JP5933604B2 - 硬質膜が被覆されたステンレス製品及びその製造方法 - Google Patents
硬質膜が被覆されたステンレス製品及びその製造方法 Download PDFInfo
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- JP5933604B2 JP5933604B2 JP2014004954A JP2014004954A JP5933604B2 JP 5933604 B2 JP5933604 B2 JP 5933604B2 JP 2014004954 A JP2014004954 A JP 2014004954A JP 2014004954 A JP2014004954 A JP 2014004954A JP 5933604 B2 JP5933604 B2 JP 5933604B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/043—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/027—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/36—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12576—Boride, carbide or nitride component
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Description
(2)ステンレス基材11に対して、イオン注入処理を行う。
(1)ステンレス基材11を提供する。
(1)ステンレス基材11を提供する。
11 ステンレス基材
13 下地層
15 移行層
17 硬質層
20 真空チャンバ
22 チタンターゲット
23 クロムターゲット
26 トラック
27 ガス源通路
30 真空ポンプ
111 イオン注入層
200 真空蒸着装置
Claims (9)
- ステンレス基材に硬質膜が被覆されたステンレス製品であって、前記ステンレス基材の上に順次に形成された下地層、移行層及び硬質層をさらに備え、前記下地層はTiからなり、前記移行層はTiaCrbからなり、前記硬質層はTixCryNzからなり、
前記化学式において、1≦a≦2、2≦b≦3、2≦x≦4、3≦y≦8、10≦z≦16であることを特徴とする硬質膜が被覆されたステンレス製品。 - 前記ステンレス基材の表層は、イオン注入層であり、前記下地層は、前記イオン注入層の上面を被覆し、前記イオン注入層は、主にFe元素及びN元素を含有し、前記イオン注入層の厚さは、0.1μm〜0.2μmであることを特徴とする請求項1に記載の硬質膜が被覆されたステンレス製品。
- 前記イオン注入層において、FeとNとの原子数の比は、1:4〜1:7であることを特徴とする請求項2に記載の硬質膜が被覆されたステンレス製品。
- 前記硬質層の厚さは1.2μm〜1.5μmであり、前記移行層の厚さは0.5μm〜0.8μmであることを特徴とする請求項1に記載の硬質膜が被覆されたステンレス製品。
- ステンレス基材を提供する工程と、
真空チャンバと、前記真空チャンバ内に固定されたチタンターゲット、クロムターゲット及び無線周波電極と、を備える真空蒸着装置を提供する工程と、
前記ステンレス基材を前記真空蒸着装置内にセットし、前記チタンターゲットに対応する電源を起動し、且つ前記無線周波電極に対して電流を印加して、前記ステンレス基材の上にTiからなる下地層を形成する工程と、
前記チタンターゲット及び前記クロムターゲットにそれぞれ対応する電源を同時に起動して、前記下地層の上面にTiaCrb(1≦a≦2、2≦b≦3)からなる移行層を形成する工程と、
窒素を反応気体とし、前記チタンターゲット及び前記クロムターゲットにそれぞれ対応する電源を同時に起動して、前記移行層の上面にTixCryNz(2≦x≦4、3≦y≦8、10≦z≦16)からなる硬質層を形成する工程と、
を備えることを特徴とする硬質膜が被覆されたステンレス製品の製造方法。 - 前記下地層を形成する前に、前記真空蒸着装置内にアルゴン及び窒素を注入して、前記ステンレス基材の表面にイオン注入層を形成する工程をさらに備えることを特徴とする請求項5に記載の硬質膜が被覆されたステンレス製品の製造方法。
- 前記イオン注入層を形成する工程において、前記無線周波電極は、前記アルゴン及び前記窒素をイオン化させて、アルゴンプラズマ及び窒素プラズマを形成し、
また、前記移行層を形成する工程及び前記硬質層を形成する工程において、前記無線周波電極は、前記チタンターゲット及び前記クロムターゲットから飛び出したチタン原子、クロム原子をイオン化させて、チタンプラズマ及びクロムプラズマを形成することを特徴とする請求項6に記載の硬質膜が被覆されたステンレス製品の製造方法。 - 前記イオン注入層を形成する工程において、前記無線周波電極の電流は5A〜8Aであり、前記ステンレス基材に印加したバイアス電圧は−1300V〜−1500Vであり、前記アルゴンの流量は100sccm〜200sccmであり、前記窒素の流量は200sccm〜600sccmであり、前記イオン注入時間は20分〜35分であることを特徴とする請求項6に記載の硬質膜が被覆されたステンレス製品の製造方法。
- 前記硬質層を形成する工程において、前記チタンターゲットに対して出力が4kw〜6kwである電流を印加し、前記クロムターゲットに対して出力が10kw〜15kwである電流を印加し、前記窒素の流量は300sccm〜500sccmであり、前記アルゴンの流量は150sccm〜200sccmであり、前記ステンレス基材に印加したバイアス電圧は−1300V〜−1500Vであり、スパッタリング時間は25分〜50分であることを特徴とする請求項5に記載の硬質膜が被覆されたステンレス製品の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CN201310013681.0 | 2013-01-15 | ||
CN201310013681.0A CN103921498B (zh) | 2013-01-15 | 2013-01-15 | 具有硬质膜层的不锈钢制品及其制备方法 |
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JP2014136836A JP2014136836A (ja) | 2014-07-28 |
JP5933604B2 true JP5933604B2 (ja) | 2016-06-15 |
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Country Status (4)
Country | Link |
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US (1) | US20140199561A1 (ja) |
JP (1) | JP5933604B2 (ja) |
CN (1) | CN103921498B (ja) |
TW (1) | TWI547366B (ja) |
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CN105899003B (zh) | 2015-11-06 | 2019-11-26 | 武汉光谷创元电子有限公司 | 单层电路板、多层电路板以及它们的制造方法 |
CN107304469A (zh) * | 2016-04-23 | 2017-10-31 | 广东祖戈卫浴科技有限公司 | 一种不锈钢表面加硬处理技术 |
DE102017102059A1 (de) | 2017-02-02 | 2018-08-02 | Friedrich-Alexander-Universität Erlangen | Schichtsystem und Bauteil |
CN108977781B (zh) * | 2018-07-28 | 2021-06-08 | 华南理工大学 | 一种硬质合金表面磁控溅射复合技术沉积w-n硬质膜的方法 |
CN110958828B (zh) * | 2019-11-25 | 2022-03-22 | 维达力实业(深圳)有限公司 | 电磁屏蔽功能芯片及其电磁屏蔽膜层、电磁屏蔽方法 |
DE102020205537A1 (de) * | 2020-04-30 | 2021-11-04 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verschleißschutzbeschichtetes Bauteil sowie Verfahren zum Beschichten desselben |
US20220066397A1 (en) * | 2020-09-01 | 2022-03-03 | Apple Inc. | Bright Color Coatings for Electronic Devices |
CN112281124A (zh) * | 2020-09-18 | 2021-01-29 | 山东宏旺实业有限公司 | 一种普砂拉丝面钛金不锈钢卷的制备方法 |
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US4915746A (en) * | 1988-08-15 | 1990-04-10 | Welsch Gerhard E | Method of forming high temperature barriers in structural metals to make such metals creep resistant at high homologous temperatures |
US5599404A (en) * | 1992-11-27 | 1997-02-04 | Alger; Donald L. | Process for forming nitride protective coatings |
US6066399A (en) * | 1997-03-19 | 2000-05-23 | Sanyo Electric Co., Ltd. | Hard carbon thin film and method of forming the same |
CA2327031C (en) * | 1999-11-29 | 2007-07-03 | Vladimir Gorokhovsky | Composite vapour deposited coatings and process therefor |
JP2001192861A (ja) * | 1999-12-28 | 2001-07-17 | Hitachi Ltd | 表面処理方法及び表面処理装置 |
US6558822B2 (en) * | 2000-05-25 | 2003-05-06 | Ebara Corporation | Cr-containing titanium nitride film |
US6904935B2 (en) * | 2002-12-18 | 2005-06-14 | Masco Corporation Of Indiana | Valve component with multiple surface layers |
US7695573B2 (en) * | 2004-09-09 | 2010-04-13 | Sikorsky Aircraft Corporation | Method for processing alloys via plasma (ion) nitriding |
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CN102121757B (zh) * | 2010-01-28 | 2012-09-19 | 北京有色金属研究总院 | 一种非真空太阳光谱选择性吸收涂层及其制备方法 |
CN102719796A (zh) * | 2011-03-30 | 2012-10-10 | 深圳富泰宏精密工业有限公司 | 具有硬质涂层的被覆件及其制备方法 |
CN102703859A (zh) * | 2012-06-15 | 2012-10-03 | 上海大学 | 非晶碳基薄膜与金属基体间梯度过渡层的制备方法 |
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2013
- 2013-01-15 CN CN201310013681.0A patent/CN103921498B/zh not_active Expired - Fee Related
- 2013-01-28 TW TW102103214A patent/TWI547366B/zh not_active IP Right Cessation
- 2013-04-19 US US13/866,403 patent/US20140199561A1/en not_active Abandoned
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2014
- 2014-01-15 JP JP2014004954A patent/JP5933604B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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TWI547366B (zh) | 2016-09-01 |
JP2014136836A (ja) | 2014-07-28 |
CN103921498A (zh) | 2014-07-16 |
CN103921498B (zh) | 2017-08-29 |
TW201438884A (zh) | 2014-10-16 |
US20140199561A1 (en) | 2014-07-17 |
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