JP5885602B2 - Light source manufacturing apparatus for particle detection apparatus and light source manufacturing method for particle detection apparatus - Google Patents

Description

  The present invention relates to an environment evaluation technique, and more particularly, to a light source manufacturing apparatus and a light source manufacturing method for a particle detection apparatus.

  In a clean room such as a bioclean room, scattered particles are detected and recorded using a particle detection device (see, for example, Non-Patent Document 1). From the particle detection result, it is possible to grasp the deterioration of the air conditioner in the clean room. In addition, a detection record of particles in the clean room may be attached to a product manufactured in the clean room as a reference material. The optical particle detection device, for example, sucks a gas in a clean room and irradiates the sucked gas with light. If the gas contains particles, light is scattered by the particles, so that the number and size of the particles contained in the gas can be detected.

Hasegawa, M. et al., “Real-time microorganism detection technology in the air and its application”, Yamatake Corporation, azbil Technical Review December 2009, p.2-7, 2009

  An object of the present invention is to provide a light source manufacturing apparatus of a particle detection apparatus and a method of manufacturing a light source of a particle detection apparatus capable of manufacturing an optical particle detection apparatus with few false detections.

  According to the aspect of the present invention, (a) an element holding part for holding a light source element, (b) a pedestal holding part for holding a base on which the light source element is mounted, and (c) a wiring pattern on the surface of the light source element Particle recognition comprising: a recognition device that recognizes a direction; and (d) a rotation mechanism that rotates the light source element relative to the pedestal so that the wiring pattern of the light source element faces a predetermined direction with respect to the pedestal. An apparatus for manufacturing a light source for an apparatus is provided.

  According to the aspect of the present invention, (a) holding the light source element, (b) holding a pedestal on which the light source element is mounted, and (c) the direction of the wiring pattern on the surface of the light source element. And (d) rotating the light source element relative to the pedestal so that the wiring pattern of the light source element faces a predetermined direction with respect to the pedestal. A manufacturing method is provided.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the light source of the particle | grain detection apparatus and the light source of a particle | grain detection apparatus which can manufacture an optical particle detection apparatus with few false detections can be provided.

1 is a schematic diagram of an optical particle detection device according to an embodiment of the present invention. It is sectional drawing of the light source element which concerns on embodiment of this invention. It is a schematic diagram of the image of the light source element which concerns on embodiment of this invention. It is a schematic diagram of the illumination optical system of the optical particle detection apparatus which concerns on embodiment of this invention. It is a 1st schematic diagram which shows the relationship between the image of the light source of the optical particle detection apparatus which concerns on embodiment of this invention, and the advancing direction of particle | grains. It is a 2nd schematic diagram which shows the relationship between the image of the light source of the optical particle detection apparatus which concerns on embodiment of this invention, and the advancing direction of particle | grains. It is a 3rd schematic diagram which shows the relationship between the image of the light source of the optical particle detection apparatus which concerns on embodiment of this invention, and the advancing direction of particle | grains. It is a schematic diagram of the manufacturing apparatus of the light source of the particle | grain detection apparatus which concerns on embodiment of this invention. It is a schematic diagram of the central processing unit of the manufacturing apparatus of the light source of the particle | grain detection apparatus which concerns on embodiment of this invention. It is a schematic diagram of the light source element which concerns on other embodiment of this invention. It is a 1st schematic diagram of the base which concerns on other embodiment of this invention. It is a 2nd schematic diagram of the base which concerns on other embodiment of this invention. It is a 3rd schematic diagram of the base which concerns on other embodiment of this invention. It is a 4th schematic diagram of the base which concerns on other embodiment of this invention. It is a 5th schematic diagram of the base which concerns on other embodiment of this invention.

  Embodiments of the present invention will be described below. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, the drawings are schematic. Therefore, specific dimensions and the like should be determined in light of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings.

  First, an optical particle detector manufactured by the manufacturing apparatus according to the embodiment will be described. For example, as shown in FIG. 1, the optical particle detection device includes a light source element 1 that emits light, a pedestal 2 on which the light source element 1 is mounted, and irradiation-side parallelism that converts light emitted from the light source element 1 into parallel light. The optical lens 11, the irradiation side condensing lens 12 which condenses parallel light, and the injection mechanism 3 which crosses the airflow containing particle | grains in the light condensed with the irradiation side condensing lens 12 are provided. Here, the particles include microorganisms, harmless or harmful chemical substances, dust, dust, dust and the like.

  The light source element 1 mounted on the pedestal 2 includes, for example, a light emitting diode (LED). The light emitted from the light source element 1 may be visible light or ultraviolet light. When the light is visible light, the wavelength of the light is, for example, in the range of 400 to 410 nm, for example, 405 nm. When the light is ultraviolet light, the wavelength of the light is in the range of 310 to 380 nm, for example, 355 nm. The pedestal 2 that holds the light source element 1 is fixed to a housing 31 of the optical particle detector.

  The ejection mechanism 3 sucks gas from the outside of the housing 31 with a fan or the like, and jets the sucked gas toward the focal point of the irradiation side condenser lens 12 through a nozzle or the like. For example, the traveling direction of the airflow ejected from the ejection mechanism 3 is set substantially perpendicular to the traveling direction of the light collected by the irradiation side condenser lens 12. Here, when particles are included in the airflow, light hitting the particles is scattered by Mie scattering, and scattered light is generated. In addition, when the particles are microorganisms including bacteria, tryptophan, nicotinamide adenine dinucleotide, riboflavin and the like contained in the microorganisms irradiated with light emit fluorescence.

  Examples of bacteria include gram negative bacteria, gram positive bacteria, and fungi including mold spores. Examples of gram-negative bacteria include E. coli. Examples of gram positive bacteria include Staphylococcus epidermidis, Bacillus subtilis spores, Micrococcus, and Corynebacterium. Examples of fungi containing mold spores include Aspergillus. The airflow crossing the light collected by the irradiation side condenser lens 12 is exhausted to the outside of the casing 31 by the exhaust mechanism.

  The optical particle detection device includes a detection-side parallel light lens 13 that converts light crossing the airflow ejected by the ejection mechanism 3 into parallel light, and a detection side that condenses the light that has been collimated by the detection-side parallel light lens 13. And a condenser lens 14. When scattered light is generated by particles contained in the airflow, the scattered light is also converted into parallel light by the detection-side parallel light lens, and then collected by the detection-side condensing lens 14.

  A scattered light detector 16 that detects light scattered by the particles is disposed at the focus of the detection-side condensing lens 14. As the scattered light detection unit 16, a photodiode, a photomultiplier tube, or the like can be used. The number of particles can be measured from the number of times the scattered light detection unit 16 detects the scattered light. Further, the intensity of the scattered light by the particles correlates with the particle size of the particles. Therefore, by detecting the intensity of the scattered light with the scattered light detection unit 16, it is possible to obtain the particle size of the particles scattered in the environment where the optical particle detection device is arranged.

  A condensing mirror 15, which is a concave mirror, is further disposed in the housing 31 of the optical particle detection device, for example, in parallel with the airflow ejected from the ejection mechanism 3. The condensing mirror 15 condenses the fluorescence emitted by the particles contained in the airflow. A fluorescence detection unit 17 that detects fluorescence is disposed at the focal point of the collector mirror 15. When the scattered light detection unit 16 detects the scattered light and the fluorescence detection unit 17 does not detect the fluorescence, it can be seen that the particles included in the airflow are non-biological particles. When the scattered light detection unit 16 detects the scattered light and the fluorescence detection unit 17 detects the fluorescence, it can be seen that the particles included in the airflow are biological particles. In addition, the number of particles can be measured from the number of times that the fluorescence detection unit 17 detects fluorescence. For example, the scattered light detection unit 16 and the fluorescence detection unit 17 are connected to a computer that statistically processes the detected light intensity and fluorescence intensity.

  For example, as shown in FIG. 2, the light source element 1 of the optical particle detector is disposed on a substrate 101, an anode electrode 102 provided along the surface of the substrate 101, a cathode electrode 103, and the substrate 101. LED chip 104. The anode electrode 102 and the LED chip 104 are electrically connected by wire bonding 105. The cathode electrode 103 and the LED chip 104 are electrically connected by wire bonding 106. A reflector 107 is disposed on the substrate 101 so as to surround the LED chip 104. The LED chip 104 is sealed with a transparent resin 108.

  The light emitted from the surface of the LED chip 104 is blocked by the wiring pattern of the wire bonding 105 and 106. Therefore, as shown in FIG. 3, the image 200 of the light source element 1 includes shadows 205 and 206 due to the wire bondings 105 and 106. Therefore, as shown in FIG. 4, an image 200 of the light source element 1 including the shadows 205 and 206 is also formed at the focal point of the irradiation side condenser lens 12.

  As shown in FIG. 5, the particles 51 and 52 cross the image 200 of the light source element 1 at the focal point of the irradiation side condensing lens 12. In the example shown in FIG. 5, the light source element 1 is arranged so that the longitudinal direction of the shadows 205 and 206 of the image 200 of the light source element 1 at the focal point of the irradiation side condenser lens 12 is parallel to the direction in which the particles 51 and 52 are flowed. Has been placed. In this case, there are some particles 51 that traverse the areas without the shadows 205 and 206 of the image 200 of the light source element 1 and some particles 52 that flow along the shadows 205 and 206 of the image 200 of the light source element 1.

  The particles 51 emit scattered light or fluorescence while traversing the image 200 of the light source element 1. On the other hand, the particles 52 emit scattered light or fluorescence only while crossing between the shadows 205 and 206 of the image 200 of the light source element 1. If the time that the particle 52 crosses between the shadows 205 and 206 of the image 200 of the light source element 1 is shorter than the data sampling interval of the scattered light detection unit 16 or the fluorescence detection unit 17, the particle 52 cannot be detected.

  In the example shown in FIG. 6, the light source element 1 is arranged so that the longitudinal direction of the shadows 205 and 206 of the image 200 of the light source element 1 at the focal point of the irradiation side condenser lens 12 is perpendicular to the direction in which the particles 51 and 52 are flowed. Has been placed. In this case, there are some particles 51 that traverse the area without the shadows 205 and 206 of the image 200 of the light source element 1 and other particles 52 that flow across the shadow 205 of the image 200 of the light source element 1. The particle 52 emits scattered light or fluorescence twice before and after crossing the shadow 205 of the image 200 of the light source element 1. For this reason, the presence of two single particles 52 may be detected erroneously.

  In the example shown in FIG. 7, the light source element 1 is arranged so that the image 200 of the light source element 1 at the focal point of the irradiation side condensing lens 12 is inclined by 45 degrees with respect to the direction in which the particles 51 and 52 flow. In this case, with respect to the particles 52 that flow in the vicinity of the diagonal line of the image 200 of the light source element 1 in parallel with the diagonal line, the particles 51 that flow in a portion away from the diagonal line in parallel with the diagonal line have a short time to cross the image 200 of the light source element 1. .

  As described above, the present inventor has found that the time and the number of times that particles emit scattered light and fluorescence change depending on the arrangement of the light source element 1 in the optical particle detector. If the arrangement direction of the light source element 1 is always constant, it is easy to correct the light reception signal of the scattered light detection unit 16 or the fluorescence detection unit 17. However, when the arrangement direction of the light source element 1 is not managed when manufacturing the optical particle detection device, it is not easy to correct the light reception signal of the scattered light detection unit 16 or the fluorescence detection unit 17.

  As shown in FIG. 8, the light source manufacturing apparatus for the particle detection device according to the embodiment based on the above problem includes an element holding unit 61 that holds the light source element 1 and a pedestal 2 on which the light source element 1 is mounted. With respect to the pedestal 2 so that the wiring pattern of the light source element 1 faces a predetermined direction with respect to the pedestal 2 and the recognition device 63 that recognizes the direction of the wiring pattern on the surface of the light source element 1. And a rotation mechanism that relatively rotates the light source element 1.

  The element holding unit 61 is, for example, a pickup device that picks up the light source element 1. The pedestal holding unit 62 is, for example, a table substrate. The recognition device 63 includes an image sensor 64 that images the surface of the light source element 1 and a central processing unit (CPU) 300 connected to the image sensor 64 and a rotation mechanism. As the image sensor 64, a CCD (Charge Coupled Device) image sensor or the like can be used.

  The imaging element 64 images the surface of the pedestal 2 including the arrangement direction display unit 21 provided on the pedestal 2 for identifying the arrangement direction of the pedestal 2. The arrangement direction display unit 21 is a recess such as a notch provided in the base 2, for example. The arrangement direction display unit 21 is provided outside the light source element arrangement unit 22 such as a recess into which the light source element 1 is inserted. The image sensor 64 stores the captured surface image of the pedestal 2 in the pedestal image storage unit 301 of the CPU 300 shown in FIG. Thereby, the arrangement direction display unit 21 of the base 2 is recognized by the recognition device 63.

  Next, the imaging element 64 shown in FIG. 8 images the surface of the light source element 1 including the wiring patterns of the wire bondings 105 and 106 shown in FIG. The imaging element 64 stores the photographed surface image of the light source element 1 in the element image storage unit 302 of the CPU 300 shown in FIG.

  The CPU 300 further includes a layout storage unit 303 and an extraction unit 304. The layout storage unit 303 stores the wiring pattern layout data of the light source element 1 acquired in advance. As layout data, CAD data, image data of only a wiring pattern, or the like can be used.

  The extraction unit 304 reads the surface image of the light source element 1 from the element image storage unit 302. Further, the extraction unit 304 reads the layout data of the wiring pattern from the layout storage unit 303. Next, the extraction unit 304 extracts a wiring pattern from the surface image of the light source element 1 with reference to the layout data. As a result, the direction of the wiring pattern on the surface of the light source element 1 is recognized by the recognition device 63.

  The CPU 300 further includes a rotation control unit 305. The rotation control unit 305 receives the extracted wiring pattern image from the extraction unit 304. Further, the rotation control unit 305 reads a surface image including the arrangement direction display unit 21 of the pedestal 2 from the pedestal image storage unit 301. Next, the rotation control unit 305 calculates an angle formed by the wiring pattern of the light source element 1 with respect to a predetermined direction indicated by the arrangement direction display unit 21 of the base 2 based on the arrangement direction display unit 21 of the base 2.

  The rotation control unit 305 controls the rotation mechanism so that the positional relationship between the arrangement direction display unit 21 provided on the base 2 and the wiring pattern of the light source element 1 satisfies the predetermined condition with respect to the base 2. The light source element 1 is relatively rotated. For example, the rotation control unit 305 moves the light source element 1 relative to the pedestal 2 so that the angle formed by the wiring pattern of the light source element 1 with respect to a predetermined direction indicated by the arrangement direction display unit 21 of the pedestal 2 is 0 degree. Rotate. The rotation mechanism may rotate only the element holding unit 61, may rotate only the pedestal holding unit 62, or may rotate both the element holding unit 61 and the pedestal holding unit 62.

  After the positional relationship between the arrangement direction display unit 21 provided on the base 2 and the wiring pattern of the light source element 1 satisfies a predetermined condition, the element holding unit 61 places the light source element 1 in the light source element arrangement part of the base 2. 22 is inserted. At this time, the adhesive 23 or the like may be dropped on the light source element arranging portion 22 in advance. Thereafter, the base 2 on which the light source element 1 is mounted is attached in a predetermined direction with respect to the traveling direction of the particles inside the casing 31 of the optical particle detection device.

  According to the light source manufacturing apparatus of the particle detector according to the embodiment described above, the wiring pattern of the light source element 1 is always constant with respect to the traveling direction of the particles inside the casing 31 of the optical particle detector. Arranged facing the direction. Therefore, even if the particle detection signal varies depending on the wiring pattern of the light source element 1, the manner of fluttering follows a certain law. For this reason, correction of variations in the detection signal can be dealt with by a certain method. Further, in the optical particle detection device, the life of the light source element 1 tends to be shorter than other components. Therefore, maintenance for replacing the light source element 1 may be required. Even when the light source element 1 is replaced, if the light source manufacturing apparatus of the particle detection device according to the embodiment is used, the wiring pattern of the light source element 1 is set in the traveling direction of the particles inside the casing 31 of the optical particle detection device. On the other hand, it can always be directed in a certain direction.

(Other embodiments)
As mentioned above, although this invention was described by embodiment, it should not be understood that the description and drawing which form a part of this indication limit this invention. From this disclosure, various alternative embodiments, embodiments, and operation techniques should be apparent to those skilled in the art. For example, in the embodiment, an example in which the wiring pattern itself of the light source element 1 is recognized as an image is shown. However, as shown in FIG. 10, the wiring pattern direction display unit 110 that indicates the direction of the wiring pattern is provided on the surface of the light source element 1. May be provided. The wiring pattern direction display unit 110 is, for example, a seal or printing. In addition, the plurality of wiring pattern direction display units 110 may be provided on the surface of the light source element 1 asymmetrically with respect to the axis of the light source element 1 when rotated by the rotation mechanism.

  Further, as shown in FIG. 11, the arrangement direction indicator 21 provided on the pedestal 2 may have a parabolic opening and a notch provided from the center of the side surface of the light source element arrangement part 22, or As shown in FIG. 12, a notch provided from the side surface end of the light source element arrangement portion 22 may be used. Furthermore, as shown in FIGS. 13 and 14, the arrangement direction display unit 21 may have a notch with a triangular opening. Alternatively, as shown in FIG. 15, the arrangement direction display unit 21 may be a groove provided in a portion away from the light source element arrangement unit 22. In addition, the plurality of arrangement direction display portions 21 may be provided asymmetrically with respect to the axis of the base 2 when rotated by the rotation mechanism. Thus, it should be understood that the present invention includes various embodiments and the like not described herein.

DESCRIPTION OF SYMBOLS 1 Light source element 2 Base 3 Injection mechanism 11 Irradiation side parallel light lens 12 Irradiation side condensing lens 13 Detection side parallel light lens 14 Detection side condensing lens 15 Condensing mirror 16 Scattered light detection part 17 Fluorescence detection part 21 Arrangement direction display part 22 Light source element arrangement part 23 Adhesive 31 Case 51, 52 Particle 61 Element holding part 62 Base holding part 63 Recognition device 64 Imaging element 101 Substrate 102 Anode electrode 103 Cathode electrode 104 LED chip 105, 106 Wire bonding 107 Reflector 108 Transparent resin 110 wiring pattern direction display unit 200 light source element images 205 and 206 shadow 301 pedestal image storage unit 302 element image storage unit 303 layout storage unit 304 extraction unit 305 rotation control unit

Claims (16)

An element holding unit for holding the light source element;
A pedestal holding portion for holding a pedestal on which the light source element is mounted;
A recognition device for recognizing the direction of the wiring pattern on the surface of the light source element;
A rotation mechanism that rotates the light source element relative to the pedestal so that a wiring pattern of the light source element faces a predetermined direction with respect to the pedestal;
An apparatus for manufacturing a light source of a particle detector.   The light source manufacturing apparatus of the particle detection apparatus according to claim 1, wherein the recognition device recognizes an arrangement direction display unit provided on the pedestal.   The rotating mechanism rotates the light source element relative to the pedestal so that a positional relationship between an arrangement direction display portion provided on the pedestal and a wiring pattern of the light source element satisfies a predetermined condition. An apparatus for producing a light source for a particle detection device according to claim 2, wherein:   The apparatus for manufacturing a light source of a particle detection device according to claim 1, wherein the recognition device includes an image sensor that images the surface of the light source element.   The light source manufacturing apparatus of the particle detection apparatus according to claim 4, wherein the recognition device further includes a layout storage unit that stores layout data of a wiring pattern of the light source element acquired in advance.   The light source manufacturing apparatus for a particle detection apparatus according to claim 5, wherein the recognition device further includes an extraction unit that extracts the wiring pattern from a surface image of the light source element based on the layout data.   The light source manufacturing apparatus for a particle detection apparatus according to claim 1, wherein the rotation mechanism rotates the element holding unit.   The light source manufacturing apparatus for a particle detector according to any one of claims 1 to 7, wherein the rotation mechanism rotates the pedestal holding unit. Holding the light source element;
Holding a pedestal on which the light source element is mounted;
Recognizing the direction of the wiring pattern on the surface of the light source element;
Rotating the light source element relative to the pedestal so that the wiring pattern of the light source element faces a predetermined direction with respect to the pedestal;
The manufacturing method of the light source of a particle | grain detection apparatus containing this.   The method for manufacturing a light source of the particle detection device according to claim 9, further comprising recognizing an arrangement direction display unit provided on the pedestal.   11. The light source element is rotated relative to the pedestal so that a positional relationship between an arrangement direction display unit provided on the pedestal and a wiring pattern of the light source element satisfies a predetermined condition. A method for producing a light source of the particle detecting device according to claim 1.   The method of manufacturing a light source of a particle detection device according to claim 9, wherein the recognition includes imaging a surface of the light source element.   The method of manufacturing a light source of the particle detection device according to claim 12, wherein the recognizing further includes preparing layout data of a wiring pattern of the light source element acquired in advance.   The method of manufacturing a light source of the particle detection device according to claim 13, wherein the recognizing further includes extracting the wiring pattern from a surface image of the light source element based on the layout data.   The method of manufacturing a light source for a particle detector according to claim 9, wherein rotating the light source element relative to the pedestal is rotating the chip.   The method of manufacturing a light source for a particle detection device according to claim 9, wherein rotating the light source element relative to the pedestal is rotating the pedestal.

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