JP5956315B2 - Base isolation table - Google Patents

Description

  The present invention relates to a base isolation table for protecting precision instruments and important products from earthquake shaking.

  Patent Document 1 discloses a base isolation table having a structure in which a sphere is arranged in a dish-shaped recess. This base is equipped with a dish-like recess at each of four locations of the square base and the moving board, and the moving board is movably supported on the base via a sphere arranged in each dish-like recess. Precision equipment to be protected is placed on the board. The four spheres arranged in the dish-shaped recess are held by the sphere holding plate and move integrally. The base is supported so as to be horizontally movable on a support plate disposed at the center thereof, and a moving plate is connected to the support plate via a collar and a bolt provided at the center of the support plate. A compression spring is externally fitted to the bolt, and the moving plate is urged toward the base by the force of the compression spring.

  In the base isolation table, the moving plate is connected to the support plate by bolts, so that the moving plate does not come off the base even if the moving plate moves in the vertical direction. Since resistance is generated by moving from the deepest position of the dish-shaped concave portion to the shallow position, horizontal shaking is attenuated. When the sphere reaches the edge of the dish-like recess, the cushion provided on the outer periphery of the collar comes into contact with the periphery (guard) of the hole in the base, and further horizontal movement is restricted. The vertical displacement of the moving board at that time is reduced by the expansion and contraction of the compression spring. When the shaking subsides, the spherical body returns to the center position of the dish-shaped recess by the dead weight of the moving board and the precision instrument placed thereon, and returns to the initial state.

  In addition, in order to prevent the θ-axis rotation of the moving table in the base-isolated table, there is one in which the moving table is moved along the guide rail (Patent Document 2).

JP-A-10-262759 JP 2000-240721 A

  However, in the base isolation table disclosed in Patent Document 1, when the number of spheres is increased to be used for a large apparatus, if the sphere holding plate is used to integrally hold all the spheres, the sphere holding plate has high rigidity. Is required, and the movement of the moving board becomes slow, and the base isolation table becomes heavy. Moreover, since the said base isolation table has connected the moving board to the base | substrate using the volt | bolt and the color | collar, there exists a fault that a structure and an assembly become complicated.

  In addition, since the above-mentioned seismic isolation table suppresses the backlash of the moving board by a compression spring and suppresses rattling, there is a risk that the movement of the moving board may be hindered if the force of the compression spring is generated against the moving board. There is. In particular, when the moving plate moves maximum and the sphere comes to the edge of the dish-shaped recess, the force of the compression spring becomes maximum, and the return operation of the moving plate is hindered.

  In addition, when connecting and using a base-isolated table having a structure in which a sphere is arranged in a dish-shaped recess, a rotational force in the θ-axis direction is generated on the moving plate due to variations in the rolling torque of the sphere generated for each base-isolated table, The moving board may rotate in the θ-axis direction.

  When the moving board rotates in the θ-axis direction, the seismic isolation effect of the base isolation table is reduced, and the load on the base isolation table may randomly rotate in the left-right direction and the loads may collide with each other.

  The seismic isolation table of Patent Document 2 moves the moving table along the guide rail to prevent the rotation of the θ axis, but it is necessary to arrange the four steel balls and adjust the guide rail to each load. There is a problem that it is difficult to modularize the base.

  Moreover, in the case of the base isolation table of Patent Document 2, a space for installing a guide rail for preventing the θ-axis rotation is required, and there is a problem that a compact base isolation base structure is not achieved.

  Moreover, in the case of the base isolation table of Patent Document 2, there is also a problem that it is impossible to prevent the moving table from being lifted in the Z-axis direction.

  Therefore, the present invention can easily connect a plurality of units to form a seismic isolation device for large equipment, simplify the structure and facilitate the assembly, and prevent the movable table from rotating in the θ-axis direction. The issue is to provide a base isolation table.

  In order to solve the above-mentioned problems, the present invention provides a base provided with two dish-like recesses, a moving board provided with two dish-like recesses, and two dish-like recesses and a moving board provided on the base. Each of the spheres disposed between the two dish-shaped recesses, a cage composed of two holding plates that sandwich and connect the spheres from above and below, and fixed to the base. Between the spheres and fixed to the base-side bridge passing through the upper side of the lower holding plate of the two holding plates, and between the spheres. It is provided with a bridge on the moving board passing through the lower side of the upper holding plate among the holding plates, and between the lower holding plate and the bridge on the base side, or between the upper holding plate and the bridge on the moving board side. At least one of the holding plate and the bridge slides according to the movement of the moving plate and the holding plate It is intended to be placed sandwiching the θ-axis rotation preventing member for holding the crossing angle at a constant ridge.

  The θ-axis rotation preventing member has a holding plate guide groove for slidably guiding the holding plate on one surface, and a planar member having a bridge guide groove for slidably guiding the bridge on the other surface. Can be configured.

  A brake mechanism for restricting the movement of the sphere held by the cage can be provided.

  The brake mechanism can be constituted by a sliding member provided between the cage and the sphere, which presses the sphere and applies a frictional force.

  In addition, two or three spheres are arranged between the base and the moving board, and a brake member (friction member) is arranged between each set of spheres. The speed of movement of a set of two or three spheres by applying a frictional force by pressing a brake member (friction member) arranged between each set of spheres with a force of the spheres toward the center of the dish-shaped recess. You may perform the braking which decelerates.

  A large seismic isolation device can be obtained by connecting a plurality of seismic isolation tables of the present invention by connecting members.

  When connecting a plurality of base isolation tables with connecting members to make a large base isolation device, a base isolation base with a θ-axis rotation prevention member sandwiched between the lower holding plate and the bridge on the base side, and the upper base isolation device It is possible to alternately combine a base plate with a θ-axis rotation prevention member sandwiched between the holding plate and the bridge on the moving board side.

  The present invention is advantageous in that it is easy to connect a plurality of units to form a seismic isolation device for a large-sized device, simplify the structure and facilitate assembly, and prevent the rotation of the moving board in the θ-axis direction. Play.

BRIEF DESCRIPTION OF THE DRAWINGS It is the figure which showed the base isolation table which concerns on one Embodiment of this invention, Comprising: The same figure (A) is a top view, The same figure (B) is AA sectional drawing, The same figure (C) is BB sectional drawing. FIG. It is the figure which showed the lower holding plate in the cage | basket of the base isolation table of FIG. 1, Comprising: The figure (A) is a top view, The figure (B) is CC sectional drawing. It is the figure which showed the upper holding plate in the cage | basket of the base isolation table of FIG. 1, Comprising: The figure (A) is a top view, The figure (B) is CC sectional drawing. It is the figure which showed the spacer in the holder | retainer of the base isolation table of FIG. 1, Comprising: The figure (A) is a top view, The figure (B) is a side view. It is the figure which showed the bridge | bridging of the base isolation table of FIG. 1, Comprising: The figure (A) is a front view, The figure (B) is a top view, The figure (C) is a side view. It is a fragmentary perspective view which shows the (theta) axis | shaft rotation prevention member in the base isolation table of FIG. It is the figure which showed the X direction operation | movement of the base isolation table of FIG. 1, Comprising: The figure (A) is a top view, The figure (B) is BB sectional drawing. It is the figure which showed the Y direction operation | movement of the base isolation table of FIG. 1, Comprising: The figure (A) is a top view, The figure (B) is AA sectional drawing. It is the top view which showed the seismic isolation apparatus which connected the some base isolation table. (A) is AA sectional drawing of FIG. 9, (B) is BB sectional drawing of FIG. It is sectional drawing which showed the base isolation table with the brake part which concerns on other embodiment of this invention. It is sectional drawing which showed the base isolation table with the brake part which concerns on other embodiment of this invention. It is sectional drawing which showed the base isolation table with the brake part which concerns on other embodiment of this invention.

Embodiments of the present invention will be described below with reference to the accompanying drawings.
As shown in FIG. 1 (A), FIG. 1 (B) and FIG. 1 (C), the base isolation table 1 of this embodiment is a rectangular base plate 2 provided with two circular dish-shaped recesses 21. And a rectangular moving board 3 provided with two circular dish-like recesses 31. Support protrusions 21a and 31a are respectively formed in the back central portions of the dish-shaped recess 21 and the dish-shaped recess 31, and the support protrusion 21a is fitted and fixed in a support hole 22 formed in the base 2. The support protrusion 31 a is fitted and fixed in a support hole 32 formed in the moving plate 3.

  A steel sphere 4 is disposed between the dish-shaped recess 21 of the base 2 and the dish-shaped recess 31 of the moving board 3. At the origin position in the base isolation table 1, the sphere 4 is located at the bottom of the dish-shaped recesses 21 and 31. For convenience, the direction in which the two spheres 4 are arranged in the base isolation table 1 (longitudinal direction of the base isolation table 1) is the Y direction, the horizontal direction perpendicular to the Y direction is the X direction, and the vertical direction. Is the Z direction.

  The two spheres 4 disposed between the dish-shaped recesses 21 and 31 are held by the cage 5 and can move integrally. The lower (board side) holding plate 51 and the upper (moving plate side) holding plate 52 in the cage 5 are connected in a state where the two spheres 4 are sandwiched from above and below. A spacer 53 is provided between the lower holding plate 51 and the upper holding plate 52.

  As shown in FIGS. 2 (A) and 2 (B), the lower holding plate 51 has a mortar-shaped receiving hole 51a for receiving the sphere 4 at both ends thereof. Further, four screw holes 51b are formed around the receiving hole 51a.

  As shown in FIGS. 3A and 3B, the upper holding plate 52 has a mortar-shaped receiving hole 52a that receives the sphere 4 at both ends thereof. The inclined raised portion 52b has a constant height in the X direction. Screw insertion holes 52b are formed at four locations around the receiving hole 52a.

  As shown in FIGS. 4 (A) and 4 (B), the spacer 53 has a through hole 53a for accommodating the steel ball 4 in the center. Further, screw insertion holes 53b are formed at four locations around the through hole 53a.

    As shown in FIG. 1, a base-side bridge 23 is fixed to the base 2. The bridge 23 on the base side is provided so that its horizontal portion passes between the two spheres 4 and passes above the lower holding plate 51. Further, the bridge 33 on the movable board side is provided so that the horizontal portion passes between the two spheres 4 and below the upper holding plate 52. As shown in FIGS. 5 (A), 5 (B) and 5 (C), both the bridges 23, 33 have leg portions 23a, 33a at both ends, and the leg portions 23a, Two screw insertion holes through which screws for fixing the bridges 23 and 33 to the base 2 or the moving board 3 are inserted are formed in 33a.

  As shown in FIG. 1 and FIG. 6, according to the movement of the moving platen 3, between the lower holding plate 51 and the base-side bridge 23 and between the upper holding plate 52 and the moving plate-side bridge 33. The holding plates 51 and 52 and the bridges 23 and 33 slide to sandwich the θ-axis rotation preventing member 8 that holds the crossing angle between the holding plates 51 and 52 and the bridges 23 and 33 constant.

  The θ-axis rotation preventing member 8 includes a holding plate guide groove 81 that slidably guides the holding plates 51 and 52 on one surface, and slidably guides the bridges 23 and 33 on the other surface. It consists of a planar member having a bridge guide groove 82. The holding plate guide groove 81 and the bridge guide groove 82 are orthogonal to each other in accordance with the crossing angle (90 °) between the holding plates 51 and 52 and the bridges 23 and 33.

  The sliding portions of the holding plate guide groove 81 and the bridge guide groove 82 of the θ-axis rotation preventing member 8 on which the holding plates 51 and 52 and the bridges 23 and 33 slide are provided on a sliding material such as a lubricant and resin, plating, and the like. It is preferable to perform the surface modification treatment or combination treatment thereof.

  As shown in FIGS. 7 (A) and 7 (B), when the base-isolated table 1 receives a shake in the X direction and the base 2 and the moving board 3 move relative to each other in the X direction, The spherical body 4 moves to the edge in the X direction of the dish-shaped recesses 21 and 31. At this time, the holding plates 51 and 52 and the bridges 23 and 33 are guided by the holding plate guide groove 81 and the bridge guide groove 82 of the θ-axis rotation preventing member 8 and are held at a constant crossing angle. No rotation in the θ-axis direction occurs between the panels 3.

  Further, as shown in FIGS. 8A and 7B, when the base isolation table 1 receives a shake in the Y direction and the relative movement in the Y direction of the base 2 and the moving board 3 occurs. The steel ball 4 moves to the edge in the Y direction of the dish-shaped recesses 21 and 31. At this time, the holding plates 51 and 52 and the bridges 23 and 33 are guided by the holding plate guide groove 81 and the bridge guide groove 82 of the θ-axis rotation preventing member 8 and are held at a constant crossing angle. There is no rotation in the θ-axis direction between the panels 3.

  As shown in FIGS. 9 and 10, two large base isolation devices can be manufactured by connecting two base isolation tables 1 with a connecting material 11. Thus, when the base isolation table 1 is connected and the base isolation apparatus for large equipment is produced, the said spherical body 4 increases in units of two. Since the two spheres 4 are integrated by the cage 5 in each seismic isolation table 1, it is possible to increase the number of spheres 4 even when the cages 5 are not coupled to each other. On the other hand, it is not particularly necessary to increase the rigidity of the cage 5, and there are no disadvantages such as an increase in weight and a slow movement of the moving plate. Moreover, since the said base isolation table 1 has connected the said moving board 3 to the said base | substrate 2 using the said bridge | bridging 23,33 and the holding plates 51 and 52 of the holder | retainer 5, a structure and an assembly are easy. . In the base isolation table 1, the holding plates 51 and 52 and the bridges 23 and 33 are guided by the holding plate guide groove 81 and the bridge guide groove 82 of the θ-axis rotation preventing member 8 so that the crossing angle is held constant. Therefore, rotation in the θ-axis direction is prevented between the base 2 and the moving board 3, and the degree of rattling can be reduced.

  Further, since the holding plate 5 is configured to contact the base-side bridge 23 and the mobile-board side bridge 33 at the maximum setting position of the relative position change between the base 2 and the mobile board 3, the mobile board 3 Can be limited within the range of the maximum setting position. Although the edge position of the said dish-shaped recessed parts 21 and 31 was illustrated as said maximum setting position, it can also be set as the position just before an edge.

  9 and 10, the base isolation table 1 (the right side in FIG. 9) in which the θ-axis rotation preventing member 8 is sandwiched between the lower holding plate 51 and the bridge 23 on the base side, A base isolation table (left side in FIG. 9) in which the θ-axis rotation preventing member 8 is sandwiched between the holding plate 52 and the bridge 33 on the moving board side is combined.

  FIGS. 11-13 is sectional drawing which showed the base isolation table 1 provided with the brake mechanism 6 which concerns on other embodiment of this invention.

  The brake mechanism 6 of the base isolation table 1 shown in FIG. 11 is formed with a bottomed hole 61 in the spacer 53 between the lower holding plate 51 and the upper holding plate 52 and directed toward the sphere 4. A spring (biasing member) 62 is provided in the bottom hole 61. A cylindrical brake member (friction member) 63 is inserted into the bottomed hole 61, and the tip end side of the brake member 63 comes into contact with the sphere 4 by the bias of the spring 61, thereby Braking is performed to reduce the moving speed.

  FIG. 12 is a cross-sectional view showing a base isolation table 1 having a brake mechanism 6 according to another embodiment of the present invention.

  The brake mechanism 6 of the base isolation table 1 shown in FIG. 12 includes a mortar-shaped receiving hole 51 a that receives the sphere 4 of the lower holding plate 51 and a mortar-shaped receiving hole that receives the sphere 4 of the upper holding plate 52. A brake member (friction member) 64 for applying a frictional force to the sphere 4 is provided at 52a to perform braking to decelerate the moving speed of the sphere 4.

  FIG. 13 is a cross-sectional view showing a base isolation table 1 having a brake mechanism 6 according to another embodiment of the present invention.

  In the embodiment of FIG. 13, two or three spheres 4 arranged between the dish-shaped recesses 21 and 31 are made into one set, and a brake member (friction member) 65 is arranged between the spheres 4 of each set. The pair of spheres 4 presses the brake member (friction member) 65 disposed between the spheres 4 of each set with a force toward the center of the dish-shaped recesses 21 and 31 by the load so that a friction force is applied. Or you may perform the braking which decelerates the moving speed of a set of three spheres 4.

  Although not shown, it is preferable to provide a shear pin that breaks when a force of a predetermined value or more is generated in the horizontal direction. With such a structure in which the shear pin is provided, it is possible to prevent the moving plate 3 from moving unnecessarily when the shaking is small. The shear pin is provided so as to connect, for example, one place or a plurality of places on the base plate 2 and the moving board 3 between the end faces.

  As mentioned above, although embodiment of this invention was described with reference to drawings, this invention is not limited to the thing of embodiment shown in figure. Various modifications and variations can be made to the illustrated embodiment within the same range or equivalent range as the present invention.

DESCRIPTION OF SYMBOLS 1 Base isolation table 2 Base 21 Dish-shaped recessed part 23 Bridge on the base side 23a Leg part 3 Moving board 31 Dish-shaped recessed part 33 Bridge on the moving board side 33a Leg part 4 Steel ball 5 Cage 51 Lower holding plate 51b Screw hole 52 Upper holding plate 52b Screw insertion hole 53 Spacer 6 Brake mechanism 61 Bottomed hole 62 Spring (biasing member)
63 Brake member (friction member)
64 Brake member (friction member)
65 Brake member (friction member)
8 θ-axis rotation prevention member 81 Holding plate guide groove 82 Bridge guide groove

Claims (7)

  Arranged between a base provided with two dish-like recesses, a moving board provided with two dish-like recesses, and two dish-like recesses of the base and two dish-like recesses of the moving board, respectively Spheres, a cage composed of two holding plates that sandwich and connect the spheres from above and below, and fixed to the base, and between the spheres, the two holding plates A base-side bridge that passes through the upper side of the lower holding plate, and is fixed to the moving plate, and is located between the spheres and below the upper holding plate of the two holding plates. A movable board-side bridge that passes through and is held in accordance with the movement of the movable board between at least one of the lower holding plate and the base-side bridge, or between the upper holding plate and the movable board-side bridge. The θ axis that keeps the crossing angle of the holding plate and bridge constant by sliding the plate and the bridge MenShindai, characterized in that placed sandwiching the rolling preventing member.   The θ-axis rotation preventing member includes a holding plate guide groove that slidably guides the holding plate on one surface, and a planar member that includes a bridge guide groove that slidably guides the bridge on the other surface. The base isolation table according to claim 1.   The base isolation table according to claim 1 or 2, further comprising a brake mechanism for restricting movement of the sphere held by the cage.   The base isolation table according to claim 3, wherein the brake mechanism includes a friction member that is provided between the cage and the sphere and presses the sphere to apply a friction force.   Two or three spheres are arranged between the base and the moving board, and a pair of sliding members is arranged between the spheres of each set. The seismic isolation table according to claim 3, wherein a frictional force is applied by pressing a friction member disposed between each pair of spheres with a force toward the center of the recess.   The seismic isolation apparatus which connected the seismic isolation stand of the said Claims 1-5 with the connection member.   The θ-axis rotation prevention member between the lower holding plate and the base-side bridge with the θ-axis rotation preventing member interposed therebetween, and the upper holding plate and the movable board-side bridge preventing θ-axis rotation. The seismic isolation apparatus according to claim 6, wherein the base isolation bases according to claims 1 to 5 sandwiching members are alternately combined and connected.

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