JP5890296B2 - Linear movement mechanism - Google Patents

Description

  The present invention relates to a rectilinear movement mechanism for converting a rotational drive into rectilinear movement to reciprocate a moving object.

In order to increase the accuracy of processing and inspection in punching processing with a mold for film-like workpieces and electrical inspection such as continuity and insulation, it is necessary to move the upper and lower molds or electrical inspection jigs with high straightness. There is. In addition, there are cases where a large thrust is required for the straight movement due to an increase in the number of locations to be processed and inspection locations.
As a means for moving the mold and the electric inspection jig, there is one using a rectilinear movement mechanism that converts a rotational drive of a drive source such as a motor into a rectilinear movement.

As such a linear movement mechanism, as shown in Patent Documents 1 to 4, there is known a linear movement mechanism that includes a feed screw such as a ball screw and a feed nut that is screwed into the feed screw.
For example, the linear movement mechanism disclosed in Patent Document 1 is configured such that when the feed screw rotates, the feed nut moves linearly in the axial direction, and the table or the like attached to the feed nut is moved. The body can be moved with the feed nut. A guide portion such as a guide rail is provided along the axial direction of the feed screw in order to move the feed nut linearly along the axial direction of the feed screw, and the movable body is linearly moved along the guide portion. Can be made.

  However, in such a linear movement mechanism, a force synchronized with the swing generated in the feed nut by the rotational drive of the feed screw is transmitted to the moved body, so that the moved body is synchronized with the swing of the feed nut. Inevitably fluctuating. For this reason, the straightness of movement of the moving object is reduced, and the moving object cannot be accurately reciprocated.

  Therefore, in order to improve the movement straightness of the movable body, in Patent Document 4, an intermediate connection member is disposed between a block integrally mounted on the feed nut and the table (movable body). Connects the intermediate connection member and the block and slidably moves in the vertical direction of the cross section of the feed screw while connecting the intermediate connection member and the table side to the horizontal slide mechanism portion slidably arranged in the horizontal direction of the cross section of the feed screw. And a vertical slide mechanism portion disposed in the frame, and are connected via an intermediate connecting member and a slide mechanism portion to absorb block shake.

Japanese Patent No. 2948951 Japanese Patent No. 4297621 JP 2007-275955 A JP-A-5-318259

  However, in fields such as microfabrication and precision measurement that require extremely high straightness, a higher degree of movement straightness is required while generating a large thrust.

  The present invention has been made in view of such circumstances, and a linear movement mechanism capable of transmitting a straight movement while maintaining a straightness of movement of the moving object with high accuracy while generating a large thrust. The purpose is to provide.

  As described in Patent Document 4, when the block and the movable body are connected via the slide mechanism, the power transmitted to the block is directly applied to the slide mechanism, and only the vibration generated in the block In addition, axial thrust is also applied. For this reason, in order to keep the moving straightness of the movable body with high accuracy, it is necessary to increase the rigidity of the slide mechanism unit. As a result, not only the mechanism becomes large, but also the slide mechanism unit moves smoothly. May be disturbed.

The linear movement mechanism of the present invention includes a drive source for rotational driving, a motion conversion means for converting the rotational motion of the drive source into a linear motion and transmitting it to the reciprocating body, and a target to be moved by the thrust of the reciprocating body. A thrust transmission unit that transmits a thrust in a straight traveling direction and a whirling absorber that absorbs the whirling that occurs in the reciprocating body are arranged in parallel between the reciprocating body and the moving body. The swing absorbing portion is disposed between a tip of the reciprocating body and the movable body along a direction perpendicular to the rectilinear direction, and the guide plate and the reciprocating portion. An X-direction slide portion that supports a movable body so as to be relatively movable in an X direction orthogonal to the straight traveling direction, and a relative movement of the guide plate and the movable body in the linear direction and a Y direction orthogonal to the X direction. Support freely The X-direction slide portion has a pair of pin-shaped portions arranged at intervals in the X-direction and a groove shape parallel to a line connecting the axis centers of the pair of pin-shaped portions. The Y-direction slide part is formed of a pair of pin-shaped parts arranged at intervals in the Y-direction, and the pair of pin-shaped parts. It is formed by a groove shape that is formed in a groove shape parallel to a line connecting the shaft centers and is engaged with the pin shape .

Connect the thrust transmission part and the swirl absorbing part separately between the reciprocating body and the moving body, and load the thrust transmission part with the thrust in the straight direction with a large load, and load compared to the thrust in the straight direction. Since the swing absorbing portion is burdened with a small amount of swing, the thrust transmitting portion can directly transmit the thrust in the vertical direction, and the stiffness of the swing absorbing portion can be set low. Therefore, it is possible to transmit the straight movement while maintaining a high degree of straightness of movement of the moving object while generating a large thrust.
The reciprocating body swings in an arbitrary XY direction combining direction that intersects with a direction of approximately 90 ° in a horizontal plane orthogonal to the straight traveling direction (Z direction). Therefore, the guide plate can guide the reciprocating body and the moving body in arbitrary XY directions, and the vibration generated in each direction can be absorbed by the guide plate, so that the shake of the reciprocating body can be absorbed. . As described above, the simple configuration of the guide plate and the both slide portions can absorb the shake generated in the reciprocating body and transmit the straight movement while maintaining the straightness of movement of the body to be moved with high accuracy.

In the rectilinear movement mechanism of the present invention, the whirling absorbing portion is configured to connect the reciprocating body and the movable body closer to the distal end side in the rectilinear direction than the thrust transmission portion.
By adopting such a configuration, it is possible to suppress the thrust of the reciprocating moving body from being transmitted to the whirling absorber, smooth the whirling absorber, and reliably absorb the whirling, and have high straightness. It is possible to move straight ahead.

In the linear movement mechanism of the present invention, in the thrust transmission unit, the reciprocating body and the body to be moved may be connected via a thrust bearing.
The thrust bearing has a sliding function or a rolling function, and can minimize the sliding resistance or rolling resistance in the XY direction generated on the contact surface between the reciprocating body and the moving body. It is possible to reduce the influence and transmit a straight movement with high straightness with a larger thrust.

  According to the present invention, the thrust transmission unit and the swing absorber are separately connected between the reciprocating body and the moving body, and the thrust transmission unit bears a thrust in a straight traveling direction with a large load. Since the configuration is such that the swirl absorbing portion bears a swing that has a small load compared to the thrust of the thrust, the thrust transmitting portion can directly transmit the thrust in the vertical direction, and the rigidity of the swirl absorbing portion must be set low. Can do. Therefore, it is possible to transmit a straight movement while generating a large thrust while maintaining the straightness of movement of the moving object with high accuracy.

It is the schematic which shows the processing apparatus to which the linear movement mechanism of 1st Embodiment of this invention is applied. It is a disassembled perspective view explaining the rectilinear movement mechanism shown in FIG. It is principal part sectional drawing explaining a thrust transmission part and a whirling absorption part. It is a disassembled perspective view explaining a whirling absorption part. It is a figure explaining the thrust transmission part of other embodiment. It is a figure explaining the whirling absorption part of other embodiment. It is principal part sectional drawing which shows the linear movement mechanism of 2nd Embodiment. It is a figure explaining the linear movement mechanism shown in FIG. 7, (a) is a thrust transmission part, (b) shows a swing absorption mechanism.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic view of a processing apparatus 100 to which the linear movement mechanism of the first embodiment is applied. The processing apparatus 100 includes a substantially rectangular base 21 installed on a work table and an upper plate 22 provided on the upper part of the base 21. Further, pillars 23 are erected at the four corners of the base 21, and the upper plate 22 is fixed to the upper end of the pillar 23 so as to face the base 21.

Between the base 21 and the upper plate 22, a rectangular moving plate 31 (movable body in the present invention) is provided at the lower end of the guide shaft 32 along the vertical direction. The four support cylinders 33 are fixed, and the guide shaft 32 is provided in the support cylinder 33 so as to be slidable in the vertical direction (contact state of the straight pair).
An upper mold 41 (movable side mold) is provided at the center of the lower surface of the moving plate 31, and a lower mold 42 (fixed side mold) is assembled at the center of the upper surface of the base 21. Thus, a mold is formed.

The processing apparatus 100 is provided with a linear movement mechanism 1 that moves the moving plate 31 up and down to open and close the mold.
The rectilinear movement mechanism 1 includes a motor 11 (drive source in the present invention) that is rotationally driven, a motion conversion means 2 that converts the rotational motion of the motor 11 into a rectilinear motion and transmits it to the reciprocating body, and a reciprocating body. It is comprised from the movement plate 31 moved by this thrust.
For example, as shown in FIG. 1, the motion converting means 2 is configured by a combination of a screw pair by a feed screw 12 such as a ball screw serving as a reciprocating body and a feed nut 13 screwed into the feed screw 12. .

The feed nut 13 is rotatably supported by a bearing 24 at the center of the upper plate 22. A pulley 14 is attached to the feed nut 13 at an upper end protruding above the upper plate 22, and the pulley 14 is rotationally driven by a motor 11 via a belt 15.
Further, the feed screw 12 is configured to move straight along the axial direction (Z direction) by rotating the feed nut 13, and a moving plate 31 is connected to the lower end of the feed screw 12. Accordingly, when the motor 11 is driven to rotate, the pulley 14 rotates to rotate the feed nut 13, whereby the feed screw 12 moves downward or ascends along the Z direction, and the moving plate 31 also feeds. It descends or rises with the screw 12. The motor 11 is fixed to the main body (not shown) of the processing apparatus 100.

Between the moving plate 31 and the feed screw 12, a thrust transmission unit 5 that transmits thrust in the straight traveling direction and a runout absorption unit 6 that absorbs the runout generated in the feed screw 12 are connected in parallel. Yes.
As shown in FIGS. 2 and 3, a central hole 34 whose inner diameter is gradually reduced in three stages is formed in the central portion of the moving plate 31. The lower step hole portion 34c arranged on the lower surface 31b side of the moving plate 31 is formed with the largest diameter, and is formed so that the diameter becomes smaller toward the middle step hole portion 34b, the upper step hole portion 34a and the upper surface 31a side.

As shown in FIG. 3, the thrust transmission unit 5 inserts the small-diameter portion 12a at the tip of the feed screw 12 into the upper hole portion 34a, and bolts the upper connecting plate 51 to the tip surface of the small-diameter portion 12a (for example, as shown In this case, the moving plate 31 is connected to the feed screw 12. The upper surface 31a of the moving plate 31 and the bottom surface of the middle step hole portion 34b are disposed between the lower end surface of the screw portion 12b of the feed screw 12 and the upper connecting plate 51, so that the feed screw 12 can be moved up and down. Accordingly, the thrust in the straight traveling direction can be transmitted to the moving plate 31 from the contact surface between the feed screw 12 and the moving plate 31.
Specifically, when the moving plate 31 is moved upward, thrust is transmitted from the contact surface between the bottom surface of the middle hole portion 34 b and the upper connecting plate 51. When the moving plate 31 is moved downward, thrust is transmitted from the contact surface between the upper surface 31a of the moving plate 31 and the lower end surface of the screw portion 12b.

  As shown in FIG. 3, the run-out absorbing portion 6 includes an upper connecting plate 51 fixed to the feed screw 12 and a lower portion fixed to the moving plate 31 on the front end side in the straight traveling direction (Z direction) with respect to the thrust transmitting portion 5. A guide plate 52 that is connected to the side connection plate 53 and disposed between the upper connection plate 51 and the lower connection plate 53 along a direction (XY direction) orthogonal to the straight direction, and the guide plate 52 An X-direction slide portion 51S that supports the upper connecting plate 51 (that is, the feed screw 12) so as to be relatively movable in the X direction orthogonal to the straight traveling direction, a guide plate 52, and a lower connecting plate 53 (that is, the moving plate 31). And a Y-direction slide portion 53S that supports the linear movement and the Y-direction that is orthogonal to the X-direction so as to be relatively movable.

  As shown in FIGS. 2 to 4, the X-direction slide portion 51 </ b> S is engaged with the pair of pin-shaped portions 51 a and a pair of pin-shaped portions 51 a that protrude from the upper connecting plate 51 and are spaced from each other in the X-direction. And a long hole groove 51b formed in the guide plate 52. The elongated groove 51b is formed in a groove shape parallel to a line connecting the axial centers of the pair of pin-shaped portions 51a, and the pin-shaped portion 51a can move along the longitudinal direction (X direction).

The Y-direction slide portion 53S is formed on a pair of pin-shaped portions 53a that protrude from the lower connecting plate 53 and are spaced from each other in the Y-direction, and a guide plate 52 that engages with these pin-shaped portions 53a. And a long hole groove 53b. The elongated groove 53b is formed in a groove shape parallel to a line connecting the axial centers of the pair of pin-shaped portions 53a, and the pin-shaped portion 53a can move along the longitudinal direction (Y direction).
As described above, the upper connecting plate 51 and the lower connecting plate 53 can be moved relative to each other in the XY directions orthogonal to the linearly moving direction of the feed screw 12.

  When processing the workpiece 4 in the processing apparatus 100 having such a configuration, first, the workpiece 4 is placed between the lower mold 42 and the upper mold 41 with the upper mold 41 raised upward. . Next, the motor 11 is rotationally driven to rotate the feed nut 13. As the feed nut 13 rotates, the feed screw 12 moves downward in the straight direction, and the upper die 41 moves downward together with the moving plate 31.

Since there is a clearance between the feed screw 12 and the feed nut 13, the feed screw 12 swings in a horizontal plane orthogonal to the straight traveling direction (Z direction) when moving up and down.
The swing absorbing portion 6 is configured to guide the feed screw 12 and the moving plate 31 in arbitrary XY directions orthogonal to each other by the guide plate 52, the X direction slide portion 51S, and the Y direction slide portion 53S. By absorbing the generated vibration by the guide plate 52, it is possible to absorb the vibration of the feed screw 12 generated in the combined direction.

Further, the linear movement mechanism 1 connects the thrust transmission unit 5 and the swing absorption unit 6 in parallel between the feed screw 12 and the moving plate 31, and applies a thrust in the straight direction with a large load to the thrust transmission unit 5. The swing absorbing portion 6 is configured to bear a swing that has a smaller load than the thrust in the straight traveling direction.
Therefore, the thrust in the vertical direction can be directly transmitted by the thrust transmission unit 5, and the resistance of the whirling absorption unit 6 can be set low. Accordingly, the straight movement can be transmitted while maintaining the straightness of movement of the movable plate 31 with high accuracy while generating a large thrust.

  Further, the run-out absorbing portion 6 is configured to connect the feed screw 12 and the moving plate 31 on the front end side in the straight direction with respect to the thrust transmitting portion 5, and the thrust of the feed screw 12 is transferred to the run-out absorbing portion 6. Transmission can be suppressed, the movement of the swing absorption part 6 can be smoothed, the swing can be reliably absorbed, and a straight movement with high straightness can be performed.

Further, the thrust transmission unit 5 is provided on the contact surface between the feed screw 12 and the moving plate 31 with the plain slide bearings 55a and 55b shown in FIG. 5A and the planar rolling bearings 56a and 56b shown in FIG. It can also be set as the structure which installs thrust bearings, such as 56b.
In this case, the contact surface between the feed screw 12 and the moving plate 31 constituting the thrust transmission unit 5 can be configured as a slip pair or a contact state of the rolling pair, and an XY slip resistance generated on the contact surface or Rolling resistance can be reduced. Therefore, it is possible to reduce the influence of the swirl of the feed screw 12 and transmit a straight movement with high straightness with a larger thrust.

Further, as shown in FIG. 6, the swing-absorbing absorption unit 6 may be configured such that the linear motion rolling guides 58 and 59 are overlapped between the upper connection plate 51 and the moving plate 31.
In FIG. 6, the linear motion rolling guide 59 disposed on the upper side includes a Y direction rail portion 59 a and a movable block 59 b that is guided by the Y direction rail portion 59 a and moves in the Y direction. And the Y direction rail part 59a is fixed to the upper side connection plate 51, and the movable block 59b can move to the Y direction along the Y direction rail part 59a. The linear motion rolling guide 58 disposed on the lower side includes an X-direction rail portion 58a and a movable block 58b that moves while being guided by the X-direction rail portion 58a. The X-direction rail portion 58a is fixed to the moving plate 31, and the movable block 58b can move in the X direction along the X-direction rail portion 58a. Note that the linear motion rolling guides 58 and 59 in the X direction and the Y direction are not restricted in the Z direction.
The linear motion rolling guides 58 and 59 are connected to each other through movable blocks 58b and 59b, and the movable blocks 58b and 59b are moved together in a state of being fixed to each other. As a result, the upper connecting plate 51 and the moving plate 31 can be moved relative to each other in the XY directions orthogonal to the linearly moving direction of the feed screw 12 via the movable blocks 58b and 59b.
In the run-out absorbing portion constituted by the linear motion rolling guides 58 and 59, the rolling elements (for example, rollers or rollers) are provided between the rail portions 58a and 59a of the linear motion rolling guides 58 and 59 and the movable blocks 58b and 59b. Since the resistance generated between these parts is small, the run-around of the feed screw 12 can be absorbed more smoothly.

  Further, in the linear movement mechanism 1 of the above-described embodiment, the feed screw 12 screwed into the feed nut 13 is moved linearly by rotating the feed nut 13, but the linear movement mechanism 60 shown in FIG. Thus, by rotating the feed screw 62, the feed nut 63 (reciprocating body in the present invention) that is screwed into the feed screw 62 can also be configured to linearly move.

  For example, as shown in FIG. 8A, the thrust transmission unit 65 includes an upper connecting cylinder 71 attached to the tip of the feed nut 63 and a passive unit 36 erected on the upper surface 31 a of the moving plate 31. Can be configured. In FIG. 8A, a hole portion through which the feed screw 62 can go in and out is formed at the center portion of the upper connecting cylinder 71. Further, the outer peripheral surface of the upper connecting cylinder 71 is provided with a concave groove portion 71a that engages with the tip flange portion 36a of the passive portion 36, and in both side surfaces of the concave groove portion 71a (in FIG. 8A, in the horizontal direction). The upper and lower surfaces are in contact with the tip flange 36a. Therefore, along with the vertical movement of the feed nut 63, it is possible to transmit the thrust in the straight direction to the moving plate 31 from the contact surface between the concave groove portion 71a and the tip flange portion 36a.

  Further, as shown in FIG. 8 (b), the whirling absorber 66 connects the upper connecting cylinder 71 and the lower connecting plate 73 on the distal end side in the straight traveling direction (Z direction) with respect to the thrust transmission unit 65. It is configured. The swing-absorbing absorbing portion 66 is a link plate-shaped guide plate 72 disposed along the direction (XY direction) orthogonal to the straight traveling direction between the tip of the feed nut 63 and the moving plate 31, and the guide plate 72 and the feed plate 72. An X-direction slide portion 71S that supports the nut 63 so as to be relatively movable in the X direction orthogonal to the straight direction, and a guide plate 72 and the movable plate 31 are supported so as to be relatively movable in the straight direction and the Y direction orthogonal to the X direction. And a Y-direction slide portion 73S. The structure of these X direction slide part 71S and Y direction slide part 73S is the same as the structure (refer FIG. 4 etc.) by pin shape part 51a, 53a mentioned above and long hole groove | channel 51b, 53b. As a result, the upper connecting cylinder 71 and the lower connecting plate 73 are supported so as to be relatively movable in the XY directions orthogonal to the rectilinear direction of the feed nut 63, respectively, and can absorb the whirling that occurs in the feed nut 63. .

  Thus, also in the rectilinear movement mechanism 60 in which the reciprocating moving body is configured by the feed nut 63, a thrust transmission portion 65 that transmits a thrust in the rectilinear direction and the feed nut 63 are generated between the moving plate 31 and the feed nut 63. By connecting in parallel the swing absorption part 66 that absorbs the swing, the rigidity of the swing absorption part 66 can be set low. Therefore, the straight movement can be transmitted while maintaining the straightness of movement of the movable plate 31 with high accuracy without increasing the size of the mechanism.

  In addition, this invention is not limited to the said embodiment, In the range which does not deviate from the meaning of this invention, a various change can be added.

DESCRIPTION OF SYMBOLS 1,60 ... Straight moving mechanism, 2 ... Motion conversion means, 4 ... Work, 5,65 ... Thrust transmission part, 6,66 ... Swing absorption part, 11 ... Motor (drive source), 12, 62 ... Lead screw ( Reciprocating body), 12a ... small diameter portion, 12b ... screw portion, 13, 63 ... feed nut, 14 ... pulley, 15 ... belt, 21 ... base, 22 ... upper plate, 23 ... support, 24 ... bearing, 31 ... Moving plate (movable body), 31a ... upper surface, 31b ... lower surface, 32 ... guide shaft, 33 ... support cylinder, 34 ... center hole, 34a ... upper hole, 34b ... middle hole, 34c ... lower hole, 36 ... passive part, 36a ... tip flange part, 41 ... upper mold, 42 ... lower mold, 51 ... upper connection plate, 51S, 71S ... X-direction slide part, 51a, 53a ... pin-shaped part, 51b, 53b ... long hole Groove, 52, 72 ... guide plate, 53, 7 ... Lower connecting plate, 53S, 73S ... Y-direction slide portion, 55a, 55b ... Plane slide bearing, 56a, 56b ... Plane rolling bearing, 58, 59 ... Linear rolling guide, 58a, 59a ... Rail portion, 58b, 59b ... Moveable block, 71 ... Upper connecting cylinder, 100 ... Processing device

Claims (3)

A driving source for rotational driving; a motion converting means for converting the rotational motion of the driving source into a rectilinear motion and transmitting it to the reciprocating body; and a moving body that is moved by the thrust of the reciprocating body. Between the moving body and the body to be moved, a thrust transmission unit that transmits thrust in a straight traveling direction and a whirling absorption unit that absorbs the whirling generated in the reciprocating moving body are connected in parallel .
The whirling absorber includes a guide plate disposed along a direction orthogonal to the rectilinear direction between a tip of the reciprocating body and the movable body, and the guide plate and the reciprocating body are linearly moved. An X-direction slide portion that supports the X-direction slidingly movable in the X-direction orthogonal to the direction, and a Y-direction that supports the guide plate and the movable body relative to each other in the linear direction and the Y-direction orthogonal to the X-direction. It consists of a slide part,
The X-direction slide portion is formed by a pair of pin-shaped portions arranged at an interval in the X-direction and a groove shape parallel to a line connecting the axial centers of the pair of pin-shaped portions, and the pin-shaped portion It consists of a slotted slot that engages,
The Y-direction slide portion is formed by a pair of pin-shaped portions arranged at intervals in the Y-direction and a groove shape parallel to a line connecting the axial centers of the pair of pin-shaped portions, and is associated with the pin shape. A linear movement mechanism characterized by comprising a long hole groove to be joined.   The rectilinear movement mechanism according to claim 1, wherein the whirling absorber is connected to the reciprocating body and the body to be moved closer to the front end in the rectilinear direction than the thrust transmission section.   3. The linear movement mechanism according to claim 1, wherein the reciprocating body and the body to be moved are connected via a thrust bearing in the thrust transmission unit.

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