JP5910509B2 - Conductive paste and solar cell element using the conductive paste - Google Patents
Conductive paste and solar cell element using the conductive paste Download PDFInfo
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- 239000011521 glass Substances 0.000 claims description 46
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 25
- 229910052710 silicon Inorganic materials 0.000 claims description 25
- 239000010703 silicon Substances 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 claims description 24
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 4
- 229910018068 Li 2 O Inorganic materials 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 229910052708 sodium Inorganic materials 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 description 17
- 230000000694 effects Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000001856 Ethyl cellulose Substances 0.000 description 3
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 229920001249 ethyl cellulose Polymers 0.000 description 3
- 235000019325 ethyl cellulose Nutrition 0.000 description 3
- 238000007496 glass forming Methods 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 1
- 229910002796 Si–Al Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 1
- 229940088601 alpha-terpineol Drugs 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/02—Frit compositions, i.e. in a powdered or comminuted form
- C03C8/04—Frit compositions, i.e. in a powdered or comminuted form containing zinc
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
- C03C8/16—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions with vehicle or suspending agents, e.g. slip
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Description
本発明は、半導体シリコン太陽電池に形成される電極として使用可能な鉛を含まない導電性ペーストに関する。 The present invention relates to a lead-free conductive paste that can be used as an electrode formed in a semiconductor silicon solar cell.
半導体シリコン基板を用いた電子部品として、図1に示すような太陽電池素子が知られている。図1に示すように、太陽電池素子は、厚みが200μm程度のp型半導体シリコン基板1の受光面側にn型半導体シリコン層2を形成し、受光面側表面に受光効率をあげるための窒化珪素膜などの反射防止膜3、さらにその反射防止膜3上に半導体と接続した表面電極4が形成されている。
As an electronic component using a semiconductor silicon substrate, a solar cell element as shown in FIG. 1 is known. As shown in FIG. 1, the solar cell element is formed by forming an n-type semiconductor silicon layer 2 on the light-receiving surface side of a p-type
また、p型半導体シリコン基板1の裏側には、アルミニウム電極層5が一様に形成されている。このアルミニウム電極層5は、一般に、アルミニウム粉末、ガラスフリット、エチルセルロースやアクリル樹脂などのバインダーを含む有機ビヒクルとからなるアルミニウムペースト材料を、スクリーン印刷などを用いて塗布し、600〜900℃程度の温度で短時間焼成することで形成される。
An aluminum electrode layer 5 is uniformly formed on the back side of the p-type
このアルミニウムペースト材料の焼成において、アルミニウムがp型半導体シリコン基板1に拡散することで、アルミニウム電極層5とp型半導体シリコン基板1との間にBSF(Back Surface Field)層6と呼ばれるSi−Al共晶層が形成され、さらにはアルミニウムの拡散による不純物層p+層7が形成される。このp+層7は、pn接合の光起電力効果によって生成したキャリアの再結合による損失を抑制する効果をもたらし、太陽電池素子の変換効率向上に寄与する。このBSF効果に関しては、例えば特許文献1や特許文献2などに開示されているように、アルミニウムペースト材料に含まれるガラスフリットとして、鉛を含有するガラスを用いることにより、高い効果を得ることが可能であると開示されている。In the baking of the aluminum paste material, aluminum diffuses into the p-type
一般的に、p+層の表面抵抗とBSF効果には相関があり、p+層の表面抵抗が低いほどBSF効果が高く、太陽電池素子としての変換効率が高いとされている。In general, there is a correlation between the surface resistance of the p + layer and the BSF effect, and the lower the surface resistance of the p + layer, the higher the BSF effect and the higher the conversion efficiency as a solar cell element.
前述した鉛成分を含むガラスフリットは、アルミニウムペースト材料のような導電性ペーストに使用することにより、高いBSF効果を得ることができ、さらに上記導電性ペーストを低融点とする上で重要な成分であるものの、人体や環境に与える弊害が大きい。前述した特許文献1及び特許文献2は導電性ペーストに鉛成分を含むという問題がある。
The glass frit containing the lead component described above can be used for a conductive paste such as an aluminum paste material to obtain a high BSF effect, and is an important component for making the conductive paste have a low melting point. However, it has a great negative effect on the human body and the environment.
そこで本発明は、半導体シリコン太陽電池に形成される電極として使用可能な鉛を含まない導電性ペーストを得ることを目的とした。 Therefore, an object of the present invention is to obtain a lead-free conductive paste that can be used as an electrode formed in a semiconductor silicon solar cell.
本発明は、半導体シリコン基板を用いる太陽電池用の導電性ペーストであって、該導電性ペーストに含まれるガラスフリットの組成は、実質的に鉛成分を含まず、質量%でSiO2を5〜15、B2O3を20〜40、Al2O3を0〜10、ZnOを30〜45、RO(MgO、CaO、SrO、及びBaOからなる群から選ばれる少なくとも1種の合計)を5〜30、R2O(Li2O、Na2O、及びK2Oからなる群から選ばれる少なくとも1種の合計)を0.1〜6、を含むことを特徴とする導電性ペーストである。The present invention is an electrically conductive paste for solar cells using a semiconductor silicon substrate, and the composition of the glass frit contained in the electrically conductive paste is substantially free of lead components and contains 5 to 2 SiO 2 by mass%. 15, B 2 O 3 and 20 to 40, Al 2 O 3 0-10, 30-45 and ZnO, RO (MgO, CaO, SrO, and at least one total selected from the group consisting of BaO) 5 a 30, is a conductive paste characterized in that it comprises a 0.1 to 6, (at least one of total selected from Li 2 O, Na 2 O, and the group consisting of K 2 O) a R 2 O .
鉛を含有するガラスフリットを使用した導電性ペーストを用いた場合、p+層の表面抵抗は20〜30Ω/□程度を示すことから、本発明の導電性ペーストを用いた際のp+層の表面抵抗は、30Ω/□以下とすることが好ましい。該表面抵抗が低いほど太陽電池素子として用いた場合、変換効率が向上する。When using a conductive paste using the glass frit containing lead, the surface resistance of the p + layer because they exhibit the 20~30Ω / □ extent, the electroconductive paste of the present invention the p + layer when using The surface resistance is preferably 30 Ω / □ or less. When the surface resistance is lower, conversion efficiency is improved when used as a solar cell element.
本発明において、ガラスフリットに含有するR2O量を増加させることにより、p+層の表面抵抗を30Ω/□より低い値にすることが可能であるが、該R2Oを6質量%越えて含む場合、該R2Oのアルカリ成分が多くなることにより潮解性を呈することがあるため、本発明では該R2Oを6質量%以下とする。In the present invention, by increasing the amount of R 2 O contained in the glass frit, the surface resistance of the p + layer can be made lower than 30 Ω / □, but the R 2 O exceeds 6% by mass. If containing Te, the order by R 2 O alkali component increases sometimes exhibit deliquescence, in the present invention to 6% by mass or less the R 2 O.
また本発明の前記ガラスフリットは、30℃〜300℃における熱膨張係数が(55〜85)×10-7/℃、軟化点が550℃以上650℃以下であることを特徴とする。また、本発明において上記の熱膨張係数は線膨張係数を意味するものである。The glass frit of the present invention is characterized in that the coefficient of thermal expansion at 30 ° C. to 300 ° C. is (55 to 85) × 10 −7 / ° C., and the softening point is from 550 ° C. to 650 ° C. In the present invention, the above thermal expansion coefficient means a linear expansion coefficient.
本発明により、鉛を含まないガラスフリットを含む導電性ペーストを得ることが可能である。本発明の導電性ペーストを太陽電池素子として使用することにより、高いBSF効果を得ることができる。また、半導体シリコン基板と良好な密着性を得ることができる。さらに、実質的に鉛成分を含まないため人体や環境に与える弊害がない。 According to the present invention, it is possible to obtain a conductive paste containing glass frit that does not contain lead. By using the conductive paste of the present invention as a solar cell element, a high BSF effect can be obtained. Also, good adhesion to the semiconductor silicon substrate can be obtained. Furthermore, since it does not substantially contain a lead component, there is no harmful effect on the human body and the environment.
本発明の導電性ペーストは、アルミニウム粉末とエチルセルロースやアクリル樹脂などのバインダーを含む有機ビヒクルに加えて、ガラスフリットを含み、該ガラスフリットが実質的に鉛成分を含まず、質量%でSiO2を5〜15、B2O3を20〜40、Al2O3を0〜10、ZnOを30〜45、RO(MgO、CaO、SrO、及びBaOからなる群から選ばれる少なくとも1種の合計)を5〜30、R2O(Li2O、Na2O、及びK2Oからなる群から選ばれる少なくとも1種の合計)を0.1〜6、を含む導電性ペーストである。The conductive paste of the present invention contains glass frit in addition to an organic vehicle containing aluminum powder and a binder such as ethyl cellulose or acrylic resin, and the glass frit contains substantially no lead component and contains SiO 2 in mass%. 5 to 15, B 2 O 3 to 20 to 40, Al 2 O 3 to 0 to 10, ZnO to 30 to 45, RO (total of at least one selected from the group consisting of MgO, CaO, SrO, and BaO) 5 to 30 and R 2 O (total of at least one selected from the group consisting of Li 2 O, Na 2 O, and K 2 O) 0.1 to 6.
本発明のガラスフリットにおいて、SiO2はガラス形成成分であり、別のガラス形成成分であるB2O3と共存させることにより、安定したガラスを形成することが可能であり、5〜15%(質量%、以下においても同様である)含有させる。15%を越えると、ガラスの軟化点が上昇し導電性ペーストとして使用し難くなる。より好ましくは7〜13%の範囲である。In the glass frit of the present invention, SiO 2 is a glass forming component, and by coexisting with B 2 O 3 which is another glass forming component, it is possible to form a stable glass, 5 to 15% ( (The same applies to the mass% below). If it exceeds 15%, the softening point of the glass will rise, making it difficult to use as a conductive paste. More preferably, it is 7 to 13% of range.
B2O3はガラス形成成分であり、ガラス溶融を容易とし、ガラスの熱膨張係数の過度の上昇を抑え、かつ、焼成時にガラスに流動性を与え、ガラスの誘電率を低下させるものであり、ガラス中に20〜40%含有させる。20%未満ではガラスの流動性が不充分となることにより焼結性が損なわれ、一方で40%を越えるとガラスの安定性が低下する。また、より好ましくは25〜35%の範囲である。B 2 O 3 is a glass-forming component, facilitates glass melting, suppresses an excessive increase in the thermal expansion coefficient of glass, imparts fluidity to glass during firing, and lowers the dielectric constant of glass. And 20 to 40% in the glass. If it is less than 20%, the fluidity of the glass becomes insufficient, so that the sinterability is impaired. On the other hand, if it exceeds 40%, the stability of the glass is lowered. More preferably, it is 25 to 35% of range.
Al2O3は、ガラスの結晶化を抑制する成分である。ガラス中に0〜10%含有させるが、10%を超えるとガラスの軟化点が上昇し導電性ペーストとして使用し難くなる。Al 2 O 3 is a component that suppresses crystallization of glass. Although it is made to contain 0 to 10% in glass, when it exceeds 10%, the softening point of glass will rise and it will become difficult to use as an electrically conductive paste.
ZnOはガラスの軟化点を下げる成分で、ガラス中に30〜45%含有させる。30%未満では上記作用を発揮し得ず、45%を超えるとガラスが不安定となり結晶を生じ易くなる。また、好ましくは35〜42%の範囲である。 ZnO is a component that lowers the softening point of the glass and is contained in the glass at 30 to 45%. If it is less than 30%, the above effect cannot be exhibited, and if it exceeds 45%, the glass becomes unstable and crystals are likely to be formed. Moreover, Preferably it is 35 to 42% of range.
RO(MgO、CaO、SrO、及びBaOからなる群から選ばれる少なくとも1種の合計)はガラスの軟化点を下げるものであり、ガラス中に5〜30%含有させる。5%未満ではガラスの軟化点の低下が不十分となり焼結性が損なわれる。一方で30%を越えるとガラスの熱膨張係数が高くなりすぎることがある。より好ましくは10〜27%の範囲である。 RO (total of at least one selected from the group consisting of MgO, CaO, SrO and BaO) lowers the softening point of the glass and is contained in the glass in an amount of 5 to 30%. If it is less than 5%, the softening point of the glass is not sufficiently lowered, and the sinterability is impaired. On the other hand, if it exceeds 30%, the thermal expansion coefficient of the glass may become too high. More preferably, it is 10 to 27% of range.
R2O(Li2O、Na2O、及びK2Oからなる群から選ばれる少なくとも1種の合計)はガラスの軟化点を下げ熱膨張係数を適宜範囲に調整するものであり、0.1〜6%の範囲で含有させる。0.1%未満ではガラスの軟化点の低下が不十分となり焼結性が損なわれる。一方で6%を越えると熱膨張係数を過度に上昇させることがある。より好ましくは2〜6%の範囲である。なおR2Oとして少なくともK2Oを含むのが好ましい。R 2 O (total of at least one selected from the group consisting of Li 2 O, Na 2 O, and K 2 O) lowers the softening point of the glass and adjusts the thermal expansion coefficient to an appropriate range. It is made to contain in 1 to 6% of range. If it is less than 0.1%, the softening point of the glass is not sufficiently lowered and the sinterability is impaired. On the other hand, if it exceeds 6%, the thermal expansion coefficient may be excessively increased. More preferably, it is 2 to 6% of range. R 2 O preferably contains at least K 2 O.
この他にも、一般的な酸化物で表すCuO、TiO2、In2O3、Bi2O3、SnO2、TeO2などを加えてもよい。In addition, CuO, TiO 2 , In 2 O 3 , Bi 2 O 3 , SnO 2 , TeO 2 or the like represented by a general oxide may be added.
実質的に鉛(以下PbOと記載することもある)を含まないことにより、人体や環境に与える影響を皆無とすることができる。ここで、実質的にPbOを含まないとは、PbOがガラス原料中に不純物として混入する程度の量を意味する。例えば、低融点ガラス中における0.3%以下の範囲であれば、先述した弊害、すなわち人体、環境に対する影響、絶縁特性等に与える影響は殆どなく、実質的にPbOの影響を受けないことになる。 By substantially not containing lead (hereinafter also referred to as PbO), it is possible to eliminate the influence on the human body and the environment. Here, “substantially free of PbO” means an amount of PbO mixed as an impurity in the glass raw material. For example, if it is in the range of 0.3% or less in the low-melting glass, there is almost no influence on the adverse effects described above, that is, the influence on the human body and the environment, the insulation characteristics, etc. Become.
前記ガラスフリットを用いることにより、30℃〜300℃における熱膨張係数が(55〜80)×10-7/℃、軟化点が550℃以上650℃以下の導電性ペーストを得ることが可能となる。熱膨張係数が(55〜85)×10-7/℃を外れると電極形成時に剥離、基板の反り等の問題が発生する。好ましくは、(60〜75)×10-7/℃の範囲である。また、軟化点が650℃を越えると焼成時に十分に流動しないため、半導体シリコン基板との密着性が悪くなる等の問題が発生する。好ましくは上記軟化点が580℃以上630℃以下である。By using the glass frit, it is possible to obtain a conductive paste having a thermal expansion coefficient of (55 to 80) × 10 −7 / ° C. and a softening point of 550 to 650 ° C. at 30 to 300 ° C. . When the thermal expansion coefficient is outside (55 to 85) × 10 −7 / ° C., problems such as peeling and warping of the substrate occur during electrode formation. Preferably, it is in the range of (60-75) × 10 −7 / ° C. Further, when the softening point exceeds 650 ° C., it does not flow sufficiently at the time of firing, so that problems such as poor adhesion to the semiconductor silicon substrate occur. The softening point is preferably 580 ° C. or higher and 630 ° C. or lower.
本発明の導電性ペーストは、前述したように太陽電池素子に使用することが可能である。またさらに、該導電性ペーストは低温で焼成が可能であることから、銀やアルミ等を用いた配線パターンの形成材料や各種電極等、電子材料用基板としても使用できる。 The conductive paste of the present invention can be used for a solar cell element as described above. Furthermore, since the conductive paste can be baked at a low temperature, it can be used as a substrate for electronic materials such as a wiring pattern forming material using silver or aluminum or various electrodes.
以下、実施例に基づき、説明する。 Hereinafter, a description will be given based on examples.
(導電性ペースト)
まず、ガラス粉末は、実施例に記載した所定組成となるように各種無機原料を秤量、混合して原料バッチを作製した。この原料バッチを白金ルツボに投入し、電気加熱炉内で1000〜1300℃、1〜2時間で加熱溶融して表1の実施例1〜4、参考例、表2の比較例1〜4に示す組成のガラスを得た。ガラスの一部は型に流し込み、ブロック状にしてい熱物性(熱膨張係数、軟化点)測定用に供した。残余のガラスは急冷双ロール成形機にてフレーク状とし、粉砕装置で平均粒径1〜4μm、最大粒径10μm未満の粉末状に整粒した。
(Conductive paste)
First, various inorganic raw materials were weighed and mixed so that the glass powder had a predetermined composition described in the examples to prepare a raw material batch. This raw material batch was put into a platinum crucible and heated and melted in an electric heating furnace at 1000 to 1300 ° C. for 1 to 2 hours. In Examples 1 to 4 in Table 1 , Reference Examples, and Comparative Examples 1 to 4 in Table 2 A glass having the composition shown was obtained. A part of the glass was poured into a mold and used for measurement of thermophysical properties (thermal expansion coefficient, softening point) in a block shape. The remaining glass was made into flakes with a rapid cooling twin roll molding machine, and sized with a pulverizer into a powder having an average particle size of 1 to 4 μm and a maximum particle size of less than 10 μm.
なお、上記の軟化点は、熱分析装置TG―DTA(リガク(株)製)を用いて測定した。また、上記の熱膨張係数は熱膨張計を用い、5℃/分で昇温したときの30〜300℃での伸び量から線膨張係数を求めた。 In addition, said softening point was measured using thermal analyzer TG-DTA (made by Rigaku Corporation). Moreover, the said thermal expansion coefficient calculated | required the linear expansion coefficient from the amount of elongation at 30-300 degreeC when it heated up at 5 degree-C / min using the thermal dilatometer.
次いで、αテルピネオールとブチルカルビトールアセテートからなるペーストオイルにバインダーとしてのエチルセルロースと上記ガラス粉、また導電性粉末としてアルミニウム粉末を所定比で混合し、粘度、500±50ポイズ程度の導電性ペーストを調製した。 Next, paste oil composed of α-terpineol and butyl carbitol acetate is mixed with ethyl cellulose as binder and the above glass powder, and aluminum powder as conductive powder at a predetermined ratio to prepare a conductive paste with a viscosity of about 500 ± 50 poise. did.
次に、p型半導体シリコン基板1を準備し、その上部に上記で作製した導電性ペーストをスクリーン印刷した。これらの試験片を、140℃のオーブンで10分間乾燥させ、次に電気炉にて800℃条件下で1分間焼成し、p型半導体シリコン基板1にアルミニウム電極層5とBSF層6を形成した構造を得た。
Next, the p-type
次に、アルミニウム電極層5のp型半導体シリコン基板1との密着性を調べるために、メンディングテープ(ニチバン製)をアルミニウム電極層5に貼り付け、剥離したときのアルミニウム電極層5の剥がれ状態を目視にて評価した。
Next, in order to examine the adhesiveness of the aluminum electrode layer 5 to the p-type
その後、アルミニウム電極層5を形成したp型半導体シリコン基板1を水酸化ナトリウム水溶液に浸漬して、アルミニウム電極層5およびBSF層6をエッチングすることでp+層7を表面に露出させ、p+層7の表面抵抗を4探針式表面抵抗測定器で測定した。Thereafter, a p-type
(結果)
無鉛低融点ガラス組成および、各種試験結果を表に示す。(result)
The lead-free low melting point glass composition and various test results are shown in the table.
なお表1及び2の接着強度の欄において、Aは接着強度が良好であったことを示し、Bは接着強度がどちらかというと良好であったことを示し、Cは接着強度が不十分であったことを示す。 In Tables 1 and 2, “A” indicates that the adhesive strength is good, “B” indicates that the adhesive strength is rather good, and “C” indicates that the adhesive strength is insufficient. Indicates that there was.
表1における実施例1〜4に示すように、本発明の組成範囲内においては、軟化点が550〜650℃であり、好適な熱膨張係数(55〜75)×10-7/℃を有しており、p型半導体シリコン基板1との密着性も良好であった。更には、太陽電池素子の変換効率に関係するp+層7の抵抗値も26Ω/□以下となり、半導体シリコン太陽電池用の導電性ペーストとして用いることが可能である。
As shown in Examples 1 to 4 in Table 1, within the composition range of the present invention, the softening point is 550 to 650 ° C. and a suitable thermal expansion coefficient (55 to 75 ) × 10 −7 / ° C. The adhesion with the p-type
他方、本発明の組成範囲を外れる表2における比較例1〜4は、p型半導体シリコン基板1との良好な密着性が得られない、p+層7の抵抗値が高い、または溶解後にガラスが潮解性を示すなど、半導体シリコン太陽電池用の導電性ペーストとしては適用し得ないものであった。On the other hand, Comparative Examples 1 to 4 in Table 2 that are out of the composition range of the present invention cannot obtain good adhesion to the p-type
1 p型半導体シリコン基板
2 n型半導体シリコン層
3 反射防止膜
4 表面電極
5 アルミニウム電極層
6 BSF層
7 P+層1 p-type semiconductor silicon substrate 2 n-type semiconductor silicon layer 3
Claims (3)
該導電性ペーストはアルミニウム粉末、ガラスフリット、有機ビヒクルを含むものであり、該ガラスフリットの組成は、実質的に鉛成分を含まず、質量%で
SiO2を5〜15、
B2O3を20〜40、
Al2O3を0〜10、
ZnOを35〜45、
RO(MgO、CaO、SrO、及びBaOからなる群から選ばれる少なくとも1種の合計)を5〜30、
R2O(Li2O、Na2O、及びK2Oからなる群から選ばれる少なくとも1種の合計)を0.1〜6、
を含み、30〜300℃における熱膨張係数が(55〜75)×10 -7 /℃であることを特徴とする導電性ペースト。 A conductive paste for solar cells using a semiconductor silicon substrate,
The conductive paste contains aluminum powder, glass frit, and an organic vehicle, and the composition of the glass frit is substantially free of lead components and contains 5 to 15 SiO 2 by mass%.
B 2 O 3 20-40,
Al 2 O 3 from 0 to 10,
35-45 the ZnO,
RO (total of at least one selected from the group consisting of MgO, CaO, SrO, and BaO) is 5 to 30,
0.1 to 6, R 2 O (total of at least one selected from the group consisting of Li 2 O, Na 2 O, and K 2 O)
And a thermal expansion coefficient at 30 to 300 ° C. is (55 to 75) × 10 −7 / ° C.
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JP2007070196A (en) * | 2005-09-09 | 2007-03-22 | Central Glass Co Ltd | Lead-free low melting-point glass |
JP2009120472A (en) * | 2007-10-24 | 2009-06-04 | Nippon Electric Glass Co Ltd | Dielectric material for plasma display panel |
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JP2007070196A (en) * | 2005-09-09 | 2007-03-22 | Central Glass Co Ltd | Lead-free low melting-point glass |
JP2009120472A (en) * | 2007-10-24 | 2009-06-04 | Nippon Electric Glass Co Ltd | Dielectric material for plasma display panel |
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