JP5891524B2 - Electron microscope remote display device - Google Patents

Description

  The present invention relates to an electron microscope remote display device, and more particularly to an electron microscope remote display device that can be observed in real time and with high definition in a remote place via a network.

  There are various types of electron microscopes such as a scanning electron microscope, a transmission electron microscope, and a scanning transmission electron microscope. All of these devices, when observing a sample, place the sample on the sample stage of the electron microscope, display a magnified image of the sample on the display device attached to the electron microscope, select the area to be photographed, magnification, etc. The photograph which is an enlarged image is taken. Moreover, a detector for performing composition analysis such as an energy dispersive X-ray spectrometer is generally attached to the electron microscope, and composition distribution measurement is performed by point analysis, line analysis, element mapping, and the like using this detector. A computer for displaying these images and data is attached to and connected to the main body of the electron microscope, and also functions to control the main body of the electron microscope and various detectors.

  An electron microscope capable of obtaining a high magnification is expensive, and it is impossible to install the electron microscope in all necessary places. Further, in order to operate the electron microscope, it is necessary to learn the operation method for each apparatus. For this reason, in order to take a magnified image of a sample with an electron microscope and to analyze a composition, it is common to ask an analyst to operate an apparatus at a remote location. In such a case, the determination of the area to be imaged, the determination of the magnification, and the determination of the composition analysis location are left to the person in charge of analysis.

  Therefore, if the client wants to determine the shooting conditions and analysis conditions, it is necessary to move to a remote location where the electron microscope is located and give instructions directly to the analyst. Needed time. In view of this, for example, as in Patent Document 1, an apparatus capable of displaying an enlarged image equivalent to that obtained by an electron microscope main body even in a remote place has been developed.

Japanese Patent Laid-Open No. 9-63529

  However, since the apparatus described in Patent Document 1 is intended for the operation of moving the sample stage of the electron microscope main body, the magnification changing operation, and the focusing operation from a remote location, the network is directly connected to a computer attached to the electron microscope main body. There is a need. The computer attached to the main body of the electron microscope stores valuable data such as programs for controlling the electron microscope, its configuration files, photographs taken in the past, and analysis data. There is a problem that the risk of being tampered with or leaking outside cannot be completely avoided.

  The present invention has been made in view of the above problems, and an electronic microscope remote display device capable of displaying an image of an electron microscope at a remote place without directly connecting a computer attached to the main body of the electron microscope to a network. The purpose is to provide.

To achieve the above object, the present invention is Rutotomoni includes a capture can capture means image data to be displayed on the image display portion of the cut off from the network electronic microscope, captured configured to be connected to a network unit And a remote display unit including a remote image display unit connected to the capture unit via a network and capable of displaying image data captured by the capture unit.

  As described above, in the electronic microscope remote display device according to the present invention, the capture unit capable of capturing image data displayed on the image display unit of the electron microscope is connected to the network, and a computer or the like attached to the main body of the electron microscope is provided. Since the image data can be transmitted to a remote place without being directly connected to the network, it is possible to prevent a risk that valuable data stored in the electron microscope leaks outside through the network.

  In the electron microscope remote display device according to the present invention, the capture unit further includes a captured image display unit capable of displaying the image data captured by the capture unit, and the remote display unit includes the remote image display unit. It is preferable that an input unit capable of inputting information that can be displayed is further provided, and the information input by the input unit is configured to be displayed on the captured image display unit.

  As described above, since the input unit connected to the remote display unit connected to the capture unit via the network can input information to the capture screen display unit of the capture unit, the requester can perform remote display at a remote place. By inputting the instruction information to the capture screen display unit of the capture unit by the input unit of the unit, it is possible to cause the analyst at the installation location of the capture unit to operate the electron microscope based on the instruction information.

  As described above, according to the present invention, it is possible to provide an electronic microscope remote display device that can display an image of an electron microscope in a remote place without directly connecting a computer attached to the main body of the electron microscope to a network. .

It is a conceptual diagram showing 1st embodiment of the electron microscope remote display apparatus which concerns on this invention. It is a conceptual diagram showing 2nd embodiment of the electron microscope remote display apparatus which concerns on this invention.

  Next, a first embodiment of an electron microscope remote display device according to the present invention will be described with reference to FIG. The electronic microscope remote display device 10 according to the first embodiment is such that a client at a remote location pseudo-remotely operates the electron microscope 12, that is, transmits instruction information to a person in charge of analysis of the electron microscope 12 from a remote location. Thus, the electron microscope 12 is remotely operated through the person in charge of analysis.

  In the present embodiment, the electron microscope 12 to be simulated remotely includes an electron microscope main body 14 and an electron microscope computer 16 connected to the electron microscope main body 14. The electron microscope main body 14 is connected to a detector for performing composition analysis, such as an energy dispersive X-ray spectrometer and an electron energy loss spectrometer (not shown). Using these detectors, point analysis, line analysis, element mapping The composition distribution can be measured by the above. The computer 16 for an electron microscope is a normal personal computer, a display 16a as a display device, a CPU as a control device and an arithmetic device, a personal computer main body 16b having a memory and a hard disk as a storage device, and a keyboard as an input device. 16c and a mouse 16d.

  The electron microscope remote display device 10 according to the first embodiment is connected to an electron microscope computer 16 and includes a capture device 20 including a capture BOX 18 capable of capturing image data that can be displayed on the display 16a of the electron microscope 12, and a capture device 20 A remote operation computer 22 connected to the apparatus 20 via a network 26 such as the Internet and capable of remotely operating the capture apparatus 20 is provided.

  The capture device 20 includes a capture BOX 18 and a capture computer 24 to which the capture BOX 18 is connected. The capture BOX 18 is connected to the personal computer main body 16b of the electron microscope computer 16, and is configured so that image data to be displayed on the display 16a can be captured by the capture computer 24. Here, the image data displayed on the display 16 a of the electron microscope computer 16 includes analysis data in addition to the image photographed by the electron microscope main body 14. The capture computer 24 is a normal personal computer, a display 24a as a display device, a control unit and a CPU as a calculation device, a personal computer main body 24b having a memory and a hard disk, a keyboard 24c as an input device, and the like. A mouse 24d and a communication unit (not shown) connectable to the network 26 such as the Internet are provided. The capture BOX 18 is controlled in the hard disk, and the captured image data is captured and displayed on the display 24a. Computer software that can be used is stored.

  The image data displayed on the display 16a of the electron microscope computer 16 is displayed on the display 24a of the capture computer 24 via the capture BOX 18, so that the electron microscope computer 16 connected to the electron microscope main body 14 is connected from the network. Since it is blocked, it is possible to prevent other moving images and analysis data stored in the electron microscope computer 16 from being tampered with or leaked to the outside due to intrusion through the network.

  A high-definition image having the same resolution as that displayed on the display 16a of the electron microscope computer 16 can be displayed on the display 24a. Further, the resolution of the image displayed on the display 24a of the capture computer 24 can be arbitrarily adjusted.

  Information input with the keyboard 24c and mouse 24d of the capture computer 24 can be displayed on the display 24a and simultaneously with the display 22a of the remote operation computer 22 connected via the network 26. And two-way communication between persons operating the remote control computer 22 respectively.

  The remote operation computer 22 is a normal personal computer, a display 22a as a display device, a control device and a CPU as a calculation device, a personal computer main body 22b having a memory and a hard disk, and a keyboard 22c as an input device. And a communication unit (not shown) that can be connected to a network 26 such as the Internet. On the hard disk of the personal computer main body 22b, the same image as the image displayed on the display 24a of the capture device 20 is displayed on the display 22a, and the information input by the mouse 22d is displayed on the display 24a of the capture device 20. Possible computer software is stored.

  The display 22a of the remote operation computer 22 can display the same image as the image displayed on the display 24a of the capture computer 24. The display 22a has a display 24a of the capture computer 24 through the electron microscope computer. It is possible to display a high-definition image having the same resolution as the image displayed on the 16 displays 16a. Further, the resolution of the image displayed on the display 22a can be arbitrarily adjusted similarly to the display 24a.

  The information input with the keyboard 22c and the mouse 22d of the remote operation computer 22 is not only the display 22a of the remote operation computer 22 but also the capture computer, similar to the information input with the keyboard 24c and the mouse 24d of the capture computer 24. It can also be displayed on 24 displays 24a. For example, by using the mouse 22d of the remote operation computer 22 and displaying the mouse pointer on the display 24a of the capture computer 24, the persons operating the capture computer 24 and the remote operation computer 22 respectively You can share your location.

  In the first embodiment, the capture computer 24 and the remote operation computer 22 substantially share the screen, so that the client can use the keyboard 22c and the mouse 22d of the remote operation computer 22 for a strict enlargement position. The analysis position can be instructed, and the person in charge of analysis can confirm the position with the mouse pointer displayed on the display 24a of the capture computer 24. Similarly, a mouse pointer can be displayed on the display 22a of the remote operation computer 22 by means of a keyboard 24c and a mouse 24d provided on the capture computer 24, so that communication in the opposite direction is possible and mutual confirmation is possible. Work can be done. In addition, in order to perform a smooth confirmation work, it is possible to use voice line communication together.

  That is, in the first embodiment, the capture device 20 can capture image data from the electron microscope computer 16 via the capture BOX 18, and the capture computer 24 and the remote operation computer 22 of the capture device 20 Are connected to each other via a network 26. According to the first embodiment, since the electron microscope computer 16 is logically disconnected from the network, a program for controlling the electron microscope main body 14 stored in the electron microscope computer 16, its setting file, the past In addition, it is possible to completely avoid the risk that valuable data such as photographs and analysis data taken in the camera will be tampered with by intrusion through the network or leaked to the outside, and the capture computer 24 and the remote operation computer 22 Because the computers are connected to each other via the network 26, the client who is in a remote location can check with the person in charge of analysis and move to a place where the electron microscope main body 14 is located. The client can determine shooting conditions and analysis conditions without spending time and money.

  Next, a method for remotely operating the electron microscope 12 using the electron microscope remote display device 10 according to the first embodiment will be described. First, the person in charge of analysis who operates these is arranged at the place where the electron microscope 12 and the capture device 20 are installed, and the client is arranged at the place where the computer 22 for remote operation is installed. When the person in charge of analysis operates the electron microscope 12 and the capture device 20, an image taken by the electron microscope main body 14 is displayed on the display 16a. At that time, the capture BOX 18 of the capture device 20 captures the image data displayed on the display 16 a and inputs it to the personal computer main body 24 b of the capture computer 24. The image data input to the personal computer main body 24 b is displayed on the display 24 a and input to the personal computer main body 22 b of the remote operation computer 22 via the network 26. The image data input to the personal computer main body 22b is displayed on the display 22a, whereby the client can recognize the image photographed by the electron microscope 12.

  Next, when the client moves the mouse pointer on the display 22a to, for example, a position to be zoomed using the mouse 22d, the mouse pointer on the display 24a of the capture computer 24 also moves to the position to be zoomed. The person in charge can recognize the location where the client wants to zoom. Then, the person in charge of analysis can send the zoomed image to the client by operating the electron microscope 12 so as to zoom the part.

  Next, a second embodiment of the electron microscope remote display device according to the present invention will be described with reference to FIG. The electronic microscope remote display device 10 ′ according to the second embodiment is not limited to a single portable terminal 29 that is a remote operation computer, and can be remotely observed from a plurality of locations at the same time. This is different from the first embodiment.

  Furthermore, in the second embodiment, instead of the remote operation computer 22 of the first embodiment, a portable terminal 29 connected to the wireless network via the base station 28 can be used, and the client can connect to the wireless network. You can freely select a remote observation place as long as you can connect.

  In other respects, the second embodiment is the same as the first embodiment. Therefore, also in the second embodiment, the computer 16 for the electron microscope connected to the electron microscope main body 14 is logically connected from the network. It is possible to prevent the past valuable moving images and analysis data stored in the electron microscope computer 16 from being intercepted and being tampered with or leaked to the outside through the network.

  As mentioned above, although some embodiment of this invention was described, these embodiment is shown as an example and is not intending limiting the range of invention. These embodiments can be implemented in various other forms.

  The conventional electronic microscope remote display device is attached to the main body of the electron microscope because it is intended to perform the operation of moving the sample stage of the main body of the electron microscope, the magnification changing operation, and the focusing operation from a remote place with a remote operation computer. It is necessary to connect the network directly to the electron microscope computer. Therefore, by operating the computer for remote operation, there is an advantage that the computer for the electron microscope attached to the electron microscope main body can be directly operated, but the computer for the electron microscope attached to the main body of the electron microscope has been intruded through the network. In this case, it is impossible to completely avoid the risk that a program for controlling the electron microscope main body, its setting file, valuable data such as photographs taken in the past and analysis data will be tampered with or leaked to the outside.

  However, according to the present invention, the computer attached to the main body of the electron microscope is completely protected from intrusion from the network, and the client who is remote from the installation location of the electron microscope is as if the electronic It is possible to construct a system that can directly instruct the analyst as if a microscope is installed.

  Further, in the present invention, the object of remote observation is not limited to the electron microscope, and the same effect can be obtained also in an analysis device that displays various data on a computer, such as an electron beam microanalysis device or a focused ion beam device. it can.

10 Electron Microscope Remote Display Device 12 Electron Microscope 16a Display (Image Display Unit)
18 Capture BOX (capture means)
20 Capture device (capture unit)
22 Remote operation computer (remote display)
22a Display (remote image display means)
26 network

Claims (1)

A capture unit configured to be capable of capturing image data displayed on the image display unit of the electron microscope that is blocked from the network and configured to be connectable to the network;
A remote display unit including a remote image display unit connected to the capture unit via a network and capable of displaying image data captured by the capture unit;
The capture unit further includes captured image display means capable of displaying the image data captured by the capture means,
The remote display unit further includes input means capable of inputting information that can be displayed on the remote image display means,
The information input by the input means is configured to be displayed on the capture image display means.

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