or not to perform (flow rate measurement at a plurality of points and resetting of the Ff relational expression). More specifically, the first adjustment command value set during the flow rate setting operation is compared with the second adjustment command value set during the verification operation, and a branch pipe whose degree of coincidence of both values is lower than a predetermined threshold is determined. Extracted as a branch to be calibrated.

  In this way, it is determined whether or not calibration work is necessary for each branch pipe, and the branch pipe that requires calibration work (the degree of coincidence between the first adjustment command value and the second adjustment command value is lower than a predetermined threshold value). Since only the calibration work is performed, the time required for the calibration work (non-operation time of the coating apparatus 1) can be shortened as compared with the case where the calibration work is performed for all the branch pipes.

  Further, as a calibration work, the flow rate measurement at a plurality of points is not performed, but the F-f relational expression is set for the branch pipe to be calibrated based on the Ff relational expression set at the flow rate setting work and the single flow rate measurement performed at the verification work. It is also possible to employ “simple calibration work” for resetting the f relational expression. In this case, since the step of measuring the flow rate at a plurality of points as in the calibration work of the first embodiment is omitted, the time required for the calibration work (non-operating time of the coating apparatus 1) can be shortened.

{Second Embodiment}
<4 Configuration of coating apparatus 1 in the second embodiment>
A second embodiment of the present invention will be described. In addition, in 2nd Embodiment, the same code | symbol is attached | subjected and demonstrated about the element same as each element of 1st Embodiment. Further, redundant description of the same configuration or operation as in the first embodiment is omitted.

  The basic configuration of the coating apparatus 1 of the second embodiment is the same as that of the coating apparatus 1 of the first embodiment.

  On the other hand, the difference between the coating apparatus 1 of the second embodiment and the coating apparatus 1 of the first embodiment is the configuration of the supply unit 54. FIG. 17 is a conceptual diagram showing the configuration of the supply unit 54b of the second embodiment. As shown in FIG. 17, the supply unit 54b of the second embodiment is a main pipe 550A (a coating supplied from a supply source 541). Two pipes (generally a plurality of pipes for feeding liquid from the manifold 555 to the manifold 545A) and a main pipe 550B (pipe for feeding the coating liquid supplied from the supply source 541 from the manifold 555 to the manifold 545B) in parallel. Book). Further, the main pipe 550A has a configuration in which a plurality of branch pipes (for example, a system to g system) are provided. Similarly, the main pipe 550B has a configuration in which a plurality of branch pipes (for example, h system to n system) are provided.

  Here, “the flow path that has a main pipe and a branch pipe provided in the main pipe and that feeds the coating liquid supplied from the supply source 541 to each nozzle 52” is referred to as a “pipe system 500”. The coating apparatus 1 in the second embodiment has a configuration including a supply source 541, a pump 542, a filter 543, a reference flow meter 544, a manifold 555, pipeline systems 500A and 500B, and a nozzle unit 50 (FIG. 17). reference).

  Further, as already described in the description of “{First Embodiment}”, the flow rate control means and the flow rate setting adjustment means are activated in the flow rate management (flow rate setting work, verification work, and calibration work) of the present invention. To be executed. The flow rate control means and the flow rate setting adjustment means are the pump 542, the reference flow meter 544, and the pipeline systems 500A and 500B (the main flow meter 557, the flow control valve 546, the branch flow meter 547, and the open / close valve 548). This means is activated by the control unit 10 controlling various operations.

<5 Effect of coating apparatus 1 in the second embodiment>
As described above, the coating apparatus 1 of the second embodiment includes the pipeline system 500A and the pipeline system 500B, and the control unit 10 controls various operations of the pipeline systems 500A and 500B. Flow management (flow setting work, verification work, and calibration work) of the present invention is performed. That is, in the coating apparatus 1 of the second embodiment, the flow rate management (flow rate setting work, verification work, and calibration work) of the present invention is individually executed for each of the pipeline systems 500A and 500B of the mains 550A and 550B. Can do. In other words, the flow rate control means and the flow rate setting adjustment means are individually activated for each of the plurality of pipeline systems.

  Therefore, when any flow rate management (for example, flow rate setting operation) is performed on a plurality of branch pipes, the coating apparatus 1 provided with a plurality of pipeline systems 500 as in the second embodiment is the first one. Compared with the coating apparatus 1 having only a single pipeline system as in the embodiment, the time required for flow management (for example, flow rate setting work) of each branch pipe (non-operation time of the coating apparatus 1) is shortened. be able to. That is, when a plurality of main pipes (for example, main pipes 550A and 550B) are drawn in parallel from a single coating liquid supply source, verification and calibration for flow rate adjustment are performed for one pipe line system 500A. Since verification and calibration for adjusting the flow rate of the other pipeline system 500B can be sequentially performed on each branch pipe while sequentially performing each branch pipe, verification and calibration can be performed in series and parallel. For this reason, the time required for the flow rate adjustment as a total is reduced rather than verifying all the branch pipes in series.

{Modifications}
Although the embodiment of the present invention has been described above, the present invention can be modified in various ways other than those described above without departing from the spirit of the present invention.

  In the above-described embodiment, a plurality of points (for example, 3 to 5 points) in the discharge flow rate range are plotted to derive various relational expressions. However, only one point may be plotted to derive a relational expression. . For example, assuming that the relational expression to be derived is always a straight line passing through a predetermined origin (for example, (0, 0)), the relational expression can be derived by plotting one point. In this case, since the measurement of the actual discharge flow rate R for deriving the relational expression and the branch flow rate setting of the selected branch pipe system are performed only for one point, the flow management man-hour of the coating apparatus is further reduced. .

  Moreover, in the said embodiment, when the relational expression (RF relational expression) between the actual flow rate R and the flow measurement value F of the reference | standard flowmeter 544 is not set, the example which performs an actual flow measurement mode process is shown. However, the actual flow rate measurement mode process may be performed according to other modes. For example, even if the relational expression between the actual flow rate R and the flow rate measurement value F of the reference flowmeter 544 has been set, the actual flow measurement mode processing may be performed to periodically reset the relational expression. It doesn't matter. Thereby, the reliability of the relational expression set by the actual flow rate measurement mode processing is increased, and more accurate flow rate management can be performed.

  Moreover, in the said embodiment, the example which performs an actual flow measurement mode process when the relational expression (R-F relational expression) between the actual flow volume R and the flow measurement value F of the reference | standard flowmeter 544 was not set was shown. However, it is possible to relatively adjust the flow rate of the coating liquid discharged from each nozzle 52 without setting the RF relational expression. Even when the R-F relational expression is not set, it is possible to detect variations and fluctuations in the flow rate measurement value f of each branch flow meter 547 with the flow rate measurement value F as a reference. By setting one adjustment command value fc, application processing at an accurate discharge flow rate can be performed for each nozzle.

  When the RF relational expression is not set in this way, the above-described “relationship between the flow rate measurement value F of the reference flow meter 544 and the flow rate measurement value f of the branch flow meter 547” is the “flow rate” in the present invention. This corresponds to “correlation between first adjustment command value for adjustment and actual flow rate”. Further, the above-mentioned “data expressing the correlation characteristics between F−f (correlation characteristics data between F−f)” is “correlation defining the correlation between the first adjustment command value for flow rate adjustment and the actual flow rate”. Corresponds to "characteristic data".

  Moreover, in the said embodiment, the 1st adjustment command value set at the time of flow volume setting operation | work and the 2nd adjustment command value set at the time of verification operation are compared by a command value comparison means, Based on these coincidence, Judgment was made on whether or not to perform calibration work. However, the numerical value to be compared by the command value comparison unit is not limited to the above-described embodiment as long as the value substantially corresponds to the first adjustment command value and the second adjustment command value.

  In the coating apparatus 1 of the above embodiment, the flow rate of the coating liquid flowing through each branch pipe is adjusted by the flow rate control valve 546. Therefore, the adjustment command value fc (adjustment target of the flow measurement value of the branch pipe) substantially corresponds to the valve opening degree of the flow control valve 546 of the branch pipe, and is a numerical value to be compared by the command value comparison means. May be the valve opening of the branch pipe during the flow rate setting operation and the valve opening degree of the branch pipe during the verification operation. In the case of such a configuration, it is necessary to provide a mechanism for detecting the valve opening degree in the flow control valve 546 of each branch pipe and outputting it to the control unit 10 as valve information during the flow setting operation and the verification operation.

  Moreover, in the said embodiment, the flow control valve 546 and the branch flow meter 547 were provided in each branch. For example, in the a system branch pipe, the control unit 10 has a function as a mass flow controller that generates an operation signal Cfa based on the flow rate information Ifa to control the operation of the flow rate control valve 546a. Similarly, the b system branch pipe to the n system branch pipe have functions as a mass flow controller. On the other hand, the main of the coating apparatus 1 shown in the above embodiment does not have the function as the mass flow controller, but the main of the coating apparatus 1 (in the second embodiment, a plurality of mains) A function as a mass flow controller may be provided.

  Moreover, as shown to the said embodiment, it is not necessary to make all the discharge flow rates of each branch pipe in a coating process the same. In this case, the target flow rate measurement value Fp is set to a different value according to the target discharge flow rate Rp for each branch pipe, and as a result, the first adjustment command value fc is set to a different value for each branch pipe. Needless to say.

  In the above-described embodiment, each time the nozzle unit 50 linearly moves in the X-axis direction, the stage 21 is moved by a predetermined pitch in the Y-axis direction, so that the nozzle unit 50 and the stage 21 are relative to the Y-axis direction. However, the present invention is not limited to this. For example, each time the nozzle unit 50 linearly moves in the X-axis direction, the nozzle unit 50 is moved by a predetermined pitch in the Y-axis direction (that is, the organic EL coating mechanism 5 moves in the Y-axis direction). The relative positional relationship between the stage 21 and the stage 21 in the Y-axis direction may be changed. In this case, the liquid receiving part 53 moves together with the organic EL coating mechanism 5 by a predetermined pitch in the Y-axis direction.

  In the above-described embodiment, the red organic EL material of red, green, and blue is poured into the groove of the substrate P by the nozzles 52a to 52n. This coating process produces an organic EL display device. It is an intermediate process. The processing procedure when manufacturing the organic EL display device is as follows: hole transport material coating → drying → red organic EL material coating → drying → green organic EL material coating → drying → blue organic EL material coating → drying Become. In this case, the coating apparatus of the present invention can be used in a step of coating a hole transport material, a red organic EL material, a green organic EL material, and a blue organic EL material, respectively.

  In the above-described embodiment, the manufacturing apparatus of the organic EL display device in which the organic EL material, the hole transport material, or the hole injection material is used as the coating liquid has been described as an example. It can also be applied to devices. For example, the present invention can be applied to an apparatus for applying a fluorescent material used to manufacture a resist solution, a SOG (Spin On Glass) solution, or a PDP (plasma display panel). Further, the present invention can also be applied to an apparatus for applying a color material used for manufacturing a color filter configured in a liquid crystal cell in order to perform color display on a liquid crystal color display.

DESCRIPTION OF SYMBOLS 1 Application | coating apparatus 2 Substrate mounting apparatus 21 Stage 22 Turning part 23 Parallel movement table 24 Guide receiving part 25, 511 Guide member 3 Control part 5 Organic EL application | coating mechanism 50 Nozzle unit 51 Nozzle movement mechanism part 52 Nozzle 521, 543 Filter 53 Liquid Receiving unit 54 Supply unit 500 Pipe line 541 Supply source 542 Pump 544 Reference flow meter 545, 555 Manifold 546, 556 Flow control valve 547 Branch flow meter 548 Open / close valve 550 Main tube 557 Main tube flow meter

Claims (9)

Coating in a coating apparatus that divides the coating liquid supplied from a supply source storing the coating liquid through a main pipe into a plurality of branch pipes and discharges the processing liquid to the substrate at a predetermined flow rate from nozzles connected to the branch pipes. A method for adjusting the liquid flow rate,
A state in which the coating liquid from the supply source is supplied in parallel to the plurality of branch pipes through the main pipe is referred to as a “parallel supply state”.
One branch sequentially selected from the plurality of branch pipes is referred to as a “selected branch pipe”, and a state in which the coating liquid supplied from the supply source is supplied only to the selected branch pipe among the plurality of branch pipes is “ When we call the `` selective supply state ''
For each of the plurality of branch pipes, correlation characteristic data defining a correlation between the first adjustment command value for flow rate adjustment and the actual flow rate is determined in advance,
A first adjustment command value for flow rate adjustment determined for each branch pipe based on the correlation is given to each branch pipe flow rate adjusting means of the plurality of branch pipes in the parallel supply state,
The method
For adjusting the flow rate of each selected branch when the flow rate of the main pipe measured by the main flow rate measuring means for measuring the flow rate of the coating liquid flowing in the main pipe becomes the predetermined flow rate in the selective supply state. An actual measurement process for specifying the second adjustment command value of
An extracting step of extracting, as a target branch pipe, a branch pipe from which the correlation characteristic data is to be reset among the plurality of branch pipes based on the relationship between the first adjustment command value and the second adjustment command value for each branch pipe; ,
A method of adjusting the flow rate of the coating liquid, comprising: A method for adjusting the coating liquid flow rate according to claim 1,
The branch pipe flow rate adjusting means includes a valve provided in each branch pipe,
“Based on the relationship between the first adjustment command value and the second adjustment command value for each branch pipe” means “the valve opening corresponding to the first adjustment command value for each branch pipe and the second A method of adjusting the flow rate of the coating liquid, which is based on the relationship with the valve opening corresponding to the adjustment command value. A coating apparatus that divides a coating liquid supplied from a supply source for storing a coating liquid through a main pipe into a plurality of branch pipes and discharges the processing liquid from a nozzle connected to each of the branch pipes to a substrate at a predetermined flow rate. And
(a) a flow rate control means for controlling the flow rate of the coating liquid;
(b) flow rate setting adjusting means for performing setting adjustment in the flow rate control;
With
The flow rate control means is
(a-1) main flow rate measuring means for measuring the flow rate of the coating liquid flowing in the main pipe,
(a-2) a plurality of branch pipe flow rate adjusting means respectively provided on the plurality of branch pipes, each for adjusting the flow rate of the coating liquid flowing inside the branch pipe;
With
A state in which the coating liquid from the supply source is supplied in parallel to the plurality of branch pipes through the main pipe is referred to as a “parallel supply state”.
One branch sequentially selected from the plurality of branch pipes is referred to as a “selection branch pipe”, and the state where the coating liquid from the supply source is supplied only to the selected branch pipe among the plurality of branch pipes is “selective”. When called `` supply state ''
The flow rate setting adjusting means is
(b-1) The first flow rate adjustment means for each branch pipe determined based on the correlation between the first flow rate adjustment command value for each of the plurality of branch pipes and the actual flow rate, and the branch flow rate adjustment means. A flow rate setting means for setting the flow rate of each branch pipe to the predetermined flow rate in the parallel supply state;
(b-2) A flow rate in which the main flow rate measured by the main flow rate measuring unit is set to the predetermined flow rate by giving a second adjustment command value to the branch flow rate adjusting unit in the selective supply state. Sequential adjustment means;
(b-3) command value comparing means for comparing the first adjustment command value and the second adjustment command value for each of the plurality of branch pipes;
(b-4) Based on the comparison result by the command value comparing means, a resetting branch extraction is performed to extract a branching pipe from which the correlation characteristic data defining the correlation is to be reset as a target branching pipe among the plurality of branching pipes. Means,
A coating apparatus comprising: In the coating device according to claim 3,
The resetting branch pipe extracting means extracts a branch pipe whose degree of coincidence between the first adjustment command value and the second adjustment command value is lower than a predetermined threshold as the target branch pipe. In the coating device of Claim 3 or Claim 4,
Each has the main pipe and the plurality of branch pipes, and there are a plurality of pipeline systems to which the coating liquid is supplied in parallel from the supply source,
The coating apparatus, wherein the flow rate control means and the flow rate setting adjustment means are individually activated for each of the plurality of pipeline systems. In the coating device according to any one of claims 3 to 5,
The correlation characteristic data is expressed by a function of a first adjustment command value for flow adjustment to the branch flow rate adjusting means for each branch pipe and an actual flow rate of the branch pipe,
The resetting branch extraction means extracts a branching pipe from which the function should be reset among the plurality of branching pipes. The coating apparatus according to claim 6, wherein
The coating apparatus, wherein the resetting of the function performed on the branch pipe extracted by the resetting branch pipe extracting unit is performed by parallel movement of the function. The coating apparatus according to any one of claims 3 to 7,
The branch pipe flow rate adjusting means includes a valve provided in each branch pipe,
Each of the first adjustment command value and the second adjustment command value is a command value corresponding to the opening of the valve,
The command value comparing means compares the valve opening corresponding to the first adjustment command value with the valve opening corresponding to the second adjustment command value. The coating apparatus according to any one of claims 3 to 8, wherein the coating liquid is an organic EL material, a hole transport material, or a hole injection material.

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