JP5937647B2 - Gas distribution connection packing and gas distribution connection using the same - Google Patents

Gas distribution connection packing and gas distribution connection using the same Download PDF

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JP5937647B2
JP5937647B2 JP2014173913A JP2014173913A JP5937647B2 JP 5937647 B2 JP5937647 B2 JP 5937647B2 JP 2014173913 A JP2014173913 A JP 2014173913A JP 2014173913 A JP2014173913 A JP 2014173913A JP 5937647 B2 JP5937647 B2 JP 5937647B2
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JP2016048103A (en
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清香 鈴木
清香 鈴木
小浦　輝政
輝政 小浦
史和 野澤
史和 野澤
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Air Liquide Japan GK
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本発明は、ガス流通部接続用パッキン（以下単に「パッキン」ということがある）およびそれを用いたガス流通接続部に関し、例えば、半導体や太陽電池等の生産装置や研究設備等において使用される材料ガスや各種プロセスにおいて使用される液化ガスや特殊ガス等のガス供給装置において用いられるガス流通部接続用パッキンおよびそれを用いたガス流通接続部に関するものである。
TECHNICAL FIELD The present invention relates to a gas distribution part connection packing (hereinafter sometimes simply referred to as “packing”) and a gas distribution connection part using the same, and is used, for example, in production apparatuses and research facilities such as semiconductors and solar cells. The present invention relates to a gas distribution part connection packing used in a gas supply apparatus such as a material gas or a liquefied gas or special gas used in various processes, and a gas distribution connection part using the same.

半導体や太陽電池等（例えば成膜材料等）を生産する製造装置や新たな素材を開発する研究設備、あるいは各種プロセスにおいては、各種の材料ガスや特殊ガスあるいは液体材料ガス等が多用されている。こうしたガスの中には、高い吸着性や強い腐食性を有するもの、あるいは空気中の水分と反応や吸湿して変質するもの等があり、ガス供給配管系は、外気と遮蔽あるいは密閉され、上記製造装置等に供給されて消費される。   Various material gases, special gases, liquid material gases, etc. are frequently used in manufacturing equipment for producing semiconductors, solar cells, etc. (for example, film forming materials), research facilities for developing new materials, and various processes. . Among these gases, there are those having high adsorptivity and strong corrosivity, or those that react with moisture in the air or change moisture, and the gas supply piping system is shielded or sealed from outside air, It is supplied to a manufacturing apparatus and consumed.

こうしたガス供給配管系には多くのガス流通接続部が備えられ、定期的に保守点検のための取外し作業や取り付け作業が行なわれる。このため、ガス流通接続部においては、配管系を構成する接続部材に接続するナット間に導入するパッキンが多く用いられる。このとき、例えばガスシリンダーとガス供給装置の接続は、ガス漏洩の危険性が非常に高い箇所であるため、こうしたシールに用いられるパッキンに対しては、その変形量を管理すべく、ナットの締め付けトルクが管理される。つまり、トルク値が管理・校正されたトルクレンチを使用し、規定値内のトルクで締付け、ガス漏洩を防止する必要がある。トルクレンチのトルク値が管理・校正されていない場合は、締付を実施してもガス漏洩が発生する可能性がある。一方、こうした管理を必要としない構成を有するガス流通接続部は、従前からガス供給装置における課題の１つであり、種々の検討がなされてきた。   Such a gas supply piping system is provided with a lot of gas circulation connection parts, and a detaching work and a mounting work for maintenance and inspection are periodically performed. For this reason, in a gas distribution connection part, many packings introduce | transduced between the nuts connected to the connection member which comprises a piping system are used. At this time, for example, the connection between the gas cylinder and the gas supply device is a place where there is a very high risk of gas leakage. Therefore, for the packing used for such a seal, tighten the nut to control the amount of deformation. Torque is managed. In other words, it is necessary to use a torque wrench whose torque value is controlled and calibrated and tighten with a torque within a specified value to prevent gas leakage. If the torque value of the torque wrench is not controlled or calibrated, gas leakage may occur even if tightening is performed. On the other hand, the gas distribution connection portion having a configuration that does not require such management has been one of the problems in the gas supply device, and various studies have been made.

例えば、メスナットを過剰に締め付けた場合でも、合成樹脂製ガスケットの変形量を最小限に抑制することができることを目的として、図６に示すようなガスシリンダーバルブ接続継手が提案されている（例えば特許文献１参照）。具体的には、グランド１０５を着脱自在に嵌合するメスナット１０４内周のネジ部と、ガスシリンダーバルブ出口１０３外周のネジ部とを螺合させつつ前記グランド１０５とガスシリンダーバルブ出口１０３との間に介在する合成樹脂製ガスケット１０６を押圧して、前記ガスシリンダーバルブ出口１０３に接続するガスシリンダーバルブ接続継手において、前記ガスケット１０６の外周に過剰締め付けを防止する金属製リング１０７を装着した。ここで、１０８はスラストベアリングを、１０９はワイヤ−リングを、１１０はガス漏洩試験のための貫通孔を、１１１はメスナット外周の円形部を示す。   For example, a gas cylinder valve connection joint as shown in FIG. 6 has been proposed for the purpose of minimizing the amount of deformation of the synthetic resin gasket even when the female nut is tightened excessively (for example, a patent) Reference 1). Specifically, the thread portion on the inner periphery of the female nut 104 to which the gland 105 is detachably fitted and the thread portion on the outer periphery of the gas cylinder valve outlet 103 are screwed together, so that the gap between the gland 105 and the gas cylinder valve outlet 103 is engaged. In the gas cylinder valve connection joint connected to the gas cylinder valve outlet 103 by pressing the synthetic resin gasket 106 interposed therebetween, a metal ring 107 for preventing excessive tightening was attached to the outer periphery of the gasket 106. Here, 108 is a thrust bearing, 109 is a wire ring, 110 is a through-hole for a gas leakage test, and 111 is a circular portion on the outer periphery of the female nut.

特開平１０−３２５４９３号公報Japanese Patent Laid-Open No. 10-325493

しかし、上記のようなガス流通接続部には、以下の課題が生じることがあった。
（ｉ）従前のガス流通接続部においては、供給するガス種が腐食性を有する場合はパッキン材を考慮し、反応性・耐食性など安全かつシール性の高いパッキンを使用しなければならない。また、フッ素ガス等の腐食性ガスは反応性がきわめて高いため、ガス供給設備に導入するパッキン材は合成樹脂系の材料は使用できず、耐食性の優れた金属材料を選択することが望ましい。しかしながら、金属材料のパッキンは高硬度のため、十分なシール性を確保しガス漏洩を防止するには、特殊なシール面の精度や接続部との接合構造が必要となる場合があるという問題があった。
（ii）金属製リングを装着したガスケットを用いたガス流通接続部においては、金属性リング以外は合成樹脂製のパッキン材を使用しているため、酸化、反応性が高いガス供給装置には使用できないという問題がある。また、ガスケットのシール性は、従前同様、ガスケットの平面部における面全体の変形量に依存することから、その一部で異常な変形が生じた場合には、シール性が破壊され、その漏洩箇所の特定・修復が難しいという課題があった。特にガスケットに異常がなく、接続部材のシール表面のキズ等があった場合には、その漏洩箇所の特定はさらに困難となる。
（iii）また、従前の金属製パッキンは、フッ素ガス等の腐食性ガスに対するシール性を確保するために、所定の締付けトルクにてガス流通接続部を接合し締付ける必要があった。このとき、ガス流通接続部を構成する継手スリーブに配置された金属製パッキンが変形して脱着できなくなるという問題が発生する。パッキンが脱着できなくなった場合は、ガス供給設備のガス流通接続部を含む配管を交換する必要が発生し、交換の期間中は、ガスの供給ができなくなり、コスト面を含む保守の負担が大きくなるという問題も発生する。また、パッキンが脱着できたとしても、パッキンとスリーブに過剰な力を加える必要があるため、スリーブ側にキズが発生し、このキズがガスリークの原因になるという問題があった。 However, the following problems may occur in the gas distribution connection section as described above.
(I) In the conventional gas distribution connection portion, when the gas type to be supplied is corrosive, the packing material must be taken into consideration and a safe and highly sealable packing such as reactivity and corrosion resistance must be used. In addition, since corrosive gases such as fluorine gas have extremely high reactivity, it is desirable to select a metal material having excellent corrosion resistance as the packing material introduced into the gas supply facility cannot use a synthetic resin material. However, since the packing of the metal material is high in hardness, there is a problem that special sealing surface accuracy and a joint structure with the connection part may be required to ensure sufficient sealing performance and prevent gas leakage. there were.
(Ii) Gas distribution connection parts using gaskets with metal rings use synthetic resin packing materials other than metal rings, so they are used for gas supply devices with high oxidation and reactivity. There is a problem that you can not. In addition, since the sealing performance of the gasket depends on the deformation amount of the entire surface of the flat portion of the gasket as before, if an abnormal deformation occurs in a part of the gasket, the sealing performance is destroyed and the leakage location There was a problem that it was difficult to identify and repair. In particular, when there is no abnormality in the gasket and there is a scratch or the like on the seal surface of the connecting member, it is more difficult to identify the leaked portion.
(Iii) Moreover, in order to ensure the sealing performance with respect to corrosive gas, such as fluorine gas, it was necessary for the conventional metal packing to join and tighten the gas flow connection portion with a predetermined tightening torque. At this time, there arises a problem that the metal packing disposed on the joint sleeve constituting the gas flow connecting portion is deformed and cannot be detached. When the packing cannot be removed, it is necessary to replace the piping including the gas distribution connection part of the gas supply facility. During the replacement period, the gas cannot be supplied, and the maintenance burden including cost is heavy. The problem that becomes. Even if the packing can be removed, there is a problem in that an excessive force needs to be applied to the packing and the sleeve, so that a flaw is generated on the sleeve side and this flaw causes a gas leak.

本発明の目的は、高い吸着性や強い腐食性を有するガス種あるいは反応性の高いガス種等に対しても、簡便な構成で、外気との接触なくガス流通路の確実なシールを確保するとともに、シール面でのパッキンの変形あるいはパッキンに対する局部的な応力による変形があっても、容易に脱着ができるガス流通部接続用パッキンおよびそれを用い、保守が容易で、再現性のよい確実なシール部を構成することができるガス流通接続部を提供することにある。   An object of the present invention is to ensure a reliable seal of a gas flow path with no contact with outside air with a simple structure even for gas species having high adsorptivity and strong corrosivity or highly reactive gas species. In addition, even if there is deformation of the packing on the seal surface or deformation due to local stress on the packing, it is easy to maintain and use the packing for connecting the gas flow section that can be easily detached, and reliable and reliable. An object of the present invention is to provide a gas flow connection part that can constitute a seal part.

本発明者らは、上記課題を解決するために鋭意研究を重ねた結果、以下に示すガス流通部接続用パッキンおよびそれを用いたガス流通接続部によって上記目的を達成できることを見出し、本発明を完成するに到った。   As a result of intensive studies to solve the above problems, the present inventors have found that the above object can be achieved by the following gas distribution part connection packing and a gas distribution connection part using the same. It came to completion.

本発明は、ガス流通部の端部に設けられた接続部材が複数接続されるガス流通接続部に用いられるガス流通部接続用パッキンであって、該ガス流通部接続用パッキンの中心軸を含む中央部分に設けられた開口部と、該開口部の周端部分を一端として所定の厚みを有して相対向する所定長さの平坦面を有する平坦部と、該平坦部の内周部分と連続的に接合する一端部分および前記開口部の中心側に所定の厚みを有する突出部分が形成された他端部分を有する突状部と、を備えるガス流通部接続用パッキンであって、前記接続部材が接続された状態において、前記平坦面および前記突状部の一端部分が前記接続部材に係止してシールを形成し、前記突状部の他端部分が弾性的に変形して前記接続部材の一部に係止するとともに、前記接続部材の接続が解除された状態において、前記突状部の他端部分の係止が解除され、前記一端部分の係止が解除されることによって、前記ガス流通部接続用パッキンの前記接続部材との係止が解除されることを特徴とする。
The present invention is a gas circulation part connection packing used for a gas circulation connection part to which a plurality of connection members provided at an end of the gas circulation part are connected, and includes a central axis of the gas circulation part connection packing An opening provided in the central portion, a flat portion having a predetermined length and facing each other with a predetermined thickness with the peripheral end portion of the opening as one end, and an inner peripheral portion of the flat portion A gas flow portion connecting packing comprising: one end portion continuously joined and a projecting portion having a second end portion formed with a projecting portion having a predetermined thickness on the center side of the opening, In a state where the member is connected, the flat surface and one end portion of the projecting portion are locked to the connection member to form a seal, and the other end portion of the projecting portion is elastically deformed to form the connection. Locking to a part of the member and connecting the connecting member. In the state but that has been released, the engagement of the other end portion of the projecting portion is released, by engagement of the one end portion is released, the locking of said connecting member of said gas distribution part connected packing Is released.

また、本発明は、ガス流通部の端部に設けられた接続部材が複数接続されるガス流通接続部に用いられるガス流通部接続用パッキンであって、該ガス流通部接続用パッキンの中心軸を含む中央部分に設けられた開口部と、該開口部の周端部分を一端として所定の厚みを有して相対向する所定長さの平坦面を有する平坦部と、該平坦部の外周部分と連続的に接合する一端部分および前記平坦部の外周側に所定の厚みを有する突出部分が形成された他端部分を有する突状部と、を備えるガス流通部接続用パッキンであって、前記接続部材が接続された状態において、前記平坦面および前記突状部の一端部分が前記接続部材に係止してシールを形成し、前記突状部の他端部分が弾性的に変形して前記接続部材の一部に係止するとともに、前記接続部材の接続が解除された状態において、前記突状部の他端部分の係止が解除され、前記一端部分の係止が解除されることによって、前記ガス流通部接続用パッキンの前記接続部材との係止が解除されることを特徴とする。
Further, the present invention is a gas circulation part connection packing used for a gas circulation connection part to which a plurality of connection members provided at an end of the gas circulation part are connected, and the central axis of the gas circulation part connection packing An opening provided in a central portion including the flat portion, a flat portion having a predetermined thickness and having a predetermined thickness with the peripheral end portion of the opening as one end, and an outer peripheral portion of the flat portion A gas flow portion connection packing comprising: one end portion continuously joined to the outer peripheral side of the flat portion and a projecting portion having a projecting portion having a predetermined thickness formed on the outer peripheral side of the flat portion, In a state where the connecting member is connected, one end portion of the flat surface and the protruding portion is locked to the connecting member to form a seal, and the other end portion of the protruding portion is elastically deformed to The connection portion is locked to a part of the connection member and the connection portion. Of the state of connection is released, the locking of the other end portion of the projecting portion is released, by engagement of the one end portion is released, and the connecting member of the gas distribution part connected packing The locking is released.

こうした構成によって、ガス流通路の確実なシールを確保するとともに、シール面での流通部接続用パッキンの変形あるいは流通部接続用パッキンに対する局部的な応力による変形があっても、容易に脱着ができるガス流通部接続用パッキンを形成することが可能となった。つまり、接続部材の接続状態において、所定の厚みを有して相対向する所定長さの平坦面および突状部の一端部分が接続部材に係止してシールを形成することによって、ガス流通路の確実なシールを確保することができる。と同時に、平坦部の内周部分または外周部分と連続的に接合する突状部の他端部分が、接続部材の一部に弾性的に変形して係止することによって、他端部分が受けた応力が突状部全体（一端部分を含む）に働くとともに平坦面にも伝わる。この状態で、接続部材の接続解除に伴い他端部分と接続部材の係止が解除されると、突状部の一端部分および平坦面に働いていた応力が解除され、小さな力を作用させるだけで、一端部分および平坦面の接続部材への係止を解除することが可能となる。
With such a configuration, it is possible to secure a reliable seal of the gas flow passage, and to easily remove and attach even if there is deformation of the flow-portion connection packing on the seal surface or deformation due to local stress on the flow-portion connection packing. It became possible to form a packing for connecting a gas flow part. In other words, in the connected state of the connecting member, a flat surface having a predetermined thickness and facing each other with a predetermined length and one end portion of the projecting portion engage with the connecting member to form a seal, thereby forming a gas flow passage. A reliable seal can be secured. At the same time, the other end portion of the projecting portion that is continuously joined to the inner peripheral portion or the outer peripheral portion of the flat portion is elastically deformed and locked to a part of the connecting member, so that the other end portion is received. The stress applied to the entire protrusion (including one end portion) is transmitted to the flat surface. In this state, when the locking of the other end portion and the connecting member is released along with the release of the connecting member, the stress acting on the one end portion of the projecting portion and the flat surface is released, and only a small force is applied. Thus, the locking of the one end portion and the flat surface to the connecting member can be released.

本発明は、上記ガス流通部接続用パッキンであって、前記突状部が、前記一端部分から前記他端部分に対して暫次薄厚となる断面形状を形成することを特徴とする。
上記のように、本発明に係るガス流通部接続用パッキンは、接続部材の接続状態において接続部材の一部に弾性的に変形して係止した突状部の他端部分が、接続部材の接続解除に伴い接続部材との係止が解除されることが起点となり、容易に接続部材からの脱着を行うことができる。このとき、他端部分が弾性的に変形する機能は、接続部材と係止する他端部分の面積（容積）が所定量以上であることが条件となるとともに、それを超えると面積が小さいほど機能が上昇する。本発明は、一端部分から他端部分に対して暫次薄厚となる断面形状とすることによって、こうした機能の向上を図ることを可能とした。 The present invention is the gas-flow-portion-connecting packing, wherein the protruding portion forms a cross-sectional shape that is temporarily thin from the one end portion to the other end portion.
As described above, the gas flow portion connection packing according to the present invention has the other end portion of the projecting portion elastically deformed and locked to a part of the connection member in the connection state of the connection member. It becomes the starting point that the locking with the connection member is released along with the release of the connection, so that the connection member can be easily detached. At this time, the function of elastically deforming the other end portion is that the area (volume) of the other end portion engaged with the connecting member is equal to or larger than a predetermined amount. Function rises. In the present invention, such a function can be improved by adopting a cross-sectional shape that is temporarily thin from one end portion to the other end portion.

本発明は、上記ガス流通部接続用パッキンであって、前記他端部分が、前記中心軸に垂直な断面形状として多角形状を形成し、該多角形状を形成する２以上の角部分または辺部分が、弾性的に変形して前記接続部材の一部に係止することを特徴とする。
突状部の他端部分は接続部材との係止が解除された時にその応力が広く分散することが好ましい。本発明は、他端部分が所定の広角を有する角部分または所定の長さを有する辺部分の一部であるとき、接続部材との弾性的変形を伴う係止状態においても、係止部分以外の部分は殆ど変形せずその応力も小さい。従って、接続部材との係止状態が解除されると、他端部分に働いていた応力の多くは角部分または辺部分の他の部分に分散し、他端部分の接続部材との係止が直ちに解除される。本発明は、流通部接続用パッキンの他端部分の断面形状を多角形状とし、その角部分または辺部分が、弾性的に変形して接続部材の一部に係止するように構成することによって、こうした機能を有効に活かすことを可能にした。
The present invention is the above gas-flow-portion-connecting packing, wherein the other end portion forms a polygonal shape as a cross-sectional shape perpendicular to the central axis, and two or more corner portions or side portions forming the polygonal shape However, it is elastically deformed and locked to a part of the connecting member.
It is preferable that the stress of the other end portion of the protruding portion is widely dispersed when the engagement with the connecting member is released. In the present invention, when the other end portion is a corner portion having a predetermined wide angle or a part of a side portion having a predetermined length, even in the locking state accompanied by elastic deformation with the connecting member, This part is hardly deformed and its stress is small. Therefore, when the locked state with the connecting member is released, most of the stress acting on the other end portion is distributed to the other portions of the corner portion or the side portion, and the locking of the other end portion with the connecting member is not performed. It is released immediately. According to the present invention, the cross-sectional shape of the other end portion of the circulation portion connecting packing is a polygonal shape, and the corner portion or the side portion is elastically deformed to be locked to a part of the connecting member. This makes it possible to make effective use of these functions.

本発明は、上記ガス流通部接続用パッキンであって、前記突状部がニッケル系材料からなり、前記平坦面と前記突状部の一端部分が同じ厚みを有することを特徴とする。
フッ素ガス等高い吸着性や強い腐食性・反応性を有するガスに対しても、確実なシールを確保するには、金属製パッキンが好ましい一方、弾性的に変形し上記のように平坦面に対しても応力の伝達・解除を行う特性を兼ね備えることが好ましい。本発明者は、種々の検証の結果、突状部をニッケル系材料で構成することによって、こうした特性を確保することができることを見出した。また、このとき、平坦面と突状部の一端部分が同じ厚みを有することによって、その応力伝達を高め、平坦面での接続部材との接続解除を容易にすることが可能となった。
The present invention is the above gas packing connection gasket, wherein the protruding portion is made of a nickel-based material, and the flat surface and one end portion of the protruding portion have the same thickness.
Metal gaskets are preferable to ensure a reliable seal even for gases with high adsorptivity, such as fluorine gas, and strong corrosiveness and reactivity, while elastically deforming against flat surfaces as described above However, it is preferable to combine the characteristics of transmitting and releasing stress. As a result of various verifications, the present inventor has found that such characteristics can be ensured by configuring the protrusions with a nickel-based material. Further, at this time, since the flat surface and the one end portion of the projecting portion have the same thickness, it is possible to increase the stress transmission and to easily release the connection with the connection member on the flat surface.

本発明は、上記ガス流通部接続用パッキンを用い、ガス流通部の端部に設けられた接続部材が複数接続されるガス流通接続部であって、前記接続部材が、前記ガス流通部を周回するように、少なくとも１つの平坦なシール面および該シール面と所定の角度で繋がるスリーブを備え、前記接続部材が接続された状態において、前記シール面に前記ガス流通部接続用パッキンの平坦面および突状部の一端部分が係止してシールを形成し、前記スリーブの一部に前記突状部の他端部分が弾性的に変形して係止するとともに、前記接続部材の接続が解除された状態において、前記突状部の他端部分の係止が解除され、前記突状部の一端部分の係止を解除することによって、前記ガス流通部接続用パッキンの前記接続部材との係止が解除されることを特徴とする。
上記のように、本発明に係るガス流通部接続用パッキンは、接続部材の接続状態において接続部材の一部に弾性的に変形して係止した突状部の他端部分が、接続部材の接続解除に伴い接続部材との係止が解除されることが起点となる。このとき、こうした突状部の他端部分の機能を効果的に活かすためには、他端部分が係止する接続部材の構成が重要となる。本発明は、接続部材がガス流通部を周回するように、少なくとも１つの平坦なシール面および該シール面と所定の角度で繋がるスリーブを備えることによって、こうした他端部分の機能を活かすとともに、保守が容易で、再現性のよい確実なシール部を構成することができるガス流通接続部を形成することが可能となった。
The present invention is a gas flow connection portion in which a plurality of connection members provided at an end of the gas flow portion are connected using the gas flow portion connection packing, and the connection member circulates around the gas flow portion. And at least one flat sealing surface and a sleeve connected to the sealing surface at a predetermined angle, and in a state where the connecting member is connected, the flat surface of the gas circulation portion connecting packing and the sealing surface, One end portion of the protruding portion is locked to form a seal, and the other end portion of the protruding portion is elastically deformed and locked to a part of the sleeve, and the connection of the connecting member is released. In this state, the locking of the other end portion of the protruding portion is released, and the locking of the one end portion of the protruding portion is released, thereby locking the packing for connecting the gas flow portion with the connecting member. Is released To.
As described above, the gas flow portion connection packing according to the present invention has the other end portion of the projecting portion elastically deformed and locked to a part of the connection member in the connection state of the connection member. The starting point is that the locking with the connection member is released along with the release of the connection. At this time, in order to effectively utilize the function of the other end portion of the projecting portion, the configuration of the connection member that the other end portion engages becomes important. The present invention is provided with at least one flat seal surface and a sleeve connected to the seal surface at a predetermined angle so that the connection member circulates around the gas flow part, thereby making use of the function of the other end portion and maintenance. Therefore, it is possible to form a gas flow connection portion that can form a reliable seal portion that is easy and reproducible.

本発明に係るガス流通部接続用パッキンの基本構成例を示す概略図Schematic which shows the basic structural example of the gas distribution part connection packing which concerns on this invention 本発明に係るガス流通部接続用パッキンの第２構成例を示す概略図Schematic which shows the 2nd structural example of the gas circulation part connection packing which concerns on this invention. 本発明に係るガス流通部接続用パッキンの第３構成例を示す概略図Schematic which shows the 3rd structural example of the gas distribution part connection packing which concerns on this invention. 本発明に係るガス流通部接続用パッキンの第４構成例を示す概略図Schematic which shows the 4th structural example of the gas distribution part connection packing which concerns on this invention. 本発明に係るガス流通接続部の構成例を示す概略図Schematic showing an example of the configuration of a gas distribution connection unit according to the present invention 従来技術に係るガスシリンダーバルブ接続継手を例示する概略図Schematic illustrating a gas cylinder valve connection joint according to the prior art

本発明に係るガス流通部接続用パッキン（以下「本パッキン」という）は、ガス流通部の端部に設けられた接続部材が複数接続されるガス流通接続部に用いられ、本パッキンの中心軸を含む中央部分に設けられた開口部と、開口部の周端部分を一端として所定の厚みを有して相対向する所定長さの平坦面を有する平坦部と、平坦部と連続的に接合する一端部分および所定の厚みを有する突出部分が形成された他端部分を有する突状部と、を備え、接続部材が接続された状態において、平坦面および突状部の一端部分が接続部材に係止してシールを形成し、突状部の他端部分が弾性的に変形して接続部材の一部に係止するとともに、接続部材の接続が解除された状態において、突状部の他端部分の係止が解除され、一端部分の係止が解除されることによって、本パッキンの接続部材との係止が解除されることを特徴とする。以下、図面を参照しながら説明する。
The gas circulation part connection packing according to the present invention (hereinafter referred to as “the present packing”) is used for a gas circulation connection part to which a plurality of connection members provided at the end of the gas circulation part are connected, and the central axis of the packing An opening provided in a central portion including a flat portion, a flat portion having a predetermined thickness and having a predetermined thickness with a peripheral end portion of the opening as one end, and a flat portion continuously joined to each other And a projecting portion having the other end portion formed with a projecting portion having a predetermined thickness, and in a state where the connecting member is connected, the flat surface and the one end portion of the projecting portion serve as the connecting member. The other end portion of the projecting portion is elastically deformed to be engaged with a part of the connection member, and the other of the projecting portion is disconnected in a state where the connection of the connection member is released. End part is unlocked and one end part is unlocked And by, characterized in that the locking of the connecting member of the present packing is released. Hereinafter, description will be given with reference to the drawings.

＜本パッキンの基本構成例＞
図１（Ａ），（Ｂ）は、本パッキンの基本的な構成を例示する概略図である。本パッキン１０は、その中心軸Ｍを含む中央部分に設けられた開口部１と、開口部１の周端部分１ａを一端として所定の厚みを有して相対向する所定長さの平坦面２ａ，２ｂを有する平坦部２と、平坦部２の内周部分２ｃと連続的に接合する一端部分３ａおよび開口部１の中心側に所定の厚みを有する突出部分が形成された他端部分３ｂを有する突状部３と、を備える。図１（Ａ）は、突状部３を４つ有する構成を例示し、図１（Ｂ）は、突状部３を２つ有する構成を例示するが、突状部３の数量および形状は、ガス流通接続部（後述する）の構成によって任意に設定可能である。本パッキン１０は、複数の接続部材が接続されるガス流通接続部に用いられ、接続部材が接続された状態において、平坦面２ａ，２ｂおよび突状部３の一端部分３ａが接続部材に係止してシールを形成する。平坦面２ａ，２ｂが所定長さにおいて接続部材に係止することによって、より確実なシール性を確保することができる。このとき、平坦面２ａ，２ｂおよび突状部３の一端部分３ａ以外に、平坦部２の外周部分等他の部位において、接続部材に係止してシールを形成する構成を用いることができる。また、平坦部２を構成する素材および所定長さは、流通するガス種によって選定される。詳細は後述する。 <Basic configuration example of this packing>
1A and 1B are schematic views illustrating the basic configuration of the packing. The packing 10 has a flat surface 2a having a predetermined length and having a predetermined thickness with an opening 1 provided in a central portion including the central axis M and a peripheral end portion 1a of the opening 1 as one end. , 2b, one end portion 3a continuously joined to the inner peripheral portion 2c of the flat portion 2, and the other end portion 3b formed with a projecting portion having a predetermined thickness on the center side of the opening portion 1. And a protruding portion 3 having the same. 1A illustrates a configuration having four projecting portions 3, and FIG. 1B illustrates a configuration having two projecting portions 3. The number and shape of the projecting portions 3 are as follows. It can be arbitrarily set depending on the configuration of the gas distribution connection part (described later). The packing 10 is used for a gas flow connecting portion to which a plurality of connecting members are connected. When the connecting members are connected, the flat surfaces 2a and 2b and one end portion 3a of the protruding portion 3 are locked to the connecting member. To form a seal. By securing the flat surfaces 2a and 2b to the connection member at a predetermined length, it is possible to ensure a more reliable sealing property. At this time, in addition to the flat surfaces 2 a and 2 b and the one end portion 3 a of the protruding portion 3, it is possible to use a configuration in which a seal is formed by engaging with the connecting member at other portions such as the outer peripheral portion of the flat portion 2. Moreover, the raw material which comprises the flat part 2, and predetermined length are selected by the gas species to distribute | circulate. Details will be described later.

突状部３の一端部分３ａは、平坦部２の内周部分２ｃと連続的に接合して接続部材に係止してシールを形成するとともに、接続部材の接続状態において、接続部材から受ける応力および平坦部２が接続部材から受ける応力を受けて突状部３に伝達し分散させる機能を有する。また、接続部材の接続が解除された状態において、一端部分３ａは平坦面２ａ，２ｂとともに、一面側の接続部材との係止が解除され、接続部材から受ける応力が解除される。このとき、平坦面２ａ，２ｂと一端部分３ａが同じ厚みを有することが好ましい。さらなるシール面を確保するとともに、平坦部２と突状部３の間の応力伝達機能を高め、平坦面２ａ，２ｂでの接続部材との接続解除を容易にし、本パッキン１０の接続解除を容易に行うことができる。   One end portion 3a of the projecting portion 3 is continuously joined to the inner peripheral portion 2c of the flat portion 2 and locked to the connecting member to form a seal, and stress received from the connecting member in the connected state of the connecting member In addition, the flat portion 2 has a function of receiving stress received from the connection member and transmitting the stress to the projecting portion 3 and dispersing it. Further, in the state where the connection of the connecting member is released, the one end portion 3a is released from the locking with the connecting member on the one surface side together with the flat surfaces 2a and 2b, and the stress received from the connecting member is released. At this time, it is preferable that the flat surfaces 2a and 2b and the one end portion 3a have the same thickness. While securing a further sealing surface, the stress transmission function between the flat part 2 and the protruding part 3 is enhanced, the connection with the connecting member on the flat surfaces 2a and 2b is facilitated, and the connection of the packing 10 is facilitated. Can be done.

一方、他端部分３ｂは、所定の厚みを有する突出部分が形成されるとともに、接続部材の接続状態において、接続部材の一部に係止することによって弾性的に変形し接続部材から受ける応力を突状部３に伝達し分散させる機能を有する。また、接続部材の接続が解除された状態において、他端部分３ｂは、接続部材との係止が解除される。他端部分３ｂの係止が解除されることによって、変形していた他端部分３ｂは弾性力によって元の状態に戻るとともに、これと繋がる一端部分３ａ、さらに平坦部２が受けていた応力による歪みを軽減し、一端部分３ａおよび平坦部２の接続部材との係止を容易に解除し、本パッキン１０を容易に接続部材から脱着させることができる。つまり、本パッキン１０の一部である他端部分３ｂにおいて弾性的に変形して接続部材と係止することによって、その一部分を含む突状部３全体でその歪を吸収し、該接合部分での変形量について塑性変形を生じる領域を低減することができるとともに、他端部分３ｂにおける接続部材との係止が解除されることによって、本パッキン１０全体が弾性変形に近い復元力によって容易に接続部材から脱着させることができるという機能を有する。なお、一端部分３ａおよび他端部分３ｂと接続部材の係止は、その全体を係止することを意味するものではなく、局部的あるいは部分的に係止することによって、シール機能や弾性的な変形機能を確保することができる場合を含む。   On the other hand, the other end portion 3b is formed with a protruding portion having a predetermined thickness, and in the connected state of the connecting member, the other end portion 3b is elastically deformed by being locked to a part of the connecting member and receives stress from the connecting member. It has a function of transmitting and distributing to the protrusion 3. Further, in the state where the connection of the connecting member is released, the other end portion 3b is released from the engagement with the connecting member. When the other end portion 3b is unlocked, the deformed other end portion 3b is restored to its original state by the elastic force, and the one end portion 3a connected to the other end portion 3b and the flat portion 2 are subjected to stress. The distortion can be reduced, the engagement of the one end portion 3a and the flat portion 2 with the connecting member can be easily released, and the packing 10 can be easily detached from the connecting member. In other words, by elastically deforming and engaging with the connecting member at the other end portion 3b which is a part of the packing 10, the distortion is absorbed by the entire projecting portion 3 including the portion, and at the joint portion. The region in which plastic deformation occurs can be reduced with respect to the amount of deformation, and the locking of the other end portion 3b with the connecting member is released, so that the entire packing 10 is easily connected by a restoring force close to elastic deformation. It has a function of being able to be detached from the member. Note that the engagement between the one end portion 3a and the other end portion 3b and the connection member does not mean that the entire member is locked, but the sealing function or the elastic property is achieved by locally or partially locking. Including the case where the deformation function can be secured.

対象となるガスは、限定することはないが、特に高い吸着性や強い腐食性を有するガス種あるいは反応性の高いガス種などには、その特徴を有効に活かすことができる。具体的には、フッ素ガス（Ｆ２），ＮＨ３，ＢＣＬ３，ＣＬ２，ＳｉＨ２ＣＬ２，Ｓｉ２Ｈ６、ＨＢｒ、ＨＦ、Ｎ２Ｏ、Ｃ３Ｆ８、ＳＦ６、ＷＦ６等に代表される材料ガス等を挙げることができる。また、ヘリウム（Ｈｅ）やアルゴン（Ａｒ）等の希ガスあるいは窒素ガス（Ｎ２）等のような反応性が低く安定性の高いガスへの適用が可能であることはいうまでもない。 The target gas is not limited, but the characteristics can be effectively utilized particularly for gas species having high adsorptivity and strong corrosivity or highly reactive gas species. Specifically, fluorine gas (F 2 ), NH 3 , BCL 3 , CL 2 , SiH 2 CL 2 , Si 2 H 6 , HBr, HF, N 2 O, C 3 F 8 , SF 6 , WF 6, etc. The material gas etc. which are represented by can be mentioned. Needless to say, the present invention can be applied to a gas having a low reactivity such as helium (He) or argon (Ar) or a rare gas such as nitrogen gas (N 2 ).

本パッキン１０の材質は、突状部３、特に他端部分３ｂが、成形性および所定の弾性あるいは変形性を有するものであれば、特に限定されるものではなく、対象となるガス種によって、種々の材料を用いることができる。また、平坦部２と突状部３が同一材料の場合のみならず、両者を異なる材料で構成することができる。具体的な材料は、例えば、反応性が低いガス等に対しては、ネオプレンゴムやイソプレンゴム等の高弾性樹脂や銅やアルミニウム等の変形容易な金属を用いることができる。一方、反応性や吸着性の強いガス等に対しては、例えばフッ素ゴムやフッ素樹脂あるいはブタジエンゴム等の耐蝕性樹脂やステンレス鋼（ＳＵＳ−３１６Ｌ等）やハステロイ（ＴＭ）やニッケル等を用いることが好ましい。特に、ニッケル系材料は、本パッキン１０の一部である他端部分３ｂにおける弾性的に変形が解除されることによって、本パッキン１０全体が弾性変形に近い復元力を有する機能が大きいことを見出した。   The material of the packing 10 is not particularly limited as long as the protruding portion 3, particularly the other end portion 3 b has formability and predetermined elasticity or deformability, and depending on the target gas type, Various materials can be used. Moreover, not only when the flat part 2 and the protrusion part 3 are the same material, but both can be comprised with a different material. As a specific material, for example, a highly elastic resin such as neoprene rubber or isoprene rubber or an easily deformable metal such as copper or aluminum can be used for a gas having low reactivity. On the other hand, for gas having strong reactivity and adsorptivity, for example, corrosion resistant resin such as fluororubber, fluororesin or butadiene rubber, stainless steel (SUS-316L, etc.), Hastelloy (TM), nickel, etc. are used. Is preferred. In particular, the nickel-based material is found to have a large function of having a restoring force close to the elastic deformation of the entire packing 10 by elastically releasing the deformation at the other end portion 3b which is a part of the packing 10. It was.

〔本パッキンの第２構成例〕
本パッキン１０は、上記形態に限定されるものではなく、例えば図２（Ａ），（Ｂ）に例示する構成を用いることができる（第２構成例）。突状部３が、平坦部２の内周部分２ｃではなく、外周部分２ｄに設けられた構成を有する。図２（Ａ）は、突状部３を４つ有する構成を例示し、図２（Ｂ）は、突状部３を２つ有する構成を例示するが、突状部３の数量および形状は、ガス流通接続部（後述する）の構成によって任意に設定可能である。具体的には、平坦部２の外周部分２ｄと連続的に接合する一端部分３ａおよび平坦部２の外周側に所定の厚みを有する突出部分が形成された他端部分３ｂを有する突状部３を備えた構成を挙げることができる。平坦面２ａ，２ｂが所定長さにおいて接続部材に係止することによって、より確実なシール性を確保することができるとともに、突状部３の一端部分３ａは、平坦部２の外周部分２ｄと連続的に接合して接続部材に係止してシールを形成する。開口部１を流通するガスに触れない部位において他端部分３ｂを構成することによって、その影響を受けずに他端部分３ｂの弾性的変形の維持を測ることができる。また、一端部分３ａおよび他端部分３ｂは、接続部材の接続状態において、接続部材から受ける本パッキン１０全体の応力を突状部３に伝達し分散させる機能を有するとともに、接続部材の接続が解除された状態において、他端部分３ｂは接続部材との係止が解除され、変形していた他端部分３ｂは弾性力によって元の状態に戻るとともに、これと繋がる一端部分３ａ、さらに平坦部２が受けていた応力による歪みを軽減し、一端部分３ａおよび平坦部２の接続部材との係止を容易に解除し、本パッキン１０を容易に接続部材から脱着させることができる。 [Second configuration example of this packing]
This packing 10 is not limited to the said form, For example, the structure illustrated to FIG. 2 (A), (B) can be used (2nd structural example). The protruding portion 3 has a configuration provided in the outer peripheral portion 2d, not in the inner peripheral portion 2c of the flat portion 2. 2A illustrates a configuration having four projecting portions 3, and FIG. 2B illustrates a configuration having two projecting portions 3. The number and shape of the projecting portions 3 are as follows. It can be arbitrarily set depending on the configuration of the gas distribution connection part (described later). Specifically, the protruding portion 3 having one end portion 3a continuously joined to the outer peripheral portion 2d of the flat portion 2 and the other end portion 3b formed with a protruding portion having a predetermined thickness on the outer peripheral side of the flat portion 2. The structure provided with can be mentioned. Since the flat surfaces 2a and 2b are locked to the connection member at a predetermined length, a more reliable sealing property can be secured, and the one end portion 3a of the protruding portion 3 is connected to the outer peripheral portion 2d of the flat portion 2. It is continuously joined and locked to the connecting member to form a seal. By configuring the other end portion 3b in a portion that does not come into contact with the gas flowing through the opening 1, it is possible to measure the maintenance of the elastic deformation of the other end portion 3b without being affected by the other end portion 3b. Further, the one end portion 3a and the other end portion 3b have a function of transmitting and distributing the stress of the entire packing 10 received from the connecting member to the projecting portion 3 in the connected state of the connecting member, and the connection of the connecting member is released. In this state, the other end portion 3b is unlocked from the connecting member, and the deformed other end portion 3b is restored to its original state by the elastic force, and is connected to the one end portion 3a and further to the flat portion 2. The strain due to the stress received by the gasket can be reduced, the engagement of the one end portion 3a and the flat portion 2 with the connecting member can be easily released, and the packing 10 can be easily detached from the connecting member.

〔本パッキンの第３構成例〕
本パッキン１０の第３構成例を図３（Ａ）〜（Ｄ）に示す。他端部分３ｂが、中心軸Ｍに垂直な断面形状として多角形状を形成し、多角形状を形成する２以上の辺部分３ｃまたは角部分３ｄが、弾性的に変形して接続部材の一部に係止することを特徴とする。図３（Ａ）は、突状部３が平坦部２の内周側に設けられ、断面四角形状を有する構成を例示し、図３（Ｂ）は、突状部３が平坦部２の内周側に設けられ、断面五角形状を有する構成を例示し、図３（Ｃ）は、突状部３が平坦部２の外周側に設けられ、断面四角形状を有する構成を例示し、図３（Ｄ）は、突状部３が平坦部２の外周側に設けられ、断面五角形状を有する構成を例示するが、突状部３の形状は、ガス流通接続部（後述する）の構成によって任意に設定可能である。平坦面２ａ，２ｂおよび突状部３の一端部分３ａが所定長さにおいて接続部材に係止することによって、より確実なシール性を確保することができる。また、一端部分３ａおよび他端部分３ｂは、接続部材の接続状態において、接続部材から受ける本パッキン１０全体の応力を突状部３に伝達し分散させる機能を有する。さらに、接続部材の接続が解除された状態において、他端部分３ｂは接続部材との係止が解除され、変形していた他端部分３ｂは弾性力によって元の状態に戻るとともに、これと繋がる一端部分３ａ、さらに平坦部２が受けていた応力による歪みを軽減し、一端部分３ａおよび平坦部２の接続部材との係止を容易に解除し、本パッキン１０を容易に接続部材から脱着させることができる。このとき、接続部材との弾性的変形を伴う係止状態において、他端部分３ｂに働く応力は、角部分３ｄまたは辺部分３ｃの係止部分以外の部分を介して突状部３に伝達し分散されることによって大きく減少するとともに、接続部材との係止状態が解除されると、他端部分３ｂに働いていた応力の多くは、角部分３ｄまたは辺部分３ｃの係止部分以外の部分に分散し、他端部分３ｂの接続部材との係止が直ちに解除され、本パッキン１０を容易に接続部材から脱着させることができる。 [Third configuration example of this packing]
The 3rd structural example of this packing 10 is shown to FIG. The other end portion 3b forms a polygonal shape as a cross-sectional shape perpendicular to the central axis M, and two or more side portions 3c or corner portions 3d forming the polygonal shape are elastically deformed to become a part of the connection member. It is characterized by locking. 3A illustrates a configuration in which the protruding portion 3 is provided on the inner peripheral side of the flat portion 2 and has a quadrangular cross section, and FIG. 3B illustrates the protruding portion 3 in the flat portion 2. 3C illustrates a configuration having a pentagonal cross section provided on the peripheral side, and FIG. 3C illustrates a configuration in which the protruding portion 3 is provided on the outer peripheral side of the flat portion 2 and has a quadrangular cross section. (D) illustrates the configuration in which the protruding portion 3 is provided on the outer peripheral side of the flat portion 2 and has a pentagonal cross section. The shape of the protruding portion 3 depends on the configuration of the gas flow connection portion (described later). It can be set arbitrarily. By securing the flat surfaces 2a, 2b and the one end portion 3a of the protruding portion 3 to the connecting member at a predetermined length, a more reliable sealing property can be ensured. Further, the one end portion 3a and the other end portion 3b have a function of transmitting and distributing the stress of the entire packing 10 received from the connecting member to the projecting portion 3 in the connected state of the connecting member. Further, in the state where the connection of the connecting member is released, the other end portion 3b is unlocked from the connecting member, and the deformed other end portion 3b returns to the original state by the elastic force and is connected to this. The strain due to the stress received by the one end portion 3a and the flat portion 2 is reduced, the engagement between the one end portion 3a and the flat portion 2 is easily released, and the packing 10 is easily detached from the connecting member. be able to. At this time, in the locked state accompanied by elastic deformation with the connecting member, the stress acting on the other end portion 3b is transmitted to the protruding portion 3 via a portion other than the locking portion of the corner portion 3d or the side portion 3c. When the state of engagement with the connecting member is released, the stress that has acted on the other end portion 3b is largely reduced by the portion other than the engagement portion of the corner portion 3d or the side portion 3c. Then, the engagement of the other end portion 3b with the connecting member is immediately released, and the packing 10 can be easily detached from the connecting member.

〔本パッキンの第４構成例〕
本パッキン１０の第４構成例を図４（Ａ）〜（Ｄ）に示す。突状部３が、一端部分３ａから他端部分３ｂに対して暫次薄厚となる断面形状を形成することを特徴とする。図４（Ａ）は、突状部３が平坦部２の内周側に４つ設けられた構成を例示し、図４（Ｂ）は、突状部３が平坦部２の内周側に２つ設けられた構成を例示し、図４（Ｃ）は、突状部３が平坦部２の内周側に設けられ、断面四角形状を有する構成を例示し、図４（Ｄ）は、突状部３が平坦部２の内周側に設けられ、断面五角形状を有する構成を例示するが、突状部３の数量および形状は、ガス流通接続部（後述する）の構成によって任意に設定可能である。こうした形状の突状部３を構成することによって、他端部分３ｂにおける弾性的に変形して接続部材と係止する機能の向上を図るとともに、他端部分３ｂにおける接続部材の接続解除に伴い接続部材との係止が解除されることが起点となり、より容易に接続部材からの脱着を行うことができる。こうした機能の向上を図ることによって、一端部分３ａおよび他端部分３ｂは、接続部材の接続状態において、接続部材から受ける本パッキン１０全体の応力を突状部３に伝達し分散させる高い機能を有する。さらに、接続部材の接続が解除された状態において、他端部分３ｂは接続部材との係止が解除され、変形していた他端部分３ｂは弾性力によって迅速に元の状態に戻るとともに、これと繋がる一端部分３ａ、さらに平坦部２が受けていた応力による歪みを軽減し、一端部分３ａおよび平坦部２の接続部材との係止を容易に解除し、本パッキン１０を容易に接続部材から脱着させることができる。 [Fourth configuration example of this packing]
A fourth configuration example of the packing 10 is shown in FIGS. The projecting portion 3 is characterized in that it forms a cross-sectional shape that is temporarily thin from the one end portion 3a to the other end portion 3b. FIG. 4A illustrates a configuration in which four protrusions 3 are provided on the inner peripheral side of the flat part 2, and FIG. 4B illustrates the protrusion 3 on the inner peripheral side of the flat part 2. FIG. 4C illustrates a configuration in which the protruding portion 3 is provided on the inner peripheral side of the flat portion 2 and has a quadrangular cross section, and FIG. The protrusion 3 is provided on the inner peripheral side of the flat part 2 and has a pentagonal cross section. The number and shape of the protrusion 3 can be arbitrarily determined depending on the structure of the gas flow connection part (described later). It can be set. By constructing the protruding portion 3 having such a shape, the function of elastically deforming and locking with the connecting member at the other end portion 3b is improved, and the connection with the disconnection of the connecting member at the other end portion 3b is performed. The starting point is that the locking with the member is released, and the connection member can be easily detached. By improving such a function, the one end portion 3a and the other end portion 3b have a high function of transmitting and distributing the stress of the entire packing 10 received from the connecting member to the protruding portion 3 in the connected state of the connecting member. . Further, in the state where the connection of the connecting member is released, the other end portion 3b is unlocked from the connecting member, and the deformed other end portion 3b is quickly returned to the original state by the elastic force. One end portion 3a connected to the flat portion 2 and strain due to the stress received by the flat portion 2 are reduced, the engagement between the one end portion 3a and the flat portion 2 is easily released, and the packing 10 is easily removed from the connecting member. Can be desorbed.

＜本パッキンを用いたガス流通接続部の基本構成例＞
本パッキンを用いたガス流通接続部（以下「本接続部」という）の実施の形態について、説明する。図５（Ａ），（Ｂ）は、図１に例示された本パッキン１０を用い、ガス流通部２１ａ，２１ｂの端部に設けられた接続部材２２ａ，２２ｂが複数接続される本接続部２０の基本的な構成を例示する概略図である。図５（Ａ）は、接続部材２２ａと接続部材２２ｂの接続が解除された状態を例示し、図５（Ｂ）は、接続部材２２ａと接続部材２２ｂが接続された状態を例示する。なお、ここでいう「ガス流通部」とは、実際にガスが流通する流路を有する部材だけではなく、例えばガス充填容器からのガス供給部やガス充填容器へのガス充填流路、流路内圧力や流量等の測定装置との接続部、ガスの流通を制御するバルブや封止部等、広くガスの流通に関係する部材や装置等をいう。本接続部２０は、接続部材２２ａ，２２ｂが、ガス流通部２１ａ，２１ｂを周回するように、少なくとも１つの平坦なシール面２３ａ，２３ｂおよびシール面２３ａ，２３ｂと所定の角度で繋がるスリーブ２４ａ，２４ｂを備える。ここでは、スリーブ２４ａ，２４ｂがガス流通部２１ａ，２１ｂ両側に設けられた構成を例示するが、本接続部２０では、いずれか一方に設ける構成を含む。また、スリーブ２４ａ，２４ｂは、図１のように広角でシール面２３ａ，２３ｂと繋がる構成ではなく、垂直あるいは狭角での繋がる構成を有することかできる。 <Example of basic configuration of gas distribution connection using this packing>
An embodiment of a gas distribution connection part (hereinafter referred to as “main connection part”) using this packing will be described. 5 (A) and 5 (B) use the main packing 10 illustrated in FIG. 1 and the main connection portion 20 in which a plurality of connection members 22a and 22b provided at the ends of the gas flow portions 21a and 21b are connected. It is the schematic which illustrates the basic composition of. FIG. 5A illustrates a state where the connection between the connection member 22a and the connection member 22b is released, and FIG. 5B illustrates a state where the connection member 22a and the connection member 22b are connected. Here, the “gas circulation part” is not only a member having a flow path through which gas actually flows, but also, for example, a gas supply part from a gas filling container, a gas filling flow path to the gas filling container, and a flow path It refers to members and devices that are widely involved in gas flow, such as connections to measuring devices such as internal pressure and flow rate, valves and seals that control the flow of gas, and the like. This connecting portion 20 includes at least one flat sealing surface 23a, 23b and a sleeve 24a connected to the sealing surfaces 23a, 23b at a predetermined angle so that the connecting members 22a, 22b go around the gas flow portions 21a, 21b. 24b. Here, the configuration in which the sleeves 24a, 24b are provided on both sides of the gas flow portions 21a, 21b is illustrated, but the connection portion 20 includes a configuration provided in either one of them. In addition, the sleeves 24a and 24b may have a configuration in which the sleeves 24a and 24b are connected to the seal surfaces 23a and 23b at a wide angle as shown in FIG.

本接続部２０において、一方のガス流通部２１ａに螺合部分２６ａを有する接合部材２５ａを係止させ、他方のガス流通部２１ｂに設けられた螺合部分２６ｂと螺合させることによって、接続部材２２ａ，２２ｂが接合し、本パッキン１０を介してシール性が確保された状態で、ガス流通部２１ａ，２１ｂが接続する。逆に接合部材２５ａを緩め、螺合部分２６ａ，２６ｂの螺合を解除することによって、ガス流通部２１ａ，２１ｂの接続が解除される。ガス流通部２１ａ，２１ｂの接続を解除することによって、本パッキン１０を取出すことができる。本接続部２０を構成する各部の素材は、堅牢な構造を形成することが可能であれば特に制限はないが、半導体用特殊材料ガス供給装置等に使用される場合には、耐蝕性を必要とすることから、例えばステンレス鋼（ＳＵＳ−３１６Ｌ等）やハステロイ（ＴＭ）やニッケルなどを使用することが好ましい。   In this connection part 20, the connecting member 25a which has the screwing part 26a in one gas distribution part 21a is latched, and it is screwed together with the screwing part 26b provided in the other gas distribution part 21b, thereby connecting member The gas flow portions 21a and 21b are connected in a state where the seals 22a and 22b are joined and the sealing performance is secured through the packing 10. Conversely, the connection of the gas flow portions 21a and 21b is released by loosening the joining member 25a and releasing the screwing of the screwing portions 26a and 26b. The packing 10 can be taken out by releasing the connection of the gas flow portions 21a and 21b. The material of each part constituting the connection part 20 is not particularly limited as long as it can form a robust structure. However, when used in a semiconductor special material gas supply device, corrosion resistance is required. Therefore, it is preferable to use, for example, stainless steel (SUS-316L or the like), Hastelloy (TM), nickel, or the like.

具体的には、図５（Ｂ）に例示するように、接続部材２２ａと接続部材２２ｂが接続された状態において、シール面２２ａ，２２ｂに本パッキン１０の平坦面２ａ，２ｂおよび突状部３の一端部分３ａが係止してシールを形成し、スリーブ２４の一部に突状部３の他端部分３ｂが弾性的に変形して係止する。シール面２３ａ，２３ｂと平坦面２ａ，２ｂ（一端部分３ａを含む）との間において、ガス流通部２１ａ，２１ｂから所定の距離の接合部分を有することによって、確実なシールを形成することができる。また、他端部分３ｂが弾性的に変形してスリーブ２４ａ，２４ｂの一部に係止することによって、本パッキン１０全体に弾性的に変形応力が働き、該応力が解除されたときの復元力が、他端部分３ｂのみならず本パッキン１０全体に潜在する。
Specifically, as illustrated in FIG. 5B, the flat surfaces 2a and 2b and the projecting portion 3 of the packing 10 are formed on the seal surfaces 22a and 22b in a state where the connection member 22a and the connection member 22b are connected. One end portion 3a of the protrusion 3 is locked to form a seal, and the other end portion 3b of the protruding portion 3 is elastically deformed and locked to a part of the sleeve 24. A reliable seal can be formed by having a joint portion at a predetermined distance from the gas flow portions 21a and 21b between the seal surfaces 23a and 23b and the flat surfaces 2a and 2b (including the one end portion 3a). . Further, when the other end portion 3b is elastically deformed and is locked to a part of the sleeves 24a and 24b, a deformation stress acts elastically on the entire packing 10, and a restoring force when the stress is released. However, it lies in the entire packing 10 as well as the other end portion 3b.

図５（Ａ）は、接続部材２２ａと接続部材２２ｂの接続が解除された状態を例示する。突状部３の他端部分３ｂのスリーブ２４ａ，２４ｂとの係止が解除され、一端部分３ａのシール面２３ａ，２３ｂとの係止を解除することによって、本パッキン１０の接続部材２２ａ，２２ｂとの係止が解除される。このとき、他端部分３ｂのスリーブ２４ａ，２４ｂとの係止が解除されることによって、上記復元力が働き一端部分３ａとシール面２３ａ，２３ｂの係止を解除することが容易となり、さらに、平坦面２ａ，２ｂとシール面２３ａ，２３ｂの係止を解除することが容易となる。   FIG. 5A illustrates a state where the connection between the connection member 22a and the connection member 22b is released. The engagement of the other end portion 3b of the projecting portion 3 with the sleeves 24a, 24b is released, and the engagement with the seal surfaces 23a, 23b of the one end portion 3a is released, whereby the connection members 22a, 22b of the packing 10 are released. Is released. At this time, by releasing the locking of the other end portion 3b with the sleeves 24a and 24b, the restoring force works, and it becomes easy to release the locking of the one end portion 3a and the seal surfaces 23a and 23b. It becomes easy to release the engagement between the flat surfaces 2a and 2b and the seal surfaces 23a and 23b.

なお、本パッキン１０として、上記第２〜第４構成例のような構成を用いた場合には、それぞれの突状部３の形態に対応した接続部材２２ａ，２２ｂ、シール面２３ａ，２３ｂおよびスリーブ２４ａ，２４ｂの形態を選定して本接続部２０を構成することによって、シールの確実性を確保し、接続解除後の本パッキン１０の取出しを容易にすることができる。   In addition, when the structure as the said 2nd-4th structural example is used as this packing 10, the connection members 22a and 22b corresponding to the form of each protrusion part 3, seal surfaces 23a and 23b, and a sleeve By selecting the form of 24a, 24b and configuring the main connection portion 20, the reliability of the seal can be ensured and the main packing 10 can be easily taken out after the connection is released.

１ 開口部
１ａ 周端部分
２ 平坦部
２ａ，２ｂ 平坦面
２ｃ 内周部分
２ｄ 外周部分
３ 突状部
３ａ 一端部分
３ｂ 他端部分
１０ 本パッキン
Ｍ 中心軸 DESCRIPTION OF SYMBOLS 1 Opening part 1a Peripheral edge part 2 Flat part 2a, 2b Flat surface 2c Inner peripheral part 2d Outer peripheral part 3 Protruding part 3a One end part 3b Other end part 10 This packing M Central axis

Claims (5)

ガス流通部の端部に設けられた接続部材が複数接続されるガス流通接続部に用いられるガス流通部接続用パッキンであって、
該ガス流通部接続用パッキンの中心軸を含む中央部分に設けられた開口部と、該開口部の周端部分を一端として所定の厚みを有して相対向する所定長さの平坦面を有する平坦部と、該平坦部の内周部分と連続的に接合する一端部分および前記開口部の中心側に所定の厚みを有する突出部分が形成された他端部分を有する突状部と、を備え、
前記他端部分が、前記中心軸に垂直な断面形状として多角形状を形成し、該多角形状を形成する２以上の角部分または辺部分が、弾性的に変形して前記接続部材の一部に係止する構成を有し、前記接続部材が接続された状態において、前記平坦面および前記突状部の一端部分が前記接続部材に係止してシールを形成し、前記突状部の他端部分が弾性的に変形して前記接続部材の一部に係止するとともに、前記接続部材の接続が解除された状態において、前記突状部の他端部分の係止が解除され、前記一端部分の係止が解除されることによって、前記ガス流通部接続用パッキンの前記接続部材との係止が解除されることを特徴とするガス流通部接続用パッキン。 A gas circulation part connection packing used for a gas circulation connection part to which a plurality of connection members provided at an end of the gas circulation part are connected,
An opening provided in a central portion including the central axis of the packing for connecting the gas flow portion, and a flat surface having a predetermined length and having a predetermined thickness with a peripheral end portion of the opening as one end includes a flat portion, and a protruding portion having a first end portion and the other end portion projecting portion is formed to have a predetermined thickness on the center side of the opening is continuously joined to the inner peripheral portion of the flat part, the ,
The other end portion forms a polygonal shape as a cross-sectional shape perpendicular to the central axis, and two or more corner portions or side portions forming the polygonal shape are elastically deformed to become a part of the connecting member. In the state where the connecting member is connected, the flat surface and one end portion of the protruding portion are locked to the connecting member to form a seal, and the other end of the protruding portion The portion is elastically deformed and locked to a part of the connection member, and in the state where the connection of the connection member is released, the lock of the other end portion of the protruding portion is released, and the one end portion The gas flow portion connection packing is released by releasing the lock of the gas flow portion connection packing from the connection member. ガス流通部の端部に設けられた接続部材が複数接続されるガス流通接続部に用いられるガス流通部接続用パッキンであって、
該ガス流通部接続用パッキンの中心軸を含む中央部分に設けられた開口部と、該開口部の周端部分を一端として所定の厚みを有して相対向する所定長さの平坦面を有する平坦部と、該平坦部の外周部分と連続的に接合する一端部分および前記平坦部の外周側に所定の厚みを有する突出部分が形成された他端部分を有する突状部と、を備え、
前記他端部分が、前記中心軸に垂直な断面形状として多角形状を形成し、該多角形状を形成する２以上の角部分または辺部分が、弾性的に変形して前記接続部材の一部に係止する構成を有し、前記接続部材が接続された状態において、前記平坦面および前記突状部の一端部分が前記接続部材に係止してシールを形成し、前記突状部の他端部分が弾性的に変形して前記接続部材の一部に係止するとともに、前記接続部材の接続が解除された状態において、前記突状部の他端部分の係止が解除され、前記一端部分の係止が解除されることによって、前記ガス流通部接続用パッキンの前記接続部材との係止が解除されることを特徴とするガス流通部接続用パッキン。 A gas circulation part connection packing used for a gas circulation connection part to which a plurality of connection members provided at an end of the gas circulation part are connected,
An opening provided in a central portion including the central axis of the packing for connecting the gas flow portion, and a flat surface having a predetermined length and having a predetermined thickness with a peripheral end portion of the opening as one end A flat portion, and a projecting portion having one end portion continuously joined to the outer peripheral portion of the flat portion and the other end portion formed with a protruding portion having a predetermined thickness on the outer peripheral side of the flat portion ,
The other end portion forms a polygonal shape as a cross-sectional shape perpendicular to the central axis, and two or more corner portions or side portions forming the polygonal shape are elastically deformed to become a part of the connecting member. In the state where the connecting member is connected, the flat surface and one end portion of the protruding portion are locked to the connecting member to form a seal, and the other end of the protruding portion The portion is elastically deformed and locked to a part of the connection member, and in the state where the connection of the connection member is released, the lock of the other end portion of the protruding portion is released, and the one end portion The gas flow portion connection packing is released by releasing the lock of the gas flow portion connection packing from the connection member. 前記突状部が、前記一端部分から前記他端部分に対して暫次薄厚となる断面形状を形成することを特徴とする請求項１または２記載のガス流通部接続用パッキン。   The gas distribution part connection packing according to claim 1, wherein the protruding part forms a cross-sectional shape that is temporarily thin from the one end part to the other end part. 前記突状部がニッケル系材料からなり、前記平坦面と前記突状部の一端部分が同じ厚みを有することを特徴とする請求項１〜３のいずれかに記載のガス流通部接続用パッキン。 The gas flow part connection packing according to any one of claims 1 to 3 , wherein the protruding part is made of a nickel-based material, and the flat surface and one end part of the protruding part have the same thickness. 請求項１〜４のいずれかに記載されたガス流通部接続用パッキンを用い、ガス流通部の端部に設けられた接続部材が複数接続されるガス流通接続部であって、
前記接続部材が、前記ガス流通部を周回するように、少なくとも１つの平坦なシール面および該シール面と所定の角度で繋がるスリーブを備え、
前記接続部材が接続された状態において、前記シール面に前記ガス流通部接続用パッキンの平坦面および突状部の一端部分が係止してシールを形成し、前記スリーブの一部に前記突状部の他端部分が弾性的に変形して係止するとともに、前記接続部材の接続が解除された状態において、前記突状部の他端部分の係止が解除され、前記突状部の一端部分の係止を解除することによって、前記ガス流通部接続用パッキンの前記接続部材との係止が解除されることを特徴とするガス流通接続部。
A gas circulation connection portion using the gas circulation portion connection packing according to any one of claims 1 to 4, wherein a plurality of connection members provided at an end of the gas circulation portion are connected,
The connecting member includes at least one flat sealing surface and a sleeve connected to the sealing surface at a predetermined angle so as to go around the gas circulation part;
In a state where the connecting member is connected, the flat surface of the gas flow portion connecting gasket and one end portion of the projecting portion are engaged with the seal surface to form a seal, and the projecting shape is formed on a part of the sleeve. The other end portion of the protrusion is elastically deformed and locked, and in the state where the connection of the connection member is released, the other end portion of the protrusion is released and one end of the protrusion is released. By releasing the locking of the portion, the locking of the gas distribution part connection packing with the connection member is released, wherein the gas distribution connection part is characterized in that
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